Laser processing apparatus, laser processing method, and method for manufacturing electronic device

Abstract

This laser machining apparatus is for forming holes at the respective irradiation positions of a plurality of laser beams with which a workpiece is irradiated and may be provided with: a diffraction optical element that divides a received laser beam into a plurality of laser beams and emits the same; a first acoustic optical element that receives the plurality of laser beams from the diffraction optical element and, according to the frequency of an applied voltage, changes the optical paths of a plurality of emission laser beams along a first direction perpendicular to an emission direction of the plurality of laser beams; a first voltage application circuit for applying a voltage with a desired frequency on the first acoustic optical element; a condensing optical system that condenses the plurality of laser beams emitted from the first acoustic optical element and irradiates the workpiece with the same; and a processor that controls the first voltage application circuit to adjust the frequency of the voltage applied on the first acoustic optical element.

Description

[Technical Field]

[0001] The present disclosure relates to a laser processing apparatus, a laser processing method, and a method for manufacturing an electronic device. [Background technology]

[0002] In recent years, semiconductor exposure devices have been required to improve their resolution in response to the miniaturization and high integration of semiconductor integrated circuits. To this end, the wavelength of light emitted from exposure light sources has been shortened. For example, KrF excimer laser devices, which output laser light with a wavelength of approximately 248.0 nm, and ArF excimer laser devices, which output laser light with a wavelength of approximately 193.4 nm, are used as gas laser devices for exposure.

[0003] The spectral linewidth of the spontaneously oscillating light of KrF excimer laser devices and ArF excimer laser devices is as wide as 350 pm to 400 pm. Therefore, if a projection lens is constructed using a material that transmits ultraviolet light, such as KrF and ArF laser light, chromatic aberration may occur. As a result, resolution may decrease. Therefore, it is necessary to narrow the spectral linewidth of the laser light output from the gas laser device to a level where chromatic aberration is negligible. Therefore, a line narrowing module (LNM) containing a line narrowing element (e.g., an etalon or a grating) may be installed inside the laser resonator of the gas laser device to narrow the spectral linewidth. Hereinafter, a gas laser device with a narrowed spectral linewidth is referred to as a line narrowing gas laser device. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Summary of International Publication No. 2005 / 084873

[0005] A laser processing apparatus according to one aspect of the present disclosure is a laser processing apparatus that forms holes at each irradiation position of a plurality of laser beams that are irradiated onto a workpiece, and may include a diffractive optical element that splits incident laser beams into a plurality of laser beams and emits the split laser beams; a first acousto-optic element that receives the plurality of laser beams from the diffractive optical element and changes the optical paths of the plurality of laser beams that are emitted in accordance with the frequency of a voltage applied thereto along a first direction perpendicular to the irradiation direction of the plurality of laser beams; a first voltage application circuit that applies a voltage of a desired frequency to the first acousto-optic element; a focusing optical system that focuses the plurality of laser beams emitted from the first acousto-optic element and irradiates the plurality of laser beams onto the workpiece; and a processor that controls the first voltage application circuit to adjust the frequency of the voltage applied to the first acousto-optic element.

[0006] Furthermore, a laser processing method according to one aspect of the present disclosure is a laser processing method for forming holes at each irradiation position of a plurality of laser beams irradiated onto a workpiece, and may include a diffraction step of inputting laser beams into a diffractive optical element and splitting the laser beams into a plurality of laser beams for emission; a first optical path changing step of inputting the plurality of laser beams from the diffractive optical element into a first acousto-optic element and applying a voltage of a desired frequency to the first acousto-optic element to change the optical paths of the plurality of laser beams emitted from the first acousto-optic element along a first direction perpendicular to the irradiation direction of the plurality of laser beams in accordance with the frequency of the applied voltage; a focusing step of focusing the plurality of laser beams emitted from the first acousto-optic element; and an irradiation step of irradiating the workpiece with the focused plurality of laser beams.

[0007] A method for manufacturing an electronic device according to one aspect of the present disclosure includes a first bonding step of bonding an interposer and an integrated circuit chip to electrically connect them to each other, and a second bonding step of bonding the interposer and a circuit board to electrically connect them to each other, wherein the interposer includes an insulating substrate having a plurality of through holes formed therein and an electrical conductor provided in the plurality of through holes, and the plurality of through holes are formed by a laser processing method that forms holes at respective irradiation positions of a plurality of laser beams to be irradiated onto the insulating substrate, and the laser processing method may include a diffraction step of incidenting laser beams onto a diffractive optical element and splitting the laser beams into a plurality of laser beams to be emitted, a first optical path changing step of incidenting the plurality of laser beams from the diffractive optical element onto a first acousto-optic element and applying a voltage of a desired frequency to the first acousto-optic element to change the optical paths of the plurality of laser beams emitted from the first acousto-optic element along a first direction perpendicular to the irradiation direction of the plurality of laser beams in accordance with the frequency of the applied voltage, a focusing step of focusing the plurality of laser beams emitted from the first acousto-optic element, and an irradiation step of irradiating the substrate with the focused laser beams. [Brief explanation of the drawings]

[0008] Some embodiments of the present disclosure will now be described, by way of example only, with reference to the accompanying drawings, in which: [Figure 1] FIG. 1 is a schematic diagram showing an example of the schematic configuration of an electronic device. [Figure 2] FIG. 2 is a flowchart showing a method for manufacturing an electronic device. [Figure 3] FIG. 3 is a schematic diagram showing an example of the schematic configuration of a laser processing device in a comparative example. [Figure 4] FIG. 4 is a schematic diagram showing an example of the schematic configuration of the laser processing device according to the first embodiment. [Figure 5] FIG. 5 is a diagram showing an example of how a plurality of laser beams enter an aperture. [Figure 6] FIG. 6 is a diagram showing another example of how a plurality of laser beams enter the aperture. [Figure 7]FIG. 7 is a flowchart showing steps of the laser processing method according to the first embodiment. [Figure 8] FIG. 8 is a schematic diagram showing an example of the schematic configuration of a laser processing device according to the second embodiment. [Figure 9] FIG. 9 is a diagram showing the state of laser processing in the third embodiment. [Figure 10] FIG. 10 is a diagram showing the state of laser processing after the laser processing shown in FIG. Embodiment

[0009] 1. Explain how electronic devices are manufactured 2. Description of the laser processing system and laser processing method of the comparative example 2.1 Configuration 2.2 Operation 2.3 Challenges 3. Description of the laser processing system and laser processing method according to the first embodiment 3.1 Configuration 3.2 Operation 3.3 Actions and Effects 4. Description of the laser processing system and laser processing method according to the second embodiment 4.1 Configuration 4.2 Operation 4.3 Actions and Effects 5. Description of the laser processing system and laser processing method according to the third embodiment 5.1 Operation 5.2 Actions and Effects

[0010] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The embodiments described below are examples of the present disclosure and are not intended to limit the scope of the present disclosure. Furthermore, not all of the configurations and operations described in each embodiment are necessarily essential to the configurations and operations of the present disclosure. Identical components are designated by the same reference numerals, and redundant descriptions will be omitted.

[0011] 1. Explain how electronic devices are manufactured FIG. 1 is a schematic diagram showing an example of the schematic configuration of an electronic device 500. The electronic device 500 shown in FIG. 1 includes an integrated circuit chip 501, an interposer 502, and a circuit board 503. The integrated circuit chip 501 is, for example, a chip-shaped integrated circuit substrate in which an integrated circuit is formed on a silicon substrate. The integrated circuit chip 501 is provided with a plurality of bumps 501B electrically connected to the integrated circuit. The interposer 502 includes an insulating substrate with a plurality of through holes formed therein, and a conductor is provided in each through hole to electrically connect the front and back of the substrate. One surface of the interposer 502 is provided with a plurality of lands connected to the bumps 501B provided on the integrated circuit chip 501, and each land is electrically connected to one of the conductors in the through holes. The other surface of the interposer 502 is provided with a plurality of bumps 502B, and each bump 502B is electrically connected to one of the conductors in the through holes. One surface of the circuit board 503 is provided with a plurality of lands connected to the respective bumps 502B. The circuit board 503 also includes a plurality of terminals that are electrically connected to these lands.

[0012] FIG. 2 is a flowchart showing a method for manufacturing the electronic device 500. As shown in FIG. 2, the method for manufacturing the electronic device 500 in this description includes a first bonding process SP1 and a second bonding process SP2. In the first bonding process SP1, the integrated circuit chip 501 and the interposer 502 are bonded together. Specifically, the bumps 501B of the integrated circuit chip 501 are placed on the lands of the interposer 502, and the bumps 501B and the lands are electrically connected. In this way, the integrated circuit chip 501 and the interposer 502 are electrically connected. In the second bonding process SP2, the interposer 502 and the circuit board 503 are bonded together. Specifically, the bumps 502B of the interposer 502 are placed on the lands of the circuit board 503, and the bumps 502B and the lands are electrically connected. In this way, the integrated circuit chip 501 is electrically connected to the circuit board 503 via the interposer 502. Through the above processes, the electronic device 500 is manufactured.

[0013] 2. Description of the laser processing system and laser processing method of the comparative example 2.1 Configuration A laser processing system and a laser processing method of a comparative example will be described. Note that the comparative example of the present disclosure is a form that the applicant recognizes as being known only by the applicant, and is not a publicly known example that the applicant acknowledges.

[0014] 3 is a schematic diagram showing an example of the overall configuration of the laser processing system 10 of this example. The laser processing system 10 of this example mainly includes a gas laser device 100, a laser processing device 300, and an optical path pipe PO that connects the gas laser device 100 and the laser processing device 300. In the following description, the direction parallel to the optical axis direction of the laser light incident on the workpiece 20 is referred to as the Z direction, the direction perpendicular to the Z direction is referred to as the X direction, and the direction perpendicular to the X and Z directions is referred to as the Y direction. The Z direction is also the height direction of the workpiece 20.

[0015] The gas laser apparatus 100 of this example is an ArF excimer laser apparatus that uses a mixed gas containing argon (Ar), fluorine (F2), and neon (Ne). This gas laser apparatus 100 emits laser light with a center wavelength of approximately 193.4 nm. Note that the gas laser apparatus 100 may be a gas laser apparatus other than an ArF excimer laser apparatus, such as a KrF excimer laser apparatus that uses a mixed gas containing krypton (Kr), F2, and Ne. In this case, the gas laser apparatus 100 emits laser light with a center wavelength of approximately 248.0 nm. The mixed gas containing Ar, F2, and Ne as a laser medium and the mixed gas containing Kr, F2, and Ne as a laser medium are sometimes called laser gases.

[0016] Gas laser device 100 mainly comprises a housing 110, a laser oscillator 130 arranged in the internal space of housing 110, a monitor module 150, a shutter 170, and a laser processor 190.

[0017] The laser oscillator 130 includes a laser chamber 131, a charger 141, a pulse power module 143, a rear mirror 145, and an output coupling mirror 147. Fig. 1 shows the internal configuration of the laser chamber 131 as viewed from a direction substantially perpendicular to the traveling direction of the laser light.

[0018] Laser chamber 131 includes an internal space where light is generated by excitation of the laser medium in the laser gas. The laser gas is supplied to the internal space of laser chamber 131 from a laser gas supply source (not shown) through piping (not shown). The light generated by excitation of the laser medium travels to windows 139a and 139b (described below).

[0019] A pair of electrodes 133a and 133b are arranged in the internal space of the laser chamber 131, facing each other, with their longitudinal directions aligned with the direction of travel of the light. The electrodes 133a and 133b are discharge electrodes for exciting the laser medium by glow discharge. In this example, the electrode 133a is a cathode, and the electrode 133b is an anode.

[0020] The electrode 133a is supported by an electrical insulator 135. The electrical insulator 135 closes an opening formed in the laser chamber 131. A conductive portion is embedded in the electrical insulator 135, and the conductive portion applies a high voltage supplied from the pulse power module 143 to the electrode 133a. The electrode 133b is supported by a return plate 137. The return plate 137 is connected to the inner surface of the laser chamber 131 by wiring (not shown).

[0021] Charger 141 is a DC power supply device that charges a charging capacitor (not shown) in pulse power module 143 with a predetermined voltage. Pulse power module 143 includes a switch 143a controlled by laser processor 190. When switch 143a is turned from OFF to ON, pulse power module 143 generates a pulsed high voltage from the electrical energy held in charger 141 and applies this high voltage between electrode 133a and electrode 133b.

[0022] When a high voltage is applied between electrodes 133a and 133b, a discharge occurs between electrodes 133a and 133b. The energy of this discharge excites the laser medium in laser chamber 131. When the excited laser medium transitions to the ground state, it emits light.

[0023] Windows 139a and 139b are provided in the laser chamber 131. The window 139a is located at one end of the laser chamber 131 in the traveling direction of the laser light, and the window 139b is located at the other end in the traveling direction, sandwiching a space between the electrodes 133a and 133b. As will be described later, the oscillated laser light is emitted to the outside of the laser chamber 131 through the windows 139a and 139b. As described above, a pulsed high voltage is applied between the electrodes 133a and 133b by the pulse power module 143, and therefore the laser light is pulsed laser light.

[0024] Rear mirror 145 is disposed in the internal space of housing 145a connected to one end of laser chamber 131, and reflects the laser light emitted from window 139a back into the internal space of laser chamber 131. Output coupling mirror 147 is disposed in the internal space of optical path pipe 147a connected to the other end of laser chamber 131, and transmits a portion of the laser light emitted from window 139b and reflects the other portion back into the internal space of laser chamber 131. In this way, rear mirror 145 and output coupling mirror 147 form a Fabry-Perot type laser resonator, and laser chamber 131 is disposed on the optical path of the laser resonator.

[0025] The monitor module 150 is disposed on the optical path of the laser light emitted from the output coupling mirror 147. The monitor module 150 includes a housing 151, a beam splitter 153, and an optical sensor 155. An opening is formed in the housing 151, and the internal space of the housing 151 communicates with the internal space of the optical path pipe 147a through this opening. The beam splitter 153 and the optical sensor 155 are disposed in the internal space of the housing 151.

[0026] Beam splitter 153 transmits the laser light emitted from output coupling mirror 147 toward shutter 170 with high transmittance, and also reflects a portion of the laser light toward the light-receiving surface of optical sensor 155. Optical sensor 155 measures the energy E of the laser light incident on the light-receiving surface. Optical sensor 155 is electrically connected to laser processor 190, and outputs a signal indicating the measured energy E to laser processor 190.

[0027] The laser processor 190 of the present disclosure is a processing device including a storage device 190a storing a control program and a CPU (Central Processing Unit) 190b that executes the control program. The laser processor 190 is specially configured or programmed to execute various processes included in the present disclosure. The laser processor 190 also controls the entire gas laser apparatus 100.

[0028] The laser processor 190 receives a signal indicating the energy E from the optical sensor 155 of the monitor module 150. The laser processor 190 also transmits and receives various signals to and from the laser processing processor 310 of the laser processing apparatus 300. For example, the laser processor 190 receives signals indicating a light emission trigger Tr (described later) and a target energy Et (described later) from the laser processing processor 310. The laser processor 190 controls the charging voltage of the charger 141 based on the energy E and target energy Et received from the optical sensor 155 and the laser processing processor 310. The energy of the laser light is controlled by controlling the charging voltage of the charger 141. The laser processor 190 also transmits a command signal to the pulse power module 143 to turn on or off the switch 143a. The laser processor 190 also controls the opening and closing of the shutter 170.

[0029] Shutter 170 is disposed in the optical path of the laser light transmitted through beam splitter 153, in the internal space of optical path pipe 171 connected to housing 151 of monitor module 150. Optical path pipe 171 is connected to the side of housing 151 opposite to the side to which optical path pipe 147a is connected, and the internal space of optical path pipe 171 communicates with the internal space of housing 151 via an opening formed in housing 151. In addition, optical path pipe 171 communicates with optical path pipe PO via an opening formed in housing 110.

[0030] The shutter 170 is electrically connected to the laser processor 190. The laser processor 190 closes the shutter 170 until the difference ΔE between the energy E received from the monitor module 150 and the target energy Et received from the laser processing processor 310 falls within an allowable range. The laser processor 190 also opens the shutter 170 upon receiving a signal indicating a light emission trigger Tr from the laser processing processor 310. Once the difference ΔE falls within the allowable range, the laser processor 190 transmits a reception preparation completion signal to the laser processing processor 310, indicating that preparation for receiving the light emission trigger Tr has been completed. The light emission trigger Tr is defined by a predetermined repetition frequency f of the laser light and a predetermined pulse number P. The light emission trigger Tr is a timing signal that causes the laser processing processor 310 to cause the laser oscillator 130 to oscillate, and is an external trigger. The repetition frequency f of the laser light is, for example, 1 kHz or more and 10 kHz or less.

[0031] The internal spaces of the optical path pipes 171 and 147a and the internal spaces of the housings 151 and 145a are filled with a purge gas. The purge gas includes an inert gas such as high-purity nitrogen. The purge gas is supplied from a purge gas supply source (not shown) through piping (not shown) to the internal spaces of the optical path pipes 171 and 147a and the internal spaces of the housings 151 and 145a.

[0032] An exhaust device (not shown) is disposed in the internal space of housing 110 of gas laser apparatus 100 to exhaust the laser gas exhausted from the internal space of laser chamber 131. The exhaust device performs processing such as removing F2 gas using a halogen filter on the gas exhausted from the internal space of laser chamber 131, and releases the gas into housing 110 of gas laser apparatus 100.

[0033] While shutter 170 is open, the laser light passes through shutter 170 and is emitted as laser light Lb from optical path pipe 171 of gas laser device 100 .

[0034] The laser processing apparatus 300 mainly includes a laser processing processor 310, an optical system 330, a stage 350, a housing 355, and a frame 357. The optical system 330 and the stage 350 are disposed in the internal space of the housing 355. The housing 355 is fixed to the frame 357. An optical path pipe PO is connected to the housing 355, and the internal space of the housing 355 communicates with the internal space of the optical path pipe PO via an opening formed in the housing 355.

[0035] The laser processing processor 310 is a processing device including a storage device 310a that stores a control program and a CPU 310b that executes the control program. The laser processing processor 310 is specially configured or programmed to execute various processes included in the present disclosure. The laser processing processor 310 controls the entire laser processing apparatus 300.

[0036] The optical system 330 includes high-reflection mirrors 331a, 331b, and 331c, an attenuator 332, a fly-eye lens 333, a condenser lens 334, a mask 335, and a projection optical system 336. Each component of the optical system 330 is fixed to a holder (not shown), and is disposed at a predetermined position within the housing 355.

[0037] High-reflection mirrors 331a, 331b, and 331c are formed by coating the surface of a transparent substrate made of, for example, synthetic quartz or calcium fluoride with a reflective film that highly reflects laser light Lb. High-reflection mirror 331a reflects laser light Lb incident from gas laser device 100 toward attenuator 332. High-reflection mirror 331b reflects laser light Lb from attenuator 332 toward high-reflection mirror 331c. High-reflection mirror 331c reflects laser light Lb from high-reflection mirror 331b toward fly-eye lens 333.

[0038] The attenuator 332 is disposed on the optical path between the high-reflection mirror 331a and the high-reflection mirror 331b. The attenuator 332 includes, for example, rotation stages 332a and 332b and partial reflection mirrors 332c and 332d fixed to the rotation stages 332a and 332b. The rotation stages 332a and 332b are electrically connected to the laser processing processor 310 and rotate around the Y axis in response to a control signal from the laser processing processor 310. When the rotation stages 332a and 332b rotate, the partial reflection mirrors 332c and 332d also rotate. The partial reflection mirrors 332c and 332d are optical elements whose transmittance changes depending on the angle of incidence of the laser light Lb onto the partial reflection mirrors 332c and 332d. The rotation angles of the partial reflection mirrors 332c and 332d around the Y axis are adjusted by rotating the rotation stages 332a and 332b so that the angles of incidence of the laser beam Lb match each other and the transmittance of the partial reflection mirrors 332c and 332d becomes a desired transmittance. As a result, the laser beam Lb from the high reflection mirror 331a is attenuated to a desired energy and passes through the attenuator 332.

[0039] The fly-eye lens 333 is a lens that is made up of multiple lenses arranged in parallel, for example, in a honeycomb pattern, and is also called an integrator lens. The fly-eye lens 333 is arranged so that the focal plane on the output side of the fly-eye lens 333 coincides with the focal plane on the input side of the condenser lens 334, and emits light so that the energy density of the laser light Lb incident on the condenser lens 334 is uniform.

[0040] The condenser lens 334 is a lens that condenses the laser light Lb emitted from the fly-eye lens 333 , and is disposed so that the focal plane on the emission side of the condenser lens 334 is on the mask 335 .

[0041] The mask 335 is, for example, a plate-like member having a plurality of transmission holes formed therein through which a portion of the laser light Lb passes and which blocks another portion of the laser light Lb. In this example, the transmission holes are made of a plurality of circular holes. When the laser light Lb passes through the plurality of transmission holes, the laser light Lb is split into a plurality of laser lights Lv, and a transfer pattern is formed in the processed portion. When the transfer pattern is transferred to the workpiece 20, through-holes corresponding to the transfer pattern are formed in the workpiece 20.

[0042] The projection optical system 336 includes, for example, a collimator lens 336a and a condenser lens 336b. The collimator lens 336a outputs the plurality of laser beams Lv from the mask 335 as parallel beams. The condenser lens 336b condenses the plurality of laser beams Lv from the collimator lens 336a onto the workpiece 20 so that a transfer pattern is formed at an imaging position located at a predetermined depth ΔZsf from the surface side of the workpiece 20. The magnification of the projection optical system 336 is, for example, 1 / 10 to 1 / 5.

[0043] Stage 350 is disposed on the bottom surface of housing 355 and includes table 351. Stage 350 can move table 351 in the X, Y, and Z directions in response to control signals from laser processing processor 310, and the position of table 351 can be adjusted by this movement.

[0044] The table 351 supports the workpiece 20. The main surface of the table 351 is generally perpendicular to the Z axis and generally along the XY plane. Therefore, the front and back surfaces of the workpiece 20 are generally perpendicular to the Z axis and located generally along the XY plane. With the above configuration, the stage 350 can adjust the position of the workpiece 20 by moving the workpiece 20 via the table 351 so that the multiple laser beams Lv emitted from the optical system 330 irradiate desired positions on the workpiece 20.

[0045] The workpiece 20 is an object to be laser processed by irradiation with a plurality of laser beams Lv. An example of the workpiece 20 is an insulating substrate that will become the interposer 502 described in Fig. 1. Examples of materials for this insulating substrate include inorganic materials such as silicon and glass, resins such as polyimide, and composite materials of inorganic and organic materials such as glass epoxy.

[0046] An inert gas constantly flows through the internal space of the housing 355 while the laser processing system 10 is in operation. This inert gas is, for example, nitrogen (N2). The housing 355 is provided with an intake port (not shown) that draws the inert gas into the housing 355 and an exhaust port (not shown) that exhausts the inert gas from the housing 355 to the outside. An intake pipe and an exhaust pipe (not shown) are connected to the intake port and the exhaust port. A gas supply source (not shown) that supplies the inert gas is connected to the intake port. The inert gas supplied from the intake port also flows through the optical path pipe PO that communicates with the housing 355.

[0047] 2.2 Operation Next, the operation of the laser processing system and the laser processing method of the comparative example will be described.

[0048] In gas laser apparatus 100, before gas laser apparatus 100 emits laser light Lb, the internal spaces of optical path pipes 147a, 171, and PO and the internal spaces of housings 145a and 151 are filled with purge gas from a purge gas supply source (not shown). Laser gas is supplied to the internal space of laser chamber 131 from a laser gas supply source (not shown). In laser processing apparatus 300, an inert gas such as nitrogen gas flows through the internal space of housing 355.

[0049] In the laser processing apparatus 300, the workpiece 20 is supported on a table 351. The laser processing processor 310 sets, on the stage 350, the coordinates X, Y, and Z of the irradiation positions where the plurality of laser beams Lv are irradiated to form the processed portion. The irradiation positions are the processed portions of the workpiece 20 where the transfer pattern is to be formed. Therefore, the stage 350 moves the table 351 so that the irradiation positions are the desired positions on the workpiece 20.

[0050] After the table 351 moves, the laser processing processor 310 controls the transmittance Tm of the gas laser device 100 and the attenuator 332 of the optical system 330 so that the multiple laser beams Lv irradiated onto the workpiece 20 have the desired fluence Fm required for laser processing.

[0051] The laser processor 190 closes the shutter 170 and activates the charger 141. The laser processor 190 also turns on the switch 143a of the pulse power module 143. This causes the pulse power module 143 to apply a pulsed high voltage between the electrodes 133a and 133b using the electrical energy stored in the charger 141. This high voltage generates a discharge between the electrodes 133a and 133b, exciting the laser medium contained in the laser gas between the electrodes 133a and 133b. When the laser medium returns to its ground state, it emits light. This light resonates between the rear mirror 145 and the output coupling mirror 147, and is amplified each time it passes through the discharge space in the internal space of the laser chamber 131, resulting in laser oscillation. A portion of the laser light passes through the output coupling mirror 147 and propagates to the beam splitter 153.

[0052] A portion of the laser light that has traveled to beam splitter 153 is reflected by beam splitter 153 and received by optical sensor 155. Optical sensor 155 measures the energy E of the received laser light and outputs a signal indicating the energy E to laser processor 190. After the energy E falls within a predetermined range, laser processor 190 transmits a reception preparation completion signal to laser processing processor 310 notifying that preparation for receiving a laser light emission trigger Tr has been completed.

[0053] Thereafter, the laser processing processor 310 transmits a light emission trigger Tr to the laser processor 190. As a result, the laser processor 190 opens the shutter 170, and the laser light that passes through the shutter 170 is emitted from the gas laser device 100 and enters the laser processing device 300. This laser light Lb is, for example, a pulsed laser light with a center wavelength of 193.4 nm.

[0054] Laser light Lb incident on laser processing apparatus 300 is irradiated onto mask 335 via high-reflection mirror 331a, attenuator 332, high-reflection mirrors 331b and 331c, fly-eye lens 333, and condenser lens 334. At this time, laser light Lb is Koehler-illuminated onto mask 335. In mask 335, some of the laser light Lb passes through a mask pattern to become multiple laser light beams Lv, while the other laser light beams are blocked. The multiple laser light beams Lv that have passed through mask 335 are collimated by collimator lens 336a of projection optical system 336, and are focused by condenser lens 336b at the above-mentioned focusing position on workpiece 20.

[0055] The plurality of laser beams Lv are irradiated onto the workpiece 20 in accordance with a light emission trigger Tr, which is defined by the repetition frequency f and the number of pulses P required for laser processing. The irradiation of the laser beams Lv causes ablation near the surface of the workpiece 20, resulting in defects. This causes the workpiece 20 to be machined at the target location, forming holes. In this example, processing is continued until a plurality of through-holes are formed in the workpiece 20.

[0056] When a portion to be processed is processed on one part of the workpiece 20 and another portion to be processed is to be processed on another part of the workpiece 20, the laser processing processor 310 sets the coordinates X and Y of a new irradiation position on the stage 350 to irradiate the multiple laser beams Lv onto the new portion to be processed. The stage 350 moves the table 351 together with the workpiece 20 so that the multiple laser beams Lv are irradiated onto the newly set irradiation position. Thereafter, laser processing is performed on the workpiece 20 at those coordinates. If no other portion to be processed is to be formed, the laser processing ends. This procedure is repeated until laser processing of all portions to be processed is completed.

[0057] 2.3 Challenges As described above, in the laser processing apparatus 300 of the comparative example, part of the laser light Lb is blocked by the mask 335. This results in low utilization efficiency of the laser light Lb and low throughput.

[0058] Therefore, in the following embodiments, a laser processing apparatus and a laser processing method that can improve energy efficiency are exemplified.

[0059] 3. Description of the laser processing system and laser processing method according to the first embodiment Next, a description will be given of the laser processing system and laser processing method of embodiment 1. Note that the same components as those described above are given the same reference numerals, and redundant description will be omitted unless otherwise specified.

[0060] 3.1 Configuration 4 is a schematic diagram showing an example of the overall configuration of the laser processing system 10 of this embodiment. In the laser processing system 10 of this embodiment, the configuration of the optical system 330 is different from the configuration of the optical system 330 in the comparative example. The optical system 330 of this embodiment includes high-reflection mirrors 331a, 331b, and 331c, an attenuator 332, a diffractive optical element (DOE) 341, an acousto-optical element module 342, a focusing optical system 343, and an aperture 344. Each component of the optical system 330 is fixed to a holder (not shown) and disposed at a predetermined position within a housing 355.

[0061] The diffractive optical element 341 diffracts the laser beam Lb incident from the high-reflection mirror 331c, splits it into multiple laser beams Lv, and emits the split laser beams Lv. FIG. 5 is a diagram showing an example of the multiple laser beams Lv entering the aperture 344. The pattern of the multiple laser beams Lv emitted from the diffractive optical element 341 is the same as the pattern of the multiple laser beams Lv shown in FIG. 5. In the example shown in FIG. 5, the diffractive optical element 341 arranges the multiple laser beams Lv in a square lattice-like matrix pattern in which multiple laser beams Lv are arranged in the X direction and multiple laser beams Lv are arranged in the Y direction. In this example, the square lattice is a 5×5 pattern. The X direction is a first direction perpendicular to the irradiation direction of the multiple laser beams Lv, and the Y direction is a second direction perpendicular to the irradiation direction of the multiple laser beams Lv and the first direction.

[0062] The acousto-optic element module 342 includes a first acousto-optic element 342a, a λ / 2 wave plate 342c, a second acousto-optic element 342b, a first voltage application circuit 342d, and a second voltage application circuit 342e.

[0063] The first voltage application circuit 342d applies a voltage of a desired frequency to the first acousto-optic device 342a, and the second voltage application circuit 342e applies a voltage of a desired frequency to the second acousto-optic device 342b. The first voltage application circuit 342d and the second voltage application circuit 342e are electrically connected to the laser processing processor 310, and can change the magnitude of the voltage applied to the first acousto-optic device 342a and the second acousto-optic device 342b and the frequency of the voltage according to signals from the laser processing processor 310.

[0064] The multiple laser beams Lv emitted from the diffractive optical element 341 are incident on the first acousto-optic element 342a. When a periodic voltage is applied to the acousto-optic element, the optical path of the emitted light is changed by a grating caused by a periodic change in refractive index due to the photoelastic effect. The amount of change in the optical path varies depending on the frequency of the applied voltage. The first acousto-optic element 342a changes the optical paths of the multiple laser beams Lv emitted along a first direction in accordance with the frequency of the applied voltage. Furthermore, the multiple laser beams Lv emitted from the first acousto-optic element 342a are incident on the second acousto-optic element 342b. The second acousto-optic element 342b changes the optical paths of the multiple laser beams Lv along a second direction in accordance with the frequency of the applied voltage. The amount by which the first acousto-optic element 342a changes the optical paths of the multiple laser beams Lv along the first direction, and the amount by which the second acousto-optic element 342b changes the optical paths along the second direction are each, for example, 0.01 degrees to 1.0 degrees.

[0065] A λ / 2 wave plate 342c is disposed between the first acousto-optic element 342a and the second acousto-optic element 342b. Therefore, the laser light Lv emitted from the first acousto-optic element 342a is incident on the second acousto-optic element 342b via the λ / 2 wave plate 342c. The λ / 2 wave plate 342c rotates the two polarization directions of the incident laser light Lv by 90 degrees. Therefore, the relationship between the polarization direction of the linearly polarized light of the laser light Lv incident on the first acousto-optic element 342a and the first direction can be aligned with the relationship between the polarization direction of the linearly polarized light of the laser light Lv incident on the second acousto-optic element 342b and the second direction. Therefore, if the characteristics of the first acousto-optic element 342a and the characteristics of the second acousto-optic element 342b are the same, when voltages of the same frequency are applied to the first acousto-optic element 342a and the second acousto-optic element 342b, the way in which the multiple laser beams Lv emitted from the first acousto-optic element 342a change in the first direction can be made to be the same as the way in which the multiple laser beams Lv emitted from the second acousto-optic element 342b change in the second direction.

[0066] The focusing optical system 343 of this embodiment includes a focusing lens 343a. The focusing lens 343a is disposed so that the focal plane on the incident side is located approximately at the exit surface of the second acousto-optic element 342b, and the focal plane on the exit side is located approximately at a predetermined depth from the workpiece 20. This predetermined depth is, for example, the same as the imaging position in the comparative example.

[0067] The aperture 344 is disposed between the workpiece 20 and the focusing optical system 343. In this example, the aperture 344 is an opening formed in a frame member 344a, and the opening has a rectangular shape consisting of a pair of sides extending in a first direction and a pair of sides extending in a second direction. In the example shown in FIG. 5, all of the multiple laser beams Lv split by the diffractive optical element 341 are transmitted through the aperture 344. In this example, the multiple laser beams Lv that have transmitted through the aperture 344 are irradiated onto the workpiece 20.

[0068] 6 is a diagram showing another example of how multiple laser beams Lv enter the aperture 344. In the example of FIG. 6, some of the multiple laser beams Lv pass through the aperture 344, while the other laser beams Lv do not pass through the aperture 344 and are blocked by the frame member 344a. In the example of FIG. 6, the multiple laser beams Lv that have passed through the acousto-optic element module 342 are shifted in the X and Y directions. Specifically, compared to the case in which multiple laser beams Lv pass through the acousto-optic element module 342 shown in FIG. 5, the optical paths of the multiple laser beams Lv that pass through the first acousto-optic element 342a are changed in the X direction along the first direction, and the optical paths of the multiple laser beams Lv that pass through the second acousto-optic element 342b are changed in the Y direction along the second direction. In this case, the frequency of the voltage applied from the first voltage application circuit 342d to the first acousto-optic element 342a and the frequency of the voltage applied from the second voltage application circuit 342e to the second acousto-optic element 342b are different from the frequencies of the respective voltages in the state shown in Fig. 5. The amount of this shift is determined by the laser processing processor 310. In other words, the laser processing processor 310 controls the first voltage application circuit 342d and the second voltage application circuit 342e to adjust the frequencies of the voltages applied to the first acousto-optic element 342a and the second acousto-optic element 342b, respectively, so that the number of laser beams Lv transmitted through the aperture 344 arranged in the first direction and the number arranged in the second direction are desired numbers, respectively.

[0069] The laser processing processor 310 may control the first voltage application circuit 342d and the second voltage application circuit 342e to adjust the frequencies of the voltages applied to the first acousto-optic element 342a and the second acousto-optic element 342b, respectively, so that the number of laser beams Lv that pass through the aperture 344 varies depending on the position of the workpiece 20. For example, when the processing position of the workpiece 20 is at a specific position, the laser processing processor 310 controls the first voltage application circuit 342d and the second voltage application circuit 342e so that the laser beams Lv pass through the aperture 344, as shown in Fig. 5. When the table 351 moves and the processing position of the workpiece 20 is at another specific position, the laser processing processor 310 controls the first voltage application circuit 342d and the second voltage application circuit 342e so that some of the laser beams Lv pass through the aperture 344 and other laser beams Lv do not pass through the aperture 344, as shown in Fig. 6. In this way, the laser processing processor 310 can control the first voltage application circuit 342d and the second voltage application circuit 342e to adjust the frequency of the voltage applied to the first acousto-optic element 342a and the second acousto-optic element 342b, respectively, so that the number of multiple laser beams Lv passing through the aperture 344 changes depending on the position of the workpiece 20.

[0070] 3.2 Operation Next, the operation of the laser processing system 10 and the laser processing method according to this embodiment will be described. Fig. 7 is a flowchart showing the steps of the laser processing method according to this embodiment. As shown in Fig. 7, the laser processing method according to this embodiment includes a table moving step SP11, a laser light emitting step SP12, a diffraction step SP13, a first optical path changing step SP14, a second optical path changing step SP15, a focusing step SP16, an aperture transmitting step SP17, and an irradiation step SP18.

[0071] (Table movement process SP11) This step is a step of moving the table 351 of the stage 350 to irradiate desired positions on the workpiece 20 with multiple laser beams Lv. In this step, the laser processing processor 310 sets the coordinates X, Y, and Z of the irradiation positions at which the multiple laser beams Lv will be irradiated on the stage 350 so that the desired positions on the workpiece 20 become the processing sites. Once this setting is made, the stage 350 moves the table 351 carrying the workpiece 20 so that the multiple laser beams Lv are irradiated at the set irradiation positions. When the movement of the table 351 is complete, the stage 350 transmits a signal indicating this to the laser processing processor 310. In this way, the table moving step SP11 is completed.

[0072] (Laser light emission process SP12) When the laser processing processor 310 receives a signal indicating that the movement of the table 351 has been completed, it controls the gas laser device 100 in the same manner as described in the comparative example. At this time, the laser processing processor 310 adjusts the number of laser beams Lv transmitted through the aperture 344 arranged in the first direction (X direction) and the number of laser beams Lv arranged in the second direction (Y direction) to desired numbers, depending on the coordinates X, Y, and Z of the irradiation positions on the workpiece 20 where the laser beams Lv are irradiated. Specifically, the laser processing processor 310 controls the first voltage application circuit 342d and the second voltage application circuit 342e to adjust the frequencies of the voltages applied to the first acousto-optic element 342a and the second acousto-optic element 342b, respectively. Therefore, when the laser beam Lb is emitted from the gas laser device 100, voltages of desired frequencies are applied to the first acousto-optic element 342a and the second acousto-optic element 342b. Furthermore, the laser processing processor 310 adjusts the attenuator 332 in the same manner as in the comparative example so that the transmittance of the attenuator 332 becomes the desired transmittance. After the gas laser apparatus 100 is thus ready to emit the laser light Lb, the gas laser apparatus 100 emits the laser light Lb. This laser light Lb is a pulsed laser light.

[0073] (Diffraction process SP13) This step involves inputting laser light Lb to diffractive optical element 341, splitting it into multiple laser beams Lv, and outputting the split laser beams Lv. Laser light Lb output from gas laser apparatus 100 in laser beam output step SP12 propagates through high-reflection mirror 331a, attenuator 332, and high-reflection mirrors 331b and 331c in this order. Laser light Lb reflected by high-reflection mirror 331c enters diffractive optical element 341. Laser light Lb entering diffractive optical element 341 is split into multiple laser beams Lv in accordance with the diffraction pattern of diffractive optical element 341, and then exits diffractive optical element 341. At this time, the pattern of the multiple laser beams Lv output from diffractive optical element 341 is the matrix pattern shown in FIG. 5.

[0074] (First optical path changing step SP14) This step is a step of making the multiple laser beams Lv from the diffractive optical element 341 incident on the first acousto-optic element 342a and changing the optical paths of the multiple laser beams Lv emitted from the first acousto-optic element 342a along a first direction. As described above, at the time when the laser beams Lb are emitted from the gas laser device 100, a voltage of a desired frequency is applied to the first acousto-optic element 342a. Therefore, the optical paths of the multiple laser beams Lv incident on the first acousto-optic element 342a change along the first direction in accordance with the frequency of this voltage, and then the multiple laser beams Lv are emitted from the first acousto-optic element 342a.

[0075] (Second optical path changing step SP15) In this step, the multiple laser beams Lv from the first acousto-optic element 342a are incident on the second acousto-optic element 342b, and the optical paths of the multiple laser beams Lv emitted from the second acousto-optic element 342b are changed along the second direction. Prior to this step, the multiple laser beams Lv emitted from the first acousto-optic element 342a pass through the λ / 2 wave plate 342c, where the polarization direction of the multiple laser beams Lv is rotated by 90 degrees. Therefore, the multiple laser beams Lv linearly polarized along the first direction when emitted from the first acousto-optic element 342a become linearly polarized along the second direction when they enter the second acousto-optic element 342b. As described above, when the laser beam Lb is emitted from the gas laser apparatus 100, a voltage of a desired frequency is applied to the second acousto-optic element 342b. Therefore, the optical paths of the multiple laser beams Lv incident on the second acousto-optic element 342b change along the second direction in accordance with the frequency of this voltage, and then the laser beams exit from the second acousto-optic element 342b.

[0076] 5, even when all of the multiple laser beams Lv pass through the aperture 344, it is preferable to apply a voltage of a desired frequency to the first voltage application circuit 342d and the second voltage application circuit 342e. Therefore, even in this case, the optical paths are changed in the first acousto-optic element 342a and the second acousto-optic element 342b. By applying a voltage of a desired frequency in this manner, the frequency of the voltage can be finely adjusted, which facilitates fine adjustment of the irradiation positions of the multiple laser beams Lv that pass through the aperture 344 and are irradiated onto the workpiece 20. In other words, when the multiple laser beams Lv are irradiated onto the workpiece 20, it is preferable to always apply a voltage of a desired frequency to the first voltage application circuit 342d and the second voltage application circuit 342e, and change the optical paths in the first acousto-optic element 342a and the second acousto-optic element 342b.

[0077] (Light collection process SP16) This step is a step of focusing the plurality of laser beams Lv. The plurality of laser beams Lv emitted from the first acousto-optic element 342a enter the focusing optical system 343 via the λ / 2 wave plate 342c and the second acousto-optic element 342b. Since the focusing optical system 343 of this embodiment is composed of a focusing lens 343a, the plurality of laser beams Lv emitted from the second acousto-optic element 342b pass through the focusing lens 343a. The plurality of laser beams Lv that pass through the focusing lens 343a are focused in accordance with the numerical aperture of the focusing lens 343a.

[0078] (Aperture transmission process SP17) This step is a step of transmitting the plurality of laser beams Lv collected in the collecting step SP16 through the aperture 344. When the first voltage application circuit 342d and the second voltage application circuit 342e are controlled so that all of the laser beams Lv are transmitted through the aperture 344, all of the laser beams Lv are incident on the aperture 344 and transmitted through the aperture 344, as shown in Fig. 5. On the other hand, when some of the laser beams Lv are transmitted through the aperture 344 and other parts of the laser beams Lv are not transmitted through the aperture 344, for example, as shown in Fig. 6, only some of the laser beams Lv are incident on the aperture 344 and transmitted through the aperture 344, and other parts of the laser beams Lv are blocked by the frame member 344a. In this case, in the first optical path changing process SP14 and the second optical path changing process SP15, the laser processing processor 310 adjusts the frequency of the voltage applied to the first acousto-optical element 342a and the second acousto-optical element 342b so that the number of laser beams Lv passing through the aperture 344 arranged in the first direction and the number arranged in the second direction are the desired numbers, respectively.

[0079] (Irradiation process SP18) This step is a step of irradiating the workpiece 20 with the multiple laser beams Lv focused in the focusing step SP16. The multiple laser beams Lv focused in the focusing step SP16 have smaller spot diameters and smaller distances between the laser beams Lv. The multiple laser beams Lv focused in this manner are irradiated onto the workpiece 20. The irradiated laser beams Lv are pulsed laser beams because the laser beams Lb are pulsed laser beams. At each irradiation position, the workpiece 20 is ablated to form holes. If the workpiece 20 is a substrate that will become the interposer 502, this step is performed until the holes become through holes, and then a conductor is placed inside the through holes. Note that the holes formed in the workpiece 20 are not limited to through holes.

[0080] Upon completion of irradiation step SP18, if another workpiece exists, the process returns to table movement step SP11; if no other workpiece exists, the laser processing is terminated. When forming a hole in a workpiece using the laser processing method described above, for example, all of the laser beams Lv may pass through the aperture 344 and be irradiated onto the workpiece 20 as shown in FIG. 5 . Then, upon moving to another workpiece, some of the laser beams Lv may pass through the aperture 344 and be irradiated onto the workpiece 20, while other laser beams Lv may be blocked by the frame member 344a as shown in FIG. 6 . In this case, the laser processing processor 310 controls the first voltage application circuit 342d and the second voltage application circuit 342e to adjust the frequencies of the voltages applied to the first acousto-optic element 342a and the second acousto-optic element 342b, respectively, so that the number of laser beams Lv passing through the aperture 344 changes depending on the position of the workpiece 20.

[0081] 3.3 Actions and Effects As described above, the laser processing apparatus 300 of this embodiment is a laser processing apparatus that forms holes at each irradiation position of a plurality of laser beams Lv that are irradiated onto the workpiece 20, and includes: a diffractive optical element 341 that divides an incident laser beam Lb into a plurality of laser beams Lv and emits the divided laser beams; a first acousto-optic element 342a that receives the plurality of laser beams Lv from the diffractive optical element 341 and changes the optical paths of the plurality of laser beams Lv that are emitted in accordance with the frequency of a voltage applied thereto, along a first direction perpendicular to the irradiation direction of the plurality of laser beams Lv; a first voltage application circuit 342d that applies a voltage of a desired frequency to the first acousto-optic element 342a; a focusing optical system 343 that focuses the plurality of laser beams Lv emitted from the first acousto-optic element 342a and irradiates the workpiece 20 with the focused laser beams Lv; and a laser processing processor 310 that controls the first voltage application circuit 342d to adjust the frequency of the voltage applied to the first acousto-optic element 342a.

[0082] Furthermore, the laser processing method of this embodiment is a laser processing method for forming holes at each irradiation position of a plurality of laser beams Lv that are irradiated onto the workpiece 20, and includes a diffraction step SP13 for making the laser beam Lb incident on the diffractive optical element 341 and splitting it into a plurality of laser beams Lv to be emitted, a first optical path changing step SP14 for making the plurality of laser beams Lv from the diffractive optical element 341 incident on the first acousto-optic element 342a and applying a voltage of a desired frequency to the first acousto-optic element 342a to change the optical paths of the plurality of laser beams Lv emitted from the first acousto-optic element 342a along a first direction perpendicular to the irradiation direction of the plurality of laser beams Lv in accordance with the frequency of the applied voltage, a focusing step SP16 for focusing the plurality of laser beams Lv emitted from the first acousto-optic element 342a, and an irradiation step SP18 for irradiating the workpiece 20 with the focused plurality of laser beams Lv.

[0083] According to the laser processing apparatus 300 and the laser processing method, the diffractive optical element 341 splits the laser beam Lb into multiple laser beams Lv, so less laser beam is blocked compared to the comparative example in which the mask 335 is used to split the laser beam Lb into multiple laser beams Lv. Therefore, the laser processing apparatus 300 of this embodiment can improve energy efficiency. Furthermore, the irradiation position of the laser beam Lv can be adjusted by adjusting the frequency of the voltage applied to the first acousto-optic element 342a without moving the table 351. Therefore, the adjustment of the irradiation position of the laser beam Lv can be completed in a short time.

[0084] In addition, the laser beam Lb in this embodiment is a pulsed laser beam. Therefore, the peak value of the energy of the multiple laser beams Lv irradiated onto the workpiece 20 can be increased, and holes can be formed efficiently. Note that the laser beam Lb may be a continuous beam.

[0085] The laser processing apparatus 300 of this embodiment further includes a second acousto-optic element 342b that receives the multiple laser beams Lv from the first acousto-optic element 342a and changes the optical paths of the multiple laser beams Lv emitted in accordance with the frequency of a voltage applied thereto along a second direction perpendicular to the irradiation direction of the multiple laser beams Lv and the first direction, and a second voltage application circuit 342e that applies a voltage of a desired frequency to the second acousto-optic element 342b. The laser processing processor 310 controls the second voltage application circuit 342e to adjust the frequency of the voltage applied to the second acousto-optic element 342b, and the multiple laser beams Lv emitted from the first acousto-optic element 342a are incident on the focusing optical system 343 via the second acousto-optic element 342b. In addition, the laser processing method of this embodiment further includes a second optical path changing process SP15 in which the multiple laser beams Lv from the first acousto-optic element 342a are incident on the second acousto-optic element 342b, and a voltage of a desired frequency is applied to the second acousto-optic element 342b to change the optical paths of the multiple laser beams Lv emitted from the second acousto-optic element 342b along a second direction perpendicular to the irradiation direction of the multiple laser beams Lv and the first direction in accordance with the frequency of the applied voltage, and in a focusing process SP16, the multiple laser beams Lv emitted from the first acousto-optic element 342a via the second acousto-optic element 342b are focused.

[0086] By including the second acousto-optic element 342b that changes the optical paths of the plurality of laser beams Lv along the second direction in this manner, it is possible to change the irradiation positions of the plurality of laser beams Lv on the workpiece 20 in two dimensions including the first direction and the second direction. Note that, when the irradiation positions of the plurality of laser beams Lv on the workpiece 20 are changed one-dimensionally rather than two-dimensionally, the laser processing apparatus 300 does not need to include the second acousto-optic element 342b and the second voltage application circuit 342e, and the laser processing method does not need to include the second optical path changing step SP15.

[0087] Furthermore, in the laser processing apparatus 300 of this embodiment, a λ / 2 wave plate 342c is disposed between the first acousto-optic element 342a and the second acousto-optic element 342b, and the laser beam Lv from the first acousto-optic element 342a is incident on the second acousto-optic element 342b via the λ / 2 wave plate 342c. This allows the polarization direction of the linearly polarized laser beam Lv incident on the first acousto-optic element 342a to be aligned with the polarization direction of the linearly polarized laser beam Lv incident on the second acousto-optic element 342b to be aligned with the polarization direction of the linearly polarized laser beam Lv ... Even when the second acousto-optic element 342b is provided, the λ / 2 wave plate 342c is not an essential component.

[0088] In addition, the laser processing apparatus 300 of this embodiment further includes a rectangular aperture 344, through which the multiple laser beams Lv emitted from the focusing optical system 343 pass, the aperture 344 consisting of a pair of sides extending in a first direction and a pair of sides extending in a second direction, the diffractive optical element 341 emits the multiple laser beams Lv in a square lattice pattern, with multiple beams arranged in the first direction and multiple beams arranged in the second direction, and the laser processing processor 310 controls the first voltage application circuit 342d and the second voltage application circuit 342e to adjust the frequencies of the voltages applied to the first acousto-optic element 342a and the second acousto-optic element 342b, respectively, so that the number of multiple laser beams Lv that pass through the aperture 344 arranged in the first direction and the number arranged in the second direction are desired numbers, respectively. The laser processing method of this embodiment also includes an aperture transmission step SP17 in which the plurality of laser beams Lv focused in the focusing step SP16 are transmitted through a rectangular aperture 344 having a pair of sides extending in a first direction and a pair of sides extending in a second direction. In the diffraction step SP13, the plurality of laser beams Lv are emitted from the diffractive optical element 341 in a square lattice pattern in which a plurality of laser beams Lv are arranged in the first direction and a plurality of laser beams Lv are arranged in the second direction, and in the first optical path changing step SP14 and the second optical path changing step SP15, the frequencies of the voltages applied to the first acousto-optic element 342a and the second acousto-optic element 342b are adjusted so that the number of laser beams Lv that are transmitted through the aperture 344 arranged in the first direction and the number of laser beams Lv that are arranged in the second direction are each desired.

[0089] Such a laser processing apparatus 300 and laser processing method can form holes arranged in a matrix. Furthermore, the number of first-direction and second-direction laser beams Lv passing through the aperture 344 can be adjusted without moving the aperture 344, allowing the number of laser beams Lv passing through the aperture 344 to be changed in a short period of time. Note that the aperture 344 may not be necessary if all of the multiple laser beams Lv are always irradiated onto the workpiece 20. In this case, for example, multiple holes can be formed by irradiating the workpiece 20 with multiple laser beams Lv in a 5 × 5 square lattice pattern, and then changing the optical paths of the multiple laser beams Lv in the first direction to form multiple holes again in a 5 × 5 square lattice pattern adjacent to the multiple holes that have been formed, thereby forming 5 × 10 holes.

[0090] The shape of the aperture 344 does not have to be rectangular. For example, the shape of the aperture 344 may be triangular or circular. When the shape of the aperture 344 is triangular, it is preferable that the multiple laser beams Lv emitted from the diffractive optical element 341 be arranged in a triangular lattice pattern, from the viewpoint of easily controlling the number of laser beams Lv passing through the aperture 344. Even when the aperture 344 is not rectangular, the laser processing processor 310 controls the first voltage application circuit 342d to adjust the frequency of the voltage applied to the first acousto-optic element 342a so that the number of multiple laser beams Lv passing through the aperture 344 is the desired number. In this case, the laser processing processor 310 may further control the second voltage application circuit 342e to adjust the frequency of the voltage applied to the second acousto-optic element 342b so that the number of multiple laser beams Lv passing through the aperture 344 is the desired number.

[0091] The laser processing apparatus 300 of this embodiment also includes a table 351 on which the workpiece 20 is placed and which is movable in a first direction and a second direction, and the laser processing processor 310 controls the first voltage application circuit 342d and the second voltage application circuit 342e to adjust the frequencies of the voltages applied to the first acousto-optic element 342a and the second acousto-optic element 342b, respectively, so that the number of the plurality of laser beams Lv that pass through the aperture 344 changes according to the position of the workpiece 20. The laser processing method of this embodiment also includes a table moving step SP11 for moving the table 351 on which the workpiece 20 is placed in the first direction and the second direction, and in a first optical path changing step SP14 and a second optical path changing step SP15, the frequencies of the voltages applied to the first acousto-optic element 342a and the second acousto-optic element 342b, respectively, so that the number of the plurality of laser beams Lv that pass through the aperture 344 changes according to the position of the workpiece 20.

[0092] In the comparative example, the number of laser beams Lv irradiated onto the workpiece 20 cannot be changed unless the mask 335 is replaced. However, according to the laser processing apparatus 300 and laser processing method of the present embodiment, the number of laser beams Lv passing through the aperture 344 can be controlled without moving the position of the aperture 344, so the number of laser beams Lv irradiated onto the workpiece 20 can be changed in a short time.

[0093] 4. Description of the laser processing system and laser processing method according to the second embodiment Next, a description will be given of a laser processing system 10 and a laser processing method according to embodiment 2. Note that the same components as those described above are given the same reference numerals, and redundant description will be omitted unless otherwise specified.

[0094] 4.1 Configuration 8 is a schematic diagram showing an example of the overall configuration of a laser processing apparatus 300 according to this embodiment. The laser processing apparatus 300 according to this embodiment differs from the laser processing apparatus 300 according to the first embodiment in that a transfer optical system 345 is disposed between an aperture 344 and the workpiece 20. In the example of FIG. 8, the transfer optical system 345 is made up of a transfer lens 345a. In this embodiment, the focal plane of the focusing optical system 343 is located at the aperture 344. The transfer optical system 345 is disposed so that the focal plane on the incident side is located at the aperture 344 and the focal plane on the exit side is located approximately at a predetermined depth from the workpiece 20.

[0095] 4.2 Operation Next, the operation of the laser processing system 10 and the laser processing method according to this embodiment will be described. In this embodiment, the multiple laser beams Lv emitted from the focusing optical system 343 and transmitted through the aperture 344 are focused on the incident surface of the transfer lens 345a of the transfer optical system 345 and transmitted through the transfer lens 345a. The multiple laser beams Lv transmitted through the transfer lens 345a are irradiated onto the workpiece 20 in a transferred state. Therefore, the laser processing method according to this embodiment can be understood as including a transfer step between the aperture transmission step SP17 and the irradiation step SP18 in the flowchart shown in FIG.

[0096] 4.3 Actions and Effects The laser processing apparatus 300 and the laser processing method of this embodiment include a transfer optical system 345 arranged between the aperture 344 and the workpiece 20, and the plurality of laser beams Lv emitted from the focusing optical system 343 are irradiated onto the workpiece 20 via the transfer optical system 345. Therefore, the distance between the workpiece 20 and the aperture 344 can be secured, and problems caused by the aperture 344 being too close to the workpiece 20 can be prevented.

[0097] 5. Description of the laser processing system and laser processing method according to the third embodiment Next, a laser processing system 10 and a laser processing method according to a third embodiment will be described. The same components as those described above are denoted by the same reference numerals, and duplicated descriptions will be omitted unless otherwise specified. The schematic configuration of the laser processing system 10 according to this embodiment is the same as that of the laser processing system 10 according to the first or second embodiment.

[0098] 5.1 Operation Fig. 9 is a diagram showing the state of laser processing in this embodiment. Note that Fig. 9 shows aperture 344, but frame member 344a is omitted. In Fig. 9, all laser beams Lv are transmitted through aperture 344, similar to the state of laser processing shown in Fig. 5. However, the positions of each laser beam Lv relative to aperture 344 are shifted in the -X direction from the positions of each laser beam Lv relative to aperture 344 shown in Fig. 5.

[0099] FIG. 10 is a diagram showing the state of laser processing after the laser processing shown in FIG. 9. For ease of understanding, crosses are shown in FIGS. 9 and 10 to indicate specific positions on the workpiece 20. As shown in FIGS. 9 and 10, the crosses are shifted in the X direction in the state shown in FIG. 10 compared to the state shown in FIG. 9. In other words, in this embodiment, even during the period when each laser beam Lv passes through the aperture 344 and is irradiated onto the workpiece 20, the laser processing processor 310 controls the stage 350 to move the table 351. In this example, the table 351 is moved in the X direction, which is the first direction.

[0100] 10, the transmission positions of the apertures 344 of the laser beams Lv are shifted in the X direction compared to the laser processing state shown in FIG. 9. This shift is the same as the shift of the cross marks in FIGS. 9 and 10, and the relative positional relationship between the cross marks in FIG. 9 and the irradiation positions of the laser beams Lv is the same as the relative positional relationship shown in FIG. 9. That is, in this embodiment, the irradiation positions of the multiple laser beams Lv are moved so that the irradiation positions of the multiple laser beams Lv on the workpiece 20 do not change as the workpiece 20 moves. To move the irradiation positions of the multiple laser beams Lv in this manner, the laser processing processor 310 controls the first voltage application circuit 342d while the table 351 is moving to change the frequency of the voltage applied to the first acousto-optic device 342a. Due to this change in frequency, the optical paths of the multiple laser beams Lv emitted from the first acousto-optic device 342a change in the first direction by the amount of the change in frequency. For this operation, in this embodiment, a table moving step SP11 is performed between the laser light emitting step SP12 and the irradiation step SP18 in the flowchart shown in FIG.

[0101] 9 and 10, the area to be processed may spread out in a matrix pattern, exceeding the range of the multiple laser beams Lv that can pass through the aperture 344 at one time. In this case, just before the laser beam Lv furthest in the X direction can no longer pass through the aperture 344, the laser processing processor 310 controls the first voltage application circuit 342d to change the frequency of the voltage applied to the first acousto-optic element 342a, thereby moving the multiple laser beams Lv in the -X direction by one row of laser beams Lv. As a result, the transmission positions of the multiple laser beams Lv relative to the aperture 344 return to the state shown in FIG. 9. During this time, the workpiece 20 continues to move in the X direction.

[0102] As described above, the laser beam Lv is a pulsed laser beam, and it is preferable to irradiate each irradiation position on the workpiece 20 with the pulsed laser beam multiple times from the viewpoint of efficiently processing the workpiece 20. Furthermore, it is preferable to move the multiple laser beams Lv in the −X direction by one row of the laser beams Lv between the period in which the pulsed laser beam is emitted and the period in which the next pulsed laser beam is emitted, as described above.

[0103] 5.2 Actions and Effects In the laser processing apparatus 300 of this embodiment, the laser processing processor 310 controls the first voltage application circuit 342d while moving the table 351 in a first direction to change the frequency of the voltage applied from the first voltage application circuit 342d to the first acousto-optic element 342a in synchronization with the movement of the table 351 so as to prevent change in the irradiation positions of the plurality of laser beams Lv on the workpiece 20. Furthermore, in the laser processing method of this embodiment, in the first optical path changing step SP14, while moving the table 351, the frequency of the voltage applied to the first acousto-optic element 342a is changed in synchronization with the movement of the table 351 so as to prevent change in the irradiation positions of the plurality of laser beams Lv on the workpiece 20.

[0104] With this laser processing apparatus 300 and laser processing method, holes can be formed over a wide area without stopping the workpiece 20. For example, in the comparative example, when holes are formed over a wide area, the table 351 is moved and stopped before laser processing is performed. If laser processing is to be performed on a different area from the area where laser processing was performed, the table 351 must be moved and stopped again before laser processing is performed. This requires time each time the table 351 is moved and stopped. However, with the laser processing apparatus 300 and laser processing method of this embodiment, it is possible to reduce the number of times the table 351 is stopped compared to the comparative example, thereby shortening the laser processing time when holes are drilled over a wide area.

[0105] In this embodiment, the workpiece 20 is not moved in the second direction. Therefore, the laser processing apparatus 300 of this embodiment does not need to include the second acousto-optic element 342b and the second voltage application circuit 342e, and the laser processing method of this embodiment does not need to include the second optical path changing step SP15.

[0106] Furthermore, in the laser processing apparatus 300 and laser processing method of this embodiment, the first voltage application circuit 342d is controlled to change the frequency of the voltage applied from the first voltage application circuit 342d to the first acousto-optic element 342a so that the pulsed laser beam is irradiated multiple times at each irradiation position on the workpiece 20. Therefore, the workpiece 20 can be processed more efficiently than when the pulsed laser beam is irradiated only once on the workpiece 20. It is more preferable that the plurality of laser beams Lv move in the −X direction by one row of the laser beams Lv, and then the pulsed laser beam is irradiated multiple times while the plurality of laser beams Lv move in the −X direction by one row of the laser beams Lv.

[0107] Furthermore, in the laser processing apparatus 300 and the laser processing method of this embodiment, the diffractive optical element 341 emits a plurality of laser beams Lv arranged in a square lattice pattern in the first direction and the second direction, and the frequency of the voltage applied from the first voltage application circuit 342d to the first acousto-optic element 342a is changed in synchronization with the movement of the table 351 so that the irradiation positions of the plurality of laser beams Lv on the workpiece 20 do not change within the aperture 344. Therefore, compared to a case where the aperture 344 is not provided, it is possible to prevent unnecessary light from being incident on the workpiece 20 and causing unintended processing.

[0108] It should be noted that the laser processing apparatus 300 of this embodiment does not need to include the aperture 344, and the laser processing method of this embodiment does not need to include the aperture transmission step SP17. If the laser processing apparatus 300 does not include the aperture 344, when the workpiece 20 has moved a certain distance, the laser processing processor 310 changes the frequency of the voltage applied to the first acousto-optic element 342a, and moves the multiple laser beams Lv in the −X direction by one row of the laser beams Lv.

[0109] Although the present invention has been described above using the embodiment as an example, the present invention is not limited thereto. For example, the number and pattern of the multiple laser beams Lv are not limited to those of the above embodiment. Furthermore, the laser beam Lb incident on the laser processing apparatus 300 is not limited to the laser beam from the gas laser apparatus 100, but may be, for example, laser beam from a solid-state laser apparatus. Furthermore, the workpiece 20 is not limited to the substrate that will become the interposer 502, but may be another member.

[0110] The above description is intended to be illustrative rather than limiting. Thus, it will be apparent to one skilled in the art that modifications can be made to the disclosed embodiments without departing from the scope of the claims. It will also be apparent to one skilled in the art that the disclosed embodiments can be used in combination. Terms used throughout this specification and claims should be construed as "open ended" terms unless expressly stated otherwise. For example, the terms "include" or "including" should be construed as "not limited to what is stated as including." The term "having" should be construed as "not limited to what is stated as having." The indefinite article "a" should be construed as "at least one" or "one or more." The term "at least one of A, B, and C" should be construed as "A," "B," "C," "A+B," "A+C," "B+C," or "A+B+C." It should also be construed as including combinations other than "A," "B," and "C."

Claims

1. A laser processing device that forms holes at respective irradiation positions of a plurality of laser beams that are irradiated onto a workpiece, a diffractive optical element that splits an incident laser beam into the plurality of laser beams and outputs the split laser beams; a first acousto-optic element configured to receive the plurality of laser beams from the diffractive optical element and change optical paths of the plurality of laser beams emitted in accordance with a frequency of an applied voltage along a first direction perpendicular to an irradiation direction of the plurality of laser beams; a first voltage application circuit that applies a voltage of a desired frequency to the first acousto-optic element; a focusing optical system that focuses the plurality of laser beams emitted from the first acousto-optic element and irradiates the workpiece with the focused laser beams; an aperture through which the plurality of laser beams emitted from the focusing optical system pass; a processor that controls the first voltage application circuit to adjust the frequency of the voltage applied to the first acousto-optic device; Equipped with The processor controls the first voltage application circuit to adjust the frequency of the voltage applied to the first acousto-optic element so that the number of the plurality of laser beams passing through the aperture becomes a desired number. Laser processing equipment.

2. The laser processing apparatus according to claim 1, The laser light is a pulsed laser light.

3. The laser processing apparatus according to claim 1, a transfer optical system disposed between the aperture and the workpiece; The plurality of laser beams emitted from the focusing optical system are irradiated onto the workpiece via the transfer optical system.

4. The laser processing apparatus according to claim 1, The workpiece is made of an insulating inorganic material.

5. A laser processing device that forms holes at respective irradiation positions of a plurality of laser beams that are irradiated onto a workpiece, a diffractive optical element that splits an incident laser beam into the plurality of laser beams and outputs the split laser beams; a first acousto-optic element configured to receive the plurality of laser beams from the diffractive optical element and change optical paths of the plurality of laser beams emitted in accordance with a frequency of an applied voltage along a first direction perpendicular to an irradiation direction of the plurality of laser beams; a first voltage application circuit that applies a voltage of a desired frequency to the first acousto-optic element; a second acousto-optic element configured to receive the plurality of laser beams from the first acousto-optic element and change optical paths of the plurality of laser beams emitted in accordance with a frequency of an applied voltage along a second direction perpendicular to the irradiation directions of the plurality of laser beams and the first direction; a second voltage application circuit that applies a voltage of a desired frequency to the second acousto-optic element; a focusing optical system that focuses the plurality of laser beams emitted from the second acousto-optic element and irradiates the workpiece with the focused laser beams; a processor that controls the first voltage application circuit and the second voltage application circuit to adjust the frequencies of the voltages applied to the first acousto-optical device and the second acousto-optical device, respectively; a rectangular aperture through which the plurality of laser beams emitted from the focusing optical system pass and which has a pair of sides extending in the first direction and a pair of sides extending in the second direction; Equipped with the diffractive optical element emits the plurality of laser beams in a square lattice pattern that is arranged in the first direction and in the second direction, The processor controls the first voltage application circuit and the second voltage application circuit to adjust the frequencies of the voltages applied to the first acousto-optic element and the second acousto-optic element, respectively, so that the number of the plurality of laser beams transmitted through the aperture that are arranged in the first direction and the number of the laser beams that are arranged in the second direction are desired numbers, respectively. Laser processing equipment.

6. The laser processing apparatus according to claim 5, a λ / 2 wave plate is disposed between the first acousto-optic element and the second acousto-optic element; The laser light from the first acousto-optic element is incident on the second acousto-optic element via the λ / 2 wave plate.

7. The laser processing apparatus according to claim 5, a table on which the workpiece is placed and which is movable in the first direction and the second direction; The processor controls the first voltage application circuit and the second voltage application circuit to adjust the frequency of the voltage applied to the first acousto-optical element and the second acousto-optical element, respectively, so that the number of the plurality of laser beams passing through the aperture changes depending on the position of the workpiece.

8. A laser processing device that forms holes at respective irradiation positions of a plurality of laser beams that are irradiated onto a workpiece, a diffractive optical element that splits an incident laser beam into the plurality of laser beams and outputs the split laser beams; a first acousto-optic element configured to receive the plurality of laser beams from the diffractive optical element and change optical paths of the plurality of laser beams emitted in accordance with a frequency of an applied voltage along a first direction perpendicular to an irradiation direction of the plurality of laser beams; a first voltage application circuit that applies a voltage of a desired frequency to the first acousto-optic element; a focusing optical system that focuses the plurality of laser beams emitted from the first acousto-optic element and irradiates the workpiece with the focused laser beams; a table on which the workpiece is placed and which moves in the first direction; a rectangular aperture through which the plurality of laser beams emitted from the focusing optical system pass and which has a pair of sides extending in the first direction and a pair of sides extending in a second direction perpendicular to the irradiation direction of the plurality of laser beams and the first direction; a processor that controls the first voltage application circuit to adjust the frequency of the voltage applied to the first acousto-optic device; Equipped with the diffractive optical element emits the plurality of laser beams in a square lattice pattern that is arranged in the first direction and in the second direction, The processor controls the first voltage application circuit while moving the table in the first direction, and changes the frequency of the voltage applied from the first voltage application circuit to the first acousto-optic element in synchronization with the movement of the table so that the irradiation positions of the plurality of laser beams on the workpiece within the aperture do not change. Laser processing equipment.

9. A laser processing method for forming holes at respective irradiation positions of a plurality of laser beams irradiated on a workpiece, the method comprising: a diffraction step of making a laser beam incident on a diffractive optical element and splitting the laser beam into the plurality of laser beams and outputting the laser beams; a first optical path changing step of causing the plurality of laser beams from the diffractive optical element to be incident on a first acousto-optic element and applying a voltage of a desired frequency to the first acousto-optic element to change the optical paths of the plurality of laser beams output from the first acousto-optic element along a first direction perpendicular to the irradiation direction of the plurality of laser beams in accordance with the frequency of the applied voltage; a second optical path changing step of causing the plurality of laser beams from the first acousto-optic element to be incident on a second acousto-optic element and applying a voltage of a desired frequency to the second acousto-optic element to change the optical paths of the plurality of laser beams emitted from the second acousto-optic element along a second direction perpendicular to the irradiation directions of the plurality of laser beams and the first direction in accordance with the frequency of the applied voltage; a focusing step of focusing the plurality of laser beams emitted from the second acousto-optic element; an aperture transmission step of transmitting the plurality of laser beams collected in the light collecting step through a rectangular aperture having a pair of sides extending in the first direction and a pair of sides extending in the second direction; an irradiation step of irradiating the workpiece with the plurality of laser beams that have been condensed and transmitted through the aperture; Equipped with In the diffraction step, the plurality of laser beams are emitted from the diffractive optical element in a square lattice pattern in which the plurality of laser beams are arranged in the first direction and in the second direction, In the first optical path changing step and the second optical path changing step, frequencies of voltages applied to the first acousto-optic element and the second acousto-optic element are adjusted so that the number of the laser beams transmitted through the aperture that are arranged in the first direction and the number of the laser beams that are arranged in the second direction are desired numbers, respectively. Laser processing method.

10. The laser processing method according to claim 9, a table moving step of moving a table on which the workpiece is placed in the first direction and the second direction, In the first optical path changing process and the second optical path changing process, the frequency of the voltage applied to the first acousto-optic element and the second acousto-optic element is adjusted, respectively, so that the number of the plurality of laser beams passing through the aperture changes depending on the position of the workpiece.

11. A laser processing method for forming holes at respective irradiation positions of a plurality of laser beams irradiated on a workpiece, the method comprising: a diffraction step of making a laser beam incident on a diffractive optical element and splitting the laser beam into the plurality of laser beams and outputting the laser beams; a first optical path changing step of causing the plurality of laser beams from the diffractive optical element to be incident on a first acousto-optic element and applying a voltage of a desired frequency to the first acousto-optic element to change the optical paths of the plurality of laser beams output from the first acousto-optic element along a first direction perpendicular to the irradiation direction of the plurality of laser beams in accordance with the frequency of the applied voltage; a focusing step of focusing the plurality of laser beams emitted from the first acousto-optic element; an aperture transmission step of transmitting the plurality of laser beams collected in the light collecting step through a quadrangular aperture having a pair of sides extending in the first direction and a pair of sides extending in a second direction perpendicular to the irradiation direction of the plurality of laser beams and the first direction; an irradiation step of irradiating the workpiece with the plurality of laser beams that have been condensed and transmitted through the aperture; a table moving step of moving a table on which the workpiece is placed in the first direction; Equipped with In the diffraction step, the plurality of laser beams are emitted from the diffractive optical element in a square lattice pattern in which the plurality of laser beams are arranged in the first direction and in the second direction, In the first optical path changing step, while the table is being moved, a frequency of a voltage applied to the first acousto-optic element is changed in synchronization with the movement of the table so that the irradiation positions of the plurality of laser beams on the workpiece within the aperture do not change. Laser processing method.

12. a first bonding step of bonding the interposer and the integrated circuit chip together to electrically connect them; a second bonding step of bonding the interposer and the circuit board to electrically connect them to each other; Equipped with the interposer includes an insulating substrate having a plurality of through holes formed therein, and a conductor provided in the plurality of through holes; the plurality of through holes are formed by a laser processing method in which holes are formed at respective irradiation positions of a plurality of laser beams irradiated onto an insulating substrate; The laser processing method includes: a diffraction step of making a laser beam incident on a diffractive optical element and splitting the laser beam into the plurality of laser beams and outputting the laser beams; a first optical path changing step of causing the plurality of laser beams from the diffractive optical element to be incident on a first acousto-optic element and applying a voltage of a desired frequency to the first acousto-optic element to change the optical paths of the plurality of laser beams output from the first acousto-optic element along a first direction perpendicular to the irradiation direction of the plurality of laser beams in accordance with the frequency of the applied voltage; a focusing step of focusing the plurality of laser beams emitted from the first acousto-optic element; an aperture transmission step of transmitting the plurality of laser beams collected in the light collection step through an aperture; an irradiation step of irradiating the substrate with the plurality of laser beams that have been condensed and transmitted through the aperture; Equipped with In the first optical path changing step, a frequency of a voltage applied to the first acousto-optic element is adjusted so that the number of the plurality of laser beams passing through the aperture becomes a desired number. A method for manufacturing electronic devices.

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