Alignment Ring and Protection Case of Probe Card

Abstract

To provide a supporting device and a protective case for a probe card.SOLUTION: A protective case includes a supporting device, a case body, an upper cover, and a switching member. The supporting device has plural quick-release members and plural bevel grooves. The case body has plural arrangement grooves each configured to mate with the corresponding quick-release member to fasten the supporting device to the case body. The probe card is connected with a protecting cover that includes plural fastening members fastened to the probe card. When the protecting cover and the probe card connected therewith are placed on the supporting device, the bevel grooves actuate the fastening members and thereby unfasten the fastening members from the probe card to make the probe card and the protecting cover separable. The switching members are provided on the case body and are each lockable to a corresponding engaging member on the upper cover to lock the upper cover the case body together.SELECTED DRAWING: Figure 5B

Description

Technical Field

[0001] The present invention relates to a probe card protection case, and particularly to a positioning ring and a quick-release protection case of a probe card.

Background Art

[0002] With the progress of science and technology, semiconductor devices have already become widely seen in various electronic devices. In the process related to semiconductor devices, the wafer is first tested before entering the packaging process. A probe card is an interface between the wafer and the test system, which is connected between the wafer to be tested and the test system. A plurality of probes are provided on the probe card, and the probes can electrically contact pads or bumps on the wafer. The wafer is electrically connected to the test system through the probe card to achieve the purpose of measurement.

[0003] Before the probe card is tested and used or before maintenance, in order to protect the probes thereon, the conventional method is to provide a protective cover on the probe card. However, currently, in the process of storing, testing or maintaining the probe card, there are still the following disadvantages. Since it is manually carried to pick up the probe card, it is easy to touch the probes during the process of taking in and out, causing damage. Also, in the process of testing a semiconductor wafer, if the protective cover is not removed from the probe card due to human error, a situation where test errors and damage to test equipment will further occur.

Summary of the Invention

Problems to be Solved by the Invention

[0004] In view of this, the present invention provides an alignment ring and a protective case for a probe card. When the protective cover is arranged on the alignment ring together with the probe card to which it is connected, the inclined groove of the alignment ring actuates the snap material on the protective cover, further disengages from the locked state with the probe card, and separates the probe card and the protective cover into a separable state. Thereby, the probe card has a protection function when lifted, and the effect of automatically removing the protective cover when grasped by an automation device can be achieved, improving the protection for the probe and contributing to the automation of the test process.

Means for Solving the Problems

[0005] According to one aspect of the present invention, a protective case for a probe card is provided, including an alignment ring and a case body. The alignment ring is used to support and align the probe card, and the alignment ring has a plurality of quick-release materials. A plurality of placement grooves are provided in the case body, arranged corresponding to the quick-release materials, and used to fit and abut against the quick-release materials. The quick-release materials are removably abutted against the placement grooves and used to removably engage the alignment ring within the case body.

[0006] In one embodiment, the quick-release material is an elastic engagement structure. Each quick-release material includes a contact material and a pair of shoulders. The contact material abuts against one inner wall of the case body, and the pair of shoulders are connected to both sides of the contact material. A plurality of button lock materials are further provided in the case body, located in the placement grooves, and each button lock material is crimped onto the shoulders to fix the alignment ring thereby.

[0007] In one embodiment, when the contact material receives force and separates from the inner wall by a certain distance, the shoulders disengage from the fasteners, putting the alignment ring in a removable state.

[0008] Based on another aspect of the present invention, a positioning ring of a probe card is provided, which is removably installed in a protective case and has a plurality of inclined grooves. The positioning ring is used to support and position the probe card. A protective cover is connected to the probe card, and the protective cover includes a plurality of snap members for locking the probe card. Here, when the protective cover and the probe card connected thereto are both arranged on the positioning ring, the inclined grooves activate the snap members and further disengage from the locked state with the probe card, thereby making the probe card and the protective cover separable. Here, when taking out the probe card arranged on the positioning ring using the first means, the probe card is separated from the protective cover, whereby the protective cover remains on the positioning ring. When taking out the protective cover and the probe card arranged on the positioning ring using the second means, the snap members disengage from the inclined grooves and the locked state of the probe card is restored.

[0009] In one embodiment, the protective cover includes a cover body, a side wall, and a first handle installed on the side wall. The first handle corresponds to the second handle of the probe card, and the second means takes out the protective cover and the probe card simultaneously via the second handle and the first handle.

[0010] In one embodiment, each snap member has an inclined handle portion, each inclined groove is used to interact with the inclined handle portion, each inclined groove has a guide inclined surface, has a first included angle between the guide inclined surface and the horizontal plane, and has a second included angle smaller than the first included angle between each inclined handle portion and the horizontal plane.

[0011] According to another aspect of the present invention, a protective case for a probe card is provided, and the protective case includes an alignment ring, a case body, an upper cover, and a plurality of switch members. The alignment ring is used to support and align the probe card, and the alignment ring has a plurality of quick release members. A plurality of placement grooves are provided in the case body, which are arranged corresponding to the quick release members and are used to fit and abut against the quick release members. Here, the quick release members are removably abutted against the placement grooves and are used to removably engage the alignment ring within the case body. The upper cover is fitted with the case body to define an accommodation space for accommodating one of the alignment ring and the probe card. The switch members are installed on the case body, and tenons are provided on the upper cover, corresponding to the positions of the switch members. Here, the switch members are locked to the tenons and are used to lock the upper cover and the case body thereby.

[0012] In one embodiment, the switch member is a rotary elastic locking member, which rotates after being pressed by a first means to disengage the switch member from the lock with the tenon, thereby making the upper cover removable.

[0013] In one embodiment, the switch member is a pressing elastic locking member, which is pressed by a second means to disengage the switch member from the lock with the tenon, thereby making the upper cover removable.

Advantages of the Invention

[0014] The positioning ring and the protective case of the probe card according to the embodiment of the present invention can achieve the effect of removing the locking between the protective cover and the probe card by using the positioning ring and quickly and easily taking out the probe card. When taking out the probe card from the positioning ring in different ways, the protective cover can be detached from the probe card or re-locked to the probe card. On the one hand, it can avoid the problem of damage caused by contact when manually inserting and removing the probe card, and on the other hand, it can contribute to the automation of the process. In addition, the positioning ring is removably installed in the protective case, and the positioning ring can be quickly replaced to correspond to different types of probe cards, improving the flexibility in application. Furthermore, a switch material and a tenon are installed in the protective case, and the effect of automating locking and unlocking can be achieved.

Brief Description of the Drawings

[0015] In order to make the above and other features, advantages and embodiments of the present invention clearer, the description of the drawings is given below.

Figure 1

Figure 2A

Figure 2B

Figure 2C

Figure 3A

Figure 3B

Figure 4A

Figure 4B

Figure 5A

Figure 5B

Figure 6A

Figure 6B

Figure 7

Figure 8A

Figure 8B

Figure 9A

Figure 9B

Figure 9C

Figure 10

Figure 11

Figure 12A

Figure 12B

Figure 12C

Figure 13

Figure 14A

Figure 14B

Mode for Carrying Out the Invention

[0016] This patent was filed on May 2, 2023 under the name of "Probe Card Supporting Device".

Patent Document 1

Examples

[0017] Please refer to FIGS. 1 and 2A through 2C. FIG. 1 is a schematic diagram of a protective case according to an embodiment of the present invention. FIG. 2A is a schematic diagram before assembling the positioning ring and the case body. FIG. 2B is a schematic diagram after assembling the positioning ring and the case body. FIG. 2C is a cross-sectional view along the line C-C' of FIG. 2B. The protective case 100 includes at least a positioning ring 151 and a case body 110. The positioning ring 151 is used to support and position the probe card 200, and the positioning ring 151 has a plurality of quick release members 157. A plurality of placement grooves 112 are provided in the case body 110, which are arranged corresponding to the quick release members 157 and are used to fit and abut against the quick release members 157. The quick release member 157 removably abuts against the placement groove 112 and is used to removably engage the positioning ring 151 within the case body 110.

[0018] In this embodiment, the quick release member 157 is an elastic engagement structure. Each quick release member 157 includes a contact member 158 and a pair of shoulders 159. The contact member 158 abuts against one inner wall 111 of the case body 110. The shoulders 159 are connected to both sides of the contact member 158. A plurality of button locking members 113 are further provided in the case body 110 and are located at the positions of the placement grooves 112. Each button locking member 113 is crimped onto the shoulder 159, thereby fixing the positioning ring 151. The contact member 158 has an elastic margin for elastic compression and release. When the contact member 158 receives a force and moves away from the inner wall 111 by a certain distance, the shoulder 159 disengages from the button locking member 113, making the positioning ring 151 removable, and the effect of quickly replacing the positioning ring 151 can be achieved, thereby corresponding to different types of probe cards 200.

[0019] In this embodiment, it is described by taking eight quick release materials 157 as an example. However, those with ordinary knowledge in the technical field to which it belongs will be able to understand that the quantity of the quick release material 157 is not limited thereto. The structure of the quick release material 157 in this embodiment is an exemplary description, and any structure can be applied to the present invention as long as the positioning ring 151 can be removably installed in the protective case 100.

[0020] Please refer to FIGS. 1 and 3A to 5B together. FIG. 3A is a side cross-sectional view before connection between the probe card and the protective cover. FIG. 3B is a side cross-sectional view during connection between the probe card and the protective cover. FIG. 4A is a perspective view during connection between the probe card and the protective cover. FIG. 4B is a perspective view from another angle during connection between the probe card and the protective cover. FIG. 5A is a side cross-sectional view before arranging the probe card and the protective cover on the positioning ring. FIG. 5B is a side cross-sectional view when the probe card and the protective cover are arranged on the positioning ring.

[0021] The protective case 100 of this embodiment is used to accommodate the probe card 200. The protective case 100 includes a case body 110, an upper cover 130, a positioning ring 151, and a protective cover 170. The upper cover 130 is fitted with the case body 110 to define an accommodation space 101 for accommodating the positioning ring 151 and the probe card 200. The positioning ring 151 is installed in the accommodation space 101 of the case body 110. The positioning ring 151 has a plurality of inclined grooves 155 facing the direction of the upper cover 130. The positioning ring 151 is used to support and position the probe card 200. The protective cover 170 includes a cover body 171 and a plurality of snap members 175 installed on the cover body 171. The cover body 171 is used to cover the plurality of probes 210 on the probe card 200, thereby protecting to avoid accidental contact of the probes 210. The snap members 175 are used to be locked to the probe card 200. When the protective cover 170 and the probe card 200 connected thereto are both arranged on the positioning ring 151, the inclined grooves 155 actuate the snap members 175 to further disengage from the locked state with the probe card 200, thereby making the probe card 200 and the protective cover 170 in a separable state. That is, the state shown in FIG. 5B.

[0022] Next, the features of the mutual locking structure among the protective cover 170, the probe card 200, and the positioning ring 151 will be described.

[0023] The snap members 175 of the protective cover 170 are each a rotating operating member, having a snap hook portion 176, an operating shaft 177, and an inclined handle portion 178. The snap hook portion 176 and the inclined handle portion 178 are connected to opposite sides of the operating shaft 177. The snap member 175 is rotatably installed on the lid body 171 of the protective cover 170 via the operating shaft 177. The snap hook portion 176 is used to latch the probe card 200, and the inclined handle portion 178 is used to interact with each inclined groove 155 of the positioning ring 151. When the inclined groove 155 pushes the inclined handle portion 178, the snap member 175 is rotated at a certain angle according to the operating shaft 177, thereby disengaging the snap hook portion 176 from the latching with the probe card 200. The probe card 200 has a second handle 220 and is used to be gripped manually or by a robotic arm. The second handle 220 is installed on the side surface 201 of the probe card 200. In this embodiment, the snap hook portion 176 is used to latch onto the second handle 220, thereby connecting the protective cover 170 to the probe card 200.

[0024] Furthermore, the snap member 175 can further include an elastic bending portion 179, which is located between the snap member 175 and the lid body 171 of the protective cover 170. When the snap member 175 rotates under the action of force, the elastic bending portion 179 is compressed. When the external force stops acting on the snap member 175, the elastic bending portion 179 elastically resets and propels the snap member 175 back to its position before rotation.

[0025] As shown in FIG. 3A, when the protective cover 170 is connected to the probe card 200, the snap hook portion 176 presses and moves along the inner wall 222 of the second handle 220. The degree of compression under the force of the elastic bending portion 179 is such that after the snap hook portion 176 moves and passes through the inner wall 222 of the second handle 220 and moves to the upper surface 221 of the second handle 220, the snap hook portion 176 elastically releases the elastic bending portion 179 on the upper surface 221 and is locked to the upper surface 221 of the second handle 220. At this time, the protective cover 170 is connected to the probe card 200. As shown in FIGS. 3B, 4A, and 4B. Since the probe 210 is protected by the lid body 171 of the protective cover 170, in the process of moving the probe card 200, the problem of damage caused by the probe 210 being contacted can be avoided, which is advantageous for various gripping and moving operations of the probe card 200.

[0026] As shown in FIG. 5A, when the protective cover 170 attempts to place the probe card 200 connected thereto on the positioning ring 151, the protective cover 170 faces the positioning ring 151, and the position of the snap member of the protective cover 170 corresponds to the inclined groove of the positioning ring 151. First, the inclined handle portion 178 of the snap member 175 is directed toward the positioning ring 151 and aligned with the position of the inclined groove 155. Next, the protective cover 170 and the probe card 200 are moved closer to the positioning ring 151, bringing the inclined groove 155 into contact with the inclined handle portion 178, and the inclined handle portion 178 is correspondingly pressed against the inclined groove 155 in response to the inclination angle thereof. The inclined groove 155 has a guide slope 156, with a first included angle A1 between the guide slope 156 and the horizontal plane H, and a second included angle A2 smaller than the first included angle A1 between the inclined handle portion 178 and the horizontal plane H. In one embodiment, the first included angle A1 is 115 degrees and the second included angle A2 is 105 degrees. When the pressing interaction between the inclined groove 155 and the inclined handle portion 178 occurs, the inclined handle portion 178 receives a force to drive the operating shaft 177 and rotates until the inclined handle portion 178 and the guide slope 156 have the same inclination angle. At this time, the snap member 175 has already rotated at an angle of 10 degrees. At the same time, the snap hook portion 176 disengages from the upper surface 221 of the second handle 220 according to the rotation angle of the operating shaft 177, further releasing the locking state between the protective cover 170 and the probe card 200. At this time, the probe card 200 and the protective cover 170 are in a separable state, as shown in FIG. 5B. It should be noted that the rotation angle of the snap member 175 under the action can be adjusted according to the actual situation and is not limited to the above angle. As long as the snap hook portion 176 can disengage from the locking with the second handle 220 and there is a certain gap (for example, a 5 mm gap) between the snap hook portion 176 and the second handle 220 in the mechanism design, any of them can be applied to the present invention.

[0027] Please refer to FIGS. 6A and 6B. FIG. 6A is a side cross-sectional view when taking out the probe card using the first means. FIG. 6B is a side cross-sectional view after taking out the probe card using the first means. In this embodiment, the first means 410 is a robot arm, and grips the probe card 200 at two opposing sides 201 of the probe card 200. Since the probe card 200 and the protective cover 170 are in a separable state, when taking out the probe card 200 disposed on the positioning ring 151 using the first means 410, the probe card 200 separates from the protective cover 170, and thereby the protective cover 170 remains on the positioning ring 151. After being gripped by the robot arm, only the probe card 200 is taken out from the positioning ring 151, thereby exposing the probe 210. Next, the probe card 200 can be moved to a test machine platform to perform subsequent tests. Taking the first means 410 in this embodiment gripping two opposing sides 201 by a robot arm as an example. However, the present invention is not limited thereto, and the robot arm may grip the probe card 200 via the four corners of the probe card 200. In addition, any technical means that grips the probe card 200 through a region other than the second handle 220 and separates the probe card 200 from the protective cover 170 can be applied to the present invention.

[0028] Please refer to FIGS. 7 to 8B. FIG. 7 is a schematic diagram showing the gripping method of the second means. FIG. 8A is a side view when the protective cover and the probe card are taken out using the second means. FIG. 8B is a side view after the protective cover and the probe card are taken out using the second means. The arrow in FIG. 7 indicates the gripping method by which the second means grips the protective cover and the probe card. In this embodiment, the protective cover 170 includes a cover body 171, side walls 172, and a first handle 173 installed on the side walls 172. The first handle 173 corresponds to the second handle 220 of the probe card 200. The second means 420 allows the operator to manually reach into the first handle 173 of the protective cover 170 through the second handle 220 of the probe card 200 and take out the protective cover 170 and the probe card 200 together. In this embodiment, the first handle 173 protrudes from the side wall 172 of the cover body 171, and the first handle 173 has the same shape as the second handle 220 of the probe card 200. When the protective cover 170 is connected to the probe card 200, the first handle 173 overlaps under the second handle 220 (shown in FIGS. 4A and 4B), so that the protective cover 170 and the probe card 200 can be taken out together. When taking out the protective cover 170 and the probe card 200 arranged on the positioning ring 151 using the second means 420, during the process that the snap member 175 disengages from the inclined groove 155, as the inclined handle portion 178 receives the inclination angle of the inclined groove 155, the snap hook portion 176 is gradually reduced until it is locked on the upper surface 221 of the second handle 220 according to the rotation angle of the operating shaft 177, and the protective cover 170 is restored to the locked state with the probe card 200. After the protective cover 170 is taken out from the positioning ring 151 together with the probe card 200, it can be moved to a repair shop or the like for subsequent operations. The second means 420 in this embodiment takes as an example the manual simultaneous gripping of the first handle 173 and the second handle 220. However, the present invention is not limited thereto, and any technical means for simultaneously gripping the protective cover 170 and the probe card 200 can be applied to the present invention.

[0029] Please refer to FIGS. 9A to 9C. FIG. 9A is a schematic diagram before removing the protective cover using the jig. FIG. 9B is a schematic diagram when the jig is connected to the protective cover. FIG. 9C is a schematic diagram after removing the protective cover using the jig. After removing the protective cover 170 and the probe card 200 by the second means 420, it can be inverted and placed on the workbench surface 500. The protective cover 170 and the probe 210 are separated from the workbench surface 500. Next, the jig 600 is used to separate the protective cover 170 and the probe card 200. The jig 600 is used to connect to the protective cover 170 and has a main body 610 and a pair of engaging pins 620. Both sides of the main body 610 are inclined surfaces 611, which are used to press against and interact with the inclined handle portion 178 of the snap member 175. The engaging pins 620 are used to engage with the protective cover 170. When the jig 600 is connected to the protective cover 170, the inclined surface 611 presses against the inclined handle portion 178, and the snap member 175 is actuated to further disengage the snap hook portion 176 from the locked state with the probe card 200. The structure and operating mechanism of this part are the same as those of the inclined groove 155 of the positioning ring 151, and will not be described again here. In addition, when the jig 600 is connected to the protective cover 170, the engaging pins 620 are engaged and connected to the protective cover 170. When the jig 600 is lifted manually (or by a robot arm), the protective cover 170 and the probe card 200 can be separated, facilitating operations such as cleaning and maintenance of the probe card 200.

[0030] In addition, for the positioning method of the positioning ring 151 of the probe card 200 in this embodiment, please refer to FIG. 1. The probe card 200 has at least one positioning hole 230, which is used to fit with at least one positioning structure 153 in the positioning ring 151. The positioning structure 153 is, for example, a convex post. When the probe card 200 is arranged on the positioning ring 151 in the correct direction, the positioning structure 153 is inserted into the positioning hole 230, thereby achieving the effect of direction limitation. In this embodiment, the positioning holes 230 are symmetrically arranged on both opposite sides. However, in different embodiments, the positioning holes 230 can have different numbers of arrangements on both opposite sides of the probe card 200. For example, one side of the probe card 200 has one positioning hole 230, and the other side has two positioning holes 230. The non-symmetric arrangement method can achieve a better effect of direction limitation. Also, the second handle 220 on the probe card 200 can also be used as a technical means for positioning and direction limitation. In one embodiment, the second handles 220 on both opposite sides have different sizes or different shapes, so that the direction of the probe card 200 can be determined. In actual applications, the positioning holes 230 and the second handle 220 can be used in combination to achieve the positioning and direction limitation of the probe card 200, and the probe card 200 can be accurately arranged on the positioning ring 151.

[0031] The above description explains the interaction mechanism among the protective cover 170, the positioning ring 151, the probe card 200, and the jig 600.

[0032] Next, please refer to FIGS. 10 and 11. FIG. 10 is a perspective view of a protective case according to an embodiment of the present invention. FIG. 11 is an exploded view of a switch member. In this embodiment, the upper cover 130 of the protective case 100 is engaged with the case body 110, and the two are in contact with each other in an openable and closable manner. The protective case 100 includes a switch member 120, which is installed on the case body 110, and a tenon 140 is provided on the upper cover 130 corresponding to the position of the switch member 120. The switch member 120 is locked to the tenon 140 and is used to lock the upper cover 130 and the case body 110. The quantity and arrangement of the switch member 120 and the tenon 140 can be installed in plural according to requirements and are not limited here. The switch member 120 in this embodiment is a rotary elastic locking member, which rotates after being pressed by the first means, disengaging the switch member 120 from the lock with the tenon 140, thereby making the upper cover 130 removable. The first means is, for example, a robot arm, which can achieve the effect of automatic lid opening. The switch member 120 includes a base 121, a snap lock member 123, and a plurality of positioning locks 127. The base 121 is installed on the case body 110 and has a plurality of elastic structures 122, which are used to push the snap lock member 123. The snap lock member 123 is assembled to one side of the base 121 via the positioning lock 127 and can rotate relative to the base 121. The snap lock member 123 has a disk body 124, a lock hook 126, and a plurality of positioning grooves 125. The positioning grooves 125 are located in the disk body 124. The positioning locks 127 respectively penetrate through the positioning grooves 125 and can be fastened to the first end and the second end of the positioning grooves 125 respectively, thereby positioning the snap lock member 123 at the locked position and the unlocked position. The lock hook 126 protrudes from the side edge of the disk body 124 and is used to lock to the tenon 140 of the upper cover 130.

[0033] Please refer to FIGS. 11 and 12A through 12C. FIG. 12A is a schematic diagram showing that the snap lock member is in the locked position. FIG. 12B is a schematic diagram when the snap lock member is pressed. FIG. 12C is a schematic diagram showing that the snap lock member is in the unlocked position. As shown in FIG. 12A, the snap lock member 123 is in the locked position, and the elastic structure 122 of the base 121 presses the disk body 124 of the snap lock member 123, whereby the lock hook 126 is locked to the groove 140. Next, as shown in FIG. 12B, a force is applied in the direction of the case body 110 by the first means to press the snap lock member 123 (for example, a force can be applied to the snap lock member 123 using an automated device). At this time, the elastic structure 122 is compressed, and the lock hook 126 separates from the groove 140. Further, as shown in FIG. 12C, the snap lock member 123 is rotated, and the positioning groove 125 on the disk body 124 is rotated until the second end of the positioning groove 125 is fastened to the positioning lock 127. At this time, the snap lock member 123 is in the unlocked position, the lock hook 126 is completely disengaged from the groove 140, and the upper cover 130 can be removed using an automated device (such as a suction device).

[0034] On the other hand, when returning the upper cover 130, first, the upper cover 130 can be arranged on the case body 110 using an automated device. And when the snap lock member 123 is in the unlocked position (shown in FIG. 12C), a force is applied in the direction of the case body 110 to press the snap lock member 123, and at this time, the elastic structure 122 is compressed. Subsequently, the snap lock member 123 is rotated in the reverse direction, the positioning groove 125 in the disk body 124 is rotated, and the rotation continues until the first end of the positioning groove 125 is reconnected to the positioning lock 127. At this time, the snap lock member 123 is in the locked position. When the force pressing the snap lock member 123 is stopped, through the elastic reset of the elastic structure 122, the lock hook 126 is locked to the groove 140 again.

[0035] Based on the operating mechanism of the switch member 120, the effect of automating locking and unlocking can be achieved.

[0036] Please refer to FIGS. 13 and 14A to 14B. FIG. 13 is a perspective view of a protective case according to another embodiment of the present invention. FIG. 14A is a schematic view when the switch member is locked in the tenon. FIG. 14B is a schematic view when the switch member is pressed. The difference between the protective case 800 of this embodiment and the previous embodiment lies in the form of the switch member 820. The switch member 820 of this embodiment is a pressing type elastic locking member. After being pressed by the second means, the switch member 820 releases the lock with the tenon 840, thereby making the upper cover 830 removable. The second means is, for example, manual gripping, and the upper cover 830 can be easily opened and closed. The switch member 820 has a locking hook 826 and is used to lock to the tenon 840 of the upper cover 830. When trying to release the lock, simply manually press the switch member 820 to disengage the locking hook 826 from the tenon 840, and the upper cover 830 can be removed. On the other hand, when the upper cover 830 is returned, the locking hook 826 is automatically locked to the tenon 840.

[0037] Based on the operating mechanism of the switch member 820, the effects of quick locking and unlocking can be achieved, and it has the advantage of simplifying the unlocking step.

[0038] As described above, for the positioning ring and the protective case of the probe card according to the embodiment of the present invention, when the protective cover and the probe card connected thereto are both arranged on the positioning ring, the inclined groove of the positioning ring actuates the snap member to further release the locked state with one of the probe cards, thereby making the probe card and the protective cover separable. The positioning ring can release the locking between the protective cover and the probe card, achieving the effect of quickly and easily removing the probe card. When removing the probe card from the positioning ring in different ways (such as a mechanical arm or a manual method), the protective cover can be detached from the probe card or re-locked to the probe card. On the one hand, it can avoid the problem of damage caused by contact when manually inserting and removing the probe card, and on the other hand, it is advantageous for the automation of the process. Furthermore, the positioning ring is removably installed in the protective case, and the positioning ring can be quickly replaced to correspond to different types of probe cards, improving the flexibility in application. In addition, a switch member and a tenon are installed on the protective case, achieving the effect of automating locking and unlocking.

[0039] The present invention has been disclosed as above with multiple embodiments, but it does not limit the present invention. Those with ordinary knowledge in the technical field to which it belongs can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention is based on that defined in the appended claims.

Explanation of Reference Numerals

[0040] 100 Protective case 101 Accommodating space 110 Case body 111 Inner wall 112 Arrangement groove 113 Button locking member 120 Switch member 121 Base 122 Elastic structure 123 Snap locking member 124 Disk body 125 Positioning groove 126 Lock hook 127 Positioning lock 130 Upper cover 140 Tenon 151 Positioning ring 153 Positioning structure 155 Inclined groove 156 Guide inclined plane 157 Quick release material 158 Contact material 159 Shoulder 170 Protection cover 171 Cover body 172 Side wall 173 First handle 175 Snap material 176 Snap hook part 177 Actuating shaft 178 Inclined handle part 179 Elastic bending part 200 Probe card 201 Side surface 210 Probe 220 Second handle 221 Upper surface 222 Inner wall 230 Positioning hole 410 First means 420 Second means 500 Workbench 600 Fixture 610 Body 611 Inclined plane 620 Engagement pin 800 Protection case 820 Switch material 826 Lock hook 830 Upper cover 840 Tenon H Horizontal plane A1 First included angle A2 Second included angle

Claims

1. A protective case for a probe card, including a positioning ring and a case body, wherein the positioning ring is used for placing and positioning the probe card, the positioning ring has a plurality of quick-release members, each of the quick-release members includes at least one abutting member, the abutting member has an elastic margin for elastic compression and release, so that each of the quick-release members is a structure engaged by an elastic member, and, the case body is provided with a plurality of arrangement grooves, which are arranged corresponding to the plurality of quick-release members and are used for fitting and abutting against the plurality of quick-release members, the case body has an inner wall, and the abutting member abuts against the inner wall, here, the plurality of quick-release members are used for removably abutting against the plurality of arrangement grooves and removably engaging the positioning ring in the case body when the abutting member abuts against the inner wall. The protective case is characterized by this.

2. Among them, each of the quick-release members further includes a pair of shoulders, the pair of shoulders are connected to both sides of the abutting member, the case body is further provided with a plurality of button locking members (pressing locking members), which are located in the plurality of arrangement grooves, and each of the button locking members is fitted to the pair of shoulders, thereby fixing the positioning ring. The protective case according to Claim 1 is characterized by this.

3. Among them, when the abutting member receives a force and is separated from the inner wall by a certain distance, the pair of shoulders are disengaged from the button locking members, making the positioning ring removable. The protective case according to Claim 2 is characterized by this.

4. A positioning ring for a probe card, which is used for placing and positioning the probe card and is removably installed in a protective case, a plurality of inclined grooves are installed on the positioning ring, a protective cover is connected to the probe card, and the protective cover includes a plurality of snap members for locking to the probe card. Among them, the positioning ring has a plurality of quick-release materials, each of the quick-release materials includes at least one abutting material, and the abutting material has an elastic margin for elastic compression and release, so that each of the quick-release materials is a structure engaged by an elastic member. The protective case has a case body, the case body has an inner wall, a plurality of placement grooves are provided in the case body, the abutting material abuts against the inner wall, and the plurality of quick-release materials are removably abutted in the plurality of placement grooves by the abutting material abutting against the inner wall, and are used for removably engaging the positioning ring in the case body. Among them, when the protective cover and the probe card connected thereto are both arranged on the positioning ring, the inclined groove actuates the plurality of snap materials to release the locking state of the probe card, and makes the probe card and the protective cover separable. Among them, when taking out the probe card arranged on the positioning ring by using the first means, the probe card is separated from the protective cover, whereby the protective cover remains on the positioning ring. Among them, when taking out the protective cover and the probe card arranged on the positioning ring by using the second means, the plurality of snap materials are disengaged from the plurality of inclined grooves and the locking state of the probe card is restored. The positioning ring is characterized by the above.

5. After taking out the protective cover and the probe card by using the second means, the protective cover is further connected to a jig, and thereby is used for separating the probe card and the protective cover. Among them, the jig has a main body, both sides of the main body are inclined surfaces respectively, and the plurality of snap materials are actuated to further disengage from the locking state with the probe card. The positioning ring according to claim 4 is characterized by the above.

6. Among them, the protective cover includes a cover body, a side wall and a first handle installed on the side wall. The first handle corresponds to a second handle of the probe card, and the second means takes out the protective cover and the probe card simultaneously via the second handle and the first handle. The positioning ring according to claim 4 is characterized by the above.

7. Among them, each of the snap members has an inclined handle portion, each of the inclined grooves is used to interact with the inclined handle portion, each of the inclined grooves has a guide slope, and has a first included angle between the guide slope and the horizontal plane, and each of the inclined handle portions has a second included angle smaller than the first included angle between the inclined handle portion and the horizontal plane. The positioning ring according to claim 4, characterized in that.

8. A protective case for a probe card, including a positioning ring, a case body, an upper lid, and a switch member. The positioning ring is used to place and position the probe card. The positioning ring has a plurality of quick release members, each of the quick release members includes at least one abutting member, and the abutting member has an elastic margin for elastic compression and release. Therefore, each of the quick release members is a structure engaged by an elastic member. The case body is provided with a plurality of arrangement grooves, which are arranged corresponding to the plurality of quick release members and are used to fit and abut against the plurality of quick release members. The case body has an inner wall, and the abutting member abuts against the inner wall. Here, the plurality of quick release members are detachably abutted against the plurality of arrangement grooves by the abutting member abutting against the inner wall, and are used to detachably engage the positioning ring into the case body. The upper lid is used to fit with the case body to define an accommodation space for accommodating the positioning ring and the probe card, and The switch member is installed on the case body and a tenon is provided on the upper lid, corresponding to the position of the switch member. Here, the switch member is locked to the tenon, thereby being used to lock the upper lid and the case body. A protective case, characterized in that.

9. Among them, the switch member is a rotary elastic locking member, which rotates after being pressed by the first means to disengage the switch member from the lock with the tenon, thereby making the upper lid in a removable state. The protective case according to claim 8, characterized in that.

10. Among them, the switch member is a pressing-type elastic locking member, which after being pressed by the second means, disengages the switch member from the lock with the tenon, thereby making the upper lid in a removable state. The protective case according to claim 8, characterized in that.

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