Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device and a sheet peeling method that peel an inner sheet from a second adhesive sheet even if the inner sheet and the second adhesive sheet are bonded to each other.SOLUTION: A transfer device EA includes: sheet cutting means 10 which cuts a first adhesive sheet AS1 attached to one surface WK1 of an adherend WK to a size that extends beyond the outer edge of the adherend, and divides the first adhesive sheet into an inner sheet AS1A attached to the adherend and an outer sheet AS1B located on the outer side of the inner sheet; transfer means 20 which arranges a second ring frame RF2 as a second frame member in the vicinity of the adherend; sheet bonding means 30 which bonds a second adhesive sheet AS2 that extends beyond the outer edge of the adherend to another surface WK2 of the adherend; inversion means 40 which inverts the adherend to which the second adhesive sheet is bonded; and sheet peeling means 50 as a sheet peeling device which bonds a peeling tape PT to the inner sheet, applies tension to the peeling tape, and peels the inner sheet from the adherend.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a sheet peeling device and a sheet peeling method.

Background Art

[0002] There is known a sheet peeling device that peels an inner sheet from an adherend having an inner sheet attached to one surface and a second adhesive sheet attached to the other surface (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the substrate transfer device 1 (sheet peeling device) as described in Patent Document 1, only a technique for peeling the inner sheet from the wafer W (adherend) while avoiding adhesion between the adhesive tape T1 (inner sheet) and the adhesive tape T2 (second adhesive sheet) is disclosed.

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method capable of peeling an inner sheet from the second adhesive sheet even if the inner sheet and the second adhesive sheet are adhered to each other.

Means for Solving the Problems

[0006] The present invention employs the configuration described in the claims.

Effects of the Invention

[0007] According to the present invention, even if tension necessary for peeling the inner sheet from the second adhesive sheet is applied, a peeling tape having an adhesive force that does not come off from the inner sheet is attached to the inner sheet. Therefore, even if the inner sheet and the second adhesive sheet are adhered to each other, the inner sheet can be peeled from the second adhesive sheet.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Mode for Carrying Out the Invention

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, the X-axis, Y-axis, and Z-axis in the present embodiment are in a mutually orthogonal relationship. The X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Further, in the present embodiment, when viewed from the front direction of FIG. 1 parallel to the Y-axis, when the direction is indicated without specifying the figure, "up" is the arrow direction of the Z-axis, "down" is the opposite direction, "left" is the arrow direction of the X-axis, "right" is the opposite direction, "front" is the front direction orthogonal to the paper surface and the arrow direction of the Y-axis, and "rear" is the opposite direction.

[0010] The transfer device EA of the present invention cuts a first adhesive sheet AS1 attached to one surface WK1 of an adherend WK to a size that protrudes from the outer edge of the adherend WK, and divides the first adhesive sheet AS1 into an inner sheet AS1A attached to the adherend WK and an outer sheet AS1B located outside the inner sheet AS1A. It includes a sheet cutting means 10, a transfer means 20 for arranging a second ring frame RF2 as a second frame member in the vicinity of the adherend WK, a sheet pasting means 30 for pasting a second adhesive sheet AS2 having a size that protrudes from the outer edge of the adherend WK to the other surface WK2 of the adherend WK, and an inversion means 40 for inverting the adherend WK with the second adhesive sheet AS2 pasted thereon upside down. It also includes a sheet peeling means 50 as a sheet peeling device for pasting a peeling tape PT on the inner sheet AS1A and applying tension to the peeling tape PT to peel the inner sheet AS1A from the adherend WK, and is arranged in the vicinity of an adherend conveying means 60 for conveying the adherend WK. In the present embodiment, the adherend WK supplied to the transfer device EA is supported by a first ring frame RF1 as a first frame member via a first adhesive sheet AS1, and forms a first integral body UP1.

[0011] The sheet cutting means 10 is composed of a plurality of arms, and within its working range, it includes a so-called articulated robot 11 as a driving device that can displace the object supported by the tip arm 11A, which is the working part, to any position and at any angle, and a cutting blade 12 as a cutting member supported by the tip arm 11A of the articulated robot 11 via a bracket 12A.

[0012] The transfer means 20 includes an articulated robot 11 shared with the sheet cutting means 10, and a suction pad 22 (holding means) supported by the tip arm 11A of the articulated robot 11 via a frame 21, to which a suction force is applied by a decompression means (not shown) such as a decompression pump or a vacuum ejector.

[0013] The sheet attaching means 30 includes a support roller 31 that supports a web RS in which the second adhesive sheet AS2 is temporarily attached to a strip-shaped release sheet RL, a guide roller 32 that guides the web RS, a release plate 33 as a peeling means that folds back the release sheet RL at the peeling edge 33A and peels the second adhesive sheet AS2 from the release sheet RL, a pressing roller 34 as a pressing means that presses and attaches the second adhesive sheet AS2 to the adherend WK, a driving roller 35 that is supported by an output shaft (not shown) of a rotation motor 35A as a driving device and sandwiches the release sheet RL with a pinch roller 35B, and a recovery roller 36 as a recovery means that is supported by an output shaft of a driving device (not shown) and constantly applies a predetermined tension to the release sheet RL existing between the release sheet RL and the pinch roller 35B to recover the release sheet RL while the automatic operation of the transfer device EA is being performed.

[0014] The reversing means 40 includes a linear motor 41 as a driving device, a frame 42 supported by its output shaft 41A, forwardly extending arms 43 respectively supported at both the left and right ends of the frame 42, a rotation motor 44 as a driving device supported in front of each arm 43, and a chuck motor 45 (holding means) as a driving device having a pair of chuck arms 45A respectively supported by its output shaft 44A.

[0015] The sheet peeling means 50 includes a tape support means 51 that rotatably supports the wound peeling tape PT with heat adhesiveness, a feeding means 52 that sandwiches the peeling tape PT supported by the tape support means 51 with the tape support means 51 and imparts a feeding output to the peeling tape PT, a lead holding means 53 that holds the lead end portion of the peeling tape PT, a holding assistance means 54 that assists the lead holding means 53 in holding the peeling tape PT, a peeling tape attaching means 55 that presses and attaches the peeling tape PT to the inner sheet AS1A, a cutting means 56 that cuts the peeling tape PT, and a tension applying means 57 that applies tension to the peeling tape PT. The peeling tape PT having an adhesive force that does not come off from the inner sheet AS1A even when a tension necessary for peeling the inner sheet AS1A from the second adhesive sheet AS2 is applied is attached to the inner sheet AS1A. In this embodiment, the sheet peeling means 50 is configured to attach the peeling tape PT to the inner sheet AS1A at a position where the inner sheet AS1A is not in contact with the second adhesive sheet AS2.

[0016] The tape support means 51 includes a rotating arm 51B that is rotatable about a shaft 51A, a support roller 51C that is supported on the free end side thereof and supports the wound peeling tape PT, and a spring 51D as a biasing means that biases the support roller 51C in the direction of the feeding means 52. The feeding means 52 includes a rotating motor 52A as a driving device and a feeding roller 52B that is supported on an output shaft (not shown) thereof and imparts a rotational force to the peeling tape PT supported by the support roller 51C. The lead holding means 53 includes a housing means 53C supported on an output shaft 53B of a linear motion motor 53A as a driving device, and a suction means 53F (holding means) as a support means such as a decompression pump or a vacuum ejector that can perform suction holding through suction holes 53E formed in a suction surface 53D that is the bottom surface of the housing means 53C. The holding assistance means 54 includes a linear motion motor 54A as a driving device and an auxiliary roller 54C that is supported on an output shaft 54B thereof and abuts the peeling tape PT against the suction surface 53D. The tape peeling means 55 includes a linear motor 55A as a driving device housed in the housing means 53C, a pressing member 55C supported by its slider 55B for pressing the peeling tape PT against the inner sheet AS1A, and a heating means 55D such as a coil heater or a heating side of a heat pipe provided inside the pressing member 55C. The cutting means 56 includes a linear motor 56A as a driving device housed in the housing means 53C, and a cutting blade 56C supported by its slider 56B and capable of cutting the peeling tape PT. The tension applying means 57 includes a linear motor 57A as a driving device and a peeling roller 57C supported by its slider 57B.

[0017] The adherend conveying means 60 includes a linear motor 61 as a driving device, a first support table 62 supported by the first slider 61A of the linear motor 61, and a second support table 63 supported by the second slider 61B of the linear motor 61. The first support table 62 is provided with an inner support surface 62A (holding means) capable of being suction-held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, a concave groove 62B formed outside the inner support surface 62A and having an annular shape in a plan view seen from above, and an outer support surface 62C (holding means) formed outside the concave groove 62B and capable of being suction-held by a decompression means (not shown) such as a decompression pump or a vacuum ejector. The second support table 63 is provided with a holding portion 63A (holding means) capable of being suction-held by a decompression means (not shown) such as a decompression pump or a vacuum ejector on its upper surface, and a strong holding portion 63B (holding means) provided in an annular shape in a plan view inside the holding portion 63A for holding the protruding portion protruding from the adherend WK on the inner sheet AS1A with a suction holding force stronger than the suction holding force of the holding portion 63A.

[0018] Next, the operation of the transfer device EA will be described. First, with respect to the transfer device EA in which each member is arranged at the initial position shown by the solid line in FIG. 1, after the user of the transfer device EA (hereinafter simply referred to as "user") sets the original fabric RS and the peeling tape PT as shown in the figure, a signal for starting automatic operation is input via an operation means (not shown) such as an operation panel or a personal computer. Then, the sheet peeling means 50 drives the suction means 53F to start adsorbing and holding the peeling tape PT on the adsorption surface 53D, and the sheet attaching means 30 drives the rotation motor 35A to feed out the original fabric RS. When the leading end portion in the feeding direction of the second adhesive sheet AS2 is peeled by a predetermined length at the peeling edge 33A of the peeling plate 33, the drive of the rotation motor 35A is stopped. Next, when the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the first integrated object UP1 on the first support table 62 as shown by the solid line in FIG. 1, the adherend conveying means 60 drives a decompression means (not shown) to start adsorbing and holding the first integrated object UP1 on the inner and outer support surfaces 62A and 62C.

[0019] Thereafter, the sheet cutting means 10 drives the articulated robot 11, and as shown by the two-dot chain line in Fig. 1, the cutting blade 12 is thrusted into the first adhesive sheet AS1 at a position separated by a predetermined distance from the outer edge of the adherend WK, and after the cutting blade 12 is rotated once along the concave groove 62B, the cutting blade 12 is returned to the initial position. Thereby, the first adhesive sheet AS1 is divided into the inner sheet AS1A and the outer sheet AS1B. Next, the transfer means 20 drives the articulated robot 11, separates the cutting blade 12 held by the tip arm 11A and holds the suction pad 22 with the tip arm 11A, then abuts the suction pad 22 against the upper surface of the first ring frame RF1, drives a decompression means (not shown), and starts the suction holding of the first ring frame RF1 by the suction pad 22. Then, when the adherend conveying means 60 stops driving the decompression means (not shown) and releases the suction holding of the first integral body UP1 on the outer support surface 62C, the transfer means 20 drives the articulated robot 11, conveys the first ring frame RF1 with the outer sheet AS1B attached thereto to a predetermined recovery position (not shown), then stops driving the decompression means (not shown), and releases the suction holding of the first ring frame RF1 by the suction pad 22. Next, the transfer means 20 drives the articulated robot 11, abuts the suction pad 22 against the upper surface of the uppermost second ring frame RF2 accumulated in the frame stocker section ST, then drives a decompression means (not shown), and starts the suction holding of the second ring frame RF2 by the suction pad 22. Thereafter, when the transfer means 20 drives the articulated robot 11 and places the second ring frame RF2 on the outer support surface 62C, the adherend conveying means 60 drives a decompression means (not shown) and starts the suction holding of the second ring frame RF2 on the outer support surface 62C. Next, the transfer means 20 stops driving the decompression means (not shown), releases the suction holding of the second ring frame RF2 by the suction pad 22, then drives the articulated robot 11, returns the suction pad 22 to the initial position, separates the suction pad 22 held by the tip arm 11A, and holds the cutting blade 12 with the tip arm 11A.

[0020] Then, the object conveying means 60 drives the linear motor 61 to move the first support table 62 to the right. When the first support table 62 reaches a predetermined position relative to the sheet attaching means 30, the sheet attaching means 30 drives the rotation motor 35A and feeds out the web RS in accordance with the moving speed of the first support table 62. As a result, the second adhesive sheet AS2 is peeled off from the release sheet RL, and the second adhesive sheet AS2 peeled off from the release sheet RL is pressed and attached to the upper surface of the second ring frame RF2 and the other surface WK2 of the object WK by the pressing roller 34 as shown by the two-dot chain line in FIG. 1. At this time, the second adhesive sheet AS2 may or may not adhere to the inner sheet AS1A. Next, the entire leading second adhesive sheet AS2 is attached to the second ring frame RF2 and the object WK to form the second integrated object UP2. When the leading end portion in the feeding direction of the next second adhesive sheet AS2 following the leading second adhesive sheet AS2 is peeled off by a predetermined length at the peeling edge 33A of the peeling plate 33, the sheet attaching means 30 stops driving the rotation motor 35A.

[0021] Thereafter, the movement of the first support table 62 to the right continues. As shown by the two-dot chain line in FIG. 1, when the first support table 62 reaches directly below the inversion means 40, the adherend conveying means 60 stops driving the linear motor 61. Thereafter, the inversion means 40 drives the linear motion motor 41. As shown by the two-dot chain line in FIG. 1, after lowering the frame 42, each chuck motor 45 is driven, and the second ring frame RF2 is gripped by each chuck arm 45A. Next, when the adherend conveying means 60 stops driving a pressure reducing means (not shown) and releases the adsorption and holding of the second integrated object UP2 on the inner and outer support surfaces 62A and 62C, the inversion means 40 drives the linear motion motor 41 and the rotation motor 44, lifts the second integrated object UP2 to a predetermined height, and then inverts the second integrated object UP2 upside down. Then, the adherend conveying means 60 drives the linear motor 61 to return the first support table 62 to the initial position and move the second support table 63 directly below the inversion means 40. Thereafter, the inversion means 40 drives the linear motion motor 41 so that the second adhesive sheet AS2 faces the second support table 63 side, and places the second integrated object UP2 on the second support table 63. Next, when the adherend conveying means 60 drives a pressure reducing means (not shown) to start the adsorption and holding of the second integrated object UP2 at the holding portion 63A and the strong holding portion 63B, the inversion means 40 drives the linear motion motor 41 and the chuck motor 45 to return the frame 42 and the chuck arm 45A to the initial positions.

[0022] Thereafter, the adherend conveying means 60 drives the linear motor 61 to move the second support table 63 rightward. When the left end portion of the adherend WK is positioned directly below the pressing member 55C as shown by the two-dot chain line in FIG. 1, the driving of the linear motor 61 is stopped. Next, the sheet peeling means 50 drives the direct-acting motor 54A. As shown by the two-dot chain line in FIG. 1, after the auxiliary roller 54C is retracted from below the accommodating means 53C, the rotation motor 52A and the direct-acting motor 53A are driven to lower the accommodating means 53C to a predetermined position directly above the inner sheet AS1A while feeding out the peeling tape PT. Then, the sheet peeling means 50 drives the linear motor 55A. As shown in FIG. 2(A), the pressing member 55C is lowered, and after the peeling tape PT is brought into contact with the inner sheet AS1A directly above the left end portion of the adherend WK, the heating means 55D is driven to heat the peeling tape PT and adhere the peeling tape PT to the inner sheet AS1A.

[0023] Next, after the sheet peeling means 50 stops driving the suction means 53F and releases the adsorption and holding of the peeling tape PT on the adsorption surface 53D, the linear motor 53A and the linear motor 55A are driven to return the housing means 53C and the pressing member 55C to their initial positions. Then, the sheet peeling means 50 drives the linear motor 57A, and as shown in FIG. 2(B), the peeling roller 57C is moved to the right to apply tension to the peeling tape PT and peel the inner sheet AS1A from the adherend WK. At this time, since the strong holding portion 63B is provided on the second support table 63, even if the second adhesive sheet AS2 and the inner sheet AS1A are adhered, the second adhesive sheet AS2 will not be lifted together with the inner sheet AS1A to damage the adherend WK. Next, when the entire inner sheet AS1A is peeled from the adherend WK and the third integrated object UP3 is formed, after the sheet peeling means 50 stops driving the linear motor 57A, the linear motor 54A and the suction means 53F are driven, and as shown in FIG. 2(C), the auxiliary roller 54C is returned to its initial position, and the adsorption and holding of the peeling tape PT on the adsorption surface 53D is started. Then, the sheet peeling means 50 drives the linear motor 56A, and as shown in FIG. 2(C), the cutting blade 56C is lifted and lowered to cut the peeling tape PT. When the operator or the transfer means (not shown) collects the inner sheet AS1A, the sheet peeling means 50 drives the linear motor 57A to return the peeling roller 57C to its initial position. Next, the adherend conveying means 60 drives the linear motor 61 to return the second support table 63 to its initial position and stop driving the decompression means (not shown), and releases the adsorption and holding of the third integrated object UP3 by the holding portion 63A and the strong holding portion 63B. Then, the operator or the conveying means (not shown) conveys the third integrated object UP3 on the second support table 63 to the next process, and the same operations as above are repeated thereafter.

[0024] According to the above embodiments, even if tension necessary for peeling the inner sheet AS1A from the second adhesive sheet AS2 is applied, the peeling tape PT having an adhesive force that does not come off from the inner sheet AS1A is attached to the inner sheet AS1A. Therefore, even if the inner sheet AS1A and the second adhesive sheet AS2 are adhered, the inner sheet AS1A can be peeled from the second adhesive sheet AS2.

[0025] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps. Moreover, they are not limited to the components and steps of merely one embodiment shown in the above embodiment. For example, the sheet cutting means may cut the first adhesive sheet AS1 from the side of the adhered surface of the adherend to a size that protrudes from the outer edge of the adherend, and the first adhesive sheet AS1 may be any one as long as it can be divided into an inner sheet adhered to the adherend and an outer sheet located outside the inner sheet, and it is not limited at all as long as it is within the technical scope in light of the common general knowledge in the art at the time of filing (the same applies to other means and steps).

[0026] The sheet cutting means 10 may cut the first adhesive sheet AS1 from the adhered surface side of the first adhesive sheet AS1, or may cut the first adhesive sheet AS1 from the non-adhered surface side of the first adhesive sheet AS1. Also, the drive device for moving the cutting blade 12 (the articulated robot 11 in the above embodiment) may be moved by another drive device without sharing with the drive device for moving the suction pad 22 by the transfer means 20. The cutting blade 12 may not be detachable from the articulated robot 11, or the articulated robot 11 may directly support the cutting blade 12 without passing through the bracket 12A.

[0027] The transfer means 20 may move the suction pad 22 with another drive device without sharing the drive device (the articulated robot 11 in the above embodiment) that moves the cutting blade 12 with the sheet cutting means 10. Alternatively, the suction pad 22 may not be detachable from the articulated robot 11. Or, the articulated robot 11 may directly support the suction pad 22 without passing through the frame 21. Or, at least one of the first ring frame RF1 and the outer sheet AS1B may not be removed from the first support table 62. Or, when the outer sheet AS1B or the first ring frame RF1 to which the outer sheet AS1B is attached is conveyed to a predetermined collection position by another device or manually, or when the second ring frame RF2 is placed on the first support table 62 by another device or manually, or when the second ring frame RF2 is not placed on the first support table 62, it may not be provided in the transfer device EA of the present invention.

[0028] The sheet attaching means 30 may unwind a web in which a predetermined region partitioned by a cut formed in a belt-like adhesive sheet base material temporarily attached to a release sheet RL is used as the second adhesive sheet AS2, or may adopt a web in which the belt-like adhesive sheet base material is temporarily attached to the release sheet RL, form a cut in a loop shape or across the entire short width direction in the belt-like adhesive sheet base material by a cutting means, and use a predetermined region partitioned by the cut as the second adhesive sheet AS2, or may be configured to attach the belt-like adhesive sheet base material to the adherend WK. When peeling the second adhesive sheet AS2 from the release sheet RL, torque control of the rotation motor 35A may be performed so that a predetermined tension is applied to the web RS. Instead of each roller such as the support roller 31 and the guide roller 32, the web RS and the release sheet RL may be supported and guided by a plate-like member, a shaft member, etc. The web RS may be supported, for example, in a fan-fold without being wound. The second adhesive sheet AS2 may be held by a holding member supported by the output shaft of a linear motor as a driving device and capable of being adsorbed and held by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and a pressing means configured to press and attach the second adhesive sheet AS2 held by the holding member to the adherend WK may be adopted. A recovery means for recovering the release sheet RL by folding the release sheet RL in a fan-fold, cutting it with a shredder, etc., or accumulating it randomly may be adopted, or the recovery means may not be adopted. The second adhesive sheet AS2 may be attached to the adherend WK while moving itself without moving or while moving the first support table 62. The second adhesive sheet AS2 to which the release sheet RL is not temporarily attached may be unwound and attached to the adherend WK. It may also be configured to attach only the second adhesive sheet AS2 to the adherend WK.

[0029] The reversing means 40 may be configured to hold at least one of the second ring frame RF2, the second adhesive sheet AS2, the inner sheet AS1A, and the adherend WK in the second integrated object UP2 and turn the second integrated object UP2 upside down. Alternatively, without raising the second integrated object UP2, for example, the first support table 62 may be retracted from below the second integrated object UP2, and the second integrated object UP2 may be turned upside down. It may also be configured to be supported by the first support table 62 or the second support table 63. The rotation motor 44 may be one unit or three or more units, and the chuck motor 45 may be one unit or three or more units. If the sheet peeling means 50 can peel the inner sheet AS1A from below the second integrated object UP2 supported by the first support table 62, for example, in a state where the second integrated object UP2 is formed by the sheet attaching means 30, it may not be provided in the transfer device EA of the present invention.

[0030] As shown in Fig. 3(A), the sheet peeling means 50 may attach the peeling tape PT to an area of the inner sheet AS1A that is not adhered to the adherend WK. Alternatively, as shown in Fig. 3(B), the peeling tape PT may be attached to an area closer to the central portion of the adherend WK than the outer edge of the adherend WK. It may also be configured to attach the single-sheet peeling tape PT to the inner sheet AS1A. Instead of biasing the support roller 51C in the direction of the feeding means 52, a pinch roller that sandwiches the peeling tape PT with the feeding roller 52B may be employed to feed out the peeling tape PT. At least one of the driving of the feeding means 52, the driving of the linear motor 61, and the driving of the linear motor 57A may be used to apply tension to the peeling tape PT to peel the inner sheet AS1A from the adherend WK. When the accommodating means 53C is lowered to a predetermined position directly above the inner sheet AS1A, the leading end portion of the peeling tape PT held by adsorption on the adsorption surface 53D may be brought into contact with the inner sheet AS1A. The accommodating means 53C may be omitted. Instead of using the holding assisting means 54, the peeling tape PT after peeling the inner sheet AS1A may be held only by the lead holding means 53. The holding assisting means 54 may be replaced by or used in combination with an auxiliary roller 54C, and a configuration may be adopted in which the peeling tape PT is brought into contact with the adsorption surface 53D by a rod-shaped member, a plate-shaped member, air blowing, etc. It may be configured not to employ the heating means 55D, or to employ the heating means 55D to attach the pressure-sensitive adhesive peeling tape PT to the inner sheet AS1A. Instead of the pressing member 55C, a configuration may be adopted in which gas is blown to attach the peeling tape PT to the inner sheet AS1A. At least one of the peeling tape attaching means 55 and the cutting means 56 may not be accommodated in the accommodating means 53C. The peeling tape PT may not be cut. Instead of using the cutting means 56, the peeling tape PT may be cut by another device or manually. Without employing the linear motor 57A and the peeling roller 57C, for example, while not moving or while moving the peeling tape holding members such as the tape support means 51, the feeding means 52, and the lead holding means 53, the second support table 63 may be moved, or the peeling tape holding members may be moved without moving the second support table 63.By relatively moving another device supporting the second integral object UP2 with respect to the tape holding member for peeling, tension may be applied to the peeling tape PT to peel the inner sheet AS1A from the adherend WK.

[0031] The adherend conveying means 60 may have separate drive devices for moving the first support table 62 and the second support table 63, or without adopting the second support table 63, the first support table 62 may be made to perform an operation equivalent to that of the second support table 63, or a drive device for moving at least one of the first support table 62 and the second support table 63 in the front-rear direction may be adopted so that the adherend WK can be moved in the left-right direction within the working area of each means. The planar view shape of the concave groove 62B formed in the first support table 62 may be any annular shape such as a polygon (triangle, square, etc.), an annular shape, an elliptical annular shape, etc., or the concave groove 62B may not be formed in the first support table 62. The system for applying a holding force to the inner support surface 62A and the outer support surface 62C may be one system, or systems for applying a holding force to them may be provided one by one respectively for a total of two systems. The system for applying a holding force to the holding portion 63A and the strong holding portion 63B may be one system, or systems for applying a holding force to them may be provided one by one respectively for a total of two systems. The strong holding portion 63B may be formed in part or all (annular) corresponding to the area of the inner sheet AS1A where the adherend WK is not attached. It may or may not be provided in the transfer device EA of the present invention. When it is not provided in the transfer device EA of the present invention, the adherend WK may be conveyed by another device, or other means such as the sheet attaching means 30 and the sheet peeling means 60 may move without conveying the adherend WK. When it is provided in the transfer device EA of the present invention, the adherend WK may be conveyed and other means such as the sheet attaching means 30 and the sheet peeling means 60 may be moved.

[0032] The adherend WK supplied to the transfer device EA may have only the first adhesive sheet AS1 attached without being supported by the first ring frame RF1. In addition to the annular first and second ring frames RF1 and RF2, the first and second frame members may be, for example, non-annular members.

[0033] The materials, types, shapes, etc. of the first and second adhesive sheets AS1 and AS2, the peeling tape PT, and the adherend WK in the present invention are not particularly limited. For example, the first and second adhesive sheets AS1 and AS2, the peeling tape PT, and the adherend WK may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. Also, the first and second sheets AS1 and AS2 and the peeling tape PT may be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When heat-sensitive adhesive first and second adhesive sheets AS1 and AS2 are employed, they may be adhered by an appropriate method such as providing heating means such as an appropriate coil heater or the heating side of a heat pipe for heating the first and second adhesive sheets AS1 and AS2. Further, such first and second adhesive sheets AS1 and AS2 and peeling tape PT may be, for example, single-layer ones having only an adhesive layer, ones having an intermediate layer between a base material and an adhesive layer, ones having three or more layers such as having a cover layer on the upper surface of the base material, or even so-called double-sided adhesive sheets capable of peeling the base material from the adhesive layer. The double-sided adhesive sheet may be one having a single-layer or multi-layer intermediate layer, or a single-layer or multi-layer one without an intermediate layer. Also, as the adherend WK, for example, it may be a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, pottery, a wooden board, or resin, or a composite formed of two or more of them, and any form of member or article can be targeted. Note that the first and second adhesive sheets AS1 and AS2 may be, for example, any sheet, film, tape, etc., such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a resin sheet for forming a recording layer, etc., when read in terms of function and use.

[0034] The drive device in the above-described embodiment can employ electric devices such as a rotary motor, a linear motor, a linear motor, a single-axis robot, and an articulated robot having two or three or more joints, and actuators such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder, and can also employ a combination of these directly or indirectly. In the above-described embodiment, when a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be formed of a deformable member such as rubber or resin, or the surface of the rotating member or the rotating member itself may be formed of a non-deformable member. Instead of the roller, other members such as a shaft or blade that rotates or does not rotate may be employed. When a pressing means such as a pressing roller or pressing head or a pressing member that presses an object to be pressed is employed, instead of or in combination with those exemplified above, members such as a roller, round bar, blade material, rubber, resin, sponge, etc. may be employed, or a configuration that presses by spraying a gas such as air or gas may be employed. The pressing member may be formed of a deformable member such as rubber or resin, or a non-deformable member. When a peeling means such as a peeling plate or peeling roller or a peeling member that peels an object to be peeled is employed, instead of or in combination with those exemplified above, members such as a plate-like member, round bar, roller, etc. may be employed. The peeling member may be formed of a deformable member such as rubber or resin, or a non-deformable member. When a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member) is employed, a gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc. may be adopted to support (hold) the supported member. When a cutting means or a cutting member that cuts a member to be cut or forms a notch or cutting line in the member to be cut is employed, instead of or in combination with those exemplified above, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of a gas or liquid, etc. may be adopted to cut, or a combination of appropriate driving devices may be used to move and cut. When a biasing means is employed, it may be formed of a spring, rubber, resin, etc.

Explanation of Reference Numerals

[0035] EA…Transfer device 10…Sheet cutting means 30…Sheet attaching means 50…Sheet peeling means AS1…First adhesive sheet AS1A…Inner sheet AS1B…Outer sheet AS2…Second adhesive sheet PT…Peeling tape WK…Adherend WK1…One side WK2…The other side

Claims

1. A sheet peeling device for peeling an inner sheet from an adherend having an inner sheet attached to one side and a second adhesive sheet attached to the other side in a size that protrudes from the outer edge, comprising: a peeling tape having an adhesive strength such that the peeling tape will not come off the inner sheet even when tension necessary for peeling the inner sheet adhered to the second adhesive sheet is applied under conditions in which the outer edge of the inner sheet and the second adhesive sheet are in an adhered state when the inner sheet is peeled off from the adherend, and a sheet attachment means for attaching the peeling tape to an area of ​​the inner sheet directly above the outer edge of the adherend or an area of ​​the inner sheet closer to the center of the adherend than the outer edge of the adherend; a sheet peeling means for applying tension to the peeling tape attached to the inner sheet to peel the inner sheet from the adherend, the sheet peeling device comprising:

2. A sheet peeling method for peeling an inner sheet from an adherend having an inner sheet attached to one side and a second adhesive sheet attached to the other side in a size that protrudes from the outer edge, comprising: preparing a peeling tape having an adhesive strength such that the peeling tape will not come off the inner sheet even when a tension necessary for peeling the inner sheet adhered to the second adhesive sheet is applied under conditions in which the outer edge of the inner sheet and the second adhesive sheet are in an adhered state when the inner sheet is peeled off from the adherend; a step of attaching the peeling tape to an area of ​​the inner sheet immediately above an outer edge of the adherend or an area of ​​the inner sheet closer to a center of the adherend than the outer edge of the adherend; and a step of applying tension to the peeling tape attached to the inner sheet to peel the inner sheet from the adherend.

Images