Anode, cooling system, and X-ray source including the same

Abstract

1. A system comprising: a vacuum enclosure; an anode support structure extending through the vacuum enclosure and including a plurality of first cooling passages; and an anode disposed within the vacuum enclosure and coupled to and supported by the anode support structure, the anode including a target and a plurality of second cooling passages, each of the second cooling passages coupled to a corresponding first cooling passage, the anode being coupled to the anode support structure on a side of the anode that is different from a side of the anode that includes the target and an axial end of the anode on a long axis of the anode.

Description

[Technical Field]

[0001] The x-ray source may be configured to generate multiple x-ray beams. An array of emitters may emit multiple electron beams toward a target(s) on the anode. Some linear anodes include a target whose length is significantly longer than its width. The electron beams may be directed toward the target to strike the target in a line along its length. The incident electron beams generate heat in the anode. The anode may be cooled by a coolant, such as water or insulating oil, supplied to one of the ends of the anode. Supports for the anode may be located on the ends of the anode. [Brief explanation of the drawings]

[0002] [Figure 1A] FIG. 1 is a top view of an anode of an X-ray system according to some embodiments. [Figure 1B] FIG. 1B is a side view of the anode and anode support structure of FIG. 1A according to some embodiments. [Figure 1C] 1C is a cross-sectional view of the anode and anode support structure of FIG. 1B according to some embodiments. [Figure 1D] FIG. 1B is a cutaway view of the anode of FIG. 1A according to some embodiments. [Figure 2] FIG. 1 is a block diagram of an X-ray system according to some embodiments. [Figure 3A] FIG. 1 is a block diagram of an X-ray system with multiple anode support structures according to some embodiments. [Figure 3B] FIG. 3B is a cutaway view of the anode of FIG. 3A according to some embodiments. [Figure 4A] FIG. 2 is an exploded perspective view of an anode and an anode support structure according to some embodiments. [Figure 4B] FIG. 4B is a cutaway view of the anode and anode support structure of FIG. 4A according to some embodiments. [Figure 4C]FIG. 2 is a perspective view of an anode without an anode support structure according to some embodiments. [Figure 4D] FIG. 4B is a perspective view of the anode of FIG. 4A with a shroud according to some embodiments. [Figure 5A] FIG. 2 is a cutaway view of an anode according to some embodiments. [Figure 5B] FIG. 2 is a top view of an anode according to some embodiments. [Figure 6A] FIG. 1 is a block diagram of a technique for forming an X-ray system according to some embodiments. [Figure 6B] FIG. 1 is a block diagram of a technique for forming an X-ray system according to some embodiments. [Figure 6C] FIG. 1 is a block diagram of a technique for forming an X-ray system according to some embodiments. [Figure 6D] FIG. 1 is a block diagram of a technique for forming an X-ray system according to some embodiments. [Figure 6E] FIG. 1 is a block diagram of a technique for forming an X-ray system according to some embodiments. [Figure 6F] FIG. 1 is a block diagram of a technique for forming an X-ray system according to some embodiments. [Figure 6G] FIG. 1 is a block diagram of a technique for forming an X-ray system according to some embodiments. [Figure 7] 1 is a flowchart of a technique for operating an anode in an x-ray system according to some embodiments. [Figure 8A] FIG. 2 is a perspective view of an anode and an anode support structure according to some embodiments. [Figure 8B] FIG. 8B is an exploded view of the anode and anode support structure of FIG. 8A. [Figure 8C] 8B-8C are various cutaway views of the anode and anode support structure of FIG. 8A illustrating cooling channels according to some embodiments. [Figure 8D] 8B-8C are various cutaway views of the anode and anode support structure of FIG. 8A illustrating cooling channels according to some embodiments. [Figure 8E]8B-8C are various cutaway views of the anode and anode support structure of FIG. 8A illustrating cooling channels according to some embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0003] Some embodiments relate to an anode, a cooling system for the anode, and an x-ray source including such an anode and cooling system.

[0004] Some x-ray sources supply coolant to the anode at the end of its length. A single hole may be formed in the body of the anode. Tubes may be placed inside to create two fluid paths for the coolant to enter and exit. The coolant is supplied to the anode from outside the vacuum chamber. As a result, insulators, standoffs, or other structures are placed at the ends of the anode for the purpose of supporting the anode and / or supplying coolant.

[0005] The walls of the vacuum enclosure are necessarily offset from the anode. Support and cooling structures increase the length of the x-ray source. Length refers to the larger dimension in which the emitter is located, such as the x-direction in the various figures described below. In some systems, multiple x-ray sources are arranged end-to-end. The resulting x-ray beam from these x-ray sources has a gap depending on the length of structures intended to support the anode and / or provide coolant.

[0006] Additionally, deformation may occur due to thermal expansion. For example, deformation may occur due to a temperature difference between the target side and the non-target side of the anode. If the hot side of the anode, where the target is located, and the cold side opposite the target are at different temperatures, the hot side may tend to grow more than the cold side, causing the anode to bend. In another example, if the anode is significantly hotter than the surrounding enclosure, the anode may expand relative to the enclosure. If the anode is fixed and / or supported at each end of the enclosure, this thermal growth may distort the enclosure and / or buckle or deform the anode. In another example, supplying a coolant from one end of the anode may cause deformation of the anode. A cooler coolant may initially enter one end of the anode. As a result, the end of the anode where the coolant enters may operate at a lower temperature than the far end. The anode may distort and / or deform due to the temperature difference. Changes in the position of the target or anode may cause a shift in focal point(s), a change in size, distortion, etc.

[0007] As will be described in more detail below, in some embodiments, supports and cooling passages (or cooling channels) may be located in the center and / or backside of the anode. The supports and / or cooling passages may provide electrical connections to the anode.

[0008] FIG. 1A is a top view of an anode of an X-ray system according to some embodiments. FIG. 1B is a side view of the anode and anode support structure of FIG. 1A according to some embodiments. FIG. 1C is a cross-sectional view of the anode and anode support structure of FIG. 1B according to some embodiments. FIG. 1C is a cross-section along plane I parallel to the YZ plane. FIG. 1D is a cut-away view of the anode of FIG. 1A according to some embodiments. FIG. 1D is a top cut-away view along plane II parallel to the XY plane.

[0009] 1A-1D , in some embodiments, an x-ray system 100 includes a vacuum enclosure 201 configured to separate a vacuum 202 from a non-vacuum 204. The x-ray system 100 includes an anode 104 disposed within the vacuum enclosure 201. An anode support structure 106 extends through the vacuum enclosure 201 to support the anode 104 within the vacuum 202 within the vacuum enclosure 201.

[0010] The anode 104 includes a target 103. The target 103 is a structure configured to generate x-rays in response to one or more incident electron beams. The target 103 may include materials such as tungsten (W), molybdenum (Mo), rhodium (Rh), silver (Ag), rhenium (Re), palladium (Pd), alloys containing such materials, etc. In some embodiments, the target 103 is a linear target, where the target length in the X-direction is 5, 10, 20, or more times the target width in the Y-direction. In some embodiments, the linear target may be flat or curved, such as a continuous curve, a piecewise linear curve, or a combination of such curves. In some embodiments, different electron beams may impinge on different regions 102 (represented by regions 102-1 through 102-n) of the target 103. In some embodiments, the electron beams may impinge on at least 3, 5, 10, 100, or more different regions 102 of the target 103. As will be described in more detail below, the target 103 may not be a linear target, but rather a planar target with different regions 102 extending in both the X and Y directions. In some embodiments, the target 103 may be a single target, even if multiple electron beams are directed at multiple regions 102 on the target 103. In other embodiments, the target 103 may include multiple separate targets attached to the anode 104. Any number of targets 103 may be disposed on the anode 104.

[0011] In some embodiments, the target 103 extends in a line and / or plane that is substantially perpendicular to the anode support structure 106. For example, the target 103 extends in a line along the X direction or in a plane along the XY plane, but the long axis of the anode support structure 106 extends in the Z direction.

[0012] In some embodiments, the anode 104 includes multiple cooling passages 112 and 114. For example, the anode 104 may include cooling passages 112-1 to 112-2 and 114-1 to 114-4. In some embodiments, the body 104a of the anode 104 may be formed of a material having a higher thermal conductivity than the target 103. For example, the body 104a of the anode 104 may be formed of copper, stainless steel, a vacuum-compatible conductive material, or the like. The cooling passages 112 and 114 may be formed in various ways, as described in more detail below.

[0013] In some embodiments, the cooling passages 112 and 114 comprise cylindrical passages within the body 104a of the anode 104. Holes 116, such as holes 116a and 116b, may be coupled to the cooling passages 112 and 114, where hole 116a is coupled to the cooling passage 114 and hole 116b is coupled to the cooling passage 112. The holes 116 may extend from the outer surface 107 of the anode 104 opposite the target 103 to the corresponding cooling passage 112 or 114. The number and arrangement of holes 116a and 116b are shown as an example, but the number and arrangement may differ in other embodiments. For example, instead of two holes 116a, four holes 116a may extend from the surface 107 to the cooling passage 114.

[0014] The anode support structure 106 may be formed from a variety of materials. For example, the anode support structure 106 may be formed from molybdenum (Mo), molybdenum alloys, copper (Cu), stainless steel, vacuum-compatible conductive materials, etc. The anode support structure 106 may be attached to the anode 104 in a variety of ways. For example, the outer wall 106 a of the anode support structure 106 may be welded, brazed, or otherwise sealed to the anode 104 to maintain the vacuum 202 within the vacuum enclosure 201.

[0015] The anode support structure 106 may be coupled to the vacuum enclosure 201 in various ways. For example, the anode 104 may be a hot anode configured for a high potential difference of approximately 160 kilovolts (kV). While 160 kV is used as an example, in other embodiments, the anode voltage may be different. The anode support structure 106 may form an electrical connection to the anode 104. Thus, the anode support structure 106, or a portion of the anode support structure 106, may be at a high voltage. An insulator, such as a ceramic insulator, may insulate the anode support structure from the vacuum enclosure housing.

[0016] The anode support structure 106 includes a plurality of cooling passages 110. In this example, the anode support structure 106 includes two cooling passages 110a and 110b. The cooling passage 110 is coupled to cooling passages 112 and 114, where cooling passage 112 is connected to cooling passage 116b through hole 116b, and cooling passage 114 is connected to cooling passage 114 through hole 116a.

[0017] In some embodiments, a coolant is routed into the anode support structure 106, as indicated by the arrows in the cooling channels 110. That is, the coolant enters cooling passage 110b of the anode support structure 106. The coolant enters cooling passage 112 through holes 116b. The coolant is split between cooling passages 112-1 and 112-2. The coolant travels toward ends 104c and 104d of the body 104 of the anode 104. At ends 104c and 104d of the anode 104, the coolant flow reverses and returns through cooling passage 114. After passing through cooling passage 112-1, the coolant is split between cooling passages 114-1 and 114-3. Similarly, after passing through cooling passage 112-2, the coolant is split between cooling passages 114-2 and 114-4. After passing through cooling passage 114, the coolant returns to the anode support structure 106 through holes 116a, which connect to cooling passage 110a.

[0018] In some embodiments, this routing of the coolant results in more uniform cooling. For example, the amount of heat generated by the electron beam incident on the target 103 may be concentrated on a centerline in the X direction along the center of the target 103. In some embodiments, the cooling passages 112 are positioned in a plane parallel to the XZ plane and the centerline of the target 103. In other embodiments, the cooling passages 112 may be the cooling passages closest to the centerline of the target 103. That is, heat may be higher closest to the cooling passages 112. Because the coolant enters the cooling passages 112 before the cooling passages 114, a greater amount of heat may be transferred to the coolant from areas of the target 103 that generate more heat. Warmer coolant may pass through the cooling passages 114 located on either side of the cooling passages 112. Because less heat may be generated above the cooling passages 114 than the cooling passages 112, the cooling passages 114 may receive less heat. As a result, the amount of cooling provided to the target 103 may better match the heat generated on the target 103.

[0019] While a particular number of cooling passages 112 and 114 are used as an example, in other embodiments, the number of cooling passages 112 and / or 114 may be different. In some embodiments, rather than four return cooling passages 114-1 through 114-4, any number from 1 onward may be used. For example, if the coolant is split into four cooling passages 114 at each end, eight return cooling passages 114 may be used.

[0020] In some embodiments, the cooling passages 110 are coaxial. For example, cooling passage 110b may be centered within cooling passage 110a. Cooling passages 110a and 110b may be formed by two coaxial pipes that form the outer and inner walls 106a and 106b.

[0021] In some embodiments, the anode support structure 106 is coupled to the anode 104 at the center of the base 104a of the anode 104, e.g., within 10% of the length along the X-direction from the center of the base 104a. In some embodiments, the anode support structure 106 may be coupled to the anode 104 at a location between 25% and 75% of the length of the anode 104 along the X-direction or the longest dimension of the base 104a. The anode support structure 106 may be coupled to the anode 104 on the opposite side of the anode 104 from the target 103. In some embodiments, positioning the anode support structure 106 relative to the center may reduce distortion. For example, the distance from the anode support structure 106 to the unsupported end of the anode 104 may be shorter than if the anode 104 were supported at the end of the anode. As a result, any resulting distortion may be smaller. While coupling the anode support structure 106 to the anode 104 at or relative to the center is used as an example, in other embodiments, the anode support structure 106 may be off-center. In some embodiments, the anode 104 may be a linear anode having an aspect ratio X:Y in the X direction (length) and Y direction (width) of 4:1, 10:1, 25:1, 50:1, and / or 100:1 or greater. In some embodiments, the anode 104 may be a linear anode having an aspect ratio X:Z in the X direction (length) and Z direction (height) of 4:1, 10:1, 25:1, 50:1, and / or 100:1 or greater. In some embodiments, the target 103 may be rectangular having an aspect ratio X:Y in the X direction (length) and Y direction (width) of 4:1, 10:1, 25:1, 50:1, and / or 100:1 or greater.

[0022] In some embodiments, the width of the system 100 can be reduced by placing the anode support structure 106 on the opposite side of the anode 104 from the target 104. In particular, the anode support structure 106 replaces standoffs, feedthroughs, etc. that would otherwise use space at the end of the anode 104. As a result, the walls of the vacuum enclosure 201 may be positioned closer to the anode 104, shortening the dimension of the system in the X-direction. In some embodiments, when multiple X-ray systems 100 are placed adjacent to each other in the X-direction, the amount of space between the anodes 104 of the X-ray systems 100 is reduced, which may reduce the gap between the X-rays generated by the X-ray systems 100.

[0023] In some embodiments, multiple high voltage standoffs may be eliminated. For example, high voltage standoffs on both ends 104c and 104d may be used to support the anode on ends 104c and 104d. However, the anode support structure 106 replaces both high voltage standoffs, reducing part count, complexity, etc.

[0024] Additionally, by locating the anode support structure 106 on the opposite side of the anode 104 from the target 103, the failure rate of the X-ray system 100 may be reduced. High-voltage instability is a failure mechanism that may increase as the high-voltage standoff increases. High-voltage instability may limit the lifespan of the X-ray system 100. Arcing across insulators due to scattered electrons from the anode 104 may increase the likelihood of such failures. When high-voltage standoffs are used on the ends 104c and 104d of the anode 104, electrons traveling laterally along the anode 104 are more likely to accumulate on the high-voltage standoffs. In contrast, when the anode 104 is supported by the anode support structure 106 on the opposite side of the target 103, scattered electrons that can reach the insulators coupled to the anode support structure 106 are reduced or eliminated, which may reduce or eliminate the probability of arcing.

[0025] Additionally, the support complexity for the anode 104 may be reduced. If the anode 104 were end-supported, the high-voltage standoffs may require a type of structure that can accommodate axial expansion in the X direction due to temperature changes. The triple point formed by such a structure may require shielding. However, by locating the anode support structure 106 on the opposite side of the target 103, a structure to accommodate axial expansion and / or additional shielding for the triple point may not be required.

[0026] In some embodiments, the structure of the anode support structure 106 and the anode 104 may simplify the manufacture and / or assembly of the x-ray system 100. Mounting the anode 104 on the anode support structure 106 as described above may simplify connection to the cooling channels 112 and 114. For example, if the anode 104 had concentric cooling passages within the body 104a, connecting to the concentric cooling passages (especially the central cooling passage) may be difficult. That is, a freely movable central tube may have the ability to rotate and may have somewhat thin walls. Sealing the tube to such a structure may be difficult. However, because the cooling passages 112 and 114 are not concentric, the holes 116a and 116b do not pass through other cooling passages to reach the intended cooling passage.

[0027] Although the anode support structure 106 is illustrated as being coupled to the anode 104 such that the anode support structure 106 is perpendicular to the target 103, in other embodiments the orientation of the anode support structure 106 relative to the target 103 and / or anode 104 may be different. For example, the connection of the anode support structure 106 to the anode 104, the structure of the body of the anode 104, etc. may be different such that the target 103 is rotated by a non-zero angle, such as 5, 10, 15, or 20 degrees, about the X direction.

[0028] 2 is a block diagram of an X-ray system according to some embodiments. X-ray system 200 may be similar to and include similar components as X-ray system 100 described above. X-ray system 200 includes a cathode 224, which includes one or more emitters 220 disposed within a vacuum enclosure 201. Here, multiple emitters 220-1 through 220-n are illustrated by way of example. The emitters are configured to generate corresponding electron beams 222-1 through 222-n.

[0029] Emitters 220 may be any of a variety of emitters. For example, each of emitters 220 may include a filament (e.g., a coil filament emitter), a low work function (LWF) emitter, a field emitter (e.g., including nanotubes), a dispenser cathode, a light emitter, etc. Emitters 220 may be the same or different types of emitters. For example, one or more of emitters 220 may be a field emitter, while one or more other emitters 220 may be a filament.

[0030] The x-ray system 200 includes a cooling system 250. The cooling system 250 may include any system configured to supply a coolant to the anode 104 through the anode support structure 106. For example, the cooling system 250 may include a pump, a radiator, a refrigerator, a reservoir, etc. The cooling system 250 may be coupled to the anode support structure 106 through a supply coolant line 252 and a return coolant line 254. A coolant, such as water, glycol, insulating oil, or a non-conductive liquid, may be circulated through the anode 104 through the coolant lines 252 and 254.

[0031] In some embodiments, the x-ray system 200 includes a high voltage (HV) source 260 located outside the vacuum enclosure 201. The high voltage source 260 may be configured to generate one or more high voltages for operating the x-ray system 200. For example, the high voltage source 260 may be configured to generate a voltage from tens of kV to 100 kV or more.

[0032] Electrical connections to components within the vacuum enclosure 201 may be made through the anode support structure 106 to the anode 104. For example, a high voltage connection 262 is illustrated as being connected from a high voltage source 260 to the support structure 106 to supply the anode voltage. If the cathode is not grounded, a feedthrough 270 may provide an electrical connection to the cathode 224.

[0033] In some embodiments, the only electrical connection to the anode 104 may be made through the single anode support structure 106. In some embodiments, the only structural support for the anode 104 within the vacuum enclosure 201 may be from the single anode support structure 106. In some embodiments, the only electrical connection to and the only structural support for the anode 104 may be from the single anode support structure 106.

[0034] 3A is a block diagram of an X-ray system with multiple anode support structures according to some embodiments. X-ray system 300 may be similar to X-ray systems 100 and / or 200 described above. However, X-ray system 300 includes multiple anode support structures 106-1 through 106-m, each extending through a vacuum enclosure. Each of anode support structures 106-1 through 106-m may be coupled to an anode 104, similar to the single anode support structure 106 described above.

[0035] In some embodiments, one of the anode support structures 106 is configured to supply and return coolant, while the other anode support structure 106 is configured to provide electrical connections. In other embodiments, one of the anode support structures 106 is configured to supply coolant, while the other anode support structure 106 is configured to return coolant. In some embodiments, coolant may be supplied and returned through two or more or all of the support structures 106. In a particular example, one coolant path may enter the anode 104 through the anode support structure 106-1 and exit through a different anode support structure 106-m. A second coolant path may enter the anode 104 through the anode support structure 106-m and exit through the anode support structure 106-1.

[0036] FIG. 3B is a cutaway view of the anode of FIG. 3A according to some embodiments. In some embodiments, each of the anode support structures 106-1 through 106-m includes cooling passages 110a and 110b coupled to openings 116a and 116b. Multiple cooling passages 112 and 114 may be present to guide coolant around the anode 104e. In this example, arrows illustrate the direction of coolant flow. In some embodiments, the coolant may flow through the cooling passages 112 toward the center of the anode 104e before being guided by the cooling passages 114 in a manner similar to the ends of the anode 104e. While each anode support structure 106-1 through 106-m is used as an example, in other embodiments, one to fewer than all of the anode support structures 106-1 through 106-m may include a cooling passage 110 associated with a structure within the anode 104e.

[0037] FIG. 4A is an exploded perspective view of an anode and anode support structure according to some embodiments. The x-ray system 400 may be similar to the x-ray systems 100, 200, and / or 300 described above. The anode 404 may be similar to the anode 104 described above and may be coupled to the anode support structure 406 similar to the anode support structure 106. These structures may be arranged in a similar configuration. The anode 404 includes a body 404a and an end cap 404b. The target 403 may be disposed on the base 404a. The body 404a may include multiple cooling passages 412 and 414. The cooling passages 412 and 414 may be holes formed through the body 404a. The holes may extend through the body from end 404c to the opposite end 404d.

[0038] End caps 404b may be disposed on both ends 404c and 404d of the body 404a. The end caps 404b may couple the cooling passages 412 and 414 to each other. For example, the end caps 404b may include recesses 405 at the ends 404c and 404d, respectively, that extend across the openings of the cooling passages 412 and 414. In this manner, coolant may flow, for example, from the cooling passage 412 into the recesses 405 and into the cooling passage 414. While a particular structure on the end cap 404b is used as an example, other structures may be used such that the end cap 404b at least partially couples the cooling passages 412 and 414 to each other. For example, the body 404a may include recesses (not shown) that connect the cooling passages 412 and 414. The end cap 404b may include flat surfaces that seal the cooling passages 412 and 414. In other embodiments, the formation of the cooling passages may include a combination of body 404a and end cap 404b structures.

[0039] The end cap 404b may be attached to the body 404a in a variety of ways, for example, the end cap 404b may be brazed, welded, and / or sealed in a vacuum compatible manner to the body 404a.

[0040] 4B is a cutaway view of the anode 404 and anode support structure 406 of FIG. 4A according to some embodiments. FIG. 4C is a perspective view of the anode 404 without the anode support structure 406 according to some embodiments. With reference to FIGS. 4A-4C, the anode support structure 406 is coupled to the base 404a at the center of the base 404a. In some embodiments, an outer wall 406a is attached to an opening 418 in the body 404a of the anode 404. As previously mentioned, the outer wall 406a may be brazed, welded, and / or sealed to the body 404a in a vacuum-compatible manner. In some embodiments, the outer wall 406 may be conductive and may form an electrical connection to the anode 404 and the target 403.

[0041] In some embodiments, the cooling passages 412 and 414 extend from the anode support structure 406 to opposite ends 404c and 404d of the base 404a.

[0042] Inner wall 406b may include a tube that is coaxial with outer wall 406a, such that cooling passages 410a and 410b are coaxial. However, in other embodiments, cooling passages 410a and 410b may not be coaxial.

[0043] In some embodiments, the inner wall 406b may be inserted into the hole 416b. The inner wall 406b may be a conductive structure. An O-ring 420 or other sealing technique may be used to seal the inner wall 406b to the body 404a. The O-ring 420 may form a seal between the cooling passages 410a and 410b and the corresponding passages for the coolant. The O-ring 420 or similar structure may be non-conductive. In some embodiments, an additional structure, such as a conductive spring, may be used to electrically connect the inner wall 406b to the body 404a. Thus, electrical connections to the anode 404 and the target 403 may be made using the inner wall 406b in addition to or as an alternative to the outer wall 406a.

[0044] In some embodiments, the combined cross-sectional area of ​​cooling passages 414 is greater than the combined cross-sectional area of ​​cooling passages 412. As a result, head loss through cooling passages 412 and 414 may be reduced.

[0045] As previously mentioned, fabricating the cooling passages may be less complicated and expensive than using coaxial tubing within the body 404a. For example, when attempting to connect to the coaxial tubing within the body 404a, it may be difficult to align the inlet pipe with the coaxial tubing within the body 404a. However, because the cooling passages 412 and 414 are not coaxial within the body 404a, connecting the anode support structure 406 to the cooling passages 412 and 414 may be easier. For example, in some embodiments, holes 416a and 416b may be drilled in the body 404a to connect the cooling passages 412 and 414. In some embodiments, the non-coaxial cooling passages may provide a larger surface area of ​​the body 404a for contact with the coolant.

[0046] 4D is a perspective view of the anode of FIG. 4A with a shroud according to some embodiments. Referring to FIGS. 4A and 4D, in some embodiments, the anode 404 may include a shroud 450. The shroud 450 may include an electrically conductive structure with an opening 452. The opening 452 may allow electrons from one or more electron beams to enter. However, the shroud 450 may collect backscattered electrons that scatter from the target 403 and prevent these backscattered electrons from striking or damaging other features of the x-ray tube, such as the emitter, insulators, windows, etc.

[0047] In some embodiments, shroud 450 may be at least partially supported by end cap 404b. For example, end cap 404b may include grooves, slots, or other structures connecting the ends of shroud 450 to base 404a. Thus, end cap 404b may both redirect coolant at ends 404c and 404d and support shroud 450.

[0048] Figure 5A is a cutaway view of an anode according to some embodiments. The anode 504 may be similar to the anodes 104 and 404 described above. Figure 5B is a top view of an anode according to some embodiments. With reference to Figures 5A and 5B, in some embodiments, the anode 504 may include a two-dimensional array of regions 502 for multiple electron beams. For example, the target 503 may include an n x m array of regions 502 on the target 503 for the electron beams. Both n and m may be integers greater than 1.

[0049] Because region 502 may extend in the X and Y directions, cooling passages 512 and 514 within body 504a may extend in directions other than along the X direction. In this example, cooling passage 112 extends in both the X and Y directions, and cooling passage 114 may extend diagonally within the XY plane. Coolant may be supplied, for example, through hole 516b and split into cooling passages 512-1 to 512-4. The coolant may return through cooling passages 514-1 to 514-4 and hole 516a.

[0050] 6A through 6G are block diagrams of techniques for forming an x-ray system according to some embodiments. Referring to FIG. 6A, a base 604a is provided. In FIG. 6B, a plurality of cooling passages are formed within the base 604a. For example, the cooling passages 612 and 614 may be formed by drilling the base 604a such that each of the cooling passages 612 and 614 extends at least partially through the base 604.

[0051] 6C, holes 616a and 616b may be drilled in body 604a to form openings 618. For example, openings 618 may be machined into the surface of body 604a. Openings 618 may be configured to receive and / or mate with a particular anode support structure (not shown). Holes 616a and 616b may be drilled to extend into cooling passages 612 and 614, thereby exposing cooling passages 612 and 614.

[0052] 6D and 6E, the anode support structure 606 may be attached to the base 604a. For example, the anode support structure 606 may be provided with multiple cooling passages 610, such as an outer cooling passage 610b and an inner cooling passage 610a. The anode support structure 606 may be attached by first attaching the outer wall 606a to the base 604a at the opening 618. As previously described, the outer wall 606a may be attached by welding, brazing, and / or any vacuum-compatible sealing technique. Next, the inner wall 606b may be inserted into the opening 616b. In some embodiments, inserting the inner wall 606b into the opening 616b may include disposing a spring, O-ring, etc. on the inner wall 606b and / or in the opening 616b, as previously described. As a result, the cooling passages 610 of the anode support structure 606 may be formed, and these cooling passages 610 may be coupled to the cooling passages 612 and 614.

[0053] 6F, in some embodiments, end caps 604c and 604d may be attached to base 604a. As previously described, end caps 604c and 604d may be attached by welding, brazing, or any vacuum-compatible sealing technique, thereby coupling cooling passages 612 and 614 to one another. In some embodiments, attachment may complete the formation of the cooling passages in base 604a.

[0054] 6G, in some embodiments, the target 603 may be formed on the base 604a, as illustrated in FIG. 6A, before the cooling passages 112 and 114 are formed in the base 604a. However, in other embodiments, the target 603 may be formed on the base 604a at a different time during the formation of the anode 604.

[0055] Although a particular sequence of operations for forming an x-ray system has been described above, in other embodiments the sequence may be different.

[0056] FIG. 7 is a flowchart of a technique for operating an anode in an X-ray system according to some embodiments. With reference to FIGS. 1A-1D and 7, X-ray system 100 is used as an example. However, in other embodiments, the operations may be used with other X-ray systems described herein. In some embodiments, at 700, a coolant is directed through anode support structure 106 that penetrates vacuum enclosure 201 toward anode 104 within vacuum enclosure 201. For example, the coolant may be directed through cooling passages 110a or 110b. In some embodiments, the coolant may be supplied from cooling system 250, as illustrated in FIG. 2.

[0057] At 710, the coolant is split at the anode to flow in opposite directions within a first cooling passage in the anode, for example, splitting the coolant to flow toward opposite ends 104c and 104d.

[0058] At 720, the coolant is redirected at the end of the first cooling passage to a second cooling passage that extends toward the anode support structure. For example, the coolant may be redirected by structure at ends 104c and 104d, such as end cap 404b illustrated in FIG. 4A. However, in other embodiments, the coolant may be redirected in other ways, such as by structure at the connection between cooling passages 112 and 114 at ends 104c and 104d themselves.

[0059] At 730, the coolant is routed from the second cooling passage into the anode support structure. For example, the coolant may proceed into cooling passage 110a. In some embodiments, the coolant may be returned to cooling system 250, as illustrated in FIG. 2.

[0060] In some embodiments, operating the x-ray system 100 may include electrically connecting to the anode through the anode support structure. For example, as illustrated in FIG. 2, an electrical connection from the HV source 260 to the anode 104 may be made through conductive structures in the anode support structure 106.

[0061] In some embodiments, splitting the coolant at the anode at 710 includes splitting the coolant to extend perpendicular to the anode support structure 106. For example, the long axis of the anode support structure 106 may extend in the Z direction. The coolant may flow generally in the Z direction through the anode support structure 106. However, once the coolant reaches the anode 104, the coolant may be directed along a vertical path in the X direction.

[0062] In some embodiments, routing the coolant through the anode support structure at 700 includes routing the coolant through the anode support structure to the anode coaxially with the coolant passing from the anode through the anode support structure. For example, the coolant passing through cooling passages 110a and 110b in anode support structure 106 may be coaxial.

[0063] Some embodiments involve supporting the anode 104 solely by the anode support structure. For example, the anode 104 may be disposed within the vacuum enclosure 201. The anode support structure 106 may be the only physical support structure supporting the anode 104 within the vacuum enclosure 201.

[0064] FIG. 8A is a perspective view of an anode and anode support structure according to some embodiments. FIG. 8B is an exploded view of the anode and anode support structure of FIG. 8A. FIGS. 8C through 8E are various cutaway views of the anode and anode support structure of FIG. 8A showing cooling channels according to some embodiments. Referring to FIGS. 8A through 8E, in some embodiments, the anode 804 and anode support structure 806 may be similar to those described above. However, the anode support structure 806 is coupled to the anode 804 on a side of the anode 804. In some embodiments, the anode 804 is coupled to the anode support structure 806 on a side of the anode that is different from the side of the anode 804 that includes the target 803 and different from the axial end of the anode 804 on the long axis of the anode 804. In this example, the long axis of the anode 804 is along the X direction. The anode support structure 806 is coupled to the anode 804 on a side of the anode 804 at approximately the midpoint along the anode 804 along the X direction. However, as previously mentioned, the anode support structure 806 may be coupled to the anode 804 at a different location along the X direction.

[0065] Opening 816a couples cooling passage 814-1 to cooling passage 810a in anode support structure 806. Opening 816b couples cooling passage 812 to cooling passage 810b. Cooling passage 814-1 may be obstructed by opening 816b. Opening 816b may be separated from cooling passage 814-1 by various structures, walls, etc.

[0066] Opening 816d may couple cooling passage 810a to cooling passage 814-2. Opening 814d may extend under cooling passages 812 and 814-1 to opening 816c. Opening 816 may couple opening 816d to cooling passage 814-2.

[0067] While the specific configuration of cooling passages, openings, inner and outer walls, etc. is used as an example, other embodiments may have different numbers, arrangements, sizes, shapes, etc. For example, the number of anode support structures 806 may be two or more, similar to the embodiment described with respect to Figures 3A and 3B. Other features previously described, such as end caps, shrouds, etc., may also be included. Regardless, because the anode support structure 806 is not coupled to the axial ends of the anode 804 along its long axis in the X direction, the anode 804 may experience less strain during operation, as previously described.

[0068] anode support structure (106, 406, 606, 806) extending through the vacuum enclosure (201) and including a plurality of first cooling passages (110, 410, 610, 810); an anode (104, 404, 504, 604, 804) disposed within the vacuum enclosure (201) and coupled to and supported by the anode support structure (106, 406, 606, 806); a target (103, 403, 503, 603, 803); and a plurality of second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814). and an anode (104, 404, 504, 604, 804) including a target (103, 403, 503, 603, 803) on a side of the anode (104, 404, 504, 604, 804) that is different from an axial end of the anode (104, 404, 504, 604, 804) on a long axis of the anode, wherein each of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) is coupled to a corresponding first cooling passage (110, 410, 610, 810), and the anode (104, 404, 504, 604, 804) is coupled to an anode support structure (106, 406, 606, 806) on a side of the anode (104, 404, 504, 604, 804) that is different from an axial end of the anode (104, 404, 504, 604, 804) on a long axis of the anode.

[0069] In some embodiments, the anode (104, 404, 504, 604, 804) is coupled to the anode support structure (106, 406, 606, 806) on an opposite side of the anode (104, 404, 504, 604, 804) from the target (103, 403, 503, 603, 803).

[0070] In some embodiments, the anode support structure (106, 406, 606, 806) is the only structural support for the anode (104, 404, 504, 604, 804) within the vacuum enclosure (201).

[0071] In some embodiments, the anode support structure (106, 406, 606, 806) is the only electrical connection to the anode (104, 404, 504, 604, 804) within the vacuum enclosure (201).

[0072] In some embodiments, the anode (104, 404, 504, 604, 804) is a linear anode.

[0073] In some embodiments, the linear anode (104, 404, 504, 604, 804) has a length to width aspect ratio of at least one or more of 4:1, 10:1, 25:1, 50:1, and 100:1.

[0074] In some embodiments, the target (103, 403, 503, 603, 803) is one of multiple targets (103, 403, 503, 603, 803) that extend in a line or plane perpendicular to the anode support structure (106, 406, 606, 806).

[0075] In some embodiments, the plurality of second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) are substantially perpendicular to the plurality of first cooling passages (110, 410, 610, 810).

[0076] In some embodiments, the anode (104, 404, 504, 604, 804) further includes a base (104a, 404a, 504a, 604a, 804a), a first end cap (404c, 404d, 604c, 604d) and a second end cap (404c, 404d, 604c, 604d) disposed on opposite ends of the base (104a, 404a, 504a, 604a, 804a), the target (103, 403, 503, 603, 803) is disposed on the base (104a, 404a, 504a, 604a, 804a), and a second cooling The passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) extend through the base (104a, 404a, 504a, 604a, 804a) from a first end cap (404c, 404d, 604c, 604d) to a second end cap (404c, 404d, 604c, 604d), and for each of the end caps (404c, 404d, 604c, 604d), the end cap (404c, 404d, 604c, 604d) at least partially couples at least a portion of the second cooling passages to one another.

[0077] In some embodiments, the anode support structure (106, 406, 606, 806) is coupled to the base (104a, 404a, 504a, 604a, 804a) at a location on the base (104a, 404a, 504a, 604a, 804a) that is between 25% and 75% of the longest dimension of the base (104a, 404a, 504a, 604a, 804a), and the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) extend from the anode support structure (106, 406, 606, 806) to both ends of the base (104a, 404a, 504a, 604a, 804a).

[0078] In some embodiments, the first cooling passage (110, 410, 610, 810) is coaxial within the anode support structure (106, 406, 606, 806).

[0079] In some embodiments, a first one of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) is positioned along the central axis of the anode (104, 404, 504, 604, 804), and a second one of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) and a third one of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) are positioned on either side of the first one of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814).

[0080] In some embodiments, the end caps (404c, 404d, 604c, 604d) are separate from the vacuum enclosure (201).

[0081] In some embodiments, one of the first cooling passages (110, 410, 610, 810) of the anode support structure (106, 406, 606, 806) is coupled to a plurality of second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) of the anode.

[0082] In some embodiments, the anode support structure (106, 406, 606, 806) forms an electrical connection from outside the vacuum enclosure (201) to the anode (104, 404, 504, 604, 804).

[0083] In some embodiments, the system further includes a cathode (224) disposed within the vacuum enclosure (201) and configured to emit at least one electron beam toward the target (103, 403, 503, 603, 803).

[0084] In some embodiments, the system further includes a shroud (450) disposed over the target (103, 403, 503, 603, 803) and electrically coupled to the base (104a, 404a, 504a, 604a, 804a), the shroud including a plurality of openings (452) configured to allow at least one electron beam to reach the target (103, 403, 503, 603, 803).

[0085] In some embodiments, the system further includes a cooling system (250) configured to supply a coolant to one of the first cooling passages (110, 410, 610, 810), the first cooling passage being coupled to at least one of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814), and at least one of the second cooling passages (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) being positioned proximate to the target (103, 403, 503, 603, 803) along a longitudinal axis of the target (103, 403, 503, 603, 803).

[0086] A method comprising: directing a coolant through an anode support structure (106, 406, 606, 806) penetrating the vacuum enclosure (201) toward an anode (104, 404, 504, 604, 804) within the vacuum enclosure (201); splitting the coolant at or within the anode (104, 404, 504, 604, 804) to flow in opposite directions within first cooling passages (110, 410, 610, 810) within the anode; redirecting the coolant at an end of the passage (110, 410, 610, 810) to a second cooling passage (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) extending toward the anode support structure (106, 406, 606, 806); and routing the coolant from the second cooling passage (112, 114, 412, 414, 512, 514, 612, 614, 812, 814) into the anode support structure (106, 406, 606, 806).

[0087] In some embodiments, the method further comprises electrically connecting to the anode (104, 404, 504, 604, 804) through an anode support structure (106, 406, 606, 806).

[0088] In some embodiments, splitting the coolant in the anode (104, 404, 504, 604, 804) comprises splitting the coolant to extend perpendicular to the anode support structure (106, 406, 606, 806).

[0089] In some embodiments, passing the coolant through the anode support structure (106, 406, 606, 806) comprises passing the coolant through the anode support structure (106, 406, 606, 806) to the anode (104, 404, 504, 604, 804) coaxially with the coolant passing from the anode (104, 404, 504, 604, 804) through the anode support structure (106, 406, 606, 806).

[0090] In some embodiments, the method further comprises supporting the anode (104, 404, 504, 604, 804) solely by the anode support structure (106, 406, 606, 806).

[0091] 1. A system comprising: means for converting an electron beam to x-rays, the means including means for passing a coolant through the means for converting the electron beam to x-rays; and means for supporting the means for converting the electron beam to x-rays, the means including means for supplying a coolant to the means for converting the electron beam to x-rays, wherein the means for converting the electron beam to x-rays further comprises means for splitting the coolant supplied to the means for converting the electron beam to x-rays.

[0092] Examples of means for converting the electron beam into X-rays include anodes 104, 404, 504, 604, and 804 and targets 102, 403, 503, 603, and 803.

[0093] Examples of means for directing coolant through the means for converting electron beams to x-rays include cooling passages 112, 114, 412, 414, 512, 514, 612, 614, 812, and 814 and openings 116, 416, 516, 616, and 816.

[0094] Examples of means for supporting means for converting electron beams into x-rays include anode support structures 106, 406, 606, and 806.

[0095] Examples of means for supplying coolant to the means for converting the electron beam into x-rays include cooling passages 110, 410, 610, and 810.

[0096] Examples of means for dividing the coolant supplied to the means for converting electron beams to x-rays include various structures at the interfaces between cooling passages 110, 410, 610, and 810 and cooling passages 112, 114, 412, 414, 512, 514, 612, 614, 812, and 814.

[0097] Examples of means for electrically connecting to the means for converting the electron beam into x-rays include electrically conductive portions of the anode support structures 106 , 406 , 606 , and 806 .

[0098] Some embodiments include a method including: providing an anode support structure including a plurality of first cooling passages; providing a base (104a, 404a, 504a, 604a, 804a); forming a target on the base (104a, 404a, 504a, 604a, 804a); forming a plurality of second cooling passages in the base (104a, 404a, 504a, 604a, 804a) below the target and extending along the base (104a, 404a, 504a, 604a, 804a); and attaching the anode support structure to the base (104a, 404a, 504a, 604a, 804a) on an opposite side from the target such that the first cooling passages and the second cooling passages are coupled to one another.

[0099] In some embodiments, forming the second cooling passage in the base (104a, 404a, 504a, 604a, 804a) includes forming the second cooling passage extending through the base (104a, 404a, 504a, 604a, 804a).

[0100] In some embodiments, forming the second cooling passages in the base (104a, 404a, 504a, 604a, 804a) further includes attaching end caps (404c, 404d, 604c, 604d) to ends of the base (104a, 404a, 504a, 604a, 804a) such that, for each end cap (404c, 404d, 604c, 604d), the end cap (404c, 404d, 604c, 604d) at least partially couples at least a portion of the second cooling passages to one another.

[0101] In some embodiments, the method further includes forming a plurality of openings in the base (104a, 404a, 504a, 604a, 804a) that expose the second cooling passage, and attaching the anode support structure includes attaching the anode support structure to the base (104a, 404a, 504a, 604a, 804a) at the openings in the base (104a, 404a, 504a, 604a, 804a).

[0102] In some embodiments, the method further includes attaching a shroud (450) to the anode (104, 404, 504, 604, 804).

[0103] In some embodiments, the method further includes providing a vacuum enclosure (201) and attaching the anode support structure (106, 406, 606, 806) to the vacuum enclosure (201) such that the anode support structure (106, 406, 606, 806) passes through the vacuum enclosure (201).

[0104] While the structures, devices, methods, and systems have been described in accordance with specific embodiments, it will be readily apparent to one skilled in the art that many variations to the specific embodiments are possible, and therefore, any variations should be considered within the spirit and scope of the disclosure herein. Accordingly, many modifications may be made by one skilled in the art without departing from the spirit and scope of the appended claims.

[0105] The claims that follow this written disclosure are hereby expressly incorporated into this disclosure, with each claim standing on its own as a separate embodiment. The disclosure includes all permutations of an independent claim with its dependent claim. Also, further embodiments that may be derived from the following independent and dependent claims are expressly incorporated into this description. These further embodiments are determined by replacing the dependency of a given dependent claim with the phrase "any of the claims beginning with claim [x] and ending with the claim that immediately precedes this claim." The bracketed term "[x]" is replaced with the number of the most recently described independent claim. For example, for a first set of claims beginning with independent claim 1, claim 4 may depend on either claims 1 and 3, with these separate dependencies resulting in two separate embodiments; claim 5 may depend on any one of claims 1, 3, or 4, with these separate dependencies resulting in three different embodiments; claim 6 may depend on any one of claims 1, 3, 4, or 5, with these separate dependencies resulting in four different embodiments, etc.

[0106] The recitation in a claim of the term "first" with respect to a feature or element does not necessarily imply the presence of second or additional such features or elements. The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:

Claims

1. 1. A system comprising: a vacuum enclosure; an anode support structure extending through the vacuum enclosure and including a plurality of first cooling passages; an anode disposed within the vacuum enclosure and coupled to and supported by the anode support structure; Target and an anode including a plurality of second cooling passages; each of the second cooling passages is coupled to a corresponding first cooling passage; the anode is coupled to the anode support structure on a side of the anode that is different from a side of the anode that includes the target and that is different from an axial end of the anode on a long axis of the anode; The system wherein the anode is a stationary anode.

2. The anode further comprises: With the base, a first end cap and a second end cap disposed on opposite ends of the base; the target is disposed on the base; the second cooling passage extends through the base from the first end cap to the second end cap; The system of claim 1 , wherein for each of the end caps, the end cap at least partially couples at least some of the second cooling passages to one another.

3. the anode support structure is coupled to the base at a location on the base that is at least 25% of the longest dimension of the base from either of the ends along the longest dimension of the base; The system of claim 2 , wherein the second cooling passages extend from the anode support structure to the opposite ends of the base.

4. The system of claim 2 , wherein the end cap is separated from a wall of the vacuum enclosure.

5. 3. The system of claim 2, further comprising a shroud disposed over the target and electrically coupled to the base, the shroud including a plurality of openings configured to allow at least one electron beam to reach the target.

6. The system of claim 1 , wherein the anode is a linear anode.

7. 7. The system of claim 6, wherein the linear anode has a length-to-width aspect ratio of 4:1 or greater.

8. The system of claim 1 , wherein the anode is coupled to the anode support structure on an opposite side of the anode from the target.

9. 8. The system of claim 1, wherein the anode support structure is the only structural support for the anode within the vacuum enclosure.

10. 8. The system of claim 1, wherein the anode support structure is the only electrical connection to the anode within the vacuum enclosure.

11. 8. The system of claim 1, wherein the target is one of a plurality of targets extending in a line or plane perpendicular to the anode support structure.

12. 8. The system of claim 1, wherein a first one of the second cooling passages is disposed along a central axis of the anode, and a second one of the second cooling passages and a third one of the second cooling passages are disposed on opposite sides of the first one of the second cooling passages.

13. The system of claim 1 , wherein one of the first cooling passages of the anode support structure is coupled to a plurality of second cooling passages of the anode.

14. The system of claim 1 , wherein the anode support structure forms an electrical connection to the anode from outside the vacuum enclosure.

15. 1. A method comprising: directing a coolant toward an anode within the vacuum enclosure through an anode support structure that penetrates the vacuum enclosure; splitting the coolant at or within the anode to flow in opposite directions within first cooling passages within the anode; redirecting the coolant at an end of the first cooling passage into a second cooling passage extending toward the anode support structure; and routing the coolant from the second cooling passage into the anode support structure; The method wherein the anode is a stationary anode.

16. The method of claim 15 further comprising electrically connecting to the anode through the anode support structure.

17. 17. The method of any of claims 15-16, wherein splitting the coolant at the anode comprises splitting the coolant to extend perpendicular to the anode support structure.

18. 17. The method of any of claims 15-16, further comprising supporting the anode solely by the anode support structure.

19. 1. A system comprising: a fixture for converting the electron beam into x-rays within the vacuum enclosure; means for supporting the fixing means for converting the electron beam into the X-rays and for supplying a coolant to the fixing means for converting the electron beam into the X-rays; means for directing the coolant within and through the fixture for converting the electron beam to the x-rays; a means for dividing the coolant supplied to the fixing means for converting the electron beam into the X-rays, within the fixing means for converting the electron beam into the X-rays; means for supporting the fixture for converting the electron beam into the x-rays and for supplying a coolant to the fixture for converting the electron beam into the x-rays.

20. 20. The system of claim 19, further comprising means for electrically connecting to the fixation means for converting the electron beam to the x-rays within the means for supporting the fixation means for converting the electron beam to the x-rays and supplying a coolant to the fixation means for converting the electron beam to the x-rays.

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