Waveguide line electrode structure and electro-optic modulator

Abstract

The present disclosure provides a waveguide line electrode structure and an electro-optical modulator. The waveguide line electrode structure further includes a covering layer disposed on the optical waveguide, and the electrode extension portion connected to the signal electrode or the ground electrode extends to the upper surface of the covering layer. The waveguide line electrode structure according to the embodiment of the present disclosure ensures that the distance between the electrode extension portion for the signal electrode and the electrode extension portion for the ground electrode is sufficiently close, and also ensures that there is a certain distance between the electrode extension portion and the corresponding optical waveguide. Therefore, the waveguide line electrode structure according to the present disclosure increases the electro-optical conversion efficiency and prevents the normal transmission of the light in the first branch or the light in the second branch from being affected, thus greatly improving the modulation effect of the waveguide line electrode structure.

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE The present disclosure relates to the field of optical-electrical signals, and in particular to waveguide line electrode structures and electro-optic modulators. [Background technology]

[0002] In recent years, the rapid development of emerging network application services such as the Internet of Things (IoT), autonomous driving, telemedicine, and distance learning has placed greater demands on high-speed, high-capacity communication technologies. Optical communications has achieved rapid development in the direction of high-speed, high-capacity communication due to its characteristics of wide bandwidth, high reliability, low cost, and strong anti-interference capabilities. The core research topic is how to transmit high-speed electrical signals onto optical carriers. Electro-optic modulators, which convert electrical signals into optical signals, are one of the core devices in optical interconnection, optical computing, and optical communication systems. Modulator performance plays a key role in determining the transmission distance and speed of optical signals. As the requirements for high-speed, high-capacity communication technologies become increasingly urgent, higher requirements are also being placed on the modulation speed of electro-optic modulators.

[0003] An electro-optic modulator is a modulator made by using the electro-optic effect of some electro-optic crystals, such as lithium niobate crystal (LiNbO3), gallium arsenide crystal (GaAs), and lithium tantalate crystal (LiTaO3). The electro-optic effect means that when a voltage is applied to the electro-optic crystal, the refractive index of the electro-optic crystal changes, thereby causing changes in the properties of the light wave passing through the crystal, and thus realizing modulation of the phase, amplitude, intensity, and polarization state of the optical signal.

[0004] After passing through a portion of the optical path, the input light wave of the MZ interferometer modulator is split into two equal beams at a 1:2 optical splitter element and transmitted through two optical waveguides. Each optical waveguide is made of an electro-optic material with a refractive index that changes with the applied voltage, so the optical signals for the two beams have a phase difference when they reach the optical combining element. When the optical path difference between the two beams is an integer multiple of the wavelength, the two beams are coherently reinforced. When the optical path difference between the two beams is half the wavelength, the two beams are coherently suppressed, and the output of the modulator is very small. Therefore, the optical signal can be modulated by controlling the voltage.

[0005] However, during the design of the coplanar waveguide wire electrode structure of the high-speed electro-optic modulator, it is necessary to maintain the impedance of the electrode material equal to the impedance of the input end to prevent microwave reflection of the electrical signal. In addition, it is necessary not only to ensure that the transmission speed of the electrical signal is the same as or close to the group velocity of the optical signal transmitted in the waveguide, but also to minimize the transmission loss of the electrical signal, thus putting forward very high requirements for the electrode design. Summary of the Invention [Problem to be solved by the invention]

[0006] The present disclosure is intended to solve at least one of the technical problems in the prior art, and therefore, the purpose of the present disclosure is to propose a waveguide line electrode structure and an electro-optic modulator for improving the modulation effect on transmitted light. [Means for solving the problem]

[0007] An embodiment of a first aspect of the present disclosure provides a waveguide line electrode structure, the waveguide line electrode structure including: a first ground electrode, a signal electrode, and a second ground electrode that are spaced apart from one another and arranged consecutively; an optical waveguide having a first branch and a second branch, the first branch being disposed in a first gap formed between the first ground electrode and the signal electrode, and the second branch being disposed in a second gap formed between the second ground electrode and the signal electrode; and a first branch at least partially covering the first branch. The antenna includes a covering layer, a second covering layer at least partially covering the second branch, and at least one electrode extension portion, each electrode extension portion extending from a first side of the signal electrode facing the first ground electrode, a second side of the signal electrode facing the second ground electrode, a third side of the first ground electrode facing the signal electrode, or a fourth side of the second ground electrode facing the signal electrode to a first gap or a second gap adjacent to that side, and each electrode extension portion also extends to an upper surface of the first covering layer or the second covering layer.

[0008] Optionally, the top surface of the first covering layer and / or the second covering layer has at least one inclined section, each inclined section extending diagonally upward from the signal electrode, the first ground electrode, or the second ground electrode in a direction toward the first branch or the second branch adjacent to that electrode, and the electrode extension portion extends to the top surface of the first covering layer or the second covering layer via the inclined section, or the electrode extension portion and at least a portion of the electrode connected to the electrode extension portion extend to the top surface of the first covering layer or the second covering layer via the inclined section.

[0009] Optionally, the electrode extension portion comprises a plurality of extended sub-electrodes, each of which extends from one side of the first ground electrode, the second ground electrode, or the signal electrode toward the first gap or the second gap adjacent to that side.

[0010] Optionally, each of the extended sub-electrodes comprises an extension portion extending from one side of the first ground electrode, the second ground electrode, or the signal electrode towards the first gap or the second gap adjacent to that side.

[0011] Optionally, each of the extension sub-electrodes further comprises an electrode portion disposed at an extension end portion of the extension portion and extending in a direction parallel to the first branch or the second branch.

[0012] Optionally, the top surface of the first covering layer and / or the second covering layer further comprises a platform section adjacent to a higher side edge of the inclined section, the optical waveguide being positioned below the platform section and the end of the extension sub-electrode being positioned on the platform section or the inclined section.

[0013] Optionally, the at least one electrode extension portion comprises a first electrode extension portion disposed on a first side of the signal electrode facing the first ground electrode, a second electrode extension portion disposed on a second side of the signal electrode facing the second ground electrode, a third electrode extension portion disposed on a third side of the first ground electrode facing the signal electrode, and a fourth electrode extension portion disposed on a fourth side of the second ground electrode facing the signal electrode.

[0014] Optionally, the first electrode extension portion comprises a plurality of first extended sub-electrodes, each of the first extended sub-electrodes extending from the first side toward the first gap, and the second electrode extension portion comprises a plurality of second extended sub-electrodes, each of the second extended sub-electrodes extending from the second side toward the second gap.

[0015] Optionally, the third electrode extension portion comprises a plurality of third extended sub-electrodes, each of the third extended sub-electrodes extending from the third side toward the first gap, and the fourth electrode extension portion comprises a plurality of fourth extended sub-electrodes, each of the fourth extended sub-electrodes extending from the fourth side toward the second gap.

[0016] Optionally, the first electrode extension portion comprises a plurality of first extended sub-electrodes, each of the first extended sub-electrodes extending from the first side toward the first gap, the second electrode extension portion comprises a plurality of second extended sub-electrodes, each of the second extended sub-electrodes extending from the second side toward the second gap, the third electrode extension portion comprises a plurality of third extended sub-electrodes, each of the third extended sub-electrodes extending from the third side toward the first gap, and the fourth electrode extension portion comprises a plurality of fourth extended sub-electrodes, each of the fourth extended sub-electrodes extending from the fourth side toward the second gap.

[0017] Optionally, each first extension sub-electrode in the first electrode extension portion is positioned opposite a corresponding third extension sub-electrode in the third electrode extension portion, and each second extension sub-electrode in the second electrode extension portion is positioned opposite a corresponding fourth extension sub-electrode in the fourth electrode extension portion.

[0018] Optionally, the upper surface of the first covering layer comprises a first inclined section, a first platform section, and a second inclined section that are successively adjacent to one another, the first inclined section facing the first ground electrode and the second inclined section facing the signal electrode; the upper surface of the second covering layer comprises a third inclined section, a second platform section, and a fourth inclined section that are successively adjacent to one another, the third inclined section facing the signal electrode and the fourth inclined section facing the second ground electrode; the first electrode extension portion extends to the first platform section via the second inclined section, the second electrode extension portion extends to the second platform section via the third inclined section, the third electrode extension portion extends to the first platform section via the first inclined section, and the fourth electrode extension portion extends to the second platform section via the fourth inclined section.

[0019] Optionally, within each electrode extension portion, the electrode portions of two adjacent extension sub-electrodes are spaced apart from each other.

[0020] Optionally, within each electrode extension portion, the electrode portions of two adjacent extension sub-electrodes are connected end to end.

[0021] Optionally, the refractive index of the cladding layer is less than the refractive index of the optical waveguide.

[0022] An embodiment of a second aspect of the present disclosure provides an electro-optical modulator comprising: a substrate; an isolation layer disposed on an upper surface of the substrate; a thin film layer disposed on an upper surface of the isolation layer, the thin film layer being made of an opto-electric material; the above-described waveguide line electrode structure disposed on the upper surface of the thin film layer; and an optical assembly disposed on the upper surface of the thin film layer, the optical assembly being configured to split light propagating in an optical waveguide into light in a first branch and light in a second branch, and to combine the light in the first branch and the light in the second branch into light propagating in the optical waveguide again.

[0023] Optionally, the lower surfaces of the signal electrode, the first ground electrode and the second ground electrode penetrate the thin film layer and directly contact the isolation layer.

[0024] Optionally, the thin film layer is a thin film of lithium niobate that is etched to an X-cut, Y-cut, or Z-cut.

[0025] The waveguide line electrode structure according to the embodiment of the present disclosure further includes a covering layer disposed on the optical waveguide, and the electrode extension portion connected to the signal electrode or the ground electrode extends to the upper surface of the covering layer. The waveguide line electrode structure according to the embodiment of the present disclosure ensures that the distance between the electrode extension portion for the signal electrode and the electrode extension portion for the ground electrode is sufficiently close, and also ensures that there is a certain distance between the edge of the electrode extension portion and the corresponding optical waveguide. Therefore, the waveguide line electrode structure according to this embodiment increases the electro-optical conversion efficiency and prevents the normal transmission of light in the first branch or the second branch from being affected, thereby greatly improving the modulation effect of the waveguide line electrode structure.

[0026] In the accompanying drawings, unless otherwise specified, the same reference numerals refer to the same or similar components or elements throughout the accompanying drawings. The accompanying drawings are not necessarily drawn to scale. It should be understood that the accompanying drawings depict only some implementations according to the present disclosure and are not to be construed as limiting the scope of the present disclosure. [Brief explanation of the drawings]

[0027] [Figure 1] FIG. 1 is a top view of a waveguide wire electrode structure according to an embodiment of the present disclosure. [Figure 2] FIG. 2 is a schematic perspective view of the waveguide line electrode structure of FIG. 1. [Figure 3] FIG. 2 is a schematic cross-sectional view of the waveguide line electrode structure of FIG. [Figure 4] FIG. 10 is a top view of a waveguide wire electrode structure according to another embodiment of the present disclosure. [Figure 5] FIG. 5 is a schematic perspective view of the waveguide line electrode structure of FIG. 4. [Figure 6] FIG. 10 is a top view of a waveguide wire electrode structure according to yet another embodiment of the present disclosure. [Figure 7] FIG. 7 is a schematic perspective view of the waveguide line electrode structure of FIG. 6. [Figure 8] FIG. 10 is a top view of a waveguide wire electrode structure according to yet another embodiment of the present disclosure. [Figure 9] FIG. 10 is a top view of a waveguide wire electrode structure according to yet another embodiment of the present disclosure. [Figure 10] FIG. 10 is a schematic perspective view of a waveguide wire electrode structure according to a further embodiment of the present disclosure. [Figure 11] 1 is a schematic perspective view of an electro-optic modulator according to one embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0028] Only a few exemplary embodiments are briefly described below. As will be understood by those skilled in the art, the described embodiments may be modified in various ways without departing from the spirit or scope of the present disclosure. Accordingly, the accompanying drawings and descriptions are to be regarded as illustrative in nature and not as restrictive.

[0029] The present disclosure first provides a waveguide line electrode structure. FIG. 1 shows a top view of a waveguide line electrode structure according to one embodiment of the present disclosure, FIG. 2 shows a schematic perspective view of the waveguide line electrode structure of FIG. 1, and FIG. 3 shows a schematic cross-sectional view of the waveguide line electrode structure of FIG. 1. As shown in FIGS. 1 to 3, the waveguide line electrode structure includes a first ground electrode 210, a signal electrode 100, a second ground electrode 220, an optical waveguide 300, a first covering layer 410, a second covering layer 420, and at least one electrode extension portion. The first ground electrode 210, the signal electrode 100, and the second ground electrode 220 are spaced apart from each other and arranged consecutively. The optical waveguide 300 includes a first branch 310 and a second branch 320, the first branch 310 being disposed in a first gap 250 formed between the first ground electrode 210 and the signal electrode 100, and the second branch 320 being disposed in a second gap 260 formed between the second ground electrode 220 and the signal electrode 100. A first covering layer 410 and a second covering layer 420 at least partially cover the first branch 310 or the second branch 320, respectively. Each electrode extension is disposed on a first side 101 of the signal electrode 100 facing the first ground electrode 210, a second side 102 of the signal electrode 100 facing the second ground electrode 220, a third side 213 of the first ground electrode 210 facing the signal electrode 100, or a fourth side 224 of the second ground electrode 220 facing the signal electrode 100. Each electrode extension extends from the side of the electrode on which it is disposed toward the first gap 250 or second gap 260 adjacent to that side of the electrode, and each extension sub-electrode also extends to the top surface of the first cover layer 410 or second cover layer 420.

[0030] Specifically, as shown in FIG. 1 , the first ground electrode 210, the signal electrode 100, and the second ground electrode 220 all extend in a first direction, i.e., the y-direction shown in this figure, and the extension lengths and widths of the three electrodes may be equal. The first ground electrode 210, the signal electrode 100, and the second ground electrode 220 are also spaced apart from each other in a second direction, i.e., the z-direction shown in this figure. Thus, a first gap 250 is formed between the first ground electrode 210 and the signal electrode 100, and a second gap 260 is formed between the second ground electrode 220 and the signal electrode 100. The widths of the first gap 250 and the second gap 260 may be equal. The three electrodes may be arranged in the same plane, i.e., the yz-plane shown in this figure. The three electrodes may be made of metal, and the signal electrode 100 is also connected to an external modulation circuit for applying a modulation voltage V between the first ground electrode 210 and the signal electrode 100 and between the second ground electrode 220 and the signal electrode 100, respectively. The optical waveguide 300 comprises a first trunk 330, a second trunk 340, a first branch 310, and a second branch 320. The first trunk 330 of the optical waveguide 300 is split adjacent to the three electrodes by an optical splitting element (not shown in this figure) into a first branch 310 and a second branch 320, with the first branch 310 extending into the first gap 250 and extending therein in a first direction (y-direction), and the second branch 320 extending into the second gap 260 and also extending therein in the first direction (y-direction), i.e., the first branch 310 and the second branch 320 remain parallel. When extending away from the three electrodes, the first branch 310 and the second branch 320 are combined by an optical combining element (not shown in this figure) to form the second trunk 340. 2 and 3, a first coating layer 410 coats the first branch 310, and a second coating layer 420 coats the second branch 320. The two coating layers also extend in the y direction shown in FIG. 1 and form two protrusions in a third direction, i.e., the x direction. The cross section of the coating layers may be any suitable shape, such as a triangle, a rectangle, a trapezoid, or a semicircle.The waveguide line of the first branch 310 or the second branch 320 may be centered at the bottom of the cladding layer, i.e., the cross section of the optical waveguide in the first branch 310 or the second branch 320 is centered at the bottom of the cross section of the cladding layer, as shown in FIG.

[0031] In this embodiment, the at least one electrode extension may be four electrode extensions. As shown in FIG. 1 , a first electrode extension 51 is disposed on a first side 101 of the signal electrode 100 facing the first ground electrode 210, a second electrode extension 52 is disposed on a second side 102 of the signal electrode 100 facing the second ground electrode 220, a third electrode extension 53 is disposed on a third side 213 of the first ground electrode 210 facing the signal electrode 100, and a fourth electrode extension 54 is disposed on a fourth side 224 of the second ground electrode 220 facing the signal electrode 100.

[0032] In this embodiment, each electrode extension portion comprises a plurality of extended sub-electrodes, each of which extends from one side of the first ground electrode, the second ground electrode, or the signal electrode toward the first gap 250 or the second gap 260 adjacent to that side. Specifically, the first electrode extension portion 51 includes a plurality of first extension sub-electrodes 510, each of which extends from the first side 101 toward the first gap 250; the second electrode extension portion 52 includes a plurality of second extension sub-electrodes 520, each of which extends from the second side 102 toward the second gap 260; the third electrode extension portion 53 includes a plurality of third extension sub-electrodes 530, each of which extends from the third side 213 toward the first gap 250; and the fourth electrode extension portion 54 includes a plurality of fourth extension sub-electrodes 540, each of which extends from the fourth side 224 toward the second gap 260. Taking the first electrode extension portion 51 as an example, a plurality of first extended sub-electrodes 510 in the first electrode extension portion 51 are arranged spaced apart from each other along the first side 101, and the base of each extended sub-electrode is connected to the signal electrode 100, and each extended sub-electrode is also made of metal, so that the modulation voltage applied to the signal electrode 100 can be further transmitted to act on the first extended sub-electrode 510. A plurality of second extended sub-electrodes 520 to fourth extended sub-electrodes 540 are similarly arranged on one side of the corresponding signal electrode 100 or ground electrode, and are not repeated here.

[0033] The specific structure of the extended sub-electrodes is shown in FIG. 2 . Taking the third extended sub-electrode 530 as an example, each third extended sub-electrode 53 may include an extension portion 531 and an electrode portion 532. The extension portion 531 extends from one side of the first ground electrode 210 toward the first gap 250 adjacent to that side. The electrode portion 532 is disposed at the extended end portion of the extension portion 531 and extends in a direction parallel to the first branch 310 (i.e., the y direction in this figure). That is, the extension portion 531 and the electrode portion 532 of each extended sub-electrode are disposed perpendicular to each other. In another example, each first extended sub-electrode 510 may also include an extension portion 511 and an electrode portion 512. The extension portion 511 extends from one side of the signal electrode 100 toward the first gap 250 adjacent to that side. The electrode portion 512 is disposed at the extended end portion of the extension portion 511 and extends in a direction parallel to the first branch 310 (i.e., the y-direction in this figure). The second extension sub-electrode 520 and the fourth extension sub-electrode 540 have the same structure and arrangement as the first extension sub-electrode 510 and the third extension sub-electrode 530, and are not repeated here. In this embodiment, the extension portion of each extension sub-electrode is connected to the middle of the electrode portion in its extension direction. That is, in the top view of the waveguide line electrode structure shown in FIG. 1, each extension sub-electrode is similarly a T-shaped structure. In addition, the extension portions of all extension sub-electrodes have the same length, and therefore the electrode portions of all extension sub-electrodes of each electrode extension portion are on the same straight line.

[0034] In the waveguide line electrode structure according to the present disclosure, the extension sub-electrodes are provided on the first ground electrode 210, the second ground electrode 220, and / or the signal electrode 100, thereby reducing the distance between the signal electrode 100 and the ground electrode, which is beneficial to reducing the transmission loss of the electrical signal of the modulation voltage. In addition, some inherent characteristics of the waveguide line electrode structure, such as the impedance and propagation speed of the electrical signal, are closely related to some characteristics of these extension sub-electrodes (such as the length of the extension portion and the length of the electrode portion). Therefore, during the actual manufacturing of the waveguide line electrode structure, the values ​​of these characteristics can be flexibly set so that the impedance of the electro-optic modulator made from the waveguide line electrode structure is the same or similar to the impedance of the input end (generally 50 Ω) and the propagation speed of the electrical signal in the modulation circuit is the same or similar to the speed of light in the optical waveguide 300, thereby improving the optical modulation effect.

[0035] The top surface of the first covering layer 410 and / or the second covering layer 420 includes at least one inclined segment. Each inclined segment extends obliquely upward from the signal electrode 100, the first ground electrode 210, or the second ground electrode 220 toward the first branch 310 or the second branch 320 adjacent to that electrode, and the electrode extension portion extends through the inclined segment to the top surface of the first covering layer 410 or the second covering layer 420. In this embodiment, the cross section of each of the first covering layer 410 and the second covering layer 420 may be trapezoidal with the inclined segment. By providing the inclined segment, the electrode extension portion for the corresponding ground electrode or signal electrode 100 can extend to the top surface of the covering layer. 2 and 3 , the top surface of the first covering layer 410 includes a first inclined section 411, a first platform section 413, and a second inclined section 412 that are continuously adjacent to one another, with the first inclined section 411 facing the first ground electrode 210 and the second inclined section 412 facing the signal electrode 100. The first inclined section 411 extends obliquely upward from the first ground electrode 210 toward the first branch 310. The second inclined section 412 extends obliquely upward from the signal electrode 100 toward the first branch 310. The upper surface of the second covering layer 420 includes a third inclined section 421, a second platform section 423, and a fourth inclined section 422 that are continuously adjacent to one another, with the third inclined section 421 facing the signal electrode 100 and the fourth inclined section 422 facing the second ground electrode 220. The third inclined section 421 extends obliquely upward in a direction from the signal electrode 100 to the second branch 320. The fourth inclined section 422 extends obliquely upward in a direction from the second ground electrode 220 to the second branch 320. The first electrode extension portion 51 extends to the first platform portion 413 via the second inclined section 412, the second electrode extension portion 52 extends to the second platform portion 423 via the third inclined section 421, the third electrode extension portion 53 extends to the first platform portion 413 via the first inclined section 411, and the fourth electrode extension portion 54 extends to the second platform portion 423 via the fourth inclined section 422.In this embodiment, only the electrode extension portion itself extends to the corresponding sloped section; the corresponding first ground electrode 210, second ground electrode 220, or signal electrode 100 does not extend to the corresponding sloped section, and each of the electrode edges is also spaced apart from the corresponding edge of the coating layer. However, it will be understood that in some other embodiments, a portion of each of the three electrodes may extend to the corresponding sloped section. That is, the electrode extension portion connected to the electrode extends upward from the sloped section.

[0036] In this embodiment, there are the same number of first extension sub-electrodes 510 from the first electrode extension portion 51 to the fourth extension sub-electrode 540 of the fourth electrode extension portion 54. In addition, the plurality of first extension sub-electrodes 510 and the plurality of third extension sub-electrodes 530 are arranged on the first platform section 413 in a one-to-one correspondence such that, when viewed from the yz plane, the electrode portion of each first extension sub-electrode 510 is aligned with the electrode portion of the corresponding third extension sub-electrode 530, and the first branch 310 is disposed between the electrode portion of the first extension sub-electrode 510 and the electrode portion of the third extension sub-electrode 530. Similarly, the plurality of second extended sub-electrodes 520 and the plurality of fourth extended sub-electrodes 540 are arranged on the second platform section 423 in a one-to-one correspondence such that when viewed from the yz plane, the electrode portion of each second extended sub-electrode 520 is aligned with the electrode portion of the corresponding fourth extended sub-electrode 540, and the second branch 320 is positioned between the electrode portion of the second extended sub-electrode 520 and the electrode portion of the fourth extended sub-electrode 540.

[0037] Generally, the electrical loss of the modulation signal voltage (i.e., the voltage applied between the signal electrode 100 and the ground electrode) is related to the size of the first gap 250 and the second gap 260. The smaller the first gap 250 and the second gap 260 (i.e., the closer the signal electrode 100 and the ground electrode are), the higher the electro-optical modulation efficiency. However, if the signal electrode 100 or the ground electrode is placed too close to the first branch 310 or the second branch 320 of the optical waveguide 300, the electrode may affect the normal transmission of light within the first branch 310 or the second branch 320. The waveguide wire electrode structure according to this embodiment further includes a covering layer disposed on the optical waveguide 300, and the electrode extension connected to the signal electrode 100 or the ground electrode extends to the upper surface of the covering layer. Such an arrangement ensures that the distance between the electrode extension portion for the signal electrode 100 and the electrode extension portion for the ground electrode is sufficiently close, and also ensures that there is a certain distance between the electrode extension portion and the corresponding optical waveguide 300 (i.e., the first branch 310 or the second branch 320). Therefore, the waveguide line electrode structure according to this embodiment increases the electro-optical conversion efficiency, and prevents the normal transmission of light in the first branch 310 or the second branch 320 from being affected, thus greatly improving the modulation effect of the waveguide line electrode structure.

[0038] Several other modified embodiments of the present disclosure are further described below with reference to FIGS. 4-9. FIG. 4 shows a top view of a waveguide line electrode structure according to another embodiment of the present disclosure. FIG. 5 shows a schematic perspective view of the waveguide line electrode structure of FIG. 4. As shown in FIG. 4, the first electrode extension portion 51 includes a plurality of first extension sub-electrodes 510, each of which extends from the first side 101 toward the first gap 250, and the second electrode extension portion 52 includes a plurality of second extension sub-electrodes 520, each of which extends from the second side 102 toward the second gap 260. That is, the third electrode extension portion 53 and the fourth electrode extension portion 54 do not each include an extension sub-electrode, but rather extend generally outward from one side of the corresponding electrode, as shown in FIG. 5. In some other embodiments, the first covering layer 410 may also be designed to include only the second inclined section 412 facing the signal electrode 100. For example, the cross section of the first covering layer 410 may be designed as a right-angled trapezoid with the right-angled surface facing the first ground electrode 210 and the inclined surface (i.e., the second inclined section 412) facing the signal electrode 100, and the third electrode extension portion 53 may extend directly to the top surface of the first covering layer 410. The second covering layer 420 may also be designed to include only the third inclined section 421 facing the signal electrode 100. For example, the cross section of the second covering layer 420 may be designed as a right-angled trapezoid with the right-angled surface facing the second ground electrode 220 and the inclined surface (i.e., the third inclined section 421) facing the signal electrode 100, and the fourth electrode extension portion 54 may extend directly to the top surface of the second covering layer 420.

[0039] FIG. 6 shows a top view of a waveguide line electrode structure according to yet another embodiment of the present disclosure, and FIG. 7 shows a schematic perspective view of the waveguide line electrode structure of FIG. 6. As shown in FIG. 6, the third electrode extension portion 53 includes a plurality of third extension sub-electrodes 530, each of which extends from the third side 213 toward the first gap 250, and the fourth electrode extension portion 54 includes a plurality of fourth extension sub-electrodes 540, each of which extends from the fourth side 224 toward the second gap 260. That is, the first electrode extension portion 51 and the second electrode extension portion 52 do not each include an extension sub-electrode, but rather extend entirely outward from one side of the corresponding electrode, as shown in FIG. 7. In some other embodiments, the first cover layer 410 may also be designed to include only the first inclined section 411 facing the first ground electrode 210. For example, the cross section of the first covering layer 410 may be designed as a right-angled trapezoid with the right-angled surface facing the signal electrode 100 and the inclined surface (i.e., the first inclined section 411) facing the first ground electrode 210, and the first electrode extension portion 51 may extend directly to the top surface of the first covering layer 410. The second covering layer 420 may also be designed to include only the fourth inclined section 422 facing the second ground electrode 220. For example, the cross section of the second covering layer 420 may be designed as a right-angled trapezoid with the right-angled surface facing the signal electrode 100 and the inclined surface (i.e., the fourth inclined section 422) facing the second ground electrode 220, and the second electrode extension portion 52 may extend directly to the top surface of the second covering layer 420.

[0040] Figure 8 shows a top view of a waveguide line electrode structure according to yet another embodiment of the present disclosure. In the embodiments shown in Figures 1 to 7, the extension portion of each extended sub-electrode is connected to the corresponding electrode portion at a position near its midpoint, but in the embodiment shown in Figure 8, the end of the extension portion of each extended sub-electrode may be connected to the end of the electrode portion in the extension direction. That is, when viewed from the yz plane, each extended sub-electrode is L-shaped.

[0041] 9 shows a top view of a waveguide wire electrode structure according to yet another embodiment of the present disclosure. While in some embodiments shown in FIGS. 1-8, within each electrode extension, the electrode portions of two adjacent extended sub-electrodes are spaced apart from each other, in some other embodiments shown in FIG. 9, the electrode portions of two adjacent extended sub-electrodes may be connected end-to-end. That is, within each electrode extension, the electrode portions of all extended sub-electrodes are continuously connected to form a straight line parallel to the first branch 310 or the second branch 320.

[0042] 10 shows a schematic perspective view of a waveguide line electrode structure according to a further embodiment of the present disclosure. The waveguide line electrode structure of this embodiment differs from the waveguide line electrode structure shown in FIG. 2 in that the extended sub-electrodes of each electrode extension portion comprise only an extension portion and not an electrode portion. On the first platform section 413 of the first cover layer 410, the end of the extension portion of each first extended sub-electrode 510 is aligned with the end of the extension portion of the corresponding third extended sub-electrode 530, and on the second platform section 423 of the second cover layer 420, the end of the extension portion of each second extended sub-electrode 520 is aligned with the end of the extension portion of the corresponding fourth extended sub-electrode 540.

[0043] It should be noted that while in the above-described embodiments, each electrode extension portion extends to the corresponding platform section of the covering layer, in some other embodiments, each electrode extension portion may only extend to the inclined section. When an electrode extension portion includes an extended sub-electrode, each end of the extended sub-electrode may also only extend to the inclined section. In some other embodiments, the covering layer may not include a platform section, for example, the upper surface of the covering layer is composed of only two inclined sections (i.e., the cross section of the covering layer is triangular). In this case, each electrode extension portion may only extend to the inclined section. In some other embodiments, the covering layer may not include an inclined section or a platform section, for example, the upper surface of the covering layer is composed of only an arcuate surface (i.e., the cross section of the covering layer is semicircular or arcuate). In this case, each electrode extension portion may extend to the arcuate surface.

[0044] In addition, the refractive index of the cladding layer is less than that of the optical waveguide 300, preventing light transmitted within the optical waveguide 300 from escaping.

[0045] According to another aspect of the present disclosure, the present disclosure further provides an electro-optical modulator. FIG. 8 is a schematic perspective view of an electro-optical modulator according to one embodiment of the present disclosure. The electro-optical modulator includes a substrate 800, an isolation layer 700 formed on the surface of the substrate 800, and a thin film layer 600 formed on the surface of the isolation layer 700. The coplanar waveguide electrode structure described above is provided on the thin film layer 600. The thin film layer 600 may be made of an optoelectronic material. Specifically, the optoelectronic material may be an etched X-cut, Y-cut, or Z-cut lithium niobate thin film. The substrate 800 may be made of silicon, silicon dioxide, a multilayer material of silicon and silicon dioxide, or a multilayer material of silicon dioxide, metal, and silicon. Any one of the signal electrode 100, the first ground electrode 210, the second ground electrode 220, and the extension sub-electrodes connected thereto may be formed by etching. In addition, the electro-optic modulator further comprises an optical assembly (not shown in this figure). The optical assembly may comprise the optical splitting element and optical combining element described above and is disposed on top of the thin film layer. The optical splitting element is configured to split light propagating in the optical waveguide 300 into light in the first branch 310 and light in the second branch 320, and the optical combining element is configured to combine the light in the first branch 310 and light in the second branch 320 back into light propagating in the optical waveguide 300.

[0046] A specific process for fabricating the electro-optic modulator may include first preparing a substrate 800 and an isolation layer 700, forming a thin film layer 600 on the upper surface of the isolation layer 700, then disposing the first branch 310 and the second branch 320 of the optical waveguide 300, and providing a first covering layer 410 and a second covering layer 420 on the first branch 310 and the second branch 320. Finally, a first ground electrode 210, a second ground electrode 220, a signal electrode 100, and electrode extensions connected to these three electrodes are further formed on the thin film layer 600 and the covering layer. Taking the first ground electrode 210 and the third extended sub-electrode 530 as an example, a metal layer may be grown on the thin film layer 600 and the covering layer at the positions of the first ground electrode 210 and the third extended sub-electrode 530, then a mask may be provided at the positions where the first ground electrode 210 and the third extended sub-electrode 530 will finally be formed, and finally, the integrated patterns of the first ground electrode 210 and the third extended sub-electrode 530 may be fabricated by etching. The first inclined section 411 of the first covering layer 410 provides a support surface for the extended portion of the third extended sub-electrode 530 during etching. The formation of the signal electrode 100, the first extended sub-electrode 510, and the second extended sub-electrode 520, as well as the formation of the second ground electrode 220 and the fourth extended sub-electrode 540, are similar to the above processes and will not be repeated here.

[0047] Additionally, in this embodiment, the lower surfaces of the signal electrode 100, the first ground electrode 210, and the second ground electrode 220 are disposed on the thin film layer 600, but in some other embodiments, the three electrodes may also penetrate the thin film layer 600 and may directly contact the surface of the separation layer 700.

[0048] In this description, the orientations, positional relationships, or dimensions indicated by terms such as "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" are those shown based on the accompanying drawings, and it should be understood that these terms do not indicate or suggest that the referenced devices or elements have a particular orientation and must be constructed and operated in a particular orientation, but are used for ease of description only, and therefore should not be construed to limit the scope of protection of the present disclosure.

[0049] Additionally, terms such as "first," "second," and "third" are for descriptive purposes only and should not be construed as indicating or suggesting relative importance or implicitly indicating the number of technical features being shown. Thus, features defined by "first," "second," and "third" can explicitly or implicitly include one or more features. In the description of this disclosure, the term "plurality" means two or more, unless explicitly and specifically defined otherwise.

[0050] In this disclosure, unless expressly stated or defined otherwise, terms such as "attach," "connect," "connected," and "secure" should be interpreted broadly, for example, they may be a fixed connection, a removable connection, or an integral connection, a mechanical connection or an electrical connection or communication, a direct connection or an indirect connection through an intermediate medium, or an internal communication between two elements or an interaction between two elements. Those skilled in the art will understand the specific meaning of the above terms in this disclosure depending on the specific circumstances.

[0051] In this disclosure, unless otherwise expressly stated or defined, a first feature being "above" or "below" a second feature can include cases where the first feature directly contacts the second feature, or cases where the first and second features are not in direct contact but are contacted via another intervening feature. Furthermore, a first feature being "over," "above," or "on" a second feature includes cases where the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher level than the second feature. A first feature being "below," "under," or "beneath" a second feature includes cases where the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower level than the second feature.

[0052] This description provides many different implementation forms or examples that can be used to implement the present disclosure. It should be understood that these different implementation forms or examples are purely illustrative and are not intended to limit the scope of protection of the present disclosure in any way. Based on the disclosure of the description of the present disclosure, those skilled in the art may think of various modifications or substitutions. All of these modifications or substitutions shall fall within the scope of protection of the present disclosure. Therefore, the scope of protection of the present disclosure shall be governed by the scope of protection of the claims.

Claims

1. a first ground electrode, a signal electrode, and a second ground electrode arranged successively and spaced apart from one another; an optical waveguide having a first branch and a second branch, the first branch being disposed in a first gap formed between the first ground electrode and the signal electrode, and the second branch being disposed in a second gap formed between the second ground electrode and the signal electrode; a first covering layer at least partially covering the first branch; a second coating layer at least partially coating the second branch; at least one electrode extension portion, each electrode extension portion extending from a first side of the signal electrode facing the first ground electrode, a second side of the signal electrode facing the second ground electrode, a third side of the first ground electrode facing the signal electrode, or a fourth side of the second ground electrode facing the signal electrode to the first gap or the second gap adjacent to that side, and each electrode extension portion also extends to an upper surface of the first covering layer or the second covering layer; the top surface of the first covering layer and / or the second covering layer comprises at least one inclined section, each inclined section extending obliquely upward from the signal electrode, the first ground electrode, or the second ground electrode toward the first branch or the second branch adjacent to that electrode; only a corresponding portion of the at least one electrode extension is configured to be in direct contact with the first covering layer or the second covering layer, and the first ground electrode, the signal electrode, and the second ground electrode are not in direct contact with the first covering layer or the second covering layer; waveguide line electrode structure.

2. the electrode extension portion extends through the sloped section to the top surface of the first coating layer or the second coating layer; or 2. The waveguide line electrode structure according to claim 1, wherein the electrode extension portion and at least a portion of the electrode connected to the electrode extension portion extend to the upper surface of the first cover layer or the second cover layer via the inclined section.

3. The electrode extension portion is 3. The waveguide line electrode structure of claim 2, comprising a plurality of extended sub-electrodes, each of which extends from one side of the first ground electrode, the second ground electrode, or the signal electrode toward the first gap or the second gap adjacent to said side.

4. Each of the extension sub-electrodes is 4. The waveguide line electrode structure of claim 3, further comprising an extension portion extending from one side of the first ground electrode, the second ground electrode, or the signal electrode toward the first gap or the second gap adjacent to that side.

5. Each of the extension sub-electrodes is The waveguide line electrode structure according to claim 4 , further comprising an electrode portion disposed at an extended end portion of the extended portion and extending in a direction parallel to the first branch or the second branch.

6. The upper surface of the first coating layer and / or the second coating layer is a platform section adjacent a higher side edge of the sloped section; 4. The waveguide line electrode structure of claim 3, wherein the optical waveguide is disposed below the platform section, and an end of the extension sub-electrode is disposed on the platform section or the inclined section.

7. the at least one electrode extension portion; a first electrode extension portion of the signal electrode disposed on the first side facing the first ground electrode; a second electrode extension portion of the signal electrode disposed on the second side facing the second ground electrode; a third electrode extension portion of the first ground electrode disposed on the third side facing the signal electrode; 7. The waveguide line electrode structure according to claim 1, further comprising: a fourth electrode extension portion disposed on the fourth side of the second ground electrode facing the signal electrode.

8. the first electrode extension portion comprises a plurality of first extended sub-electrodes, each of the first extended sub-electrodes extending from the first side toward the first gap; the second electrode extension portion comprises a plurality of second extended sub-electrodes, each of the second extended sub-electrodes extending from the second side toward the second gap; 8. The waveguide line electrode structure of claim 7.

9. the third electrode extension portion comprises a plurality of third extended sub-electrodes, each of the third extended sub-electrodes extending from the third side toward the first gap; the fourth electrode extension portion comprises a plurality of fourth extension sub-electrodes, each of the fourth extension sub-electrodes extending from the fourth side toward the second gap; 8. The waveguide line electrode structure of claim 7.

10. the first electrode extension portion comprises a plurality of first extended sub-electrodes, each of the first extended sub-electrodes extending from the first side toward the first gap; the second electrode extension portion comprises a plurality of second extended sub-electrodes, each of the second extended sub-electrodes extending from the second side toward the second gap; the third electrode extension portion comprises a plurality of third extended sub-electrodes, each of the third extended sub-electrodes extending from the third side toward the first gap; the fourth electrode extension portion comprises a plurality of fourth extension sub-electrodes, each of the fourth extension sub-electrodes extending from the fourth side toward the second gap; 8. The waveguide line electrode structure of claim 7.

11. each of the first extension sub-electrodes in the first electrode extension portion is disposed opposite a corresponding third extension sub-electrode in the third electrode extension portion; each of the second extension sub-electrodes in the second electrode extension portion is disposed opposite a corresponding fourth extension sub-electrode in the fourth electrode extension portion; 11. The waveguide line electrode structure of claim 10.

12. the top surface of the first cover layer comprises a first inclined section, a first platform section, and a second inclined section that are continuously adjacent to one another, the first inclined section facing the first ground electrode, and the second inclined section facing the signal electrode; the top surface of the second cover layer includes a third inclined section, a second platform section, and a fourth inclined section that are successively adjacent to one another, the third inclined section facing the signal electrode, and the fourth inclined section facing the second ground electrode; the first electrode extension portion extends to the first platform section via the second sloped section, the second electrode extension portion extends to the second platform section via the third sloped section, the third electrode extension portion extends to the first platform section via the first sloped section, and the fourth electrode extension portion extends to the second platform section via the fourth sloped section.

8. The waveguide line electrode structure of claim 7.

13. Within each electrode extension portion, the electrode portions of two adjacent extension sub-electrodes are spaced apart from each other; 7. A waveguide line electrode structure according to any one of claims 3 to 6.

14. Within each electrode extension portion, the electrode portions of two adjacent extension sub-electrodes are connected end to end; 7. A waveguide line electrode structure according to any one of claims 3 to 6.

15. the refractive index of the coating layer is smaller than the refractive index of the optical waveguide; 7. A waveguide line electrode structure according to any one of claims 1 to 6.

16. A substrate; a separation layer disposed on an upper surface of the substrate; a thin film layer disposed on the top surface of the separation layer, the thin film layer being made of an optoelectronic material; a waveguide line electrode structure according to claim 1 disposed on an upper surface of the thin film layer; an optical assembly disposed on the top surface of the thin film layer and configured to split light propagating in the optical waveguide into light in the first branch and light in the second branch, and to combine the light in the first branch and the light in the second branch into the light propagating in the optical waveguide again; 1. An electro-optic modulator comprising:

17. the lower surfaces of the signal electrode, the first ground electrode, and the second ground electrode penetrate the thin film layer and directly contact the isolation layer; 17. The electro-optic modulator of claim 16.

18. 17. The electro-optic modulator of claim 16, wherein the thin film layer is an etched X-cut, Y-cut, or Z-cut lithium niobate thin film.

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