Method for adjusting flow rates of cooling water and nitrogen gas in tandem in dry pumps

Abstract

To provide a collaborative flow rate control method of cooling water and nitrogen gas used for a dry pump.SOLUTION: In a process where a dry pump is used for processing a product, a cooling water flows in a pump body of the dry pump to decrease temperature of the dry pump. When the dry pump is in a condensation state, the cooling water flow rate is decreased while an inner temperature of a pump chamber of the dry pump is increased by purging hot nitrogen gas into the pump chamber of the dry pump. When the dry pump is in an almost critical high-temperature state, the cooling water flow rate is increased while a work temperature of the dry pump is quickly decreased by conveying cold nitrogen gas into the pump chamber of the dry pump. When the dry pump is in a safety state between the condensation state and the high-temperature state, the cooling water flow rate is controlled while the hot nitrogen gas or the cold nitrogen gas is purged into the pump chamber of the dry pump.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to the technical field of dry pumps, and more particularly to a method for adjusting the flow rates of cooling water and nitrogen gas used in a dry pump in cooperation with each other. [Background technology]

[0002] Dry pumps are devices that create vacuum by extracting gas without using oil or other working fluids and discharging it directly into the atmosphere. Since the advent of dry pump technology, the methods of vacuum generation and their application in industrial manufacturing have changed dramatically. Dry pumps are applicable to production systems with strict cleanliness requirements and where corrosive gases, moisture, and dust are present, making them the first choice for important equipment in general semiconductor production lines.

[0003] Dry pumps are divided into two types: positive displacement and momentum type, with positive displacement dry pumps being the most widely used. Positive displacement dry pumps are divided into several types, including claw, roots, and screw, depending on the rotor mold line. During operation, the two rotors in a dry pump rotate and mesh with each other, drawing in external gas and then discharging it. The drawn-in working gas is compressed and rotates at high speed, causing friction with the rotors, which can raise the temperature inside the pump chamber to over 100-200 degrees Celsius. The dust generated by the drawn-in working gas reacts with the rotors, causing further friction between the rotors and between the rotors and the pump chamber, resulting in jamming.

[0004] For dry pumps used in general-purpose semiconductor production lines, the requirements for long-term operational stability, reliability, and operability of dry pumps are particularly high because they are faced with the possibility of ingesting toxic, flammable, explosive, and corrosive working gases, and shutdowns due to malfunctions can cause significant economic losses to the semiconductor production line. In order to reduce shutdowns due to malfunctions of dry pumps, it is very important to control the temperature rise of dry pumps and remove dust.

[0005] Dry pumps generally use a water-cooling method to control temperature rise. That is, cooling water is piped into the pump housing of the dry pump to directly cool the pump body. Dust is generally removed by pumping nitrogen gas into the pump chamber to purge it. Because the chemical reaction products of the drawn-in working gas generate dust at low temperatures, which easily contaminates the rotor surface, and because water vapor condenses at low temperatures, which easily promotes dust adhesion, the purging nitrogen gas is heated by a heater outside the pump body before being pumped into the pump chamber.

[0006] In conventional dry pump cooling and dust purging technologies, the delivery of cooling water and nitrogen gas is controlled independently, rather than being coordinated. The cooling of the dry pump by the cooling water causes a difference in the heat demand of the hot nitrogen gas in the pump chamber, and the introduction of hot nitrogen gas into the pump chamber also affects the temperature of the dry pump. Therefore, by regulating the two in coordination, the cooling water and nitrogen gas can better perform their roles and reduce material and energy consumption.

[0007] In addition, after a certain degree of vacuum is formed in the pump chamber of the dry pump, the gas is thin, and the heat dissipation due to gas convection from the wall of the pump chamber to the rotor of the dry pump is greatly reduced. There is only one heat dissipation path through which the cooling water passes through the dry pump housing and conducts heat to the metal on the rotor. At this time, the heat dissipation efficiency of the pump chamber of the dry pump is low, and the temperature reduction rate of the dry pump is relatively slow. Summary of the Invention [Problem to be solved by the invention]

[0008] In order to overcome the drawbacks and deficiencies of the prior art, the object of the present invention is to provide a method for coordinated flow rate adjustment of cooling water and nitrogen gas used in a dry pump, which uses cooling water and nitrogen gas in combination to adjust the temperature and purge dust from the dry pump, thereby more efficiently controlling the operating temperature of the dry pump, reducing the amount of cooling water and nitrogen gas used, reducing the energy consumption required to heat the nitrogen gas, reducing the adhesion of dust inside the pump chamber of the dry pump, and reducing the frequency of blowing off dust inside the dry pump, thereby achieving the objective of reducing the maintenance and repair costs and operating costs of the dry pump. [Means for solving the problem]

[0009] To achieve the above object, the present invention provides the following technical solution: a method for cooperatively adjusting the flow rates of cooling water and nitrogen gas used in a dry pump, in which, during the process of the dry pump participating in product processing, cooling water flows through the pump body of the dry pump to cool the dry pump; when the dry pump is in a condensing state, the flow rate of the cooling water is reduced and hot nitrogen gas is purged into the pump chamber of the dry pump to raise the internal temperature of the pump chamber of the dry pump to prevent condensation; when the dry pump is in a high-temperature state close to its critical point, the flow rate of the cooling water is increased and cold nitrogen gas is delivered into the pump chamber of the dry pump to purge, thereby quickly lowering the operating temperature of the dry pump to a safe temperature range; when the dry pump is in a safe state between the condensing state and the high-temperature state, the flow rate of the cooling water is adjusted to adjust the operating temperature of the dry pump to the target operating temperature value, and hot or cold nitrogen gas is purged into the pump chamber of the dry pump according to the required temperature adjustment speed, thereby achieving a temperature control and dust purging method for the dry pump that relies primarily on cooling water and supplemented by cold / hot nitrogen gas.

[0010] This invention uses two methods, cooling water and nitrogen gas, in combination to regulate the temperature of the dry pump, which can more efficiently control the operating temperature of the dry pump, reduce the amount of cooling water and nitrogen gas used, reduce the energy consumption required to heat the nitrogen gas, save the operating costs of the dry pump, prevent more dust caused by gas condensation from adhering to the walls and rotor of the pump chamber of the dry pump, reduce the frequency of blowing off dust inside the dry pump, and reduce maintenance and repair costs.

[0011] In the case of a high temperature state close to the critical point, the present invention directly purges the rotor by adding cold nitrogen gas in addition to the cooling method using cooling water, so that the nitrogen gas can carry away the heat from the rotor, improving the heat dissipation effect.

[0012] Preferably, in the process in which the dry pump participates in the processing of the product, the method for adjusting the flow rate of the cooling water and the nitrogen gas in cooperation with each other is as follows: Step S1: setting a target operating temperature and a condensation temperature, the target operating temperature being greater than the upper limit of a temperature range with a high dust generation rate and less than the upper limit of a safe operating temperature of the dry pump, the condensation temperature being greater than the upper limit of a temperature range where condensation is likely to occur and less than the target operating temperature, and initializing the flow rate of cooling water; Step S2: detecting the temperature of the internal region of the pump chamber of the dry pump in real time to obtain the maximum temperature region and the minimum temperature region of the internal region of the pump chamber of the dry pump; Determine the condition of the dry pump, Step S3: if the temperature of the lowest temperature region is equal to or lower than the condensation temperature, it is determined that the dry pump is in a condensation state; if the difference between the upper limit of the safe operating temperature and the temperature of the highest temperature region is smaller than a set safe difference, it is determined that the dry pump is in a high temperature state close to critical; otherwise, it is determined that the dry pump is in a safe state; The amount of cooling required to reduce the temperature is obtained based on the difference between the temperature in the maximum temperature region and the target operating temperature. When the dry pump is in a condensing state, the flow rate of the cooling water is reduced according to the cooling amount required to lower the temperature, the cold / hot type of nitrogen gas is set as hot nitrogen gas, and hot nitrogen gas is purged into the pump chamber of the dry pump to increase the internal temperature of the pump chamber of the dry pump; When the dry pump is in a high temperature state close to the critical point, the flow rate of the cooling water is increased to the maximum, the nitrogen gas cooling type is set to cold nitrogen gas, and cold nitrogen gas is transported into the pump chamber of the dry pump to purge, thereby quickly lowering the operating temperature of the dry pump to a safe temperature range. and step S4, when the dry pump is in a safe state, adjusting the flow rate of the cooling water according to the amount of cooling required to lower the temperature, setting the cold / hot type of nitrogen gas as cold nitrogen gas or hot nitrogen gas, and transporting cold nitrogen gas or hot nitrogen gas into the pump chamber of the dry pump to purge dust.

[0013] Preferably, when the dry pump is in a condensing state, the flow rate of the hot nitrogen gas is set as the maximum flow rate of the allowable range of the working nitrogen gas of the dry pump, or the flow rate of the hot nitrogen gas is set according to the difference between the condensing temperature and the lowest temperature region; When the dry pump is in a high temperature state close to the critical point, the flow rate of the cold nitrogen gas is set as the maximum flow rate of the dry pump's operating nitrogen gas allowable range; When the dry pump is in a safe state, the flow rate of cold or hot nitrogen gas is set as the flow rate of nitrogen gas required to purge the dust.

[0014] Preferably, the flow rate of hot nitrogen gas when the dry pump is in a condensing state is greater than the flow rate of cold or hot nitrogen gas when the dry pump is in a safe state, and the flow rate of cold nitrogen gas when the dry pump is in a high temperature state near criticality is greater than the flow rate of cold or hot nitrogen gas when the dry pump is in a safe state.

[0015] Preferably, when the dry pump is in a safe state, according to the requirement for temperature adjustment speed, the method for setting the cold and hot type of nitrogen gas is as follows: A first solution is to set an early warning value, and when the maximum temperature range is equal to or greater than the early warning value, set the cold / hot type of nitrogen gas as cold nitrogen gas, and when the maximum temperature range is less than the early warning value, set the cold / hot type of nitrogen gas as hot nitrogen gas; and The second solution is to set the cold or warm type of nitrogen gas as hot nitrogen gas.

[0016] Preferably, in step S2, the temperature of the internal region of the pump chamber of the dry pump is detected in real time by one or more contact temperature sensing modules attached to the pump body of the dry pump, or by a non-contact infrared thermography device capturing a thermal image distribution map in real time. The non-contact infrared thermography device does not require drilling holes in the pump body of the dry pump, can reflect the overall temperature and its distribution of the dry pump, and is not affected by vibrations of the dry pump.

[0017] Preferably, a high dust generation rate temperature zone of the working gas sucked into the dry pump is obtained according to the type and concentration of the working gas sucked into the dry pump, and a target operating temperature value is set, thereby setting the operating temperature of the dry pump to a non-high dust generation rate temperature zone, thereby reducing the generation of dust in the pump chamber of the dry pump, and a condensation temperature is set according to the type and concentration of the working gas sucked into the dry pump.

[0018] By target-directedly setting the operating temperature target value and the condensation temperature according to the type and concentration of the working gas sucked into the dry pump, the generation and adhesion of dust in the pump chamber of the dry pump can be further reduced.

[0019] Preferably, a heating branch pipeline and a cooling branch pipeline are connected in parallel to the nitrogen gas transport pipeline, and the nitrogen gas is heated by connecting the nitrogen gas transport pipeline and the heating branch pipeline via a switch module to obtain hot nitrogen gas, or the nitrogen gas is cooled by connecting the nitrogen gas transport pipeline and the cooling branch pipeline to obtain cold nitrogen gas.

[0020] Preferably, the heating branch line heats the nitrogen gas by an electric heating device.

[0021] Preferably, the cooling branch pipe lowers the temperature of the nitrogen gas with cooling water. [Effects of the Invention]

[0022] Compared with the prior art, the present invention has the following advantages and beneficial effects: First, the present invention uses two methods, cooling water and nitrogen gas, in cooperation to regulate the temperature of the dry pump, thereby more efficiently controlling the operating temperature of the dry pump, reducing the amount of cooling water and nitrogen gas used, and reducing the energy consumption required to heat the nitrogen gas, thereby saving the operating cost of the dry pump. Second, when the dry pump is in a condensing state, the present invention reduces the flow rate of cooling water and purges hot nitrogen gas into the pump chamber of the dry pump to raise the internal temperature of the pump chamber. This prevents more dust particles from adhering to the walls and rotor of the pump chamber due to condensation of gas, reduces the frequency of blowing off dust particles inside the dry pump, and reduces maintenance and repair costs. Third, when the dry pump is in a high temperature state close to the critical point, the present invention increases the amount of cold nitrogen gas to directly purge the rotor, allowing the nitrogen gas to carry away the heat from the rotor, improving the heat dissipation effect. Fourth, the present invention can maintain the internal temperature of the pump chamber of a dry pump within a range approximately close to the target operating temperature value, and by setting the target operating temperature outside of a temperature range with a high dust generation rate, it can reduce the generation of dust in the pump chamber of a dry pump. Furthermore, by target-directedly setting the target operating temperature and condensation temperature according to the type and concentration of the working gas drawn into the dry pump, it can further reduce the generation and adhesion of dust in the pump chamber of a dry pump. [Brief explanation of the drawings]

[0023] [Figure 1] 1 is a flowchart of a method for adjusting the flow rates of cooling water and nitrogen gas in cooperation with each other, which is used in a dry pump according to the present invention. [Figure 2] 1 is a schematic diagram of a nitrogen gas transport pipe in a method for adjusting the flow rates of cooling water and nitrogen gas in cooperation with each other, which is used in a dry pump according to the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0024] The present invention will be described in more detail below with reference to specific embodiments with reference to the drawings.

[0025] Example In the method for adjusting the flow rates of cooling water and nitrogen gas used in the dry pump according to this embodiment, when the dry pump is involved in product processing, cooling water flows through the pump body of the dry pump to cool the dry pump. When the dry pump is in a condensation state, the flow rate of the cooling water is reduced and hot nitrogen gas is purged into the pump chamber of the dry pump to raise the internal temperature of the pump chamber, thereby preventing condensation. When the dry pump is in a high-temperature state close to its critical point, the flow rate of the cooling water is increased and cold nitrogen gas is transported into the pump chamber of the dry pump to purge, thereby quickly lowering the operating temperature of the dry pump to a safe temperature range. When the dry pump is in a safe state between the condensation state and the high-temperature state, the flow rate of the cooling water is adjusted to adjust the operating temperature of the dry pump to the target operating temperature, and hot or cold nitrogen gas is purged into the pump chamber of the dry pump according to the required temperature adjustment speed, thereby achieving a temperature control and dust purging method for the dry pump that relies mainly on cooling water and supplemented by cold / hot nitrogen gas.

[0026] Specifically, when a dry pump is used in the processing of a product, the method for adjusting the flow rate of cooling water and nitrogen gas in coordination is shown in FIG. 1 and includes the following steps:

[0027] S1 Setting a target operating temperature value and a condensation temperature. The method for setting the target operating temperature value and the condensation temperature includes obtaining a high dust generation rate temperature zone of the working gas sucked into the dry pump according to the type and concentration of the working gas sucked into the dry pump, and further setting a target operating temperature value to bring the operating temperature of the dry pump into a non-high dust generation rate temperature zone, thereby reducing the generation of dust in the pump chamber of the dry pump, and setting the condensation temperature according to the type and concentration of the working gas sucked into the dry pump.

[0028] The target operating temperature and condensation temperature vary depending on the type and concentration of the working gas drawn into the dry pump. A conventional method can be used to establish a correspondence relationship between the type and concentration of the working gas drawn into the dry pump and the target operating temperature and condensation temperature. For example, a limited number of tests are conducted using different types and concentrations of drawn working gas during the operation of the dry pump. During the test, the high dust production rate temperature zone and the temperature zone prone to condensation for each type and concentration of drawn working gas are recorded. Then, target operating temperatures and condensation temperatures are respectively set for the different types and concentrations of drawn working gas. The target operating temperature is greater than the upper limit of the high dust production rate temperature zone and less than the upper limit of the safe operating temperature of the dry pump, and the condensation temperature is greater than the upper limit of the temperature zone prone to condensation and less than the target operating temperature. This allows a table to be created that lists the correspondence relationship between the type and concentration of the drawn working gas and the target operating temperature and condensation temperature. The correspondence relationship between the type and concentration of the drawn working gas and the target operating temperature and condensation temperature can then be obtained using a table lookup method.

[0029] Initialize the cooling water flow rate, S2 Detect the temperature of the internal region of the pump chamber of the dry pump in real time by using one or more contact temperature sensing modules attached to the pump body of the dry pump, or by obtaining a thermal image distribution map using a non-contact infrared thermography device to detect the temperature of the dry pump in real time, and obtain the highest temperature region and the lowest temperature region of the internal region of the pump chamber of the dry pump.

[0030] S3 Determine the status of the dry pump and If the temperature of the lowest temperature region is equal to or lower than the condensation temperature, the dry pump is determined to be in a condensation state; if the difference between the upper limit of the safe operating temperature and the temperature of the highest temperature region is smaller than the set safe difference, the dry pump is determined to be in a high temperature state close to critical; otherwise, the dry pump is determined to be in a safe state.

[0031] S4: Obtaining the amount of cooling required to reduce the temperature based on the difference between the temperature in the maximum temperature region and the target operating temperature; When the dry pump is in a condensing state, the flow rate of the cooling water is reduced according to the cooling amount required to lower the temperature, the cold / hot type of nitrogen gas is set as hot nitrogen gas, and hot nitrogen gas is purged into the pump chamber of the dry pump to increase the internal temperature of the pump chamber of the dry pump; When the dry pump is in a high temperature state close to the critical point, the flow rate of the cooling water is increased to the maximum, the nitrogen gas cooling type is set to cold nitrogen gas, and cold nitrogen gas is transported into the pump chamber of the dry pump to purge, thereby quickly lowering the operating temperature of the dry pump to a safe temperature range. When the dry pump is in a safe state, the flow rate of the cooling water is adjusted according to the amount of cooling required to lower the temperature, the nitrogen gas cooling / heating type is set to cold nitrogen gas or hot nitrogen gas, and cold nitrogen gas or hot nitrogen gas is transported into the pump chamber of the dry pump to purge dust.

[0032] Furthermore, when the dry pump is in a safe state, according to the requirements for temperature adjustment speed, the setting method for the cold and hot type of nitrogen gas is as follows: For example, when the requirement for temperature adjustment speed is high, an early warning value is set, and when the maximum temperature range is equal to or greater than the early warning value, the cold and hot type of nitrogen gas is set as cold nitrogen gas; when the maximum temperature range is less than the early warning value, the cold and hot type of nitrogen gas is set as hot nitrogen gas. When the requirement for the temperature adjustment speed is low, the second solution is adopted, in which the cold type of nitrogen gas is set as hot nitrogen gas.

[0033] The flow rate of cold or hot nitrogen gas is set as the flow rate of nitrogen gas required to purge the dust.

[0034] When the dry pump is in a condensing state, the demand for hot nitrogen gas is large, so the flow rate of hot nitrogen gas is set as the maximum flow rate of the dry pump's operating nitrogen gas, or the flow rate of hot nitrogen gas is set according to the difference between the condensing temperature and the minimum temperature range.When the dry pump is in a high-temperature state close to the critical point, the demand for cold nitrogen gas is large, so the flow rate of cold nitrogen gas is set as the maximum flow rate of the dry pump's operating nitrogen gas.When the dry pump is in a safe state, cold or hot nitrogen gas is sufficient to purge dust, so the flow rate of cold or hot nitrogen gas is set as the nitrogen gas flow rate required for dust purging.

[0035] The flow rate of hot nitrogen gas when the dry pump is in a condensing state > the flow rate of cold or hot nitrogen gas when the dry pump is in a safe state, and the flow rate of cold nitrogen gas when the dry pump is in a high temperature state near critical > the flow rate of cold or hot nitrogen gas when the dry pump is in a safe state.

[0036] As shown in FIG. 2, in this embodiment, a heating branch pipeline 2 and a cooling branch pipeline 3 are connected in parallel to a nitrogen gas transport pipeline 1, an electric heating device is fitted around the heating branch pipeline 2, and a cooling cover is fitted around the cooling branch pipeline 3, through which cooling water is passed.

[0037] The switch module 4, for example, a solenoid valve, connects the nitrogen gas transport pipeline 1 and the heating branch pipeline 2 to heat the nitrogen gas and obtain hot nitrogen gas, or connects the nitrogen gas transport pipeline 1 and the cooling branch pipeline 3 to lower the temperature of the nitrogen gas and obtain cold nitrogen gas.

[0038] The rear sides of the heating branch pipe 2 and the cooling branch pipe 3 join together to form one pipe, which then communicates with the pump chamber of the dry pump.

[0039] The above examples are preferred embodiments of the present invention, but the embodiments of the present invention are not limited to the above examples. Any other changes, modifications, substitutions, combinations, and simplifications made without departing from the spirit / essence and principles of the present invention are all equivalent replacement methods and fall within the protection scope of the present invention.

Claims

1. A method for adjusting the flow rates of cooling water and nitrogen gas used in a dry pump in cooperation with each other, comprising: When the dry pump is in use, cooling water flows through the pump body of the dry pump to cool it down; when the dry pump is in a condensing state, the flow rate of the cooling water is reduced and hot nitrogen gas is purged into the pump chamber of the dry pump to increase the internal temperature of the pump chamber, thereby avoiding condensation; when the dry pump is in a high-temperature state close to its critical point, the flow rate of the cooling water is increased and cold nitrogen gas is transported into the pump chamber of the dry pump to purge, thereby quickly lowering the operating temperature of the dry pump to a safe temperature range; when the dry pump is in a safe state between the condensing state and the high-temperature state, the flow rate of the cooling water is adjusted to adjust the operating temperature of the dry pump to the target operating temperature value, and hot or cold nitrogen gas is purged into the pump chamber of the dry pump according to the temperature adjustment speed requirements, thereby realizing a temperature control and dust purging method for the dry pump that relies mainly on cooling water and supplemented by cold / hot nitrogen gas. In the process of using a dry pump, the method of adjusting the flow rate of cooling water and nitrogen gas in cooperation is as follows: Step S1: setting a target operating temperature and a condensation temperature, the target operating temperature being greater than the upper limit of a temperature range with a high dust generation rate and less than the upper limit of a safe operating temperature of the dry pump, the condensation temperature being greater than the upper limit of a temperature range where condensation is likely to occur and less than the target operating temperature, and initializing the flow rate of cooling water; Step S2: detecting the temperature of the internal region of the pump chamber of the dry pump in real time and acquiring the maximum temperature region and the minimum temperature region of the internal region of the pump chamber of the dry pump; Determine the condition of the dry pump, Step S3: if the temperature of the lowest temperature region is equal to or lower than the condensation temperature, it is determined that the dry pump is in a condensation state; if the difference between the upper limit of the safe operating temperature and the temperature of the highest temperature region is smaller than a set safe difference, it is determined that the dry pump is in a high temperature state close to critical; otherwise, it is determined that the dry pump is in a safe state; The amount of cooling required to reduce the temperature is obtained based on the difference between the temperature in the maximum temperature region and the target operating temperature. When the dry pump is in a condensing state, the flow rate of the cooling water is reduced according to the cooling amount required to lower the temperature, the cold / hot type of nitrogen gas is set as hot nitrogen gas, and hot nitrogen gas is purged into the pump chamber of the dry pump to increase the internal temperature of the pump chamber of the dry pump; When the dry pump is in a high temperature state close to the critical point, the flow rate of the cooling water is increased to the maximum, the nitrogen gas cooling type is set to cold nitrogen gas, and cold nitrogen gas is transported into the pump chamber of the dry pump to purge, thereby quickly lowering the operating temperature of the dry pump to a safe temperature range. and step S4, when the dry pump is in a safe state, adjusting the flow rate of the cooling water according to the amount of cooling required to lower the temperature, setting the cold / hot type of nitrogen gas as cold nitrogen gas or hot nitrogen gas, and transporting cold nitrogen gas or hot nitrogen gas into the pump chamber of the dry pump to purge dust.

2. When the dry pump is in a condensing state, the flow rate of the hot nitrogen gas is set as the maximum flow rate of the working nitrogen gas of the dry pump, or the flow rate of the hot nitrogen gas is set according to the difference between the condensing temperature and the lowest temperature range; When the dry pump is in a high temperature state close to the critical point, the flow rate of the cold nitrogen gas is set as the maximum flow rate of the dry pump's operating nitrogen gas allowable range; The method for adjusting the coordinated flow rates of cooling water and nitrogen gas used in a dry pump according to claim 1, characterized in that when the dry pump is in a safe state, the flow rate of cold nitrogen gas or hot nitrogen gas is set as the flow rate of nitrogen gas required for purging dust.

3. The method for adjusting the coordinated flow rates of cooling water and nitrogen gas used in a dry pump as described in claim 2, characterized in that the flow rate of hot nitrogen gas when the dry pump is in a condensing state is greater than the flow rate of cold nitrogen gas or hot nitrogen gas when the dry pump is in a safe state, and the flow rate of cold nitrogen gas when the dry pump is in a high temperature state close to criticality is greater than the flow rate of cold nitrogen gas or hot nitrogen gas when the dry pump is in a safe state.

4. When the dry pump is in a safe state, according to the requirements for temperature adjustment speed, the setting method for the cold and hot type of nitrogen gas is as follows: A first solution is to set an early warning value, and when the maximum temperature range is equal to or greater than the early warning value, set the cold type of nitrogen gas as cold nitrogen gas, and when the maximum temperature range is less than the early warning value, set the cold type of nitrogen gas as hot nitrogen gas; and A method for adjusting the coordinated flow rates of cooling water and nitrogen gas used in a dry pump as described in claim 1, characterized in that one of the following solutions is adopted: a first solution for setting cold or hot nitrogen gas as hot nitrogen gas; and a second solution for setting cold or hot nitrogen gas as hot nitrogen gas.

5. The method for adjusting the coordinated flow rates of cooling water and nitrogen gas used in a dry pump described in any one of claims 1 to 4, characterized in that in step S2, the method for detecting the temperature of the internal region of the pump chamber of the dry pump in real time is to detect it in real time using one or more contact temperature sensing modules attached to the pump body of the dry pump, or to detect it in real time by obtaining a thermal image distribution map using a non-contact infrared thermography device.

6. A method for adjusting the coordinated flow rates of cooling water and nitrogen gas used in a dry pump as described in claim 1, characterized in that a high dust generation rate temperature zone of the working gas sucked into the dry pump is obtained according to the type and concentration of the working gas sucked into the dry pump, and a target operating temperature value is set, thereby bringing the operating temperature of the dry pump into a non-high dust generation rate temperature zone and reducing the generation of dust in the pump chamber of the dry pump, and a condensation temperature is set according to the type and concentration of the working gas sucked into the dry pump.

7. 2. The method for adjusting the coordinated flow rates of cooling water and nitrogen gas used in a dry pump according to claim 1, wherein a heating branch pipeline and a cooling branch pipeline are connected in parallel to the nitrogen gas transport pipeline, and a switch module is used to connect the nitrogen gas transport pipeline and the heating branch pipeline to heat the nitrogen gas and obtain hot nitrogen gas, or to connect the nitrogen gas transport pipeline and the cooling branch pipeline to lower the temperature of the nitrogen gas and obtain cold nitrogen gas.

8. 8. The method for adjusting the flow rates of cooling water and nitrogen gas in cooperation with each other in a dry pump according to claim 7, wherein the heating branch pipe heats the nitrogen gas by an electric heating device.

9. 8. The method for adjusting the flow rates of cooling water and nitrogen gas in cooperation with each other used in a dry pump according to claim 7, wherein the cooling branch pipe lowers the temperature of the nitrogen gas with cooling water.

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