Fine Metal Mask

Abstract

One embodiment of a fine metal mask includes a base sheet, a mask sheet formed on the base sheet and having a pattern area in which cells are formed, and a cutting area formed between the base sheet and the mask sheet, and the cutting area may include a plurality of cutting lines and a plurality of bridges arranged at both ends of each of the plurality of cutting lines and spaced apart from each other, connecting the base sheet and the mask sheet.

Description

[Technical Field]

[0001] The present invention relates to fine metal masks, and more particularly to fine metal masks used in the manufacture of display elements. [Background technology]

[0002] The content described herein merely provides background information regarding the present invention and may not constitute prior art.

[0003] Display elements, such as OLED elements, use organic materials as light-emitting layers, forming multiple organic layers between a lower electrode and an upper electrode, and utilizing the principle that when a voltage is applied between the lower electrode and the upper electrode, electrons and holes are injected from the negative electrode and positive electrode and recombine in the organic layers to generate light.

[0004] When depositing organic multilayer films on a transparent insulating substrate to manufacture OLED devices, a fine metal mask (FMM), or shadow mask, is generally used to deposit the organic multilayer film only on the area of ​​the substrate where the device will be formed, and to prevent deposition of the multilayer film on other areas of the substrate. These shadow masks have a significant impact on the quality and overall yield of OLED devices, so the importance of shadow masks is becoming increasingly important.

[0005] The fine metal mask is formed with a mask sheet used in the manufacture of display elements, which can be fabricated separately from the fine metal mask.

[0006] A patterned area is formed on the mask sheet, with a number of spaced apart cells formed in the patterned area, and a trim or cut line is formed around the mask sheet to separate the mask sheet from the fine metal mask.

[0007] The cutting lines are lines that are cut using a laser cutting device or the like in the mask manufacturing process, so that when cut along the cutting lines, the mask sheet can be separated from the fine metal mask.

[0008] On the other hand, fine metal masks undergo a multi-stage manufacturing process, and as they move from one process to another, they can be wound up on a roller device or the like.

[0009] Therefore, the fine metal mask may bend or deform during the manufacturing process, and since the fine metal mask is formed entirely of a thin film, such deformation may cause damage.

[0010] In particular, if the mask sheet attached to the fine metal mask is damaged, this can lead to product defects. Therefore, a solution is needed that can prevent damage to the mask sheet due to deformation of the fine metal mask during the manufacturing process. Summary of the Invention [Problem to be solved by the invention]

[0011] SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a fine metal mask having a structure that can suppress breakage due to deformation during the manufacturing process.

[0012] Another object of the present invention is to provide a fine metal mask having a structure that can suppress damage to the mask sheet even when the fine metal mask is deformed.

[0013] The objects of the present invention are not limited to those mentioned above, and other objects and advantages of the present invention not mentioned above can be understood from the following description and can be more clearly understood from the examples of the present invention. Furthermore, it can be easily understood that the objects and advantages of the present invention can be achieved by the means and combinations thereof set forth in the claims. [Means for solving the problem]

[0014] One example of a fine metal mask includes a base sheet, a mask sheet formed on the base sheet and having a pattern area in which cells are formed, and a cutting area formed between the base sheet and the mask sheet, and the cutting area may include a plurality of cutting lines and a plurality of bridges arranged at both ends of each of the plurality of cutting lines, spaced apart from each other, connecting the base sheet and the mask sheet.

[0015] The cutting lines may be provided to penetrate the fine metal mask.

[0016] The cutting lines may be formed by half-etching the fine metal mask.

[0017] One embodiment of the fine metal mask may further include a slit hole whose length is arranged parallel to the fine metal mask and separates the base sheet and the mask sheet, and a clamping hole arranged at a position spaced apart from the slit hole.

[0018] The cutting region may include a first region extending from the slit hole and formed so that its length is parallel to the length of the slit hole, a second region extending from the end of the first region and formed so that its length intersects the length of the first region, a third region extending from the clamping hole and arranged to intersect with the end of the second region and formed so that its length intersects the length of the second region, and a fourth region extending from the end of the second region and the third region and formed so that its length is parallel to the length of the second region and intersects the length of the third region.

[0019] One embodiment of the fine metal mask may further include a first line that is arranged to penetrate the base sheet, extends from the first region, and has a length that is parallel to the length of the first region and intersects the length of the second region.

[0020] The cutting lines provided in the first and second regions may include bent portions formed by bending the ends of the cutting lines to extend the length of the bridge.

[0021] The bridge may have half-etched lines formed thereon, the ends of which are connected to adjacent bends.

[0022] In the first and second regions, the width of the cutting line may be greater than the width of the bridge.

[0023] In the third and fourth regions, the width of the cutting line and the width of the bridge may be the same length.

[0024] Another embodiment of the fine metal mask may further include a second line that is arranged to penetrate the base sheet, extends from the first region, has a length direction parallel to the length direction of the first region and intersects the length direction of the second region, and a third line that is arranged to penetrate the base sheet, extends from the third region, has a length direction parallel to the length direction of the third region and intersects the length direction of the second region.

[0025] In the first and second regions, the width of the cutting line may be greater than the width of the bridge.

[0026] In the third region, the width of the cutting line may be smaller than the width of the bridge.

[0027] In the fourth region, the width of the cutting line and the width of the bridge may be the same length. [Effects of the Invention]

[0028] In the fine metal mask according to the present invention, the first, second, and third lines can reduce the influence of deformation between the base sheet and the mask sheet, thereby effectively preventing the mask sheet from being deformed and damaged due to deformation of the base sheet.

[0029] Furthermore, in the fine metal mask according to the present invention, the bent portions and half-etching lines can effectively prevent the mask sheet from being deformed and damaged due to deformation of the base sheet.

[0030] In addition, in the fine metal mask according to the present invention, the cutting lines, which are relatively wider than the bridges, can reduce the influence of deformation between the base sheet and the mask sheet, thereby effectively preventing the mask sheet from being deformed and damaged due to deformation of the base sheet.

[0031] The above-mentioned effects and specific effects of the present invention will be described in conjunction with the following description of the preferred embodiment of the invention. [Brief explanation of the drawings]

[0032] [Figure 1] FIG. 1 is a plan view showing a fine metal mask according to an embodiment. [Figure 2] 2 is a plan view showing a mask sheet separated from the fine metal mask of FIG. 1. FIG. [Figure 3] FIG. 10 is a plan view showing a fine metal mask according to another embodiment. [Figure 4] FIG. 4 is a diagram showing part A of FIG. 3. [Figure 5] FIG. 4 is a diagram showing part B of FIG. 3. [Figure 6] FIG. 10 is a plan view showing a fine metal mask according to still another embodiment. [Figure 7] FIG. 7 is a diagram showing part C of FIG. 6. [Figure 8] FIG. 7 is a diagram showing part D in FIG. 6. DETAILED DESCRIPTION OF THE INVENTION

[0033] The above-mentioned objects, features, and advantages will be described in detail below with reference to the accompanying drawings, so that those skilled in the art can easily implement the technical concept of the present invention. In describing the present invention, if a detailed description of known technologies relating to the present invention is deemed to obscure the gist of the present invention, the detailed description will be omitted. Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The same reference numerals in the drawings are used to indicate the same or similar components.

[0034] Although terms such as "first" and "second" are used to indicate various components, it is understood that these components are not limited by these terms. These terms are used merely to distinguish one component from another, and unless otherwise specified, a first component may also be a second component.

[0035] Throughout the specification, unless otherwise specified, each element may be singular or plural.

[0036] As used herein, singular expressions include plural expressions unless the context clearly dictates otherwise. Terms such as "comprise" or "include" in this application should not be interpreted as including all of the multiple components or multiple steps described in the specification, but should be interpreted as meaning that some of the components or some of the steps may not be included, or that additional components or steps may be included.

[0037] In the entire specification, "A and / or B" means A, B or A and B unless otherwise specified, and "C to D" means C or more and D or less unless otherwise specified.

[0038] FIG. 1 is a plan view showing a fine metal mask according to one embodiment. FIG. 2 is a plan view showing a mask sheet 200 separated from the fine metal mask of FIG. 1. The fine metal mask may be made of a metal material and formed in the shape of a thin film plate. The fine metal mask according to one embodiment may include a base sheet 100, a mask sheet 200, and a cutting region 300.

[0039] The base sheet 100 can be used to manufacture the mask sheet 200. The mask sheet 200 can be manufactured in a state where it is attached to the base sheet 100. The mask sheet 200 and the base sheet 100 are integrally formed, and then the mask sheet 200 can be separated from the base sheet 100 to complete the manufacturing process.

[0040] The mask sheet 200 may be formed on the base sheet 100 and have a pattern area 210 where cells are to be formed. The mask sheet 200 can be used to fabricate display elements. After fabrication of the fine metal mask is completed, the mask sheet 200 can be separated from the base sheet 100.

[0041] The pattern region 210 may have, for example, a rectangular shape. The cells formed in the pattern region 210 may have, for example, a mesh shape, and a masking process may be performed to manufacture a display element using the cells.

[0042] A cutting region 300 is formed between the base sheet 100 and the mask sheet 200, and after the production of the fine metal mask is completed, the mask sheet 200 can be cut in the cutting region 300 to complete the production into the shape shown in Figure 2.

[0043] The fine metal mask according to one embodiment may further include slit holes 400 and clamping holes 500 .

[0044] The slits 400 are arranged such that the length direction is parallel to the fine metal mask, and can separate the base sheet 100 and the mask sheet 200. The slits 400 may be provided in pairs.

[0045] A portion of the mask sheet 200 can be manufactured by being separated from the base sheet 100 from the beginning by the slits 400. Therefore, after the manufacture of the fine metal mask is completed, the worker can separate the mask sheet 200 by cutting only the portion where the cutting region 300 is formed. Therefore, the slits 400 make it easier to separate the mask sheet 200 and reduce damage to the mask sheet 200 during the cutting operation.

[0046] The clamping holes 500 may be disposed at positions spaced apart from the slit holes 400 and may be formed, for example, as through-holes having a curved portion. After separating the mask sheet 200 from the base sheet 100, a clamping tool may be inserted into the clamping holes 500 to fix the mask sheet 200, and then a masking process may be performed.

[0047] The fine metal mask undergoes a multi-stage manufacturing process, and in order to move from one process to another, the fine metal mask may be wound up on a roller device or the like.

[0048] Therefore, the fine metal mask may bend or deform during the manufacturing process, and since the fine metal mask is formed entirely of a thin film, such deformation may cause damage.

[0049] In particular, if the mask sheet 200 attached to the fine metal mask is damaged, this can lead to product defects. Below, we will specifically describe the structure of a fine metal mask that can prevent the mask sheet from being damaged due to deformation such as bending of the fine metal mask during the manufacturing process.

[0050] Fig. 3 is a plan view showing a fine metal mask according to another embodiment, Fig. 4 shows part A in Fig. 3, and Fig. 5 shows part B in Fig. 3.

[0051] The cutting region 300 may include a cutting line 310 and a bridge 320. A plurality of cutting lines 310 may be provided in the cutting region 300. The cutting lines 310 may be provided spaced apart from each other by a bridge 320 of each cutting line 310.

[0052] The cutting lines 310 may be connected to the slit holes 400. When the mask sheet 200 is separated from the base sheet 100, the mask sheet 200 is separated along the cutting lines 310, so the cutting lines 310 may have a shape that, together with the slit holes 400, defines the outer shape of the completed mask sheet 200.

[0053] According to one embodiment, the cutting lines 310 may be formed to penetrate the fine metal mask. When separating the mask sheet 200, the cutting lines 310 having a penetrating structure cut only the bridges 320 aligned with the cutting lines 310, so that the mask sheet 200 can be separated from the base sheet 100.

[0054] In another embodiment, the cutting lines 310 may be formed by half-etching the fine metal mask. When separating the mask sheet 200, the cutting lines 310 having a half-etched structure are easily cut at the cutting lines 310 having a relatively thin thickness, and the bridges 320 are also cut, so that the mask sheet 200 can be separated from the base sheet 100.

[0055] A plurality of bridges 320 are provided at both ends of each of the cutting lines 310, spaced apart from one another, to connect the base sheet 100 and the mask sheet 200. The bridges 320 connect the base sheet 100 and the mask sheet 200 to each other, and can prevent the mask sheet 200 from easily separating from the base sheet 100 even if an external force is applied during the manufacturing process of the fine metal mask.

[0056] The cutting region 300 may be formed by alternating a plurality of cutting lines 310 and bridges 320. When separating the mask sheet 200, the bridges 320 can be cut to complete the separation of the mask sheet 200.

[0057] The cutting regions 300 may be formed symmetrically in a direction intersecting the longitudinal direction of the fine metal sheet with the clamping hole 500 as the center. In addition, since the clamping holes 500 are formed at both ends of the fine metal sheet in the longitudinal direction, the cutting regions 300 may be formed symmetrically with respect to each other with the center of the fine metal sheet as the reference.

[0058] 1 and 3, the cutting region 300 may include a first region 301, a second region 302, a third region 303, and a fourth region 304. Each of the first region 301 to the fourth region 304 may have a structure in which cutting lines 310 and bridges 320 are alternately arranged.

[0059] The first region 301 may be formed to extend from the slit hole 400 and have a length direction parallel to the length direction of the slit hole 400. The second region 302 may be formed to extend from an end of the first region 301 and have a length direction intersecting the length direction of the first region 301.

[0060] The third region 303 may be formed so as to extend from the clamping hole 500 and intersect with the end of the second region 302, and so as to have a length direction that intersects with the length direction of the second region 302.

[0061] The fourth region 304 may be formed so as to extend from the ends of the second region 302 and the third region 303, with its length direction being parallel to the length direction of the second region 302 and intersecting the length direction of the third region 303.

[0062] 4, the fine metal mask may further include first lines 610 extending from the first region 301, with the length direction parallel to the length direction of the first region 301 and intersecting the length direction of the second region 302. The first lines 610 may be provided in pairs.

[0063] The first lines 610 may be formed to penetrate the fine metal mask. The first lines 610 may be formed on the base sheet 100 to reduce the influence of deformation between the base sheets 100 separated by the first lines 610.

[0064] In addition, the first lines 610 can reduce the influence of mutual deformation between the base sheet 100 and the mask sheet 200. Therefore, deformation of the base sheet 100 can effectively prevent the mask sheet 200 from being deformed and damaged.

[0065] The cutting line 310 provided in the first region 301 and the second region 302 may include a bending portion 311 formed to be bent at the end of the cutting line 310, thereby extending the length (L1) of the bridge 320.

[0066] 4 and 5, the bent portion 311 may be formed to extend from the cutting line 310 and may have a width greater than other portions of the cutting line 310. The bent portion 311 may increase the length (L1) of the bridge 320.

[0067] Meanwhile, the bridge 320 may have half-etching lines 321 formed at both ends thereof, the half-etching lines 321 being connected to adjacent bent portions 311. The half-etching lines 321 are formed relatively thin compared to other portions of the bridge 320, and therefore, when the bridge 320 is cut, the half-etching lines 321 are cut cleanly, thereby reducing the occurrence of product defects such as breakage of the mask sheet 200.

[0068] The increased length of the bridge 320 can reduce the influence of deformation between the base sheet 100 and the mask sheet 200 connected by the bridge 320. Furthermore, if excessive deformation occurs in the bridge 320, cutting occurs at the half-etching line 321, thereby preventing the deformation occurring in the base sheet 100 from being transmitted to the mask sheet 200 via the bridge 320.

[0069] Therefore, the bent portions 311 and the half-etching lines 321 can effectively prevent the mask sheet 200 from being deformed and damaged due to deformation of the base sheet 100 .

[0070] In the first region 301 and the second region 302, the width (W1) of the cutting line 310 may be greater than the width (W2) of the bridge 320. The cutting line 310 having a width relatively greater than that of the bridge 320 can reduce the influence of mutual deformation between the base sheet 100 and the mask sheet 200. Therefore, deformation and breakage of the mask sheet 200 due to deformation of the base sheet 100 can be effectively prevented.

[0071] In the third region 303 and the fourth region 304, the width of the cutting line 310 and the width of the bridge 320 may be the same. In the first region 301 and the fourth region 304, if the fine metal sheet is deformed by an external force, the bridge 320 may be cut. In this case, even if the bridge 320 is cut, the manufacturing process of the fine metal sheet can be continued.

[0072] However, the mask sheet 200 and the base sheet 100 must remain bonded at least partially until the step of separating the mask sheet 200 is performed. Therefore, it is necessary to prevent the bridges 320 from being cut by an external force in the third region 303 and the fourth region 304 until the step of separating the mask sheet 200 is performed.

[0073] For this reason, in the third region 303 and the fourth region 304, the widths of the bridges 320 and the cutting lines 310 are the same, so that the areas occupied by the bridges 320 and the cutting lines 310 are the same, thereby making it possible for the bridges 320 to have a robust structure.

[0074] With this structure, in the third region 303 and the fourth region 304, it is possible to prevent the bridges 320 from being cut by an external force before the mask sheet 200 is separated.

[0075] Fig. 6 is a plan view showing a fine metal mask according to yet another embodiment. Fig. 7 shows part C of Fig. 6. Fig. 8 shows part D of Fig. 6. In the following, explanations of parts that overlap with those described above will be omitted.

[0076] The fine metal mask may further include second lines 620 and third lines 630. The second lines 620 and the third lines 630 may each be provided in pairs. The second lines 620 and the third lines 630 may be provided so as to penetrate the fine metal mask.

[0077] The second line 620 may be arranged to penetrate the base sheet 100, extend from the first region 301, and have a length direction parallel to the length direction of the first region 301 and intersect with the length direction of the second region 302.

[0078] The third line 630 may be arranged to penetrate the base sheet 100, extend from the third region 303, and have a length direction parallel to the length direction of the third region 303 and intersect with the length direction of the second region 302.

[0079] The second line 620 and the third line 630 are formed on the base sheet 100, and can reduce the influence of deformation between the base sheets 100 separated by the second line 620 and the third line 630.

[0080] In addition, the second lines 620 and the third lines 630 can reduce the influence of mutual deformation between the base sheet 100 and the mask sheet 200. Therefore, deformation of the base sheet 100 can effectively prevent the mask sheet 200 from being deformed and damaged.

[0081] In the first region 301 and the second region 302, the width (W1) of the cutting line 310 may be greater than the width (W2) of the bridge 320. The cutting line 310 having a width relatively greater than that of the bridge 320 can reduce the influence of mutual deformation between the base sheet 100 and the mask sheet 200. Therefore, deformation and breakage of the mask sheet 200 due to deformation of the base sheet 100 can be effectively prevented.

[0082] In the third region 303, the width of the cutting line 310 may be shorter than the width of the bridge 320. In the fourth region 304, the width of the cutting line 310 and the width of the bridge 320 may be the same length.

[0083] As described above, the mask sheet 200 and the base sheet 100 must remain bonded at least partially until the step of separating the mask sheet 200 is performed. Therefore, it is necessary to prevent the bridges 320 from being cut by an external force in the third region 303 and the fourth region 304 until the step of separating the mask sheet 200 is performed.

[0084] For this reason, in the third region 303, the width of the bridge 320 is relatively longer than the cutting line 310, thereby enabling the bridge 320 to have a robust structure. Also, in the fourth region 304, the widths of the bridge 320 and the cutting line 310 are the same, thereby enabling the area occupied by the bridge 320 and the cutting line 310 to be the same, thereby enabling the bridge 320 to have a robust structure.

[0085] This structure makes it possible to prevent the bridges 320 from being cut by an external force in the third region 303 and the fourth region 304 before the mask sheet 200 is separated.

[0086] Meanwhile, the first to fourth regions 301 to 304 shown in FIGS. 3 and 6 can be combined with one another in various cases to create even more various embodiments.

[0087] Although the present invention has been described above with reference to illustrative drawings, the present invention is not limited to the embodiments and drawings disclosed in this specification, and various modifications within the scope of the technical concept of the present invention will be readily apparent to those skilled in the art. Furthermore, even if the effects of the configuration of the present invention are not explicitly described and explained in the above description of the embodiments of the present invention, it is natural that the effects that can be predicted by the configuration should also be recognized.

Claims

1. A base sheet and a mask sheet formed on the base sheet and having a pattern area in which cells are formed; a cutting area formed between the base sheet and the mask sheet; Including, The cutting region is A plurality of cutting lines are provided; a plurality of bridges spaced apart from each other and disposed at both ends of each of the plurality of cutting lines, connecting the base sheet and the mask sheet; In fine metal masks, a slit hole whose length direction is arranged in a direction parallel to the fine metal mask and which separates the base sheet and the mask sheet; a clamping hole disposed at a position spaced apart from the slit hole; Further comprising: The cutting region is a first region extending from the slit and formed so that the length direction is parallel to the length direction of the slit; a second region extending from an end of the first region and formed so that the length direction thereof intersects with the length direction of the first region; a third region extending from the clamping hole, disposed so as to intersect with an end of the second region, and formed so that a length direction thereof intersects with a length direction of the second region; a fourth region extending from the end of the second region and the third region, the fourth region being formed so that the length direction is parallel to the length direction of the second region and intersects with the length direction of the third region; Including fine metal masks.

2. The cutting line is provided to penetrate the fine metal mask. The fine metal mask according to claim 1 .

3. the cutting lines are formed by half-etching the fine metal mask. The fine metal mask according to claim 1 .

4. a first line extending from the first region and penetrating the base sheet, the first line having a length direction parallel to the length direction of the first region and intersecting the length direction of the second region; The fine metal mask according to claim 1 .

5. The cutting lines provided in the first region and the second region include: a bending portion formed to be bent at an end of the cutting line and extending the length of the bridge; The fine metal mask according to claim 4.

6. The bridge has: A half-etching line is formed, the ends of which are connected to the adjacent bent portions. The fine metal mask according to claim 5 .

7. In the first region and the second region, The width of the cutting line is longer than the width of the bridge. The fine metal mask according to claim 4.

8. In the third region and the fourth region, The width of the cutting line and the width of the bridge are the same length. The fine metal mask according to claim 4.

9. a second line extending from the first region and penetrating the base sheet, the second line having a length direction parallel to the length direction of the first region and intersecting the length direction of the second region; a third line provided to penetrate the base sheet, extending from the third region, the length direction of which is parallel to the length direction of the third region and intersects with the length direction of the second region; Further comprising: The fine metal mask according to claim 1 .

10. In the first region and the second region, The width of the cutting line is longer than the width of the bridge. The fine metal mask according to claim 9.

11. In the third region, The width of the cutting line is shorter than the width of the bridge. The fine metal mask according to claim 9.

12. In the fourth region, The width of the cutting line and the width of the bridge are the same length. The fine metal mask according to claim 9.

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