High-frequency power supply device

Abstract

To appropriately perform matching operation and frequency modulation control.SOLUTION: In a high frequency power unit according to the present disclosure, a first power supply outputs a first high frequency voltage having a first fundamental frequency. A second power supply outputs a second high frequency voltage having a second fundamental frequency. The second fundamental frequency is lower than the first fundamental frequency. A first matching section is connected between the first power supply and a load. The first matching section performs first matching operation in a state in which intermodulation distortion occurs. The intermodulation distortion occurs due to simultaneous supply of first high frequency power and second high frequency power to the load. The first matching operation is operation to match an impedance of the first power supply and an impedance of the load with each other. The first power supply performs frequency modulation control after completion of the first matching operation. The frequency modulation control is control of modulating the frequency of the first high frequency voltage by a modulation signal and outputting the first high frequency voltage as a modulation wave. The modulation signal has the same frequency as the second fundamental frequency.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a high frequency power supply device. [Background technology]

[0002] A high-frequency power supply device used in a plasma processing apparatus has two high-frequency power supplies (a first power supply and a second power supply), each of which outputs a high-frequency voltage with a different fundamental frequency (the frequency of the fundamental wave) to a load. For example, the first power supply supplies a first high-frequency power to the load by outputting a first high-frequency voltage having a first fundamental frequency F1 suitable for generating plasma. The second power supply supplies a second high-frequency power to the load by outputting a second high-frequency voltage having a second fundamental frequency F2 suitable for accelerating ions (first fundamental frequency F1 > second fundamental frequency F2) (see Patent Documents 1 to 3). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2018-536295 [Patent Document 2] Japanese Patent Application Laid-Open No. 2017-188434 [Patent Document 3] U.S. Patent No. 10,304,669 Summary of the Invention [Problem to be solved by the invention]

[0004] In such a case, intermodulation distortion (IMD) occurs, causing a phenomenon in which reflected power fluctuates on the first power supply side according to the period of the second fundamental frequency F2. A technique for performing frequency modulation control on the first power supply to reduce the reflected power caused by this intermodulation distortion is known. In this case, if a matching operation for matching the impedance of the first power supply with the impedance of the load and frequency modulation control are performed simultaneously in a high-frequency power supply device, the matching operation and frequency modulation control may interfere with each other and may not be performed properly.

[0005] The present disclosure provides a high frequency power supply device that can appropriately perform both matching operation and frequency modulation control. [Means for solving the problem]

[0006] A high-frequency power supply device according to the present disclosure includes a first power supply, a second power supply, a first matching unit, and a second matching unit. The first power supply supplies a first high-frequency power to a load by outputting a first high-frequency voltage. The first high-frequency voltage has a first fundamental frequency. The second power supply supplies a second high-frequency power to the load by outputting a second high-frequency voltage. The second high-frequency voltage has a second fundamental frequency. The second fundamental frequency is lower than the first fundamental frequency. The first matching unit is connected between the first power supply and the load. The second matching unit is connected between the second power supply and the load. The first matching unit performs a first matching operation in a state in which intermodulation distortion occurs. The intermodulation distortion occurs when the first high-frequency power and the second high-frequency power are simultaneously supplied to the load. The first matching operation is an operation of matching the impedance of the first power supply with the impedance of the load. The first power supply performs frequency modulation control after the first matching operation is completed. The frequency modulation control is a control in which the first high-frequency voltage is frequency-modulated with a modulation signal and output as a modulated wave. The modulation signal has the same frequency as the second fundamental frequency. The second matching unit performs a third matching operation to match the impedance of the second power supply with the impedance of the load. The first matching unit has a function of calculating the magnitude of the reflection coefficient or the magnitude of the reflected power based on information detected by the first matching unit. The first matching unit considers the first matching operation to be complete when the calculated magnitude of the reflection coefficient or the magnitude of the reflected power becomes equal to or less than a predetermined threshold. The second matching unit has a function of calculating the magnitude of the reflection coefficient or the magnitude of the reflected power based on information detected by the second matching unit. The second matching unit considers the third matching operation to be complete when the calculated magnitude of the reflection coefficient or the magnitude of the reflected power becomes equal to or less than a predetermined threshold. [Effects of the Invention]

[0007] According to the high frequency power supply device of the present disclosure, it is possible to appropriately perform both matching operation and frequency modulation control. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a block diagram showing the configuration of a high-frequency power supply device according to an embodiment. [Figure 2] FIG. 3 is a sequence diagram showing a schematic operation of the high frequency power supply device according to the embodiment. [Figure 3] FIG. 4 is a sequence diagram showing a detailed operation of the high frequency power supply device according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of a high frequency power supply device according to the present disclosure will be described with reference to the drawings.

[0010] (Embodiment) A high-frequency power supply device according to an embodiment supplies high-frequency power to a load (e.g., a plasma processing apparatus) by outputting a high-frequency voltage in the RF (Radio Frequency) band. This high-frequency power supply device has two high-frequency power supplies (a first power supply and a second power supply), each of which outputs a high-frequency voltage with a different fundamental frequency (also referred to as an output frequency) to the load. For example, the first power supply supplies the first high-frequency power to the load by outputting a first high-frequency voltage having a first fundamental frequency F1 suitable for generating plasma. The second power supply supplies the second high-frequency power to the load by outputting a second high-frequency voltage having a second fundamental frequency F2 suitable for ion acceleration (first fundamental frequency F1 > second fundamental frequency F2).

[0011] When multiple high-frequency powers with different levels are supplied to a load from multiple power sources in this manner, intermodulation distortion can cause the reflected power on the first power source to fluctuate according to the fundamental period (period of the fundamental wave) on the second power source, potentially resulting in high reflected power. To reduce the reflected power, the first power source may perform frequency modulation control on the first high-frequency voltage, and a superposition matching device between the first power source and the load may perform impedance matching. Simultaneous frequency modulation control and impedance matching may interfere with each other, potentially preventing proper operation. Therefore, in this embodiment, the matching operation and frequency modulation control are coordinated as follows to effectively reduce reflected power.

[0012] The high-frequency voltage output from the first power supply and directed toward the load is called the first traveling wave voltage, and the high-frequency voltage reflected from the load and returning to the first power supply is called the first reflected wave voltage. The high-frequency voltage output from the second power supply and directed toward the load is called the second traveling wave voltage, and the high-frequency voltage reflected from the load and returning to the second power supply is called the second reflected wave voltage.

[0013] FIG. 1 is a diagram showing the configuration of a high-frequency power supply device 1. The high-frequency power supply device 1 is applied to a plasma processing device PA. The plasma processing device PA is, for example, a parallel-plate type, and a lower electrode EL1 and an upper electrode EL2 face each other in a chamber CH. A substrate SB to be processed can be placed on the lower electrode EL1. The high-frequency power supply device 1 is electrically connected to the lower electrode EL1. The upper electrode EL2 is electrically connected to ground potential. The chamber CH is connected to a gas supply device (not shown) via an air supply pipe and to a vacuum device (not shown) via an exhaust pipe.

[0014] The high frequency power supply device 1 includes an HF power supply (first power supply) 10, an LF power supply (second power supply) 20, and a superposition matching box 30. The HF power supply 10 outputs a first high frequency voltage (first traveling wave voltage) having a first fundamental frequency F1 to supply a first high frequency power (first traveling wave power) to a load. The first high frequency voltage has a relatively high first fundamental frequency F1 that is suitable for generating plasma. The first fundamental frequency F1 is, for example, 40.68 MHz. The HF power supply 10 is also referred to as a source power supply. Note that the fundamental frequency F1 is not limited to 40.68 MHz and may be, for example, a frequency in the industrial RF (Radio Frequency) band, such as 13.56 MHz or 27.12 MHz.

[0015] The LF power supply 20 supplies a second high frequency power (second traveling wave power) to a load by outputting a second high frequency voltage (second traveling wave voltage) having a second fundamental frequency F2 lower than the first fundamental frequency F1. The second high frequency voltage has a relatively low second fundamental frequency F2 suitable for accelerating ions. The second fundamental frequency F2 is, for example, 400 kHz. The LF power supply 20 is also called a bias power supply. Note that the second fundamental frequency F2 is not limited to 400 kHz and may be another frequency.

[0016] The superposition matching box 30 is electrically connected to the HF power supply 10 and the LF power supply 20, respectively. The superposition matching box 30 is electrically connected between the HF power supply 10 and the LF power supply 20 and the lower electrode EL1. The superposition matching box 30 performs an HF matching operation to match the impedance on the HF power supply 10 side with the impedance on the lower electrode EL1 side, and also performs an LF matching operation to match the impedance on the LF power supply 20 side with the impedance on the lower electrode EL1 side. With the HF matching operation and the LF matching operation performed, the superposition matching box 30 receives a first high frequency power from the HF power supply 10 and a second high frequency power from the LF power supply 20, and supplies the first high frequency power and the second high frequency power superimposed on each other to the lower electrode EL1.

[0017] The high frequency power supply device 1 and the plasma processing apparatus PA are not limited to the configuration shown in Fig. 1. For example, there are various configurations, such as a configuration in which a first high frequency power output from an HF power supply 10 is supplied to an upper electrode EL2 via a superposition matching box 30, and a second high frequency power output from an LF power supply 20 is supplied to a lower electrode EL1 via a superposition matching box 30. The high frequency power supply device 1 can also be used in such other configurations.

[0018] The superposition matching device 30 has an HF matching section (first matching section) 31, an LF matching section (second matching section) 32, and an output sensor 33. The HF matching section 31 is electrically connected between the HF power supply 10 and the lower electrode EL1. The LF matching section 32 is electrically connected between the LF power supply 20 and the lower electrode EL1. The HF matching section 31 performs HF matching operation, and the LF matching section 32 performs LF matching operation.

[0019] The output sensor 33 detects the third forward wave voltage at the output end of the superposition matching network 30 and outputs a forward wave voltage detection signal SG3f as a detection signal, and also detects the third reflected wave voltage at the output end of the superposition matching network 30 and outputs a reflected wave voltage detection signal SG3f as a detection signal. The forward wave voltage detection signal SG3f and the reflected wave voltage detection signal SG3f are output to, for example, an external device (not shown).

[0020] The HF matching unit 31 has a function of calculating the magnitude of the reflection coefficient Γ or the magnitude of the reflected power based on information detected in the HF matching unit 31 when performing HF matching operation. The HF matching unit 31 includes a sensor 311 , an impedance calculation unit 312 , a matching calculation unit 313 , an HF matching network 314 , and a communication unit 315 .

[0021] The sensor 311 detects the first forward wave voltage output from the HF power supply 10 and outputs a forward wave voltage detection signal SG1f as a detection signal, and also detects a first reflected wave voltage reflected from the HF matching network 314 and outputs a reflected wave voltage detection signal SG1r as a detection signal. The forward wave voltage detection signal SG1f and the reflected wave voltage detection signal SG1r are supplied to the impedance calculation unit 312.

[0022] The impedance calculation unit 312 calculates the impedance on the HF power supply 10 side based on the forward wave voltage detection signal SG1f and the reflected wave voltage detection signal SG1r. The impedance calculation unit 312 calculates a reflection coefficient Γ, which is the ratio of the first reflected wave voltage to the first forward wave voltage. The impedance calculation unit 312 supplies the reflection coefficient Γ to the matching calculation unit 313.

[0023] Upon receiving the reflection coefficient Γ, the matching calculation unit 313 calculates an amount of impedance change that will reduce the reflection coefficient Γ. The matching calculation unit 313 controls the HF matching network 314 in accordance with the amount of impedance change, and changes the impedance value of the HF matching network 314. Note that the impedance calculation unit 312 may calculate reflected power instead of the reflection coefficient Γ, and the matching calculation unit 313 may calculate an amount of impedance change that will reduce the reflected power instead of the reflection coefficient Γ.

[0024] As a result, the HF matching unit 31 can determine that the HF matching operation is complete when the magnitude of the calculated reflection coefficient Γ or the magnitude of the reflected wave power becomes equal to or less than a predetermined threshold. This makes it possible to clarify the time when the HF matching operation is complete. In response, the communication unit 315 can transmit a completion notification to the HF power source 10 indicating that the HF matching operation is complete.

[0025] The LF matching section 32 has a function of calculating the magnitude of the reflection coefficient Γ or the magnitude of the reflected power based on information detected in the LF matching section 32 when performing LF matching operation. The LF matching unit 32 includes a sensor 321 , an impedance calculation unit 322 , a matching calculation unit 323 , an LF matching network 324 , and a communication unit 325 .

[0026] The sensor 321 detects the second forward wave voltage output from the LF power supply 20 and outputs a forward wave voltage detection signal SG2f as a detection signal, and also detects the first reflected wave voltage reflected from the HF matching network 314 and outputs a reflected wave voltage detection signal SG2r as a detection signal. The forward wave voltage detection signal SG2f and the reflected wave voltage detection signal SG2r are supplied to the impedance calculation unit 322.

[0027] The impedance calculation unit 322 calculates the impedance on the LF power supply 20 side based on the forward wave voltage detection signal SG2f and the reflected wave voltage detection signal SG2r. The impedance calculation unit 322 calculates a reflection coefficient Γ, which is the ratio of the second reflected wave voltage to the second forward wave voltage. The impedance calculation unit 312 supplies the reflection coefficient Γ to the matching calculation unit 313.

[0028] Upon receiving the reflection coefficient Γ, the matching calculation unit 323 calculates an amount of impedance change that will reduce the reflection coefficient Γ. The matching calculation unit 323 controls the LF matching network 324 in accordance with the amount of impedance change, and changes the impedance value of the LF matching network 324. Note that the impedance calculation unit 322 may calculate reflected power instead of the reflection coefficient Γ, and the matching calculation unit 323 may calculate an amount of impedance change that will reduce the reflected power instead of the reflection coefficient Γ.

[0029] As a result, the LF matching unit 32 can determine that the LF matching operation is complete when the magnitude of the calculated reflection coefficient Γ or the magnitude of the reflected wave power becomes equal to or less than a predetermined threshold. This makes it possible to clarify the time when the LF matching operation is complete. In response, the communication unit 325 can transmit a completion notification to the HF power source 10 indicating that the LF matching operation is complete.

[0030] The HF power supply 10 performs frequency modulation control, modulating the frequency of the first high-frequency voltage with a modulation signal having the same frequency as the second fundamental frequency and outputting the modulated wave. The HF power supply 10 has a function of calculating the magnitude of the reflection coefficient Γ or the magnitude of the reflected wave power based on information detected by the HF power supply 10.

[0031] The HF power supply 10 includes a frequency modulation control block 11, a controller 12, a direct digital combiner (DDS) 13, an amplifier 14, a sensor 15, a wideband detector 16, an averaging unit 17, a power setting unit 18, a subtractor 19, and a communication unit 21. The frequency modulation control block 11 generates a modulated fundamental wave. The modulated fundamental wave has a frequency F2 and a reference amplitude. The frequency modulation control block 11 sets a start phase at which modulation should begin and a frequency deviation amount indicating the degree of modulation for the modulated fundamental wave based on a trigger signal having a timing corresponding to the LF power supply 20, and generates a modulated signal. The modulated signal includes the start phase and frequency deviation amount. The frequency modulation control block 11 supplies the modulated signal to the direct digital combiner 13 as a frequency modulation setting. The direct digital combiner 13 uses the frequency modulation setting (i.e., the modulated signal) and the amplitude setting to generate a modulated wave whose frequency is the same as the second fundamental frequency F2 and supplies the modulated signal to the amplifier 14. The amplifier 14 amplifies the modulated wave and supplies it to the sensor 15 .

[0032] The sensor 15 supplies the modulated wave (traveling wave) output from the amplifier 14 to the superposition matching box 30. The sensor 15 also detects the first travelling wave voltage from the amplifier 14 and outputs a travelling wave voltage detection signal Vf1 as a detection signal, and detects the first reflected wave voltage reflected from the plasma processing apparatus PA side via the superposition matching box 30 and outputs a reflected wave voltage detection signal Vr1 as a detection signal. The sensor 15 supplies the detected travelling wave voltage detection signal Vf1 and reflected wave voltage detection signal Vr1 to the wideband detection box 16.

[0033] The wideband detection unit 16 is a filter that passes desired frequency components, and by performing calculations using, for example, the superheterodyne method and filtering processing, passes the forward wave voltage detection signal Vf2, which is the desired component of the forward wave voltage detection signal Vf1, and the reflected wave voltage detection signal Vr2, which is the desired component of the reflected wave voltage detection signal Vr1, and supplies them to the averaging unit 17.

[0034] The averaging unit 17 calculates the forward wave power Pf based on the forward wave voltage detection signal Vf2, and calculates the reflected wave power Pr based on the reflected wave voltage detection signal Vr2. For example, the forward wave power Pf can be calculated by Vf2^2 / R (R: gain corresponding to the resistance value). The reflected wave power Pr can also be calculated in a similar manner. In the above calculation formula, Vf2 represents the magnitude of the forward wave voltage detection signal Vf2. Of course, a gain is multiplied to convert it into an actual power value. Furthermore, the averaging unit 17 accumulates the calculated forward power Pf and reflected power Pr for a predetermined period. Furthermore, the averaging unit 17 averages the forward power Pf and reflected power Pr for a predetermined period. The averaging unit 17 supplies the average power of the forward power Pf to the subtractor 19. Furthermore, the averaging unit 17 supplies the average power of the forward power Pf and the average power of the reflected power Pr to the frequency modulation control block 11. Note that, although the above example shows a case where power is calculated based on voltage and then averaging is performed, power may also be calculated after averaging the voltage.

[0035] A target power is set in advance in power setting unit 18. Power setting unit 18 supplies the target power to subtractor 19. Subtractor 19 subtracts the average power of forward power Pf from the target power and feeds back the subtraction result to controller 12 as error ΔP. Controller 12 controls the amplitude of the modulated wave in accordance with error ΔP. That is, controller 12 determines the amplitude of the modulated wave in accordance with error ΔP (e.g., so that error ΔP becomes small), and supplies an amplitude setting in accordance with the determined amplitude directly to digital multiplexer 13. For example, if the target power is 1,000 [W] and the average power of the forward power Pf is 950 [W], the target power is 50 [W] short, so the amplitude setting controller 24 controls the amplitude of the modulated wave to increase the forward power Pf supplied to the load. This control of the amplitude of the modulated wave can be performed using known techniques such as PI control or PID control.

[0036] As a result, the frequency modulation control block 11 adjusts the starting phase of the modulated signal and the frequency shift of the modulated wave within their respective predetermined adjustment ranges so that the average power of the reflected wave power Pr is minimized. When the average power of the reflected wave power Pr becomes equal to or less than a predetermined threshold, the frequency modulation control block 11 can determine that the average power of the reflected wave power Pr has been minimized. When the frequency modulation control block 11 determines that the average power of the reflected wave power Pr has been minimized, it can determine that the frequency modulation control has been completed. This makes it possible to clarify the time when the frequency modulation control has been completed. In response, the communication unit 21 can transmit a completion notification to the HF matching unit 31 indicating that the frequency modulation control has been completed.

[0037] Next, the general operation of the high frequency power supply device 1 will be described with reference to Fig. 2. Fig. 2 is a sequence diagram showing the general operation of the high frequency power supply device 1. Fig. 2 shows the correspondence between the operating state of the high frequency power supply device 1 and the operations of the superposition matching box 30 and the HF power supply 10 in chronological order.

[0038] In ST1, both the HF power supply 10 and the LF power supply 20 are stopped, and no power is applied by either the HF power supply 10 or the LF power supply 20. The superposition matching device 30 waits at its initial value (SQ1), and the HF power supply 10 waits at its initial value (SQ7).

[0039] In ST2, the HF power supply 10 generates a first high frequency voltage and starts outputting it to the superposition matching box 30 (SQ8), and power is applied by the HF power supply 10. In response to this, the superposition matching box 30 prepares for matching operation on the HF power supply 10 side (SQ2). At this time, the LF power supply 20 is stopped.

[0040] In ST3, power is applied by both the HF power supply 10 and the LF power supply 20, and IMD (intermodulation distortion) occurs on the HF power supply 10 side. In response, the superposition matching network 30 detects the IMD state and starts matching operations on the HF power supply 10 side (first matching operation) and on the LF power supply 20 side (third matching operation) (SQ3). The superposition matching network 30 detects the waveforms of the forward wave and the reflected wave on each of the HF power supply 10 side and the LF power supply 20 side, calculates the impedance according to the detection results, and starts operating the variable impedance element accordingly while determining the reflection coefficient Γ.

[0041] In ST4, power is applied by both the HF power supply 10 and the LF power supply 20. Although IMD (intermodulation distortion) occurs on the HF power supply 10 side, the superposition matching device 30 performs matching operation. At this time, frequency modulation control by the HF power supply 10 is not being performed, so the matching operation and frequency modulation control do not interfere with each other, and the superposition matching device 30 can perform matching operation. Then, after the matching operation on the HF power supply 10 side and the matching operation on the LF power supply 20 side are in progress (SQ4), the superposition matching device 30 determines that the matching operation is complete when the reflected power (or reflection coefficient Γ) on each of the HF power supply 10 side and the LF power supply 20 side becomes equal to or less than a threshold (SQ5). At this time, the operation of the variable impedance element used for the matching operation on the HF power supply 10 side is stopped (SQ6). In response, the superposition matching device 30 transmits a completion notification to the HF power supply 10 indicating that the matching operation on the HF power supply 10 side has been completed. In response to receiving the completion notification, the HF power supply 10 recognizes that it has been confirmed that post-matching operation on the HF power supply 10 side has stopped (SQ9).

[0042] In ST5, power is applied by both the HF power supply 10 and the LF power supply 20, and IMD (intermodulation distortion) occurs on the HF power supply 10 side, causing frequency modulation control by the HF power supply 10. When the HF power supply 10 starts frequency modulation control (SQ10), it acquires reflected power and performs frequency modulation control while searching for conditions that minimize the reflected power (SQ11). At this time, the matching operation of ST4 has suppressed the reflected power to a certain extent. Furthermore, since the matching operation in the superposition matching device 30 is completed at the end of ST4, there is no interference between the matching operation and the frequency modulation control. This allows frequency modulation control to be performed efficiently. When the reflected power (or reflection coefficient Γ) becomes equal to or less than the threshold, the HF power supply 10 determines that the frequency modulation control is complete (SQ12). In response to this, the HF power supply 10 transmits a completion notification indicating that the frequency modulation control is complete to the superposition matching device 30. In response to receiving the completion notification, the superposition matching device 30 recognizes that the frequency modulation control has been completed (SQ13).

[0043] In ST6, power is applied by both the HF power supply 10 and the LF power supply 20, IMD (intermodulation distortion) is suppressed on the HF power supply 10 side, and matching operation is performed by the superimposed matching device 30. Because the matching state can change due to frequency modulation control, the superimposed matching device 30 performs matching operation again. At this time, the frequency modulation control reduces the reflected wave power due to IMD, so the matching operation can efficiently reduce the reflected wave power due to impedance mismatch. The superimposed matching device 30 calculates the impedance on the HF power supply 10 side (SQ14) and starts matching operation on the HF power supply 10 side (second matching operation) accordingly (SQ15). When the reflected power (or reflection coefficient Γ) becomes equal to or less than a threshold, the matching operation is considered to be complete (SQ16).

[0044] Next, detailed operation of the high frequency power supply device 1 will be described with reference to Fig. 3. Fig. 3 is a sequence diagram showing detailed operation of the high frequency power supply device 1. Fig. 3 shows the operations of the LF power supply 20, the LF matching unit 32, the HF matching unit 31, and the HF power supply 10 in chronological order.

[0045] Before the high frequency power supply device 1 is started, the LF power supply 20, the LF matching unit 32, the HF matching unit 31, and the HF power supply 10 are on standby at their initial values ​​(S1, S4, S11, S8).

[0046] In response to the start-up command of the high frequency power supply device 1, the LF power supply 20 starts generating the second traveling wave voltage and outputting it to the LF matching unit 32 (S2). After this, the LF power supply 20 continuously generates the second traveling wave voltage and outputs it to the LF matching unit 32 (S3).

[0047] When the LF matching unit 32 starts detecting the forward wave voltage detection signal SG2f output from the LF power supply 20, it starts the LF matching operation (third matching operation) (S5). The LF matching unit 32 detects the waveform signal of the second forward wave voltage and the waveform signal of the second reflected wave voltage, and calculates the impedance on the LF power supply 20 side according to the waveform signal of the second forward wave voltage and the waveform signal of the second reflected wave voltage. The LF matching unit 32 calculates the reflected power (or reflection coefficient Γ) according to the impedance on the LF power supply 20 side. The LF matching unit 32 calculates an impedance change amount that reduces the reflected power (or reflection coefficient Γ) and operates the variable impedance element with that impedance change amount. As a result, the LF matching unit 32 performs the LF matching operation (S6). While performing the LF matching operation, the LF matching unit 32 compares the reflected power (or reflection coefficient Γ) with a predetermined threshold. The LF matching unit 32 determines that the LF matching operation is complete when the magnitude of the reflected power (or the reflection coefficient Γ) becomes equal to or less than a predetermined threshold (S7). In response, the LF matching unit 32 transmits a completion notification to the HF power supply 10 indicating that the LF matching operation is complete.

[0048] Meanwhile, in the high frequency power supply device 1, the operations of S9, S10, and S12 to S22 are performed in parallel with the operations of S2 to S7.

[0049] In response to the start-up command of the high frequency power supply device 1, the HF power supply 10 starts generating the first traveling wave voltage and outputting it to the HF matching unit 31 (S9). After this, the LF power supply 20 continuously generates the first traveling wave voltage and outputs it to the HF matching unit 31 (S10).

[0050] When the HF matching unit 31 starts detecting the forward wave voltage detection signal SG1f output from the HF power supply 10, it starts HF matching operation (first matching operation) (S12). The HF matching unit 31 detects the waveform signal of the first forward wave voltage and the waveform signal of the first reflected wave voltage, and calculates the impedance on the HF power supply 10 side according to the waveform signal of the first forward wave voltage and the waveform signal of the first reflected wave voltage. The HF matching unit 31 calculates the reflected power (or reflection coefficient Γ) according to the impedance on the HF power supply 10 side. The HF matching unit 31 calculates an impedance change amount that reduces the reflected power (or reflection coefficient Γ) and operates the variable impedance element with that impedance change amount. In this way, the HF matching unit 31 performs HF matching operation (S13). While performing HF matching operation, the HF matching unit 31 compares the reflected power (or reflection coefficient Γ) with a predetermined threshold. The HF matching unit 31 determines that the HF matching operation is complete when the magnitude of the reflected power (or the reflection coefficient Γ) becomes equal to or less than a predetermined threshold (S14). In response, the HF matching unit 31 transmits a completion notification to the HF power supply 10 indicating that the HF matching operation is complete.

[0051] When the HF power supply 10 receives a completion notification from the HF matching unit 31, it confirms that the HF matching operation has been completed in accordance with the completion notification from the HF matching unit 31. When the HF power supply 10 receives a completion notification from the LF matching unit 32, it confirms that the LF matching operation has been completed in accordance with the completion notification from the LF matching unit 32 (S15). When the HF matching operation and the LF matching operation have been completed, the HF power supply 10 starts frequency modulation control (S16). The HF power supply 10 performs frequency modulation control, which modulates the frequency of the first high-frequency voltage with a modulation signal having the same frequency as the second fundamental frequency and outputs the modulated wave. During frequency modulation control, the HF power supply 10 acquires reflected power and searches for the condition that minimizes the reflected power, i.e., the combination of the starting phase of the modulation signal and the frequency deviation of the modulated wave. The HF power supply 10 performs frequency modulation control while adjusting the starting phase of the modulated signal and the frequency deviation of the modulated wave within predetermined adjustment ranges, and detects the waveforms of the first forward wave voltage and the first reflected wave voltage Pr to determine the reflected power (or reflection coefficient Γ). The HF power supply 10 then performs frequency modulation control (S17) while searching for conditions under which the reflected power (or reflection coefficient Γ) is minimized. Since the matching operations in S12 and S13 suppress the reflected power on the HF side to some extent, the frequency modulation control can be performed efficiently. The HF power supply 10 compares the reflected power (or reflection coefficient Γ) with a threshold value, and can determine that the reflected power has been minimized when the reflected power (or reflection coefficient Γ) is equal to or less than the threshold value. When the HF power supply 10 determines that the reflected power has been minimized, it determines that the frequency modulation control has been completed (S18). In response, the HF power supply 10 transmits a completion notification to the HF matching unit 31 indicating that the frequency modulation control has been completed.

[0052] Upon receiving the completion notification, the HF matching unit 31 confirms that the frequency modulation control has been completed (S19). In response to the completion of the frequency modulation control, the HF matching unit 31 restarts the HF matching operation (second matching operation) (S20). At this time, the frequency modulation control reduces the reflected power due to IMD, so the HF matching operation can efficiently reduce the reflected power due to impedance mismatch. The HF matching unit 31 detects the waveform signal of the first forward wave voltage and the waveform signal of the first reflected wave voltage, and calculates the impedance on the HF power source 10 side according to the waveform signal of the first forward wave voltage and the waveform signal of the first reflected wave voltage. The HF matching unit 31 calculates the reflected power (or reflection coefficient Γ) according to the impedance on the HF power source 10 side. The HF matching unit 31 calculates an impedance change amount that reduces the reflected power (or reflection coefficient Γ) and operates the variable impedance element with the impedance change amount. As a result, the HF matching unit 31 performs the HF matching operation (S21). While performing HF matching operation, the HF matching unit 31 compares the reflected power (or reflection coefficient Γ) with a predetermined threshold. The HF matching unit 31 considers the HF matching operation to be complete when the magnitude of the reflected power (or reflection coefficient Γ) becomes equal to or less than the predetermined threshold (S22). While the HF matching operation and the LF matching operation are being performed, the superimposed matching circuit 30 receives a first traveling wave voltage from the HF power supply 10 at the HF matching unit 31 and a second traveling wave voltage from the LF power supply 20 at the LF matching unit 32. The superimposed matching circuit 30 superimposes the first traveling wave voltage (first high frequency power) from the HF matching unit 31 and the second traveling wave voltage (second high frequency power) from the LF matching unit 32 and supplies the superimposed voltage to the lower electrode EL1 (S23).

[0053] As described above, in this embodiment, in the high frequency power supply device 1, the HF power supply 10 performs frequency modulation control after the HF matching operation by the HF matching unit 31 is completed. This allows the HF matching operation and frequency modulation control to be performed appropriately, and makes it possible to efficiently reduce the reflected wave power on the HF power supply 10 side that is generated due to the influence of intermodulation distortion.

[0054] Furthermore, in this embodiment, in the high frequency power supply device 1, the HF matching unit 31 performs HF matching operation again after the frequency modulation control by the HF power supply 10 is completed. For example, performing frequency modulation control may change the optimal value (optimal matching circuit state) of the HF matching operation in the HF matching unit 31. Therefore, by performing HF matching operation again, it is possible to further reduce the reflected wave power generated due to the influence of intermodulation distortion.

[0055] Furthermore, in this embodiment, in the high frequency power supply device 1, the HF power supply 10 performs frequency modulation control after the HF matching operation by the HF matching unit 31 is completed and after the LF matching operation by the LF matching unit 32 is completed. This allows the HF matching operation, the LF matching operation, and the frequency modulation control to be performed appropriately, and the reflected wave power on the HF power supply 10 side and the reflected wave power on the LF power supply 20 side, which are generated due to the influence of intermodulation distortion, can each be efficiently reduced.

[0056] Furthermore, in this embodiment, in the high-frequency power supply device 1, the HF matching unit 31 acquires the reflected power (or reflection coefficient Γ) while performing the HF matching operation, and determines that the HF matching operation is complete when the magnitude of the reflected power (or reflection coefficient Γ) becomes equal to or less than a predetermined threshold. The LF matching unit 32 acquires the reflected power (or reflection coefficient Γ) while performing the LF matching operation, and determines that the LF matching operation is complete when the magnitude of the reflected power (or reflection coefficient Γ) becomes equal to or less than a predetermined threshold. This clarifies the completion times of the HF matching operation and the LF matching operation, and allows the matching operation to be performed within a reasonable range (the threshold can be set to an appropriate value through experiments, etc.). In other words, if the goal is to reduce the reflected power to zero, control may be repeated even when the reflected power becomes small, resulting in unstable control. However, by implementing the above, this instability is reduced. Furthermore, control can be completed earlier.

[0057] Furthermore, in this embodiment, in the high-frequency power supply device 1, the HF power supply 10 adjusts the start phase of the modulated signal and the frequency deviation of the modulated wave within predetermined adjustment ranges during frequency modulation control, while acquiring the reflected power (or reflection coefficient Γ), and considers the frequency modulation control to be complete when the magnitude of the reflected power (or reflection coefficient Γ) is deemed to be minimized. This clarifies the time when the frequency modulation control is completed, and allows frequency modulation control to be performed within a reasonable range (the threshold value can be set to an appropriate value through experiments, etc.). In other words, if the goal is to reduce the reflected power to zero, control may be repeated even when the reflected power has become small, resulting in unstable control. However, by implementing the above, instability is reduced. Furthermore, control can be completed earlier.

[0058] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, as well as within the scope of the invention described in the claims and their equivalents. [Explanation of symbols]

[0059] 1 High frequency power supply 10 HF power supply 20 LF power supply 30 Superposition Matcher 31 HF matching section 32 LF matching section

Claims

1. a first power supply that supplies a first high frequency power to a load by outputting a first high frequency voltage having a first fundamental frequency; a second power supply that supplies second high frequency power to the load by outputting a second high frequency voltage having a second fundamental frequency lower than the first fundamental frequency; a first matching unit connected between the first power supply and the load; a second matching unit connected between the second power supply and the load; Equipped with the first matching unit performs a first matching operation to match an impedance of the first power supply with an impedance of the load in a state in which intermodulation distortion occurs due to the first high frequency power and the second high frequency power being simultaneously supplied to the load; after the first matching operation is completed, the first power supply performs frequency modulation control to frequency-modulate the first high-frequency voltage with a modulation signal having the same frequency as the second fundamental frequency and output the modulated wave, the second matching unit performs a third matching operation to match an impedance of the second power supply with an impedance of the load; the first matching unit has a function of calculating a magnitude of a reflection coefficient or a magnitude of reflected power based on information detected in the first matching unit, and when the calculated magnitude of the reflection coefficient or the magnitude of the reflected power becomes equal to or less than a predetermined threshold, the first matching operation is considered to be completed; The second matching unit has a function of calculating the magnitude of the reflection coefficient or the magnitude of the reflected wave power based on the information detected in the second matching unit, and when the calculated magnitude of the reflection coefficient or the magnitude of the reflected wave power becomes equal to or less than a predetermined threshold, the third matching operation is considered to be completed. High frequency power supply.

2. A first power supply that supplies first high frequency power to a load by outputting a first high frequency voltage having a first fundamental frequency; a second power supply that supplies second high frequency power to the load by outputting a second high frequency voltage having a second fundamental frequency lower than the first fundamental frequency; a first matching unit connected between the first power supply and the load; a second matching unit connected between the second power supply and the load; Equipped with the first matching unit performs a first matching operation to match an impedance of the first power supply with an impedance of the load in a state in which intermodulation distortion occurs due to the first high frequency power and the second high frequency power being simultaneously supplied to the load; after the first matching operation is completed, the first power supply performs frequency modulation control to frequency-modulate the first high-frequency voltage with a modulation signal having the same frequency as the second fundamental frequency and output the modulated wave, the first power supply has a function of calculating a magnitude of a reflection coefficient or a magnitude of a reflected wave power based on information detected by the first power supply, The frequency modulation control is performed by adjusting the start phase of the modulated signal and the frequency deviation of the modulated wave within predetermined adjustment ranges, and when it is determined that the magnitude of the calculated reflection coefficient or the magnitude of the reflected wave power has become minimum, the frequency modulation control is deemed to be completed. High frequency power supply.

3. The first matching unit performs a second matching operation to match the impedance of the first power supply with the impedance of the load after the frequency modulation control is completed.

3. The high frequency power supply device according to claim 1 or 2.

4. the second matching unit performs a third matching operation to match an impedance of the second power supply with an impedance of the load; The first power supply performs the frequency modulation control after the first matching operation and the third matching operation are completed.

4. The high frequency power supply device according to claim 3.

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