Substrate Processing Equipment

Abstract

To suppress contact of a substrate held by a mounting unit with water.SOLUTION: A mounting unit 40 of a substrate processing apparatus holds: an unprocessed substrate that is transferred from an indexer robot to a center robot; and a processed substrate transferred from the center robot to the indexer robot. The mounting unit 40 comprises: a housing 411; a first opening / closing portion 413; and a second opening / closing portion 414. The housing 411 can house a plurality of substrates 9 into an internal space 400 to which a low-moisture gas having moisture lower than that of atmosphere is supplied. The first opening / closing portion 413 opens and closes a portion on a processing block side of the housing 411. The second opening / closing portion 414 is driven independently from the first opening / closing portion 413, and opens and closes a portion on an indexer block side of the housing 411. Thus, contact of the substrate held by the mounting unit 40 with water can be suppressed.SELECTED DRAWING: Figure 11

Description

[Technical Field]

[0001] The present invention relates to a substrate processing apparatus for processing a substrate. [Background technology]

[0002] Conventionally, in a substrate processing apparatus for processing substrates, a substrate accommodated in a carrier such as a FOUP (Front Opening Unified Pod) is removed by an indexer robot and placed on a loading unit (also called a transfer unit), and then transported from the loading unit to a processing unit by a center robot, where the substrate is subjected to various processes.

[0003] For example, Patent Document 1 discloses a multilayer wiring formation system in which a BEOL (Back End of Line) process is performed. In this multilayer wiring formation system, an unprocessed substrate is transferred from a transfer station to a transfer part, and the substrate placed in the transfer part is transported to a processing unit by a substrate transport device of the processing station. Furthermore, the processed substrate is transferred from the processing station to the transfer part, and the substrate placed in the transfer part is stored in a carrier by the substrate transport device of the transfer station.

[0004] In this multilayer wiring formation system, in order to suppress oxidation of the electroless plating film on the substrate, a Bernoulli chuck that holds the substrate by spraying an inert gas such as nitrogen gas is used as the substrate transport device in the processing station, and the entire transport section, which is the movement path of the substrate transport device in the processing station, is filled with an inert gas atmosphere.

[0005] In the substrate processing system of Patent Document 2, the pressure in the internal space of the loading / unloading station is made higher than the pressure in the internal space of the processing station, thereby forming an air flow from the loading / unloading station through the transfer section toward the processing station. This prevents chemical atmospheres, etc., generated in the processing units from entering the loading / unloading station. Furthermore, in the transfer section, a gas outlet that supplies dry air is provided at the opening of the transfer section on the loading / unloading station side to reduce the effect of humidity on devices on the substrate.

[0006] In the substrate processing apparatus of Patent Document 3, a shutter is provided at the connection between the placement unit and the transport path of the processing block, thereby blocking the movement of gas between the indexer block and the placement unit, which are in a low-oxygen atmosphere, and the transport path of the processing block. This suppresses oxidation of substrates in the indexer block and the placement unit. Furthermore, in this substrate processing apparatus, a shutter may also be provided at the connection between the indexer block and the placement unit. In the processing system of Patent Document 4, shutters are also provided at the openings on both sides of the wafer transfer unit.

[0007] Furthermore, in the substrate processing apparatus of Patent Document 5, the entire passage opening that communicates with the substrate entrance and exit of the substrate container is covered with a cover from the indexer space side, and a small, horizontal opening for inserting a hand is provided in the cover, thereby preventing the atmosphere in the indexer space from entering the substrate container. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] International Publication No. 2019 / 151023 [Patent Document 2] Japanese Patent Application Laid-Open No. 2016-40801 [Patent Document 3] Japanese Patent Publication No. 2020-47888 [Patent Document 4] Japanese Patent Application Laid-Open No. 2007-311691 [Patent Document 5] Japanese Patent Application Laid-Open No. 2010-232522 Summary of the Invention [Problem to be solved by the invention]

[0009] In the BEOL process, it is necessary to prevent moisture from coming into contact with metal or low-k films on the substrate surface, so it is important to maintain a low humidity atmosphere. As described above, in the substrate processing system of Patent Document 2, dry air is supplied from an opening on the transfer station side of the transfer unit. Because the dry air spreads from the transfer unit to the processing station, a large amount of dry air is required to maintain a low humidity in the transfer unit. In addition, the transfer path and other components of the processing station must be airtightly isolated from the external space, which may complicate the structure and manufacturing of the substrate processing system.

[0010] The present invention has been made in view of the above-mentioned problems, and has as its object to prevent moisture from coming into contact with a substrate held on a mounting unit. [Means for solving the problem]

[0011] A first aspect of the present invention is a substrate processing apparatus for processing substrates, comprising: a processing block in which processing units for processing substrates and a first transport robot for loading and unloading substrates into and from the processing units are disposed; an indexer block in which a second transport robot for loading and unloading substrates into and from a carrier capable of accommodating a plurality of substrates is disposed; an indexer block provided at a connection between the processing block and the indexer block, which is configured to transfer unprocessed substrates from the second transport robot to the first transport robot; No. and a placement unit for holding a processed substrate handed over from the first transport robot to the second transport robot, the placement unit including a housing capable of accommodating a plurality of substrates in an internal space to which a low-humidity gas having a humidity lower than that of the atmosphere is supplied, a first opening / closing unit for opening and closing a portion of the housing on the processing block side, and a second opening / closing unit that is driven independently of the first opening / closing unit and opens and closes a portion of the housing on the indexer block side. a mounting portion provided in the internal space of the housing and on which the plurality of substrates arranged in a predetermined arrangement direction are mounted; Equipped with. The first opening / closing unit opens only a selected partial area of ​​an area facing the placement unit in a portion of the housing on the processing block side to allow the first transport robot to enter. The first opening / closing unit covers an opening provided in the portion of the housing on the processing block side and includes a first door body having a first access opening facing a portion of the placement unit in the arrangement direction, and a first door moving mechanism that moves the first door body relative to the housing along the arrangement direction. The substrate processing apparatus further includes a first waiting closing unit provided at a position facing the first access opening in the internal space of the housing when the first transport robot is not accessing the placement unit.

[0015] Aspects of the present invention 2 is the aspect 1 In the substrate processing apparatus of the present invention, the mounting section includes an unprocessed substrate mounting section on which a group of unprocessed substrates is mounted, and a processed substrate mounting section arranged on one side of the unprocessed substrate mounting section in the arrangement direction and spaced apart from each other, and the mounting unit further includes a partition section that separates a space in the internal space of the housing where the unprocessed substrate mounting section is disposed from a space in which the processed substrate mounting section is disposed. The first standby closing section is a side surface of the partition section.

[0018] Aspects of the present invention 3 teeth, Process the substrate A substrate processing apparatus, The system includes a processing block in which processing units for processing substrates and a first transport robot for loading and unloading substrates into and from the processing units are disposed, an indexer block in which a second transport robot for loading and unloading substrates into and from a carrier capable of accommodating a plurality of substrates is disposed, and a mounting unit provided at a connection between the processing block and the indexer block and configured to hold unprocessed substrates passed from the second transport robot to the first transport robot and processed substrates passed from the first transport robot to the second transport robot. The mounting unit includes a housing capable of accommodating a plurality of substrates in an internal space supplied with low-humidity gas having a humidity lower than that of the atmosphere, a first opening / closing unit for opening and closing a portion of the housing facing the processing block, a second opening / closing unit driven independently of the first opening / closing unit for opening and closing a portion of the housing facing the indexer block, and a mounting unit provided in the internal space of the housing and on which the plurality of substrates arranged in a predetermined arrangement direction are placed. The second opening / closing unit opens only a selected partial area of ​​an area facing the placement unit in the portion of the housing on the indexer block side so as to allow the second transport robot to enter. The second opening / closing unit covers an opening provided in the portion of the housing on the indexer block side and includes a second door body having a second access opening facing a portion of the placement unit in the arrangement direction, and a second door moving mechanism that moves the second door body relative to the housing along the arrangement direction. The substrate processing apparatus further includes a second waiting closure portion that is provided in a position opposite the second access opening within the internal space of the housing when the second transport robot is not accessing the placement unit.

[0019] Aspects of the present invention 4 is the aspect 3 In the substrate processing apparatus of the present invention, the mounting section includes an unprocessed substrate mounting section on which a group of unprocessed substrates is mounted, and a processed substrate mounting section arranged on one side of the unprocessed substrate mounting section in the arrangement direction and spaced apart from each other, and the mounting unit further includes a partition section that separates a space in the internal space of the housing where the unprocessed substrate mounting section is disposed from a space in which the processed substrate mounting section is disposed. The second standby closing section is a side surface of the partition section. A fifth aspect of the present invention is the substrate processing apparatus of any one of the first to fourth aspects, wherein the first transport robot includes a first base, a first arm attached to the first base and configured to transfer substrates between the placement unit and the processing unit, and a first cover configured to cover the first arm on the first base and house the first arm therein. A low-humidity gas having a humidity lower than that of the atmosphere is supplied into the first cover. A sixth aspect of the present invention is the substrate processing apparatus of any one of the first to fourth aspects (or any one of the first to fifth aspects), wherein the second transport robot includes a second base, a second arm attached to the second base and configured to transfer substrates between the placement unit and the carrier, and a second cover configured to cover the second arm on the second base and house the second arm therein. A low-humidity gas having a humidity lower than that of the atmosphere is supplied into the second cover.

[0021] Aspects of the present invention 7 teeth, Process the substrate A substrate processing apparatus, The system includes a processing block in which processing units for processing substrates and a first transport robot for loading and unloading substrates into and from the processing units are disposed, an indexer block in which a second transport robot for loading and unloading substrates into and from a carrier capable of accommodating multiple substrates is disposed, and a placement unit provided at a connection between the processing block and the indexer block and for holding unprocessed substrates passed from the second transport robot to the first transport robot and processed substrates passed from the first transport robot to the second transport robot. The placement unit includes a housing capable of accommodating multiple substrates in an internal space supplied with low-humidity gas having a humidity lower than that of the atmosphere, a first opening / closing unit for opening and closing a portion of the housing on the processing block side, and a second opening / closing unit driven independently of the first opening / closing unit for opening and closing a portion of the housing on the indexer block side. The first transfer robot includes a first base, a first arm attached to the first base and configured to transfer substrates between the placement unit and the processing unit, and a first cover configured to cover the first arm on the first base and house the first arm therein. A low-humidity gas having a humidity lower than that of the atmosphere is supplied into the first cover.The first cover portion includes a first fixed cover fixed on the first base, a first movable cover that is movable while connected to the first fixed cover, and a first movable cover moving mechanism that moves the first movable cover when the first arm extends laterally from above the first base, thereby covering the tip end of the first arm with the first movable cover.

[0023] Aspects of the present invention 8 teeth, Process the substrate A substrate processing apparatus, The system includes a processing block in which processing units for processing substrates and a first transport robot for loading and unloading substrates into and from the processing units are disposed, an indexer block in which a second transport robot for loading and unloading substrates into and from a carrier capable of accommodating multiple substrates is disposed, and a placement unit provided at a connection between the processing block and the indexer block and for holding unprocessed substrates passed from the second transport robot to the first transport robot and processed substrates passed from the first transport robot to the second transport robot. The placement unit includes a housing capable of accommodating multiple substrates in an internal space supplied with low-humidity gas having a humidity lower than that of the atmosphere, a first opening / closing unit for opening and closing a portion of the housing on the processing block side, and a second opening / closing unit driven independently of the first opening / closing unit for opening and closing a portion of the housing on the indexer block side. The second transfer robot includes a second base, a second arm attached to the second base and configured to transfer substrates between the placement unit and the carrier, and a second cover configured to cover the second arm on the second base and house the second arm therein. A low-humidity gas having a humidity lower than that of the atmosphere is supplied into the second cover. The second cover portion includes a second fixed cover fixed on the second base, a second movable cover that is movable while connected to the second fixed cover, and a second movable cover moving mechanism that moves the second movable cover when the second arm extends laterally from above the second base, thereby covering the tip end of the second arm with the second movable cover. [Effects of the Invention]

[0024] In the present invention, it is possible to prevent moisture from coming into contact with the substrate held on the mounting unit. [Brief explanation of the drawings]

[0025] [Figure 1] 1 is a plan view of a substrate processing apparatus according to an embodiment; [Figure 2] FIG. 2 is a front view showing the inside of the substrate processing apparatus. [Figure 3] FIG. 2 is a vertical cross-sectional view of an indexer block. [Figure 4] FIG. 2 is a perspective view of the vicinity of a cover of the indexer robot. [Figure 5] FIG. 2 is a side view of the vicinity of the cover of the indexer robot. [Figure 6] FIG. 2 is a perspective view of the vicinity of the cover of the center robot. [Figure 7] FIG. 10 is a side view of the vicinity of the cover of the center robot. [Figure 8] FIG. 2 illustrates an example of a processing unit. [Figure 9] FIG. [Figure 10] FIG. [Figure 11] FIG. 2 is a vertical cross-sectional view of the mounting unit. [Figure 12] FIG. 2 is a cross-sectional view of the mounting unit. [Figure 13] FIG. 1 illustrates an indexer robot and a carrier. [Figure 14] FIG. 1 illustrates an indexer robot and a carrier. [Figure 15] FIG. 2 shows an indexer robot and a placement unit. [Figure 16] FIG. 2 shows an indexer robot and a placement unit. [Figure 17] FIG. 2 is a diagram showing a center robot and a placement unit. [Figure 18] FIG. 2 is a diagram showing a center robot and a placement unit. [Figure 19] FIG. 2 is a diagram showing a center robot and a processing unit. [Figure 20] FIG. 2 is a diagram showing a center robot and a processing unit. DETAILED DESCRIPTION OF THE INVENTION

[0026] FIG. 1 is a plan view of a substrate processing apparatus 1 according to one embodiment of the present invention. FIG. 2 is a view of the substrate processing apparatus 1 as seen from line II-II in FIG. 1. Note that each of the drawings referred to below is appropriately illustrated with an XYZ Cartesian coordinate system in which the Z axis direction is the vertical direction (i.e., the up-down direction) and the XY plane is the horizontal plane. Note that in FIG. 1, the internal structure of the substrate processing apparatus 1 is also shown by solid lines. Also, in FIG. 2, a portion of the (+X) side of the substrate processing apparatus 1 is not shown.

[0027] The substrate processing apparatus 1 is an apparatus that continuously processes a plurality of substantially disk-shaped semiconductor substrates 9 (hereinafter simply referred to as "substrates 9"). In the substrate processing apparatus 1, for example, cleaning processing is performed on the substrates 9 in a BEOL (Back End of Line) process.

[0028] The substrate processing apparatus 1 includes a carrier stage 11, an indexer block 10, a processing block 20, and a placement unit 40. The indexer block 10 and the processing block 20 are also called an indexer cell and a processing cell, respectively. The indexer block 10 is also called an Equipment Front End Module (EDEM) unit, etc. In the example shown in FIG. 1 , multiple (four) carrier stages 11, indexer blocks 10, and processing blocks 20 are arranged adjacent to each other in this order from the (-X) side to the (+X) side.

[0029] The multiple carrier stages 11 are arranged in the Y direction along the sidewall on the (-X) side of the indexer block 10. Each of the multiple carrier stages 11 is a mounting table on which a carrier 95 is placed. The carrier 95 can accommodate multiple disk-shaped substrates 9. The internal space of the carrier 95 is filled with an inert gas (e.g., nitrogen (N2) or argon (Ar)), creating a low-oxygen and low-humidity atmosphere. The carrier 95 is, for example, a front-opening unified pod (FOUP) that accommodates substrates 9 in a sealed space. The carrier 95 is not limited to a FOUP and may be, for example, a standard mechanical interface (SMIF) pod or the like. The number of carrier stages 11 may be one or two or more.

[0030] Carriers 95 containing a plurality of unprocessed substrates 9 (i.e., substrates 9 before being processed by the substrate processing apparatus 1) are carried in from outside the substrate processing apparatus 1 by an OHT (Overhead Hoist Transfer) or the like and placed on each carrier stage 11. In addition, processed substrates 9 that have completed processing in the processing block 20 are accommodated in the carrier 95 placed on the carrier stage 11. The carrier 95 containing the processed substrates 9 is then carried out to the outside of the substrate processing apparatus 1 by an OHT or the like. In other words, the carrier stage 11 functions as a substrate accumulation unit that accumulates unprocessed substrates 9 and processed substrates 9.

[0031] FIG. 3 is a vertical cross-sectional view of the indexer block 10 showing an enlarged view of the vicinity of one carrier 95. A passage opening 131 is provided in the side wall 13 on the (-X) side of the indexer block 10 at a position corresponding to the carrier 95 on each carrier stage 11. The passage opening 131 is closed by a sliding door (not shown) that is movable along the side wall 13. When a substrate 9 is loaded or unloaded into or from the carrier 95, the sliding door is opened. Note that in FIG. 3, some of the substrates 9 in the carrier 95 are not shown. The same applies to FIGS. 13 and 14 described below.

[0032] A passage port cover 141 that covers the entire passage port 131 is provided on the (+X) side of the passage port 131. In other words, the passage port cover 141 covers the passage port 131 on the opposite side of the carrier stage 11 with respect to the passage port 131. The passage port cover 141 is a box-shaped member that is approximately a rectangular parallelepiped and has an open side on the (-X) side. The edge on the (-X) side of the passage port cover 141 is approximately rectangular, and faces the side wall 13 of the indexer block 10 with a small clearance (for example, a gap of 2 mm to 3 mm) between them.

[0033] A passage port cover moving mechanism 142 is provided below the passage port cover 141 to support the passage port cover 141 and move it up and down. The passage port cover moving mechanism 142 includes, for example, a ball screw mechanism driven by a motor. The passage port cover 141 covers almost the entire passage port 131 regardless of whether it is positioned in the up or down direction.

[0034] A horizontally elongated opening 143 and a shutter 144 for opening and closing the opening 143 are provided on a substantially flat side surface on the (+X) side of the passage port cover 141. The opening 143 is, for example, horizontally elongated (i.e., its horizontal length is greater than its vertical height) and has a substantially rectangular shape. When viewed along the X direction, the opening 143 is smaller than the passage port 131. The vertical height of the opening 143 is smaller than the vertical height of the passage port 131 and greater than the vertical height of the four transport arms 121 of the indexer robot 12, which will be described later.

[0035] The shutter 144 is moved up and down by a drive unit (not shown). The drive unit includes, for example, a linear motor. A seal member 145 such as an O-ring is provided around substantially the entire periphery of the opening 143 on the (+X) side surface of the passage port cover 141. When the shutter 144 closes the opening 143, the shutter 144 comes into contact with the seal member 145, thereby substantially isolating the internal space of the passage port cover 141 (i.e., the space between the passage port cover 141 and the side wall 13) from the internal space 100 of the indexer block 10. For example, a low-humidity gas, which will be described later, may be supplied to the internal space of the passage port cover 141.

[0036] When the substrate 9 is loaded into or unloaded from the carrier 95, the passage port cover 141 is moved vertically by the passage port cover moving mechanism 142, and the opening 143 is positioned opposite the transport arm 121 of the indexer robot 12 in the X direction. Then, the shutter 144 moves downward below the opening 143. Thereafter, the transport arm 121 of the indexer robot 12 is inserted into the carrier 95 through the opening 143 and the passage port 131, and the substrate 9 is transferred between the carrier 95 and the carrier 95.

[0037] 1 and 2, unprocessed substrates 9 are transferred from carriers 95 to processing blocks 20. In addition, processed substrates 9 transferred from processing blocks 20 are transferred to carriers 95 in indexer block 10. An indexer robot 12 is disposed in an internal space 100 of indexer block 10, and transfers substrates 9 into and out of carriers 95.

[0038] The indexer robot 12 includes a transport arm 121, a base 122, an arm support section 123, a moving mechanism 124, and a cover section 125. In the example shown in Fig. 2, the indexer robot 12 includes four transport arms 121. The four transport arms 121 are mounted on the base 122 in an array spaced apart from each other in the vertical direction. The base 122 is mounted on the arm support section 123. The arm support section 123 is provided with a rotation mechanism (not shown) that rotates the base 122 around a rotation axis facing in the vertical direction. The rotation mechanism includes, for example, a motor.

[0039] The movement mechanism 124 is a mechanism that moves the arm support part 123 in the Y direction (i.e., the direction in which the multiple carriers 95 are arranged) and the Z direction (i.e., the up-down direction). The movement mechanism 124 includes, for example, a ball screw mechanism driven by a motor. The cover part 125 covers the periphery of the transfer arm 121 on the base 122 and houses the transfer arm 121 inside. The cover part 125 is, for example, a box-shaped member having a substantially rectangular parallelepiped shape, and opens to the side at the tip side of the transfer arm 121. In FIGS. 1 and 2, the cover part 125 is indicated by dashed lines.

[0040] A hand that is approximately U-shaped in plan view is provided at the tip of each transfer arm 121. The hand includes, for example, a base portion that extends in the width direction and two claw portions that extend approximately parallel to the longitudinal direction perpendicular to the width direction from both widthwise ends of the base portion. Each transfer arm 121 supports the underside of one substrate 9 with the hand. Each transfer arm 121 moves in the horizontal direction by a drive mechanism 122a (see FIG. 5) provided on the base 122. In other words, the hand is provided on the indexer robot 12 so as to be freely movable forward and backward, vertically movable, and rotatable. In the indexer robot 12, the multiple transfer arms 121 may be movable independently of each other, or some or all of the multiple transfer arms 121 may be moved together without being independent of each other. The number of transfer arms 121 may be one or more. The drive mechanism 122a that moves the transfer arm 121 includes, for example, a linear motor.

[0041] The indexer robot 12 is a transport robot that transfers substrates 9 between the carrier 95 placed on the carrier stage 11 and the mounting unit 40, which can accommodate multiple substrates 9 in its internal space, by accessing the transport arm 121, which holds the substrates 9 with a hand, to the carrier 95 placed on the carrier stage 11 and the mounting unit 40. The mechanism for moving each component of the indexer robot 12 is not limited to the above example and may be modified in various ways. For example, a ball screw mechanism driven by a motor may be used as the drive mechanism 122a of the transport arm 121. Furthermore, a belt feed mechanism using a pulley and a timing belt may be used as the movement mechanism 124 that moves the arm support part 123.

[0042] 4 is an enlarged perspective view showing the vicinity of the cover unit 125 of the indexer robot 12. The cover unit 125 includes a fixed cover 126, a movable cover 127, and a movable cover moving mechanism 128. The fixed cover 126 is a box-shaped member having a substantially rectangular parallelepiped shape, and is fixed on the base 122. The fixed cover 126 covers the multiple transport arms 121 on the base 122. An opening is provided on the side of the fixed cover 126 at a position facing the tip ends of the multiple transport arms 121. The opening has, for example, a substantially rectangular shape.

[0043] The movable cover 127 is a substantially rectangular cylindrical member having a cross section substantially identical in shape to the opening of the fixed cover 126, and is inserted into the opening of the fixed cover 126. The gap between the opening and the movable cover 127 is airtightly sealed by a sealing member (not shown) or the like. The movable cover 127 has openings on both sides in the direction in which the transport arm 121 advances and retreats relative to the base 122. The movable cover 127 covers the peripheries of the tips of the multiple transport arms 121. Specifically, the movable cover 127 covers the upper and lower sides and both widthwise sides of the tips of the multiple transport arms 121. The opening on the tip side of the movable cover 127 is larger than the opening 143 of the passage port cover 141 (see FIG. 3) and is larger than a second access opening 443 of the mounting unit 40 (see FIG. 10), which will be described later.

[0044] The movable cover 127 is movably attached to the fixed cover 126. The movable cover moving mechanism 128 moves the movable cover 127 in the forward / backward direction while it is connected to the fixed cover 126, causing the movable cover 127 to protrude from the fixed cover 126 in the forward / backward direction. In FIG. 4, the movable cover 127 protruding largely from the fixed cover 126 is shown by a two-dot chain line. A portion of the movable cover 127 is always housed inside the fixed cover 126. In the indexer robot 12, when the transport arm 121 is extended laterally from above the base 122, the movable cover 127 is moved laterally in advance so that it protrudes largely from the fixed cover 126. This maintains the tip of the transport arm 121 covered by the movable cover 127.

[0045] FIG. 5 is a side view of the vicinity of the cover unit 125 of the indexer robot 12. The fixed cover 126 is shown in cross section in FIG. 5 (the same applies to FIGS. 13 to 16 described below). In the indexer robot 12, a gas supply port 129a is provided at the end of the fixed cover 126 opposite the end to which the movable cover 127 is connected. A gas exhaust port 129b is also provided at the end of the fixed cover 126 to which the movable cover 127 is connected. The gas supply port 129a is connected to a low-humidity gas supply source (not shown) via a pipe, and low-humidity gas is supplied from the low-humidity gas supply source to the inside of the cover unit 125. Low-humidity gas has a lower humidity than the atmosphere at the same temperature and pressure. Examples of low-humidity gas that can be used include dry air and inert gases such as N2.

[0046] In the indexer robot 12, the inside of the cover part 125 is filled with low-humidity gas to create a low-humidity atmosphere, thereby preventing moisture from coming into contact with the substrate 9 (see FIGS. 1 and 2) held by the transfer arm 121. The low-humidity gas supplied into the inside of the cover part 125 from the gas supply port 129a is led out of the cover part 125 from the gas exhaust port 129b and sent to a gas recovery part or the like via piping (not shown).

[0047] 1 and 2, the processing block 20 is provided with a transport path 23 used to transport substrates 9, and a plurality of processing units 21 arranged around the transport path 23. In the example shown in FIG. 1, the transport path 23 extends in the X direction at the center of the processing block 20 in the Y direction. A center robot 22 that transports substrates 9 into and out of each processing unit 21 is arranged in an internal space 230 of the transport path 23. In the example shown in FIG. 2, one center robot 22 is provided in the processing block 20, but, for example, two or more center robots 22 arranged vertically may be arranged in the internal space 230 of the transport path 23.

[0048] The center robot 22 includes a transfer arm 221, a base 222, an arm support section 223, a movement mechanism 224, and a cover section 225. In the example shown in Fig. 2, the center robot 22 includes two transfer arms 221. The two transfer arms 221 are attached to the base 222 in an aligned state while being spaced apart in the vertical direction. The base 222 is movably attached to the arm support section 223. The arm support section 223 is provided with a rotation mechanism (not shown) that rotates the base 222 around a rotation axis facing in the vertical direction. The rotation mechanism includes, for example, a motor.

[0049] The movement mechanism 224 is a mechanism that moves the arm support part 223 in the X direction and the Z direction. The movement mechanism 224 includes, for example, a ball screw mechanism driven by a motor. The cover part 225 covers the periphery of the transfer arm 221 on the base 222 and houses the transfer arm 221 inside. The cover part 225 is, for example, a box-shaped member having a substantially rectangular parallelepiped shape, and opens laterally at the tip side of the transfer arm 221. In FIGS. 1 and 2, the cover part 225 is indicated by dashed lines.

[0050] A hand that is approximately U-shaped in a plan view is provided at the tip of each transfer arm 221. The hand includes, for example, a base portion that extends in the width direction and two claw portions that extend approximately parallel to the longitudinal direction perpendicular to the width direction from both widthwise ends of the base. Each transfer arm 221 supports the lower surface of one substrate 9 with the hand. Each transfer arm 221 moves in the horizontal direction by a drive mechanism 222a (see FIG. 7) provided on the base 222. In other words, the hand is provided on the center robot 22 so as to be freely movable forward and backward, vertically movable, and rotatable. In the center robot 22, the multiple transfer arms 221 may be movable independently of each other, or some or all of the multiple transfer arms 221 may be moved together without being independent of each other. The number of transfer arms 221 may be one or more. The drive mechanism 222a that moves the transfer arm 221 includes, for example, a linear motor.

[0051] The center robot 22 is a transport robot that transfers the substrate 9 between the mounting unit 40 and the processing units 21 by accessing the transport arm 221, which holds the substrate 9 with its hand, to the mounting unit 40 and the multiple processing units 21. The mechanism for moving each component in the center robot 22 is not limited to the above example and may be modified in various ways. For example, a ball screw mechanism driven by a motor may be used as the drive mechanism 222a of the transport arm 221. Furthermore, a belt feed mechanism using a pulley and a timing belt may be used as the movement mechanism 224 that moves the arm support part 223.

[0052] 6 is an enlarged perspective view showing the vicinity of the cover unit 225 of the center robot 22. The cover unit 225 includes a fixed cover 226, a movable cover 227, and a movable cover moving mechanism 228. The fixed cover 226 is a box-shaped member having a substantially rectangular parallelepiped shape, and is fixed onto the base 222. The fixed cover 226 covers the multiple transport arms 221 on the base 222. An opening is provided on the side of the fixed cover 226 at a position facing the tip ends of the multiple transport arms 221. The opening is, for example, substantially rectangular.

[0053] The movable cover 227 is a substantially rectangular cylindrical member having a cross section substantially identical in shape to the opening of the fixed cover 226, and is inserted into the opening of the fixed cover 226. The gap between the opening and the movable cover 227 is airtightly sealed by a sealing member (not shown) or the like. The movable cover 227 has openings on both sides in the direction in which the transfer arm 221 advances and retreats relative to the base 222. The movable cover 227 covers the peripheries of the tips of the multiple transfer arms 221. Specifically, the movable cover 227 covers the upper and lower sides and both widthwise sides of the tips of the multiple transfer arms 221. The opening on the tip side of the movable cover 227 is larger than a first access opening 433 (see FIG. 9) of the mounting unit 40 (described later) and is larger than an opening 212 (see FIG. 8) of the processing unit 21 (described later).

[0054] The movable cover 227 is movably attached to the fixed cover 226. The movable cover moving mechanism 228 moves the movable cover 227 in the forward / backward direction while it is connected to the fixed cover 226, causing the movable cover 227 to protrude from the fixed cover 226 in the forward / backward direction. In FIG. 6, the movable cover 227 protruding largely from the fixed cover 226 is shown by a two-dot chain line. A portion of the movable cover 227 is always housed inside the fixed cover 226. In the center robot 22, when the transfer arm 221 is extended laterally from above the base 222, the movable cover 227 is moved laterally in advance so that it protrudes largely from the fixed cover 226. This maintains a state in which the tip of the transfer arm 221 is covered by the movable cover 227.

[0055] FIG. 7 is a side view of the vicinity of the cover unit 225 of the center robot 22. FIG. 7 shows the fixed cover 226 in cross section (the same applies to FIGS. 17 to 20 described below). In the center robot 22, a gas supply port 229a is provided at the end of the fixed cover 226 opposite to the end to which the movable cover 227 is connected. In addition, a gas exhaust port 229b is provided at the end of the fixed cover 226 to which the movable cover 227 is connected. The gas supply port 229a is connected to the low-humidity gas supply source described above via a pipe, and low-humidity gas is supplied from the low-humidity gas supply source to the inside of the cover unit 225. In the center robot 22, the inside of the cover unit 225 is filled with low-humidity gas to create a low-humidity atmosphere, thereby preventing moisture from coming into contact with the substrate 9 (see FIGS. 1 and 2) held by the transfer arm 221. The low-humidity gas supplied from the gas supply port 229a to the inside of the cover part 225 is discharged from the gas exhaust port 229b to the outside of the cover part 225 and sent to a gas recovery part or the like via a pipe not shown.

[0056] In the following description, the center robot 22 and the indexer robot 12 are also referred to as the "first transport robot" and the "second transport robot," respectively. The transport arm 221, the base 222, the cover unit 225, the fixed cover 226, the movable cover 227, and the movable cover moving mechanism 228 of the center robot 22 are also referred to as the "first arm," the "first base," the "first cover unit," the "first fixed cover," the "first movable cover," and the "first movable cover moving mechanism," respectively. The transport arm 121, the base 122, the cover unit 125, the fixed cover 126, the movable cover 127, and the movable cover moving mechanism 128 of the indexer robot 12 are also referred to as the "second arm," the "second base," the "second cover unit," the "second fixed cover," the "second movable cover," and the "second movable cover moving mechanism," respectively.

[0057] 1 and 2, processing is performed on a substrate 9. In the example shown in Fig. 1 and 2, 12 processing units 21 are provided in the processing block 20. Specifically, four groups of three processing units 21 stacked in the Z direction are arranged around a center robot 22 in a plan view.

[0058] 8 is a diagram showing an example of the processing unit 21. The processing unit 21 includes a housing 211 and a processing section 24. The processing section 24 is accommodated in an internal space 210 of the housing 211. The processing section 24 includes a substrate holder 241, a substrate rotation mechanism 242, a cup section 243, a nozzle 244, and a top plate 245. The processing section 24 performs liquid processing such as etching on the upper surface of the substrate 9, for example.

[0059] The substrate holding unit 241 holds the substrate 9 in a horizontal position, for example. The substrate holding unit 241 includes, for example, a plurality of mechanical chucks that contact and hold the peripheral edge of the substrate 9. The substrate rotation mechanism 242 rotates the substrate 9 held by the substrate holding unit 241 by rotating the substrate holding unit 241 around a rotation axis J1 that faces the up-down direction. The substrate rotation mechanism 242 includes, for example, an electric motor connected to the underside of the substrate holding unit 241.

[0060] The cup portion 243 is a substantially cylindrical member that surrounds the entire periphery of the substrate holding portion 241. The cup portion 243 receives liquid that splashes around from the rotating substrate 9. The top plate 245 is a shielding plate that covers the upper side of the substrate 9 to shield it from the surrounding atmosphere. The top plate 245 is supported from below by the substrate holding portion 241, for example, and rotates together with the substrate holding portion 241 by the substrate rotation mechanism 242. The nozzle 244 is inserted into an opening provided in the center of the top plate 245, and supplies the processing liquid toward the center of the upper surface of the substrate 9.

[0061] An opening 212 and a shutter 213 that opens and closes the opening 212 are provided on a substantially flat side surface of the housing 211. The opening 212 has, for example, a horizontally elongated, substantially rectangular shape. The shutter 213 is a substantially rectangular plate-like member that is larger than the opening 212. The shutter 213 moves up and down by a drive unit (not shown). The drive unit includes, for example, a linear motor. A seal member 214 such as an O-ring is provided around the opening 212 on the outer side surface of the housing 211, extending over substantially the entire periphery. When the opening 212 is closed by the shutter 213, the shutter 213 comes into contact with the seal member 214, thereby substantially isolating the internal space 210 of the housing 211 from the internal space 230 of the conveying path 23 (see FIGS. 1 and 2).

[0062] When the substrate 9 is carried in or out of the processing unit 21, the shutter 213 moves downward below the opening 212. Then, the transport arm 221 (see FIGS. 6 and 7) of the center robot 22 is inserted into the internal space 210 of the housing 211 through the opened opening 212, and transfers the substrate 9 between it and the substrate holder 241. In the processing unit 21, the internal space 210 is kept under a negative pressure atmosphere (i.e., a state in which the pressure is lower than that of the internal space 230 of the transport path 23) to prevent mist of the processing liquid or the like from leaking out of the housing 211 when the substrate 9 is carried in or out.

[0063] 1 and 2, the placement unit 40 is provided at the connection between the indexer block 10 and the processing block 20. As described above, the indexer robot 12 and the center robot 22 can access the placement unit 40. The placement unit 40 is connected to the plurality of processing units 21 via the transport path 23 on which the center robot 22 is arranged.

[0064] In the placement unit 40, an unprocessed substrate that has been carried out from the carrier 95 by the indexer robot 12 is temporarily placed. The unprocessed substrate 9 in the placement unit 40 is carried out from the placement unit 40 by the center robot 22 and carried into the processing unit 21. The processed substrate 9 that has been processed in the processing unit 21 is carried out from the processing unit 21 by the center robot 22 and carried into the placement unit 40 where it is temporarily placed. The processed substrate 9 in the placement unit 40 is carried out from the placement unit 40 by the indexer robot 12 and carried into the carrier 95. In other words, the placement unit 40 temporarily holds the unprocessed substrate 9 that is handed over from the indexer robot 12 to the center robot 22, and the processed substrate 9 that is handed over from the center robot 22 to the indexer robot 12.

[0065] In the indexer robot 12, the part of each transport arm 121 that comes into contact with the substrate 9 when holding an unprocessed substrate 9 is different from the part that comes into contact with the substrate 9 when holding a processed substrate 9. Similarly, in the center robot 22, the part of each transport arm 221 that comes into contact with the substrate 9 when holding an unprocessed substrate 9 is different from the part that comes into contact with the substrate 9 when holding a processed substrate 9. This makes it possible to prevent particles and the like that were attached to the unprocessed substrate 9 from adhering to the processed substrate 9 via the transport arms 121, 221, for example.

[0066] Fig. 9 is a side view of the placement unit 40 as seen from the (+X) side. Fig. 10 is a side view of the placement unit 40 as seen from the (-X) side. Fig. 11 is a vertical cross-sectional view of the placement unit 40, showing the internal structure of the placement unit 40 as seen from the (-Y) side. Fig. 12 is a horizontal cross-sectional view of the placement unit 40 taken along line XII-XII in Fig. 9.

[0067] The mounting unit 40 includes a housing 411, a mounting section 412, a first opening / closing section 413, and a second opening / closing section 414. The housing 411 is a box-shaped member having a substantially rectangular parallelepiped shape. An internal space 400 of the housing 411 can accommodate multiple substrates 9. Note that the substrates 9 are not shown in FIGS. 9 to 11. An opening 415 is provided in a portion of the housing 411 facing the processing block 20 (i.e., the side wall on the (+X) side). The shape of the opening 415 as viewed from the (+X) side is, for example, substantially rectangular. The opening 415 faces the entire housing position for the multiple substrates 9 in the housing 411 in the X direction. The opening 415 connects the internal space 400 of the housing 411 with the internal space 230 of the transfer path 23 of the processing block 20 (see FIGS. 1 and 2). The opening 415 allows the substrates 9 held by the center robot 22 to pass through.

[0068] An opening 416 is provided in the housing 411 at the portion of the indexer block 10 (i.e., the side wall portion on the (-X) side). The shape of the opening 416 as viewed from the (-X) side is, for example, approximately rectangular. The opening 416 faces the entire storage position of the multiple substrates 9 in the housing 411 in the X direction. The opening 416 connects the internal space 400 of the housing 411 with the internal space 100 of the indexer block 10 (see Figures 1 and 2). The opening 416 allows the substrates 9 held by the indexer robot 12 to pass through.

[0069] In the following description, the opening 415 and the opening 416 are also referred to as the "first opening 415" and the "second opening 416," respectively. The first opening 415 and the second opening 416 have, for example, substantially the same shape. The first opening 415 is opened and closed by a first opening / closing unit 413 disposed on the (+X) side of the first opening 415. The second opening 416 is opened and closed by a second opening / closing unit 414 disposed on the (-X) side of the second opening 416. The second opening / closing unit 414 is driven independently of the first opening / closing unit 413. In other words, the second opening / closing unit 414 can freely open or close the second opening 416 regardless of the open / closed state of the first opening 415 by the first opening / closing unit 413. Furthermore, the first opening / closing unit 413 can freely open or close the first opening 415 regardless of the open / closed state of the second opening 416 by the second opening / closing unit 414.

[0070] The mounting portion 412 is provided in the internal space 400 of the housing 411. A plurality of substrates 9 arranged in a predetermined arrangement direction (vertical direction in the example shown in FIG. 11) are mounted on the mounting portion 412. The mounting portion 412 includes a plurality of substrate support portions 423 that support the plurality of substrates 9 from below. Each substrate support portion 423 includes, for example, a substantially flat support plate that is fixed to the inner surface of the housing 411 and extends substantially horizontally. The support plate contacts the lower surface of the substrate 9 to support the substrate 9 from below in a substantially horizontal manner. The shape and structure of the substrate support portion 423 may be changed as appropriate.

[0071] 12, in the mounting unit 40, a gas supply port 417a is provided in a side wall portion of the housing 411 (in the example shown in FIG. 12, the side wall portion on the (+Y) side) on the side of the plurality of substrate support portions 423. In addition, a gas exhaust port 417b is provided in the side wall portion of the housing 411 on the opposite side of the gas supply port 417a with the plurality of substrate support portions 423 in between. The gas supply port 417a is connected to the above-mentioned low-humidity gas supply source via a pipe, and low-humidity gas is supplied from the low-humidity gas supply source to the internal space 400 of the housing 411.

[0072] A diffusion plate 418 is provided between the gas supply port 417a and the plurality of substrate support members 423 to diffuse the low-humidity gas discharged from the gas supply port 417a in the vertical and X directions. This allows the low-humidity gas discharged from the gas supply port 417a to be distributed evenly among the plurality of substrates 9 supported by the plurality of substrate support members 423. The diffusion plate 418 is, for example, a substantially flat punched plate with numerous small through-holes. In the mounting unit 40, the internal space 400 of the housing 411 is filled with the low-humidity gas to create a low-humidity atmosphere, thereby preventing moisture from coming into contact with the substrates 9 supported by the substrate support members 423. The low-humidity gas supplied from the gas supply port 417a to the internal space 400 of the housing 411 is discharged from the gas outlet 417b to the outside of the housing 411 and sent to a gas recovery unit or the like via piping (not shown).

[0073] In the mounting unit 40, a static eliminator 419 for removing static electricity is provided on the side wall portion (the side wall portion on the (+Y) side in the example shown in FIG. 12) of the housing 411 where the gas supply port 417a is provided. The static eliminator 419 is, for example, an ionizer. This suppresses charging of the substrate 9 supported by the substrate support portion 423, and also suppresses adhesion of particles and the like due to charging.

[0074] 9 to 11, the placement section 412 includes an unprocessed substrate placement section 421 on which a group of unprocessed substrates 9 is placed, and a processed substrate placement section 422 on which a group of processed substrates 9 is placed. The processed substrate placement section 422 is disposed on one side of the unprocessed substrate placement section 421 in the arrangement direction, spaced apart from the unprocessed substrate placement section 421. In the example shown in FIG. 11, the processed substrate placement section 422 is disposed above the unprocessed substrate placement section 421. The above-mentioned plurality of substrate support sections 423 are provided on both the unprocessed substrate placement section 421 and the processed substrate placement section 422.

[0075] In this embodiment, eight substrates 9 can be placed on the unprocessed substrate placement section 421, and sixteen substrates 9 can be placed on the processed substrate placement section 422. In Figures 9 to 11, some of the substrate support sections 423 are not shown in the processed substrate placement section 422. The number of substrates 9 that can be placed on the unprocessed substrate placement section 421 and the number of substrates 9 that can be placed on the processed substrate placement section 422 may be changed in various ways.

[0076] The placement section 412 further includes a partition 424 disposed between the unprocessed substrate placement section 421 and the processed substrate placement section 422. The partition 424 is a substantially flat member that is substantially perpendicular to the up-down direction. The partition 424 is disposed in the internal space 400 of the housing 411, and separates the space in which the unprocessed substrate placement section 421 is disposed from the space in which the processed substrate placement section 422 is disposed. This makes it possible to prevent, for example, particles and the like that were attached to the unprocessed substrate 9 from floating inside the housing 411 and attaching to the processed substrate 9.

[0077] As shown in FIG. 11 , the partition section 424 includes a partition main body 425, a first side plate 426, and a second side plate 427. The partition main body 425 is a substantially rectangular flat plate member that is substantially perpendicular to the up-down direction. The partition main body 425 is provided across substantially the entire internal space 400 of the housing 411 in a plan view. A first side plate 426, which is a horizontally elongated substantially rectangular flat plate that extends in the up-down direction from the end on the (+X) side of the partition main body 425, is connected to the end on the (+X) side. The first side plate 426 is disposed adjacent to the first opening 415 of the housing 411 on the (-X) side of the first opening 415. The first side plate 426 extends across the entire width of the first opening 415 in the Y direction, crossing the first opening 415. The vertical height of the first side plate 426 is smaller than the vertical height of the first opening 415.

[0078] A second side plate 427 having a horizontally elongated, generally rectangular, flat plate shape that extends vertically from the (-X) side end of the partition main body 425 is connected to the (-X) side end. The second side plate 427 is disposed adjacent to the second opening 416 of the housing 411 on the (+X) side of the second opening 416. The second side plate 427 extends across the second opening 416 across the entire width of the second opening 416 in the Y direction. The vertical height of the second side plate 427 is smaller than the vertical height of the second opening 416. Furthermore, the vertical height of the second side plate 427 is greater than the vertical height of the first side plate 426.

[0079] The first opening / closing unit 413 includes a first door body 431 and a first door movement mechanism 432. The first door body 431 is disposed adjacent to the (+X) side of the housing 411 and covers substantially the entire first opening 415 of the housing 411. The first door body 431 may be in contact with the side surface of the (+X) side of the housing 411 or may face the side surface with a small clearance therebetween. The first door body 431 is a substantially rectangular flat plate-shaped member. The first door movement mechanism 432 moves the first door body 431 in the up-down direction (i.e., the arrangement direction of the multiple boards 9 inside the housing 411). The first door movement mechanism 432 includes, for example, a ball screw mechanism driven by a motor. In FIG. 9, the first door body 431 in the upward and downward moved states is shown by two-dot chain lines. The first door body 431 covers substantially the entire first opening 415 regardless of whether it is positioned in the up-down direction. The first door moving mechanism 432 may move the first door body 431 relative to the housing 411 by moving the housing 411 in the vertical direction.

[0080] The first door 431 is provided with a first access opening 433 penetrating the first door 431 in the X direction. The first access opening 433 has, for example, a horizontally elongated, substantially rectangular shape. A sealing member 434 such as an O-ring is provided around the first access opening 433 on the (+X) side of the first door 431, substantially around the entire periphery. The first access opening 433 is smaller than the first opening 415 when viewed along the X direction. The vertical height of the first access opening 433 is smaller than the vertical height of the first opening 415 and greater than the vertical height of the two transport arms 221 of the center robot 22 (see FIGS. 6 and 7 ). When the center robot 22 accesses the internal space 400 of the placement unit 40, the transport arms 221 are inserted into the internal space 400 through the first access opening 433 and the first opening 415.

[0081] 9 and 11, the first access opening 433 is located at a position facing the first side plate 426 of the partition 424 in the housing 411 in the X direction across the first opening 415. The vertical height of the first access opening 433 is smaller than the vertical height of the first side plate 426. In the state shown in FIGS. 9 and 11, almost the entire first access opening 433 is closed by the side surface on the (+X) side of the first side plate 426, facing the X direction. Therefore, the center robot 22 cannot access the internal space 400 of the placement unit 40 through the first access opening 433. In other words, the first opening / closing unit 413 shown in FIGS. 9 and 11 is in a standby state in which the center robot 22 does not access the placement unit 40. In the loading unit 40, the (+X) side surface of the first side panel 426 (i.e., the (+X) side surface of the partition portion 424) is a first standby closing portion that is located opposite the first access opening 433 in the first opening / closing portion 413 in the standby state in the X direction and closes the first access opening 433.

[0082] When the center robot 22 accesses the internal space 400 of the mounting unit 40, the first door body 431 is moved in the vertical direction by the first door moving mechanism 432, and the first access opening 433 is brought into a state where it faces the mounting portion 412 in the X direction inside the housing 411. The first access opening 433 faces only a portion of the mounting portion 412 in the vertical direction (i.e., a portion of the plurality of substrate support members 423) in the X direction via the first opening 415. In this manner, the first opening / closing member 413 opens only a selected partial region of the region facing the mounting portion 412 on the processing block 20 side of the housing 411 so that the center robot 22 can enter. The first access opening 433 faces, for example, two substrate support members 423 arranged adjacent to each other in the vertical direction in the X direction.

[0083] The second opening / closing unit 414 includes a second door body 441 and a second door movement mechanism 442. The second door body 441 is disposed adjacent to the (-X) side of the housing 411 and covers substantially the entire second opening 416 of the housing 411. The second door body 441 may be in contact with the side surface of the (-X) side of the housing 411 or may face the side surface with a small clearance therebetween. The second door body 441 is a substantially rectangular flat plate-shaped member. The second door movement mechanism 442 moves the second door body 441 in the vertical direction (i.e., the arrangement direction of the multiple boards 9 inside the housing 411). The second door movement mechanism 442 includes, for example, a ball screw mechanism driven by a motor. In FIG. 10, the second door body 441 in the upward and downward moved states is shown by two-dot chain lines. The second door body 441 covers substantially the entire second opening 416 regardless of whether it is positioned in the vertical direction. The second door moving mechanism 442 may move the second door body 441 relative to the housing 411 by moving the housing 411 in the vertical direction.

[0084] The second door 441 is provided with a second access opening 443 penetrating the second door 441 in the X direction. The second access opening 443 has, for example, a horizontally elongated, substantially rectangular shape. A seal member 444, such as an O-ring, is provided around the second access opening 443 on the (-X) side of the second door 441, substantially around the entire periphery. The second access opening 443 is smaller than the second opening 416 when viewed along the X direction. The vertical height of the second access opening 443 is smaller than the vertical height of the second opening 416 and greater than the vertical height of the four transport arms 121 (see FIGS. 4 and 5 ) of the indexer robot 12. When the indexer robot 12 accesses the internal space 400 of the placement unit 40, the transport arms 121 are inserted into the internal space 400 through the second access opening 443 and the second opening 416.

[0085] 10 and 11, the second access opening 443 is located opposite the second side plate 427 of the partition 424 in the housing 411 in the X direction across the second opening 416. The vertical height of the second access opening 443 is smaller than the vertical height of the second side plate 427. In the state shown in FIGS. 10 and 11, almost the entire second access opening 443 is closed by the (-X) side surface of the second side plate 427, facing the X direction. Therefore, the indexer robot 12 cannot access the internal space 400 of the placement unit 40 through the second access opening 443. In other words, the second opening / closing unit 414 shown in FIGS. 10 and 11 is in a standby state in which the indexer robot 12 does not access the placement unit 40. In the loading unit 40, the (-X) side surface of the second side panel 427 (i.e., the (-X) side surface of the partition portion 424) is a second standby closing portion that is located opposite the second access opening 443 in the second opening / closing portion 414 in the standby state in the X direction and closes the second access opening 443.

[0086] When the indexer robot 12 accesses the internal space 400 of the mounting unit 40, the second door body 441 is moved in the vertical direction by the second door moving mechanism 442, and the second access opening 443 is brought into a state where it faces the mounting section 412 in the X direction inside the housing 411. The second access opening 443 faces only a portion of the mounting section 412 in the vertical direction (i.e., a portion of the plurality of substrate support sections 423) in the X direction via the second opening section 416. In this way, the second opening / closing section 414 opens only a selected partial area of ​​the area facing the mounting section 412 on the indexer block 10 side of the housing 411 so that the indexer robot 12 can enter. The second access opening 443 faces, for example, four substrate support sections 423 arranged adjacent to each other in the vertical direction in the X direction.

[0087] Next, an example of the flow of processing a substrate 9 in the substrate processing apparatus 1 shown in Figures 1 and 2 will be described. When a substrate 9 is processed, first, the indexer robot 12 is moved in the Y direction by the movement mechanism 124, and faces one carrier 95 in the X direction, as shown in Figure 13. The passage opening 131 corresponding to that carrier 95 is opened. Next, the four transport arms 121 of the indexer robot 12 move up and down together with the base 122 and cover part 125, and are positioned to face four unprocessed substrates 9 in the X direction that are to be unloaded from the carrier 95. In addition, the passage opening cover 141 is moved up and down by the passage opening cover moving mechanism 142 (see Figure 3), and the opening 143 of the passage opening cover 141 is positioned to face the four transport arms 121 in the X direction. Then, the shutter 144 moves downward, and the opening 143 is opened. 13, in the cover section 125 of the indexer robot 12, the movable cover 127 does not extend laterally from the fixed cover 126. In addition, the four transport arms 121 do not extend laterally either, and are housed within the fixed cover 126.

[0088] 14, in the cover section 125 of the indexer robot 12, the movable cover 127 is moved in the (-X) direction by the movable cover moving mechanism 128, and extends laterally from the fixed cover 126. The tip end of the movable cover 127 (i.e., the end on the (-X) side) comes into contact with the seal member 145 over substantially the entire periphery around the opening 143 of the passage port cover 141. As a result, the internal space of the cover section 125 communicates with the internal space of the carrier 95 and is substantially isolated from the internal space 100 of the indexer block 10.

[0089] As described above, since the low-humidity gas is supplied to the interior of the fixed cover 126, the interior of the movable cover 127 connecting the fixed cover 126 and the passage port cover 141 is also filled with the low-humidity gas. At this time, the low-humidity gas supplied to the internal space of the cover part 125 hardly flows into the internal space 100 of the indexer block 10. Therefore, the flow rate of the low-humidity gas supplied to the cover part 125 can be reduced, and the amount of low-humidity gas used in the substrate processing apparatus 1 can be reduced.

[0090] Next, the four transfer arms 121 are moved in the (-X) direction by the drive mechanism 122a, and are inserted into the inside of the carrier 95 through the movable cover 127, the opening 143 of the passage port cover 141, and the passage port 131. The four transfer arms 121 receive and hold the four substrates 9 from the carrier 95. Thereafter, the four transfer arms 121 move in the (+X) direction together with the four substrates 9, and return to the inside of the fixed cover 126 on the base 122 through the passage port 131, the opening 143 of the passage port cover 141, and the movable cover 127.

[0091] As described above, low-humidity gas is supplied to the inside of movable cover 127, which prevents moisture from coming into contact with substrate 9 passing through inside movable cover 127. In addition, low-humidity gas is also supplied to the inside of fixed cover 126, which also prevents moisture from coming into contact with substrate 9 held by transfer arm 121 inside fixed cover 126.

[0092] Once the four substrates 9 are accommodated within the fixed cover 126 of the indexer robot 12, the movable cover 127, which had been extending laterally from the fixed cover 126, is returned and accommodated within the fixed cover 126. Next, as shown in FIG. 1, the indexer robot 12 moves to a position facing the placement unit 40 in the X direction. The base 122 is rotated approximately 180°, and the tip of the transfer arm 121 holding the substrates 9 faces the (+X) direction. Because low-humidity gas is continuously supplied inside the cover part 125, contact of moisture with the substrates 9 is suppressed even while the indexer robot 12 is moving.

[0093] In the indexer robot 12, the base 122 is moved in the vertical direction, and as shown in FIG. 15, the four transport arms 121 are positioned opposite the unprocessed substrate placement section 421 of the placement unit 40 in the X direction. In the placement unit 40, the second door 441 is moved in the vertical direction by the second door moving mechanism 442 (see FIG. 10), and the second access opening 443 of the second door 441 is positioned opposite the four transport arms 121 in the X direction. In the state shown in FIG. 15, in the cover section 125 of the indexer robot 12, the movable cover 127 does not extend laterally from the fixed cover 126. Furthermore, the four transport arms 121 do not extend laterally either, and are housed within the fixed cover 126 together with four unprocessed substrates 9 (not shown).

[0094] 16 , in the cover section 125 of the indexer robot 12, the movable cover 127 is moved in the (+X) direction by the movable cover moving mechanism 128, and extends laterally from the fixed cover 126. The tip end of the movable cover 127 (i.e., the end on the (+X) side) comes into contact with the seal member 444 over substantially the entire periphery around the second access opening 443 of the second door body 441. As a result, the internal space of the cover section 125 communicates with the internal space 400 of the mounting unit 40, and is substantially isolated from the internal space 100 of the indexer block 10.

[0095] As described above, low-humidity gas is supplied to the interior of the fixed cover 126, and also to the internal space 400 of the mounting unit 40. Therefore, the interior of the movable cover 127 connecting the fixed cover 126 and the mounting unit 40 is filled with low-humidity gas. At this time, the low-humidity gas supplied to the internal space of the cover part 125 and the internal space 400 of the mounting unit 40 hardly flows into the internal space 100 of the indexer block 10. Therefore, the flow rate of the low-humidity gas supplied to the cover part 125 and the mounting unit 40 can be reduced, and the amount of low-humidity gas used in the substrate processing apparatus 1 can be reduced.

[0096] Next, the four transfer arms 121 are moved in the (+X) direction by the drive mechanism 122a and inserted into the internal space 400 of the mounting unit 40 through the movable cover 127 and the second access opening 443 of the second door 441. The four transfer arms 121 deliver the four substrates 9 to the four substrate support portions 423 (see FIG. 11 ) of the unprocessed substrate mounting portion 421. Thereafter, the four transfer arms 121 move in the (-X) direction and return to the inside of the fixed cover 126 on the base 122 through the second access opening 443 of the second door 441 and the movable cover 127. As described above, since low-humidity gas is supplied to the internal space 400 of the mounting unit 40, moisture is prevented from coming into contact with the substrates 9 mounted on the unprocessed substrate mounting portion 421.

[0097] When the four unprocessed substrates 9 are accommodated in the internal space 400 of the mounting unit 40, the movable cover 127, which had been extending laterally from the fixed cover 126 of the indexer robot 12, is returned and accommodated inside the fixed cover 126. In addition, the second door moving mechanism 442 moves the second door body 441 to the standby position, and the second access opening 443 is closed facing the (-X) side surface of the partition part 424, which is the second standby closing part, in the X direction. This makes it possible to prevent the low-humidity gas in the internal space 400 of the mounting unit 40 from leaking out through the second access opening 443 to the outside, thereby reducing the amount of low-humidity gas used in the substrate processing apparatus 1.

[0098] Next, the center robot 22 is moved in the X direction by the movement mechanism 224 (see FIGS. 1 and 2) and faces the mounting unit 40 in the X direction. Subsequently, the two transport arms 221 of the center robot 22 move up and down together with the base 222 and the cover part 225, and as shown in FIG. 17, the two transport arms 221 are positioned to face the unprocessed substrate mounting part 421 of the mounting unit 40 in the X direction. Specifically, the two transport arms 221 are positioned to face the two unprocessed substrates 9 (not shown) to be carried out of the mounting unit 40 in the X direction.

[0099] In the loading unit 40, the first door body 431 is moved up and down by the first door moving mechanism 432 (see FIG. 10), and the first access opening 433 of the first door body 431 is positioned facing the two transport arms 221 in the X direction. In the state shown in FIG. 17, in the cover part 225 of the center robot 22, the movable cover 227 does not extend laterally from the fixed cover 226. In addition, the two transport arms 221 do not extend laterally either, and are housed within the fixed cover 226.

[0100] 18, in the cover section 225 of the center robot 22, the movable cover 227 is moved in the (-X) direction by the movable cover moving mechanism 228, and extends laterally from the fixed cover 226. The tip end of the movable cover 227 (i.e., the end on the (-X) side) comes into contact with the seal member 434 over substantially the entire periphery around the first access opening 433 of the first door body 431. As a result, the internal space of the cover section 225 communicates with the internal space 400 of the placement unit 40, and is substantially isolated from the internal space 230 of the transport path 23 (see FIGS. 1 and 2).

[0101] As described above, low-humidity gas is supplied to the inside of the fixed cover 126, and also to the internal space 400 of the mounting unit 40. Therefore, the inside of the movable cover 227 connecting the fixed cover 226 and the mounting unit 40 is filled with low-humidity gas. At this time, the low-humidity gas supplied to the internal space 400 of the cover part 225 and the mounting unit 40 hardly flows into the internal space 230 of the transfer path 23. Therefore, the flow rate of the low-humidity gas supplied to the cover part 225 and the mounting unit 40 can be reduced, and the amount of low-humidity gas used in the substrate processing apparatus 1 can be reduced.

[0102] Next, the two transport arms 221 are moved in the (-X) direction by the drive mechanism 222a, and are inserted into the internal space 400 of the mounting unit 40 through the movable cover 227 and the first access opening 433 of the first door body 431. The two transport arms 221 receive and hold two unprocessed substrates 9 from the unprocessed substrate mounting section 421 of the mounting unit 40. Thereafter, the two transport arms 221 move in the (+X) direction together with the two substrates 9, and return to the inside of the fixed cover 226 on the base 222 through the first access opening 433 of the first door body 431 and the movable cover 227.

[0103] As described above, low-humidity gas is supplied to the inside of the movable cover 227, which prevents moisture from coming into contact with the substrate 9 passing through the inside of the movable cover 227. In addition, low-humidity gas is also supplied to the inside of the fixed cover 226, which also prevents moisture from coming into contact with the substrate 9 held by the transfer arm 221 inside the fixed cover 226.

[0104] Once the two substrates 9 are accommodated within the fixed cover 226 of the center robot 22, the movable cover 227 that had been extending laterally from the fixed cover 226 is returned and accommodated inside the fixed cover 226. Subsequently, the center robot 22 is moved in the X and Z directions and positioned to face the opening 212 of one of the processing units 21. The base 222 is rotated as appropriate, and as shown in FIG. 19 , the tip of the transfer arm 221 that holds the substrates 9 (not shown) faces the opening 212 of the processing unit 21. Because low-humidity gas is continuously supplied inside the cover part 225, contact of moisture with the substrates 9 is suppressed even while the center robot 22 is moving.

[0105] 19, in the cover section 225 of the center robot 22, the movable cover 227 does not extend laterally from the fixed cover 226. The two transport arms 221 also do not extend laterally, and are housed in the fixed cover 226 together with the two unprocessed substrates 9. In addition, in the processing unit 21, the shutter 213 has moved downward to open the opening 212.

[0106] 20 , in the cover section 225 of the center robot 22, the movable cover moving mechanism 228 moves the movable cover 227 toward the opening 212 of the processing unit 21, and the movable cover 227 extends laterally from the fixed cover 226. The tip of the movable cover 227 comes into contact with the seal member 214 over substantially the entire periphery around the opening 212 of the processing unit 21. As a result, the internal space of the cover section 225 communicates with the internal space 210 of the processing unit 21, and is substantially isolated from the internal space 230 of the transport path 23.

[0107] As described above, since the low-humidity gas is supplied inside the fixed cover 226, the inside of the movable cover 227 connecting the fixed cover 226 and the processing unit 21 is also filled with the low-humidity gas. At this time, the low-humidity gas supplied into the internal space of the cover part 225 hardly flows into the internal space 230 of the transfer path 23. Therefore, the flow rate of the low-humidity gas supplied to the cover part 225 can be reduced, and the amount of low-humidity gas used in the substrate processing apparatus 1 can be reduced.

[0108] Next, one transfer arm 221 is moved toward the processing unit 21 by the drive mechanism 222a, and is inserted into the internal space 210 of the processing unit 21 through the movable cover 227 and the opening 212 of the processing unit 21. The transfer arm 121 delivers one substrate 9 (not shown) to the substrate holder 241 (see FIG. 8) of the processing section 24. Thereafter, the transfer arm 121 moves in a direction away from the substrate holder 241, and returns to the inside of the fixed cover 226 on the base 222 through the opening 212 of the processing unit 21 and the movable cover 227.

[0109] When the substrate 9 is accommodated in the internal space 210 of the processing unit 21, the movable cover 227 that had been extending laterally from the fixed cover 226 in the center robot 22 is returned and accommodated inside the fixed cover 226. In addition, the opening 212 of the processing unit 21 is closed by the shutter 213, and the internal space 210 of the processing unit 21 is sealed. Then, a predetermined process is performed on the substrate 9 in the processing unit 21.

[0110] When the above processing of the substrate 9 is completed, the center robot 22 unloads the processed substrate 9 from the processing unit 21. Unloading the substrate 9 from the processing unit 21 is performed in substantially the same procedure as loading the substrate 9 into the processing unit 21. That is, the center robot 22 extends the movable cover 227 from the fixed cover 226 filled with low-humidity gas and connects it to the opening 212 of the processing unit 21, and inserts the transfer arm 221 into the internal space 210 of the processing unit 21. Then, the transfer arm 221 holds the substrate 9, and unloads the substrate 9 from the processing unit 21 via the opening 212 and the movable cover 227 of the processing unit 21, and stores it in the fixed cover 226. In this manner, substantially similar to the above, it is possible to reduce the amount of low-humidity gas used while suppressing moisture from coming into contact with the substrate 9.

[0111] The substrate 9 unloaded from the processing unit 21 is loaded by the center robot 22 into the processed substrate loading section 422 of the loading unit 40 (see FIG. 11 ) and loaded thereon. The loading of the substrate 9 into the loading unit 40 by the center robot 22 is performed in substantially the same procedure as the unloading of the substrate 9 from the loading unit 40. That is, the center robot 22 extends the movable cover 227 from the fixed cover 226 filled with low-humidity gas and connects it to the first access opening 433 of the loading unit 40, and inserts the transport arm 221 holding the substrate 9 into the internal space 400 of the loading unit 40 via the movable cover 127. Then, after the substrate 9 is transferred from the transport arm 221 to the processed substrate loading section 422, the transport arm 221 is retracted from inside the loading unit 40, and the first access opening 433 is closed by the first standby closing section (i.e., the side surface on the (+X) side of the partition section 424). As a result, in substantially the same manner as above, it is possible to reduce the amount of low-humidity gas used and also to prevent moisture from coming into contact with the substrate 9.

[0112] The processed substrate 9 placed on the placement unit 40 is removed from the placement unit 40 by the indexer robot 12. The removal of the substrate 9 from the placement unit 40 by the indexer robot 12 is performed in substantially the same procedure as the loading of the substrate 9 into the placement unit 40. That is, in the indexer robot 12, the movable cover 127 is extended from the fixed cover 126 filled with low-humidity gas and connected to the second access opening 443 of the placement unit 40, and the transport arm 121 is inserted into the internal space 400 of the placement unit 40. Then, the transport arm 121 holds the substrate 9 placed on the processed substrate placement section 422, and removes the substrate 9 from the placement unit 40 via the second access opening 443 and the movable cover 127 of the placement unit 40 and stores it in the fixed cover 226. In addition, the second access opening 443 is closed by the second standby closing portion (i.e., the side surface on the (-X) side of the partition portion 424). As a result, in substantially the same manner as above, it is possible to reduce the amount of low-humidity gas used and also to prevent moisture from coming into contact with the substrate 9.

[0113] The substrate 9 removed from the placement unit 40 is loaded into the carrier 95 by the indexer robot 12. Loading the substrate 9 into the carrier 95 by the indexer robot 12 is performed in a procedure substantially similar to that for unloading the substrate 9 from the carrier 95. That is, in the indexer robot 12, the movable cover 127 is extended from the fixed cover 126 filled with low-humidity gas and connected to the opening 143 of the passage cover 141, and the transfer arm 221 holding the substrate 9 is inserted into the carrier 95 via the movable cover 127 and the passage cover 141. Then, after the substrate 9 is transferred from the transfer arm 121 to the carrier 95, the transfer arm 121 is retracted from inside the carrier 95. This makes it possible to reduce the amount of low-humidity gas used and prevent moisture from coming into contact with the substrate 9, in a manner substantially similar to that described above.

[0114] The processing flow for substrates 9 in the substrate processing apparatus 1 is not limited to the above example and may be modified in various ways. For example, the operations of the indexer robot 12 and the center robot 22 described above may be performed in parallel on a large number of substrates 9. Specifically, the indexer robot 12 may carry a new substrate 9 into the unprocessed substrate placement section 421 in parallel with the center robot 22 unloading an unprocessed substrate 9 placed on the unprocessed substrate placement section 421. Furthermore, the center robot 22 may carry a new processed substrate 9 into the processed substrate placement section 422 in parallel with the indexer robot 12 unloading a processed substrate 9 placed on the processed substrate placement section 422.

[0115] As described above, the substrate processing apparatus 1 that processes substrates 9 includes a processing block 20, an indexer block 10, and a placement unit 40. The processing block 20 is provided with processing units 21 that process the substrates 9, and a first transport robot (i.e., center robot 22) that transfers substrates 9 into and out of the processing units 21. The indexer block 10 is provided with a second transport robot (i.e., indexer robot 12) that transfers substrates 9 into and out of carriers 95 that can accommodate multiple substrates 9. The placement unit 40 is provided at a connection between the processing block 20 and the indexer block 10. The placement unit 40 holds unprocessed substrates 9 that are passed from the indexer robot 12 to the center robot 22, and processed substrates 9 that are passed from the center robot 22 to the indexer robot 12.

[0116] The mounting unit 40 includes a housing 411, a first opening / closing unit 413, and a second opening / closing unit 414. The housing 411 can accommodate a plurality of substrates 9 in an internal space 400 to which low-humidity gas having a humidity lower than that of the atmosphere is supplied. The first opening / closing unit 413 opens and closes a portion of the housing 411 facing the processing block 20. The second opening / closing unit 414 is driven independently of the first opening / closing unit 413 and opens and closes a portion of the housing 411 facing the indexer block 10. This reduces the amount of low-humidity gas used in the substrate processing apparatus 1 and prevents moisture from coming into contact with the substrates 9 held in the mounting unit 40, compared to when a low-humidity gas is supplied to the entire internal space of the substrate processing apparatus 1 to create a low-humidity atmosphere.

[0117] As described above, the mounting unit 40 preferably further includes a mounting section 412 provided in the internal space 400 of the housing 411. A plurality of substrates 9 arranged in a predetermined arrangement direction (vertical direction in the above example) are mounted on the mounting section 412. Furthermore, the first opening / closing section 413 preferably opens only a selected partial area of ​​the area facing the mounting section 412 at the processing block 20 side of the housing 411, allowing the center robot 22 to enter. This can prevent low-humidity gas from leaking from inside the housing 411 when the center robot 22 loads or unloads the substrates 9 into or from the mounting unit 40. As a result, the low-humidity atmosphere inside the housing 411 can be stably maintained, and the amount of low-humidity gas used in the substrate processing apparatus 1 can be further reduced.

[0118] As described above, the first opening / closing unit 413 preferably includes a first door 431 and a first door moving mechanism 432. The first door 431 covers an opening (i.e., the first opening 415) provided in a portion of the housing 411 facing the processing block 20. The first door 431 is provided with a first access opening 433 that faces a portion of the mounting unit 412 in the arrangement direction. The first door moving mechanism 432 moves the first door 431 relative to the housing 411 along the arrangement direction. This makes it possible to realize the first opening / closing unit 413, which can partially open and close the portion of the housing 411 facing the processing block 20, with a simple structure.

[0119] As described above, it is preferable that the substrate processing apparatus 1 further includes a first standby closing section (in the above example, a side surface of the partition section 424) that is provided at a position facing the first access opening 433 in the internal space 400 of the housing 411 when the center robot 22 is not accessing the mounting unit 40. This makes it possible to more stably maintain the low-humidity atmosphere in the housing 411 and further reduce the amount of low-humidity gas used in the substrate processing apparatus 1.

[0120] As described above, the placement section 412 preferably includes the unprocessed substrate placement section 421 on which the group of unprocessed substrates 9 is placed, and the processed substrate placement section 422 on which the group of processed substrates 9 is placed. The processed substrate placement section 422 is disposed on one side of the unprocessed substrate placement section 421 in the arrangement direction, spaced apart from the unprocessed substrate placement section 421. The placement unit 40 preferably further includes a partition section 424 that separates the space in which the unprocessed substrate placement section 421 is disposed from the space in which the processed substrate placement section 422 is disposed in the internal space 400 of the housing 411. Furthermore, the first waiting closing section is preferably a side surface of the partition section 424 (in the above example, the side surface on the (+X) side). In this way, by using the partition section 424, which is used to separate the unprocessed substrate placement section 421 from the processed substrate placement section 422, as the first waiting closing section as well, the structure of the placement unit 40 can be simplified.

[0121] As described above, it is preferable that the second opening / closing part 414 opens only a selected partial area of ​​the area facing the placement part 412 in the part of the housing 411 on the indexer block 10 side so as to allow the indexer block 10 to enter. This makes it possible to suppress the outflow of low-humidity gas from inside the housing 411 when the indexer robot 12 loads and unloads the substrate 9 into the placement unit 40. As a result, it is possible to stably maintain a low-humidity atmosphere inside the housing 411 and further reduce the amount of low-humidity gas used in the substrate processing apparatus 1.

[0122] As described above, the second opening / closing unit 414 preferably includes the second door body 441 and the second door moving mechanism 442. The second door body 441 covers an opening (i.e., the second opening 416) provided in a portion of the housing 411 facing the indexer block 10. The second door body 441 is provided with a second access opening 443 that faces a portion of the mounting unit 412 in the arrangement direction. The second door moving mechanism 442 moves the second door body 441 relative to the housing 411 along the arrangement direction. This makes it possible to realize the second opening / closing unit 414, which can partially open and close the portion of the housing 411 facing the indexer block 10, with a simple structure.

[0123] As described above, it is preferable that the substrate processing apparatus 1 further includes a second standby closing portion (in the above example, a side surface of the partition portion 424) that is provided at a position facing the second access opening 443 in the internal space 400 of the housing 411 when the indexer robot 12 is not accessing the placement unit 40. This makes it possible to more stably maintain the low-humidity atmosphere in the housing 411 and further reduce the amount of low-humidity gas used in the substrate processing apparatus 1.

[0124] As described above, the second waiting closed section is preferably a side surface (in the above example, the side surface on the (-X) side) of the partition section 424. In this way, by using the partition section 424, which is used to separate the unprocessed container placement section 421 from the processed container placement section 422, as the second waiting closed section, the structure of the placement unit 40 can be further simplified.

[0125] As described above, the center robot 22 preferably includes the base 222, which is the first base, the transfer arm 221, which is the first arm, and the cover 225, which is the first cover. The transfer arm 221 is attached to the base 222 and transfers the substrate 9 between the mounting unit 40 and the processing unit 21. The cover 225 surrounds the transfer arm 221 on the base 222 and accommodates the transfer arm 221 therein. A low-humidity gas having a humidity lower than that of the atmosphere is preferably supplied to the inside of the cover 225. This reduces the amount of low-humidity gas used in the substrate processing apparatus 1 and prevents moisture from coming into contact with the substrate 9 held by the center robot 22.

[0126] As described above, the cover unit 225 preferably includes the fixed cover 226, which is the first fixed cover, the movable cover 227, which is the first movable cover, and the movable cover moving mechanism 228, which is the first movable cover moving mechanism. The fixed cover 226 is fixed on the base 222. The movable cover 227 is movable while being continuous with the fixed cover 226. When the transfer arm 221 extends laterally from above the base 222, the movable cover moving mechanism 228 moves the movable cover 227 to cover the tip of the transfer arm 221 with the movable cover 227. This reduces the amount of low-humidity gas used in the substrate processing apparatus 1 and prevents moisture from coming into contact with the substrate 9, even when the center robot 22 transfers the substrate 9 into or out of the placement unit 40 and / or the processing unit 21.

[0127] As described above, the indexer robot 12 preferably includes the base 122, which is the second base, the transfer arm 121, which is the second arm, and the cover 125, which is the second cover. The transfer arm 121 is attached to the base 122 and transfers the substrate 9 between the mounting unit 40 and the carrier 95. The cover 125 surrounds the transfer arm 121 on the base 122 and accommodates the transfer arm 121 therein. A low-humidity gas with a humidity lower than that of the atmosphere is preferably supplied to the inside of the cover 125. This reduces the amount of low-humidity gas used in the substrate processing apparatus 1 and prevents moisture from coming into contact with the substrate 9 held by the indexer robot 12.

[0128] As described above, the cover unit 125 preferably includes the fixed cover 126, which is the second fixed cover, the movable cover 127, which is the second movable cover, and the movable cover moving mechanism 128, which is the second movable cover. The fixed cover 126 is fixed on the base 122. The movable cover 127 is movable while being continuous with the fixed cover 126. When the transport arm 121 extends laterally from above the base 122, the movable cover moving mechanism 128 moves the movable cover 127 to cover the tip of the transport arm 121 with the movable cover 127. This reduces the amount of low-humidity gas used in the substrate processing apparatus 1 and prevents moisture from coming into contact with the substrate 9 when the indexer robot 12 loads and unloads the substrate 9 into and from the placement unit 40 and / or the carrier 95.

[0129] The above-described substrate processing apparatus 1 can be modified in various ways.

[0130] For example, when the center robot 22 loads or unloads the substrate 9 into or out of the placement unit 40, the movable cover 227 of the center robot 22 does not necessarily have to come into contact with the first door body 431, but may be close to the first door body 431 with a small clearance between them. In this case, the seal member 434 may be omitted. Similarly, when the center robot 22 loads or unloads the substrate 9 into or out of the processing unit 21, the movable cover 227 does not necessarily have to come into contact with the housing 211 of the processing unit 21, but may be close to the housing 211 with a small clearance between them.

[0131] When the indexer robot 12 loads or unloads the substrate 9 into or from the placement unit 40, the movable cover 127 of the indexer robot 12 does not necessarily have to come into contact with the second door body 441, but may be close to the second door body 441 with a small clearance between them. In this case, the seal member 444 may be omitted. Similarly, when the indexer robot 12 loads or unloads the substrate 9 into or from the carrier 95, the movable cover 127 does not necessarily have to come into contact with the passage port cover 141, but may be close to the passage port cover 141 with a small clearance between them.

[0132] The indexer block 10 does not necessarily need to have the passage cover 141, and in this case, the movable cover 127 of the indexer robot 12 extends in the (-X) direction from the fixed cover 126 and approaches the carrier 95 via the passage 131.

[0133] The cover unit 225 of the center robot 22 may be provided with only the fixed cover 226, omitting the movable cover 227 and the movable cover moving mechanism 228. Alternatively, the entire cover unit 225 may be omitted from the center robot 22.

[0134] Furthermore, the cover unit 125 of the indexer robot 12 may be provided with only the fixed cover 126, omitting the movable cover 127 and the movable cover moving mechanism 128. Alternatively, the entire cover unit 125 may be omitted from the indexer robot 12.

[0135] The shape and structure of each component such as the transfer arm 221 of the center robot 22 may be modified in various ways. The shape and structure of each component such as the transfer arm 121 of the indexer robot 12 may also be modified in various ways.

[0136] The above-mentioned first standby closing portion does not necessarily have to be a side surface of the partition portion 424, and may be a structure other than the partition portion 424. Similarly, the second standby closing portion does not necessarily have to be a side surface of the partition portion 424, and may be a structure other than the partition portion 424.

[0137] In the placement section 412, the partition section 424 between the unprocessed placement section 421 and the processed placement section 422 may be omitted. In addition, in the placement section 412, it is not necessarily necessary to distinguish between the unprocessed placement section 421 on which the unprocessed substrate 9 is placed and the processed placement section 422 on which the processed substrate 9 is placed.

[0138] In the mounting unit 40, the arrangement direction of the plurality of substrates 9 on the mounting portion 412 does not necessarily have to be the vertical direction, and may be, for example, a direction inclined relative to the vertical direction.

[0139] In the first opening / closing unit 413, the structure for partially opening and closing the portion of the housing 411 facing the processing block 20 is not necessarily limited to the above example, and may be modified in various ways. For example, the first opening / closing unit 413 may include a plurality of horizontally elongated shutters arranged in the vertical direction, and the plurality of shutters may be opened and closed independently of one another. Furthermore, the first opening / closing unit 413 does not necessarily have to partially open and close the portion of the housing 411 facing the processing block 20, and may open and close the entire portion together.

[0140] In the second opening / closing unit 414, the structure for partially opening and closing the portion of the housing 411 facing the indexer block 10 is not necessarily limited to the above example, and may be modified in various ways. For example, the second opening / closing unit 414 may include a plurality of horizontally elongated shutters arranged in the vertical direction, and the plurality of shutters may be opened and closed independently of one another. Furthermore, the second opening / closing unit 414 does not necessarily have to partially open and close the portion of the housing 411 facing the indexer block 10, and may open and close the entire portion together.

[0141] The processing block 20 of the substrate processing apparatus 1 may be provided with processing units of various structures other than the above-described processing unit 21, and various processes may be performed on the substrate 9.

[0142] The above-described substrate processing apparatus 1 may be used to process glass substrates used in flat panel displays such as liquid crystal displays or organic EL (Electro Luminescence) displays, or glass substrates used in other displays, in addition to semiconductor substrates. The above-described substrate processing apparatus 1 may also be used to process substrates for optical disks, magnetic disks, magneto-optical disks, photomasks, ceramic substrates, solar cell substrates, etc.

[0143] The configurations in the above-described embodiment and each modification may be combined as appropriate as long as they are not mutually contradictory. [Explanation of symbols]

[0144] 1. Substrate processing equipment 9 Substrate 10 Indexer Block 12 Indexer Robot 20 Processing Blocks 21 Processing Unit 22 Center Robot 40 Mounting unit 95 Career 121 Transfer arm 122 base 125 Cover 126 Fixed cover 127 Movable cover 128 Movable cover movement mechanism 221 Transfer arm 222 Base 225 Cover 226 Fixed Cover 227 Movable cover 228 Movable cover movement mechanism 400 interior space 411 Case 412 Placement section 413 First opening and closing section 414 Second opening and closing section 421 Unprocessed waste storage area 422 Processed waste storage area 424 Partition 431 First door body 432 First door movement mechanism 433 First Access Opening 441 Second door body 442 Second door movement mechanism 443 Second Access Opening

Claims

1. A substrate processing apparatus for processing a substrate, a processing block in which processing units for processing substrates and a first transport robot for carrying substrates into and out of the processing units are disposed; an indexer block in which a second transport robot is disposed, the second transport robot carrying substrates into and out of a carrier capable of accommodating a plurality of substrates; a placement unit provided at a connection between the processing block and the indexer block, the placement unit holding an unprocessed substrate passed from the second transport robot to the first transport robot and a processed substrate passed from the first transport robot to the second transport robot; Equipped with The mounting unit is a housing capable of accommodating a plurality of substrates in an internal space to which a low-humidity gas having a humidity lower than that of the atmosphere is supplied; a first opening / closing unit that opens and closes a portion of the housing on the processing block side; a second opening / closing unit that is driven independently of the first opening / closing unit and that opens and closes a portion of the housing on the indexer block side; a mounting portion provided in the internal space of the housing and on which the plurality of substrates arranged in a predetermined arrangement direction are mounted; Equipped with the first opening / closing unit opens only a selected partial area of ​​an area facing the placement unit in a portion of the housing on the processing block side so that the first transport robot can enter; The first opening / closing unit is a first door body covering an opening provided in a portion of the housing on the processing block side and having a first access opening facing a part of the mounting section in the arrangement direction; a first door moving mechanism that moves the first door body relative to the housing along the arrangement direction; Equipped with The substrate processing apparatus is characterized in that it further comprises a first waiting closure section that is positioned opposite the first access opening within the internal space of the housing when the first transport robot is not accessing the placement unit.

2. The substrate processing apparatus according to claim 1 , The placement section is a substrate receiving section for receiving a group of unprocessed substrates; a processed substrate receiving portion disposed on one side of the unprocessed substrate receiving portion in the arrangement direction and spaced apart from the unprocessed substrate receiving portion, on which a group of processed substrates is to be placed; Equipped with the mounting unit further includes a partition separating a space in which the unprocessed substrate mounting section is disposed and a space in which the processed substrate mounting section is disposed in the internal space of the housing, The substrate processing apparatus is characterized in that the first waiting closed portion is a side surface of the partition portion.

3. A substrate processing apparatus for processing a substrate, comprising: A substrate processing apparatus for processing a substrate, a processing block in which processing units for processing substrates and a first transport robot for carrying substrates into and out of the processing units are disposed; an indexer block in which a second transport robot is disposed, the second transport robot carrying substrates into and out of a carrier capable of accommodating a plurality of substrates; a placement unit provided at a connection between the processing block and the indexer block, the placement unit holding an unprocessed substrate passed from the second transport robot to the first transport robot and a processed substrate passed from the first transport robot to the second transport robot; Equipped with The mounting unit is a housing capable of accommodating a plurality of substrates in an internal space to which a low-humidity gas having a humidity lower than that of the atmosphere is supplied; a first opening / closing unit that opens and closes a portion of the housing on the processing block side; a second opening / closing unit that is driven independently of the first opening / closing unit and that opens and closes a portion of the housing on the indexer block side; a mounting portion provided in the internal space of the housing and on which the plurality of substrates arranged in a predetermined arrangement direction are mounted; Equipped with the second opening / closing unit opens only a selected partial area of ​​an area facing the placement unit in a portion of the housing on the indexer block side so that the second transport robot can enter; The second opening / closing unit is a second door body that covers an opening provided in a portion of the housing on the indexer block side and has a second access opening that faces a part of the placement section in the arrangement direction; a second door moving mechanism that moves the second door body relative to the housing along the arrangement direction; Equipped with The substrate processing apparatus is characterized in that it further comprises a second waiting closure section that is arranged at a position opposite the second access opening within the internal space of the housing when the second transport robot is not accessing the placement unit.

4. 4. The substrate processing apparatus according to claim 3, The placement section is a substrate receiving section for receiving a group of unprocessed substrates; a processed substrate receiving portion disposed on one side of the unprocessed substrate receiving portion in the arrangement direction and spaced apart from the unprocessed substrate receiving portion, on which a group of processed substrates is to be placed; Equipped with the mounting unit further includes a partition separating a space in which the unprocessed substrate mounting section is disposed and a space in which the processed substrate mounting section is disposed in the internal space of the housing, The substrate processing apparatus is characterized in that the second waiting closed portion is a side surface of the partition portion.

5. 5. The substrate processing apparatus according to claim 1, The first transport robot First base and a first arm attached to the first base and configured to transfer substrates between the placement unit and the processing unit; a first cover portion that covers the periphery of the first arm on the first base and houses the first arm therein; Equipped with A substrate processing apparatus, wherein a low-humidity gas having a humidity lower than that of the atmosphere is supplied to the inside of the first cover portion.

6. 5. The substrate processing apparatus according to claim 1, The second transport robot is The second base, a second arm attached to the second base and configured to transfer substrates between the placement unit and the carrier; a second cover portion that covers the periphery of the second arm on the second base and houses the second arm therein; Equipped with A substrate processing apparatus, wherein a low-humidity gas having a humidity lower than that of the atmosphere is supplied to the inside of the second cover portion.

7. A substrate processing apparatus for processing a substrate, a processing block in which processing units for processing substrates and a first transport robot for carrying substrates into and out of the processing units are disposed; an indexer block in which a second transport robot is disposed, the second transport robot carrying substrates into and out of a carrier capable of accommodating a plurality of substrates; a placement unit provided at a connection between the processing block and the indexer block, the placement unit holding an unprocessed substrate passed from the second transport robot to the first transport robot and a processed substrate passed from the first transport robot to the second transport robot; Equipped with The mounting unit is a housing capable of accommodating a plurality of substrates in an internal space to which a low-humidity gas having a humidity lower than that of the atmosphere is supplied; a first opening / closing unit that opens and closes a portion of the housing on the processing block side; a second opening / closing unit that is driven independently of the first opening / closing unit and that opens and closes a portion of the housing on the indexer block side; Equipped with The first transport robot First base and a first arm attached to the first base and configured to transfer substrates between the placement unit and the processing unit; a first cover portion that covers the periphery of the first arm on the first base and houses the first arm therein; Equipped with A low-humidity gas having a humidity lower than that of the atmosphere is supplied into the first cover portion, The first cover portion is a first fixed cover fixed on the first base; a first movable cover that is movable in a state of being continuous with the first fixed cover; a first movable cover moving mechanism that moves the first movable cover to cover a tip end of the first arm with the first movable cover when the first arm extends laterally from above the first base; A substrate processing apparatus comprising:

8. A substrate processing apparatus for processing a substrate, comprising: a processing block in which processing units for processing substrates and a first transport robot for carrying substrates into and out of the processing units are disposed; an indexer block in which a second transport robot is disposed, the second transport robot carrying substrates into and out of a carrier capable of accommodating a plurality of substrates; a placement unit provided at a connection between the processing block and the indexer block, the placement unit holding an unprocessed substrate passed from the second transport robot to the first transport robot and a processed substrate passed from the first transport robot to the second transport robot; Equipped with The mounting unit is a housing capable of accommodating a plurality of substrates in an internal space to which a low-humidity gas having a humidity lower than that of the atmosphere is supplied; a first opening / closing unit that opens and closes a portion of the housing on the processing block side; a second opening / closing unit that is driven independently of the first opening / closing unit and that opens and closes a portion of the housing on the indexer block side; Equipped with The second transport robot is The second base, a second arm attached to the second base and configured to transfer substrates between the placement unit and the carrier; a second cover portion that covers the periphery of the second arm on the second base and houses the second arm therein; Equipped with A low-humidity gas having a humidity lower than that of the atmosphere is supplied to the inside of the second cover portion, The second cover portion is a second fixed cover fixed on the second base; a second movable cover that is movable in a state of being continuous with the second fixed cover; a second movable cover moving mechanism that moves the second movable cover to cover a tip end of the second arm with the second movable cover when the second arm extends laterally from above the second base; A substrate processing apparatus comprising:

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