Tape Application System

Abstract

To provide a tape sticking system capable of automatically switching and replacing a dicing tape.SOLUTION: A tape sticking system 1 includes a stocker 5 for storing a plurality of tape magazines 4 each storing a dicing tape DT wound in a roll, a sticking device 3 which includes movable guide rollers 32a and 32b, fixed guide rollers 33a and 33b, and a knife plate 35 for regulating a drawing area R of the dicing tape DT to a predetermined locus, in which the tape magazine 4 is exchangeable, and which sticks the dicing tape DT to a dicing frame DF and a workpiece W, and a first transfer robot 6 for transferring the tape magazines 4 between the stocker 5 and the sticking device 3.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a tape application system for dicing tape. [Background technology]

[0002] In the field of semiconductor manufacturing, there is a process in which semiconductor substrates such as silicon wafers (hereinafter referred to as "work") are cut into chips. In this process, dicing tape attached to the work restrains the position of each chip, allowing the chips to be cut efficiently.

[0003] Patent Document 1 describes that an expanding tape E is attached to a wafer W fixed by suction to a table 211 by the pressure of an attachment roller. The reference numerals are those of Patent Document 1. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-4584 Summary of the Invention [Problem to be solved by the invention]

[0005] However, with the device described in Patent Document 1, when switching tapes depending on the type of wafer W or when replacing tapes as they wear out, it was necessary to remove the used expanding tape E that was wound around the various rollers and set to follow a predetermined track, and then manually set a new expanding tape E again so that it follows the predetermined track.

[0006] Therefore, a technical problem arises that must be solved in order to automatically switch or replace the dicing tape, and an object of the present invention is to solve this problem. [Means for solving the problem]

[0007] In order to achieve the above-mentioned object, the tape splicing device of the present invention is a tape application system that includes a stocker that stores multiple tape magazines, each containing dicing tape with a portion of the dicing tape wound in a roll pulled out, a regulating section that regulates the pull-out area from which the portion of the dicing tape is pulled out to a predetermined trajectory, the tape magazines are replaceable, and the dicing tape is applied to a dicing frame and a workpiece, and a transfer device that transfers the tape magazine between the stocker and the application device.

[0008] According to this configuration, the dicing tape is stored in the tape magazine with a portion of it pulled out, and when the tape magazine is handed over to the application device by the delivery device and converted into the application device, the regulating unit regulates the pull-out area of the dicing tape to a predetermined trajectory, thereby enabling the dicing tape to be automatically switched or replaced. [Effects of the Invention]

[0009] The present invention allows automatic switching and replacement of dicing tapes. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a perspective view showing the configuration of a tape application system according to an embodiment of the present invention; [Figure 2] FIG. 1 is a schematic diagram showing the configuration of a tape application system. [Figure 3] FIG. 2 is a perspective view showing the configuration of the attachment device. [Figure 4] FIG. 2 is a perspective view showing the configuration of a tape magazine. [Figure 5] FIG. 1 is a block diagram showing the main configuration of a tape application system. [Figure 6] Schematic diagram showing the procedure for automatically setting dicing tape. [Figure 7] Schematic diagram showing the procedure for attaching dicing tape to a workpiece and a dicing frame. DETAILED DESCRIPTION OF THE INVENTION

[0011] An embodiment of the present invention will be described with reference to the drawings. Note that, hereinafter, when referring to the number, numerical value, amount, range, etc. of components, unless otherwise specified or when it is clearly limited to a specific number in principle, the number is not limited to the specific number, and may be more or less than the specific number.

[0012] Furthermore, when referring to the shape or positional relationship of components, etc., it includes things that are substantially similar or approximate to those shapes, etc., unless otherwise specified or when it is clearly considered otherwise in principle.

[0013] In addition, the drawings may exaggerate characteristic parts to make the features easier to understand, and the dimensional ratios of the components may not be the same as in reality.

[0014] 1 and 2, the tape application system 1 applies a dicing tape DT to a workpiece W and a dicing frame DF. The workpiece W is, for example, a semiconductor substrate such as a silicon wafer, but is not limited to this. The dicing tape DT is, for example, an ultraviolet curing tape.

[0015] The tape application system 1 includes a transport device 2 and an application device 3.

[0016] The transfer device 2 includes an inner circumference side table 21 that holds the workpiece W, and an outer circumference side table 22 on which the dicing frame DF is placed.

[0017] An adsorbent (not shown) made of a porous material having numerous pores is embedded in the surface of the inner peripheral table 21. The roughness of the pores in the adsorbent is, for example, #400 or #800.

[0018] The inner circumference side table 21 is switchably connected to a vacuum source and a compressed air source (not shown). When the vacuum source is activated, negative pressure is supplied between the workpiece W placed on the inner circumference side table 21 and the upper surface (adsorption surface) of the adsorption body, and the workpiece W is adsorbed and held on the adsorption surface. When the compressed air source is activated, compressed air (release air) is supplied between the workpiece W and the adsorption surface, and the adsorption between the workpiece W and the adsorption surface is released.

[0019] The inner circumference side table 21 and the outer circumference side table 22 are placed on sliders 23 and configured to be slidable in the conveying direction D1.

[0020] As shown in Figure 3, the application device 3 comprises a base 31 on which the tape magazine 4 is installed so that it can be freely replaced, movable guide rollers 32a, 32b that stand upright from the side of the base 31 and regulate the trajectory of the dicing tape DT, fixed guide rollers 33a, 33b that stand upright from the side of the base 31 and regulate the trajectory of the dicing tape DT, a pressure roller 34 that moves up and down to apply the tape body B to the workpiece W, and a knife plate 35 that regulates the trajectory of the separator S.

[0021] As shown in FIG. 4, the tape magazine 4 is a modularized device that stores the dicing tape DT wound in a roll with a portion of the dicing tape DT pulled out, and can be transported by a first transport robot 6 and a second transport robot 7, which will be described later. The dicing tapes DT stored in each tape magazine 4 may be the same type or different types. In the following, the range where a portion of the dicing tape DT is pulled out will be referred to as the "pulled-out region R."

[0022] The tape magazine 4 includes a payout shaft 41 that supports the roll-shaped dicing tape DT so that it can be paid out, a winding shaft 42 that winds up the separator S of the dicing tape DT and imparts a payout force to the dicing tape DT, and fixed guide rollers 43a to 43b that apply tension to the dicing tape DT and regulate the trajectory of the dicing tape DT so as to pull out a portion of the dicing tape DT.

[0023] The payout spindle 41 is provided with a rotation speed sensor that calculates the remaining amount of dicing tape DT from the rotation speed of the payout spindle 41, or a metal detection sensor that detects the payout spindle 41 when the dicing tape DT becomes low, making it possible to detect when the remaining amount of dicing tape DT is low.

[0024] The payout spindle 41 and the take-up spindle 42 are erected from the side of a base 44, and both ends of the fixed guide rollers 43a and 43b are supported by the base 44 and a support plate 45. In addition, an adsorbed portion 46 that can be adsorbed by a first transport robot 6 and a second transport robot 7, which will be described later, is provided at the upper end of the base 44. The base 44 and the base portion 31 are configured to be detachable from each other by a locking mechanism or the like (not shown).

[0025] Furthermore, a cutout portion 47 is provided in a part of the base 44, specifically, between the fixed guide roller 43a and the supply spindle 41 and the take-up spindle 42 when viewed from the side. The cutout portion 47 is set to a size that can accommodate the movable guide rollers 32a and 32b, the fixed guide rollers 33a and 33b, and the knife plate 35.

[0026] 2, the tape application system 1 includes a stocker 5 that stores a plurality of tape magazines 4, and a first transport robot 6 that serves as a transfer device that delivers the tape magazines 4 between the application device 3 and the stocker 5. The first transport robot 6 includes an adsorption section 61 that is capable of adsorbing and holding the adsorbed section 46 of the tape magazine 4. In the following description, when distinguishing between the tape magazine 4 attached to the application device 3 and the tape magazine 4 stored in the stocker 5, the former will be given the symbol 4A and the latter will be given the symbol 4B.

[0027] 1 and 2 show a configuration in which a stocker 5 loads multiple tape magazines 4B on pallets 51 shown in FIG. 5, the pallets 51 are configured to be freely movable within the stocker 5, and a first transport robot 6 holds the tape magazines 4B that have been transported to a predetermined removal position 52 in the stocker 5 and transports them to the application device 3.

[0028] The tape application system 1 also includes a second transport robot 7 as a replacement device. The second transport robot 7 includes a suction section 71 that is capable of suction-holding the suction target section 46 of the tape magazine 4B in the stocker 5 and the external tape magazine 4. In the following description, when distinguishing the external tape magazine 4 from the tape magazine 4B stored in the stocker 5, the external tape magazine will be designated by the symbol 4C.

[0029] Figure 2 shows a configuration in which a stocker 5 carries multiple tape magazines 4B on a pallet 51 that is configured to be freely movable within the stocker 5, and a second transport robot 7 holds and ejects the tape magazine 4B that has been transported to a predetermined replacement position 53 in the stocker 5, and then transports an external tape magazine 4C to the replacement position 53.

[0030] The external tape magazine 4C may be any type of tape, such as one stored in an external rack or the like, or one transported as needed by a transport device or the like. Furthermore, the tape magazine 4B containing the dicing tape DT that is used frequently is stored in the stocker 5, and the tape magazine 4C containing the dicing tape DT that is used less frequently is stored in the external rack or the like, thereby reducing the frequency of tape replacement. Furthermore, the external tape magazine 4C may be shared by multiple tape application systems 1.

[0031] The operation of the tape application system 1 is controlled via a controller 8 serving as a control device. The controller 8 controls each of the components that make up the tape application system 1. The controller 8 is, for example, a computer, and is composed of a CPU, memory, etc. The functions of the controller 8 may be realized by control using software, or may be realized by something that operates using hardware.

[0032] The controller 8 includes an input device 81 and a storage device 82 .

[0033] The input device 81 is a device for inputting processing conditions for the workpiece W and calling up the desired dicing tape DT, and is, for example, a touch panel.

[0034] The storage device 82 stores the processing conditions for a plurality of workpieces W and the type information of the dicing tape DT corresponding to each processing condition in association with each other. The storage device 82 also stores, for each tape magazine 4, type information of the dicing tape DT contained in the tape magazine 4, as well as position information of the tape magazine 4B within the stocker 5 (such as a number that can identify each individual pallet 51), and position information of an external tape magazine 4C stored in an external rack or the like. The position information of the tape magazine 4 is updated every time the tape magazine 4 is replaced or exchanged.

[0035] Next, the operation of the tape application system 1 will be described with reference to the drawings.

[0036] <Work transport> First, the dicing frame DF is transferred onto the outer peripheral table 22 by a transfer hand or the like (not shown).

[0037] Next, the workpiece W is transferred onto the inner circumference side table 21 by a transfer hand or the like (not shown). After that, when negative pressure is supplied from a compressed air source between the workpiece W and the suction surface, the workpiece W is sucked onto the inner circumference side table 21. The upper surface of the workpiece W and the upper surface of the dicing frame DF are set to be approximately flush with each other.

[0038] <Tape magazine installation> The tape magazine 4A is loaded into the joining device 3 before, after, or in parallel with the workpiece transport.

[0039] Specifically, first, based on the processing conditions of the workpiece W inputted via the input device 81 by an operator or the like, the controller 8 calls up type information of the dicing tape DT suitable for the processing conditions of the workpiece W from the storage device 82.

[0040] Next, the controller 8 determines whether or not the dicing tape DT needs to be switched based on whether or not the type information of the dicing tape DT that is suitable for the processing conditions of the called workpiece W matches the type information of the dicing tape DT in the tape magazine 4A attached to the base 31. The controller 8 also determines whether or not the dicing tape DT needs to be replaced based on the remaining amount of dicing tape DT in the tape magazine 4A.

[0041] Next, if the controller 8 determines that the dicing tape DT needs to be switched or replaced, the controller 8 retrieves the position information within the stocker 5 for the tape magazine 4B containing this dicing tape DT from the memory device 82, and controls the operation of the pallet 51 containing the retrieved tape magazine 4B to move to the removal position 52.

[0042] The first transport robot 6 bends and stretches its arm to the vicinity of the tape magazine 4B that has been transported to the removal position 52, and the suction portion 61 sucks and holds the sucked portion .

[0043] Thereafter, the first transport robot 6 bends and extends the tape magazine 4B to the vicinity of the base 31, and the base 44 is attached to the base 31. At this time, as shown in FIG. 6(a), the movable guide rollers 32a and 32b, the fixed guide rollers 33a and 33b, and the knife plate 35 are disposed in the cutout portion 47. The movable guide roller 32a and the fixed guide roller 33a are disposed on opposite sides of the dicing tape DT, and the movable guide roller 32b and the fixed guide roller 33b are disposed on opposite sides of the dicing tape DT.

[0044] Next, as shown in Figure 6(b), the movable guide roller 32a moves closer to the fixed guide roller 33a to unwind the dicing tape DT upward, and the movable guide roller 32a and the fixed guide roller 33a clamp the dicing tape DT to regulate the trajectory of the dicing tape DT within the pull-out area R.

[0045] Similarly, as shown in Figure 6(c), the movable guide roller 32b moves closer to the fixed guide roller 33b to unwind the dicing tape DT downward, and the movable guide roller 32b and the fixed guide roller 33b clamp the dicing tape DT to regulate the pulling trajectory of the dicing tape DT within the pulling area R.

[0046] Then, as shown in FIG. 6(d), the knife plate 35 moves closer to the pressure roller 34, unwinding the dicing tape DT downward and regulating the trajectory of the dicing tape DT within the pull-out region R so that it reaches the vicinity of the pressure roller 34.

[0047] Thereafter, the suction between the suction portion 61 and the suction receiving portion 46 is released, and the first transport robot 6 delivers the tape magazine 4B to the joining device 3.

[0048] In addition, when removing the tape magazine 4A attached to the base 31 prior to attaching the tape magazine 4B, first, the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b and the knife plate 35 are moved away from the dicing tape DT, and the trajectory of the dicing tape DT is brought into a state where it is regulated by the payout shaft 41, the take-up shaft 42 and the fixed guide roller 43a.

[0049] Next, the first transport robot 6 bends and stretches its arm to the vicinity of the tape magazine 4A attached to the joining device 3, and the adsorbing part 61 adsorbs and holds the adsorbed part 46. Thereafter, the base 44 is detached from the base part 31.

[0050] Thereafter, the first transport robot 6 bends and stretches the tape magazine 4A to the vicinity of the take-out position 52 of the stocker 5, places the tape magazine 4A on the pallet 51, and delivers the tape magazine 4A to the stocker 5.

[0051] The stocker 5 and the first transport robot 6 may be configured in any way as long as they cooperate to supply the tape magazine 4B containing the dicing tape DT selected according to the type of work W, etc., to the application device 3.

[0052] For example, a plurality of tape magazines 4B may be placed at predetermined positions within the stocker 5, and the first transport robot 6 may bend and extend its arm to the vicinity of the desired tape magazine 4B within the stocker 5, hold the tape magazine 4B, and transport it to the application device 3.

[0053] In such a configuration, first, the controller 8 retrieves from the memory device 82 the position information in the stocker 5 for the tape magazine 4B containing the type of dicing tape DT suitable for the processing conditions of the workpiece W, and sends the position information of this tape magazine 4B to the first transport robot 6. The first transport robot 6 then bends and extends its arm to the vicinity of the tape magazine 4B in the stocker 5, and the suction portion 61 suctions and holds the suction target portion 46.

[0054] Thereafter, the first transport robot 6 bends and stretches the tape magazine 4 to the vicinity of the base 31 , and the base 44 is attached to the base 31 .

[0055] If the stocker 5 does not contain a type of dicing tape DT suitable for the processing conditions of the workpiece W, an external tape magazine 4C is brought into the stocker 5 and then attached to the application device 3.

[0056] Specifically, the controller 8 retrieves the position information of the external tape magazine 4C containing the type of dicing tape DT suitable for the processing conditions of the workpiece W from the memory device 82 and sends it to the second transport robot 7, and the second transport robot 7 then suction-holds this external tape magazine 4C and hands it over to the pallet 51 located at the replacement position 53 of the stocker 5.

[0057] Thereafter, the controller 8 controls the operation of the stocker 5 to move the pallet 51 storing the loaded tape magazine 4C to the removal position 52. Then, the first transport robot 6 bends and extends its arm to the vicinity of the tape magazine 4C that has been transported to the removal position 52, and the adsorbing portion 61 adsorbs and holds the adsorbed portion 46.

[0058] Thereafter, the first transport robot 6 bends and stretches the tape magazine 4C to the vicinity of the base 31, and the base 44 is attached to the base 31.

[0059] The stocker 5 and the second transport robot 7 may have any configuration as long as they can cooperate to switch the tape magazine 4B inside the stocker 5 with the external tape magazine 4C.

[0060] For example, the stocker 5 may have multiple tape magazines 4C each placed at a predetermined position, and the second transport robot 7 may move within the stocker 5 to the position of the tape magazine 4B, hold the tape magazine 4B, eject it from the stocker 5, and then transport the external tape magazine 4C into the stocker 5.

[0061] In such a configuration, when an external tape magazine 4C is to be loaded into the stocker 5, the controller 8 first retrieves the position information of the external tape magazine 4C, which contains a type of dicing tape DT suitable for the processing conditions of the workpiece W, from the memory device 82 and sends it to the second transport robot 7.The second transport robot 7 then suction-holds the external tape magazine 4C and loads it into the specified position within the stocker 5.

[0062] Thereafter, the controller 8 sends the position information of the tape magazine 4B brought in from outside to the first transport robot 6 in the stocker 5, and the first transport robot 6 bends and extends its arm to the vicinity of the tape magazine 4B brought in from outside, and the suction portion 61 suctions and holds the suction target portion 46.

[0063] Thereafter, the first transport robot 6 bends and stretches the tape magazine 4B that has been carried in from the outside to the vicinity of the base 31, and the base 44 is attached to the base 31.

[0064] <Tape application> Next, the slider 23 is driven to move the inner circumference side table 21 and the outer circumference side table 22 so that one end (attachment start position) of the tape main body B is positioned below the pressure roller 34, as shown in FIG. 7(a).

[0065] Next, the take-up shaft 42 rotates to unwind the dicing tape DT, and the pressure roller 34 presses the tape body B against the dicing frame DF with a predetermined pressure to adhere the tape body B to the dicing frame DF.

[0066] Thereafter, when the inner circumference side table 21 and the outer circumference side table 22 move along the transport direction D1, the tape body B is gradually adhered to the dicing frame DF and the workpiece W, as shown in FIG. 7(b).

[0067] 7(c), when the tape body B reaches the other end of the dicing frame DF (the attachment end position), the workpiece W and the dicing frame DF are attached together via the tape body B.

[0068] In this way, the tape application system 1 of this embodiment is configured to include: a stocker 5 that stores multiple tape magazines 4, each of which contains dicing tape DT with a portion of the dicing tape DT wound in a roll pulled out; an application device 3 that is equipped with movable guide rollers 32a, 32b, fixed guide rollers 33a, 33b, and a knife plate 35 that regulate the pull-out area R from which a portion of the dicing tape DT is pulled out to a predetermined trajectory, and in which the tape magazines 4 are replaceable and that applies the dicing tape DT to the dicing frame DF and the workpiece W; and a first transport robot 6 that transfers the tape magazines 4 between the stocker 5 and the application device 3.

[0069] According to this configuration, the dicing tape DT is stored in the tape magazine 4 with a portion of it pulled out, the tape magazine 4 is handed over to the application device 3 by the first transport robot 6 and replaced with the application device 3, and the movable guide rollers 32a, 32b, fixed guide rollers 33a, 33b and knife plate 35 regulate the pull-out area R of the dicing tape DT to a predetermined trajectory, thereby enabling the dicing tape DT to be automatically switched or replaced.

[0070] In addition, the tape application system 1 of this embodiment is further configured to include a memory device 82 that stores type information of the dicing tape DT corresponding to the processing conditions of the workpiece W, and stores, for each tape magazine 4, type information of the dicing tape DT contained therein and position information of the tape magazine 4 within the stocker 5, and a controller 8 that controls the pallet 51 of the stocker 5 so as to transfer the tape magazine 4 containing the type of dicing tape DT corresponding to the input processing conditions of the workpiece W from the stocker 5 to the application device 3.

[0071] According to this configuration, the tape magazine 4B that stores the appropriate dicing tape DT according to the input processing conditions of the workpiece W can be delivered to the joining device 3.

[0072] Moreover, the tape application system 1 according to this embodiment is configured to further include a second transport robot 7 that switches the tape magazine 4B stored in the stocker 5 with an external tape magazine 4C.

[0073] According to this configuration, the capacity of the tape magazine 4 stored in the stocker 5 can be substantially expanded, making it possible to accommodate a variety of types of dicing tape DT. Furthermore, since the external tape magazine 4C can be shared by multiple tape application systems 1, the dicing tape DT can be used effectively.

[0074] Furthermore, the present invention can be modified in various ways other than those described above without departing from the spirit of the present invention, and it goes without saying that the present invention also covers such modifications.

[0075] In the above-described embodiment, the movable guide rollers 32a, 32b, the fixed guide rollers 33a, 33b, and the knife plate 35 are used as examples of regulating parts that regulate the trajectory of the dicing tape DT in the pull-out region R, but the number and types of regulating parts are not limited to these. [Explanation of symbols]

[0076] 1:Tape application system 2:Transportation device 21: Inner table 22: Outer table 23: Slider 3: Application device 31: Base 32a, 32b: Movable guide roller (regulating portion) 33a, 33b: fixed guide roller (regulating portion) 34: Pressure roller 35: Knife plate (regulating part) 4, 4A, 4B, 4C: Tape magazine 41: Feeding shaft 42: Winding shaft 43a, 43b: fixed guide rollers 44: Bass 45: Support plate 46: Adsorbed part 47: Notch 5: Stocker 51: Palette 6: First transport robot (transfer device) 61: Adsorption part 7: Second transport robot (replacement device) 71: Adsorption part 8: Controller (control device) 81: Input device 82: Storage device B: Tape body D1: Transport direction DF: Dicing frame DT: Dicing tape R: Drawer area S: Separator W: Work

Claims

1. 1. A tape application system comprising: a stocker that stores a plurality of tape magazines that each store a roll of dicing tape with a portion of the dicing tape pulled out; an application device including a pair of regulating portions that regulate a pull-out area, where a portion of the dicing tape is folded back and pulled out in a U-shape, to a predetermined trajectory, the tape magazine being replaceable, and that applies the dicing tape to a dicing frame and a workpiece; a delivery device for delivering the tape magazine between the stocker and the joining device; Equipped with A tape application system characterized in that the pair of regulating parts move away from each other from a standby position located inside the standby orbit of the dicing tape in the pull-out area to a regulating position located outside the standby orbit, thereby transitioning the orbit of the dicing tape in the pull-out area from the standby orbit to an application orbit that extends outward from the standby orbit.

2. a storage device that stores type information of the dicing tape corresponding to the processing conditions of the workpiece, and stores, for each tape magazine, type information of the dicing tape stored therein and position information of the tape magazine within the stocker; a control device that controls the stocker or the delivery device so as to deliver a tape magazine containing the dicing tape of a type corresponding to the input processing conditions of the workpiece from the stocker to the joining device; 2. The tape application system according to claim 1, further comprising:

3. 3. A tape application system according to claim 1, further comprising an exchange device for exchanging the tape magazine stored in said stocker with an external tape magazine.

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