Component processing device

Abstract

Detect the occurrence of troubles in the mechanical part including the voice coil motor with higher accuracy. 【Solution means】The component processing apparatus according to one aspect of the present disclosure is an apparatus that performs predetermined processing on a workpiece. This component processing apparatus includes a workpiece holding unit that holds the workpiece and is movable forward and backward, a forward and backward drive unit that applies an external force to the workpiece holding unit so that the workpiece holding unit moves forward and backward, and a load detection unit that is provided in the forward and backward drive unit and detects the load applied to the workpiece holding unit. The forward and backward drive unit includes a drive motor that generates a driving force and a voice coil motor that limits the load applied to the workpiece holding unit.

Description

Technical Field

[0001] The present disclosure relates to a component processing apparatus.

Background Art

[0002] Patent Document 1 discloses an electronic component holding apparatus provided with a voice coil motor.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present disclosure provides a component processing apparatus useful for more accurately detecting the occurrence of troubles in a mechanism portion including a voice coil motor.

Means for Solving the Problems

[0005] The component processing apparatus according to one aspect of the present disclosure is an apparatus that performs a predetermined process on a workpiece. This component processing apparatus includes a workpiece holding portion that holds the workpiece and is movable forward and backward, a forward and backward drive portion that applies an external force to the workpiece holding portion so that the workpiece holding portion moves forward and backward, and a load detection portion that is provided in the forward and backward drive portion and detects the load applied to the workpiece holding portion. The forward and backward drive portion includes a drive motor that generates a driving force and a voice coil motor that limits the load applied to the workpiece holding portion.

Effects of the Invention

[0006] According to the present disclosure, there is provided a component processing apparatus useful for more accurately detecting the occurrence of troubles in a mechanism portion including a voice coil motor.

Brief Description of the Drawings

[0007]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

MODE FOR CARRYING OUT THE INVENTION

[0008] Hereinafter, an embodiment will be described with reference to the drawings. In the description, the same reference numerals are given to the same elements or elements having the same function, and redundant description is omitted.

[0009] [Component Processing Apparatus] FIG. 1 is a plan view schematically showing a component processing apparatus according to an embodiment. A component processing apparatus 1 shown in FIG. 1 is an apparatus that performs a predetermined process on a workpiece to be processed (hereinafter referred to as “workpiece W”). The component processing apparatus 1 is, for example, a dicing saw, and is an apparatus that classifies the workpiece W into good products and defective products while conveying the workpiece W, and then accommodates the workpiece W in an accommodating member. The component processing apparatus 1 may be an apparatus that mounts the workpiece W on other components such as a printed circuit board after conveying the workpiece W, that is, a mounter or a bonder. Hereinafter, the content of the present disclosure will be described by taking the case where the component processing apparatus 1 is a dicing saw as an example.

[0010] The component processing apparatus 1 may accommodate the work W determined to be a non-defective product through inspection in an accommodating member, or may accommodate the work W in different accommodating members according to the classification result by inspection. The component processing apparatus 1 may accommodate the work W in the accommodating member in a removable state. In one example, after the work W is accommodated in the accommodating member in the component processing apparatus 1, the work W is taken out from the accommodating member and subjected to another process in an apparatus different from the component processing apparatus 1. The inspection performed by the component processing apparatus 1 includes, for example, appearance inspection or electrical characteristic inspection. In addition to the inspection of the work W, the component processing apparatus 1 may perform marking. The accommodating member that accommodates the work W after inspection by the component processing apparatus 1 is, for example, a carrier tape, a tray, or a wafer sheet.

[0011] The work W to which the process by the component processing apparatus 1 is applied is an electronic component. The type of the work W (electronic component) is not limited, and specific examples of the work W include passive components such as resistors, capacitors, and inductors, active components such as transistors, diodes, and integrated circuits, LEDs, and sensors that detect physical quantities. The work W may be configured by combining two or more types of components. The electronic component as the work W also includes semiconductor components (electronic components using semiconductor materials). The work W may be a component formed in a pre-process of semiconductor manufacturing and then diced or the like into individual pieces.

[0012] As shown in FIG. 1, the component processing apparatus 1 includes, for example, a rotary transfer unit 10, a plurality of processing units 40, and a controller 100. The rotary transfer unit 10 transfers the work W along a circular orbit CR. The work W to be transferred may have main surfaces Wa and Wb facing each other (parallel to each other) (see FIG. 2). The rotary transfer unit 10 includes, for example, a support unit 12, a plurality of work holding units 14, a rotary drive unit 16, one or more forward / backward drive units 18, and an angle detection unit 90.

[0013] The support part 12 is configured to support a plurality of work holding parts 14. The support part 12 supports the plurality of work holding parts 14 such that each work holding part 14 is located on the circular orbit CR. The support part 12 is provided so as to be rotatable about the central axis Ax of the circular orbit CR. The circular orbit CR may be a horizontal circular orbit, and the central axis Ax may be a vertical axis. In FIG. 1 and the like, the direction in which the central axis Ax extends is represented by the "Z-axis". The support part 12 is, for example, a turntable. Hereinafter, it will be described assuming that the Z-axis direction is the vertical direction.

[0014] The plurality of work holding parts 14 are arranged at equal intervals along the circumference centered on the central axis Ax and are fixed to the support part 12. Each of the plurality of work holding parts 14 is configured to hold the work W and is provided so as to be able to move forward and backward. At least a part of each work holding part 14 can move forward and backward in the Z-axis direction (vertical direction), for example. The work holding part 14 may hold the work W in any manner. Specific examples of the manner in which the work holding part 14 holds the work W include vacuum adsorption, electrostatic adsorption, and gripping. The work holding part 14 may vacuum-adsorb either the main surface Wa or Wb from one side in the direction perpendicular to the support part 12 (for example, the upper surface of the turntable).

[0015] FIG. 2 is a side view schematically showing a part of the component processing apparatus. In one example, the work holding part 14 includes an adsorption part 22, a holder 24, and a spring 26, as shown in FIG. 2. The adsorption part 22 (work holding part) is configured to adsorb either the main surface Wa or Wb of the work W from above. The adsorption part 22 is, for example, an adsorption rod formed to extend perpendicularly to the support part 12, and adsorbs and holds the work W at its lower end. The holder 24 is fixed to the outer peripheral part of the support part 12 and holds the adsorption part 22 so as to be able to move up and down. As described above, the adsorption part 22 holds the work W by adsorption and can move forward and backward in the Z-axis direction.

[0016] Spring 26 resists the downward movement of the suction part 22 due to its elasticity. When a downward external force is applied to the upper end of the suction part 22, spring 26 elastically deforms in response to the downward movement of the suction part 22, and when the downward external force disappears, it elastically returns and pushes the suction part 22 back to the height before the downward movement. Spring 26 is also referred to as a "support spring". The work holding part 14 may have a valve for switching on and off the vacuum suction by the suction part 22 in response to an operation instruction from the controller 100. Specific examples of the valve include an electromagnetic valve and the like.

[0017] Returning to FIG. 1, the rotation drive part 16 is configured to rotate the support part 12 around the central axis Ax of the circular orbit CR. The rotation drive part 16 rotates the support part 12 around the central axis Ax by a direct drive without using a gear, for example, using a power source such as an electric motor. As a result, the plurality of work holding parts 14 move along the horizontal circular orbit CR centered on the central axis Ax. That is, the rotation drive part 16 moves the plurality of work holding parts 14 along the circular orbit CR. As a result, the work W held by the work holding part 14 is conveyed along the circular orbit CR.

[0018] The rotation drive part 16 is controlled by the controller 100 to repeat the rotation and stop of the support part 12 at the angular pitch (angular pitch around the central axis Ax) between adjacent work holding parts 14. Hereinafter, the plurality of positions where the plurality of work holding parts 14 (more specifically, the plurality of suction parts 22) are respectively arranged when the rotation drive part 16 stops the support part 12 are referred to as "plurality of stop positions SP".

[0019] The advancing / retreating drive unit 18 or more is configured to individually advance and retreat at least a part of the plurality of work holding units 14. The rotary transfer unit 10 may have a plurality of advancing / retreating drive units 18 as the advancing / retreating drive unit 18 or more. In FIG. 2, one of the plurality of advancing / retreating drive units 18 is shown. The advancing / retreating drive unit 18 is configured to advance and retreat the work holding unit 14 along a predetermined direction. The advancing / retreating drive unit 18 applies an external force to the corresponding work holding unit 14 so that the work holding unit 14 disposed at the corresponding stop position SP advances (displaces). Thereby, the work holding unit 14 disposed at the corresponding stop position SP moves downward, which is one side in the direction perpendicular to the support unit 12.

[0020] The plurality of advancing / retreating drive units 18 may be provided so as to correspond to all of the plurality of stop positions SP. The advancing / retreating drive unit 18 may not be provided at the stop position SP where it is not necessary to advance and retreat the work holding unit 14. When viewed from the Z-axis direction, the advancing / retreating drive unit 18 is disposed at or near the corresponding stop position SP. The advancing / retreating drive unit 18 is provided so as to be located above the work holding unit 14 disposed at the corresponding stop position SP. The advancing / retreating drive unit 18 moves the work holding units 14 sequentially disposed at the corresponding stop position SP downward. The stop position SP where the advancing / retreating drive unit 18 is disposed is also a position (acting position) where the advancing / retreating drive unit 18 applies a force to any of the plurality of work holding units 14.

[0021] Although omitted in FIGS. 1 and 2, the rotary transfer unit 10 may have a member for fixing the plurality of advancing / retreating drive units 18. The plurality of advancing / retreating drive units 18 are provided so as not to rotate together even when the support unit 12 rotates. Details of the advancing / retreating drive unit 18 will be described later.

[0022] The angle detection unit 90 is a sensor that detects the rotation angle of the support unit 12. The rotation angle represents the rotational position of the support unit 12 in the circumferential direction around the central axis Ax. The angle detection unit 90 may detect the position (i.e., the rotation angle) in the circumferential direction of the reference position of the support unit 12. The angle detection unit 90 may be provided in the rotation drive unit 16 that rotates the support unit 12. The angle detection unit 90 may be any sensor as long as it can acquire information indicating the rotation angle of the support unit 12. In one example, the angle detection unit 90 is a rotary encoder or a slit sensor.

[0023] Instead of the rotation drive unit 16, the angle detection unit 90 may be provided to detect the rotation angle of the shaft member along the central axis Ax of the support unit 12. The angle detection unit 90 may be provided directly on the shaft member, or may be provided at a position away from the shaft member (central axis Ax). In one example, the angle detection unit 90 is connected to the shaft member and provided on a transmission member including a belt and a pulley.

[0024] The angle detection unit 90 outputs information indicating the rotation angle of the support unit 12 to the controller 100. The angle detection unit 90 may repeatedly execute the acquisition and output of information indicating the rotation angle of the support unit 12 at a predetermined measurement cycle. The angle detection unit 90 may continuously execute the acquisition and output of information indicating the rotation angle of the support unit 12 while the component processing apparatus 1 is operating.

[0025] The plurality of processing units 40 are provided to correspond to several stop positions SP. Different from the example shown in FIG. 1, a processing unit 40 may be provided at each of all the stop positions SP. The processing unit 40 is configured to perform a predetermined process on the workpiece W in a processing area including the corresponding stop position SP. In the present disclosure, for the sake of convenience of explanation, the process performed by each processing unit 40 on the workpiece W is referred to as "unit process" in order to distinguish it from the overall process by the component processing apparatus 1. The retraction / extension drive unit 18 is arranged at the stop position SP where a processing area for executing the unit process by the processing unit 40 is set.

[0026] In the present disclosure, the "unit process" performed on the workpiece W includes any act of changing the state of the workpiece W. For example, performing marking or the like on the workpiece W, holding (delivering) the workpiece W in the workpiece holding unit 14, and the workpiece holding unit 14 delivering the workpiece W correspond to the "unit process". Also, performing any inspection on the workpiece W also corresponds to the "unit process" because the inspection data changes from an unknown state to a known state. The plurality of processing units 40 includes, for example, a component supply unit 42, a component recovery unit 44, and one or more intermediate processing units 46.

[0027] The component supply unit 42 is a unit that supplies the workpiece W to the rotary transfer unit 10. The component supply unit 42 is disposed at any one of the stop positions SP. In one example, the component supply unit 42 conveys the storage member so that each storage portion in the storage member in a state of accommodating a plurality of workpieces W is sequentially disposed at the corresponding stop position SP. With the storage portion accommodating the workpiece W disposed at the corresponding stop position SP, the workpiece holding unit 14 disposed at that stop position SP is displaced by the forward and backward drive unit 18 while receiving the workpiece W in the storage portion. Thereby, the workpiece W is supplied from the component supply unit 42 to the rotary transfer unit 10. Hereinafter, the stop position SP at which the component supply unit 42 supplies the workpiece W is referred to as the "supply stop position SP".

[0028] The component recovery unit 44 is a unit that recovers the workpiece W from the rotary transfer unit 10. The component recovery unit 44 is disposed at any one of the stop positions SP. In one example, the component recovery unit 44 conveys the storage member so that each empty storage portion in the storage member capable of accommodating a plurality of workpieces W is sequentially disposed at the corresponding stop position SP. With the storage portion not accommodating the workpiece W disposed at the corresponding stop position SP, the workpiece holding unit 14 disposed at that stop position SP is displaced by the forward and backward drive unit 18 while delivering the workpiece W into the storage portion. Thereby, the workpiece W is recovered from the rotary transfer unit 10 to the component recovery unit 44. Hereinafter, the stop position SP at which the component recovery unit 44 recovers the workpiece W is referred to as the "recovery stop position SP".

[0029] The intermediate processing unit 46 is a unit that performs a predetermined unit process on the workpiece W at any stop position SP other than the supply and recovery stop positions SP. Specific examples of the unit process by the intermediate processing unit 46 include electrical characteristic inspection, optical characteristic inspection, correction of at least one of the posture and position, and marking (laser marking). In order to transfer the workpiece W to and from the intermediate processing unit 46 or to execute the unit process in the intermediate processing unit 46, the workpiece holding unit 14 disposed at the corresponding stop position SP may be displaced by the forward and backward drive unit 18.

[0030] (Forward and Backward Drive Unit) With reference to FIGS. 2 and 3, an example of the details of the forward and backward drive unit 18 will be described. As shown in FIG. 2, the forward and backward drive unit 18 includes a fixed base portion 52, a drive motor 54, a movable base portion 55, a first spring 56, a voice coil motor 60, a first forward and backward rod 72, a holder 73, a second spring 74, and a second forward and backward rod 76.

[0031] The fixed base portion 52 is a base portion that supports members other than the fixed base portion 52 of the forward and backward drive unit 18. The fixed base portion 52 is fixed at a predetermined position in the component processing apparatus 1. The fixed base portion 52 is connected to a member for fixing the forward and backward drive unit 18 so that the support portion 12 does not move even when it rotates. The fixed base portion 52 includes, for example, a first portion extending horizontally, a second portion connected to one end of the first portion and extending downward along the Z-axis direction, and a third portion connected to the lower end of the second portion and extending horizontally so that a part thereof overlaps the first portion.

[0032] The drive motor 54 is a motor that generates a driving force. The drive motor 54 may be a servo motor. When the movable parts (the first forward / backward rod 72 and the second forward / backward rod 76) in the forward / backward drive unit 18 move and contact the work holding part 14, an external force acts on the work holding part 14. The drive motor 54 generates a driving force for moving the above-mentioned movable parts (the first forward / backward rod 72 and the second forward / backward rod 76). In other words, the drive motor 54 drives the above-mentioned movable parts (the first forward / backward rod 72 and the second forward / backward rod 76).

[0033] The drive motor 54 may include a position detector 54a. The position detector 54a is a sensor that detects the rotational position of the drive motor 54. The position detector 54a is, for example, a rotary encoder. The position detector 54a may output information indicating the detected rotational position to the controller 100. Based on the detection result by the position detector 54a, the position of the above-mentioned movable part (for example, the tip of the above-mentioned movable part) in the Z-axis direction can be grasped. The drive motor 54 may be provided on the above-mentioned first part of the fixed base part 52.

[0034] The movable base part 55 is a base part that is movably provided with respect to the fixed base part 52. The movable base part 55 is provided so as to be movable (ascendable and descendable) along the Z-axis direction. The movable base part 55 is arranged between the above-mentioned first part and the above-mentioned third part of the fixed base part 52 in the Z-axis direction. The movable base part 55 includes, for example, a first part that extends horizontally, a second part that is connected to one end of the first part and extends downward in the Z-axis direction, and a third part that is connected to the lower end of the second part and extends horizontally so that a part thereof overlaps the first part.

[0035] The first spring 56 is provided between the third part of the movable base portion 55 and the third part of the fixed base portion 52. Due to its elasticity, the first spring 56 resists the downward movement of the movable base portion 55. When a downward external force is applied to the movable base portion 55, the first spring 56 elastically deforms in response to the downward movement of the movable base portion 55, and when the downward external force disappears, it elastically returns and pushes the movable base portion 55 back to the height before the descent. The first spring 56 functions as a push-up spring. The upward force applied to the movable base portion 55 by the first spring 56 is denoted as "force F1". The first spring 56 supports the self-weight of the movable base portion 55 and the portion supported by the movable base portion 55 in the forward and backward drive unit 18.

[0036] The voice coil motor 60 limits the load applied to the work holding portion 14. The voice coil motor 60 has a function of limiting the force acting on the work holding portion 14 by the forward and backward drive unit 18. By continuing to apply a predetermined voltage (or a voltage within a predetermined range) to the voice coil motor 60, the load applied to the work holding portion 14 is limited to a load corresponding to the predetermined voltage (or the voltage within the predetermined range). The value of the voltage applied to the voice coil motor 60 may be determined in advance according to the value of the load to be limited for the work holding portion 14.

[0037] The voice coil motor 60 is a linear motor that generates linear motion using electromagnetic force. The voice coil motor 60 includes a stator 62 and a mover 64. In the example shown in FIG. 3, the stator 62 and the mover 64 are arranged side by side along the Z-axis direction (predetermined direction). In this case, when viewed from the Z-axis direction, at least a part of the stator 62 overlaps at least a part of the mover 64. The voice coil motor 60 may be provided with a case that houses the stator 62 and a part of the mover 64. The stator 62 includes a coil, and the mover 64 includes a magnet. When an electric current flows through the coil of the stator 62, the coil of the stator 62 generates a force that draws the mover 64 closer to itself according to the electric current (current value).

[0038] The stator 62 is connected to the first portion of the movable base portion 55. Therefore, when the movable base portion 55 is driven by the drive motor 54, the entire voice coil motor 60 moves (descends). In the voice coil motor 60, an upward pulling force is applied to the mover 64 along with the application of voltage (supply of current). The upward force generated in the voice coil motor 60 is denoted as "force Fv".

[0039] The first advance / retreat rod 72 is formed in a rod shape so as to extend along the Z-axis direction. The upper end of the first advance / retreat rod 72 is connected to the mover 64 of the voice coil motor 60. The holder 73 is a portion that supports the first advance / retreat rod 72. The holder 73 may support the lower end portion of the first advance / retreat rod 72 in the Z-axis direction. The holder 73 may be formed so as to extend inward from the location where it supports the first advance / retreat rod 72. "Inward" means the direction toward the central axis Ax.

[0040] The second spring 74 (spring) is disposed between the portion connected to the stator 62 of the advance / retreat drive unit 18 and the portion connected to the mover 64. The second spring 74 is configured to generate a force in the direction opposite to the force generated by the voice coil motor 60. In one example, the movable base portion 55 includes a connection portion 55a that extends downward from the lower surface of the horizontally extending first portion. The second spring 74 is provided between the connection portion 55a of the movable base portion 55 and the holder 73. The second spring 74 applies a downward force to the holder 73 by its elasticity. The second spring 74 functions as a push-down spring (compression spring). The downward force applied by the second spring 74 is denoted as "force F2".

[0041] The second advance / retreat rod 76 is formed in a rod shape so as to extend along the Z-axis direction. The upper end portion of the second advance / retreat rod 76 is connected to the holder 73, and the second advance / retreat rod 76 is supported by the holder 73. The lower end of the second advance / retreat rod 76 is provided at a position where it can contact the upper end of the suction portion 22 (suction rod) of the work holding portion 14.

[0042] In the forward and backward drive unit 18 exemplified above, the movable part connected to the mover 64 of the voice coil motor 60 is composed of a first forward and backward rod 72, a holder 73, and a second forward and backward rod 76. A force Fv by the voice coil motor 60 is applied upward to this movable part, and a force F2 by the second spring 74 is applied downward.

[0043] The forward and backward drive unit 18 exemplified in FIG. 2 is in a state where it does not push down the suction part 22 of the work holding part 14 (hereinafter referred to as the "neutral state"). In the neutral state, a voltage is applied to the voice coil motor 60. In the neutral state, a balance is taken between the force Fv and the force F2.

[0044] FIG. 3 exemplifies a state where the forward and backward drive unit 18 is pushing down the suction part 22 (hereinafter referred to as the "pushing down state"). In the pushing down state, a downward force F0 is applied to the movable base part 55 by the drive of the drive motor 54. While taking a balance between the force Fv and the force F2, by applying the force F0, the movable part including the first forward and backward rod 72 and the second forward and backward rod 76 descends, and the lower end (tip) of the second forward and backward rod 76 contacts the suction part 22. Then, so as to overcome the upward force by the spring 26, the movable part including the first forward and backward rod 72 and the second forward and backward rod 76 pushes down the suction part 22. In FIG. 3, a state is exemplified in which a downward force Fd is applied from the tip of the second forward and backward rod 76 to the suction part 22, and a force Fr representing the reaction force of the spring 26 corresponding to the force Fd is generated. By taking a balance between the force Fv and the force F2, that is, by providing the second spring 74, position control becomes possible in the drive by the drive motor 54.

[0045] (Load detection unit) The component processing apparatus 1 includes a load detection unit 80. The load detection unit 80 is provided in the forward and backward drive unit 18. In the component processing apparatus 1, a load detection unit 80 may be provided for each forward and backward drive unit 18. That is, the component processing apparatus 1 may include a plurality of load detection units 80 corresponding to the plurality of forward and backward drive units 18. The load detection unit 80 is a sensor that detects the load applied to the work holding unit 14. When the forward and backward drive unit 18 applies a force to the work holding unit 14, it receives a reaction force corresponding to that force. The load detection unit 80 can detect the reaction force received from the work holding unit 14 (the load received by the second forward and backward rod 76 from the work holding unit 14).

[0046] The load detection unit 80 may detect the load by any method. The load detection unit 80 may be a mechanical sensor that detects a change in the electrical resistance value such as a strain gauge, or may be a load cell. The load detection unit 80 outputs information indicating the magnitude of the load (load value) to the controller 100. The load detection unit 80 may repeatedly execute the acquisition and output of information indicating the magnitude of the load at a predetermined measurement cycle. The load detection unit 80 may continuously execute the acquisition and output of information indicating the magnitude of the load while the component processing apparatus 1 is operating.

[0047] The load detection unit 80 may be provided in a portion of the forward and backward drive unit 18 that is connected to the mover 64 of the voice coil motor 60. In the example shown in FIG. 2, the portion of the forward and backward drive unit 18 that is connected to the mover 64 is a portion composed of the first forward and backward rod 72, the holder 73, and the second forward and backward rod 76. For example, the load detection unit 80 is provided on the second forward and backward rod 76. In one example, the load detection unit 80 is provided in the vicinity of the upper end of the second forward and backward rod 76.

[0048] (Control Example by Controller) Returning to FIG. 1, the controller 100 is constituted by one or a plurality of control computers. The controller 100 controls the rotary transfer unit 10 and the plurality of processing units 40 according to a predetermined control procedure so that a predetermined process is sequentially performed on the plurality of workpieces W. For example, the controller 100 controls the rotary transfer unit 10 and the plurality of processing units 40 so that while transporting the plurality of workpieces W along the circular orbit CR, corresponding unit processes are performed on the workpieces W at some stop positions SP.

[0049] The controller 100 may intermittently rotate the support portion 12 by the rotary drive unit 16 so that the plurality of workpiece holding portions 14 are sequentially arranged at the plurality of stop positions SP. Intermittent rotation means alternately repeating the rotation and stop of the support portion 12. The controller 100 may intermittently rotate the support portion 12 by the rotary drive unit 16 at the same pitch as the angular pitch between adjacent workpiece holding portions 14 on the circular orbit CR. Thereby, any one of the workpiece holding portions 14 (any one of the suction portions 22) is sequentially arranged at each stop position SP.

[0050] The controller 100 may control the advance / retreat drive unit 18, the workpiece holding portion 14, and the component supply unit 42 so that the workpiece W is supplied to the rotary transfer unit 10 at the supply stop position SP. In one example, the controller 100 lowers the suction portion 22 of the workpiece holding portion 14 by the corresponding advance / retreat drive unit 18 in a state where the housing portion in which the workpiece W is housed by the component supply unit 42 is arranged at the supply stop position SP. The controller 100 operates the advance / retreat drive unit 18 so that the suction portion 22 descends to such an extent that the lower end of the suction portion 22 contacts the main surface Wa of the workpiece W, or reaches a position immediately before contact. The controller 100 may control the advance / retreat drive unit 18 so that the suction portion 22 returns to the height before descent after the suction portion 22 sucks the main surface Wa.

[0051] The controller 100 may control the forward and backward drive unit 18, the work holding unit 14, and the component recovery unit 44 so that the work W is recovered from the rotary transfer unit 10 to the storage member at the recovery stop position SP. In one example, the controller 100 lowers the suction portion 22 of the work holding unit 14 by the corresponding forward and backward drive unit 18 with the empty storage portion arranged at the recovery stop position SP by the component recovery unit 44. The controller 100 operates the forward and backward drive unit 18 so that the suction portion 22 descends to such an extent that the main surface Wb of the work W held by the suction portion 22 contacts the storage portion or reaches a position immediately before contact. After releasing the suction of the work W by the suction portion 22, the controller 100 may control the forward and backward drive unit 18 so that the suction portion 22 returns to the height before descent.

[0052] The controller 100 may control the forward and backward drive unit 18, the work holding unit 14, and the intermediate processing unit 46 so that unit processing is performed on the work W at a stop position SP other than the supply and recovery stop positions SP. In one example, the controller 100 moves the suction portion 22 forward and backward by the corresponding forward and backward drive unit 18 with the suction portion 22 arranged at the stop position SP for performing unit processing.

[0053] The controller 100 may acquire the detection value by the load detection unit 80. While the component processing apparatus 1 is operating, the controller 100 may repeatedly acquire the detection value from the load detection unit 80 at a predetermined measurement cycle. While the forward and backward drive unit 18 moves the work holding unit 14 (suction portion 22) forward and backward, the controller 100 may monitor the detection value by the load detection unit 80. Based on the detection value of the load detection unit 80, the controller 100 may adjust the voltage value applied to the voice coil motor 60. The controller 100 may perform closed-loop control to adjust the voltage value applied to the voice coil motor 60 so that the detection value of the load detection unit 80 follows a predetermined target load. While performing this closed-loop control, the controller 100 may monitor the presence or absence of an abnormality in the detected load value.

[0054] FIG. 4 shows a graph schematically representing the temporal changes in the position of the elevating portion including the second advancing / retreating rod 76 and the like of the advancing / retreating drive unit 18, the position of the suction unit 22, and the detection value by the load detection unit 80 during the period in which the advancing / retreating drive unit 18 executes one advancing / retreating operation of the suction unit 22. The position of the elevating portion of the advancing / retreating drive unit 18 and the position of the suction unit 22 represent positions in the Z-axis direction. The position of the elevating portion of the advancing / retreating drive unit 18 in the Z-axis direction may be defined by the height position of the lower end of the second advancing / retreating rod 76, and the position of the suction unit 22 in the Z-axis direction may be defined by the height position of the lower end of the suction unit 22.

[0055] The operation by the advancing / retreating drive unit 18 may be started when the operation by the drive motor 54 of the advancing / retreating drive unit 18 is started. In the portion indicated by "a1" in the graph, the drive of the drive motor 54 for the elevating portion including the movable base portion 55, the voice coil motor 60, the first advancing / retreating rod 72, and the second advancing / retreating rod 76 is started, and the lowering of the elevating portion starts. When the lowering of the elevating portion including the second advancing / retreating rod 76 and the like continues, at time t1, the lower end of the second advancing / retreating rod 76 contacts the upper end of the suction unit 22. As a result, in the portion indicated by "b1" in the graph, the lowering of the suction unit 22 starts. Further, along with the contact between the second advancing / retreating rod 76 and the suction unit 22, the load detection unit 80 starts to detect the load received by the second advancing / retreating rod 76 from the work holding unit 14 (the load applied to the work holding unit 14). Immediately after the contact, in addition to the load received by the second advancing / retreating rod 76, the load detection unit 80 detects a disturbance caused by the collision between the second advancing / retreating rod 76 and the suction unit 22.

[0056] After time t1, the state where the reciprocating drive unit 18 (second reciprocating rod 76) applies a force to the suction unit 22 continues, and the descent of the suction unit 22 continues. While the descent of the suction unit 22 continues, the applied voltage to the voice coil motor 60 is adjusted so that the detection value by the load detection unit 80 follows the target load. Then, at the portions indicated by "a2" and "b2" in the graph, the descent of the second reciprocating rod 76 stops, and accordingly, the descent of the suction unit 22 also stops. In one example, at the recovery stop position SP, the reciprocating drive unit 18 operates so that the suction unit 22 stops at a position where the main surface Wb of the workpiece W held by the suction unit 22 contacts the housing portion of the housing member that houses the workpiece W after recovery or at a position immediately before contact.

[0057] After the state where the second reciprocating rod 76 and the suction unit 22 are stopped continues for a predetermined time, at the portions indicated by "a3" and "b3" in the graph, the ascent of the elevating portion including the second reciprocating rod 76 etc. starts, and accordingly, the ascent of the suction unit 22 also starts. After immediately after the second reciprocating rod 76 and the suction unit 22 come into contact and before the ascent of the elevating portion including the second reciprocating rod 76 etc. and the suction unit 22 starts, the load applied to the workpiece holding unit 14 (the reaction force received from the suction unit 22) is maintained substantially constant by the voice coil motor 60. The fact that the load applied to the workpiece holding unit 14 is substantially constant means that the load acting on the suction unit 22 from the second reciprocating rod 76 is also limited within a certain range.

[0058] When the ascent of the elevating portion including the second reciprocating rod 76 etc. continues, at time t2, the lower end of the second reciprocating rod 76 separates from the upper end of the suction unit 22. As a result, the state where the second reciprocating rod 76 applies a force to the suction unit 22 is released. Consequently, at the portion indicated by "b4" in the graph, the ascent of the suction unit 22 ends (the suction unit 22 returns to the height position before descent). Thereafter, at the portion indicated by "a4" in the graph, the drive of the drive motor 54 for the elevating portion including the second reciprocating rod 76 etc. ends, and the ascent of the elevating portion including the second reciprocating rod 76 etc. ends (the elevating portion of the second reciprocating rod 76 etc. returns to the height position before descent).

[0059] While the controller 100 moves the suction unit 22 forward and backward by the forward and backward drive unit 18, it may detect the occurrence of an abnormality from the detection value by the load detection unit 80. Here, taking the operation of moving the suction unit 22 that holds the workpiece W forward and backward by the forward and backward drive unit 18 at the recovery stop position SP as an example, a method for detecting the occurrence of an abnormality by the controller 100 will be exemplified. In the forward and backward operation, it is assumed that the suction unit 22 is lowered until the main surface Wb of the workpiece W held by the suction unit 22 stops immediately before contacting the housing unit. FIG. 5(a) illustrates the state of the normal operation, and FIG. 5(b) illustrates the state of the abnormal operation.

[0060] In the normal operation shown in FIG. 5(a), for example, the detection result of the load value by the load detection unit 80 changes with time as exemplified in FIG. 4. In the abnormal operation shown in FIG. 5(b), as shown in the part indicated by "A", the voice coil motor 60 does not operate normally, and the stator 62 and the mover 64 collide with each other. Since a trouble has occurred in the voice coil motor 60, the lifting part including the second forward and backward rod 76 descends without the load being restricted by the voice coil motor 60. As a result, the suction unit 22 descends more than in the normal operation, and the workpiece W held by the suction unit 22 collides with the housing unit. Due to this collision, or due to an excessive load being applied to the workpiece W after the collision, an abnormality such as a crack may occur in the workpiece W.

[0061] In the abnormal operation shown in FIG. 5(b), a reaction force corresponding to the collision of the workpiece W or the load applied to the workpiece W after the collision acts on the suction unit 22, and this reaction force is also transmitted to the second forward and backward rod 76. As a result, an abnormal load value different from the normal time is detected by the load detection unit 80. For example, when the detection value by the load detection unit 80 exceeds a predetermined set load, the controller 100 determines that an abnormality has occurred in the lifting part (mechanical part) of the forward and backward drive unit 18.

[0062] As described with reference to FIG. 4, when the second advancing / retreating rod 76 comes into contact with the suction part 22, the detection value by the load detection part 80 includes disturbances. On the other hand, the position of the second advancing / retreating rod 76 in the Z-axis direction correlates with the driving force by the drive motor 54 (in other words, the rotational position of the drive motor 54). Therefore, the controller 100 may determine that an abnormality has occurred in the elevating part (mechanism part) of the advancing / retreating drive part 18 based on the detection result by the position detector 54a of the drive motor 54 and the detection value by the load detection part 80. Specifically, the controller 100 excludes from the determination target the time zone when it is assumed that the contact between the second advancing / retreating rod 76 and the suction part 22 has started, based on the detection result by the position detector 54a, and then determines the presence or absence of an abnormality in the elevating part based on the comparison result between the detection value by the load detection part 80 and the set load.

[0063] The controller 100 may set (change) a threshold value for determining the presence or absence of an abnormality in the elevating part of the advancing / retreating drive part 18 according to the individual of the suction part 22 arranged at the stop position SP (hereinafter referred to as "the target stop position SP") where the target advancing / retreating drive part 18 and the load detection part 80 are provided. There are also individual differences in the spring 26 that applies a reaction force to the suction part 22. Therefore, after the second advancing / retreating rod 76 comes into contact with the suction part 22, the reaction force received by the second advancing / retreating rod 76 from the suction part 22 can vary depending on the individuals of the suction part 22 and the spring 26.

[0064] From the perspective of the above-mentioned individual differences, when determining whether there is an abnormal load by comparing the detected value of the load by the load detection unit 80 with a threshold value, if the determination is made using the same threshold value, even a load value that should be allowed may be determined as abnormal, and even a load value that should not be allowed may be determined as not abnormal. This possibility increases particularly when performing load management with small values. The controller 100 may identify the individual of the suction unit 22 disposed at the target stop position SP based on the detection result of the rotational position of the support unit 12 obtained from the angle detection unit 90. Then, the controller 100 may use the threshold value corresponding to the identified suction unit 22 as the set load. The controller 100 may have threshold values set for each of the plurality of suction units 22 stored in advance.

[0065] When the controller 100 detects an abnormality from the detected value of the load by the load detection unit 80, the controller 100 may stop the operation of the entire component processing apparatus 1. After the operation of the entire component processing apparatus 1 stops, the cause of the abnormality may be investigated by an operator or the like, and measures may be taken against the abnormality. The controller 100 may resume the processing by the component processing apparatus 1 after receiving a user instruction indicating the restart of the component processing apparatus 1 from an operator or the like.

[0066] [Modification Example] In the above example, the controller 100 performs closed-loop control based on the detected value of the load detection unit 80. Instead, the controller 100 may execute an operation of advancing and retracting the work holding unit 14 to the advancing and retracting drive unit 18 according to a preset control procedure. Specifically, the controller 100 may continuously apply a predetermined constant voltage value to the voice coil motor 60 during the period when the advancing and retracting drive unit 18 is executing the operation of advancing and retracting the work holding unit 14. The controller 100 may compare the detected value of the load with the set load while performing control to apply a constant voltage value to the voice coil motor 60 to determine whether an abnormality has occurred.

[0067] In the above example, the reciprocating drive unit 18 moves the work holding unit 14 (suction unit 22) forward and backward in the Z-axis direction along the central axis Ax. However, the direction in which the reciprocating drive unit 18 moves the work holding unit 14 forward and backward is not limited to the direction along the central axis Ax. The reciprocating drive unit 18 may be configured to move the work holding unit 14 forward and backward along the radial direction of a circle centered on the central axis Ax. In this case, the central axis Ax may be a vertical axis, a horizontal axis, or an axis inclined in the vertical and horizontal directions.

[0068] Here, with reference to FIGS. 6 to 8, an example of the case where the reciprocating drive unit moves the work holding unit forward and backward along the above radial direction will be described in detail. The component processing apparatus 1 shown in FIG. 6 includes a rotary transfer unit 110 instead of the rotary transfer unit 10. The rotary transfer unit 110 includes a support unit 112, a plurality of work holding units 114, a rotary drive unit 116, one or more reciprocating drive units 118, and an angle detection unit 190. The support unit 112, the work holding unit 114, the rotary drive unit 116, the reciprocating drive unit 118, and the angle detection unit 190 respectively correspond to the support unit 12, the work holding unit 14, the rotary drive unit 16, the reciprocating drive unit 18, and the angle detection unit 90 of the rotary transfer unit 10.

[0069] The support unit 112 is configured to support a plurality of work holding units 114. The support unit 112 supports the plurality of work holding units 114 such that each work holding unit 114 is located on a circular orbit CR1. The support unit 112 is provided so as to be rotatable around the central axis Ax1 of the circular orbit CR1. The central axis Ax1 may be a vertical axis, a horizontal axis, or an axis inclined with respect to both the vertical and horizontal directions. In FIGS. 6 to 8, the direction in which the central axis Ax1 extends is represented by the "Z-axis".

[0070] The support portion 112 includes a rotating body 112a and a plurality of protruding portions 112b. The rotating body 112a is provided so as to rotate around the central axis Ax1. The rotating body 112a is formed in a cylindrical shape or a disk shape, and the central axis Ax1 passes through its center. The plurality of protruding portions 112b radially extend from the outer peripheral surface of the rotating body 112a so as to move away from the central axis Ax1. The plurality of protruding portions 112b are arranged at intervals in the circumferential direction around the central axis Ax1. The number of the plurality of protruding portions 112b coincides with the number of the plurality of workpiece holding portions 114.

[0071] The plurality of workpiece holding portions 114 are arranged at equal intervals along the circumference centered on the central axis Ax1 and are fixed to the plurality of protruding portions 112b of the support portion 112. Each of the plurality of workpiece holding portions 114 is configured to hold the workpiece W and is provided so as to be able to move forward and backward. At least a part of each workpiece holding portion 114 is movable forward and backward in the radial direction of the circle centered on the central axis Ax1. Hereinafter, the radial direction of the circle centered on the central axis Ax1 is simply referred to as the "radial direction". Also, in the radial direction, the direction approaching the central axis Ax1 is referred to as the "inward direction", and the direction moving away from the central axis Ax1 is referred to as the "outward direction".

[0072] The workpiece holding portion 114 may hold the workpiece W in any manner. For example, the main surface Wa of the workpiece W is held by suction. The workpiece holding portion 114 may hold the main surface Wa with the main surface Wb of the workpiece W facing outside the circular orbit CR1.

[0073] In one example, as shown in FIG. 7, the workpiece holding portion 114 includes a suction portion 122, a fixed base portion 123, a movable base portion 124, and a spring 126. The suction portion 122 (workpiece holding portion) is configured to suction the main surface Wa with the main surface Wb of the workpiece W facing outside the circular orbit CR1. In a state where the suction portion 122 holds the workpiece W by suction, the main surface Wa faces the central axis Ax1, and the main surface Wb faces outside the circular orbit CR1. The suction portion 122 is formed in a rod shape so as to extend along the radial direction, for example.

[0074] The fixed base portion 123 is a portion fixed to the corresponding overhanging portion 112b of the support portion 112. The movable base portion 124 is a portion provided so as to be movable along the radial direction with respect to the fixed base portion 123. The movable base portion 124 includes a holder portion 124a that holds the suction portion 122. As the movable base portion 124 is displaced with respect to the fixed base portion 123, the suction portion 122 moves forward and backward along the radial direction. The forward and backward movement of the suction portion 122 includes an operation of moving forward so as to move away from the central axis Ax1 and an operation of moving backward so as to approach the central axis Ax1.

[0075] The spring 126 resists the forward movement of the suction portion 122 (movable base portion 124) by its elastic force. When an outward force is applied to the suction portion 122 (movable base portion 124), the spring 126 elastically deforms in accordance with the displacement of the suction portion 122, and when the outward external force disappears, it elastically returns to push the suction portion 122 back to the original position before forward movement. The spring 126 functions as a tension spring. The work holding portion 114 may have a valve for switching on and off the vacuum suction by the suction portion 122 in response to an operation instruction from the controller 100, similar to the work holding portion 14.

[0076] Returning to FIG. 6, the rotation drive portion 116 is configured to rotate the support portion 112 around the central axis Ax1 of the circular orbit CR1. The rotation drive portion 116 may be a drive portion of the same type as the rotation drive portion 16. By driving the support portion 112 by the rotation drive portion 116, a plurality of work holding portions 114 move along the circular orbit CR1. That is, the rotation drive portion 116 moves a plurality of work holding portions 114 along the circular orbit CR1. As a result, the work W held by the work holding portion 114 is conveyed along the circular orbit CR1.

[0077] The rotation drive unit 116 is controlled by the controller 100 to repeat the rotation and stop of the support unit 112 at the angular pitch (the angular pitch around the central axis Ax1) between adjacent workpiece holding units 114. Hereinafter, when the rotation drive unit 116 stops the support unit 112, a plurality of positions where the plurality of workpiece holding units 114 (more specifically, the plurality of suction units 122) are respectively arranged are referred to as "a plurality of stop positions SP1".

[0078] One or more forward and backward drive units 118 are configured to individually move at least a part of the plurality of workpiece holding units 114 forward and backward. The rotary transfer unit 110 may have a plurality of forward and backward drive units 118 as one or more forward and backward drive units 118. In FIG. 6, one forward and backward drive unit 118 is shown. Although omitted in FIG. 6 and the like, the rotary transfer unit 110 may have a member for fixing the plurality of forward and backward drive units 118. The plurality of forward and backward drive units 118 are provided so as not to rotate together even when the support unit 112 rotates.

[0079] The plurality of forward and backward drive units 118 may be provided so as to correspond to all of the plurality of stop positions SP1. The forward and backward drive unit 118 may not be provided at the stop position SP1 where it is not necessary to move the workpiece holding unit 114 forward and backward. In the component processing apparatus 1 provided with the rotary transfer unit 110, the plurality of processing units 40 may be provided outside the circular orbit CR1. Hereinafter, for the convenience of explanation, focusing on one forward and backward drive unit 118, the forward and backward drive unit 118 will be described. In FIG. 6 and the like, the direction (predetermined direction) in which the forward and backward drive unit 118 moves the workpiece holding unit 114 is represented by the "X-axis". The X-axis direction is orthogonal to the Z-axis direction.

[0080] The advancing / retreating drive unit 118 applies an external force to the work holding unit 114 so that the work holding unit 114 disposed at the corresponding stop position SP1 advances (displaces). As a result, the work holding unit 114 disposed at the corresponding stop position SP1 moves radially outward. When viewed from the Z-axis direction, the advancing / retreating drive unit 118 may be disposed inside the corresponding stop position SP. The advancing / retreating drive unit 118 may be provided so as to be located inside the suction unit 122 of the work holding unit 14 disposed at the corresponding stop position SP. The advancing / retreating drive unit 118 moves the work holding units 114 sequentially disposed at the corresponding stop positions SP radially outward. The stop position SP where the advancing / retreating drive unit 118 is disposed is also a position (acting position) where the advancing / retreating drive unit 118 applies a force to any one of the plurality of work holding units 114.

[0081] The angle detection unit 190 is a sensor that detects the rotation angle of the support unit 112. The angle detection unit 190 may have the same configuration and function as the angle detection unit 90 except for the rotation angle of the detection target.

[0082] As shown in FIG. 7, the advancing / retreating drive unit 118 includes a fixed base unit 152, a drive motor 154, a movable base unit 155, a first spring 156, a voice coil motor 160, a first advancing / retreating rod 172, a holder 173, and a second advancing / retreating rod 176. The fixed base unit 152, the drive motor 154, the movable base unit 155, and the first spring 156 respectively correspond to the fixed base unit 52, the drive motor 54, the movable base unit 55, and the first spring 56 of the advancing / retreating drive unit 18. The voice coil motor 160, the first advancing / retreating rod 172, the holder 173, and the second advancing / retreating rod 176 respectively correspond to the voice coil motor 60, the first advancing / retreating rod 72, the holder 73, and the second advancing / retreating rod 76 of the advancing / retreating drive unit 18.

[0083] The fixed base portion 152 is a base portion that supports members other than the fixed base portion 152 among the forward and backward drive portions 118. The fixed base portion 152 is fixed at a predetermined position in the component processing apparatus 1 provided with the rotary transfer portion 110. The fixed base portion 152 is connected to a member for fixing the forward and backward drive portion 118 so that it does not move even when the support portion 112 rotates. The fixed base portion 152 includes, for example, a first portion extending in the Z-axis direction and a second portion connected to one end of the first portion (the end farther from the overhanging portion 112b) and extending in the X-axis direction.

[0084] The drive motor 154 is a motor that generates a driving force. The drive motor 154 may be a servo motor. When the movable parts (the first forward and backward rod 172 and the second forward and backward rod 176) in the forward and backward drive portion 118 move and contact the work holding portion 114, an external force acts on the work holding portion 114. The drive motor 154 generates a driving force for moving the movable parts (the first forward and backward rod 172 and the second forward and backward rod 176). In other words, the drive motor 154 drives the movable parts (the first forward and backward rod 172 and the second forward and backward rod 176).

[0085] The drive motor 154 may include a position detector 154a. The position detector 154a is a sensor that detects the rotational position of the drive motor 154. The position detector 154a is, for example, a rotary encoder. The position detector 154a may output information indicating the detected rotational position to the controller 100. Based on the detection result by the position detector 154a, the position of the movable part (for example, the tip of the movable part) in the X-axis direction can be grasped. The drive motor 154 may be provided on the first portion of the fixed base portion 152.

[0086] The movable base portion 155 is a base portion provided movably with respect to the fixed base portion 152. The movable base portion 155 is provided movably (displaceably) along the X-axis direction. At least a part of the movable base portion 155 is disposed between the overhanging portion 112b of the support portion 112 and the second portion of the fixed base portion 152 in the Z-axis direction. The movable base portion 155 includes, for example, a first portion extending in the Z-axis direction and a second portion connected to one end of the first portion (the end farther from the overhanging portion 112b) and extending in the X-axis direction. In one example, the second portion of the movable base portion 155 is connected to the second portion along the X-axis direction of the fixed base portion 152 in a movable state.

[0087] The first spring 156 is provided between the first portion of the movable base portion 155 and the first portion of the fixed base portion 152. The first spring 156 resists the displacement (forward movement) of the movable base portion 155 by its elastic force. When an external force in the outward direction is applied to the movable base portion 155, the first spring 156 elastically deforms in accordance with the displacement of the movable base portion 155, and when the external force in the outward direction disappears, it elastically returns to return the movable base portion 155 to the original position before displacement. The first spring 156 functions as a tension spring. The inward force applied to the movable base portion 155 by the first spring 156 is denoted as "force F11".

[0088] The voice coil motor 160 limits the load applied to the work holding portion 114. The voice coil motor 160 has a function of limiting the force acting on the work holding portion 114 by the forward and backward drive portion 118. By continuing to apply a predetermined voltage (or a voltage within a predetermined range) to the voice coil motor 160, the load applied to the work holding portion 114 is limited to a load corresponding to the predetermined voltage (or the voltage within the predetermined range). The value of the voltage applied to the voice coil motor 160 may be determined in advance according to the value of the load to be limited for the work holding portion 114.

[0089] The voice coil motor 160 may be of the same type as the voice coil motor 60 described above. The voice coil motor 160 includes a stator 162 and a mover 164. The stator 162 and the mover 164 respectively correspond to the stator 62 and the mover 64 of the voice coil motor 60. The stator 162 and the mover 164 are arranged side by side along the X-axis direction. In this case, when viewed from the X-axis direction, at least a part of the stator 162 overlaps at least a part of the mover 164.

[0090] The stator 162 is connected to the first part of the movable base portion 155. Therefore, when the movable base portion 155 is driven by the drive motor 154, the entire voice coil motor 160 is displaced (moves forward). In the voice coil motor 160, an inward pulling force is applied to the mover 164 along with the application of voltage (supply of current). The inward force generated in the voice coil motor 160 is denoted as "force Fv1".

[0091] The first advance / retreat rod 172 is formed in a rod shape so as to extend along the X-axis direction. One end inside the first advance / retreat rod 172 is connected to the mover 164 of the voice coil motor 160. The holder 173 is a part that supports the first advance / retreat rod 172. The holder 173 may support the outer end of the first advance / retreat rod 172. The holder 173 may be formed so as to extend along the Z-axis direction from the location where the first advance / retreat rod 172 is supported.

[0092] The second spring 174 (spring) is disposed between a portion connected to the stator 162 of the forward and backward drive unit 118 and a portion connected to the mover 164. The second spring 174 is configured to generate a force in a direction opposite to the force generated by the voice coil motor 160. In one example, the movable base portion 155 includes a connection portion 155a that extends outward from the outer end surface of the first portion along the Z-axis direction. The second spring 174 is provided between the connection portion 155a of the movable base portion 155 and the holder 173. The second spring 174 applies an outward force to the holder 173 by its elasticity. The second spring 174 functions as a compression spring. The outward force applied by the second spring 174 is denoted as "force F21".

[0093] The second forward and backward rod 176 is formed in a rod shape so as to extend along the X-axis direction. The inner end portion of the second forward and backward rod 176 is connected to the holder 173, and the second forward and backward rod 176 is supported by the holder 173. The movable base portion 124 of the work holding portion 114 described above includes a contact portion 124b with which the tip of the second forward and backward rod 176 can come into contact. When observed from the outside in the X-axis direction, the contact portion 124b of the work holding portion 114 disposed at the stop position SP1 corresponding to the forward and backward drive unit 118 overlaps with the tip of the second forward and backward rod 176. The second forward and backward rod 176 is provided at a position where its tip can come into contact with the contact portion 124b of the work holding portion 114.

[0094] In the forward and backward drive unit 118 illustrated above, the movable portion connected to the mover 164 of the voice coil motor 160 is constituted by the first forward and backward rod 172, the holder 173, and the second forward and backward rod 176. A force Fv1 by the voice coil motor 160 is applied inwardly to this movable portion, and a force F21 by the second spring 174 is applied outwardly.

[0095] The forward and backward drive unit 118 illustrated in FIG. 7 is in a neutral state where no external force is applied to the suction unit 122 of the work holding unit 114. In the neutral state, a voltage is applied to the voice coil motor 160. In the neutral state, a balance is achieved between the force Fv1 and the force F21.

[0096] FIG. 8 illustrates a state in which the forward and backward drive unit 118 applies an external force to the suction unit 122 (hereinafter referred to as the “drive state”). In the drive state, an outward force F01 is applied to the movable base unit 155 by the drive of the drive motor 154. While balancing between the force Fv1 and the force F21, the application of the force F01 causes the movable part including the first forward and backward rod 172 and the second forward and backward rod 176 to move outward (forward), and the tip of the second forward and backward rod 176 contacts the contact part 124b connected to the suction unit 122. Then, the movable part including the first forward and backward rod 172 and the second forward and backward rod 176 moves the suction unit 122 outward so as to overcome the inward force by the spring 126. In FIG. 8, an outward force Fd1 is applied from the tip of the second forward and backward rod 176 to the contact part 124b, and an example of the generation of a reaction force Fr1 of the spring 126 corresponding to the force Fd1 is illustrated. By balancing between the force Fv1 and the force F21, that is, by providing the second spring 174, position control is possible in the drive by the drive motor 154.

[0097] The component processing apparatus 1 provided with the rotation and transfer unit 110 includes a load detection unit 180 instead of the load detection unit 80. The load detection unit 180 may have the same configuration and function as the load detection unit 80 except that it is provided in the forward and backward drive unit 118. When the forward and backward drive unit 118 applies a force to the work holding unit 114, it receives a reaction force corresponding to the force. The load detection unit 180 can detect the reaction force received from the work holding unit 114 (the load received by the second forward and backward rod 176 from the work holding unit 114).

[0098] The load detection unit 180 may be provided in a portion of the forward and backward drive unit 118 that is connected to the mover 164 of the voice coil motor 160. In the example shown in FIG. 7, the portion of the forward and backward drive unit 118 that is connected to the mover 164 is a portion composed of the first forward and backward rod 172, the holder 173, and the second forward and backward rod 176. For example, the load detection unit 180 is provided on the second forward and backward rod 176. In one example, the load detection unit 180 is provided in the vicinity of the inner end of the second forward and backward rod 176.

[0099] Even when the controller 100 is provided with the rotary transfer unit 110 and the load detection unit 180, it may execute the same control as when the rotary transfer unit 10 and the load detection unit 80 are provided.

[0100] When the rotary transfer unit 110 and the load detection unit 180 are provided, as shown in FIGS. 9(a) and 9(b), a processing unit 40 arranged to correspond to the stop position SP1 at which the forward and backward drive unit 18 moves the work holding unit 114 forward and backward may be another rotary transfer unit 110. As viewed from the rotary transfer unit 110 being focused on, another rotary transfer unit 110 that functions as the processing unit 40 is denoted as "rotary transfer unit 110A".

[0101] As illustrated in FIG. 9(a), the central axis Ax1 of the rotary transfer unit 110 and the central axis Ax1 of the rotary transfer unit 110A may be parallel to each other. As illustrated in FIG. 9(b), the central axis Ax1 of the rotary transfer unit 110 and the central axis Ax1 of the rotary transfer unit 110A may intersect (for example, be orthogonal) to each other. In the present disclosure, the intersection includes a relationship in a twisted position without having an intersection point (so-called skew intersection). Although omitted in FIGS. 9(a) and 9(b), the forward and backward drive unit 118 may also be arranged in the rotary transfer unit 110A. In the example shown in FIG. 9(a) or FIG. 9(b), one or more rotary transfer units 110 may be further provided separately from the rotary transfer unit 110 and the rotary transfer unit 110A.

[0102] In the component processing apparatus 1, instead of the plurality of workpiece holding parts 14 and 114, a single workpiece holding part 14 or 114 may be provided. In this case, the component processing apparatus 1 moves the workpiece holding part 14 or 114 on a movement path different from the circular orbit, and then advances and retreats the workpiece holding part 14 or 114 by the advancing and retreating drive parts 18 and 118 at any position on the movement path. In the component processing apparatus 1, the rotary transfer part 10 and the rotary transfer part 110 may be combined. In one of the various examples described above, at least a part of the matters described in other examples may be combined.

[0103] [Summary of the present disclosure] The present disclosure includes the following configurations [1] to [5].

[0104] [1] A component processing apparatus (1) that performs a predetermined process on a workpiece (W), the component processing apparatus (1) including: a workpiece holding part (14, 22, 114, 122) that holds the workpiece (W) and is capable of advancing and retreating; an advancing and retreating drive part (18, 118) that applies an external force to the workpiece holding part (14, 22, 114, 122) so that the workpiece holding part (14, 22, 114, 122) advances and retreats; and a load detection part (80, 180) that is provided in the advancing and retreating drive part (18, 118) and detects a load applied to the workpiece holding part (14, 22, 114, 122), wherein the advancing and retreating drive part (18, 118) includes a drive motor (54, 154) that generates a driving force and a voice coil motor (60, 160) that restricts a load applied to the workpiece holding part (14, 22, 114, 122).

[0105] In this component processing apparatus (1), the load applied to the workpiece holding parts (14, 22, 114, 122) is restricted by voice coil motors (60, 160). As a result, the load applied to the workpiece (W) via the workpiece holding parts (14, 22, 114, 122) is also restricted, so the possibility that an abnormal load is applied to the workpiece (W) is reduced. Conventionally, in a component processing apparatus provided with such a voice coil motor, even if a trouble occurs in a mechanical part including the voice coil motor and an abnormal load is applied to the workpiece holding part that holds the workpiece, there has been no means to detect the load itself, so there have been cases where the abnormality could not be detected. On the other hand, in the above component processing apparatus (1), even if an abnormal load is applied to the workpiece holding parts (14, 22, 114, 122) that hold the workpiece (W) due to a trouble in the mechanical part of the forward and backward drive parts (18, 180), by monitoring the detection value of the load detection parts (80, 180), an abnormality that could not be detected conventionally can also be detected. Therefore, it is useful for more accurately detecting the occurrence of trouble in the mechanical part including the voice coil motors (60, 160). For example, by more accurately detecting the occurrence of trouble, the trouble can be recognized earlier and the operation of the component processing apparatus (1) can be stopped. Thereby, it is possible to avoid the situation where the processing of a plurality of workpieces (W) is repeated while the trouble occurs and these plurality of workpieces (W) are discarded or the like.

[0106] [2] The voice coil motors (60, 160) include stators (62, 162) and rotors (64, 164), and the load detection parts (80, 180) are provided in the part of the forward and backward drive parts (18, 118) that is connected to the rotors (64, 164) in the component processing apparatus (1) described in the above [1].

[0107] In a voice coil motor (60, 160), the stator (62, 162) and the mover (64, 164) are physically separated. If a load detection unit is installed in a part connected to the stator (62, 162) or in the stator (62, 162), the reaction force received from the work holding unit (14, 22, 114, 122) may not be accurately reflected in the detected value of the load. On the other hand, in the component processing apparatus (1) described in [2] above, since the load detection units (80, 180) are provided in the parts connected to the mover (64, 164), the load applied to the work holding unit (14, 22, 114, 122) can be detected more accurately. This is useful for more precise management of the load applied to the work (W).

[0108] [3] The voice coil motor (60, 160) includes a stator (62, 162) and a mover (64, 164). The forward and backward drive units (18, 118) are configured to move the work holding unit (14, 22, 114, 122) forward and backward along a predetermined direction (Z-axis, X-axis). The stator (62, 162) and the mover (64, 164) are arranged side by side along the predetermined direction (Z-axis, X-axis). The forward and backward drive units (18, 118) further include springs (74, 174) arranged between a part connected to the stator (62, 162) and a part connected to the mover (64, 164), and the springs (74, 174) are configured to generate forces (F2, F21) opposite to the forces (Fv, Fv1) generated by the voice coil motor (60, 160). The component processing apparatus (1) described in [1] or [2] above.

[0109] In this case, the forward and backward drive units (18, 118) can drive the work holding unit (14, 22, 114, 122) by the drive motor (54, 154) while balancing the forces (Fv, Fv1) generated by the voice coil motor (60, 160) and the forces (F2, F21) generated by the springs (74, 174). As a result, position control can be executed during the drive by the drive motor (54, 154).

[0110] [4] A component processing apparatus (1) according to any one of [1] to [3] above, further comprising: a plurality of workpiece holding portions (14, 22, 114, 122) including workpiece holding portions (14, 22, 114, 122); and a support portion (12, 122) that supports the plurality of workpiece holding portions (14, 22, 114, 122) so as to be located on a circular orbit (CR) passing through an action position (SP, SP1) where a forward and backward drive portion (18, 118) applies a force to any one of the plurality of workpiece holding portions (14, 22, 114, 122).

[0111] In this case, a forward and backward movement operation can be performed using the same forward and backward drive portion (18, 118) between one workpiece holding portion (14, 22, 114, 122) and another workpiece holding portion (14, 22, 114, 122). Therefore, it is useful for simplifying the component processing apparatus (1).

[0112] [5] The component processing apparatus (1) according to [4] above, further comprising: a rotational drive portion (16, 116) that moves the plurality of workpiece holding portions (14, 22, 114, 122) along a circular orbit (CR, CR1); and an angle detection portion (90, 190) that detects the rotational angle of the support portion (12, 112).

[0113] In this case, based on the detection values by the load detection units (80, 180), it is possible to more accurately detect an abnormality in the load. When it is necessary to more strictly manage the load applied to the workpiece (W), it is more beneficial to adopt the above configuration. For example, as described above, between the individuals of the workpiece holding units (22, 122), while the forward and backward drive units (18, 118) are moving the workpiece holding units (22, 122) forward and backward, a difference may occur in the reaction force acting on the workpiece holding units (22, 122). And the difference in the reaction force is reflected in the detection values by the load detection units (80, 180). On the other hand, in the component inspection apparatus (1) described in the above [4], based on the detection results by the angle detection units (90, 190), it is possible to specify which workpiece holding unit (22, 122) is arranged at the target working position (SP, SP1). Therefore, by determining an abnormality using the detection values by the load detection units (80, 180) under conditions corresponding to the specified workpiece holding unit (22, 122), the possibility of a false determination can be reduced.

[0114] [6] The drive motors (54, 154) include position detectors (54a, 154a), and are the component processing apparatuses (1) described in any one of the above [1] to [5].

[0115] As described above, along with the start of contact between the forward and backward drive units (18, 118) and the workpiece holding units (14, 22, 114, 122), the detection values by the load detection units (80, 180) include disturbances in the time period immediately after the contact. On the other hand, the position of the mechanism part (movable part) where the forward and backward drive units (18, 118) move forward and backward correlates with the rotational position of the drive motors (54, 154). Therefore, after excluding from the determination target the time period in which it is assumed that disturbances are generated due to the start of contact between the forward and backward drive units (18, 118) and the workpiece holding units (14, 22, 114, 122) based on the detection results by the position detectors (54a, 154a), by monitoring the detection values by the load detection units (80, 180), it is possible to determine the presence or absence of an abnormality in the above mechanism part. Thereby, the possibility of a false determination can be reduced.

Explanation of Reference Signs

[0116] 1…Component processing device, 10, 110…Rotary transfer unit, 12, 112…Support unit, 14, 114…Work holding unit, 22, 122…Suction unit, 16, 116…Rotary drive unit, 90, 190…Angle detection unit, 18, 118…Advance / retreat drive unit, 54, 154…Drive motor, 54a, 154a…Position detector, 60, 160…Voice coil motor, 62, 162…Stator, 64, 164…Rotor, 72, 172…First advance / retreat rod, 76, 176…Second advance / retreat rod, 80, 180…Load detection unit.

Claims

1. A part processing device that performs a predetermined process on a workpiece, A plurality of workpiece holding parts, each of which holds the workpiece and is configured to be movable forward and backward; A support portion that supports the plurality of work holding portions so as to be positioned on a circular orbit; an advance / retract drive unit that applies a force from the outside to one of the plurality of workpiece holding units, the workpiece holding unit being arranged at an operating position set on the circular orbit, so that the one of the workpiece holding units advances and retreats along a predetermined direction; a load detection unit provided in the forward / backward driving unit and detecting a load applied to the workpiece holding unit; Equipped with The forward and backward driving unit is A drive motor that generates a drive force; A voice coil motor that limits a load applied to the workpiece holding portion, The voice coil motor includes a stator and a mover. The stator and the mover are aligned along the predetermined direction, the forward / backward drive unit further includes a first portion connected to the stator, a second portion connected to the movable element, and a spring disposed between the first portion and the second portion and configured to generate a force in a direction opposite to a force generated by the voice coil motor, the drive motor is configured to drive the first portion connected to the stator, the second portion connected to the mover, and the voice coil motor; Parts handling equipment.

2. The load detection unit is provided in the second portion of the forward / backward drive unit that is connected to the mover. The part processing device according to claim 1 .

3. The predetermined direction is a vertical direction, The forward / backward drive unit further includes another spring configured to generate an upward force in response to the first portion connected to the stator being lowered by the drive motor.

3. The parts processing device according to claim 1 or 2.

4. The actuator further includes a controller that adjusts a voltage value applied to the voice coil motor so that a detection value of the load detection unit follows a predetermined target load.

3. The parts processing device according to claim 1 or 2.

5. A rotation drive unit that moves the plurality of workpiece holders along the circular orbit; An angle detection unit that detects a rotation angle of the support unit; and a controller that determines whether or not there is an abnormality in the forward / backward drive unit based on a detection value of the load detection unit and a threshold value set for each of the plurality of workpiece holding units.

3. The parts processing device according to claim 1 or 2.

Images