Cassette retainer

Abstract

The cassette retainer includes a frame, a first cassette contact portion extending vertically relative to the frame, and a second cassette contact portion extending vertically in the same direction. The first and second cassette contact portions are spaced apart along the length of the frame. The cassette contact portions can contact the wafer cassette on either side of a horizontal bar of the wafer cassette that interfaces with a channel in a door for the wafer container that includes the cassette and the cassette retainer. The second cassette contact portion can be coupled to the frame by a spring. A mounting mechanism, such as a boss, can be included to connect the cassette retainer to the wafer container. A hard stop extending opposite the cassette contact portion can be included to limit movement of the cassette contact portion through mechanical interference with the wafer container.

Description

[Technical Field]

[0001] SUMMARY The present disclosure relates to a cassette retainer for a wafer container, and more particularly to a cassette retainer that includes multiple contact points for contacting a wafer cassette. [Background technology]

[0002] The wafer container may include a wafer cassette housed in an outer pod. The wafer cassette may move relative to the rest of the pod when transported or subjected to shock, such as being dropped or bumped. Wafer cassette movement may result in damage to the pod, cassette, or wafers, or may result in the generation of undesirable particles. Wafer cassette movement may also cause the wafer cassette to fall out of other retention mechanisms, such as door guides included in the wafer container door. Summary of the Invention

[0003] SUMMARY The present disclosure relates to a cassette retainer for a wafer container, and more particularly to a cassette retainer that includes multiple contact points for contacting a wafer cassette.

[0004] By using multiple contact points located on both sides of the horizontal bar away from the horizontal bar that engages the wafer cassette, the cassette presser can secure the wafer cassette on both sides of the horizontal bar to better control the rotational movement and displacement of the wafer cassette and to better retain the wafer cassette within the door guide that houses the horizontal bar.

[0005] In one embodiment, the cassette retainer includes a frame, a first cassette contact extending vertically from the frame on a first side of the frame, and a second cassette contact extending vertically from the frame on the first side of the frame, the first cassette contact being spaced apart from the second cassette contact along the length of the frame.

[0006] In one embodiment, the cassette retainer further includes a plurality of mounting bosses, each of the mounting bosses extending vertically on a second side of the cassette retainer opposite the first side.

[0007] In one embodiment, each of the first cassette contact portion and the second cassette contact portion includes one or more stoppers extending vertically on a second side opposite the first side of the cassette retainer, and each of the one or more stoppers is disposed on one of the first cassette contact portion or the second cassette contact portion.

[0008] In one embodiment, the cassette hold down further includes a spring connecting the second cassette contact to the frame, the spring configured to allow vertical movement of the second cassette contact relative to the frame.

[0009] In one embodiment, a wafer container includes a pod including one or more sidewalls, a closed end, an interior space defined by the one or more sidewalls and the closed end, and an open end, and a door. The door is configured to close the open end of the pod, the door including a channel. The wafer container further includes a wafer cassette including a bar configured to be received in the channel of the door. The wafer container further includes a cassette retainer. The cassette retainer includes a frame, a first cassette contacting portion extending vertically from the frame on a first side of the frame, and a second cassette contacting portion extending vertically from the frame on the first side of the frame. When the wafer cassette and cassette retainer are positioned in the interior space and the door closes the open end, the first cassette contacting portion and the second cassette contacting portion contact the wafer cassette on either side of the bar in the plane of the door.

[0010] In one embodiment, the closed end facing the interior space includes a plurality of attachment features, and the cassette retainer includes a plurality of attachment bosses, each of which is configured to engage at least one of the attachment features. In one embodiment, each of the plurality of attachment features is a hole formed in the closed end facing the interior space.

[0011] In one embodiment, the cassette presser includes a plurality of stoppers configured to extend toward the closed end facing the interior space when the wafer cassette and cassette presser are positioned in the interior space and the door closes the open end, and each of the plurality of stoppers is disposed on one of the first cassette contact portion or the second cassette contact portion.

[0012] In one embodiment, the wafer container further includes a spring connecting the second cassette contact to the frame, the spring configured to allow vertical movement of the second cassette contact relative to the frame.

[0013] In one embodiment, the wafer container is a standard mechanical interface (SMIF) pod. [Brief explanation of the drawings]

[0014] [Figure 1] 1 illustrates a perspective view of a cassette retainer according to one embodiment. [Figure 2] 1 illustrates an exploded view of a wafer container including a cassette hold-down according to one embodiment. [Figure 3] 1 illustrates a top view of a wafer cassette, wafer container door, and cassette retainer according to one embodiment. [Figure 4] 1 illustrates a cross-sectional view of a wafer container door, wafer cassette, and cassette retainer according to one embodiment. [Figure 5A] 1 illustrates a bottom view of a wafer container pod according to one embodiment. [Figure 5B]5B illustrates a bottom view of the wafer container pod shown in FIG. 5A and a cassette hold-down according to one embodiment. [Figure 6] 1 illustrates a top view of a wafer container door according to one embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0015] SUMMARY The present disclosure relates to a cassette retainer for a wafer container, and more particularly to a cassette retainer that includes multiple contact points for contacting a wafer cassette.

[0016] 1 shows a perspective view of a cassette retainer according to one embodiment. The cassette retainer 100 includes a frame 102, a first cassette contact portion 104, a second cassette contact portion 106, one or more springs 108, a mounting boss 110, and a stopper 112. A rib 114 may be provided along a portion of the frame 102.

[0017] The cassette retainer 100 is a component configured to be included within a wafer container to restrict movement of a wafer cassette housed therein. The cassette retainer may be attached to a portion of the wafer container other than the wafer cassette and may apply pressure to the wafer cassette at contact points, such as those provided by the first cassette contact portion 104 and the second cassette contact portion 106. The cassette retainer 100 may comprise a material suitable for contact with or presence within a semiconductor wafer wafer container. The cassette retainer 100 may comprise one or more polymeric materials. In one embodiment, the cassette retainer 100 includes polycarbonate in one or more of the first cassette contact portion 104, the second cassette contact portion 106, the spring 108, the mounting boss 110, or the stopper 112. In one embodiment, the entire cassette retainer 100 is polycarbonate.

[0018] The frame 102 forms the main body of the cassette hold down device 100. The frame 102 can connect other elements of the cassette hold down device 100, including the first cassette contact 104 and the mounting boss 110, along with the second cassette contact 106 or the spring 108. The frame 102 can include one or more beams connecting these elements. The frame 102 has a length direction L and a width direction W, and a vertical direction V is perpendicular to the plane formed by L and W. In one embodiment, the frame 102 is flexible and resilient so as to allow the first cassette contact 104 to deflect vertically when a force is applied, for example, by the first cassette contact 104 contacting a wafer cassette.

[0019] The first cassette contact portion 104 is a first point configured to contact a wafer cassette. The first cassette contact portion 104 extends in a vertical direction V from the frame 102 so as to be able to contact the wafer cassette. The first cassette contact portion 104 may be located at one end of the frame 102 in the length direction L. The first cassette contact portion 104 may be positioned in the length direction L of the frame 102 so that the first cassette contact portion 104 is not aligned with the horizontal bar of the wafer cassette when the cassette hold down device 100 is installed in the wafer container.

[0020] The second cassette contact portion 106 is a second point configured to contact a wafer cassette. The second cassette contact portion extends in the vertical direction V from the frame 102 so as to be able to contact the wafer cassette that the first cassette contact portion 104 is also contacting. The second cassette contact portion 106 may be spaced apart from the first cassette contact portion 104 in the length direction L of the frame 102. The spacing between the first and second cassette contact portions 104 and 106 may be such that one of the first cassette contact portion 104 and the second cassette contact portion 106 is on a first side of a horizontal bar included in the wafer cassette, and the other of the first cassette contact portion 104 and the second cassette contact portion 106 is on a second side of the horizontal bar opposite the first side.

[0021] One or more springs 108 can couple the second cassette contact 106 to the frame 102. Each spring 108 can be a resilient member configured to allow vertical movement of the second cassette contact upon application of a force, such as a force from the second cassette contact 106 pressing against a wafer cassette. The springs 108 can be provided on one or both sides of the second cassette contact 106 between the second cassette contact 106 and the frame 102. The springs 108 can include one or more flexures. In one embodiment, each spring 108 is the same material as the frame 102. In one embodiment, each spring 108 is polycarbonate.

[0022] The mounting boss 110 may be one or more vertical protrusions extending vertically from the frame 102 on the side of the frame 102 opposite the direction in which the first cassette contacting portions 104 and 106 extend vertically from the frame 102. The mounting boss 110 may include one or more features configured to engage with one or more engagement features on a portion of a wafer container, such as a pod, into which the cassette hold down 100 will be installed. The mounting boss 110 may be located at a position corresponding to the relative position of the engagement feature on the wafer container with which the mounting boss 110 engages. The mounting boss 110 may be, for example, a protrusion having a cross-section shaped like a plus sign sized to be press-fit into a corresponding hole on the inner surface of the pod into which the cassette hold down 100 will be installed. The mounting boss 110 may have any suitable shape or size for interfacing with the pod and stably retaining the cassette hold down 100 within the pod when assembled.

[0023] The stops 112 are vertical protrusions from each of the first and second cassette contacts 104 and 106. The stops 112 extend vertically in a direction opposite to the first and second cassette contacts 104 and 106. The stops 112 can be configured to extend to a height that is less than the distance between the first or second cassette contact 104 or 106 and the wafer container. The height of the stops 112 can be selected so that the stops do not normally contact the wafer container when the wafer container including the cassette holddown 100 is assembled. The stops can be spaced apart from the wafer container by a gap sized such that in the event of a mechanical shock (i.e., a sudden acceleration or deceleration, such as a drop or a knock), the stops 112 contact the wafer container and stop further movement of the first and / or second cassette contacts 104 and 106 beyond a certain amount.

[0024] Ribs 114 may extend vertically from some or all of the frame 102 and / or portions of the first and second cassette contacting portions 104 and 106. The ribs 114 may provide mechanical reinforcement to the portions where they are provided, reducing vertical deflection of those portions, for example, when force is applied to the cassette hold down 100. In one embodiment, the ribs 114 are provided on both the upper and lower surfaces of the frame 102, forming a plus or cross shape in the cross section of the frame 102 where the ribs 114 are provided. The ribs 114 may reinforce the frame 102 to increase the holding force applied by the cassette hold down 100.

[0025] 2 shows an exploded view of a wafer container including a cassette holddown according to one embodiment. The wafer container 200 includes a pod 202 having one or more sidewalls 204 and a closed end 206, a door 208, a wafer cassette 210 including a handle 212, and a cassette holddown 214.

[0026] Wafer container 200 is a wafer container that includes a wafer cassette 210 housed within an interior space defined by a pod 202 and a door 208. Wafer container 200 may be any such suitable container for holding one or more wafers, such as, for example, a standard mechanical interface (SMIF) pod. Wafer container 200 may be used, for example, to hold one or more wafers during semiconductor wafer processing, transport, and / or storage.

[0027] The pod 202 partially defines the interior space of the wafer container 200. The pod 202 can include one or more sidewalls 204 and a closed end 206, opposite the closed end being an open end (not shown). The one or more sidewalls 204 can be any number and arrangement of sidewalls that form a continuous wall such that when the open end is sealed, such as with a door 208, the one or more sidewalls 204 together with the closed end 206 define the interior space. In one embodiment, there is one sidewall 204 that is a continuous curved wall. In one embodiment, the one or more sidewalls are four sidewalls 204 that form a rectangular or square shape. The pod 202 can include one or more mounting features (not shown) on the side of the closed end 206 that faces the interior space. The one or more mounting features can be positioned to correspond to one or more mounting bosses on the cassette hold-down 214. The open end can receive the door 208. When the door 208 is attached, the pod 202 and door 208 may define an interior space configured to accommodate a wafer cassette 210 and a cassette holddown 214 .

[0028] The door 208 is a component of the wafer container 200 configured to close the open end of the pod 202. The door 208 can have a shape generally similar to the shape defined by one or more side walls 204 of the pod 202. The door 208 can include one or more engagement features for coupling the door 208 to the pod 202 and enclosing the wafer container 200. The door 208 can be configured so that a wafer cassette 210 can be placed on the door 208 on the side of the door 208 that faces the interior space of the wafer container 200 when the wafer container 200 is assembled. The door 208 can be sized to be the same size as or larger than the footprint of the wafer cassette 210. The door 208 can have a plane defined by its length and width.

[0029] A channel 228 may be formed in the side of the door 208 that faces the interior space of the wafer container 200 when the wafer container 200 is assembled. The channel 228 may be a groove or recess, or a channel defined by a sidewall extending perpendicularly from the door 208. The channel 228 may extend, for example, across the width of the door 208. In one embodiment, the channel 228 may be located at or near the centerline of the door 208 along its length. The channel 228 may be sized to receive the horizontal bar of the wafer cassette 210. The channel 228 may extend across some or all of the width of the door 208.

[0030] The wafer cassette 210 is a container configured to receive one or more wafers, such as semiconductor wafers, within an interior space. Each of the one or more wafers may be held by one or more wafer supports that extend from the walls of the wafer cassette 210 into the interior space. The wafer cassette 210 may include a handle 212 on a wall of the wafer cassette 210. In one embodiment, the handle 212 extends vertically from the top wall of the wafer cassette 210.

[0031] A horizontal bar (not shown) may be provided on the wall of the wafer cassette 210 that faces the door 208 when the wafer container 200 is assembled. The horizontal bar extends across the width of the wafer cassette. The horizontal bar may protrude vertically outward from the wall of the wafer cassette 210 on which the horizontal bar is provided, away from the interior space defined by the wafer cassette. The horizontal bar may be located at or near the centerline of the wafer cassette 210 along its length. In one embodiment, the horizontal bar may be recessed into the wall of the wafer cassette 210 on which the horizontal bar is provided so that the horizontal bar does not protrude beyond the surface of the wafer cassette 210 that is configured to contact the door 208. The horizontal bar is shown in FIG. 4 and described in more detail below.

[0032] 1 and described above. In the wafer container 200, a first cassette contact portion 216 and a second cassette contact portion 218 contact the wafer cassette 210 on each side of a horizontal bar in the plane of the door 208. In one embodiment, the first cassette contact portion 216 and the second cassette contact portion 218 may be on either side of the handle 212 of the wafer cassette 210. In one embodiment, the mounting boss 220 mechanically interfaces with one or more mounting features (not shown) formed on the pod 202. The cassette hold down 214 can be held in place relative to the pod 202 by the interface between the mounting boss 220 and the mounting features. When the wafer container 200 is assembled, the stopper 222 can be positioned away from the inside of the pod 202 by a gap under normal conditions, and the stopper 222 can contact the inside of the pod when the frame 224 and / or the spring 226 deflect, such as when the wafer container 200 is subjected to a mechanical shock. When the stopper 222 contacts the pod 202, the stopper can prevent further movement of the first cassette contacting portion 216 and / or the second cassette contacting portion 218, limiting further movement of the wafer cassette 210.

[0033] When the wafer container 200 is assembled, the first and second cassette contact portions 216 and 218 may be on either side of the horizontal bar and channel relative to the plane of the door 208. The contact between the first and second cassette contact portions 216 and 218 can provide a force that resists rocking of the horizontal bar within the channel. The cassette holddown 214, when installed in the wafer container 200, can reduce the likelihood of the wafer cassette becoming dislodged from its proper position within the wafer container 200. In one embodiment, each of the cassette contact portions 216 and 218 has a dome-like shape. The dome-like shape can reduce the contact points between each of the cassette contact portions 216 and 218. The dome-like shape can further provide a rolling contact, as opposed to a sharp point contacting the cassette.

[0034] 3 shows a top view of a wafer cassette, wafer container door, and cassette retainer according to one embodiment. Cassette retainer 300 is located above wafer cassette 302. The wafer cassette is then placed on wafer container door 304.

[0035] The cassette retainer 300 is an embodiment of a cassette retainer, such as the cassette retainer 100 or cassette retainer 214 shown in FIGS. 1 and 2, respectively, and described above. In the top view of FIG. 3, a first cassette contact portion 306 and a second cassette contact portion 308 can be seen spaced apart along the length L of the frame 310. The frame 310 can be shaped to surround a handle 318 of the wafer cassette 302. A mounting boss 312 is provided on the upper side of the frame 310. The mounting boss 312 extends upward from the frame 310 so as to be able to engage a pod in a wafer container. A stopper 314 is located on each of the first cassette contact portion 306 and the second cassette contact portion 308. The second cassette contact portion 308 is coupled to the frame 310 by a spring 316.

[0036] Wafer cassette 302 is a wafer cassette such as wafer cassette 210 described above and shown in FIG. 2. Wafer cassette 302 includes a handle 318 located on a top surface of wafer cassette 302. Wafer cassette 302 includes a horizontal bar, not visible in the top view of FIG. 3, such as the horizontal bar described herein and shown in FIG. 4. Horizontal line H corresponds to the centerline of the horizontal bar of wafer cassette 302. As can be seen from the figure, first cassette contact portion 306 and second cassette contact portion 308 are spaced and positioned in length direction L such that first cassette contact portion 306 and second cassette contact portion 308 are located on either side of horizontal line H.

[0037] A wafer container door 304 is located below the wafer cassette 302. The wafer container door 304 may be any suitable door for closing a wafer container, such as the door 208 for the wafer container 200 shown in FIG. 2 and described above. The wafer container door is sized larger than the footprint of the wafer cassette 302, as can be seen from above that the wafer container door 304 remains visible when the wafer cassette 302 is placed on the wafer container door 304. The wafer container door is sized to close the open end of a pod, such as the pod 202 described above and shown in FIG. 2.

[0038] The combination of cassette holddown 300, wafer cassette 302, and wafer container door 304 can be assembled with a pod, such as pod 202 described above and shown in Figure 2, to form a complete wafer container. Mounting bosses 312 on cassette holddown 300 can mechanically interface with the mounting features of such a pod, and stops 314 can contact the pod when the resulting wafer container is impacted.

[0039] Figure 4 shows a cross-sectional view of a wafer container door, wafer cassette, and cassette retainer according to one embodiment. The cross-sectional view of Figure 4 includes a cassette retainer 400, a wafer cassette 402 including a horizontal bar 404, and a door 406 including a channel 408.

[0040] The cassette retainer 400 includes a first cassette contacting portion 410, a second cassette contacting portion 412, a frame 414, a mounting boss 416, and a stopper 418. The cassette retainer 400 may be, for example, any of the cassette retainers 100, 214, or 300 shown in FIGS. 1-3 and described above. The first cassette contacting portion 410 and the second cassette contacting portion 412 contact the wafer cassette 402 and limit movement of the wafer cassette within the wafer container. The frame 414 joins the elements of the cassette retainer 400 together. The mounting boss 416 is provided to allow the cassette retainer to engage with a pod of a wafer container, for example, to securely position the cassette retainer. The stopper 418 can limit the vertical movement of the first and second cassette contact portions 410 and 412, for example, to set a stopper at a maximum deflection amount of one or both of the first and second cassette contact portions 410 and 412.

[0041] Wafer cassette 402 defines an interior space for storing one or more wafers. Wafer cassette 402 includes wafer supports 420, each extending into the interior space so as to be configured to at least partially support a wafer within wafer cassette 402. A handle 422 extends above the body of wafer cassette 402 on the side opposite that facing door 406.

[0042] The wafer cassette 402 includes a horizontal bar 404 formed on the side facing the door 406. The horizontal bar 404 extends vertically from the surface of the wafer cassette 402 toward the door 406. In one embodiment, the horizontal bar 404 is recessed in a recess 424 on the side of the wafer cassette 402 facing the door 406 so that the horizontal bar 404 does not protrude further than other surfaces of the wafer cassette 402 that also contact the door 406. In one embodiment, the horizontal bar 404 is received in a channel 408 formed in the door 406. In FIG. 4, the centerline of the horizontal bar 404 is indicated by a vertical line H for reference. As can be seen from the figure, the first cassette contacting portion 410 and the second cassette contacting portion 412 are spaced apart such that they are located on either side of the centerline of the horizontal bar 404. In one embodiment, the first cassette contact portion 410 and the second cassette contact portion 412 may be completely offset from the horizontal bar 404 such that each is not above any portion of the horizontal bar 404 but is located on either side of the entire horizontal bar 404.

[0043] The door 406 supports the wafer cassette 402. The door 406 may be any suitable door for closing a wafer container, such as the door 208 for the wafer container 200 shown in FIG. 2 and described above or the door 304 shown in FIG. 3 and described above. A channel 408 is formed in the door 406. The channel 408 may be a groove, channel, or recess in the door 406 that can receive at least a portion of the horizontal bar 404. The channel 408 may be defined, for example, by a raised side extending upward from the side of the door 406 that faces the interior space when the door 406 is assembled to the wafer container. The channel 408 may assist in positioning and securing the wafer cassette 402, for example, by receiving the horizontal bar within the channel 408. In one embodiment, the first cassette contact portion 410 and the second cassette contact portion 412 are located on either side of the channel 408 within the plane of the door 406.

[0044] FIG. 5A illustrates a bottom view of a wafer container pod according to one embodiment. In the bottom view of the pod 500, the closed end facing the interior of the pod 502 can be seen. A mounting mechanism 504 is provided at a predetermined point on the closed end facing the interior of the pod 502. The mounting mechanism 504 can be any suitable mechanical interface for engaging with a mounting boss, such as the mounting bosses 110, 220, 312, or 416 described above and shown in FIGS. 1-4. In one embodiment, the mounting mechanism 504 is a hole, such as a bore, sized to receive the mounting boss while providing a press fit when the mounting boss is inserted. FIG. 5B illustrates a bottom view of the wafer container pod 500 shown in FIG. 5A and a cassette retainer according to one embodiment. Cassette retainer 506 is shaped to correspond to the location of mounting feature 504 visible in Figure 5A such that a mounting boss (not shown) on cassette retainer 506 aligns with the mounting feature and the mounting boss and mounting feature mechanically interface to hold cassette retainer 506 aligned with pod 500. The mounting boss may be, for example, mounting boss 110, 220, 312, or 416 described above and shown in Figures 1-4.

[0045] Figure 6 shows a top view of a wafer container door according to one embodiment. Door 600 includes a channel 602, shown as a dashed line, defined by two opposing pairs of projections 604. Channel 602 can be sized to receive a horizontal bar included in a wafer cassette, such as any of the horizontal bars described above and horizontal bar 404 shown in Figure 4. Figure 6 shows two opposing pairs of projections 604 defining channel 602 by providing a space between each pair that allows retention of the horizontal bar. However, channel 602 can be defined by any suitable physical structure, such as additional pairs of projections, a pair of consecutive projections, etc.

[0046] Aspects: It is understood that any of the embodiments 1-4 can be combined with any of the embodiments 5-10.

[0047] Aspect 1. A frame; a first cassette contact extending vertically from the frame on a first side of the frame; a second cassette contact extending vertically from the frame on the first side of the frame; It is equipped with The first cassette contact portion is spaced apart from the second cassette contact portion along the length of the frame.

[0048] Aspect 2. The cassette retainer according to aspect 1, further comprising a plurality of mounting bosses, each of the mounting bosses extending vertically on a second side of the cassette retainer opposite the first side.

[0049] Aspect 3. The cassette holddown according to either Aspect 1 or 2, wherein the first cassette contacting portion and the second cassette contacting portion each include one or more stops extending vertically on a second side of the cassette holddown opposite the first side, each of the one or more stops being disposed on one of the first cassette contacting portion or the second cassette contacting portion.

[0050] Aspect 4. The cassette presser according to any of Aspects 1-3, further comprising a spring connecting the second cassette contact to the frame, the spring configured to allow vertical movement of the second cassette contact relative to the frame.

[0051] Embodiment 5. A pod including one or more side walls, a closed end, an interior space defined by the one or more side walls and the closed end, and an open end; a door configured to close the open end of the pod and including a channel; a wafer cassette including a bar configured to be received in the channel of the door; Cassette holder and It is equipped with The cassette holder is The frame and a first cassette contact extending vertically from the frame on a first side of the frame; a second cassette contact extending vertically from the frame on the first side of the frame; It contains A wafer container in which a wafer cassette and a cassette presser are positioned in the interior space, and when the door closes the open end, the first cassette contact portion and the second cassette contact portion contact the wafer cassette on both sides of the bar in the plane of the door.

[0052] Embodiment 6. The wafer container according to embodiment 5, wherein a side of the closed end facing the interior space includes a plurality of mounting features, and the cassette holddown includes a plurality of mounting bosses each configured to engage at least one of the mounting features.

[0053] Embodiment 7. The wafer container according to embodiment 6, wherein each of the plurality of attachment mechanisms is a hole formed in a side of the closed end facing the interior space.

[0054] Aspect 8. The wafer container according to any of Aspects 5 to 7, wherein the cassette presser includes a plurality of stoppers configured to extend toward a side of the closed end facing the interior space when the wafer cassette and the cassette presser are positioned in the interior space and the door closes the open end, and each of the plurality of stoppers is disposed on one of the first cassette contact portion or the second cassette contact portion.

[0055] Embodiment 9. The wafer container according to any of embodiments 5-8, further comprising a spring connecting the second cassette contact to the frame, the spring configured to allow vertical movement of the second cassette contact relative to the frame.

[0056] Embodiment 10. The wafer container according to any of embodiments 5-9, wherein the wafer container is a standard mechanical interface (SMIF) pod.

[0057] The examples disclosed in this application are to be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the appended claims, rather than the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.

Claims

1. A cassette holder, a flexible and elastic frame; a first cassette contact extending vertically from the frame on a first side of the frame; a second cassette contact portion extending from the frame in the vertical direction on the first side of the frame; It is equipped with the first cassette contact portion is spaced apart from the second cassette contact portion in a longitudinal direction of the frame; A cassette presser, wherein each of the first cassette contact portion and the second cassette contact portion includes one or more stoppers extending in the vertical direction on a second side of the cassette presser opposite the first side, and each of the one or more stoppers is disposed on one of the first cassette contact portion or the second cassette contact portion.

2. The cassette retainer of claim 1 , further comprising a plurality of mounting bosses, each of said mounting bosses extending in said vertical direction on a second side of said cassette retainer opposite said first side.

3. The cassette retainer of claim 1 , further comprising a spring connecting the second cassette contact to the frame, the spring configured to allow vertical movement of the second cassette contact relative to the frame.

4. 2. The cassette retainer of claim 1, wherein the first cassette contact portion is at one end of the frame in the length direction.

5. 10. The cassette holddown of claim 1, configured to be included within a wafer container to limit movement of a wafer cassette contained within the wafer container.

6. a pod including one or more side walls, a closed end, an interior space defined by the one or more side walls and the closed end, and an open end; a door configured to close the open end of the pod, the door including a channel; a wafer cassette including a bar configured to be received in the channel of the door; Cassette holder and It is equipped with The cassette holder is a flexible and elastic frame; a first cassette contact extending vertically from the frame on a first side of the frame; a second cassette contact portion extending from the frame in the vertical direction on the first side of the frame; It contains the first cassette contact portion is spaced apart from the second cassette contact portion in a longitudinal direction of the frame; each of the first cassette contact portion and the second cassette contact portion includes one or more stoppers extending in the vertical direction on a second side of the cassette presser opposite the first side, each of the one or more stoppers being disposed on one of the first cassette contact portion or the second cassette contact portion; a wafer container, wherein when the wafer cassette and the cassette presser are positioned in the interior space and the door closes the open end, the first cassette contact portion and the second cassette contact portion contact the wafer cassette on both sides of the bar in the plane of the door.

7. 7. The wafer container of claim 6, further comprising a spring connecting the second cassette contact to the frame, the spring configured to allow vertical movement of the second cassette contact relative to the frame.

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