Protective insulator for HFET devices.

Abstract

To provide a manufacturing method of a transistor.SOLUTION: A high-voltage field effect transistor (HFET) 100 includes a first semiconductor material 105, a second semiconductor material 110, a heterojunction 115, and a plurality of composite passivation layers 199. A first composite passivation layer includes a first insulation layer 170 and a first passivation layer 165. A second composite passivation layer includes a second insulation layer 192 and a second passivation layer 175. A gate dielectric 155 is disposed between the first passivation layer and the second semiconductor material. A gate electrode 135 is disposed between the gate dielectric and the first passivation layer. A first gate field plate 140 is disposed between the first passivation layer and the second passivation layer. A source electrode 125 and a drain electrode 130 are coupled to the second semiconductor material, and a source field plate 145 is coupled to the source electrode.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates generally to high-voltage field effect transistors (HFETs), and particularly, but not exclusively, to protective insulators in HFET devices. [Background technology]

[0002] GaN's high breakdown voltage and high electron mobility make it an ideal candidate for high-power transistor applications. Furthermore, GaN's large bandgap means that GaN transistor performance can be maintained at much higher temperatures than other conventional semiconductor choices. Applications include, but are not limited to, microwave radio frequency amplifiers, high-voltage switching devices, and power supplies. One application in the mass market is as a microwave source in microwave ovens (replacing the magnetron).

[0003] Despite their potential ubiquitous use in consumer electronics, GaN-based devices still suffer from some limitations due to the high-voltage environments in which they are used. The device layers in GaN transistors can accumulate charge during use, resulting in altered device performance due to electric field redistribution and thermal stress. In the worst case, HFET devices can fail catastrophically due to dielectric breakdown or cracking of the device layers.

[0004] Non-limiting and non-exhaustive examples of the present invention are described with reference to the following figures, in which like reference numerals in different figures refer to like parts unless otherwise specified: [Brief explanation of the drawings]

[0005] [Figure 1] 1 is a cross-sectional view of an exemplary HFET device including a composite passivation layer in accordance with the teachings of the present disclosure. [Figure 2] 1 is a cross-sectional view of an exemplary HFET device including a composite passivation layer in accordance with the teachings of the present disclosure. [Figure 3] 1 is a cross-sectional view of an exemplary HFET device including a composite passivation layer in accordance with the teachings of the present disclosure. [Figure 4] 1 is a cross-sectional view of an exemplary HFET device including a composite passivation layer in accordance with the teachings of the present disclosure. [Figure 5] FIG. 1 is a flow diagram illustrating a method for manufacturing an HFET in accordance with the teachings of the present disclosure. [Figure 6] FIG. 1 is a flow diagram illustrating a method for manufacturing an HFET in accordance with the teachings of the present disclosure. [Figure 7] 1 is a cross-sectional view of an exemplary HFET device including a composite passivation layer in accordance with the teachings of the present disclosure. [Figure 8] 1 is a cross-sectional view of an exemplary HFET device including a composite passivation layer in accordance with the teachings of the present disclosure. [Figure 9] 1 is a cross-sectional view of an exemplary HFET device including a composite passivation layer in accordance with the teachings of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0006] Corresponding reference characters indicate corresponding elements throughout the several views of the drawings. Those skilled in the art will appreciate that the elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to facilitate a better understanding of the various embodiments of the present invention. Additionally, common but well-understood elements that are useful or necessary in commercially available embodiments are often not depicted in order to avoid cluttering the figures of these various embodiments of the present invention.

[0007] Exemplary apparatus and methods relating to protective insulators for high-voltage field-effect transistors (HFETs) are described herein. In the following description, numerous specific details are set forth to provide a thorough understanding of the examples. However, those skilled in the art will recognize that the techniques described herein may be practiced without one or more of the specific details, or with other methods, components, materials, etc. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring certain aspects.

[0008] References herein to "one example" or "one embodiment" mean that a particular feature, structure, or characteristic described in connection with the example is included in at least one example of the invention. Thus, the appearances of the phrases "in one example" or "in one embodiment" in various places throughout this specification do not necessarily all refer to the same example. Furthermore, particular features, structures, or characteristics may be combined in any suitable manner in one or more examples.

[0009] Throughout this specification, several technical terms are used. These terms have their ordinary meaning in the art to which they belong, unless otherwise specified herein or unless the context in which they are used clearly suggests otherwise. It should be noted that element names and element symbols (e.g., Si and silicon) may be used interchangeably throughout this specification, but both have the same meaning.

[0010] 1 is a cross-sectional view of an exemplary HFET 100 including a composite passivation layer 199. The HFET 100 includes a first semiconductor material 105, a second semiconductor material 110, and a heterojunction 115. A gate dielectric 155 is disposed on the second semiconductor material 110. The heterojunction 115 is disposed between the first semiconductor material 105 and the second semiconductor material 110. When the device is turned on, a two-dimensional electron gas 120 is generated at the heterojunction 115 due to the material properties of the semiconductor materials 105, 110.

[0011] A plurality of composite passivation layers 199 are disposed above the second semiconductor material 110. A first composite passivation layer is disposed within the plurality of composite passivation layers 199, the first composite passivation layer including a first insulating layer 170 and a first passivation layer 165. The plurality of composite passivation layers 199 further includes a second composite passivation layer having a second insulating layer 192 and a second passivation layer 175, the second passivation layer 175 being disposed between the first insulating layer 170 and the second insulating layer 192. In one example, the gate dielectric 155 and the first insulating layer 170 include the same material composition. In another example or the same example, the first passivation layer 165 and the second passivation layer 175 include SiN, and the gate dielectric 155 and the first insulating layer 170 include a metal oxide. In the illustrated example, a gate dielectric 155 is disposed between the first passivation layer 165 and the second semiconductor material 110, and a gate electrode 135 is disposed between the gate dielectric 155 and the first passivation layer 165. Selective biasing of the gate electrode 135 adjusts the conductivity between the source electrode 125 and the drain electrode 130. A first gate field plate 140 is disposed between the first passivation layer 165 and the second passivation layer 175. In one example, the first gate field plate 140 is connected to the gate electrode 135. The source electrode 125 and the drain electrode 130 are connected to the second semiconductor material 110, and the source field plate 145 is connected to the source electrode 125. In one example, the drain electrode 130 extends from the second semiconductor material 110 through at least one composite passivation layer in the plurality of composite passivation layers 199.

[0012] In the example shown, gate electrode 135, first gate field plate 140, and source field plate 145 have a generally rectangular cross-section. Gate electrode 135 includes a first edge 150. First edge 150 is positioned a lateral distance d0 from source electrode 125 and a vertical distance d5 above second semiconductor material 110. First edge 150 is vertically spaced apart from second semiconductor material 110 by gate dielectric 155 and first passivation layer 165.

[0013] In one example, the HFET includes a third passivation layer 195. A second insulating layer 192 is disposed between the second passivation layer 175 and the third passivation layer 195. In another example or the same example, a source field plate 145 may be disposed between the second insulating layer 192 and the third passivation layer 195. Additionally, a first gate field plate 140 may be disposed between the first insulating layer 170 and the second passivation layer 175.

[0014] The first gate field plate 140 includes a second edge 160. The second edge 160 is located a lateral distance d0+d1 toward the drain electrode 130 and a vertical distance d5+d6 above the second semiconductor material 110. The second edge 160 is vertically spaced apart from the second semiconductor material 110 by the gate dielectric 155, the first passivation layer 165, and the first insulating layer 170. The source field plate 145 includes a third edge 174. The third edge 174 is located a lateral distance d0+d1+d3 from the side of the source electrode 125 toward the drain electrode 130 and a vertical distance d5+d6+d7 above the second semiconductor material 110. Note that third edge 174 is vertically spaced apart from second semiconductor material 110 by gate dielectric 155, first passivation layer 165, first insulating layer 170, second passivation layer 175, and second insulating layer 192. The electric field between each of gate electrode 135, first gate field plate 140, source field plate 145, and heterojunction 115 is highest at their respective edges 150, 160, 174 under certain bias conditions.

[0015] Gate electrode 135 can be electrically connected to first gate field plate 140 in a variety of ways. In the example shown, the connection between gate electrode 135 and first gate field plate 140 is outside the cross-sectional view. However, gate electrode 135 and first gate field plate 140 can be formed by a single member having a generally L-shaped cross-section.

[0016] Source electrode 125 can be electrically connected to source field plate 145 in a variety of ways. In the example shown, source electrode 125 is electrically connected to source field plate 145 by source via member 180. In other examples, source electrode 125 can be electrically connected to source field plate 145 outside of the cross-section shown.

[0017] In the illustrated example, the drain electrode 130 is electrically connected to a pair of drain via members 185, 190. The drain via members 185, 190 extend through the second passivation layer 175 to the same vertical level as the source field plate 145 and thus function as extensions of the drain electrode 130. Because the via member 190 is at the same vertical level as the source field plate 145, it is the extension of the drain electrode 130 closest to the source field plate 145. The side of the source field plate 145, including the third edge 174, is positioned at the same vertical level and a lateral distance d4 away from the drain via member 190. In some examples, the lateral distance d4 is equal to or less than the distance required to maintain the device's specific lateral breakdown voltage. In the illustrated example, the source field plate 145 and the drain via member 190 are covered by a third passivation layer 195.

[0018] In the example shown, both the source electrode 125 and the drain electrode 130 may be directly on top of the second semiconductor material 110 and in electrical contact with the second semiconductor material 110. However, in some examples, the source electrode 125 and / or the drain electrode 130 penetrate into the second semiconductor material 110. In some examples, this penetration is deep enough that the source electrode 125 and / or the drain electrode 130 contact or even penetrate the heterojunction 115. In another example or the same example, one or more interstitial adhesive metals or other conductive materials are disposed between the source electrode 125 and / or the drain electrode 130 and one or both of the semiconductor materials 105, 110.

[0019] In the illustrated example, the gate electrode 135 is electrically insulated from the second semiconductor material 110 by a single electrically insulating layer (gate dielectric 155) having a uniform thickness d5. However, in other examples not shown, multiple layers may be used to insulate the gate electrode 135 from the second semiconductor material 110. In another example, a single layer or multiple layers with non-uniform thicknesses may be used to insulate the gate electrode 135 from the second semiconductor material 110.

[0020] It should be noted that various features of the lateral channel HFET 100 can be formed from a variety of different materials. For example, the first semiconductor material 105 can include GaN, InN, AlN, AlGaN, InGaN, or AlInGaN. In some examples, the first semiconductor material 105 can further include an arsenic-containing compound semiconductor, such as GaAs, InAs, AlAs, InGaAs, AlGaAs, or InAlGaAs. The second semiconductor material 110 can be AlGaN, GaN, InN, AlN, InGaN, or AlIn-GaN. The second semiconductor material 110 can further include an arsenic-containing compound semiconductor, such as one or more of GaAs, InAs, AlAs, InGaAs, AlGaAs, or InAlGaAs. The compositions of the first semiconductor material 105 and the second semiconductor material 110 (which may also be referred to as "active layers") are tailored to generate a two-dimensional electron gas 120 at the heterojunction 115. For example, the composition of the first semiconductor material 105 and the second semiconductor material 110 is 10 11 From 10 14 cm -2 occurs at the heterojunction 115 (more specifically, 5x10 12 From 5x10 13 cm -2 or 8x10 12 From 1.2x10 13 cm -2The first semiconductor material 105 may be in direct contact with such a substrate, or one or more intervening layers may be present.

[0021] The source electrode 125, the drain electrode 130, and the gate electrode 135 may be formed from a variety of conductors, including metals such as Al, Ni, Ti, TiW, TiN, TiAu, TiAlMoAu, TiAlNiAu, TiAlPtAu, etc. The insulating layers 170, 192 and the gate dielectric 155 may be formed from a variety of dielectrics suitable for forming gate insulators (e.g., aluminum oxide (Al2O3), zirconium dioxide (ZrO2), aluminum nitride (AlN), hafnium oxide (HfO2), silicon dioxide (SiO2), silicon nitride (Si3N4), aluminum silicon nitride (AlSiN), or other suitable gate dielectric materials).

[0022] The passivation layers 165, 175, 195 may be formed from a variety of dielectrics including silicon nitride, silicon oxide, silicon oxynitride, etc. The composite passivation layer may reduce or prevent charging of surface states in the underlying second semiconductor material 110 or layers 155, 165, 175.

[0023] In some examples, the passivation layers 165, 175, 195 have a composition such that after long-term operation at steady-state operating parameters, the number of charge defects per area in the passivation layers 165, 175, 195 is less than the sheet carrier density at the heterojunction. In other words, the sum of the product of each three-dimensional defect density in the passivation layers 165, 175, 195 and its respective thickness is less than the (two-dimensional) sheet carrier density at the heterojunction 115. For example, the number of charge defects per area in the passivation layers 165, 175, 195 can be less than 20%, or less than 10%, of the sheet carrier density at the heterojunction 115.

[0024] The source electrode 125 is disposed at a lateral distance d2 from the drain electrode 130. In some examples, the lateral distance d2 is between 5 micrometers and 50 micrometers (more specifically, between 9 micrometers and 30 micrometers). In some examples, the lateral distance d1 is between 1 micrometer and 5 micrometers (more specifically, between 1.5 micrometers and 3.5 micrometers). In some examples, the thickness of the second passivation material 175 is between 0.2 micrometers and 1 micrometer (more specifically, between 0.35 micrometers and 0.75 micrometers). In some examples, the lateral distance d4 is between 1 micrometer and 8 micrometers (more specifically, between 2 micrometers and 6 micrometers). In some examples, the thickness of the third passivation layer 195 is between 0.4 micrometers and 3 micrometers (more specifically, between 0.5 micrometers and 2 micrometers). In some examples, the lateral distance d3 is between 1 micrometer and 10 micrometers (more specifically, between 2.5 micrometers and 7.5 micrometers).

[0025] During operation, the insulating layers (e.g., first insulating layer 170 and second insulating layer 192) and gate dielectric 155 are arranged to prevent charging of the passivation layers (e.g., passivation layers 165, 175, and 195) within composite passivation layer 199. To achieve high performance in GaN-based electronic devices (such as high-voltage and / or high-frequency transistors and diodes), field-distribution and charge-shielding metallization can be used. One promising passivation material for GaN electronic devices is silicon nitride (SiN). Therefore, the metallization is often formed above a SiN passivation layer. However, SiN has a relatively narrow bandgap among dielectrics, which can lead to charge injection from adjacent materials into the silicon nitride under an applied electric field. As a result of charging, the material properties of both the passivation material (SiN) and the metallization pattern can change over time. This can lead to drift behavior and, under some conditions, irrecoverable failure of the device. Therefore, in some examples, including the gate dielectric (e.g., gate dielectric 155) and the insulating layers (e.g., insulating layers 170 and 192) within the passivation layers of a GaN-based device can reduce charging in the passivation layers, since the insulating layers include a wider bandgap than the passivation layers. Reducing charging in the passivation layers lowers the probability of device failure / performance drift. Furthermore, the insulating layers can be fabricated from the same material as the gate dielectric, thereby eliminating the need for additional processing steps / materials.

[0026] FIG. 2 is a cross-sectional view of an exemplary HFET 200 including a composite passivation layer 299. In many respects, HFET 200 is similar to (or the same as) HFET 100 shown in FIG. 1 . However, one notable feature of HFET 200 is that the area of ​​insulating layers 270, 292 does not occupy the entirety of the composite passivation layer. In other words, the lateral boundaries of first insulating layer 270 are substantially coextensive with the lateral boundaries of source field plate 245, and further, the lateral boundaries of second insulating layer 292 are substantially coextensive with the lateral boundaries of source field plate 245. In one example, the lateral boundaries of first insulating layer 270 may extend beyond first gate field plate 240 and may terminate short of via member 285. In another example or the same example, the length of second insulating layer 292 may extend beyond source field plate 274 and terminate short of via member 290.

[0027] FIG. 3 is a cross-sectional view of an exemplary HFET 300 including a composite passivation layer 399. HFET 300 is similar in many respects to HFETs 100 and 200 shown in FIGS. 1-2. However, HFET 300 includes a third composite passivation layer including third passivation layer 387 and third insulating layer 394. HFET 300 further includes a fourth passivation layer 396. Third insulating layer 394 is disposed between third passivation layer 387 and fourth passivation layer 396. Second gate field plate 342 is disposed between second insulating layer 392 and third passivation layer 387 and is connected to first gate field plate 340. As shown, source field plate 345 is disposed between third insulating layer 394 and fourth passivation layer 396.

[0028] The HFET 300 further includes a first gate field plate 340, a source field plate 345, and a second gate field plate 342. The second gate field plate 342 is electrically connected to the gate electrode 335. In some examples, the source field plate 345 functions as a so-called "shield wrap." As previously mentioned, some GaN devices experience parasitic DC-to-RF dispersion, which is believed to arise at least in part from the exchange of surface charges with the surrounding environment during high-voltage operation. In particular, surface states charge and discharge with a relatively slow response time. Subsequently, the performance of GaN devices is affected during high-frequency operation. A metal shield wrap can reduce or eliminate these effects by improving shielding and preventing the movement of surface charges. In some examples, the source field plate 345 can reduce the peak value of the electric field in the HFET 300 (e.g., the electric field between the heterojunction 315 and the third edge 344 of the second gate field plate 342). As described in more detail below, in some examples, source field plate 345 also functions to deplete charge carriers from heterojunction 315. In some examples, source field plate 345 serves multiple functions, i.e., acting as a shield wrap, a field plate, and / or depleting heterojunction 315. The particular use of source field plate 345 in a device is a function of any of many different geometric, material, and operational parameters. Because source field plate 345 may serve one or more functions, it is referred to herein simply as a “source field plate.”

[0029] In the example shown, source field plate 345 has a generally rectangular cross-section. Source field plate 345 includes a fourth edge 374. Fourth edge 374 is disposed at a lateral distance d0+d1+d3+d11 from the side of source electrode 325 toward drain electrode 330 and at a vertical distance d5+d6+d7+d8 above second semiconductor material 110. In some examples, lateral distance d0+d1+d3+d11 is greater than or equal to two times the vertical distance d5+d6+d7+d8. For example, lateral distance d0+d1+d3+d11 can be greater than or equal to three times d5+d6+d7+d8. Fourth edge 374 is vertically spaced apart from second semiconductor material 110 by gate dielectric 355, first passivation layer 365, first insulating layer 370, second passivation layer 375, second insulating layer 392, third passivation layer 387, and third insulating layer 394. As described in more detail below, the electric field between source field plate 345 and heterojunction 315 is highest at fourth edge 374 under certain bias conditions.

[0030] Source field plate 345 can be electrically connected to source electrode 325 in a variety of ways. In the example shown, source electrode 325 is electrically connected to source field plate 345 by source via member 380. In other examples, source electrode 325 can be electrically connected to source field plate 345 outside of the cross-section shown.

[0031] As shown, drain electrode 330 is electrically connected to the other drain vias via via members 385, 390. Drain via member 388 extends through third passivation layer 387 to the same vertical level as second gate field plate 342 and therefore serves as an extension of drain electrode 330. Via member 388 is at the same vertical level as source field plate 345 and is therefore the extension of drain electrode 330 closest to source field plate 345. The fourth composite passivation material has a thickness d10.

[0032] In some examples, d1 + d3 + d4 is between 5 micrometers and 35 micrometers (more specifically, between 8 micrometers and 26 micrometers). In some examples, the lateral distance d9 is between 1 micrometer and 10 micrometers (more specifically, between 2 micrometers and 6 micrometers). In some examples, the layers 365, 375, 387, 396 have a composition and quality such that after long-term operation at steady-state operating parameters, the number of charge defects per area in the layers 365, 375, 387, 396 is less than the sheet carrier density at the heterojunction. In other words, the sum of the products of each three-dimensional defect density of the passivation layers 365, 375, 387, 396 and their respective thicknesses is less than the (two-dimensional) sheet carrier density at the heterojunction 115. For example, the number of charge defects per area in the insulating material layers 365, 375, 387, 396 is less than 20% (more specifically, less than 10% of the sheet carrier density at the heterojunction 315).

[0033] 4 is a cross-sectional view of an exemplary HFET 400 including a composite passivation layer 499. HFET 400 is similar to HFET 300, except that the lateral boundaries of first insulating layer 470 are substantially coextensive with those of first gate field plate 440, the lateral boundaries of second insulating layer 492 are substantially coextensive with those of second gate field plate 442, and the lateral boundaries of third insulating layer 494 are substantially coextensive with those of source field plate 445. In other words, HFET 400 is similar to HFET 300, except that the areas of insulating layers 470, 492, 492 in HFET 400 do not occupy the entire passivation layer. In one example, the length of first insulating layer 470 can extend beyond first gate field plate 440, terminating short of via member 485. In one example, the length of the second insulating layer 492 can extend beyond the second gate field plate 442 and terminate short of the via member 490. In one example, the length of the third insulating layer 494 can extend beyond the source field plate 445 and terminate short of the drain 488.

[0034] 5 is a flow diagram depicting an exemplary HFET fabrication method 500. The order of process blocks 502-510 in method 500 should not be considered limiting. As one skilled in the art would understand, process blocks 502-510 can be performed in any order and even in parallel. Furthermore, process blocks 502-510 represent a highly simplified version of method 500, and process blocks can be added to or removed from method 500 so as not to obscure certain aspects of the present disclosure.

[0035] Process block 502 depicts depositing a semiconductor layer (e.g., first semiconductor material 105 and second semiconductor material 110) on a substrate. In one example, the semiconductor layer and substrate can include any of the materials listed in the description of FIGS. 1-4. In one example, a heterojunction can be formed between the first semiconductor material and the second semiconductor material (e.g., first semiconductor material 105 and second semiconductor material 110). In another example or the same example, a source electrode and a drain electrode are coupled to the second semiconductor material. Additionally, a gate dielectric can be deposited adjacent to the second semiconductor material such that the second semiconductor material is disposed between the gate dielectric and the first semiconductor material.

[0036] Process block 504 depicts depositing one or more composite passivation layers on the semiconductor layer. In one example, this may include depositing a plurality of composite passivation layers, where a first composite passivation layer in the plurality of composite passivation layers includes a first insulating layer and a first passivation layer. In the aforementioned example, the first passivation layer may be disposed between a gate dielectric and the first insulating layer, and the gate may be formed between the gate dielectric and the plurality of composite passivation layers. In another example or the same example, a second composite passivation layer in the plurality of composite passivation layers may be deposited. The second composite passivation layer may include a second insulating layer and a second passivation layer, where the first insulating layer is disposed between the first passivation layer and the second passivation layer. In one example, the first insulating layer has a larger bandgap than the first passivation layer. In another example or the same example, the first passivation layer includes SiN, and the gate dielectric and the first insulating layer include a metal oxide.

[0037] In one example, depositing the multiple composite passivation layers includes depositing the first insulating layer and the second insulating layer such that a lateral boundary between the first insulating layer and the second insulating layer is less than the lateral distance between the source electrode and the drain electrode. In another example or the same example, a third composite passivation layer is deposited, the third composite passivation layer including a third insulating layer and a third passivation layer. In this example, the second insulating layer is disposed between the second passivation layer and the third passivation layer.

[0038] Process block 506 depicts recess etching, metal deposition, metal patterning, and rapid thermal annealing to form ohmic contacts that contact the top surfaces of the semiconductor layers shown, for example, in Figures 1-4.

[0039] Process block 508 depicts patterning one or more field plates on the one or more composite passivation layers. In one example, a first gate field plate is formed between the first and second passivation layers. In another example or the same example, the first gate field plate is connected to the gate electrode. Additionally, a source field plate can be deposited on the second insulating layer. In one example, the first gate field plate is disposed between the first insulating layer and the second passivation layer. In another example, a second gate field plate (coupled to the first gate field plate) is formed, and the second gate field plate is disposed between the second insulating layer and a third passivation layer. A source field plate can be coupled to the source electrode and can be formed on the third insulating layer.

[0040] Process block 510 depicts depositing an encapsulation layer over the top composite passivation layer. In one example, depositing the encapsulation layer includes a fourth passivation layer, the fourth passivation layer being disposed over the source field plate and the third insulating layer.

[0041] 6 is a flow diagram depicting an exemplary HFET fabrication method 600. The order of process blocks 602-622 in method 600 should not be considered limiting. As one skilled in the art would understand, process blocks 602-622 can be performed in any order and even in parallel. Furthermore, process blocks 602-622 illustrate a highly simplified version of method 600 so as not to obscure certain aspects of the present disclosure, and process blocks can be added to or removed from method 600.

[0042] A semiconductor layer is deposited on a substrate in block 602. In one example, the semiconductor layer and substrate may include any of the materials listed in the description of Figures 1-4.

[0043] Process block 604 depicts depositing one or more composite passivation layers over the semiconductor layer. It should be understood that the insulating and passivation materials in the composite passivation layer can have the same or different material compositions.

[0044] Block 606 illustrates forming ohmic contact occupation areas using plasma etching. The occupation areas can be formed by using a composite passivation layer as an etch stop. As described above, the composite passivation layer includes a gate dielectric layer and a passivation layer. In one example, the gate dielectric layer can be made of aluminum oxide, and the passivation layer can be made of silicon nitride (SiN). The plasma etch rate of the passivation material is greater than the etch rate of the gate dielectric material. In one example, the plasma etch rate of the passivation material is substantially greater than the etch rate of the gate dielectric. In one example, the etch rate of the passivation layer can be up to 100 times greater than the etch rate of the gate dielectric and the insulating layer. This allows for precise control of the thickness of the device layers below each field plate (i.e., gate field plate, source field plate, drain field plate). In one example, the gate dielectric and insulating layer can be used as etch stop layers.

[0045] In process block 608, ohmic contacts are created by recess etching, metal deposition, metal patterning, and high temperature annealing.

[0046] Optional process block 610 indicates that another composite passivation layer is deposited.

[0047] The gate contact is formed by metal deposition and metal patterning in block 614. An optional field plate may also be created in this step.

[0048] Process blocks 616-620 are optional in exemplary method 600. Block 616 depicts depositing another composite passivation layer. In block 618, another footprint for a field plate can be formed by plasma etching using an etch stop. Block 620 depicts depositing and patterning another metal field plate.

[0049] At block 622, an encapsulation layer is deposited over the top composite passivation layer.

[0050] FIG. 7 is a cross-sectional view of an exemplary HFET 700 including a composite passivation layer 799. In many respects, HFET 700 is similar to (or identical to) HFET 100 shown in FIG. 1 . However, one notable feature is that HFET 700 includes a second gate field plate 742 connected to a first gate field plate 740 and disposed between a second insulating layer 792 and a third passivation layer 795. It is understood that in another example of HFET 700, the areas of insulating layers 770 and 792 do not occupy the entire composite passivation layer. In this example, the lateral boundaries of first insulating layer 770 may be substantially coextensive with the lateral boundaries of first gate field plate 740, and the lateral boundaries of second insulating layer 792 may be substantially coextensive with the second gate field plate 742. In other words, the insulating layers 770 and 792 do not span the entire distance between the source electrode 725 and the drain electrode 730 .

[0051] FIG. 8 is a cross-sectional view of an exemplary HFET 800 including a composite passivation layer 899. HFET 800 is similar in many respects to the HFETs shown in previous figures. However, HFET 800 includes a third composite passivation layer including a third passivation layer 887 and a third insulating layer 894. HFET 800 further includes a fourth passivation layer 896. Third insulating layer 894 is disposed between third passivation layer 887 and fourth passivation layer 896. A second gate field plate 842 is disposed between second passivation layer 875 and third passivation layer 887 and is connected to first gate field plate 840. As shown, a third gate field plate 846 is disposed between third insulating layer 894 and fourth passivation layer 896. Third gate field plate 846 is connected to second gate field plate 842. It is understood that in another embodiment of HFET 800, the areas of insulating layers 870, 892, and 894 do not occupy the entirety of composite passivation layer 899. In this example, the lateral boundaries of third insulating layer 894 are substantially coextensive with third gate field plate 846. In other words, insulating layers 870, 892, and 894 do not extend the entire distance between source electrode 825 and drain electrode 830.

[0052] FIG. 9 is a cross-sectional view of an exemplary HFET 900 including a composite passivation layer 999. The HFET 900 is similar in many respects to the HFETs shown in FIGS. 1-4, 7, and 8. However, the HFET 900 includes another exemplary second gate-connected field plate 942. The second gate field plate 942 is coupled to the first gate field plate 940. It is understood that in another embodiment of the HFET 900, the areas of the insulating layers 970, 992, and 994 do not occupy the entire composite passivation layer. In other words, as with other HFET embodiments, the insulating layers 970, 992, and 994 do not extend the entire distance between the source electrode 825 and the drain electrode 830.

[0053] HFET 900 includes a first semiconductor material 905, a second semiconductor material 910, and a heterojunction 915 disposed therebetween. HFET 900 further includes multiple composite passivation layers. The first composite passivation layer includes a first insulating layer 970 and a first passivation layer 965, with first passivation layer 965 disposed between second semiconductor material 910 and first insulating layer 970. The second composite passivation layer includes a second insulating layer 992 and a second passivation layer 975, with second passivation layer 975 disposed between first insulating layer 970 and second insulating layer 992. The third composite passivation layer includes a third insulating layer 994 and a third passivation layer 987. A third passivation layer 987 is disposed between the second insulating layer 992 and the third insulating layer 994. In the illustrated example, a first gate field plate 940 is disposed between the first passivation layer 965 and the second passivation layer 975. Additionally, a gate dielectric 955 is disposed between the first passivation layer 965 and the second semiconductor material 910. A gate electrode 935 is disposed between the gate dielectric 955 and the first passivation layer 965. The HFET 900 includes a fourth passivation layer 996, and the third insulating layer 994 is disposed between the fourth passivation layer 996 and the third passivation layer 987.

[0054] In one example, the second gate field plate 942 extends from the second passivation layer 975, through the second insulating layer 992, through the third passivation layer 987, and into the fourth passivation layer 996. Note that in the illustrated example, the second gate field plate 942 includes a large, continuous bulk metal portion disposed within the third passivation layer 987. In one example, the lateral dimensions of the bulk portion of the second gate field plate 942 occupy less than 50% of the distance between the source electrode 925 and the drain electrode 930 within the third passivation layer 987. In another example, the lateral dimensions of the bulk portion of the second gate field plate 942 occupy less than 33% of the distance between the source electrode 925 and the drain electrode 930 within the third passivation layer 987. In the example shown, the second gate field plate 942 has a larger cross-sectional diameter than the first gate field plate 940, and the second gate field plate 942 is disposed above the first gate field plate 940. As depicted, the second gate field plate 942 includes a component disposed between a third passivation layer 987 and a fourth passivation layer 996. In the illustrated example, this component is segmented, but in other examples, this component may be continuous. It should be noted that in all of the examples depicted in FIGS. 1-4 , 7 , and 8 , the second gate field plate 942 can take any shape as the first gate field plate, the second gate field plate, and / or the third gate field plate. These shapes may be achieved by fabricating a single continuous gate field plate (e.g., the second gate field plate 942) rather than dividing the gate field plate fabrication process into many steps to form individual gate field plates.

[0055] In one embodiment, HFET 900 can be fabricated by the following method. Note that these steps can be performed in any order and even in parallel. Additionally, as will be appreciated by those skilled in the art, the following method may omit steps or alternatively include steps that are not necessarily required.

[0056] A first semiconductor material and a second semiconductor material are provided. A heterojunction is disposed between the first semiconductor material and the second semiconductor material. In one embodiment, the first semiconductor material and / or the second semiconductor material can include GaN.

[0057] Source and drain electrodes are formed on the second semiconductor material. In one example, the source and drain electrodes may extend into the second semiconductor material and may also contact the first semiconductor material.

[0058] A gate dielectric is formed on the second semiconductor material. In one example, the gate dielectric is AlO x , HfO x or other suitable dielectric material (high-k or otherwise).

[0059] A gate electrode is formed near the surface of the second semiconductor material, and a gate dielectric is disposed between the gate electrode and the second semiconductor material.

[0060] The plurality of composite passivation layers are deposited near the gate dielectric, and the gate dielectric is disposed between the plurality of composite passivation layers and the second semiconductor material. In one example, a first composite passivation layer in the plurality of composite passivation layers includes a first passivation layer and a first insulating layer. The first passivation layer is disposed between the gate dielectric and the first insulating layer. In another example or the same example, a second composite passivation layer in the plurality of composite passivation layers includes a second passivation layer and a second insulating layer. The second passivation layer is disposed between the first insulating layer and the second insulating layer.

[0061] Next, patterned grooves are etched into the multiple composite passivation layers to form one or more gate field plates. The shape of these patterned grooves can be controlled by depositing and dissolving photoresist (positive or negative) on the appropriate layers of the device architecture. The groove shape can match the shape of the field plate to be formed (see the description of the first, second, and third gate field plates above in connection with Figures 1-4 and 7-9 for details of the groove shape). In one example, etching of the first composite passivation layer can be performed before forming the second composite passivation layer. However, in another example, multiple composite passivation layers can be formed and then all etched together. Etching can include wet and / or dry etching. Note that the passivation layer can include SiN, which etches up to 100 times faster than the insulating layer, depending on the etchant and process used. Therefore, the insulating layer and / or gate dielectric can be used as an etch stop layer to precisely control the shape of the gate field plate.

[0062] The etched pattern / holes can then be backfilled with metal or other conductive material to form gate field plates (such as the first gate field plate, second gate field plate, and third gate field plate in FIGS. 1-4 and 7-9 and related descriptions). Field plates can be deposited in one or many steps, and their shapes can include one continuous layer or multiple independent structures. In the example shown in FIG. 9, the bulk of the second gate field plate 942 can be formed by depositing metal in a trench etched in the third passivation layer 987 in one metal deposition step. The portion of the second gate field plate 942 disposed on the third passivation layer 987 can then be patterned and deposited.

[0063] It should be noted that after the gate field plate is formed, excess metal / deposition flux may be removed, such as by chemical-mechanical polishing. After forming the various field plate architectures, additional insulating and / or passivation layers may be deposited. Additionally, the above process may be used to fabricate any of the geometric structures depicted in the figures and described herein.

[0064] The above description of illustrated examples of the present invention, including what is described in the Abstract, is not intended to be exhaustive or to limit the invention to the precise form disclosed. While specific examples of the present invention are described herein for illustrative purposes, various modifications within the scope of the present invention, as those skilled in the art will recognize, are possible.

[0065] These modifications can be made to the invention in light of the above detailed description. The terms used in the following claims should not be construed to limit the invention to the specific examples disclosed in the specification. Rather, the scope of the invention is to be defined entirely by the following claims, which are to be construed in accordance with established doctrines of claim interpretation.

[0066] [Additional note 1] a heterojunction between a first semiconductor material and a second semiconductor material, the heterojunction is disposed between the first semiconductor material and the second semiconductor material; the first semiconductor material, the second semiconductor material, and the heterojunction; a plurality of composite passivation layers, a first composite passivation layer in the plurality of composite passivation layers includes a first insulating layer and a first passivation layer; a second composite passivation layer in the plurality of composite passivation layers includes a second insulating layer and a second passivation layer; the second passivation layer is disposed between the first insulating layer and the second insulating layer; the plurality of composite passivation layers; a gate dielectric disposed between the first passivation layer and the second semiconductor material; the gate electrode disposed between the gate dielectric and the first passivation layer; a first gate field plate disposed between the first passivation layer and the second passivation layer; A source electrode and a drain electrode, the source electrode and the drain electrode are coupled to the second semiconductor material; the source electrode and the drain electrode; A source field plate, the source field plate is coupled to the source electrode; the source field plate; A high voltage field effect transistor (HFET) comprising: [Additional note 2] the first gate field plate is connected to the gate electrode; Attached item 1 describes an HFET. [Additional note 3] further comprising a third passivation layer; the second insulating layer is disposed between the second passivation layer and the third passivation layer; Attached item 1 describes an HFET. [Additional note 4] further comprising a second gate field plate disposed between the second insulating layer and the third passivation layer. The HFET described in Appendix 3. [Additional note 5] the source field plate is disposed between the second passivation layer and the third passivation layer; the first gate field plate is disposed between the first insulating layer and the second passivation layer. The HFET described in Appendix 3. [Additional note 6] a lateral boundary of the first insulating layer is substantially coextensive with a lateral boundary of the source field plate; a lateral boundary of the second insulating layer substantially coextensive with the lateral boundary of the source field plate; The HFET described in appended item 5. [Additional note 7] a third composite passivation layer including the third passivation layer and a third insulating layer; a fourth passivation layer, the third insulating layer is disposed between the third passivation layer and the fourth passivation layer; the fourth passivation layer; a second gate field plate coupled to the first gate field plate, the second gate field plate is disposed between the second passivation layer and the third passivation layer; the source field plate is disposed between the third passivation layer and the fourth passivation layer. the second gate field plate; 4. The HFET according to claim 3, further comprising: [Additional note 8] a third gate field plate coupled to the second gate field plate and disposed between the third passivation layer and the fourth passivation layer; Item 7. The HFET according to item 7. [Additional note 9] a lateral boundary of the first insulating layer substantially coextensive with a lateral boundary of the first gate field plate; a lateral boundary of the second insulating layer substantially coextensive with a lateral boundary of the second gate field plate; a lateral boundary of the third insulating layer is substantially coextensive with a lateral boundary of the source field plate; Item 7. The HFET according to item 7. [Additional Note 10] the gate dielectric and the first insulating layer in the plurality of composite passivation layers comprise the same material composition; Attached item 1 describes an HFET. [Additional Note 11] the first passivation layer and the second passivation layer in the plurality of composite passivation layers comprise SiN; the gate dielectric and the first insulating layer comprise a metal oxide; Attached item 1 describes an HFET. [Additional Note 12] an insulating layer in the plurality of composite passivation layers is arranged to prevent charging of the passivation layer in the plurality of composite passivation layers; Attached item 1 describes an HFET. [Additional Note 13] the drain electrode extends from the second semiconductor material through at least one of the plurality of composite passivation layers; Attached item 1 describes an HFET. [Additional Note 14] a heterojunction between a first semiconductor material and a second semiconductor material, the heterojunction is disposed between the first semiconductor material and the second semiconductor material; the first semiconductor material, the second semiconductor material, and the heterojunction; a plurality of composite passivation layers including a first composite passivation layer, a second composite passivation layer, and a third composite passivation layer; the first composite passivation layer includes a first insulating layer and a first passivation layer; the first passivation layer is disposed between the second semiconductor material and the first insulating layer; the second composite passivation layer includes a second insulating layer and a second passivation layer; the second passivation layer is disposed between the first insulating layer and the second insulating layer; the third composite passivation layer includes a third insulating layer and a third passivation layer; the third passivation layer is disposed between the second insulating layer and the third insulating layer; the plurality of composite passivation layers; a first gate field plate disposed between the first passivation layer and the second passivation layer; a second gate field plate coupled to the first gate field plate, the second gate field plate extends from the second passivation layer through the third insulating layer; the second gate field plate; A high voltage field effect transistor (HFET) comprising: [Additional Note 15] a gate dielectric disposed between the first passivation layer and the second semiconductor material; a gate electrode disposed between the gate dielectric and the first passivation layer; Item 15. The HFET according to item 14, further comprising: [Additional Note 16] further comprising a fourth passivation layer; the third insulating layer is disposed between the fourth passivation layer and the third passivation layer; the second gate field plate extends from the second passivation layer, through the second insulating layer, through the third passivation layer, and into the fourth passivation layer. Item 14. The HFET according to item 14. [Additional Note 17] the second gate field plate comprises metal and is continuous; Item 14. The HFET according to item 14. [Additional Note 18] further comprising a source field plate coupled to the source electrode; the third passivation layer is disposed between the source field plate and the second insulating layer. Item 14. The HFET according to item 14. [Additional Note 19] forming a heterojunction between the first semiconductor material and the second semiconductor material; forming a source electrode and a drain electrode, the source electrode and the drain electrode are coupled to the second semiconductor material; forming the source electrode and the drain electrode; depositing a gate dielectric; the second semiconductor material is disposed between the gate dielectric and the first semiconductor material. depositing said gate dielectric; depositing a plurality of composite passivation layers; a first composite passivation layer in the plurality of composite passivation layers includes a first insulating layer and a first passivation layer; the first passivation layer is disposed between the gate dielectric and the first insulating layer; depositing the plurality of composite passivation layers; forming a gate electrode between the gate dielectric and the plurality of composite passivation layers; depositing a second composite passivation layer in the plurality of composite passivation layers, the second composite passivation layer including a second insulating layer and a second passivation layer; the second passivation layer is disposed between the first insulating layer and the second insulating layer; depositing the second composite passivation layer; forming a first gate field plate between the first passivation layer and the second passivation layer; A method for manufacturing a high voltage field effect transistor (HFET), comprising: [Additional Note 20] the first insulating layer has a larger bandgap than the first passivation layer; The method according to appended item 19. [Additional Note 21] the first gate field plate is connected to the gate electrode; The method according to appended item 19. [Additional Note 22] further comprising forming a source field plate on the second insulating layer. The method according to appended item 19. [Additional Note 23] forming a second gate field plate coupled to the first gate field plate; the second gate field plate is disposed on the second insulating layer. The method according to appended item 19. [Additional note 24] depositing the plurality of composite passivation layers includes depositing the first insulating layer and the second insulating layer such that a lateral boundary between the first insulating layer and the second insulating layer is less than a lateral distance between the source electrode and the drain electrode. The method according to appended item 19. [Additional note 25] depositing a third composite passivation layer including a third insulating layer and a third passivation layer; the third passivation layer is disposed between the second insulating layer and the third insulating layer; depositing the third composite passivation layer; forming a second gate field plate coupled to the first gate field plate; the second gate field plate is disposed between the second passivation layer and the third passivation layer. forming the second gate field plate; forming a source field plate, the third passivation layer is disposed between the source field plate and the second insulating layer. forming the source field plate; 20. The method of claim 19, further comprising: [Additional note 26] forming a third gate field plate coupled to the second gate field plate and disposed on the third insulating layer. The method described in appended item 25. [Additional note 27] further comprising depositing a fourth passivation layer; the fourth passivation layer is disposed on the source field plate and the third insulating layer. The method described in appended item 25. [Additional note 28] the first gate field plate is disposed between the first insulating layer and the second passivation layer. The method according to appended item 20. [Additional note 29] the first passivation layer comprises SiN, and the gate dielectric and the first insulating layer comprise a metal oxide; The method according to appended item 20.

Claims

1. a heterojunction between a first semiconductor material and a second semiconductor material, the heterojunction being disposed between the first semiconductor material and the second semiconductor material; a plurality of composite passivation layers including a first composite passivation layer, a second composite passivation layer, and a third composite passivation layer; the first composite passivation layer includes a first insulating layer and a first passivation layer; the first passivation layer is disposed between the second semiconductor material and the first insulating layer; the second composite passivation layer includes a second insulating layer and a second passivation layer; the second passivation layer is disposed between the first insulating layer and the second insulating layer; the third composite passivation layer includes a third insulating layer and a third passivation layer; the third passivation layer is disposed between the second insulating layer and the third insulating layer; the first insulating layer and the second insulating layer in the plurality of composite passivation layers are made of a dielectric suitable for forming a gate insulator; the plurality of composite passivation layers; a fourth passivation layer, the third insulating layer being disposed between the fourth passivation layer and the third passivation layer; and a first gate field plate disposed between the first passivation layer and the second passivation layer, the first gate field plate being connected to a gate electrode; and a second gate field plate connected to the first gate field plate, the second gate field plate extends from the second passivation layer through the second insulating layer, through the third passivation layer, and into the fourth passivation layer. the second gate field plate; a gate dielectric disposed between the first passivation layer and the second semiconductor material, the gate electrode being disposed between the gate dielectric and the first passivation layer; A high voltage field effect transistor comprising:

2. the second gate field plate comprises metal and is continuous; 10. The high voltage field effect transistor of claim 1.

3. the first insulating layer and the second insulating layer have a wider bandgap than the first passivation layer and the second passivation layer; 3. The high-voltage field-effect transistor according to claim 1 or claim 2.

4. the first insulating layer and the second insulating layer are longer than the source field plate but do not occupy the entire length of each of the composite passivation layers; 10. The high voltage field effect transistor of claim 1.

5. a lateral boundary of the first insulating layer is coextensive with a lateral boundary of the first gate field plate; a lateral boundary of the second insulating layer is coextensive with a lateral boundary of the second gate field plate; a lateral boundary of the third insulating layer is coextensive with a lateral boundary of a source field plate; 10. The high voltage field effect transistor of claim 1.

6. the gate dielectric and the first insulating layer in the plurality of composite passivation layers are made of the same material composition; 10. The high voltage field effect transistor of claim 1.

7. the first passivation layer and the second passivation layer in the plurality of composite passivation layers comprise SiN; the gate dielectric and the first insulating layer comprise a metal oxide; 10. The high voltage field effect transistor of claim 1.

8. A method comprising fabricating a high voltage field effect transistor according to any one of claims 1 to 7.

9. the first insulating layer has a wider bandgap than the first passivation layer; The method of claim 8.

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