Semiconductor-superconductor hybrid devices with tunnel barriers

Abstract

The device includes a semiconductor-superconductor hybrid structure having a semiconductor component and a superconductor component, the superconductor component having a layer of aluminum, at least one conductive lead in tunneling communication with the semiconductor-superconductor hybrid structure, and a tunnel barrier disposed between the semiconductor-superconductor hybrid structure and the at least one conductive lead. The conductive lead is disposed on the superconductor component such that the superconductor component shields the semiconductor component from the conductive lead. The tunnel barrier is disposed between the superconductor component and the at least one conductive lead. Methods of manufacturing and operating the device are also provided.

Description

[Background technology]

[0001] Given the right conditions, nanowires brought close to superconductors are expected to host topological phases of material, making them promising candidates as building blocks for fault-tolerant quantum computers.

[0002] The topological phase manifests itself in the form of a pair of Majorana zero modes ("MZM") at the ends of the nanowire. Along the bulk of the wire, away from the ends, there exists a gap in the single-electron spectrum. Experiments typically use tunneling spectroscopy at the ends of the nanowire to detect a zero-bias peak ("ZBP") in the tunneling conductance.

[0003] By forming a network of such nanowires and inducing topological regimes in places along the network, it is possible to create quantum bits (qubits), which can be manipulated for quantum computing purposes. A quantum bit, also called a qubit, is an element on which a measurement with two possible outcomes can be performed, but which at any given time (when not measured) can actually be in a quantum superposition of two states corresponding to those different outcomes.

[0004] A nanowire can take the form of an elongated piece of semiconductor material with a length dimension many times greater than its width and thickness. Nanowires are quasi-one-dimensional systems. A layer of a conventional superconductor is disposed over at least a portion of the nanowire.

[0005] Another useful system for creating MZMs is semiconductor nanowires based on a two-dimensional electron gas ("2DEG") with close coupling to a conventional superconductor. The superconductor is typically grown as part of an epitaxial 2D wafer stack, but can also be deposited after material growth during fabrication. This material platform has significant spin-orbit coupling and large electron g-factors, which are key factors for the formation of topological states. The 2D platform enables complex device geometries through top-down lithographic patterning involving etching and deposition.

[0006] To induce a topological phase, the device is cooled to a temperature where the superconductor (e.g., aluminum) exhibits superconducting behavior. The superconductor induces a proximity effect in the adjacent semiconductor, which causes the region of the semiconductor near its interface to also exhibit superconducting properties, i.e., a superconducting pairing gap is induced in the adjacent semiconductor. When a magnetic field is applied, MZMs are formed at both ends of the semiconductor-superconductor hybrid.

[0007] The role of a magnetic field is to lift (or break) the spin degeneracy in semiconductors. Degeneracy, in the context of quantum systems, refers to when different quantum states have the same energy levels. Breaking degeneracy refers to forcing the states to adopt different energy levels. Spin degeneracy refers to when different spin states have the same energy levels. Spin degeneracy can be lifted by a magnetic field, resulting in energy level splitting between differently spin-polarized electrons. This is known as the Zeeman effect. The Zeeman energy, i.e., the magnitude of the energy level splitting, should be at least as large as the superconducting gap to close the slight superconducting gap and reopen a topological gap in the system.

[0008] Inducing an MZM can also involve adjusting the electrostatic potential of charge carriers within the nanowire by gating the nanowire with an electrostatic potential. The electrostatic potential is applied using a gate electrode. Applying the electrostatic potential manipulates the number of charge carriers in the conduction band or valence band of the semiconductor component.

[0009] It is necessary to measure the electronic properties of semiconductor-superconductor hybrid systems. One technique used to perform such measurements is tunneling spectroscopy. To perform tunneling spectroscopy measurements, conducting leads are placed near the semiconductor-superconductor hybrid structure. A tunneling current is passed between the semiconductor-superconductor hybrid structure and the conducting leads. The properties of this current (e.g., its magnitude, frequency, and phase) are measured. Based on such measurements, information about the properties of the semiconductor-superconductor hybrid structure can be inferred.

[0010] FIG. 1 shows a typical system 100 for performing tunneling spectroscopy measurements. The system includes a semiconductor component 110 in the form of a nanowire. A superconductor component 120 is disposed on the semiconductor component. A normal-conducting lead 130 is disposed at the end of the semiconductor nanowire 110. The superconductor component does not extend to the end of the nanowire 110, but is separated from the normal-conducting lead by a space. A gate stack having a gate dielectric 142 and a gate electrode 144 is disposed on top of the semiconductor nanowire 110. The gate electrode 144 is configured to gate the semiconductor material within the space. Applying an electrostatic field to the gate electrode creates a tunneling barrier between the semiconductor-superconductor hybrid portion of the device and the normal-conducting lead. The tunneling barrier is created internal to the semiconductor component 110, i.e., a portion of the semiconductor acts as the tunneling barrier. Summary of the Invention

[0011] In one aspect, a device is provided, the device comprising: a semiconductor-superconductor hybrid structure having a semiconductor component and a superconductor component, the superconductor component having an aluminum layer; at least one conductive lead in tunnel communication with the semiconductor-superconductor hybrid structure; and a tunnel barrier disposed between the semiconductor-superconductor hybrid structure and the at least one conductive lead. The conductive lead is disposed on the superconductor component such that the superconductor component shields the semiconductor component from the conductive lead. The tunnel barrier is disposed between the superconductor component and the at least one conductive lead. The tunnel barrier is comprised of a native aluminum oxide layer integrally formed on the superconductor component. Because the superconductor component is disposed between the conductive lead and the semiconductor component, the superconductor component can block high-energy electrons, thereby allowing low-energy electrons (e.g., those corresponding to MZMs) to be more easily detected. Forming the tunnel barrier integrally on the superconductor component provides a high-quality dielectric barrier between the conductive lead and the semiconductor-superconductor hybrid structure.

[0012] In another aspect, a method of fabricating a device is provided, the method comprising: forming a semiconductor-superconductor hybrid structure by providing a semiconductor component on a substrate; fabricating a superconductor component on the semiconductor component, the superconductor component having a layer of aluminum, partially oxidizing the aluminum to form a tunnel barrier of native aluminum oxide on the superconductor component; and fabricating at least one conductive lead on the tunnel barrier.

[0013] In yet a further aspect, there is provided a method of operating a device as defined herein, the method comprising: cooling the device to a temperature below the critical temperature of the superconductor component such that the superconductor component exhibits superconductivity, applying a magnetic field to the semiconductor-superconductor hybrid structure, electrostatically gate the semiconductor-superconductor hybrid structure, and measuring a tunneling current through the at least one conductive lead.

[0014] This Summary is provided to introduce some concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. The claimed subject matter is not limited to implementations that solve any or all of the disadvantages discussed herein. [Brief explanation of the drawings]

[0015] To assist in understanding embodiments of the present disclosure and to show how those embodiments may be carried into effect, reference will now be made, by way of example only, to the accompanying drawings, in which: [Figure 1] FIG. 1 is a schematic cross-sectional view of a device according to a comparative example. [Figure 2] FIG. 10 is a diagram of the potential at a junction in a comparative device as a function of position. [Figure 3] 1 is a diagram of the potential as a function of position at an ideal junction. [Figure 4] 1 is a schematic cross-sectional view along the length of an example device. [Figure 5] FIG. 5 is a cross-sectional view taken along line A in FIG. [Figure 6] 1 is a flowchart of a method for manufacturing a device. [Figure 7] FIG. 1 is a schematic perspective view of a shadow wall useful in fabricating an example device. [Figure 8]FIG. 10 is a plan view of a shadow wall arrangement useful for fabricating a two-terminal device. [Figure 9] FIG. 10 is a plan view of a shadow wall arrangement useful for fabricating a three terminal device. [Figure 10] FIG. 10 is a plan view of a shadow wall arrangement useful for fabricating a device having conductive leads at each end of a nanowire and conductive leads in communication with the bulk region of the nanowire. [Figure 11] 1 is a flowchart of a method of operating a device. DETAILED DESCRIPTION OF THE INVENTION

[0016] As used herein, the verb 'have' is used as shorthand for 'comprise or consist of.' In other words, although the verb 'have' is intended to be an open term, particularly when used in connection with chemical compositions, replacement of this term with the closed term 'consisting of' is expressly contemplated.

[0017] Directional terms such as "top," "bottom," "left," "right," "upper," "lower," "horizontal," and "vertical" are used herein for convenience of explanation and relate to the orientation shown in the associated figures. The substrate is taken to be the "bottom" of the device. For the avoidance of doubt, this terminology is not intended to limit the orientation of the device in an external coordinate system.

[0018] As used herein, the terms "superconductor component" and "superconducting metal" refer to the material whose critical temperature T c Refers to components and metals that become superconducting when cooled to a lower temperature. The use of these terms is not intended to limit the temperature of the device when it is not in use.

[0019] A "nanowire" is an elongated member having a nanoscale width and a length-to-width ratio of at least 100, or at least 500, or at least 1000. Nanowires can have widths in the range of 10-500 nm, optionally 50-100 nm or 75-125 nm. Lengths are typically on the order of micrometers, e.g., at least 1 μm or at least 10 μm. In particular, nanowires can have diameters in the range of 80-100 nm and lengths in the range of 10-15 μm.

[0020] A "semiconductor-superconductor hybrid structure" comprises a semiconductor component and a superconductor component configured such that, under appropriate operating conditions, the superconductor component induces superconductivity in the semiconductor component via the proximity effect. In particular, the term refers to a structure capable of exhibiting topological behavior, such as Majorana zero modes or other excitations useful for quantum computing applications. Operating conditions generally include cooling the structure to a temperature below the Tc of the superconductor component, applying a magnetic field to the structure, and applying electrostatic gating to at least a portion of the structure. Typically, at least a portion of the semiconductor component is in intimate contact with the superconductor component; for example, the superconductor component may be epitaxially grown on the semiconductor component. However, certain device structures have been proposed that have one or more additional components between the semiconductor component and the superconductor component.

[0021] A "directional deposition process" is a process in which a directed beam of material or a precursor of the material is used to deposit material onto a surface. In a directional deposition process, the location where the material is adsorbed on the surface is determined by the direction of the beam. The beam has a constant azimuthal angle relative to the surface; in other words, the direction of the beam relative to the surface is fixed during deposition. Examples of processes that can be used to achieve directional deposition include molecular beam epitaxy, thermal evaporation, and electron beam evaporation.

[0022] It turns out that devices of the type shown in Figure 1 may not allow reliable detection of Majorana zero modes because only trivial states with characteristics similar to Majorana zero modes can be induced in such devices. For example, Andreev states can be induced in the tunnel junctions of this comparative device.

[0023] In this comparative device, the tunnel junction is defined electrostatically. This allows the junction to have a non-uniform or smooth electrostatic potential profile, as shown in Figure 2. A non-uniform potential profile can create "pseudo-Majorana" or insignificant states that reduce the visibility of true MZMs. This effect is described in Vuik, et al., SciPost Phys. 7, 061 (2019).

[0024] It would be desirable to provide a device with a tunnel barrier that has a sharp electrostatic potential profile, such as that shown in Figure 3. Provided herein are devices with tunnel junctions that involve fewer inconsequential states and / or may allow for easier detection of MZMs.

[0025] An example device 400 will now be described with reference to Figures 4 and 5. Figure 4 is a schematic cross-sectional view taken along the length of the device, and Figure 5 is a schematic cross-sectional view taken along line A in Figure 4.

[0026] Device 400 includes a semiconductor-superconductor hybrid structure, a tunnel barrier disposed on the semiconductor-superconductor hybrid structure, and a conductive lead disposed on the tunnel barrier at one end of the semiconductor-superconductor hybrid structure.

[0027] The device may be disposed on a substrate. A substrate typically comprises a wafer, i.e., a piece of single-crystal material. One example of a wafer material is indium phosphide. Other examples of wafer materials include gallium arsenide, indium antimonide, indium arsenide, and silicon. The substrate may also be a more sophisticated workpiece with additional structures disposed on or over the wafer. The substrate may comprise two or more layers of material. An example of a multilayer substrate is a silicon-on-insulator substrate, in particular one obtainable by the Smart Cut process.

[0028] The semiconductor-superconductor hybrid structure has a semiconductor component 410 and a superconductor component 420. The superconductor component 420 is configured to induce superconductivity in the semiconductor component 410 via the proximity effect. Under appropriate conditions, this can induce useful excitations, such as Majorana zero modes, in the hybrid structure.

[0029] Semiconductor components can be implemented in various ways. In this example, the semiconductor component 410 is in the form of a nanowire. Semiconductor nanowires can be manufactured, for example, by selective area growth ("SAG") or the vapour-liquid-solid ("VLS") process. Techniques for selective area growth are disclosed, for example, in Davies Proc. SPIE 2140, Epitaxial Growth Processes, 58 (doi:10.1117 / 12.175795); Fahed, Doctoral thesis: Selective area growth of in-plane III-V nanostructures using molecular beam epitaxy, 2016 (http: / / www.theses.fr / 2016LIL10114); Fukui et al, Appl. Phys. Lett. 58, 2018 (1991) (doi: 10.1063 / 1.105026); and Aseev et al. Nano Letters 2019 19 (l), 218-227, doi: 10.1021 / acs.nanolett.8b03733.

[0030] A variety of semiconductor materials are useful for the manufacture of semiconductor nanowires. One exemplary class of semiconductor materials is III-V semiconductors. The semiconductor component 410 can have, for example, a material of Formula 1: InAs x Sb 1-x (Formula 1) where x ranges from 0 to 1. In other words, the semiconductor component 41o can have indium antimonide (x = 0), indium arsenide (x = 1), or a ternary mixture containing 50% indium and variable ratios of arsenic and antimony (0 < x < 1) on a molar basis.

[0031] The illustrated nanowire 410 is a VLS nanowire with six crystal planes or facets 411, 412, 413, 414, 415, and 416. In this example, the superconductor component 420, tunnel barrier 425, and conductive leads 430 are disposed on a subset of these facets. This subset includes a top facet 411 and two facets 412 and 413 on one side of the nanowire 410. The superconductor component, tunnel barrier, and conductive leads do not extend onto the other side of the nanowire, which has facets 415 and 416. The bottom facet 414 is in contact with the substrate. In implementations in which the superconductor component 420 is fabricated by directional deposition of superconductor material, one side of the nanowire can be shadowed and not receive the superconductor material.

[0032] The superconductor component 420, the tunnel barrier 425, and the conductive leads 430 may have different thicknesses. The thicknesses of the superconductor component 420, the tunnel barrier 425, and the conductive leads 430 may vary between different facets. For example, the thickness of the portion of the superconductor component 420 on facet 411 may be different from the thickness of the portion on facet 412.

[0033] The superconductor component 420 comprises a layer of a superconducting metal, which is aluminum. The use of aluminum allows a tunnel barrier in the form of a native aluminum oxide layer to be formed by in-situ oxidation. The superconductor component may have a thickness in the range of 4-10 nm.

[0034] The superconductor component 420 may be an island of superconductor material that is not electrically connected to further components. Devices including a superconductor component in the form of an island may be useful as a component of a topological qubit. Alternatively, the superconductor component 420 may be electrically connected to ground. Connecting the superconductor component 420 to ground may be useful to enable tunneling spectroscopy measurements to be performed on the semiconductor-superconductor hybrid structure. In tunneling spectroscopy measurements, the superconductor component 420 is grounded, a voltage is applied to the conductive leads 430, and the current through the conductive leads is measured.

[0035] A tunnel barrier 425 is disposed on the superconductor component 420. A conductive lead 430 is disposed on the tunnel barrier 425.

[0036] The conductive leads 430 are electrodes and are typically configured to function as normal conductors in use. The conductive leads may be fabricated from a normally conducting metal such as platinum, silver, or gold. Superconductor metals may be used instead, particularly if the conductive leads extend perpendicular to the superconductor component of the semiconductor-superconductor hybrid structure; superconductor materials may exhibit critical magnetic field anisotropy and exhibit either normal or superconducting behavior depending on their orientation relative to an applied magnetic field.

[0037] In operation, the conductive leads 430 can be used to perform tunneling spectroscopy measurements on the semiconductor-superconductor hybrid structure. To this end, the conductive leads 430 can be connected to amplifier circuitry. The amplifier circuitry can be located on the same substrate as the device or on a different substrate. The connections can be any suitable configuration of transmission lines, contact pads, wire bonds, and / or the like.

[0038] Conductive leads 430 extend only over the portion of the semiconductor component that is also covered by superconductor component 420. This is because, as explained further below, the superconductor component can selectively shield electrons with energies above a certain limit, preventing conductive leads 430 from disrupting the chemical potential within the semiconductor-superconductor hybrid device.

[0039] The tunnel barrier 425 is a dielectric layer that allows tunneling of electrons between the semiconductor-superconductor hybrid structure and the conductive leads.

[0040] It has been found that electrons can tunnel from the semiconductor component to the conductive leads through the superconductor component. The states of interest, e.g., Majorana zero modes, are isolated states that exist below the superconducting gap. The superconductor component does not have any states below the superconducting gap. Usefully, at the same time, the superconductor component shields the semiconductor-superconductor hybrid structure from the electric field induced by the conductive leads.

[0041] The tunnel barrier is a dielectric and does not have any states in the low-energy region, so it does not block the signal from the semiconductor-superconductor hybrid structure.

[0042] Electrons in a topological state can tunnel through the superconductor and the tunnel barrier because the maximum coherence length of these electrons is greater than the thickness of the superconductor component and the tunnel barrier. The maximum coherence length ξ in a bulk superconductor is given by Equation 1:

number

number

[0043] Constraining electrons to a one-dimensional system, such as a nanowire, or a two-dimensional system, such as a 2DEG, changes the maximum coherence length. The maximum coherence length in such a system is given by Equation 2:

number

[0044] The combined thickness of the superconductor component and the tunnel barrier is selected to be less than the maximum coherence length of the excitation of interest. In practice, this constraint is not particularly limiting. It has been reported that insignificant subgap states can have coherence lengths up to approximately 300 nm (Menard, et al., PRL 124, 036802 (2020)). It has been theorized that Majorana zero modes can have coherence lengths up to 1 μm or even greater in some devices. These coherence lengths are substantially greater than the typical thicknesses of the superconductor component 420 and the tunnel barrier 425. For example, the superconductor component of a hybrid device typically has a thickness of 15 nm or less. The tunnel barrier typically has a thickness in the range of 1 nm to 4 nm.

[0045] Conductive leads 430 extend only over the portion of semiconductor component 410 covered by superconductor component 420. This reduces the effect of conductive leads 430 on the chemical potential within semiconductor component 410 because the superconductor component shields the hybrid portion of the device from the electric fields induced by the conductive leads.

[0046] The screening effect can be particularly advantageous in implementations where the conductive leads tunnel into bulk segments of the nanowire, i.e., segments that are not at the ends of the nanowire. In comparative examples where unscreened conductive leads communicate with the bulk, the leads can disrupt the topological phase. Unscreened leads can perturb the chemical potential within the nanowire by an amount larger than the topological gap. By way of example, the maximum topological gap in a hybrid structure with aluminum and indium antimonide is approximately 250 μeV.

[0047] Conductive leads 430 do not extend over portions of the nanowire that do not include a superconductor component.

[0048] Because the tunnel barrier is not electrostatically defined, the potential at the tunnel junction is sharper and approaches the ideal potential shown in Figure 3. This can avoid the creation of spurious MZMs, thereby allowing true MZMs to be more easily detected.

[0049] The tunnel barrier 425 is integrally formed with the superconductor component 420. The superconductor component 420 comprises aluminum, and the tunnel barrier 425 comprises a native aluminum oxide layer formed on the aluminum. Such a layer can be formed by exposing the aluminum to oxygen gas. The thickness of the native oxide layer can be controlled by varying the pressure of the oxygen gas. For example, the portion of the tunnel barrier underlying the at least one conductive lead can have a thickness t1 in the range of 1 nm to 2 nm.

[0050] By integrally forming a tunnel barrier in situ on a superconductor component without the use of deposition, a higher quality tunnel barrier can be obtained. Tunnel barriers made of native aluminum oxide have been found to perform better than barriers including a layer of deposited dielectric material, such as a vapor-deposited aluminum oxide layer. Forming the aluminum oxide in situ can avoid contamination of the dielectric layer. Forming the aluminum oxide layer in situ can allow for more precise control over the thickness of the aluminum layer. Native aluminum oxide layers can have less trapped charge than vapor-deposited aluminum oxide layers.

[0051] Various modifications may be made to the illustrated device.

[0052] The example device 400 has a single conductive lead at one end of the semiconductor-superconductor hybrid structure. In variations, any number of leads may be present.

[0053] For example, a pair of conductive leads may be provided at each end of the semiconductor-superconductor hybrid structure. Majorana zero modes exist in pairs at both ends of the hybrid structure, and providing a lead at each end may therefore be useful for detecting the Majorana zero modes.

[0054] Alternatively, or in addition, conductive leads may be placed on the bulk portion of the semiconductor-superconductor hybrid structure, i.e., the portion away from the ends of the hybrid structure. When Majorana zero modes are formed, a topological phase transition occurs, i.e., the superconducting gap in the bulk closes and then reopens. Therefore, being able to perform tunneling spectroscopy measurements on the bulk of the nanowire may allow the Majorana zero modes to be detected.

[0055] An example device configuration includes a conductive lead at each end of the semiconductor-superconductor hybrid structure and one or more conductive leads disposed above the bulk portion of the semiconductor-superconductor hybrid structure. By arranging the conductive leads so that the superconductor component shields the hybrid structure from the conductive leads, destruction of the topological phase can be avoided even when the conductive leads extend above the bulk portion.

[0056] The example device includes a semiconducting nanowire, shown as a VLS nanowire, although SAG nanowires may alternatively be used.

[0057] The principles described herein can be applied to any type of semiconductor-superconductor hybrid system. The semiconductor component does not necessarily have to be in the form of a nanowire. The semiconductor component may instead be in the form of a semiconductor heterostructure configured to host a two-dimensional electron gas ("2DEG") or a two-dimensional hole gas ("2DHG").

[0058] The semiconductor heterostructure may have a quantum well disposed between a lower barrier and an upper barrier. The quantum well comprises a material different from the material of the lower barrier and the upper barrier. The quantum well has a material different from the material(s) of the lower barrier and the upper barrier. The materials of the lower barrier layer and the upper barrier layer may each be independently selected.

[0059] The lower and upper barriers function to trap charge carriers within the quantum well. The quantum well layer can include a layer of semiconductor material with a relatively small bandgap compared to the materials of the lower and upper barriers. Exemplary materials useful for forming quantum wells are described, for example, in Odoh and Njapba, “A Review of Semiconductor Quantum Well Devices,” Advances in Physics Theories and Applications, vol. 46, 2015, pp. 26-32, and in S. Kasap and P. Capper (eds.), “Springer Handbook of Electronic and Photonic Materials,” DOI 10.1007 / 978-3-319-48933-9_40.

[0060] A semiconductor-superconductor hybrid device may include a gate stack for gating one or more portions of the semiconductor-superconductor hybrid structure. Electrostatic gating is useful for tuning the behavior of the hybrid structure. Any number of gate electrodes may be included.

[0061] An example of a method for manufacturing the devices described herein will now be described with reference to Figure 6, which is a flow diagram outlining the method.

[0062] The device is fabricated on a substrate. As mentioned above, the substrate may comprise a wafer. The substrate may be pre-patterned. In other words, one or more components selected from gate electrodes, contact pads, leads, isolation layers, and shadow walls may be provided on the substrate before forming the semiconductor-superconductor hybrid device.

[0063] A semiconductor component is provided on a substrate in block 601. The semiconductor component may be implemented in a variety of ways, and the process used to form the semiconductor component may be selected accordingly.

[0064] One example process is selective area growth (SAG). SAG involves forming an amorphous mask over a substrate and then epitaxially growing semiconductor components on the substrate within the openings in the mask. SAG is useful for producing horizontally oriented nanowires.

[0065] Another example process is the vapor-liquid-solid VLS process. VLS uses droplets of liquid catalyst to control the growth of nanowires on a growth substrate. VLS produces vertically oriented nanowires. VLS nanowires can optionally be cleaved from the growth substrate and placed horizontally on either the growth substrate or a different substrate.

[0066] An even further possibility is to grow semiconductors epitaxially over the entire surface of the substrate. In this way, multiple layers can be built up, each with an independently selected material. This approach is useful for the fabrication of 2DEG structures.

[0067] At block 602, a semiconductor-superconductor hybrid structure is formed by fabricating a superconductor component on a semiconductor component. The superconductor component has a layer of superconducting metal.

[0068] Various processes can be used to fabricate superconductor components. For example, the superconductor material can be globally deposited over the entire surface of the substrate and then patterned by lithography or lift-off. Lithography and lift-off processes include etching steps.

[0069] It is generally desirable to avoid the use of etching, which can damage semiconductor components and / or degrade the interface between the semiconductor and the superconductor, which can make it more difficult to induce or observe excitations, such as MZMs.

[0070] The use of etching can be avoided by selectively depositing material on a target area. This can be achieved through the use of directional deposition controlled by shadow walls. The directional deposition process involves directing a beam of material toward the target substrate from a specific direction relative to the substrate. A shadow wall is a structure configured to block the path of the beam, thereby creating a shadow area where the material is not deposited. Various examples of shadow walls are described in WO2019 / 099171A2, US10,629,798, US2020 / 0243742A1, and WO2021 / 112856A1. The shape of the shadow area can be controlled by selecting the shape of the shadow wall and the direction in which the beam of material is deposited.

[0071] In implementations where shadow walls are used, the shadow walls may be formed on the substrate before or after providing the semiconductor component.

[0072] The superconducting metal is reacted with a reagent to form the tunnel barrier at block 603. This process converts a portion of the layer of superconducting material deposited at block 602 into a dielectric layer.

[0073] In implementations where the superconducting metal is aluminum, this treatment may involve exposing the aluminum metal to a gas containing dioxygen, ozone, or a mixture thereof. By controlling the pressure of the gas, the thickness of the tunnel barrier can be adjusted.

[0074] Forming the tunnel barrier does not involve depositing an additional dielectric material on the substrate: the tunnel barrier is formed in situ by converting a portion of the superconductor into a dielectric, for example, by converting a portion of an aluminum layer into a native aluminum oxide layer.

[0075] At least one conductive lead is fabricated on the tunnel barrier at block 604. The conductive lead is positioned such that the superconductor component shields the semiconductor component from the conductive lead. In other words, the conductive lead does not extend over portions of the semiconductor component that are not covered by the superconductor component.

[0076] The process used to fabricate the conductive leads may be selected as appropriate. A variety of techniques are known for fabricating metal electrodes.

[0077] In particular, the conductive leads may be fabricated using directional deposition controlled by the use of shadow walls. Advantageously, in implementations where the superconductor component is fabricated through the use of shadow walls, the same shadow wall may be used to control both the fabrication of the superconductor component and the fabrication of the conductive leads. The superconductor component and the conductive leads may be deposited from different angles such that the conductive leads are applied only over selected portions of the superconductor component.

[0078] After fabrication, a protective layer of a dielectric, for example hafnium oxide, may be applied over the device, and a gate electrode may be fabricated on the protective layer if desired.

[0079] Alternatively, a gate electrode and gate dielectric may be incorporated into the substrate prior to the processing of block 601. This results in a bottom-gate device. Pre-patterning the gate electrode minimizes the manufacturing steps performed after fabricating the superconductor component. This may allow for a pristine semiconductor-superconductor interface. A high-quality interface may allow for more reliable Majorana zero modes.

[0080] The method can be performed in a sealed apparatus, for example, having a vacuum chamber and an oxidation chamber connected to the vacuum chamber. The oxidation chamber can be a load lock for the vacuum chamber. The method can be performed without removing the device from the apparatus, i.e., without exposing the device to an open atmosphere. Avoiding exposure to, for example, water vapor can prevent damage to the surface of the material layer.

[0081] The method may be free of the use of etching, such as ion milling or wet etching. Avoiding etching may avoid damage to materials or material interfaces.

[0082] As mentioned above, the superconductor components and conductive leads are preferably fabricated by directional deposition controlled by shadow walls. One illustrative example of a shadow wall 700 is shown in FIG.

[0083] The example shadow wall 700 has two supports 710a, 710b and an overhang 720. The supports 710a, 710b are each in the form of a support post. The overhang 720 bridges the supports 710a, 710b. The overhang 720 overhangs a region 705a of the substrate 705; in other words, there is a space between the overhang 720 and the surface of the substrate 705.

[0084] The number, shape, relative position, and size of the supports are not particularly limited. When the shadow wall includes multiple supports, the shapes and sizes of the supports can be selected independently.

[0085] The inclusion of flares is optional: there may be any number of flares, and the shape and size of the flares may be selected as desired.

[0086] By selecting the shape and dimensions of the shadow wall, the distance from the shadow wall to the semiconductor component, and the direction of the beam of material being deposited, different patterns of material can be deposited on the substrate. For example, material arriving at a relatively shallow angle can pass through the gap under the overhang 720 and reach locations on the substrate that cannot be reached by material applied at a steeper angle that would be blocked by the overhang 720.

[0087] A shadow wall having a support and an overhang can be fabricated by a two-step process: the first step involves forming a mask to define the shape of the support of the shadow wall, and the second step is to form the shadow wall using the mask.

[0088] The first step involves forming a first resist on a substrate, portions of which are selectively exposed to light and then developed to form a mask that defines the channels.

[0089] The first resist may be an electron beam resist, preferably a positive electron beam resist. A positive electron beam resist is one that becomes more soluble in a developer solvent upon exposure to an electron beam. Examples of positive electron beam resists include acrylate polymers and copolymers. For example, the positive electron beam resist may be poly(methyl methacrylate), a methyl methacrylate-methacrylic acid copolymer, or a copolymer of chloromethyl methacrylate and methylstyrene. The copolymer of chloromethyl methacrylate and methylstyrene is commercially available under the trade name CSAR. In particular, the first resist may be poly(methyl methacrylate) PMMA.

[0090] The exposure and development conditions can be appropriately selected based on the resist selected. For example, if the first resist comprises poly(methyl methacrylate), a developer comprising a mixture of methyl isobutyl ketone and isopropyl alcohol can be used.

[0091] In a second step, a second resist is formed in the channel and over the mask. The first and second resists have different materials. The exposed portions of the second resist transform these portions into shadow walls.

[0092] The second resist can be selected so that the shadow wall comprises an inorganic material. The second resist can comprise, for example, a silsesquioxane, such as hydrogen silsesquioxane (“HSQ”) or methyl silsesquioxane (“MSQ”). Exposing the HSQ to an electron beam converts the HSQ to silicon oxide.

[0093] The second resist can be developed using a developer that does not attack the mask. In examples where the first resist comprises an acrylate polymer or copolymer, such as poly(methyl methacrylate), the developer for the second resist can comprise a base. The base can comprise, for example, tetramethylammonium hydroxide ("TMAH"), potassium hydroxide, or sodium hydroxide. Various developers are commercially available. Exemplary TMAH-based developers are available under the trade names MF-321 and MF-322.

[0094] The mask may then be removed to create the shadow walls. Removing the mask may include stripping the first resist. Any suitable technique for resist stripping may be used, as long as the shadow walls remain intact. Examples include the use of a solvent in combination with critical point drying, or the use of oxygen plasma. In implementations where poly(methyl methacrylate) is used as the first resist, the solvent may be, for example, acetone.

[0095] Exemplary shadow wall configurations useful in fabricating devices of the type described herein are shown in Figures 8-10, which are schematic plan views showing shadow walls positioned relative to semiconductor nanowires. It should be understood that Figures 8-10 are schematic. The shape, size, and location of the various portions of the illustrated shadow walls can be varied independently.

[0096] Figure 8 shows an example of a shadow wall arrangement useful for fabricating a device with a superconductor component in the form of an island and including a pair of leads at each end of the semiconductor-superconductor hybrid structure. Figure 8 shows shadow walls 812, 814, 816, 822, and 824 positioned relative to a nanowire 805.

[0097] The shadow wall in this example is a unitary structure including a left support portion 812, a center support portion 814, and a right support portion 816. The left support portion 812 and the right support portion 816 are connected to the center support portion 814 by respective overhangs 822, 824. Spaces 832, 834 are provided between the supports.

[0098] The distance between each portion of the shadow wall and the nanowire can be selected independently, for example, the distance between left support 814 and nanowire 805 can be different from the distance between overhang 822 and nanowire 805.

[0099] In use, to create a hybrid structure superconductor component, superconductor material is directed towards the nanowire 805 from a first angle selected such that the shadow wall shadows the area in front of the nanowire but not the front side 805a of the nanowire 805. The nanowire is "self-shadowing" such that the front side 805a of the nanowire shadows the back side 805b of the nanowire, resulting in the superconductor material reaching a subset of the nanowire's facets, as shown in FIG.

[0100] As will be appreciated, the nanowires may be prepared either before or after forming the shadow wall.

[0101] To create the conductive leads, a beam of material is directed toward nanowire 805 at a second angle shallower than the first angle. Supports 812, 814, 816 block the beam, but allow it to pass under portions 822, 824, thereby depositing on the nanowire and forming the conductive leads.

[0102] Material is also deposited in spaces 832, 834 between supports 812 and 814 and between 814 and 816. Material deposited in these regions can act as transmission lines for connecting leads to additional components. In the case of a superconductor component, overhangs 822 and 824 cast a shadow that prevents the formation of a continuous strip of superconductor extending from nanowire 805 to spaces 832, 834. Because a tunnel barrier is formed on the superconductor component before depositing the leads, the leads do not electrically connect to the superconductor component. Thus, using shadow walls in this configuration, superconducting islands can be formed on nanowires that are not electrically connected to additional components. Devices with superconducting islands are useful for constructing topological qubits.

[0103] Figure 9 shows an alternative shadow wall arrangement. The example of Figure 9 differs from the example of Figure 8 by including a metal contact 940 that extends under the central shadow wall 914. Such a contact 940 is useful for connecting the center of the superconductor component to ground. Devices in which the superconductor component is connected to ground are useful for making non-local conductance measurements.

[0104] Similar to the example of Figure 8, the example of Figure 9 includes a shadow wall that is a unitary structure including a left support 912, a center support 914, and a right support 916. The left support 912 and the right support 916 are connected to the center support 914 by respective overhangs 922, 924. Spaces 932, 934 are provided between the supports.

[0105] A metal contact 940 is provided on the substrate. The contact can be formed on the substrate before fabricating the semiconductor component. This allows for the use of etching to pattern the metal contact 940 without risking damage to the semiconductor-superconductor hybrid structure. The metal contact is fabricated before forming the shadow wall and extends below the central support 914.

[0106] The placement of the shadow walls can be varied depending on the desired configuration of the semiconductor-superconductor hybrid structure and the placement of the leads. While the illustrated example includes a single semiconductor-superconductor hybrid structure, devices incorporating multiple such structures are also contemplated. For example, a topological qubit device could include multiple hybrid structures arranged in a network.

[0107] A further example of the placement of shadow walls is shown in Figure 10. The location of nanowire 1005 is also shown. The example of Figure 10 is useful for fabricating devices with conductive leads at each end of the topological segment and conductive leads in communication with the bulk of the topological segment.

[0108] The shadow wall in this example includes four supports 1012, 1014, 1016, and 1018. Adjacent pairs of shadow supports are connected by overhangs 1022, 1024, and 1026. Spaces 832, 834, and 836 are also provided between adjacent pairs of supports to accommodate conductive leads.

[0109] A method of operating the devices provided herein will now be described with reference to Figure 11. Figure 11 shows a flow diagram outlining the method.

[0110] In block 1101, the device is cooled to an operating temperature below the critical temperature of the superconductor component such that the superconductor component exhibits superconductivity. Typically, the device is operated at a temperature below 1 K. Various suitable cryogenic systems, such as dilution refrigerators, have been described. During operation, the device is maintained at the operating temperature.

[0111] At block 1102, a magnetic field is applied to the semiconductor-superconductor hybrid structure. Applying the magnetic field removes spin degeneracy in the device. In other words, different spin states that have the same energy in the absence of a magnetic field are forced to occupy different energy levels.

[0112] In implementations in which the semiconductor component is in the form of a nanowire, the magnetic field generally includes a component applied parallel to the nanowire. The magnetic field may have a field strength parallel to the nanowire on the order of 1 T to 2 T. In implementations in which at least one conductive lead is formed of a superconductor material and extends in a direction perpendicular to the nanowire, the magnetic field may cause the conductive lead to function as a normal conductor.

[0113] The magnetic field is typically applied using an external electromagnet. Alternatively, or in addition, the device may include a ferromagnetic insulator component for applying the magnetic field internally. The ferromagnetic insulator component may be disposed between the superconductor component and the semiconductor component. Examples of materials useful for forming the ferromagnetic insulator component include EuS, EuO, GdN, Y3Fe5O, and the like. 12 , Bi3Fe5O 12 , YFeO3, Fe2O3, Fe3O4, Sr2CrReO6, CrBr3 / CrI3, and YTiO3. Ferromagnetic insulator components for semiconductor-superconductor hybrid devices are described, for example, in WO2021 / 110274A1.

[0114] At block 1103, the semiconductor-superconductor hybrid structure is electrostatically gated. Electrostatic gating can change the number of available charge carriers in the semiconductor component, allowing tuning of device behavior. Different portions of the device may be exposed to different electrostatic fields as desired. The electrostatic fields may be applied using appropriate gate electrodes.

[0115] At block 1104, a tunneling current through at least one conductive lead is measured. This operation may include measuring the frequency, amplitude, and / or phase of the alternating current through at least one conductive lead. Amplifier circuitry connected to the conductive leads may be used to increase the strength of the signal. Measuring the tunneling current may be useful, for example, for data readout in implementations where the device is a component of a topological qubit.

[0116] In implementations where the device includes more than one conductive lead, measurements can be made on any number of those leads. For example, measuring the tunneling current through a pair of conductive leads placed at each end of the semiconductor-superconductor hybrid structure can enable measurement of nonlocal conductance in the semiconductor-superconductor hybrid structure.

[0117] Measurements are taken while the device is at operating temperature and while applying magnetic and electrostatic fields, the strength and / or direction of which may be varied.

[0118] It will be understood that the above embodiments have been described by way of example only.

[0119] More generally, according to one aspect disclosed herein, a device is provided, the device comprising: a semiconductor-superconductor hybrid structure having a semiconductor component and a superconductor component, the superconductor component having an aluminum layer; at least one conductive lead in tunnel communication with the semiconductor-superconductor hybrid structure; and a tunnel barrier disposed between the semiconductor-superconductor hybrid structure and the at least one conductive lead. The conductive lead is disposed on the superconductor component such that the superconductor component shields the semiconductor component from the conductive lead. The tunnel barrier is disposed between the superconductor component and the at least one conductive lead. The tunnel barrier is comprised of a native aluminum oxide layer integrally formed on the superconductor component. Because the superconductor component is disposed between the conductive lead and the semiconductor component, the superconductor component can block high-energy electrons, thereby allowing low-energy electrons (e.g., those corresponding to MZMs) to be more easily detected. Forming the tunnel barrier integrally on the superconductor component provides a high-quality dielectric barrier between the conductive lead and the semiconductor-superconductor hybrid structure. For example, there may be less contamination compared to a device that further includes a deposited, eg, evaporated, dielectric layer.

[0120] The tunnel barrier is made of a native aluminum oxide, which is therefore integrally formed with the superconductor component. The use of a native oxide, as opposed to a deposited layer, can avoid contamination of the tunnel barrier, thereby allowing for improved dielectric properties.

[0121] Native oxide can be conveniently formed by exposing aluminum to an oxidizing gas, particularly dioxygen (O), ozone (O), or a mixture thereof. The thickness of the native oxide can be controlled by selecting the pressure of the oxidizing gas.

[0122] The tunnel barrier may have a thickness in the range of 1 to 4 nm, optionally 1 to 2 nm. The superconductor component may have a thickness in the range of 6 to 10 nm. The coherence lengths of excitations of interest in semiconductor-superconductor hybrid systems are typically on the order of a few hundred nanometers, and electrons can easily tunnel through layers of these thicknesses.

[0123] The superconductor component comprises a layer of aluminum, which has been found to be particularly effective at inducing superconductivity in semiconductor materials, particularly materials of Formula 1. Furthermore, aluminum oxide can be easily formed on the aluminum layer and has good chemical and physical stability and good dielectric properties.

[0124] Typically, the tunnel barrier does not extend beyond the edges of the superconductor component. During fabrication, the tunnel barrier is formed by converting a partial thickness of the superconductor component into a dielectric. As a result, the tunnel barrier typically does not extend beyond the edges of the superconductor component.

[0125] Generally, the at least one conductive lead does not extend over any portion of the semiconductor component that is not covered by the superconductor component and the tunnel barrier, which may allow for more effective shielding of the semiconductor component from the at least one conductive lead by the superconductor component.

[0126] The at least one conductive lead may comprise a normally conducting metal. Alternatively, the at least one conductive lead may be formed of a superconducting metal. In such implementations, the at least one conductive lead may be oriented such that the at least one conductive lead has a critical magnetic field lower than the critical magnetic field of the superconductor component. The at least one conductive lead generally does not comprise a semiconductor material, more particularly, an electrostatically gated semiconductor material.

[0127] The semiconductor component may be in the form of a nanowire. The nanowire may have a diameter in the range of 80-100 nm and a length in the range of 10-15 μm. The nanowire may have multiple facets. The superconductor component may be disposed on a subset of the multiple facets. For example, during fabrication, superconductor material may be deposited from a first exposed side of the nanowire, and the nanowire may be self-shadowing such that no material is deposited on a second, shadowed side of the nanowire. In such an implementation, the subset is the exposed facet.

[0128] Alternatively, the semiconductor component may be a semiconductor heterostructure configured to host a two-dimensional electron gas or a two-dimensional hole gas. In such implementations, the device may further include one or more gate electrodes configured to define an active channel within the semiconductor heterostructure, and the superconductor component may be disposed over the active channel. The active channel may be in the form of a nanowire.

[0129] The device can include a pair of conductive leads, each conductive lead of the pair communicating with a respective end of the semiconductor-superconductor hybrid structure. Because MZMs exist in pairs, with each MZM of the pair at a respective end of the nanowire, placing leads at the ends of the nanowire can be useful for detecting the MZMs.

[0130] The superconductor component may be an island. In such an implementation, the superconductor component is not conductively connected to any further components. Devices with superconducting islands may be useful as components of qubit devices.

[0131] Alternatively, the superconductor component may be electrically grounded, which may allow tunneling spectroscopy measurements to be performed on the semiconductor-superconductor hybrid structure using conductive leads.

[0132] The device may include a conductive lead in tunneling communication with a bulk segment of the semiconductor-superconductor hybrid structure, where the superconductor component shields the hybrid structure from an electric field induced by the conductive lead, which may allow the conductive lead to be placed on the bulk segment of the semiconductor-superconductor hybrid structure without destroying the topological phase.

[0133] Measurements on the bulk of the device, i.e., regions away from the edges of the device, can be useful to confirm the presence of MZMs, since a topological phase transition involving the closing and reopening of the bulk gap must occur when MZMs form. There may be any number of conductive leads communicating with the bulk.

[0134] The semiconductor-superconductor hybrid structure and the at least one conductive lead may be disposed on a substrate. At least one shadow wall may further be disposed on the substrate. The at least one shadow wall may include a support and an overhang. In such implementations, the overhang overhangs the substrate and is supported by the support. The shadow wall is useful for enabling fabrication of metallic components, such as superconductor components and conductive leads, without requiring the use of etching. Etching processes can damage or degrade the semiconductor component and / or the interface between the semiconductor component and the superconductor component, and it is desirable to avoid or at least minimize the use of etching during fabrication.

[0135] The device can be bottom-gate: the bottom gate and gate dielectric can be formed on the substrate before the semiconductor and superconductor components are formed. This can minimize the number of fabrication steps performed after forming the semiconductor-superconductor hybrid interface, thereby avoiding degradation of the interface.

[0136] In another aspect, the present disclosure provides a method for fabricating a device, the method including: providing a semiconductor component on a substrate; fabricating a superconductor component on the semiconductor component to form a semiconductor-superconductor hybrid structure, the superconductor component having a layer of aluminum, partially oxidizing the aluminum to form a tunnel barrier made of native aluminum oxide on the superconductor component; and fabricating at least one conductive lead on the tunnel barrier. Forming the tunnel barrier in situ can result in a higher quality dielectric compared to methods in which the tunnel barrier comprises a deposited dielectric material.

[0137] Forming the tunnel barrier does not involve depositing a layer of dielectric material. The tunnel barrier is made of a compound of a superconducting metal.

[0138] The method can be used to manufacture the above-mentioned devices.

[0139] The substrate may be pre-patterned and may include a metal component and a dielectric layer covering the metal component. In particular, the substrate may include a pre-patterned gate electrode. Providing a pre-patterned component may allow for minimizing the number of manufacturing processes performed after fabricating the semiconductor-superconductor interface.

[0140] The tunnel barrier is made of a native aluminum oxide. Partially oxidizing the aluminum can include exposing the aluminum to a gas containing dioxygen, ozone, or a mixture thereof. The thickness of the oxide layer can be controlled by selecting the gas pressure.

[0141] The method may further include forming at least one shadow wall on the substrate before forming the superconductor component. Forming the superconductor component may include directionally depositing the superconducting metal from a selected first direction such that the at least one shadow wall defines a shadow region in which the superconducting metal is not deposited. The shadow wall may allow for controlled deposition of a material, e.g., a metal layer, and may allow for fabrication of a device without the use of etching.

[0142] The at least one shadow wall may include a support and an overhang. In such implementations, the overhang overhangs the substrate and is supported by the support. Creating the at least one conductive lead may include directionally depositing a conductive material from a second direction different from the first direction, the second direction being selected such that the at least one shadow wall controls the deposition of the conductive material. By providing a shadow wall with an overhang, deposition of both the superconductor component and the at least one conductive lead may be controlled using a single shadow wall.

[0143] The superconductor component, the tunnel barrier, and the at least one conductive lead can be fabricated without the use of etching, which processes, such as ion milling, can damage or degrade the components of the device.

[0144] The method can be carried out in a sealed apparatus. For example, the semiconductor and superconductor components can be fabricated in a vacuum chamber, and the oxidation can be carried out in a load lock connected to the vacuum chamber. In such implementations, the substrate is preferably not removed from the apparatus until device fabrication is complete. This avoids exposing the device to an open atmosphere that could otherwise damage or degrade the surface of the component.

[0145] A still further aspect provides a method of operating a device as defined herein, the method comprising cooling the device to a temperature below the critical temperature of the superconductor component such that the superconductor component exhibits superconductivity, applying a magnetic field to the semiconductor-superconductor hybrid structure, electrostatically gate the semiconductor-superconductor hybrid structure, and measuring a tunneling current through at least one conductive lead.

[0146] The method may be useful, for example, in the context of reading out the state of a topological qubit.

[0147] Given the disclosure herein, other variations or use cases of the disclosed technologies may become apparent to one of ordinary skill in the art. The scope of the present disclosure is not limited by the described embodiments, but rather only by the appended claims.

Claims

1. A device, a semiconductor-superconductor hybrid structure having a semiconductor component and a superconductor component, the superconductor component having a layer of aluminum; at least one conductive lead in tunneling communication with the semiconductor-superconductor hybrid structure; a tunnel barrier disposed between the semiconductor-superconductor hybrid structure and the at least one conductive lead; and the at least one conductive lead is disposed on the superconductor component such that the superconductor component shields the semiconductor component from the at least one conductive lead; the tunnel barrier is disposed between the superconductor component and the at least one conductive lead; the tunnel barrier comprises a native aluminum oxide layer integrally formed on the superconductor component; the device is configured such that electrons tunnel through the superconductor component and the tunnel barrier between the semiconductor component and the at least one conductive lead; device.

2. The device of claim 1 , wherein the tunnel barrier does not extend beyond an edge of the superconductor component.

3. 3. The device of claim 1 or 2, wherein the semiconductor component is in the form of a nanowire.

4. The device of claim 3 , wherein the nanowire has a plurality of facets and the superconductor component is disposed on a subset of the plurality of facets.

5. 5. The device of claim 1, wherein the device comprises a pair of conductive leads, each conductive lead of the pair communicating with a respective end of the semiconductor-superconductor hybrid structure.

6. A device described in any one of claims 1 to 5, wherein the superconductor component is an island.

7. The device of any one of claims 1 to 6, wherein the device includes a conductive lead in tunneling communication with a bulk segment of the semiconductor-superconductor hybrid structure.

8. 8. The device of claim 1, wherein the semiconductor-superconductor hybrid structure and the at least one conductive lead are disposed on a substrate, and wherein at least one shadow wall is disposed on the substrate.

9. the at least one shadow wall includes a support portion and an overhang portion; the protruding portion protrudes above the substrate and is supported by the support portion; The device of claim 8.

10. 1. A method of manufacturing a device, comprising: providing a semiconductor component on the substrate; forming a semiconductor-superconductor hybrid structure by fabricating a superconductor component on the semiconductor component, the superconductor component having a layer of aluminum; partially oxidizing the aluminum to form a tunnel barrier of native aluminum oxide on the superconductor component; fabricating at least one conductive lead on said tunnel barrier; Having that, the device is configured such that electrons tunnel through the superconductor component and the tunnel barrier between the semiconductor component and the at least one conductive lead; method.

11. The method of claim 10 , wherein the substrate includes a pre-patterned gate electrode.

12. 12. The method of claim 10 or 11, wherein partially oxidizing the aluminum comprises exposing the aluminum to dioxygen and / or ozone.

13. The method further comprises fabricating at least one shadow wall on the substrate prior to fabricating the superconductor component; fabricating the superconductor component includes directionally depositing the aluminum from a first direction selected such that the at least one shadow wall defines a shadow region in which no superconducting metal is deposited.

13. The method according to any one of claims 10 to 12.

14. the at least one shadow wall includes a support portion and an overhang portion; the protruding portion protrudes above the substrate and is supported by the support portion; creating the at least one conductive lead includes directionally depositing a conductive material from a second direction different from the first direction, the second direction being selected such that the at least one shadow wall controls deposition of the conductive material. The method of claim 13.

15. i) the superconductor component, the tunnel barrier, and the at least one conductive lead are fabricated without the use of etching; and / or ii) the method is carried out in a sealed apparatus and the substrate is not removed from the apparatus until fabrication of the device is complete; 15. The method according to any one of claims 10 to 14.

16. A method of operating a device according to any one of claims 1 to 9, comprising the steps of: cooling the device to a temperature below the critical temperature of the superconductor component such that the superconductor component exhibits superconductivity; applying a magnetic field to the semiconductor-superconductor hybrid structure; electrostatically gating the semiconductor-superconductor hybrid structure; measuring a tunneling current through said at least one conductive lead; How to have that.

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