Ceiling transport vehicle

Abstract

This overhead conveying vehicle comprises a slide mechanism that causes a unit including an article-retaining part for retaining an article to slide along a first direction orthogonal to a travel direction. The slide mechanism has a slide part that moves along the first direction relative to a conveying vehicle body, a guide block that is provided between the conveying vehicle body and the slide part and is capable of sliding along the first direction relative to the conveying vehicle body and the slide part, and a guide-block-retaining part that retains the position of the guide block such that the positional relationship between the guide block and at least one of the conveying vehicle body and the slide part is maintained while the slide part moves.

Description

[Technical Field]

[0001] One aspect of the present invention relates to an overhead transport vehicle. [Background technology]

[0002] For example, Patent Document 1 describes a ceiling transport vehicle equipped with a lifting drive unit (unit) that raises and lowers a lifting platform, and a lateral movement unit (slide mechanism) that moves the lifting drive unit laterally. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-331906 Summary of the Invention [Problem to be solved by the invention]

[0004] In the overhead transport vehicle described above, when a unit is slid using a slide mechanism, the slide section may be guided by a guide block relative to the vehicle body. In such an overhead transport vehicle, the unit tilts as it slides depending on the amount of protrusion from the vehicle body. Furthermore, the position of the guide block (the support state of the unit) is not fixed at that time, and as a result, the tilt angle of the unit may change each time it slides.

[0005] Therefore, one aspect of the present invention aims to provide an overhead transport vehicle that can suppress angle changes that cause a unit slid by a slide mechanism to tilt more than expected. [Means for solving the problem]

[0006] A ceiling transport vehicle according to one aspect of the present invention is equipped with a slide mechanism that slides a unit including an item holding section that holds items along a first direction perpendicular to the traveling direction, and the slide mechanism has a slide section that moves along the first direction relative to the transport vehicle body, a guide block that is provided between the transport vehicle body and the slide section and is slidable along the first direction relative to each of the transport vehicle body and the slide section, and a guide block holding section that holds the position of the guide block so that the positional relationship between either the transport vehicle body or the slide section and the guide block is maintained when the slide section moves.

[0007] After extensive research, the inventors discovered that when a unit is slid by a sliding mechanism in an overhead transport vehicle, if the guide block is free to move in a first direction (its position in the first direction is indefinite), the sliding section may tilt more than expected, and the angle of tilt may change, depending on the position of the guide block in the first direction. Therefore, in one aspect of the present invention, when the sliding section moves, the positional relationship (hereinafter simply referred to as "positional relationship") between the guide block and either the transport vehicle body or the sliding section is maintained by a guide block holder. This makes it possible to prevent the sliding section from tilting more than expected. In other words, it is possible to prevent the unit slid by the sliding mechanism from tilting more than expected.

[0008] In an overhead transport vehicle according to one aspect of the present invention, the guide block holder may include a first magnetic member provided on the guide block and including a magnet or a magnetic material, and a second magnetic member provided on at least one of the transport vehicle body and the slide unit and including a magnet or a magnetic material that is attracted to the first magnetic member. In this case, by using the first magnetic member and the second magnetic member as the guide block holder, it is possible to suppress an angle change that would cause the unit slid by the slide mechanism to tilt more than expected.

[0009] In the overhead transport vehicle according to one aspect of the present invention, the first magnetic member may be attracted to the second magnetic member through a gap or a protective member while the guide block is held in position. In this case, the first magnetic member and the second magnetic member do not come into direct contact with each other, thereby making it possible to prevent damage to them.

[0010] In the overhead transport vehicle according to one aspect of the present invention, a plurality of guide blocks may be provided, and the guide block holder may bias at least one of the plurality of guide blocks in a direction away from another guide block adjacent to the guide block. This makes it possible to effectively maintain the positional relationship of at least one of the plurality of guide blocks when a plurality of guide blocks are provided.

[0011] In an overhead transport vehicle according to one aspect of the present invention, the guide block may include a first guide block and a second guide block, and the guide block holder may hold the position of the first guide block at one end of at least one of the transport vehicle body and the sliding unit in the first direction, and may hold the position of the second guide block at the other end of at least one of the transport vehicle body and the sliding unit in the first direction. In this case, the distance between the first guide block and the second guide block can be made as wide as possible. This makes it possible to suppress tilting of the sliding unit and thus tilting of the slid unit.

[0012] In an overhead transport vehicle according to one aspect of the present invention, the slide mechanism may include: another slide portion that moves in a first direction relative to the slide portion; another guide block that is provided between the slide portion and the other slide portion and is slidable in the first direction relative to each of the slide portion and the other slide portion; and another guide block holder that holds the position of the other guide block so that a positional relationship between either the slide portion or the other slide portion and the other guide block is maintained when the other slide portion moves. In this case, it is possible to easily increase the slide amount (stroke) of the slide mechanism.

[0013] In the overhead transport vehicle according to one aspect of the present invention, the slide mechanism may slide the unit to both sides in the first direction. In this configuration, since the position of the guide block in the first direction is often indefinite, the effect of maintaining the positional relationship by the guide block holder and suppressing the change in the angle at which the slide unit tilts more than expected is significant. [Effects of the Invention]

[0014] According to one aspect of the present invention, it is possible to provide an overhead transport vehicle that can suppress the angle change of a unit slid by a slide mechanism that tilts more than expected. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a side view showing an overhead transport vehicle according to one embodiment. [Figure 2] FIG. 2 is an enlarged front view of the lateral unit of FIG. [Figure 3] Fig. 3(a) is a schematic cross-sectional view showing the upper guide block of Fig. 2. Fig. 3(b) is a schematic cross-sectional view showing the lower guide block of Fig. 2. [Figure 4] FIG. 4 is a front view showing the lateral unit of FIG. 2 when it is slid. [Figure 5] FIG. 5 is a front view showing a lateral unit according to a modified example when it is slid. DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, an embodiment will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated explanations will be omitted. The terms "upper" and "lower" correspond to the up and down directions in the vertical direction.

[0017] 1, an overhead transport vehicle 1 of this embodiment travels along a track 20 laid near the ceiling of a clean room where semiconductor devices are manufactured. The track 20 forms a travel path for the overhead transport vehicle 1. The overhead transport vehicle 1 transports a FOUP (Front Opening Unified Pod) (item) 200 that contains a plurality of semiconductor wafers, and transfers the FOUP 200 to a load port 300 or the like provided in a processing device that performs various processes on the semiconductor wafers.

[0018] The overhead transport vehicle 1 includes a frame unit 2, a traveling unit 3, a lateral unit (slide mechanism) 4, a theta unit 5, a lift drive unit 6, a holding unit (article holding section) 7, and a transport vehicle controller 8. The frame unit 2 has a center frame (transport vehicle main body) 15, a front frame 16, and a rear frame 17. The front frame 16 extends downward from the end of the front side of the center frame 15 (the front side in the traveling direction of the overhead transport vehicle 1). The rear frame 17 extends downward from the end of the rear side of the center frame 15 (the rear side in the traveling direction of the overhead transport vehicle 1).

[0019] The traveling unit 3 is disposed above the center frame 15. The traveling unit 3 travels along the track 20 by receiving a contactless supply of power, for example, from a high-frequency current line laid along the track 20. The lateral unit 4 is disposed below the center frame 15. The lateral unit 4 slides the theta unit 5, the lifting drive unit 6, and the holding unit 7 laterally relative to the center frame 15.

[0020] The theta unit 5, the lifting drive unit 6, and the holding unit 7 are also simply referred to as unit 9. The lateral direction (first direction perpendicular to the traveling direction of the ceiling transport vehicle 1, horizontal direction, side) in which the lateral unit 4 slides the unit 9 is also simply referred to as side. The lateral unit 4 slides the unit 9 to both one side and the other side in the lateral direction (left and right directions in the figure) by the driving force of a driving mechanism (for example, a driving motor, a pulley, a belt, etc.) not shown.

[0021] The theta unit 5 is disposed below the lateral unit 4. The theta unit 5 rotates the lifting / lowering drive unit 6 and the holding unit 7 in a horizontal plane. The lifting / lowering drive unit 6 is disposed below the theta unit 5. The lifting / lowering drive unit 6 raises and lowers the holding unit 7 by reeling in and retracting multiple belts B connected to the holding unit 7. The holding unit 7 is disposed below the lifting / lowering drive unit 6. The holding unit 7 is provided so that it can be raised and lowered by the lifting / lowering drive unit 6. The holding unit 7 has a pair of grippers 12 that can be opened and closed in the horizontal direction. The holding unit 7 holds the flange 201 of the FOUP 200 with the pair of grippers 12.

[0022] The transport vehicle controller 8 is disposed on the center frame 15. The transport vehicle controller 8 is an electronic control unit configured with a CPU (Central Processing Unit), a ROM (Read only memory), a RAM (Random access memory), etc. The transport vehicle controller 8 controls each part of the overhead transport vehicle 1. The transport vehicle controller 8 may be configured with multiple electronic control units. The transport vehicle controller 8 may also be disposed on the front frame 16, etc.

[0023] The overhead transport vehicle 1 configured as described above operates, for example, as follows. When a FOUP 200 is transferred from the load port 300 to the overhead transport vehicle 1, the overhead transport vehicle 1 without holding the FOUP 200 stops at a predetermined position above the load port 300. If the position of the holding unit 7, which is lowered at the stop position, deviates from the predetermined position relative to the load port 300 (the FOUP 200 placed on the load port 300), the lateral unit 4 and the theta unit 5 are driven to adjust the horizontal position and horizontal angle of the holding unit 7. Next, the lift drive unit 6 lowers the holding unit 7, and the holding unit 7 holds the flange 201 of the FOUP 200 placed on the load port 300. Next, the lift drive unit 6 raises the holding unit 7 to the upper end, and the FOUP 200 is placed between the front frame 16 and the rear frame 17. Next, the overhead transport vehicle 1 holding the FOUP 200 starts traveling.

[0024] On the other hand, when transferring a FOUP 200 from the overhead transport vehicle 1 to the load port 300, the overhead transport vehicle 1 holding the FOUP 200 stops at a predetermined position above the load port 300. If the position of the holding unit 7 (FOUP 200) being lowered at the stop position deviates from the predetermined position relative to the load port 300, the lateral unit 4 and the theta unit 5 are driven to adjust the horizontal position and horizontal angle of the holding unit. Next, the lift drive unit 6 lowers the holding unit 7, placing the FOUP 200 on the load port 300, and the holding unit 7 releases its hold on the flange 201 of the FOUP 200. Next, the lift drive unit 6 raises the holding unit 7 to the upper end. Next, the overhead transport vehicle 1, which is not holding the FOUP 200, begins traveling.

[0025] Next, the configuration of the lateral unit 4 will be described.

[0026] As shown in Figure 2, the lateral unit 4 has an upper slide portion (slide portion) 41, an upper guide block (guide block) 42, a lower slide portion (other slide portion) 43, a lower guide block (other guide block) 44, an upper guide block holding portion (guide block holding portion) 45, and a lower guide block holding portion (other guide block holding portion) 48.

[0027] [Upper slide section] 2 and 3(a), the upper slide portion 41 moves laterally relative to the center frame 15. The upper slide portion 41 is configured to be movable laterally to both one side and the other side below the center frame 15.

[0028] [Upper guide block] The upper guide block 42 is provided between the center frame 15 and the upper slide portion 41. The upper guide block 42 is slidable in the lateral direction relative to both the center frame 15 and the upper slide portion 41. The upper guide block 42 is, for example, a linear motion guide (LM guide) block.

[0029] An upper groove 42a that opens upward is formed in the upper part of the upper guide block 42. A first upper rail portion 15a that is provided at the bottom of the center frame 15 so as to protrude downward is slidably engaged in the upper groove 42a along the lateral direction. The upper groove 42a and the first upper rail portion 15a extend along the lateral direction. A lower groove 42b that opens downward is formed in the lower part of the upper guide block 42. A second upper rail portion 41a that is provided at the top of the upper slide portion 41 so as to protrude upward is slidably engaged in the lateral direction with the lower groove 42b. The lower groove 42b and the second upper rail portion 41a extend along the lateral direction.

[0030] A plurality of upper guide blocks 42 are provided. Here, the upper guide blocks 42 include a first upper guide block (first guide block) 42X and a second upper guide block (second guide block) 42Y. The upper guide blocks 42 as described above guide the movement of the upper slide portion 41 in the lateral direction. The upper guide blocks 42 restrict the movement of the upper slide portion 41 in the traveling direction of the ceiling transport vehicle 1. The upper guide blocks 42 connect the center frame 15 and the upper slide portion 41 in the up-down direction. The upper guide blocks 42 are not fixed in the lateral direction and are freely movable in the lateral direction (their lateral position is undefined).

[0031] [Lower slide section] 2 and 3(b), the lower slide part 43 moves in the lateral direction relative to the upper slide part 41. The lower slide part 43 is configured to be movable to both one side and the other side in the lateral direction below the upper slide part 41. The theta unit 5 is connected to the lower slide part 43.

[0032] [Lower guide block] The lower guide block 44 is provided between the upper slide portion 41 and the lower slide portion 43. The lower guide block 44 is slidable in the lateral direction relative to each of the upper slide portion 41 and the lower slide portion 43. The lower guide block 44 is, for example, a linear motion guide (LM guide) block.

[0033] An upper groove 44a that opens upward is formed in the upper part of the lower guide block 44. A first lower rail portion 41b, which is provided at the lower part of the upper slide portion 41 so as to protrude downward, is slidably engaged in the upper groove 44a along the lateral direction. The upper groove 44a and the first lower rail portion 41b extend along the lateral direction. A lower groove 44b that opens downward is formed in the lower part of the lower guide block 44. A second lower rail portion 43a, which is provided at the upper part of the lower slide portion 43 so as to protrude upward, is slidably engaged in the lateral direction with the lower groove 44b. The lower groove 44b and the second lower rail portion 43a extend along the lateral direction.

[0034] A plurality of lower guide blocks 44 are provided. Here, the lower guide blocks 44 include a first lower guide block 44X and a second lower guide block 44Y. The lower guide blocks 44 as described above guide the movement of the lower slide section 43 in the lateral direction. The lower guide blocks 44 restrict the movement of the lower slide section 43 in the traveling direction of the ceiling transport vehicle 1. The lower guide blocks 44 connect the upper slide section 41 and the lower slide section 43 in the up-down direction. The lower guide blocks 44 are not fixed in the lateral direction and can move freely in the lateral direction (their lateral position is undefined).

[0035] [Upper guide block holding section] The upper guide block holding portion 45 holds the position of the upper guide block 42 so that the positional relationship between the upper guide block 42 and either the center frame 15 or the upper slide portion 41 is maintained when the upper slide portion 41 moves. The upper guide block holding portion 45 biases the first upper guide block 42X and the second upper guide block 42Y in directions that move them away from each other. The upper guide block holding portion 45 holds the position of the first upper guide block 42X at one end of the center frame 15 and the upper slide portion 41 in the lateral direction, and holds the position of the second upper guide block 42Y at the other end of the center frame 15 and the upper slide portion 41 in the lateral direction.

[0036] The upper-stage guide block holding portion 45 holds the position of the upper-stage guide block 42 by utilizing magnetic attraction (in other words, magnetic attraction or attraction). The upper-stage guide block holding portion 45 has first magnetic members 46X, 46Y including magnets or magnetic materials, and second magnetic members 47A-47D including magnets or magnetic materials that are attracted to the first magnetic members 46X, 46Y. The first magnetic member 46X is provided on the outer side in the lateral direction of the first upper-stage guide block 42X (the opposite side to the second upper-stage guide block 42Y). The first magnetic member 46Y is provided on the outer side in the lateral direction of the second upper-stage guide block 42Y (the opposite side to the first upper-stage guide block 42X).

[0037] The second magnetic member 47A is fixed to the center frame 15 via a stopper 61A. The stopper 61A is provided on the lateral outer side of the first upper rail portion 15a at the bottom of the center frame 15. The stopper 61A is disposed at one lateral end of the center frame 15. The stopper 61A abuts against the first upper guide block 42X, thereby preventing the first upper guide block 42X from falling off the first upper rail portion 15a.

[0038] The second magnetic member 47A is fixed to the lower surface of the stopper 61A. The second magnetic member 47A is positioned laterally outwardly of the stopper 61A. In other words, the inner lateral surface of the second magnetic member 47A is positioned laterally outwardly of the inner lateral surface of the stopper 61A. As a result, when the first upper-stage guide block 42X abuts the stopper 61A, a gap is formed between the second magnetic member 47A and the first upper-stage guide block 42X, preventing direct contact between them. As a result, while the first upper-stage guide block 42X is held in position, the first magnetic member 46X is attracted by magnetic force to the second magnetic member 47A through the gap.

[0039] The second magnetic member 47B is fixed to the upper slide portion 41 via a stopper 61B. The stopper 61B is provided on the upper part of the upper slide portion 41, outside the lateral direction of the second upper rail portion 41a. The stopper 61B is disposed at one lateral end of the upper slide portion 41. The stopper 61B abuts against the first upper guide block 42X, thereby preventing the first upper guide block 42X from falling off the second upper rail portion 41a.

[0040] The second magnetic member 47B is fixed to the upper surface of the stopper 61B. The second magnetic member 47B is positioned laterally outwardly of the stopper 61B. In other words, the inner lateral surface of the second magnetic member 47B is positioned laterally outwardly of the inner lateral surface of the stopper 61B. As a result, when the first upper-stage guide block 42X abuts the stopper 61B, a gap is formed between the second magnetic member 47B and the first upper-stage guide block 42X, preventing direct contact between them. As a result, while the first upper-stage guide block 42X is held in position, the first magnetic member 46X is attracted by magnetic force to the second magnetic member 47B via the gap.

[0041] The second magnetic member 47C is fixed to the center frame 15 via a stopper 61C. The stopper 61C is provided on the outer lateral side of the first upper rail portion 15a at the bottom of the center frame 15. The stopper 61C is disposed at the other lateral end of the center frame 15. The stopper 61C abuts against the second upper guide block 42Y, thereby preventing the second upper guide block 42Y from falling off the first upper rail portion 15a.

[0042] The second magnetic member 47C is fixed to the lower surface of the stopper 61C. The second magnetic member 47C is positioned laterally outwardly of the stopper 61C. In other words, the inner lateral surface of the second magnetic member 47C is positioned laterally outwardly of the inner lateral surface of the stopper 61C. As a result, when the second upper-stage guide block 42Y abuts the stopper 61C, a gap is formed between the second magnetic member 47C and the second upper-stage guide block 42Y, preventing direct contact between them. As a result, while the second upper-stage guide block 42Y is held in position, the first magnetic member 46Y is magnetically attracted to the second magnetic member 47C through the gap.

[0043] The second magnetic member 47D is fixed to the upper slide portion 41 via a stopper 61D. The stopper 61D is provided on the upper part of the upper slide portion 41, outside the lateral direction of the second upper rail portion 41a. The stopper 61D is disposed at the other lateral end of the upper slide portion 41. The stopper 61D abuts against the second upper guide block 42Y, thereby preventing the second upper guide block 42Y from falling off the second upper rail portion 41a.

[0044] The second magnetic member 47D is fixed to the upper surface of the stopper 61D. The second magnetic member 47D is positioned laterally outwardly of the stopper 61D. In other words, the inner lateral surface of the second magnetic member 47D is positioned laterally outwardly of the inner lateral surface of the stopper 61D. As a result, when the second upper-stage guide block 42Y abuts the stopper 61D, a gap is formed between the second magnetic member 47D and the second upper-stage guide block 42Y, preventing direct contact between them. As a result, while the second upper-stage guide block 42Y is held in position, the first magnetic member 46Y is attracted by magnetic force to the second magnetic member 47D through the gap.

[0045] [Lower guide block holding section] The lower guide block holding portion 48 holds the position of the lower guide block 44 so that the positional relationship between either the upper slide portion 41 or the lower slide portion 43 and the lower guide block 44 is maintained when the lower slide portion 43 moves. The lower guide block holding portion 48 biases the first lower guide block 44X and the second lower guide block 44Y in directions in which they move away from each other. The lower guide block holding portion 48 holds the position of the first lower guide block 44X at one end of the upper slide portion 41 and the lower slide portion 43 in the lateral direction, and holds the position of the second lower guide block 44Y at the other end of the upper slide portion 41 and the lower slide portion 43 in the lateral direction.

[0046] The lower guide block holding portion 48 holds the position of the lower guide block 44 by utilizing magnetic attraction. The lower guide block holding portion 48 has first magnetic members 49X, 49Y including magnets or magnetic materials, and second magnetic members 50A-50D including magnets or magnetic materials that are attracted to the first magnetic members 49X, 49Y. The first magnetic member 49X is provided on the outer side in the lateral direction of the first lower guide block 44X (the opposite side to the second lower guide block 44Y). The first magnetic member 49Y is provided on the outer side in the lateral direction of the second lower guide block 44Y (the opposite side to the first lower guide block 44X).

[0047] The second magnetic member 50A is fixed to the upper slide portion 41 via a stopper 62A. The stopper 62A is provided at the bottom of the upper slide portion 41, outside the first lower rail portion 41b in the lateral direction. The stopper 62A is disposed at one end of the upper slide portion 41 in the lateral direction. The stopper 62A abuts against the first lower guide block 44X, thereby preventing the first lower guide block 44X from falling off the first lower rail portion 41b. The second magnetic member 50A is fixed to the lower surface of the stopper 62A. The second magnetic member 50A is disposed offset outward in the lateral direction from the stopper 62A. In other words, the inner surface of the second magnetic member 50A in the lateral direction is located outward in the lateral direction from the inner surface of the stopper 62A in the lateral direction. As a result, when the first lower-stage guide block 44X hits the stopper 62A, a gap is formed between the second magnetic member 50A and the first lower-stage guide block 44X, preventing direct contact between them. As a result, while the position of the first lower-stage guide block 44X is maintained, the first magnetic member 49X is attracted by magnetic force to the second magnetic member 50A via the gap.

[0048] The second magnetic member 50B is fixed to the lower slide portion 43 via a stopper 62B. The stopper 62B is provided at the upper part of the lower slide portion 43, outside the second upper rail portion 43b in the lateral direction. The stopper 62B is disposed at one end of the lower slide portion 43 in the lateral direction. The stopper 62B abuts against the first lower guide block 44X, thereby preventing the first lower guide block 44X from falling off the second lower rail portion 43a. The second magnetic member 50B is fixed to the upper surface of the stopper 62B. The second magnetic member 50B is disposed offset outward in the lateral direction from the stopper 62B. In other words, the inner surface of the second magnetic member 50B in the lateral direction is positioned outside the inner surface of the stopper 62B in the lateral direction. As a result, when the first lower-stage guide block 44X hits the stopper 62B, a gap is formed between the second magnetic member 50B and the first lower-stage guide block 44X, preventing direct contact between them. As a result, while the position of the first lower-stage guide block 44X is maintained, the first magnetic member 49X is attracted by magnetic force to the second magnetic member 50B via the gap.

[0049] The second magnetic member 50C is fixed to the upper slide portion 41 via a stopper 62C. The stopper 62C is provided at the lower part of the upper slide portion 41, outside the first lower rail portion 41b in the lateral direction. The stopper 62C is disposed at the other end of the upper slide portion 41 in the lateral direction. The stopper 62C abuts against the second lower guide block 44Y, thereby preventing the second lower guide block 44Y from falling off the first lower rail portion 41b. The second magnetic member 50C is fixed to the lower surface of the stopper 62C. The second magnetic member 50C is disposed offset outward in the lateral direction from the stopper 62C. In other words, the inner surface of the second magnetic member 50C in the lateral direction is positioned outward in the lateral direction from the inner surface of the stopper 62C in the lateral direction. As a result, when the second lower-stage guide block 44Y hits the stopper 62C, a gap is formed between the second magnetic member 50C and the second lower-stage guide block 44Y, preventing direct contact between them. As a result, while the position of the second lower-stage guide block 44Y is maintained, the first magnetic member 49Y is attracted by magnetic force to the second magnetic member 50C via the gap.

[0050] The second magnetic member 50D is fixed to the lower slide portion 43 via a stopper 62D. The stopper 62D is provided at the upper part of the lower slide portion 43, outside the second lower rail portion 43a in the lateral direction. The stopper 62D is disposed at the other end of the lower slide portion 43 in the lateral direction. The stopper 62D abuts against the second lower guide block 44Y, thereby preventing the second lower guide block 44Y from falling off the second lower rail portion 43a. The second magnetic member 50D is fixed to the upper surface of the stopper 62D. The second magnetic member 50D is disposed outward in the lateral direction relative to the stopper 62D. In other words, the inner surface of the second magnetic member 47D in the lateral direction is located outward in the lateral direction relative to the inner surface of the stopper 62D in the lateral direction. As a result, when the second lower-stage guide block 44Y hits the stopper 62D, a gap is formed between the second magnetic member 50D and the second lower-stage guide block 44Y, preventing direct contact between them. As a result, while the position of the second lower-stage guide block 44Y is maintained, the first magnetic member 49Y is attracted by magnetic force to the second magnetic member 50D via the gap.

[0051] Next, an example of the operation of the lateral unit 4 will be described.

[0052] 4, in the lateral unit 4, the driving force of a drive mechanism (not shown) causes the upper slide portion 41 to slide laterally to the other side relative to the center frame 15 while being guided by the upper guide block 42. At the same time, the driving force of a drive mechanism (not shown) causes the lower slide portion 43 to further slide laterally to the other side relative to the upper slide portion 41 while being guided by the lower guide block 44.

[0053] In this case, the first upper-tier guide block 42X slides along the first upper-tier rail portion 15a in conjunction with the movement of the upper-tier slide portion 41. At this time, the first upper-tier guide block 42X remains positioned at one end of the upper-tier slide portion 41 because the first magnetic member 46X is attracted by the magnetic force of the second magnetic member 47B. Furthermore, the second upper-tier guide block 42Y slides along the second upper-tier rail portion 41a in conjunction with the movement of the upper-tier slide portion 41. At this time, the second upper-tier guide block 42Y remains positioned at the other end of the center frame 15 because the first magnetic member 46Y is attracted by the magnetic force of the second magnetic member 47C.

[0054] In this case, the first lower-stage guide block 44X slides along the first lower-stage rail portion 41b in conjunction with the movement of the lower-stage slide portion 43. At this time, the first lower-stage guide block 44X remains positioned at one end of the lower-stage slide portion 43 because the first magnetic member 49X is attracted by the magnetic force of the second magnetic member 50B. The second lower-stage guide block 44Y slides along the second lower-stage rail portion 43a in conjunction with the movement of the lower-stage slide portion 43. At this time, the second lower-stage guide block 44Y remains positioned at the other end of the upper-stage slide portion 41 because the first magnetic member 49Y is attracted by the magnetic force of the second magnetic member 50C.

[0055] In the operation example here, the case where the upper slide portion 41 and the lower slide portion 43 slide to the other side in the lateral direction has been described, but the same applies when they slide to one side in the lateral direction.

[0056] As described above, in the ceiling transport vehicle 1, when the upper slide section 41 moves, the positional relationship between either the center frame 15 or the upper slide section 41 and the upper guide block 42 is maintained by the upper guide block holder 45. This makes it possible to prevent unexpected changes in the tilt angle of the upper slide section 41. Similarly, when the lower slide section 43 moves, the positional relationship between either the upper slide section 41 or the lower slide section 43 and the lower guide block 44 is maintained by the lower guide block holder 48. This makes it possible to prevent unexpected changes in the tilt angle of the lower slide section 43.

[0057] Therefore, with the ceiling transport vehicle 1, it is possible to suppress the angle change of the unit 9 slid by the lateral unit 4, which tilts more than expected. It is possible to suppress variations in the tilt of the unit 9. It is possible to slide the unit 9 as expected with the lateral unit 4. It is possible to reduce shaking, improve transfer stability (transfer accuracy, etc.), and suppress the amount of deviation of the various sensors installed.

[0058] In the ceiling transport vehicle 1, the upper guide block holding portion 45 includes first magnetic members 46X, 46Y provided on the upper guide block 42, and second magnetic members 47A to 47D provided on the center frame 15 and the upper slide portion 41. In this case, by using the first magnetic members 46X, 46Y and the second magnetic members 47A to 47D as the upper guide block holding portion 45, it is possible to suppress an angle change that would cause the unit 9 slid by the lateral unit 4 to tilt more than expected.

[0059] Similarly, in the ceiling transport vehicle 1, the lower guide block holding portion 48 includes first magnetic members 49X, 49Y provided on the lower guide block 44, and second magnetic members 50A to 50D provided on the upper slide portion 41 and the lower slide portion 43. In this case, by using the first magnetic members 49X, 49Y and the second magnetic members 50A to 50D as the lower guide block holding portion 48, it is possible to suppress an angle change that would cause the unit 9 slid by the lateral unit 4 to tilt more than expected.

[0060] In the ceiling transport vehicle 1, the first magnetic members 46X, 46Y are attracted to the second magnetic members 47A-47D through the gaps while the upper guide block 42 is held in position. The first magnetic members 49X, 49Y are attracted to the second magnetic members 50A-50D through the gaps while the lower guide block 44 is held in position. In this case, the first magnetic members 46X, 46Y, 49X, 49Y do not come into direct contact with the second magnetic members 47A-47D, 50A-50D, so damage to these members can be reduced.

[0061] The ceiling transport vehicle 1 is provided with a plurality of upper guide blocks 42 (configured to be divided). The upper guide block holding unit 45 urges the first upper guide block 42X and the second upper guide block 42Y in directions away from each other. In other words, it urges at least one of the plurality of upper guide blocks 42 in a direction away from the other upper guide block 42 adjacent to that upper guide block 42. This makes it possible to effectively maintain the positional relationship between the plurality of upper guide blocks 42 when they are provided.

[0062] Similarly, the ceiling transport vehicle 1 is provided with a plurality of lower guide blocks 44 (configured to be divided). The lower guide block holding portion 48 urges the first lower guide block 44X and the second lower guide block 44Y in directions away from each other. In other words, it urges at least one of the plurality of lower guide blocks 44 in a direction away from the other lower guide block 44 adjacent to that lower guide block 44. This makes it possible to effectively maintain the positional relationship between the plurality of lower guide blocks 44 when they are provided.

[0063] In the ceiling transport vehicle 1, the upper guide block holding unit 45 holds the position of the first upper guide block 42X at one end of the center frame 15 and the upper slide unit 41 in the lateral direction, and holds the position of the second upper guide block 42Y at the other end of the center frame 15 and the upper slide unit 41 in the lateral direction. This allows the distance between the first upper guide block 42X and the second upper guide block 42Y to be as wide as possible. When sliding the unit 9 using the lateral unit 4, the first upper guide block 42X and the second upper guide block 42Y can be positioned in the most advantageous position. This makes it possible to suppress tilting of the upper slide unit 41 and thus the slid unit 9.

[0064] Similarly, in the ceiling transport vehicle 1, the lower guide block holder 48 holds the position of the first lower guide block 44X at one end of the upper slide section 41 and the lower slide section 43 in the lateral direction, and holds the position of the second lower guide block 44Y at the other end of the upper slide section 41 and the lower slide section 43 in the lateral direction. This allows the distance between the first lower guide block 44X and the second lower guide block 44Y to be as wide as possible. When sliding the unit 9 using the lateral unit 4, the first lower guide block 44X and the second lower guide block 44Y can be positioned in the most advantageous position. This prevents the lower slide section 43 from tilting, making it possible to prevent the slid unit 9 from tilting.

[0065] In the ceiling transport vehicle 1, the lateral unit 4 has an upper slide section 41, an upper guide block 42, and an upper guide block holding section 45, as well as a lower slide section 43, a lower guide block 44, and a lower guide block holding section 48. By adopting such a multiple-stage configuration vertically, it is possible to easily increase the sliding distance (stroke) of the lateral unit 4.

[0066] In the ceiling transport vehicle 1, the lateral unit 4 slides the unit 9 laterally to both one side and the other. In this configuration, since the lateral positions of the upper guide block 42 and the lower guide block 44 are indefinite, the positional relationship is maintained by the upper guide block holding portion 45 and the lower guide block holding portion 48, which has the remarkable effect of suppressing changes in the angle at which the upper slide portion 41 and the lower slide portion 43 tilt more than expected.

[0067] Although one embodiment has been described above, one aspect of the present invention is not limited to the above embodiment, and various modifications are possible without departing from the spirit of one aspect of the invention.

[0068] In the above embodiment, multiple upper guide blocks 42 are provided, including a first upper guide block 42X and a second upper guide block 42Y. However, the number of upper guide blocks 42 is not limited and may be one, three, or more. Similarly, the number of lower guide blocks 44 is not limited and may be one, three, or more. For example, as shown in FIG. 5, a lateral unit 104 according to a modified example may be provided with one undivided upper guide block 142 and one undivided lower guide block 144. The upper guide block 142 and the lower guide block 144 have a shape that is elongated in the lateral direction (e.g., a shape whose longitudinal dimension is at least twice the lateral dimension). In this case, as shown in the figure, stoppers 61C, 61D, 62C, and 62D and second magnetic members 47C, 47D, 50C, and 50D may not be provided.

[0069] In the above embodiment and modified examples, the first magnetic members 46X and 46Y are attracted to the second magnetic members 47A to 47D through a gap, but this is not limiting. The first magnetic members 46X and 46Y may be attracted to the second magnetic members 47A to 47D via a protective member that protects the second magnetic members 47A to 47D. Similarly, the first magnetic members 49X and 49Y are attracted to the second magnetic members 50A to 50D through a gap, but this is not limiting. The first magnetic members 49X and 49Y may be attracted to the second magnetic members 50A to 50D via a protective member that protects the second magnetic members 50A to 50D. In this case, the first magnetic members 46X, 46Y, 49X, and 49Y do not come into direct contact with the second magnetic members 47A to 47D and 50A to 50D, thereby preventing damage to these members. The protective member is not particularly limited, and various known members may be used.

[0070] In the above embodiment and modified examples, the upper guide block holding portion 45 and the lower guide block holding portion 48 use magnetic force to hold the positions of the upper guide block 42 and the lower guide block 44, but this is not limiting. The upper guide block holding portion 45 and the lower guide block holding portion 48 may also use the elastic force of an elastic body such as a spring to hold the positions of the upper guide block 42 and the lower guide block 44.

[0071] The components in the above embodiments or modifications are not limited to the materials and shapes described above, and various materials and shapes can be applied. The components in the above embodiments or modifications can be applied as desired to the components in other embodiments or modifications. Some of the components in the above embodiments or modifications can be omitted as appropriate without departing from the spirit of one aspect of the present invention.

[0072] The constituent elements of one aspect of the present invention will be described below. <Invention 1> a slide mechanism that slides a unit including an article holding portion that holds an article along a first direction perpendicular to the traveling direction; The slide mechanism is a slide portion that moves along the first direction relative to the transport vehicle body; a guide block provided between the transport vehicle body and the slide portion, the guide block being slidable along the first direction relative to the transport vehicle body and the slide portion; A ceiling transport vehicle having a guide block holding section that holds the position of the guide block so that the positional relationship between the guide block and either the transport vehicle body or the slide section is maintained when the slide section moves. <Invention 2> The guide block holding portion is a first magnetic member provided on the guide block and including a magnet or a magnetic body; The ceiling transport vehicle according to invention 1, further comprising: a second magnetic member provided on at least one of the transport vehicle body and the slide portion, the second magnetic member including a magnet or a magnetic body that is attracted to the first magnetic member. <Invention 3> The ceiling transport vehicle according to invention 2, wherein the first magnetic member is attracted to the second magnetic member via a gap or a protective member while the guide block is held in position. <Invention 4> The guide block is provided in plurality, The ceiling transport vehicle according to any one of the first to third aspects of the present invention, wherein the guide block holding section biases at least one of the plurality of guide blocks in a direction away from the other guide blocks adjacent to the guide block in question. <Invention 5> The guide blocks include a first guide block and a second guide block, The guide block holding portion is The position of the first guide block is maintained at one end side of at least one of the transporting vehicle body and the slide portion in the first direction, The ceiling transport vehicle according to invention 4, wherein the position of the second guide block is maintained on the other end side of at least one of the transport vehicle body and the slide portion in the first direction. <Invention 6> The slide mechanism is Another sliding portion that moves along the first direction relative to the sliding portion; another guide block provided between the slide portion and the other slide portion and slidable along the first direction relative to each of the slide portion and the other slide portion; An overhead transport vehicle as described in any one of Inventions 1 to 5, having an other guide block holding portion that holds the position of the other guide block so that the positional relationship between either the slide portion or the other slide portion and the other guide block is maintained when the other slide portion moves. <Invention 7> 7. The ceiling transport vehicle according to any one of claims 1 to 6, wherein the slide mechanism slides the unit to both one side and the other side in the first direction. [Explanation of symbols]

[0073] 1...Ceiling transport vehicle, 4,104...Lateral unit (slide mechanism), 7...Holding unit (article holding section), 9...Unit, 15...Center frame (transport vehicle body), 41...Upper slide section (slide section), 42,142...Upper guide block (guide block), 42X...First upper guide block (first guide block), 42Y...Second upper guide block (second guide block), 43...Lower slide section (other slide section), 4 4,144...lower guide block (other guide block), 44X...first lower guide block, 44Y...second lower guide block, 45...upper guide block holding portion (guide block holding portion), 46X, 46Y, 49X, 49Y...first magnetic member, 47A, 47B, 47C, 47D, 50A, 50B, 50C, 50D...second magnetic member, 48...lower guide block holding portion (other guide block holding portion), 200...FOUP (article).

Claims

1. a slide mechanism that slides a unit including an article holding portion that holds an article along a first direction perpendicular to the traveling direction; The slide mechanism is a slide portion that moves along the first direction relative to the transport vehicle body; a guide block provided between the transport vehicle body and the slide portion, the guide block being slidable along the first direction relative to the transport vehicle body and the slide portion; a guide block holding section that holds the position of the guide block so that a positional relationship between the guide block and either the transport vehicle body or the slide section is maintained when the slide section moves, The guide block holding portion is a first magnetic member provided on the guide block and including a magnet or a magnetic substance; a second magnetic member provided on at least one of the transport vehicle body and the slide portion, the second magnetic member including a magnet or a magnetic body that is attracted to the first magnetic member.

2. The ceiling transport vehicle according to claim 1 , wherein the first magnetic member is attracted to the second magnetic member via a gap or a protective member while the guide block is held in position.

3. The guide block is provided in plurality, The ceiling transport vehicle according to claim 1 , wherein the guide block holding portion biases at least one of the plurality of guide blocks in a direction away from the other guide blocks adjacent to the guide block in question.

4. The guide blocks include a first guide block and a second guide block, The guide block holding portion is The position of the first guide block is maintained at one end side of at least one of the transporting vehicle body and the slide portion in the first direction, The ceiling transport vehicle according to claim 3 , wherein the position of the second guide block is maintained at the other end side of at least one of the transport vehicle body and the slide portion in the first direction.

5. The slide mechanism is Another sliding portion that moves along the first direction relative to the sliding portion; another guide block provided between the slide portion and the other slide portion and slidable along the first direction relative to each of the slide portion and the other slide portion; The ceiling transport vehicle as described in claim 1, further comprising: an other guide block holding portion that holds the position of the other guide block so that the positional relationship between either the slide portion or the other slide portion and the other guide block is maintained when the other slide portion moves.

6. The ceiling transport vehicle according to claim 1 , wherein the slide mechanism slides the unit to both one side and the other side in the first direction.

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