Gas valve cover and substrate carrier to which it is applied

Abstract

To provide a gas valve cover and a substrate carrier to which the gas valve cover is applied.SOLUTION: A substrate carrier includes a housing and a base disposed on the bottom of the housing. The bottom can accommodate a gas valve. The base is provided with a gas opening. The gas valve cover includes a gas valve cover body and a plurality of elastic buckle arms. The gas valve cover body is disposed on the base. The elastic buckle arms are disposed on the gas valve cover body. The elastic buckle arms are located at the locations of the gas openings, thereby fixing the gas valve between the bottom of the housing and the base, wherein the upper surface of the gas valve cover is lower than the surface height of the base and the surface height of the gas valve.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a gas valve cover and a substrate carrier using the same, and more particularly to a gas valve cover for a gas valve that can be quickly disassembled and assembled and is used in the semiconductor field, and a substrate carrier using the same. [Background technology]

[0002] With the advancement of science and technology, semiconductor processes are constantly improving, especially with the miniaturization of threads, semiconductor devices are developing towards smaller size and higher logic density, so defects in semiconductor devices or particles adhering thereto have a significant impact on yield.

[0003] In the semiconductor manufacturing process, to ensure the cleanliness of components during transport while avoiding damage to the components, the industry has developed semiconductor carriers such as front-opening wafer carriers (FOUPs), which allow multiple semiconductor components to be transported in batches within the same carrier, improving efficiency. However, because external contaminants can enter the carrier once the carrier door is opened, maintaining the cleanliness of the carrier interior is a very important issue.

[0004] In the prior art, it is known to install different numbers of gas valves in a carrier and allow a constant flow rate of gas to pass through, thereby maintaining the gas exchange rate within the carrier and thereby reducing the number of particles within the carrier. Elastic rubber is installed around the air valve, which is attached to the housing by interference between the elastic rubber and the intake and exhaust holes of the housing. However, this type of attachment is prone to the gas valve loosening and falling off when subjected to external force impact or during the inflation operation on the machine, resulting in inaccurate inflation.

[0005] Therefore, how to prevent the gas valve from falling off the semiconductor carrier is an issue that needs to be resolved quickly in the relevant industry. Summary of the Invention [Problem to be solved by the invention]

[0006] In view of this, the present invention provides a gas valve cover and a substrate carrier to which the same is applied. The gas valve cover and the substrate carrier to which the same is applied include a gas valve cover body and a plurality of elastic buckle arms. The elastic buckle arms are located at the gas openings on the base of the substrate carrier, thereby fixing the gas valve between the bottom of the housing and the base. This secures the gas valve so that it will not fall off during gas supply operations and can be operated smoothly. In addition, the gas valve is easy to disassemble and assemble, improving the efficiency of semiconductor manufacturing processes. [Means for solving the problem]

[0007] According to one aspect of the present invention, there is provided a gas valve cover adapted for use with a substrate carrier, the substrate carrier including a housing and a base disposed at the bottom of the housing. The bottom can accommodate a gas valve. The base has a gas opening. The gas valve cover includes a gas valve cover body and a plurality of elastic buckle arms. The gas valve cover body is disposed on the base. The plurality of elastic buckle arms are disposed on the gas valve cover body and are located at the gas openings, thereby securing the gas valve between the bottom of the housing and the base. The upper surface of the gas valve cover is lower than the surface height of the base and the surface height of the gas valve.

[0008] In one embodiment, the upper surface of the gas valve lid is lower than the surface height of the base and the surface height of the gas valve, and the difference is greater than 1 mm.

[0009] In one embodiment, there is a snap elastic angle between the plurality of elastic buckle arms and the gas valve cover body, and the snap elastic angle is in the range of 0 to 90 degrees.

[0010] In one embodiment, the gas valve cover body is a hollow ring, one side of the elastic buckle arm is connected to the outside of the hollow ring and is used to abut against the gas valve, and the other side of the elastic buckle arm abuts against the side facing the base from the gas opening, so that a part of the elastic buckle arm is located on the base, and the elastic buckle arm is removably installed at the location of the gas opening.

[0011] In one embodiment, each elastic buckle arm has a hook portion, the gas valve is provided with a stopper portion, the hook portion is directed toward the gas opening and is engaged on the side portion of the base, and the interconnection positions between the multiple elastic buckle arms and the outside of the hollow ring are used to abut against the stopper portion.

[0012] In one embodiment, the base has a recess extending outward from the side edge of the gas opening, the hook is engaged on the base through the recess, and the overlapping portion of the hook portion and the base has a hook range of 0.8 mm to 1.5 mm.

[0013] In one embodiment, the inner diameter width of the hollow ring is sufficient to support the stopper portion of the gas valve, and the inner diameter width of the hollow ring is 25 mm to 26.5 mm in diameter, and the outer diameter width of the hollow ring is 25.1 mm to 28.5 mm in diameter.

[0014] In one embodiment, the gas valve cover body is provided with a covering portion, which is located below the elastic buckle arm and spaced apart from the gas opening, and which covers a portion of the gas valve.

[0015] In one embodiment, one side of the elastic buckle arm is formed extending from the base toward the gas opening, and the other side of the elastic buckle arm is connected to the gas valve cover body, and the gas valve cover body is used to abut against the gas valve.

[0016] According to another aspect of the present invention, there is provided a substrate carrier, the substrate carrier comprising: a housing, a base, and the gas valve cover, the housing having a bottom and used to accommodate the gas valve, the base being disposed at the bottom of the housing and having a gas opening disposed in the base, the gas opening being used to accommodate a portion of the gas valve, and the height of the surface of the gas valve being equal to or lower than the height of the surface of the base, and the gas valve cover being disposed between the bottom of the housing and the base and used to fix the gas valve and prevent the gas valve from falling off the gas opening. [Effects of the Invention]

[0017] The gas valve cover and the substrate carrier to which it is applied use an elastic buckle arm to fix the gas valve body between the base and the bottom surface, which prevents the gas valve from falling off during the gas supply operation or when the substrate carrier is moving, allowing the substrate carrier to perform the gas supply operation accurately, and the detachable elastic buckle arm improves the convenience of gas valve replacement. [Brief explanation of the drawings]

[0018] To make the above and other features, advantages and embodiments of the present invention more apparent, reference is made to the accompanying drawings, in which: [Figure 1] 1 is a perspective view of a substrate carrier according to one embodiment of the present invention; [Figure 2] FIG. 2 is an exploded view of the substrate carrier of FIG. [Figure 3] FIG. 2 is a partial cross-sectional view of the gas valve lid, housing, and base. [Figure 4] FIG. 1 is a perspective view showing a gas valve cover according to an embodiment of the present invention. [Figure 5] FIG. 2 is a side view showing a gas valve cover according to one embodiment of the present invention. [Figure 6] FIG. 2 is a plan view showing a gas valve cover according to an embodiment of the present invention. [Figure 7] FIG. 10 is a partial cross-sectional view of a gas valve lid, housing, and base according to another embodiment of the present invention. [Figure 8]FIG. 10 is a partial cross-sectional view of a gas valve cover, housing, and base according to yet another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0019] This patent invention is a patent application entitled "Quick Release Purge Valve Cover and Semiconductor Container Using The Same" filed in the United States on March 23, 2023. [Patent Document 1] This application claims international priority from U.S. Provisional Patent Application No. 63 / 454,173, the contents of which are incorporated herein by reference and made a part hereof. [Example]

[0020] The gas valve cover and substrate carrier to which the gas valve cover is applied according to an embodiment of the present invention include a gas valve cover body and a plurality of elastic buckle arms, the elastic buckle arms being located at the gas opening in the base of the substrate carrier, thereby fixing the gas valve between the base and the bottom of the housing, and the upper surface of the gas valve cover being lower than the surface height of the base and the surface height of the gas valve, the gas valve cover can effectively fix the gas valve, preventing the gas valve from falling off, allowing for smooth gas supply operation, and improving the efficiency of the semiconductor manufacturing process.

[0021] Please refer to Figures 1 to 3. Figure 1 is a perspective view of a substrate carrier according to one embodiment of the present invention, Figure 2 is an exploded view of the substrate carrier of Figure 1, and Figure 3 is a partial cross-sectional view of a gas valve cover, a housing, and a base. The substrate carrier 100 of this embodiment includes a housing 110, a base 130, and a gas valve cover 150. The housing 110 has a bottom 111 and is used to accommodate a gas valve 170. The base 130 is disposed on the bottom 111 of the housing 110. A gas opening 130a is provided in the base 130 and is used to accommodate a portion of the gas valve 170. The surface height 176 of the gas valve 170 is equal to or less than the surface height 136 of the base 130. The gas valve cover 150 includes a gas valve cover body 151 and a plurality of elastic buckle arms 153. The elastic buckle arm 153 is mounted on the gas valve cover body 151 and located at the gas opening 130 a , thereby securing the gas valve 170 between the base 130 and the bottom 111 of the housing 110 .

[0022] As shown in FIG. 2, this embodiment is exemplified by four gas valve covers 150 and four gas openings 130a, some of which, the gas openings 130a, are used to introduce gas into the housing 110 (i.e., intake, specifically, to introduce gas into the storage space for accommodating multiple substrates within the housing 110). The other gas opening 130a is used to discharge gas from the housing 110 (i.e., exhaust, specifically, exhausting gas from the storage space). In this embodiment, two gas openings 130a are used for intake, and the other two gas openings 130a are used for exhaust. In practical applications, the number of intake and exhaust gas openings 130a can be adjusted according to the demand for air supply, and the number of gas valve covers 150 can also be adjusted accordingly.

[0023] Please refer to Figures 3 to 6. Figure 4 is a perspective view of a gas valve cover according to an embodiment of the present invention, Figure 5 is a side view of a gas valve cover according to an embodiment of the present invention, and Figure 6 is a plan view of a gas valve cover according to an embodiment of the present invention. In this embodiment, the gas valve cover body 151 of the gas valve cover 150 is a hollow ring 1511, one side of the elastic buckle arm 153 is connected to the outside of the hollow ring 1511 and is used to abut against the gas valve 170, and the other side of the elastic buckle arm 153 abuts against the side 131 facing the base 130 from the gas opening 130a, so that a portion of the elastic buckle arm 153 is located on the base 130 and the elastic buckle arm 153 is removably installed at the location of the gas opening 130a. The elastic buckle arm 153 extends outward in the radial direction r of the hollow ring 1511 and removably engages with the opening 130a of the base 130. In one embodiment, the elastic buckle arm 153 is, for example, a U-shaped hook, one side of which is connected to the hollow ring 1511 and the other side of which is used to elastically engage with the base 130. A snap elastic angle A is formed between the elastic buckle arm 153 and the gas valve cover body 151, and this snap elastic angle A ranges from 0 to 90 degrees. The smaller the snap elastic angle A, the shorter the elastic stroke of the elastic buckle arm 153, increasing its structural rigidity and providing a more stable engagement force. Conversely, the larger the snap elastic angle A, the longer the elastic stroke of the elastic buckle arm 153, increasing its structural elasticity and making it easier to remove. In practical applications, depending on the material of the elastic buckle arm 153 or the amount of airflow required for the air filling operation, elastic buckle arms 153 with different snap elastic angles A can be selected, thereby making a trade-off between the engagement force and the difficulty of removal.

[0024] In addition, in this embodiment, a pair of elastic buckle arms 153 is taken as an example, and the pair of elastic buckle arms 153 are positioned in opposite radial directions r, i.e., the angle between the two elastic buckle arms 153 is 180 degrees. However, the present invention is not limited to this, and the number of elastic buckle arms 153 may be three or more. When the number of elastic buckle arms 153 is three, the angle between two adjacent elastic buckle arms 153 may be, for example, 120 degrees. When the number of elastic buckle arms 153 is four, the angle between adjacent elastic buckle arms 153 may be, for example, 90 degrees. Although the different numbers of elastic buckle arms 153 have been described as being equally spaced on the hollow ring 1511, the elastic buckle arms 153 may also be unevenly spaced on the hollow ring 1511, and this can be determined according to the actual needs of the mechanism design.

[0025] Each elastic buckle arm 153 has a hook portion 1533, and the gas valve 170 is provided with a stopper portion 171. The hook portion 1533 faces the gas opening 130a and is engaged on the side portion 131 of the base 130, and the interconnection positions of the elastic buckle arms 153 and the outside of the hollow ring 1511 are used to abut against the stopper portion 171. In this way, the gas valve cover 150 fixes the gas valve 170. Since the interconnection positions of the elastic buckle arms 153 and the hollow ring 1511 are used to abut against the stopper portion 171 of the gas valve 170, the size of the hollow ring 1511 is closely related to the effect of fixing the gas valve 170 and also affects the gas supply operation. In one embodiment, the inner diameter D0 of the hollow ring 1511 is slightly smaller than the stopper portion 171 it abuts and is close to the gas valve soft rubber 177 of the gas valve 170 (details of the gas valve soft rubber will be described later). The smaller the inner diameter D0 of the hollow ring 1511, the less likely the gas valve 170 will fall off. The larger the inner diameter D0, the more likely it will interfere with the gas valve soft rubber 177. In practical applications, the size can be adjusted according to the dimensions of the external gas nozzle. In one embodiment, the inner diameter D0 of the hollow ring 1511 is approximately 25.0 mm to approximately 26.5 mm, which can provide good fixing effect and can accommodate the air supply range to which the external gas nozzle is docked. Furthermore, in one embodiment, the outer diameter D1 of the hollow ring 1511 is approximately 25.1 mm to approximately 28.5 mm.

[0026] As shown in FIG. 3 , the gas valve 170 of this embodiment further includes a gas valve soft rubber 177. The gas valve soft rubber 177 is used to tightly contact the external gas nozzle. It is located on one side of the gas valve 170 and is positioned at the gas opening 130a. The top surface 156 of the gas valve cover 150 is lower than the surface height 136 of the base 130 and the surface height 176 of the gas valve 170. Furthermore, the top surface 156 of the gas valve cover 150 is lower than the surface height 136 of the base 130 and the surface height 176 of the gas valve 170, with the difference being greater than 1.0 mm, thereby achieving a buffer safety value and providing stability when supplying air to the device body. When the external gas nozzle contacts the gas valve soft rubber 177 and operates the gas supply operation, the gas valve cover 150 does not interfere with it, avoiding affecting the gas tightness and the performance of the gas supply operation.

[0027] In another embodiment, as shown in FIGS. 2 and 3, the base 130 has a recess 130b extending outward from the side edge of the gas opening 130a, the hook portion 1533 of the elastic buckle arm 153 is engaged with the base 130 through the recess 130b, and the overlapping portion between the hook portion 1533 and the base 130 has a hook range C of 0.8 mm to 1.5 mm, which allows the elastic buckle arm 153 to be well engaged with the base 130 and at the same time facilitates disassembly by the user, achieving a good assembly and disassembly relationship.

[0028] A receiving portion 115 is provided in the bottom 111 of the housing 110, and the housing 110 receives the gas valve 170 through the receiving portion 115. The gas valve 170 may be a check valve and may have an elastic grommet 175 around it. When the gas valve 170 is received in the receiving portion 115, the elastic grommet 175 fits tightly against the receiving portion 115 to form an airtight state, preventing gas from flowing in and out of the housing 110 only through the central air flow passage 170a of the gas valve 170, thereby preventing leakage.

[0029] The gas valve cover 150 according to the embodiment of the present invention is installed on the gas opening 130a of the base 130 using the elastic buckle arm 153, thereby fixing the gas valve 170 between the base 130 and the bottom surface 111 of the housing 110. This prevents the gas valve 170 from falling off during the gas supply operation or when the substrate carrier 100 is moving, and allows the substrate carrier 100 to accurately supply gas. Furthermore, the detachable elastic buckle arm 153 also makes it easy to replace the gas valve 170.

[0030] Please refer to Figure 7, which is a partial cross-sectional view of a gas valve cover, housing, and base according to another embodiment of the present invention. Gas valve cover 250 includes a gas valve cover body 251 and a plurality of resilient buckle arms 253. Gas valve cover body 251 is mounted on base 230. Resilient buckle arms 253 are mounted on gas valve cover body 251, and resilient buckle arms 253 are mounted in gas openings 230a of base 230, thereby securing gas valve 270 between bottom 211 of housing 210 and base 230. An upper surface 256 of gas valve cover 250 is lower than surface height 236 of base 230 and surface height 276 of gas valve 270.

[0031] The gas valve cover body 251 of this embodiment is provided with a covering portion 255, which is located below the elastic buckle arm 253 and is spaced apart from the gas opening 230a, and the covering portion 255 covers a portion of the gas valve 270. In addition, the elastic buckle arm 253 of this embodiment may have, for example, the same structure as the elastic buckle arm 153 according to the embodiment of Figures 1 to 6, and detailed technical features thereof will not be described here.

[0032] In the gas valve cover 250 according to one embodiment of the present invention, an elastic buckle arm 253 is installed on the gas valve cover body 251, and the elastic buckle arm 253 is installed on the gas opening 230a, thereby fixing the gas valve 270 between the base 230 and the bottom surface 211 of the housing 210, preventing the gas valve 270 from falling off, enabling accurate air supply operation, and improving the convenience of replacing the gas valve 270.

[0033] Please refer to Figure 8, which is a partial cross-sectional view of a gas valve cover, housing, and base according to yet another embodiment of the present invention. Gas valve cover 350 includes a gas valve cover body 351 and a plurality of elastic buckle arms 353. Elastic buckle arms 353 are installed on gas valve cover body 351, and elastic buckle arms 353 are installed in gas openings 330a of base 330, thereby securing gas valve 370 between bottom 311 of housing 310 and base 330. An upper surface 356 of gas valve cover 350 is lower than surface height 336 of base 330 and surface height 376 of gas valve 370.

[0034] In this embodiment, one side of the elastic buckle arm 353 extends from the base 330 toward the gas opening 330a, and the other side of the elastic buckle arm 353 is connected to the gas valve cover body 351, which is used to abut against the gas valve 370. That is, the side of the base 330 facing the gas opening 330a is integrally formed with the elastic buckle arm 353 and the gas valve cover body 351. The elastic buckle arm provides a snap elastic angle A (see FIG. 5 and the corresponding structural function description), and one end of the gas valve cover body 351 is connected to the elastic buckle arm 353, and the other end is used to abut against the stopper portion of the gas valve 370 (see the stopper portion 171 of the gas valve 170 in FIG. 3). Even if the gas valve cover body 351 is designed as an insubstantial hollow ring structure, the same technical means and effects are maintained and the same technical purpose is achieved. Furthermore, the elastic buckle arm 353 of this embodiment may have, for example, the same structure as the elastic buckle arm 153 according to the embodiment of FIGS. 1 to 6, and detailed technical features thereof will not be described here.

[0035] In the gas valve cover 350 according to one embodiment of the present invention, the elastic buckle arm 353 is installed on the gas opening 330a, thereby fixing the gas valve 370 and preventing the gas valve 370 from falling off, enabling accurate gas supply operation and improving the convenience of replacing the gas valve assembly 370.

[0036] As described above, the gas valve cover and the substrate carrier to which it is applied according to the embodiment of the present invention include a gas valve body and an elastic buckle arm. The gas valve cover is an independent element or is combined as part of the base. The elastic buckle arm is installed on the gas opening and is used to secure the gas valve between the base and the bottom of the housing, preventing the gas valve from falling off the gas opening. Furthermore, the upper surface of the gas valve cover is lower than the surface height of the base and the surface height of the gas valve, thereby enabling accurate gas supply operations. Furthermore, the elastic buckle arm is installed on the gas valve cover body, allowing the gas valve cover to be quickly removed, which is advantageous in improving the convenience of gas valve replacement.

[0037] Although the present invention has been disclosed above by a number of embodiments, they are not intended to limit the present invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and therefore the scope of protection of the present invention should be determined by the appended claims. [Explanation of symbols]

[0038] 100 PCB Carriers 110 Housing 111 Bottom 115 Storage unit 130 base 130a Gas opening 130b recess 131 Side 136 Surface Height 150 Gas valve cover 151 Gas valve cover body 1511 Hollow Ring 153 Elastic Buckle Arm 1533 Hook part 156 Top surface 170 Gas valve 171 Stopper part 170a Air flow passage 175 Elastic Grommet 177 Gas valve soft rubber 176 Surface Height 210 Housing 211 Bottom 230 base 230a Gas opening 236 Surface Height 250 Gas valve cover 251 Gas valve body 255 Covering part 253 Elastic Buckle Arm 256 Top 270 Gas valve 276 Surface Height 310 Housing 311 Bottom 330 base 330a Gas opening 336 Surface Height 350 Gas valve cover 351 Gas valve body 353 Elastic Buckle Arm 356 Top 370 Gas valve 376 Surface Height A Snap Elastic Angle D0 Inner diameter D1 Outer diameter C Hook Range r radial direction

Claims

1. 1. A gas valve lid for application to a substrate carrier, comprising: The substrate carrier includes a housing and a base disposed at the bottom of the housing, the bottom can accommodate a gas valve, and the base is provided with a gas opening. The gas valve cover includes a gas valve cover body and a plurality of elastic buckle arms; The gas valve cover body is installed on the base, The plurality of elastic buckle arms are installed on the gas valve cover body, and the plurality of elastic buckle arms are located at the locations of the gas openings, thereby fixing the gas valve between the bottom of the housing and the base; The gas valve cover is characterized in that the upper surface of the gas valve cover is lower than the surface height of the base and the surface height of the gas valve.

2. The gas valve cover according to claim 1, wherein the upper surface of the gas valve cover is lower than the surface height of the base and the surface height of the gas valve, and the difference is greater than 1 mm.

3. The gas valve cover of claim 1, wherein there is a snap elastic angle between the plurality of elastic buckle arms and the gas valve cover body, and the snap elastic angle is in the range of 0 to 90 degrees.

4. 2. The gas valve cover according to claim 1, wherein the gas valve cover body is a hollow ring, one side of the plurality of elastic buckle arms is connected to the outside of the hollow ring and is used to abut against the gas valve, and the other side of the plurality of elastic buckle arms abuts against the side from the gas opening toward the base, so that a portion of the plurality of elastic buckle arms is located on the base, and the plurality of elastic buckle arms are detachably installed at the location of the gas opening.

5. 5. The gas valve cover of claim 4, wherein each of the elastic buckle arms has a hook portion, the gas valve is provided with a stopper portion, the hook portion is directed toward the gas opening and is engaged on the side portion of the base, and the interconnection position between the multiple elastic buckle arms and the outside of the hollow ring is used to abut against the stopper portion.

6. The gas valve cover of claim 5, wherein the base has a recess extending outward from the side edge of the gas opening, the hook portion is engaged on the base through the recess, and the overlapping portion of the hook portion and the base has a hook range of 0.8 mm to 1.5 mm.

7. 6. The gas valve cover of claim 5, wherein the inner diameter width of the hollow ring is sufficient to support the stopper portion of the gas valve, the inner diameter width of the hollow ring is 25 mm to 26.5 mm in diameter, and the outer diameter width of the hollow ring is 25.1 mm to 28.5 mm in diameter.

8. 2. The gas valve cover according to claim 1, wherein the gas valve cover body is provided with a covering portion, the covering portion being located below the plurality of elastic buckle arms and spaced apart from the gas opening, and the covering portion being used to cover a portion of the gas valve.

9. The gas valve cover of claim 1, wherein one side of the plurality of elastic buckle arms is formed extending from the base toward the gas opening, and the other side of the plurality of elastic buckle arms is connected to the gas valve cover body, and the gas valve cover body is used to abut against the gas valve.

10. A substrate carrier comprising a housing, a base, and the gas valve cover of claim 1; the housing has a bottom, the bottom being adapted to accommodate a gas valve; the base is disposed at the bottom of the housing, the base has a gas opening, the gas opening is used to accommodate a portion of the gas valve, and the surface height of the gas valve is equal to or lower than the surface height of the base; The substrate carrier is characterized in that the gas valve cover is provided between the bottom of the housing and the base, fixing the gas valve and preventing the gas valve from falling out of the gas opening.

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