Control device for controlling a vibration device and method for controlling a vibration device

Abstract

A method according to the present disclosure involves controlling, by a control device, a vibration apparatus provided with a piezoelectric element, the method comprising: a step for changing the frequency of a driving signal for driving the piezoelectric element; a step for measuring the value relating to the impedance of the piezoelectric element; and a step for determining, on the basis of change in the value relating to the impedance of the piezoelectric element, a driving frequency for driving the piezoelectric element. The step for changing the frequency of the driving signal involves changing the clock width of some of a plurality of clock periods included in the driving signal such that the clock width of said some of the clock periods differs from the clock width of the other clock periods.

Description

[Technical Field]

[0001] The present disclosure relates to a control device for controlling a vibration device and a method for controlling a vibration device. [Background technology]

[0002] The resonance frequency of a piezoelectric element provided in a vibrating device or the like changes due to various factors. Patent Document 1 discloses a piezoelectric motor drive circuit that controls and drives the piezoelectric element so that the AC current flowing through the piezoelectric element remains approximately constant, even if the resonance frequency characteristics of the piezoelectric element change due to fluctuations in the ambient temperature, etc. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 8-126357 Summary of the Invention [Problem to be solved by the invention]

[0004] In recent years, in vibration devices including piezoelectric elements, there has been a demand for appropriate control of the drive frequency for driving the piezoelectric elements.

[0005] Therefore, an object of the present disclosure is to provide a control device for controlling a vibration device and a method for controlling a vibration device that can appropriately control the drive frequency that drives a piezoelectric element. [Means for solving the problem]

[0006] In one aspect of the method according to the present disclosure, A method for controlling a vibration device including a piezoelectric element by a control device, comprising: changing the frequency of a drive signal that drives the piezoelectric element; measuring a value related to the impedance of the piezoelectric element; determining a drive frequency for driving the piezoelectric element based on the measured value related to the impedance of the piezoelectric element; Including, the step of changing the frequency of the drive signal includes changing clock widths of some of the multiple clocks included in the drive signal so that the clock widths of the some of the multiple clocks are different from the clock widths of the other clocks; It has.

[0007] A control device according to one aspect of the present disclosure includes: A control device for controlling a vibration device including a piezoelectric element, a processor; a memory storing instructions to be executed by the processor; Equipped with The instruction: changing the frequency of a drive signal that drives the piezoelectric element from the processor; measuring a value related to the impedance of the piezoelectric element; determining a drive frequency for driving the piezoelectric element based on the measured value related to the impedance of the piezoelectric element; Including, the step of changing the frequency of the drive signal includes changing clock widths of some of the multiple clocks included in the drive signal so that the clock widths of the some of the multiple clocks are different from the clock widths of the other clocks; It has. [Effects of the Invention]

[0008] According to the control device for a vibration device and the control method for a vibration device according to the present disclosure, the drive frequency for driving the piezoelectric element can be appropriately controlled. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a perspective view for explaining the configuration of an imaging unit according to the first embodiment. FIG. [Figure 2]1 is a schematic cross-sectional view showing a cross-sectional configuration of an imaging unit according to a first embodiment. [Figure 3] 1 is a schematic cross-sectional view showing a cross-sectional configuration of a vibration device according to a first embodiment. [Figure 4] 2 is an exploded perspective view showing each component of the vibration device according to the first embodiment. FIG. [Figure 5] 2 is a block diagram illustrating the configuration of a control device that controls the vibration device according to the first embodiment. FIG. [Figure 6] 4 is a transition diagram of operation modes for explaining the operation of the control device that controls the vibration device according to the first embodiment. FIG. [Figure 7] 5 is a flowchart illustrating the operation of the control device that controls the vibration device according to the first embodiment. [Figure 8] This shows the relationship between the resonant frequency and impedance of a piezoelectric element when the effective voltage is constant. [Figure 9A] 1 shows the relationship between the resonant frequency and impedance of a piezoelectric element when the effective voltage is changed. [Figure 9B] 1 shows the relationship between the resonant frequency and impedance of a piezoelectric element when the effective voltage is changed. [Figure 10] 10 is a flowchart illustrating the operation of the control device that controls the vibration device according to the first modification of the first embodiment. [Figure 11] 10 is a flowchart illustrating the operation of the control device that controls the vibration device according to the second modification of the first embodiment. [Figure 12] 10 is a flowchart illustrating the operation of the control device that controls the vibration device according to the second embodiment. [Figure 13] 10 shows an example of a plurality of clocks included in a drive signal, the clock width of which is changed, in a method for controlling a vibration device by a control device according to the second embodiment. [Figure 14] 10 shows the relationship between the frequency of a drive signal and the resonance frequency in a graph showing the relationship between the resonance frequency and impedance of a piezoelectric element. [Figure 15]10 is a flowchart illustrating the operation of the control device that controls the vibration device according to the first modification of the second embodiment. [Figure 16] 10 shows an example of a plurality of clocks included in a drive signal, the clock width of which is changed, in a method for controlling a vibration device by a control device according to Modification 2 of Embodiment 2. DETAILED DESCRIPTION OF THE INVENTION

[0010] (Background to this disclosure) Imaging units are installed at the front or rear of a vehicle, and images captured by the imaging units are used to control safety devices and autonomous driving. Because these imaging units are often installed outside the vehicle, raindrops, mud, dust, and other foreign matter can adhere to transparent bodies such as lenses and protective glass that cover the exterior. When foreign matter adheres to the transparent bodies, the foreign matter is reflected in the images captured by the imaging unit, making it difficult to obtain clear images.

[0011] Therefore, vibration devices have been developed that vibrate the light-transmitting body to remove foreign matter. Such vibration devices use, for example, a piezoelectric element to vibrate the light-transmitting body, but the resonance frequency of the piezoelectric element changes due to various factors, such as the heat generated by the piezoelectric element and foreign matter attached to the light-transmitting body. Therefore, unless the driving frequency for driving the piezoelectric element is appropriately controlled, the light-transmitting body cannot be vibrated efficiently.

[0012] For example, a control device has been developed that searches for the resonant frequency of a piezoelectric element in order to control the drive frequency that drives the piezoelectric element. The higher the search performance for the resonant frequency of the piezoelectric element, the more appropriately the drive frequency of the piezoelectric element can be controlled. For example, one method for improving the search performance for the resonant frequency is to increase the performance of the processor in the control device. However, increasing the performance of the processor in the control device leads to problems such as higher manufacturing costs and a larger processor mounting area.

[0013] Therefore, the present inventors have conducted extensive research to solve these problems and have arrived at the present disclosure.

[0014] In one aspect of the method according to the present disclosure, A method for controlling a vibration device including a piezoelectric element by a control device, comprising: changing the frequency of a drive signal that drives the piezoelectric element; measuring a value related to the impedance of the piezoelectric element; determining a drive frequency for driving the piezoelectric element based on the measured value related to the impedance of the piezoelectric element; Including, the step of changing the frequency of the drive signal includes changing clock widths of some of the multiple clocks included in the drive signal so that the clock widths of the some of the multiple clocks are different from the clock widths of the other clocks; It has.

[0015] With this configuration, the driving frequency for driving the piezoelectric element can be appropriately controlled, and manufacturing costs can be reduced.

[0016] In the method, the several clocks may be periodically positioned in the plurality of clocks.

[0017] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0018] In the method, the several clocks may be positioned at equal intervals in the plurality of clocks.

[0019] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0020] In the method, the clock width of some of the clocks among the plurality of clocks may be changed to 0.5 times or more and less than 1 time, or more than 1 time and less than 1.5 times the clock width of the other clocks.

[0021] With this configuration, the drive frequency of the piezoelectric element can be controlled more appropriately.

[0022] In the method, the clock width of the clocks in the range of 0.1% to 99.9% of the plurality of clocks may be changed.

[0023] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0024] In the method, the value related to the impedance is an impedance value, The step of determining the drive frequency includes: determining whether a value related to the impedance is equal to or less than a predetermined threshold; determining, as the drive frequency, a frequency of the drive signal when it is determined that the value related to the impedance is equal to or less than a predetermined threshold value; may have

[0025] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0026] The method may include a step of further changing the clock width if, in the step of determining the drive frequency, the drive frequency cannot be determined based on a value related to the impedance measured after changing the clock width.

[0027] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0028] In the method, the step of changing the frequency of the drive signal includes changing the frequency while keeping the clock widths of the plurality of clocks constant; the step of measuring a value related to the impedance includes measuring a value related to the impedance while the frequency is changed with a clock width kept constant; In the step of determining the drive frequency, if the drive frequency cannot be determined based on values related to the impedance measured while the frequency is changed with the clock width kept constant, the clock width may be changed.

[0029] With this configuration, the drive frequency of the piezoelectric element can be controlled more appropriately.

[0030] A control device according to one aspect of the present disclosure includes: A control device for controlling a vibration device including a piezoelectric element, a processor; a memory storing instructions to be executed by the processor; Equipped with The instruction: Varying the frequency of a drive signal sent from the processor to the piezoelectric element; measuring a value related to the impedance of the piezoelectric element; determining a drive frequency for driving the piezoelectric element based on the measured value related to the impedance of the piezoelectric element; Including, the step of changing the frequency of the drive signal includes changing clock widths of some of the multiple clocks included in the drive signal so that the clock widths of the some of the multiple clocks are different from the clock widths of the other clocks; It has.

[0031] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled, and manufacturing costs can be reduced.

[0032] In the control device, the several clocks may be positioned periodically among the plurality of clocks.

[0033] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0034] In the control device, the several clocks may be positioned at equal intervals among the plurality of clocks.

[0035] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0036] In the control device, the clock width of some of the plurality of clocks may be changed to 0.5 times or more and less than 1 time, or more than 1 time and less than 1.5 times the clock width of the other clocks.

[0037] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0038] The control device may change the clock width of a clock that is between 0.1% and 99.9% of the plurality of clocks.

[0039] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0040] the value related to the impedance is an impedance value, The step of determining the drive frequency includes: determining whether a value related to the impedance is equal to or less than a predetermined threshold; determining, as the drive frequency, a frequency of the drive signal when it is determined that the value related to the impedance is equal to or less than a predetermined threshold value; may have

[0041] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0042] The instructions may include a step of further changing the clock width if, in the step of determining the drive frequency, the drive frequency cannot be determined based on a value related to the impedance measured after changing the clock width.

[0043] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0044] the step of changing the frequency of the drive signal includes changing the frequency while keeping the clock widths of the plurality of clocks constant; the step of measuring a value related to the impedance includes measuring a value related to the impedance while the frequency is changed with a clock width kept constant; In the step of determining the drive frequency, if the drive frequency cannot be determined based on values related to the impedance measured while the frequency is changed with the clock width kept constant, the clock width may be changed.

[0045] With this configuration, the drive frequency of the piezoelectric element can be appropriately controlled.

[0046] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. In each drawing, elements are exaggerated for ease of explanation.

[0047] As used herein, terms such as "first," "second," etc. are used for descriptive purposes only and should not be understood as expressing or implying the relative importance or ranking of technical features. Features qualified as "first" and "second" expressly or imply the inclusion of one or more of such features.

[0048] (Embodiment 1) <Overall structure of the vibration device> An imaging unit including a vibration device according to the first embodiment will be described below with reference to the drawings. Fig. 1 is a perspective view for explaining the configuration of the imaging unit according to the first embodiment. Fig. 2 is a schematic cross-sectional view showing the cross-sectional configuration of the imaging unit according to the first embodiment. Fig. 3 is a schematic cross-sectional view showing the cross-sectional configuration of the vibration device according to the first embodiment. Fig. 4 is an exploded perspective view showing each component of the vibration device according to the first embodiment.

[0049] As shown in FIGS. 1 and 2, the imaging unit 100 includes a housing 1, a vibration device 10, and an imaging device 5.

[0050] 1 and 2, the housing 1 houses the imaging device 5. The housing 1 exposes a part of the vibration device 10. The housing 1 is made of a material such as resin.

[0051] 3 and 4, the vibration device 10 includes a light-transmitting body 2, a vibrating body 12 that vibrates the light-transmitting body 2, and a retainer 13 that supports the light-transmitting body 2 at its outer periphery. As shown in FIG. 1, in the vibration device 10, the light-transmitting body 2, the retainer 13, and a portion of the vibrating body 12 are exposed from holes provided in the housing 1. The vibration device 10 removes foreign matter adhering to the light-transmitting body 2 by vibrating the light-transmitting body 2.

[0052] The light-transmitting body 2 is placed in front of the imaging device 5. The vibration device 10 removes foreign matter adhering to the light-transmitting body 2. The light-transmitting body 2 has a light-transmitting property that allows energy rays or light of a wavelength detected by the imaging device 5 to pass through. The light-transmitting body 2 may also be a lens with a light-collecting property.

[0053] The vibrating body 12 vibrates the light-transmitting body 2 to remove any foreign matter adhering thereto. As shown in FIG. 4, the vibrating body 12 has a cylindrical shape. The vibrating body 12 is provided with a hollow circular, i.e., annular, piezoelectric element 14 on the surface opposite to the surface that contacts the light-transmitting body 2, for example. Furthermore, the piezoelectric element 14 is provided with a wiring 15 having a hollow circular, i.e., annular, electrode on the surface opposite to the surface that contacts the vibrating body 12. By applying a voltage to the wiring 15 to vibrate the piezoelectric element 14 in the penetration direction of the cylindrical vibrating body 12, the light-transmitting body 2 can be vibrated in the penetration direction of the vibrating body 12 via the vibrating body 12.

[0054] The position of the piezoelectric element 14 provided on the vibrating body 12 is not limited to the position shown in FIG.

[0055] The retainer 13 is connected to the vibrating body 12. The retainer 13 and the vibrating body 12 are each threaded, and the retainer 13 and the vibrating body 12 are connected by fitting together their respective threaded portions. The material of the retainer 13 may be, for example, a metal such as stainless steel, aluminum, iron, titanium, or duralumin, or may be plastic.

[0056] The vibration device 10 may further have a configuration for removing foreign matter adhering to the light-transmitting body 2 by discharging a cleaning liquid (cleaning body) onto the light-transmitting body 2. For example, the cleaning nozzle 3 shown in FIG. 1 for discharging a cleaning liquid onto the light-transmitting body 2 removes foreign matter adhering to the light-transmitting body 2 by discharging the cleaning liquid onto the light-transmitting body 2.

[0057] The imaging device 5 captures an image of an imaging target outside the vibration device 10 through the light-transmitting body 2 of the vibration device 10. The imaging device 5 includes, for example, an optical element, an imaging element, a sensor component, and the like.

[0058] Next, the configuration of the control device 50 that controls the vibration device 10 will be described with reference to the drawings. Fig. 5 is a block diagram for explaining the configuration of the control device that controls the vibration device according to the first embodiment.

[0059] The control device 50 includes a processor 20, a piezoelectric driving unit 30, an impedance detection unit 70, and a power supply circuit 80. The processor 20 is a control unit that processes the imaging signal from the imaging device 5 and supplies a control signal to the piezoelectric driving unit 30.

[0060] The processor 20 includes a CPU (Central Processing Unit) as a control center, a ROM (Read Only Memory) that stores programs and control data for the CPU to operate, a RAM (Random Access Memory) that functions as a work area for the CPU, an input / output interface for maintaining signal consistency with peripheral devices, etc. The processor 20 may also be a microcomputer, an MPU (Micro-Processing Unit), a GPU (Graphics Processing Unit), a DSP (Digital Signal Processor), an FPGA (Field Programmable Gate Array), or an ASIC (Application Specific Integrated Circuit).

[0061] The piezoelectric driving unit 30 generates a driving signal according to a driving voltage and frequency for driving the piezoelectric element 14 in response to a control signal from the processor 20 .

[0062] The piezoelectric element 14 vibrates when a drive signal generated by the piezoelectric driver 30 is applied to it. The vibration of the piezoelectric element 14 vibrates the vibrating body 12 and the light-transmitting body 2, and foreign matter is removed. Examples of materials that form the piezoelectric element 14 include barium titanate (BaTiO3), lead zirconate titanate (PZT: PbTiO3 PbZrO3), lead titanate (PbTiO3), lead metaniobate (PbNb2O6), bismuth titanate (Bi4Ti3O 12 Suitable piezoelectric ceramics such as (K,Na)NbO3, or suitable piezoelectric single crystals such as LiTaO3, LiNbO3, etc. can be used.

[0063] When vibrating the piezoelectric element 14, the impedance detection section 70 monitors a value relating to the impedance of the piezoelectric driving section 30. The value relating to the impedance is, for example, a current, an impedance, or the like.

[0064] The power supply circuit 80 outputs an AC signal. The effective voltage of the power supply circuit 80 is, for example, 0 V or more and 70 V or less.

[0065] The piezoelectric driver 30 and the impedance detector 70 can be realized, for example, by electronic circuits. The functions of the piezoelectric driver 30 and the impedance detector 70 may be configured solely by hardware, or may be realized by combining hardware and software. The piezoelectric driver 30 and the impedance detector 70 may realize predetermined functions by reading data and programs stored in a storage unit such as a memory and performing various arithmetic processing.

[0066] Next, the operation of the control device 50 will be described based on a transition diagram and a flowchart. Fig. 6 is a transition diagram of operation modes for explaining the operation of the control device that controls the vibration device according to embodiment 1. Fig. 7 is a flowchart for explaining the operation of the control device that controls the vibration device according to embodiment 1.

[0067] As shown in Fig. 6, the control device 50 drives the piezoelectric element 14 in a search mode and a drive mode. In the search mode, the piezoelectric element 14 is vibrated to determine the resonance frequency fc of the piezoelectric element 14. In the drive mode, the vibrating body 12 is vibrated at the resonance frequency fc determined in the search mode, thereby vibrating the piezoelectric element 14 to remove foreign matter adhering to the surface of the light-transmitting body 2. The search mode and the drive mode are performed alternately. Detailed steps of the search mode are described below.

[0068] The search mode in the first embodiment includes a first search step and a second search step. In the first search step, the frequency fr of the drive signal is swept between fmin and fmax to search for the resonant frequency fc of the piezoelectric element 14. Sweeping means gradually changing the frequency fr over time. For example, it means increasing the frequency fr by Δf every time Δt elapses. Furthermore, fmin is the minimum value of the frequency fr of the drive signal, and fmax is the maximum value of the frequency fr of the drive signal. The second search step is performed if the resonant frequency fc cannot be found in the first search step. In the second search step, the resonant frequency fc is searched for by changing the drive voltage Vpp applied to the piezoelectric element 14.

[0069] First, the control device 50 sets the drive voltage Vpp of the drive signal that drives the piezoelectric element 14 to voltage V1 (step S1), and sets the update count Nv of the drive voltage Vpp to 1 (step S2). The drive voltage Vpp is, for example, an AC voltage. The effective voltage of voltage V1 is, for example, between 0V and 70V.

[0070] Next, the control device 50 sets the frequency fr of the drive signal to a frequency fmin (step S3). The frequency fmin is, for example, not less than 20 kHz and not more than 1 MHz.

[0071] Next, the control device 50 applies a drive signal having the drive voltage Vpp set in step S1 and the frequency fr set in step S3 to the piezoelectric element 14 (step S4).

[0072] Next, the control device 50 measures the impedance value Z of the piezoelectric element 14 at the frequency fr of the drive signal (step S5).

[0073] Next, the control device 50 determines whether the measured impedance value Z is equal to or less than a predetermined threshold value Zth (step S6). The threshold value Zth is, for example, greater than 0Ω and equal to or less than 1 kΩ.

[0074] Here, the relationship between the impedance and resonant frequency of the piezoelectric element 14 will be described with reference to FIG. 8. FIG. 8 shows the relationship between the resonant frequency fc and the impedance Z of the piezoelectric element 14 when the drive voltage Vpp is constant. In FIG. 8, the horizontal axis represents frequency [kHz] and the vertical axis represents impedance [Ω]. In the graph shown in FIG. 8, the frequency at which the impedance changes suddenly is the resonant frequency fc of the piezoelectric element 14. Therefore, when the frequency fr of the drive signal matches the resonant frequency fc of the piezoelectric element 14 or is close to the resonant frequency fc of the piezoelectric element 14, the measured impedance value Z of the piezoelectric element 14 is equal to or less than the threshold value Zth.

[0075] Therefore, when it is determined that the impedance value Z measured in step S5 is equal to or less than the threshold value Zth, the control device 50 determines the frequency fr of the drive signal as the resonance frequency fc of the piezoelectric element 14 (step S7).

[0076] Step S 7 Next, the control device 50 operates in a drive mode in which the piezoelectric element 14 is vibrated at the resonance frequency fc to remove foreign matter adhering to the light-transmitting body 2 (step S8). Specifically, the control device 50 determines the resonance frequency fc of the piezoelectric element 14 as the drive frequency, and drives the piezoelectric element 14 at the determined drive frequency. In the drive mode, in conjunction with the vibration of the piezoelectric element 14, a cleaning liquid may be ejected from the cleaning nozzle 3 shown in FIG. 1 to remove foreign matter adhering to the light-transmitting body 2.

[0077] If it is determined in step S6 that the measured impedance value Z is not equal to or less than the threshold value Zth, the control device 50 updates the frequency fr of the drive signal to fr+Δf (step S9), where Δf is, for example, 1 Hz or more and 1 kHz or less.

[0078] Next, the control device 50 determines whether the frequency fr of the drive signal exceeds a frequency fmax (step S10). The frequency fmax is, for example, 1 MHz or less.

[0079] If it is determined in step S10 that the frequency fr of the drive signal does not exceed the frequency fmax, the process returns to step S4.

[0080] The above steps S1 to S10 constitute the first search step. If it is determined in step S10 that the frequency fr of the drive signal exceeds the frequency fmax, the following second search step is carried out.

[0081] If it is determined in step S10 that the frequency fr of the drive signal exceeds the frequency fmax, the control device 50 changes the voltage waveform of the drive voltage Vpp. This changes the voltage waveform of the drive signal applied to the piezoelectric element 14. For example, the effective voltage of the voltage waveform changes. For example, the amplitude of the voltage waveform changes. For example, the amplitude of the voltage waveform increases. For example, the amplitude of the voltage waveform decreases. Specifically, the drive voltage Vpp is updated to Vpp+ΔV (step S11). ΔV may be a positive value or a negative value. That is, the amplitude of the voltage waveform applied to the piezoelectric element 14 increases or decreases. The absolute value of ΔV is, for example, greater than 0 V and equal to or less than 70 V.

[0082] Next, the control device 50 updates the number of updates Nv of the drive voltage Vpp to Nv+1 (step S12).

[0083] Next, the control device 50 determines whether the number of updates Nv updated in step S12 exceeds the maximum number of updates Nvmax (step S13). The maximum number of updates Nvmax may be a predetermined number. Nvmax is, for example, 1 time or more and 10 times or less.

[0084] If it is determined in step S13 that the number of updates Nv exceeds Nvmax, the control device 50 detects an error (ERROR) (step S14) and ends the operation in the search mode (step S15).

[0085] If it is determined in step S13 that the number of updates Nv does not exceed Nvmax, the process returns to step S3.

[0086] Here, referring to FIGS. 9A and 9B, the relationship between the resonant frequency and impedance of the piezoelectric element 14 when the effective voltage of the drive voltage Vpp is changed will be described. In FIG. 9A, the horizontal axis represents the effective voltage [V], and the vertical axis represents the resonant frequency [Hz]. FIG. 9A shows an example of the change in the resonant frequency fc of the piezoelectric element 14 when the effective voltage is changed from 10 V to 50 V in increments of 10. As can be seen from the graph shown in FIG. 9A, the resonant frequency fc of the piezoelectric element 14 decreases as the effective voltage increases. In FIG. 9B, the horizontal axis represents frequency [kHz], and the vertical axis represents impedance [Ω]. The graph shown in FIG. 9B illustrates the change in the resonant frequency when the effective voltage is changed from Vpp1 to Vpp3. For the effective voltages shown in FIG. 9B, Vpp1 > Vpp2 > Vpp3. The frequency f1 in FIG. 9B is an example of the frequency fr of the drive signal where fmin≦f1≦fmax. From the graph in FIG. 9B, when the effective voltage is Vpp1 or Vpp2, the impedance value Z is greater than the threshold value Zth with a drive signal of frequency f1 or frequency f1+Δf, and the resonance frequency fc cannot be found. However, when the effective voltage is Vpp3, the drive signal of frequency f1 can be used to find a frequency at which the impedance value Z is equal to or less than the threshold value Zth. That is, in step S11, the drive voltage Vpp is set to Vpp+ΔV to By changing the frequency fc and then performing step S3 and subsequent steps, the resonance frequency fc of the piezoelectric element 14 can be made to match the frequency fr of the drive signal or to approach the frequency fr of the drive signal.

[0087] Therefore, by performing the second search step of the above control method, it is possible to improve the search performance for the resonance frequency fc of the piezoelectric element 14. Furthermore, the above control method can improve the search performance for the resonance frequency without changing the performance of the processor 20, thereby reducing manufacturing costs.

[0088] (First Modification of First Embodiment) In the first embodiment, the second search step is performed after the first search step, but the first search step can be omitted. The operation of the vibration device 10 of the imaging unit 100 in this modification will be described with reference to Fig. 10. Fig. 10 is a flowchart for explaining the operation of the control device that controls the vibration device according to this modification.

[0089] First, the control device 50 sets the frequency fr of the drive signal to f0 (step S101), where f0 is, for example, an arbitrary resonance frequency searched for in the preceding search mode.

[0090] Next, the control device 50 sets the driving voltage Vpp to V1 (step S102), and sets the number of updates Nv of the driving voltage Vpp to 1 (step S103).

[0091] Next, the control device 50 applies a drive signal having the frequency fr set in step S101 and the drive voltage Vpp set in step S102 to the piezoelectric element 14 (step S104).

[0092] Next, the control device 50 measures the impedance value Z of the piezoelectric element 14 at the frequency fr of the drive signal (step S105).

[0093] Next, the control device 50 determines whether the measured impedance value is equal to or less than a predetermined threshold value Zth (step S106).

[0094] If it is determined that the impedance value Z measured in step S106 is equal to or less than the predetermined threshold value Zth, the control device 50 determines the frequency fr of the drive signal as the resonance frequency fc of the piezoelectric element 14 (step S107).

[0095] After step S107, the control device 50 operates in a drive mode in which the piezoelectric element 14 is vibrated at the resonance frequency fc to remove foreign matter adhering to the light-transmitting body 2 (step S108). Specifically, the control device 50 determines the resonance frequency fc of the piezoelectric element 14 as the drive frequency, and drives the piezoelectric element 14 at the determined drive frequency. In the drive mode, in conjunction with the vibration of the piezoelectric element 14, a cleaning liquid may be ejected from the cleaning nozzle 3 shown in FIG. 1 to remove foreign matter adhering to the light-transmitting body 2.

[0096] If it is determined in step S106 that the impedance value Z exceeds the predetermined threshold value Zth, the control device 50 updates the drive voltage Vpp to Vpp+ΔV (step S109).

[0097] Next, the control device 50 updates the number of updates Nv of the drive voltage Vpp to Nv+1 (step S110).

[0098] Next, the control device 50 determines whether the number of updates Nv updated in step S110 exceeds the maximum number of updates Nvmax (step S111).

[0099] If it is determined in step S111 that the number of updates Nv exceeds Nvmax, the control device 50 detects an error (ERROR) (step S112) and ends the operation in the search mode (step S113).

[0100] If it is determined in step S111 that the number of updates Nv does not exceed Nvmax, the process returns to step S104.

[0101] [effect] The above control method can improve the search performance for the resonance frequency fc of the piezoelectric element 14. Furthermore, the above control method can simplify the control steps and shorten the time required for frequency search.

[0102] (Modification 2 of Embodiment 1) In the above control method, the control device 50 detects the impedance value Z of the piezoelectric element 14, but the control device 50 may detect the current value I of the piezoelectric element 14.

[0103] Since the current value is the reciprocal of the impedance, when the control device 50 detects the current value I of the piezoelectric element 14, it measures the current value I in step S5 of the above control method, and determines in step S6 whether the current value I is greater than a predetermined threshold value Ith.

[0104] FIG. 11 shows a flowchart for explaining the operation of the control device that controls the vibration device according to this modification.

[0105] First, steps S1 to S4 of the first embodiment shown in FIG. 7 are carried out.

[0106] Next, the control device 50 measures the current value I of the piezoelectric element 14 (step S5A).

[0107] Next, the control device 50 determines whether the current value I measured in step S5A is greater than a predetermined threshold value Ith (step S6A).

[0108] If it is determined in step S6A that the current value I is greater than the predetermined threshold value Ith, steps S7 and S8 of the first embodiment shown in FIG. 7 are carried out.

[0109] If it is determined in step S6A that the current value I is not greater than the predetermined threshold value Ith, steps S9 to S15 of the first embodiment shown in FIG. 7 are carried out.

[0110] [effect] The above control method makes it possible to appropriately control the drive frequency that drives the piezoelectric element 14. Specifically, it is possible to appropriately determine the drive frequency because it is possible to improve the search performance for the resonance frequency of the piezoelectric element 14. Furthermore, the above control method makes it easy to measure because the measurement value for determining the resonance frequency fc of the piezoelectric element 14 is the current value I of the piezoelectric element 14.

[0111] (Embodiment 2) The second embodiment differs from the first embodiment in the method of searching for the resonant frequency in the search mode. The search mode in the second embodiment includes a first search step and a third search step. The first search step differs from the first embodiment in that the frequency fr of the drive signal is swept between fmin and fmax to search for the resonant frequency fc of the piezoelectric element 14. The third search step is performed when the resonant frequency fc of the piezoelectric element 14 cannot be found in the first search step. The third search step searches for the resonant frequency fc of the piezoelectric element 14 by changing the clock width of some of the multiple clocks included in the drive signal. Here, the clock width may be changed by changing the duty ratio.

[0112] 12 is a flowchart illustrating the operation of the control device that controls the vibration device according to embodiment 2. A control method for the vibration device according to embodiment 2 will be described with reference to FIG.

[0113] First, the control device 50 sets the drive voltage Vpp to Vdr (step S201). The effective voltage of the voltage Vdr is, for example, 0V or more and 70V or less.

[0114] Next, the control device 50 sets the clock width a of the multiple clocks included in the drive signal to amin (step S202), and sets the number of updates Nc of the clock width a to 1 (step S203). amin is the minimum value of the clock width a, and is, for example, a preset value. amin is, for example, not less than 1 usec (1 MHz) and not more than 50 usec (20 kHz). Here, since the frequency fr of the drive signal depends on the clock width, when the clock width a is set, the frequency fr of the drive signal is set to fr(a). Furthermore, when the clock width of the multiple clocks is a single width a, fr = fr(a) = a. Therefore, when the clock width a is set to amin, the frequency fr is set to fr(a) = amin = fmin.

[0115] Next, the control device 50 applies a drive signal having the drive voltage Vpp set in step S201 and the frequency fr set in step S202 to the piezoelectric element 14 (step S204).

[0116] Next, the control device 50 measures the impedance value Z of the piezoelectric element 14 at the frequency fr of the drive signal (step S205).

[0117] The control device 50 determines whether the measured impedance value Z is equal to or less than a predetermined threshold value Zth (step S206).

[0118] If it is determined in step S206 that the measured impedance value Z is equal to or less than the threshold value Zth, the control device 50 determines the frequency fr of the drive signal as the resonance frequency fc of the piezoelectric element 14 (step S207).

[0119] After step S207, the control device 50 operates in a drive mode (step S208) in which the piezoelectric element 14 is vibrated at the resonance frequency fc determined in step S207 to remove foreign matter adhering to the light-transmitting body 2. In the drive mode, in conjunction with the vibration of the piezoelectric element 14, a cleaning liquid may be ejected from the cleaning nozzle 3 shown in FIG. 1 to remove foreign matter adhering to the light-transmitting body 2.

[0120] If it is determined in step S206 that the measured impedance value Z is not equal to or less than the threshold value Zth, the control device 50 updates the clock width a of the multiple clocks included in the drive signal to a+Δa (step S209). As a result, the frequency fr of the drive signal is updated to fr(a+Δa)=a+Δa. Δa is, for example, 1 Hz or more and 1 kHz or less.

[0121] Next, the control device 50 updates the number of updates Nc of the clock width a to Nc+1 (step S210).

[0122] Next, the control device 50 determines whether the number of updates Nc updated in step S210 exceeds a predetermined threshold value Ncth1 (step S211). Ncth1 is, for example, 1 time or more and 10 times or less.

[0123] If it is determined in step S211 that the number of updates Nc does not exceed Ncth1, step S20 4 Return to.

[0124] The above steps S201 to S211 constitute the first search step in this embodiment. When it is determined in step S211 that the number of updates Nc exceeds Ncth1, the frequency fr of the drive signal has reached fmax. Therefore, in the first search step, the frequency fr of the drive signal is swept from fmin to fmax. That is, in the first search step, the clock width changes from amin to amax. When it is determined in step S211 that the number of updates Nc exceeds Ncth1, the following third search step is performed.

[0125] If it is determined in step S211 that the update count Nc exceeds Ncth1, the control device 50 changes the clock widths of some of the multiple clocks so that they are different from the clock widths of the other clocks (step S212). In other words, some of the clocks are referred to as multiple first clocks and the remaining clocks as multiple second clocks. The clock widths of the multiple first clocks are maintained at amax, and the clock widths of the multiple second clocks are changed to a1. The clock width a1 is, for example, less than 1 time the clock width amax, preferably 0.5 times or more and less than 1 time, and more preferably 0.99 times or more and less than 1 time. That is, the control device 50 changes the clock widths of some of the multiple clocks to less than 1 time the clock widths of the other clocks, preferably 0.5 times or more and less than 1 time, and more preferably 0.99 times or more and less than 1 time. The width a1 is, for example, amax-Δa, where Δa is, for example, the same as Δa in step S209. As the clock width a is changed, the frequency fr of the drive signal is changed to fr(a(amax, a1)). Note that in this embodiment, the widths of the second clocks among the multiple clocks are set to be less than one time the widths of the first clocks, but this is not limited to this, and the widths of the second clocks among the multiple clocks may be greater than one time the widths of the first clocks. In this case, for example, the widths of the second clocks are greater than one time and not more than 1.5 times the widths of the first clocks, and preferably greater than one time and not more than 1.01 times the widths of the first clocks.

[0126] Furthermore, in step S212, the control device 50 changes the clock width of, for example, 0.1% to 99.9% of the clocks included in the drive signal. A specific example will be described with reference to Fig. 13. Fig. 13 shows an example of the clocks included in the drive signal whose clock widths have been changed. As shown in Fig. 13, the control device 50 changes the clock width of 1 / 2 (50%) of the clocks included in the drive signal to a width amax, and changes the clock width of the remaining 1 / 2 (50%) of the clocks to a width a1.

[0127] Furthermore, in step S212, the control device 50 periodically changes the clock widths of the multiple clocks, for example. As a result, some clocks are periodically positioned among the multiple clocks. For example, some clocks are positioned at equal intervals among the multiple clocks. Specifically, the control device 50 periodically changes the clock widths of the multiple clocks so that clocks with width amax and clocks with width a1 are alternately included among the multiple clocks included in the drive signal.

[0128] Next, the control device 50 updates the number of updates Nc of the clock width a to Nc+1 (step S213).

[0129] Next, the control device 50 measures the impedance value Z of the piezoelectric element 14 at the frequency fr(a(amax, a1)) of the drive signal (step S214).

[0130] Next, the control device 50 determines whether the impedance value Z measured in step S214 is equal to or less than a predetermined threshold value Zth (step S215).

[0131] If it is determined in step S215 that the impedance value Z measured is equal to or less than the predetermined threshold value Zth, the control device 50 determines the frequency fr of the drive signal as the resonance frequency fc of the piezoelectric element 14 (step S216).

[0132] After step S216, the control device 50 operates in a drive mode in which the piezoelectric element 14 is vibrated at the resonance frequency fc determined in step S216 to remove foreign matter adhering to the light-transmitting body 2 (step S217). Specifically, the control device 50 determines the resonance frequency fc of the piezoelectric element 14 as the drive frequency, and drives the piezoelectric element 14 at the determined drive frequency. In the drive mode, in conjunction with the vibration of the piezoelectric element 14, a cleaning liquid may be ejected from the cleaning nozzle 3 shown in FIG. 1 to remove foreign matter adhering to the light-transmitting body 2.

[0133] If it is determined in step S215 that the measured impedance value Z is not equal to or less than the threshold value Zth, the control device 50 updates the frequency fr of the drive signal to a-Δa, which is the clock width of the multiple clocks included in the drive signal (step S218). As a result, the frequency fr of the drive signal is updated to fr(a-Δa). Updating to a-Δa means, for example, decreasing both the clock width amax and the clock width a1 by Δa. Δa is, for example, the same as Δa in step S209.

[0134] Next, the control device 50 updates the number of updates Nc of the clock width a to Nc+1 (step S219).

[0135] Next, the control device 50 determines whether the number of updates Nc updated in step S219 exceeds a threshold value Ncth2 (step S220). Ncth2 is, for example, 1 time or more and 10 times or less.

[0136] If it is determined in step S220 that the number of updates Nc does not exceed Ncth2, the process returns to step S214.

[0137] If it is determined in step S220 that the number of updates Nc exceeds Ncth2, the control device 50 detects an error. (Step S221) , the operation in the search mode is ended (step S22 2 ).

[0138] When the multiple clocks included in the drive signal include two or more clock widths, the frequency fr of the drive signal will be a frequency fr that depends on the two or more clock widths. For example, if the multiple clocks included in the drive signal include clocks with clock width A1 at a rate of N1% and clocks with clock width A2 at a rate of N2% (N2=100-N1), the frequency fr of the drive signal is expressed by the following equation 1.

[0139] (Formula 1) fr=fr(a(A1, A2)) =N1 / 100×A1+N2 / 100×A2 =N1 / 100×fr(A1)+N2 / 100×fr(A2)

[0140] Specifically, for example, if the multiple clocks included in the drive signal include clocks with a clock width amax at a 50% ratio and clocks with a clock width a1 = amax - Δa at a 50% ratio, the frequency fr of the drive signal is expressed by the following equation 2.

[0141] (Formula 2) fr=fr(a(amax, a1)) =fr(a(amax, amax-Δa)) =50 / 100×amax+50 / 100×(amax-Δa) =1 / 2×amax+1 / 2×(amax-Δa) =1 / 2×fr(amax)+1 / 2×fr(amax-Δa)

[0142] Therefore, by performing the third search step, it is possible to generate a drive signal having a frequency fr that is between fr(amax) and fr(amax-Δa).

[0143] Now, let us refer to FIG. 14. FIG. 14 shows the relationship between the frequency of the drive signal and the resonant frequency in a graph showing the relationship between the resonant frequency and impedance of a piezoelectric element. In the graph shown in FIG. 14, the horizontal axis represents frequency [kHz] and the vertical axis represents impedance [Ω]. In the example shown in FIG. 14, the resonant frequency fc of the piezoelectric element 14 lies between fr(amax) and fr(amax-Δa). Furthermore, when the frequency fr of the drive signal is fr(amax) or fr(amax-Δa), the measured impedance Z is greater than the threshold value Zth. Therefore, the resonant frequency fc cannot be found in the first search step. However, as shown in Equation 2, by performing the third search step, it is possible to generate a drive signal having a frequency fr(a(amax, amax-Δa)) between fr(amax) and fr(amax-Δa). This makes it possible to search for the resonant frequency fc between fr(amax) and fr(amax-Δa), which could not be found in the first search step.

[0144] [effect] Therefore, the third search step of the above control method can improve frequency resolution without depending on the performance of the processor 20. This allows the drive frequency of the piezoelectric element 14 to be appropriately controlled. Specifically, since the search performance for the resonance frequency fc of the piezoelectric element 14 can be further improved, the drive frequency of the piezoelectric element 14 can be appropriately determined. Furthermore, since there is no need to use an expensive processor 20, increases in manufacturing costs can be suppressed.

[0145] (Modification 1 of Embodiment 2) In the control method of the second embodiment, the third search step is performed after the first search step, but the first search step can be omitted. The operation of the vibration device 10 of the imaging unit 100 in this modification will be described with reference to Fig. 15. Fig. 15 is a flowchart for explaining the operation of the control device that controls the vibration device according to this modification.

[0146] First, the control device 50 sets the driving voltage Vpp to Vdr (step S301).

[0147] Next, the control device 50 sets the clock width of some of the multiple clocks so that the clock width of the clocks is different from the clock width of the other clocks (step S302). For example, the clock width of 50% of the multiple clocks included in the drive signal is set to width amax, and the clock width of the remaining 50% of the clocks is set to width a1. Width a1 is, for example, amax-Δa, where Δa is, for example, the same as Δa in step S209 of the second embodiment. With the change in clock width, the frequency fr of the drive signal is set to fr(a(amax, a1)).

[0148] In addition, in step S302, the method by which the control device 50 makes the clock width of some of the multiple clocks different from the clock width of the other clocks can be the same as the method of changing the clock width in step S212 of the second embodiment.

[0149] Next, the control device 50 sets the number of updates Nc of the clock width a to 1 (step S303).

[0150] Next, the control device 50 applies a drive signal having the drive voltage Vpp set in step S301 and the frequency fr(a(amax, a1)) set in step S302 to the piezoelectric element 14 (step S304).

[0151] Next, the control device 50 measures the impedance value Z of the piezoelectric element 14 at the frequency fr(a(amax, a1)) of the drive signal (step S305).

[0152] Next, the control device 50 determines whether the impedance value Z measured in step S305 is equal to or less than a predetermined threshold value Zth (step S306).

[0153] If it is determined that the impedance value Z measured in step S305 is equal to or less than the threshold value Zth, the control device 50 determines the frequency fr of the drive signal as the resonance frequency fc of the piezoelectric element 14 (step S307).

[0154] After step S307, the control device 50 performs step S 3 The piezoelectric element 14 is vibrated at the resonance frequency fc determined in step S307 to operate in a drive mode to remove foreign matter adhering to the light-transmitting body 2 (step S308). In the drive mode, cleaning liquid may be ejected from the cleaning nozzle 3 in conjunction with the vibration of the piezoelectric element 14 to remove foreign matter adhering to the light-transmitting body 2.

[0155] If it is determined in step S306 that the measured impedance value Z is not equal to or less than the threshold value Zth, the control device 50 updates the frequency fr of the drive signal to a-Δa (step S309). This updates the frequency fr of the drive signal to fr(a-Δa). Updating to a-Δa means, for example, reducing both the clock width amax and the clock width a1 by Δa. Δa is, for example, the same as Δa in step S209 of the second embodiment.

[0156] Next, the control device 50 updates the number of updates Nc of the clock width a to Nc+1 (step S310).

[0157] Next, the control device 50 performs step S 3 It is determined whether the number of updates Nc updated to 10 exceeds Ncmax (step S311). The maximum number of updates Ncmax may be a preset number of updates. Ncmax is, for example, 1 to 10 times.

[0158] If it is determined in step S311 that the number of updates Nc does not exceed Ncmax, step S30 4 Return to.

[0159] If it is determined in step S311 that the number of updates Nc exceeds Ncmax, the control device 50 detects an error (ERROR) (step S312) and ends the operation in the search mode (step S313).

[0160] [effect] The above control method can improve the search performance for the resonance frequency fc of the piezoelectric element 14. Furthermore, the above control method can simplify the control and shorten the time required for frequency search.

[0161] (Modification 2 of Embodiment 2) In the control method of the second embodiment, in step S212, the control device 50 maintains the clock widths of 1 / 2 (50%) of the clocks included in the drive signal at width amax, and changes the clock widths of the remaining 1 / 2 (50%) of the clocks to width a1. However, the method by which the processor 20 changes the clock widths so that the clock widths of some of the multiple clocks are different from the clock widths of the other clocks is not limited to this.

[0162] For example, as shown in Fig. 16, the control device 50 may maintain the clock width of 2 / 3 of the clocks included in the drive signal at width amax, and change the clock width of the remaining 1 / 3 of the clocks to width a1. In this case, the clock with clock width a1 is issued, for example, once every three cycles. In this case, the frequency fr of the drive signal is expressed by the following equation 3.

[0163] (Formula 3) fr=fr(a(amax, a1)) =fr(a(amax, amax-Δa)) =2 / 3×amax+1 / 3×(amax-Δa) =2 / 3×fr(amax)+1 / 3×fr(amax-Δa)

[0164] In other words, a drive signal can be generated that contains a clock with width amax in a ratio of 2 / 3 and a clock with clock width a1 in a ratio of 1 / 3, and that has a different frequency fr from a drive signal that contains a clock with width amax and a clock with width a1 in equal proportions.

[0165] [effect] As described above, it is possible to generate drive signals having various frequencies fr depending on how the clock widths of the multiple clocks included in the drive signal are changed. This allows the drive frequency of the piezoelectric element 14 to be appropriately controlled. Specifically, it is possible to generate a drive signal of a desired frequency, improving the search performance for the resonant frequency fc, and therefore appropriately determining the drive frequency of the piezoelectric element 14.

[0166] In the above embodiment, an example has been described in which the control device 50 determines the resonant frequency of the piezoelectric element 14 and sets the determined resonant frequency as the drive frequency for driving the piezoelectric element 14. However, the present invention is not limited to this. For example, the control device 50 may determine the drive frequency based on a change in the value related to the impedance of the piezoelectric element 14, without determining the resonant frequency of the piezoelectric element 14. [Industrial Applicability]

[0167] The control method for controlling a vibration device and the control device for a vibration device of the present disclosure can be applied to vibration devices used in vehicle-mounted cameras, surveillance cameras, or optical sensors such as LiDAR used outdoors. [Explanation of symbols]

[0168] 1 chassis 2 Translucent body 3 Cleaning nozzle 5. Imaging device 10 Vibration device 12 Vibration body 13 Retainer 14 Piezoelectric element 15 Wiring 20 processors 30 Piezoelectric drive unit 50 Control device 70 Impedance detection unit 80 Power circuit 100 Imaging unit

Claims

1. A method for controlling a vibration device including a piezoelectric element by a control device, comprising: changing the frequency of a drive signal that drives the piezoelectric element; measuring a value related to the impedance of the piezoelectric element; determining a drive frequency for driving the piezoelectric element based on the measured value related to the impedance of the piezoelectric element; Including, the step of changing the frequency of the drive signal includes changing clock widths of some of the multiple clocks included in the drive signal so that the clock widths of the some of the multiple clocks are different from the clock widths of the other clocks; having method.

2. the several clocks are periodically positioned in the plurality of clocks; The method of claim 1.

3. the several clocks are equally spaced in the plurality of clocks; The method of claim 1.

4. Among the plurality of clocks, the clock width of some of the clocks is 0.5 times or more but less than 1 time, or more than 1 time but not more than 1.5 times, the clock width of the other clocks. The method of claim 1.

5. Among the plurality of clocks, the clock width of 0.1% or more and 99.9% or less of the clock is variable. The method of claim 1.

6. the value related to the impedance is an impedance value, The step of determining the drive frequency includes: determining whether a value related to the impedance is equal to or less than a predetermined threshold; determining, as the drive frequency, a frequency of the drive signal when it is determined that the value related to the impedance is equal to or less than a predetermined threshold value; having The method of claim 1.

7. the method further includes a step of changing the clock width if, in the step of determining the drive frequency, the drive frequency cannot be determined based on a value related to the impedance measured after changing the clock width. The method of claim 1.

8. the step of changing the frequency of the drive signal includes changing the frequency while keeping the clock widths of the plurality of clocks constant; the step of measuring a value related to the impedance includes measuring a value related to the impedance while the frequency is changed with a clock width kept constant; In the step of determining the drive frequency, if the drive frequency cannot be determined based on a value related to the impedance measured while the frequency is changed with the clock width kept constant, the clock width is changed.

8. The method according to any one of claims 1 to 7.

9. A control device for controlling a vibration device including a piezoelectric element, a processor; a memory storing instructions to be executed by the processor; Equipped with The instruction: Varying the frequency of a drive signal sent from the processor to the piezoelectric element; measuring a value related to the impedance of the piezoelectric element; determining a drive frequency for driving the piezoelectric element based on the measured value related to the impedance of the piezoelectric element; Including, the step of changing the frequency of the drive signal includes changing clock widths of some of the multiple clocks included in the drive signal so that the clock widths of the some of the multiple clocks are different from the clock widths of the other clocks. Control device.

10. the several clocks are periodically positioned in the plurality of clocks; The control device according to claim 9.

11. the several clocks are equally spaced in the plurality of clocks; The control device according to claim 9.

12. Among the plurality of clocks, the clock width of some of the clocks is 0.5 times or more but less than 1 time, or more than 1 time but not more than 1.5 times, the clock width of the other clocks. The control device according to claim 9.

13. Among the plurality of clocks, the clock width of 0.1% or more and 99.9% or less of the clock is variable. The control device according to claim 9.

14. the value related to the impedance is an impedance value, The step of determining the drive frequency includes: determining whether a value related to the impedance is equal to or less than a predetermined threshold; determining, as the drive frequency, a frequency of the drive signal when it is determined that the value related to the impedance is equal to or less than a predetermined threshold value; having The control device according to claim 9.

15. the instructions include a step of further changing the clock width if, in the step of determining the drive frequency, the drive frequency cannot be determined based on a value related to the impedance measured after changing the clock width. The control device according to claim 9.

16. the step of changing the frequency of the drive signal includes changing the frequency while keeping the clock widths of the plurality of clocks constant; the step of measuring a value related to the impedance includes measuring a value related to the impedance while the frequency is changed with a clock width kept constant; In the step of determining the drive frequency, if the drive frequency cannot be determined based on a value related to the impedance measured while the frequency is changed with the clock width kept constant, the clock width is changed.

16. A control device according to any one of claims 9 to 15.

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