Method for making ceramic matrix composites that exhibit moisture and environmental resistance

Abstract

To provide a method of producing a ceramic matrix composite material (CMC), capable of exhibiting improved resistance to moisture and environment without accompanying loss of the performance of material.SOLUTION: A method of producing a ceramic matrix composite material capable of exhibiting resistance to moisture and environment is developed. The method comprises steps of depositing a diffusion barrier layer containing boron nitride on a silicon carbide fiber, and depositing a humidity-resistant layer containing silicon-doped boron nitride on the diffusion barrier layer, with the thickness of the humidity resistant layer being about 3 to 300 times as thick as the diffusion barrier layer. Thus, a compliant multilayer including a humidity resistant layer and a diffusion barrier layer is formed. A wet layer containing silicon carbide, boron carbide and / or pyrolyzed carbon is deposited on the compliant multilayer. After the wet layer is deposited, slurry is made to penetrate a fiber preform including a silicon carbide fiber. Subsequent to the slurry penetration, a molten material containing silicon is made to penetrate the fiber preform, and thereafter the molten material is cooled, whereby a ceramic matrix composite material is formed.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates generally to the production of ceramic matrix composites (CMCs), and more particularly to producing CMCs that have good moisture and environmental resistance and favorable mechanical properties. [Background technology]

[0002] Ceramic matrix composites contain ceramic fibers embedded in a ceramic matrix, and these composites exhibit a combination of properties that make them promising candidates for industrial applications requiring excellent thermal and mechanical properties along with low weight, such as gas turbine engines. Ceramic matrix composites containing a silicon carbide matrix reinforced with silicon carbide fibers are sometimes referred to as silicon carbide / silicon carbide composites or SiC / SiC composites. The manufacture of SiC / SiC composites can involve slurry infiltration and melt infiltration steps to densify a silicon carbide fiber preform. Prior to these infiltration steps, the fibers comprising the silicon carbide preform can be coated with one or more materials to protect the fibers and / or improve the performance of the final densified composite. Summary of the Invention

[0003] Embodiments may be better understood by reference to the following figures and description. The components in the figures are not necessarily to scale. Additionally, in the figures, like reference numerals indicate corresponding parts throughout the different views. [Brief explanation of the drawings]

[0004] [Figure 1] High-resolution transmission electron microscope (TEM) image showing the cross-section of a section of silicon carbide fiber coated with a functional layer. Scale bar is 500 nm. [Figure 2]FIG. 1 shows an electron energy loss spectroscopy (EELS) line scan showing elemental (e.g., B, C, N, Si) profiles, where the at.% of the element is plotted against the depth or distance (nanometers). [Figure 3] 4 is a flowchart illustrating exemplary steps of the method. [Figure 4] 10 is a graph showing data plots illustrating the results of moisture exposure testing of SiBN coated fiber preform specimens at different doping levels. DETAILED DESCRIPTION OF THE INVENTION

[0005] A method for making ceramic matrix composites (CMCs) that can exhibit improved moisture and environmental resistance without loss of material performance is described. The method involves controllably depositing a series of coatings or layers, each with a specific function, onto silicon carbide fibers that serve as reinforcement in the final CMC. In particular, a moisture-resistant layer is deposited onto a diffusion barrier layer to form a compliant multilayer that protects the underlying silicon carbide fibers from environmental degradation during use. After these layers are applied, a fiber preform containing silicon carbide fibers can be slurry infiltrated and then melt infiltrated to form the final CMC.

[0006] FIG. 1 is a high-resolution transmission electron microscope (TEM) image showing the cross section of an exemplary silicon carbide fiber including a series of functional layers or coatings, and FIG. 3 provides a flowchart of the method. Referring to FIGS. 1 and 3, the method involves depositing 130 a diffusion barrier layer 104 including boron nitride on one or more silicon carbide fibers 102, sometimes referred to as "silicon carbide fibers." The diffusion barrier layer 104 may help ensure a weak fiber-matrix interface in the final CMC and promote matrix crack deflection, thereby improving fracture toughness. Next, a moisture resistant layer 106 including silicon-doped boron nitride is deposited 132 on the diffusion barrier layer 104, thereby forming a compliant multilayer 108 including the moisture resistant layer 106 and the diffusion barrier layer 104. The diffusion barrier layer may prevent the silicon carbide fibers 102 and the moisture resistant layer 106 from interdiffusing and forming a strong bond, whether during subsequent heat treatment or during use. The diffusion barrier layer 104 can be nanoscale in thickness, but typically not more than about 100 nm thick; above this thickness, the diffusion barrier layer 104 may exhibit moisture instability, which is sometimes observed with thick boron nitride coatings in silicon carbide / silicon carbide composites. The moisture resistant layer 106 can have a thickness of about 3 to about 300 times the thickness of the diffusion barrier layer 104. Silicon carbide, boron carbide (e.g., B x A wetting layer 110 comprising silicon carbide fibers 102 is deposited 134 on the compliant multilayer layer 108. In some examples, a barrier layer designed to resist wetting by molten silicon may be deposited on the moisture resistant layer 106 before depositing the wetting layer 110, as discussed further below. After depositing the wetting layer 110, a fiber preform comprising silicon carbide fibers 102 is infiltrated 136 with a slurry that may include ceramic (e.g., silicon carbide) particles in a carrier fluid. Following the slurry infiltration, the fiber preform is infiltrated 138 with a melt comprising silicon, and upon cooling, a dense CMC may be formed comprising silicon carbide fibers in a ceramic matrix comprising silicon carbide.

[0007] The addition of a moisture resistant layer 106 comprising silicon-doped boron nitride may not only enhance the environmental resistance of the CMC during use, but may also help protect the underlying diffusion barrier layer 104 and silicon carbide fibers 102 from silicon attack during melt infiltration. As noted above, the thickness of the moisture resistant layer 106 is 3 to 300 times greater than the thickness of the diffusion barrier layer 104, and this thickness may also be 5 to 100 times the thickness of the diffusion barrier layer 104. For example, the thickness of the moisture resistant layer 106 may be within the range of about 0.4 to about 3 microns or about 1.5 microns to about 3 microns, while the thickness of the diffusion barrier layer 104 may be within the range of about 0.01 micron to about 0.10 micron or about 0.05 micron to about 0.10 micron. Diffusion barrier layers having thicknesses at the upper end of this range (e.g., about 0.05 micron (50 nm) or greater) may be associated with increased fracture toughness and fracture strain. The concentration of silicon in the silicon-doped boron nitride may be in the range of about 2 at.% to about 30 at.%.

[0008] Each of the layers deposited on the silicon carbide fibers 102, sometimes referred to as "functional layers," is described below in order of deposition. Note that deposition of the functional layers on the silicon carbide fibers 102 may be performed using chemical vapor infiltration (CVI). Generally speaking, CVI involves flowing hot gaseous reagents through a furnace or reaction chamber containing one or more porous specimens to be coated. The one or more porous specimens may include any arrangement of silicon carbide fibers 102 (e.g., fiber preforms and / or fiber tows, as discussed below), and the gaps between adjacent silicon carbide fibers 102 may be understood to constitute pores. During CVI, the gaseous reagents may penetrate the porous specimen (e.g., fiber preforms and / or fiber tows) and chemically react to form a deposit, coating, or layer on the exposed surfaces of the silicon carbide fibers 102. During deposition, the porous specimen may be untooled or may be held in place by a tool. Suitable fixtures may include through-holes for the passage of gaseous reagents and may be formed of chemically inert and / or refractory materials, such as graphite or silicon carbide, which are stable at the high temperatures at which deposition occurs. The through-holes in the fixture may have a diameter or width large enough to allow sufficient flow of gaseous reactants into the porous specimen during CVI. The fixture may have a single-piece or multi-piece construction suitable for securing the porous specimen in the desired orientation and for easy removal after deposition of the coating.

[0009] To deposit a diffusion barrier layer 104 comprising boron nitride, the silicon carbide fibers 102 may be exposed to a gas atmosphere containing a flow of a nitrogen-containing gas, such as ammonia, and a flow of a boron-containing gas, such as boron trichloride, at a temperature ranging from about 700°C to about 875°C. The gas atmosphere may further include a flow of a substantially inert carrier gas, such as N2 or H2. In one example, the diffusion barrier layer 104 may comprise a crystalline (hexagonal) phase of boron nitride; the crystalline phase is preferred because amorphous or turbostratic boron nitride is more susceptible to decomposition upon exposure to moisture and / or oxygen at elevated temperatures. The crystallinity of the boron nitride may be promoted or ensured by exposure to atmospheric humidity and optional heat treatment, described below, during CVI of successive layers. Deposition of the diffusion barrier layer 104 may be carried out for a duration of 1 to 10 hours.

[0010] In a next step, a moisture resistant layer 106 comprising silicon-doped boron nitride is deposited on the diffusion barrier layer 104 to enhance moisture and environmental resistance. This may entail incorporating a silicon-containing gas into the gas atmosphere used to form the underlying diffusion barrier layer 104, which may include a flow of a nitrogen-containing gas and a boron-containing gas along with a substantially inert carrier gas, such as N or H, as described above. In particular, it has been found that using H instead of N as the carrier gas can increase the deposition rate of silicon-doped boron nitride by 50%, and therefore H is preferred. Suitable silicon-containing gases may include methyltrichlorosilane (CHSiCl), trichlorosilane (HSiCl), dichlorosilane (HSiCl), silicon tetrachloride (SiCl), and / or silane (SiH). Typically, CVI of silicon-doped boron nitride is performed at a temperature ranging from about 700°C to about 875°C. The deposition of the moisture resistant layer 106 may be carried out for a duration of 10 to 70 hours.

[0011] In addition to serving as a compliant release layer, the diffusion barrier layer 104 may also function as a diffusion barrier between the silicon carbide fibers 102 and carbon enrichment / non-stoichiometry of the silicon carbide fibers and / or residual carbon (sizing) char in the moisture resistant layer 106. As discussed above, to promote crystallinity in the diffusion barrier layer 104 (e.g., formation of a hexagonal boron nitride phase), the method may further include exposing the diffusion barrier layer 104 and / or the compliant multilayer 108 to atmospheric humidity and then heat treating the diffusion barrier layer 104 and / or the compliant multilayer 108 at a temperature in the range of about 900° C. to about 1150° C., preferably in an inert atmosphere.

[0012] As described above, an optional barrier layer having a high contact angle with molten silicon may be deposited on the compliant multilayer 108 prior to deposition of the wetting layer 110. For the barrier layer to act as an effective chemical barrier, the contact angle is preferably at least about 45°. Thus, the barrier layer may be silicon nitride or silicon nitrocarbide, e.g., Si x N y C zIt may include these, and all of them can exhibit the necessary contact angle with respect to molten silicon. In one example, 0.1 < x < 0.697, 0.3 < y < 0.6 and 0.003 < z < 0.33, that is, the barrier layer may contain carbon at a concentration of about 0.3 at.% to 33 at.% and nitrogen at a concentration of about 30 at.% to 60 at.%, and the rest is silicon and any accompanying impurities. Silicon carbonitride can be understood to include a mixture of silicon carbide (SiC), silicon nitride (Si3N4) and / or carbon (C). Silicon carbonitride may be amorphous, and may remain amorphous during CVI treatment, at least partially due to the presence of carbon that can suppress or prevent crystallization. As a result, it is possible to advantageously avoid the crystallization-induced shrinkage cracks in the barrier layer, which is a problem related to amorphous silicon nitride that never contains a significant amount of carbon. When the barrier layer contains silicon nitride (such as Si3N4), crystalline silicon nitride is preferred, and more specifically, crystalline silicon nitride without cracks is preferred. The barrier layer may be deposited to have a thickness within the range of about 0.005 microns to about 2 microns, or more preferably within the range of about 0.3 microns to about 1 micron.

[0013] The location of the barrier layer between the compliant multilayer 108 and the wetting layer 110 can result in the improvement of the manufacturing and properties of the CMC. Previous studies have shown that molten silicon can diffuse through the wetting layer or the hardened layer of silicon carbide and can chemically attack the underlying diffusion barrier layer and / or silicon carbide fibers. Here, the barrier layer may be deposited before the hardened layer or the wetting layer 110, and thus arranged uniquely to provide a chemical barrier against the attack of silicon without sacrificing the desired wettability of the wetting layer 110.

[0014] Deposition of a barrier layer on the compliant multilayer 108 may include exposing the compliant multilayer 108 to a gas atmosphere including a flow of a silicon-containing gas and a flow of a nitrogen-containing gas, which may entail stopping the flow of the boron-containing gas into the gas atmosphere while continuing to flow the nitrogen and / or silicon-containing gases described above at a temperature in the range of about 700°C to about 1000°C. It may be beneficial to stop the flow of the boron-containing gas for 5 to 30 minutes before stopping the flows of the nitrogen and silicon-containing gas. If it is intended to deposit a barrier layer comprising silicon carbonitride instead of silicon nitride, a flow of a carbon-containing gas may be included in the gas atmosphere. The carbon-containing gas may be the same as or different from the silicon-containing gas or the nitrogen-containing gas. In other words, the silicon-containing gas or the nitrogen-containing gas may also contain carbon. An example of a silicon-containing gas that includes carbon is the aforementioned methyltrichlorosilane (CH3SiCl3), also known as MTS. In addition to the silicon-, nitrogen-, and / or carbon-containing gases, sometimes referred to individually or collectively as reactive gases, the gas atmosphere may further include a flow of a carrier gas, which, as indicated above, may be a non-reactive or reactive gas and may be selected from N2 and H2.

[0015] After deposition of the optional barrier layer, a wetting layer 110 may be deposited, which may also function as a hardening layer in some cases. Typically, the wetting layer 110 comprises silicon carbide, boron carbide, and / or pyrolytic carbon. Deposition may involve CVI using a flow of a silicon-containing or boron-containing gas that also contains carbon, such as the MTS described above. Prior to CVI of the wetting layer 110, all gas flows except the carrier gas (e.g., H2 or N2) may be stopped and the furnace may be cooled. Typically, the wetting layer 110 has a thickness in the range of about 0.5 microns to about 10 microns. CVI of the wetting layer 110 may be performed for about 1 hour to about 60 hours, typically at a temperature in the range of about 600°C to about 1500°C.

[0016] The silicon carbide fibers 102 to be coated may be arranged into fiber tows, one-dimensional tapes, braids, plies, and / or woven fabrics (e.g., 2D, 3D, and / or 2.5D woven fabrics), and may be part of a fiber preform having a predetermined shape, such as an airfoil shape. The fiber preform is typically produced from plies, woven fabrics, and / or tapes in a lay-up process and may be described as a three-dimensional framework of silicon carbide fibers or fiber tows. Typically, the silicon carbide fibers 102 are assembled into a fiber preform prior to CVI.

[0017] After deposition of the functional layer, the silicon carbide fibers may be referred to as coated silicon carbide fibers, and the fiber preform may be referred to as a rigid preform. Deposition of the functional layer may be followed by slurry infiltration, impregnating the rigid preform with a matrix precursor to form what may be referred to as an impregnated fiber preform. Suitable slurries may include ceramic particles (e.g., particulate silicon carbide) and / or particulate reactive elements (e.g., elements reactive with molten silicon or molten silicon alloys), such as carbon, in an aqueous or organic liquid. The slurry may also include a carbon resin, such as phenolic alcohol or furfuryl alcohol. In some cases, the carbon resin may be separately infiltrated into the rigid preform after slurry infiltration, or may not be used at all. If a carbon resin is used, one or more additional steps, such as curing and / or pyrolysis, may be performed to convert the resin to carbon. Typically, the impregnated fiber preform contains a loading level of particulate matter, including ceramic particles and particulate reactive elements, of about 40% to about 60% by volume, with the remainder being pores. The method may further include infiltrating the fiber preform with a molten material (e.g., molten silicon or a molten silicon alloy) followed by cooling to form a dense ceramic matrix composite. Due to the presence of the barrier coating, the silicon carbide fibers and the diffusion barrier layer (or compliant multilayer) may be protected from attack by the molten silicon.

[0018] During melt infiltration, the molten material infiltrating the rigid and / or impregnated fiber preform may consist essentially of silicon (e.g., elemental silicon and any incidental impurities) or may include a silicon-rich alloy. Melt infiltration can be performed at a temperature equal to or greater than the melting temperature of the silicon or silicon alloy being infiltrated. Thus, temperatures for melt infiltration are typically in the range of about 1380°C to about 1700°C. In one example, the ramp rate from an intermediate temperature of about 800°C to temperatures above about 1380°C may be less than about 10°C / min. Suitable durations for melt infiltration can range from 15 minutes to 4 hours, depending in part on the size and complexity of the ceramic matrix composite being formed. The ceramic matrix is ​​formed from ceramic particles and ceramic reaction products resulting from the reaction between the molten material and any other particles (e.g., carbon particles, refractory metal particles) in the fiber preform. Preferably, the final ceramic matrix composite is substantially devoid of closed porosity. In some cases, the ceramic matrix composite may form part or all of a gas turbine engine component, such as a blade or vane. [Example]

[0019] 5HS Hi-Nicalon Type S fabric is preformed into a 6.5" x 7" x 0.200" panel, placed in a graphite fixture with diffusion holes, and loaded into a furnace. After ejection, the furnace is heated to 1000°C for 5 minutes to 1 hour for heat treatment of the panel / fiber preform. The furnace temperature is then cooled to 750-850°C, and a flow of N2, BCl3, and NH3 is introduced for 3 hours to apply a diffusion barrier layer containing boron nitride to the silicon carbide fibers of the preform. Next, a flow of MTS is added to the gas atmosphere for 25-40 hours, depositing a moisture-resistant layer containing silicon-doped boron nitride on the diffusion barrier layer to form a compliant multilayer. In the next step, the BCl3 flow is shut off for 15 minutes while the flow of MTS, NH3, and N2 is continued to form the silicon carbonitride barrier layer. Finally, all gas flows except N2 are stopped, and the furnace is cooled. A SiC layer is then deposited to form a hardening or wetting layer. The preform may be slurry infiltrated with a SiC-containing slurry and then melt infiltrated with silicon or a silicon alloy to form a SiC / SiC composite.

[0020] The microstructure of the functional coating on silicon carbide fibers is shown by a transmission electron microscope (TEM) image in Figure 1, along with an electron energy loss spectroscopy (EELS) line scan that provides the elemental profile shown in Figure 2. The data reveal that the exemplary sample includes a moisture resistant layer comprising silicon-doped boron nitride ("SiBN") containing approximately 11-12 at.% silicon. The SiBN layer is approximately 0.65 microns (650 nm) thick, and the diffusion barrier layer comprising BN is approximately 0.05 microns (50 nm) thick.

[0021] Figure 4 shows a data plot of moisture exposure test results for SiBN coated fiber preform specimens at different doping levels. The moisture tests were conducted at 65°C and 95% relative humidity. As shown in the plot, the weight gain from hydrolysis is significantly reduced with silicon dopant levels above about 3 at.%.

[0022] In order to clarify the purpose of the public display and to provide the public display, 、 , …and <n> "At least one of the following" or "< / n> 、 、… <n> At least one of or a combination thereof" or "< / n> 、 , ...and / or <n>The phrase "a" or "an" is defined by applicant in the broadest sense, superseding any other suggested definition, either earlier or later, unless expressly asserted to the contrary by applicant, and means one or more elements selected from the group including A, B, ..., and N. In other words, the phrase means any combination of one or more of the elements A, B, ..., or N, including any one element alone or one element in combination with one or more of the other elements, which may also include additional elements not listed in the combination. Unless otherwise indicated or otherwise suggested by context, as used herein, "a" or "an" means "at least one" or "one or more."

[0023] While various embodiments have been described, it will be apparent to those skilled in the art that many further embodiments and implementations are possible. Accordingly, the embodiments described herein are examples and not the only possible embodiments and implementations.

[0024] The subject matter of the present disclosure may also relate, inter alia, to the following aspects:

[0025] A first aspect relates to a method for making a moisture and environmentally resistant ceramic matrix composite material, the method including the steps of depositing a diffusion barrier layer comprising boron nitride on silicon carbide fibers, depositing a moisture resistant layer comprising silicon-doped boron nitride on the diffusion barrier layer, wherein the moisture resistant layer is about 3 to about 300 times thicker than the diffusion barrier layer, thereby forming a compliant multilayer comprising the moisture resistant layer and the diffusion barrier layer, depositing a wetting layer comprising silicon carbide, boron carbide, and / or pyrolytic carbon on the compliant multilayer layer, infiltrating a fiber preform comprising silicon carbide fibers with a slurry after depositing the wetting layer, and infiltrating the fiber preform with a melt comprising silicon after infiltration, thereby forming the ceramic matrix composite material.

[0026] A second embodiment relates to the method of the first embodiment, wherein the thickness of the moisture resistant layer is about 10 to 100 times the thickness of the diffusion barrier layer.

[0027] A third embodiment relates to the method of the first or second embodiment, wherein the thickness of the diffusion barrier layer is in the range of about 0.01 microns to about 0.10 microns.

[0028] A fourth embodiment relates to the method of any one of the first to third embodiments, wherein the moisture-resistant layer has a thickness in the range of about 0.4 microns to about 3 microns.

[0029] A fifth embodiment relates to the method of any of the first to fourth embodiments, wherein the moisture-resistant layer comprises silicon at a concentration of about 2 at.% to about 30 at.%.

[0030] A sixth aspect relates to the method of any of the first to fifth aspects, wherein the diffusion barrier layer comprises a crystalline phase of boron nitride.

[0031] A seventh aspect relates to the method of the sixth aspect, wherein the crystalline phase comprises a hexagonal phase.

[0032] An eighth aspect relates to the method of the sixth or seventh aspect, further comprising exposing the compliant multilayer to atmospheric humidity and heat treating the compliant multilayer at a temperature in the range of about 900°C to about 1150°C to form a crystalline phase.

[0033] A ninth aspect relates to the method of any of the first to eighth aspects, wherein the step of depositing a diffusion barrier layer comprises exposing the silicon carbide fibers to a gas atmosphere comprising a flow of a carrier gas selected from N2 and H2, a flow of a nitrogen-containing gas, and a flow of a boron-containing gas at a temperature in the range of about 700°C to about 875°C.

[0034] A tenth embodiment relates to the method of the ninth embodiment, wherein the carrier gas comprises H2.

[0035] An eleventh aspect relates to the method of the ninth or tenth aspect, wherein the nitrogen-containing gas comprises ammonia.

[0036] A twelfth aspect relates to the method of any one of the ninth to eleventh aspects, wherein the boron-containing gas comprises boron trichloride.

[0037] A thirteenth aspect relates to the method of any one of the ninth to twelfth aspects, further comprising, after the step of depositing the diffusion barrier layer, introducing a flow of a silicon-containing gas into the gas atmosphere to deposit a moisture resistant layer on the diffusion barrier layer.

[0038] A fourteenth aspect relates to the method of the thirteenth aspect, wherein the silicon-containing gas is selected from the group consisting of methyltrichlorosilane (CH3SiCl3), trichlorosilane (HSiCl3), dichlorosilane (H2SiCl2), silicon tetrachloride (SiCl4), and silane (SiH4).

[0039] A fifteenth aspect relates to the method of any of the first to fourteenth aspects, wherein the diffusion barrier layer is deposited for a duration of from about 1 hour to about 10 hours.

[0040] A sixteenth aspect relates to the method of any of the first to fifteenth aspects, wherein the moisture-containing layer is deposited for a duration of about 10 to about 70 hours.

[0041] A seventeenth aspect relates to the method of any of the first to sixteenth aspects, further comprising the step of depositing a barrier layer having a high contact angle with molten silicon onto the compliant multilayer prior to the step of depositing the wetting layer.

[0042] An eighteenth aspect relates to the method of the seventeenth aspect, wherein the barrier layer comprises silicon carbonitride or silicon nitride.

[0043] A nineteenth aspect relates to any of the first to eighteenth aspects, further comprising forming a fiber preform including the silicon carbide fibers before coating the plurality of silicon carbide fibers with the diffusion barrier layer.

[0044] A twentieth aspect relates to a fiber preform for producing a ceramic matrix composite, the fiber preform comprising silicon carbide fibers coated with a plurality of functional layers, the functional layers comprising: a diffusion barrier layer comprising boron nitride deposited on the silicon carbide fibers; a moisture resistant layer comprising silicon-doped boron nitride deposited on the diffusion barrier layer, the moisture resistant layer having a thickness of from about 3 to about 300 times the thickness of the diffusion barrier layer, the moisture resistant layer and the diffusion barrier layer together defining a compliant multilayer; and a wetting layer comprising silicon carbide, boron carbide, and / or pyrolytic carbon deposited on the compliant multilayer layer. [Section 1] 1. A method for making a ceramic matrix composite material that exhibits moisture and environmental resistance, comprising: depositing a diffusion barrier layer comprising boron nitride on the silicon carbide fibers; depositing a moisture resistant layer comprising silicon-doped boron nitride on the diffusion barrier layer, wherein the thickness of the moisture resistant layer is about 3 to about 300 times the thickness of the diffusion barrier layer, thereby forming a compliant multilayer comprising the moisture resistant layer and the diffusion barrier layer; depositing a wetting layer comprising silicon carbide, boron carbide and / or pyrolytic carbon onto the compliant multi-layer; After the step of depositing the wetting layer, infiltrating the fiber preform containing silicon carbide fibers with a slurry; and forming a ceramic matrix composite by infiltrating the fiber preform with a melt containing silicon after the slurry infiltration and then cooling the melt; A method comprising: [Section 2] Item 1. The method according to item 1, wherein the thickness of the moisture-resistant layer is about 10 to 100 times the thickness of the diffusion barrier layer. [Section 3] Item 3. The method according to item 1 or 2, wherein the thickness of the diffusion barrier layer is within the range of about 0.01 microns to about 0.10 microns. [Section 4] Item 4. The method according to any one of items 1 to 3, wherein the moisture-resistant layer has a thickness in the range of about 0.4 microns to about 3 microns. [Section 5] Item 5. The method according to any one of items 1 to 4, wherein the moisture-resistant layer contains silicon at a concentration of about 2 at.% to about 30 at.%. [Section 6] Item 6. The method of any one of items 1 to 5, wherein the diffusion barrier layer comprises a crystalline phase of boron nitride. [Section 7] Item 7. The method according to item 6, wherein the crystalline phase comprises a hexagonal phase. [Section 8] exposing the compliant multilayer to atmospheric humidity; and forming a crystalline phase by heat treating the compliant multilayer at a temperature in the range of about 900°C to about 1150°C; Item 6 or 7. The method according to Item 6 or 7, further comprising: [Section 9] The step of depositing the diffusion barrier layer includes: heating the silicon carbide fibers at a temperature in the range of about 700°C to about 875°C; N 2 and H 2 a flow of a carrier gas selected from: Flow of nitrogen-containing gas and Boron-containing gas flow Item 9. The method of any one of items 1 to 8, comprising exposing the composition to a gas atmosphere comprising: [Section 10] Carrier gas is H 2 Item 10. The method according to item 9, comprising: [Section 11] Item 11. The method of item 9 or 10, wherein the nitrogen-containing gas comprises ammonia. [Section 12] 12. The method of any one of paragraphs 9 to 11, wherein the boron-containing gas comprises boron trichloride. [Section 13] Item 13. The method according to any one of items 9 to 12, further comprising, after the step of depositing the diffusion barrier layer, introducing a flow of a silicon-containing gas into the gas atmosphere to deposit a moisture-resistant layer on the diffusion barrier layer. [Section 14] The silicon-containing gas is methyltrichlorosilane (CH 3 SiCl 3 ), trichlorosilane (HSiCl 3 ), dichlorosilane (H 2 SiCl 2 ), silicon tetrachloride (SiCl 4 ) and silane (SiH 4 Item 14. The method of item 13, wherein the compound is selected from the group consisting of: [Section 15] 15. The method of any one of paragraphs 1 to 14, wherein the diffusion barrier layer is deposited for a duration of about 1 hour to about 10 hours. [Section 16] Item 16. The method of any one of items 1 to 15, wherein the moisture-containing layer is deposited for a duration of about 10 hours to about 70 hours. [Section 17] Item 17. The method of any one of items 1 to 16, further comprising depositing a barrier layer having a high contact angle with molten silicon on the compliant multilayer prior to depositing the wetting layer. [Section 18] Item 18. The method of item 17, wherein the barrier layer comprises silicon carbonitride or silicon nitride. [Section 19] Item 19. The method of any one of items 1 to 18, further comprising forming a fiber preform comprising silicon carbide fibers before coating the silicon carbide fibers with a diffusion barrier layer. [Section 20] 1. A fiber preform for producing a ceramic matrix composite, comprising: The present invention relates to a silicon carbide fiber coated with a plurality of functional layers, the functional layers comprising: a diffusion barrier layer comprising boron nitride deposited on the silicon carbide fibers; a moisture resistant layer comprising silicon-doped boron nitride deposited on the diffusion barrier layer, the moisture resistant layer having a thickness between about 3 and about 300 times the thickness of the diffusion barrier layer, the moisture resistant layer and the diffusion barrier layer together defining a compliant multilayer; and a wetting layer comprising silicon carbide, boron carbide and / or pyrolytic carbon deposited on the compliant multilayer layer; a fiber preform comprising:

[0045] In addition to the features mentioned in each of the independent aspects listed above, some examples may exhibit optional features mentioned in dependent aspects and / or disclosed in the above description and shown in the drawings, either alone or in combination. [Explanation of symbols]

[0046] 102 Silicon carbide fiber 104 Diffusion Barrier Layer 106 Moisture-resistant layer 108 Compliant Multilayer 110 Wet Layer< / n>

Claims

1. 1. A method of making a ceramic matrix composite material, comprising: aggregating silicon carbide fibers into a fiber preform, the aggregating step comprising laying up a 2.5D woven fabric comprising silicon carbide fibers; Fixing the fiber preform in a fixture; depositing a diffusion barrier layer comprising boron nitride onto the silicon carbide fibers after the fiber preform is secured to the fixture; depositing a moisture resistant layer comprising silicon-doped boron nitride on the diffusion barrier layer, wherein the thickness of the diffusion barrier layer is within the range of 0.01 microns to 0.10 microns, the thickness of the moisture resistant layer is within the range of 0.4 microns to 3 microns, and the thickness of the moisture resistant layer is 3 to 300 times the thickness of the diffusion barrier layer, thereby forming a compliant multilayer comprising the moisture resistant layer and the diffusion barrier layer; depositing a barrier layer on the moisture resistant layer, the barrier layer having a contact angle with molten silicon of at least 45°, the barrier layer comprising silicon carbonitride; depositing a wetting layer comprising silicon carbide, boron carbide and / or pyrolytic carbon onto the barrier layer; After the step of depositing the wetting layer, removing the fiber preform from the tool and infiltrating the fiber preform with a slurry; and forming a ceramic matrix composite by infiltrating the fiber preform with a melt containing silicon after the slurry infiltration and then cooling the melt; A method comprising:

2. 2. The method of claim 1, wherein the thickness of the moisture resistant layer is 10 to 100 times the thickness of the diffusion barrier layer.

3. 3. The method according to claim 1, wherein the moisture resistant layer comprises silicon in a concentration of 2 at.% to 30 at.%.

4. 4. The method of claim 1, wherein the diffusion barrier layer comprises a crystalline phase of boron nitride.

5. 5. The method of claim 4, wherein the crystalline phase comprises a hexagonal phase.

6. exposing the compliant multilayer to atmospheric humidity; and forming a crystalline phase by heat treating the compliant multilayer at a temperature in the range of 900°C to 1150°C; 6. The method of claim 4 or 5, further comprising:

7. The step of depositing the diffusion barrier layer comprises: N 2 and H 2 a flow of a carrier gas selected from: Flow of nitrogen-containing gas and Boron-containing gas flow 7. The method of claim 1, comprising exposing the material to a gas atmosphere comprising:

8. Carrier gas is H 2 8. The method of claim 7, comprising:

9. 9. The method of claim 7 or 8, wherein the nitrogen-containing gas comprises ammonia.

10. 10. The method of claim 7, wherein the boron-containing gas comprises boron trichloride.

11. 11. The method of claim 7, further comprising, after the step of depositing the diffusion barrier layer, introducing a flow of a silicon-containing gas into the gas atmosphere to deposit a moisture resistant layer on the diffusion barrier layer.

12. The silicon-containing gas is methyltrichlorosilane (CH 3 SiCl 3 ), trichlorosilane (HSiCl 3 ), dichlorosilane (H 2 SiCl 2 ), silicon tetrachloride (SiCl 4 ) and silane (SiH 4 12. The method of claim 11, wherein the hydroxybenzoate is selected from the group consisting of:

13. 13. The method according to any one of claims 1 to 12, wherein the diffusion barrier layer is deposited for a duration of between 1 hour and 10 hours.

14. 14. The method according to any one of claims 1 to 13, wherein the moisture-containing layer is deposited for a duration of between 10 hours and 70 hours.

15. 15. The method of claim 1, further comprising forming a fiber preform comprising silicon carbide fibers prior to coating the silicon carbide fibers with the diffusion barrier layer.

16. 1. A fiber preform for producing a ceramic matrix composite, comprising: The present invention relates to a silicon carbide fiber coated with a plurality of functional layers, the functional layers comprising: a diffusion barrier layer comprising boron nitride deposited on the silicon carbide fibers; a moisture resistant layer comprising silicon-doped boron nitride deposited on the diffusion barrier layer, wherein the thickness of the diffusion barrier layer is within the range of 0.01 micron to 0.10 micron, the thickness of the moisture resistant layer is within the range of 0.4 micron to 3 micron, and the thickness of the moisture resistant layer is 3 to 300 times the thickness of the diffusion barrier layer, wherein the moisture resistant layer and the diffusion barrier layer together define a compliant multilayer; a barrier layer on the moisture resistant layer, the barrier layer having a contact angle of at least 45° with molten silicon, the barrier layer comprising silicon carbonitride; and a wetting layer comprising silicon carbide, boron carbide and / or pyrolytic carbon deposited on the barrier layer; a fiber preform comprising:

Images