Information processing apparatus, display control method, program, substrate processing apparatus, and method for manufacturing an article

Abstract

To provide an information processing apparatus that can search for recipe data in a shorter time.SOLUTION: An information processing apparatus controls display of a user interface, and the information processing apparatus has: an acquisition unit that acquires recipe data on a processing condition for a substrate processing apparatus that processes a substrate, and layout data on the arrangement of a portion to be processed of the substrate processed by the substrate processing apparatus; and a display control unit that controls such that information on the layout data and information on the recipe data related to the layout data, which are acquired by the acquisition unit, are displayed in association with each other on the user interface.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to an information processing apparatus, a display control method, a program, a substrate processing apparatus, and a method for manufacturing an article.

Background Art

[0002] In a substrate processing apparatus that processes a substrate for manufacturing an article such as a semiconductor device, it is necessary to prepare recipe data regarding processing conditions for processing the substrate for each type of article to be manufactured. The recipe data is composed of a plurality of data such as layout data regarding the arrangement of the processed portion of the substrate to be processed by the substrate processing apparatus and control data regarding the control of each unit of the substrate processing apparatus. Further, the recipe data differs for each type of article to be manufactured from the substrate, and also differs depending on the manufacturing process and the substrate processing apparatus even for the same type of article. Further, in an information processing apparatus that manages the recipe data, an operator can display the recipe data on a screen and edit a plurality of data constituting the recipe data.

[0003] Patent Document 1 discloses a data editing apparatus and the like having a function of arranging and displaying a plurality of data constituting recipe data on a screen and rewriting the held data according to an input command while this screen is being displayed.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] With the improvement of the performance of substrate processing equipment and the diversification of articles such as semiconductor devices, the number of data constituting recipe data has increased. Therefore, when creating recipe data, in order to shorten the creation time, an operator may create new recipe data by duplicating existing recipe data and editing some of the data.

[0006] However, as the number of recipe data stored in the information processing device increases, an operator needs a lot of time to search for existing recipe data to find the target recipe data.

[0007] Therefore, an object of the present invention is to provide an information processing device, a display control method, a program, a substrate processing device, and a method for manufacturing an article that can search for recipe data in a shorter time.

Means for Solving the Problems

[0008] An information processing device according to one aspect of the present invention for solving the above problems is an information processing device that controls the display of a user interface, and includes an acquisition unit that acquires recipe data related to the processing conditions of a substrate processing device for processing a substrate and layout data related to the arrangement of the processed portion of the substrate processed by the substrate processing device, and a display control unit that controls so that information related to the layout data and information related to recipe data associated with the layout data acquired by the acquisition unit are associated and displayed on the user interface. Then, the display control unit controls such that a layout image obtained by imaging information on the arrangement as information on the layout data is displayed on the user interface, and a thumbnail image of the layout image is displayed 。

Effects of the Invention

[0009] According to the present invention, an information processing device, a display control method, a program, a substrate processing device, and a method for manufacturing an article that can search for recipe data in a shorter time are provided.

Brief Description of the Drawings

[0010]

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Embodiments for Carrying Out the Invention

[0011] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In each figure, the same members are denoted by the same reference numerals, and overlapping explanations are omitted.

[0012] <First Embodiment> In this embodiment, an exposure apparatus will be described as an example of a substrate processing apparatus. FIG. 1 is a perspective view showing the appearance of the exposure apparatus. As shown in the figure, the exposure apparatus includes a chamber 101 for controlling the environmental temperature of the apparatus main body, and a control unit 106 having a CPU for controlling the apparatus main body. Further, the exposure apparatus includes a console unit including a display 102 for displaying various information, a monitor 105 for displaying image information obtained through imaging means in the apparatus main body, an operation panel 103 for an operator to input, a keyboard 104, and the like. In the figure, 107 is an ON-OFF switch, 108 is an emergency stop switch, and 109 is various switches, a mouse, etc. The exposure apparatus main body is installed inside the chamber 101.

[0013] The display 102 is a thin flat type such as organic EL, plasma, or liquid crystal, and is housed in front of the chamber 101 and connected to the control unit 106 by a LAN cable (not shown). The control unit 106 is an information processing device, and details will be described later. The operation panel 103, keyboard 104, monitor 105, etc. are also installed in front of the chamber 101 so that operations in the console unit can be performed from the front of the chamber 101.

[0014] Figure 2 is a diagram showing the internal structure of the exposure apparatus. In the figure, a stepper is shown as the exposure apparatus. In the figure, 202 is a reticle (original plate, mask), and 203 is a wafer (substrate). When the light beam emitted from the light source device 204 illuminates the reticle 202 through the illumination optical system 205, the pattern on the reticle 202 can be transferred to the photosensitive layer on the wafer 203 by the projection lens 206. The reticle 202 is supported by a reticle stage 207 for holding and moving the reticle 202. The wafer 203 is exposed while being vacuum-sucked by a wafer chuck 208. The wafer chuck 208 is movable in each axial direction by a wafer stage 209. Above the reticle 202, a reticle optical system 281 for detecting the amount of misalignment of the reticle is arranged. Above the wafer stage 209 and adjacent to the projection lens 206, an off-axis microscope 282 is arranged. The main role of the off-axis microscope 282 is to detect the relative position between the internal reference mark and the alignment mark on the wafer 203. In addition, a reticle library 220 and an elevator 230, which are peripheral devices, are arranged adjacent to the stepper main body, and the necessary reticles and wafers are transported to the stepper main body by a reticle transport device 221 and a wafer transport device 231.

[0015] FIG. 3 is a block diagram showing the electrical circuit configuration of a control unit that controls an exposure apparatus. In the figure, reference numeral 321 denotes a CPU (Central Processing Unit) built in the control unit 106 that controls the entire apparatus. Reference numeral 322 denotes a wafer stage driving device, reference numeral 323 denotes an alignment detection system such as the off-axis microscope 282, reference numeral 324 denotes a reticle stage driving device, reference numeral 325 denotes an illumination system such as the light source device 204, reference numeral 326 denotes a shutter driving device, reference numeral 327 denotes a focus detection system, and reference numeral 328 denotes a Z driving device. These are controlled by the CPU 321. Reference numeral 329 denotes a transfer system such as the reticle transfer device 221 and the wafer transfer device 231.

[0016] Reference numeral 330 denotes a console unit having a display 102, a keyboard 104, a mouse (not shown), a touch pen (not shown), etc., and is for giving various commands and parameters regarding the operation of this exposure apparatus to the CPU 321. That is, the console unit is for exchanging information with the operator and serves as a user interface of the exposure apparatus. Reference numeral 331 denotes an external memory that stores recipe data, layout data, etc. The recipe data includes information indicating processing conditions for performing exposure processing such as data related to the reticle to be used, the opening amount of the masking blade, the exposure amount, focus-related data, and layout data. The exposure apparatus performs exposure processing according to the information indicating the processing conditions of the exposure processing included in the recipe data. Further, the control unit 106 serves as an acquisition unit that acquires parameters of various recipe data from the external memory 331 and a display control unit that controls the display on the display 102. Further, the control unit 106 acquires the recipe data from the external memory 331, but may also acquire it from an external device connected via a network.

[0017] Here, the layout data related to the recipe data will be described. FIG. 4 is a top view of the wafer 203 processed by the exposure apparatus. 401 indicates the exposure area to be exposed by the exposure apparatus. In the example of FIG. 4(a), 26 exposure areas 401 are arranged. The plurality of exposure areas 401 are sequentially exposed by the exposure apparatus. That is, the exposure area 401 is the portion of the wafer 203 to be processed, and the layout data includes information on the arrangement of the portions of the wafer 203 to be processed. Here, the portion to be processed is not limited to a region having a certain area such as the exposure area 401. For example, a point or a line having no area such as a predetermined point within the exposure area 401 or a line indicating the boundary of the exposure area 401 may be used as the portion to be processed.

[0018] The layout data includes data on the arrangement of the exposure areas to be exposed by the exposure apparatus on the wafer 203. For example, the coordinates, size, number, etc. of the exposure area 401. The coordinates of the exposure area 401 may be the coordinates for defining the outer shape of the exposure area 401 or the coordinates of the center of the exposure area 401. Also, the size of the exposure area 401 may be the length of the side defining the outer shape of the exposure area 401 or the area of the exposure area 401. Also, the number of the exposure areas 401 is the number of the exposure areas 401 arranged on the wafer 203.

[0019] Also, as shown in FIG. 4(b), when multiple exposure processes are performed on the wafer 203, the recipe data may be associated with a plurality of layout data. For example, in FIG. 4(b), the exposure area 401 shown in the left figure, the exposure area 401 shown in the middle figure, and the exposure area 401 shown in the right figure are sequentially exposed. In this case, three pieces of layout data are associated with the recipe data, and each piece of layout data includes data on the arrangement of the exposure area 401 shown in each figure.

[0020] Next, the relationship between the recipe data and the layout data will be described. FIG. 5 is a diagram showing the relationship between the recipe data and the layout data. FIG. 5(a) shows that layout data 506 is associated with recipe data 501. Here, the layout data 506 includes information regarding the arrangement of the processed portion of the wafer 203 as described above. Specifically, the layout data 506 is data regarding the coordinates, size, number, etc. of the exposure area 401. In FIG. 5, for the sake of clarity, the layout data is represented by a diagram showing the wafer 203 and the exposure area 401.

[0021] Also, the same layout data may be associated with a plurality of recipe data. FIG. 5(b) shows that layout data 507 is associated with recipe data 502, 503, and 504. The recipe data 502, 503, and 504 are different recipe data because at least some of the parameter values are different, but the same layout data 507 is associated because the arrangement of the exposure area 401 is the same.

[0022] Also, a plurality of layout data may be associated with one recipe data. FIG. 5(c) shows that layout data 508, 509, and 510 are associated with recipe data 505. In the exposure process according to the recipe data 505, three exposure processes are performed in order while switching the layout data, and the exposure areas shown in the layout data 508, 509, and 510 are exposed in each exposure process. By performing the exposure process while switching a plurality of layout data in this way, a complex device pattern can be formed on the wafer 203.

[0023] FIG. 6 is a diagram showing a search screen for searching recipe data according to the first embodiment. The control unit 106 controls to display on the display 102 a search screen 601 including layout data acquired from an external memory 331 or the like and information related to the recipe data. A label 602 indicates an area 604 for displaying information related to the layout data. In the area 604, a layout image including an exposure area on the wafer imaged based on the layout data is displayed. When a layout image of layout data associated with other recipe data is displayed, a boundary line is displayed between the other layout images in the area 604, and each of the layout images is displayed separately. That is, the information related to the recipe data is classified and displayed for each associated layout data on the search screen 601.

[0024] Further, a label 603 indicates an area 605 for displaying the recipe data. Here, in the area 605, for example, an identifier of the recipe data or a name of the recipe data is displayed as information related to the recipe data. Also, the recipe data related to the layout data of the layout image displayed in the area 604 is displayed side by side in the area 605 beside the layout image. Further, the boundary line separating the layout images in the area 604 extends to the area 605, and the recipe data is classified and displayed for each associated layout data.

[0025] In the example of the search screen 601 shown in FIG. 6, the recipe data 501 associated with the layout data 506 is displayed side by side in the area beside the area where the layout image indicating the layout data 506 is displayed. Also, the recipe data 502, 503, and 505 associated with the layout data 507 are displayed side by side in the area beside the area where the layout image indicating the layout data 507 is displayed.

[0026] Thereby, on the search screen 601, the information related to the layout data and the information related to the recipe data are associated and displayed, so that the operator can search for the recipe data based on the information related to the layout data.

[0027] Also, on the search screen 601 shown in FIG. 6, two layout images are displayed, but the number of displayed layout images is not limited to two. Also, the number of recipe data to be displayed can be any number. Also, when there are many displayed layout images or recipe data and not all of the layout images or recipe data can be displayed on the search screen 601, the displays in regions 604 and 605 on the search screen 601 may be made scrollable.

[0028] Also, on the search screen 601 shown in FIG. 6, a layout image is displayed as information regarding layout data, but an identifier indicating the layout data or a name indicating the layout data may be displayed.

[0029] Also, on the search screen 601, a line connecting information regarding related layout data and information regarding recipe data may be displayed as shown in FIG. 5. Thereby, it is possible to clearly display that the information regarding layout data and the information regarding recipe data are associated with each other.

[0030] Also, on the search screen 601, the information regarding related layout data and the information regarding recipe data may be displayed using related colors. Specifically, the information regarding related layout data and the information regarding recipe data are displayed using the same color or the same color tone so as to be distinguishable from other unrelated information. Also by this, it is possible to clearly display that the information regarding layout data and the information regarding recipe data are associated with each other.

[0031] As described above, according to the information processing apparatus according to the present embodiment, since the information regarding layout data and the information regarding recipe data are associated and displayed on the search screen, an operator can search for recipe data in a shorter time.

[0032] <Second Embodiment> Next, an information processing apparatus according to the second embodiment will be described. Note that matters not mentioned here may follow the first embodiment. In the second embodiment, the display of a search screen for searching for recipe data in which a plurality of layout data are associated will be described.

[0033] FIG. 7 is a diagram showing a search screen for searching for recipe data according to the second embodiment. The control unit 106 controls to display a search screen 701 including layout data acquired from an external memory 331 or the like and information related to the recipe data on the display 102. A label 702 indicates an area 704 for displaying the layout data. In the area 704, a plurality of layout images including the exposure areas on the wafer imaged based on the layout data are displayed. The plurality of layout images are imaged based on the layout data associated with the same recipe data.

[0034] Here, in the search screen 701 in FIG. 7, different display methods of the layout images are exemplified in the upper area and the lower area. In the upper area, an example is shown in which a plurality of layout images are arranged side by side horizontally. By arranging them side by side horizontally, a plurality of layout images can be confirmed at the same time.

[0035] On the other hand, in the lower area of the search screen 701, some of the plurality of layout images (one layout image in the example of FIG. 7) are displayed. Then, when a layout image on the screen is instructed by an operator using an input means such as a keyboard or a mouse, an area 708 in which the layout image is displayed in a reduced size is displayed. That is, usually only some of the layout images are displayed, but the layout images are displayed as thumbnails only when instructed by the operator. Thereby, when the number of the plurality of layout images is large and all the layout images cannot be displayed on the search screen 701, the operator can confirm the plurality of layout images when needed.

[0036] As described above, according to the information processing apparatus according to the present embodiment, since information on a plurality of layout data related to recipe data is displayed on the search screen, an operator can search for recipe data in a shorter time.

[0037] <Third Embodiment> Next, an information processing apparatus according to the third embodiment will be described. Note that matters not mentioned here may follow the first embodiment. In the third embodiment, display of a search screen for searching for recipe data based on information included in the recipe data will be described.

[0038] FIG. 8 is a diagram showing a search screen for searching for recipe data according to the third embodiment. The control unit 106 controls to display on the display 102 a search screen 601 and 801 including layout data acquired from an external memory 331 or the like and information related to the recipe data. Note that since the search screen 601 is the same as that in the first embodiment, the description thereof will be omitted.

[0039] The search screen 801 is a screen for searching for recipe data according to information related to the recipe data or the like. In the search screen 801, 802 and 804 are labels indicating parameters included in the recipe data, and 803 and 805 are input areas for inputting values of the parameters indicated by the labels 802 and 804, respectively. In the example of FIG. 8, the parameter indicated by the label 802 is the exposure dose, and the parameter indicated by the label 804 is the reticle identifier, but other parameters included in the recipe data may be displayed. Further, information related to the layout data, such as the coordinates, size, and number of the exposure area 401, may be displayed on the search screen 801.

[0040] Further, 806 is a button to start the search. When the button 806 is pressed, the layout image and recipe data to be displayed on the search screen 601 are narrowed down according to the values of the parameters input in the input areas 803 and 805. When the button 806 is pressed, the control unit 106 searches for and acquires recipe data and layout data in which the values of the parameters that match the values of the parameters input in the input areas 803 and 805 are set. That is, the control unit 106 acquires recipe data that satisfies the search conditions and layout data related to the recipe data. Then, the control unit 106 associates the information about the acquired recipe data with the information about the layout data and controls to display them on the search screen 601.

[0041] Also, the search screen 801 in FIG. 8 is an example, and the number of labels indicating the parameters and input areas for inputting the values of the parameters displayed on the search screen 801 can be arbitrarily determined. Also, regarding the search conditions, not only the condition of whether or not it matches the value of the parameter, but also other search conditions such as a condition for specifying the range of the value of the parameter and a condition for using a wild card may be displayed with labels and input areas so that they can be input. Also, recipe data that satisfies some of the plurality of search conditions may be displayed, or recipe data that satisfies all of the plurality of search conditions may be displayed.

[0042] As described above, according to the information processing apparatus according to the present embodiment, information on recipe data and information on layout data that satisfy a predetermined search condition are displayed on the search screen, so that an operator can search for recipe data in a shorter time.

[0043] <Fourth Embodiment> Next, an information processing apparatus according to the fourth embodiment will be described. Note that matters not mentioned here may follow the first embodiment. In the fourth embodiment, an example will be described in which an information processing apparatus disposed outside the substrate processing apparatus controls to associate information on recipe data and information on layout data and display them on a search screen.

[0044] FIG. 9 is a diagram showing the configuration of the information processing apparatus according to the fourth embodiment. The information processing apparatus can be realized by a computer (information processing apparatus) communicably connected to the substrate processing apparatus. In FIG. 9, a CPU 901 (processing unit) is a central processing unit (CPU) that executes an OS (Operating System) and various application programs. Further, the CPU 901 is not limited to the central processing unit (CPU), and may be a processor or a circuit such as a microprocessing unit (MPU), a graphics processing unit (GPU), or an application specific integrated circuit (ASIC). Further, the CPU 901 may be any combination of these processors or circuits.

[0045] The ROM 902 is a memory that stores fixed data among the programs and calculation parameters executed by the CPU 901. The RAM 903 is a memory that provides a work area and a temporary storage area for data of the CPU 901. The ROM 902 and the RAM 903 are connected to the CPU 901 via a bus 908.

[0046] 905 is an input device (input unit) including a mouse, a keyboard, etc., and 906 is a display device (display unit) such as a CRT or a liquid crystal display. The input device 905 and the display device 906 serve as a user interface of the information processing apparatus. Further, the input device 905 and the display device 906 may be an integrated device such as a touch panel. Further, the input device 905 and the display device 906 may be configured as devices separate from the computer.

[0047] 904 is a storage device such as a hard disk drive, CD, DVD, memory card, etc., and stores various data such as various programs and recipe data. The input device 905, the display device 906, and the storage device 904 are each connected to the bus 908 via an interface (not shown). Also, a communication device 907 for connecting to a network and performing communication is connected to the bus 908. The communication device 907 is used, for example, when connecting to a LAN and performing data communication according to a communication protocol such as TCP / IP and communicating with other communication devices. The communication device 907 functions as a data transmission unit and a reception unit. For example, it receives information regarding recipe data, information regarding layout data, etc. from a transmission unit (not shown) in the substrate processing device and stores it in the storage device 904.

[0048] The information processing apparatus according to the present embodiment is disposed outside the substrate processing apparatus, and controls to associate and display on a search screen information regarding recipe data and information regarding layout data acquired from the storage device 904 and the like.

[0049] <Embodiment of a method for manufacturing an article> As an article, for example, a method for manufacturing a device (such as a semiconductor device, a magnetic storage medium, a liquid crystal display element, etc.), a color filter, or a hard disk will be described. Such a manufacturing method includes a step of forming a pattern on a substrate (such as a wafer, a glass plate, a film-like substrate, etc.) using a pattern forming apparatus (such as an exposure apparatus, an imprint apparatus, a drawing apparatus, etc.). Such a manufacturing method further includes a step of processing the substrate on which the pattern is formed. The processing step may include a step of removing the remaining film of the pattern. Also, it may include other well-known steps such as a step of etching the substrate using the pattern as a mask. The method for manufacturing an article in the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the prior art.

[0050] <Other embodiments> The present invention can also be implemented by supplying a program that realizes one or more functions of the above-described embodiments to a system or apparatus via a network or a storage medium, and causing one or more processors in a computer of the system or apparatus to read and execute the program. It can also be implemented by a circuit (e.g., ASIC) that realizes one or more functions.

[0051] As described above, the preferred embodiments of the present invention have been described. Needless to say, the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of the gist thereof.

[0052] As an example of a substrate processing apparatus, an exposure apparatus has been described, but the present invention is not limited thereto. As an example of a substrate processing apparatus, an imprint apparatus that forms a composition in which the shape of a mold is transferred by bringing an imprint material supplied onto a substrate into contact with a mold (master, mold) and applying energy for curing to the imprint material may be used. Further, as an example of a substrate processing apparatus, a drawing apparatus that forms a pattern on a substrate by performing drawing on the substrate with a charged particle beam (such as an electron beam or an ion beam) via a charged particle optical system may be used. The substrate processing apparatus may also include an apparatus that performs a process other than the process performed by an apparatus such as the exposure apparatus described above in the manufacture of an article such as a device, such as a coating apparatus that coats a photosensitive medium on the surface of the substrate, and a developing apparatus that develops a substrate onto which a pattern has been transferred. Further, as an example of a substrate processing apparatus, the present invention may also include an apparatus that inspects a processed substrate, such as an overlay inspection apparatus, a line width inspection apparatus, a pattern inspection apparatus, and an electrical characteristic inspection apparatus.

[0053] Further, the first to fourth embodiments can be implemented not only alone but also in any combination of the first to fourth embodiments.

Claims

1. An information processing apparatus for controlling the display of a user interface, comprising: an acquisition unit that acquires recipe data regarding processing conditions of a substrate processing apparatus that processes a substrate and layout data regarding the arrangement of a processed portion of the substrate processed by the substrate processing apparatus; a display control unit that controls such that information regarding the layout data acquired by the acquisition unit and information regarding recipe data associated with the layout data are associated and displayed on the user interface; The display control unit controls such that a layout image obtained by imaging information regarding the arrangement as information regarding the layout data is displayed on the user interface, and a thumbnail image of the layout image is displayed. An information processing apparatus characterized by the above.

2. The information processing apparatus according to claim 1, wherein the display control unit controls such that a plurality of the thumbnail images are arranged and displayed on the user interface.

3. The information processing apparatus according to claim 1 or 2, wherein the display control unit controls such that information regarding a plurality of the recipe data is associated with information regarding one layout data and displayed on the user interface.

4. The information processing apparatus according to any one of claims 1 to 3, wherein the display control unit controls such that information regarding a plurality of the layout data is associated with information regarding one recipe data and displayed on the user interface.

5. The information processing apparatus according to claim 4, wherein when the display control unit displays a part of information regarding a plurality of the layout data on the user interface, the display control unit controls such that all of the information regarding the plurality of the layout data is displayed according to an input from the user interface.

6. The display control unit controls to display, on the user interface, a display for inputting search conditions based on information regarding the recipe data and information regarding the layout data, The acquisition unit acquires the recipe data and layout data that satisfy the search conditions input from the user interface. The information processing apparatus according to any one of claims 1 to 5.

7. The display control unit controls to display, on the user interface, the information regarding the layout data and the information regarding the recipe data related to the layout data side by side, so that the information regarding the layout data and the information regarding the recipe data related to the layout data are associated with each other. The information processing apparatus according to any one of claims 1 to 6.

8. The display control unit controls to display, on the user interface, a line connecting the information regarding the layout data and the information regarding the recipe data related to the layout data, so that the information regarding the layout data and the information regarding the recipe data related to the layout data are associated with each other. The information processing apparatus according to any one of claims 1 to 7.

9. The display control unit controls to display, on the user interface, the information regarding the layout data and the information regarding the recipe data related to the layout data using a color in which they are related, so that the information regarding the layout data and the information regarding the recipe data related to the layout data are associated with each other. The information processing apparatus according to any one of claims 1 to 8.

10. A display control method for controlling the display of a user interface, An acquisition step of acquiring recipe data regarding processing conditions of a substrate processing apparatus for processing a substrate and layout data regarding the arrangement of a processed portion of the substrate processed by the substrate processing apparatus; A display control step of controlling so that information regarding the layout data and information regarding recipe data related to the layout data acquired in the acquisition step are associated and displayed on the user interface, and having; The display control step uses the information regarding the arrangement as the information regarding the layout data Controlling so that a layout image obtained by imaging is displayed on the user interface and a thumbnail image of the layout image is displayed; A display control method characterized by the above.

11. A program for causing a computer to execute a display control method for controlling the display of a user interface, An acquisition step of acquiring recipe data regarding processing conditions of a substrate processing apparatus for processing a substrate and layout data regarding the arrangement of a processed portion of the substrate processed by the substrate processing apparatus; A display control step of controlling so that information regarding the layout data and information regarding recipe data related to the layout data acquired in the acquisition step are associated and displayed on the user interface, and having; The display control step uses the information regarding the arrangement as the information regarding the layout data Controlling so that a layout image obtained by imaging is displayed on the user interface and a thumbnail image of the layout image is displayed; A program for causing a computer to execute a display control method characterized by the above.

12. A substrate processing apparatus for processing a substrate, Having the information processing apparatus according to any one of claims 1 to 9, The information processing apparatus controls the display of the user interface of the substrate processing apparatus A substrate processing apparatus characterized by the above.

13. A substrate processing apparatus for processing a substrate, a display unit that associates and displays layout data regarding the arrangement of the portion to be processed of the substrate processed by the substrate processing apparatus and information regarding recipe data regarding the processing conditions of the substrate processing apparatus related to the layout data; a control unit that controls the display unit, and the control unit controls such that a layout image obtained by imaging the information regarding the arrangement as information regarding the layout data is displayed on the display unit and a thumbnail image of the layout image is displayed. A substrate processing apparatus characterized by the above.

14. Using the substrate processing apparatus according to claim 12 or 13, a step of processing a substrate, and a step of manufacturing an article from the substrate processed in the above step, and having A method for manufacturing an article characterized by the above.

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