Curtain frame device

Abstract

To provide a curtain frame device which, when using an electric heater to ignite a curtain burner, can reduce the possibility of the curtain frame damaging the electric heater while maintaining the ignition performance of the curtain burner, thereby improving the life of the electric heater. [Solution] A curtain frame device 10 is provided near an opening 93 of a processing chamber 91 in which the workpiece S is processed, and is equipped with a curtain burner 1 that forms the curtain frame and an electric heater 5 for igniting the curtain burner 1, and an ignition hole 15 that communicates with a fuel gas supply pipe 12 for the curtain burner 1 is formed on the furnace-exterior side 11b of the main body 11 of the curtain burner 1, and the electric heater 5 is provided near the ignition hole 15.

Description

[Technical Field]

[0001] The present invention relates to a curtain frame device that is provided near an opening of a processing chamber for processing an object to be processed. [Background technology]

[0002] In order to suppress changes in the atmosphere inside a processing chamber where a workpiece is processed, a curtain frame device is sometimes provided near the opening of the processing chamber. The curtain frame device generates a ribbon-shaped flame (curtain frame), and by covering the opening of the processing chamber with the curtain frame, it suppresses the inflow of outside air into the processing chamber and the outflow of the atmosphere inside the processing chamber. Patent Document 1 discloses a configuration in which an electric heater is used to ignite the curtain burner that forms the curtain frame. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2024-97722 Summary of the Invention [Problem to be solved by the invention]

[0004] Here, as shown in Patent Document 1, when an electric heater is used to ignite a curtain burner, the electric heater is positioned above the gas outlet, and there is a concern that the electric heater may obstruct the flow of fuel gas and combustion air, thereby worsening the ignition ability and uniformity of the curtain burner, or that the electric heater may be damaged or its lifespan shortened by constant direct contact with the curtain frame.

[0005] Therefore, the object of the present invention is to provide a curtain frame device that, when using an electric heater to ignite a curtain burner, can reduce the possibility of damage to the electric heater by the curtain frame while maintaining the ignition ability of the curtain burner, and can improve the life of the electric heater. [Means for solving the problem]

[0006] The present invention provides a curtain frame device that is provided near an opening of a processing chamber for processing a workpiece, a curtain burner forming a curtain frame; an electric heater for igniting the curtain burner; an ignition hole communicating with a fuel gas supply pipe of the curtain burner is formed on a side surface of the main body of the curtain burner on the outer side of the furnace, The electric heater is provided near the ignition hole.

[0007] According to the above configuration, by locating the electric heater near the ignition hole that communicates with the fuel gas supply pipe of the curtain burner, it is possible to maintain the ignition ability of the curtain burner by the electric heater, while reducing the possibility of damage to the electric heater by the curtain frame and improving the lifespan of the electric heater. [Effects of the Invention]

[0008] According to the present invention, when an electric heater is used to ignite a curtain burner, a curtain frame device can be provided that can reduce the possibility of damage to the electric heater by the curtain frame while maintaining the ignition ability of the curtain burner, thereby improving the life of the electric heater. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a schematic diagram of a processing facility including a curtain frame device according to an embodiment of the present invention; [Figure 2] FIG. 2 is a top view of the curtain burner. [Figure 3] FIG. 2 is a side view of the curtain burner. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 2. [Figure 5] FIG. 2 is an enlarged view of the curtain frame device of FIG. DETAILED DESCRIPTION OF THE INVENTION

[0010] 1 is a schematic diagram of a processing facility 90 equipped with a curtain frame apparatus 10 according to an embodiment of the present invention. The processing facility 90 is a facility for subjecting a workpiece S to heat treatment or the like, and has a processing chamber 91 that accommodates and processes the workpiece S, the processing chamber 91 being formed by a furnace body 92. The processing chamber 91 is provided with an opening 93 for loading and unloading the workpiece S, and the opening 93 can be opened and closed by a door 94.

[0011] The curtain frame device 10 is provided near the opening 93 and serves to prevent outside air from flowing into the processing chamber 91 and the atmosphere inside the processing chamber 91 from flowing out through the opening 93 through which the object to be processed S passes. The curtain frame device 10 includes a curtain burner 1 that forms a curtain frame and an electric heater 5 that ignites the curtain burner 1.

[0012] Fig. 2 is a top view of the curtain burner 1, Fig. 3 is a side view of the curtain burner 1, and Fig. 4 is a cross-sectional view taken along line IV-IV in Fig. 2. As shown in Figs. 1 to 4, the main body 11 of the curtain burner 1 is provided with a supply pipe 12 through which fuel gas flows. Note that not only fuel gas but also a mixed gas of fuel gas and combustion air may flow through the supply pipe 12.

[0013] The main body 11 of the curtain burner 1 has a length corresponding to the entire length of the opening 93, and a height 11H of about 150 to 200 mm.

[0014] The supply pipe 12 is formed linearly extending in the longitudinal direction of the main body 11 of the curtain burner 1, and has an inner diameter 14D of approximately 30 to 40 mm. A plurality of fuel gas outlets 14 communicating with the supply pipe 12 are formed on the upper surface 11a of the main body 11. The fuel gas is ejected vertically upward from the supply pipe 12 through the fuel gas outlets 14. The ejection of fuel gas from the fuel gas outlets 14 forms a curtain frame extending upward from the fuel gas outlets 14.

[0015] As long as a curtain frame can be formed, the type of fuel gas is not particularly limited. For example, hydrocarbon gases such as city gas and propane gas are used as fuel gas, and the temperature of the fuel gas is, for example, room temperature (20 to 40°C).

[0016] The cross section of the fuel gas outlet 14 on the upper surface 11a has a circular shape, and the appropriate size varies depending on the flow rate of the fuel gas to be ejected, but for example, the diameter is about 3 mm. The fuel gas outlets 14 are arranged at intervals so as to form a line parallel to the extension direction of the supply pipe 12, and the interval 14L between adjacent fuel gas outlets 14 is about 3 to 4 times the diameter of the fuel gas outlet 14. Note that although the fuel gas outlets 14 are arranged in a line in this embodiment, they may also be arranged in a staggered pattern in two or more lines.

[0017] An ignition hole 15 communicating with the supply pipe 12 is formed in the side surface 11b of the main body 11 on the furnace exterior. The ignition hole 15 is provided near the fuel gas outlet 14a, which is located most upstream in the fuel gas flow direction. The ignition hole 15 is provided at a position (15H) within 1 / 5 to 1 / 3, preferably within 1 / 4, of the height length 11H of the main body 11 from the top surface 11a of the main body 11. The cross section of the ignition hole 15 on the side surface 11b is circular, and its diameter 15D is about 2 to 3 mm, slightly smaller than the diameter 14D of the fuel gas outlet 14.

[0018] 5 is an enlarged view of the curtain frame device 10 of FIG. 1. As shown in FIG. 5, the electric heater 5 has a cylindrical shape and includes a heat generating portion 51 located at the tip, a support portion 52 that supports the heat generating portion 51, and a lead portion (electrical wiring) 53 that is connected to the heat generating portion 51. The electric heater 5 is provided near the ignition hole 15 formed in the side surface 11b. More specifically, the heat generating portion 51 of the electric heater 5 is provided so as to face the ignition hole 15, and the upper end 51a of the heat generating portion 51 is positioned so as to be at the same level as or lower than the upper surface 11a of the main body 11 in the vertical direction. A small gap T is provided between the heat generating portion 51 and the ignition hole 15 to improve the ease of flame formation, and the size of the gap T is approximately half the diameter 51D of the heat generating portion 51.

[0019] Heat generating portion 51 is formed by coating a heating element such as nichrome with ceramic such as silicon nitride or alumina, and generates heat when electricity is passed through lead portion 53. The temperature of heat generating portion 51 is equal to or higher than the ignition temperature of fuel gas.

[0020] The support part 52 is a cylindrical member made of, for example, alumina. The heat generating part 51 is supported at the tip of the support part 52, and a lead part 53 connected to the heat generating part 51 passes through the inside of the support part 52, is drawn out from the base of the support part 52, and is connected to a power source (not shown).

[0021] (Formation of curtain frame by curtain frame device 10) Before the object to be processed S is processed in the processing chamber 91, a curtain frame is formed in the following procedure.

[0022] First, the electric heater 5 is energized to heat the heat generating portion 51 to a predetermined temperature at which ignition is possible. At this time, the opening 93 is closed by the door 94.

[0023] After the heat generating portion 51 is heated, the fuel gas is supplied from the supply pipe 12 and ejected from the fuel gas ejection port 14 .

[0024] Here, the heat from the heat generating portion 51 of the electric heater 5, which is disposed opposite the ignition hole 15 provided near the most upstream fuel gas outlet 14a, first ignites the fuel gas ejected from the ignition hole 15, and the flame spreads to the most upstream fuel gas outlet 14a, forming a flame. Furthermore, the flame formed at the most upstream fuel gas outlet 14a spreads to the fuel gas outlet 14 adjacent to the most upstream fuel gas outlet 14a, and flames are formed sequentially from the upstream side to the downstream side of the fuel gas outlet 14. As a result, flames are formed at all of the fuel gas outlets 14, and a curtain frame is constructed.

[0025] Then, the door 94 closing the opening 93 is raised to open the opening 93. As the door 94 is raised, the flame on the curtain frame also extends upward in accordance with the raising of the door 94, and the curtain frame prevents outside air from flowing into the processing chamber 91 and the atmosphere inside the processing chamber 91 from flowing out.

[0026] Then, the workpiece S is carried into the processing chamber 91 while passing through the curtain frame. After the workpiece S has been carried in, the door 94 descends and the opening 93 is closed by the door 94. Then, the supply of fuel gas to the curtain frame device 10 is stopped and the curtain frame disappears.

[0027] Furthermore, after the processing of the workpiece S in the processing chamber 91 is completed, when the workpiece S is transported out of the opening of the processing chamber 91, the curtain frame device 10 is operated and stopped in the same procedure as when the workpiece S is transported into the processing chamber 91.

[0028] The curtain frame device 10 having the above-described configuration can achieve the following effects.

[0029] (1) By forming an ignition hole 15 communicating with the fuel gas supply pipe 12 of the curtain burner 1 on the furnace-exterior side 11b of the main body 11 of the curtain burner 1 and locating the electric heater 5 near the ignition hole 15, it is possible to maintain the ignition ability of the curtain burner 1 by the electric heater 5 while reducing the possibility of damage to the electric heater 5 by the curtain frame and improving the lifespan of the electric heater 5. Specifically, because the electric heater 5 is not located above the fuel gas nozzle 14 on the top surface 11a of the main body 11, it does not come into direct contact with the curtain frame, and is not damaged or shortened in lifespan due to overheating. Furthermore, the electric heater 5 does not impede the flow of fuel gas or combustion air, thereby reducing the ignition ability and uniformity of the curtain burner. Note that the "side" in this case refers to the side facing the fuel gas nozzle that forms the curtain frame.

[0030] (2) By locating the ignition hole 15 near the fuel gas outlet 14a, which is located most upstream among the multiple fuel gas outlets 14 connected to the supply pipe 12, the curtain burner 1 is ignited by the electric heater 5 at the outlet with the highest fuel gas concentration, thereby improving the ignition ability of the curtain burner 1.

[0031] (3) By locating the ignition hole 15 at a position (15H) within 1 / 5 to 1 / 3 of the height length 11H from the top surface 11a of the main body 11, the flame formed at the ignition hole 15 can easily reach the fuel gas nozzle 14, thereby improving the ignition ability of the curtain burner 1.

[0032] (4) The cross-sectional area of ​​the ignition hole 15 does not need to be large; it need only be approximately the same as or slightly smaller than the cross-sectional area of ​​the fuel gas nozzle 14. Therefore, the release of fuel gas from the ignition hole 15 does not deteriorate the flame formation ability of the curtain frame of the fuel gas nozzle 14.

[0033] (5) The distance between adjacent fuel gas nozzles 14 is approximately 3 to 4 times the diameter of the fuel gas nozzle 14 and the diameter of the ignition hole 15, so that the number of fuel gas nozzles can be reduced while facilitating flame formation at the fuel gas nozzles adjacent to the fuel gas nozzle where the flame is formed.

[0034] In the above embodiment, the ignition holes 15 are provided near the fuel gas outlet 14a located most upstream, but they may be provided near fuel gas outlets located further downstream. Also, the ignition holes may be provided near two or more of the multiple fuel gas outlets.

[0035] The present invention and embodiments can be summarized as follows.

[0036] (1) One embodiment of the present invention is a curtain frame device provided at an opening of a processing chamber for processing a workpiece, a curtain burner forming a curtain frame; an electric heater for igniting the curtain burner; an ignition hole communicating with a fuel gas supply pipe of the curtain burner is formed on a side surface of the main body of the curtain burner on the outer side of the furnace, The electric heater is provided near the ignition hole.

[0037] According to the above-mentioned configuration (1), by providing the electric heater that ignites the curtain burner near the ignition hole on the side of the curtain burner that communicates with the fuel gas supply pipe, it is possible to reduce the possibility of the electric heater being damaged by the curtain frame and improve the lifespan of the electric heater while maintaining the ignition ability of the curtain burner by the electric heater. Specifically, the electric heater no longer comes into direct contact with the curtain frame, so it is not damaged or its lifespan is shortened by overheating, and the electric heater does not impede the flow of fuel gas or combustion air, which would deteriorate the ignition ability or uniformity of the curtain burner.

[0038] (2) In the configuration (1), a plurality of fuel gas outlets communicating with the supply pipe are formed on the upper surface of the main body, The ignition hole is provided in the vicinity of the fuel gas outlet located most upstream in the fuel gas flow direction.

[0039] According to the above configuration (2), by providing the ignition hole near the fuel gas outlet located most upstream, the curtain burner is ignited by an electric heater at the outlet where the fuel gas concentration is high, thereby improving the ignition ability of the curtain burner.

[0040] (3) In the configuration (1) or (2), the ignition hole is provided at a position within 1 / 5 to 1 / 3 of the height of the main body from the top surface of the main body.

[0041] According to the above-mentioned configuration (3), by providing the ignition hole at a position within 1 / 5 to 1 / 3 of the height direction length from the top surface of the main body, the flame formed at the ignition hole can easily reach the fuel gas outlet, improving the ignition performance of the curtain burner. Specifically, if the ignition hole is located closer than 1 / 5, the electric heater is easily damaged by heat from the curtain frame, and if the ignition hole is located farther than 1 / 3, the flame ignited at the ignition hole is less likely to spread to the fuel gas ejected from the top surface of the main body.

[0042] (4) In the configuration (2), the cross-sectional area of ​​the ignition hole on the side surface of the main body is approximately the same as or slightly smaller than the cross-sectional area of ​​the fuel gas nozzle on the top surface of the main body.

[0043] According to the configuration (4), by making the cross-sectional area of ​​the ignition hole approximately the same as or slightly smaller than the cross-sectional area of ​​the fuel gas outlet, the release of fuel gas from the ignition hole is suppressed, and the flame formation ability of the curtain frame of the fuel gas outlet is not deteriorated.

[0044] (5) In the configuration (2) or (4), the interval between adjacent fuel gas outlets is about 3 to 4 times the diameter of the fuel gas outlet.

[0045] According to the above configuration (5), the number of fuel gas nozzles can be reduced while facilitating flame formation at the fuel gas nozzles adjacent to the fuel gas nozzle where the flame is formed. Specifically, if the number of nozzles is less than three times (i.e., if the number of nozzles is large), the amount of fuel gas ejected downstream of the supply pipe decreases, and if the number is more than four times, it becomes difficult for the flame to spread to the downstream fuel gas nozzle.

[0046] Various modifications and variations may be made without departing from the spirit and scope of the present invention as set forth in the following claims. [Industrial Applicability]

[0047] The present invention provides a curtain frame device that can reduce the possibility of damage to the electric heater by the curtain frame and improve the life of the electric heater while maintaining the ignition ability of the curtain burner when the curtain burner is ignited using an electric heater, and is therefore of great industrial value. [Explanation of symbols]

[0048] 1 Curtain Burner 10 Curtain frame device 11 main body, 11a top surface, 11b side surface, 11H height 12 Supply pipe 14 Fuel gas outlet 14a Fuel gas outlet located most upstream 14D Fuel gas nozzle diameter, 14L spacing 15 Ignition hole, 15D Ignition hole diameter, 15H Ignition hole position 5 Electric heater 51 heating part, 51a upper end, 51D diameter of heating part 52 Support part 53 Lead part 90 Processing Equipment 91 treatment chamber 92 furnace body 93 opening 94 door S Processing object T-gap

Claims

1. A curtain frame device provided near an opening of a processing chamber for processing an object to be processed, a curtain burner forming a curtain frame; an electric heater for igniting the curtain burner; an ignition hole communicating with a fuel gas supply pipe of the curtain burner is formed on a side surface of the main body of the curtain burner on the outer side of the furnace, The electric heater is provided in the vicinity of the ignition hole, A curtain frame device in which the heat generating portion of the electric heater faces the ignition hole, the upper end of the heat generating portion is positioned at the same level as or lower than the upper surface of the main body portion in the vertical direction, and a gap of approximately half the diameter of the heat generating portion is provided between the heat generating portion and the ignition hole.

2. a plurality of fuel gas outlets communicating with the supply pipe are formed on an upper surface of the main body; 2. The curtain frame device according to claim 1, wherein the ignition hole is provided in the vicinity of the fuel gas outlet located most upstream in the fuel gas flow direction.

3. 2. The curtain frame device according to claim 1, wherein the ignition hole is provided at a position within 1 / 5 to 1 / 3 of the height of the main body from the top surface of the main body.

4. 3. The curtain frame device according to claim 2, wherein a cross-sectional area of ​​the ignition hole on the side surface of the main body portion is approximately the same as or slightly smaller than a cross-sectional area of ​​the fuel gas nozzle on the top surface of the main body portion.

5. 5. The curtain frame device according to claim 4, wherein the interval between adjacent fuel gas outlets is about 3 to 4 times the diameter of the fuel gas outlet.

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