Purge device

Abstract

A purge device (10) comprises: a placement section (8) on which a container (F) is placed by a transfer device (30); a purge nozzle (11) provided on the placement section (8); a controller (13) that implements control such that a purge process is implemented to supply a purge gas through the purge nozzle (11) into the container (F) placed on the placement section (8); and approach detection sensors (18, 28) that detect the approach of the transfer device (30) or the container (F) to directly above the placement section (8) in a case in which the transfer device (30) causes the container (F) to approach directly above the placement section (8) from the front side or depth side of the placement section (8). On the basis of the detection results of the approach detection sensors (18, 28), the controller (13) implements control so as to discharge the purge gas from the purge nozzle (11) before implementation of the purge process.

Description

Technical Field

[0001] One aspect of the present invention relates to a purge device.

Background Art

[0002] There is known a purge device including a placement unit on which a container is placed by a transfer device, a purge nozzle provided on the placement unit, and a controller that performs a purge process of supplying a purge gas into the container placed on the placement unit via the purge nozzle. In such a purge device, a pre-purge (cleaning of the purge nozzle) process of discharging the purge gas from the purge nozzle may be performed before the purge process (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the purge device as described above, for example, the start of the pre-purge process may be too early, and there is a risk of an increase in the consumption amount of the purge gas in the pre-purge process.

[0005] Therefore, an object of one aspect of the present invention is to provide a purge device capable of suppressing the consumption amount of the purge gas in the pre-purge process.

Means for Solving the Problems

[0006] The purge device according to one aspect of the present invention includes a placement unit on which a container is placed by a transfer device, a purge nozzle provided in the placement unit, a controller that controls so that a purge process in which purge gas is supplied into the container placed on the placement unit via the purge nozzle is performed, and an entry detection sensor that detects the entry of the transfer device or the container directly above the placement unit when the transfer device enters the position directly above the placement unit from the front side or the back side of the placement unit. The controller controls to discharge the purge gas from the purge nozzle before the purge process based on the detection result of the entry detection sensor.

[0007] In this purge device, a pre-purge process can be performed based on the timing when the transfer device or the container enters directly above the placement unit, and it becomes possible to perform the pre-purge process from immediately before the container is placed on the placement unit. As a result, for example, the start of the pre-purge process is not too early, and it becomes possible to suppress the consumption amount of the purge gas in the pre-purge process. Further, when performing the pre-purge process, for example, it is not necessary to trigger a control command on the transfer device side, and the pre-purge process can be performed only by the control on the purge device side.

[0008] The purge device according to one aspect of the present invention may further include a load sensor that detects that a container has been placed on the placement unit, and the controller may control so that the purge process is performed based on the detection result of the load sensor. In this case, it becomes possible to perform the purge process following the pre-purge process by the control on the purge device side.

[0009] In the purge device according to one aspect of the present invention, the placement part is a shelf board suspended from the ceiling part by a plurality of suspension members in a storage shelf, and the entry detection sensor includes a light projector that emits light and a light receiver that receives the light from the light projector. Either one of the light projector and the light receiver may be attached to a suspension member arranged on the front side of the placement part, and either one of the light projector and the light receiver may be attached to a suspension member arranged on the back side of the placement part. In this case, by using the light projector and the light receiver as the entry detection sensor, it is possible to reliably detect the entry of a transfer device or a container directly above the placement part with a simple configuration.

[0010] In the purge device according to one aspect of the present invention, the placement part is a shelf board suspended from the ceiling part by a plurality of suspension members in a storage shelf, and the entry detection sensor includes a transceiver that emits light and receives the reflected light reflected by the reflector of the transfer device in response to the emission. The transceiver may be attached to any of the plurality of suspension members. In this case, by using the transceiver as the entry detection sensor, it is possible to reliably detect the entry of a transfer device or a container directly above the placement part with a simple configuration.

[0011] In the purge device according to one aspect of the present invention, the entry detection sensor may detect the entry of the transfer device directly above the placement part. In this case, compared with the case of detecting the entry of the container directly above the placement part, it is possible to quickly grasp the transfer of the container to the placement part.

[0012] The purge device according to one aspect of the present invention may include a proximity detection sensor that detects a transfer device or a container approaching the placement part from directly above the placement part. In this case, for example, the ongoing pre-purge process can be controlled according to the timing when the transfer device or the container approaches the placement part from directly above.

Advantages of the Invention

[0013] According to one aspect of the present invention, it is possible to provide a purge device capable of suppressing the consumption amount of the purge gas in the pre-purge process.

Brief Description of the Drawings

[0014]

Figure 1

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[0015] Hereinafter, embodiments will be described with reference to the drawings. In the description of the drawings, the same reference numerals are assigned to the same elements, and redundant descriptions are omitted. The terms "X direction", "Y direction", and "Z direction" are based on the directions shown in the drawings and are for convenience only.

[0016] As shown in FIGS. 1, 2, and 3, the purge device 10 according to the embodiment is a device provided in the storage shelf 1, and supplies a purge gas such as nitrogen to the container F stored in the storage shelf 1. The storage shelf 1 is arranged, for example, along the track 4 of the overhead traveling vehicle 2 that constitutes the semiconductor transfer system S of a semiconductor manufacturing factory. The container F is, for example, a FOUP (Front Opening Unified Pod) or a reticle pod. The storage shelf 1 temporarily stores the container F. The storage shelf 1 may be a side track buffer (STB) arranged on the side of the track 4. The storage shelf 1 is configured to purge the inside of the container F with a purge gas.

[0017] As shown in FIGS. 1 and 2, the storage shelf 1 includes, for example, two base frames 6 suspended from the ceiling portion 5, and two beam members 7 spanned between the two base frames 6. Each base frame 6 has two suspension members 61A and 61B suspended from the ceiling portion 5 and extending in the vertical Z direction, and one support member 62 spanned across the lower ends of the suspension members 61A and 61B and extending in the horizontal Y direction. The beam member 7 is attached to the lower surface of the support member 62 of the two base frames 6. The beam member 7 is a member made of, for example, a channel steel having a C-shaped cross section. The beam member 7 extends parallel to the horizontal X direction. The two beam members 7 are spaced apart in the Y direction.

[0018] In the storage shed 1, a flat shelf board 8 is attached onto the beam material 7. The shelf board 8 is a purge shelf including a rectangular plate member that is substantially the same as the bottom surface of the container F or slightly smaller than the bottom surface of the container F. The container F is placed on the shelf board 8 by a transfer device 30 (described later) of the overhead traveling vehicle 2. The shelf board 8 constitutes a placement portion suspended from the ceiling portion 5 by a plurality of suspension members 61A and 61B. The shelf board 8 extends horizontally, for example. Three positioning pins 81 for positioning the container F are attached to the shelf board 8. The three positioning pins 81 are provided so as to protrude on the shelf board 8. The positioning pins 81 are inserted into grooves or holes formed in the bottom surface of the container F placed on the shelf board 8. The shelf board 8 is supported on the beam material 7 via an elastic body 82.

[0019] In the illustrated example, the negative (minus) side in the Y direction of the shelf board 8 corresponds to the front side of the shelf board 8, and the positive (plus) side in the Y direction of the shelf board 8 corresponds to the back side of the shelf board 8. The front side and the back side respectively correspond to one side and the other side in the lateral direction of the track 4 (the lateral direction in the traveling direction of the overhead traveling vehicle 2, the horizontal direction orthogonal to the extending direction of the track 4).

[0020] The purge device 10 includes the above-described shelf board 8, purge nozzles 11, a first pipe 12, a gas control device (controller) 13, a second pipe 14, a main pipe 15, and a load sensor 16. The purge nozzles 11 are provided on the shelf board 8. The purge nozzles 11 are nozzles for supplying gas into the container F. The purge nozzles 11 protrude upward from the placement surface (upper surface) of the shelf board 8. The purge nozzles 11 are connected to introduction holes in the bottom surface of the container F placed on the purge nozzles 11. A plurality of purge nozzles 11 are provided.

[0021] The first pipe 12 is a pipe member that connects between the purge nozzle 11 and the gas control device 13. The gas control device 13 is a device that controls the flow rate of the purge gas. The gas control device 13 is attached at an appropriate position of the storage shelf 1. The gas control device 13 includes a flow controller, a control board, a regulator, an electromagnetic valve, etc. (none of which are shown in the figure). The gas control device 13 controls so that a purge process of supplying the purge gas into the container F placed on the shelf board 8 via the purge nozzle 11 and a pre-purge process of discharging the purge gas from the purge nozzle 11 (a cleaning process of blowing off the dust attached to the purge nozzle 11) are carried out.

[0022] The second pipe 14 is a pipe member that connects between the gas control device 13 and the main pipe 15. The main pipe 15 is connected to the supply source of the purge gas. The main pipe 15 is a pipe member formed of a metal such as stainless steel or a resin such as fluororesin. The main pipe 15 has the second pipe 14 connected thereto via the branch portion 17. The load sensor 16 is a sensor that detects that the container F is placed on the shelf board 8. The load sensor 16 is connected to the gas control device 13 and outputs the detection result to the gas control device 13. The load sensor 16 is arranged at a position close to one positioning pin 81. As the load sensor 16, for example, a contact sensor that turns ON when contacting the bottom surface of the container F and a proximity sensor that turns ON when approaching the bottom surface of the container F can be used.

[0023] As shown in FIGS. 2 and 4, the ceiling traveling vehicle 2 travels along a track 4 laid near the ceiling portion 5. The track 4 forms a traveling path for the ceiling traveling vehicle 2. The ceiling traveling vehicle 2 conveys the container F and transfers the container F to the shelf board 8 of the storage shelf 1. The ceiling traveling vehicle 2 includes a frame unit 21, a traveling unit 22, a transfer device 30, and a carrier vehicle controller 23. The frame unit 21 has a center frame 24, a front frame 25, and a rear frame 26. The front frame 25 extends downward from the front end (the front side in the traveling direction of the ceiling traveling vehicle 2) of the center frame 24. The rear frame 26 extends downward from the rear end (the rear side in the traveling direction of the ceiling traveling vehicle 2) of the center frame 24.

[0024] The traveling unit 22 is disposed above the center frame 24. The traveling unit 22 travels along the track 4, for example, by receiving power supply non - contact from a high - frequency current line laid along the track 4. The transfer device 30 is a device for transferring the container F between the shelf board 8, and includes a lateral unit 31, a theta unit 32, a lifting drive unit 33, and a holding unit 34. The lateral unit 31 is disposed below the center frame 24. The lateral unit 31 is driven to slide in the Y direction (the lateral direction in the traveling direction of the ceiling traveling vehicle 2), and moves the theta unit 32, the lifting drive unit 33, and the holding unit 34 in the Y direction. The theta unit 32 is disposed below the lateral unit 31. The theta unit 32 rotates the lifting drive unit 33 and the holding unit 34 in a horizontal plane.

[0025] The lifting drive unit 33 is disposed below the theta unit 32. The lifting drive unit 33 raises and lowers the holding unit 34 by feeding out and winding up a plurality of belts (hanging lower members) B connected to the holding unit 34. The holding unit 34 is disposed below the lifting drive unit 33. The holding unit 34 is provided so as to be movable up and down by the lifting drive unit 33. The holding unit 34 holds the flange 201 of the container F. The carrier vehicle controller 23 is disposed on the center frame 24. The carrier vehicle controller 23 is an electronic control unit composed of a CPU (Central Processing Unit), a ROM (Read only memory), a RAM (Random access memory), etc. The carrier vehicle controller 23 controls each part of the overhead traveling vehicle 2.

[0026] As shown in FIGS. 1 and 2, the purge device 10 of the present embodiment includes a pre-purge sensor 18. The pre-purge sensor 18 is an entry detection sensor that detects the entry of the transfer device 30 directly above the shelf board 8 when the transfer device 30 enters the container F directly above the shelf board 8 from the front side of the shelf board 8. Directly above the shelf board 8 corresponds to, for example, the space directly above the shelf board 8, the space directly above the shelf board 8 in a straight line, and the space overlapping the shelf board 8 when viewed from above. The pre-purge sensor 18 here can detect a lateral unit 31 (a part of the transfer device 30) that slides along the horizontal direction during transfer. The pre-purge sensor 18 is connected to the gas control device 13 and outputs the detection result to the gas control device 13.

[0027] The pre-purge sensor 18 has a light projector 18A that emits light and a light receiver 18B that receives the light from the light projector 18A. The light projector 18A is attached to a hanging member 61A disposed on the front side of the shelf board 8 in one of the two base frames 6. The light receiver 18B is attached to a hanging member 61B disposed on the back side of the shelf board 8 in the other of the two base frames 6.

[0028] In one example, the projector 18A is disposed above the lateral unit 31. The light receiver 18B is disposed below the lateral unit 31. The projector 18A and the light receiver 18B emit and receive light so as to intersect the shelf board 8 when viewed from above. The projector 18A and the light receiver 18B emit and receive light so as to intersect all of the X direction, the Y direction, and the Z direction. The projector 18A is disposed such that light hits the lateral unit 31 during sliding or at the initial stage of the start of sliding during transfer. Such a pre-purge sensor 18 detects the entry of the transfer device 30 directly above the shelf board 8 when the light from the projector 18A is blocked and not received by the light receiver 18B. The pre-purge sensor 18 does not detect the entry of the transfer device 30 directly above the shelf board 8 (in other words, detects that it has not entered) when the light from the projector 18A is not blocked and is received by the light receiver 18B. Note that the projector 18A and the light receiver 18B are not particularly limited, and various known projectors and light receivers may be used.

[0029] Based on the detection result of the pre-purge sensor 18, the gas control device 13 controls to discharge the purge gas from the purge nozzle 11 before performing the purge process (perform the pre-purge process). Further, the gas control device 13 controls to perform the purge process based on the detection result of the load sensor 16. For example, the gas control device 13 executes the following process. That is, as shown in FIG. 5, it is determined whether or not the transfer device 30 has entered directly above the shelf board 8 by the pre-purge sensor 18 (step S1). If YES in step S1 above, a pre-purge process of discharging the purge gas at a first flow rate from the purge nozzle 11 is started (step S2). If NO in step S1 above, the process returns to step S1. After step S2 above, it is determined whether or not the placement of the container F on the shelf board 8 has been detected by the load sensor 16 (step S3). If YES in step S3 above, a purge process of supplying the purge gas at a second flow rate into the container F placed on the shelf board 8 through the purge nozzle 11 is started (step S4). If NO in step S3 above, the process returns to step S3.

[0030] Incidentally, the first flow rate of the pre-purge process and the second flow rate of the purge process may be the same or different. The pre-purge process may end at the start timing of the purge process (for example, YES in step S3 above), or may end before the start of the purge process (for example, before step S3 above). When the first flow rate and the second flow rate are the same, the pre-purge process and the purge process may be carried out without interruption.

[0031] Figures 6(a), 6(b), 7(a) and 7(b) are schematic side views for explaining examples of the pre-purge process and the purge process when transferring the container F from the ceiling traveling vehicle 2 to the shelf board 8 of the storage shelf 1. For example, when transferring the container F from the ceiling traveling vehicle 2 to the shelf board 8 of the storage shelf 1, as shown in Figure 6(a), the ceiling traveling vehicle 2 holding the container F stops at a position close to the front side of the empty shelf board 8. At this time, the purge gas from the purge nozzle 11 of the shelf board 8 is not discharged.

[0032] Subsequently, as shown in Figure 6(b), by sliding the lateral unit 31 in the Y direction, the theta unit 32, the lifting drive unit 33, the holding unit 34 and the container F are moved from the front side to the back side. As a result, the lateral unit 31, the theta unit 32, the lifting drive unit 33, the holding unit 34 and the container F enter the directly above space H, which is the space directly above the shelf board 8, along the Y direction, and at least a part of them is positioned within the directly above space H. At this time, for example, in the initial stage of the sliding operation of the lateral unit 31, the lateral unit 31 blocks the light from the projector 18A of the pre-purge sensor 18, and the start of the entry of the lateral unit 31 into the directly above space H (the start of transfer by the transfer device 30) is detected by the pre-purge sensor 18. As a result, triggered by the detection, the above-mentioned pre-purge process is started.

[0033] Subsequently, as shown in Fig. 7(a), the lifting drive unit 33 is driven to lower the holding unit 34, and the container F is placed on the shelf board 8. At this time, the container F contacts the load sensor 16 and the load sensor 16 turns ON, detecting the placement of the container F on the shelf board 8. As a result, triggered by this detection, the above-described purge process is started. After that, the holding unit 34 releases the holding of the flange 201 of the container F, and the holding unit 34 is lifted to the upper end by the lifting drive unit 33. By driving and sliding the lateral unit 31, the theta unit 32, the lifting drive unit 33, and the holding unit 34 are moved from the back side to the front side, and these are detached from the directly above space H. Then, as shown in Fig. 7(b), the ceiling traveling vehicle 2 that is not holding the container F travels, for example, toward another transfer source.

[0034] As described above, in the purge device 10, the pre-purge process can be carried out based on the timing when the transfer device 30 enters directly above the shelf board 8, and it becomes possible to perform the pre-purge process immediately before the container F is placed on the shelf board 8. Thereby, for example, the start of the pre-purge process does not become too early, and it becomes possible to suppress the consumption amount of the purge gas in the pre-purge process. It becomes possible to surely carry out the pre-purge process for cleaning the purge nozzle 11 or the like with the minimum necessary amount of purge gas.

[0035] Also, in the purge device 10, when carrying out the pre-purge process, for example, it is not necessary to use as a trigger a control command on the transfer device 30 side (each control timing etc. included in the control command), and it becomes possible to carry out the pre-purge process only by the control on the purge device 10 side which is the local side. That is, it becomes possible to start the pre-purge process at the timing immediately before the container F is placed on the shelf board 8 without going through the upper control command. When the ceiling traveling vehicle 2 transfers the container F to the shelf board 8 based on the remote operation of the user, the present embodiment in which the start of the pre-purge process can be controlled only by the control on the purge device 10 side is particularly effective.

[0036] The purge device 10 further includes a load sensor 16 that detects that the container F is placed on the shelf board 8. The gas control device 13 performs a purge process based on the detection result of the load sensor 16. In this case, it becomes possible to perform a purge process following a pre-purge process under the control of the purge device 10 side.

[0037] In the purge device 10, the shelf board 8 is suspended from the ceiling portion 5 in the storage shelf 1 by a plurality of suspension members 61A and 61B. The light emitter 18A of the pre-purge sensor 18 is attached to the suspension member 61A arranged on the front side of the shelf board 8, and the light receiver 18B of the pre-purge sensor 18 is attached to the suspension member 61B arranged on the back side of the shelf board 8. In this case, by using the light emitter 18A and the light receiver 18B as the pre-purge sensor 18 which is an entry detection sensor, it is possible to reliably detect the entry of the transfer device 30 directly above the shelf board 8 with a simple configuration.

[0038] In the purge device 10, the pre-purge sensor 18 detects the entry of the transfer device 30 directly above the shelf board 8. In this case, compared with the case of detecting the entry of the container F directly above the shelf board 8, it becomes possible to quickly grasp the transfer of the container F onto the shelf board 8.

[0039] As described above, the embodiments according to one aspect of the present invention have been described, but one aspect of the present invention is not limited to the above embodiments.

[0040] In the above embodiment, the entry detection sensor may include a light emitter and a light receiver that receives the reflected light reflected by the reflector of the transfer device 30 in response to the emission of light. The light emitter and the light receiver may be attached to any of the plurality of suspension members 61A and 61B. In this case, by using the light emitter and the light receiver, it is possible to reliably detect the entry of the transfer device 30 directly above the shelf board 8 with a simple configuration. As an example of such an entry detection sensor, for example, the pre-purge sensor 28 shown in FIGS. 8(a) and 8(b) may be used.

[0041] The pre-purge sensor 28 includes a light transmitter and receiver that emits light downward and is provided at a position higher than the transfer device 30 in the suspension member 61B. Further, a reflector R1 such as a mirror is provided on the upper surface of the theta unit 32. In this case, when the lateral unit 31 slides and the theta unit 32, the lifting drive unit 33, the holding unit 34, and the container F enter directly above the shelf board 8 from the front side, the light emitted downward from the pre-purge sensor 28 is reflected by the reflector R1, and the reflected light is received by the pre-purge sensor 28. Therefore, based on whether the reflected light is detected by the pre-purge sensor 28, it is possible to reliably detect the entry of the transfer device 30 directly above the shelf board 8. Note that the reflector R1 may be arranged on the shelf board 8, and the light from the light transmitter 18A may be blocked by the lateral unit 31 or the like that has entered directly above the shelf board 8 and not received by the light receiver 18B, so as to detect the entry of the transfer device 30. Further, without using the reflector R1, the entry of the transfer device 30 may be detected by detecting the lateral unit 31 or the like that has entered directly above the shelf board 8 with a distance sensor or the like.

[0042] The above embodiment and the above modification may further include a proximity detection sensor that detects the transfer device 30 or the container F approaching the shelf board 8 from directly above the shelf board 8. In this case, according to the timing when the transfer device 30 or the container F approaches the shelf board 8 from directly above the shelf board 8, the pre-purge process being performed can be appropriately controlled. For example, the mode of the pre-purge process being performed can be changed using the approach as a trigger. As an example of such a proximity detection sensor, for example, the pre-purge sensor 38 shown in FIGS. 9(a) and 9(b) may be used.

[0043] The pre-purge sensor 38 includes a light emitter 38A attached to the lower part of the suspension member 61B on the back side of the shelf board 8, and a light receiver 38B attached to the lower part of the suspension member 61A arranged on the front side of the shelf board 8. The light emitter 38A and the light receiver 38B emit and receive light along the horizontal direction. In this case, when the lifting drive unit 33 is driven and the holding unit 34 descends, and when the transfer device 30 or the container F approaches the shelf board 8, in the pre-purge sensor 38, the light from the light emitter 38A is blocked and not received by the light receiver 38B. Therefore, based on whether light is detected by the pre-purge sensor 38, it is possible to reliably detect the approach of the transfer device 30 or the container F from directly above the shelf board 8 to the shelf board 8.

[0044] Alternatively, as an example of the proximity detection sensor, the pre-purge sensor 48 shown in FIGS. 10(a) and 10(b) may be used. The pre-purge sensor 48 includes a light emitter / receiver that emits light toward the front side at the lower part of the suspension member 61B. Further, a reflector R2 such as a mirror is provided on the back side surface of the holding unit 34. In this case, when the lifting drive unit 33 is driven and the holding unit 34 descends, and when the lifting drive unit 33 approaches the shelf board 8, the light emitted from the pre-purge sensor 48 is reflected by the reflector R2, and the reflected light is received by the pre-purge sensor 48. Therefore, based on whether the reflected light is detected by the pre-purge sensor 48, it is possible to reliably detect the approach of the lifting drive unit 33 from directly above the shelf board 8 to the shelf board 8.

[0045] In the above-described embodiments and the above-described modification examples, the entry detection sensor detects the entry of the transfer device 30 directly above the shelf board 8, but may also detect the entry of the container F directly above the shelf board 8. In the above-described embodiments and the above-described modification examples, the container F is caused to enter directly above the shelf board 8 from the front side of the shelf board 8 by the transfer device 30, but the container F may also be caused to enter directly above the shelf board 8 from the back side of the shelf board 8. In the above-described embodiments and the above-described modification examples, the entry detection sensor is not particularly limited, and various sensors may be used as long as they can detect the entry of the transfer device 30 or the container F directly above the shelf board 8. In the above-described embodiments and the above-described modification examples, the light projector 18A is attached to the suspension member 61A, and the light receiver 18B is attached to the suspension member 61B, but the light projector 18A may be attached to the suspension member 61B, and the light receiver 18B may be attached to the suspension member 61A.

[0046] In the above-described embodiments and modification examples, as shown in FIG. 11 for example, a plurality of sets of the light projector 18A and the light receiver 18B may be arranged for each shelf board 8. In the illustrated example, a beam member 68A extending along the X direction is provided so as to span the upper portions of a pair of suspension members 61A, 61A spaced apart in the X direction. A beam member 68B extending along the X direction is provided so as to span a position below the beam member 68A in a pair of suspension members 61B, 61B spaced apart in the X direction. The light projector 18A is provided at a position corresponding to each shelf board 8 on the beam member 68A, and the light receiver 18B is provided at a position corresponding to each shelf board 8 on the beam member 68B.

[0047] In the above-described embodiments and modification examples, an example in which one aspect of the present invention is applied to the storage shelf 1 configured to be suspended from the ceiling has been described. However, for example, one aspect of the present invention may be applied to a storage shelf (pallet stocker) installed on the ground or the like. In the above-described embodiments and modification examples, the overhead traveling vehicle 2 has been described as an example of the transport device, but a transport device such as a stacker crane traveling on the ground may also be used.

[0048] Hereinafter, the constituent elements of one aspect of the present invention will be described. <Invention 1> A placement portion on which a container is placed by a transfer device, A purge nozzle provided in the placement unit, A controller that controls so that a purge process of supplying a purge gas into the container placed on the placement unit is performed via the purge nozzle, An entry detection sensor that detects entry of the transfer device or the container directly above the placement unit when the transfer device enters the placement unit directly above from the front side or the back side of the placement unit, and is provided, The controller controls to discharge the purge gas from the purge nozzle before the purge process is performed based on the detection result of the entry detection sensor, a purge device. <Invention 2> Further provided with a load sensor that detects that the container is placed on the placement unit, The controller controls to perform the purge process based on the detection result of the load sensor, the purge device according to Invention 1. <Invention 3> The placement unit is a shelf board suspended from a ceiling portion by a plurality of suspension members in a storage shelf, The entry detection sensor includes a light projector that emits light and a light receiver that receives the light from the light projector, Either one of the light projector and the light receiver is attached to the suspension member disposed on the front side of the placement unit, Either one of the light projector and the light receiver is attached to the suspension member disposed on the back side of the placement unit, the purge device according to Invention 1 or 2. <Invention 4> The placement unit is a shelf board suspended from a ceiling portion by a plurality of suspension members in a storage shelf, The entry detection sensor includes a light projector and receiver that emits light and receives reflected light reflected by a reflector of the transfer device in response to the emission, The light projector and receiver is attached to any one of the plurality of suspension members, the purge device according to Invention 1 or 2. <Invention 5> The purge device according to any one of Inventions 1 to 4, wherein the entry detection sensor detects entry of the transfer device directly above the placement unit. <Invention 6> The purge device according to any one of Inventions 1 to 5, comprising a proximity detection sensor that detects the transfer device or the container approaching the placement unit from directly above the placement unit.

Description of Signs

[0049] 1... storage shelf, 5... ceiling part, 8... shelf board (placement unit), 10... purge device, 11... purge nozzle, 13... gas control device (controller), 16... load sensor, 18, 28... pre-purge sensor (entry detection sensor), 18A... projector, 18B... light receiver, 30... transfer device, 38, 48... pre-purge sensor (proximity detection sensor), 61A, 61B... suspension members, F... container.

Claims

1. A placement part on which a container is placed by a transfer device, A purge nozzle provided on the placement part, A controller that controls so that a purge process of supplying a purge gas into the container placed on the placement part through the purge nozzle is performed, When the transfer device enters the container directly above the placement part from the front side or the back side of the placement part, an entry detection sensor that detects a sliding operation of the transfer device or the container in the horizontal direction and detects the entry of the transfer device or the container in the horizontal direction directly above the placement part, and The controller controls to discharge the purge gas from the purge nozzle before the implementation of the purge process based on the detection result of the entry detection sensor. A purge device.

2. Further comprising a load sensor that detects that the container is placed on the placement part, The controller controls so that the purge process is performed based on the detection result of the load sensor. The purge device according to claim 1.

3. The placement part is a shelf board suspended from a ceiling part by a plurality of suspension members in a storage shelf, The entry detection sensor includes a light projector that emits light and a light receiver that receives the light from the light projector, Either the light projector or the light receiver is attached to the suspension member arranged on the front side of the placement part, Either the light projector or the light receiver is attached to the suspension member arranged on the back side of the placement part. The purge device according to claim 1 or 2.

4. The placement part is a shelf board suspended from a ceiling part by a plurality of suspension members in a storage shelf, The entry detection sensor includes a light projector and receiver that emits light and receives reflected light reflected by a reflector of the transfer device in response to the emission, The light projector and receiver is attached to any one of the plurality of suspension members. The purge device according to claim 1 or 2.

5. The entry detection sensor detects the entry of the transfer device directly above the placement part. The purge device according to claim 1 or 2.

6. The purge device according to claim 1 or 2, further comprising a proximity detection sensor that detects the transfer device or the container approaching the placement part from directly above the placement part.

Images