Tape disposal device

Abstract

To surely drop a tape from a tape transfer unit into a box.SOLUTION: A tape discarding device comprises: a rectangular parallelepiped box which has a rectangular outer shape, in which a circular opening is formed in a central part and which includes in an upper part an opening sized larger than an outer shape of a tape including an adhesive layer on one side; and a tape transfer unit including a frame and a plurality of suction pads provided on a bottom face side of the frame and being capable of transferring the tape to the box while sucking and holding the tape with the plurality of suction pads. The box includes a plurality of elastic board units each being disposed so as to protrude from an inner edge of the opening of the box to the central part and elastically deformable and including a through hole in which one suction pad can be inserted. The plurality of elastic board units is capable of allowing the tape to enter the box by being elastically deformed when being pushed down with the falling tape and is capable of regulating the tape from leaving the box by pressing a top face side of the rising tape downward.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a tape disposal device for disposing of a tape having a rectangular outer shape, a circular opening formed in the central portion, and an adhesive layer on one surface side.

Background Art

[0002] When a circular workpiece such as a semiconductor wafer is diced into a plurality of chips, a rectangular tape attached to the workpiece so as to protrude outside the outer periphery of the workpiece is pulled and expanded in all directions, thereby dividing the workpiece into a plurality of chips and expanding the interval between the chips. A processing apparatus is known (see, for example, Patent Documents 1 and 2).

[0003] After expanding the interval between the chips, one surface of a ring frame including an opening having a predetermined diameter is attached to a rectangular tape, thereby arranging the ring frame so as to surround the outside of a plurality of chips corresponding to the radially outer peripheral portion of the workpiece. Thereby, the tape located in the region corresponding to the opening is fixed in an expanded state, and the interval between the chips is fixed.

[0004] The tape usually has a laminated structure in which a base material layer and an adhesive layer are laminated, and the workpiece and the ring frame are attached to the adhesive layer side. After attachment, the tape is cut along a circle having a predetermined diameter that is larger than the diameter of the opening of the ring frame and smaller than the outer diameter of the ring frame, and the tape is separated into a circular region having the predetermined diameter and an outer region having a rectangular outer shape and an opening corresponding to the circular region.

[0005] The outer region of the tape is conveyed by a tape conveyance unit of the tape disposal device and discarded into a rectangular parallelepiped box (garbage box) having a rectangular opening at the top. The tape conveyance unit has a plurality of suction pads for sucking the four corners of one surface of the tape.

[0006] The suction pad holds the tape in a manner that it contacts the adhesive layer side of the tape. Usually, at least the contact portion of the suction pad with the tape is provided with a coating layer formed of a material that is difficult to adhere to the adhesive layer (for example, a fluororesin such as polytetrafluoroethylene).

[0007] The tape conveyance unit, for example, moves to the upper part of the box body while sucking the four corners of one side of the tape with the suction pads, enters the box body from the opening, and then stops sucking with the suction pads. Then, by injecting air from the suction pads, the tape is dropped into the box body.

[0008] However, as the number of uses increases, for example, the coating layer of the suction pad deteriorates and the coating layer partially peels off, resulting in a state where the adhesive layer of the tape adheres to the suction pad, and the tape may not be able to be dropped into the box body even when air is injected.

Prior Art Documents

Patent Documents

[0009]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0010] The present invention has been made in view of such problems, and an object thereof is to surely drop the tape from the tape conveyance unit into the box body.

Means for Solving the Problems

[0011] According to one aspect of the present invention, there is provided a tape disposal device for disposing of a tape having a rectangular outer shape with a circular opening formed in the central portion and having an adhesive layer on one surface side, the tape disposal device comprising: a rectangular parallelepiped box body having an opening with a size larger than the outer shape of the tape at the upper part; a frame; and a plurality of suction pads provided on the bottom surface side of the frame. The tape disposal device further includes a tape conveyance unit configured to convey the tape to the box body in a state where the tape is sucked and held by the plurality of suction pads. The box body has a plurality of elastic plate units each arranged to protrude from the inner peripheral edge of the opening of the box body toward the central portion, being elastically deformable, and having a through hole into which one suction pad can be inserted. When the frame holding the tape sucked by the plurality of suction pads descends relative to the box body and the tape enters the box body, the plurality of elastic plate units are elastically deformed when pushed down by the descending tape, thereby allowing the tape to enter the box body. After the suction by the plurality of suction pads inside the box body is released, when the tape is attached to at least one of the plurality of suction pads when the frame ascends relative to the box body, the elastic plate unit corresponding to the at least one ascending suction pad presses the upper surface side of the tape downward, thereby peeling the tape from the at least one suction pad and restricting the tape from exiting the box body.

[0012] Preferably, the tape conveyance unit has four suction pads that suck and hold the four corners on one surface side of the tape, and the four suction pads are arranged at different positions on the frame such that the through hole of one elastic plate unit corresponds to one suction pad.

[0013] Also preferably, each of the plurality of elastic plate units includes a base plate at least the outer surface of which is covered with a fluororesin, and a urethane foam resin block disposed on the bottom surface side of the base plate so as to allow deformation by pressing downward of the base plate but suppress deformation by pressing upward of the base plate.

Advantages of the Invention

[0014] In the tape disposal device according to one aspect of the present invention, even when the adhesive layer of the tape is attached to the suction pad and the tape cannot be dropped even when air is jetted, the elastic plate unit can peel the tape from the suction pad, so that the tape can be surely dropped into the box body.

Brief Description of the Drawings

[0015]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Modes for Carrying Out the Invention

[0016] With reference to the accompanying drawings, an embodiment according to one aspect of the present invention will be described. FIG. 1 is a perspective view of a tape expansion device 2. As shown in FIG. 1, the tape expansion device 2 includes a tape conveyance unit 6 and a tape disposal device 4 provided with a box body 8.

[0017] After attaching a rectangular tape (i.e., an expandable tape) 13 having elasticity to a disk-shaped workpiece 11, the tape 13 is expanded in all directions, and then a ring frame 17 having an opening 17a with a diameter larger than the diameter of the workpiece 11 is attached to a predetermined region of the tape 13 located outside the outer peripheral edge of the workpiece 11 (see FIG. 2).

[0018] Thereafter, the central portion of the tape 13 is cut out in a circular shape, and the outer region of this circular shape is conveyed to the box body 8 by the tape conveyance unit 6. Here, with reference to FIG. 2, the workpiece 11 will be described. FIG. 2 is a perspective view of a workpiece unit 19 including the workpiece 11. The workpiece 11 is, for example, a semiconductor wafer formed of a semiconductor material such as silicon.

[0019] On the surface 11a side of the workpiece 11, a plurality of division planned lines (not shown) are set in a grid pattern. Devices 15 such as ICs (Integrated Circuits) are formed in each region partitioned by the division planned lines. However, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the devices 15.

[0020] At different depth positions of the workpiece 11 along each division planned line, a plurality of modified layers (not shown) are formed using a laser processing device (not shown). The modified layer is a region where the mechanical strength is weaker than the region where the device 15 is formed.

[0021] The modified layer can be formed, for example, by irradiating a pulsed laser beam from the back surface 11b side while sucking and holding the surface 11a side with a chuck table (not shown) via a protective tape (not shown).

[0022] Specifically, with the condensing point of a pulsed laser beam having a wavelength that penetrates the workpiece 11 positioned at a predetermined depth inside the workpiece 11, a modified layer can be formed by relatively moving this condensing point along the planned division line.

[0023] After forming one or a plurality of modified layers on each planned division line, the above-described tape 13 is attached to the back surface 11b side. The attachment of the tape 13 is performed using the tape supply unit 10, the attachment unit 12, the delivery unit 40, etc. of the tape stretching device 2.

[0024] Here, returning to FIG. 1, the components of the tape stretching device 2 will be described. The X-axis direction, the Y-axis direction, and the Z-axis direction shown in FIG. 1 are directions perpendicular to each other. The +X direction and the -X direction are opposite directions and are both parallel to the X-axis direction.

[0025] Similarly, the +Y direction and the -Y direction are opposite directions and are both parallel to the Y-axis direction. Also, the +Z direction and the -Z direction are opposite directions and are both parallel to the Z-axis direction. In this specification, the +Z direction may be referred to as upward and the -Z direction may be referred to as downward.

[0026] The tape stretching device 2 includes a flat base 2a. At the corners of the base 2a in the -X direction and the -Y direction, a tape supply unit 10 for supplying the tape 13 to the workpiece 11 is arranged.

[0027] In the tape supply unit 10, for example, a roll body (not shown) around which a tape 13 with a release film is wound in a roll shape is arranged. The width of the wound tape 13 in the short side direction is larger than the diameter of the workpiece 11.

[0028] The tape 13 has a resin base material layer 13a (see FIG. 3(B)). The base material layer 13a is formed of, for example, a stretchable polyolefin or the like. A resin adhesive layer (paste layer) 13b is formed on the entire surface of one side of the base material layer 13a (see FIG. 3(B)).

[0029] In this way, an adhesive layer 13b is formed over the entire surface on one side 13c of the tape 13. The adhesive layer 13b is formed of, for example, an ultraviolet curable resin, but may be formed of other materials such as a thermosetting resin.

[0030] The tape supply unit 10 includes a feed roller (not shown) that feeds out the tape 13 with a release film from a roll body, and a peeling plate (not shown) that peels the release film from the tape 13 with the release film.

[0031] Furthermore, the tape supply unit 10 includes a take-up roller (not shown) that winds up the peeled release film, and an application roller (not shown) that supports the base material layer 13a side of the tape 13 from which the release film has been peeled.

[0032] Above the tape supply unit 10, an application unit 12 is disposed that presses the workpiece 11 against the adhesive layer 13b side of the tape 13 while sucking and holding the workpiece 11. The application unit 12 includes a disk-shaped first chuck table 14.

[0033] The first chuck table 14 has a substantially flat holding surface 14a connected to a suction source (not shown) such as an ejector via a predetermined flow path. The holding surface 14a sucks and holds an object by negative pressure. A flat base portion 16 is fixed to the opposite side of the holding surface 14a.

[0034] The base portion 16 is rotatable around a rotation axis 18 disposed substantially parallel to the X-axis direction. A drive source (not shown) such as a motor is connected to the rotation axis 18, and the first chuck table 14 is positioned by the drive source in a state where the holding surface 14a faces upward and a state where the holding surface 14a faces downward.

[0035] The first chuck table 14 is fixed to an air cylinder 22 via a frame body 20. The air cylinder 22 moves the first chuck table 14 along the Z-axis direction. The air cylinder 22 is supported by a support plate 24 including a through hole 24a having a diameter larger than the diameter of the first chuck table 14.

[0036] On one side of the support plate 24 in the -X direction, there are provided a cutting edge portion 26 having a cutting edge (not shown) for cutting the tape 13 and a heater 28 for heating the cutting edge. The cutting edge portion 26 is configured to be movable along the Y-axis direction by a moving mechanism (not shown) provided on the support plate 24.

[0037] On one side of the support plate 24 in the +Y direction, there is provided a ball screw type X-axis direction moving mechanism 30 for moving the attaching unit 12 along the X-axis direction. The X-axis direction moving mechanism 30 has a pair of guide rails 32 arranged substantially parallel to the X-axis direction.

[0038] A moving plate 34 is attached to the pair of guide rails 32 so as to be slidable in the X-axis direction. A nut portion (not shown) is provided on the back surface side of the moving plate 34, and a ball screw 36 arranged substantially parallel to the X-axis direction is rotatably connected to the nut portion.

[0039] One end of the ball screw 36 is connected to a rotational drive source 38 such as a motor. By operating the rotational drive source 38, the moving plate 34 moves along the X-axis direction. Here, a procedure for attaching the tape 13 to the back surface 11b side of the workpiece 11 will be described.

[0040] First, the attaching unit 12 is arranged above the tape supply unit 10. Then, with the holding surface 14a facing upward, the workpiece 11 is placed on the holding surface 14a such that the surface 11a side faces the holding surface 14a through a protective tape (not shown).

[0041] Thereafter, with the surface 11a side sucked and held by the holding surface 14a, the rotary shaft 18 is rotated to turn the holding surface 14a downward, and further, the air cylinder 22 is operated to move the first chuck table 14 downward.

[0042] At this time, the tape 13 is fed out below the support plate 24 so that the adhesive layer 13b is exposed upward. By moving the first chuck table 14 downward through the through hole 24a, the adhesive layer 13b of the tape 13 is attached to the entire back surface 11b side.

[0043] Next, the cutting blade portion 26 is moved along the Y-axis direction to cut the tape 13. As a result, the tape 13 is cut so as to have a substantially square (rectangular) outer shape (see FIG. 2). The workpiece 11 to which the tape 13 is attached is placed on the delivery unit 40 disposed below the attachment unit 12.

[0044] The delivery unit 40 has a rectangular moving plate 42. On the moving plate 42, a disc-shaped support plate 44 that can rotate around a predetermined rotation axis along the Z-axis direction is provided. At the central portion of the support plate 44, a columnar air cylinder 46 is provided in a manner protruding in the +Z direction from the support plate 44.

[0045] A disc-shaped second chuck table 48 is provided at the upper end of the air cylinder 46. The second chuck table 48 has a circular and substantially flat holding surface 48a on its upper surface. A negative pressure generated by a suction source (not shown) such as an ejector is transmitted to the holding surface 48a.

[0046] A plurality of clamp mechanisms 50 are provided on the side portion of the second chuck table 48. In the present embodiment, four clamp mechanisms 50 are provided at substantially equal intervals along the circumferential direction of the holding surface 48a. The four clamp mechanisms 50 sandwich the four corners of the tape 13 sucked and held on the holding surface 48a.

[0047] A rectangular parallelepiped-shaped support column 52 is provided on the upper surface of the support plate 44. At the upper end portion of the support column 52, two roller portions 54 are provided at substantially the same height position. Each roller portion 54 is used when attaching the ring-shaped ring frame 17 (see FIG. 2) formed of a thin metal plate to the tape 13.

[0048] At the upper end of the support column 52, between the two roller parts 54, one cutting blade part 56 is provided. The cutting blade part 56 has a disc-shaped cutting blade. The cutting blade part 56 is used when cutting the tape 13 with the ring frame 17 attached along the outside of the opening 17a (see FIG. 2) of the ring frame 17 and along the opening 17a.

[0049] At the lower part of each roller part 54, an air cylinder (not shown) is provided, and the height of each roller part 54 is adjusted by the air cylinder. Also, at the lower part of the cutting blade part 56, an air cylinder (not shown) is provided, and the height of the cutting blade part 56 is adjusted by the air cylinder.

[0050] At the lower part of the moving plate 42, a ball screw type X-axis direction moving mechanism 60 is provided. The X-axis direction moving mechanism 60 has a pair of guide rails 62 arranged substantially parallel to the X-axis direction. On the guide rails 62, the moving plate 42 is slidably attached in the X-axis direction.

[0051] On the back side of the moving plate 42, a nut part (not shown) is provided. A ball screw 64 substantially parallel to the X-axis direction is rotatably connected to the nut part. At one end of the ball screw 64, a rotational drive source such as a motor (not shown) is connected.

[0052] When the rotational drive source is operated, the moving plate 42 moves along the X-axis direction. By the way, above the delivery unit 40, a peeling mechanism 70 for peeling the protective tape attached to the surface 11a side is provided.

[0053] After the tape 13 is attached to the back surface 11b side, the moving plate 42 moves in the +X direction, and the protective tape on the surface 11a side is peeled off by the peeling mechanism 70. After the peeling of the protective tape, the moving plate 42 further moves in the +X direction and moves directly below the expansion unit 72.

[0054] The extension unit 72 has a first clamping unit 74A, a second clamping unit 74B, a third clamping unit 74C, and a fourth clamping unit 74D that respectively clamp the tape 13 in the Z-axis direction.

[0055] The first clamping unit 74A and the second clamping unit 74B are arranged to face each other in the X-axis direction and are movable along the X-axis direction so as to approach each other or move away from each other by a ball screw type movement mechanism.

[0056] Each of the first clamping unit 74A and the second clamping unit 74B includes an upper clamping portion and a lower clamping portion that respectively have a long portion along the Y-axis direction. The upper clamping portion and the lower clamping portion are movable along the Z-axis direction so as to approach each other or move away from each other by a ball screw type movement mechanism.

[0057] The third clamping unit 74C and the fourth clamping unit 74D are arranged to face each other in the Y-axis direction and are movable along the Y-axis direction so as to approach each other or move away from each other by a ball screw type movement mechanism.

[0058] Each of the third clamping unit 74C and the fourth clamping unit 74D includes an upper clamping portion and a lower clamping portion that respectively have a long portion along the X-axis direction. The upper clamping portion and the lower clamping portion are movable along the Z-axis direction so as to approach each other or move away from each other by a ball screw type movement mechanism.

[0059] After the moving plate 42 moves directly below the extension unit 72, the air cylinder 46 raises the second chuck table 48 until the tape 13 reaches the height position between the upper clamping portion and the lower clamping portion. Then, after clamping the four sides of the tape 13 with the upper clamping portion and the lower clamping portion, the air cylinder 46 lowers the second chuck table 48.

[0060] In this way, after the workpiece 11 and the tape 13 are delivered to the extension unit 72, the extension unit 72 expands the tape 13 in all directions along the X-Y plane direction.

[0061] Specifically, the first clamping unit 74A and the second clamping unit 74B are moved in a direction away from each other in the X-axis direction, and the third clamping unit 74C and the fourth clamping unit 74D are moved in a direction away from each other in the Y-axis direction.

[0062] As a result, the tape 13 is expanded, and an external force associated with the expansion of the tape 13 is applied to the workpiece 11. The external force applied to the workpiece 11 acts on the modified layer, and the workpiece 11 is divided into a plurality of chips 15a (see FIG. 2) starting from the modified layer.

[0063] After the workpiece 11 is divided, while maintaining the expanded state of the tape 13, one surface of the ring frame 17 is attached to the adhesive layer 13b of the tape 13. The ring frame 17 is housed in a ring frame housing box 76 arranged in the +Y direction of the expansion unit 72.

[0064] The ring frame 17 is carried out from the ring frame housing box 76 in a state of being attracted by a ring frame conveying unit 78 arranged above the base 2a, and is arranged at a predetermined height position near the tape 13 held by the expansion unit 72.

[0065] Thereafter, the two roller parts 54 are raised with respect to the ring frame 17 held and attracted by the ring frame conveying unit 78, so that the lower surface side of the tape 13 is pressed upward by the roller parts 54.

[0066] Then, by rotating the support plate 44 approximately 360°, one surface of the ring frame 17 is attached to the adhesive layer 13b of the expanded tape 13. Next, the two roller parts 54 are lowered, and in exchange, the cutting blade part 56 is raised, and the cutting blade is raised until it hits one surface of the ring frame 17 and cuts into the tape 13.

[0067] Then, again, by rotating the support plate 44 approximately 360°, the tape 13 is cut out in a circular shape. As a result, a workpiece unit 19 in which the divided workpiece 11 (i.e., a plurality of chips 15a) and the ring frame 17 are integrated via the circular tape 13 is formed.

[0068] FIG. 2 is a perspective view of the workpiece unit 19. In FIG. 2, the cutting position by the cutting blade portion 56 (corresponding to the opening 13d formed in the tape 13) is indicated by a dashed line. The workpiece unit 19 is then carried out to a predetermined processing area by the ring frame transfer unit 78.

[0069] After the workpiece unit 19 is carried out, the tape 13 having a circular opening 13d formed in the central portion (i.e., the outer region of the tape 13) is discarded. FIG. 3(A) is a top view of the outer region of the tape 13, and FIG. 3(B) is a side view of the tape 13.

[0070] The outer region of the tape 13 is conveyed by the tape conveyance unit 6 to a rectangular parallelepiped box body 8. The box body 8 is arranged adjacent to the +Y direction of the expansion unit 72 and adjacent to the +X direction of the ring frame storage box 76.

[0071] FIG. 4 is an enlarged perspective view of the tape conveyance unit 6 and the box body 8. The tape conveyance unit 6 has a square bar-shaped rod 6a arranged along the Z-axis direction. An elevating mechanism (not shown) such as an air cylinder for elevating the rod 6a along the Z-axis direction is provided at the upper end portion of the rod 6a.

[0072] Further, the elevating mechanism is provided with a moving mechanism (not shown) for moving the rod 6a along the X-axis direction and the Y-axis direction. A square bar-shaped connecting portion 6b having a long hand portion arranged along the Y-axis direction is fixed to the lower end portion of the rod 6a.

[0073] At both ends of the connecting portion 6b in the Y-axis direction, the middle portions in the longitudinal direction of the rectangular bar-shaped arm portions 6c, which are respectively arranged along the X-axis direction, are fixed. The connecting portion 6b and the two arm portions 6c are substantially H-shaped in top view.

[0074] In the present embodiment, the connecting portion 6b and the two arm portions 6c form a frame 6d. Since suction pads 6e are provided on the bottom surface sides of both ends in the longitudinal direction of each arm portion 6c, a total of four suction pads 6e are provided on the frame 6d.

[0075] The four suction pads 6e are arranged at different positions on the frame 6d such that one suction pad 6e corresponds to one through hole 94 of the elastic plate unit 80 described later. The suction pad 6e sucks and holds the tape 13 by negative pressure in a manner of contacting the tape 13.

[0076] A columnar conduit 6f having a predetermined length and arranged along the Z-axis direction is connected to the suction port (not shown) of the suction pad 6e. The negative pressure generated by a suction source (not shown) such as a vacuum pump or an ejector is transmitted to the suction pad 6e via the conduit 6f.

[0077] Note that a first electromagnetic valve (not shown) is provided in a first flow path (not shown) connecting the suction port of the suction pad 6e and the suction source. By opening and closing the first electromagnetic valve, the transmission of the negative pressure to the suction port is controlled.

[0078] In addition, air 6g (see FIG. 9) is supplied to the suction pad 6e from an air supply source (not shown) via the conduit 6f. The suction port and the air supply source are connected by a second flow path (not shown), and a second electromagnetic valve (not shown) is provided in the second flow path. By opening and closing the second electromagnetic valve, the supply of the air 6g to the suction port is controlled.

[0079] The contact area of the suction pad 6e with the tape 13 is covered with a coating layer formed of a fluororesin such as polytetrafluoroethylene (PTFE). However, as the number of uses increases, the coating layer deteriorates and the coating layer may partially peel off.

[0080] When the tape conveyance unit 6 discards the tape 13 into the box body 8, after the ring frame conveyance unit 78 carries out the workpiece unit 19 from the vicinity of the expansion unit 72, the outer peripheral portion of the tape 13 held by each clamping unit is sucked and held by each suction pad 6e of the tape conveyance unit 6.

[0081] After each clamping unit releases the clamping of the tape 13, the tape conveyance unit 6 ascends and translates in parallel while sucking and holding the four corners of the tape 13 where the opening 13d is formed by the four suction pads 6e, and conveys the tape 13 above the box body 8.

[0082] The box body 8 has an opening 8a at the upper part. The opening 8a has each side longer than one side of the outer shape of the substantially square tape 13. That is, the size of the opening 8a is larger than the outer shape of the tape 13. For example, the outer shape of the tape 13 is a square with each side of 400 mm, while the opening 8a is a square with each side of 420 mm.

[0083] Normally, after the tape conveyance unit 6 descends and enters the box body 8 from the opening 8a, the negative pressure at the suction pad 6e is released, and then the air 6g (see FIG. 9) is jetted to drop the tape 13 from the suction pad 6e. However, as described above, the tape 13 may stick to the suction pad 6e and be difficult to peel off.

[0084] Therefore, in the present embodiment, a plurality of elastic plate units 80 provided at the opening 8a of the box body 8 are used to peel the tape 13 from the suction pad 6e. Each elastic plate unit 80 has a function of allowing the suction pad 6e and the tape 13 to enter the box body 8, but restricting the tape 13 from exiting the box body 8.

[0085] Here, referring to FIGS. 5(A) and 5(B), the elastic plate unit 80 will be described. FIG. 5(A) is a top view of one elastic plate unit 80, and FIG. 5(B) is a cross-sectional view taken along line A-A of FIG. 5(A).

[0086] In the present embodiment, one elastic plate unit 80 is provided at the corner 8b of the opening 8a. One elastic plate unit 80 has a pair of claw members 82. The claw member 82 has a base plate 84 formed of an elastically deformable material.

[0087] The base plate 84 of the present embodiment is formed of a fluororesin such as PTFE. However, the base plate 84 may be formed of an elastically deformable material other than a fluororesin, and at least its outer surface may be covered with a fluororesin.

[0088] The base plate 84 includes a beam portion 86 arranged to protrude from the inner peripheral edge of the opening 8a of the box body 8 toward the central portion. A rectangular plate-shaped fixing portion 88 fixed to the inner peripheral side surface of the box body 8 is provided at the base end portion of the beam portion 86.

[0089] The beam portion 86 includes a beam base end portion 86a connected to the upper end portion of the fixing portion 88. The beam base end portion 86a has a relatively wide width, similar to the fixing portion 88. The width B1 of the fixing portion 88 and the beam base end portion 86a is a predetermined value, for example, not less than 3 cm and not more than 5 cm.

[0090] A beam tip portion 86b having a relatively narrow width is provided on the side of the beam base end portion 86a opposite to the fixing portion 88. The beam tip portion 86b is located at a position away from the corner 8b of the opening 8a in the width direction of the beam base end portion 86a.

[0091] The beam tip portion 86b has a triangular region in the vicinity of its tip, where the width becomes narrower as it advances in a direction away from the inner peripheral side surface of the box body 8. The protruding amount B2 from the inner peripheral side surface of the box body 8 to the tip position of the beam tip portion 86b is substantially the same as the width B1 of the fixing portion 88 and the beam base end portion 86a, and is a predetermined value, for example, not less than 3 cm and not more than 5 cm.

[0092] A pair of beam portions 86 disposed at the corner portion 8b of the opening 8a are arranged symmetrically with respect to the diagonal line 8c of the opening 8a passing through the corner portion 8b while being separated from each other. A linear gap 92 is formed along the diagonal line 8c between the pair of beam tip portions 86b arranged symmetrically.

[0093] In the vicinity of the gap 92, a substantially rectangular through hole 94 is formed in a manner connected to the gap 92. The through hole 94 is located in a region surrounded by a pair of beam base end portions 86a and a pair of beam tip portions 86b arranged symmetrically.

[0094] The length of each side of the through hole 94 is approximately equal to or slightly larger than the diameter of the suction pad 6e. Therefore, one suction pad 6e can be inserted into one through hole 94. On the diagonal line 8c, on the side opposite to the gap 92 with respect to the through hole 94, a substantially rectangular gap 96 is formed.

[0095] The gap 96 is connected to the through hole 94 in the direction along the diagonal line 8c. The gap 96 allows, for example, the corner portion of the tape 13 conveyed into the box body 8 through the opening 8a to enter. However, the gap 96 is not essential, and the pair of claw members 82 may be connected so as to close the gap 96.

[0096] The beam base end portion 86a of the beam portion 86 and the fixing portion 88 are connected in an orthogonal manner, and a rectangular parallelepiped block 98 made of foamed urethane resin is fixed to the bottom surface of the beam base end portion 86a and the inner side surface of the fixing portion 88 with an adhesive or the like.

[0097] In FIG. 5(A), for the sake of convenience, the region where the block 98 is provided is indicated by a broken line and dots. The block 98 is disposed on the entire bottom surface side of the beam base end portion 86a and is not provided on the bottom surface side of the beam tip portion 86b.

[0098] Since the foamed urethane resin is relatively easily compressed and deformed by an external force, the beam portion 86 fixed integrally with the block 98 is relatively easily deformed with respect to a downward external force.

[0099] Therefore, when the tape conveyance unit 6 holding the tape 13 by suction enters the box body 8 from the opening 8a, if the beam portion 86 of the base plate 84 is pressed downward by the tape 13 and / or the suction pad 6e, the beam portion 86 and the block 98 are easily deformed (that is, the block 98 allows deformation).

[0100] On the other hand, the block 98 made of foamed urethane resin is not easily deformed even when pulled by an external force similar to the external force during compression. Therefore, the beam portion 86 fixedly integrated with the block 98 is less likely to deform with respect to an upward external force than when the block 98 is not present.

[0101] For example, when the tape conveyance unit 6 exits the box body 8 from the opening 8a with the tape 13 attached to the suction pad 6e, the beam portion 86 of the base plate 84 is pressed upward by the tape 13.

[0102] However, even if the beam portion 86 is pushed up by the tape 13 attached to the suction pad 6e, the block 98 fixed to the beam portion 86 is hardly deformed (that is, the block 98 suppresses deformation).

[0103] Therefore, when the tape conveyance unit 6 moves upward, the movement of the tape 13 attached to the suction pad 6e upward is restricted by the beam portion 86. As the tape conveyance unit 6 moves upward, after the tape 13 is peeled off from the suction pad 6e, it falls downward by its own weight.

[0104] Returning to FIG. 1, the tape stretching device 2 includes a control unit 100 that controls the operations of each component such as the tape conveyance unit 6. The control unit 100 is constituted by a computer including, for example, a processor (processing device) represented by a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory.

[0105] The auxiliary storage device stores software including a predetermined program. By operating the processing device and the like according to this software, the functions of the control unit 100 are realized.

[0106] Next, referring to FIGS. 6 to 11, the state in which the tape conveyance unit 6 conveys the tape 13 to the box body 8 and discards it will be described. As described above, the tape conveyance unit 6 that receives and sucks and holds the tape 13 from the extension unit 72 moves above the box body 8.

[0107] FIG. 6 is a partial cross-sectional side view of the tape conveyance unit 6 and the like disposed directly above the box body 8. In FIG. 6, for the sake of convenience, two claw members 82 and the like that are located on the +Y direction side of the box body 8 and protrude along the X-axis direction are shown. The range corresponding to the through hole 94 is shown by a broken line for the sake of convenience. The same applies to FIGS. 9 to 11 described later.

[0108] When the outer periphery of the tape 13 has moved to a position corresponding to the inside of the opening 8a in the X-Y plane, the tape conveyance unit 6 starts to descend. When the frame 6d that sucks and holds the tape 13 with the four suction pads 6e descends relative to the box body 8, the tape 13 enters the box body 8.

[0109] FIG. 7 is a top view of the vicinity of the corner portion 8b showing the tape conveyance unit 6 and the like entering the box body 8, and FIG. 8 is a partial cross-sectional side view of the tape conveyance unit 6 and the like entering the box body 8.

[0110] As shown in FIG. 8, when the tape 13 enters the box body 8, each elastic plate unit 80 (that is, each pair of claw members 82 and the block 98) is pushed down by the relatively descending tape 13 and elastically deformed.

[0111] As shown in FIG. 9, the tape conveyance unit 6 descends to a height position where each suction pad 6e is located inside the box body 8 below the beam portion 86, but the arm portion 6c does not enter the box body 8. After the tape 13 is disposed at a predetermined height position inside the box body 8, the tape conveyance unit 6 stops descending.

[0112] Next, by closing the first flow path connecting the suction pad 6e and the suction source, the suction of the tape 13 by the suction pad 6e is released. Then, the second flow path connecting the suction pad 6e and the air supply source is opened, and air 6g is jetted from the suction pad 6e.

[0113] FIG. 9 is a partial cross-sectional side view of the tape conveyance unit 6 and the like when air 6g is jetted onto the tape 13. However, as described above, when the tape 13 is attached to at least one suction pad 6e, the tape 13 may be difficult to peel off from the suction pad 6e even when air 6g is jetted.

[0114] Therefore, in the present embodiment, after the air 6g is jetted, the frame 6d is relatively raised with respect to the box body 8. FIG. 10 is a partial cross-sectional side view of the tape conveyance unit 6 and the like that rises after the air 6g is jetted.

[0115] As the suction pad 6e relatively rises, when the tape 13 is attached to at least one suction pad 6e, one or a plurality of elastic plate units 80 corresponding to the suction pad 6e to which the tape 13 is attached relatively presses the one surface (upper surface) 13c side of the tape 13 downward.

[0116] As described above, since the block 98 is difficult to deform with respect to an external force in the tensile direction, even if the tape 13 attached to the suction pad 6e presses the beam portion 86 of the base plate 84 upward, the beam portion 86 is difficult to deform. The tape 13 receives a downward external force from the beam portion 86 and is peeled off from the suction pad 6e.

[0117] Therefore, the exit of the tape 13 from the box body 8 can be restricted, and the tape 13 can be surely dropped into the box body 8. FIG. 11 is a partial cross-sectional side view of the tape 13 and the like falling from the tape conveyance unit 6.

[0118] Next, a second embodiment will be described. FIG. 12(A) is a top view of one elastic plate unit 110 according to the second embodiment, and FIG. 12(B) is a cross-sectional view taken along the line C-C of FIG. 12(A).

[0119] One elastic plate unit 110 has an annular base plate 112 provided at the corner 8b. The base plate 112 is formed of an elastically deformable material (in this embodiment, a fluororesin such as PTFE).

[0120] However, the base plate 112 may be formed of an elastically deformable material other than fluororesin, and at least its outer surface may be covered with fluororesin. The base plate 112 is arranged so as to protrude from the inner peripheral edge of the opening 8a of the box body 8 toward the central part, and has a substantially rectangular outer shape in a top view.

[0121] The base plate 112 has a linear notch 114. The notch 114 is formed along the diagonal line 8c at the corner of the base plate 112 that is farther from the corner 8b among the two corners of the base plate 112 located on the diagonal line 8c passing through the corner 8b.

[0122] The notch 114 is connected to a circular through hole 116 formed in the central part of the base plate 112. The diameter of the through hole 116 is approximately equal to or slightly larger than the diameter of the suction pad 6e. The suction pad 6e can be inserted into the through hole 116.

[0123] An annular block 118 made of foamed urethane resin is fixed to the bottom surface of the base plate 112 and the two side surfaces constituting the corner 8b of the box body 8 with an adhesive or the like. In this way, the block 118 is arranged on the bottom surface side of the base plate 112.

[0124] In FIG. 12(A), for the sake of convenience, the area where the block 118 is provided is indicated by a broken line and dots. The block 118 is arranged outside the through hole 116 around the through hole 116 except in the vicinity of the notch 114.

[0125] Specifically, the block 118 is formed in a range of a predetermined angle α that is symmetric with respect to the diagonal line 8c outside the through-hole 116 except in the vicinity of the notch 114. The predetermined angle α is 270° in the example of FIG. 12(A), but may be appropriately determined within the range of 180° or more and 300° or less.

[0126] Also in the second embodiment, when the tape conveyance unit 6 that sucks and holds the tape 13 enters the box body 8 from the opening 8a, when the base plate 112 is pressed downward by the tape 13, the block 118 easily deforms.

[0127] On the other hand, when the tape conveyance unit 6 with the tape 13 attached to the suction pad 6e exits the box body 8 from the opening 8a, the base plate 112 is pressed upward by the tape 13, but at this time the block 118 hardly deforms.

[0128] Therefore, similar to the beam portion 86 of the first embodiment, the base plate 112 of the present embodiment can also restrict the tape 13 from exiting the box body 8 and reliably drop the tape 13 into the box body 8. In addition, the structures, methods, etc. according to the above-described embodiments can be appropriately changed and implemented without departing from the scope of the object of the present invention.

[0129] As an example, instead of the block 98 made of foamed urethane resin, the elastic plate unit 80 may employ other materials or mechanisms that allow deformation with respect to an external force in the compression direction but suppress deformation with respect to an external force in the tensile direction.

[0130] For example, as shown in FIGS. 5(A) and 5(B), the bottom surface of the beam base end portion 86a and the side surface of the fixing portion 88 may be connected by a flexible member. As the flexible member, for example, one or a plurality of rods or sheets can be used. The rod and the sheet are formed of, for example, foamed urethane resin, but may be formed of a material other than foamed urethane resin.

[0131] Such a flexible member allows deformation by bending in any direction against an external force in the compression direction, but is relatively difficult to deform against an external force in the tensile direction, so the deformation is suppressed. Alternatively, a crank mechanism may be used instead of the flexible member.

[0132] For example, the crank mechanism includes a first rod having one end rotatably fixed to the bottom surface of the beam base end portion 86a, and a second rod having one end rotatably fixed to the side surface of the fixing portion 88. The other end of the first rod and the other end of the second rod are rotatably connected by a crank pin.

[0133] However, the first rod and the second rod can rotate around the crank pin so that one end of the first rod and one end of the second rod approach each other, but the opening angle between the first rod and the second rod with the crank pin as the rotation axis is appropriately limited so as not to open beyond a predetermined angle range.

[0134] Instead of the crank mechanism, a link mechanism may be employed. Similarly, for the block 118 made of foamed urethane resin in the elastic plate unit 110, a flexible member, a crank mechanism, a link mechanism, etc. can be applied.

Explanation of Reference Numerals

[0135] 2: Tape expansion device, 2a: Base, 4: Tape waste device 6: Tape conveyance unit, 6a: Rod, 6b: Connection part, 6c: Arm part 6d: Frame, 6e: Suction pad, 6f: Conduit, 6g: Air 8: Box body, 8a: Opening, 8b: Corner, 8c: Diagonal line 10: Tape supply unit, 12: Affixing unit 11: Workpiece, 11a: Surface, 11b: Back surface 13: Tape, 13a: Base material layer, 13b: Adhesive layer 13c: One surface (upper surface), 13d: Opening 14: First chuck table, 14a: Holding surface 15: Device, 15a: Chip 17: Ring frame, 17a: Opening, 19: Workpiece unit 16: Base part, 18: Rotation axis, 20: Frame body, 22: Air cylinder 24: Support plate, 24a: Through hole, 26: Cutting edge part, 28: Heater 30: X-axis direction movement mechanism, 32: Guide rail 34: Moving plate, 36: Ball screw, 38: Rotation drive source 40: Delivery unit, 42: Moving plate, 44: Support plate, 46: Air cylinder 48: Second chuck table, 48a: Holding surface, 50: Clamping mechanism 52: Support column, 54: Roller part, 56: Cutting edge part 60: X-axis direction movement mechanism, 62: Guide rail, 64: Ball screw 70: Peeling mechanism, 72: Expansion unit 74A: First clamping unit, 74B: Second clamping unit 74C: Third clamping unit, 74D: Fourth clamping unit 76: Ring frame storage box, 78: Ring frame transfer unit 80: Elastic plate unit 82: Claw member 84: Base plate, 86: Beam part, 86a: Beam base end part, 86b: Beam tip end part, 88: Fixed part 92: Gap, 94: Through hole, 96: Gap, 98: Block 100: Control unit 110: Elastic plate unit 112: Base plate, 114: Notch, 116: Through hole, 118: Block α: Predetermined angle, B1: Width, B2: Projection amount

Claims

1. A tape disposal device for disposing of a tape having a rectangular outer shape with a circular opening formed in the central part and having an adhesive layer on one surface side, a rectangular parallelepiped box having an opening at the top with a size larger than the outer shape of the tape, a frame, and a plurality of suction pads provided on the bottom surface side of the frame, and having a tape conveyance unit capable of conveying the tape to the box while the tape is sucked and held by the plurality of suction pads, the box has a plurality of elastic plate units each arranged so as to project from the inner peripheral edge of the opening of the box toward the central part, being elastically deformable, and having a through hole into which one suction pad can be inserted, when the frame that sucks and holds the tape with the plurality of suction pads descends relative to the box and the tape enters the box, the plurality of elastic plate units are elastically deformed when pushed down by the descending tape, thereby allowing the tape to enter the box, after the suction by the plurality of suction pads is released inside the box, when the tape is attached to at least one of the plurality of suction pads when the frame rises relative to the box, the elastic plate unit corresponding to the at least one suction pad that rises presses the upper surface side of the tape downward, thereby peeling the tape from the at least one suction pad and restricting the tape from exiting the box. A tape disposal device characterized by this.

2. The tape conveyance unit has four suction pads that suck and hold the four corners on the one surface side of the tape, The tape disposal device according to claim 1, wherein the four suction pads are arranged at different positions on the frame such that the through hole of one elastic plate unit corresponds to one suction pad.

3. Each of the plurality of elastic plate units, a base plate at least the outer surface of which is covered with a fluororesin, a block made of a foamed urethane resin disposed on the bottom surface side of the base plate so as to allow deformation by pressing downward of the base plate but suppress deformation by pressing upward of the base plate, The tape disposal device according to claim 1 or 2, characterized by including this.

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