Laser inspection device and laser inspection method

Abstract

To radiate a two-dimensional laser beam parallel to a longer direction of a tubular member, which is a test object.SOLUTION: A laser inspection device includes: a two-dimensional laser displacement sensor that extends along an axial direction of a tubular member and emits a two-dimensional laser beam perpendicular to the axial direction of the tubular member when inserted into the tubular member; a first mirror that reflects the two-dimensional laser beam emitted from the two-dimensional laser displacement sensor so that it travels in the axial direction of the tubular member; and a second mirror that reflects the two-dimensional laser light reflected by the first mirror so that it travels radially outward of the tubular member in the same plane.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a laser inspection device and a laser inspection method. [Background technology]

[0002] As disclosed in Patent Document 1, an ultrasonic inspection device is used for inspections such as measuring the wall thickness of tubular members of boilers and detecting internal flaws, etc. In Patent Document 1, an ultrasonic inspection device is inserted into the tubular member, and ultrasonic waves are irradiated onto the tubular member from the ultrasonic inspection device to inspect the tubular member. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2001-004603 Summary of the Invention [Problem to be solved by the invention]

[0004] The inventor has developed a laser inspection device equipped with a two-dimensional laser displacement sensor that inspects the inner peripheral surface of a tubular member by irradiating the inner peripheral surface with planar two-dimensional laser light instead of ultrasonic waves. In such a laser inspection device, it is desirable to irradiate the tubular member to be inspected with two-dimensional laser light parallel to the longitudinal direction of the tubular member.

[0005] However, it was difficult to position the two-dimensional laser displacement sensor in the laser inspection device inserted inside the tubular member so that it would emit two-dimensional laser light parallel to the longitudinal direction of the tubular member, which posed a problem in that it was difficult to irradiate the tubular member to be inspected with two-dimensional laser light parallel to the longitudinal direction of the tubular member. Other objects and novel features will become apparent from the description of this specification and the accompanying drawings. [Means for solving the problem]

[0006] A laser inspection device according to an embodiment includes: When inserted into the tubular member, a two-dimensional laser displacement sensor extending along the axial direction of the tubular member and emitting two-dimensional laser light perpendicular to the axial direction of the tubular member; a first mirror that reflects the two-dimensional laser light emitted from the two-dimensional laser displacement sensor so that the two-dimensional laser light travels in the axial direction of the tubular member; and a second mirror that reflects the two-dimensional laser light reflected by the first mirror so that the light travels radially outward of the tubular member within the same plane.

[0007] A laser inspection method according to an embodiment includes: a first mirror reflecting two-dimensional laser light emitted from the two-dimensional laser displacement sensor and perpendicular to the axial direction of the tubular member so as to travel in the axial direction of the tubular member; The two-dimensional laser light reflected by the first mirror is reflected by a second mirror so as to travel radially outward of the tubular member within the same plane. [Effects of the Invention]

[0008] According to the embodiment, it is possible to provide a laser inspection device capable of irradiating a two-dimensional laser beam parallel to the longitudinal direction of a tubular member to be inspected. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 2 is a side view schematically showing how the inside of a tubular member is inspected using the laser inspection device according to the first embodiment. [Figure 2] 1 is a perspective view schematically showing a laser inspection device according to a first embodiment. [Figure 3] FIG. 1 is a front view schematically showing a laser inspection device according to a first embodiment. [Figure 4] FIG. 1 is a side view schematically showing a laser inspection device according to a first embodiment. [Figure 5] FIG. 1 is a side view schematically showing a laser inspection device according to a first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Specific embodiments will be described in detail below with reference to the drawings. However, the present invention is not limited to the following embodiments. In addition, the following description and drawings have been simplified appropriately for clarity.

[0011] (First embodiment) An example of the configuration of a laser inspection device according to the first embodiment will be described with reference to Figs. 1 to 5. Fig. 1 is a side view schematically showing how the inside of a tubular member is inspected using the laser inspection device according to the first embodiment. Fig. 2 is a perspective view schematically showing the laser inspection device according to the first embodiment. Fig. 3 is a front view schematically showing the laser inspection device according to the first embodiment. Fig. 4 is a side view schematically showing the laser inspection device according to the first embodiment. Fig. 5 is a side view schematically showing the laser inspection device according to the first embodiment.

[0012] The right-handed xyz Cartesian coordinate system shown in Figure 1 and other drawings is for the convenience of explaining the positional relationships of the components. Normally, the positive z-axis direction is vertically upward, and the xy plane is the horizontal plane, which is common among the drawings.

[0013] <Outline of inspection using laser inspection equipment> First, an overview of inspection using the laser inspection device 10 according to this embodiment will be described with reference to FIG. 1. FIG. 1 schematically illustrates how the inside of a tubular member is inspected using the laser inspection device 10 according to this embodiment, and shows a cross-sectional view of the tubular member to be inspected. The tubular member shown in FIG. 1 has a tubular body that is the main body, and a cross-hole that communicates with the inside of the body. Note that the cross-hole is not essential. The tubular member shown in FIG. 1 is not particularly limited, but may be, for example, a reaction vessel for producing low-density polyethylene.

[0014] As shown in Fig. 1, a laser inspection device 10 is inserted into the body of a tubular member. The laser inspection device 10 irradiates the inner circumferential surface of the body with planar two-dimensional laser light LB to inspect the inner circumferential surface of the body and the shape of the end of the cross hole, etc. Therefore, the laser inspection device 10 can detect surface scratches formed on the inner circumferential surface of the body of the tubular member or the end of the cross hole, for example.

[0015] As will be described in detail later, in Fig. 1, the laser inspection device 10 can irradiate the inner peripheral surface of the body with two-dimensional laser light LB while rotating along the inner peripheral surface of the tubular member. The laser inspection device 10 is also lifted, for example, by a crane (not shown), and can move up and down (in the z-axis direction). With this configuration, the laser inspection device 10 can be used to inspect the entire inner peripheral surface of the body of the tubular member.

[0016] In addition, in FIG. 1, the laser inspection device 10 may be turned upside down and inserted into the body of the tubular member. In the following, the "inner surface of the body of the tubular member" shown in Figure 1 will be simply referred to as the "inner surface of the tubular member", and the "axial direction of the body of the tubular member" will be simply referred to as the "axial direction of the tubular member", etc.

[0017] <Configuration of laser inspection equipment> Next, the configuration of the laser inspection device 10 according to this embodiment will be described with reference to Figures 1 to 5. As shown in Figures 1 to 5, the laser inspection device 10 according to this embodiment includes a main body 11, an upper rotation mechanism 12, and a lower rotation mechanism 13.

[0018] <Configuration of main body 11> First, the main body 11 will be described. As shown in FIGS. 2 to 5, the main body 11 includes a top plate TP1, a bottom plate BP1, a two-dimensional laser displacement sensor LDS, a sensor holder SH, mirrors M1 and M2, mirror support members MS1 and MS2, a camera CM, and a camera holder CH.

[0019] As shown in, for example, FIGS. 1 and 3, when the two-dimensional laser displacement sensor LDS is inserted into the inside of a tubular member, it extends along the axial direction (z-axis direction) of the tubular member. As shown in Fig. 3, the two-dimensional laser displacement sensor LDS has a laser emission unit LE at its top and a light receiving unit LR at its bottom. Two-dimensional laser light LB perpendicular to the axial direction (z-axis direction) of the tubular member is emitted from the laser emission unit LE of the two-dimensional laser displacement sensor LDS toward the radially inner side of the tubular member (y-axis negative direction). The two-dimensional laser light LB emitted from the two-dimensional laser displacement sensor LDS is planar light parallel to the xy plane, expanding in width in the x-axis direction and traveling in the y-axis negative direction.

[0020] For example, as shown in Fig. 2, two-dimensional laser light LB is emitted from the two-dimensional laser displacement sensor LDS so as to travel while widening its width, is reflected by mirrors M1 and M2 in this order, and is irradiated onto the inner circumferential surface of the tubular member shown in Fig. 1. By irradiating the two-dimensional laser light LB via mirrors M1 and M2, the optical path length increases, and therefore the width of the two-dimensional laser light LB irradiated onto the inner circumferential surface of the tubular member can be widened.

[0021] On the other hand, although not shown, the laser light reflected on the inner surface of the tubular member is reflected by mirrors M2 and M1 in this order and is received by the light receiving portion LR of the two-dimensional laser displacement sensor LDS shown in FIG. As shown in FIG. 5, a sensor cable C1 for transmitting and receiving signals is connected to the two-dimensional laser displacement sensor LDS.

[0022] The two-dimensional laser displacement sensor LDS may be positioned in any way as long as it extends along the axial direction (z-axis direction) of the tubular member when inserted inside the tubular member and emits two-dimensional laser light LB perpendicular to the axial direction (z-axis direction) of the tubular member. In this embodiment, as shown in Figures 3 and 5, the two-dimensional laser displacement sensor LDS is supported by a sensor holder SH. The sensor holder SH is fixed to the lower surface (lower main surface) of the tabletop TP1. That is, the two-dimensional laser displacement sensor LDS is fixed to the tabletop TP1 via the sensor holder SH.

[0023] Here, the tabletop TP1 is, for example, a disk-shaped member. When the tabletop TP1 is inserted into a tubular member, the tabletop TP1 is positioned so that its main surface is perpendicular to the axial direction (z-axis direction) of the tubular member. That is, the two-dimensional laser light LB emitted from the two-dimensional laser displacement sensor LDS in the negative y-axis direction is parallel to the main surface of the tabletop TP1.

[0024] 2 and 3, the mirror (first mirror) M1 reflects the two-dimensional laser light LB emitted from the two-dimensional laser displacement sensor LDS so that it travels in the axial direction (z-axis direction) of the tubular member. That is, as shown in Fig. 3, the two-dimensional laser light LB traveling in the negative y-axis direction is incident on the mirror M1 at an incident angle of 45° when viewed from the x-axis direction and is reflected at a reflection angle of 45°. As shown in Fig. 2, the two-dimensional laser light LB reflected by the mirror M1 is planar light parallel to the xz plane traveling in the negative z-axis direction while increasing in width in the x-axis direction.

[0025] 2 and 3, the mirror M1 is supported by a mirror support member MS1. The mirror support member MS1 is fixed to the lower surface (lower main surface) of the tabletop TP1. That is, the mirror M1 is fixed to the lower surface of the tabletop TP1 via the mirror support member MS1. The mirror surface of the mirror M1 is inclined at 45° with respect to the main surface of the tabletop TP1, which is parallel to the x-axis, and is parallel to the x-axis. As the mirror M1, for example, an aluminum surface mirror that has excellent flatness and is less likely to produce ghosts can be used.

[0026] The mirror (second mirror) M2 reflects the two-dimensional laser light LB reflected by the mirror M1 so that the light travels radially outward from the tubular member within the same plane (xz plane), as shown in Figures 2 to 5. Therefore, as shown in Figure 3, when viewed from the x-axis direction, both the two-dimensional laser light LB reflected by the mirror M1 and the two-dimensional laser light LB reflected by the mirror M2 appear as straight lines extending in the z-axis direction.

[0027] The two-dimensional laser light LB reflected by mirror M1 and traveling in the negative direction of the z-axis is incident on mirror M2 at an incident angle of 45° when viewed from the y-axis direction, and is reflected at a reflection angle of 45°, as shown in Figures 4 and 5. The two-dimensional laser light LB reflected by mirror M2 is planar light parallel to the xz plane traveling in the positive direction of the x-axis while widening its width in the z-axis direction. Therefore, the inner surface of the tubular member to be inspected can be irradiated with two-dimensional laser light parallel to the longitudinal direction (z-axis direction) of the tubular member. As the mirror M2, an aluminum surface mirror that has excellent flatness and is less likely to produce ghosts, like the mirror M1, can be used.

[0028] 2 and 4, the mirror M2 is supported by a mirror support member MS2. The mirror support member MS2 is fixed to the upper surface (upper main surface) of the bottom plate BP1. That is, the mirror M2 is fixed to the bottom plate BP1 via the mirror support member MS2. The mirror surface of the mirror M2 is inclined at 45° with respect to the main surface of the bottom plate BP1, which is parallel to the xy plane, and is parallel to the y axis.

[0029] Here, the bottom plate BP1 is a disk-shaped member similar to the top plate TP1 and is provided parallel to the top plate TP1. The top plate TP1 and the bottom plate BP1 are fixed to each other by, for example, a support (not shown) extending along the axial direction (z-axis direction) of the tubular member. The top plate TP1 and the bottom plate BP1 form a housing that supports and houses the two-dimensional laser displacement sensor LDS and the mirrors M1 and M2.

[0030] The camera CM captures an image of the area on the inner surface of the tubular member irradiated with the two-dimensional laser light LB. The camera CM is positioned so as to capture an image from the gap between mirrors M1 and M2, as shown in Figures 2 and 4, for example. By providing the camera CM, in addition to laser inspection using the two-dimensional laser displacement sensor LDS, the status of the area irradiated with the two-dimensional laser light LB can be confirmed using the image captured by the camera CM. Note that the camera CM is not essential.

[0031] In this embodiment, as shown in Figures 4 and 5, the camera CM is supported by a camera holder CH. The camera holder CH is fixed to the lower surface (lower principal surface) of the tabletop TP1 on the negative x-axis side of the mirrors M1 and M2. That is, the camera CM is fixed to the tabletop TP1 via the camera holder CH. As shown in FIGS. 4 and 5, a camera cable C2 for transmitting and receiving signals is connected to the camera CM.

[0032] As described above, the laser inspection device 10 according to this embodiment includes a two-dimensional laser displacement sensor LDS that extends along the axial direction of the tubular member when inserted inside the tubular member. In the laser inspection device 10 according to this embodiment, two-dimensional laser light LB emitted from the two-dimensional laser displacement sensor LDS and perpendicular to the axial direction of the tubular member is reflected by a mirror M1 so as to travel in the axial direction of the tubular member. The two-dimensional laser light LB reflected by the mirror M1 is then reflected by a mirror M2 so as to travel radially outward of the tubular member within the same plane. With this configuration, the inner peripheral surface of the tubular member to be inspected can be irradiated with two-dimensional laser light parallel to the longitudinal direction of the tubular member.

[0033] 2, the two-dimensional laser light LB emitted from the two-dimensional laser displacement sensor LDS travels while widening in width. Therefore, by irradiating the two-dimensional laser light LB onto a tubular member via mirrors M1 and M2, the optical path length increases. As a result, the width (i.e., the inspection area) of the two-dimensional laser light LB irradiated onto the inner circumferential surface of the tubular member can be widened.

[0034] <Configuration of upper rotation mechanism 12> Next, the upper rotation mechanism 12 will be described. The upper rotation mechanism 12 is provided on the upper end side of the main body 11 and rotates the laser inspection device 10 in the circumferential direction of the tubular member when inserted inside the tubular member. The upper rotation mechanism 12 allows the laser inspection device 10 to rotate in the circumferential direction of the tubular member while irradiating the two-dimensional laser light LB onto the inner circumferential surface of the tubular member.

[0035] As shown in Figures 2 to 5, the upper rotation mechanism 12 includes a top plate TP2, a bottom plate BP2, a support SC, upper wheels UW11, UW12, UW21, UW22, wheel holders WH11, WH12, a motor MT, a motor gear MG, transmission gears TG1, TG2, axle gears WG1, WG2, omniwheels OW1, OW2, and a linear motion mechanism LM1.

[0036] The upper wheels UW11 and UW12 are drive wheels that are provided so as to be able to come into contact with the inner circumferential surface of the tubular member when inserted inside the tubular member. The axles of the upper wheels UW11 and UW12 are parallel to the axial direction (z-axis direction) of the tubular member, and both ends of the axles are rotatably supported by wheel holders WH11. Although not shown, the wheel holder WH11 is fixed to the top plate TP2. In other words, the upper wheels UW11 and UW12 are fixed to the top plate TP2 via the wheel holders WH11.

[0037] Here, the top plate TP2 is, for example, a disk-shaped member, similar to the top plate TP1. When the top plate TP2 is inserted into the inside of the tubular member, the main surface is positioned so as to be perpendicular to the axial direction (z-axis direction) of the tubular member. Additionally, omni-wheels OW1 and OW2 that can move in any direction are provided on the periphery of the tabletop TP2. More specifically, omni-wheels OW1 and OW2 are provided on both ends of the tabletop TP2 in the y-axis direction.

[0038] On the other hand, the bottom plate BP2 is a rectangular plate-shaped member and is provided parallel to the top plate TP2. The bottom plate BP2 is fixed onto the top plate TP1 of the main body 11. The top plate TP2 and the bottom plate BP2 are fixed to each other by four support columns SC extending along the axial direction (z-axis direction) of the tubular member. Naturally, the number of support columns SC is determined appropriately.

[0039] The upper wheels UW11 and UW12 are driven by a motor MT. That is, the motor MT is a drive source that drives the upper wheels UW11 and UW12. For example, as shown in Figures 4 and 5, when the motor MT is inserted into the tubular member, it extends in the radial direction of the tubular member. A motor gear MG is fixed to the rotating shaft of the motor MT, and rotates as the rotating shaft of the motor MT rotates.

[0040] 2 and 3, the motor gear MG meshes with the transmission gear TG1, and a transmission gear TG2 is fixed to the rotation shaft of the transmission gear TG1. The transmission gear TG2 meshes with the axle gears WG1 and WG2. Therefore, the rotation of the motor gear MG is transmitted to the axle gears WG1 and WG2 via the transmission gears TG1 and TG2. The axle gear WG1 is fixed to the upper end of the axle of the upper wheel UW11. Similarly, the axle gear WG2 is fixed to the upper end of the axle of the upper wheel UW12.

[0041] In this way, the rotation of the motor gear MG fixed to the rotation shaft of the motor MT is transmitted via transmission gears TG1 and TG2 to the axle gears WG1 and WG2 fixed to the axles of the upper wheels UW11 and UW12. With this configuration, the upper wheels UW11 and UW12 are rotated by the motor MT.

[0042] The upper wheels UW21 and UW22 are non-driven wheels that are slidable in the radial direction (x-axis direction) of the tubular member when inserted inside the tubular member. The axles of the upper wheels UW21 and UW22 are parallel to the axial direction (z-axis direction) of the tubular member, and both ends of the axles are rotatably supported by wheel holders WH12.

[0043] When inserted into the tubular member, the upper wheels UW11 and UW12 are provided at one radial end (x-axis positive end) of the tubular member. In contrast, the upper wheels UW21 and UW22 are provided at the other radial end (x-axis negative end) of the tubular member. In other words, the upper wheels UW21 and UW22 are arranged opposite the upper wheels UW11 and UW12 across the axis of the tubular member.

[0044] The upper wheels UW21 and UW22 can slide in the radial direction (x-axis direction) of the tubular member by a linear motion mechanism LM1 such as a cylinder. For example, as shown in Figures 4 and 5, the linear motion mechanism LM1 is fixed to the top plate TP2 so that when inserted into the tubular member, it extends in the radial direction (x-axis direction) of the tubular member. A wheel holder WH12 is fixed to the tip (end on the negative x-axis side) of the linear motion mechanism LM1.

[0045] When the laser inspection device 10 rotates in the circumferential direction of the tubular member, the upper wheels UW21 and UW22 move radially outward (toward the negative x-axis direction) of the tubular member and are pressed against the inner circumferential surface of the tubular member. At that time, the upper wheels UW11 and UW12 are also pressed against the inner circumferential surface of the tubular member. In this state, when the upper wheels UW11 and UW12 are driven by the motor MT, the upper wheels UW11, UW12, UW21, and UW22 run in the circumferential direction on the inner circumferential surface of the tubular member. As a result, the laser inspection device 10 rotates in the circumferential direction of the tubular member.

[0046] On the other hand, when the laser inspection device 10 moves in the axial direction (z-axis direction) of the tubular member, the upper wheels UW21 and UW22 move radially inward (x-axis positive direction) of the tubular member so as not to come into contact with the inner circumferential surface of the tubular member. Here, if the upper wheels UW21 and UW22 do not come into contact with the inner circumferential surface of the tubular member, the upper wheels UW11 and UW12 also do not come into contact with the inner circumferential surface of the tubular member. Therefore, the laser inspection device 10 can move in the axial direction (z-axis direction) of the tubular member.

[0047] In the illustrated example, two drive wheels (upper wheels UW11, UW12) are provided, but the number of drive wheels may be one or three or more. The upper wheels UW11, UW12, which are drive wheels, may also be slidable in the radial direction (x-axis direction) of the tubular member, similar to the upper wheels UW21, UW22. In the illustrated example, two non-drive wheels (upper wheels UW21, UW22) are provided, but the number of non-drive wheels may be one, or three or more. Furthermore, the upper wheels UW21, UW22 may be drive wheels.

[0048] <Configuration of lower rotation mechanism 13> Next, the lower rotation mechanism 13 will be described. The lower rotation mechanism 13 is provided on the lower end side of the main body 11 . As shown in FIGS. 2 to 5, the lower rotation mechanism 13 includes lower wheels LW11, LW12, LW21, and LW22, a wheel holder WH2, and a linear motion mechanism LM2.

[0049] The lower wheels LW11, LW12 are non-drive wheels that are provided so as to be able to come into contact with the inner circumferential surface of the tubular member when inserted inside the tubular member. The axles of the lower wheels LW11, LW12 are parallel to the axial direction (z-axis direction) of the tubular member, and the upper ends of the axles are rotatably supported on the bottom plate BP1 of the main body 11.

[0050] The lower wheels LW21, LW22 are non-driven wheels that are slidable in the radial direction (x-axis direction) of the tubular member when inserted inside the tubular member. The axles of the lower wheels LW21, LW22 are parallel to the axial direction (z-axis direction) of the tubular member, and both ends of the axles are rotatably supported by wheel holders WH2.

[0051] When inserted into the tubular member, the lower wheels LW11 and LW12 are provided at one radial end (x-axis positive end) of the tubular member. In contrast, the lower wheels LW21 and LW22 are provided at the other radial end (x-axis negative end) of the tubular member. In other words, the lower wheels LW21 and LW22 are disposed opposite the lower wheels LW11 and LW12 across the axis of the tubular member.

[0052] The lower wheels LW21, LW22 can slide in the radial direction (x-axis direction) of the tubular member by a linear motion mechanism LM2 such as a cylinder. For example, as shown in Figures 2, 4, and 5, the linear motion mechanism LM2 is fixed to the bottom plate BP1 of the main body 11 so that when inserted into the tubular member, it extends in the radial direction (x-axis direction) of the tubular member. A wheel holder WH2 is fixed to the tip (x-axis negative side end) of the linear motion mechanism LM2.

[0053] When the laser inspection device 10 rotates in the circumferential direction of the tubular member, the lower wheels LW21 and LW22 move radially outward (toward the negative x-axis direction) of the tubular member and are pressed against the inner circumferential surface of the tubular member. At that time, the lower wheels LW11 and LW12 are also pressed against the inner circumferential surface of the tubular member. In this state, when the upper wheels UW11 and UW12 of the upper rotation mechanism 12 are driven by the motor MT, the lower wheels LW11, LW12, LW21, and LW22 run in the circumferential direction on the inner circumferential surface of the tubular member. As a result, the laser inspection device 10 rotates in the circumferential direction of the tubular member.

[0054] On the other hand, when the laser inspection device 10 moves in the axial direction (z-axis direction) of the tubular member, the lower wheels LW21, LW22 move radially inward (x-axis positive direction) of the tubular member so as not to come into contact with the inner circumferential surface of the tubular member. Here, if the lower wheels LW21, LW22 do not come into contact with the inner circumferential surface of the tubular member, the lower wheels LW11, LW12 also do not come into contact with the inner circumferential surface of the tubular member. Therefore, the laser inspection device 10 can move in the axial direction (z-axis direction) of the tubular member.

[0055] In the illustrated example, four wheels (lower wheels LW11, LW12, LW21, LW22) are provided, but the number of wheels can be determined appropriately. In addition, the lower wheels LW11 and LW12 or the lower wheels LW21 and LW22 may be drive wheels, or all of the lower wheels LW11, LW12, LW21 and LW22 may be drive wheels. Similarly to the lower wheels LW21 and LW22, the lower wheels LW11 and LW12 may also be able to slide in the radial direction (x-axis direction) of the tubular member.

[0056] The invention made by the inventor has been specifically described above based on the embodiments, but it goes without saying that the present invention is not limited to the embodiments already described, and various modifications are possible within the scope of the gist of the invention. [Explanation of symbols]

[0057] 10 Laser inspection equipment 11 Main body 12 Upper rotation mechanism 13 Lower rotation mechanism BP1, BP2 bottom plate C1 Sensor Cable C2 Camera Cable CH Camera Holder Commercial camera LB two-dimensional laser light LDS 2D Laser Displacement Sensor LE Laser emission part LM1, LM2 linear motion mechanism LR receiver LW11, LW12, LW21, LW22 lower wheels M1, M2 mirrors MG Motor Gear MS1, MS2 mirror support members MT motor OW1, OW2 Omniwheel SC strut SH Sensor Holder TG1, TG2 transmission gear TP1, TP2 top plate UW11, UW12, UW21, UW22 upper wheels WG1, WG2 axle gear WH11, WH12, WH2 Wheel Holder

Claims

1. A laser inspection device that is inserted into a tubular member and inspects an inner circumferential surface of the tubular member by irradiating the tubular member with a laser beam, When the entire laser inspection device is inserted into the tubular member, a two-dimensional laser displacement sensor extending along the axial direction of the tubular member and emitting two-dimensional laser light perpendicular to the axial direction of the tubular member; a first mirror that reflects the two-dimensional laser light emitted from the two-dimensional laser displacement sensor so that the two-dimensional laser light travels in the axial direction of the tubular member; a second mirror that reflects the two-dimensional laser light reflected by the first mirror so that the two-dimensional laser light travels radially outward of the tubular member within the same plane; the first mirror is disposed adjacent to the two-dimensional laser displacement sensor on a traveling direction side of the two-dimensional laser light emitted from the two-dimensional laser displacement sensor, the second mirror is disposed adjacent to the first mirror on a traveling direction side of the two-dimensional laser light incident from the two-dimensional laser displacement sensor and reflected by the first mirror, the two-dimensional laser light reflected by the inner circumferential surface of the tubular member is reflected by the second mirror and the first mirror in this order, and is received by the two-dimensional laser displacement sensor; Laser inspection equipment.

2. the two-dimensional laser light is emitted from the two-dimensional laser displacement sensor so as to travel while widening its width; The laser inspection device according to claim 1 .

3. a camera configured to capture an image of a portion of the inner surface of the tubular member irradiated with the two-dimensional laser light; 3. The laser inspection device according to claim 1 or 2.

4. the camera is positioned to capture an image from a gap between the first mirror and the second mirror; 4. The laser inspection device according to claim 3.

5. When inserted into the tubular member, a rotation mechanism that is provided on one end side of the tubular member in the axial direction and rotates the laser inspection device in the circumferential direction of the tubular member; the rotating mechanism rotates the tubular member in a circumferential direction of the tubular member while irradiating the inner circumferential surface of the tubular member with the two-dimensional laser light; The laser inspection device according to claim 1 .

6. The rotation mechanism includes: a drive wheel having an axle parallel to the axial direction of the tubular member and capable of contacting the inner circumferential surface of the tubular member; a drive source that drives the drive wheels; a wheel whose axle is parallel to the axial direction of the tubular member and is disposed opposite the drive wheel across the axis of the tubular member; 6. The laser inspection device according to claim 5.

7. The rotation mechanism includes: The vehicle further includes a linear motion mechanism that slides the wheels in the radial direction of the tubular member.

7. The laser inspection device according to claim 6.

8. The vehicle includes a plurality of at least one of the drive wheels and the wheels, 8. The laser inspection device according to claim 6 or 7.

9. (a) inserting the entire laser inspection device into a tubular member; (b) irradiating a laser beam from the laser inspection device to inspect the inner circumferential surface of the tubular member, The laser inspection device a two-dimensional laser displacement sensor extending along the axial direction of the tubular member; first and second mirrors; In step (b), a first mirror reflecting two-dimensional laser light emitted from the two-dimensional laser displacement sensor and perpendicular to the axial direction of the tubular member so as to travel in the axial direction of the tubular member; The two-dimensional laser light reflected by the first mirror is reflected by the second mirror so as to travel radially outward of the tubular member within the same plane; the first mirror is disposed adjacent to the two-dimensional laser displacement sensor on a traveling direction side of the two-dimensional laser light emitted from the two-dimensional laser displacement sensor, the second mirror is disposed adjacent to the first mirror on a traveling direction side of the two-dimensional laser light incident from the two-dimensional laser displacement sensor and reflected by the first mirror, the two-dimensional laser light reflected by the inner circumferential surface of the tubular member is reflected by the second mirror and the first mirror in this order, and is received by the two-dimensional laser displacement sensor; Laser inspection method.

10. the two-dimensional laser light is emitted from the two-dimensional laser displacement sensor so as to travel while widening its width; The laser inspection method according to claim 9.

11. In step (b), the laser inspection device a camera configured to capture an image of a portion of the inner surface of the tubular member irradiated with the two-dimensional laser light; The laser inspection method according to claim 9 or 10.

12. the camera is positioned to capture an image from a gap between the first mirror and the second mirror; The laser inspection method according to claim 11.

13. In step (b), the laser inspection device a rotation mechanism that is provided on one end side of the tubular member in the axial direction and rotates the laser inspection device in the circumferential direction of the tubular member; the rotating mechanism rotates the tubular member in a circumferential direction of the tubular member while irradiating the inner circumferential surface of the tubular member with the two-dimensional laser light; The laser inspection method according to claim 9.

14. The rotation mechanism includes: a drive wheel having an axle parallel to the axial direction of the tubular member and capable of contacting the inner circumferential surface of the tubular member; a drive source that drives the drive wheels; a wheel whose axle is parallel to the axial direction of the tubular member and is disposed opposite the drive wheel across the axis of the tubular member; The laser inspection method according to claim 13.

15. The rotation mechanism includes: The vehicle further includes a linear motion mechanism that slides the wheels in the radial direction of the tubular member. The laser inspection method according to claim 14.

16. The vehicle includes a plurality of at least one of the drive wheels and the wheels, 16. The laser inspection method according to claim 14 or 15.

Images