Support structure for planar motor

Abstract

To provide a support structure for a transport unit of a flat motor.SOLUTION: A transport unit can be driven by at least one stator of a flat motor, and can place a product in the transport unit at a support position of the transport unit defined in the support structure. While at least one process force is acting on the product, the support structure adds a bearing force to the transport unit and the bearing force is partially transferred from the product to the transport unit. This bearing force acts against the process force. The transport unit can be carried into the support position in a floating form by using at least one stator of the flat motor, and can be carried out from the support position. The support structure is attached to a substrate and induces a reaction force caused by the bearing force to the substrate at least partially. The transfer of force to an acting surface of the stator is reduced or completely avoided.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a support structure for a planar motor. [Background technology]

[0002] Planar motors are basically known in the prior art. US Pat. No. 5,623,999 discloses, for example, the basic structure and operation of such a planar motor.

[0003] A planar motor has substantially one conveying surface along which one or more conveying units (shuttles) can be moved primarily in two dimensions. To this end, a planar motor typically has drive coils distributed over the conveying surface, which are driven by a control unit to generate a moving magnetic field in the desired direction of movement. The (typically fixedly mounted) units that hold the drive coils and form the conveying surface are typically called stators. Alternatively, permanent magnets arranged in a movable form can also be provided to generate a moving magnetic field. In the context of this disclosure, the fixed units of a planar motor are generally called stators, and the units that are moved at the stators are called conveying units, regardless of the operating method.

[0004] The conveying unit has two-dimensionally distributed drive magnets that cooperate with the magnetic field of the stator, so that a force acts on the conveying unit in the desired direction of movement. In this case, the drive coils and drive magnets are advantageously arranged so that in addition to the one-dimensional movement along the axis generated by the conveying surface, more complex two-dimensional movements of the conveying unit within the conveying surface are also possible. Planar motors can be used, for example, as conveying devices in manufacturing processes, whereby complex movement profiles allow for very flexible conveying processes.

[0005] Modern planar motors are capable of achieving high-precision movements of the carrier units levitating on the stator in all six rigid-body degrees of freedom. The modern structure of the stator (in the form of a segmented arrangement) allows for almost unlimited translation in the two main directions of movement, as well as translation in a third spatial direction ("up" or "down") and limited rotation (up to a certain deflection). The necessary motor forces and moments are generated by (electro)magnetism.

[0006] However, due to the action of process forces and moments, such as inertial forces and / or forces and moments acting on and transferred from products transported with the transport units at the processing stations to the transport units, it may happen that the motor forces and moments are not sufficient to adequately counteract the total load on the shuttle, and in particular the given process forces and moments, which may cause the shuttle to contact or even strike sensitive surfaces of the stator tiles, thereby damaging the surfaces.

[0007] Patent Document 2 discloses a planar motor with a shuttle and stator configured in a number of different ways. In particular, the document teaches that in the transition region between the stator of the planar motor and a stator-less transport system (e.g., a belt conveyor, a robot gripper, or the like), the stator is protected by a guide rail, so that the shuttle first floats and is moved from the stator to the guide rail, and then slides on the guide rail (e.g., on rollers) and is further moved by the stator-less transport system when it leaves the region where the stator magnets act.

[0008] Furthermore, in the field of planar motors, it is known that the shuttle is equipped with rolling elements (in particular balls or rollers). In that case, the shuttle does not float on the stator, but rolls on its surface and is moved only in planar direction by the stator. This allows for the transportation of larger loads, but this incurs additional friction losses and causes wear of the components of the planar motor. Furthermore, there is a risk of damaging the surface of the stator tiles or the surface must be constructed particularly robustly. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] U.S. Patent No. 9,202,719 [Patent Document 2] International Patent Publication No. 2018 / 176137 Summary of the Invention [Problem to be solved by the invention]

[0010] The object of the present disclosure is to alleviate the drawbacks of the prior art, in particular to increase the maximum permissible process force without compromising the functionality of the planar motor. [Means for solving the problem]

[0011] This and other problems are solved in a first aspect of the present disclosure by a support structure for a transport unit of a planar motor, the transport unit being movable by at least one stator of the planar motor, a product being able to be placed on the transport unit, the support structure applying at least one support force to the transport unit while at least one process force is acting on the product at at least one support position of the transport unit defined in relation to the support structure, the process force being at least partially transmitted from the product to the transport unit, the at least one support force acting against the at least one process force, the transport unit being able to be transported to and from the support position in a floating manner using the at least one stator of the planar motor, the support structure being attached to a substrate, the support structure at least partially directing reaction forces caused by the support forces to the substrate, thereby reducing, or advantageously avoiding, force transmission to the active surfaces of the stators. This allows the unit consisting of the conveying unit and the product to be supported or held in a manner that precisely matches the process forces that occur, and the allowable process forces are no longer limited by the maximum motor force and motor moment that can be achieved by the combination of stator and conveying unit. Since the process forces are output to a substrate that is independent of the stator surface, it is no longer necessary to use the stator surface for additional forces. At least in some cases, the forces acting on the active surface of the stator can still be reduced to such an extent that they do not damage this surface and damage to it is prevented.

[0012] In the context of this disclosure, the term "working surface of the stator" refers to the surface of the stator on which a transport unit can be held or moved in a suspended manner. This substrate is independent of the stator surface and is therefore able to absorb forces without adversely affecting the motor-related structures of the stator (i.e., in particular the sensitive stator surface of the stator tiles) and without transmitting them from the support structure to the stator surface. At least in some cases, the forces acting on the working surface are still reduced to such an extent that they do not damage the surface or damage to the surface is prevented. This substrate can also be a housing or a holder on which the stator tiles or stator components forming the stator surface are fixed. This substrate can also be the mounting point on which the stator is fixed or on which the stators are fixed side by side.

[0013] The process forces may be, inter alia, forces applied by a tool, magnetic or electromagnetic forces, inertial forces, moments caused by such forces, or a combination of such forces. Examples of tool-applied forces include forces applied by the action of the tool (e.g., clamping forces, forces applied to deform a workpiece, forces acting on a workpiece during cutting, e.g., pressing forces by a roller, etc.). Examples of applied moments include, but are not limited to, attaching or machining threadable parts (e.g., screws, nuts, or caps when sealing a container such as a bottle) with a rotary tool. Examples of inertial forces and moments include, but are not limited to, forces and moments acting on a product during acceleration of the product or part of the product (e.g., when placing the product on a transport unit, filling the product with a filler, e.g., when pouring a liquid, braking and / or accelerating a shuttle within the confines of a support structure, etc.).

[0014] Alternatively, a process force may be an exceptional force acting on the product only during the process, for example, a support force may serve to absorb short-term excessive loads on the shuttle.

[0015] Advantageously, the substrate can be attached to a support structure on which at least one stator is mounted, whereas another support structure can be arranged on the substrate that is not in direct contact with the stator.

[0016] Advantageously, the support structure can act on the conveying unit in a contactless manner, which reduces friction losses and wear on the conveying unit caused by friction, for example, electromagnetically (for example, by means of an additional coil arrangement), magnetically (for example, by means of a permanent magnet) or pneumatically (for example, by means of an air nozzle directed at the conveying unit).

[0017] Advantageously, this support structure can comprise a support coil arrangement acting on the drive magnet arrangement and / or the support magnet arrangement of the transport unit, so that the magnetic force applied to the transport unit during processing of the products at the support location can be increased in a targeted and controlled manner.

[0018] In another advantageous embodiment, the support structure can comprise, in particular, a base mat, a frame and / or a sliding-preventing structure with at least one ridge, which is a particularly simple, inexpensive and effective solution.

[0019] This support structure may optionally have a sliding structure which may in particular be provided with at least one profiled rail, rail guide, lateral guide and / or sliding surface, so that the unit consisting of the transport unit and the product can be slidably moved further (in a limited way) in the support structure during processing, the movement being adapted to the processing.

[0020] Advantageously, the support structure can form a guide structure into which a holding device arranged on the transport unit can engage, whereby a support structure independent of the shape of the transport unit can be realized, and various transport units can be equipped with holding devices.

[0021] In another advantageous embodiment, the guide structure can form a linear guide in which a sliding part of the holding device can slide into engagement, which again allows the transport unit to move in a guided manner during processing.

[0022] The present disclosure further relates to a processing station for processing products that can be placed on a transport unit of a planar motor, where at least one process force acts on the product during processing and is transmitted through the product to the transport unit, the processing station having at least one support structure as described herein, and the transport unit can be placed in at least one support position during processing.

[0023] Advantageously, the process force may be a force applied by a tool, a magnetic or electromagnetic force, an inertial force, a moment caused by such a force, or a combination of such forces.

[0024] In another aspect, the present disclosure relates to a planar motor comprising at least one processing station disclosed herein and / or a support structure disclosed herein.

[0025] In another aspect, the present disclosure relates to a method for controlling and driving a transport unit using a planar motor having at least one support structure and / or processing station disclosed herein, the method comprising the steps of: using at least one stator of the planar motor to transport the transport unit into a support position in a levitated manner; applying at least one process force acting on a product placed on the transport unit and transmitted to the transport unit; applying at least one support force to the transport unit via the support structure, the support force acting against the at least one process force; and using at least one stator of the planar motor to transport the transport unit out of the support position in a levitated manner.

[0026] In the context of this disclosure, an arrangement of the transport units in which an air gap remains between the drive magnet arrangement of the transport units and the transport surface of the stator, such that there is no contact between the stator and the transport surface, is referred to as "levitated".

[0027] In the context of this disclosure, both forces and moments acting on the transport unit and / or product only during a given movement and / or acceleration of the transport unit and / or during processing at a processing station are referred to as "process forces." Process forces also include inertial forces resulting from the movement of the transport unit 4 and / or product 3 during processing.

[0028] The process forces can be applied, for example, by mechanical action on the product, but can also act on the product in a contactless manner, as can be achieved, for example, with compressed air nozzles or magnets. Likewise, the definitions here apply to all forces and moments mentioned elsewhere, and in particular to support forces.

[0029] The invention will be explained in more detail below with reference to Figures 1 to 14, which illustrate advantageous embodiments of the invention by way of example and in a non-limiting manner. [Brief explanation of the drawings]

[0030] [Figure 1] Three-dimensional schematic of a planar motor with a processing station [Figure 2] 1 is a schematic side view of a planar motor with a processing station according to another embodiment; [Figure 3] Schematic plan view of a planar motor with a processing station according to another embodiment. [Figure 4] Schematic diagrams of processing stations with different configurations of support structures or transport units. [Figure 5] Schematic diagrams of processing stations with different configurations of support structures or transport units. [Figure 6] Schematic diagrams of processing stations with different configurations of support structures or transport units. [Figure 7]Schematic diagrams of processing stations with different configurations of support structures or transport units. [Figure 8] Schematic diagrams of processing stations with different configurations of support structures or transport units. [Figure 9] Schematic diagrams of processing stations with different configurations of support structures or transport units. [Figure 10] Schematic diagrams of processing stations with different configurations of support structures or transport units. [Figure 11] Schematic diagrams of processing stations with different configurations of support structures or transport units. [Figure 12] Schematic diagrams of processing stations with different configurations of support structures or transport units. [Figure 13] Schematic diagram of another embodiment of a processing station. [Figure 14a] Planar motor and supporting structure [Figure 14b] Side view of the planar motor and the supporting structure placed on it DETAILED DESCRIPTION OF THE INVENTION

[0031] 1 shows a schematic diagram of a planar motor 5 and a processing station 1 arranged thereon. The planar motor 5 has stators 6 arranged in a flat configuration that forms a conveying surface 2 on which a number of conveying units 4, 4' can be arranged. The stators 6 of the planar motor are usually arranged rigidly and spatially fixed relative to one another, so that their spatial positions relative to the conveying surface 2 can be determined by spatially fixed coordinates (x S ,y S ,z S ) This coordinate system can be expressed as, for example, S -y S The conveying surface 2 can be defined as lying in a plane. Any number of stators 6 can be arranged on the conveying surface 2, each of which can be expanded depending on the movement space of the conveying unit 2. The axes of the spatially fixed coordinate system are usually the first main axis x S , the second major axis y S and height axis z SThe terms "first major axis," "second major axis," and "elevation axis," in the context of this disclosure, serve only to facilitate understanding of the specification and should not be construed as limiting the present invention.

[0032] In some cases, each stator 6 can have its own coordinate system defined. This is useful, for example, if each stator 6 is configured to be movable relative to the other stators. For example, each stator 6 can move, together with the transport unit 4 arranged thereon, between different positions and / or different transport surfaces, or function as an "elevator" or "transport platform" that can also define the tilt or oscillation of the stator 6.

[0033] The teachings of the present disclosure are applicable to many different embodiments of planar motor 5 and are not limited to the variations with a single conveying surface 2 shown in particular.

[0034] As is well known, each stator 6 contains one or more layers of coils to which individual coil currents can be applied in a controlled manner, thereby generating a magnetic field. Such controlled coil activation allows the generation of a locally defined magnetic field, the position and time course of which can be varied within the region of motion of the conveying surface 2 defined by the arrangement of the stators 6. Alternatively or additionally, movable permanent magnets can be used, which also generate a variable magnetic field.

[0035] A drive magnet arrangement 10 is provided below the conveying unit 4, again working in cooperation with the magnetic field generated by the stator. This drive magnet arrangement 10 typically consists of a planar arrangement of permanent magnets forming magnet pattern areas with alternating polarities (N / S). In some cases, this drive magnet arrangement 10 can also comprise an electromagnet if the magnet pattern of the drive magnet arrangement 10 is to be changeable. However, this embodiment of the planar motor can also function in the reverse manner, with the permanent magnet arrangement located on the conveying surface and the coil arrangement located on the conveying unit. It should be noted that the present disclosure is not limited to a particular embodiment, but is applicable to any type of planar motor consistent with technical constraints, e.g., unless expressly stated to the contrary.

[0036] The transport unit 4 has a coordinate system (x T ,y T ,z T ) can be assigned, in which case the position of the conveying unit 4 can be defined by a corresponding coordinate transformation relative to the spatially fixed coordinate system of the stator 6 (or stators).

[0037] The magnetic field generated by the stator 6 holds the transport unit 4 in a levitated state above the transport surface 2, leaving an air gap d between the transport surface 2 and the underside of the transport unit. In this case, stable magnetic levitation can be achieved by continuously varying the magnetic field using a closed control loop. This method is also called "active levitation" (in English "electromagnetic suspension").

[0038] Here, the controlled change in the magnetic field causes the conveying unit to move parallel to the conveying surface 2 (i.e. along the axis x S and y S Not only can it be moved in the direction of the axis z, but also depending on the strength of the magnetic field, SA (limited) movement along the height axis z of the conveying unit 4 is also possible, whereby the gap d changes. Thereby, the conveying unit 4 can be raised and lowered along the height axis z. T A (possibly limited) rotation (yaw) about the first principal axis x is also possible. T (roll) and / or second principal axis y T Rotation around (pitch) is also possible to a limited extent.

[0039] Any object can be placed on the transport unit, which in the context of this disclosure is generally referred to as a "product" in a non-limiting manner. This term encompasses any object that can be placed on and transported by the transport unit 4 of the planar motor 5. In some cases, the transport unit can be equipped with securing and / or storage means that facilitate or enable the placement and secure transport of the product. The product 3 can have any shape and is schematically illustrated in FIG. 1 as a cubic-shaped object. Examples of products that can be transported by the transport unit 4 of the planar motor 5 and processed at the processing station 1 include, but are not limited to, electronic components or products, such as components for microcomputers, mobile phones, or the like; manufacturing process components (screws, bearings, etc.); liquid containers (e.g., bottles, nozzles, test tubes, etc.); pharmaceutical and drugstore products; and food products (e.g., cut cheese).

[0040] For many applications, it is necessary to process the products 3 arranged on the transport unit 4. For this purpose, in FIG. 1, a processing station 1 is arranged on the edge of the stator 6 of the planar motor 5. This processing station 1 has a base 8 arranged close to the stator 6 and advantageously supported independently of the stator. A tool 15 is arranged in a movable manner on this base 8, with which the products 3 can be processed. For simplicity's sake, the tool illustrated in FIG. 1 consists of a simple drill that can be moved along one axis in the drilling direction. The processing station 1 is illustrated in FIG. 1 purely by way of example; the teachings disclosed herein can be applied to any type of processing station 1. The processing station can perform any method- and / or production-technical process. Examples of processing stations 1 include stations for machining (e.g. drilling, milling, cutting, joining, etc.), stations for assembling parts (e.g. joining-technical measures such as clamping, pressing, pulling, screwing, welding, gluing, etc., or sealing of containers with rotary seals or (crown) corks), and stations for method-technical processes (e.g. filling, mixing, washing, etc.), but the invention is not limited to these processing stations.

[0041] To process the products 3 in the processing station 1, the transport unit 4 with the products thereon is moved into a support position, designated 4' in FIG. 1 . The transport unit 4 moves the products 3 into the support position in a floating manner, positions them there very precisely, and can remove the products from the support position again in a floating manner after processing. In particular, when forces are mechanically applied to the products 3 (i.e., for example, in the case of drilling holes as shown in FIG. 1 or similar processes), the maximum holding force that can be exerted by the stator 6 on the transport unit during processing may not be sufficient to hold the products 3 reliably and accurately positioned in the support position. This may result in impermissible movements of the products 3 together with the transport unit 4 while the process forces required for processing act on the products.

[0042] To prevent this unacceptable movement, a support structure 7 is arranged in the area of ​​the support position, which supports the unit consisting of the transport unit 4 and the product 3 in at least one spatial direction. In FIG. 1, the support structure 7 consists of two elongated base parts 16, 16' fixed to a base plate 8 and which just reach the conveying surface 2 in the movement space of the planar motor 5. These base parts 16, 16' are of a sufficiently low height to allow the planar motor 5 to transport the unit consisting of the transport unit 4 and the product 3 in a floating manner into and out of the support position. This prerequisite is generally the height (along the height axis z S (relative to the thickness of the base part) is given when the thickness is smaller than the maximum possible gap d.

[0043] When the transport unit 4 reaches the support position, it may abut against the base part 16, 16' at a defined position, so that the negative height axis -z S The transport unit 4 can be lowered slightly until further movement of the unit consisting of the transport unit 4 and the product in the direction of the axis of height is no longer possible. In some cases, the base parts 16, 16' can form a form-fitting receiving section for the transport unit 4, so that not only are supporting forces applied in the direction of the height axis, but supporting forces and / or supporting moments are also applied in other spatial directions.

[0044] 2 shows another example of a processing station 1. In this case, the product 3 is processed by the roller device 17 while the product is moved by the transport unit 4 under the roller device 17 with a movement corresponding to the roller speed. This roller device can, for example, be part of a printing mechanism or comprise an embossing roller for printing or embossing the front side of the product 3. The unit consisting of the transport unit 4 and the product 3 is transported in a floating manner by the stator 6 from the first position (reference numerals 3, 4) shown in FIG. 2 into the processing station 1 (reference numerals 3', 4'), where the transport unit 4 is supported on its underside by a support structure 7 formed here as a rolling device 18. While the unit consisting of the transport unit 4 and the product 3 is in the area of ​​the processing station 1, the rolling device 18 is surely rotated about the first main axis x S allows further linear motion in the direction of the negative height axis -z S Movement in this direction is again prevented by the support structure 7. In this case, the support structure 7 formed as a rolling device 19 absorbs the pressing force (or process force) exerted by the roller device 17 on the product 3.

[0045] In an alternative embodiment, instead of the rolling device 18, the support force is applied to the transport unit 4 only along the height axis, and the first main axis x S direction and the second principal axis y S The movement in both directions of the height axis z S Any roller or sliding device, e.g., a ball bearing device, that does not substantially prevent rotation about the processing station 1 may be provided. In some cases, the treatment process can be controlled by the movement of the transport unit 4 relative to the processing station 1, for example, by the movement of the transport unit 4 producing a predetermined treatment pattern.

[0046] In the examples shown in FIGS. 1 and 2, the axis of the height of the conveyor 2 is oriented substantially perpendicular to the conveying surface 2, i.e., the negative height axis −z S, the process forces acting along the axis of the support structure 7 are applied (and received by the support structure 7). However, the support structure 7 may also be constructed and arranged to limit the movement of the unit consisting of the conveying unit 4 and the product 3 in one or more other directions, or even rotational movement, in almost any manner.

[0047] The present disclosure is not limited to the process forces illustrated in the drawings. Rather, in light of the teachings disclosed herein, any support structure 7 can be realized to provide a corresponding support force against many different process forces. For example, magnetic forces can be applied to the product 3 and / or the conveying unit 4, or inertial forces can be applied. Process forces can be generated, for example, by any acceleration of the conveying unit 4, by the application or removal of a load on the product, or by the action of a material flow. For example, a product can be dried in an air current that generates a flow force on the product, which is a process force. Based on the teachings disclosed herein, a support structure can be realized to accommodate any such process force.

[0048] 3 shows another example of the arrangement of the processing station 1 on the stator 6 of the planar motor 5. This processing station again has a tool 15 which acts on the products 3 arranged on the transport unit 4. In this case, the tool 15 has a rotational speed of z T A rotational moment acting around an axis is applied to the workpiece 3 (process forces acting as such a moment can occur, for example, when inserting a screw or screwing a lid onto a container, or in the case of many other machining operations, such as drilling or milling). In this case, the support structure 7 serves to ensure that the rotational moment applied by the tool 15 does not cause either the workpiece 3 or the carrier unit 4 to rotate from its position. To this end, the support structure 7 has a number of fulcrums 19-19''', (four in the illustrated case), which respectively support the carrier unit 4 on two opposite sides thereof while the latter is in the supporting position. In this case, the support structure 7 is arranged such that the rotational moment is applied to the workpiece 3 around the height axis z S rotation around the first principal axis x SThe fulcrum 19 can be formed, for example, as a roller or in the shape of a ball or have any other shape that allows for an approximately point support of the conveying unit 4. In the context of the present disclosure, a support configuration that allows for swinging of the support configuration about at least one axis with respect to an object that it supports on a straight surface of the support configuration is called an "approximate point support" configuration.

[0049] 4 to 12 show different embodiments of the support structure 7, with a schematic bottom view of the transport unit 4, a plan view of the area of ​​the processing station 1 having the support structure 7 and a side view of such area of ​​the processing station 1, respectively, shown above and below. The directional information given in the following description is with respect to the respective illustrated coordinate system. This serves purely for better understanding and description possibilities and should not be interpreted as limiting the invention. As such, each support structure can also be arranged at a different angle, in particular if this is necessary and technically meaningful in the case.

[0050] FIG. 4 illustrates a transport unit 4, e.g., in the form of a rectangular parallelepiped, with an approximately square base and an approximately constant thickness. In the area of ​​the processing station 1, where the transport unit 4 is to be positioned for processing by the stator 6, a support structure 7 in the form of an approximately square base mat 23 is provided. This base mat 23 can be arranged, for example, on a flat support attached to a substrate 8, so that the process forces acting on the support structure 7 are not guided via the stator 6 but directly to the substrate 8 (the substrate 8 is not shown in FIG. 4 but can be realized similarly to the substrate shown in FIG. 1). This base mat 23 can be made of a non-magnetic material, for example, a plastic or rubber material. Advantageously, the base mat 23 has a larger bottom surface than the transport unit 4, e.g., in order to optimally support the transport unit (however, this is not an essential prerequisite). Due to the low coefficient of friction of the material for the transport unit 4 (smooth surface), the base mat allows the transport unit 4, which is pressed against the base mat with the process forces, to be (approximately) supported along the height axis z.S In this case, the base mat 23 can only support in one direction, i.e., can exert a purely supporting force in that direction. On the other hand, the base mat 23 can also have a high coefficient of friction (for example, realized as a rubber mat), in which case the movement of the transport unit 4 is frictionally supported also in other directions. In some cases, the sliding surface can also have direction-dependent sliding or holding properties.

[0051] FIG. 5 illustrates a transport unit 4 having a substantially square base, but tapered sides, resulting in a horizontal (i.e., x T -y T The cross section (seen in the plane) of the transport unit 4 tapers towards the stator. In the area of ​​the processing station 1, where the transport unit 4 is to be positioned for processing by the stator 6, a support structure 7 in the form of a rectangular frame 24 is provided, the edges of which have a triangular cross section. This frame 24 forms a seating surface that slopes towards the inside of the frame, the slope and shape of which are adapted to the tapering of the transport unit 4. This allows the transport unit 4 to be moved on the frame 24 by the stator and then lowered until the tapering of the transport unit 4 abuts in a conformal manner against the seating surface of the frame 24. This conformal accommodation almost completely restricts the degree of freedom of the transport unit 4, so that it can be raised (by means of the stator) and removed from the processing station in a levitated manner by means of the positive height axis z. T Only translational motion in the direction of is possible.

[0052] 6 shows a transport unit 4 provided on its underside (i.e. the surface facing the stator) with recesses 20 that allow the transport unit to be "placed" conformally on a support structure 7. To this end, this support structure 7 has a number of square ridges 25 that are shaped to fit into the recesses 20.

[0053] 7 shows a substantially square transport unit 4. This support structure 7 has two elongated shaping rails 26 arranged parallel to one another. These shaping rails 26 have a substantially L-shaped cross section, and the spacing between the two fillet corners of the shaping rails 26 matches the transport unit 4, allowing it to accommodate the transport unit 4 in a form-fitting manner. The movement of the transport unit is controlled by the shaping rails 26 (in addition to the supporting role in the direction of the height axis) along a first main axis x S and is prevented from sliding in the direction of the second principal axis y S Motion along the axis is still possible (unless frictional forces that overcome the force exerted prevent it).

[0054] 8 again shows a processing station 1 having a support structure 7 with two parallel shaped rails 26. In this case, the shaped rails 26 have a triangular cross section, so that two opposing oblique seating surfaces are formed on which the transport unit 4 can be supported. In some cases, the transport unit 4 can have at least two opposing oblique side surfaces, so that it can be conformally supported on the shaped rails 26. However, a transport unit 4 of the type shown in FIG. 5, for example, can also be conformally supported on such a support structure.

[0055] 9 shows a conveying unit 4 provided with recesses. In this case, two recesses are provided which form two narrow grooves 27 running parallel over the entire underside of the conveying unit (again, the surface facing the stator 6 is referred to as the "underside", regardless of the actual orientation of the conveying unit 4 and the corresponding conveying surface 2 of the stator 6). This support structure 7 comprises two parallel rail guides 11 with a rectangular cross section, the spacing of which corresponds to the spacing of the recesses 20. The rail guides 11 arranged in the recesses 20 prevent movement at least transverse to the rail axis and are also adapted to move in the direction of the first main axis z. S Rotation around the second principal axis y is also prevented. S Movement along the

[0056] 4 to 9, the support structure 7 can also be arranged above or to the side of the transport unit, so that it can also absorb forces in the positive z-direction or forces acting laterally. This can also induce process forces, for example, directed upward or to the side. Furthermore, this has the advantage that the minimum thickness of the support structure is not limited to (or below) the maximum air gap.

[0057] 10 shows a support structure 7 with two parallel lateral guides 12, the lateral guides 12 having a spacing corresponding to the width of the transport unit 4, such that the transport unit 4 located between them is restricted in its movement in the direction of the lateral guides 12, but in height, i.e. the gap, along the height axis z S The second main axis y can be changed by raising and lowering the transport unit in the direction of S Movement along the

[0058] FIG. 11 illustrates a processing station 1 having a support structure 7 in the form of a base mat 23. This base mat 23 has a surface that is significantly larger than the bottom surface of the transport unit 4. This allows the transport unit 4 to abut against the base mat 23 at different positions. On the other hand, transport units 4 of different sizes can use this support structure. In some cases, the surface of the base mat 23 can also be realized as a sliding surface, with constant or variable sliding properties. For example, the base mat 23 can have a direction-dependent slipperiness or can only slide in a predetermined area, e.g., along a predetermined path provided on the surface of the base mat 23. This base mat 23 can be fixed to a substrate 8, also not shown in FIG. 11 (this feature is also applicable to the other support structures 7 shown here), so that the stator surface remains undamaged by both process and support forces.

[0059] 12 shows a processing station 1 having a support structure 7 in the form of a guide structure 13. A holding device 14 is fixed to the transport unit 4, which has a slide element 21 that can be engaged with the guide structure 13. The slide element 21 slides the guide structure 13 in the manner of a linear guide. In the embodiment shown in FIG. 12, the slide element 21 is spherical, and the guide structure 13 has a cylindrical recess extending parallel to the transport surface 2, into which the spherical slide element 21 is snugly received. This allows the transport unit 4 to rotate around the center of the sphere of the slide element 21 in all rotational degrees of freedom, but translational movement of the transport unit 4 is only possible along the linear guide defined by the guide structure 13.

[0060] Alternatively, the retaining device 14 (or its sliding element 21) and the guide structure 13 may have other matching shapes, for example, restricting rotation about one or more axes by form-fittingly receiving the sliding element 21 in the guide structure 13. The selection and implementation of a suitable embodiment is within the capabilities of one skilled in the art in light of the teachings disclosed herein.

[0061] In all of the above-described embodiments, the surface of the support structure 7 has a high coefficient of friction, so that it can also absorb process forces through friction, or it can be configured as a sliding surface, so that possible frictional forces are minimized. The sliding surface can also have different sliding properties, for example, as described above in connection with the individual embodiments. The sliding surface can also have a direction-dependent coefficient of friction, so that, for example, movement is possible only in one direction with low friction. In some cases, additional bearing components, such as roller or ball bearings, can be provided to minimize sliding friction between the transport unit 4 and the support structure 7. In some cases, the support structure can also be realized in a contactless manner, for example, using one or more of air bearings, passive magnetic bearings, and active magnetic bearings.

[0062] Depending on the embodiment and the field of use, the support structure 7 can be manufactured from various materials, for example, metal, plastic, rubber material or a combination of such and similar materials. A person skilled in the art, armed with the teachings disclosed herein, can meaningfully select a suitable combination of materials by routine work and experimentation, taking into account the mentioned attendant conditions.

[0063] 13 shows another embodiment of the support structure 7, in which the support force can be applied to the transport unit 4 in a contactless manner. To this end, the transport unit 4 is provided with, in addition to the usual drive magnet arrangement 10, which cooperates with the stator 6 of the planar motor 5, a magnet arrangement 10, which in the illustrated case is provided on one side of the transport unit 4 and perpendicular to the drive magnet arrangement 10 (i.e. along the height axis z T 13 shows that the support coil arrangement 9 is arranged as a support structure 7 on the base plate 8 above the stator 6. The support coil arrangement 9 can be driven independently of the stator 6 and generates a magnetic field that acts on the support magnet arrangement 22 when the transport unit 4 is placed in the support position shown or moves into its area. In some cases, a (passive) support magnet arrangement can also be provided instead of the support coil arrangement 9. In FIG. 13, the support coil arrangement 9 is arranged in a direction parallel to the height axis z. S 1. The support coil arrangement 9 is arranged in a plane parallel to the stator 6 (i.e. perpendicular to the transport surface 4). However, the support coil arrangement 9 can also be arranged parallel to the stator 6, for example below or above it, in order to amplify the magnetic field generated by the stator 6 in the area of ​​the processing station 1 as desired. The magnetic field generated by the support coil arrangement 9 can also act on the drive magnet arrangement 10, so that an additional support magnet arrangement 22 does not have to be provided on the transport unit 4. This support coil arrangement 9 can be used to apply an additional magnetic force to the transport unit 4 that acts against the process force, thereby allowing the process force to be induced on the substrate in a contactless manner via the transport unit 4. The actual approach can vary in many ways depending on the selected shape and embodiment of the support coil arrangement 9 and / or the support magnet arrangement 22.

[0064] Instead of or in addition to the support coil arrangement 9, a nozzle arrangement (not shown) for ejecting a fluid may be provided, the fluid flow being directed towards the conveying unit 4 and exerting a force thereon.

[0065] 14a and 14b show a planar motor 5 according to another embodiment. The stator 6 of the planar motor 5 shows three transport units 4, 4', 4", which are moved by the stator 6 along a curved path 28 in a suspended manner. This path 28 describes a 90° curve with an approximately constant radius. Due to this change in direction, inertial forces act on the transport units 4, 4', 4", and on the products 3, 3', 3", which are transported by them, within the curve. The transport units 4, 4', 4", respectively, have ring-shaped receptacles 29, 29', 29", in which the (approximately cylindrical) products 3, 3', 3", are stored and held. At high speeds, these inertial forces can no longer be sufficiently compensated for by the stator 6. In this case, the transport units 4, 4', 4", may be thrown "off course" or may tilt in an unacceptable manner, thereby becoming uncontrollable. The latter is of particular concern for products 3, 3', 3" which have a high centre of gravity. In some cases, the product 3 may be released from its container 29 due to inertia and fall off the conveying unit 4. In Figures 14a and 14b, the products 3, 3', 3" are cylindrically shaped. In practice, they may, for example, be containers or bottles placed upright on the conveying units 4, 4', 4" (or in corresponding containers 29, 29', 29" of each conveying unit 4, 4', 4"). In order to enable safe cornering even at high speeds for the conveying units 4, 4', 4" a support structure 7 is provided which is fixed to the base plate 8 and arranged on the surface area of ​​the stator 6, supporting the conveying units 4, 4', 4" (and therefore the products 3, 3', 3") during cornering. The transport unit travels in a straight line on the support structure (transport unit 4) until the receptacles 29, 29', 29" arranged on the transport unit 4 abut against the support structure 7 before the start of the curve. During the curve, the receptacle 29' slides on the support structure 7 (transport unit 4") until the curve is over and the transport unit resumes straight travel. Alternatively or additionally, the support structure 7 can abut against the product 3 and support it. Likewise, the support structure 7 can be arranged as a fall prevention for the transport unit 4.In some cases, in order to minimize frictional forces between the support structure 7 and the receptacle 29 (or the conveying unit 4), a rolling device or equivalent device can be provided on the support structure 7 instead of the sliding surface against which the receptacle 29 abuts, as shown in Figure 14.

[0066] Alternatively, the support structure 7 can also support the conveying unit 4 (or the receptacle 29 and / or the product 3) to compensate for gravity, i.e., in the direction of the height axis z when the stator is arranged flat, for example, in order to enable the accommodation and transport of loads over a defined travel area that would otherwise exceed the carrying capacity of the conveying unit 4. In this case, the corresponding support structure 7 is advantageously arranged on the base plate 8 and fixed independently of the stator 6, i.e., such that the supporting forces assumed by the support structure 7 do not act on the stator 6 via the conveying unit 4 but are output directly to the base plate 8 and do not impair the stator 6 (in particular with regard to its mechanical load-bearing capacity). Even if the stator 6 is arranged vertically, the support structure 7 can be provided to absorb gravity, which in this case extends parallel to the carrying surface.

[0067] In all the embodiments described herein, the product 3 can usually (but not necessarily) be rigidly coupled to the transport unit 4. For example, the product 3 can be placed in the receptacle of the transport unit 4 by conformal placement and / or, if necessary, fixed there by suitable fastening means. No internal degrees of freedom for transport or processing exist between the product 3 and the transport unit 4. In this case, the unit consisting of the transport unit 4 and the product 3 can be considered as a substantially integral unit. Therefore, in this case, limiting the degrees of freedom of the product 3 by the support forces acting on the product actually limits the degrees of freedom of the transport unit 4 in the same way as if the support forces acted directly on the transport unit 4. On the other hand, the product 3 can also be fixed to the transport unit 4 in such a way that it allows limited relative movement with respect to the transport unit 4. For example, the transport unit 4 can have a swinging fastener for a liquid container, so that the transport unit is always transported with its opening facing upwards.

[0068] All of the above-described embodiments have been described based on the orientation and arrangement as shown in the corresponding drawings. However, each such arrangement is purely exemplary and does not limit the present invention. Those skilled in the art, informed by the teachings disclosed herein, will readily be able to appropriately adapt and modify the arrangement and embodiment of the support structure 7 relative to the stator 6 of the planar motor 5, as well as the shape and embodiment of the conveying unit 4, to achieve the desired or required absorption of process forces and process moments.

[0069] Individual features and variations described in individual embodiments and examples can be freely combined with other examples and embodiments (unless stated otherwise elsewhere) and can in particular be used to characterize the invention in the claims without necessarily resorting to further details of the individual embodiments or examples.

[0070] In this specification and claims, unless stated otherwise in the context, the terms "approximately" or "for example" mean, where physically possible, a deviation of within 10% of the stated value, both upward and downward, and only in otherwise meaningful directions, and thus in the case of degrees (angles and temperatures), means ±10°.

[0071] For example, terms defining spatial configurations such as "upper," "lower," "near," "side," "horizontal," "vertical," "right," "left," and the like, refer to the positions shown in the drawings described, or, unless otherwise specifically indicated, to the configuration of the planar motor 5 with the conveying surface 2 in a horizontal position. Such terms serve only to facilitate understanding of this specification and should not be construed as limiting the invention. [Explanation of symbols]

[0072] 1 Processing Station 2. Transport surface 3,3',3" products 4,4',4" transport unit 5 Planar Motor 6 Stator 7 Support structure 8 PCB 9 Support coil device 10 Drive magnet device 11 Rail guide 12 Lateral guide 13 Guide structure 14 Holding device 15 Tools 16,16' Base parts 17 Roller device 18 Rolling device 19 Fulcrum 20 recess 21 Slide parts 22 Support magnet device 23 Base Mat 24 frames 25 prominence 26 Molded Rail 27 Narrow groove 28 Travel Path

Claims

1. A support structure (7) for a carrying unit (4) of a planar motor (5), comprising: The conveying unit (4) can be moved in a levitated manner on the working surface of at least one stator (6) of a planar motor (5), and the product (3) can be placed on the conveying unit (4); At least one support position of the transport unit (4) defined in relation to said support structure (7), the support structure (7) applies at least a support force to the transport unit (4) while at least one process force acts on the product (3), The process forces are at least partially transmitted from the product (3) to the conveying unit (4), the at least one support force acting against the at least one process force; The transport unit (4) can be brought into and out of a support position in a levitated manner by means of at least one stator (6) of a planar motor (5), The support structure (7) is fixedly attached to a substrate (8), The support structure (7) at least partially guides the reaction force caused by the support force to the substrate (8), Thereby, the transmission of forces to the working surface of the stator (6) is reduced, advantageously avoided altogether. Support structure.

2. A support structure (7) according to claim 1, The substrate (8) is mounted on a support structure on which at least one stator (6) is mounted.

3. A support structure (7) according to claim 1 or 2, A support structure characterized in that the support structure (7) acts on the conveying unit (4) in a contactless manner.

4. A support structure (7) according to any one of claims 1 to 3, 1. A support structure (7) characterized in that the support structure (7) comprises a supporting coil arrangement (9) and / or a supporting magnet arrangement acting on a driving magnet arrangement (10) and / or a supporting magnet arrangement (22) of a transport unit (4).

5. A support structure (7) according to any one of claims 1 to 4, The support structure (7) is characterized in that it has a structure with a shape that suppresses sliding, in particular, comprising one or more of a base mat (23), a frame (24), at least one protrusion (25) and at least one depression.

6. A support structure (7) according to any one of claims 1 to 5, The support structure (7) is characterized in that it comprises a slide structure with at least one profiled rail (26), a rail guide (11), a lateral guide (12) and / or a slide surface.

7. A support structure (7) according to any one of claims 1 to 6, The support structure (7) is characterized in that it forms a guide structure (13) in which a holding device (14) arranged on the transport unit (4) can engage.

8. A support structure (7) according to claim 7, A support structure characterized in that said guide structure (13) forms a linear guide in which a sliding part (21) of said holding device (14) can slideably engage.

9. A processing station (1) for processing products (3) that can be placed on a transport unit (4) of a planar motor (5), During this treatment, at least one process force acts on the product (3), which process force is transmitted via the product (3) to the conveying unit (4), This processing station (1) comprises at least one support structure (7) according to any one of claims 1 to 8, During processing, this transport unit (4) can be placed in at least one support position, Processing station.

10. A processing station (1) according to claim 9, A processing station, wherein said process force is a force applied by a tool (15), a magnetic force, an electromagnetic force, an inertial force, a moment caused by such a force, or a combination of such forces.

11. A planar motor (5) comprising a processing station (1) according to claim 9 or 10 and / or a support structure (7) according to any one of claims 1 to 8.

12. A method for controlling and driving a conveying unit (4) by means of a planar motor (5) according to claim 11, comprising: levitating the transport unit (4) into a support position using at least one stator (6) of a planar motor (5); applying at least one process force acting on the product placed on the conveying unit and transmitted to the conveying unit (4); applying at least one support force to the conveying unit (4) via a support structure (7), the support force acting against the at least one process force; levitating and transporting the transport unit (4) from the support position using at least one stator (6) of the planar motor (5); A method having the following.

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