Integrated measurement system

Abstract

An integrated metrology system for evaluating semiconductor wafers, the metrology system comprising: a body having a rear surface and a front surface, the front surface defining a front surface boundary of the body; one or more removable support units removably coupled to the body and extending outside the front surface boundary while supporting the body; and at least one auxiliary support unit configured to support the body in the absence of the one or more removable support units.

Description

Technical Field

[0001] Cross - Reference to Related Applications This application claims the benefit of U.S. Provisional Patent Application No. 62 / 966,152, filed on January 27, 2020, which is hereby incorporated by reference into this specification.

[0002] This invention relates to an integrated metrology system.

Background Art

[0003] An integrated metrology system should be suitable for integration with other systems, such as semiconductor manufacturing systems.

[0004] The above integration usually includes connecting the integrated metrology system to the manufacturing system and enabling wafer exchange between the integrated metrology system and the manufacturing system.

Summary of the Invention

Problems to be Solved by the Invention

[0005] An integrated metrology system must meet various conflicting requirements and be compact (e.g., with a minimum installation area) while easily maintaining and executing a high - precision measurement process.

[0006] An integrated metrology system may include a powerful light source that dissipates a lot of heat. The dissipated heat may deform the optical elements of the integrated metrology system.

[0007] There is an increasing demand for providing an efficient integrated metrology system.

Means for Solving the Problems

[0008] An integrated measurement system for evaluating a semiconductor wafer is provided. The measurement system includes a main body that can have a rear surface and a front surface, where the front surface defines a front border of the main body, one or more detachable support units that can be detachably connected to the main body and support the main body while extending outside the front border, and at least one auxiliary support unit configured to support the main body in the absence of the one or more detachable support units.

[0009] The integrated measurement system may include at least one auxiliary support unit configured to support the main body without extending outside the front border.

[0010] The at least one auxiliary support unit may be movable relative to the main body.

[0011] The at least one auxiliary support unit may be configured to move relative to the main body along a first direction, and the one or more detachable support units may be configured to move relative to the main body along a second direction different from the first direction.

[0012] The second direction can be a vertical direction, and the first direction can be a horizontal direction.

[0013] The one or more detachable support units can include wheels and arms.

[0014] The main body may include a support frame that defines a support frame inner space, and the rear portion of the arm may be shaped and dimensioned to move within the frame inner space.

[0015] The integrated measurement system may include a fixed element, and when the arm is partially disposed within the internal space of the support frame, the fixed element may be configured to hold the arm in a fixed position.

[0016] The arm may include a cavity, and the fixed element may have an edge shaped and dimensioned to fit into the cavity.

[0017] The integrated measurement system may include at least one additional support unit disposed below the main body.

[0018] The at least one additional support unit may be closer to the rear surface of the main body than the detachable support unit.

[0019] The at least one additional support unit may have a single degree of freedom.

[0020] The one or more detachable support units may include wheels and an arm, the wheels may be rotatable about a wheel axis, and the axis of the wheels may be rotatable relative to the arm.

[0021] The one or more detachable support units may include wheels and an arm, the wheels may be rotatable about an axis of the wheels, the axis of the wheels may be connected to a housing of the wheels, and the housing of the wheels may be rotatable relative to the arm.

[0022] An integrated measurement system for evaluating a semiconductor wafer is provided. The measurement system includes a main body that can have a back surface and a front surface, the front surface defining a front boundary of the main body, a front interface, and a keyboard that can be movably connected to the main body. The keyboard can be configured to move between a plurality of positions, the plurality of positions can include a first position and a second position. When disposed in the first position, the keyboard extends outside the front boundary by a first distance. When disposed in the second position, the keyboard does not extend outside an imaginary line (virtual line) located at a maximum second distance from the front boundary, and the second distance may be smaller (shorter) than the first distance.

[0023] In the integrated measurement system, the second position may be a folded position, and the first position may be an extended position.

[0024] The keyboard may be rotatably connected to the main body.

[0025] The keyboard may be rotatably connected to the main body via an axis located near the bottom of the keyboard when disposed in the second position.

[0026] The second position may be a vertical position, and the first position may be a horizontal position.

[0027] The keyboard may be non-rotatably connected to the main body.

[0028] When disposed in the second position, the keyboard does not extend outside the front boundary.

[0029] When disposed in the second position, the keyboard extends outside the front boundary by the second distance.

[0030] The integrated measurement system may include a rear interface that mechanically interfaces (connects) the integrated measurement system with another system.

[0031] The integrated measurement system may include a rear interface that mechanically interfaces (connects) the integrated measurement system with an equipment front-end module of a semiconductor manufacturing system.

[0032] The front interface may include a shaft, and the keyboard may be configured to rotate around the shaft while moving between the plurality of positions.

[0033] The integrated measurement system may include a fixing element for holding the unit at the second position.

[0034] The integrated measurement system may include a recess, and at least a part of the keyboard may be located within the recess when at the second position.

[0035] An integrated measurement system for evaluating a semiconductor wafer is provided, the measurement system including a main body that can include an optical head and a light source, the light source may be disposed at a lower portion of the main body, the optical head may be disposed at an upper portion of the main body, and the optical head may be optically connected to the light source via an optical path that can include an optical cable and an optical coupler.

[0036] The light source and the optical head may be disposed in different compartments of the main body, and the optical head may be disposed above the light source.

[0037] The main body may include a plurality of intermediate compartments that can be disposed between the light source and the optical head.

[0038] The integrated measurement system may include a detachable module that can be detachably connected to the intermediate compartment.

[0039] The light source may be arranged within a perforated compartment.

[0040] The main body may include a main body frame and a plurality of panels that can be detachably connected to the main body frame.

[0041] The integrated measurement system may include air suction elements arranged at the bottom of the main body.

[0042] The integrated measurement system may include air suction elements configured to discharge air from at least near the light source towards a space located below a lowest compartment of the main body.

[0043] The air suction elements may be fans.

[0044] The integrated measurement system may include air suction elements configured to discharge air from at least a majority of the main body.

[0045] The integrated measurement system may include air suction elements configured to discharge air from the light source but not from the optical head.

[0046] The light source may be arranged within a lowest compartment of the main body.

[0047] The above optical head may be disposed under the high-performance mechanical stage control device of the above integrated measurement system.

[0048] The above integrated measurement system may include a plurality of compartments and a plurality of detachable modules that can be detachably connected to the above plurality of compartments.

[0049] The above plurality of detachable modules may include a computer module.

[0050] The above light source may be a laser drive light source.

[0051] The power consumption of the above light source may exceed 50 watts. For example, it may be in the range of 70 to 140 watts.

[0052] The above integrated measurement system may include a plurality of compartments, at least some of the compartments may be sealed, and at least some of the other compartments may not be sealed.

[0053] The above integrated measurement system may include a plurality of compartments, at least one of the compartments may have a perforated bottom, and at least one of the other compartments may have a non-perforated bottom.

[0054] To understand this invention and confirm how it is implemented, only by way of non-limiting examples, preferred embodiments will be described below with reference to the accompanying drawings.

Brief Description of the Drawings

[0055]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Figure 17

Figure 18

Figure 19

Figure 20

Figure 21

Figure 22

Figure 23

Embodiments for Carrying Out the Invention

[0056] In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the invention. However, it will be understood by those skilled in the art that the invention may be practiced without these specific details. In other instances, well-known methods, procedures, and components have not been described in detail so as not to obscure the invention.

[0057] The subject matter regarded as the invention is particularly pointed out and distinctly claimed at the conclusion of the specification. However, the invention will be best understood by reference to the following detailed description, read in conjunction with the accompanying drawings, regarding its construction and method of operation, and its objects, features, and advantages.

[0058] It will be understood that, for the sake of simplicity and clarity of illustration, the elements shown in each figure are not necessarily drawn to scale. For example, the size of some elements may be exaggerated relative to other elements for clarity. Further, reference numerals may be repeated among the figures in order to indicate corresponding or similar elements where appropriate.

[0059] Since at least one exemplary embodiment of this invention is implemented using electronic components and circuits that are well known to those skilled in the art in most cases, for the purpose of understanding and evaluating the basic concepts of this invention, and so as not to obscure or render ambiguous the teachings of this invention, it will not be described in more detail than is considered necessary as described above.

[0060] Any number or value exemplified below should be regarded as a non-limiting example.

[0061] Any combination of any elements and / or devices and / or mechanisms of any of the systems exemplified in any of the drawings may be provided.

[0062] Any combination of any elements and / or devices and / or mechanisms (features) of any of the systems exemplified in the specification may be provided.

[0063] Any combination of any subject matters found in any of the claims (e.g., the claims of the first filed patent application) may be provided.

[0064] Any one of the drawings may or may not be to scale.

[0065] FIG. 1 is a perspective view of an example of the integrated measurement system 100 and another system 10. In FIG. 1, the other system includes an equipment front-end module. FIG. 2 is a side view of an example of the integrated measurement system 100 and another system 10. FIG. 3 is a perspective view of an example of the integrated measurement system 100 and another system 10. FIG. 4 is a side view of an example of the integrated measurement system 100 and another system 10. FIG. 5 is a top view of an example of the integrated measurement system 100 and another system 10. FIG. 6 is a top view of an example of a part of the integrated measurement system 100 and another system 10. FIG. 7 is a top view of an example of the integrated measurement system 100, another system 10, and a so-called light curtain 142. FIG. 8 is a top view of an example of a part of the integrated measurement system 100 and another system 10. FIG. 9 is a perspective view of an example of the integrated measurement system 100 and another system 10. FIG. 10 is a perspective view of an example of the integrated measurement system 100 and another system 10. FIG. 11 is a side view of an example of the integrated measurement system 100 and another system 10. FIG. 12 is a perspective view of an example of a part of the integrated measurement system 100 and a part of another system 10. FIG. 13 is a perspective view of an example of a part of the integrated measurement system 100. FIG. 14 is a rear view of an example of the integrated measurement system 100 without a part of its external panel. FIG. 15 is a perspective view of an example of the integrated measurement system 100 without a part of its external panel. FIG. 16 is a rear view of an example of a part of the integrated measurement system 100 without a part of its external panel. FIG. 17 is a perspective view of an example of the mechanical stage and chuck of the integrated measurement system 100. FIG. 18 is a rear view of an example of the mechanical stage and chuck of the integrated measurement system 100. FIG. 19 is a perspective view of an example of the mechanical stage and chuck of the integrated measurement system 100. FIG. 20 is a perspective view of an example of the optical components of the integrated measurement system 100. FIG. 21 is a perspective view of an example of a part of the integrated measurement system 100 without a part of its external panel. FIGS. 22 and 23 are schematic views of keyboards at different positions.

[0066] Referring to FIGS. 1 to 5 and FIGS. 9 to 11, the integrated measurement system 100 is connected to another system 10 by an interface such as a rear interface. The rear interface can mechanically detachably connect the integrated measurement system to the other system.

[0067] The integrated measurement system 100 has a front surface 114 and a rear surface 112 and includes the following. a. A main body 110. The front of the main body defines (draws) a (virtual) front border 140 on the floor below the integrated measurement system 100. A safety border 142 can be defined (for example, by a user of the integrated measurement system) to be further away from the main body than the front border 140. b. A display 201. c. A keyboard 200. d. A front interface 210 that supports the keyboard. e. A high-performance mechanical stage control device 260 that supplies a high-voltage control signal to the mechanical stage. f. Various panels including a first front panel 101, a second front panel 105, a side panel 103, and another side panel 106. The panels are detachable and can be detachably connected to the main body frame 111 of the main body 110. g. One or more detachable support units 130 that can each include a wheel 132 and an arm 134. h. At least one auxiliary support unit 150 that can each include legs. i. At least one additional support unit 160 that can each include an additional wheel 163.

[0068] The display 201, the keyboard 200, the front interface 210, the first front panel 101, and the second front panel 105 are arranged on the front surface 114 of the integrated measurement system.

[0069] Integrated measurement system with multiple support units A stable and compact integrated measurement system is provided.

[0070] During the transportation of the integrated measurement system, it has been found that the integrated measurement system needs to have a large support base that contributes to the stability of the integrated measurement system during its transportation.

[0071] After the integrated measurement system is transported to the desired location, a large support base is no longer necessary, especially because a large support base increases the installation area of the integrated measurement system more than necessary.

[0072] The provided integrated measurement system includes: (a) a main body 110 having a rear surface and a front surface, where the rear surface faces another system and the front surface defines a front boundary 140 of the main body; (b) one or more detachable support units 130 detachably connected to the main body and extending outside the front boundary while supporting the main body when extended; and (c) at least one auxiliary support unit 150 configured to support the main body when there are no one or more detachable support units.

[0073] After the integrated measurement system 100 is installed (see, for example, FIG. 9), one or more detachable support units 130 can be removed, and the main body 110 can be supported by at least one auxiliary support unit 150. At least one auxiliary support unit 150 does not extend outside the front boundary to the same extent as one or more detachable support units, and may not extend outside the front boundary at all.

[0074] The support base can be defined by either (a) at least one additional support unit 160 positioned below the main body, (b) one or more detachable support units 130 (if still connected to the main base), or (c) at least one auxiliary support unit 150 (if arranged to support the main body).

[0075] The distance between at least one additional support unit 160 and one or more removable support units 130 exceeds (is greater than) the distance between at least one additional support unit 160 and at least one auxiliary support unit 150.

[0076] Each of the at least one additional support unit, the one or more removable support units, and the at least one auxiliary support unit may be movable or fixed relative to the floor on which the integrated measurement system is disposed.

[0077] At least one auxiliary support unit 150 is configured to move relative to the body along a first direction (e.g., upward and downward) between a position where the at least one auxiliary support unit contacts the floor (upper position) and another position where the at least one auxiliary support unit does not contact the floor.

[0078] One or more removable support units 130 are configured to move relative to the body along a second direction (e.g., horizontally outside the body).

[0079] The first direction can be made different from the second direction.

[0080] One or more removable support units 130 may be removed after at least one auxiliary support unit 160 has moved to a lower position and supports the body there.

[0081] Figs. 12 - 13 show examples of various support units. Any number of any type of support units (removable, auxiliary, and additional support units) may be present.

[0082] Each removable support unit 130 includes a wheel 132 and an arm 134. The wheel 132 is illustrated as having two degrees of freedom.

[0083] The wheel 132 rotates around the axis 131 of the wheel. The axis 131 of the wheel is connected to the wheel housing and is rotatable (with respect to the main body) along a further axis 135. In FIGS. 12 and 13, the axis of the wheel is horizontal and the further axis is vertical.

[0084] The arm 134 can be supported by a support frame 119 that defines a support frame inner space 113, and in the said space, the arm 134 can be moved, for example, horizontally, towards and away from the main body.

[0085] In FIG. 12, the arm 134 is outside the support frame inner space 113, and in FIG. 13, the arm is partially within the support frame inner space 113.

[0086] For movement within the frame inner space, the rear portion of the arm 134 is shaped and dimensioned to move within the support frame inner space 113.

[0087] The arm 134 can be fixed to the support frame 119 by a fixing element 117, which is configured to hold the arm in a fixed position when the arm is partially disposed within the frame inner space. The fixing element 117 can be a pin that can be pushed or rotated into an opening (a threaded opening can be used) formed in the support frame, thereby pressing the arm towards the other side of the support frame.

[0088] The arm 134 may include an arm’s cavity (hole, recess) 133 in which the edge of the fixing element 117 can be disposed when fixing the position of the arm.

[0089] Each additional support unit 160 may be disposed under the main body and may include an additional wheel 163 and an additional housing 167. The additional wheel 163 can rotate around an additional shaft 161 rotatably connected to the additional housing 167.

[0090] The additional housing 167 can be fixed to the main body or rotatably connected to the main body by yet another shaft (not shown), whereby the additional wheel can have two degrees of freedom.

[0091] Each additional support unit 160 may be closer to the rear surface of the main body than the detachable support unit 130. Any of the support units may be provided at any other position.

[0092] The auxiliary support unit 150 may be a leg, may include a wheel, may be fixed to the main body, or may be movable relative to the main body. The movement (between an upper position and a lower position) can be effected by rotation, linearly or non-linearly.

[0093] Movable keyboard A safety border (also called "Safety light border" or "Light Curtain", indicated by reference numeral 142 in FIG. 7) can be defined by the user of the integrated measurement system 100. If any part of the integrated measurement system 100 exceeds the safety border 142, the user may not operate the integrated measurement system 100 (and / or any other system 10). One or more sensors may be provided to monitor the safety border, check whether a keyboard or other components exceed the safety border, and issue an alarm and stop the progress of the manufacturing process if a crossing occurs. In FIG. 7, the safety border 142 is defined by a portion 143 of the frame of another device.

[0094] The integrated measurement system 100 includes a keyboard that extends outside the main body during use.

[0095] Maintaining the keyboard open will either result in exceeding the safety boundary or will force the main body of the integrated measurement system 100 to be made smaller so that the integrated measurement system 100 does not exceed the safety boundary even when the keyboard is open.

[0096] An integrated measurement system can be provided that includes (a) a main body 110 having a rear surface and a front surface, where the rear surface faces another system and the front surface defines a front boundary 140 of the main body, (b) a front interface 210, and (c) a keyboard 200 movably coupled to the main body via the front interface 210.

[0097] The keyboard 200 is configured to move between a plurality of positions, the plurality of positions including a first position and a second position.

[0098] When disposed in the first position (extended position or open position), the keyboard extends outside the front boundary 140 by a first distance. The first distance may be approximately the width of the keyboard.

[0099] When disposed in the second position (folded position or closed position), the keyboard does not extend outside an imaginary line that is located at most a second distance from the front boundary, and the second distance is smaller (shorter) than the first distance. The imaginary line may be positioned on the front boundary 140 or may be disposed away from the front boundary 140.

[0100] In FIGS. 1 - 5, the keyboard is in the first position.

[0101] In FIGS. 7 - 11, the keyboard is in the second position.

[0102] Figures 22 and 23 show the situation where the keyboard is in the first position and a further situation where the keyboard is in the second position.

[0103] Figures 22 and 23 show the second position where the keyboard still extends a little from the front boundary, and also show the recess 209 formed in the main body into which the keyboard and the front interface will fully or partially fit when in the second position.

[0104] The keyboard (rather, the front interface) can be rotatably connected to the main body, for example, by a keyboard axis 207.

[0105] The keyboard axis can be positioned near a top of the keyboard. Figure 22 shows the keyboard axis 207 positioned near the bottom of the keyboard.

[0106] The second position can be a vertical or substantially vertical position (see Figure 22), and the first position can be a horizontal position.

[0107] The keyboard may be non-rotatably connected to the main body.

[0108] A keyboard fixation element may be provided to hold the keyboard in the second position (by mechanical means and / or electromagnetic means).

[0109] The keyboard may be replaced with another device movable between different positions including an open position and a closed position.

[0110] Integrated measurement system with heat dissipation and maintainability The integrated measurement system 100 is connected to other systems (via a rear interface). It may be desirable to perform maintenance work without separating the integrated measurement system 100 from other systems.

[0111] The integrated measurement system 100 can include a main body frame and a plurality of panels for protecting the main body. The panel(s) can be detachably connected to the main body frame (e.g., via clips, screws, bolts, and nuts) and can be easily removed during maintenance work. The main body frame can include an opening (such as opening 109 in FIG. 16) that facilitates access to various components of the main body.

[0112] Furthermore, in order to facilitate the maintenance of the integrated measurement system 100 and / or to facilitate upgrades, the integrated measurement system 100 may have a modular configuration. The various components of the integrated measurement system 100 can be arranged as detachable modules positioned (disposed) within a plurality of compartments of the integrated measurement system 100.

[0113] The integrated measurement system 100 may include a very powerful light source that dissipates a significant amount of heat.

[0114] To prevent heat from deforming the optical components of the optical head and to prevent damage or deformation to other devices of the integrated measurement system 100, the light source is spaced away from the optical head. In addition, heat is conveyed (escaped) to the outside of the main body by one or more air suction elements such as air vents.

[0115] An integrated measurement system 100 for evaluating a semiconductor wafer can be provided, and the measurement system can include a main body 110 that may include an optical head 230 and a light source 220.

[0116] The light source 220 is disposed in the lower portion of the main body. The optical head 230 is disposed in the upper portion of the main body.

[0117] The optical head 230 is optically connected to the light source 220 via an optical path including an optical cable (indicated by reference numeral 208 in FIG. 14) and may include additional optical components.

[0118] Figures 14 to 15 show the main body 110 as including a plurality of compartments such as the first to fourth compartments 211 to 214. The first compartment 211 is the compartment at the lowest position, and the fourth compartment 214 is the compartment at the highest position.

[0119] The optical head 230 is located within the fourth compartment 214.

[0120] The mechanical stage 280 and the chuck 281 are located within the third compartment 213.

[0121] The computer module 270 is located within the second compartment 212.

[0122] The light source 220 is located within the first compartment 211.

[0123] As described above, the light source 220 and the optical head 230 are arranged in different compartments of the main body, and the optical head 230 is located above the light source 220. In the examples shown in FIGS. 14 and 15, the second compartment 212 and the third compartment 213 are intermediate compartments arranged between the light source 220 and the optical head 230.

[0124] As shown in FIGS. 14 and 15, and in particular FIG. 21, air from near the light source is discharged (e.g., sucked) by one or more air suction elements 250 disposed below the light source 220. A perforated plate 290 (including the opening(s) 291) is disposed between the one or more air suction elements 250 and the light source 220, and through the opening(s) formed in the perforated plate 290, the one or more air suction elements 250 can suck air from the space above the one or more air suction elements 250. A further perforated plate is shown in FIG. 15. There may be a plurality of perforated plates at the bottom of one or more compartments.

[0125] The air suction element 250 may be disposed at the bottom of the main body and extend (partially) outside the main body and into the space 102 located below the lowest compartment of the main body.

[0126] The air suction element can further discharge air from at least most of the main body, for example, through an opening formed in the compartment, and can suck air from the second compartment 212 and other compartments that are not sealed.

[0127] FIGS. 14 - 15 further show that the optical head 230 is disposed below (even just below) the high-performance mechanical stage control device 260 of the integrated measurement system.

[0128] The light source 220 may be a laser drive light source.

[0129] The power consumption of the light source may exceed 50 watts. For example, it may be in the range of 70 - 140 watts.

[0130] Figures 17 and 18 show a mechanical stage 280 that supports the chuck 281 and moves the chuck in various directions (e.g., X, Y, and Z). First end effectors 301 and second end effectors 302 may be further provided. The first end effector 301 is positioned above the second end effector 302. The first end effector 301 can receive the first wafer (from another system 10), while the second end effector can receive another wafer from the chuck support and the first and second end effectors can move in various ways, e.g., upward and downward, so that it can be used in another system.

[0131] Any configuration of components for realizing the same function is effectively "associated" so that the desired function is realized. Thus, any two components in this specification combined to realize a particular function can be regarded as being "associated" with each other so that the desired function is realized, regardless of the architecture or intermediate components. Similarly, any two components thus associated can also be regarded as being "operably connected" or "operably coupled" to each other to realize the desired function.

[0132] Furthermore, those skilled in the art will understand that the boundaries between the aforementioned operations are merely illustrative. Multiple operations can be integrated into a single operation, a single operation can be distributed into additional operations, and multiple operations can be executed at least partially overlapping in a timely manner. Further, in another embodiment, it can include multiple instances of an operation, and in various other embodiments, the order of operations can be changed.

[0133] Also, for example, in one embodiment, the illustrated examples can be implemented as circuits located on a single integrated circuit or within the same device. Alternatively, the present examples can be implemented as any number of separate integrated circuits or separate devices interconnected with each other in a suitable manner.

[0134] Also, for example, each example, or a part thereof, can be implemented as a physical circuit or a soft or code representation of a logical expression convertible to a physical circuit, for example, in any suitable type of hardware description language.

[0135] However, other modifications, variations, and alternative forms are also possible. Therefore, the present specification and drawings should be regarded as illustrative rather than in a limiting sense.

[0136] In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or steps other than those listed in a claim. Further, as used herein, a term without an accompanying number (such as "a" or "an") is defined as one or more than one. Also, the use of introductory phrases such as "at least one" and "one or more" in the claims shall not be construed to imply that the introduction of another claim element by a term without an accompanying number (the indefinite article "a" or "an") limits any particular claim containing the claim element thus introduced to an invention having only one such element, even if the same claim contains the introductory phrases "one or more" or "at least one" and a term without an accompanying number (such as the indefinite article "a"). The same applies to the use of definite articles. Unless otherwise stated, terms such as "first" and "second" are used to arbitrarily distinguish between elements described by such terms. Thus, these terms are not necessarily intended to indicate a temporal or other ranking of such elements. The mere fact that certain means are recited in mutually different claims does not indicate that a combination of these means cannot be used advantageously.

[0137] Certain features of the invention are illustrated and described herein, but those skilled in the art will envision many modifications, alternatives, variations, and equivalents. Accordingly, it is to be understood that the claims are intended to cover all such modifications and variations that fall within the true spirit of the invention.

[0138] The terms "including", "comprising", "having", "consisting of" and "consisting essentially of" are used interchangeably. For example, any method can include at least the steps included in the figures and / or the specification, and can include only the steps included in the figures and / or the specification.

Explanation of Signs

[0139] 10 Another system (other system) 100 Integrated measurement system 101 First front panel 102 Space under the main body 103 Side panel 104 Upper panel 105 Second front panel 106 Another side panel 109 Opening 110 Main body 111 Main body frame 112 Rear surface 113 Space inside the support frame 114 Front surface 116 Rear interface 117 Fixed element of the arm 119 Support frame 130 Detachable support unit 131 Axis of the wheel 132 Wheel 133 Cavity of the arm 134 Arm 135 Further axis 137 Housing of the wheel 140 Front boundary 142 Safety boundary 143 Portion of the frame of another system 150 Auxiliary support unit 151 Interface for the auxiliary support unit 160 Additional support unit 161 Additional Axis 163 Additional Wheel 167 Additional Housing 200 Keyboard 201 Display 207 Keyboard Axis 280 Optical Cable 209 Concave Portion 210 Front Interface 211 - 215 Compartment 219 Plate 220 Light Source 230 Optical Head 240 Optical Cable 250 Air Suction Element 270 Computer Module 280 Mechanical Stage 281 Chuck 290 Perforated Plate 291 Opening 292 Nitrogen Source 293 Lock 301 First End Effector 302 Second End Effector 310 Optical Coupler 312 Optical Input 314 Optical Output 316 Gas Input 318 Gas Output

Claims

1. An integrated measurement system for evaluating a semiconductor wafer, a main body having a rear surface and a front surface, the front surface defining a front boundary of the main body, one or more detachable support units detachably connected to the main body and supporting the main body while extending outside the front boundary, and at least one auxiliary support unit configured to support the main body when the one or more detachable support units are not present, the at least one auxiliary support unit is configured to move relative to the main body along a first direction, the one or more detachable support units are configured to move relative to the main body along a second direction, the first direction is different from the second direction, the second direction is a vertical direction, and the first direction is a horizontal direction, An integrated measurement system.

2. An integrated measurement system for evaluating a semiconductor wafer, a main body having a rear surface and a front surface, the front surface defining a front boundary of the main body, one or more detachable support units detachably connected to the main body and supporting the main body while extending outside the front boundary, and at least one auxiliary support unit configured to support the main body when the one or more detachable support units are not present, the main body includes an optical head and a light source, the light source is disposed in a lower portion of the main body, the optical head is disposed in an upper portion of the main body, and the optical head is optically connected to the light source via an optical path including an optical cable, An integrated measurement system.

3. The integrated measurement system according to claim 1, comprising at least one auxiliary support unit configured to support the main body without extending outside the front boundary.

4. The integrated measurement system according to claim 1, wherein at least one of the auxiliary support units is movable relative to the main body. **Claim 5** The integrated measurement system according to claim 1, wherein the one or more detachable support units include wheels and arms. **Claim 6** The integrated measurement system according to claim 5, wherein the main body includes a support frame defining an internal space of the support frame, and a rear portion of the arm is shaped and dimensioned to move within the internal space of the frame. **Claim 7** The integrated measurement system according to claim 6, further comprising a fixing element configured to hold the arm in a fixed position when the arm is partially disposed within the internal space of the support frame. **Claim 8** The integrated measurement system according to claim 7, wherein the arm has a cavity, and the fixing element has an edge shaped and dimensioned to fit into the cavity. **Claim 9** The integrated measurement system according to claim 1, further comprising at least one additional support unit disposed under the main body. **Claim 10** The integrated measurement system according to claim 9, wherein the at least one additional support unit is closer to the rear surface of the main body than the detachable support unit. **Claim 11** The integrated measurement system according to claim 9, wherein the at least one additional support unit has one degree of freedom. **Claim 12** The integrated measurement system according to claim 1, wherein the one or more detachable support units include wheels and arms, the wheels are rotatable about an axis of the wheels, and the axis of the wheels is rotatable relative to the arms. **Claim 13** The integrated measurement system according to claim 1, wherein the one or more detachable support units include wheels and arms, the wheels are rotatable about an axis of the wheels, the axis of the wheels is connected to a housing of the wheels, and the housing of the wheels is rotatable relative to the arms.

14. Comprising a keyboard movably connected to the body, the keyboard being configured to move between a plurality of positions, the plurality of positions including a first position and a second position, wherein when disposed in the first position, the keyboard extends outside the front boundary by a first distance, and when disposed in the second position, the keyboard does not extend outside an imaginary line located at a maximum second distance from the front boundary, and the second distance is smaller than the first distance. The integrated measurement system according to claim 1.

15. The integrated measurement system according to claim 14, wherein the second position is a folded position and the first position is an extended position.

Images