ultrasonic cleaner
The plate-shaped ultrasonic cleaner addresses the high water and power consumption issues of traditional submersible cleaners by directly propagating vibrations to the object, achieving efficient cleaning with reduced resources.
Patent Information
- Application Number
- JP2021092210
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2021-06-01
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2041-06-01
AI Technical Summary
Submersible ultrasonic cleaners require a large amount of water and high power consumption due to the need to transmit ultrasonic vibrations through a significant volume of water.
A plate-shaped ultrasonic cleaner that is submerged or placed in water, using a flat plate with ultrasonic vibrators to propagate vibrations directly to the object, reducing the need for extensive water and power usage.
Reduces water and power consumption by allowing cleaning with a smaller amount of water and lower power requirements, while maintaining effective cleaning efficiency.
Smart Images
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Abstract
Description
[Technical Field]
[0001] The present invention relates to an ultrasonic cleaner. [Background technology]
[0002] In cleaning the object to be cleaned, as disclosed in Patent Document 1, an ultrasonic cleaner is thrown into the water in a tank, and ultrasonic waves are propagated through the water in the tank to clean the object to be cleaned. [Prior art documents] [Patent documents]
[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 1997-206712 [Patent Document 2] Japanese Patent Application Laid-Open No. 2000-228381 Summary of the Invention [Problem to be solved by the invention]
[0004] Because these submersible ultrasonic cleaners are thick, they require a large tank of water to submerge them. Furthermore, the ultrasonic vibrations must be transmitted through the large amount of water stored in the tank, resulting in a problem of high power consumption. Therefore, there is a demand for ultrasonic cleaners that can clean objects using a small amount of water and low power consumption. [Means for solving the problem]
[0005] The ultrasonic cleaner of the present invention is a plate-shaped ultrasonic cleaner that is placed or submerged in water in which the object to be cleaned is submerged, and cleans the object by propagating ultrasonic vibrations through the water.It comprises a flat plate and a plurality of ultrasonic vibrators arranged on one side of the flat plate, and the other side of the flat plate is placed facing the object to be cleaned, thereby cleaning the object. The ultrasonic cleaner may include two of the flat plates and a connecting portion that connects the two flat plates with a gap between them, with one side of the two flat plates facing each other. The flat plate may have a plurality of projections and recesses on the other surface. The flat plate may have a plurality of holes, and ultrasonic vibrators may be arranged to block the holes. [Effects of the Invention]
[0006] The ultrasonic cleaning machine of the present invention is a plate-shaped ultrasonic cleaning machine that is placed in or submerged in water in which an object to be cleaned is submerged, and that cleans the object by propagating ultrasonic vibrations through the water, Has multiple holes A flat plate and a surface of the flat plate As if covering the hole placed Dome-shaped and an ultrasonic vibrator, and cleans the object that is brought into contact with the other surface of the flat plate. The ultrasonic cleaner mentioned above is for two plates. Has multiple holes The flat plate and a connecting portion that connects the two flat plates with a gap provided in a state where one surface of each of the two flat plates faces each other, and the one surface of each of the two flat plates is provided with: As if covering the hole A plurality of ultrasonic vibrators may be arranged, and the objects to be cleaned may be brought into contact with the other surfaces of the flat plates of each other to clean the objects. [Brief explanation of the drawings]
[0007] [Figure 1] FIG. 2 is a perspective view of a first ultrasonic cleaner. [Figure 2] FIG. 2 is a cross-sectional view of the first ultrasonic cleaner. [Figure 3] FIG. 2 is a cross-sectional view of a water tank, water, a first ultrasonic cleaner, and an object to be cleaned. [Figure 4] FIG. [Figure 5] FIG. 4 is a cross-sectional view of a second ultrasonic cleaner. [Figure 6] FIG. 10 is a cross-sectional view of a third ultrasonic cleaner. [Figure 7] FIG. 10 is a cross-sectional view of a fourth ultrasonic cleaner. [Figure 8] FIG. 2 is a cross-sectional view of a water tank, water, a fourth ultrasonic cleaner, and an object to be cleaned. [Figure 9] FIG. 10 is a cross-sectional view of a fifth ultrasonic cleaner. DETAILED DESCRIPTION OF THE INVENTION
[0008] The first ultrasonic cleaner 11 shown in FIG. 1 is a plate-shaped cleaner including a substantially circular flat plate 2 and a plurality of first ultrasonic vibrators 3 arranged on one surface 201 of the flat plate 2.
[0009] 2, the first ultrasonic transducer 3 has a first member 31 disposed on one surface 201 of the flat plate 2, and a second member 32 supported by the first member 31. The first member 31 and the second member 32 correspond to the rear mass and front mass of a Langevin type ultrasonic transducer (see Patent Document 1). A piezoelectric element and an electrode plate (not shown) are disposed between the first member 31 and the second member 32.
[0010] A cover 4 is disposed on one surface 201 of the flat plate 2 so as to cover the plurality of first ultrasonic transducers 3 arranged on the flat plate 2. The first ultrasonic transducers 3 are protected by the cover 4.
[0011] 3, the first ultrasonic cleaner 11 is submerged in water 101 in a water tank 100. Then, the object 9 to be cleaned is submerged above the first ultrasonic cleaner 11. The first ultrasonic cleaner 11 propagates ultrasonic vibrations into the water 101 to clean the object 9. The object 9 to be cleaned is, for example, a semiconductor wafer sliced into a disk shape.
[0012] When cleaning the object 9 to be cleaned using the first ultrasonic cleaner 11, the operator first places the first ultrasonic cleaner 11 with the other surface 202 of its flat plate 2 facing upward on the bottom surface 102 of a water tank 100 filled with water 101 deep enough to submerge the first ultrasonic cleaner 11 and the object 9 to be cleaned.
[0013] Next, the worker places the object to be cleaned 9 on the other surface 202 of the flat plate 2. That is, the other surface 202 of the flat plate 2 faces the object to be cleaned 9. As a result, the object to be cleaned 9 and the first ultrasonic cleaner 11 are submerged in the water 101 in the water tank 100. After placing the first ultrasonic cleaner 11 and the object to be cleaned 9 in the water tank 100, water 101 may be poured into the water tank 100 to submerge the first ultrasonic cleaner 11 and the object to be cleaned 9.
[0014] Then, by supplying power to each of the first ultrasonic vibrators 3 from a high-frequency power supply (not shown) connected to the first ultrasonic vibrators 3, ultrasonic vibrations are generated from each of the first ultrasonic vibrators 3, and the generated ultrasonic vibrations are propagated through the flat plate 2 to the water 101 in the water tank 100, and the object 9 to be cleaned is cleaned by the ultrasonic vibrations propagated to the water 101.
[0015] As described above, when cleaning the object 9 using the first ultrasonic cleaner 11, the object 9 and the plate-shaped first ultrasonic cleaner 11 are stacked and placed in the water tank 100, thereby reducing the total thickness of the object 9 and the first ultrasonic cleaner 11. Therefore, a smaller amount of water 101 than conventionally required can be used in the water tank 100 to submerge the object 9 and the first ultrasonic cleaner 11, thereby saving water. Furthermore, when cleaning the object 9, ultrasonic vibrations only need to be propagated through this small amount of water 101, thereby saving power required to generate ultrasonic vibrations.
[0016] When cleaning the object 9 with the first ultrasonic cleaner 11, the object 9 may be placed on the bottom surface 102 of a water tank 100 filled with water 101 deep enough to submerge the object 9, and the first ultrasonic cleaner 11 may be placed on top of the object 9. In this case, the first ultrasonic cleaner 11 may be placed on top of the water 101 in the water tank 100 without being submerged in the water 101. In other words, a part of the first ultrasonic cleaner 11 may be exposed above the surface of the water 101 in the water tank 100.
[0017] The first ultrasonic cleaner 11 can also clean a work unit 93 as shown in Fig. 4. In the work unit 93, the object to be cleaned 9 is positioned in an opening 91 of a ring frame 90, and tape 92 is attached to the underside of the ring frame 90 and the underside of the object to be cleaned 9, integrating the object to be cleaned 9, the ring frame 90, and the tape 92. In the work unit 93, the opening 91 of the ring frame 90 is closed with the tape 92, and the ring frame 90 with the opening 91 closed in this state and the flat plate 2 of the first ultrasonic cleaner 11 have approximately the same outer shape. In other words, the flat plate 2 of the first ultrasonic cleaner 11 and the work unit 93 have approximately the same outer shape.
[0018] When cleaning the work unit 93, the worker stacks and stores the work unit 93 and the first ultrasonic cleaner 11 on each shelf of a frame cassette (not shown) having a plurality of shelves.
[0019] The worker then places the frame cassette into a water tank 100 (see FIG. 3) filled with water 101 deep enough to submerge the frame cassette. After that, by supplying power to the first ultrasonic vibrators 3 of each of the first ultrasonic cleaners 11, the ultrasonic vibrations generated from each of the first ultrasonic vibrators 3 are propagated to the water 101 in the water tank 100, and the work unit 93 is cleaned by the ultrasonic vibrations propagated to the water 101.
[0020] In this configuration, each work unit 93 is cleaned by generating ultrasonic vibrations from the first ultrasonic cleaner 11 stored on each shelf of the frame cassette, stacked with the work unit 93. Therefore, cleaning can be performed with less power than in a configuration in which ultrasonic vibrations are applied from outside to the entire frame cassette storing multiple work units (see Patent Document 2). Note that the object 9 to be cleaned may be stored on each shelf of a frame cassette instead of the work unit 93. That is, the object 9 to be cleaned may be placed on the first ultrasonic cleaner 11, and the first ultrasonic cleaner 11 may be stored on each shelf of a frame cassette to clean the object 9 to be cleaned.
[0021] 5 shows the second ultrasonic cleaner 12. Similar to the first ultrasonic cleaner 11, the second ultrasonic cleaner 12 includes a flat plate 2 and a plurality of first ultrasonic vibrators 3 arranged on one surface 201 of the flat plate 2. A cover 4 is arranged on one surface 201 of the flat plate 2 so as to cover the plurality of first ultrasonic vibrators 3 arranged on the flat plate 2.
[0022] A plurality of hemispherical convex members 203 are arranged at intervals on the other surface 202 of the flat plate 2 of the second ultrasonic cleaner 12. The flat plate 2 of the second ultrasonic cleaner 12 has a plurality of projections and recesses on the other surface 202, which are formed by hemispherical portions (convex portions) occupied by the convex members 203 and flat portions (concave portions) occupied by the other surface 202.
[0023] The cleaning of the object 9 to be cleaned by the second ultrasonic cleaner 12 is performed in the same manner as the cleaning of the object 9 to be cleaned by the first ultrasonic cleaner 11. First, an operator places the second ultrasonic cleaner 12, with the other surface 202 of its flat plate 2 facing upward, on the bottom surface 102 of a water tank 100 (see FIG. 3 ) filled with water 101 deep enough to submerge the second ultrasonic cleaner 12 and the object 9 to be cleaned. Then, the operator places the object 9 to be cleaned on the other surface 202 of the flat plate 2 in a stacked manner.
[0024] Next, power is supplied to each of the first ultrasonic vibrators 3 from a high-frequency power supply (not shown) connected to the first ultrasonic vibrators 3, causing each of the first ultrasonic vibrators 3 to generate ultrasonic vibrations, which are then propagated to the flat plate 2. In this way, in the second ultrasonic cleaner 12, ultrasonic vibrations are propagated from each of the first ultrasonic vibrators 3 to the flat plate 2, causing the ultrasonic vibrations to be diffused in multiple directions from the multiple concaves and convexes on the other surface 202 of the flat plate 2, and propagated into the water 101 in the water tank 100, thereby cleaning the object 9 to be cleaned.
[0025] In the second ultrasonic cleaner 12, the ultrasonic vibrations propagated from the first ultrasonic vibrator 3 to the flat plate 2 are diffused in multiple directions from the multiple irregularities on the other surface 202 of the flat plate 2, and propagated to the water 101 in the water tank 100. Therefore, in cleaning using the second ultrasonic cleaner 12, ultrasonic vibrations can be propagated to many parts of the object 9 at once compared to cleaning using the first ultrasonic cleaner 11, so the object 9 can be cleaned in a shorter time.
[0026] 6 shows the third ultrasonic cleaner 13. Similar to the first ultrasonic cleaner 11 and the second ultrasonic cleaner 12, the third ultrasonic cleaner 13 includes a flat plate 2 and a plurality of first ultrasonic vibrators 3 arranged on one surface 201 of the flat plate 2.
[0027] A protective member 6 made of resin is disposed on one surface 201 of the flat plate 2 of the third ultrasonic cleaner 13. The protective member 6 has the function of protecting each of the first ultrasonic vibrators 3. When cleaning an object 9 to be cleaned, the third ultrasonic cleaner 13 is also placed in a water tank 100 (see FIG. 3), and the object 9 to be cleaned is placed on the other surface 202 of the flat plate 2, so that the third ultrasonic cleaner 13 functions in the same way as the first ultrasonic cleaner 11. With this configuration, the cover 4 can be eliminated.
[0028] 7 shows a fourth ultrasonic cleaner 14. The fourth ultrasonic cleaner 14 includes a first flat plate 21 and a second flat plate 22, which are two flat plates configured similarly to the flat plate 2 included in the first ultrasonic cleaner 11. The second flat plate 22 includes an annular protruding portion 223 on its outer periphery, and is formed with a larger diameter than the first flat plate 21 by the amount of the protruding portion 223. A plurality of first ultrasonic vibrators 3 are arranged on one surface 211 of the first flat plate 21 and one surface 221 of the second flat plate 22.
[0029] The fourth ultrasonic cleaner 14 also includes an annular connecting portion 29 that connects the first flat plate 21 and the second flat plate 22 with a gap between them, with one surface 211 of the first flat plate 21 facing one surface 221 of the second flat plate 22. The first flat plate 21 and the second flat plate 22 are integrated by the connecting portion 29.
[0030] In the fourth ultrasonic cleaner 14, the first ultrasonic vibrators 3 arranged on one surface 221 of the second flat plate 22 face each other in a state where the first ultrasonic vibrators 3 arranged on one surface 221 of the second flat plate 22 are positioned between the plurality of first ultrasonic vibrators 3 arranged on one surface 211 of the first flat plate 21. In other words, the one surface 211 of the first flat plate 21 faces the one surface 221 of the second flat plate 22 such that the first ultrasonic vibrators 3 arranged thereon do not face each other.
[0031] When cleaning the object 9 using the fourth ultrasonic cleaner 14, as shown in Figure 8, first, a worker places the object 9 on the bottom surface 102 of the water tank 100, which is filled with water 101 deep enough to submerge the fourth ultrasonic cleaner 14 and the object 9.
[0032] Next, the operator places the fourth ultrasonic cleaner 14 on top of the object to be cleaned 9 with its second flat plate 22 facing downwards. As a result, the other surface 222 of the second flat plate 22 faces the object to be cleaned 9.
[0033] Furthermore, the worker places another object to be cleaned 9 on the other surface 212 of the first flat plate 21 of the fourth ultrasonic cleaner 14 in the water tank 100. As a result, the other surface 212 of the first flat plate 21 faces the other object to be cleaned 9.
[0034] Then, power is supplied from a high frequency power source (not shown) to the first ultrasonic vibrators 3 arranged on one surface 211 of the first flat plate 21 and the first ultrasonic vibrators 3 arranged on one surface 221 of the second flat plate 22. As a result, ultrasonic vibrations are generated from each of the first ultrasonic vibrators 3, and the generated ultrasonic vibrations are propagated to the water 101 in the water tank 100 via the first flat plate 21 and the second flat plate 22, and the object 9 to be cleaned is cleaned by the ultrasonic vibrations propagated to the water 101.
[0035] As described above, in the fourth ultrasonic cleaner 14, one surface 211 of the first flat plate 21 and one surface 221 of the second flat plate 22 face each other so that the first ultrasonic vibrators 3 arranged thereon do not face each other. This makes it possible to reduce the total thickness of the object 9 to be cleaned and the fourth ultrasonic cleaner 14. Therefore, similar to the first ultrasonic cleaner 11, the fourth ultrasonic cleaner 14 can also achieve water and power savings. Furthermore, when cleaning the object 9 with the fourth ultrasonic cleaner 14, the object 9 is placed in the water tank 100, the other surface 222 of the second flat plate 22 is placed on the object 9, and the object 9 is then placed on the other surface 212 of the first flat plate 21. Therefore, the fourth ultrasonic cleaner 14 can clean two objects 9 at a time, thereby improving cleaning efficiency.
[0036] Note that cleaning by the fourth ultrasonic cleaner 14 may be performed by storing the fourth ultrasonic cleaner 14 and the above-described work unit 93 on a shelf of a frame cassette (not shown). In this case, first, with the workpiece unit 93 placed on the first flat plate 21 of the fourth ultrasonic cleaner 14, the protruding portion 223 of the second flat plate 22 is placed on the shelf of the frame cassette. Next, the frame cassette is placed in the water tank 100. At this time, the water tank 100 is filled with water 101 deep enough to submerge the frame cassette. Then, the work unit 93 is cleaned by generating ultrasonic vibrations from the fourth ultrasonic cleaner 14 stored on the shelf of the frame cassette. Alternatively, the object 9 may be stored on each shelf of a frame cassette instead of the work unit 93. That is, the object 9 may be placed on the fourth ultrasonic cleaner 14, and the fourth ultrasonic cleaner 14 may be stored on each shelf of a frame cassette to clean the object 9.
[0037] Note that, similar to the other surface 202 of the second ultrasonic cleaner 12, a plurality of hemispherical convex members 203 (see FIG. 5) may be arranged on the other surface 212 of the first flat plate 21 and the other surface 222 of the second flat plate 22 of the fourth ultrasonic cleaner 14. In this case, the other surface 212 of the first flat plate 21 and the other surface 222 of the second flat plate 22 are configured to have a plurality of concaves and convexes.
[0038] 9 shows the fifth ultrasonic cleaner 15. The fifth ultrasonic cleaner 15 includes a third flat plate 23 and a fourth flat plate 24.
[0039] The third flat plate 23 has a plurality of holes 26 formed at intervals. A plurality of second ultrasonic vibrators 5 are arranged on one surface 231 of the third flat plate 23 so as to cover each of the holes 26 of the third flat plate 23. The second ultrasonic vibrators 5 include a dome-shaped first member 51 provided so as to cover the holes 26, and a dome-shaped second member 52 supported by the first member 51, and have a dome shape as a whole. The first member 51 is exposed to the outside of the third flat plate 23 through the holes 26 formed in the third flat plate 23. The first member 51 and the second member 52 are electrode plates, and a piezoelectric element (not shown) is disposed between the first member 51 and the second member 52.
[0040] Furthermore, the fourth flat plate 24 has an annular protruding portion 243 on its outer periphery, and is formed with a larger diameter than the third flat plate 23 by the amount of the protruding portion 243. Here, the fourth flat plate 24 may have the same configuration as the third flat plate 23. That is, the fourth flat plate 24 may have a plurality of holes 26 formed at intervals, and the second ultrasonic vibrators 5 may be arranged on one surface 241 of the fourth flat plate 24 so as to cover the holes 26.
[0041] Furthermore, the fifth ultrasonic cleaner 15 includes a connecting portion 29 similar to the connecting portion 29 of the fourth ultrasonic cleaner 14. That is, the third flat plate 23 and the fourth flat plate 24 are connected and integrated by the connecting portion 29 in a state in which one surface 231 of the third flat plate 23 and one surface 241 of the fourth flat plate 24 face each other so that the second ultrasonic vibrators 5 arranged on each of the third flat plate 23 and the fourth flat plate 24 do not face each other.
[0042] The cleaning of the object 9 by the fifth ultrasonic cleaner 15 is performed in the same manner as the cleaning of the object 9 by the fourth ultrasonic cleaner 14. First, an operator places the object 9 on the bottom surface 102 of a water tank 100 (see FIG. 8 ) filled with water 101 deep enough to submerge the fifth ultrasonic cleaner 15 and the object 9. Then, the operator places the fifth ultrasonic cleaner 15 on top of the object 9 with the other surface 242 of its fourth flat plate 24 facing downward. At this time, the first members 51 of the second ultrasonic vibrators 5 provided on the third flat plate 23 and the fourth flat plate 24 come into contact with the water 101 in the water tank 100. Furthermore, the worker places another object to be cleaned 9 on top of the other surface 232 of the third flat plate 23 facing upward.
[0043] Then, power is supplied from a high frequency power source (not shown) to the second ultrasonic vibrators 5 disposed on one surface 231 of the third flat plate 23 and one surface 241 of the fourth flat plate 24. This causes ultrasonic vibrations to be generated from each of the second ultrasonic vibrators 5.
[0044] In the fifth ultrasonic cleaner 15, part of the ultrasonic vibrations generated by the second ultrasonic vibrator 5 is transmitted directly to the water 101 near the second ultrasonic vibrator 5 through the holes 26 formed in the third flat plate 23 and the fourth flat plate 24, thereby cleaning the object 9 to be cleaned. In addition, another part of the ultrasonic vibrations is transmitted indirectly to the water 101 in the water tank 100 via the third flat plate 23 and the fourth flat plate 24, thereby cleaning the object 9 to be cleaned.
[0045] In this way, in the fifth ultrasonic cleaner 15, ultrasonic vibrations can be propagated directly through the holes 26 to the water 101 near the second ultrasonic vibrator 5. Therefore, relatively strong ultrasonic vibrations can be propagated to the water 101 near the second ultrasonic vibrator 5, so that the area near the second ultrasonic vibrator 5 on the object 9 can be quickly cleaned. Furthermore, this strong ultrasonic vibration can more effectively wash away dirt adhering to the area near the second ultrasonic vibrator 5 on the object 9.
[0046] Alternatively, the operator may move the fifth ultrasonic cleaner 15 horizontally relative to the object 9 while generating ultrasonic vibrations from the second ultrasonic vibrator 5, thereby moving the positions of the holes 26 relative to the object 9. This allows the strong ultrasonic vibrations propagated directly from the holes 26 to the water 101 near the second ultrasonic vibrator 5 to reach the entire object 9, thereby quickly and effectively cleaning the entire object 9.
[0047] Note that cleaning by the fifth ultrasonic cleaner 15 may be performed by storing the fifth ultrasonic cleaner 15 and the work unit 93 on a shelf of the frame cassette (not shown) described above. In this case, with the work unit 93 placed on the third plate 23 of the fifth ultrasonic cleaner 15, the protruding portion 243 of the fourth plate 24 is placed on the shelf of the frame cassette. Then, the frame cassette is placed in a water tank 100 filled with water 101 to an appropriate depth. Furthermore, ultrasonic vibrations are generated from the fifth ultrasonic cleaner 15 stored on the shelf of the frame cassette, and the object 9 to be cleaned is cleaned. Alternatively, the object 9 may be stored on each shelf of a frame cassette instead of the work unit 93. That is, the object 9 may be placed on the fifth ultrasonic cleaner 15, and the fifth ultrasonic cleaner 15 may be stored on each shelf of a frame cassette to clean the object 9.
[0048] In the fifth ultrasonic cleaner 15, the first ultrasonic vibrator 3 shown in FIG.
[0049] Furthermore, the other surface 232 of the third flat plate 23 and the other surface 242 of the fourth flat plate 24 of the fifth ultrasonic cleaner 15 may be provided with a plurality of hemispherical convex members 203 (see FIG. 5 ) disposed in the second ultrasonic cleaner 12. In this case, the other surface 232 of the third flat plate 23 and the other surface 242 of the fourth flat plate 24 are configured to have a plurality of concaves and convexes. [Explanation of symbols]
[0050] 2: Flat plate 3: First ultrasonic vibrator 4: Cover 5: Second ultrasonic vibrator 6: Protective material 9: Object to be cleaned 11: 1st ultrasonic cleaner 12: 2nd ultrasonic cleaner 13: 3rd ultrasonic cleaner 14: 4th ultrasonic cleaner 15: 5th ultrasonic cleaner 21: 1st plate 22: 2nd plate 23: 3rd plate 24: 4th plate 26: Hole 29: Connection portion 31: First member 32: Second member 51: First member 52: Second member 90: Ring frame 91: Opening 92: Tape 93: Work unit 100: Water tank 101: Water 102: Bottom surface 203: Protruding part
Claims
1. A plate-shaped ultrasonic cleaner that cleans an object by placing or submerging it in water and propagating ultrasonic vibrations through the water, The ultrasonic transducer comprises a flat plate having a plurality of holes, and a dome-shaped ultrasonic transducer disposed on one surface of the flat plate so as to cover the holes; An ultrasonic cleaner that cleans the object to be cleaned by placing it in contact with the other surface of the flat plate.
2. The flat plate has two holes, and a connecting portion that connects the two flat plates with a gap provided between them in a state where one surface of each of the two flat plates faces each other, a plurality of ultrasonic vibrators are arranged on one surface of each of the two flat plates so as to cover the holes; The object to be cleaned is brought into contact with the other surface of each of the flat plates, and then cleaned.
2. The ultrasonic cleaner according to claim 1.
Citation Information
Patent Citations
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Throwing type ultrasonic washing device
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Ultrasonic cleaning method and ultrasonic cleaner
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Ultrasonic wave generating device
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