Control device and method for alternately switching the operating states of two processing facilities

Abstract

To provide a control device and a method for controlling operational states of two processing facilities to alternately convert them.SOLUTION: Respective processing facilities are alternately operated to process a waste gas which is generated in a semiconductor manufacture process. Two pipelines are pipes for transporting the waste gas to the processing facilities, and two electrothermal units provide thermal energy to the pipelines. Such a control device includes a man-machine interface controller, a programmable controller, and a signal transmission port in which the programmable controller selectively makes the loads of the electrothermal units rise or fall as a cutoff valve and the electrothermal units are controlled in a time-sequential manner. Consumption of electric energy due to the electrothermal unit in a backup state is reduced and an entire carbon discharge amount can be reduced.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a treatment facility for waste gases generated during a semiconductor manufacturing process, and more particularly to a control device and method for alternately switching the operating states of two treatment facilities. [Background technology]

[0002] Waste gases generated in semiconductor manufacturing processes must be repeatedly treated through appropriate waste gas treatment equipment until they meet standards before they can be discharged to the outside or reused. Such treatment equipment may be a type of local scrubber (LSC). The manufacturing process equipment performs the semiconductor manufacturing process and generates waste gases during its operation. The treatment equipment must be shut down to remove trapped substances in the waste gases or to perform maintenance on the equipment. To prevent the shutdown of the treatment equipment from affecting the progress of the semiconductor manufacturing process, two pieces of treatment equipment are provided corresponding to the manufacturing process equipment. When one piece of treatment equipment is shut down to remove trapped substances or to perform maintenance on the equipment, the other piece of treatment equipment is operated to treat the waste gas. The treatment equipment alternates between operating and shut down states, so that the continuous operation of the semiconductor manufacturing process is not restricted by the shutdown of each piece of treatment equipment.

[0003] The two pipelines are respectively connected to the manufacturing process equipment, and each pipeline is respectively connected to each of the treatment equipment, so that the waste gas generated from the manufacturing process equipment is transmitted through a selected one of the pipelines to one of the treatment equipments connected to the pipeline.

[0004] According to the need to transport waste gas having a specific substance or property, each of the pipelines for transporting the waste gas needs to be maintained within a corresponding temperature range. When assembling each of the pipelines through which the waste gas flows, it is necessary to prevent the components of the waste gas from depositing inside each of the pipelines and clogging each of the pipelines. Therefore, two electric heating units are used to provide heat energy to each of the pipelines, each of which includes a plurality of electrothermal zones and a temperature control device. Each of the electrothermal zones is sequentially installed along the pipelines to which it is connected, and the temperature control device is configured to sense the temperature of each of the electrothermal zones and correspondingly control the current passing through each of the electrothermal zones based on the sensed temperature, thereby maintaining the temperature of each of the pipelines by controlling the heat energy generated in each of the electrothermal zones.

[0005] One of the two pieces of processing equipment that alternately switch between an operating state and a shutdown state is defined as a first processing equipment, and the other piece of processing equipment is defined as a second processing equipment, the pipeline connecting the first processing equipment and the manufacturing process equipment is defined as a first pipeline, the electric heating unit arranged corresponding to the first pipeline is defined as a first electric heating unit, the pipeline connecting the second processing equipment and the manufacturing process equipment is defined as a second pipeline, and the electric heating unit arranged corresponding to the second pipeline is defined as a second electric heating unit. Summary of the Invention [Problem to be solved by the invention]

[0006] The first treatment equipment, which is in a shutdown state, can be switched into an operational state and treat the waste gas generated from the manufacturing process equipment instead of the second treatment equipment, which is in an operational state, thereby allowing the second treatment equipment to be shut down to remove trapped substances or perform maintenance on the equipment. At this time, the waste gas can selectively pass through the first pipeline to flow toward the first treatment equipment, and the waste gas cannot be selectively passed through the second pipeline. However, the second electric heating unit still maintains a power supply state to its electrothermal zone, and the second pipeline continues to maintain a temperature range required for the transport of the waste gas, resulting in unnecessary consumption of electrical energy and adversely affecting overall carbon emissions.

[0007] A primary object of the present invention is to provide a control device and method for controlling two treatment facilities so as to alternately switch between their operating states. [Means for solving the problem]

[0008] Based on the above object, the present invention adopts the following technical solution: A control device for controlling the operation states of two treatment facilities to alternately switch between them,

[0009] The two treatment facilities are operated alternately to treat waste gases generated in a semiconductor manufacturing process, each treatment facility being defined as a first treatment facility and a second treatment facility, respectively. A first pipeline connects the first treatment facility with manufacturing process equipment that generates the waste gas, and a second pipeline connects the second treatment facility with the manufacturing process equipment, and the waste gas is selectively passed through the first pipeline or the second pipeline to be transmitted to the first treatment facility or the second treatment facility. The first electric heating unit includes a plurality of first electrolytic zones and a first temperature controller, and each of the first electrolytic zones is disposed sequentially along the first pipeline and surrounds the first pipeline. the first temperature controller detects the temperature of the first pipeline and controls each of the first electrolytic zones to generate thermal energy; the second electric heating unit includes a plurality of second electrolytic zones and a second temperature controller, each of the second electrolytic zones being arranged sequentially along the second pipeline and surrounding the second pipeline; the second temperature controller detects the temperature of the second pipeline and controls each of the second electrolytic zones to generate thermal energy; a first shut-off valve is provided at an end of the first pipeline communicating with the manufacturing process equipment; and a second shut-off valve is provided at an end of the second pipeline communicating with the manufacturing process equipment;

[0010] The control device includes a man-machine interface controller, a programmable controller electrically connected to the man-machine interface controller, and a signal transmission port electrically connected to the programmable controller, the signal transmission port being connected to the first shut-off valve and the second shut-off valve, the first temperature controller and the second temperature controller being connected in parallel by the signal transmission port, the man-machine interface controller including a display, a switch circuit, and a microprocessor, the display and the switch circuit being electrically connected to the microprocessor, respectively, the display displays the temperatures of the first pipe line and the second pipe line and displays the open / closed states of the first shut-off valve and the second shut-off valve based on signals transmitted from the microprocessor, and the switch circuit is a control device for controlling two processing facilities to alternately switch operating states, the control device transmitting a first control signal to the microprocessor based on an operation by a user, the microprocessor processing the first control signal and transmitting a second control signal to the programmable controller based on a processing result, the programmable controller processing the second control signal and controlling the first shutoff valve, the second shutoff valve, the first temperature controller, and the second temperature controller in time series through the signal transmission port based on the processing result, thereby selectively increasing or decreasing the load on the first electric heating unit and the second electric heating unit, respectively, and the first shutoff valve and the second shutoff valve selectively opening or closing the communication state of the first pipeline and the second pipeline with the manufacturing process equipment, respectively.

[0011] The method for controlling the operation state of the second treatment facility to be alternately switched is a method performed using a control device that controls the operation state of the second treatment facility to be alternately switched as described above,

[0012] The method includes a first electric heating unit load increasing step in which the first temperature controller controls each of the first electrolytic zones to increase the load, thereby increasing the supply of thermal energy to the first pipes and raising the temperature of the first pipes; a first pipe temperature determination step in which the temperature of the first pipes is compared with a set first temperature, and if the first temperature is a temperature at which the waste gas does not deposit and does not clog the first pipes and the temperature of the first pipes is lower than the first temperature, the first electric heating unit load increasing step is executed again; and if the temperature of the first pipes is equal to the first temperature, the subsequent steps are executed continuously; and a first pipe temperature determination step in which, if the temperature of the first pipes used in the first pipe temperature determination step is equal to the first temperature, the first shutoff valve is opened to allow the waste gas to pass through the first pipes and flow toward the first treatment equipment, and the first electric heating unit and the first treatment equipment enter an operating state; a second electric heating unit load reduction step in which, after the second shutoff valve is closed, the second temperature controller controls each of the second electric heat zones to reduce the load, thereby reducing the supply of thermal energy to the second pipes and lowering the temperature of the second pipes; and a second pipe temperature determination step in which the temperature of the second pipes is compared with a set second temperature, the second temperature is reduced to a lower value than the first temperature, and if the temperature of the second pipes is higher than the second temperature, the second electric heating unit load reduction step is performed again, and if the temperature of the second pipes is equal to the second temperature, the second electric heating unit and the second treatment equipment enter a backup state. [Effects of the Invention]

[0013] According to the present invention, the load of the first electric heating unit or the second electric heating unit, which is controlled to be switched to a backup state, is reduced, thereby reducing the consumption of electric energy in the first electric heating zone or the second electric heating zone, and reducing overall carbon emissions. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is a system layout diagram in which a first embodiment of the present invention is arranged. [Figure 2] FIG. 10 is a partial cross-sectional view showing the first electrolytic zone installed in the first pipe line. [Figure 3] FIG. 10 is a partial cross-sectional view showing the second electrolytic zone installed in the second pipe line. [Figure 4] FIG. 2 is a diagram showing the electrical circuit architecture of a control device according to a first embodiment of the present invention. [Figure 5] 1 is a flowchart of a method according to a first embodiment of the present invention; [Figure 6] 10 is a line graph (1) showing control of temperature change in the first pipe line in the first embodiment of the present invention. [Figure 7] 10 is a line graph (1) showing control of temperature change in the second pipe line in the first embodiment of the present invention; [Figure 8] 10 is a line graph (2) showing control of the temperature change of the first pipe line in the first embodiment of the present invention. [Figure 9] 10 is a line graph (2) showing control of the temperature change of the second pipe line in the first embodiment of the present invention. [Figure 10] FIG. 10 is a diagram showing the electrical circuit architecture of a control device according to a second embodiment of the present invention. [Figure 11] FIG. 10 is a diagram showing the electrical circuit architecture of a control device according to a third embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION [Example]

[0015] As shown in FIGS. 1 to 4, two treatment facilities are operated alternately to treat waste gas generated in a semiconductor manufacturing process, and each treatment facility is defined as a first treatment facility 11 and a second treatment facility 12. A first pipeline 13 connects the first treatment facility 11 to a manufacturing process facility 90 that generates the waste gas, and a second pipeline 14 connects the second treatment facility 12 to the manufacturing process facility 90. The waste gas is selectively passed through the first pipeline 13 or the second pipeline 14 to be transmitted to the first treatment facility 11 or the second treatment facility 12. A first electric heating unit 15 includes a plurality of first electrolytic zones 152 and a first temperature controller 154. The first electrolytic zones 152 are arranged sequentially along the first pipeline 13 and surround the first pipeline 13, and the first temperature controllers 15 4 detects the temperature of the first pipeline 13 and controls each of the first electrolytic zones 152 to generate thermal energy based on the detected temperature; the second electrolytic unit 16 includes a plurality of second electrolytic zones 162 and a second temperature controller 164, each of the second electrolytic zones 162 being arranged sequentially along the second pipeline 14 and surrounding the second pipeline 14; the second temperature controller 164 detects the temperature of the second pipeline 14 and controls each of the second electrolytic zones 162 to generate thermal energy based on the detected temperature; a first shut-off valve 17 is provided at the end of the first pipeline 13 communicating with the manufacturing process equipment 90; and a second shut-off valve 18 is provided at the end of the second pipeline 14 communicating with the manufacturing process equipment 90.

[0016] The first electric heating unit 15 and the second electric heating unit 16 are existing technologies that are familiar to those skilled in the art in the technical field to which the present invention pertains, and therefore, detailed descriptions of the specific configurations of the first electric heating unit 15 and the second electric heating unit 16 will be omitted.

[0017] The control device 20, which controls the operation states of the first treatment equipment 11 and the second treatment equipment 12 to be alternately switched, includes a man-machine interface controller 30, a programmable controller 40, and a signal transmission port 50, wherein the man-machine interface controller 30 is electrically connected to the programmable controller 40, the programmable controller 40 is electrically connected to the signal transmission port 50, the signal transmission port 50 is connected to the first shut-off valve 17 and the second shut-off valve 18, and the first temperature controller 154 and the second temperature controller 164 are connected in parallel by the signal transmission port 50.

[0018] The man-machine interface controller 30 includes a display 32, a switch circuit 34, and a microprocessor 36, of which the display 32 and the switch circuit 34 are electrically connected to the microprocessor 36, and the display 32 displays the temperatures of the first pipe line 13 and the second pipe line 14 based on a signal from the microprocessor 36, and displays the open / closed states of the first shut-off valve 17 and the second shut-off valve 18. The switch circuit 34 transmits a first control signal to the microprocessor 36 based on a user's operation, and the microprocessor 36 processes the first control signal and outputs a result of the processing. Based on the result of the processing, a second control signal is transmitted to the programmable controller 40, and the programmable controller 40 processes the second control signal and controls the first shut-off valve 17, the second shut-off valve 18, the first temperature controller 154, and the second temperature controller 164 in time series through the signal transmission port 50, respectively, to selectively increase or decrease the load on the first electric heating unit 15 and the second electric heating unit 16, and the first shut-off valve 17 and the second shut-off valve 18 selectively open or close the communication state of the first pipeline 13 and the second pipeline 14 with the manufacturing process equipment 90, respectively.

[0019] The programmable controller 40 transmits signals to the first shutoff valve 17, the second shutoff valve 18, the first temperature controller 154, and the second temperature controller 164 through the signal transmission port 50, respectively, thereby operating the first shutoff valve 17, the second shutoff valve 18, the first temperature controller 154, and the second temperature controller 164, respectively, and the first temperature controller 154 and the second temperature controller 164 transmit signals to the programmable controller 40 and the man-machine interface controller 30 through the signal transmission port 50, respectively, and the man-machine interface controller 30 can display the temperatures of the first pipe 13 and the second pipe 14, providing the user with the convenience of monitoring and controlling the first pipe 13 and the second pipe 14.

[0020] The first treatment equipment 11 can be switched into an operating state according to demand, treating the waste gas instead of the second treatment equipment 12, and the second treatment equipment 12 in an operating state can be switched into a shutdown state. In the process of treating the waste gas in the second treatment equipment 12, trapped substances can be removed or equipment maintenance can be performed. After the removal of the trapped substances or equipment maintenance is completed, the second treatment equipment 12 can be switched into a backup state. When it is necessary to remove such substances in the first treatment equipment 11 or perform equipment maintenance, the second treatment equipment 12 is switched into an operating state, and the first treatment equipment 11 enters a shutdown state. The operating states of the first treatment equipment 11 and the second treatment equipment 12 are switched alternately, and the manufacturing process equipment 90 can be continuously operated to perform the semiconductor manufacturing process.

[0021] When a user operates the man-machine interface controller 30, the first shut-off valve 17, the second shut-off valve 18, the first temperature controller 154, and the second temperature controller 164 can be controlled in time series through the programmable controller 40, thereby increasing or decreasing the load on the first electric heating unit 15 and the second electric heating unit 16, respectively, and the first shut-off valve 17 and the second shut-off valve 18 opening or closing the communication state of the first pipeline 13 and the second pipeline 14 with the manufacturing process equipment 90, respectively, thereby satisfying the need to alternately switch the operating states of the first treatment equipment 11 and the second treatment equipment 12.

[0022] When the first treatment equipment 11 or the second treatment equipment 12 is switched to a shutdown state, the programmable controller 40 controls the corresponding first electric heating unit 15 or the second electric heating unit 16 to reduce the load, thereby reducing the electrical energy consumption by each of the first electric heating zones 152 or each of the second electric heating zones 162, and the control device 20 is able to reduce overall carbon emissions.

[0023] As shown in FIGS. 5 to 9, the method of alternately switching the operating states of the first treatment facility 11 and the second treatment facility 12 executed by the control device 20 includes the following steps, which are executed sequentially.

[0024] In the load increase step of the first electric heating unit, the programmable controller 40 transmits a signal to the first electric heating unit 15, and the first temperature controller 154 increases the load of each of the first electric heating zones 152 based on the signal control, increases the supply of thermal energy to the first pipeline 13 to raise the temperature of the first pipeline 13, and controlling each of the first electric heating zones 152 to increase the load means increasing the power supplied to each of the first electric heating zones 152 to raise the temperature of each of the first electric heating zones 152.

[0025] In the temperature judgment step of the first pipeline, the temperature of the first pipeline 13 is compared with the set first temperature T1, and the first temperature T1 is a temperature at which the waste gas does not deposit and does not clog the first pipeline 13. The specific temperature value of the first temperature T1 is determined according to the properties and components of the waste gas flowing through the first pipeline 13. If the temperature of the first pipeline 13 is lower than the first temperature T1, the load increase step of the first electric heating unit 15 is executed again. If the temperature of the first pipeline 13 is equal to the first temperature T1, the subsequent steps are continued.

[0026] In the step of opening the first shutoff valve, if the temperature of the first pipe 13 based on the step of determining the temperature of the first pipe is equal to the first temperature T1, the programmable controller 40 transmits a signal to the first shutoff valve 17 to control the first shutoff valve 17 to open, thereby causing the waste gas to pass through the first pipe 13 and flow toward the first treatment equipment 11, and the first electric heating unit 15 and the first treatment equipment 11 enter an operating state, and the temperature of the first pipe 13 is After the temperature of the first line 13 has risen to the first temperature T1, the programmable controller 40 controls the first shut-off valve 17 to open for the first time. When the temperature of the first line 13 has not yet risen to the first temperature T1, the first shut-off valve 17 is kept closed to prevent the waste gas from entering the first line 13. This prevents the waste gas from being introduced into the first line 13 prematurely, which could cause components of the waste gas to deposit inside the first line 13 or block the first line 13.

[0027] In the step of closing the second shut-off valve, if the temperature of the first pipeline 13, which is the basis for the step of determining the temperature of the first pipeline, is equal to the first temperature T1, the second shut-off valve 18 is closed to prevent the waste gas from entering the second pipeline 14.

[0028] In the load reduction step of the second electric heating unit, after closing the second shut-off valve 18, the programmable controller 40 transmits a signal to the second electric heating unit 16, and the second temperature controller 164 reduces the load of each of the second electrolytic zones 162 based on the signal control, reduces the supply of thermal energy to the second pipeline 14, and lowers the temperature of the second pipeline 14. Controlling each of the second electrolytic zones 162 to reduce the load means reducing the power supplied to each of the second electrolytic zones 162, lowering the temperature of each of the second electrolytic zones 162, and reducing the consumption of electrical energy by each of the second electrolytic zones 162.

[0029] In the load reduction step of the second heating unit, two load reduction modes can be selected to reduce the power supplied to each of the second electrolytic zones 162. In the first load reduction mode, the current passing through each of the second electrolytic zones 162 is reduced while maintaining the current supplied to each of the second electrolytic zones 162. In the second load reduction mode, the power supplied to each of the second electrolytic zones 162 is stopped. In both load reduction modes, the power supplied to the second temperature controller 164 is maintained, thereby allowing the second temperature controller 164 to operate, and temperature detection of the second pipe 14 and control of each of the second electrolytic zones 162 are maintained. Such load reduction does not necessarily stop the operation of the second heating unit 16.

[0030] In the temperature determination step of the second pipeline, the temperature of the second pipeline 14 is compared with the set second temperature T2 to determine whether it is equal to the set second temperature T2, and the second temperature T2 is set lower than the first temperature T1. If the temperature of the second pipeline 14 is higher than the second temperature T2, the load reduction step of the second electric heating unit is executed again. If the temperature of the second pipeline 14 is equal to the second temperature T2, the second electric heating unit 16 and the second treatment equipment 12 enter a backup state.

[0031] In the line graphs shown in FIGS. 6 to 9, the horizontal axis represents time, and the vertical axis represents temperature.

[0032] FIG. 6 illustrates an example in which the first pipe line 13 is selected to increase the temperature stepwise from the second temperature T2 to the first temperature T1, where Ta, Tb, and Tc indicate temperatures at different temperature increase stages, and the temperature of the first pipe line 13 is increased sequentially from the second temperature T2 to temperature Tc, temperature Tb, and temperature Ta, and then further increased to the first temperature T1.

[0033] FIG. 7 illustrates an example in which the second pipe 14 is selected to decrease the temperature stepwise from the first temperature T1 to the second temperature T2, where Ta, Tb, and Tc indicate temperatures at different temperature decrease stages, and the temperature of the second pipe 14 is decreased sequentially from the first temperature T1 to the temperature Ta, the temperature Tb, and the temperature Tc, and then further decreased to the second temperature T2.

[0034] FIG. 8 illustrates an example in which the first pipe line 13 is selected to continuously increase the temperature from the second temperature T2 to the first temperature T1, and FIG. 9 illustrates an example in which the second pipe line 14 is selected to continuously decrease the temperature from the first temperature T1 to the second temperature T2.

[0035] Such a backup state is not equivalent to a shutdown or down state, and a shutdown or down state are simply varieties of such a backup state.

[0036] After the second electric heating unit 16 is reduced in load and enters a backup state, it is possible to select to continuously supply power to each of the second electrolytic zones 162, thereby maintaining a small amount of thermal energy from each of the second electric heating zones 162 to the second pipeline 14, and maintaining the temperature of the second pipeline 14 at the second temperature T2, which is higher than room temperature. Therefore, if an unexpected accident occurs and the waste gas does not pass through the first pipeline 13 or the first treatment equipment 11 cannot treat the waste gas, the second electric heating unit 16 in the backup state can raise the temperature of the second pipeline 14 from the second temperature T2, which is higher than room temperature, to the first temperature T1 in a relatively short time. The waste gas can then be selected to pass through the second pipeline 14 and flow toward the second treatment equipment 12, which treats the waste gas instead of the first treatment equipment 11, thereby reducing the adverse effects that may be caused by such an accident.

[0037] The display 32 may be a touch panel display, which is provided to display icons for touching to increase or decrease the load of the first electric heating unit 15 and the second electric heating unit 16, and the switch circuit 34 is electrically connected to the display 32, so that the user can operate the switch circuit 34 by touching the icons.

[0038] The control device 20 executes the above-described method of alternately switching the operating states of the first treatment equipment 11 and the second treatment equipment 12, and the programmable controller 40 controls the load increase of the first electric heating unit 15, the opening of the first shut-off valve 17, the closing of the second shut-off valve 18, and the load decrease of the second electric heating unit 16 in a time series, thereby forming an effective foolproof mechanism and preventing the first electric heating unit 15, the first shut-off valve 17, the second shut-off valve 18, or the second electric heating unit 16 from failing to operate at the correct time due to user error. [Example]

[0039] As shown in FIG. 10 , the main difference between the configuration of Example 2 and Example 1 is that the control device 20 further includes a power control module 60, which is electrically connected to the signal transmission port 50 and forms a parallel connection relationship between the power control module 60 and the programmable controller 40. The power control module 60 has two manual switches 62, each of which controls the power supply to the first electrolytic zone 152 and the second electrolytic zone 162 through the signal transmission port 50. The manual switches 62 are linked together to form a foolproof mechanism, which can prevent the user from accidentally increasing or decreasing the load on the first electrolytic zone 152 and the second electrolytic zone 162.

[0040] In the second embodiment, the man-machine interface controller 30 or the power control module 60 can be selected and operated as needed to control the operation of the first electric heating unit 15 or the second electric heating unit 16 . [Example]

[0041] As shown in FIG. 11 , the main difference between the configuration of the third embodiment and the first embodiment is that the control device 20 further includes a second man-machine interface controller 70, of which the second man-machine interface controller 70 is connected to the programmable controller 40, and a parallel connection relationship is formed between the man-machine interface controller 30 and the second man-machine interface controller 70. A wired connection or a wireless connection may be selectively adopted between the second man-machine interface controller 70 and the programmable controller 40, and the second man-machine interface controller 70 and the programmable controller 40 may select to transmit signals to each other via a wireless network, thereby allowing a user to select to perform remote control via the second man-machine interface controller 70. [Explanation of symbols]

[0042] 11: First treatment facility 12: Second treatment facility 13: 1st pipeline 14:Second conduit 15: First electric heating unit 152: First electric field 154: First temperature controller 16: Second electric heating unit 162: Second electric field 164: Second temperature controller 17: First shutoff valve 18: Second shutoff valve 20: Control device 30: Man-machine interface controller 32: Display 34: Switch circuit 36: Microprocessor 40: Programmable controller 50: Signal transmission port 60: Power control module 62: Manual switch 70: Second man-machine interface controller 90: Manufacturing process equipment T1: 1st temperature T2: Second temperature Ta,Tb,Tc:Temperature

Claims

1. A control device that controls the operation states of two treatment facilities to be alternately switched, The two treatment facilities are operated alternately to treat waste gases generated in a semiconductor manufacturing process, each of the two treatment facilities being defined as a first treatment facility and a second treatment facility, a first pipeline connecting the first treatment facility with manufacturing process equipment that generates the waste gas, a second pipeline connecting the second treatment facility with the manufacturing process equipment, and the waste gas is selectively passed through the first pipeline or the second pipeline to be transmitted to the first treatment facility or the second treatment facility, and a first electric heating unit includes a plurality of first electrolytic zones and a first temperature controller, each of the first electrolytic zones being arranged sequentially along the first pipeline and each of the first electrolytic zones being connected to the first temperature controller. the first temperature controller detects the temperature of the first conduit and controls each of the first electrolytic zones to generate thermal energy; the second electric heating unit includes a plurality of second electrolytic zones and a second temperature controller, each of the second electrolytic zones being arranged sequentially along the second conduit and respectively enclosing the second conduit; the second temperature controller detects the temperature of the second conduit and controls each of the second electrolytic zones to generate thermal energy; a first shut-off valve is provided at an end of the first conduit communicating with the manufacturing process equipment; and a second shut-off valve is provided at an end of the second conduit communicating with the manufacturing process equipment; The control device includes a man-machine interface controller, a programmable controller electrically connected to the man-machine interface controller, and a signal transmission port electrically connected to the programmable controller, the signal transmission port being connected to the first shut-off valve and the second shut-off valve, the first temperature controller and the second temperature controller being connected in parallel by the signal transmission port, the man-machine interface controller including a display, a switch circuit, and a microprocessor, the display and the switch circuit being electrically connected to the microprocessor, respectively, the display being configured to display the temperatures of the first pipe line and the second pipe line and to display the open / closed states of the first shut-off valve and the second shut-off valve based on a signal transmitted from the microprocessor, and the switch circuit being configured to display the open / closed states of the first shut-off valve and the second shut-off valve based on a signal transmitted from the microprocessor, the microprocessor processes the first control signal and transmits a second control signal to the programmable controller based on the processing result; the programmable controller processes the second control signal and controls the first shutoff valve, the second shutoff valve, the first temperature controller, and the second temperature controller in time sequence through the signal transmission port based on the processing result, thereby selectively increasing or decreasing the load on the first electric heating unit and the second electric heating unit, respectively; and the first shutoff valve and the second shutoff valve selectively open or close the communication state of the first pipeline and the second pipeline with the manufacturing process equipment, respectively.

2. 2. The control device for controlling the operation states of two treatment facilities to be alternately switched as described in claim 1, further comprising a power control module electrically connected to the signal transmission port, wherein the power control module and the programmable controller are connected in parallel, and the power control module has two manual switches for controlling the power supply to each of the first electrolytic zone and each of the second electrolytic zone through the signal transmission port.

3. 2. The control device for controlling the alternating switching of the operating states of two treatment equipments as described in claim 1, characterized in that the display, which is a touch panel type display, is provided to display icons that can be touch-operated to increase or decrease the load of the first electric heating unit and the second electric heating unit, and the switch circuit is electrically connected to the display.

4. 2. A method for treating waste gases generated in a semiconductor manufacturing process by using a control device for controlling the operation states of two processing equipments to be alternately switched as claimed in claim 1, The method includes a first electric heating unit load increasing step in which the first temperature controller controls each of the first electrolytic zones to increase the load, thereby increasing the supply of thermal energy to the first pipes and raising the temperature of the first pipes; a first pipe temperature determination step in which the temperature of the first pipes is compared with a set first temperature, and if the first temperature is a temperature at which the waste gas does not deposit and does not clog the first pipes, the first electric heating unit load increasing step is performed again; and if the temperature of the first pipes is equal to the first temperature, the subsequent steps are performed continuously; and a first pipe temperature determination step in which, if the temperature of the first pipes used in the first pipe temperature determination step is equal to the first temperature, the first shutoff valve is opened to allow the waste gas to pass through the first pipes and flow toward the first treatment equipment, and the first electric heating unit and the first treatment equipment enter an operating state; and a second electric heating unit load reduction step in which, after the second shutoff valve is closed, the second temperature controller controls each of the second electrolytic zones to reduce the load, thereby reducing the supply of thermal energy to the second pipes and lowering the temperature of the second pipes; and a second pipe temperature determination step in which the temperature of the second pipes is compared with a set second temperature, the second temperature is reduced to a lower value than the first temperature, and if the temperature of the second pipes is higher than the second temperature, the second electric heating unit load reduction step is performed again, and if the temperature of the second pipes is equal to the second temperature, the second electric heating unit and the second treatment equipment enter a backup state.

5. 5. The method for controlling two processing equipments to alternately switch between their operating states as set forth in claim 4, wherein the second temperature is between the first temperature and room temperature.

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