Vaporization system and method for fixing vaporizer

Abstract

This vaporization system for vaporizing a liquid material is provided with: a vaporization device that comprises an introduction port through which a liquid material is introduced and a discharge port through which a vaporized gas that is obtained by vaporizing the liquid gas is discharged; a first fixation screw which affixes at least one of the introduction port and the discharge port to a base member by screwing; a pipe member which is in communication with the affixed port, and in which the vaporized gas or the liquid material flows; and a second fixation screw which affixes the pipe member to the affixed port by screwing, with a sealing member being interposed therebetween.

Description

[Technical Field]

[0001] The present invention relates to a vaporization system for vaporizing a liquid material. [Background technology]

[0002] Conventionally, vaporization systems that vaporize liquid materials have been used to generate gases used in semiconductor manufacturing processes such as film formation processes (see, for example, Patent Document 1). Generally, these vaporization systems include a housing that houses multiple devices, such as a vaporizer that vaporizes the liquid material and a mass flow controller that controls the flow rate of the vaporized gas. The housing is provided with an inlet port through which the liquid material is introduced and an outlet port through which the vaporized gas produced by vaporizing the liquid material is discharged. These inlet and outlet ports can be connected to piping in a semiconductor manufacturing line to supply a predetermined flow rate of gas to a process chamber where the semiconductor manufacturing process is performed.

[0003] Incidentally, this vaporization system is often used while being fixed to a base member or the like within a process chamber. In a conventional method for fixing a vaporization system, as shown in Figure 10, the inlet port and outlet port of the vaporizer are connected to internal flow paths formed in the base member, and these are then fixed with screws via sealing members to fix the vaporizer to the base member. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-122841 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the conventional method of fixing the vaporizer to the base member, the same fixing screw is used to fix the vaporizer to the base member and to fasten the seal member, so the weight of the vaporizer is placed on the seal member, which can cause uneven tightening pressure on the seal member and reduce sealing performance.

[0006] Therefore, the present invention has been made to solve the above problems, and its main objective is to reduce the weight of the vaporizer that is placed on the screws that tighten the sealing member, reduce the imbalance in the tightening surface pressure of the sealing member, and improve sealing performance. [Means for solving the problem]

[0007] In other words, the vaporization system of the present invention is characterized by comprising: a vaporization device for vaporizing a liquid material, the vaporization device having an inlet port through which the liquid material is introduced and an outlet port through which the vaporized gas produced by vaporizing the liquid material is discharged; a first fixing screw for screwing and fixing at least one of the inlet port and the outlet port to a base; a piping member that communicates with the fixed port and through which the vaporized gas or the liquid material flows; and a second fixing screw for screwing and fixing the piping member to the fixed port via a sealing member.

[0008] With this configuration, the screw (first fixing screw) that fastens the port and the base to secure the vaporizer to the base and the screw (second fixing screw) that fastens the port and the piping member to form a seal are separately provided, so the weight of the vaporizer can be supported mainly by the first fixing screw, and the weight of the vaporizer that is applied to the second fixing screw for forming a seal can be reduced. This reduces the unevenness of the tightening surface pressure applied to the seal member by the second fixing screw, and improves sealing performance.

[0009] A specific configuration of the evaporation system is such that the fixed port has a mounting surface that is attached to the base and a piping member mounting surface to which the piping member is attached so as to communicate, and in the fixed port, the mounting surface and the piping member mounting surface are formed on different surfaces.

[0010] In the vaporization system, it is preferable that the piping member mounting surface is formed on the surface opposite to the mounting surface of the fixed port. This allows the user to screw the piping member into the port while facing the mounting surface of the base, improving the ease of installation of the piping member to the vaporizer. This effect is particularly noticeable when installing multiple vaporizer systems in a narrow space, such as when multiple systems are lined up.

[0011] It is preferable that the vaporization system has the inlet port and the outlet port each screwed to the base by the first fixing screw, and the piping members include an inlet side piping member that communicates with the inlet port and through which the liquid material flows, and an outlet side piping member that communicates with the outlet port and through which the vaporized gas flows, and the inlet side piping member and the outlet side piping member are screwed to their corresponding ports by the second fixing screw via sealing members. With this configuration, both the inlet port and the outlet port are screwed to the base by the first fixing screw, so the weight of the vaporizer applied to the second fixing screw for forming a seal can be reduced for both the inlet port and the outlet port. This further reduces unevenness in the tightening surface pressure applied to the seal member by the second fixing screw, improving sealing performance.

[0012] The effect of the present invention becomes more pronounced as the component of the weight of the vaporizer that is applied to the first fixing screw increases. An example of an embodiment in which the effects of the present invention are more pronounced is one in which the inlet port is provided at one end of the vaporizer and the outlet port is provided at the other end of the vaporizer, and the vaporizer is fixed to the base so that the inlet port and the outlet port are positioned above and below in the vertical direction. In addition, an embodiment in which the effects of the present invention are more pronounced is one in which the mounting surfaces of the inlet port and outlet port are formed parallel to the vertical direction.

[0013] the piping member of the vaporization system includes an outer piping and a communication member that communicates the outer piping with the fixed port; Preferably, one end of the communication member is screwed to the fixed port and the other end is screwed to the outer pipe. In this way, since the piping member is made up of a plurality of members, the degree of freedom in designing the piping member can be increased.

[0014] The above-described effects of the present invention become more pronounced as the weight of the vaporizer increases. An example of an embodiment in which the effects of the present invention are more pronounced is one in which the vaporization device includes a vaporizer that vaporizes the liquid material and a supply amount control device that controls the amount of the liquid material supplied to the vaporizer. In another embodiment in which the effects of the present invention are more pronounced, for example, the vaporization device further includes a mass flow controller that controls the flow rate of the vaporized gas vaporized by the vaporizer.

[0015] Furthermore, the method for fixing a vaporization device of the present invention is a method for fixing a vaporization device to a base, the vaporization device having an inlet port through which the liquid material is introduced and an outlet port through which the vaporized gas produced by vaporizing the liquid material is discharged, characterized in that at least one of the inlet port and the outlet port is screwed and fixed to the base, and a piping member that is connected to the fixed port and through which the vaporized gas or the liquid material flows is screwed and fixed to the fixed port via a sealing member. Such a method for fixing the vaporizer can achieve the same effects as the vaporization system of the present invention described above. [Effects of the Invention]

[0016] According to the present invention configured in this manner, the weight of the vaporizer placed on the screws tightening the sealing member can be reduced, and the uneven tightening surface pressure of the sealing member can be reduced, thereby improving sealing performance. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 1 is a schematic diagram showing the configuration of a vaporization system according to an embodiment of the present invention. [Figure 2] FIG. 2 is a plan view of the vaporization system of the embodiment, viewed from the device mounting surface. [Figure 3] FIG. 2 is an exploded view of the vaporization system of the embodiment. [Figure 4] FIG. 10 is a schematic diagram showing the configuration of a vaporization system according to another embodiment. [Figure 5] FIG. 10 is a schematic diagram showing the configuration of a vaporization system according to another embodiment. [Figure 6] FIG. 10 is a plan view of the configuration of a vaporization system according to another embodiment, viewed toward the device mounting surface. [Figure 7] FIG. 10 is a schematic diagram showing the configuration of a vaporization system according to another embodiment. [Figure 8] FIG. 10 is a plan view of the configuration of a vaporization system according to another embodiment, viewed toward the device mounting surface. [Figure 9] FIG. 10 is a schematic diagram showing the configuration of a vaporization system according to another embodiment. [Figure 10]FIG. 1 is a schematic diagram showing the configuration of a conventional vaporization system. [Explanation of symbols]

[0018] 100···Evaporation System 1. Vaporizer 41 i、 41 о First fixing screw 42 i Inlet side piping components 42 о Outlet side piping components 43i 、 43 о ...Second fixing screw F Base member S...Sealing material P i Introduction port P O Lead-out port B Body block DETAILED DESCRIPTION OF THE INVENTION

[0019] An embodiment of a vaporization system according to the present invention will be described below with reference to the drawings.

[0020] Vaporization system 100 of this embodiment is incorporated into, for example, a semiconductor manufacturing line to supply a predetermined flow rate of gas to a process chamber where a semiconductor manufacturing process is performed. Specifically, vaporization system 100 includes vaporizer 1 that vaporizes a liquid material, and connection mechanism 4 that fixes vaporizer 1 to base member F and connects it to the semiconductor manufacturing line.

[0021] As shown in Fig. 1, the vaporizer 1 includes a vaporizer 2 that vaporizes a liquid raw material, and a mass flow controller 3 that controls the flow rate of the gas vaporized by the vaporizer 2. The vaporizer 1 includes a housing C that has a roughly columnar shape (specifically, roughly rectangular parallelepiped shape) with a longitudinal direction, and the vaporizer 2 and mass flow controller 3 are housed inside the housing C. An inlet port P is provided at one end of the longitudinal direction of the housing C to introduce the liquid material. i At the other end of the longitudinal direction, there is an outlet port P for discharging the vaporized gas. о 2, the vaporization system 100 of this embodiment includes a plurality of vaporization devices 1, which are arranged and fixed upright on a device mounting surface Fx of a base member F.

[0022] The vaporization section 2 includes a vaporizer 21 that vaporizes the liquid material by a baking method, a supply flow control device 22 that controls the amount of liquid material supplied to the vaporizer 21, and a preheater 23 that preheats the liquid material supplied to the vaporizer 21 to a predetermined temperature.

[0023] The vaporizer 21, the supply flow rate control device 22, and the preheater 23 are attached to an equipment mounting surface Bx set on one surface of a main body block B, which is a manifold block having a flow path formed therein. The main body block B is made of a metal such as stainless steel and has a roughly columnar shape (specifically, a roughly rectangular parallelepiped shape) with a longitudinal direction, and the equipment mounting surface Bx is a surface having a rectangular shape with a longitudinal direction. The main body block B is attached to the housing C so that its longitudinal direction faces the longitudinal direction of the housing C.

[0024] Specifically, the preheater 23, the supply flow rate control device 22, and the vaporizer 21 are mounted in a row along the longitudinal direction on the device mounting surface Bx. The preheater 23, the supply flow rate control device 22, and the vaporizer 21 are connected in series, in this order from the upstream side, by an internal flow path formed in the main body block B. The upstream opening of the internal flow path of the main body block B is connected to a liquid material introduction port Pi is connected to.

[0025] The vaporizer 21 has a storage container, which is a vaporization tank having a space for storing a liquid material inside, and a vaporization heater (not shown) provided in the storage container for vaporizing the liquid material.

[0026] Supply flow rate control device 22 is a control valve, specifically an electromagnetic on-off valve, that controls the supply flow rate of the liquid material to vaporizer 21. A control device (not shown) controls (e.g., controls ON / OFF) electromagnetic on-off valve 22 based on a detection signal from a liquid level sensor provided in the storage container of vaporizer 21 so that the liquid material stored in the storage container is always at a predetermined amount. This allows the liquid material to be intermittently supplied to vaporizer 21.

[0027] The preheater 23 is configured to heat the liquid material to a temperature just below the vaporization point (below the boiling point) using a preheater (not shown).

[0028] The vaporizing section 2 configured as above allows the liquid material introduction port P i The liquid material introduced from the preheater 23 is preheated to a predetermined temperature by flowing through a flow path in the preheater 23. The liquid material preheated by the preheater 23 is intermittently introduced into the vaporizer 21 under the control of the electromagnetic on-off valve 22, which is a supply amount control device. The liquid material is then constantly stored in the vaporizer 21, and the vaporized gas obtained by vaporizing the liquid material is continuously generated without being affected by the control of the electromagnetic on-off valve 22, and is continuously led to the mass flow controller 3.

[0029] Next, the mass flow controller 3 will be described. The mass flow controller 3 includes a fluid detection device 31 that detects the vaporized gas flowing through the flow path, and a flow control valve 32 that controls the flow rate of the vaporized gas flowing through the flow path. The fluid detection device 31 is, for example, a capacitance-type pressure sensor that detects the pressures upstream and downstream of a fluid resistor provided in the flow path. The flow control valve 32 is a control valve that controls the flow rate of the vaporized gas generated by the vaporizer 21, and in this embodiment, is a piezoelectric valve.

[0030] The fluid detection device 31 and the flow control valve 32 are attached to the device mounting surface Bx. Specifically, the flow control valve 32 and the fluid detection device 31 are attached to the device mounting surface Bx in a row along its longitudinal direction. The flow control valve 32 and the fluid detection device 31 are connected in series, in this order from the upstream side, by an internal flow path formed in the main body block B.

[0031] In this embodiment, an upstream pressure sensor 5 and an on-off valve 6 are provided upstream of the mass flow controller 3. Furthermore, the downstream opening of the internal flow path of the main body block B is connected to a vaporized gas outlet port P о is connected to.

[0032] The connecting mechanism 4 connects the vaporizer 1 with its longitudinal direction facing up and down (vertical direction) and the inlet port P i and the output port P о (Here, the introduction port P i is below, and the lead-out port P о is located on top) is fixed to the device mounting surface Fx of the base member F. Here, the device mounting surface Fx is formed on the base member F so as to be parallel to the vertical direction.

[0033] Specifically, the connection mechanism 4 includes an inlet port P i and outlet port P o a first fixing screw 41 that fixes the inlet port P to the base member F; ian inlet piping member 42 in which an internal flow path through which the liquid material flows is formed, the inlet piping member 42 communicating with the i and the output port P o and a discharge-side piping member 42 in which an internal flow path through which the vaporized gas flows is formed. о and the inlet side piping member 42 i and outlet-side piping member 42 о and second fixing screws 43 for screwing and fixing the respective ports via the sealing members S.

[0034] The introduction port P i and outlet port P o is a block-shaped member having an internal flow path formed therein, and is attached to the device mounting surface Fx of the base member F. i x, P о x. i and outlet port P o The mounting surface P i x, P о Through hole P that penetrates from x to the opposite surface i h, P о The first fixing screws 41 are formed on the respective ports P i , P o Mounting surface P i x, P о Through hole P from the surface opposite to x i h, P о h, and the tip of the hole is screwed into a screw hole formed on the device mounting surface Fx of the base member F, thereby connecting each port P i , P o Mounting surface P i x, P о x and the device mounting surface Fx of the base member F. Here, the through-hole P i h, P о h and screw holes are formed.

[0035] Introduction port P i and outlet port P o In the case of the mounting surface P i x, P оOn the surface different from x, the corresponding piping component is attached so as to communicate with the piping component. i y, P о y is formed. Here, each port P i , P o Piping component mounting surface P i y, P о y is the mounting surface P i x, P о The inlet port P is located on the opposite side of the x-axis. i Piping component mounting surface P i y is formed with an inlet for introducing the liquid material, and an outlet port P o Piping component mounting surface P о An outlet port for discharging the vaporized gas is formed at y.

[0036] Inlet side piping member 42 i and outlet-side piping member 42 о Each piping member 42 is configured such that its internal flow path extends in the vertical direction along the device mounting surface Fx of the base member F. i , 42 о is the piping component mounting surface P of the corresponding port i y, P о y is attached to the first mounting surface 42 i x, 42 о x. The first mounting surface 42 i x, 42 о x, one end of the internal flow path is open, and each piping member 42 i , 42 о The first mounting surface 42 i x, 42 о x is the piping component mounting surface P of the corresponding port i y, P о By attaching the nozzle 1 to the nozzle y, the internal flow path is configured to communicate with the inlet and outlet, respectively.

[0037] Inlet side piping member 42 i and outlet-side piping member 42 о The first mounting surface 42 i x, 42 о Through hole 42 that penetrates from x to the opposite surfacei h, 42 о The second fixing screws 43 are formed on the respective piping members 42. i , 42 о The first mounting surface 42 i x, 42 о From the surface opposite to x, through hole 42 i h, 42 о h, and the tip of each port P i , P o Piping component mounting surface P i y, P о y. i , 42 о The first mounting surface 42 i x, 42 о x and each corresponding port P i , P o Piping component mounting surface P i y, P о y is tightened and sealed via a sealing member S. Here, the through-hole 42 is set so that the second fixing screw 43 is perpendicular to the device mounting surface Fx of the base member F. i h, 42 о h and screw holes are formed.

[0038] In this embodiment, the introduction side piping member 42 i and outlet-side piping member 42 о Specifically, as shown in FIG. 3, the inlet side piping member 42 i The outer pipe 421 on the inlet side communicates with a liquid supply line through which the liquid material flows. i and the introduction side outer pipe 421 i and introduction port P i an introduction side communicating member 422 that communicates with the i The outlet-side piping member 42 о The outer outlet pipe 421 communicates with the process chamber. о and the outlet side outer pipe 421 о and the output port P o and an outlet-side communicating member 422 that communicates with the о It is equipped with the following.

[0039] Each outer pipe 421 i , 421 о Each outer pipe 421 is a columnar pipe having an internal flow passage formed therein, and is attached to the device mounting surface Fx of the base member F so that the internal flow passage faces vertically. i , 421 о In this case, the mounting surface 421 is mounted on the base member F. i x, 421 о On the surface opposite to x, there is a connecting member mounting surface 421 to which a corresponding connecting member is attached. i y, 421 о y is formed on the connecting member mounting surface 421 i y, 421 о One end of the internal flow path opens at y.

[0040] Each communication member 422 i , 422 о is a block-shaped member having an internal flow path formed therein, and the first mounting surface 42 i x, 42 о x and the corresponding outer piping connecting member mounting surface 421 i y, 421 о y is attached to the second mounting surface 422 i x, 422 о x. Here, the first mounting surface 42 i x, 42 о x and the second mounting surface 422 i x, 422 о x is the number of each communication member 422 i , 422 о are formed at different positions on the same surface, and the first mounting surface 42 i x, 42 о One end of the internal flow path is open at x, and the second mounting surface 422 i x, 422 о The other end of the internal flow path is open at x. i , 422 о The first mounting surface 42 i x, 42 о x to the corresponding port P i , Po Piping component mounting surface P i y, P о By attaching it to the y, the internal flow path of the communicating member and each port P i , P o The inlet and outlet of the second mounting surface 422 are in communication with each other. i x, 422 о x to the corresponding outer piping 421 i , 421 о The connecting member mounting surface 421 i y, 421 о y, each of the communication members 422 i , 422 о and the corresponding outer pipe 421. i , 421 о The inner flow path is configured to communicate with the inner flow path formed in the inner flow path.

[0041] Here, the connection mechanism 4 includes an introduction side communication member 422 i and outlet side communication member 422 о , and the corresponding outer piping 421 i , 421 о The third fixing screw 44 is screwed and fixed to the sealing member S via the sealing member S.

[0042] Introduction side communication member 422 i and outlet side communicating member 422 о The second mounting surface 422 i x, 422 о Through hole 422 that penetrates from x to the opposite surface i h, 422 о The third fixing screw 44 is formed in each of the communication members 422. i , 422 о The second mounting surface 422 i x, 422 о From the surface opposite to x, through hole 422 i h, 422 о h, and the ends of the outer pipes 421 i , 421 о The connecting member mounting surface 421 i y, 421 оy. i , 422 о The second mounting surface 422 i x, 422 о x and each corresponding outer pipe 421 i , 421 о The connecting member mounting surface 421 i y, 421 о The space between the base member F and the device mounting surface Fx is sealed by tightening the seal member S. The third fixing screw 44 is set perpendicular to the device mounting surface Fx of the base member F. i h, 422 о h and screw holes are formed.

[0043] According to the vaporization system 100 of this embodiment configured as described above, each port P i , P o and the base member F to fix the vaporizer 1 to the base, and i , P o and the corresponding piping member 42 i , 42 о Since the first fixing screw 41 and the second fixing screw 43 for fastening and sealing are separately provided, the weight of the vaporizer 1 is mainly supported by the first fixing screw 41, and the weight of the vaporizer 1 applied to the second fixing screw 43 for forming the seal can be reduced. This reduces the unevenness of the fastening surface pressure applied to the seal member S by the second fixing screw 43, and improves the sealing performance.

[0044] The present invention is not limited to the above-described embodiment.

[0045] For example, the vaporization system 100 of the embodiment includes the inlet side piping member 42 i and outlet-side piping member 42 о In the vaporization system 100 of another embodiment, as shown in FIG. 4, the introduction side piping member 42 i and outlet-side piping member 42 о may each be made of a single member.

[0046] In addition, the vaporization system 100 of the embodiment has an inlet port P i and outlet port P o In the case of the mounting surface P i x, P о Piping component mounting surface P on the opposite side of x i y, P о y is formed, but this is not limited to this. i y, P о y is the mounting surface P i x, P о The position may be any position as long as it is formed at a position different from x.

[0047] For example, another embodiment of the vaporization system 100 includes an inlet port P i and outlet port P o In the case of the mounting surface P i x, P о x to the piping component mounting surface P i y, P о 5 and 6, the piping member mounting surface P i y, P о y is the mounting surface P i x, P о x and the longitudinal direction of the vaporizer 1. As shown in FIGS. i y, P о y is the mounting surface P i x, P о It may be formed so as to intersect with x and be parallel to the longitudinal direction of the vaporizer 1.

[0048] In addition, the vaporization system 100 of the embodiment includes an inlet port P i and outlet port P o In the vaporization system 100 of another embodiment, the introduction port P i and outlet port P oOnly one of the inlet ports P may be connected to the semiconductor manufacturing line via the piping member 42. For example, as shown in FIG. i (or lead-out port P о ) may be fixed to the base member F by means of a fixing screw 7 via a sealing member, and may be made to communicate with an internal flow path formed within the base member F.

[0049] Furthermore, the vaporization system 100 of the above embodiment may not have the mass flow controller 3, but may have at least the vaporizer 21 and the supply flow rate control device 22.

[0050] In the above embodiment, the vaporizer 1 is installed so that its longitudinal direction is oriented in the up-down direction (vertical direction), but it may be installed on the base member F so that the longitudinal direction is oriented in the left-right direction (horizontal direction). i is the output port P o It may be fixed to the base member F so as to be positioned above the

[0051] Furthermore, although the mass flow controller 3 in the above embodiment is a so-called pressure type, it is not limited to this and may be a so-called thermal type.

[0052] Furthermore, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications are possible without departing from the spirit of the present invention. [Industrial Applicability]

[0053] According to the present invention, the weight of the vaporizer applied to the screws tightening the seal member can be reduced, and unevenness in the tightening surface pressure of the seal member can be reduced, thereby improving sealing performance.

Claims

1. a vaporization apparatus having a vaporizer for vaporizing a liquid material, a supply amount control device for controlling the amount of liquid material supplied to the vaporizer, and a housing for accommodating the vaporizer and the supply amount control device, the vaporization apparatus further having, on the outside of the housing, an inlet port for introducing the liquid material and an outlet port for discharging a vaporized gas obtained by vaporizing the liquid material; a connection mechanism provided outside the vaporizer and configured to screw the vaporizer to a base to fix the vaporizer; The connection mechanism includes: a first fixing screw that screws and fixes the mounting surface of at least one of the inlet port and the outlet port to the base; a piping member that communicates with the fixed port and through which the vaporized gas or the liquid material flows; a second fixing screw that screws the piping member to a piping member mounting surface formed on a surface different from the mounting surface of the fixed port via a sealing member.

2. 2. The vaporization system according to claim 1, wherein the piping member mounting surface is formed on a surface of the fixed port opposite the mounting surface.

3. the inlet port and the outlet port are each screwed to the base by the first fixing screw; The piping member includes: an inlet piping member that communicates with the inlet port and through which the liquid material flows; an outlet-side piping member that communicates with the outlet port and through which the vaporized gas flows; have 3. The vaporization system according to claim 1, wherein the inlet piping member and the outlet piping are screwed to the corresponding ports via the second fixing screws via sealing members.

4. the inlet port is provided on one end side of the vaporizer, and the outlet port is provided on the other end side of the vaporizer; 4. The vaporization system according to claim 3, wherein the vaporization device is fixed to the base so that the inlet port and the outlet port are positioned above and below each other in a vertical direction.

5. the piping member includes an outer piping and a communication member that communicates the outer piping with the fixed port; 5. The vaporization system according to claim 1, wherein one end of the communication member is screwed to the fixed port and the other end is screwed to the outer pipe.

6. The vaporization system according to claim 1 , wherein the vaporization device further comprises a mass flow controller that controls the flow rate of the vaporized gas vaporized by the vaporizer.

7. A method for fixing a vaporization device to a base, the vaporization device having a vaporizer that vaporizes a liquid material, a supply amount control device that controls the amount of liquid material supplied to the vaporizer, and a housing that houses the vaporizer and the supply amount control device, the vaporization device further having an inlet port through which the liquid material is introduced and an outlet port through which a vaporized gas produced by vaporizing the liquid material is discharged on the outside of the housing, the method comprising: outside the vaporizer, a mounting surface of at least one of the inlet port and the outlet port is fixed to the base by screws; A method for fixing a vaporization device, comprising: fixing a piping member that is connected to the fixed port and through which the vaporized gas or the liquid material flows, by screwing it via a sealing member to a piping member mounting surface formed on a surface of the fixed port that is different from the mounting surface.

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