Valve unit for raw material container

Abstract

To provide a valve unit of a material vessel which is achieved in the acceleration of purge processing by reducing a dead volume, improved in the compactness and reduction of a size, and contributes to an improvement of workability.SOLUTION: In a valve unit for a material vessel arranged above a material vessel 1, a unit body 3 includes carrier gas supply piping 4, material supply piping 5, bypass piping 6, a sending valve 7, a supply valve 8 and a purge bypass valve 9. A continuous arrangement position of the bypass piping 6 is set within a range of width diameters of at least the sending valve 7 and the supply valve 8 in a flow rate direction, a width diameter of the bypass valve 9 in a direction of the bypass piping 6 is a distance approaching a state of contacting and interfering with the sending valve 7 and the supply valve 8, and the bypass valve 9 is attached in an inclined state toward a direction of the material supply piping 5 at a level that the bypass valve does not interfere with the sending valve 7 and the supply valve 8 in a non-contact state.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a valve unit for a raw material container, and more particularly to a valve unit for a raw material container applied to a raw material container storing a film-forming raw material for semiconductor manufacturing.

Background Art

[0002] Conventionally, in semiconductor manufacturing processes such as the ALD (Atomic Layer Deposition) method and the CVD (Chemical Vapor Deposition) method, raw material containers for storing film-forming raw materials (hereinafter sometimes referred to as precursors) for film-forming processes are known. In addition, a valve unit composed of a plurality of valves and pipes is attached to the raw material container storing the film-forming raw material.

[0003] As this type of valve unit, for example, the valve unit for a raw material container in FIG. 10 of Patent Document 1 is known. A carrier gas introduction pipe and a raw material supply pipe are connected to the raw material container. In the middle of the carrier gas introduction pipe, a valve (carrier gas introduction valve) for controlling the supply of gas introduction is provided, and an inert carrier gas such as He or N2 is sent from the carrier gas introduction pipe to pressurize the inside of the raw material container, and a liquid material or a solid material stored in the raw material container is gasified, and the precursor gas is supplied to the semiconductor manufacturing apparatus through the raw material supply pipe.

[0004] In the middle of the raw material supply pipe, a valve (raw material supply valve) for controlling the supply of the film-forming raw material to the semiconductor manufacturing apparatus is provided. On the secondary side (semiconductor manufacturing apparatus side) of this valve, a purge pipe (bypass pipe) for introducing purge gas into the raw material supply valve and the supply line to the semiconductor manufacturing apparatus is branched. A purge valve (bypass valve), which is normally closed and opened to introduce a purge gas during a purge process, is provided in the middle of a purge pipe branched from a raw material supply pipe. During raw material switching or raw material container replacement, etc., this purge valve is periodically opened, and a purge process is performed to clean the inside of the pipe, the flow path of the valve, etc. with an inert purge gas such as nitrogen gas.

[0005] Connectors, etc. are attached to the downstream sides of the carrier gas introduction pipe, the raw material supply pipe, and the purge pipe, and the raw material container can be separated from the supply line to the semiconductor manufacturing apparatus, etc. while the carrier gas introduction pipe and the raw material supply pipe are connected to the raw material container.

[0006] Also, as another example, there is a valve unit for a raw material container in Patent Document 2. In the valve unit for a raw material container in Patent Document 2, the bypass valve of the bypass pipe is attached perpendicular to other valves, and the actuators of the raw material supply valve, the carrier gas introduction valve, and the bypass valve are configured not to contact each other.

[0007] Also, a block valve of Patent Document 3 is known as a valve unit for a raw material container. This block valve forms a flow path in a manifold block, aggregates the flow paths, and mounts various valves on the surface of the manifold block.

Prior Art Documents

Patent Documents

[0008]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0009] However, in the valve unit for the raw material container of Patent Document 1, since it is necessary to branch the purge pipe above the raw material supply valve provided in the raw material supply pipe, the valves (carrier gas introduction valve, raw material supply valve) and the purge valve are stacked vertically, and the entire valve unit for the raw material container becomes large. In addition, the branch pipe and the pipeline (pipe) become long, and the dead volume (stagnant area) where the raw material for film formation and the like stay in this branch pipe and pipeline (pipe) increases. It takes time to remove the raw material for film formation remaining in this dead volume, and there is a problem that the time required for the purge process becomes long.

[0010] In the semiconductor manufacturing process, a purge process is also carried out every time the raw material is switched. Therefore, if the purge process takes time, the raw material supply will be stopped, and the operating efficiency of the semiconductor manufacturing apparatus will decrease. In particular, in the ALD method, since the opening and closing control of the valve is repeated in a short time and the number of purge processes also increases, a rapid purge process is required. Furthermore, since the number of valve openings and closings of the valve unit increases and the number of maintenance operations such as component replacement due to component deterioration and damage increases, workability during maintenance and the like is also required for the semiconductor manufacturing apparatus.

[0011] In the valve unit for the raw material container of Patent Document 2, since the bypass valve is attached vertically to the other valve, when the diameter of the actuator of the bypass valve is larger than the piping distance on both sides, there is also a problem that the bypass valve cannot be attached. Also, when the bypass valve is an upward manual valve, the handle operation may be difficult. For this reason, if the handle operation is troublesome during maintenance work or the like, the workability is impaired, the working time becomes long, and the operating efficiency of the semiconductor manufacturing apparatus decreases. In addition, since the bypass valve is attached vertically, the valve unit cannot be stably placed on a workbench or the like, and work such as assembly and disassembly of the valve unit may become difficult.

[0012] In addition, the block valve for the raw material container in Patent Document 3 forms a flow path inside the block body, so it reduces piping members and is easy to compact. However, since a joint part integrated with the manifold block is formed by dedicated parts, the number of dedicated parts increases and the cost tends to be high. When the number of dedicated parts increases, not only does the maintenance work of the operator become complicated, but also if some dedicated parts are lost or damaged during assembly or disassembly, there is also a problem that the block valve cannot be used. Furthermore, since the block valve for the raw material container in Patent Document 3 mounts valves on both the front and back sides of the manifold block, the valves on the opposite side become an obstacle during maintenance work, thus impairing workability.

[0013] The present invention has been developed to solve the conventional problems, and its object is to provide a valve unit for a raw material container that reduces dead volume to achieve rapid purging, and also achieves compactness and miniaturization, and contributes to the improvement of workability.

Means for Solving the Problems

[0014] To achieve the above object, the invention according to claim 1 is a valve unit provided on the upper part of a raw material container. The unit body includes a supply valve provided on a pipe for supplying carrier gas, a supply valve provided on a pipe for supplying raw materials, a bypass pipe provided between the supply valve and the supply valve, and a purge bypass valve provided on this bypass pipe. The continuous installation position of the bypass pipe is provided at least within the range of the width diameter in the flow path direction of the supply valve and the supply valve. The interval distance of the bypass pipe is a distance close to a state where the width diameter in the direction of the bypass pipe of the bypass valve contacts and interferes with the supply valve and the supply valve when the bypass valve is mounted. The bypass valve is a valve unit for a raw material container that is mounted on the bypass pipe in an inclined state toward the raw material supply pipe direction so as not to contact and interfere with the supply valve and the supply valve.

[0015] The invention according to claim 2 is a valve unit for a raw material container in which each valve of the unit body has its valve body bottom surface facing in the same direction and the valve body bottom surfaces are arranged on the same plane.

[0016] The invention according to claim 3 is a valve unit for a raw material container in which the inclination direction of the bypass valve is inclined in the supply direction of the raw material supply pipe and is arranged in an inclined state in the space region above the supply valve and the supply valve.

[0017] The invention according to claim 4 is a valve unit for a raw material container in which each valve of the unit body is a valve having an actuator, and the diameter of the supply valve, the supply valve, and the bypass valve is the diameter of the actuator.

[0018] The invention according to claim 5 is a valve unit for a raw material container in which the inclination angle of the bypass valve is 30° to 60°.

Advantages of the Invention

[0019] According to the invention according to claim 1, when the bypass valve is attached to the bypass pipe, even if the diameter of the bypass valve is close to a distance where it contacts and interferes with the supply valve and the supply valve, the bypass valve can be attached to the bypass pipe. Therefore, the bypass pipe can be shortened, the dead volume (stagnant region) in the pipe can be reduced, and the purge processing time can be shortened.

[0020] In the semiconductor manufacturing process, a purge process is also performed every time the raw material is switched. Therefore, the operation efficiency of the semiconductor manufacturing apparatus is improved by the rapid purge process. In particular, in the ALD method, since the opening and closing control of the valve is repeated in a short time, even if the number of purge processes increases, it is possible to suppress the increase in the purge processing time, which is preferable.

[0021] In addition, since the bypass valve is attached to the bypass pipe in an inclined state so as not to interfere with the supply valve and the supply valve in a non-contact state, the height and width of the unit body can be reduced, and the entire valve unit for the raw material container can be miniaturized and made compact. Therefore, when the valve unit for the raw material container is attached to the semiconductor manufacturing apparatus, the installation space can be reduced and the enlargement of the entire apparatus can be suppressed. Further, when a plurality of raw material containers are intensively arranged, a certain working space can be secured during maintenance or the like.

[0022] According to the invention according to claim 2, since each valve of the unit body has its body bottom surface facing in the same direction and the body bottom surfaces are arranged on the same plane, the valve unit for the raw material container can be placed on a flat workbench or the like. Therefore, during operations such as assembly and disassembly, the valves can be prevented from rattling and positioned in a stable state, facilitating operations such as positioning and improving workability.

[0023] According to the invention according to claim 3, since the inclination direction of the bypass valve of the valve unit for the raw material container is arranged in an inclined state in the upper space region of the feed valve and the feed valve toward the supply direction of the raw material supply pipe, the waste of the space region between the raw material supply pipe and the carrier gas supply pipe of the unit body can be reduced.

[0024] According to the invention according to claim 4, since the valves are connected in series in a non-contact state so that the actuators of the feed valve, the supply valve, and the bypass valve do not interfere with each other, the height and width of the unit body can be reduced, and the entire valve unit for the raw material container can be miniaturized and made compact.

[0025] According to the invention according to claim 5, since the inclination angle is set within a predetermined range in consideration of workability such as assembly and disassembly of the valve unit, both compactness and miniaturization of the valve unit can be achieved, and workability can be improved at the same time.

Brief Description of the Drawings

[0026]

Figure 1

Figure 2

Figure 3

Figure 4

Embodiments for Carrying Out the Invention

[0027] Embodiments of the valve unit for the raw material container according to the present invention will be described in detail with reference to the drawings. FIG. 1 shows a schematic flow diagram showing an example of the valve unit for the raw material container according to the present invention, FIG. 2 is a front view of the valve unit for the raw material container, FIG. 3 is a side view of the valve unit for the raw material container, and FIG. 4 is a perspective view of the valve unit for the raw material container.

[0028] As shown in FIG. 1, the valve unit for the raw material container (hereinafter sometimes referred to as the valve unit) is attached to the upper part of the raw material container 1. The raw material container 1 stores a film-forming raw material for performing a film-forming process in a semiconductor manufacturing process such as an ALD method or a CVD method. The film-forming raw material is stored in the raw material container 1 in a liquid or solid state, and the film-forming raw material (precursor) is supplied to the raw material supply line of the semiconductor manufacturing apparatus by a carrier gas.

[0029] The unit main body 3 includes a feed valve 7 provided in the carrier gas feed pipe 4, a supply valve 8 provided in the raw material supply pipe 5, and a purge bypass valve 9 provided in the bypass pipe 6. The unit main body 3 is provided with a carrier gas feed pipe 4 in the carrier gas feed line 2a and a raw material supply pipe 5 in the raw material supply line 2b. The unit main body 3 is provided with a bypass pipe 6 that branches the carrier gas feed pipe 4 and the raw material supply pipe 5.

[0030] The pipe 4 for supplying carrier gas is provided with a supply valve 7 and an on-off valve 10. One end is connected to the upper part of the raw material container 1 via a joint member 12, and the other end is connected to a pipe (not shown) for supplying carrier gas via a joint member 11 or the like. The joint members 11 and 12 are constituted by one-touch type joint members or the like, so that the connection and disconnection between the valve unit and the raw material container can be facilitated.

[0031] The supply valve 7 is provided on the side of the raw material container 1 of the pipe 4 for supplying carrier gas, and is an automatic valve equipped with an air-driven actuator body 7a. The supply valve 7 is controlled to supply air to the actuator body 7a by a control device (not shown) or the like, and the supply valve 7 is opened and closed to supply carrier gas to the raw material container 1.

[0032] Here, when the valve unit is constituted by an automatic valve equipped with an actuator body, there is a problem that the width diameter of the actuator body becomes large and the installation space of the valve unit becomes large, but the installation space is reduced by the means described later.

[0033] The on-off valve 10 provided in the pipe 4 for supplying carrier gas is a manual valve, and is opened and closed during the supply of carrier gas, maintenance work, container replacement, etc.

[0034] The pipe 5 for supplying raw materials is provided with a supply valve 8 and an on-off valve 13. One end is connected to the raw material container 1 via a joint member 15, and the other end is connected to a pipe (not shown) of the raw material supply line of the semiconductor manufacturing apparatus via a joint member 14 or the like. The joint members 14 and 15 are constituted by one-touch type joint members or the like, so that the connection and disconnection between the valve unit and the raw material container can be facilitated.

[0035] The supply valve 8 is provided on the side of the raw material container 1 of the pipe 5 for supplying raw materials, and is an automatic valve equipped with an air-driven actuator body 8a. The supply valve 8 is controlled by a control device (not shown) to supply air to the actuator body 8a, and the supply valve 8 is opened and closed to supply a precursor to the raw material supply line of a semiconductor manufacturing apparatus (not shown).

[0036] The on-off valve 13 provided in the raw material supply pipe 5 is a manual valve, and is opened and closed when supplying a film-forming raw material (precursor) to the supply line of the semiconductor process, during maintenance work, during container replacement, etc.

[0037] The bypass pipe 6 is provided between the feed valve 7 and the supply valve 8, and a purge bypass valve 9 is provided in this bypass pipe 6. The bypass valve 9 is mounted in a state inclined at a predetermined angle toward the raw material supply direction of the raw material supply pipe 5 in the bypass pipe 6.

[0038] The bypass valve 9 is an automatic valve equipped with an air-driven actuator body 9a, and the air supply to the actuator body 9a is controlled by a control device (not shown), and the bypass valve 9 is opened and closed for purge processing. During the purge process, the feed valve 7 and the supply valve 8 are controlled to be valve-closed, and the bypass valve 9 is controlled to be valve-opened so that the inside of the pipe and the valve flow path are purged with a purge gas. Also, the bypass valve 9 is controlled to be valve-closed when supplying the raw material of the precursor to the semiconductor manufacturing apparatus.

[0039] Here, the feed valve 7, the supply valve 8, and the bypass valve 9 provided in each pipe of the unit body 3 are automatic valves equipped with actuator bodies. In particular, in the case of an automatic valve equipped with an actuator body, the outer diameter of the feed valve 7 and the outer diameter of the supply valve 8 become large, taking up space for the installation of the bypass valve 9. Therefore, in this example, the bypass valve 9 is mounted on the bypass pipe 6 in a state inclined at a predetermined angle, suppressing the installation space of the bypass valve 9.

[0040] As shown in FIG. 2, the continuous installation position of the bypass pipe 6 is provided within at least the width diameter in the flow path direction of the supply valve 7 and the supply valve 8 (in this example, the diameter of the actuator bodies 7a and 8a), and the distance between the bypass pipes 6 (in this example, the length of the bypass pipe when connecting between the supply valve and the supply valve) is such that when the bypass valve 9 is mounted, the actuator body 9a of the bypass valve 9 is close to a state where it contacts and interferes with the supply valve 7 and the supply valve 8. That is, the distance between the bypass pipes 6 is such that the actuator bodies 7a of the supply valve 7 and the actuator bodies 8a of the supply valve 8 are in a close state, and when the actuator body 9a of the bypass valve 9 of the bypass pipe 6 is to be mounted in the same direction as the actuator body 7a of the supply valve 7 and the actuator body 8a of the supply valve 8 (the same direction as the height direction of the actuator body), the distance is close to the extent that the actuator bodies of each valve contact each other.

[0041] In the conventional valve unit for the raw material container, the bypass valve is mounted on the bypass pipe in a sufficiently separated state so that the actuator bodies of each valve do not contact each other. For this reason, depending on the size of the actuator body, it is necessary to install the bypass pipes sufficiently separated.

[0042] However, in this example, when the bypass valve 9 is mounted on the bypass pipe 6, the width diameter 9c of the actuator in the direction of the bypass pipe 6 of the bypass valve 9 is brought close to a state where it interferes with the width diameter 7c of the actuator of the supply valve 7 and the width diameter 8c of the actuator of the supply valve 8, and the bypass valve 9 is tilted at a predetermined angle, so that the actuator 9a of the bypass valve 9 is mounted on the bypass pipe 6 so as not to contact and interfere with the actuator 7a of the supply valve 7 and the actuator 8a of the supply valve 8.

[0043] Therefore, by bringing the bypass pipe 6 close to the connection position where the bypass valve 9 attached to the bypass pipe 6 interferes with the supply valve 7 and the supply valve 8, the interval distance of the bypass pipe 6 can be shortened. Therefore, since the interval distance of the bypass pipe 6 can be shortened, the dead volume (stagnant area) in the pipe of the unit body 3 can be reduced, and the purge processing time can be shortened.

[0044] In the semiconductor manufacturing process, a purge process is also performed every time the raw material is switched. Therefore, a quick purge process contributes to an improvement in the operating efficiency of the semiconductor manufacturing apparatus. In particular, in the ALD method, since the opening and closing control of the valve is repeated in a short time, even if the number of purge processes increases, it is possible to suppress an increase in the purge processing time, which is preferable.

[0045] In addition, since the interval distance of the bypass pipe 6 can be shortened, the width of the unit body 3 can be reduced to make it more compact, and the installation area when installing it in the raw material container 1 can be reduced. Even when the valve unit is attached to the raw material container 1, it is possible to suppress an increase in the size of the entire apparatus.

[0046] The inclination direction of the actuator 9a of the bypass valve 9 is arranged in an inclined state in the upper space region of the supply valve 7 and the supply valve 7 toward the raw material supply direction of the raw material supply pipe 5 of the raw material supply line 2b for raw material supply. Therefore, the waste of the space region between the carrier gas supply pipe 4 and the raw material supply pipe 5 is reduced, the protrusion of the unit body 3 in the height direction is suppressed, and the valve unit can be made more compact. Therefore, even when compared with a conventional valve unit for a raw material container in which the bypass valve is not inclined, there is less waste of the space region, and an increase in the size of the entire apparatus can be suppressed.

[0047] In addition, when the valve unit is attached to the semiconductor manufacturing apparatus, the installation space can be reduced, and an increase in the size of the entire apparatus can be suppressed. Therefore, especially when a plurality of raw material containers are intensively arranged, a certain working space can be secured during maintenance or the like.

[0048] Note that the inclination direction of the actuator 9a of the bypass valve 9 may be inclined toward the raw material container side. Any direction is acceptable as long as the wasted space in the space area can be suppressed by making use of the spaces between the joint members and piping members of the valve unit.

[0049] The inclination angle of the bypass valve 9 is set within a predetermined range in consideration of workability such as the assembly and disassembly of the valve unit. Therefore, while solving the problem of contact between each valve during compactification, the workability during maintenance and container replacement is not impaired, and both compactness and workability can be achieved.

[0050] The inclination angle θ of the actuator body 9a of the bypass valve 9 is preferably in the range of 30° to 60° because the actuator bodies of the respective valves do not interfere with each other. Considering the assembly workability, 35° to 55° is more preferable. Note that the actuator body 9a of the bypass valve 9 in this example is inclined at about 40°.

[0051] In addition, each valve of the unit body 3 has its body bottom surface facing in the same direction and the body bottom surfaces are arranged on the same plane. Therefore, the body bottom surface 7b of the supply valve 7, the body bottom surface 8b of the supply valve 8, the body bottom surface 9b of the bypass valve 9, the body bottom surface 21 of the on-off valve 10, and the body bottom surface 22 of the on-off valve 13 can be placed on the same plane, and the valve unit can be placed on a flat workbench or the like during operations such as assembly, disassembly, and container replacement.

[0052] For this reason, rattling of each valve is prevented and stabilized, making positioning and other operations easier. Thus, with the bypass valve 9 inclined at a predetermined angle with high precision, the bypass valve 9 can be continuously installed between the carrier gas supply pipe 4 and the raw material supply pipe 5, improving workability.

[0053] For example, in the valve unit assembly process, each valve can be connected while the valves are placed on a horizontal plane such as a workbench.

[0054] In this example, the piping parts of the bypass valve 9 and other valves are connected by welding. When welding the bypass valve 9 at a desired inclination angle, a horizontal workbench can be used as the reference plane 20. After accurately positioning the bypass valve 9, the bypass valve 9 and the supply valve 8 can be connected by welding. Since the valve can be assembled stably on a horizontal plane such as a workbench, workability is improved, and the piping connection part can be welded while adjusting the inclination angle of the bypass valve 9 with high precision.

[0055] Here, if there is a protruding part from the bottom surface of the body, it cannot be placed on a horizontal plane, and stable assembly work and accurate welding cannot be performed. Therefore, it is preferable that there is no protruding part on the bottom surface side of the body. As shown in FIG. 3, for the unit body 3, the top of the hex nut of the joint member 14 protrudes from the reference plane 20. However, if it can be adjusted to a direction without a protruding part by shifting the top of the rotatable hex nut, there is no problem. In addition, due to the structure of the unit body, even if the structure is such that protrusions such as non-rotatable parts cannot be avoided, stable assembly work can be performed by using a workbench small enough not to reach the protruding part.

[0056] Also, in order to prevent the top of the nut from protruding from the reference plane, (1) reducing the outer shape of the nut, (2) changing the height of the piping part protruding from the valve body, (3) increasing the height of the valve body, etc., can be used to prevent the top of the hex nut of the unit body from protruding from the reference plane.

[0057] Also, when disassembling each valve of the valve unit, the unit body 3 can be placed on a flat reference surface such as a workbench and the valve can be disassembled stably. Therefore, the workability is excellent even during maintenance work.

[0058] In this way, the valve unit for the raw material container can be miniaturized to achieve compactness, and the workability during operations such as assembly and disassembly of the unit body can also be improved.

[0059] Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the invention described in the claims of the present invention.

[0060] The supply valve and the feed valve may be constituted by a three-way valve. A plurality of bypass pipes may be provided between the feed valve and the supply valve, and a configuration in which a plurality of bypass valves are arranged in the bypass pipes may also be adopted. The supply valve, the feed valve, and the bypass valve may be constituted by manual valves. In addition, a plurality of on-off valves may be provided to prevent the raw material from leaking from the container and the pipe during container replacement and maintenance work. The embodiment of the present invention may also be constituted by block valves in which each valve is mounted on a manifold block.

Explanation of Reference Numerals

[0061] 1 Raw material container 3 Unit body 4 Carrier gas supply pipe 5 Raw material supply pipe 6 Bypass pipe 7 Feed valve 7a Actuator (actuator body) 7b Body bottom surface (bottom surface of valve body) 7c Width diameter (width diameter of actuator) 8 Supply valve 8a Actuator (actuator body) 8b Body bottom surface (bottom surface of valve body) 8c Width diameter (width diameter of actuator) 9 Bypass valve (purge bypass valve) 9a Actuator (actuator body) 9b Body bottom surface (bottom surface of valve body) 9c Width diameter (width diameter of actuator)

Claims

1. A valve unit provided at the upper part of a raw material container. The unit body includes a supply valve provided in a supply pipe for carrier gas, a supply valve provided in a raw material supply pipe, a bypass pipe provided between the supply valve and the supply valve, and a purge bypass valve provided in this bypass pipe. The continuous position of the bypass pipe is provided at least within the range of the width diameter in the flow path direction of the supply valve and the supply valve. The interval distance of the bypass pipe is a distance close to a state where the width diameter in the direction of the bypass pipe of the bypass valve contacts and interferes with the supply valve and the supply valve when the bypass valve is mounted. The bypass valve is mounted on the bypass pipe in an inclined state toward the raw material supply pipe direction so as not to contact and interfere with the supply valve and the supply valve. A valve unit for a raw material container, characterized in that.

2. The valve unit for a raw material container according to claim 1, wherein the bottom surfaces of the bodies of the respective valves of the unit body face the same direction and the bottom surfaces of the bodies are arranged on the same plane.

3. The valve unit for a raw material container according to claim 1 or claim 2, wherein the inclination direction of the bypass valve is arranged in an inclined state in the supply direction of the raw material supply pipe in the upper space region of the supply valve and the supply valve.

4. The valve unit for a raw material container according to any one of claims 1 to 3, wherein each valve of the unit body is a valve having an actuator, and the width diameters of the supply valve, the supply valve, and the bypass valve are the width diameter of the actuator.

5. The valve unit for a raw material container according to claim 1, wherein the inclination angle of the bypass valve is 30° to 60°.

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