Substrate transport device

Abstract

Provided is a substrate conveyance device (102) which can ensure safety of an operator without cutting off power supply of a conveyance robot (230). An operator-side shutter (104) is provided between a storage container mounting portion (220) and the outside of the device, and a conveyance robot-side shutter (105) is provided between the conveyance robot (230) and the storage container mounting portion (220).

Description

[Technical Field]

[0001] The present invention relates to a substrate transfer device, and more particularly to a technique that is effective when applied to a substrate transfer device that transfers, for example, semiconductor substrates. [Background technology]

[0002] Patent Publication No. 6822953 (Patent Document 1), Patent Publication No. 2016-58481 (Patent Document 2), and Patent Publication No. 5825948 (Patent Document 3) describe technology that includes a mechanism that blocks a transport robot from accessing a storage container installation section while a worker is accessing the storage container installation section. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6822953 [Patent Document 2] Japanese Patent Application Laid-Open No. 2016-58481 [Patent Document 3] Patent No. 5825948 Summary of the Invention [Problem to be solved by the invention]

[0004] For example, in a substrate transport device that transports substrates such as semiconductor wafers and reticles, an operator places a storage container for storing the substrates in a storage container installation section, while a transport robot removes the substrates from the storage container installed in the storage container installation section and transports them into a processing device for processing the substrates, or transports the substrates from the processing device and stores them in the storage container.

[0005] As described above, the storage container installation area is a location accessed by both workers and the transport robot, but the transport robot is an industrial robot with a rated output of, for example, 80 W or more, and to ensure the safety of the workers, it is necessary to prevent contact between the workers and the transport robot at the storage container installation area. In other words, the substrate transport device must take measures to prevent contact between the workers and the transport robot.

[0006] In this regard, for example, when a worker is installing a storage container in a storage container installation section, it is possible to prevent the transport robot from coming into contact with the worker by cutting off the drive power supply to the transport robot.

[0007] However, if the drive power of the transport robot is cut off, it takes time to make the transport robot operable again. Also, while the operator is placing the storage container in the storage container placement section, the transport robot cannot perform any other work, which reduces the work efficiency of the substrate transport device.

[0008] Therefore, there is a need for a method for preventing contact between the worker and the transport robot and ensuring the safety of the worker without shutting off the drive power supply to the transport robot. [Means for solving the problem]

[0009] In one embodiment, the substrate transport device includes a transport robot that transports substrates, a first installation section in which a storage container for accommodating substrates can be installed, a first shutter mechanism that is configured to block a first access path when accessing the storage container or the first installation section from outside the device, a second shutter mechanism that is configured to block a second access path when the transport robot accesses the storage container, and a control section that controls the opening and closing operations of the first shutter mechanism and the second shutter mechanism. [Effects of the Invention]

[0010] According to one embodiment, it is possible to provide a substrate transport device that can ensure the safety of workers without cutting off the power supply to the transport robot. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a perspective view schematically showing a semiconductor inspection device. [Figure 2] FIG. 2 is a top view schematically illustrating the configuration of a substrate transport device. [Figure 3] FIG. 2 is a side view schematically illustrating the configuration of the substrate transport device. [Figure 4] FIG. 10 is a diagram showing a state in which the shutter is closed. [Figure 5] FIG. 10 is a diagram showing a state in which the shutter is open. [Figure 6] FIG. 1 is a diagram illustrating a basic concept of an embodiment. [Figure 7] 10 is a flowchart illustrating the flow of operations of the substrate transport device when an operator accesses a storage container installation unit. [Figure 8] 10 is a flowchart illustrating the flow of operations of the substrate transport device when the transport robot accesses the storage container installation part. [Figure 9] This is a flowchart illustrating the operation of the substrate transport device following Figure 8, and explains the operation of transitioning to a state where an operator can access the storage container installation section after the transport robot has accessed the storage container installation section. [Figure 10] 1 is a diagram illustrating a schematic configuration of a substrate transport device according to an embodiment of the present invention; [Figure 11] 1A and 1B are diagrams illustrating features of the embodiment. [Figure 12] FIG. 1 shows a storage container called an "open cassette." [Figure 13] FIG. 2 is a diagram illustrating an example of the configuration of a shutter mechanism. [Figure 14] 10A and 10B are diagrams illustrating a locking mechanism in Modification 1. [Figure 15]FIG. 10 is a diagram illustrating an example of installing a light curtain to detect when a worker is accessing a storage container installation area, and also illustrates an example of installing a light curtain to detect when a transport robot is accessing a storage container installation area. [Figure 16] 10A and 10B are diagrams showing substrate transfer devices in Modifications 4 and 5. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0012] In all the drawings for explaining the embodiments, the same components are generally designated by the same reference numerals, and repeated explanations thereof will be omitted. In addition, hatching may be used even in plan views to make the drawings easier to understand. (Embodiment)

[0013] First, an overview of the substrate transport apparatus will be described. In particular, in this embodiment, a semiconductor inspection apparatus including a substrate transport apparatus will be described as an example of a substrate transport apparatus. However, the substrate transport apparatus in this embodiment is not limited to this example, and can be widely applied to substrate transport apparatuses attached to substrate processing apparatuses that process substrates. Furthermore, examples of substrates transported by the substrate transport apparatus include semiconductor wafers (semiconductor substrates) and reticles, but in this embodiment, a semiconductor substrate will be described as an example of a substrate.

[0014] <Outline of PCB inspection equipment> FIG. 1 is a perspective view schematically showing a semiconductor inspection device 100. As shown in FIG. In FIG. 1, a semiconductor inspection device 100 has a semiconductor substrate processing unit 101 provided at the rear of the device, and a substrate transport device 102 provided at the front of the device.

[0015] The semiconductor substrate processing unit 101 has the main function of semiconductor inspection equipment 100, which inspects or measures semiconductor substrates, and a control unit including a computer system and a power supply that controls the function. For example, if the semiconductor inspection equipment 100 is a critical dimension SEM (Scanning Electron Microscope), the semiconductor substrate processing unit 101 has an electron gun unit, a stage unit, a vacuum pumping unit, and a power supply unit. Meanwhile, the control unit is configured to control the operation of these components, and is configured to perform dimensional measurement of a fine pattern formed on a semiconductor substrate by controlling these components.

[0016] <Configuration of the substrate transport device> FIG. 2 is a top view schematically showing the configuration of the substrate transfer device 102. As shown in FIG. 2, the substrate transfer device 102 includes a control unit 210, a pre-aligner 211, a storage container installation unit 220, and a transfer robot 230.

[0017] The control unit 210 is configured to control the transfer operation of the semiconductor substrate 201 by the transfer robot 230 .

[0018] The pre-aligner 211 is a unit configured to measure the amount of eccentricity of the semiconductor substrate 201 and correct the amount of eccentricity, and is a unit that detects an orientation flat or a notch on the semiconductor substrate 201 and aligns the orientation of the orientation flat or the notch.

[0019] The storage container installation section 220 is configured to place the storage container 200, and has a storage container stand 221 on which the storage container 200 is placed. The substrate transfer device 102 is provided with at least one storage container stand 221, and for example, as shown in Fig. 2, storage container stands 221a and 221b are provided. Storage containers 200 can be placed on these storage container stands 221a and 221b at the same time.

[0020] Although not shown in the figure, the storage container installation section 220 is provided with sensors, switches, and readers that check whether the storage container 200 is properly placed on the storage container stand 221, store the placement history of the storage container 200, and check whether the semiconductor substrate 201 is protruding from the storage container 200 placed on the storage container stand 221.

[0021] The transfer robot 230 is configured to be able to transfer the semiconductor substrate 201 and is configured to operate under the control of the control unit 210. FIG. 3 is a side view that schematically shows the configuration of the substrate transfer device 102. As shown in FIG.

[0022] 3, in the substrate transfer device 102, a storage container 200 is placed on a storage container stand 221, and it can be seen that a plurality of semiconductor substrates 201 are stored inside the storage container 200. A transfer robot 230 is disposed in the space between an upper port 240 provided in the semiconductor substrate processing unit 101 and the storage container 200 placed on the storage container stand 221 of the substrate transfer device 102.

[0023] <Operation of the substrate transport device> Next, the operation of the substrate transfer device 102 will be described with reference to FIG. First, an operator manually places the storage container 200 containing multiple semiconductor substrates 201 on the storage container stand 221 of the storage container installation unit 220. Thereafter, under the control of the control unit 210, the transfer robot 230 removes the semiconductor substrate 201 from the storage container 200 placed on the storage container stand 221, and then places the removed semiconductor substrate 201 on the pre-aligner 211. Next, in the pre-aligner 211, the eccentricity of the semiconductor substrate 201 is corrected, and the orientation of the orientation flat and notch is aligned.

[0024] Thereafter, under the control of the control unit 210 , the transfer robot 230 takes out the semiconductor substrate 201 from the pre-aligner 211 and transfers the semiconductor substrate 201 to the upper port 240 for delivery to the semiconductor substrate processing unit 101 .

[0025] The semiconductor substrate 201 placed in the upper port 240 is then processed in the semiconductor substrate processing unit 101. Subsequently, the semiconductor substrate 201 processed in the semiconductor substrate processing unit 101 is placed again in the upper port 240. Thereafter, under the control of the control unit 210, the transfer robot 230 picks up the semiconductor substrate 201 placed in the upper port 240, and then stores the semiconductor substrate 201 in the storage container 200 placed on the storage container stand 221 of the storage container installation unit 220. Then, an operator manually carries the storage container 200 storing the processed semiconductor substrate 201 out of the substrate transfer device 102. The substrate transfer device 102 operates in the above manner.

[0026] <Consideration of improvements> For example, the transport robot 230 is an industrial robot with a rated output of 80W or more, and the SEMI standard requires that workers be protected by physical shielding to prevent them from coming into contact with the transport robot 230.

[0027] In this regard, the transport robot 230 accesses the storage container installation unit 220. Meanwhile, the storage container installation unit 220 is also a location that an operator accesses to place the storage container 200 on the storage container stand 221 of the storage container installation unit 220. For this reason, unless any measures are taken, there will be no physical barrier between the operator and the transport robot 230 at the storage container installation unit 220. Therefore, since there is no physical barrier between the operator and the transport robot 230, for example, when the operator is accessing the storage container installation unit 220 and the transport robot 230 accesses the storage container installation unit 220, there is a risk of contact between the operator and the transport robot 230. For this reason, a technique may be considered in which a shutter mechanism (sometimes referred to as a shutter) is provided at the boundary between the operator and the storage container installation unit 220, for example.

[0028] Fig. 4 is a diagram showing a state in which the shutter 103 is closed. As shown in Fig. 4, the shutter 103 separates the worker (outside the apparatus) from the storage container installation section 220. As a result, the worker cannot access the storage container installation section 220, but the transfer robot 230 is protected by a physical barrier (shutter 103) and can therefore access the storage container installation section 220.

[0029] Fig. 5 is a diagram showing a state in which the shutter 103 is open. As shown in Fig. 5, it can be seen that a transfer opening 222a and a transfer opening 222b are provided between the storage container installation part 220 and the transfer robot 230, which are large enough to allow the transfer robot 230 to take out the semiconductor substrate 201 from the storage container 200 and to store the semiconductor substrate 201 in the storage container 200. From this, it can be seen that even in a state in which the shutter 103 is closed as shown in Fig. 4, the transfer robot 230 can access the storage container installation part 220 via the transfer opening 222a or the transfer opening 222b.

[0030] 5, when the shutter 103 is open, there is no physical barrier (shutter 103) between the worker and the transport robot 230. For this reason, there is a risk of contact between the worker and the transport robot 230, but the drive power supply for the transport robot 230 is cut off, for example, by an interlock circuit or the like that is linked to the opening of the shutter 103. As a result, the transport robot 230 cannot operate, and the worker can safely access the storage container installation section 220.

[0031] In this regard, if the drive power supply of the transport robot 230 is cut off, it takes time to make the transport robot 230 operable again. Furthermore, while the worker is placing the storage container 200 in the storage container installation unit 220, the transport robot 230 cannot perform any work, which reduces the work efficiency of the substrate transport apparatus 102. That is, the technology of providing the shutter 103 as a physical shield and cutting off the drive power supply of the transport robot 230 leaves room for improvement from the perspective of ensuring the safety of the worker while suppressing the reduction in work efficiency of the substrate transport apparatus 102.

[0032] Therefore, in this embodiment, a device is implemented to overcome the above-mentioned room for improvement. The technical concept of this embodiment that implements this device will be described below.

[0033] <Basic Concept of the Embodiment> FIG. 6 is a diagram illustrating the basic concept of this embodiment. 6, the basic idea is to provide an operator-side shutter 104 (first shutter mechanism) between the outside of the apparatus and the storage container installation unit 220, and to provide a transport robot-side shutter 105 (second shutter mechanism) between the transport robot 230 and the storage container installation unit 220. Specifically, the basic idea is to provide the substrate transport apparatus 102 with an operator-side shutter 104 arranged so as to be able to block a first access path when accessing the storage container installation unit 220 from the outside of the apparatus, and a transport robot-side shutter 105 arranged so as to be able to block a second access path when the transport robot 230 accesses the storage container installation unit 220. In other words, the basic idea is to provide the substrate transport apparatus 102 with a double shutter mechanism, that is, the operator-side shutter 104 and the transport robot-side shutter 105.

[0034] According to this basic concept, for example, when an operator accesses the storage container installation section 220, the operator-side shutter 104 is in an open state and the transport robot-side shutter 105 is in a closed state. , transportation Since the transfer robot shutter 105 is in a closed state, the transfer robot 230 cannot access the storage container installation section 220. , written by Since the contractor-side shutter 104 is in the open state, the worker can access the storage container installation section 220.

[0035] In other words, according to the basic concept, when a worker accesses the storage container installation section 220, there is always a physical barrier, the transport robot side shutter 105, between the worker and the transport robot 230, so the worker can safely access the storage container installation section 220 without worrying about coming into contact with the transport robot 230.

[0036] As described above, according to the basic concept, when an operator accesses the storage container installation section 220, the transport robot 230 is blocked from accessing the storage container installation section 220 by the transport robot-side shutter 105. Therefore, according to the basic concept, when an operator accesses the storage container installation section 220, it is not necessary to shut off the drive power of the transport robot 230 in order to prevent contact between the operator and the transport robot 230. Therefore, according to the basic concept, it is not necessary to turn on the drive power of the transport robot 230 that has been shut off, and as a result, it is possible to save time in making the transport robot 230 operable. Therefore, according to the basic concept, a significant effect can be obtained in which the safety of the operator can be ensured while suppressing a decrease in work efficiency in the substrate transport device 102.

[0037] On the other hand, according to the basic concept, for example, when the transport robot 230 accesses the storage container installation section 220, the worker side shutter 104 is closed and the transport robot side shutter 105 is open. , written by Since the contractor-side shutter 104 is in a closed state, the worker cannot access the storage container installation section 220. , transportation Since the transfer robot side shutter 1045 is in an open state, the transfer robot 230 can access the storage container installation section 220 while reliably preventing contact with the worker.

[0038] Below, we will explain the operation of the substrate transport device 102 to reliably avoid contact between the worker and the transport robot 230, based on the basic idea of ​​providing the substrate transport device 102 with a double shutter mechanism consisting of a worker-side shutter 104 and a transport robot-side shutter 105.

[0039] FIG. 7 is a flowchart illustrating the flow of operations of the substrate transfer device 102 when an operator accesses the storage container installation section 220. As shown in FIG.

[0040] 7, it is assumed that the worker-side shutter 104 is in a closed state. It is also assumed that the substrate transport device 102 is provided with an open switch that serves as a trigger for opening the worker-side shutter 104.

[0041] When an operator accesses the storage container installation section 220, the operator presses an open switch that serves as a trigger for opening the operator-side shutter 104 (S101). The control unit 210 of the substrate transfer device 102 then determines whether the transfer robot 230 is accessing the storage container installation section 220 (S102). If the control unit 210 determines that the transfer robot 230 is accessing the storage container installation section 220, it waits until the transfer robot 230 finishes accessing the storage container installation section 220. On the other hand, if the control unit 210 determines that the transfer robot 230 is not accessing the storage container installation section 220, it closes the transfer robot-side shutter 105 (S103).

[0042] Next, the control unit 210 opens the worker-side shutter 104 (S104). As a result, the transfer robot-side shutter 105 is closed, blocking access to the storage container installation unit 220 by the transfer robot 230, while allowing the worker to safely access the storage container installation unit 220 (S105).

[0043] In this way, the control unit 210 is configured to control the transition from the phase in which the worker-side shutter 104 is in a closed state to the first phase in which the worker-side shutter 104 is in an open state and the transport robot-side shutter 105 is in a closed state, thereby enabling the worker to access the storage container installation unit 220.

[0044] Next, FIG. 8 is a flowchart illustrating the flow of operations of the substrate transfer device 102 when the transfer robot 230 accesses the storage container installation unit 220. In FIG.

[0045] 8, it is assumed that the worker-side shutter 104 is in the open state. It is also assumed that the substrate transport device 102 is provided with a close switch that serves as a trigger for closing the worker-side shutter 104.

[0046] When the worker finishes work at the storage container installation section 220, he or she presses the close switch, which serves as a trigger for closing the worker-side shutter 104 (S201). Then, the control unit 210 of the substrate transport device 102 determines whether or not the worker is accessing the storage container installation section 220 (S202). If the control unit 210 determines that the worker is accessing the storage container installation section 220, it waits until the worker has finished accessing the storage container installation section 220. On the other hand, if the control unit 210 determines that the worker is not accessing the storage container installation section 220, it closes the worker-side shutter 104 (S203).

[0047] Next, the control unit 210 opens the transport robot-side shutter 105 (S204). As a result, the worker-side shutter 104 is in the closed state, blocking access to the storage container installation unit 220 by the worker, while allowing the transport robot 230 to access the storage container installation unit 220 (S205).

[0048] In this way, the control unit 210 controls the operator side shutter 104 to be in the open state and the conveyance The system is configured to transition from a first phase in which the robot-side shutter 105 is in a closed state to a second phase in which the worker-side shutter 104 is closed and then the transport robot-side shutter 105 is opened, thereby enabling the transport robot 230 to transport the substrate from the storage container.

[0049] Figure 9 is a flowchart explaining the operation of the substrate transport device 102 following Figure 8, and is a flowchart explaining the operation of transitioning to a state where the worker can access the storage container installation section 220 after the transport robot 230 has accessed the storage container installation section 220.

[0050] When the worker side shutter 104 is closed and the transport robot side shutter 105 is open, In the second phase, which is an open state, the transfer robot 230 accesses the storage container installation unit 220 and removes the semiconductor substrate 201 from the storage container 200 (S301). Then, under the control of the control unit 210, the transfer robot 230 loads the semiconductor substrate 201 removed from the storage container 200 into the semiconductor substrate processing unit 101 (S302). Next, after the semiconductor substrate 201 is processed in the semiconductor substrate processing unit 101 (S303), under the control of the control unit 210, the transfer robot 230 removes the semiconductor substrate 201 processed in the semiconductor substrate processing unit 101 from the semiconductor substrate processing unit 101. Then, under the control of the control unit 210, the transfer robot 230 accesses the storage container installation unit 220 and stores the semiconductor substrate 201 in the storage container 200 (S304).

[0051] Next, the control unit 210 determines whether the transfer robot 230 is accessing the storage container installation unit 220 (S305). If the control unit 210 determines that the transfer robot 230 is accessing the storage container installation unit 220, it waits until the transfer robot 230 finishes accessing the storage container installation unit 220. On the other hand, if the control unit 210 determines that the transfer robot 230 is not accessing the storage container installation unit 220, it closes the transfer robot-side shutter 105 (S306).

[0052] Then, the control unit 210 opens the worker-side shutter 104 (S307). As a result, the transfer robot-side shutter 105 is closed, blocking access to the storage container installation unit 220 by the transfer robot 230, while allowing the worker to safely access the storage container installation unit 220 (S308).

[0053] In this way, when the semiconductor substrate 201 is loaded into the storage container 200 by the transport robot 230 in the second phase, the control unit 210 is configured to transition from the second phase to the third phase in which the transport robot side shutter 105 is closed and then the worker side shutter 104 is opened.

[0054] That is, as shown in FIG. 9, the operation of opening the worker-side shutter 104 can be performed automatically under the control of the control unit 210 without the worker having to press the open switch after all processing in the semiconductor substrate processing unit 101 has been completed for the semiconductor substrates 201 stored in the storage container 200 specified by the worker and the semiconductor substrates 201 have been stored back into the storage container 200 by the transport robot 230.

[0055] This eliminates the need for the worker to press the open switch after processing (inspection, measurement, etc.) of the semiconductor substrate 201 is completed, thereby improving the ease of use of the substrate transport device 102 for the worker.

[0056] According to the basic concept described above, by providing the substrate transport device 102 with a double shutter mechanism consisting of the worker-side shutter 104 and the transport robot-side shutter 105, it becomes unnecessary to shut off the drive power supply of the transport robot 230 in order to prevent contact between the transport robot 230 and the worker. As a result, according to the basic concept, it is possible to ensure the safety of the worker while suppressing a decrease in work efficiency in the substrate transport device 102.

[0057] <Consideration of further improvements> The basic concept is a useful technical concept in that it can reliably ensure the safety of workers without cutting off the drive power supply of the transport robot 230. In this regard, the present inventors have further studied this basic concept and found that there is room for improvement in terms of improving the work efficiency of the substrate transport device 102. This room for improvement will now be explained.

[0058] 6, the substrate transfer device 102 is provided with an operator-side shutter 104 and a transfer robot-side shutter 105. For example, when an operator accesses the storage container installation section 220, the control unit 210 controls the operator-side shutter 104 to be in an open state and the transfer robot-side shutter 105 to be in a closed state. This allows the operator to access the storage container installation section 220, while blocking access to the storage container installation section 220 by the transfer robot 230. According to the basic concept, this means that contact between the operator and the transfer robot 230 is prevented, ensuring the safety of the operator. However, it also means that when the operator is accessing the storage container installation section 220, the transfer robot 230 cannot access the storage container installation section 220 to perform work.

[0059] 6, for example, storage container placement unit 220 of substrate transfer device 102 has storage container placement stand 221a and storage container placement stand 221b. For this reason, for example, when worker-side shutter 104 is in the open state and a worker accesses storage container placement stand 221a, the worker does not have access to storage container placement stand 221b.

[0060] Here, if the transport robot 230 can access the storage container stand 221b that is not being accessed by the worker, the transport robot 230 can work on the storage container stand 221b while the worker works on the storage container stand 221a, which is thought to improve the work efficiency of the substrate transport device 102.

[0061] However, in the basic concept, when the worker-side shutter 104 is in the open state, the transport robot-side shutter 105 is in the closed state. Therefore, in the basic concept, the transport robot 230 cannot access the storage container stage 221b that the worker has not accessed. In other words, in terms of improving the work efficiency of the substrate transport device 102, there is room for improvement in the basic concept.

[0062] Therefore, in the embodiment, some improvements have been made to address the room for improvement that exists in the basic concept. The embodiment that has made these improvements will be described below.

[0063] <Realization mode> <<Configuration of the substrate transport device>> FIG. 10 is a diagram showing a schematic configuration of a substrate transfer device 102 in an embodiment. As shown in FIG. 10, the substrate transport device 102 has a storage container stand 221a and a storage container stand 221b, and an isolation wall 400 is provided between the storage container stand 221a and the storage container stand 221b to isolate the storage container stand 221a and the storage container stand 221b.

[0064] An operator-side shutter 401a is installed between the outside of the device and the storage container stand 221a, which is separated by the separation wall 400. On the other hand, an operator-side shutter 401b is installed between the outside of the device and the storage container stand 221b, which is separated by the separation wall 400.

[0065] Furthermore, a transfer robot-side shutter 402a is installed between the storage container stand 221a and the transfer robot 230 (not shown in FIG. 10). On the other hand, a transfer robot-side shutter 402b is installed between the storage container stand 221b and the transfer robot 230.

[0066] Each of the worker-side shutter 401a, worker-side shutter 401b, transport robot-side shutter 402a, and transport robot-side shutter 402b is configured to perform an opening and closing operation based on the control of the control unit 210 (not shown in FIG. 10). In particular, the substrate transport device 102 is provided with a switch 410, and the opening and closing operation of the worker-side shutter 401a and worker-side shutter 401b is configured to be triggered by this switch 410. Meanwhile, the transport robot-side shutter 402a and transport robot-side shutter 402b are provided with a function for recognizing an open state and a closed state, and the opening and closing operation is performed under the control of the control unit 210 based on this function.

[0067] As described above, the substrate transfer device 102 in the embodied embodiment has a first installation section (storage container stand 221a) and a second installation section (storage container stand 221b) on which a storage container 200 (not shown in FIG. 10) can be installed. Here, the first installation section and the second installation section are separated by a partition wall 400. The substrate transfer device 102 also has an operator-side shutter 401a that is provided to be able to block a first access path when the storage container 200 or the first installation section is accessed from outside the device, a transfer robot-side shutter 402a that is provided to be able to block a second access path when the transfer robot 230 accesses the storage container 200, an operator-side shutter 401b that is provided to be able to block a third access path when the storage container 200 or the second installation section is accessed from outside the device, and a transfer robot-side shutter 402b that is provided to be able to block a fourth access path when the transfer robot 230 accesses the storage container 200. Furthermore, the substrate transfer device 102 has a control unit configured to control the opening and closing operations of the worker side shutter 401a, the worker side shutter 401b, the transfer robot side shutter 402a, and the transfer robot side shutter 402b. The substrate transport device 102 in the embodied embodiment is configured as described above.

[0068] <<Operation of the substrate transport device>> Next, the operation of the substrate transfer device 102 will be described with reference to FIG. For example, consider a case where a worker accesses the storage container stand 221a. In this case, the worker first presses an open switch included in the switch 410 to open the worker-side shutter 401a. This triggers the control unit 210 to open the worker-side shutter 401a. At this time, the control unit 210 closes the transport robot-side shutter 402a opposite the worker-side shutter 401a. Furthermore, the control unit 210 closes the worker-side shutter 401b and opens the transport robot-side shutter 402b opposite the worker-side shutter 401b. In this way, when the worker-side shutter 401a is open and the transport robot-side shutter 402a is closed, the control unit 210 closes the worker-side shutter 401b and opens the transport robot-side shutter 402b. This allows the worker to access the storage container stand 221a, and the transfer robot 230 to access the storage container stand 221b.

[0069] Next, consider the case where a worker accesses the storage container stand 221b. In this case, the worker first presses an open switch included in the switch 410 to open the worker-side shutter 401b. Pressing the open switch triggers the control unit 210 to open the worker-side shutter 401b. At this time, the control unit 210 closes the transport robot-side shutter 402b opposite the worker-side shutter 401b. Furthermore, the control unit 210 closes the worker-side shutter 401a and opens the transport robot-side shutter 402a opposite the worker-side shutter 401a. In this way, when the worker-side shutter 401b is open and the transport robot-side shutter 402b is closed, the worker-side shutter 401a is closed and the transport robot-side shutter 402a is open. This allows the worker to access the storage container stand 221b, and the transfer robot 230 to access the storage container stand 221a.

[0070] <<Features in Realization Mode>> Next, features of specific embodiments will be described. 10, a feature of this specific aspect is that a partition wall 400 is provided between storage container stand 221a and storage container stand 221b, and a shutter is provided on the storage container stand 221a side and a shutter is provided on the storage container stand 221b side, which are separate and independent. In other words, a feature is that an operator-side shutter 401a is provided between storage container stand 221a on the left side of partition wall 400 and the outside of the apparatus, and a transport robot-side shutter 402a is provided between storage container stand 221a and transport robot 230, while an operator-side shutter 401b is provided between storage container stand 221b on the right side of partition wall 400 and the outside of the apparatus, and a transport robot-side shutter 402b is provided between storage container stand 221b and transport robot 230. Based on this configuration, when the worker side shutter 401a is in the open state and the transport robot side shutter 402a is in the closed state, the control unit 210 controls the worker side shutter 401b to be in the closed state and the transport robot side shutter 402b to be in the open state, whereas when the worker side shutter 401a is in the closed state and the transport robot side shutter 402a is in the open state, the control unit 210 controls the worker side shutter 401b to be in the open state and the transport robot side shutter 402b to be in the closed state.

[0071] As a result, for example, as shown in FIG. 11 , when the worker-side shutter 401a is open and the transport robot-side shutter 402a is closed on the storage container stand 221a, the worker 420 can access the storage container 200 placed on the storage container stand 221a. At this time, the control unit 210 controls the storage container stand 221b so that the worker-side shutter 401b is closed and the transport robot-side shutter 402b is open. As a result, as shown in FIG. 11 , the transport robot 230 can access the storage container 200 placed on the storage container stand 221b. As described above, according to the feature of the specific embodiment, the worker 420 can access the storage container stand 221a and the transport robot 230 can access the storage container stand 221b simultaneously. Therefore, according to the feature, the work efficiency of the substrate transport device 102 can be improved. According to the feature, a partition wall 400 is provided between storage container stand 221a and storage container stand 221b. Therefore, even if worker 420 accesses storage container stand 221a and transport robot 230 accesses storage container stand 221b simultaneously, partition wall 400 can prevent contact between worker 420 and transport robot 230. As described above, the feature of this specific aspect has the remarkable effect of improving the work efficiency of substrate transport device 102 while reliably ensuring the safety of worker 420.

[0072] <<Application to open cassettes>> The above-described technical concept is particularly effective when applied to a case where an "open cassette" is used as the storage container. For example, the storage container may be placed in an enclosed space (e.g., a chamber), and a transfer robot may access the storage container within the enclosed space. In this configuration, since the transfer robot accesses the storage container within the enclosed space, the enclosed space, which acts as a physical barrier, is always present between the worker and the storage container. Therefore, it is believed that the worker's safety is less likely to be threatened by contact between the worker and the transfer robot.

[0073] In contrast, for example, FIG. 12 shows a storage container called an “open cassette 450.” Such an “open cassette 450” is not placed in an enclosed space and accessed by a transfer robot, but is placed on the storage container stand 221 of the substrate transfer device 102 and accessed by a transfer robot. Furthermore, the “open cassette 450” is manually placed on the storage container stand 221 by an operator. Therefore, when the “open cassette 450” is used as a storage container, both the operator and the transfer robot access the “open cassette 450” without any physical obstruction on the storage container stand 221. This means that when the “open cassette 450” is used as a storage container, contact between the operator and the transfer robot is likely to occur, making it important to ensure the safety of the operator. Therefore, when the “open cassette 450” is used as a storage container, the safety of the operator can be reliably ensured by employing the substrate transfer device 102 that embodies the above-described technical concept. In other words, the substrate transport device 102 that embodies the above-mentioned technical idea has a particularly great technical significance when applied to substrate transport technology that employs the "open cassette 450" as a storage container.

[0074] <<Configuration example of shutter mechanism>> In this section, the shutter and the mechanism that opens and closes the shutter will be collectively referred to as the shutter mechanism. The shutter mechanism can be any mechanism that can move the shutter vertically. For example, there is a shutter mechanism that uses an air cylinder and a linear guide. In Figure 13, the air cylinder is a component that uses air pressure to move a cylinder block 311 linearly on a cylinder rod 310. On the other hand, the linear guide is a component that moves a linear guide block 321 smoothly on a linear guide rail 320.

[0075] 6, an air cylinder and a linear guide are attached in parallel to a base 300, and a shutter 350, the air cylinder, and the linear guide are connected by a bracket 330. When air is sent to the bottom of the air cylinder in an upward direction, the cylinder block 311 moves linearly to the upper end of the cylinder rod 310, and the linear guide block 321 and the shutter 350, which are connected by the bracket 330, also move linearly to the upper end of the cylinder rod 310.

[0076] At this time, the linear guide block 321 smooths the linear motion of the cylinder block 311, so that the shutter 350 opens smoothly.

[0077] On the other hand, when air flowing downward is sent to the upper part of the air cylinder, the cylinder block 311 moves linearly to the lower end of the cylinder rod 310, and the linear guide block 321 and shutter 350 connected by the bracket 330 also move linearly to the lower end of the cylinder rod 310.

[0078] At this time, the linear guide block 321 smooths the linear motion of the cylinder block 311, so that the shutter 350 closes smoothly.

[0079] The other side of the shutter 350 may be provided with a mechanism for moving the shutter 350 in a linear motion similar to the mechanism described above, but if a shutter mechanism on only one side is sufficient to achieve linear motion of the shutter 350, the other side of the shutter 350 may simply be provided with a mechanism for guiding the linear motion of the shutter 350.

[0080] Furthermore, the shutter mechanism is provided with a function for detecting the opening and closing of the shutter 350, but the detection function may be any function.

[0081] For example, one configuration that realizes the detection function is a non-contact door sensor, which turns the output of the sensor head "ON" when the actuator approaches within a certain distance from the sensor head, and turns "OFF" when the actuator moves away from the sensor head.

[0082] 13, sensor head 340a and sensor head 340b are attached to base 300, while actuators 341a and 341b are attached to bracket 330. Here, actuator 341a corresponds to sensor head 340a, and actuator 341b corresponds to sensor head 340b. When shutter 350 is in the closed state, the output of sensor head 340a is "ON," while the output of sensor head 340b is "OFF."

[0083] The outputs of sensor head 340a and sensor head 340b are input to control unit 210 (not shown in FIG. 13). When shutter 350 opens, actuator 341a moves away from sensor head 340a, causing the output of sensor head 340a to turn "OFF." On the other hand, actuator 341b moves closer to sensor head 340b, causing the output of sensor head 340b to turn "ON" near the point where shutter 350 is completely opened.

[0084] When the output of sensor head 340b turns "ON", control unit 210 recognizes that shutter 350 has entered the open state. However, if the outputs of both sensor head 340a and sensor head 340b are "ON", or if the output of sensor head 340b does not turn "ON" within a certain period of time after shutter 350 starts its opening operation, control unit 210 is configured to determine that the operation of shutter 350 is abnormal and display an error message.

[0085] When the shutter 350 closes, the actuator 341b moves away from the sensor head 340b, causing the output of the sensor head 340b to turn "OFF." On the other hand, the actuator 341a moves closer to the sensor head 340a, causing the output of the sensor head 340a to turn "ON" near the completion of the closing operation of the shutter 350. When the output of the sensor head 340a turns "ON," the control unit 210 recognizes that the shutter 350 has entered the closed state. However, if the output of the sensor head 340b remains "ON" or if the output of the sensor head 340a remains "OFF" even after a certain time has elapsed since the shutter 350 started the closing operation, the control unit 210 is configured to determine that the operation of the shutter 350 is abnormal and display an error message. The shutter mechanism is configured as described above.

[0086] <Variation 1> Next, the substrate transfer device 102 in the first modification will be described. For example, in FIG. 6, when the worker side shutter 104 is in the closed state or the transport robot side shutter 105 is in the closed state, if the worker side shutter 104 or the transport robot side shutter is forcibly opened by a force from outside the device, there will be no physical barrier between the worker and the transport robot 230.

[0087] Therefore, in this first modification, a locking mechanism is provided to forcibly maintain the closed state when the worker-side shutter 104 or the transport robot-side shutter 105 is in the closed state. As a result, even if the worker-side shutter 104 or the transport robot-side shutter is forced to open by force from outside the device, the locking mechanism can forcibly maintain the closed state. As a result, this first modification can prevent a situation in which there is no physical barrier between the worker and the transport robot 230.

[0088] The locking mechanism may be any locking mechanism as long as it can lock the closed state of the worker-side shutter 104 or the closed state of the transport robot-side shutter 105. For example, FIG. 14 is a diagram showing an example of a locking mechanism.

[0089] 14 shows a solenoid lock mechanism 500 as an example of a locking mechanism. The solenoid lock mechanism 500 is a mechanism in which a shaft 501 projects when current is applied, and retracts when current is cut. As shown in FIG. 14, the worker-side shutter 104 is provided with a hole into which the shaft 501 can be inserted. In this case, the hole into which the shaft 501 can be inserted may be provided in a component attached to the worker-side shutter 104.

[0090] For example, when the worker-side shutter 104 is closed, the solenoid lock mechanism 500 is configured to be energized, so that the shaft 501 jumps out of the solenoid lock mechanism 500 and is inserted into a hole provided in the worker-side shutter 104. This causes the worker-side shutter 104 to be locked.

[0091] On the other hand, when the operator-side shutter 104 is to be opened, the solenoid lock mechanism 500 is de-energized, and the shaft 501 is pulled into the solenoid lock mechanism 500, thereby unlocking the operator-side shutter 104.

[0092] In this way, according to this modification 1, by providing a locking mechanism to the worker-side shutter 104, it is possible to forcibly maintain the closed state of the worker-side shutter 104. As a result, according to this modification 1, it is possible to prevent a situation in which there is no physical barrier between the worker and the transport robot 230.

[0093] The transport robot side shutter 105 is also provided with a locking mechanism having a similar configuration to the locking mechanism provided in the worker side shutter 104. This makes it possible to forcibly maintain the closed state of the transport robot side shutter 105 as well. Therefore, by providing locking mechanisms in both the worker side shutter 104 and the transport robot side shutter 105, it is possible to reliably prevent a situation in which there is no physical barrier between the worker and the transport robot 230.

[0094] <Variation 2> 10, the operation of opening the worker-side shutter 401a is performed on the condition that the transport robot-side shutter 402a is closed. Similarly, the operation of opening the worker-side shutter 401b is performed on the condition that the transport robot-side shutter 402b is closed.

[0095] Here, in the present modified example 2, the substrate transport device 102 is configured to include a logic circuit that invalidates a command from the control unit 210 to set the device in an open state based on the output of a sensor that detects the closed state.

[0096] Specifically, in this second variant, when the control unit 210 outputs a control signal to open the worker side shutter 401a, if the output of the sensor (e.g., sensor head 340b in Figure 13) that detects the closed state of the transport robot side shutter 402a is "OFF," the control signal output from the control unit 210 is invalidated by the logic circuit described above.

[0097] At this time, if both the worker side shutter 401a and the transport robot side shutter 402a are in the closed state and the control unit 210 outputs a control signal to simultaneously open both shutters, it may not be possible to prevent both shutters from being in the open state.

[0098] Therefore, the output (control signal) from the control unit 210 to open both the worker-side shutter 401a and the transport robot-side shutter 402a is always given priority to the control to open the transport robot-side shutter 402a. In other words, if there is an output (control signal) from the control unit 210 to open both the worker-side shutter 401a and the transport robot-side shutter 402a, the output (control signal) from the control unit 210 to open the worker-side shutter 401a is invalidated by the above-mentioned logic circuit. This makes it possible to prevent damage to the transport robot 230 due to contact between the transport robot 230 and the transport robot-side shutter 402a, for example, even if the transport robot 230 extends its arm.

[0099] <Variation 3> In this third variant, for example, in Figure 6, an example is described in which a safety interlock circuit is implemented in the substrate transport device 102 to cut off the driving power supply of the transport robot 230 when both the worker side shutter 104 and the transport robot side shutter 105 are in the open state.

[0100] Here, the safety interlock circuit may have any circuit configuration as long as it is capable of cutting off the drive power supply of the transport robot 230 in conjunction with both the worker side shutter 104 and the transport robot side shutter 105 being in the open state.

[0101] For example, one example of a safety interlock circuit is a safety interlock circuit that uses a mechanical relay. A mechanical relay is a component in which, when current is passed through an operation coil, the contacts come together and the relay contacts turn "ON." Here, the drive power supply for the transport robot 230 is connected to the relay contacts. The input of the operation coil is connected to the output of sensors that detect the closed state of the worker-side shutter 104 and the transport robot-side shutter 105, respectively.

[0102] This allows power to be supplied to the transport robot 230 only while either the worker-side shutter 104 or the transport robot-side shutter 105 is closed, enabling the transport robot 230 to operate. In other words, according to the present modified example 3, when both the worker-side shutter 104 and the transport robot-side shutter 105 are open, the power supply to the transport robot 230 is cut off.

[0103] <Variation 4> In the fourth modification, for example, as shown in FIG. 15, an example in which a light curtain 900 is provided to detect that a worker is accessing the storage container installation section 220 will be described.

[0104] The light curtain 900 is a device configured to be able to detect access to the storage container installation section 220 from outside the apparatus, including from an operator. The substrate transport device 102 in this fourth modification is configured so that the worker-side shutter 104 cannot be placed in a closed state while the light curtain 900 is detecting access to the storage container installation section 220 from outside the apparatus, including from an operator. Furthermore, the substrate transport device 102 in this fourth modification is configured to interrupt the closing operation of the worker-side shutter 104 if the light curtain 900 detects access to the storage container installation section 220 from outside the apparatus, including from an operator, while the worker-side shutter 104 is performing the closing operation.

[0105] 16, when two different storage container stands 221a and 221b are provided, light curtain 900a is installed on storage container stand 221a, and light curtain 900b is installed on storage container stand 221b. As a result, light curtain 900a can detect access to storage container stand 221a, and light curtain 900b can detect access to storage container stand 221b. As a result, the closing operations of worker-side shutters 401a and 401b can be restricted based on the detection results of light curtains 900a and 900b. Therefore, according to this fourth modification, it is possible to prevent the worker from being caught between worker-side shutter 401a or 401b, thereby ensuring the safety of the worker.

[0106] For example, even if the light curtain 900a detects access to the storage container stand 221a, if the light curtain 900b does not detect access to the storage container stand 221b, it is possible to continue the closing operation of the worker-side shutter 401b and keep the worker-side shutter 401b in the closed state. In other words, even if the light curtain 900a detects access during the closing operation of the worker-side shutter 401b, the closing operation of the worker-side shutter 401b continues without stopping.

[0107] In this way, when different storage container stands 221a and 221b are provided, by providing a light curtain 900a for storage container stand 221a and a light curtain 900b for storage container stand 221b, it is possible to ensure the safety of workers while preventing unnecessary interruptions to the closing operation.

[0108] <Variation 5> In the fifth modification, as shown in FIG. 15, an example will be described in which a light curtain 901 is provided to detect that the transfer robot 230 is accessing the storage container installation unit 220.

[0109] The light curtain 901 is a device configured to be able to detect access by the transport robot 230 to the storage container installation unit 220. In this fifth modification, an example in which the light curtain 901 is provided will also be described, but since the route by which the transport robot 230 accesses the storage container installation unit 220 is fixed, a photoelectric sensor or the like may be used instead of the light curtain 901.

[0110] The substrate transport device 102 in the present modified example 5 is configured so that the transport robot side shutter 105 cannot be put into the closed state while the light curtain 901 detects access by the transport robot 230 to the storage container installation section 220. Furthermore, the substrate transport device 102 in the present modified example 5 is configured so that if the light curtain 901 detects access by the transport robot 230 to the storage container installation section 220 while the transport robot side shutter 105 is performing the closing operation, the closing operation of the transport robot side shutter 105 is interrupted.

[0111] 16, when mutually different storage container stands 221a and 221b are provided, light curtain 901a is installed on storage container stand 221a, and light curtain 901b is installed on storage container stand 221b. As a result, access to storage container stand 221a can be detected by light curtain 901a, and access to storage container stand 221b can be detected by light curtain 901b, and as a result, the closing operations of transport robot-side shutter 402a and transport robot-side shutter 402b can be restricted based on the detection results of light curtains 901a and 901b.

[0112] Therefore, according to the fifth modification, the transport robot 230 can be prevented from being caught between the transport robot side shutter 402a or the transport robot side shutter 402b, and thus damage to the transport robot 230 can be prevented.

[0113] For example, even if the light curtain 901a detects access to the storage container stand 221a, if the light curtain 901b does not detect access to the storage container stand 221b, it is possible to continue the closing operation of the transport robot-side shutter 402b and keep the transport robot-side shutter 402b in the closed state. In other words, even if the light curtain 901a detects access during the closing operation of the transport robot-side shutter 402b, the closing operation of the transport robot-side shutter 402b continues without stopping.

[0114] In this way, when different storage container stands 221a and 221b are provided, by providing a light curtain 901a for storage container stand 221a and a light curtain 901b for storage container stand 221b, damage to transport robot 230 can be prevented while unnecessary interruptions to the closing operation can be prevented.

[0115] <Variation 6> For example, in order to correct the tolerances due to the storage container 200 being a molded product and the clearance errors during transport caused by the assembly errors of the substrate transport device 102 and the transport robot 230, it is necessary to perform a process called "teaching" to set the transport parameters of the transport robot 230 using the substrate transport device 102 and the storage container 200 being used.

[0116] "Teaching" is a visual inspection by a service technician, and requires that both the operator-side shutter 104 and the transport robot-side shutter 105 be in the open state.

[0117] Therefore, the substrate transport device 102 in this modified example 6 is provided with a "teaching mode" that allows the operator to arbitrarily select the open / close state of the shutter. The substrate transport device 102 in this modified example 6 is also provided with an open / close switch for the operator-side shutter 104 and an open / close switch for the transport robot-side shutter 105 that can be used only in the "teaching mode."

[0118] When switching from "operation mode" to "teaching mode," the safety interlock circuit described in the above-mentioned modified example 3 is disabled, and the worker-side shutter 104 and the transport robot-side shutter 105 can be simultaneously opened. Meanwhile, monitoring of access to the storage container installation section 220 by the light curtain 900 described in the above-mentioned modified example 4 and monitoring of access to the storage container installation section 220 by the light curtain 901 described in the above-mentioned modified example 5 continue to be performed in the "teaching mode."

[0119] This prevents the worker from being pinched by the worker-side shutter 104 even in the "teaching mode," ensuring the worker's safety, and also prevents the transport robot 230 from being pinched by the transport robot-side shutter 105, preventing damage to the transport robot 230.

[0120] The invention made by the inventor has been specifically described above based on the embodiments thereof, but it goes without saying that the present invention is not limited to the above-described embodiments and can be modified in various ways without departing from the spirit of the invention. [Explanation of symbols]

[0121] 100 Semiconductor inspection equipment 101 Semiconductor substrate processing unit 102 Substrate transport device 103 Shutter 104 Operator side shutter 105 Transport robot side shutter 200 Storage Container 201 Semiconductor substrate 210 Control Unit 211 Pre-Aligner 220 Storage container installation section 221 Storage container stand 221a Storage container stand 221b Storage container stand 230 Transport Robot 240 upper ports 300 base 310 Cylinder rod 311 Cylinder block 320 Linear Guide Rail 321 Linear Guide Block 330 Bracket 340a sensor head 340b sensor head 341a Actuator 341b Actuator 350 Shutter 400 Isolation Wall 401a Operator side shutter 401b Operator side shutter 402a Transfer robot side shutter 402b Transfer robot side shutter 410 Switch 450 open cassette 500 Solenoid lock mechanism 501 shaft 900 Light Curtain 900a Light Curtain 900b Light Curtain 901 Light Curtain 901a Light Curtain 901b Light Curtain

Claims

1. a transfer robot that transfers the substrate; a first installation section capable of installing a first container for accommodating the substrate; a first shutter mechanism that is provided to be able to block a first access path when accessing the first storage container or the first installation section from outside the device; a second shutter mechanism provided to be able to block a second access path when the transport robot accesses the first storage container; a first sensor that is installed closer to the transport robot than the second shutter mechanism and that detects an object on the second access path closer to the transport robot than the second shutter mechanism; a controller that controls opening and closing operations of the first shutter mechanism and the second shutter mechanism; Equipped with The controller controls the opening and closing operation of the second shutter mechanism based on the detection result of the first sensor.

2. 2. The substrate transport device according to claim 1, The substrate transport device further comprises: a second installation section in which a second storage container can be installed; a third shutter mechanism that is provided to be able to block a third access path when accessing the second storage container or the second installation section from outside the device; a fourth shutter mechanism provided to be able to block a fourth access path when the transfer robot accesses the second storage container; a second sensor that is installed closer to the transport robot than the fourth shutter mechanism and that detects an object on the fourth access path closer to the transport robot than the fourth shutter mechanism; a partition wall separating the first installation portion and the second installation portion; and The controller controls the opening and closing operation of the fourth shutter mechanism based on the detection result of the second sensor.

3. 2. The substrate transport device according to claim 1, In a state where the first storage container storing the substrate is placed on the first installation section, the controller is configured to control the substrate transport device to transition from a first phase in which the first shutter mechanism is in an open state and the second shutter mechanism is in a closed state while waiting, to a second phase in which the first shutter mechanism is in a closed state and then the second shutter mechanism is in an open state, thereby making it possible for the transport robot to transport the substrate from the first storage container.

4. 4. The substrate transport device according to claim 3, In a state where the first housing container without housing the substrate is installed in the first installation section, The substrate transport device is configured such that, when the transport robot loads the substrate into the first storage container in the second phase, the controller transitions from the second phase to a third phase in which the second shutter mechanism is closed and then the first shutter mechanism is opened.

5. 4. The substrate transport device according to claim 3, The substrate transport device has a first switch that triggers a transition from the first phase to the second phase.

6. 4. The substrate transport device according to claim 3, the controller is configured to transition from the second phase to a third phase in which the second shutter mechanism is brought into a closed state and then the first shutter mechanism is brought into an open state; The substrate transport device has a second switch that triggers a transition from the second phase to the third phase.

7. 3. The substrate transport device according to claim 2, The controller is configured to close the third shutter mechanism and open the fourth shutter mechanism when the first shutter mechanism is in an open state and the second shutter mechanism is in a closed state.

8. 3. The substrate transport device according to claim 2, The controller is configured to set the third shutter mechanism to an open state and the fourth shutter mechanism to a closed state when the first shutter mechanism is in a closed state and the second shutter mechanism is in an open state.

9. 2. The substrate transport device according to claim 1, The substrate transport device further comprises: a first locking mechanism for forcibly maintaining the first shutter mechanism in a closed state when the first shutter mechanism is in a closed state; a second locking mechanism for forcibly maintaining the second shutter mechanism in a closed state when the second shutter mechanism is in a closed state; A substrate transport apparatus comprising:

10. 2. The substrate transport device according to claim 1, the substrate transfer device further includes a third sensor that detects that the first access path is accessed from outside the device; The substrate transport device is configured such that when the controller detects, based on the output from the third sensor, that the first access path is being accessed from outside the device during the closing operation of the first shutter mechanism, the controller stops the closing operation of the first shutter mechanism.

11. 11. The substrate transport apparatus according to claim 10, The substrate transport device is configured such that when the controller detects, based on output from the first sensor, that the transport robot is accessing the second access path during the closing operation of the second shutter mechanism, the controller stops the closing operation of the second shutter mechanism.

12. 2. The substrate transport device according to claim 1, The substrate transport apparatus, wherein the first storage container is an open cassette.

13. 2. The substrate transport device according to claim 1, The substrate transport apparatus, wherein the substrate is a semiconductor wafer or a reticle.

14. 2. The substrate transport device according to claim 1, The substrate transport device, wherein the first sensor is a light curtain or a photoelectric sensor.

15. 3. The substrate transport device according to claim 2, The substrate transport apparatus further includes a third sensor that detects that the first access path is being accessed from outside the apparatus, and a fourth sensor that detects that the third access path is being accessed from outside the apparatus.

16. 16. The substrate transport apparatus according to claim 15, a substrate transport device in which, even if the controller detects that the first access path is being accessed from outside the device based on the output from the third sensor, if the controller does not detect that the third access path is being accessed from outside the device based on the output from the fourth sensor, the controller continues the closing operation of the third shutter mechanism without stopping it.

17. 16. The substrate transport apparatus according to claim 15, a substrate transport device, wherein the controller continues the closing operation of the fourth shutter mechanism without stopping it if it detects that the second access path is being accessed based on the output from the first sensor, but does not detect that the fourth access path is being accessed based on the output from the second sensor.

18. a single transfer robot for transferring substrates; a first installation section capable of installing a first container for accommodating a substrate; a second installation section capable of installing a second container for accommodating a substrate; a single operator-side shutter mechanism that is provided to be able to block both access to the first storage container or the first installation section from outside the apparatus and access to the second storage container or the second installation section from outside the apparatus; a single transport robot-side shutter mechanism that is provided to be able to block both access by the transport robot to the first storage container and access by the transport robot to the second storage container; a controller that controls the opening and closing operations of the worker-side shutter mechanism and the transport robot-side shutter mechanism; Equipped with The controller is configured to close the transport robot side shutter mechanism when the worker side shutter mechanism is in an open state, and to open the transport robot side shutter mechanism when the worker side shutter mechanism is in a closed state.

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