Inspection method, manufacturing method and inspection system for disk drive suspension

Abstract

To provide an inspection method, a manufacturing method, and an inspection system for accurately inspecting a suspension containing an adhesive.SOLUTION: An inspection method for inspecting a suspension for a disk device including an electronic part having a first side surface and a second side surface arranged in a first direction, a first adhesive 71 provided along the first side surface, and a second adhesive 72 provided along the second surface includes the steps of: measuring a first height H1 on a first position P1 of the first adhesive; measuring a second height H2 on a second position P2 of the second adhesive; and determining whether at least one of the application positions in the first direction of the first adhesive and the second adhesive based on the first height and the second height and the application amount of the first adhesive and the second adhesive is appropriate.SELECTED DRAWING: Figure 10

Description

[Technical Field]

[0001] The present invention relates to an inspection method, a manufacturing method and an inspection system for a disk drive suspension used in a hard disk drive or the like. [Background technology]

[0002] Hard disk drives (HDDs) are used in information processing devices such as personal computers. Hard disk drives include a magnetic disk that rotates around a spindle and a carriage that rotates around a pivot shaft. The carriage has an actuator arm and rotates around the pivot shaft in the track width direction of the disk by a positioning motor such as a voice coil motor.

[0003] A disk drive suspension (hereinafter sometimes simply referred to as the suspension) is attached to the actuator arm. The suspension includes a load beam and a flexure placed on top of the load beam. A slider that constitutes a magnetic head is attached to a gimbal portion formed near the tip of the flexure. The slider is equipped with an element (transducer) for accessing the disk, such as reading or writing data.

[0004] To accommodate the increasing recording density of disks, it is necessary to be able to position the magnetic head with greater precision relative to the disk's recording surface. To achieve this, suspensions have been developed that include a positioning motor and an actuator element made of a piezoelectric material such as PZT (lead zirconate titanate). In this type of suspension, the tip of the suspension can be moved very quickly and by small amounts in the sway direction (across the track) by deforming the actuator element.

[0005] As an actuator element operates, particles may fall off from the side of the actuator element. One way to prevent this is to cover the side with adhesive. In this case, if the adhesive is misaligned from the designed application position or if the amount of adhesive applied is inappropriate, problems such as adversely affecting the operation of the actuator element may occur. To prevent such problems, it is necessary to inspect whether the adhesive application position and amount are appropriate. Note that this type of inspection is also required for adhesives used to bond various electronic components other than actuator elements.

[0006] For example, Patent Document 1 discloses an electronic component mounting system that, when mounting electronic components on a substrate coated with adhesive (coating agent), statistically processes the state of the coating agent (coating position, coating area, and coating thickness) to calculate the amount of change over time, and feedback controls the coating device to reduce this amount of change. However, Patent Document 1 does not disclose a specific inspection method for the coating position, etc., nor does it mention anything about inspecting whether the coating position or amount of coating is appropriate for individual products including substrates and electronic components. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Japanese Patent Application Publication No. 2018-93081 Summary of the Invention [Problem to be solved by the invention]

[0008] An object of the present invention is to provide an inspection method capable of inspecting a suspension containing an adhesive with high accuracy, a manufacturing method for the suspension, and an inspection system. [Means for solving the problem]

[0009] An inspection method according to one embodiment inspects a suspension for a disk drive, the suspension including an electronic component having a first side and a second side aligned in a first direction, a first adhesive provided along the first side, and a second adhesive provided along the second side, and includes the steps of measuring a first height of the first adhesive at a first position, measuring a second height of the second adhesive at a second position, and determining, based on the first height and the second height, whether the application positions of the first adhesive and the second adhesive in the first direction and / or the application amounts of the first adhesive and the second adhesive are appropriate.

[0010] A manufacturing method according to one embodiment manufactures a suspension for a disk drive including an electronic component having a first side and a second side aligned in a first direction, a first adhesive provided along the first side, and a second adhesive provided along the second side, and includes the steps of applying the first adhesive and the second adhesive, measuring a first height at a first position of the first adhesive, measuring a second height at a second position of the second adhesive, and determining, based on the first height and the second height, whether the application positions of the first adhesive and the second adhesive in the first direction and at least one of the application amounts of the first adhesive and the second adhesive are appropriate.

[0011] An inspection system according to one embodiment inspects a suspension for a disk drive, the suspension including an electronic component having a first side and a second side aligned in a first direction, a first adhesive provided along the first side, and a second adhesive provided along the second side, and includes a measuring device that measures a first height at a first position of the first adhesive and a second height at a second position of the second adhesive, and a control device that determines, based on the first height and the second height, whether the application positions of the first adhesive and the second adhesive in the first direction and at least one of the application amounts of the first adhesive and the second adhesive are appropriate. [Effects of the Invention]

[0012] According to the present invention, it is possible to provide an inspection method capable of inspecting a suspension containing an adhesive with high accuracy, a manufacturing method for the suspension, and an inspection system. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic perspective view showing an example of a disk device according to an embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view showing a part of a disk device according to an embodiment. [Figure 3] FIG. 3 is a schematic plan view of a suspension according to one embodiment. [Figure 4] FIG. 4 is a schematic plan view of the suspension as viewed from the opposite side to that of FIG. [Figure 5] FIG. 5 is an enlarged schematic plan view of an actuator mounting portion and an actuator element according to one embodiment. [Figure 6] FIG. 6 is a schematic cross-sectional view of the actuator mounting portion and the actuator element taken along line VI-VI in FIG. [Figure 7] FIG. 7 is a diagram showing a schematic configuration of a manufacturing system (inspection system) according to an embodiment. [Figure 8] FIG. 8 is a diagram illustrating an example of the structure of a nozzle included in a coating apparatus according to an embodiment. [Figure 9] FIG. 9 is a flowchart showing an example of a manufacturing method (inspection method) according to an embodiment. [Figure 10] FIG. 10 is a model diagram for explaining height measurement according to one embodiment. [Figure 11] FIG. 11 is a schematic plan view of adhesive that has been applied at a position that is shifted from the correct position. [Figure 12] FIG. 12 is another schematic plan view of the adhesive applied at a position that is shifted from the correct position. [Figure 13] FIG. 13 is a diagram for explaining an adhesive according to a modified example and a method for inspecting the adhesive. DETAILED DESCRIPTION OF THE INVENTION

[0014] An embodiment of the present invention will be described with reference to the drawings. In this embodiment, a DSA (Dual Stage Actuator) type suspension is shown as an example of a disk drive suspension, but the main configurations of the suspension inspection method, manufacturing method, and inspection system disclosed in this embodiment can also be applied to other types of suspensions that include adhesives.

[0015] 1 is a schematic perspective view showing an example of a disk drive (HDD) 1. This disk drive 1 has a case 2, multiple disks 4 that rotate around a spindle 3, a carriage 6 that can rotate around a pivot shaft 5, and a positioning motor 7 (voice coil motor) for driving the carriage 6. The case 2 is sealed with a lid (not shown).

[0016] 2 is a schematic cross-sectional view showing a part of the disk device 1. As shown in FIGS. 1 and 2, a carriage 6 is provided with a plurality of arms (carriage arms) 8. A suspension 10 is attached to the tip of each arm 8. A slider 11 constituting a magnetic head is provided at the tip of each suspension 10. When the disk 4 rotates at high speed, air flows in between the disk 4 and the slider 11, forming an air bearing.

[0017] 2, the suspension 10 includes a base plate 20. The base plate 20 is formed with a boss portion 20a that is inserted into a hole 8a formed in the arm 8.

[0018] When the carriage 6 is rotated by the positioning motor 7 , the suspension 10 moves in the radial direction of the disk 4 , and the slider 11 moves to the desired track on the disk 4 .

[0019] Fig. 3 is a schematic plan view of the suspension 10 according to this embodiment. Fig. 4 is a schematic plan view of the suspension 10 as viewed from the opposite side to that of Fig. 3. The suspension 10 includes the above-described base plate 20, a load beam 30, and a flexure 40 with wiring. In this embodiment, the base plate 20 is an example of a first plate, and the load beam 30 is an example of a second plate.

[0020] In the following description, a first direction X, a second direction Y, a third direction Z, and a sway direction S are defined as shown in FIG. 3. The first direction X, the second direction Y, and the third direction Z intersect with each other and are perpendicular to each other in this embodiment. The first direction X corresponds to the width direction of the suspension 10, the base plate 20, the load beam 30, the flexure 40, etc. The second direction Y corresponds to the length direction of the suspension 10, the base plate 20, the load beam 30, the flexure 40, etc. The third direction Z corresponds to the thickness direction of the suspension 10, the base plate 20, the load beam 30, the flexure 40, etc. The sway direction S is the direction in which the tip of the load beam 30 sways left and right in FIG. 3.

[0021] A pair of hinge portions 31L, 31R that can be elastically bent in the third direction Z are formed at the base (root portion) of the load beam 30. These hinge portions 31L, 31R are aligned in the first direction X with a gap between them.

[0022] 4, the flexure 40 is disposed along the load beam 30. Near the tip of the load beam 30, the flexure 40 has a tongue 41 that functions as a gimbal portion. A slider 11 that forms a magnetic head is attached to the tongue 41. A tail portion 42 of the flexure 40 extends rearward from the base plate 20.

[0023] An element 11a, such as an MR element, capable of converting magnetic signals to electric signals is provided at the end of the slider 11. The element 11a writes and reads data to and from the disk 4. The slider 11, load beam 30, and flexure 40 constitute a head gimbal assembly.

[0024] The flexure 40 includes a metal base 43 made of, for example, stainless steel, and a plurality of wires 44 formed on the metal base 43. The wires 44 are covered with an insulating layer such as polyimide. The metal base 43 is fixed to the load beam 30 by, for example, laser spot welding. Some of the plurality of wires 44 are connected to the slider 11.

[0025] The suspension 10 further includes a pair of actuator mounting portions 50L, 50R and a pair of actuator elements 60L, 60R. The actuator elements 60L, 60R are mounted on the actuator mounting portions 50L, 50R, respectively, with an electrically insulating adhesive 70 such as epoxy resin.

[0026] The actuator mounting portions 50L, 50R are located between the boss portion 20a provided on the base plate 20 and the hinge portions 31L, 31R, and are aligned in the first direction X. The actuator elements 60L, 60R have the function of moving the load beam 30 in the sway direction S.

[0027] 3, the base plate 20 has a notch 51 in each of the actuator mounting portions 50L, 50R. These notches 51 are recessed toward the center of the base plate 20 in the first direction X.

[0028] 4, the load beam 30 has openings 52 in each of the actuator mounting portions 50L and 50R. These openings 52 overlap with the notches 51 shown in FIG.

[0029] Actuator element 60L is disposed inside notch 51 of actuator mounting portion 50L so as to close opening 52. Actuator element 60R is disposed inside notch 51 of actuator mounting portion 50R so as to close opening 52.

[0030] 3, the surfaces of the actuator elements 60L and 60R are each covered with a first electrode 61. These first electrodes 61 are connected to the base plate 20 by a conductive material 53.

[0031] 4 is covered with a second electrode 62. These second electrodes 62 are connected to some of the plurality of wirings 44 by terminals 45 extending from the flexure 40.

[0032] 5 is an enlarged schematic plan view of the actuator mounting portion 50L and the actuator element 60L. The area enclosed by a dashed line and marked with dots in the figure corresponds to the adhesive 70.

[0033] 5, the notch 51 has a first inner wall 51a, a second inner wall 51b, and a third inner wall 51c. For example, the first inner wall 51a is parallel to the second direction Y, and the second inner wall 51b and the third inner wall 51c are parallel to the first direction X.

[0034] Furthermore, the actuator element 60L has a first side surface 60a, a second side surface 60b, a third side surface 60c, and a fourth side surface 60d. The first side surface 60a and the second side surface 60b are all parallel to the second direction Y and aligned in the first direction X. The third side surface 60c and the fourth side surface 60d are all parallel to the first direction X and aligned in the second direction Y. In this embodiment, the first side surface 60a and the second side surface 60b are both longer than the third side surface 60c and the fourth side surface 60d. The second side surface 60b faces the first inner wall 51a, the third side surface 60c faces the second inner wall 51b, and the fourth side surface 60d faces the third inner wall 51c.

[0035] In the example of FIG. 5, the adhesive 70 is formed in a ring shape surrounding the periphery of the actuator element 60L. Specifically, the adhesive 70 includes a first adhesive 71 provided along the first side surface 60a, a second adhesive 72 provided along the second side surface 60b, a third adhesive 73 provided along the third side surface 60c, and a fourth adhesive 74 provided along the fourth side surface 60d. The first adhesive 71 and the second adhesive 72 have an elongated shape in the second direction Y. The third adhesive 73 and the fourth adhesive 74 have an elongated shape in the first direction X. These adhesives 71, 72, 73, and 74 do not necessarily need to be connected to each other and may be separated at least in part.

[0036] Fig. 6 is a schematic cross-sectional view of the actuator mounting portion 50L and the actuator element 60L taken along line VI-VI in Fig. 5. In addition to the above-mentioned first electrode 61 and second electrode 62, the actuator element 60L includes a piezoelectric body 63 disposed between these electrodes 61, 62. The piezoelectric body 63 is made of, for example, PZT, and deforms in response to the voltage applied between the electrodes 61, 62.

[0037] The first adhesive 71 covers the first side surface 60a and is in contact with the upper surface of the load beam 30. A part of the first adhesive 71 protrudes above the actuator element 60L and covers the edge of the first electrode 61. Another part of the first adhesive 71 is interposed between the load beam 30 and the actuator element 60L and covers the edge of the second electrode 62.

[0038] The second adhesive 72 is filled between the second side surface 60b and the base plate 20 (first inner wall 51a) and is in contact with the upper surface of the load beam 30. A portion of the second adhesive 72 protrudes above the actuator element 60L and covers the edge of the first electrode 61 and the edge of the upper surface of the base plate 20. Another portion of the second adhesive 72 is interposed between the load beam 30 and the actuator element 60L and covers the edge of the second electrode 62.

[0039] The cross-sectional structure of the portion including the third adhesive 73 and the fourth adhesive 74 is the same as the cross-sectional structure of the portion including the second adhesive 72 shown in FIG. 6. That is, the third adhesive 73 is filled between the third side surface 60c and the base plate 20 (second inner wall 51b) and is in contact with the upper surface of the load beam 30. A portion of the third adhesive 73 protrudes above the actuator element 60L and covers the edge of the first electrode 61 and the edge of the upper surface of the base plate 20. Another portion of the third adhesive 73 is interposed between the load beam 30 and the actuator element 60L and covers the edge of the second electrode 62. The fourth adhesive 74 is filled between the fourth side surface 60d and the base plate 20 (third inner wall 51c) and is in contact with the upper surface of the load beam 30. A portion of the fourth adhesive 74 protrudes above the actuator element 60L and covers the edge of the first electrode 61 and the edge of the upper surface of the base plate 20. Another part of the fourth adhesive 74 is interposed between the load beam 30 and the actuator element 60L, and covers the edge of the second electrode 62.

[0040] Although the structures of the actuator mounting portion 50L and the actuator element 60L are shown in FIGS. 5 and 6, the actuator mounting portion 50R and the actuator element 60R also have the same structures.

[0041] In this manner, in the present embodiment, the side surfaces of the actuator elements 60L, 60R are covered with the adhesive 70. Therefore, even if particles are attached to the side surfaces of the actuator elements 60L, 60R, it is possible to prevent such particles from falling off.

[0042] Next, the manufacturing and inspection of the suspension 10 will be described. 7 is a diagram showing a schematic configuration of a manufacturing system 100 for the suspension 10. An inspection system 200 for the suspension 10 is configured by elements of the manufacturing system 100 that perform processes related to the inspection of the suspension 10.

[0043] The manufacturing system 100 includes a transfer device 110 , a coating device 120 , a measuring device 130 , a stage controller 140 , a discharge controller 150 , and a control device 160 .

[0044] The transport device 110 is driven by a stage controller 140, and transports the suspension 10 (workpiece) in the middle of manufacture placed on the stage toward the coating device 120 and the measuring device 130. The coating device 120 is driven by a discharge controller 150, and applies adhesive to the suspension 10 in a state where at least the actuator mounting portions 50L, 50R have been formed. The adhesive 70 described above is formed by hardening this adhesive.

[0045] Thereafter, actuator elements 60L, 60R are placed on the actuator mounting portions 50L, 50R, respectively, and the adhesive 70 is cured. The measuring device 130 measures the height of the adhesive 70 on the suspension 10 on which the adhesive 70 has cured. The measuring method of the measuring device 130 is not limited, but as an example, a white light confocal method can be applied. In the white light confocal method, white light emitted from a light source passes through a lens module and is focused at a different position for each color (wavelength). Then, the height of the surface is measured by detecting the reflected light of the color focused on the surface of the object to be measured.

[0046] The control device 160 controls various elements of the manufacturing system 100, such as the stage controller 140, the discharge controller 150, and the measuring device 130. The control device 160 includes a memory that stores computer programs and data for implementing operations related to the control and inspection of these elements, and a processor that executes these programs.

[0047] The applicator 120 includes a nozzle 121 that dispenses adhesive. In this embodiment, the nozzle 121 simultaneously applies adhesives 71, 72, 73, and 74 shown in FIG.

[0048] 8 is a diagram showing an example of the structure of such a nozzle 121. The illustrated nozzle 121 has a plurality of outlets 122. These outlets 122 are arranged in a frame shape similar to that of the adhesive 70. By using such a nozzle 121, adhesives 71, 72, 73, and 74 can be applied simultaneously.

[0049] For example, the adhesive 70 on the actuator mounting portions 50L, 50R is applied sequentially by one nozzle 121. As another example, the adhesive 70 may be applied by two nozzles 121 simultaneously.

[0050] The control device 160 inspects the suspension 10 based on the height of the adhesive 70 measured by the measuring device 130. A series of steps in the manufacturing method including such an inspection will be described below.

[0051] 9 is a flowchart showing an example of a manufacturing method (inspection method) for the suspension 10. Note that the focus here is mainly on the steps relating to application of adhesive 70 and inspection in the manufacturing of one suspension 10, and detailed descriptions of other steps will be omitted.

[0052] 9, first, a pre-process including assembling the base plate 20 and the load beam 30 is performed (step S1). After that, the transfer device 110 transfers the suspension 10 to a position directly facing the nozzle 121 of the coating device 120, and the coating device 120 applies the adhesive 70 (step S2).

[0053] Next, the transport device 110 transports the suspension 10 to a measurement position by the measuring device 130, and the height of the adhesive 70 is measured by the measuring device 130 (step S3). As will be described in detail later, in this embodiment, the height of the adhesive 70 is measured at a plurality of positions.

[0054] Next, based on the height measured in step S3, the control device 160 determines whether the application position and amount of adhesive 70 are appropriate (step S4).

[0055] If at least one of the application position and application amount is not appropriate, the control device 160 performs feedback to adjust the control parameters of the conveying device 110 and the application device 120 so that the application position and application amount of adhesive for the next suspension 10 to be manufactured are appropriate (step S5).

[0056] Thereafter, various processes necessary for completing the suspension 10 are performed (step S6). If at least one of the application position and the application amount is determined to be inappropriate in step S4, the suspension 10 may not be subjected to the subsequent processes.

[0057] Here, an example of the height measurement in step S3 will be described. FIG. 10 is a model diagram for explaining height measurement. (a) in the figure is a plan view of the adhesive 70, with the outline shapes of the first adhesive 71 and the second adhesive 72 indicated by solid lines and the outline shapes of the third adhesive 73 and the fourth adhesive 74 indicated by dashed lines. Furthermore, a first center line C1 passing through the center (first center) of the first adhesive 71 in the first direction X, a second center line C2 passing through the center (second center) of the second adhesive 72 in the first direction X, a third center line C3 passing through the center (third center) of the third adhesive 73 in the second direction Y, and a fourth center line C4 passing through the center (fourth center) of the fourth adhesive 74 in the second direction Y are each indicated by a dashed-dotted line. The center lines C1 and C2 are parallel to the second direction Y, and the center lines C3 and C4 are parallel to the first direction X. In FIG. 10, it is assumed that the adhesive 70 is applied at the appropriate position.

[0058] The first adhesive 71 has a first outer edge 71a that is farther from the second adhesive 72 in the first direction X than the first center line C1, and a first inner edge 71b that is closer to the second adhesive 72 in the first direction X than the first center line C1. The second adhesive 72 has a second outer edge 72a that is farther from the first adhesive 71 in the first direction X than the second center line C2, and a second inner edge 72b that is closer to the first adhesive 71 in the first direction X than the second center line C2.

[0059] In the above-mentioned step S3, the measuring device 130 measures the height of the adhesive 70 at least two locations, and preferably three or more locations. Hereinafter, it is assumed that the height is measured at three locations: a first position P1 of the first adhesive 71, a second position P2 of the second adhesive 72, and a third position P3 of the first adhesive 71, as shown in FIG. 10 . Furthermore, the distance between the first center line C1 and the second center line C2 is defined as D1, the distance between the first position P1 and the second position P2 in the first direction X as D2, the distance between the third center line C3 and the fourth center line C4 as D3, and the distance between the first position P1 and the third position P3 in the second direction Y as D4.

[0060] For example, the first position P1, the second position P2, and the third position P3 are set so as not to overlap with the center lines C1, C2, C3, and C4, respectively, when the application position of the adhesive 70 is appropriate as designed. Furthermore, the first position P1, the second position P2, and the third position P3 are set so that the distance D2 is different from the distance D1 and the distance D4 is different from the distance D3. For example, the first position P1 and the second position P2 are located on a straight line parallel to the first direction X, and the first position P1 and the third position P3 are located on a straight line parallel to the second direction Y.

[0061] 10, the first position P1 is located between the first center line C1 and the first outer edge 71a in the first direction X. The second position P2 is located between the second center line C2 and the second outer edge 72a in the first direction X. That is, the first position P1 and the second position P2 are set outside the area between the first center line C1 and the second center line C2. The first position P1 and the third position P3 are set outside the area between the third center line C3 and the fourth center line C4.

[0062] 10(b), 10(c), and 10(d) are schematic cross-sectional views of the adhesive 70, each including a first position P1, a second position P2, and a third position P3. Generally, the heights of the adhesives 71, 72, 73, and 74 reach their peaks at positions overlapping with the center lines C1, C2, C3, and C4.

[0063] As shown in the cross-sectional views (b), (c), and (d) of Figure 10, the height of the adhesive 70 (first adhesive 71) at the first position P1 is defined as the first height H1, the height of the adhesive 70 (second adhesive 72) at the second position P2 is defined as the second height H2, and the height of the adhesive 70 (first adhesive 71) at the third position P3 is defined as the third height H3.

[0064] The heights H1, H2, and H3 are, for example, heights from a common reference plane RF. The reference plane RF may be, for example, the surface of the base plate 20 or the surface of the load beam 30, but is not limited to these.

[0065] In this embodiment, it is assumed that, during measurement by the measuring device 130, there is no deviation between each of the positions P1, P2, and P3 and the base plate 20 or the load beam 30. In other words, deviations of the heights H1, H2, and H3 from the appropriate values are caused by deviations of the application position and application amount of the adhesive 70 from the appropriate values.

[0066] The first position P1 may be set so as not to be aligned with the third adhesive 73 and the fourth adhesive 74 in the first direction X, as in the first position P1a shown by the dashed circle in FIG. 10 . Similarly, the second position P2 may be set so as not to be aligned with the third adhesive 73 and the fourth adhesive 74 in the first direction X, as in the second position P2a shown by the dashed circle in FIG. 10 . Furthermore, the first position P1 may be located between the first center line C1 and the first inner edge 71b in the first direction X, as in the first position P1b shown by the dashed circle in FIG. 10 . Similarly, the second position P2 may be located between the second center line C2 and the second inner edge 72b in the first direction X, as in the second position P2b shown by the dashed circle in FIG. 10 . For the third position P3, various portions of the first adhesive 71 may be selected.

[0067] 11 and 12 are schematic plan views of adhesive 70 that has been applied in a position that is shifted from the appropriate position. An example of determining the application position of adhesive 70 and the application amount of adhesive 70 in step S4, and feedback in step S5 will be described below with reference to FIGS.

[0068] [Determination of application position in first direction X] When the difference ΔHa (=H1-H2) between the first height H1 and the second height H2 differs from a predetermined reference value Hx, the control device 160 determines that the application position of the adhesive 70 in the first direction X is deviated from the appropriate position. The reference value Hx is an example of a first reference value.

[0069] For example, the reference value Hx is determined taking into consideration the difference in height between the first adhesive 71 and the second adhesive 72 applied at appropriate positions. In this embodiment, as shown in FIG. 6, the second adhesive 72 fills the gap between the base plate 20 and the actuator element 60L (or actuator element 60R), whereas the first adhesive 71 does not fill such gaps. Therefore, the height of the second adhesive 72 may be greater overall than the height of the first adhesive 71. Therefore, the reference value Hx may be set to a value corresponding to the difference in height that may occur near the first position P1 and the second position P2 when the first adhesive 71 and the second adhesive 72 are applied appropriately.

[0070] The reference value Hx may be zero. The reference value Hx may also be a numerical range defined by an upper limit and a lower limit. When the reference value Hx is a numerical range, the expression "the difference ΔHa matches the reference value Hx" in the following description means that the difference ΔHa is included in the numerical range, and the expression "the difference ΔHa does not match the reference value Hx" means that the difference ΔHa is not included in the numerical range.

[0071] 10, when the position of the adhesive 70 is appropriate, the difference ΔHa coincides with the reference value Hx. In this case, the control device 160 determines that the position of the adhesive 70 in the first direction X is appropriate.

[0072] On the other hand, in the example of Figure 11, the second position P2 is located at the intersection of the second center line C2 and the third center line C3. Therefore, the second height H2 increases compared to when the adhesive 70 is applied at the correct position, and the difference ΔHa fluctuates in the negative direction. As a result, the difference ΔHa becomes smaller than the reference value Hx, and the two do not match. In this case, the control device 160 determines that the adhesive 70 is shifted to the right in the figure (in the direction from the first adhesive 71 to the second adhesive 72) from its original position.

[0073] 12, the second position P2 has moved closer to the edge of the second adhesive 72. Therefore, the second height H2 is smaller than when the adhesive 70 is applied at the correct position, and the difference ΔHa fluctuates in the positive direction. As a result, the difference ΔHa becomes larger than the reference value Hx, and the two do not match. In this case, the control device 160 determines that the adhesive 70 has shifted to the left in the drawing (the direction from the second adhesive 72 toward the first adhesive 71) from its original position.

[0074] [Determination of application position in second direction Y] The control device 160 determines that the application position of the adhesive 70 in the second direction Y is deviated from the appropriate position when the difference ΔHb (=H1-H3) between the first height H1 and the third height H3 differs from a predetermined reference value Hy. The reference value Hy is another example of the first reference value.

[0075] For example, the reference value Hy is determined taking into consideration the difference between the first height H1 and the third height H3 of the first adhesive 71 applied at the appropriate position. The reference value Hy may be zero. Alternatively, the reference value Hy may be a numerical range determined by an upper limit and a lower limit. When the reference value Hy is a numerical range, the expression "the difference ΔHb matches the reference value Hy" in the following description means that the difference ΔHb is included in the numerical range, and the expression "the difference ΔHb does not match the reference value Hy" means that the difference ΔHb is not included in the numerical range.

[0076] 10, when the position of the adhesive 70 is appropriate, the difference ΔHb matches the reference value Hy. In this case, the control device 160 determines that the position of the adhesive 70 in the first direction X is appropriate.

[0077] On the other hand, in the example of FIG. 11, the first position P1 is located on the third center line C3, and the third position P3 has moved closer to the edge of the first adhesive 71. Therefore, compared to when the adhesive 70 is applied at the correct position, the first height H1 increases and the third height H3 decreases, causing the difference ΔHb to fluctuate in the positive direction. As a result, the difference ΔHb becomes larger than the reference value Hy, and the two do not match. In this case, the control device 160 determines that the adhesive 70 has shifted upward in the figure (in the direction from the fourth adhesive 74 toward the third adhesive 73) from its original position.

[0078] 12, the third position P3 has moved to the intersection of the first center line C1 and the fourth center line C4. Therefore, the third height H3 increases compared to when the adhesive 70 is applied at the correct position, and the difference ΔHb fluctuates in the negative direction. As a result, the difference ΔHb becomes smaller than the reference value Hy, and the two do not match. In this case, the control device 160 determines that the adhesive 70 has shifted downward in the figure (in the direction from the third adhesive 73 to the fourth adhesive 74) from its original position.

[0079] [Determining the amount of application] The control device 160 determines that the amount of adhesive 70 applied is greater than the appropriate amount when at least two, and preferably all, of the heights H1, H2, and H3 are greater than the predetermined reference value Hm. The control device 160 also determines that the amount of adhesive 70 applied is less than the appropriate amount when at least two, and preferably all, of the heights H1, H2, and H3 are smaller than the reference value Hm.

[0080] The reference value Hm may be a range of values determined by an upper limit and a lower limit. When the reference value Hm is a range of values, the expression "the heights H1, H2, and H3 are greater than the reference value Hm" means that the heights H1, H2, and H3 are greater than the upper limit of the range of values, and the expression "the heights H1, H2, and H3 are smaller than the reference value Hm" means that the heights H1, H2, and H3 are smaller than the lower limit of the range of values.

[0081] [feedback] If the control device 160 determines that the application position of the adhesive 70 is inappropriate, it adjusts the control parameters of the transfer device 110 and the application device 120 so that the application position of the adhesive 70 in the next suspension 10 to be manufactured will be appropriate. These control parameters include, for example, a parameter for driving a motor that moves the stage of the transfer device 110 and a parameter for driving an actuator that moves the nozzle 121 of the application device 120.

[0082] That is, when the control device 160 determines that the adhesive 70 is misaligned in the first direction X, it adjusts the positional relationship between the suspension 10 and the nozzle 121 in the first direction X in step S2 for the suspension 10 to be manufactured next. Furthermore, when the control device 160 determines that the adhesive 70 is misaligned in the second direction Y, it adjusts the positional relationship between the suspension 10 and the nozzle 121 in the second direction Y in step S2 for the suspension 10 to be manufactured next.

[0083] Furthermore, if the control device 160 determines that the amount of adhesive 70 is inappropriate, it adjusts the control parameters of the applicator 120 so that the amount of adhesive 70 applied in the next manufactured suspension 10 will be appropriate. These control parameters include, for example, a parameter for changing the pressure when the applicator 120 applies the adhesive and a parameter for changing the temperature of the adhesive.

[0084] That is, if the control device 160 determines that the amount of adhesive 70 applied is too much, it reduces the amount of adhesive 70 applied to the suspension 10 to be manufactured next. On the other hand, if the control device 160 determines that the amount of adhesive 70 applied is too little, it increases the amount of adhesive 70 applied to the suspension 10 to be manufactured next.

[0085] The adjustment amount of the application position and application amount of adhesive 70 during feedback may be a predetermined constant value or may be dynamically calculated based on heights H1, H2, and H3. Alternatively, correlation data that quantifies the relationship between heights H1, H2, and H3 and deviations in the application position and the relationship between heights H1, H2, and H3 and deviations in the application amount may be prepared in advance, and the adjustment amount during feedback may be determined based on the heights H1, H2, and H3 measured in step S3 and the correlation data.

[0086] The inspection of the application position and application amount is performed similarly for the adhesive 70 on each of the actuator mounting portions 50L, 50R. As another example, the inspection may be performed on the adhesive 70 on either one of the actuator mounting portions 50L, 50R.

[0087] 1 to 12, it is determined whether the application positions and application amounts of the adhesives 71 and 72 in the first direction X are appropriate based on the first height H1 of the first adhesive 71 at the first position P1 and the second height H2 of the second adhesive 72 at the second position P2. This method simplifies the inspection configuration and provides superior inspection accuracy compared to, for example, using image processing to inspect the application positions and application amounts.

[0088] 10 , when the first position P1 and the second position P2 are shifted from the center lines C1 and C2, respectively, the deviation in the application positions of the first adhesive 71 and the second adhesive 72 is likely to be reflected in the first height H1 and the second height H2. For example, if the first position P1 is set to a portion overlapping with the first center line C1, such as position Q1 indicated by the dashed circle in FIG. 10 , and the second position P2 is set to a portion overlapping with the second center line C2, such as position Q2 indicated by the dashed circle in FIG. 10 , even if the first adhesive 71 and the second adhesive 72 are shifted in the first direction X, both heights H1 and H2 decrease, so the difference ΔHa is unlikely to deviate from the appropriate value. Therefore, it becomes difficult to detect the deviation in the application positions of these adhesives 71 and 72.

[0089] 10, if the first adhesive 71 and the second adhesive 72 are slightly misaligned in the first direction X, one of the heights H1 and H2 will basically increase and the other will decrease. Therefore, the difference ΔHa is likely to vary depending on the misalignment of the application positions of the adhesives 71 and 72, making it easy to detect the misalignment.

[0090] In this embodiment, the third height H3 of the first adhesive 71 at the third position P3 is further used to determine whether the application positions of the first adhesive 71 and the second adhesive 72 in the second direction Y are appropriate. This makes it possible to detect misalignment of the adhesives 71, 72 in both the first direction X and the second direction Y.

[0091] 7, deviations in the application position and amount can be automatically detected without the involvement of an operator, and the results can be fed back. Furthermore, if the adhesive 70 is inspected for all suspensions 10 manufactured by the manufacturing system 100, variations in the quality of the suspensions 10 can be significantly reduced.

[0092] The inspection method disclosed in this embodiment is not limited to application to the adhesive 70 having the shape shown in Fig. 5 etc., but can be applied to adhesives having various shapes. A modified example of this embodiment will be disclosed below.

[0093] FIG. 13 is a diagram illustrating a method for inspecting adhesives, their application positions, and application amounts according to this modified example. This diagram shows a first adhesive 81, a second adhesive 82, a third adhesive 83, and a fourth adhesive 84, which are spaced apart from one another. In the illustrated example, the planar shapes of these adhesives 81, 82, 83, and 84 are perfect circles of the same size. However, the adhesives 81, 82, 83, and 84 may have other shapes, such as ellipses or polygons. The adhesives 81, 82, 83, and 84 may be used to bond actuator elements 60L and 60R, as in the above-described embodiment, or may be used to bond other electronic components.

[0094] 13, a first center line C1 passes through the centers of the first adhesive 81 and the third adhesive 83 and is parallel to the second direction Y. A second center line C2 passes through the centers of the second adhesive 82 and the fourth adhesive 84 and is parallel to the second direction Y. A third center line C3 passes through the centers of the first adhesive 81 and the second adhesive 82 and is parallel to the first direction X. A fourth center line C4 passes through the centers of the third adhesive 83 and the fourth adhesive 84 and is parallel to the first direction X.

[0095] In this modified example, when inspecting the application position and application amount, the heights of the first position P1 of the first adhesive 81, the second position P2 of the second adhesive 82, and the third position P3 of the third adhesive 83 are measured.

[0096] For example, the first position P1, the second position P2, and the third position P3 are set so as not to overlap with the center lines C1, C2, C3, and C4, respectively, when the application positions of the adhesives 81, 82, 83, and 84 are appropriate as designed. Furthermore, the first position P1, the second position P2, and the third position P3 are set so that the distance D2 is different from the distance D1 and the distance D4 is different from the distance D3, as in the above-described embodiment.

[0097] 13, the first position P1, the second position P2, and the third position P3 are all located outside the area between the first center line C1 and the second center line C2 and outside the area between the third center line C3 and the fourth center line C4. However, these positions P1, P2, and P3 may be located in other parts of the adhesives 81, 82, and 83. Furthermore, any of the positions P1, P2, and P3 may be located in the fourth adhesive 84.

[0098] In this modified example, the method of determining whether the application position and application amount are appropriate using the heights of the first position P1, the second position P2, and the third position P3 is the same as in the above-described embodiment.

[0099] The above-described embodiments and their modifications are not intended to limit the scope of the present invention to the configurations disclosed in these embodiments and modifications. The present invention can be implemented by modifying the configurations disclosed in these embodiments and modifications in various ways.

[0100] For example, the adhesive whose application position and application amount are inspected may be used to bond electronic components other than actuator elements. Also, the number of positions at which the height of the adhesive is measured is not limited to three, but may be two, four, or more. The inspection of the adhesive may be performed for only one of the application position and application amount. [Explanation of symbols]

[0101] 1...disk device, 10...suspension, 20...base plate, 30...load beam, 50L, 50R...actuator mounting portion, 60L, 60R...actuator element, 70...adhesive, 71...first adhesive, 72...second adhesive, 73...third adhesive, 74...fourth adhesive, P1...first position, P2...second position, P3...third position, 100...manufacturing system, 200...inspection system.

Claims

1. 1. A method for inspecting a suspension for a disk drive, the method comprising: an electronic component having a first side surface and a second side surface aligned in a first direction; a first adhesive provided along the first side surface; and a second adhesive provided along the second side surface, the method comprising: measuring a first height of the first adhesive at a first location; measuring a second height of the second adhesive at a second location; determining whether at least one of the application positions of the first adhesive and the second adhesive in the first direction and the application amounts of the first adhesive and the second adhesive are appropriate based on the first height and the second height; An inspection method including:

2. the first adhesive has a first center in the first direction and a first outer edge that is farther from the second adhesive in the first direction than the first center; the second adhesive has a second center in the first direction and a second outer edge that is farther from the first adhesive than the second center in the first direction; the first position is located between the first center and the first outer edge in the first direction when the application position of the first adhesive in the first direction is appropriate; the second position is located between the second center and the second outer edge in the first direction when the application position of the second adhesive in the first direction is appropriate; The inspection method according to claim 1 .

3. the first adhesive has a first center in the first direction and a first inner edge that is closer to the second adhesive than the first center in the first direction; the second adhesive has a second center in the first direction and a second inner edge that is closer to the first adhesive than the second center in the first direction; the first position is located between the first center and the first inner edge in the first direction when the application position of the first adhesive in the first direction is appropriate; the second position is located between the second center and the second inner edge in the first direction when the application position of the first adhesive in the first direction is appropriate; The inspection method according to claim 1 .

4. In the determining step, when a difference between the first height and the second height is different from a predetermined first reference value, it is determined that the application positions of the first adhesive and the second adhesive in the first direction are deviated from appropriate positions. The inspection method according to any one of claims 1 to 3.

5. In the determining step, when both the first height and the second height are greater than a predetermined second reference value, it is determined that the application amounts of the first adhesive and the second adhesive are greater than appropriate application amounts, and when both the first height and the second height are smaller than the second reference value, it is determined that the application amounts of the first adhesive and the second adhesive are less than appropriate application amounts. The inspection method according to any one of claims 1 to 4.

6. the first adhesive and the second adhesive have an elongated shape in a second direction intersecting the first direction, measuring a third height of the first adhesive at a third location distant from the first location in the second direction; and determining whether the application position of the first adhesive in the second direction is appropriate based on the first height and the third height. The inspection method according to any one of claims 1 to 5.

7. the electronic component is an actuator element including a piezoelectric body, the suspension includes a first plate facing at least the second side surface in the first direction, and a second plate having an opening overlapping the actuator element and overlapping the first plate, the first adhesive covers the first side surface and contacts the second plate; the second adhesive is filled between the second side surface and the first plate and is in contact with the second plate; The inspection method according to any one of claims 1 to 6.

8. A method for manufacturing a suspension for a disk drive, the method comprising: an electronic component having a first side surface and a second side surface aligned in a first direction; a first adhesive provided along the first side surface; and a second adhesive provided along the second side surface, the method comprising: applying the first adhesive and the second adhesive; measuring a first height of the first adhesive at a first location; measuring a second height of the second adhesive at a second location; determining whether at least one of the application positions of the first adhesive and the second adhesive in the first direction and the application amounts of the first adhesive and the second adhesive are appropriate based on the first height and the second height; A manufacturing method comprising:

9. 1. An inspection system for a disk drive suspension, the system including: an electronic component having a first side surface and a second side surface aligned in a first direction; a first adhesive provided along the first side surface; and a second adhesive provided along the second side surface, a measuring device for measuring a first height of the first adhesive at a first location and a second height of the second adhesive at a second location; a control device that determines whether at least one of the application positions of the first adhesive and the second adhesive in the first direction and the application amounts of the first adhesive and the second adhesive are appropriate, based on the first height and the second height; An inspection system comprising:

Images