Peeling device

Abstract

To provide a peeling device capable of peeling a protective member from a workpiece without increasing the frequency of work for taking the collected protective member out of a collection box and without complicating this work.SOLUTION: A peeling device comprises a control unit by which a holding unit is positioned at an upper side of a collection box and a protective member is then thrown down from the holding unit together with a peeling tape after the holding unit is awaited by a preset time. In the peeling device, after oscillation of the peeling tape and the protective member with the movement of the holding unit is settled, the peeling tape and the protective member can be thrown into the collection box. In such a case, a probability for the protective member thrown down from the holding unit to be stuck on a sidewall of the collection box can be reduced. As a result, the protective member can be peeled from a workpiece without increasing the frequency of work for taking the collected protective member out of the collection box and without complicating this work.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a peeling device for peeling a protective member from a workpiece.

Background Art

[0002] Chips of devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are essential components in various electronic devices such as mobile phones and personal computers. Such chips are manufactured, for example, by thinning a workpiece (workpiece) such as a wafer having a large number of devices formed on its surface, and then dividing the regions containing the individual devices.

[0003] As a method of thinning a workpiece, grinding on the back surface side of the workpiece can be mentioned. This grinding is generally performed in a state where a protective member is attached to the surface of the workpiece to protect the device. Further, as a method of dividing the workpiece, cutting from the surface side of the workpiece can be mentioned. This cutting is generally performed in a state of a frame unit in which the workpiece is integrated with an annular frame via a dicing tape attached to the back surface of the workpiece in order to facilitate handling before and after dividing the workpiece.

[0004] Therefore, after thinning the workpiece and before dividing the workpiece, it is necessary to attach the back surface of the workpiece to the central region of the dicing tape with the outer peripheral region attached to the annular frame and peel the protective member from the surface of the workpiece. For example, peeling of the protective member (protective tape) from the surface of the workpiece is performed by attaching a peeling tape to the end of the protective member and then relatively moving a holding table for holding the workpiece and a gripping unit (clamping means) for gripping one end of the peeling tape (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0005] Patent Document 1 Japanese Patent Application Laid-Open No. 2012-28478 Summary of the Invention Problems to be Solved by the Invention

[0006] In a peeling device for peeling a protective member from a workpiece, a collection box for collecting the protective member is provided. This collection box generally includes a bottom wall and side walls erected from the outer peripheral portion of the bottom wall, and the upper surface side thereof is open. Further, the collection box is incorporated into the peeling device in such a manner that it can be easily separated in order to take out the collected protective member and empty the collection box.

[0007] When the protective member is peeled from the workpiece in this peeling device, a gripping unit that grips one end of the peeling tape attached to the protective member is moved and stopped above the collection box, and then the protective member together with the peeling tape is dropped into the collection box. However, when the gripping unit is moved and then stopped in this way, an inertial force acts on the peeling tape and the protective member, and the protective member swings together with the peeling tape whose one end is gripped by the gripping unit.

[0008] Then, when the peeling tape and the protective member are dropped into the collection box in a state where the peeling tape and the protective member are swinging in this way, the peeling tape and the protective member may stick to the side wall of the collection box. In such a case, the frequency of the operation of taking out the collected protective member from the collection box increases, and there is a possibility that this operation becomes complicated.

[0009] In view of this point, an object of the present invention is to provide a peeling device that can peel a protective member from a workpiece without increasing the frequency of the operation of taking out the collected protective member from the collection box and without complicating this operation. Means for Solving the Problems

[0010] According to the present invention, there is provided a peeling device for peeling a protective member from a workpiece with the protective member adhered to one surface thereof, comprising: a holding table for holding the workpiece from the other surface side; a gripping unit for gripping one end of a peeling tape adhered to the protective member adhered to the one surface of the workpiece held by the holding table; a recovery box for recovering the protective member dropped together with the peeling tape from the gripping unit; a moving mechanism for moving the gripping unit from above the holding table to above the recovery box; and a control unit for controlling the operations of the holding table, the gripping unit, and the moving mechanism. The control unit positions the gripping unit above the recovery box, waits the gripping unit for a preset time, and then drops the protective member together with the peeling tape from the gripping unit.

Effect of the Invention

[0011] The peeling device of the present invention includes a control unit that positions the gripping unit above the recovery box, waits the gripping unit for a preset time, and then drops the protective member together with the peeling tape from the gripping unit. Therefore, in the peeling device of the present invention, the peeling tape and the protective member can be dropped into the recovery box after the shaking of the peeling tape and the protective member accompanying the movement of the gripping unit has subsided.

[0012] In this case, the probability that the protective member dropped from the gripping unit adheres to the side wall of the recovery box can be reduced. As a result, in the peeling device of the present invention, the protective member can be peeled from the workpiece without increasing the frequency of the operation of taking out the recovered protective member from the recovery box and without complicating this operation.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2

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Figure 8

BEST MODE FOR CARRYING OUT THE INVENTION

[0014] Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing an example of a peeling device for peeling a protective member from a workpiece. The X-axis direction (front-rear direction) and Y-axis direction (left-right direction) shown in FIG. 1 are directions orthogonal to each other on a horizontal plane, and the Z-axis direction (vertical direction) is a direction orthogonal to each of the X-axis direction and Y-axis direction (vertical direction). In addition, in FIG. 1, some components are shown in a simplified manner.

[0015] The peeling device 2 shown in FIG. 1 has a support surface 4a parallel to the X-axis direction and the Y-axis direction, and includes a rectangular parallelepiped support base 4 extending along the X-axis direction. A first moving mechanism (moving mechanism for the holding table) 6 for moving the holding table 16, which will be described later, along the X-axis direction is provided on the support surface 4a of the support base 4.

[0016] This first moving mechanism 6 is fixed to the support surface 4a and has a pair of guide rails 8 extending along the X-axis direction. And on the upper surface side of the pair of guide rails 8, a moving plate 10 is connected in a slidable manner along the pair of guide rails 8. Also, between the pair of guide rails 8, a screw shaft 12 extending along the X-axis direction is arranged.

[0017] At the front end of this screw shaft 12, a motor 14 for rotating the screw shaft 12 is connected. Also, on the surface of the screw shaft 12 where a spiral groove is formed, a nut portion for accommodating balls that roll on the surface of the rotating screw shaft 12 is provided, and a ball screw is constituted. That is, when the screw shaft 12 rotates, the balls circulate inside the nut portion and the nut portion moves along the X-axis direction.

[0018] Furthermore, this nut portion is fixed to the lower surface side of the moving plate 10. Therefore, if the screw shaft 12 is rotated by the motor 14, the moving plate 10 moves along the X-axis direction together with the nut portion. On the upper surface of this moving plate 10, a holding table 16 for holding a frame unit including a workpiece to be described later is provided.

[0019] FIG. 2 is a perspective view schematically showing an example of the frame unit held by the holding table 16. The frame unit 11 shown in FIG. 2 has a disk-shaped workpiece 13 after being ground from the back surface (lower surface, the other surface) side to a desired thickness.

[0020] This workpiece 13 is, for example, a wafer made of a semiconductor material such as silicon (Si) and has a notch 13a formed on the side surface. Also, the workpiece 13 is partitioned into a plurality of regions by a plurality of division planned lines intersecting each other, and devices such as ICs or LSIs are formed on the surface (upper surface) side of each region.

[0021] Furthermore, on the surface (upper surface, one side surface) of the workpiece 13, a disc-shaped protective member 15 having a diameter approximately equal to the diameter of the workpiece 13 is provided so as to cover the device. This protective member 15 is made of, for example, resin, and is provided to protect the device by mitigating the impact applied to the surface side when the workpiece 13 is ground from the back side.

[0022] Also, after the workpiece 13 is ground from the back side, the central region of a disc-shaped dicing tape 17 having a diameter longer than the diameter of the workpiece 13 is adhered to the back surface of the workpiece 13. This dicing tape 17 has, for example, a flexible film-shaped tape base material and an adhesive layer (paste layer) provided on one surface (the surface on the side of the workpiece 13) of this tape base material.

[0023] This tape base material is made of, for example, polyolefin (PO), polyethylene terephthalate (PET), polyvinyl chloride (PVC), polystyrene (PS), or the like. Also, this adhesive layer is made of, for example, an ultraviolet-curable silicone rubber, an acrylic-based material, or an epoxy-based material.

[0024] Also, an annular frame 19 made of a metal material such as aluminum or stainless steel is adhered to the outer peripheral region of the dicing tape 17. A circular opening having a diameter longer than the diameter of the workpiece 13 is formed in this annular frame 19. And the dicing tape 17 is adhered to the annular frame 19 so as to close this opening.

[0025] The frame unit 11 shown in FIG. 2 is carried into the holding table 16 shown in FIG. 1 with the dicing tape 17 facing downwards. FIG. 3 is a perspective view schematically showing the holding table 16. This holding table 16 has a cylindrical housing 18. A cylindrical concave portion is formed in the upper portion of this housing 18, and a disc-shaped porous plate 20 is fixed to this concave portion.

[0026] This porous plate 20 communicates with a suction source (not shown) such as a vacuum pump via a suction path (not shown) formed inside the housing 18, a pipe connected to the housing 18, an electric valve, and the like. Further, an annular frame holding portion 22 is provided around the housing 18. An annular groove 22a is formed on the upper surface of this frame holding portion 22.

[0027] This groove 22a communicates with a suction source (not shown) such as a vacuum pump via a plurality of suction paths 22b that open at the bottom surface of the groove 22a, a pipe connected to the frame holding portion 22, an electric valve, and the like. Note that this suction source may be the same as or different from the suction source that communicates with the porous plate 20.

[0028] When holding the frame unit 11 on the holding table 16, first, the frame unit 11 is carried onto the upper surface of the porous plate 20 and the upper surface of the frame holding portion 22 so that the dicing tape 17 is on the bottom. Then, the above-described suction source is operated and the electric valve provided between the porous plate 20 and the groove 22a and the suction source is opened.

[0029] As a result, the workpiece 13 is sucked from the porous plate 20 side through the central region of the dicing tape 17, and the annular frame 19 is sucked from the frame holding portion 22 side through the outer peripheral region of the dicing tape 17. As a result, the frame unit 11 is held on the holding table 16.

[0030] Further, a plurality of air cylinders 24 are provided below the frame holding portion 22 at substantially equal intervals along the circumferential direction of the frame holding portion 22. Each of the plurality of air cylinders 24 has a piston rod 24a that is movable along the Z-axis direction, and the frame holding portion 22 is connected to the upper end portion of this piston rod 24a.

[0031] Therefore, in the holding table 16, by operating a plurality of air cylinders 24 with the frame unit 11 held in the holding table 16, it is possible to lower the position of the annular frame 19 below the position of the workpiece 13, etc.

[0032] Above the holding table 16, as shown in FIG. 1, a support base 26 having a support surface 26a parallel to the X-axis direction and the Z-axis direction and extending along the X-axis direction in a rectangular parallelepiped shape is provided. A second moving mechanism (moving mechanism for the holding table and the heating plate) 28 for moving the gripping unit 42 and the heating plate 48 described later along the X-axis direction is provided on the support surface 26a of the support base 26.

[0033] This second moving mechanism 28 has a pair of guide rails 30 fixed to the support surface 26a and extending along the X-axis direction. And on the surface side of the pair of guide rails 30, a moving plate 32 is connected in a slidable manner along the pair of guide rails 30. Also, between the pair of guide rails 30, a screw shaft 34 extending along the X-axis direction is arranged.

[0034] A motor 36 for rotating the screw shaft 34 is connected to the front end portion of the screw shaft 34. Further, on the surface of the screw shaft 34 where a spiral groove is formed, a nut portion for accommodating balls that roll on the surface of the rotating screw shaft 34 is provided, and a ball screw is configured. That is, when the screw shaft 34 rotates, the balls circulate inside the nut portion and the nut portion moves along the X-axis direction.

[0035] Furthermore, this nut portion is fixed to the back surface side of the moving plate 32. Therefore, when the screw shaft 34 is rotated by the motor 36, the moving plate 32 moves along the X-axis direction together with the nut portion. Also, a pair of air cylinders 38, 40 are provided on the surface of the moving plate 32 so as to be arranged in the front-rear direction.

[0036] And the air cylinder 38 located in the front has a piston rod 38a that can move along the Z-axis direction, and a gripping unit 42 that grips the peeling tape 21 described later is connected to the lower end of this piston rod 38a. This gripping unit 42 has an L-shaped fixed claw 44.

[0037] This fixed claw 44 has a rectangular parallelepiped-shaped standing portion 44a extending along the Z-axis direction and a rectangular parallelepiped-shaped bottom portion 44b extending rearward from the lower end of this standing portion 44a. Also, a rectangular parallelepiped-shaped movable claw 46 that can move along the Z-axis direction is provided on the rear surface of this standing portion 44a.

[0038] Also, the air cylinder 40 located behind the air cylinder 38 has a piston rod 40a that can move along the Z-axis direction, and a rectangular parallelepiped-shaped heating plate 48 that heats the peeling tape 21 described later is connected to the lower end of this piston rod 40a. A heating wire is built into this heating plate 48, and by causing an electric current to flow through this heating wire, the heating plate 48 is heated around the vicinity of the lower end of the heating plate 48.

[0039] Furthermore, a support base 50 having a support surface 50a parallel to the Y-axis direction and the Z-axis direction and a rectangular parallelepiped shape extending along the Y-axis direction is provided below and behind the air cylinder 40. A third moving mechanism (cutter moving mechanism) 52 that moves a cutter 62 described later along the Y-axis direction is provided on the support surface 50a of this support base 50.

[0040] This third moving mechanism 52 is fixed to the support surface 50a and has a pair of guide rails 54 extending along the Y-axis direction. And an air cylinder 56 is connected to the front side of the pair of guide rails 54 in a slidable manner along the pair of guide rails 54. Also, a screw shaft 58 extending along the Y-axis direction is arranged between the pair of guide rails 54.

[0041] One end of this screw shaft 58 is connected to a motor 60 for rotating the screw shaft 58. Further, on the surface of the screw shaft 58 where the spiral groove is formed, a nut portion for accommodating balls that roll on the surface of the rotating screw shaft 58 is provided, and a ball screw is configured. That is, when the screw shaft 58 rotates, the balls circulate within the nut portion and the nut portion moves along the Y-axis direction.

[0042] Furthermore, this nut portion is fixed to the rear surface side of the air cylinder 56. Therefore, if the screw shaft 58 is rotated by the motor 60, the air cylinder 56 moves along the Y-axis direction together with the nut portion. Also, the air cylinder 56 has a piston rod 56a that is movable along the Z-axis direction, and a disk-shaped cutter 62 is connected to the lower end portion of this piston rod 56a.

[0043] Also, below the cutter 62, a workbench 64 used for cutting the peeling tape 21 described later is provided. This workbench 64 is provided at a position higher than the upper surface of the holding table 16 (the upper surface of the porous plate 20 and the upper surface of the frame holding portion 22). Further, a groove 64a extending along the Y-axis direction is formed in the workbench 64.

[0044] Then, when the cutter 62 with its lower end positioned inside the groove 64a is moved along the Y-axis direction while the peeling tape 21 is present on the workbench 64, the peeling tape 21 is cut by the cutter 62.

[0045] Furthermore, a peeling tape supply unit 66 is provided on the upper rear side of the workbench 64. This peeling tape supply unit 66 has a supply roller 68. The peeling tape 21 is wound around this supply roller 68. This peeling tape 21 has, for example, a tape base material and a thermosetting resin layer provided on one surface (the surface on the supply roller 68 side) of this tape base material.

[0046] Below the supply roller 68, a pair of guide rollers 70 arranged along the Z-axis direction are provided, and the peeling tape 21 is pulled downward by this pair of guide rollers 70. Further, below the pair of guide rollers 70, a pair of feeding rollers 72 arranged along the Z-axis direction are provided, and the peeling tape 21 is fed forward by this pair of feeding rollers 72.

[0047] Furthermore, the peeling tape supply unit 66 is connected to a fourth moving mechanism (a moving mechanism for the peeling tape supply unit) (not shown) that moves the peeling tape supply unit 66 along the Z-axis direction. This fourth moving mechanism is, for example, a ball screw type moving mechanism.

[0048] Below the peeling tape supply unit 66, a collection box 74 for collecting the protective member 15 peeled from the workpiece 13 is provided. In FIG. 1, for the sake of convenience, only the outline of this collection box 74 is shown by a dashed line. Specifically, the collection box 74 includes a bottom wall and side walls erected from the outer peripheral portion of the bottom wall, and its upper surface side is open.

[0049] Furthermore, the peeling device 2 is provided with a cover (not shown) that covers the above-described components. And a touch panel 76 is arranged on the front surface of this cover. This touch panel 76 is composed of, for example, an input device such as a touch sensor of a capacitance type or a resistive film type, and a display device such as a liquid crystal display or an organic EL (Electro Luminescence) display, and functions as a user interface.

[0050] Also, the components of the peeling device 2 are connected to the control unit 78. In FIG. 1, for the sake of convenience, this control unit 78 is shown as a functional block. Specifically, the control unit 78 has a central processing unit (CPU) and a storage device including a main storage device and an auxiliary storage device, and controls the operations of the above-described components.

[0051] The main memory device is composed of a volatile memory such as DRAM (Dynamic Random Access Memory) or SRAM (Static Random Access Memory). The auxiliary storage device is composed of a non-volatile memory such as an SSD (Solid State Drive) (NAND type flash memory) or an HDD (Hard Disk Drive) (magnetic storage device). The CPU reads various programs and / or data stored in the main memory device and / or the auxiliary storage device and controls the operations of the above-described components.

[0052] For example, the CPU reads data on the time (waiting time) to wait above the collection box 74 for the gripping unit 42 that grips the tip of the peeling tape 21 attached to the protective member 15 peeled from the surface of the workpiece 13 from the auxiliary storage device. Then, after waiting for the gripping unit 42 for this waiting time, the CPU controls the gripping unit 42 to drop the protective member 15 together with the peeling tape 21 from the gripping unit 42.

[0053] FIGS. 4(A) and 4(B), FIGS. 5(A) and 5(B), and FIGS. 6(A) and 6(B) are partial cross-sectional side views schematically showing the state around the holding table 16 when the protective member 15 is peeled from the surface of the workpiece 13. FIGS. 7(A) and 7(B) and FIGS. 8(A) and 8(B) are side views schematically showing the state around the collection box 74 when the protective member 15 peeled from the surface of the workpiece 13 is dropped into the collection box 74 together with the peeling tape 21.

[0054] In the peeling device 2, for example, the protective member 15 is peeled from the surface of the workpiece 13 and the peeled protective member 15 is dropped into the collection box 74 in the following order. Specifically, first, the control unit 78 operates the first moving mechanism 6 to move the holding table 16 forward so that the loading of the frame unit 11 onto the holding table 16 is not obstructed by the gripping unit 42, the workbench 64, etc.

[0055] Next, the frame unit 11 is carried into the holding table 16 so that the protective member 15 faces upward. Next, the control unit 78 operates a suction source communicating with the porous plate 20 and a suction source communicating with the groove 22a and the suction passage 22b of the frame holding portion 22. Next, the control unit 78 opens an electric valve provided between these suction sources and the porous plate 20 or the frame holding portion 22.

[0056] Thereby, the workpiece 13 is sucked from the side of the porous plate 20 through the central region of the dicing tape 17, and the annular frame 19 is sucked from the side of the frame holding portion 22 through the outer peripheral region of the dicing tape 17 (see Fig. 4(A)). As a result, the frame unit 11 is held by the holding table 16.

[0057] Next, the control unit 78 controls a plurality of air cylinders 24 to lower the piston rod 24a so as to lower the frame holding portion 22. At this time, the annular frame 19 sucked by the frame holding portion 22 also descends (see Fig. 4(B)). Thereby, it is possible to prevent the protective member 15 peeled from the surface of the workpiece 13 from adhering to the annular frame 19 or the like.

[0058] Next, the control unit 78 operates the first moving mechanism 6 to move the holding table 16 rearward so that the workbench 64 or the like is positioned above the frame unit 11 held by the holding table 16. Next, the control unit 78 operates the second moving mechanism 28 so that the gripping unit 42 approaches the peeling tape supply unit 66.

[0059] Next, the control unit 78 operates a pair of guide rollers 70 and a pair of feeding rollers 72 so that the peeling tape 21 is fed toward the gripping unit 42. Thereby, the tip (one end) of the peeling tape 21 is positioned between the bottom 44b of the fixed claw 44 and the movable claw 46.

[0060] Next, the movable claw 46 is moved closer to the bottom 44b of the fixed claw 44 so that the tip of the peeling tape 21 is sandwiched between the bottom 44b of the fixed claw 44 and the movable claw 46, that is, so that it is gripped by the gripping unit 42. Next, the control unit 78 operates the second moving mechanism 28 so that the gripping unit 42 is separated from the peeling tape supply unit 66 and the front end portion of the protection member 15 is positioned directly below the heating plate 48.

[0061] Thereby, the peeling tape 21 is pulled out by the gripping unit 42 until its tip is positioned in front of the workbench 64. Next, the control unit 78 operates the air cylinder 40 to lower the piston rod 40a connected to the heating plate 48 so as to press a part of the peeling tape 21 existing directly below the heating plate 48 against the protection member 15 (see Fig. 5(A)).

[0062] Next, the control unit 78 causes an electric current to flow through the heating wire built into the heating plate 48 to heat the vicinity of the lower end of the heating plate 48. Thereby, a part of the peeling tape 21 is adhered to the protection member 15. Next, the control unit 78 operates the air cylinder 56 to lower the piston rod 56a connected to the cutter 62 so that the lower end of the cutter 62 is positioned inside the groove 64a.

[0063] Next, the control unit 78 operates the third moving mechanism 52 so that the portion of the peeling tape 21 located above the groove 64a of the workbench 64 is cut by the cutter 62. Next, the control unit 78 operates the air cylinder 40 to raise the piston rod 40a connected to the heating plate 48 so as to separate the heating plate 48 from the peeling tape 21 (see Fig. 5(B)).

[0064] Next, the control unit 78 operates the air cylinder 38 to raise the piston rod 38a connected to the gripping unit 42 so as to raise the gripping unit 42 (see Fig. 6(A)). Thereby, the front end portion of the protection member 15 is peeled off from the surface of the workpiece 13 together with the peeling tape 21.

[0065] Next, the control unit 78 operates the first moving mechanism 6 and the second moving mechanism 28 so that the entire protective member 15 is peeled off from the surface of the workpiece 13 (see Fig. 6(B)). That is, the gripping unit 42 that grips the tip of the peeling tape 21 and the holding table 16 that holds the frame unit 11 are relatively moved along the X-axis direction.

[0066] Next, the control unit 78 operates the second moving mechanism 28 so that the gripping unit 42 that grips the tip of the peeling tape 21 integrated with the protective member 15 peeled off from the surface of the workpiece 13 is positioned above the recovery box 74 (see Fig. 7(A)). Then, when the gripping unit 42 reaches above the recovery box 74, the control unit 78 stops the operation of the second moving mechanism 28 (see Fig. 7(B)).

[0067] Here, when the gripping unit 42 is moved and then stopped in this way, inertial force acts on the peeling tape 21 and the protective member 15, and the protective member 15 swings together with the peeling tape 21 whose tip is gripped by the gripping unit 42. Then, in order to drop the protective member 15 into the recovery box 74 after this swing subsides, the control unit 78 makes the gripping unit 42 standby for a preset time (for example, 10 seconds or more and 20 seconds or less) (see Fig. 8(A)).

[0068] Note that this time is set by the operator via the touch panel 76, for example, and can be changed. Then, when this time elapses, the control unit 78 operates the gripping unit 42 so that the protective member 15 together with the peeling tape 21 is dropped into the recovery box 74, that is, separates the movable claw 46 from the bottom 44b of the fixed claw 44 (see Fig. 8(B)).

[0069] The above-described peeling device 2 is provided with a control unit 78 that positions the gripping unit 42 above the collection box 74, waits the gripping unit 42 for a preset time, and then drops the protective member 15 together with the peeling tape 21 from the gripping unit 42. Therefore, in the peeling device 2, the peeling tape 21 and the protective member 15 can be dropped into the collection box 74 after the shaking of the peeling tape 21 and the protective member 15 accompanying the movement of the gripping unit 42 has subsided.

[0070] In this case, the probability that the protective member 15 dropped from the gripping unit 42 adheres to the side wall of the collection box 74 can be reduced. As a result, in the peeling device 2, the frequency of the operation of taking out the collected protective member 15 from the collection box 74 is not increased, and the protective member 15 can be peeled from the workpiece 13 without complicating this operation.

[0071] Note that the structures and methods according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the object of the present invention.

Explanation of Reference Numerals

[0072] 2: Peeling device 4: Support base (4a: Support surface) 6: First moving mechanism (Moving mechanism for holding table) 8: Guide rail 10: Moving plate 11: Frame unit 12: Screw shaft 13: Workpiece (13a: Notch) 14: Motor 15: Protective member 16: Holding table 17: Dicing tape 18: Housing 19: Annular frame 20: Porous plate 21: Peeling tape 22: Frame holding part (22a: Groove, 22b: Suction path) 24: Air cylinder (24a: Piston rod) 26: Support base (26a: Support surface) 28: Second moving mechanism (Moving mechanism for gripping unit) 30: Guide rail 32: Moving plate 34: Screw shaft 36: Motor 38: Air cylinder (38a: Piston rod) 40: Air cylinder (40a: Piston rod) 42: Gripping unit 44: Fixed claw (44a: Standing part, 44b: Bottom part) 46: Movable claw 48: Heating plate 50: Support base (50a: Support surface) 52: Third moving mechanism (Moving mechanism for cutter) 54: Guide rail 56: Air cylinder (56a: Piston rod) 58: Screw shaft 60: Motor 62: Cutter 64: Workbench (64a: Groove) 66: Tape supply unit for peeling 68: Supply roller 70: Guide roller 72: Feeding roller 74: Collection box 76: Touch panel 78: Control unit

Claims

【Claim 1】 A peeling device for peeling a protective member from a workpiece with the protective member adhered to one surface, comprising: a holding table for holding the workpiece from the other surface side; a gripping unit for gripping one end of a peeling tape that adheres to the protective member adhered to the one surface of the workpiece held by the holding table; a collection box for collecting the protective member dropped together with the peeling tape from the gripping unit; a moving mechanism for moving the gripping unit from above the holding table to above the collection box; a control unit for controlling the operations of the holding table, the gripping unit, and the moving mechanism; The control unit positions the gripping unit above the collection box, waits the gripping unit for a preset time, and then drops the protective member together with the peeling tape from the gripping unit. The peeling device is characterized by this.

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