Manufacturing method, inspection method, and inspection device

Abstract

This manufacturing method for a semiconductor device comprises: a first step for creating a first member by forming a layered film by growing a crystal on a sapphire substrate, forming an insulating film on the layered film, and forming contact holes in an electrical connection location for an n-GaN layer and an electrical connection location for a p-GaN layer in the insulating film; a second step for creating a second member by forming an electroconductive layer on the first member, the electroconductive layer electrically connecting the electrical connection location of the n-GaN layer and the electrical connection location of the p-GaN to each other; a third step for irradiating the second member with excitation light, and measuring light emission generated at the second member; and a fourth step for creating a semiconductor device by forming a first pad electrode and a second pad electrode.

Description

[Technical Field]

[0001] One aspect of the present invention relates to a manufacturing method, an inspection method, and an inspection apparatus for a semiconductor device. [Background technology]

[0002] As a method for determining whether a group of light-emitting elements formed on a wafer is formed, a method is known in which the photoluminescence emitted by the light-emitting elements is observed and the pass / fail of the light-emitting elements is determined based on the brightness of the photoluminescence (see, for example, Patent Document 1). This method makes it possible to efficiently inspect a large number of minute light-emitting elements, compared to a method in which the pass / fail of light-emitting elements is determined by probing (i.e., based on electrical characteristics), for example. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-163857 Summary of the Invention [Problem to be solved by the invention]

[0004] Here, the above-described photoluminescence observation method can detect leak defects, but cannot properly detect contact defects (open defects, high resistance defects, high threshold defects). For this reason, with the above-described photoluminescence observation method, defective light-emitting elements (light-emitting elements with contact defects) may be included among light-emitting elements that are determined to be good because they do not have leak defects, and there is a risk that the quality of the light-emitting elements cannot be properly determined.

[0005] One embodiment of the present invention has been made in view of the above circumstances, and an object of the present invention is to appropriately detect contact failure of a light-emitting element. [Means for solving the problem]

[0006] A method for manufacturing a semiconductor device according to one embodiment of the present invention is a method for manufacturing a semiconductor device having a plurality of light-emitting elements formed thereon, and includes the following steps: a first step of growing a crystal on a substrate to form a laminated film including a buffer layer, an N layer, an emitting layer, and a P layer, forming an insulating film on the laminated film, and forming contact holes in the insulating film at the electrical connection points of the N layer and the electrical connection points of the P layer to generate a first member; a second step of forming a conductive layer on the surface of the first member on which the insulating film is formed, to generate a second member in which the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other by the conductive layer; a third step of irradiating light onto the second member and measuring the light emission generated in the second member; and a fourth step of processing the conductive layer formed on the second member to form a first pad electrode corresponding to the electrical connection points of the N layer and a second pad electrode corresponding to the electrical connection points of the P layer, thereby generating a semiconductor device.

[0007] In one embodiment of the present invention, a semiconductor device manufacturing method includes forming a stacked film and an insulating film, forming contact holes in the insulating film at the electrical connection points of the N layer and the electrical connection points of the P layer, forming a conductive layer on the insulating film, and processing the conductive layer to form pad electrodes. During this manufacturing process, a second member on which the conductive layer is formed is irradiated with light, and light emitted from the second member is measured. Here, in the second member on which the conductive layer is formed, the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other by the conductive layer, creating a short circuit. In such a short-circuited second member, carrier recombination is unlikely to occur in a portion that would become a good light-emitting element, resulting in reduced light emission brightness. On the other hand, in a portion that would become a light-emitting element with poor contact, carrier recombination actively occurs internally, even when the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other by the conductive layer (short-circuited state), resulting in higher light emission brightness than a good light-emitting element. Thus, the brightness of light emitted from the second member when the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other by the conductive layer varies depending on whether or not there is a contact failure. Therefore, as in the manufacturing method according to one embodiment of the present invention, by irradiating light onto the second member in which the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other by the conductive layer and measuring the light emission from the second member, it is possible to distinguish between portions of the light-emitting element that have contact defects and portions of the light-emitting element that do not have contact defects based on the brightness of the measured light emission. This makes it possible to appropriately detect contact defects in the light-emitting element and improve the accuracy of determining whether the light-emitting element is good or bad. Furthermore, in the manufacturing method of a semiconductor device according to one embodiment of the present invention, as described above, contact defects can be detected during the manufacturing process of the semiconductor device, making it easier and faster to detect contact defects than, for example, when a separate inspection is performed to detect contact defects (a separate inspection is performed outside the manufacturing process).

[0008] The manufacturing method may further include a fifth step, after the fourth step, of irradiating the semiconductor device with light and measuring the light emitted from the semiconductor device. In the semiconductor device produced through the fourth step, a first pad electrode and a second pad electrode are formed, and the electrical connection points of the N layer and the P layer are not electrically connected to each other. The brightness of the light emitted from such a semiconductor device varies depending on whether or not there is a leakage defect. Therefore, by irradiating the semiconductor device after the fourth step with light and measuring the light emitted from the semiconductor device, it is possible to distinguish between portions of the light-emitting element that have a leakage defect and portions of the light-emitting element that do not have a leakage defect based on the brightness of the measured light emission. This allows for appropriate detection of leakage defects in the light-emitting element.

[0009] The manufacturing method may further include a sixth step of identifying a portion of the light-emitting element having a contact defect based on the measurement result in the third step, and identifying a portion of the light-emitting element having a leakage defect based on the measurement result in the fifth step, and determining whether the light-emitting element is a good or defective product based on the identification result obtained by doing so. With this configuration, light-emitting elements having a contact defect and light-emitting elements having a leakage defect can be properly detected as defective products, thereby improving the accuracy of determining whether the light-emitting element is good or defective.

[0010] The manufacturing method may further include a seventh step of identifying positions in the reflection image corresponding to each light-emitting element of the semiconductor device based on a reflection image obtained by irradiating the second member with light and measuring the light reflected from the second member and on previously acquired design data for the semiconductor device, thereby making it possible to determine which light-emitting element in the design data emits light when the light is measured.

[0011] An inspection method according to one aspect of the present invention includes a conductive layer forming step of forming a conductive layer on a surface of an insulating film formed on a laminate film of a measurement object on which a plurality of light-emitting elements are formed, such that the electrical connection points of the N layer and the electrical connection points of the P layer in the insulating film on the laminate film are electrically connected to each other; and a first measurement step of irradiating the measurement object with light and measuring the light emitted from the measurement object when the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other by the conductive layer. In the inspection method according to one aspect of the present invention, when the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other by the conductive layer, light is irradiated onto the measurement object and the light emitted from the measurement object is measured. Here, the state in which the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other is a short-circuited state. In such a short-circuited measurement object, carrier recombination is less likely to occur in the portions that would become good light-emitting elements, resulting in reduced light emission brightness. On the other hand, in the portion of the light-emitting element with poor contact, even when the electrical connection points of the N layer and the P layer are electrically connected to each other (short-circuited state) by the conductive layer, carrier recombination actively occurs internally, resulting in a higher light emission brightness than that of a good product. Thus, the brightness of the light emitted from the measurement object when the electrical connection points of the N layer and the P layer are electrically connected to each other by the conductive layer varies depending on whether or not there is a poor contact. Therefore, as in one embodiment of the present invention, by irradiating light onto the measurement object where the electrical connection points of the N layer and the P layer are electrically connected to each other by the conductive layer and measuring the light emission from the measurement object, it is possible to distinguish between portions of the light-emitting element with poor contact and portions of the light-emitting element without poor contact based on the brightness of the measured light emission. This allows for appropriate detection of contact defects in the light-emitting element and improves the accuracy of determining the quality of the light-emitting element.

[0012] The above inspection method may further include a second measurement step of irradiating the measurement object with light and measuring the light emitted from the measurement object when the conductive layer is processed so that the electrical connection points of the N layer and the electrical connection points of the P layer are not electrically connected to each other. The brightness of the light emitted from a semiconductor device in which the electrical connection points of the N layer and the electrical connection points of the P layer are not electrically connected to each other varies depending on the presence or absence of a leakage defect. Therefore, by irradiating light onto such a semiconductor device and measuring the light emitted from the semiconductor device, it becomes possible to distinguish between light-emitting element portions with a leakage defect and light-emitting element portions without a leakage defect based on the brightness of the measured light emission. This allows for appropriate detection of leakage defects in the light-emitting element.

[0013] The inspection method may further include a determination step of identifying a portion of the light-emitting element that has a contact defect based on the measurement result in the first measurement step, identifying a portion of the light-emitting element that has a leakage defect based on the measurement result in the second measurement step, and determining whether the light-emitting element is good or bad based on the identification results. With this configuration, light-emitting elements that have a contact defect and light-emitting elements that have a leakage defect can be appropriately detected as defective, thereby improving the accuracy of determining whether the light-emitting element is good or bad.

[0014] The inspection method may further include a step of identifying positions in the reflected image corresponding to each light-emitting element of the measurement object based on a reflected image obtained by irradiating the measurement object with light and measuring the reflected light from the measurement object and on design data of the measurement object that has been acquired in advance, thereby making it possible to determine which light-emitting element in the design data is emitting the light when the light is measured.

[0015] An inspection device according to one aspect of the present invention includes a light irradiation unit that irradiates a measurement object on which a plurality of light-emitting elements are formed, an optical measurement unit that measures the light emitted from the measurement object in response to the light irradiated by the light irradiation unit, and a processing unit that outputs the measurement results from the optical measurement unit. The processing unit outputs the measurement results from the optical measurement unit when a conductive layer is formed on the surface of the measurement object on which an insulating film is formed, such that the electrical connection points of the N layer and the P layer in the insulating film are electrically connected to each other. As described above, when the electrical connection points of the N layer and the P layer are electrically connected to each other (short-circuited state), the brightness of the light emitted from the measurement object varies depending on whether or not there is a contact failure. Therefore, by outputting the measurement results from the optical measurement unit when a conductive layer is formed and the electrical connection points of the N layer and the P layer are electrically connected to each other, as in the inspection device according to one aspect of the present invention, it is possible to distinguish between light-emitting elements with contact failures and light-emitting elements without contact failures based on the brightness of the measured light emission. This allows for appropriate detection of contact failures in light-emitting elements and improves the accuracy of determining whether or not the light-emitting elements are good.

[0016] The processing unit may output the measurement results from the optical measurement unit when the conductive layer is processed so that the electrical connection points of the N layer and the electrical connection points of the P layer are not electrically connected to each other. As described above, the brightness of the light emitted from the measurement object when the electrical connection points of the N layer and the electrical connection points of the P layer are not electrically connected to each other varies depending on whether or not there is a leak defect. Therefore, by outputting the measurement results from the optical measurement unit when the electrical connection points of the N layer and the electrical connection points of the P layer are not electrically connected to each other, it becomes possible to distinguish between parts of the light-emitting element that have a leak defect and parts of the light-emitting element that do not have a leak defect based on the brightness of the measured light emission. This allows for appropriate detection of leak defects in the light-emitting element.

[0017] The processing unit may identify a portion of the light-emitting element that has a contact defect based on the measurement result by the optical measurement unit when the electrical connection portion of the N layer and the electrical connection portion of the P layer are electrically connected to each other, and may identify a portion of the light-emitting element that has a leakage defect based on the measurement result by the optical measurement unit when the electrical connection portion of the N layer and the electrical connection portion of the P layer are not electrically connected to each other, and may determine whether the light-emitting element is good or bad based on the identification result. With this configuration, it is possible to appropriately detect light-emitting elements that have a contact defect and light-emitting elements that have a leakage defect as defective, thereby improving the accuracy of determining whether the light-emitting element is good or bad.

[0018] The light measurement unit may further measure reflected light from the measurement object in response to the light irradiated by the light irradiation unit, and the processing unit may identify positions in the reflected image corresponding to each light-emitting element of the measurement object based on a reflected image obtained by measuring the reflected light in the light measurement unit and design data of the measurement object acquired in advance. This makes it possible to determine which light-emitting element in the design data is emitting the light when the light emission is measured. [Effects of the Invention]

[0019] According to one embodiment of the present invention, contact failure of a light-emitting element can be appropriately detected. [Brief explanation of the drawings]

[0020] [Figure 1] 1 is a configuration diagram of an inspection device 1 according to an embodiment of the present invention. [Figure 2] 10 shows the results of imaging by a camera, where (a) is a reflected image, (b) is a PL image showing a leak defect, and (c) is a PL image showing a contact defect. [Figure 3] 1A to 1C are diagrams illustrating a manufacturing process of a semiconductor device. [Figure 4] 1A to 1C are diagrams illustrating a manufacturing process of a semiconductor device. [Figure 5] 1A to 1C are diagrams illustrating manufacturing and inspection processes for semiconductor devices. [Figure 6]1A to 1C are diagrams illustrating manufacturing and inspection processes for semiconductor devices. [Figure 7] 1 is a flowchart showing the steps of a method for manufacturing a semiconductor device. DETAILED DESCRIPTION OF THE INVENTION

[0021] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each drawing, the same or corresponding parts are designated by the same reference numerals, and redundant explanations will be omitted.

[0022] FIG. 1 is a configuration diagram of an inspection apparatus 1 according to the present embodiment. The inspection apparatus 1 is an apparatus for inspecting a sample S (measurement object). The sample S is a semiconductor device having multiple light-emitting elements formed on a wafer. Note that the sample S (measurement object) described in this embodiment includes not only completed semiconductor devices but also semiconductor devices under fabrication (unfinished). In semiconductor devices under fabrication, light-emitting elements may be in the process of being formed. Terms such as "portions that will become light-emitting elements" or "portions of light-emitting elements" are more accurate terms for referring to such light-emitting elements under formation. However, hereinafter, such light-emitting elements under formation may also be referred to simply as "light-emitting elements." Examples of light-emitting elements include LEDs, mini-LEDs, μLEDs, SLD elements, laser elements, and vertical cavity surface lasers (VCSELs). The inspection apparatus 1 observes photoluminescence (specifically, fluorescence) for each of the multiple light-emitting elements formed on the sample S to determine whether the light-emitting element is a defective product due to a contact failure or leakage failure, or whether the light-emitting element is a non-defective product. Note that such light-emitting elements may also be inspected by, for example, probing (i.e., based on electrical characteristics). However, for minute LEDs such as μLEDs, probing by placing a needle on the LED to measure it is physically difficult. In this regard, the photoluminescence-based light-emitting element inspection method according to the present embodiment can perform inspection by acquiring a fluorescent image, so that a large number of light-emitting elements can be inspected efficiently without being bound by physical constraints.

[0023] 1, the inspection apparatus 1 includes a chuck 11, an XY stage 12, an excitation light source 20 (light irradiation unit), an optical system 30, a dichroic mirror 40, an objective lens 51, a Z stage 52, an imaging lens 72, a camera 82 (light measurement unit), a dark box 90, a control device 100 (processing unit), and a monitor 110. The dark box 90 houses all of the above-mentioned components except for the control device 100 and the monitor 110, and is provided to prevent the components housed therein from being affected by external light. Note that the components housed in the dark box 90 may be mounted on a vibration isolation table to improve the quality of the image captured by the camera 82 (to improve image quality and prevent image misalignment).

[0024] The chuck 11 is a holding member that holds the sample S. The chuck 11 holds the sample S, for example, by vacuum-suctioning a wafer of the sample S. The XY stage 12 is a stage that moves the chuck 11, which holds the sample S, in the X and Y directions (front-back and left-right directions), i.e., in the direction along the surface of the chuck 11 on which the sample S is placed. The XY stage 12 moves the chuck 11 in the X and Y directions under the control of the control device 100 so that each of the multiple light-emitting elements is sequentially illuminated by the excitation light. The inspection device 1 may further include a rotation stage (Θ stage, not shown). Such a rotation stage may be provided, for example, above the XY stage 12 and below the chuck 11, or may be provided integrally with the XY stage 12. The rotation stage is used to accurately align the vertical and horizontal positions of the sample S. The provision of the rotation stage reduces the time required for alignment and the total time required for data processing.

[0025] The excitation light source 20 is a light irradiation unit that generates excitation light to be irradiated onto the sample S and irradiates the sample S with the excitation light. The excitation light source 20 may be any light source that can generate light including a wavelength that excites the light-emitting element of the sample S, and may be, for example, an LED, laser, halogen lamp, mercury lamp, D2 lamp, plasma light source, or the like. The inspection device 1 may further include a sensor that monitors the illumination brightness in order to keep the brightness of the excitation light emitted from the excitation light source 20 constant. Furthermore, in order to minimize shading, a diffuser plate, a fly's eye lens, or the like may be used at the position where the excitation light is emitted from the excitation light source 20 to uniformize the brightness distribution.

[0026] The optical system 30 includes an optical fiber cable 31 and a light-guiding lens 32. The optical fiber cable 31 is a light-guiding optical fiber cable connected to the excitation light source 20. For example, a polarization-maintaining fiber or a single-mode fiber can be used as the optical fiber cable 31. The light-guiding lens 32 is, for example, a single or compound convex lens, and guides the excitation light that has arrived via the optical fiber cable 31 toward the dichroic mirror 40. Note that in order to prevent the wavelength of the excitation light emitted from the excitation light source 20 from changing over time, the inspection device 1 may include a bandpass filter (not shown) between the excitation light source 20 and the dichroic mirror 40.

[0027] The dichroic mirror 40 is a mirror made of a special optical material that reflects light of a specific wavelength and transmits light of other wavelengths. Specifically, the dichroic mirror 40 is configured to reflect the excitation light toward the objective lens 51 and transmit photoluminescence (more specifically, fluorescence) from the light-emitting element, which is light in a wavelength band different from the excitation light, toward the imaging lens 72. Note that the normal emission spectrum of the excitation light may be lower in wavelength than the normal emission spectrum (normal fluorescence spectrum) of the fluorescence. In other words, the dichroic mirror 40 reflects the excitation light, which is light in a low wavelength band, toward the objective lens 51 and transmits the fluorescence, which is light in a higher wavelength band than the excitation light, toward the imaging lens 72.

[0028] The objective lens 51 is a component for observing the sample S, and focuses the excitation light guided by the dichroic mirror 40 onto the sample S. The Z stage 52 adjusts the focus by moving the objective lens 51 in the Z direction (up and down), i.e., in a direction intersecting the surface of the chuck 11 on which the sample S is placed.

[0029] The imaging lens 72 is a lens that forms an image of the fluorescence from the light-emitting element that has passed through the dichroic mirror 40 and guides the fluorescence to the camera 82. The camera 82 captures the fluorescence from the light-emitting element. That is, the camera 82 measures the light emission (fluorescence) generated in the sample S in response to the excitation light irradiated by the excitation light source 20 by capturing the image. The camera 82 detects the image formed by the imaging lens 72. The camera 82 outputs a PL image (fluorescence image), which is the imaging result, to the control device 100. The camera 82 is, for example, an area image sensor such as a CCD or MOS. The camera 82 may also be configured with a line sensor or a TDI sensor. As will be described later, the camera 82 also captures (measures) the light reflected from the sample S in response to the excitation light irradiated onto the sample S by the excitation light source 20.

[0030] The control device 100 controls the XY stage 12, the excitation light source 20, the Z stage 52, and the camera 82. Specifically, the control device 100 controls the XY stage 12 to adjust the irradiation area of ​​the excitation light (the irradiation area on the sample S). The control device 100 controls the Z stage 52 to adjust the focus of the excitation light. The control device 100 controls the excitation light source 20 to adjust the emission of the excitation light and the wavelength, amplitude, and other parameters of the excitation light. The control device 100 controls the camera 82 to make adjustments related to the acquisition of fluorescence images. The control device 100 also determines the acceptability of light-emitting elements based on the fluorescence images captured by the camera 82 (details will be described later). The control device 100 is a computer and physically includes memories such as RAM and ROM, a processor (arithmetic circuit) such as a CPU, a communication interface, and a storage unit such as a hard disk. Examples of such a control device 100 include a personal computer, a cloud server, and a smart device (a smartphone, a tablet terminal, etc.). The control device 100 functions by executing a program stored in memory on the CPU of a computer system. The monitor 110 is a display device that displays a PL image (fluorescence image) or the like, which is a measurement result.

[0031] Next, a manufacturing process of a semiconductor device that serves as the sample S in the inspection apparatus 1 will be described with reference to FIGS. 3 and 4. The manufacturing process of a semiconductor device is performed in a manufacturing apparatus 500 (see FIG. 5). In the manufacturing process, first, a sapphire substrate 401 is prepared as shown in FIG. 3(a). The sapphire substrate 401 may be produced through, for example, a single crystal growth process for producing an ingot, a processing process for slicing the sapphire ingot into thin slices, a CMP (Chemical Mechanical Polishing) process for polishing the substrate flat, and the like. Note that instead of the sapphire substrate 401, a substrate made of a different material suited to the semiconductor may be used.

[0032] Next, an epitaxial growth process is performed on the sapphire substrate 401, and a stacked film is formed on the sapphire substrate 401, including a buffer layer 402 (see FIG. 3(b)), an n-GaN layer 403 (see FIG. 3(c)) serving as an electron transport layer, a light-emitting layer 404 (see FIG. 3(d)), and a p-GaN layer 405 (see FIG. 3(e)) serving as a hole transport layer. The epitaxial growth process may be performed by, for example, a liquid phase epitaxy (LPE) method or a metal organic vapor phase epitaxy (MOVPE) method. The electron transport layer and the hole transport layer do not necessarily have to be made of GaN, but may be made of a semiconductor containing another element that does not cause a band energy and lattice spacing mismatch with the light-emitting layer 404. The positions of the n-GaN layer 403 and the p-GaN layer 405 may be reversed.

[0033] Next, as shown in FIG. 3(f), element isolation is performed. Specifically, resist application, patterning, etching, and resist removal are performed in this order. Next, as shown in FIG. 4(a), a process for exposing the n-GaN layer 403 is performed. Specifically, resist application, patterning, etching, and resist removal are performed in this order. Note that the order of the element isolation process shown in FIG. 3(f) and the process shown in FIG. 4(a) may be reversed.

[0034] Next, as shown in FIG. 4(b), an insulating film 406 is formed on the stacked film. Then, as shown in FIG. 4(c), contact holes H1 and H2 are formed in predetermined locations of the insulating film 406, penetrating the insulating film 406. The contact hole H1 is formed at an electrical connection location of the n-GaN layer 403 in the insulating film 406. The contact hole H2 is formed at an electrical connection location of the p-GaN layer 405 in the insulating film 406. The member produced through the steps up to this point is the first member S1.

[0035] Next, as shown in FIG. 4(d), a conductive layer 407 is formed on the surface of the first member S1 on which the insulating film 406 is formed. The conductive layer 407 is an electrode material, such as metal or ITO (Indium Tin Oxide). The conductive layer 407 is formed on substantially the entire surface on which the insulating film 406 is formed. Therefore, the conductive layer 407 electrically connects (conducts) the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 to each other. The member produced through the steps up to this point is the second member S2.

[0036] Next, the conductive layer 407 formed on the second member S2 is processed to form a first pad electrode 407A corresponding to the electrical connection portion of the n-GaN layer 403 and a second pad electrode 407B corresponding to the electrical connection portion of the p-GaN layer 405. Specifically, resist application, patterning, etching, and resist removal are performed in sequence to form the first pad electrode 407A and the second pad electrode 407B. In the semiconductor device S3 on which the first pad electrode 407A and the second pad electrode 407B are formed, the electrical connection portion of the n-GaN layer 403 and the electrical connection portion of the p-GaN layer 405 are not electrically connected to each other. This completes the semiconductor device manufacturing process.

[0037] In this embodiment, an inspection process for a semiconductor device is carried out during the manufacturing process of the semiconductor device described above. The inspection process during the manufacturing process of a semiconductor device will be described below. Figure 5 is a diagram illustrating an example of the manufacturing and inspection process for a semiconductor device.

[0038] In the example shown in FIG. 5, first, in the manufacturing apparatus 500, the following processes are performed on the sapphire substrate 401: epitaxial growth (see FIGS. 3(b) to 3(e)), element isolation (see FIG. 3(f)), a process for exposing the n-GaN layer 403 (see FIG. 4(a)), a process for forming an insulating film 406 (see FIG. 4(b)), a process for forming contact holes H1 and H2 (see FIG. 4(c)), and a conductive layer formation process for forming a conductive layer 407 (see FIG. 4(d)), thereby producing a second member S2. Then, in the inspection apparatus 1, the second member S2 is used as the sample S, and a first measurement step (described in detail below) is performed, which is PL measurement of the second member S2. As described in detail below, in a discrimination step after the first measurement step, the position of the contact failure in the second member S2 is identified, and data D1 indicating the position of the contact failure is output. Then, in the manufacturing apparatus 500, processes subsequent to the pad formation process (see FIG. 4(e)) for forming the first pad electrode 407A and the second pad electrode 407B on the second member S2 are carried out to produce the semiconductor device S3. Since the data D1 indicating the position of the contact defect has been acquired, it becomes possible to remove the light-emitting element with the contact defect in the semiconductor device S3 based on the data D1. As described above, in this embodiment, after the conductive layer formation process in the manufacturing process and before the pad formation process, the first measurement step, which is a PL measurement for identifying the position of the contact defect, is carried out.

[0039] The first measurement step is a step for detecting light-emitting elements with poor contact. After the conductive layer formation process (conductive layer formation step) described above, in a state where the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 are electrically connected to each other by the conductive layer 407 (i.e., before the pad formation process), the second member S2, which is the measurement target, is irradiated with light and the light emitted from the second member S2 is measured. In the first measurement step, with the second member S2 placed on the chuck 11, excitation light emitted from the excitation light source 20 is irradiated onto the surface (back surface) of the second member S2 on which the conductive layer 407 is not formed. If the conductive layer 407 is made of a transparent material such as ITO, the excitation light may be irradiated from the surface (front surface) on the conductive layer 407 side. The light emitted from the second member S2 in response to the excitation light then passes through the dichroic mirror 40, is focused by the imaging lens 72, and is detected (measured) as a PL image by the camera 82. Then, the control device 100 outputs the detection (measurement) results by the camera 82 in a state where the conductive layer 407 is formed so that the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 are electrically connected to each other, for the discrimination step described below.

[0040] The determining step is performed by the control device 100. In the determining step, the control device 100 identifies a light-emitting element that has a contact failure based on the measurement result in the first measuring step.

[0041] Identification of contact failure will now be described. The state in which the first measurement step is performed, in which the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 are electrically connected to each other by the conductive layer 407, is a state in which each light-emitting element in the second member S2 is short-circuited. In this state, carrier recombination is unlikely to occur in a good light-emitting element, resulting in a relatively low emission luminance. On the other hand, in a light-emitting element with contact failure, carrier recombination actively occurs within the light-emitting element even in a short-circuited state, resulting in a higher emission luminance compared to a good light-emitting element. Thus, the luminance of each light-emitting element measured in the first measurement step varies depending on whether or not there is a contact failure. The control device 100 identifies the luminance of each light-emitting element in the PL image and identifies a light-emitting element with contact failure based on the luminance. In the PL image of FIG. 2(c), only the luminance of a certain light-emitting element 200z is higher than the luminance of the other light-emitting elements. In such a case, the control device 100 identifies the light-emitting element 200z as a light-emitting element with contact failure. The control device 100 generates and outputs data D1, which is a contact failure map that defines the addresses (positions) of light-emitting elements with contact failures.

[0042] Then, based on data D1 that is the measurement result of the first measurement step, the control device 100 identifies the light-emitting element in the semiconductor device S3 that has a contact failure as a defective product and outputs the address of the defective light-emitting element. This prevents the defective light-emitting element from being used in subsequent processes, thereby improving the quality of panels and the like that use the light-emitting elements.

[0043] Fig. 6 is a diagram illustrating another example of the manufacturing and inspection process of a semiconductor device. In the example shown in Fig. 6, in addition to the process of Fig. 5, a semiconductor device S3 on which a pad formation process has been performed is used as a sample S, and a second measurement step is performed. Furthermore, a determination step corresponding to the second measurement step is performed.

[0044] The second measurement step is a step for detecting a light-emitting element having a leakage defect. The step involves irradiating light onto a semiconductor device S3, which has undergone a pad formation process and in which the electrical connection points of the n-GaN layer 403 and the p-GaN layer 405 are not electrically connected to each other, and measuring the light emitted from the semiconductor device S3. In the second measurement step, while the semiconductor device S3 is placed on the chuck 11, excitation light emitted from the excitation light source 20 is irradiated onto the semiconductor device S3. The light emitted from the semiconductor device S3 in response to the excitation light passes through the dichroic mirror 40, is focused by the imaging lens 72, and is detected (measured) as a PL image by the camera 82. The control device 100 then outputs the detection (measurement) results obtained by the camera 82 when the electrical connection points of the n-GaN layer 403 and the p-GaN layer 405 are not electrically connected to each other for the determination step described below.

[0045] In the determination step, the control device 100 identifies light-emitting elements that have a contact failure based on the measurement results in the first measurement step, and identifies light-emitting elements that have a leakage failure based on the measurement results in the second measurement step, and determines whether the light-emitting elements are good or bad based on the identification results. Identification of contact failure is as described above.

[0046] Identification of a leak defect will now be described. When the second measurement step is performed, i.e., when the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 are not electrically connected to each other, the light emission luminance of a leak defect (short defect) light-emitting element is extremely low compared to a good light-emitting element. The control device 100 identifies the luminance of each light-emitting element in the PL image and identifies a leak defect light-emitting element based on the luminance. In the PL image of FIG. 2(b), the luminance of a certain light-emitting element 200x is extremely low compared to the luminance of the other light-emitting elements. In such a case, the control device 100 identifies the light-emitting element 200x as a leak defect light-emitting element. The control device 100 generates and outputs data D2, which is a leak defect map that specifies the addresses (positions) of the leak defect light-emitting elements.

[0047] The control device 100 then identifies light-emitting elements with contact defects based on data D1, which is the measurement result from the first measurement step, and light-emitting elements with leakage defects based on data D2, which is the measurement result from the second measurement step, and distinguishes between pass and fail light-emitting elements based on the identification results. The control device 100 derives the exclusive OR of data D1 and D2 to identify light-emitting elements that do not have contact defects or leakage defects, classifies these light-emitting elements as pass, and classifies the remaining light-emitting elements as defective, and outputs the addresses of the defective light-emitting elements. This prevents the use of defective light-emitting elements in subsequent processes, thereby improving the quality of panels and other devices that use light-emitting elements. Furthermore, outputting the addresses of defective light-emitting elements allows the laser device 600 (see FIG. 6) to laser-remove the defective light-emitting elements. In this case, a semiconductor device S4 (see FIG. 6) can be produced from which the defective light-emitting elements have been removed.

[0048] Note that a specifying step for aligning the light-emitting elements may be performed before the first measurement step and the second measurement step. In the specifying step, the positions of the light-emitting elements of the sample S in the reflected image are specified (the light-emitting elements are aligned) based on a reflection image obtained by irradiating the sample S with light and measuring the reflected light from the sample S and previously acquired design data for the sample S. In the specifying step before the first measurement step, the light emitted from the excitation light source 20 is irradiated onto the second member S2, and the reflected light is detected by the camera 82 to obtain a reflection image (for example, an image as shown in FIG. 2(a)). In the specifying step before the second measurement step, the light emitted from the excitation light source 20 is irradiated onto the semiconductor device S3, and the reflected light is detected by the camera 82 to obtain a reflection image (for example, an image as shown in FIG. 2(a)). As shown in FIG. 2(a), the reflection image shows images corresponding to the light-emitting elements 200 and the electrodes 300. Then, for example, the control device 100 identifies the position in the reflected image corresponding to each light-emitting element of the sample S by comparing the reflected image with design data of the sample S. The design data here indicates at least the state (position, shape, etc.) of each light-emitting element and electrode of the sample S. In this way, by identifying the position of each light-emitting element of the sample S in the acquired image before the first measurement step and the second measurement step, it is possible to identify which light-emitting element each position in the PL images acquired in the first measurement step and the second measurement step corresponds to.

[0049] Next, the procedure of the method for manufacturing the semiconductor device S4 will be described with reference to Fig. 7. In this manufacturing method, an inspection step of the semiconductor device is carried out during the manufacturing process. Fig. 7 is a flowchart showing the procedure of the method for manufacturing the semiconductor device S4.

[0050] 7, an epitaxial growth process is first performed, in which a crystal is grown on a sapphire substrate 401 to form a stacked film including a buffer layer 402, an n-GaN layer 403, a light-emitting layer 404, and a p-GaN layer 405, an insulating film 406 is formed on the stacked film, and further, a contact hole H1 is formed in the insulating film 406 at the electrical connection portion of the n-GaN layer 403, and a contact hole H2 is formed in the insulating film 406 at the electrical connection portion of the p-GaN layer 405 (first step, step S101). The first step produces a first member S1.

[0051] Next, a conductive layer 407 is formed on the entire surface of the first member S1 on which the insulating film 406 is formed (second step, step S102). In the second step, a second member S2 is produced in which the electrical connection portions of the n-GaN layer 403 and the electrical connection portions of the p-GaN layer 405 are electrically connected to each other by the conductive layer 407.

[0052] Next, PL measurement is performed by irradiating the second member S2 with excitation light and measuring the light emitted from the second member S2 (third step, step S103). In this case, the control device 100 identifies the brightness of each light-emitting element in the PL image and identifies light-emitting elements with contact failures based on the brightness. The control device 100 generates and outputs data D1, which is a contact failure map that specifies the addresses (positions) of light-emitting elements with contact failures.

[0053] Next, the conductive layer 407 formed on the second member S2 is processed to form a first pad electrode 407A corresponding to the electrical connection portion of the n-GaN layer 403 and a second pad electrode 407B corresponding to the electrical connection portion of the p-GaN layer 405 (fourth step, step S104). In this way, in the semiconductor device S3 on which the first pad electrode 407A and the second pad electrode 407B are formed, the electrical connection portion of the n-GaN layer 403 and the electrical connection portion of the p-GaN layer 405 are not electrically connected to each other.

[0054] Next, PL measurement is performed (fifth step, step S105), in which excitation light is irradiated onto the semiconductor device S3 and light emitted from the semiconductor device S3 is measured. In this case, the control device 100 identifies the brightness of each light-emitting element in the PL image and identifies light-emitting elements with leak defects based on the brightness. The control device 100 generates and outputs data D2, which is a leak defect map that specifies the addresses (positions) of light-emitting elements with leak defects.

[0055] Next, light-emitting elements with contact defects are identified based on data D1, and light-emitting elements with leakage defects are identified based on data D2, and based on the identification results, the light-emitting elements are distinguished as good or bad (sixth step, step S106).

[0056] Finally, the defective light emitting element is removed by laser using the laser device 600 (step S107), and a semiconductor device S4 is produced from which the defective light emitting element has been removed.

[0057] Next, the effects of the manufacturing method, inspection method, and inspection apparatus 1 for the semiconductor device S3 according to this embodiment will be described.

[0058] The method for manufacturing the semiconductor device S3 according to this embodiment is a method for manufacturing a semiconductor device having a plurality of light-emitting elements formed thereon, and includes the steps of: growing a crystal on a sapphire substrate 401 to form a stacked film including a buffer layer 402, an n-GaN layer 403, a light-emitting layer 404, and a p-GaN layer 405; forming an insulating film 406 on the stacked film; and forming contact holes H1, H2 at electrical connection points of the n-GaN layer 403 and the p-GaN layer 405 in the insulating film 406 to generate a first member S1; and forming a conductive layer 4 a second step of forming a conductive layer 407 on the second member S2 to generate a second member S2 in which the electrical connection portions of the n-GaN layer 403 and the electrical connection portions of the p-GaN layer 405 are electrically connected to each other by the conductive layer 407; a third step of irradiating the second member S2 with excitation light and measuring the light emission generated in the second member S2; and a fourth step of processing the conductive layer 407 formed on the second member S2 to form a first pad electrode 407A corresponding to the electrical connection portions of the n-GaN layer 403 and a second pad electrode 407B corresponding to the electrical connection portions of the p-GaN layer 405, thereby generating a semiconductor device S3.

[0059] In the manufacturing method of the semiconductor device S3 according to this embodiment, a stacked film and an insulating film 406 are formed, contact holes H1 and H2 are formed in the insulating film 406 at the electrical connection points of the n-GaN layer 403 and the p-GaN layer 405, a conductive layer 407 is formed on the insulating film 406, and the conductive layer 407 is processed to form a first pad electrode 407A and a second pad electrode 407B. During this manufacturing process of the semiconductor device S3, excitation light is irradiated onto the second member S2 on which the conductive layer 407 is formed, and light emission generated in the second member S2 is measured. Here, in the second member S2 on which the conductive layer 407 is formed, the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 are electrically connected to each other by the conductive layer 407, resulting in a short circuit. In such a short-circuited second member S2, carrier recombination is unlikely to occur in a non-defective light-emitting element, resulting in reduced light emission brightness. On the other hand, in a light-emitting element with poor contact, even when the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 are electrically connected to each other (short-circuited state) by the conductive layer 407, active carrier recombination occurs internally, resulting in a higher light emission luminance than a good light-emitting element. Thus, when the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 are electrically connected to each other by the conductive layer 407, the luminance of the light emitted from the second member S2 differs depending on whether or not there is poor contact. Therefore, as in the manufacturing method according to this embodiment, excitation light is irradiated onto the second member S2, in which the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 are electrically connected to each other by the conductive layer 407, and the light emission from the second member S2 is measured. Based on the luminance of the measured light emission, it is possible to distinguish between light-emitting elements with poor contact and light-emitting elements without poor contact. This allows for appropriate detection of poor contact in light-emitting elements and improves the accuracy of determining the quality of light-emitting elements.Furthermore, in the manufacturing method of the semiconductor device S3 according to this embodiment, as described above, contact defects can be detected during the manufacturing process of the semiconductor device S3, and therefore contact defects can be detected more easily and quickly than, for example, when a separate inspection is performed to detect contact defects (a separate inspection is performed outside the manufacturing process).

[0060] The manufacturing method may further include a fifth step, after the fourth step, of irradiating the semiconductor device S3 with excitation light and measuring the light emitted from the semiconductor device S3. In the semiconductor device S3 produced through the fourth step, the first pad electrode 407A and the second pad electrode 407B are formed, and the electrical connection points of the n-GaN layer 403 and the electrical connection points of the p-GaN layer 405 are not electrically connected to each other. The brightness of the light emitted from such a semiconductor device S3 varies depending on whether or not there is a leakage defect. Therefore, by irradiating the semiconductor device S3 after the fourth step with excitation light and measuring the light emitted from the semiconductor device S3, it is possible to distinguish between light-emitting elements with a leakage defect and light-emitting elements without a leakage defect based on the brightness of the measured light emission. This allows for appropriate detection of leakage defects in the light-emitting element.

[0061] The manufacturing method may further include a sixth step of identifying light-emitting elements having a contact defect based on the measurement result in the third step, identifying light-emitting elements having a leakage defect based on the measurement result in the fifth step, and determining whether the light-emitting elements are good or bad based on the identification results. With this configuration, light-emitting elements having a contact defect and light-emitting elements having a leakage defect can be properly detected as defective, thereby improving the accuracy of determining whether the light-emitting elements are good or bad.

[0062] The manufacturing method may further include a seventh step of identifying positions in the reflected image corresponding to each light-emitting element of the semiconductor device based on a reflected image obtained by irradiating the second member S2 with light and measuring the light reflected from the second member S2 and on previously acquired design data for the semiconductor device, thereby making it possible to determine which light-emitting element in the design data emits light when the light is measured.

[0063] The inspection method according to this embodiment includes a conductive layer formation step of forming a conductive layer 407 on a surface of an insulating film 406 on a laminated film, such that the electrical connection portions of the n-GaN layer 403 and the p-GaN layer 405 in the insulating film 406 are electrically connected to each other, and a first measurement step of irradiating the measurement object with excitation light and measuring the light emitted from the measurement object in a state in which the electrical connection portions of the n-GaN layer 403 and the p-GaN layer 405 are electrically connected to each other by the conductive layer 407. The inspection method according to this embodiment, like the manufacturing method described above, can appropriately detect contact failures in the light-emitting elements and improve the accuracy of determining whether the light-emitting elements are good or bad.

[0064] The inspection device 1 according to this embodiment includes an excitation light source 20 (light irradiation unit) that irradiates a measurement object on which a plurality of light-emitting elements are being formed, a camera 82 (light measurement unit) that measures light emitted from the measurement object in response to the light irradiated by the excitation light source 20, and a control device 100 (processing unit) that outputs the measurement results obtained by the camera 82. The control device 100 outputs the measurement results obtained by the camera 82 in a state in which a conductive layer 407 is formed on the surface of the measurement object on which an insulating film 406 is formed, such that the electrical connection points of the n-GaN layer 403 and the p-GaN layer 405 in the insulating film 406 are electrically connected to each other. As with the manufacturing method described above, the inspection device 1 according to this embodiment can appropriately detect contact defects in the light-emitting elements and improve the accuracy of determining whether the light-emitting elements are good or bad. [Explanation of symbols]

[0065] 1...inspection device, 20...excitation light source (light irradiation unit), 82...camera (light measurement unit), 100...control device (processing unit).

Claims

1. A method for manufacturing a semiconductor device having a plurality of light-emitting elements formed thereon, comprising: a first step of growing a crystal on a substrate to form a laminated film including a buffer layer, an N layer, a light-emitting layer, and a P layer, forming an insulating film on the laminated film, and forming contact holes in the insulating film at electrical connection points of the N layer and electrical connection points of the P layer to generate a first member; a second step of forming a conductive layer on the surface of the first member on which the insulating film is formed, and generating a second member in which the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other by the conductive layer; a third step of irradiating the second member with light and measuring the light emitted from the second member; a fourth step of, after the third step, processing the conductive layer formed on the second member to form a first pad electrode corresponding to the electrical connection point of the N layer and a second pad electrode corresponding to the electrical connection point of the P layer, thereby producing the semiconductor device.

2. 2. The method for manufacturing a semiconductor device according to claim 1, further comprising a fifth step, after said fourth step, of irradiating said semiconductor device with light and measuring light emission generated in said semiconductor device.

3. 3. The method for manufacturing a semiconductor device according to claim 2, further comprising a sixth step of determining whether the light-emitting element is good or bad based on the identification results obtained by identifying the portion of the light-emitting element that has a contact failure based on the measurement results in the third step and identifying the portion of the light-emitting element that has a leakage failure based on the measurement results in the fifth step.

4. The method for manufacturing a semiconductor device according to any one of claims 1 to 3, further comprising a seventh step of identifying positions in the reflection image corresponding to each light-emitting element of the semiconductor device based on a reflection image obtained by irradiating the second member with light and measuring reflected light from the second member and on design data of the semiconductor device that has been acquired in advance.

5. a conductive layer forming step of forming a conductive layer on a surface on which an insulating film is formed, such that an electrical connection portion of an N layer and an electrical connection portion of a P layer in an insulating film on a laminated film are electrically connected to each other in a measurement object on which a plurality of light-emitting elements are formed; a first measurement step of irradiating the object to be measured with light and measuring the luminescence generated in the object to be measured while the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other by the conductive layer.

6. 6. The inspection method according to claim 5, further comprising a second measurement step of irradiating the object to be measured with light and measuring luminescence generated in the object to be measured in a state in which the conductive layer has been processed so that the electrical connection points of the N layer and the electrical connection points of the P layer are not electrically connected to each other.

7. 7. The inspection method according to claim 6, further comprising a discrimination step of identifying a portion of the light-emitting element that has a contact failure based on the measurement result in the first measurement step, and identifying a portion of the light-emitting element that has a leakage failure based on the measurement result in the second measurement step, and discriminating whether the light-emitting element is good or bad based on the identification results.

8. The inspection method according to any one of claims 5 to 7, further comprising a specifying step of specifying positions in the reflected image corresponding to each light-emitting element of the measurement object, based on a reflected image obtained by irradiating the measurement object with light and measuring the reflected light from the measurement object, and on design data of the measurement object that has been acquired in advance.

9. a light irradiation unit that irradiates light onto the measurement object being formed by a plurality of light emitting elements; an optical measurement unit that measures luminescence generated in the measurement object in response to light irradiated by the light irradiation unit; a processing unit that outputs a measurement result by the optical measurement unit, the processing unit outputs a measurement result by the optical measurement unit in a state in which a conductive layer is formed on a surface of the measurement object on which an insulating film is formed, such that an electrical connection point of an N layer and an electrical connection point of a P layer in the insulating film are electrically connected to each other, The processing unit outputs the measurement results of the optical measurement unit when the conductive layer is processed so that the electrical connection points of the N layer and the electrical connection points of the P layer are not electrically connected to each other.

10. 10. The inspection device according to claim 9, wherein the processing unit identifies a portion of the light-emitting element that has a contact failure based on a measurement result by the optical measurement unit in a state in which the electrical connection points of the N layer and the electrical connection points of the P layer are electrically connected to each other, and identifies a portion of the light-emitting element that has a leakage failure based on a measurement result by the optical measurement unit in a state in which the electrical connection points of the N layer and the electrical connection points of the P layer are not electrically connected to each other, and distinguishes between good and bad light-emitting elements based on the identification results.

11. the light measurement unit further measures reflected light from the measurement object in response to the light irradiated by the light irradiation unit, 11. The inspection device according to claim 9, wherein the processing unit identifies positions in the reflected image corresponding to each light-emitting element of the measurement object, based on a reflected image obtained by measuring reflected light in the optical measurement unit and design data of the measurement object that has been acquired in advance.

Images