Motion Control Using Artificial Neural Networks

Abstract

To disclose a processor configured to control movement of a component of an apparatus with at least one prescribed movement.SOLUTION: Variable setpoints and / or other factors may limit iterative learning control for moving components of an apparatus. A processor is configured to receive a control input such as and / or including a variable setpoint. The control input indicates the at least one prescribed movement for the component. The processor is configured to determine, with a trained artificial neural network, based on the control input, a feed forward output for the component. The artificial neural network is previously trained with training data such that the artificial neural network determines the control output regardless of whether or not the control input falls outside the training data set. The processor controls the component based on at least the control output.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] [CROSS REFERENCE TO RELATED APPLICATIONS] This application claims priority to U.S. Application No. 63 / 049,719, filed July 9, 2020, which is incorporated herein by reference in its entirety.

[0002] [Technical field] The present disclosure relates to an apparatus, a method for controlling components of an apparatus, and a non-transitory computer-readable medium. [Background technology]

[0003] A lithographic apparatus is a machine configured to apply a desired pattern onto a substrate. Lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs). A lithographic apparatus may, for example, project a pattern (often referred to as a "design layout" or "design") in a patterning device (e.g., a mask) onto a layer of radiation-sensitive material (resist) provided on the substrate (e.g., a wafer).

[0004] As semiconductor manufacturing processes continue to advance, the dimensions of circuit elements have continually decreased while the number of functional elements, such as transistors, per device has steadily increased for decades, following a trend commonly referred to as "Moore's Law." To keep up with Moore's Law, the semiconductor industry pursues technologies that enable the creation of increasingly smaller features. To project a pattern onto a substrate, a lithography apparatus may use electromagnetic radiation. The wavelength of this radiation determines the minimum size of the features patterned on the substrate. Typical wavelengths currently in use are 365 nm (i-line), 248 nm, 193 nm, and 13.5 nm. Lithography apparatus using extreme ultraviolet (EUV) radiation having a wavelength in the range between 4 nm and 20 nm, e.g., 6.7 nm or 13.5 nm, may be used to form smaller features on a substrate than lithography apparatus using radiation having a wavelength of, for example, 193 nm.

[0005] Low k1 lithography may be used to process features with dimensions smaller than the classical resolution limit of a lithography tool. In such processes, the resolution equation may be expressed as "CD = k1 x λ / NA," where λ is the wavelength of the radiation used, NA is the numerical aperture of the projection optical elements in the lithography tool, CD is the "critical dimension" (typically the smallest feature size to be printed, in this case the half pitch), and k1 is an empirical resolution factor. Generally, the smaller k1 is, the more difficult it is to reproduce on a substrate a pattern resembling the shape and dimensions designed by a circuit designer to achieve a particular electrical function and performance.

[0006] To overcome these difficulties, sophisticated fine-tuning steps may be applied to the lithographic projection apparatus and / or the design layout. These include, but are not limited to, various optimizations of the design layout such as NA optimization, customized illumination schemes, use of phase-shifting patterning devices, optical proximity correction (OPC, sometimes referred to as "optical and process correction") in the design layout, or other methods commonly designated as "resolution enhancement techniques" (RET). Alternatively, tight control loops for controlling the stability of the lithographic apparatus may be used to improve pattern repeatability at low k1.

[0007] Thus, in lithographic processes, it is desirable to make frequent measurements of the structures being produced, for example for process control and verification. Tools for making such measurements are typically called metrology tools or inspection tools. Different types of metrology tools are known for making such measurements, including scanning electron microscopes or various forms of scatterometer metrology tools. Scatterometers are versatile instruments that allow measurements of parameters of the lithographic process by having a sensor at the pupil or a plane conjugate to the pupil of the scatterometer objective (in which case the measurement is typically referred to as pupil-based measurement), or at the image plane or a plane conjugate to the image plane (in which case the measurement is typically referred to as image- or field-based measurement). Such scatterometers and associated measurement techniques are further described in patent applications US2010 / 0328655, US2011 / 102753A1, US2012 / 0044470A, US2011 / 0249244, US2011 / 0026032 or EP 1,628,164A, which are incorporated herein by reference in their entirety. The aforementioned scatterometers may measure gratings using soft x-rays and light from the visible to near-infrared wavelength range. Summary of the Invention [Problem to be solved by the invention]

[0008] The success of iterative learning control (ILC) of the motion of a component of an equipment depends on repeatable motion control setpoints for the component, repeatable disturbance forces, time lags in the system under control, and / or other factors. The disturbance forces may be forces resulting from the motion of various components of the equipment, the types of components used in the equipment, the location of the equipment, component wear, and / or other similar factors. The motion control setpoints may define the motion of the component of the equipment. In semiconductor manufacturing and / or other applications, the setpoints and disturbance forces are often non-repeatable. This can result in inaccuracies in the motion of a component of a semiconductor manufacturing equipment, even when controlled by an ILC system, for example.

[0009] SUMMARY OF THE INVENTION Accordingly, the present invention aims to provide systems and methods configured to more accurately control the movement of equipment components when the operating setpoints and / or disturbance forces on the components are not repetitive. [Means for solving the problem]

[0010] In contrast to conventional systems, the present system is configured to control the movement of a component of an apparatus based on output from a trained machine learning model. The machine learning model may be, for example, an artificial neural network. The system is configured to receive a control input, such as a variable operational setpoint. The system is configured to determine a control output for the component with the trained machine learning model based on the control input. The machine learning model is trained with training data such that the machine learning model can determine the control output regardless of whether the control input falls outside the training data. The system then controls the component based at least on the control output. In addition to other advantages, controlling the movement of the component based on the control output from the trained machine learning model improves the accuracy of the component movement (e.g., the component can better follow a predetermined movement in the operational setpoint) compared to conventional systems. Advantageously, these features may be added to existing controllers.

[0011] In view of at least the above, in accordance with one embodiment of the invention, there is provided an apparatus comprising: a component configured to move along at least one predetermined motion; and a processor configured with machine-readable instructions. The processor is configured to receive a control input, the control input indicating at least one predetermined motion for the component. The processor is configured to determine a feedforward output for the component with an artificial neural network based on the control input. The artificial neural network is pre-trained with training data such that the artificial neural network is able to determine the control output regardless of whether the control input falls outside the training data set. The processor is configured to control the component based on at least the control output.

[0012] In some embodiments, the artificial neural network is pre-trained with training data. The training may be performed offline, online, or a combination of offline and online. The training data may comprise a plurality of benchmark training control input and corresponding training control output pairs. In some embodiments, the training control input comprises varying a plurality of target parameters for the component. In some embodiments, the training control output comprises a plurality of known forces, torques, currents, and / or voltages for the component corresponding to varying the plurality of target parameters. The training may generate one or more coefficients for the artificial neural network.

[0013] In some embodiments, the control input is (1) pre-filtered and / or (2) comprises a scanning and / or stepping motion setpoint. In some embodiments, the control input comprises a digital signal indicative of the position, a higher order time derivative of the position, a velocity, and / or an acceleration of the component over time. In some embodiments, the control input comprises a digital signal indicative of the position and / or a higher order time derivative of the position, e.g., velocity or acceleration, of the component over time. In some embodiments, the motion setpoint comprises varying a target parameter for the component.

[0014] In some embodiments, the apparatus comprises a semiconductor lithography apparatus, an optical metrology inspection tool, an electron beam inspection tool, and / or other system.

[0015] In some embodiments, the components include a reticle stage, a wafer stage, a mirror, a lens element, and / or other components configured to move into and / or out of one or more positions for photolithography.

[0016] In some embodiments, the control output comprises at least one of force, torque, current, voltage, and charge used to control movement of the component.

[0017] According to another embodiment of the invention, there is provided a method for controlling a component of an apparatus. The method comprises receiving a control input. The control input indicates at least one predetermined movement of the component. The method comprises determining, with a trained artificial neural network, a feedforward output for the component based on the control input. The artificial neural network is pre-trained with training data such that the artificial neural network can determine the control output regardless of whether the control input falls outside the training data set. The method comprises controlling the component based on at least the control output.

[0018] In some embodiments, the artificial neural network is pre-trained with training data. The training may be performed offline, online, or a combination of offline and online. The training data may comprise a plurality of benchmark training control input and corresponding training control output pairs. The training control input may comprise varying a plurality of target parameters for the component. The training control output may comprise a plurality of known forces, torques, currents, and / or voltages for the component corresponding to varying the plurality of target parameters. The training may generate one or more coefficients for the artificial neural network.

[0019] In some embodiments, the control input is (1) pre-filtered and / or (2) comprises a stepping and / or scanning motion setpoint. In some embodiments, the control input comprises a digital signal indicative of the position, a higher order time derivative of the position, a velocity, and / or an acceleration of the component over time. In some embodiments, the control input comprises a digital signal indicative of the position and / or a higher order time derivative of the position, e.g., velocity or acceleration, of the component over time. In some embodiments, the motion setpoint comprises varying a target parameter for the component.

[0020] In some embodiments, the apparatus comprises a semiconductor lithography apparatus, an optical metrology inspection tool, an electron beam inspection tool, and / or other system.

[0021] In some embodiments, the components include a reticle stage, a wafer stage, a mirror, a lens element, and / or other components configured to move into and / or out of one or more positions for photolithography.

[0022] In some embodiments, the control output comprises at least one of force, torque, current, voltage, and charge used to control movement of the component.

[0023] According to another embodiment of the invention, a non-transitory computer-readable medium is provided having stored thereon instructions that, when executed by a computer, perform the processes of any of the above-described embodiments.

[0024] According to another embodiment of the invention, there is provided a non-transitory computer-readable medium having stored thereon instructions that, when executed by a computer, cause the computer to receive control inputs indicative of at least one predetermined movement of a component of a device, determine with a trained artificial neural network a control output for the component based on the control inputs, and control the component based at least on the control output, wherein the artificial neural network is trained with training data such that the artificial neural network can determine the control output regardless of whether the control inputs fall outside the training data.

[0025] In some embodiments, the artificial neural network is pre-trained with training data. In some embodiments, the training is performed offline, online, or a combination of offline and online. The training data may comprise a plurality of benchmark training control input and corresponding training control output pairs. The training control input may comprise varying a plurality of target parameters for the component. The training control output may comprise a plurality of known forces, torques, currents, and / or voltages for the component corresponding to varying the plurality of target parameters. The training may generate one or more coefficients for the artificial neural network.

[0026] In some embodiments, the control input is (1) pre-filtered and / or (2) comprises a stepping and / or scanning motion set point. In some embodiments, the control input comprises a digital signal indicative of the position, higher order time derivatives, velocity, and / or acceleration of the component over time. In some embodiments, the control input comprises a digital signal indicative of the position and / or higher order time derivatives of the position, e.g., velocity or acceleration, of the component over time. In some embodiments, the set point comprises varying a target parameter for the component.

[0027] In some embodiments, the apparatus comprises a semiconductor lithography apparatus, an optical metrology inspection tool, an electron beam inspection tool, and / or other system.

[0028] In some embodiments, the components include a reticle stage, a wafer stage, a mirror, a lens element, and / or other components configured to move into and / or out of one or more positions for photolithography.

[0029] In some embodiments, the control output comprises at least one of force, torque, current, voltage, and charge used to control movement of the component.

[0030] According to another embodiment of the invention, there is provided a non-transitory computer-readable medium having stored thereon instructions that, when executed by a computer, cause the computer to train an artificial neural network with training data. The training data comprises a plurality of pairs of benchmark training control inputs and corresponding training control outputs. The trained artificial neural network is configured to determine control outputs for components of an apparatus based on the control inputs. The artificial neural network is trained with the training data such that the artificial neural network can determine the control outputs regardless of whether the control inputs fall outside the training data. The control inputs indicate at least one predetermined behavior of the component. The apparatus is configured to be controlled based on at least the control outputs.

[0031] In some embodiments, the training is offline, online, or a combination of offline and online. In some embodiments, the training control input comprises varying a plurality of target parameters for the component. The training control output may comprise a plurality of known forces, torques, currents, and / or voltages for the component corresponding to varying the plurality of target parameters. The training may generate one or more coefficients for the artificial neural network. [Brief explanation of the drawings]

[0032] Embodiments of the invention will now be described, by way of example only, with reference to the accompanying schematic drawings in which: [Figure 1] 1 depicts a schematic overview of a lithographic apparatus; [Figure 2] FIG. 2 is a detailed view of a portion of the lithographic apparatus of FIG. 1; [Figure 3] 1 shows a schematic diagram of a position control system. [Figure 4] 1 shows a schematic overview of a lithography cell. [Figure 5] FIG. 1 is a schematic diagram of holistic lithography, illustrating the collaboration between three key technologies to optimize semiconductor manufacturing. [Figure 6]1 shows a schematic diagram of a position control system with an iterative learning control (ILC) module. [Figure 7] Two example operating set points that result in different ILC learned forces and moments are shown. [Figure 8] 1 illustrates an example method for controlling a motion component of a device. [Figure 9] 1 illustrates an example embodiment of the present system that includes an artificial neural network. [Figure 10] FIG. 1 is a block diagram of an example computer system. DETAILED DESCRIPTION OF THE INVENTION

[0033] Iterative learning control (ILC) is a control technique that iteratively learns a feedforward control signal when controlling the motion of one or more components of an apparatus by converting a measured control error for iteration "i" into a corrected feedforward control signal for iteration "i+1." This technique has been demonstrated in many motion control systems for components including wafer stages, and typically reduces the magnitude of the control error by an order of magnitude (even more for other feedforward control systems).

[0034] However, as previously described, the success of ILC depends on iterative setpoints, iterative disturbance forces, and / or other factors. Disturbance forces may be forces resulting from the motion of various components of the equipment, the types of components used in the equipment, the location of the equipment, component wear, and / or other similar factors. For example, disturbance forces may relate to motor commutation, cable slabs, system drift, etc. Setpoints may describe predetermined motions of components of the equipment. Operational setpoints may specify the position, velocity, acceleration, and / or other parameters of the component's motion over time (e.g., higher-order time derivatives of such parameters, etc.). The success of ILC may depend on iterative setpoint trajectories for a given component, including, for example, fixed-length motion, fixed motion patterns, fixed motion speeds, fixed accelerations, repetitive jerking and / or snapping motions by the component, etc.

[0035] In semiconductor manufacturing and / or other applications, set points and disturbance forces are often non-repeatable. In semiconductor manufacturing, set points can vary for several reasons, such as, for example, support for different field sizes, real-time or near-real-time changes in overlay corrections to compensate for wafer heating, reticle heating, and / or mirror / lens heating, and / or other reasons. The number of potential set point and / or disturbance force variations is theoretically infinite. In practice, the number of potential set point and / or disturbance force variations is too large to individually calibrate a motion control system (e.g., learning an ILC feedforward signal). For example, attempting such a calibration would require excessive use of equipment (e.g., scanners in the context of lithography) for calibration, significantly limiting the availability of the equipment for manufacturing purposes.

[0036] In contrast to conventional systems, the present system is configured to control the movement of a component of an apparatus based on output from a trained machine learning model. The machine learning model may be, for example, an artificial neural network. The system is configured to receive a control input, such as and / or including a variable operational setpoint. The system is configured to determine a control output for the component with the artificial neural network based on the control input. The control output may be, for example, a feedforward signal. The artificial neural network is trained with training data such that the artificial neural network can determine the control output regardless of whether the control input falls outside the training data. The system then controls the movement of the component based at least on the control output.

[0037] In addition to other advantages, controlling component movement based on control output from a trained artificial neural network improves the accuracy of component movement (e.g., the component better follows a predetermined movement at an operational setpoint) compared to conventional systems. In semiconductor manufacturing, this can result in increased device dimensional accuracy, higher yield, reduced process setup time, faster throughput, more accurate overlay and / or other process control measurements, and / or have other effects.

[0038] As a brief introduction, motion control using machine learning models is described herein in the context of integrated circuit and / or semiconductor manufacturing. Those skilled in the art may apply the principles of motion control using machine learning models to other operations requiring precise control of one or more motion components of a device.

[0039] In the present context, the terms "radiation" and "beam" are used to encompass all types of electromagnetic radiation, including ultraviolet radiation (e.g., having a wavelength of 365, 248, 193, 157, or 126 nm) and EUV (extreme ultraviolet radiation, e.g., having a wavelength in the range of about 5-100 nm). The terms "reticle," "mask," or "patterning device" as used in this text may be broadly interpreted to refer to a general patterning device that can be used to impart an incident beam with a patterned cross-section that corresponds to the pattern to be created in the target portion of the substrate. The term "light valve" may also be used in this context. Besides the classic mask (transmissive or reflective; binary, phase-shifting, hybrid, etc.), other examples of such patterning devices include programmable mirror arrays and programmable LCD arrays.

[0040] 1 schematically shows a lithographic apparatus LA, comprising: an illumination system (also referred to as an illuminator) IL configured to condition a radiation beam B (e.g., UV radiation, DUV radiation or EUV radiation), a mask support (e.g., a mask table) MT configured to support a patterning device (e.g., a mask) MA and connected to a first positioner PM configured to accurately position the patterning device MA according to certain parameters, a substrate support (e.g., a wafer table) WT configured to hold a substrate (e.g., a resist-covered wafer) W and connected to a second positioner PW configured to accurately position the substrate support according to certain parameters, and a projection system (e.g., a refractive projection lens system) PS configured to project a pattern formed in the radiation beam B by the patterning device MA onto a target portion C (e.g., comprising one or more dies) of the substrate W.

[0041] In operation, the illumination system IL receives a radiation beam from the radiation source SO, for example via the beam delivery system BD. The illumination system IL may include various types of optical components, such as refractive, reflective, magnetic, electromagnetic, electrostatic and / or other types of optical components, or any combination thereof, for directing, shaping and / or controlling the radiation. The illuminator IL may be used to condition the radiation beam B so that it has a cross-section that has a desired spatial and angular intensity distribution in the plane of the patterning device MA.

[0042] The term "projection system" PS as used herein should be interpreted broadly to encompass various types of projection systems, including refractive, reflective, catadioptric, anamorphic, magnetic, electromagnetic and / or electrostatic optical systems, or any combination thereof, as appropriate for the exposure radiation being used and / or other factors such as the use of an immersion liquid or vacuum. Any use of the term "projection lens" herein may be considered as synonymous with the more general term "projection system" PS.

[0043] The lithographic apparatus LA may be of a type (also referred to as immersion lithography) in which at least a part of the substrate may be covered by a liquid having a relatively high refractive index, such as water, so as to fill a space between the projection system PS and the substrate W. More information about immersion techniques is given in US 6,952,253, which is incorporated herein by reference.

[0044] The lithographic apparatus LA may be of a type having two or more substrate supports WT (also called "dual stage"), in which the substrate supports WT may be used in parallel and / or preparation steps for a subsequent exposure of the substrate W may be performed on a substrate W placed on one substrate support WT while another substrate W on another substrate support WT is being used to expose a pattern thereon.

[0045] In addition to the substrate support WT, the lithographic apparatus LA may comprise a measurement stage. The measurement stage is arranged to hold a sensor and / or a cleaning device. The sensor may be arranged to measure a property of the projection system PS or a property of the radiation beam B. The measurement stage may hold multiple sensors. The cleaning device may be arranged to clean part of the lithographic apparatus, for example part of the projection system PS or part of the system for providing immersion liquid. The measurement stage may move below the projection system PS when the substrate support WT is spaced apart from the projection system PS.

[0046] In operation, a radiation beam B is incident on a patterning device, such as a mask MA, held on a mask support MT, and is patterned according to a pattern (design layout) present on the patterning device MA. After the patterning device MA, the radiation beam B passes through a projection system PS, which focuses the beam onto a target portion C of a substrate W. The second positioner PW and position measurement system IF may, for example, accurately drive the substrate support WT so that different target portions C can be positioned at focusing and alignment positions in the path of the radiation beam B. Similarly, the first positioner PM and other position sensors (not explicitly shown in FIG. 1 ) may be used to accurately position the patterning device MA with respect to the path of the radiation beam B. The patterning device MA and substrate W may be aligned using mask alignment marks M1, M2 and substrate alignment marks P1, P2. Although the illustrated substrate alignment marks P1, P2 occupy dedicated target portions, they may also be located in spaces between the target portions. Substrate alignment marks P1, P2 located between target portions C are known as scribe-lane alignment marks.

[0047] To clarify the invention, a Cartesian coordinate system is used. The Cartesian coordinate system has three axes: x, y, and z. Each of the three axes is orthogonal to the other two. Rotation around the x axis is designated as Rx rotation. Rotation around the y axis is designated as Ry rotation. Rotation around the z axis is designated as Rz rotation. The x and y axes define a horizontal plane, and the z axis is oriented vertically. The Cartesian coordinate system is used for clarity only and is not intended to limit the invention. Alternatively, other coordinate systems, such as a cylindrical coordinate system, may be used to clarify the invention. The orientation of the Cartesian coordinate system may be different, for example, so that the z axis has a component along the horizontal plane.

[0048] Figure 2 shows a more detailed view of part of the lithographic apparatus LA of Figure 1. The lithographic apparatus LA may be provided with a base frame BF, a balance mass BM, a metrology frame MF and a vibration isolation system IS. The metrology frame MF supports the projection system PS. In addition, the metrology frame MF may support part of the position measurement system PMS. The metrology frame MF is supported by the base frame BF via the vibration isolation system IS. The vibration isolation system IS is provided to prevent or reduce vibrations from being transmitted from the base frame BF to the metrology frame MF.

[0049] The second positioner PW is configured to accelerate the substrate support WT by providing a driving force between the substrate support WT and the balance mass BM. The driving force accelerates the substrate support WT in a desired direction. Due to the law of conservation of momentum, the driving force is also applied to the balance mass BM in an equal and opposite direction to the desired direction. Typically, the mass of the balance mass BM is significantly greater than the mass of the second positioner PW and the movable portion of the substrate support WT.

[0050] In one embodiment, the second positioner PW is supported by the balance mass BM. For example, the second positioner PW includes a planar motor for suspending the substrate support WT above the balance mass BM. In another embodiment, the second positioner PW is supported by the base frame BF. For example, the second positioner PW includes a linear motor and a bearing, such as a gas bearing, for suspending the substrate support WT above the base frame BF.

[0051] As shown in FIG. 3, the lithography apparatus LA may include a position control system PCS. The position control system PCS includes a setpoint generator SP, a feedforward controller FF, and a feedback controller FB. The position control system PCS provides drive signals to actuators ACT. The actuators ACT may be actuators for the first positioner PM, the second positioner PW, and / or other movable components of the lithography apparatus LA. For example, the actuators ACT may drive a plant P, which may include a substrate support WT or a mask support MT. The output of the plant P is a position quantity, such as position, velocity, acceleration, or other higher-order time derivative of the position. The position quantity is measured by a position measurement system PMS. The position measurement system PMS generates a signal, which is a position signal, representing the position quantity of the plant P. The setpoint generator SP generates a signal, which is a reference signal, representing a desired position quantity of the plant P. For example, the reference signal represents the desired trajectory of the substrate support WT. The difference between the reference signal and the position signal constitutes an input to the feedback controller FB. Based on the input, the feedback controller FB provides at least a portion of the drive signal for the actuator ACT. The reference signal may constitute an input to the feedforward controller FF. Based on the input, the feedforward controller FF provides at least a portion of the drive signal for the actuator ACT. The feedforward FF may utilize information about the dynamic characteristics of the plant P, such as mass, stiffness, resonant modes, and natural frequencies. Additional details of the system shown in FIG. 3 are provided below.

[0052] As shown in FIG. 4, the lithography apparatus LA may form part of a lithography cell LC, sometimes referred to as a lithocell or (litho)cluster, which often also includes apparatus for performing pre-exposure and post-exposure processes on the substrate W. Conventionally, these include a spin coater SC for forming a resist layer, a developer DE for developing the exposed resist, and a chill plate CH and bake plate BK for adjusting the temperature of the substrate W (e.g., solvent in the resist layer). A substrate handler or robot RO picks up substrates W from input / output ports I / O1, I / O2, moves them between different processing equipment, and transports the substrates W to a loading bay LB of the lithography apparatus LA. The devices in the lithocell, often collectively referred to as a track, are typically under the control of a track control unit TCU, which may itself be controlled by a supervisory control system SCS. The supervisory control system SCS may control the lithography apparatus LA via a lithography control unit LACU.

[0053] To ensure that substrates W exposed by lithographic apparatus LA are consistently and correctly exposed, it is desirable to inspect the substrates to measure properties of the patterned structures, such as overlay error between subsequent layers, line thickness, critical dimension (CD), etc. For this purpose, an inspection tool (not shown) may be included in lithocell LC. If an error is detected, particularly if inspection is performed before other substrates W of the same batch or lot are exposed or processed, adjustments may be made, for example, to the exposure of subsequent substrates or to other processing steps performed on substrate W.

[0054] The inspection apparatus, which may also be referred to as a metrology apparatus, is used to determine the properties of the substrate W, in particular the variation in properties between different substrates W or the layer-to-layer variation in properties for different layers of the same substrate W. Alternatively, the inspection apparatus may be configured to identify defects on the substrate W and may, for example, be part of a lithocell LC, integrated into a lithography apparatus LA, or be a stand-alone device. The inspection apparatus may measure properties of a latent image (an image in a resist layer after exposure), a semi-latent image (an image in a resist layer after a post-exposure bake step PEB), a developed resist image (from which exposed or unexposed portions of the resist have been removed), or an etched image (after a pattern transfer step such as etching).

[0055] Typically, the patterning process in a lithography tool LA is one of the most critical steps, requiring high accuracy in the dimensional formation and placement of structures on a substrate W. To ensure this high accuracy, three systems may be combined in a so-called "holistic" control environment, as shown schematically in FIG. 5. One of these systems is a lithography tool LA (virtually) connected to a metrology tool MT (second system) and a computer system CL (third system). The key to such a "holistic" environment is optimizing the interaction between these three systems to improve the overall process window and provide a tight control loop to ensure that the patterning performed by the lithography tool LA remains within the process window. The process window defines the range of process parameters (e.g., dose, focus, overlay) within which a particular manufacturing process will produce a defined result (e.g., a functional semiconductor device). Typically, within the process window, variations in process parameters are tolerated during the lithography or patterning process.

[0056] The computer system CL may use (part of) the design layout to be patterned to predict which resolution enhancement techniques should be used, and may be used to perform computational lithography simulations and calculations to determine which mask layout and lithography apparatus settings will achieve the largest overall process window for the patterning process (indicated in FIG. 5 by the double-headed arrow at a first scale SC1). Typically, the resolution enhancement techniques are provided to match the patterning capabilities of the lithography apparatus LA. The computer system CL may also be used to detect (e.g., using input from the metrology tool MT) where within the process window the lithography apparatus LA is currently operating, e.g., to predict whether defects due to non-ideal processing may be present (indicated in FIG. 5 by the arrow pointing to "0" at a second scale SC2).

[0057] The metrology tool MT may provide input to the computer system CL to enable accurate simulations and predictions, and may provide feedback to the lithography apparatus LA, for example to identify potential drift in the calibration status of the lithography apparatus LA (indicated in Figure 5 by multiple arrows at the third scale SC3).

[0058] As described above with reference to Figures 1-5, lithography apparatus, metrology tools, and / or lithocells typically include multiple stage systems used to position a specimen, substrate, mask, or sensor arrangement relative to a reference or other components. Examples of these are a mask support MT and first positioner PM, a substrate support WT and second positioner PW, measurement stages provided to hold sensors and / or cleaning devices, and stages used in an inspection tool MT, for example, where a substrate W is positioned relative to a scanning electron microscope or various scatterometers. These apparatuses may also include several other moving components, such as a reticle stage, a wafer stage, mirrors, lens elements, a light source (e.g., a drive laser, an EUV source, etc.), a reticle masking stage, a wafer top cooler, a wafer and reticle handler, vibration isolation systems, stage torque compensators, software and / or hardware modules controlling and / or containing such components, and / or other components. These examples are not intended to be limiting.

[0059] As described above, the system is configured to control movement of a component of an apparatus (e.g., at least one of those described in the preceding paragraphs) based on output from a trained machine learning model. The machine learning model may be, for example, an artificial neural network. The system is configured to receive a control input, such as a variable operational setpoint and / or including the variable operational setpoint. The system is configured to determine a control output (e.g., a feedforward signal and / or an individual component of the feedforward signal) for the component based on the control input with the trained machine learning model. The control output may comprise force, torque, current, charge, voltage, and / or other information for the moving component corresponding to the given input variable operational setpoint. The machine learning model is trained with training data such that the machine learning model can determine the control output regardless of whether the control input falls outside the training data. The system then controls the component based at least on the control output.

[0060] For example, the present machine learning models (e.g., one or more artificial neural networks) effectively interpolate operational set points and facilitate extrapolation from prior operational set points with limited and inexpensive training (e.g., calibration). In other words, if alternative control outputs for corresponding control inputs are known and used to train the machine learning model, the machine learning model can determine new control outputs for the corresponding control inputs that are somewhere between the known control inputs (e.g., prior operational set points) or somewhere outside the known control inputs.

[0061] An overview of this approach is as follows: ILC may be applied to train a set of operational setpoints (e.g., control inputs) for stage movement in a lithography apparatus (by way of example only) within a predetermined setpoint space (e.g., for various lithography scan lengths, scan velocities, accelerations, etc.). The learned feedforward signals (force, torque, current, charge, voltage, and / or other information for the stage corresponding to given variable operational setpoints) may be recorded and stored along with their corresponding setpoints. In some embodiments, a system similar and / or identical to the system shown in FIG. 6 may be used for these operations.

[0062] FIG. 6 is similar to FIG. 3 , but adds an ILC module (denoted ILC in FIG. 6 ). FIG. 6 illustrates a position control system PCS, as schematically shown in FIG. 3 , as well as a control error CE and a stage ST. As previously described, the position control system PCS includes a setpoint generator SP, a feedforward controller FF, and a feedback controller FB. The position control system PCS provides drive signals to actuators ACT. The actuators ACT may drive the stage ST so that the stage ST has a particular position quantity, such as a position, velocity, or acceleration (P / V / A). The position quantity is measured by a position measurement system PMS. The position measurement system PMS generates a signal, which is a position signal, representing a position quantity of the stage ST. The setpoint generator SP generates a signal, which is a reference signal, representing a desired position quantity of the stage ST. For example, the reference signal represents a desired trajectory of the stage ST. The difference between the reference signal and the position signal (e.g., the control error CE) constitutes an input to the feedback controller FB. Based on the input, the feedback controller FB provides at least a portion of the drive signal to the actuator ACT. The reference signal may constitute an input to a feedforward controller FF. Based on the input, the feedforward controller FF provides at least a portion of the drive signal for the actuator ACT. The feedforward controller FF may utilize information about the dynamic characteristics of the stage ST, such as its mass, stiffness, resonant modes, and natural frequencies. Note that switch SW indicates that the ILC module may be updated offline for a complete scan profile time trace (e.g., in the context of a lithography apparatus). The ILC module may be configured such that the feedforward signal is determined by minimizing (or optimizing) a prediction of the control error for future trials (which can be done in many different ways). The feedforward signal here is a free variable.

[0063] FIG. 7 illustrates that in semiconductor manufacturing and / or other applications, operational set points (e.g., control inputs as described herein) are often non-repetitive. In semiconductor manufacturing, set points may vary for a number of reasons, such as, for example, support for different field sizes, real-time or near-real-time changes in overlay corrections to compensate for wafer heating, reticle heating, and / or mirror / lens heating, and / or other reasons. The number of potential set point and / or disturbance force variations is theoretically infinite. FIG. 7 shows two example operational set points that result in different ILC learned forces and moments (e.g., potential components of the feedforward signal). These and other set points and corresponding learned forces and moments may be included in the recorded and stored information described above (which, in turn, may be used to train an artificial neural network, as described below).

[0064] Two different set points, SP1 and SP2, are shown in FIG. 7. SP1 and SP2 each provide a predetermined position over time for the device's motion components. FIG. 7 also illustrates the ILC learned forces F1 (Fy), F2 (Fz), F3 (Fy), F4 (Fz), and moments M1 (Mx), M2 (Mx), shown below each set point. As the set point changes (SP1 vs. SP2), the compensation signals (Fy, Fz, Mx) that need to follow the reference (y, z=0, Rx=0 in the top row) change significantly.

[0065] Returning to the overview of the present approach, an artificial neural network may be trained with recorded and stored motion setpoints and corresponding feedforward signals to reproduce the feedforward signals for a given setpoint. For example, inputs to the artificial neural network may be predetermined position, velocity, acceleration, jerk, and / or other parameters as a function of time. The artificial neural network may output feedforward forces, torques, and other parameters that mimic those learned by the ILC. The artificial neural network may be implemented (e.g., as a feedforward add-on replacing the ILC module in FIG. 6 ), and the artificial neural network may generate new feedforward signals in real time and / or near real time (e.g., at frequencies greater than 10 kHz) for new motion control setpoints (predetermined movements of the stage and / or other apparatus components).

[0066] 8 illustrates a method 800 for controlling motion components of an apparatus. Method 800 may be associated with moving components of a lithographic apparatus, optical and / or electron beam inspection tools, atomic force microscope (AFM)-based inspection tools, and / or other systems. As previously mentioned, the components may be and / or include reticle stages, wafer stages, mirrors, lens elements, light sources (e.g., drive lasers, EUV sources, etc.), reticle masking stages, wafer top coolers, wafer and reticle handlers, vibration isolation systems, stage torque compensators, software and / or hardware modules comprising such components, and / or other components.

[0067] Method 800 comprises training 802 an artificial neural network, receiving 804 a control input for a moving component, determining 806 a control output with the artificial neural network, controlling 808 a moving component of an apparatus based on at least the control output, and / or other operations. In some embodiments, method 800 is performed, for example, for a semiconductor manufacturing process (or part thereof). In some embodiments, a component is configured to be driven into and / or out of one or more positions for lithography, inspection, etc.

[0068] The operations of method 800 presented below are for illustrative purposes only. In some embodiments, method 800 may be implemented with one or more additional operations not described and / or without one or more operations discussed. For example, method 800 may not require training an artificial neural network (e.g., the artificial neural network may be pre-trained). Additionally, the order in which the operations of method 800 are shown in FIG. 8 and described below is not intended to limit the invention.

[0069] In some embodiments, one or more portions of method 800 may be implemented (e.g., via simulation, modeling, etc.) in one or more processing devices (e.g., one or more processors). The one or more processing devices may include one or more devices that perform some or all of the operations of method 800 in accordance with instructions electronically stored on an electronic storage medium. The one or more processing devices may include, for example, one or more devices configured through hardware, firmware, and / or software designed to perform one or more operations of method 800.

[0070] As described above, the method 800 comprises training 802 an artificial neural network. For example, the artificial neural network may have an input layer, an output layer, and one or more intermediate or hidden layers. In some embodiments, the one or more artificial neural networks may be and / or include a deep neural network (e.g., a neural network having one or more intermediate or hidden layers between the input and output layers).

[0071] As an example, one or more artificial neural networks may be based on a large collection of neural units (or artificial neurons). One or more neural networks may loosely mimic the way a biological brain works (e.g., via large clusters of biological neurons connected by axons). Each neural unit in an artificial neural network may be connected to many other neural units in the neural network. Such connections may enhance or suppress the influence on the activation state of the connected neural units. In some embodiments, individual neural units may have a summation function that combines the values ​​of all inputs. In some embodiments, each connection (or the neural unit itself) may have a threshold function such that a signal must exceed a threshold before it can be passed on to other neural units. These neural network systems may self-learn and train instead of being explicitly programmed, and can perform significantly better in certain areas of problem solving than traditional computer programs. In some embodiments, one or more artificial neural networks may include multiple layers (e.g., signal paths extending from a front layer to a back layer). In some embodiments, backpropagation techniques may be utilized with artificial neural networks, in which forward stimuli are used to reset weights and / or biases on "front" neural units. In some embodiments, connections may interact in a more chaotic and complex manner, allowing stimuli and inhibition for one or more neural networks to flow more freely. In some embodiments, the intermediate layers of one or more artificial neural networks include one or more convolutional layers, one or more recurrent layers, and / or other layers. As a non-limiting example, an artificial neural network may have 10 neurons distributed among an input layer, three hidden layers, and an output layer. Such an artificial neural network may have sufficient degrees of freedom to capture nonlinearities in multiple dimensions and may compute feedforward signals at sampling rates greater than 10 kHz on a typical computing system (e.g., a laptop).Note that this can be faster with specialized code and hardware.

[0072] One or more neural networks may be trained (i.e., their parameters may be determined) using a set of training data (e.g., as described herein). The training data may comprise a plurality of pairs of benchmark training control inputs and corresponding training control outputs. The training data may include a set of training samples. Each sample may be a pair comprising an input object (often formatted as a vector, which may be called a feature vector) and a desired output value (also called a supervisory signal). A training algorithm analyzes the training data and adjusts the behavior of the artificial neural network by adjusting its parameters (e.g., weights, biases, and / or other parameters of one or more layers) based on the training data. For example, {(x1, y1), (x2, y2), ..., (x N , y N )} form (x i is the feature vector of the i-th example, and y i Given a set of N training samples of n eigenvalues ​​(x,y,y,y,y,y,y,y,y,y,y,y,y,y,y,y,y,y,y,y,y,y,y,y,z ...

[0073] In some embodiments, the training control input comprises varying multiple target parameters for the component. Varying the target parameters may be described, for example, by an operational setpoint. Varying the target parameters may include position, higher-order time derivatives of position, velocity, acceleration, and / or other parameters. In some embodiments, the training control input may comprise, for example, digital signals indicative of the position, higher-order time derivatives of position, velocity, and / or acceleration of the component over time. In some embodiments, the training control input may comprise digital signals indicative of the position and / or higher-order time derivatives of position, e.g., velocity or acceleration, of the component over time. In some embodiments, the training control input may include disturbance forces (e.g., as described above) and / or other information.

[0074] Training control outputs may comprise, for example, known feedforward signals. These may include a plurality of known forces, torques, currents, charges, voltages, and / or other information for the component corresponding to a plurality of operational setpoints (e.g., varying target parameters). Examples of benchmark training data may include, for example, control inputs and outputs comprising iterative learning control data, machine-in-loop optimized feedforward signals, and / or other data. Benchmark training data may include error data (e.g., data indicating the difference between a predetermined position / velocity / acceleration, etc. and an actual position / velocity / acceleration, etc. of a component), and / or other information.

[0075] The trained artificial neural network is configured to determine a control output for the component based on the control input. The artificial neural network is trained with training data such that the artificial neural network can determine the control output regardless of whether the control input falls outside the training data. This means that the artificial neural network can, for example, interpolate between known motion control set points and corresponding feedforward signals and / or extrapolate beyond known motion control set points and corresponding feedforward signals.

[0076] In some embodiments, training is offline, online, or a combination of offline and online. Offline training may comprise procedures that occur separate from the components and / or equipment. This means that device manufacturing (e.g., semiconductor manufacturing) does not need to be interrupted while the artificial neural network is trained. Online training comprises training with the equipment in the training loop. This requires interruption of manufacturing because the equipment is required to perform the training operations.

[0077] Training may generate one or more coefficients for the artificial neural network. The one or more coefficients may include, for example, layer and / or individual neuron weights and / or biases, and / or other coefficients. These coefficients may change over time in response to model retraining, manual adjustments by a user, and / or other operations.

[0078] It should be noted that although training an artificial neural network is described in the context of a single moving component of a device, the artificial neural network may be trained to account for multiple moving components in one or more devices and / or the combined effects between one or more such components. For example, the combined effects may include and / or result in the disturbance forces described herein.

[0079] Method 800 comprises receiving 804 a control input for the movable component. The control input indicates at least one predetermined movement of the component. The control input may be, for example, a motion setpoint. In some embodiments, the control input comprises a stepping and / or scanning (e.g., for a lithographic apparatus) motion setpoint. In some embodiments, the motion setpoint comprises varying a target parameter for the component. Varying the target parameter may be a position, a high-order time derivative of the position, a velocity, an acceleration, and / or other parameter. In some embodiments, the control input comprises, for example, a digital signal indicative of a position, a high-order time derivative of the position, a velocity, or an acceleration of the component over time. In some embodiments, the control input comprises a digital signal indicative of a position and / or a high-order time derivative of the position, e.g., a velocity or an acceleration, of the component over time. In some embodiments, the control input may be similar and / or identical to SP1 and / or SP2 shown in FIG. 7 . For example, the control input may define different positions for the component (e.g., a reticle stage) over time. The control input may define movement according to a triangular wave (SP1), a sine wave (SP2), and / or any other pattern. However, because at least the present systems and methods utilize an artificial neural network (which can interpolate and / or extrapolate based on training), the control input need not be the same as the control input used for training. Advantageously, the control input may be an operational setpoint within the operational setpoints used for training (e.g., having parameters that differ from corresponding parameters in the operational setpoints used for training but do not violate value range limits therefor) and / or an operational setpoint outside the operational setpoints used for training (e.g., having parameters that violate value range limits for corresponding parameters in the operational setpoints used for training).

[0080] In some embodiments, the control inputs are pre-filtered. Filtering may include low-pass, high-pass, band-pass, and / or other filtering. Filtering may be performed to limit the frequency bandwidth over which the neural network is "active" to avoid amplifier saturation and / or other effects. As another example, non-linear analytical functions such as trigonometric functions (sine, cosine) may be applied to more simply relate between the inputs and outputs of the neural network (e.g., if one wants to know whether an effect is repetitive in frequency, this can shorten the training process).

[0081] 8, method 800 includes determining 806 a control output with an artificial neural network. The control output is determined with the trained artificial neural network based on the control input and / or other information. The control output may be and / or may include, for example, a feedforward signal. In some embodiments, as described above, the control output comprises force, torque, current, voltage, charge, and / or other information used to control movement of the component.

[0082] In some embodiments, the control output may include force, torque, current, voltage, charge, and / or other information similar and / or identical to F1-F4 and / or M1-M2 as shown in FIG. 7. For example, the control output may indicate different forces (e.g., F1 and F2 vs. F3 and F4) and / or moments (M1 vs. M2) for a component (e.g., a reticle stage) over time, depending on a control input (e.g., an operational setpoint). Also, because at least the present systems and methods utilize an artificial neural network (which can interpolate and / or extrapolate based on training), the control output need not be the same as the control output used for training. Advantageously, the control output may be a feedforward signal within and / or outside the feedforward signal used for training.

[0083] Returning to FIG. 8 , method 800 includes controlling 808 a motion component of the apparatus based at least on the control output. Controlling 808 the moving component may include generating a feedforward signal and / or other electronic signal. Controlling 808 the moving component may include sending a feedforward signal and / or other electronic signal to the moving component (and / or one or more actuators controlling the moving component) and / or the entire apparatus including the component. The motion of the component may be controlled based on additional information to the control output. For example, the motion of the component may be controlled based on feedback control information (e.g., see FB in FIG. 3 and / or FIG. 6 ), motion of the component governed by normal physics (e.g., see FF in FIG. 3 and / or FIG. 6 ), and / or other information. In a preferred embodiment, all known and normal physics information is accurately modeled and controlled via the feedforward signal FF.

[0084] As a non-limiting example, FIG. 9 illustrates an embodiment of the present system including an artificial neural network PM. FIG. 9 illustrates that the present system can be interpreted as a data-based feedforward add-on that focuses on the (often nonlinear) residual after physics-based feedforward (such as mass and snap feedforward). This allows for the complementary implementation of machine learning model-based control to existing control methods. FIG. 9 illustrates that the artificial neural network PM, while different from the configuration used for ILCs, may still be added as a complementary add-on to other system components. As described herein and illustrated in FIG. 9, the processor of the present system (see FIG. 10 below) is configured to receive a control input, such as and / or including a variable setpoint SP. The control input indicates at least one predetermined movement for a component, such as a stage ST. The processor is configured to determine a control output P / V / A for the component based on the control input SP using the artificial neural network PM. The artificial neural network PM is trained with training data so that the artificial neural network PM can determine a control output regardless of whether the control input SP falls outside the training data. The processor controls the component ST (via the actuator ACT) based on at least the control output. In the example shown in Figure 9, the processor controls the component ST based on feedback information (from the feedback controller FB) and also information from the feedforward controller FF. This example is not intended to be limiting.

[0085] As described herein, an artificial neural network can determine control outputs for components regardless of whether the control inputs (e.g., operational setpoints) fall outside the training data. The artificial neural network can effectively interpolate and extrapolate. Operational setpoints (e.g., with various scan speeds, scan lengths, and scan accelerations for a lithography apparatus) between the operational setpoints of the training data are accurately interpolated by the artificial neural network (more than 90% accuracy relative to the pre-ILC case). According to the present system and method, extrapolating the (scan) accelerations for the operational setpoints (to generate the extrapolated operational setpoints) also provides excellent performance (e.g., greater than 75% accuracy).

[0086] FIG. 10 is a block diagram of an example computer system CS according to one embodiment. The computer system CS may support implementation of a method, flow, or apparatus disclosed herein. The computer system CS includes a bus BS or other communication mechanism for communicating information and a processor PRO (or multiple processors) coupled to the bus BS for processing information. The computer system CS also includes a main memory MM, such as a random access memory (RAM) or other dynamic storage device, coupled to the bus BS for storing information and instructions executed by the processor PRO. The main memory MM may be used, for example, to store temporary variables or other intermediate information during execution of instructions executed by the processor PRO. The computer system CS includes a read-only memory (ROM) ROM or other static storage device coupled to the bus BS for storing static information and instructions for the processor PRO. A storage device SD, such as a magnetic disk or optical disk, is provided and coupled to the bus BS for storing information and instructions.

[0087] The computer system CS may be coupled via a bus BS to a display DS, such as a cathode ray tube (CRT) or flat panel or touch panel display, for displaying information to a computer user. An input device ID, including alphanumeric and other keys, is coupled to the bus BS for communicating information and command selections to the processor PRO. Another type of user input device is a cursor control CC, such as a mouse, trackball, or cursor direction keys, for communicating directional information and command selections to the processor PRO and for controlling cursor movement on the display DS. This input device typically has two degrees of freedom in two axes—a first axis (e.g., x) and a second axis (e.g., y)—allowing the device to specify a position in a plane. A touch panel (screen) display may also be used as an input device.

[0088] In some embodiments, portions of one or more methods described herein may be performed by computer system CS in response to processor PRO executing one or more sequences of one or more instructions stored in main memory MM. Such instructions may be read into main memory MM from another computer-readable medium, such as storage device SD. Execution of the sequences of instructions stored in main memory MM causes processor PRO to perform the process steps described herein. One or more processors in a multiprocessor arrangement may be used to execute the sequences of instructions stored in main memory MM. In some embodiments, hardware-implemented circuitry may be used in place of or in combination with software instructions. Thus, the description herein is not limited to any specific combination of hardware circuitry and software.

[0089] The term "computer-readable medium" as used herein refers to any medium that participates in providing instructions to a processor PRO for execution. Such media may take many forms, including, but not limited to, non-volatile media, volatile media, and transmission media. Non-volatile media include, for example, optical or magnetic disks such as a storage device SD. Volatile media include dynamic memory such as main memory MM. Transmission media include coaxial cables, copper wire, and optical fibers, including the wires that comprise a bus BS. Transmission media may also take the form of acoustic or light waves, such as those generated during radio frequency (RF) and infrared (IR) data communications. Computer-readable media may also be non-transitory, such as a floppy disk, a flexible disk, a hard disk, magnetic tape, any other magnetic medium, a CD-ROM, a DVD, any other optical medium, punch cards, paper tape, any other physical medium with a pattern of holes, RAM, PROM, EPROM, FLASH-EPROM, or any other memory chip or cartridge. Non-transitory computer-readable media may have instructions stored thereon. When executed by a computer, the instructions can perform any of the features described herein. The transitory computer-readable medium may include a carrier wave or other propagating electromagnetic signal.

[0090] Various forms of computer-readable media may be involved in carrying one or more sequences of one or more instructions to processor PRO for execution. For example, the instructions may initially be carried on a magnetic disk of a remote computer. The remote computer can load the instructions into its dynamic memory and send the instructions over a telephone line using a modem. A modem included in computer system CS can receive the data on the telephone line and convert the data to an infrared signal using an infrared transmitter. An infrared detector coupled to bus BS can receive the data carried in the infrared signal and place the data on bus BS. Bus BS transmits the data to main memory MM, from which processor PRO retrieves and executes the instructions. The instructions received by main memory MM may optionally be stored on storage device SD either before or after execution by processor PRO.

[0091] The computer system CS may include a communications interface CI coupled to a bus BS. The communications interface CI provides a bidirectional data communications coupling to a network link NDL, which is connected to a local network LAN. For example, the communications interface CI may be an Integrated Services Digital Network (ISDN) card or a modem providing a data communications connection to a corresponding type of telephone line. As another example, the communications interface CI may be a local area network (LAN) card providing a data communications connection to a compatible LAN. A wireless link may also be implemented. In any such implementation, the communications interface CI sends and receives electrical, electromagnetic, or optical signals that carry digital data streams representing various types of information.

[0092] The network link NDL typically provides data communication through one or more networks to other data devices. For example, the network link NDL may provide a connection to a host computer HC through a local network LAN. This may include data communication services provided through the global packet data communication network commonly designated the "Internet" INT. The local network LAN (Internet) uses electrical, electromagnetic, or optical signals that carry digital data streams. The signals through the various networks and the signals on the network data link NDL and through the communication interface CI that carry digital data to and from the computer system CS are exemplary forms of information carried by carrier waves.

[0093] The computer system CS can send messages and receive data, including program code, through the network, the network data link NDL, and the communication interface CI. In the Internet example, a host computer HC may transmit requested code for an application program through the Internet INT, the network data link NDL, the local network LAN, and the communication interface CI. One such downloaded application may, for example, provide all or part of the methods described herein. The received code may be executed immediately by the processor PRO and / or stored in the storage device SD or other non-volatile storage for later execution. In this manner, the computer system CS can obtain application code in the form of a carrier wave.

[0094] Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it should be understood that the lithographic apparatus described herein may have other applications, including the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memories, flat panel displays, liquid crystal displays (LCDs), thin film magnetic heads, etc.

[0095] Although specific reference may be made in this text to embodiments of the invention in the context of a lithography apparatus, embodiments of the invention may be used in other apparatus. Embodiments of the invention may form part of a mask inspection apparatus, a metrology apparatus, or any apparatus that measures or processes objects such as wafers (or other substrates) or masks (or other patterning devices). These apparatus may be generally referred to as lithography tools. Such lithography tools may use vacuum or atmospheric (non-vacuum) conditions.

[0096] Although specific reference may have been made above to the use of embodiments of the invention in the context of optical lithography, it will be understood that the invention is not limited to optical lithography and may be used in other applications, such as imprint lithography, where the context permits.

[0097] Where the context allows, embodiments of the invention may be implemented in hardware, firmware, software, or any combination thereof. Embodiments of the invention may also be implemented as instructions stored on a machine-readable medium, which may be read and executed by one or more processors. As described herein, a machine-readable medium may include any mechanism for storing or transmitting information in a form readable by a machine (e.g., a computing device). For example, a machine-readable medium may include read-only memory (ROM), random-access memory (RAM), magnetic storage media, optical storage media, flash memory devices, electrical, optical, acoustic, or other forms of transmission signals (e.g., carrier waves, infrared signals, digital signals, etc.), and the like. Furthermore, firmware, software, routines, and instructions may be described as performing particular actions. However, it should be understood that such description is merely for convenience and that such actions may actually be brought about by a computing device, processor, controller, or other device executing the firmware, software, routines, instructions, etc., causing actuators or other devices to interact with the physical world.

[0098] While specific embodiments of the invention have been described above, it will be understood that the invention may be practiced otherwise than as described. The foregoing description is intended to be illustrative and not limiting. As such, it will be apparent to those skilled in the art that modifications may be made to the invention as described without departing from the scope of the claims set forth below. Other aspects of the invention are set forth in the following numbered paragraphs: 1. a component configured to move along at least one predetermined motion; a processor; Equipped with The processor receiving a control input indicative of at least one predetermined movement of the component; determining a control output for the component based on the control input with the trained machine learning model; controlling a component based on at least the control output; configured to execute the machine-readable instructions, The machine learning model is trained on the training data so that the machine learning model can determine the control output regardless of whether the control input falls outside the training data; Device. 2. Item 10. The apparatus of item 1, wherein the machine learning model is an artificial neural network. 3. 3. The apparatus of claim 1 or 2, wherein the control input (1) is pre-filtered and / or (2) comprises a scanning and / or stepping operation set point. 4. Item 4. The apparatus of item 3, wherein the operating set point comprises changing a target parameter for the component. 5. 5. The apparatus of any of items 1 to 4, wherein the apparatus comprises a semiconductor lithography apparatus, an optical metrology inspection tool, or an electron beam inspection tool. 6. 6. The apparatus of any of items 1 to 5, wherein the component comprises a reticle stage, a wafer stage, a mirror, or a lens element configured to move into and / or out of one or more positions for photolithography. 7. 7. The apparatus of any of items 1 to 6, wherein the control input comprises a digital signal indicative of at least one of the position, a higher order time derivative of the position, the velocity, or the acceleration of the component over time. 8. 7. The apparatus of any of items 1 to 6, wherein the control input comprises a digital signal indicative of the position of the component over time and a higher order time derivative of the position, for example velocity or acceleration. 9. 9. The apparatus of any of items 1 to 8, wherein the control output comprises at least one of force, torque, current, voltage, or charge used to control movement of the component. 10. 10. The apparatus of any of items 1 to 9, wherein the machine learning model is pre-trained with training data. 11. Item 11. The apparatus of item 10, wherein training is performed offline, online, or a combination of offline and online. 12. Item 12. The apparatus of item 10 or 11, wherein the training data comprises a plurality of benchmark training control input and corresponding training control output pairs. 13. Item 13. The apparatus of item 12, wherein the training control input comprises varying a plurality of target parameters for the component. 14. Item 14. The apparatus of item 13, wherein the training control output comprises a plurality of known forces, torques, currents, and / or voltages for the component corresponding to varying a plurality of target parameters. 15. 15. The apparatus of any of items 10 to 14, wherein the training generates one or more coefficients for a machine learning model. 16. 1. A method for controlling a component of an apparatus, comprising: receiving a control input indicative of at least one predetermined movement of the component; determining a control output for the component based on the control input with the trained machine learning model; controlling a component based on at least the control output; Equipped with The machine learning model is trained on the training data so that the machine learning model can determine the control output regardless of whether the control input falls outside the training data; method. 17. Item 17. The method of item 16, wherein the machine learning model is an artificial neural network. 18. 18. The method of claim 16 or 17, wherein the control input is (1) pre-filtered and / or (2) comprises a stepping and / or scanning operation set point. 19. Item 19. The method of item 18, wherein the operating setpoint comprises changing a target parameter for the component. 20. 20. The method of any of items 16 to 19, wherein the apparatus comprises a semiconductor lithography apparatus, an optical metrology inspection tool, or an electron beam inspection tool. twenty one. 21. The method of any of items 16 to 20, wherein the component comprises a reticle stage, a wafer stage, a mirror, or a lens element configured to move into and / or out of one or more positions for photolithography. twenty two. 22. The method of any of items 16 to 21, wherein the control input comprises a digital signal indicative of at least one of the position, a higher order time derivative of the position, the velocity, and the acceleration of the component over time. twenty three. 22. An apparatus according to any of items 16 to 21, wherein the control input comprises a digital signal indicative of the position of the component over time and a higher order time derivative of the position, for example velocity and / or acceleration. twenty four. 24. The method of any of items 16 to 23, wherein the control output comprises at least one of force, torque, current, voltage, or charge used to control movement of the component. twenty five. 25. The method of any of items 16 to 24, wherein the machine learning model is pre-trained with training data. 26. 26. The method of claim 25, wherein the training is performed offline, online, or a combination of offline and online. 27. 27. The method of claim 25 or 26, wherein the training data comprises a plurality of benchmark training control input and corresponding training control output pairs. 28. Item 28. The method of item 27, wherein the training control input comprises varying a plurality of target parameters for the component. 29. 29. The method of claim 28, wherein the training control output comprises a plurality of known forces, torques, currents, and / or voltages for the component corresponding to varying a plurality of target parameters. 30. 30. The method of any of items 25 to 29, wherein the training generates one or more coefficients for a machine learning model. 31. A non-transitory computer-readable medium having stored thereon instructions that, when executed by a computer, perform the process described in any of items 16 to 30. 32. A non-transitory computer-readable medium having instructions stored thereon, The instructions, when executed by the computer, receiving a control input indicative of at least one predetermined movement of a component of the device; determining a control output for the component based on the control input with the trained machine learning model; controlling a component based on at least the control output; on the computer, The machine learning model is trained on the training data so that the machine learning model can determine the control output regardless of whether the control input falls outside the training data; Non-transitory computer-readable medium. 33. Item 33. The medium of item 32, wherein the machine learning model is an artificial neural network. 34. Item 34. The medium of item 32 or 33, wherein the control input is (1) pre-filtered and / or (2) comprises stepping and / or scanning operation set points. 35. Item 35. The medium of item 34, wherein the set point comprises changing a target parameter for the component. 36. 36. The medium of any of items 32 to 35, wherein the apparatus comprises a semiconductor lithography apparatus, an optical metrology inspection tool, or an electron beam inspection tool. 37. 37. The medium of any of items 32 to 36, wherein the component comprises a reticle stage, a wafer stage, a mirror, or a lens element configured to move into and / or out of one or more positions for photolithography. 38. 38. The medium of any of items 32 to 37, wherein the control input comprises a digital signal indicative of at least one of position, higher order time derivatives, velocity, and acceleration of the component over time. 39. 38. An apparatus according to any of items 32 to 37, wherein the control input comprises a digital signal indicative of the position of the component over time and a higher order time derivative of the position, for example velocity and / or acceleration. 40. 40. The medium of any of items 32 to 39, wherein the control output comprises at least one of force, torque, current, voltage, and charge used to control movement of the component. 41. 41. The medium of any of items 32 to 40, wherein the machine learning model is pre-trained with training data. 42. Item 42. The medium of item 41, wherein the training is performed offline, online, or a combination of offline and online. 43. Item 43. The medium of item 41 or 42, wherein the training data comprises a plurality of benchmark training control input and corresponding training control output pairs. 44. Item 44. The medium of item 43, wherein the training control input comprises varying a plurality of target parameters for the component. 45. 45. The medium of item 43 or 44, wherein the training control output comprises a plurality of known forces, torques, currents, and / or voltages for the component corresponding to varying a plurality of target parameters. 46. 46. ​​The medium of any of items 41 to 45, wherein the training generates one or more coefficients for a machine learning model. 47. A non-transitory computer-readable medium having instructions stored thereon, The instructions, when executed by the computer, cause the computer to train a machine learning model with training data comprising a plurality of pairs of benchmark training control inputs and corresponding training control outputs; the trained machine learning model is configured to determine a control output for a component of the apparatus based on a control input; a machine learning model is trained with training data such that the machine learning model can determine a control output regardless of whether a control input falls outside the training data; the control input indicates at least one predetermined movement of the component; the device is configured to be controlled based on at least the control output; Non-transitory computer-readable medium. 48. Item 48. The medium of item 47, wherein the training is offline, online, or a combination of offline and online. 49. Item 49. The medium of item 47 or 48, wherein the training control input comprises varying a plurality of target parameters for the component. 50. 50. The medium of any of items 47 to 49, wherein the training control output comprises a plurality of known forces, torques, currents, and / or voltages for the component corresponding to varying a plurality of target parameters. 51. 51. The medium of any of items 47 to 50, wherein the training generates one or more coefficients for a machine learning model.

Claims

1. a component configured to move along at least one predetermined motion; a processor; An apparatus comprising: The processor receiving a control input indicative of at least one predetermined movement of the component; determining with a trained artificial neural network a feedforward output for the component based on the control input; controlling a component based on at least the control output; configured to execute the machine-readable instructions, the artificial neural network is pre-trained with training data such that the artificial neural network can determine the control output regardless of whether the control input falls outside the training data set; The control input comprises a scanning and / or stepping operation set point; Device.

2. The apparatus of claim 1 , wherein the control input is pre-filtered.

3. The apparatus of claim 1 , wherein the operational setpoint comprises varying a target parameter for the component.

4. The apparatus of any of claims 1 to 3, comprising a semiconductor lithography apparatus, an optical metrology inspection tool, or an electron beam inspection tool.

5. The apparatus of claim 1 , wherein the component comprises a reticle stage, a wafer stage, a mirror, or a lens element configured to move for photolithography.

6. 6. An apparatus according to any preceding claim, wherein the control input comprises a digital signal indicative of at least one of the position, third or higher order time derivative of the position, velocity, and / or acceleration of the component over time.

7. 6. An apparatus according to any preceding claim, wherein the control input comprises a digital signal indicative of the position of the component over time and a first or higher order time derivative of the position.

8. The apparatus of claim 7 , wherein the training is performed offline, online, or a combination of offline and online.

9. The apparatus of claim 8 , wherein the training data comprises a plurality of benchmark training control input and corresponding training control output pairs.

10. The apparatus of claim 9 , wherein the training control output comprises a plurality of known forces, torques, currents, and / or voltages for the component corresponding to varying a plurality of target parameters.

11. 11. An apparatus according to any of claims 8 to 10, wherein the training generates one or more coefficients for an artificial neural network.

12. a physical structure configured to move; a motor configured to move the physical structure; one or more processors connected to the motor; Equipped with the one or more processors: executing a feedforward control configured to determine a feedforward signal for the physical structure based on a first control input; configured to execute a physics-based neural network configured to determine, based on a second control input, a compensation signal for the physical structure that addresses a residual after the feedforward control; the physics-based neural network is pre-trained with training data such that the physics-based neural network can determine the compensation signal regardless of whether the second control input falls outside a training data set; the second control input comprises a scanning and / or stepping operation set point; the physics-based neural network operates simultaneously and complementary with the feedforward control; the feedforward signal and the compensation signal are configured to be combined to form a control output; the one or more processors are configured to control the motors to move the physical structure based on the control output. Movement control system.

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