Crimping Device

Abstract

To provide a crimp device which can inhibit foreign objects from adhering to a backup part.SOLUTION: A crimp device includes: a crimp part which heats and crimps a pair of workpieces sandwiching an anisotropic conductive member therebetween through a lifting block 53c; a backup part 61 which is provided facing a compression part 51a of a compression member 51 of the crimp part and has an elongated support surface for supporting the pair of workpieces; and a detection part D which detects foreign objects adhering to a surface of a protection sheet C which protects the support surface. When the detection part D detects foreign objects, the protection sheet C is sent out.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a crimping device. [Background technology]

[0002] Display devices such as liquid crystal displays and organic EL displays are manufactured through a process of forming circuits and signal lines on glass plates, bonding a pair of glass plates together to form a display panel as a substrate that constitutes the display area, and attaching driver ICs and other components to the outside of the display area of ​​the display panel.

[0003] A conventional method for mounting a driver IC is to use a flexible film-like electronic component equipped with a driver IC, such as COF (Chip On Film). This is a method in which the terminals of the electronic component are crimped and connected to electrodes that are exposed from the periphery of the display area of ​​the panel in the horizontal direction parallel to the display surface (see Patent Document 1).

[0004] Hereinafter, the objects to be bonded, such as a substrate and an electronic component, will be referred to as a workpiece. Also, conductive parts of the workpiece, such as electrodes and terminals, that are to be electrically connected to each other will be referred to as leads.

[0005] Anisotropic conductive film (ACF) is used to connect the workpieces together, and ensures electrical conductivity between the leads of each workpiece through heat and pressure bonding. Anisotropic conductive film is a sheet-like material that contains many small conductive particles in a resin base material. Thermosetting resin is used as the resin base material.

[0006] When ACF is sandwiched between the leads of a pair of workpieces and pressure is applied while heating, the leads protrude from the surface of the workpieces, so the conductive particles in those parts are crushed and the leads become electrically connected. The other parts are not crushed and maintain their thickness, so no conductivity occurs and insulation is ensured. The thermosetting resin base hardens when heated, so the workpieces are mechanically connected to each other.

[0007] Specifically, a pair of workpieces is supported on the backup section, and the pair of workpieces is sandwiched between the backup section and a pressure member, and then heated and pressurized. At this time, if foreign matter is attached to the support surface of the backup section, there is a risk that the workpieces will not be sufficiently pressed together, or that the workpieces will be damaged. For this reason, it is known that the support surface of the backup section is cleaned with a brush in advance to remove foreign matter (see Patent Document 2). [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Patent No. 3734548 [Patent Document 2] JP 2007-189015 A Summary of the Invention [Problem to be solved by the invention]

[0009] Examples of foreign matter include dust, workpiece fragments, and resin, which is the base material of ACF. That is, resin that melts from ACF during heat bonding may adhere to the backup part along one edge of the workpiece. It is difficult to remove such foreign matter by brush cleaning as described in Patent Document 2. Therefore, it was necessary to stop the device once, allow the backup part to fully dissipate heat, and then wipe it off with a cloth soaked in alcohol. In addition, if the foreign matter could not be removed even by cleaning with alcohol, it was scraped off with a cutter knife. Not only was this work time-consuming, but it also took time to dissipate heat and reheat the backup part, causing a decrease in productivity.

[0010] An object of the present invention is to provide a crimping device capable of suppressing adhesion of foreign matter to a backup portion. [Means for solving the problem]

[0011] The crimping device of the present invention comprises a crimping unit that heats and crimps a pair of workpieces via an anisotropic conductive member, a backup unit that is arranged opposite the pressure member of the crimping unit and has a long support surface that supports the pair of workpieces, and a detection unit that detects foreign matter adhering to the surface of a protective sheet that protects the support surface, and when the detection unit detects the foreign matter, the protective sheet is fed out. Effect of the Invention

[0012] The crimping device of the present invention can suppress adhesion of foreign matter to the backup portion. [Brief description of the drawings]

[0013] [Figure 1] FIG. 2 is a perspective view showing a workpiece to be crimped according to the embodiment. [Diagram 2] FIG. 4 is a plan view showing the leads of a workpiece to be crimped according to the embodiment. [Diagram 3] 4 is a cross-sectional view showing a crimped portion of a work and an ACF to be crimped according to an embodiment. FIG. [Figure 4]1 is a partially sectional side view showing a basic configuration of a crimping device according to an embodiment. [Diagram 5] FIG. 4 is a schematic side view showing a heat-bonded portion in the embodiment. [Figure 6] FIG. 4 is a schematic front view showing a heat-bonded portion in the embodiment. [Figure 7] FIG. 2 is a block diagram showing a control device according to the embodiment. [Figure 8] 5 is a flowchart showing a procedure for detecting foreign matter and collecting the protective sheet according to an embodiment. [Figure 9] 4 is a flowchart showing a procedure for thermocompression bonding according to an embodiment. [Figure 10] FIG. 11 is a schematic front view showing a heat-pressure bonded portion in a modified example of the embodiment. [Figure 11] FIG. 11 is a schematic side view showing a thermocompression bonded portion in a modified example of the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] An embodiment of the present invention (hereinafter, referred to as the present embodiment) will be specifically described with reference to the drawings. [Crimping target] A first work 1 and a second work 2 to be bonded in this embodiment, and an ACF 3 will be described with reference to Figs. 1 and 2. The first work 1 is a display panel having a display area such as a liquid crystal display or an organic EL display. Depending on the size of such a display panel, multiple second workpieces 2 may be bonded to the display panel as shown in Fig. 1(A) or a single second workpiece 2 may be bonded to the display panel as shown in Fig. 1(B). In this embodiment, an example in which multiple second workpieces 2 are bonded to the display panel will be described.

[0015] As shown in Fig. 2, leads 11, which are conductive parts, are provided on the sides of the first work 1. Each lead 11 is connected to a circuit in the display area via a signal line. A plurality of leads 11 are arranged side by side at a predetermined interval (pitch p). The plurality of leads 11 have a maximum pitch p (distance between center lines) of 40 µm or less, for example.

[0016] As shown in Fig. 1(A), the second work 2 is an electronic component that is joined to the first work 1 via ACF 3. A COF (Chip On Film) is used as the electronic component. A COF is, for example, a flexible sheet made of a flexible resin, on which a driver IC is mounted and printed wiring is formed.

[0017] As shown in FIG. 2, one side of the second work 2 is provided with a lead 21, which is a conductive portion. The lead 21 is a portion for electrically connecting with the lead 11 of the first work 1. Each lead 21 is connected to a driver IC via a signal line. A plurality of leads 21 are arranged side by side at a predetermined interval. The lead 11 of the first work 1 and the lead 21 of the second work 2 have a predetermined correspondence relationship to be connected to each other, and need to be crimped so that the positions of the corresponding leads 11 and 21 match. For this reason, the intervals between the leads 11 and 21 are also the same. This matching may be sufficient to ensure the conductivity between the corresponding leads 11 and 21 and to ensure insulation between the other adjacent leads 11 and 21.

[0018] The ACF 3 is an anisotropic conductive member, and is a film in which conductive particles 32 are dispersed in a base material 31 (see FIG. 3(A)). The base material 31 is made of a thermosetting resin that is hardened by heating.

[0019] When ACF 3 is sandwiched between second work 2 and first work 1 and pressurized while being heated, conductive particles 32 located between leads 21 and 11 are crushed by being sandwiched between leads 11, 21, thereby realizing conductivity in the thickness direction between leads 21 and 11 and insulation in the surface direction (see FIG. 3(B)). In addition, the thermosetting resin of base material 31 is hardened by heating, and second work 2 is bonded to first work 1. In other words, electrical connection between leads 11 and 21 and mechanical connection between first work 1 and second work 2 can be realized by thermocompression bonding.

[0020] [composition] The configuration of the crimping device 40 of this embodiment will be described with reference to FIG. 4 and FIG. 5(A) and (B). In FIG. 4, the crimping direction by the crimping device 40 is the Z direction, and the directions perpendicular to each other in a plane perpendicular to the Z direction are the X direction and the Y direction. The Y direction is the direction between the front and the back in the figure. When the crimping device 40 is installed so that the Z direction is the vertical direction, the XY plane becomes a horizontal plane. In this case, the Z direction is the height direction, and the installation surface side is called the bottom and the opposite side is called the top. The rotation direction parallel to the XY plane is called the θ direction. The crimping device 40 has a crimping unit 50, a pressure receiving unit 60, a detection unit D, a support unit 70, and a control device 80.

[0021] The bonding unit 50 is a component that heats and presses the leads 11 of the first work 1 and the leads 21 of the second work 2 via the ACF 3. The bonding unit 50 has a pressure member 51, a heating unit 52, a pressure source 53, and a drive mechanism 54. Note that the second work 2 will be described as being supplied to the bonding device 40 in a state in which it has been temporarily bonded to the first work 1 via the ACF 3 by a temporary bonding device arranged in a process preceding the bonding device 40.

[0022] The pressure member 51 is a member that applies pressure to the second work 2. The pressure member 51 is a substantially rectangular parallelepiped shape that is elongated in the Y direction, and has a pressure surface with a length corresponding to the second work 2. Although the pressure members 51 are overlapped and hidden in FIG. 4, a plurality of pressure members 51 are arranged in the Y direction corresponding to each of the second work 2. As will be described later, a configuration for applying pressure to the pressure members 51, such as a pressure source 53, is also provided individually for each of the plurality of pressure members 51. The surface of the pressure member 51 facing the second work 2 has a pressure portion 51a that protrudes in a strip shape. This pressure portion 51a has a flat pressure surface that faces the second work 2 in parallel.

[0023] Although not shown in FIG. 4, as shown in FIGS. 5(A) and (B), a cushion sheet B is interposed between the pressure member 51 and the second workpiece 2. The cushion sheet B is a cushioning sheet that is wound around a supply reel (not shown) and is pushed out by rotation and then wound around a recovery reel for recovery. The pressure member 51 starting to pressurize the second workpiece 2 includes not only the case where the pressure member 51 comes into direct contact with the second workpiece 2, but also the case where the pressure member 51 comes into indirect contact with the second workpiece 2 through the intermediation of another member, such as the case where the cushion sheet B is interposed. Note that FIG. 5(A) shows the state before pressure is applied, and FIG. 5(B) shows the state during pressure application.

[0024] The heating unit 52 is a member that heats the pressure applying member 51. The heating unit 52 is built into the pressure applying member 51. The heating unit 52 uses, for example, a heater that generates heat when a voltage is applied. A plurality of heaters are embedded at equal intervals in the pressure applying member 51 behind the pressure applying unit 51a.

[0025] The pressure source 53 is a device that applies pressure to the pressure member 51. The pressure set in the pressure source 53 causes the pressure member 51 to pressurize the second workpiece 2. The pressure source 53 is a fluid pressure cylinder that applies a pressure force to the pressure member 51 by applying fluid pressure to a piston that is slidably provided inside the cylinder. For example, an air cylinder is used in which the piston slides inside due to the pressure of compressed air. The pressure source 53 has an operating rod 53a connected to the piston. The operating rod 53a is urged downward in the Z direction by the pressure source 53. The pressure source 53 is also provided with a load sensor 53b, such as a load cell, that detects the load applied to the second workpiece 2.

[0026] The actuation rod 53a is connected to the pressure member 51 via a lift block 53c. The lift block 53c is a rectangular parallelepiped member, and moves up and down as the actuation rod 53a moves back and forth, thereby lifting and lowering the pressure member 51.

[0027] The driving mechanism 54, together with the pressure source 53, drives the pressure member 51 in a direction to move toward or away from the second workpiece 2. The driving mechanism 54 has a frame 541, a motor 542, a ball screw 543, a nut member 544, a base plate 545, and guide rails 546 and 547.

[0028] The frame 541 is a box-shaped member fixed to a housing (not shown) of the crimping device 40. The motor 542 is a driving source fixed to the upper part of the frame 541. The ball screw 543 is disposed inside the frame 541 along the Z direction and supported so as to rotate about an axis. The nut member 544 is a member that moves up and down along the ball screw 543 as the ball screw 543 rotates. The nut member 544 protrudes from a window hole formed in a side surface of the frame 541.

[0029] The base plate 545 is a member that extends in the Z direction and supports the lifting block 53c together with the pressure source 53. The base plate 545 is attached to a nut member 544 that protrudes from the frame body 541. The guide rail 546 is a rail provided on the base plate 545 along the Z direction and supports the lifting block 53c so that it can slide. The guide rail 547 is a rail provided on the frame body 541 along the Z direction and supports the base plate 545 so that it can slide.

[0030] As shown in Fig. 4, 5(A) and 5(B), the pressure receiving portion 60 is a member that holds the second work 2 and the first work 1 between itself and the pressure receiving portion 51a of the pressure member 51. The pressure receiving portion 60 is a member having a substantially rectangular parallelepiped shape that can be raised and lowered by a lifting mechanism (not shown), and has the same length as the pressure receiving portion 51. The pressure receiving portion 60 has a backup portion 61 and a heating portion 62. The backup portion 61 is provided on a surface facing the pressure receiving portion 51a, and extends in the Y direction, protruding in a band shape. In this way, the backup portion 61 is a member that is long in the Y direction.

[0031] The backup unit 61 has a flat support surface that faces the pressure applying surface of the pressure applying unit 51a. The support surface of the backup unit 61 is long in the Y direction. The support surface of the backup unit 61 is set so that, as the pressure receiving unit 60 rises, it becomes flush with the lower surface of the first workpiece 1 supported by a stage 71, which will be described later. The support surface of the backup unit 61 may be set to the same height as the lower surface of the first workpiece 1 by providing the pressure receiving unit 60 in a stationary position.

[0032] The heating portion 62 is a member that is built into the pressure receiving portion 60 and heats the backup portion 61. The heating portion 62 uses, for example, a heater that generates heat when a voltage is applied. A plurality of heating portions 62 are embedded at equal intervals in the pressure receiving portion 60 at the rear of the backup portion 61.

[0033] Although not shown in FIG. 4, as shown in FIGS. 5(A), (B) and 6, a protective sheet C is interposed between the support surface of the backup unit 61 and the first work 1. The protective sheet C is made of a heat-resistant and durable hard material such as polyimide or glass cloth, and prevents foreign matter from adhering to the support surface of the backup unit 61. For this reason, it is preferable that the width (X direction) of the protective sheet C is equal to or larger than the width (X direction) of the backup unit 61. As shown in FIG. 6, the protective sheet C is wound around the supply reel SR and pushed out by rotation, and is wound up and collected by the rotation of the recovery reel CR. That is, the protective sheet C is sent out on the backup unit 61 by the cooperation of the supply reel SR and the recovery reel CR. In this embodiment, the supply reel SR and the recovery reel CR are provided at positions sandwiching the pressure receiving unit 60 in the Y direction. In addition, while the protective sheet C fed from the supply reel SR is being taken up by the recovery reel CR, protective sheet support parts R are provided on both ends of the backup part 61. The protective sheet support parts R support the protective sheet C fed onto the support surface of the backup part 61 at a height at which the protective sheet C is fed out so as to stroke the support surface of the backup part 61.

[0034] As shown in FIG. 6, a detection unit D is provided near one end of the backup unit 61 in the longitudinal direction (Y direction) to detect foreign matter attached to the protective sheet C. The detection unit D is, for example, a sensor such as a photoelectric sensor. The photoelectric sensor in this embodiment is described as a reflective type in which a light-emitting unit and a light-receiving unit are integrated. The detection unit D irradiates light such as infrared light in the Y direction and detects foreign matter attached to the protective sheet C from one end to the other end of the backup unit 61. Specifically, the detection unit D is provided above the supply reel SR or the recovery reel CR at a height where the optical axis of the detection unit D blocks foreign matter on the surface of the protective sheet C. For example, the detection unit D is provided at a height of 0.1 mm or less above the protective sheet C. As a result, the light irradiated from the detection unit D can detect foreign matter attached to the surface of the protective sheet C from one end to the other end of the backup unit 61. More specifically, for example, resin molten from ACF, which becomes a foreign object, tends to adhere to the back side of the support surface of the backup unit 61, that is, near the side E on the drive mechanism 54 side (see FIG. 5), so the detection unit D is provided at a position where its optical axis passes over the protective sheet C on the side E of the support surface of the backup unit 61 on the drive mechanism 54 side. Also, the detection unit D may be provided at a position where the optical axis passes over the protective sheet C on an area where foreign objects are likely to adhere, recording the adhesion history of the foreign objects. When a foreign object is detected, the supply reel SR and the recovery reel CR feed a predetermined amount of protective sheet C, in this case an amount of protective sheet C equivalent to the length from one end to the other end of the backup unit 61.

[0035] The support unit 70 is a device that supports the first workpiece 1. The support unit 70 has a stage 71 and a moving device 72. The stage 71 is a flat platform that supports the first workpiece 1 in the horizontal direction. Although not shown, the stage 71 has a plurality of holes that are connected to a vacuum source. This allows the stage 71 to suction and hold the first workpiece 1. The moving device 72 is a device that supports the stage 71 so that it can move freely in the X direction, Y direction, and θ direction.

[0036] The support unit 70 receives the first work 1 to which the second work 2 has been temporarily bonded via the ACF 3 from a previous process such as a temporary bonding device, and moves the first work 1 so that the second work 2 is at a bonding position where it is bonded to the first work 1 by the pressurizing unit 51a. The support unit 70 also delivers the first work 1, for which the bonding operation has been completed, to a subsequent process such as a substrate storage device.

[0037] 7, the control device 80 is a device that controls the crimping device 40. The control device 80 is configured, for example, by a dedicated electronic circuit or a computer that operates with a predetermined program. That is, the control device 80 controls the operation of the crimping device 40 by operating the heating unit 52 of the crimping unit 50, the driving mechanism 54, the heating unit 62 of the pressure receiving unit 60, the moving device 72 of the support unit 70, and the like. The control device 80 also determines whether the detection unit D has detected a foreign object, and when it determines that a foreign object has been detected, controls the supply reel SR and the recovery reel CR to feed out a predetermined amount of protective sheet C, i.e., an amount corresponding to the length of the backup unit 61.

[0038] The control device 80 stores programs that control the heating temperatures of the heating units 52 and 62, the operation timing and rotation speed of the motor 542, the pressurization timing of the pressure source 53, the operation of the moving device 72, and the like. The control device 80 controls each unit by reading and executing the programs and data using a processing device such as a PLC or a CPU. By changing the programs and data, it is possible to accommodate a wide variety of specifications for the first workpiece 1, second workpiece 2, and ACF 3 to be bonded.

[0039] The control device 80 has a detection unit 81, a mechanism control unit 82, a heating temperature control unit 83, a detection control unit 84, a reel control unit 85, a memory unit 86, a setting unit 87, and an input / output control unit 88.

[0040] The detection unit 81 detects the start of the pressurization of the pressurizing member 51 against the second work 2, that is, the timing of contact. In this embodiment, since the pressurization is performed via the cushion sheet B, the detection unit 81 detects the start of pressurization based on the moving distance of the pressurizing member 51 until the pressurizing surface comes into contact with the surface of the cushion sheet B placed on the second work 2. In other words, the detection unit 81 detects the contact when the position coordinates of the pressurizing surface of the pressurizing unit 51a moved by the drive mechanism 54 become the preset position coordinates. For this purpose, a distance obtained by subtracting the thicknesses (thicknesses in a provisionally pressed state) of the first work 1 and the second work 2 and the thicknesses of the cushion sheet B and the protective sheet C from the distance between the position coordinates of the reference position, which is the starting end of the movement of the pressurizing surface, and the position coordinates of the support surface of the first work 1 (support surface of the backup unit 61) is obtained. Then, the position coordinates moved in the Z direction by the obtained distance from the position coordinates of the reference position are set in advance as the start position of pressurization. The start of pressure application can also be detected by the detection unit 81 detecting the contact of the pressure application surface with the second workpiece 2 based on a signal from the load sensor 53b.

[0041] The mechanism control unit 82 operates the motor 542, the pressure source 53, etc. The heating temperature control unit 83 controls the temperature of the heating unit 52 so that the temperature becomes a curing temperature necessary for thermally curing the base material 31 of the ACF 3, and also controls the temperature of the heating unit 62 so that the temperature becomes a temperature that supports the heating unit 52.

[0042] The detection control unit 84 controls the operation of the detection unit D to detect foreign matter adhering to the protective sheet C. The detection control unit 84 has a determination unit 841, which determines whether foreign matter is adhering based on the detection result of the detection unit D. The reel control unit 85 controls the supply reel SR and the recovery reel CR based on the determination result of the determination unit 841 to feed out the protective sheet C.

[0043] The storage unit 86 stores information necessary for control of this embodiment. Information stored in the storage unit 86 includes position coordinates such as a reference position, a pressurization start position, and a pressing position, a thermocompression bonding time, and a recovery amount of the protective sheet C. The setting unit 87 is a processing unit that sets information in the storage unit 86 in accordance with an input. The input / output control unit 88 is an interface that controls conversion of signals between each unit to be controlled and input / output.

[0044] An input device 91 and an output device 92 are connected to the control device 80. The input device 91 is an input means such as a switch, a touch panel, a keyboard, a mouse, etc., for an operator to operate the crimping device 40 via the control device 80. The operator can input various pieces of information to be set in the storage unit 86 using the input device 91.

[0045] The output device 92 is an output means such as a display, a lamp, a meter, etc. that makes information for checking the status of the device visible to an operator. For example, the output device 92 can display an input screen for information from the input device 91.

[0046] [Effect] Next, an operation example of this embodiment will be described with reference to Fig. 8 in addition to Figs. 1 to 7. Fig. 8 is a flow chart showing the procedure of foreign object detection and protective sheet recovery in this embodiment. Foreign object detection and protective sheet recovery in this embodiment are performed after heat and pressure bonding of the work, which will be described later.

[0047] Under the control of the detection control unit 84, the detection unit D irradiates the protective sheet C with light such as infrared light for detecting a foreign object. The direction of irradiation of the light is the direction in which the protective sheet C is fed, i.e., the Y direction. The determination unit 841 determines the presence or absence of a foreign object based on the detection result (step S01). If a foreign object is not detected (NO in step S01), the flow ends. If a foreign object is detected (YES in step S01), the reel control unit 85 is notified that a foreign object has been detected. The reel control unit 85 controls the supply reel SR and the recovery reel CR to start feeding the protective sheet C (step S02). The supply reel SR and the recovery reel CR continue to feed the protective sheet C until a predetermined amount, i.e., an amount equivalent to the length of the backup unit 61, has been fed (NO in step S03), and when an amount of the protective sheet C equivalent to the length of the backup unit 61 has been fed (YES in step S03), they stop (step S04).

[0048] Next, the thermocompression bonding operation of this embodiment will be described with reference to Fig. 9. Fig. 9 is a flow chart showing the procedure of the thermocompression bonding operation of this embodiment. The pressure of the pressure source 53, which is an air cylinder, is set to a predetermined pressure. Also, the pressure member 51 and the backup section 61 are heated to a predetermined temperature by the heating sections 52 and 62, respectively.

[0049] First, the first work 1 to which the second work 2 is temporarily bonded via the ACF 3 is supported on the stage 71 of the support unit 70, and the first work 1 is moved by the moving device 72 so that the area where the first work and the second work are temporarily bonded via the ACF faces the pressure unit 51a. Then, the pressure receiving unit 60 rises, and the support surface of the backup unit 61 comes into contact with the lower surface of the first work 1.

[0050] In this state, the pressing member 51 starts to move downward toward the second work 2 by the operation of the driving mechanism 54 (step S11). When the pressing member 51 continues to move (NO in step S12) and the pressing surface of the pressing part 51a reaches the pressing start position (YES in step S12), the detection part 81 detects this.

[0051] When the detection unit 81 detects the contact of the pressure member 51a, the drive mechanism 54 moves down a predetermined pushing amount and when it reaches the pushing position (step S13), stops the pressure member 51 (step S14). As a result, the pressure surface of the pressure member 51a stops in a state where it presses the second work 2 through the cushion sheet B.

[0052] In addition, as the pressing surface of the pressing unit 51a approaches the second work 2, the base material 31 of the ACF 3 is heated by the heating unit 62 of the backup unit 61 and the radiant heat from the pressing unit 51a, and the temperature starts to rise. When the pressing surface starts to press the second work 2, the temperature rises rapidly. In this process, the base material 31 starts to melt and the hardness decreases, and when it reaches the lowest hardness state, it starts to harden. In parallel with this, as shown in FIG. 3(B), the conductive particles 32 are crushed, the conductivity between the lead 21 and the lead 11 is secured, and an electrical connection is established. Thereafter, the second work 2 and the first work 1 are joined and a mechanical connection is established while the hardening of the base material 31 progresses further until the thermocompression is completed (NO in step S15).

[0053] When a predetermined pressure-bonding time has elapsed since the start of pressurization (YES in step S15), the drive mechanism 54 raises the pressurizing member 51 to release the second work 2 from the pressure (step S16). The pressure-bonding time is, for example, 5 seconds from the start of pressurization.

[0054] [effect] (1) The bonding device 40 of this embodiment includes a bonding unit 50 that heats and bonds the first work 1 and the second work 2 via the ACF 3, a backup unit 61 that is provided opposite the pressure member 51 of the bonding unit 50 and has a long support surface that supports the first work 1 and the second work 2, and a detection unit D that detects foreign matter attached to the surface of a protective sheet C that protects the support surface, and when the detection unit D detects a foreign matter, the protective sheet C is fed out. This prevents foreign matter from directly adhering to the support surface of the backup unit 61, and therefore eliminates the need to clean the support surface of the backup unit 61.

[0055] Furthermore, since the protective sheet on the backup part 61 is replaced when adhesion of a foreign object is detected, the risk of a foreign object being caught between the backup part 61 and the first work 1 and the second work 2 when they are heat-pressed together is reduced. This reduces the possibility that the work pieces are not sufficiently press-bonded together during heat-pressing, or that the work pieces are damaged. Moreover, since the protective sheet C is replaced only when the detection part D detects a foreign object, there is no risk of the protective sheet C being wasted in vain.

[0056] (2) The detection unit D includes a sensor provided near one end in the longitudinal direction of the backup unit 61, and the sensor detects foreign objects by irradiating light from one end to the other end in the longitudinal direction of the backup unit 61. This allows one detection unit D to detect foreign objects all at once in the range from one end to the other end of the backup unit 61.

[0057] (3) Protective sheet C is made of polyimide or glass cloth. During thermocompression bonding, backup section 61 becomes hot due to heating section 62, so protective sheet C is required to be heat resistant. In addition, since protective sheet C is not replaced until a foreign object is detected, it is also required to be durable. Furthermore, if protective sheet C is made of a soft material, there is a risk that thermocompression bonding will be insufficient, so hardness is required. Polyimide or glass cloth are materials that can satisfy all of the above requirements, and are therefore suitable as protective sheet C.

[0058] [Variations] (1) In the above embodiment, a reflective type sensor for the detection unit D has been described, but a transmission type sensor in which the light-emitting unit and the light-receiving unit are separate may also be used. When a transmission type sensor is used, a pair of photoelectric sensors may be provided near one end and the other end of the backup unit 61, respectively.

[0059] (2) In the above embodiment, a foreign object is detected when the foreign object blocks the optical axis of a photoelectric sensor, but the position of the foreign object may also be detected based on the arrival time or image position of the light reflected from the foreign object. Based on this detected position, the supply reel SR and the recovery reel CR adjust the feed amount of the protective sheet C so that the portion of the protective sheet C to which the foreign object is attached is removed from the support surface of the backup unit 61. For example, if it is detected that a foreign object is attached 3 cm from the recovery reel CR side of the backup unit 61, it is only necessary to feed the protective sheet C by 3 cm, which makes it possible to reduce the amount of protective sheet C used.

[0060] (3) As shown in FIG. 10, the detection unit D may be provided on a moving mechanism M extending from one end to the other end in the longitudinal direction of the backup unit 61. This moving mechanism M allows the detection unit D to move in the Y direction between the pressure unit 51a and the backup unit 61 from one end to the other end of the backup unit 61. In this case, the moving mechanism M is disposed at a position that does not affect the thermal compression bonding operation and the cushion sheet B, and is provided so that the sensor surface of the detection unit D faces the support surface of the backup unit 61. The detection unit D can irradiate light onto the surface of the protective sheet C during this movement, and detect any foreign matter attached thereto from the amount of reflected light or the like. The detection unit D can also move from the supply reel SR side of one end of the backup unit 61 to the recovery reel CR side of the other end. This allows for a margin in the detection range of foreign matter in the protective sheet C, so that foreign matter can be reliably detected. That is, the detection unit D can move in the Y direction at least from one end to the other end of the backup unit 61.

[0061] It is also possible to detect the position of the foreign object in the backup unit 61 from the amount of movement of the detection unit D. Based on this detected position, the supply reel SR and the recovery reel CR can adjust the amount of protective sheet C that is fed out so that the portion of the protective sheet C to which the foreign object is attached is removed from the support surface of the backup unit 61. For example, if it is detected that a foreign object is attached 3 cm from the recovery reel CR side of the backup unit 61, it is only necessary to feed out the protective sheet C by 3 cm, and therefore the amount of protective sheet C fed out can be reduced.

[0062] In this case, the detection unit D is not limited to a sensor, and may use an infrared (IR) camera, a CCD camera, a CMOS camera, or the like, and detect a foreign object and its position from an obtained image.

[0063] Furthermore, in the above embodiment, the detection unit D is provided at a position where the optical axis of the detection unit D passes over the protective sheet C on the side E of the support surface of the backup unit 61 on the drive mechanism 54 side, but as shown in FIG. 11, a moving mechanism N may be provided to move the detection unit D so that the optical axis of the detection unit D moves from the side E to the side F of the support surface of the backup unit 61 on the protective sheet C. After the workpiece is heated and pressed, the detection unit D is moved from the side E to the side F by this moving mechanism, and light is irradiated while moving to detect foreign objects on the protective sheet C. This makes it possible to detect foreign objects on the entire surface of the protective sheet C. As described above, the position of the foreign object on the protective sheet C can also be detected by driving the moving mechanism M and the moving mechanism N. Therefore, when multiple foreign objects are detected, the amount of the protective sheet C to be fed may be adjusted based on the position of the foreign object detected closest to the supply reel SR.

[0064] (4) In the above embodiment, the supply reel SR and the recovery reel CR are provided at positions sandwiching the pressure receiving portion 60 in the Y direction, but they may be provided so as to sandwich the pressure receiving portion 60 in the X direction, i.e., in the short direction of the backup portion 61. In this modification, the protective sheet C having a width from one end to the other end of the backup portion 61 is fed in the X direction, i.e., in the short direction of the backup portion 61, so that the time required to feed the protective sheet C can be shortened.

[0065] In the above embodiment, the detection unit D is disposed at a height such that its optical axis is at a height that blocks foreign matter on the surface of the protective sheet C. Therefore, the supply reel SR and the recovery reel CR are disposed at positions sandwiching the pressure receiving unit 60 so that the detection unit D and the supply path of the protective sheet C do not intersect. However, when the above-mentioned moving mechanism M is provided, the sensor surface of the detection unit D is disposed facing the protective sheet C, so the supply reel SR and the recovery reel CR may be disposed at positions sandwiching the pressure bonding unit 50.

[0066] In the above embodiment, the supply reel SR and the recovery reel CR work together to feed out the protective sheet C, but this is not limited to the above. The recovery reel CR may rotate alone to recover the protective sheet C, thereby feeding out the protective sheet C. The supply reel SR and the recovery reel CR are not necessarily included in the configuration of the crimping device 40, and may be controlled separately as separate components from the crimping device 40.

[0067] (5) The detection unit 81 is not limited to detecting contact of the pressure surface of the pressure unit 51a with the second workpiece 2 based on the position coordinates of the pressure surface of the pressure unit 51a or the signal of the load sensor 53b, but may be configured to detect contact of the pressure surface of the pressure unit 51a with the second workpiece 2 (or the first workpiece 1) based on other means, for example, an image captured from the side.

[0068] (6) In the above embodiment, the pressing surfaces of the pressing members 51 having a length corresponding to the second workpieces 2 are arranged in a row corresponding to each of the second workpieces 2. However, the method of the final pressure bonding is not limited to this, and a plurality of second workpieces 2 temporarily bonded to one side of the first workpiece 1 may be permanently bonded together using one long pressing member 51. In other words, the pressing member 51 may have a length that allows the plurality of second workpieces 2 temporarily bonded to the first workpiece 1 to be thermally bonded together. The configuration for applying pressure to the pressing member 51, such as the pressure source 53, may also be one corresponding to the long pressing member 51.

[0069] (7) In the above embodiment, a plurality of second workpieces 2 are permanently pressure-bonded to one side of the first workpiece 1, but as shown in Fig. 1(B), the present invention can also be applied to a mode in which a single second workpiece 2 is permanently pressure-bonded to one side of the first workpiece 1. Furthermore, the present invention can also be applied to a mode in which a single or multiple second workpieces 2 are permanently pressure-bonded to multiple sides of the first workpiece 1.

[0070] (8) The material of the substrate of the second work 2 is not limited to a flexible one made of resin. A glass substrate may be used for the second work 2. A flexible resin substrate may be used for the first work 1 instead of a glass substrate.

[0071] (9) The second work 2 may be the side to be supported and the first work 1 may be the side to be pressed, or pressure may be applied from both the first work 1 and the second work 2.

[0072] [Other embodiments] Although the embodiment of the present invention and the modified examples of each part have been described above, these embodiments and the modified examples of each part are presented as examples and are not intended to limit the scope of the invention. These novel embodiments described above can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are included in the invention described in the claims. [Explanation of symbols]

[0073] 1. First Work 2. Second Work 11, 21 Lead 3 ACF 31 Base material 32 Conductive particles 40 Crimping device 50 Crimping section 51 Pressure member 52 Heating section 53 Pressure source 54 Drive mechanism 60 Pressure receiving part 61 Backup Department 62 Heating section 70 Support part Stage 71 72 Mobile Device 80 Control device 81 Detection unit 82 Mechanical control unit 83 Heating temperature control unit 84 Detection control section 85 Reel control section 86 Memory section 87 Setting section 88 Input / Output Control Unit 91 Input Devices 92 Output Device B Cushion seat C. Protective sheet D Detector M, N movement mechanism R Protective sheet support part

Claims

1. a pressure bonding unit that heats and presses a pair of workpieces together via an anisotropic conductive member; A backup section having a long support surface that is provided opposite to the pressing member of the crimping section and supports the pair of workpieces; a detection unit that detects foreign matter attached to a surface of a protective sheet that protects the support surface; Equipped with When the detection unit detects the foreign object, the protective sheet is fed. Crimping device.

2. the detection unit includes a sensor provided near one end in a longitudinal direction of the backup unit, the sensor detects the foreign object by irradiating light from one end to the other end in a longitudinal direction of the backup portion. The crimping device according to claim 1 .

3. the detection unit detects the foreign object by moving at least from one end to the other end in a longitudinal direction of the backup unit. The crimping device according to claim 1 .

4. adjusting the amount of the protective sheet being fed based on the position at which the detection unit detects the foreign object; The crimping device according to any one of claims 1 to 3.

5. The protective sheet is fed in the short direction of the backup section.

5. The crimping device according to claim 1.

6. The protective sheet is made of polyimide or glass cloth. The crimping device according to any one of claims 1 to 5.

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