Processing equipment

Abstract

To provide processing apparatus which is able to reduce an operator's burden caused by preparation and connection of pipes in washing a cooling water passage.SOLUTION: Processing apparatus includes: a chuck table for holding a workpiece; a spindle 22 to which a cutting blade 21, which is a grinding tool for processing the workpiece held on the chuck table, is attached; a spindle housing 25 rotatably supporting the spindle 22 and having a cooling water passage 72 in an inner part thereof; and a cooling water passage washing unit 40 which washes the cooling water passage 72. The cooling water passage washing unit 40 includes: a fluid supply unit 41 which is connected to the cooling water passage 72 via a valve 42 and supplies the cooling water passage 72 with washing water and compressed air; and a control unit 43 which controls the valve 42.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a processing device that uses a spindle. [Background technology]

[0002] There is a known technology for processing various plate-shaped workpieces, such as semiconductor device wafers, glass, resin package substrates, ceramics, etc., with processing tools such as cutting blades and grinding wheels rotated at high speed (see, for example, Patent Document 1). The processing tool is fixed to a spindle that rotates at high speed, and the spindle is housed in a spindle housing. In order to suppress heat generation associated with the high speed rotation, a cooling water passage is provided in the spindle housing, and cooling water at a predetermined temperature is supplied. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2001-259961 A Summary of the Invention [Problem to be solved by the invention]

[0004] If city water or well water is used as the cooling water for the cooling water passage, the passage may become clogged with foreign matter, requiring periodic cleaning. In such cases, a cleaning water passage is connected to the cooling water passage of the spindle housing for cleaning (flushing), but there is a problem in that preparing and connecting the piping is a burden on the operator.

[0005] The present invention has been made in consideration of such problems, and its object is to provide a processing apparatus that can reduce the burden on an operator caused by preparing and connecting piping when cleaning a cooling water passage. [Means for solving the problem]

[0006] In order to solve the above problems and achieve the object, the processing apparatus of the present invention is a processing apparatus including a chuck table for holding a workpiece, a spindle on which a grinding tool for processing the workpiece held on the chuck table is attached, a spindle housing for rotatably supporting the spindle and including a cooling water channel therein, and a cooling water channel cleaning unit for cleaning the cooling water channel, the cooling water channel cleaning unit including a fluid supply unit connected to the cooling water channel via a valve and supplying cleaning water and compressed air to the cooling water channel, and a control unit for controlling the valve. The fluid supply unit further includes a processing water supply passage for supplying processing water from a nozzle to the grindstone tool, the fluid supply unit including a pipe that branches off the processing water supply passage and connects the processing water supply passage to the cooling water passage via the valve, and the processing water is used as the cleaning water. This is what we have in mind.

[0008] The processing apparatus is connected to a temperature control device which receives the cooling water discharged from the cooling water channel, adjusts the temperature again, and returns the water to the cooling water channel, and further includes a drain selection unit which selectively directs the water discharged from the cooling water channel into a return water channel to the temperature control device and a drain channel connected to a drain, and the cleaning water and compressed air used to clean the cooling water channel in the cooling water channel cleaning unit may be discharged into the drain channel. Effect of the Invention

[0009] The present invention can reduce the burden on an operator caused by preparing and connecting piping when cleaning a cooling water passage. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view showing a configuration example of a processing device according to the first embodiment. [Diagram 2] FIG. 2 is a perspective view showing a configuration example of a processing unit of the processing apparatus of FIG. [Diagram 3] FIG. 3 is a schematic diagram illustrating a main part of the processing apparatus of FIG. [Figure 4] FIG. 4 is a schematic diagram illustrating a main part of a processing device according to the second embodiment. [Diagram 5] FIG. 5 is a perspective view showing a configuration example of a processing device according to the third embodiment. [Figure 6] FIG. 6 is a schematic diagram illustrating a main part of the processing apparatus of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0012] [Embodiment 1] A processing apparatus 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the processing apparatus 1 according to the first embodiment. FIG. 2 is a perspective view showing a configuration example of a processing unit 20 of the processing apparatus 1 of FIG. 1. FIG. 3 is a schematic view explaining a main part of the processing apparatus 1 of FIG. 1. As shown in FIG. 1, the processing apparatus 1 includes a chuck table 10, a processing unit 20, a moving unit 30, a cooling water channel cleaning unit 40, a drainage selection unit 50, and a control unit 60.

[0013] In the first embodiment, the workpiece 200, which is the object to be processed by the processing device 1, is, for example, a disk-shaped semiconductor device wafer or an optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like. As shown in FIG. 1, the workpiece 200 has a flat surface 201, and devices 203 are formed in areas partitioned by a plurality of planned division lines 202 formed in a lattice pattern on the surface 201. In the first embodiment, the workpiece 200 has an adhesive tape 205 attached to a back surface 204 on the back side of the surface 201, and an annular frame 206 attached to the outer edge of the adhesive tape 205, but the present invention is not limited to this. In the present invention, the workpiece 200 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0014] The chuck table 10 has a disk-shaped frame body with a recess formed therein and a disk-shaped suction part fitted in the recess. The suction part of the chuck table 10 is formed of a porous ceramic or the like, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction part of the chuck table 10 is a holding surface 11 on which the workpiece 200 is placed and which suction-holds the placed workpiece 200. In the first embodiment, the holding surface 11 is a surface on which the workpiece 200 is placed with the front surface 201 facing upward, and suction-holds the placed workpiece 200 from the back surface 204 side via an adhesive tape 205. The holding surface 11 and the upper surface of the frame body of the chuck table 10 are arranged on the same plane and are formed parallel to the XY plane, which is a horizontal plane. The chuck table 10 is movable in the X-axis direction, which is one horizontal direction, by the X-axis moving unit 31 of the moving unit 30, and is rotatable around an axis parallel to the Z-axis direction, which is vertical and perpendicular to the holding surface 11, by a rotary drive source not shown.

[0015] As shown in Figures 2 and 3, the processing unit 20 includes a spindle 22, a mount flange 23, a motor 24, a spindle housing 25, a blade cover 26, nozzles 27-1, 27-2, and 27-3, a processing water supply passage connection portion 28, and a processing water supply passage 29.

[0016] The spindle 22 is formed in a cylindrical shape, and the cutting blade 21 is attached to the tip. The cutting blade 21 is an example of a grinding tool according to the present invention. The mount flange 23 fixes the cutting blade 21 to the tip of the spindle 22. In the first embodiment, the cutting blade 21 is a cutting grindstone having an annular cutting blade with abrasive grains fixed with a bond material, but the present invention is not limited to this, and may be an electroformed bond type blade having a cutting blade with abrasive grains fixed to a plating layer, or a saw-like metal saw having a cutting blade formed of a thin steel plate blade made of cemented carbide.

[0017] 3, the motor 24 is disposed at the base end of the spindle 22, and rotates the spindle 22 around an axis parallel to a Y-axis direction which is another horizontal direction and perpendicular to the X-axis direction. The motor 24 rotates the spindle 22, thereby rotating the cutting blade 21 attached to the tip of the spindle 22 around an axis parallel to the Y-axis direction. The cutting blade 21 attached to the tip of the spindle 22 is rotated by the spindle 22 around the axis parallel to the Y-axis direction, thereby cutting the workpiece 200 held on the chuck table 10.

[0018] The spindle housing 25 exposes the tip of the spindle 22 and accommodates the portion of the spindle 22 other than the tip, through which the spindle 22 is inserted. An air supply passage 71 and a cooling water passage 72 are formed inside the spindle housing 25. The air supply passage 71 supplies air from an air supply source 73 to the inner circumferential surface of the spindle housing 25 that faces the spindle 22. The air supplied to the inner circumferential surface of the spindle housing 25 from the air supply source 73 functions as an air bearing, so that the spindle housing 25 bears the spindle 22 and supports the spindle 22 rotatably around an axis parallel to the Y-axis direction.

[0019] 3, the cooling water passage 72 has a supply port 74 formed at one end connected to the cooling water supply pipe 101 of the temperature adjustment device 100 via a valve 42 equipped with a check valve of the cooling water passage cleaning unit 40, and a discharge port 75 formed at the other end connected to a cooling water recovery pipe 102, which is a return water passage to the temperature adjustment device 100, via a valve 52 of the drainage selection unit 50. In the processing device 1, the cooling water supplied from the temperature adjustment device 100 by the cooling water supply pipe 101 passes through the cooling water passage 72 of the spindle housing 25, so that heat generated in the spindle 22 and the motor 24 of the processing unit 20 and transferred to the spindle housing 25 is recovered by the cooling water, and the spindle 22, the motor 24, and the spindle housing 25 are water-cooled. In the first embodiment, the cooling water is, for example, pure water.

[0020] The blade cover 26 is attached to the tip side of the spindle housing 25, and covers the upper, front, and rear of the cutting blade 21 attached to the tip of the spindle 22. The blade cover 26 has a plurality of water passages formed therein, and as shown in FIG. 2, nozzles 27-1, 27-2, and 27-3 for supplying processing water are provided at one end of the lower side of the plurality of water passages, and a processing water supply passage connection part 28 is provided at the other end of the upper side of the plurality of water passages. The processing water supply passage connection part 28 is connected to the other end of the processing water supply passage 29. As shown in FIG. 3, the processing water supply passage 29 has one end connected to the processing water supply pipe 103 of the temperature adjustment device 100, and the other end connected to the processing water supply passage connection part 28. As shown in FIG. 3, the processing water supply passage 29 has a valve 29-1 provided midway. The opening and closing of the valve 29-1 is controlled by the control unit 60.

[0021] 2, the nozzle 27-1 supplies the machining water supplied from the machining water supply passage 29 through the machining water supply passage connection part 28 to the side of the cutting edge of the cutting blade 21. The nozzle 27-2 supplies the machining water supplied from the machining water supply passage 29 to the front of the cutting edge of the cutting blade 21. The nozzle 27-3 supplies the machining water supplied from the machining water supply passage 29 to the workpiece 200 forward of the cutting edge of the cutting blade 21. In the first embodiment, the machining water is the cutting water supplied when the workpiece 200 is cut by the cutting blade 21, and is, for example, the same pure water as the cooling water described above.

[0022] The spindle housing 25 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit 32 of the moving unit 30 with respect to the workpiece 200 held on the chuck table 10, and is also provided so as to be movable in the Z-axis direction by the Z-axis moving unit 33 of the moving unit 30. The spindle 22 rotatably supported by the spindle housing 25 and the cutting blade 21 attached to the tip of the spindle 22 move together with the spindle housing 25. The processing device 1 sets the cutting blade 21 attached to the tip of the spindle 22 by the moving unit 30 at a predetermined position with respect to the workpiece 200 held on the chuck table 10, supplies processing water to the processing area by the nozzles 27-1, 27-2, and 27-3, and moves the cutting blade 21 relatively along the planned division line 202 with respect to the workpiece 200 while rotating, thereby cutting the workpiece 200 along the planned division line 202 with the cutting blade 21.

[0023] As shown in FIG. 3, the cooling water passage cleaning unit 40 includes a fluid supply unit 41, a valve 42, and a control unit 43. The fluid supply unit 41 includes a cleaning fluid supply pipe 44, a valve 45, and a valve 46. The cleaning fluid supply pipe 44 is connected to a cleaning water source 47 via the valve 45, to a compressed air source 48 via the valve 46, and to a supply port 74 of the cooling water passage 72 via the valve 42. Thus, the cleaning fluid supply pipe 44 is an example of a pipe connected to the cooling water passage 72 via the valve 42 according to the present invention. The valve 45 is controlled by the control unit 43 to adjust the supply amount (water amount) of cleaning water supplied from the cleaning water source 47 to the cleaning fluid supply pipe 44. The valve 46 is controlled by the control unit 43 to adjust the supply amount of compressed air supplied from the compressed air source 48 to the cleaning fluid supply pipe 44.

[0024] Inside the cleaning fluid supply pipe 44, cleaning water supplied from a cleaning water source 47 via a valve 45 and compressed air supplied from a compressed air source 48 via a valve 46 are mixed to generate a cleaning fluid for cleaning, i.e., flushing, the cooling water passage 72. The cleaning fluid generated in the cleaning fluid supply pipe 44 is supplied to the cooling water passage 72 via the valve 42. In this manner, the fluid supply unit 41 is connected to the cooling water passage 72 via the valve 42, and supplies the cleaning fluid, which is a mixture of cleaning water and compressed air, to the cooling water passage 72 via the valve 42. The cleaning water supplied from the cleaning water source 47 is, for example, pure water. The compressed air supplied from the compressed air source 48 is, for example, compressed air or compressed inert gas.

[0025] The valve 42 is controlled by the control unit 43, and selectively switches the connection destination of the supply port 74 of the cooling water passage 72 between the cooling water supply pipe 101 of the temperature adjustment device 100 and the cleaning fluid supply pipe 44 of the fluid supply unit 41. The valve 42 selectively switches between a state in which the cooling water is supplied from the cooling water supply pipe 101 of the temperature adjustment device 100 to the supply port 74 of the cooling water passage 72 and a state in which the cleaning fluid is supplied from the cleaning fluid supply pipe 44 of the fluid supply unit 41 to the supply port 74 of the cooling water passage 72. The control unit 43 is electrically connected to the valves 42, 45, and 46, and controls the valves 42, 45, and 46, respectively. The control unit 43 controls the mixing ratio of the cleaning water and the compressed air of the cleaning fluid generated in the cleaning fluid supply pipe 44 by controlling the valve 45 and 46. The control unit 43 controls whether or not the cleaning fluid generated in the cleaning fluid supply pipe 44 is supplied to the cooling water passage 72 by controlling the valve 42. In this manner, the control unit 43 functions as a cleaning fluid supply control unit that controls the supply of cleaning fluid to the cooling water passage 72 .

[0026] In the first embodiment, the control unit 43 includes a computer system. The computer system included in the control unit 43 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 43 performs arithmetic processing according to a computer program stored in the storage device of the control unit 43, and outputs control signals for controlling the valves 42, 45, and 46 to the valves 42, 45, and 46 via the input / output interface devices of the valves 42, 45, and 46.

[0027] As shown in FIG. 3, the drain selection unit 50 includes a drain passage 51, a valve 52, and a control unit 53. One end of the drain passage 51 is connected to the outlet 75 of the cooling water passage 72 via the valve 52, and the other end is connected to a drain. The valve 52 is controlled by the control unit 53 to selectively switch the connection destination of the outlet 75 of the cooling water passage 72 between the cooling water recovery pipe 102 of the temperature adjustment device 100 and the drain passage 51 of the drain selection unit 50. The valve 52 selectively switches between a state in which the cooling water discharged from the outlet 75 of the cooling water passage 72 is returned to the temperature adjustment device 100 via the cooling water recovery pipe 102 and recovered, and a state in which the used cleaning fluid that has cleaned the cooling water passage 72 and is discharged from the outlet 75 of the cooling water passage 72 is discharged to the drain via the drain passage 51 of the drain selection unit 50. The control unit 53 is electrically connected to the valve 52, and functions as a drain destination control unit that controls the destination of the drain by controlling the valve 52. In this manner, the drainage selection unit 50 selectively causes the drainage water (cooling water or cleaning fluid) from the cooling water passage 72 to flow into the cooling water recovery pipe 102 of the temperature adjustment device 100 and the drainage passage 51 connected to the drain.

[0028] In the first embodiment, the control unit 53 includes a computer system having an arithmetic processing device having a microprocessor such as a CPU similar to that of the control unit 43, a storage device having a memory such as a ROM or RAM, and an input / output interface device. The arithmetic processing device of the control unit 53 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 53, and outputs a control signal for controlling the valve 52 to the valve 52 via the input / output interface device of the valve 52.

[0029] The processing apparatus 1 is connected to a temperature adjustment device 100 as shown in Fig. 1 and Fig. 3. The temperature adjustment device 100 includes a cooling water supply pipe 101, a cooling water recovery pipe 102, a processing water supply pipe 103, a water supply source 105, valves 106 and 107, a temperature adjustment unit 108, and a control unit 109 as shown in Fig. 3. The cooling water supply pipe 101 is connected to a supply port 74 of the cooling water passage 72 via a valve 42 of the cooling water passage cleaning unit 40. The cooling water recovery pipe 102 is connected to a discharge port 75 of the cooling water passage 72 via a valve 52 of the drainage selection unit 50. Inside the temperature adjustment device 100, the temperature adjustment unit 108 is provided between the cooling water supply pipe 101 and the cooling water recovery pipe 102. The temperature control device 100 supplies cooling water from a cooling water supply pipe 101 to a cooling water passage 72 of the processing unit 20 to water-cool the spindle 22, motor 24, and spindle housing 25 of the processing unit 20, and receives cooling water (drained water) discharged from the cooling water passage 72 from a cooling water recovery pipe 102, re-temperature-controls (cools) the water in the temperature control section 108, and returns the water to the cooling water passage 72.

[0030] The processing water supply pipe 103 is connected to the processing water supply passage 29. The temperature adjustment device 100 supplies processing water from the processing water supply pipe 103 through the processing water supply passage 29 to the nozzles 27-1, 27-2, and 27-3 of the processing unit 20.

[0031] The valve 106 is controlled by the control unit 109 to adjust the amount of cooling water supplied from the water supply source 105 to the cooling water flow path. Here, the cooling water flow path is composed of the cooling water supply pipe 101, the cooling water recovery pipe 102, and the temperature adjustment unit 108 of the temperature adjustment device 100, and the cooling water path 72. The valve 107 is controlled by the control unit 109 to adjust the amount of processing water supplied from the water supply source 105 to the processing water flow path. Here, the processing water flow path is composed of the processing water supply pipe 103 of the temperature adjustment device 100, the processing water supply path 29, the water path inside the blade cover 26, and the nozzles 27-1, 27-2, and 27-3. The temperature adjustment unit 108 cools and adjusts the temperature of the cooling water recovered from the water supply source 105 and the cooling water recovery pipe 102 and supplied from the cooling water supply pipe 101 to the cooling water path 72 and the processing water supplied to the processing water supply pipe 103.

[0032] The control unit 109 is electrically connected to the valves 106, 107 and the temperature adjustment unit 108, and controls the valves 106, 107 and the temperature adjustment unit 108. The control unit 109 detects the amount of cooling water flowing in the cooling water flow path using a water amount detector (not shown), such as a level sensor, provided in the cooling water flow path, and when it determines that the amount of cooling water is insufficient, opens the valve 106 to supply an appropriate amount of water from the water supply source 105 to the cooling water flow path, thereby automatically maintaining the amount of cooling water flowing in the flow path at an appropriate amount. The control unit 109 controls the valve 107 to control the supply amount (water amount) of processing water supplied from the nozzles 27-1, 27-2, and 27-3. In the first embodiment, the control unit 109 basically keeps the valve 107 open all the time. The control unit 109 controls the temperature adjustment unit 108 to control the temperature of the cooling water supplied from the cooling water supply pipe 101 to the cooling water passage 72 and the processing water supplied to the processing water supply pipe 103. In this way, the control unit 109 functions as a temperature adjustment control unit that controls the temperature adjustment by the temperature adjustment device 100, and also functions as a processing water supply control unit that controls the supply of processing water.

[0033] In the first embodiment, the control unit 109 includes a computer system having an arithmetic processing device having a microprocessor such as a CPU similar to the control units 43 and 53, a storage device having a memory such as a ROM or RAM, and an input / output interface device. The arithmetic processing device of the control unit 109 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 109, and outputs control signals for controlling the valves 106 and 107 and the temperature adjustment unit 108 to the valves 106 and 107 and the temperature adjustment unit 108 via the input / output interface devices of the valves 106 and 107 and the temperature adjustment unit 108.

[0034] The control unit 60 controls the operation of each component of the processing device 1 to cause the processing device 1 to perform processing by the processing unit 20. The control unit 60 also controls the valve 29-1 and generally controls the control units 43, 53, and 109. In the first embodiment, the control unit 60 includes a computer system having an arithmetic processing device having a microprocessor such as a CPU similar to the control units 43, 53, and 109, a storage device having a memory such as a ROM or RAM, and an input / output interface device. The arithmetic processing device of the control unit 60 performs arithmetic processing according to a computer program stored in the storage device of the control unit 60, and outputs a control signal for controlling the processing device 1 to each component of the processing device 1 via the input / output interface device of the control unit 60.

[0035] 1, the processing apparatus 1 further includes a cassette placement unit 81, a cleaning unit 82, and a display unit 87. The cassette placement unit 81 is a placement table for placing a cassette 85, which is a container for storing a plurality of workpieces 200, and raises and lowers the placed cassette 85 in the Z-axis direction. The cleaning unit 82 cleans the workpiece 200 after processing by the processing unit 20, and removes foreign matter such as processing chips attached to the workpiece 200.

[0036] The display unit 87 is provided on a cover (not shown) of the processing device 1 with its display surface facing outward, and displays a screen for setting the processing conditions of the processing device 1, a screen showing the processing results, etc., so that the operator can see them. The display unit 87 is composed of a liquid crystal display device or the like. The display unit 87 is provided with an input unit 88 that the operator uses to input command information related to the processing conditions of the processing device 1 and image display, etc. The input unit 88 provided on the display unit 87 is composed of at least one of a touch panel provided on the display unit 87, a keyboard, etc.

[0037] The processing apparatus 1 further includes a transport unit (not shown). The transport unit (not shown) transports the workpiece 200 before processing from inside the cassette 85 onto the chuck table 10, transports the workpiece 200 after processing from the chuck table 10 to the cleaning unit 82, and transports the workpiece 200 after cleaning from the cleaning unit 82 into the cassette 85.

[0038] Next, this specification describes an example of the operation process of the processing device 1 according to the first embodiment. When the processing unit 20 processes the workpiece 200, the control unit 60 of the processing device 1 receives an input from the operator via the input unit 88, and controls the valve 42 to connect the supply port 74 of the cooling water passage 72 to the cooling water supply pipe 101 of the temperature adjustment device 100 via the control unit 43, and controls the valve 52 to connect the discharge port 75 of the cooling water passage 72 to the cooling water recovery pipe 102 of the temperature adjustment device 100 via the control unit 53, thereby circulating the cooling water in the flow path including the cooling water passage 72, and water-cooling the spindle 22, motor 24, and spindle housing 25 of the processing unit 20 with the cooling water. The control unit 60 of the processing device 1 also opens the valve 29-1 to supply the processing water from the nozzles 27-1, 27-2, and 27-3 through the processing water supply passage 29 to the processing area where the cutting blade 21 processes the workpiece 200.

[0039] When the control unit 60 of the processing device 1 stops the processing of the workpiece 200 by the processing unit 20 and washes the inside of the cooling water channel 72, it receives an input from the operator via the input unit 88, controls the valve 42 by the control unit 43 to connect the supply port 74 of the cooling water channel 72 to the fluid supply unit 41 of the cooling water channel washing unit 40, and controls the valve 52 by the control unit 53 to connect the discharge port 75 of the cooling water channel 72 to the drainage channel 51 of the drainage selection unit 50, thereby supplying the washing fluid to the cooling water channel 72, washing the cooling water channel 72 with the washing fluid, and discharging the washing fluid having washed the cooling water channel 72 into the drainage channel 51. The control unit 60 of the processing device 1 also closes the valve 29-1 to stop the supply of processing water from the nozzles 27-1, 27-2, 27-3 to the processing area through the processing water supply channel 29.

[0040] The processing apparatus 1 of embodiment 1 having the above-mentioned configuration includes a cooling water passage cleaning unit 40 having a fluid supply unit 41 that is connected to the cooling water passage 72 provided in the spindle housing 25 via the valve 42 and supplies a cleaning fluid mixed with cleaning water and compressed air, and a control unit 43 that controls the valve 42.Therefore, the operator can supply cleaning fluid to the cooling water passage 72 for cleaning by simply activating the cooling water passage cleaning unit 40 and switching the valve 42 with the control unit 43, thereby achieving the effect of reducing the burden on the operator due to preparation and connection of piping when cleaning the cooling water passage 72.

[0041] In addition, the processing apparatus 1 of embodiment 1 is equipped with a drainage selection unit 50 that selectively flows the cooling water (drainage) discharged from the cooling water passage 72 into the cooling water recovery pipe 102, which is a return water passage to the temperature control device 100, and into the drainage passage 51 connected to the drain, and since the used cleaning fluid used to clean the cooling water passage 72 can be selectively discharged into the drainage passage 51, the burden on the operator due to preparation and connection of piping when cleaning the cooling water passage 72 is further reduced, and the risk of mixing of the cooling water and the cleaning fluid can be reduced.

[0042] [Embodiment 2] A processing device 1 according to a second embodiment of the present invention will be described with reference to the drawings. Fig. 4 is a schematic diagram for explaining the main parts of the processing device 1 according to the second embodiment. In Fig. 4, the same parts as those in the first embodiment are given the same reference numerals and the explanation thereof will be omitted.

[0043] The processing apparatus 1 according to the embodiment 2 is the same as that of the embodiment 1, except that the cooling water passage cleaning unit 40 is replaced with a cooling water passage cleaning unit 40-2. The cooling water passage cleaning unit 40-2 is the same as that of the cooling water passage cleaning unit 40 of the embodiment 1, except that the fluid supply unit 41 is replaced with a fluid supply unit 41-2.

[0044] The fluid supply unit 41-2 includes a cleaning fluid supply pipe 44-2, a valve 46, and a valve 49. The cleaning fluid supply pipe 44-2 is connected to the processing water supply passage 29 via the valve 49, to the compressed air source 48 via the valve 46, and to the supply port 74 of the cooling water passage 72 via the valve 42. Thus, the cleaning fluid supply pipe 44-2 is an example of a piping according to the present invention in which the processing water supply passage 29 branches off and is connected to the cooling water passage 72 via the valve 42.

[0045] The valve 49 is controlled by the control unit 43, and selectively switches the connection destination of the processing water supply pipe 103 of the temperature adjustment device 100 between the nozzles 27-1, 27-2, 27-3 provided at the tip of the processing water supply path 29 and a cleaning fluid supply pipe 44-2 branched off from the processing water supply path 29. The valve 49 thereby selectively switches between a state in which the processing water supplied from the processing water supply pipe 103 of the temperature adjustment device 100 is supplied to the nozzles 27-1, 27-2, 27-3 via the processing water supply path 29, and a state in which the processing water supplied from the processing water supply pipe 103 of the temperature adjustment device 100 is supplied to the cleaning fluid supply pipe 44-2 as cleaning water. In the second embodiment, the control unit 43 is electrically connected to the valves 42, 46, 49, and controls the valves 42, 46, 49, respectively.

[0046] Inside the cleaning fluid supply pipe 44-2, the processing water supplied from the processing water supply passage 29 via the valve 49 and the compressed air supplied from the compressed air source 48 via the valve 46 are mixed to generate a cleaning fluid for cleaning, i.e., flushing, the cooling water passage 72. The cleaning fluid generated in the cleaning fluid supply pipe 44-2 is supplied to the cooling water passage 72 via the valve 42. In this manner, the fluid supply unit 41-2 of the second embodiment is configured such that, instead of the cleaning water source 47 of the first embodiment, the temperature adjustment device 100 that supplies processing water from the processing water supply pipe 103 to the processing water supply passage 29 is changed to a cleaning water supply source.

[0047] Next, this specification describes an example of an operation process of the processing device 1 according to embodiment 2. When the processing unit 20 processes the workpiece 200, the control unit 60 of the processing device 1 according to embodiment 2 circulates cooling water in a flow path including the cooling water path 72, as in embodiment 1, to water-cool the spindle 22, the motor 24, and the spindle housing 25 of the processing unit 20 with the cooling water. The control unit 60 of the processing device 1 according to embodiment 2 also controls the valve 107 so that the processing water is supplied to the processing water supply path 29 by the control unit 109, and controls the valve 49 so that the destination of the processing water supplied from the processing water supply pipe 103 of the temperature adjustment device 100 to the processing water supply path 29 is the nozzles 27-1, 27-2, and 27-3, thereby supplying the processing water to the processing area from the nozzles 27-1, 27-2, and 27-3.

[0048] When the processing of the workpiece 200 by the processing unit 20 is stopped and the cooling water passage 72 is cleaned, the control unit 60 of the processing apparatus 1 according to the second embodiment receives an input from the operator via the input unit 88 to that effect, and controls the valve 42 by the control unit 43 to connect the supply port 74 of the cooling water passage 72 to the fluid supply unit 41 of the cooling water passage cleaning unit 40, and controls the flow of the processing water supplied from the processing water supply pipe 103 of the temperature adjustment device 100 to the processing water supply passage 29 by the control unit 43. Valve 49 is controlled so that the destination is the cleaning fluid supply pipe 44-2 branching off from the processing water supply passage 29, and the control unit 53 controls valve 52 so as to connect the outlet 75 of the cooling water passage 72 to the drainage passage 51 of the drainage selection unit 50, thereby supplying cleaning fluid to the cooling water passage 72, cleaning the cooling water passage 72 with the cleaning fluid, and draining the cleaning fluid that has cleaned the cooling water passage 72 into the drainage passage 51, and stopping the supply of processing water from nozzles 27-1, 27-2, 27-3 to the processing area.

[0049] The processing apparatus 1 according to the second embodiment having the above configuration is obtained by changing the fluid supply unit 41 including the cleaning fluid supply pipe 44 to which the cleaning water source 47 is connected via the valve 45 to a fluid supply unit 41-2 including a cleaning fluid supply pipe 44-2 to which the processing water supply path 29 through which the processing water is supplied is branched and connected via a valve 49, and the other configuration is the same as that of the first embodiment, so that the processing apparatus 1 according to the second embodiment has the same effect as that of the first embodiment. Furthermore, the processing apparatus 1 according to the second embodiment has the effect that it is not necessary to separately prepare a cleaning water source 47 because the processing water supplied to the processing region can be used as cleaning water for cleaning the cooling water path 72.

[0050] [Embodiment 3] A processing device 1-3 according to a third embodiment of the present invention will be described with reference to the drawings. Fig. 5 is a perspective view showing a configuration example of the processing device 1-3 according to the third embodiment. Fig. 6 is a schematic diagram for explaining the main parts of the processing device 1-3 in Fig. 5. In Figs. 5 and 6, the same reference numerals are assigned to the same parts as those in the first and second embodiments, and the description thereof will be omitted.

[0051] As shown in Fig. 5, the processing apparatus 1-3 according to the third embodiment is obtained by changing the processing unit 20 in the processing apparatus 1 according to the first embodiment to a processing unit 20-3, and changing the shape and arrangement of each of the other components of the processing apparatus 1 according to the change. That is, as shown in Fig. 5, the processing apparatus 1-3 includes the chuck table 10, the moving unit 30, the cooling water channel cleaning unit 40, the drainage selection unit 50, and the control unit 60 similar to those of the processing apparatus 1, and the processing unit 20-3.

[0052] As shown in FIGS. 5 and 6, the processing unit 20-3 includes a spindle 22-3, a motor 24-3, a spindle housing 25-3, a nozzle 27-4, and a processing water supply passage 29-3.

[0053] A grinding wheel 21-3 is attached to the tip of the spindle 22-3. The grinding wheel 21-3 is an example of a grinding tool according to the present invention. In the third embodiment, the grinding wheel 21-3 has grinding stones arranged in a ring shape, for example. As shown in Figs. 5 and 6, the spindle 22-3 is the spindle 22 of the first embodiment, except that the axis direction is changed from the direction parallel to the Y-axis direction to the direction parallel to the Z-axis direction.

[0054] In the third embodiment, the motor 24-3 rotates the spindle 22-3 around an axis parallel to the Z-axis direction. In the third embodiment, the motor 24-3 is the motor 24 of the first embodiment, but the spindle 22, which is the object of rotation, and the direction of rotation thereof are changed, and the shape and arrangement are changed accordingly. The other configurations and functions are the same as those of the motor 24 of the first embodiment. The motor 24-3 rotates the spindle 22-3, thereby rotating the grinding wheel 21-3 attached to the tip of the spindle 22-3 around an axis parallel to the Z-axis direction. The grinding wheel 21-3 attached to the tip of the spindle 22-3 is rotated by the spindle 22-3 around an axis parallel to the Z-axis direction, and grinds the workpiece 200 held on the chuck table 10.

[0055] The spindle housing 25-3 exposes the tip of the spindle 22-3 and accommodates the portion other than the tip, through which the spindle 22-3 is inserted. As shown in Fig. 6, the spindle housing 25-3 has an air supply passage 71-3 formed therein, which has a function similar to that of the air supply passage 71 of the first embodiment, and the air supply passage 71-3 supports the spindle 22-3 rotatably about an axis parallel to the Z-axis direction.

[0056] 6, the spindle housing 25-3 has a cooling water passage 72-3 formed therein, which has the same function as the cooling water passage 72 of the embodiment 1. In the processing apparatus 1-3, the cooling water supplied from the temperature adjustment device 100 through the cooling water supply pipe 101 passes through the cooling water passage 72-3 of the spindle housing 25-3, whereby heat generated in the spindle 22-3 and the motor 24-3 of the processing unit 20-3 and transferred to the spindle housing 25-3 is recovered by the cooling water, and the spindle 22-3, the motor 24-3, and the spindle housing 25-3 are water-cooled.

[0057] As shown in Figs. 5 and 6, the nozzle 27-4 is provided such that its tip side is directed toward the holding surface 11 of the chuck table 10 or the grinding stone of the grinding wheel 21-3. As shown in Fig. 6, the nozzle 27-4 has its base end connected to the other end of the processing water supply passage 29-3. One end of the processing water supply passage 29-3 is connected to the processing water supply pipe 103 of the temperature adjustment device 100, and the other end is connected to the base end side of the nozzle 27-4. As shown in Fig. 6, the processing water supply passage 29-3 is provided with a valve 29-1 similar to that of the first embodiment in the middle, like the processing water supply passage 29 of the first embodiment. The nozzle 27-4 supplies the processing water supplied from the processing water supply passage 29-3 to a processing area where the grinding wheel 21-3 processes the workpiece 200 on the holding surface 11 of the chuck table 10. In the third embodiment, the processing water is grinding water supplied when the workpiece 200 is ground by the grinding wheel 21-3, and is, for example, pure water as in the first embodiment.

[0058] The processing device 1-3 sets the grinding wheel 21-3 attached to the tip of the spindle 22-3 by the moving unit 30 at a predetermined position relative to the workpiece 200 held on the chuck table 10, supplies processing water to the processing area by the nozzle 27-4, and while rotating the grinding wheel 21-3, presses it along the grinding feed direction (the Z-axis direction parallel to the vertical direction) against the back surface 204 of the workpiece 200, which rotates as the chuck table 10 rotates, thereby grinding the back surface 204 of the workpiece 200 with the grinding wheel 21-3.

[0059] As shown in FIG. 5, the processing apparatus 1-3 further includes cassettes 91 and 92, an alignment unit 93, a carry-in unit 94, an unloading unit 95, a cleaning unit 96, and a carry-in / out unit 97. The cassettes 91 and 92 are containers for storing a plurality of workpieces 200. The alignment unit 93 is a table on which the workpieces 200 taken out of the cassettes 91 and 92 are temporarily placed and the center alignment is performed. The carry-in unit 94 has a suction pad, and suction-holds the workpiece 200 before grinding aligned by the alignment unit 93 and carries it onto the chuck table 10. The carry-out unit 95 suction-holds the workpiece 200 after grinding held on the chuck table 10 and carries it out to the cleaning unit 96. The cleaning unit 96 cleans the workpiece 200 after grinding to remove contamination such as grinding chips adhering to the ground surface. The carry-in / out unit 97 is, for example, a robot pick equipped with a circular hand, and uses the circular hand to suction-hold and transport the workpiece 200. The carry-in / out unit 97 carries the workpiece 200 before grinding from the cassettes 91, 92 to the alignment unit 93, and carries the workpiece 200 after grinding from the cleaning unit 96 to the cassettes 91, 92.

[0060] The machining device 1-3 according to the third embodiment having the above-mentioned configuration is obtained by changing the machining unit 20 in the first embodiment to a machining unit 20-3, and accordingly, the object through which the cooling water supplied from the temperature adjustment device 100 passes and which is cleaned by supplying a cleaning fluid in which cleaning water and compressed air are mixed is changed to a cooling water passage 72-3 instead of the cooling water passage 72, and the spindle 22-3, motor 24-3, and spindle housing 25-3 of the machining unit 20-3 are cooled instead of the spindle 22, motor 24, and spindle housing 25 of the machining unit 20, and the other configurations are the same as those of the first embodiment. Therefore, the machining device 1-3 according to the third embodiment has the same effects as those of the first embodiment.

[0061] In addition, in the processing apparatus 1-3 according to the third embodiment, the cooling water channel cleaning unit 40 may be changed to the cooling water channel cleaning unit 40-2 of the second embodiment, in which case the same effects as those of the second embodiment can be obtained.

[0062] The present invention is not limited to the above-mentioned embodiment. That is, various modifications can be made without departing from the gist of the present invention. In the first and second embodiments, an example is shown in which the processing device 1 includes a processing unit 20 (cutting unit) having a spindle 22 that rotates the cutting blade 21, and in the third embodiment, an example is shown in which the processing device 1-3 includes a processing unit 20-3 (grinding unit) having a spindle 22-3 that rotates the grinding wheel 21-3, but the present invention is not limited to this. The processing device may also include a processing unit (polishing unit) having a spindle that rotates a polishing pad. In this way, the processing device according to the present invention may include any type of processing unit having a spindle that rotates a grinding tool that processes the workpiece 200.

[0063] In the first, second and third embodiments, the processing device 1, 1-3 supplies a cleaning fluid, which is a mixture of cleaning water and compressed air, to the cooling water passage 72, 72-3 when cleaning the cooling water passage 72, 72-3, but the present invention is not limited to this. Alternatively, the processing device 1, 1-3 may perform a compressed air supply process in which the control unit 43 controls the valves 42, 46, 45 or 49 when cleaning the cooling water passage 72, 72-3 to supply only cleaning water or cleaning fluid to the cooling water passage 72, 72-3, and then supplies only compressed air to discharge the cleaning water remaining in the cooling water passage 72, 72-3. In addition, when performing the compressed air supply process, the control unit 43 may be programmed to automatically alternately supply water (cleaning water or cleaning fluid) and compressed air to the cooling water passage 72, 72-3. Furthermore, the processing apparatus 1, 1-3 may perform a compressed air supply process for cleaning the cooling water passages 72, 72-3 periodically at preset intervals, preferably automatically. [Explanation of symbols]

[0064] 1,1-3 Processing equipment 10 Chuck table 20,20-3 Processing unit 21 Cutting blade (an example of a grinding tool according to the present invention) 21-3 Grinding wheel (an example of a grinding tool according to the present invention) 22,22-3 Spindle 25,25-3 spindle housing 27-1, 27-2, 27-3, 27-4 Nozzle 29,29-3 Processing water supply channel 40,40-2 Cooling water channel cleaning unit 41, 41-2 Fluid supply unit 42, 45, 46, 49, 52, 106, 107 Valves 43,53,109 Control section 44,44-2 Cleaning fluid supply pipe 50 Drainage Selection Unit 51 Drainage Channel 60 Control Unit 72,72-3 Cooling waterway 100 Temperature control device 102 Cooling water recovery pipe 200 Workpiece

Claims

1. A processing apparatus comprising: a chuck table for holding a workpiece; a spindle on which a grinding tool for processing the workpiece held on the chuck table is attached; a spindle housing for rotatably supporting the spindle and having a cooling water channel therein; and a cooling water channel cleaning unit for cleaning the cooling water channel, The cooling water channel cleaning unit comprises: a fluid supply unit connected to the cooling water passage via a valve and configured to supply cleaning water and compressed air to the cooling water passage; A control unit that controls the valve, A processing water supply passage for supplying processing water from a nozzle to the grindstone tool is further provided. The fluid supply unit includes a pipe from which the processing water supply passage is branched and connected to the cooling water passage via the valve, and the processing water is used as the cleaning water.

2. The processing device is connected to a temperature control device that receives the cooling water discharged from the cooling water channel, controls the temperature again, and returns the cooling water to the cooling water channel; a drain selection unit that selectively directs drainage of the cooling water passage to a return water passage to the temperature adjustment device and a drain passage connected to a drain; 2. The processing apparatus according to claim 1, wherein the cleaning water and compressed air used to clean the cooling water channel in the cooling water channel cleaning unit are drained into the drainage channel.

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