Cutting device and product manufacturing method

Abstract

To provide a cutting device and a product manufacturing method capable of producing multiple products from which dirt has been removed while reducing the amount of cleaning fluid used to clean both sides of multiple cut products and the amount of air used to dry them.SOLUTION: A cutting device (100) includes a first cleaning and drying mechanism (110) having a first spinner table (111) that can suction-hold and rotate first surfaces (301) of a plurality of cut pieces (300), and a second cleaning and drying mechanism (133) having a second spinner table (114) that can suction-hold and rotate second surfaces (302) of the plurality of cut pieces (300).SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] TECHNICAL FIELD The present disclosure relates to cutting devices and methods for manufacturing products. [Background technology]

[0002] For example, Patent Document 1 discloses an apparatus for producing a plurality of products from which dirt such as cutting chips has been removed, by a cutting device cutting a material to be cut and a cleaning device spraying cleaning water onto the resulting plurality of cut pieces to clean them, and then the cleaning device sprays air onto the plurality of cut pieces to dry them. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-68294 Summary of the Invention [Problem to be solved by the invention]

[0004] The device described in Patent Document 1 can also sufficiently clean and dry both sides of a plurality of cut products, making it possible to manufacture a plurality of products from which dirt has been removed. However, in recent years, there has been a growing demand for manufacturing a plurality of products from which dirt has been removed while reducing the amount of cleaning fluid used to clean both sides of a plurality of cut products and the amount of air used to dry them. [Means for solving the problem]

[0005] According to the embodiment disclosed herein, a cutting device can be provided which includes a processing table on which an object to be cut can be placed, a cutting mechanism capable of cutting the object placed on the processing table into a plurality of cut pieces, a first cleaning and drying mechanism having a first spinner table which can suction-hold a first surface of the plurality of cut pieces and can rotate, and which can clean and dry a second surface opposite to the first surface of the plurality of cut pieces, a second cleaning and drying mechanism having a second spinner table which can suction-hold a second surface of the plurality of cut pieces and can rotate, and which can clean and dry the first surface of the plurality of cut pieces, a first conveying mechanism which can receive the plurality of cut pieces from the processing table and deliver the plurality of cut pieces to the first spinner table, a second conveying mechanism which can receive the plurality of cut pieces from the first spinner table, and a third conveying mechanism which can receive the plurality of cut pieces from the second conveying mechanism and deliver the plurality of cut pieces to the second spinner table.

[0006] According to the embodiment disclosed herein, a method for manufacturing a product can be provided, including the steps of placing an object to be cut on a processing table, cutting the object on the processing table to produce a plurality of cut products, a step of a first conveying mechanism receiving the plurality of cut products from the processing table and transferring them to a first spinner table, a step of the first spinner table rotating while suction-holding first sides of the plurality of cut products, a step of cleaning second sides opposite the first sides of the plurality of cut products while the first spinner table is rotating and then drying them, a step of a second conveying mechanism receiving the plurality of cut products from the first spinner table after drying the second sides of the plurality of cut products, a step of the second conveying mechanism inverting the plurality of cut products while holding the second sides of the plurality of cut products, a step of a third conveying mechanism receiving the plurality of cut products from the second conveying mechanism after the inverting step and transferring them to the second spinner table, a step of the second spinner table rotating while suction-holding the second sides of the plurality of cut products, and a step of obtaining a plurality of products by cleaning and drying the first sides of the plurality of cut products while the second spinner table is rotating. [Effects of the Invention]

[0007] According to the embodiments disclosed herein, it is possible to provide a cutting device and a method for manufacturing products that can produce multiple products from which dirt has been removed while reducing the amount of cleaning fluid used to clean both sides of the multiple cut products and the amount of air used to dry them. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram illustrating a schematic configuration of an example of a cutting device according to an embodiment. [Figure 2] 2 is a schematic perspective view of an example of a first cleaning and drying mechanism or an example of a second cleaning and drying mechanism shown in FIG. 1. FIG. [Figure 3] FIG. 3 is a schematic cross-sectional view of an example of the first and second spinner tables shown in FIG. 2. [Figure 4] 4 is a schematic partial plan view of an example of first and second suction and holding members of the first and second spinner tables shown in FIG. 3. FIG. [Figure 5] 3A to 3C are schematic cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. [Figure 6] 3A to 3C are schematic partial cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. [Figure 7] 3A to 3C are schematic partial cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. [Figure 8] 3A to 3C are schematic cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. [Figure 9] 3A to 3C are schematic cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. [Figure 10] 3A to 3C are schematic cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. [Figure 11] 3A to 3C are schematic cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. [Figure 12] 3A to 3C are schematic cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. [Figure 13] 3A to 3C are schematic cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. [Figure 14] 3A to 3C are schematic cross-sectional views illustrating some of the steps of an example of a method for manufacturing a product according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments will be described. In the drawings used to describe the embodiments, the same reference numerals denote the same or corresponding parts.

[0010] <Cutting device> Fig. 1 shows a schematic configuration of an example of a cutting device according to an embodiment. The cutting device 100 according to the embodiment shown in Fig. 1 includes a magazine module A, a cut engine module B, a cleaning and drying module C, and an off-load module D. In the cutting device 100 according to the embodiment, the magazine module A and the cut engine module B are adjacent to each other, the cut engine module B and the cleaning and drying module C are adjacent to each other, and the cleaning and drying module C and the off-load module D are adjacent to each other.

[0011] <Magazine module A> The magazine module A includes a magazine 101 that can store, for example, multiple cutting objects (not shown) in a vertical position, and a pusher (not shown) that can push the cutting objects from the magazine 101 onto a strip rail 102 of the cut engine module B. The cutting object can be, for example, a package substrate that includes a support member and a sealing resin that seals at least a portion of the support member. The support member is, for example, a member that supports a semiconductor chip or thin film, etc., and includes a lead frame, a substrate, an interposer, a semiconductor substrate (such as a Si wafer), a metal substrate, a glass substrate, a ceramic substrate, a resin substrate, or a circuit board, and may or may not be wired. The sealing resin is a resin that seals at least one surface of the semiconductor chip or thin film, etc., supported by the support member. While this embodiment describes a case where a semiconductor package substrate is used as the cutting object, the cutting object is not limited to the semiconductor package substrate.

[0012] <Cut Engine Module B> The cut engine module B includes a strip rail 102 capable of receiving the workpiece from the magazine module A, a transport mechanism 103 such as a strip loader capable of transporting the workpiece on the strip rail 102 to a processing table 105, a processing table 105 on which the workpiece can be placed, and a cutting mechanism 109 capable of cutting the workpiece fixed to the processing table 105 into a plurality of cut pieces (not shown). In this embodiment, a configuration will be described in which the cutting device 100 includes two processing tables 105 and two cutting mechanisms 109, but the cutting device 100 may include one processing table 105 and one cutting mechanism 109, or three or more of each. The cut engine module B further includes a cleaning fluid injection nozzle 108 capable of injecting a cleaning fluid to clean the upper surfaces of the plurality of cut products after cutting by the cutting mechanism 109, an air injection nozzle 104 capable of injecting air to dry the upper surfaces of the plurality of cut products after cleaning, and a first transport mechanism 106 such as a package unloader capable of receiving the plurality of dried cut products from the processing table 105 and delivering the plurality of cut products to the first spinner table 111. The transport mechanism 103 is capable of reciprocating between the strip rail 102 and the processing table 105 on a moving shaft 129 along the X axis. The processing table 105 is capable of reciprocating on a moving shaft 130 along the Y axis. The cutting mechanism 109 is capable of reciprocating on a moving shaft 131 along the X axis. The first transport mechanism 106 is capable of reciprocating between the processing table 105 and the first spinner table 111 on a moving shaft 132 along the X axis. As will be described later, in the cleaning and drying module C, the upper surfaces of the multiple cut products are cleaned and dried by the first cleaning and drying mechanism 110, so the cleaning fluid spray nozzle 108 and the air spray nozzle 104 do not necessarily have to be provided.

[0013] <Cleaning and Drying Module C> The cleaning and drying module C includes a first cleaning and drying mechanism 110 having a first spinner table 111, a second cleaning and drying mechanism 133 having a second spinner table 114, a second conveying mechanism 112 capable of receiving multiple cut products from the first spinner table 111, a third conveying mechanism 115 capable of receiving multiple cut products from the second conveying mechanism 112 and transferring them to the second spinner table 114, a first inspection mechanism 117 capable of inspecting the undersides of multiple products obtained by cleaning and drying the multiple cut products using the second cleaning and drying mechanism 133 from below, a second inspection mechanism 120 capable of inspecting the top surfaces of the multiple products from above, a fourth conveying mechanism 118 capable of transporting multiple products to the first inspection mechanism 117, a fifth conveying mechanism 121 capable of transporting multiple products to the second inspection mechanism 120, and an air injection nozzle 116 capable of spraying air onto the undersides of multiple products obtained by cleaning and drying the multiple cut products using the second cleaning and drying mechanism 133 to dry them. In this specification, the term "cut product" refers to a semi-finished product obtained after the cutting mechanism 109 has cut the object fixed on the processing table 105 and before the second cleaning and drying mechanism 133 has cleaned and dried the cut product. The term "product" refers to a final product obtained after the second cleaning and drying mechanism 133 has cleaned and dried the cut product.

[0014] The first spinner table 111 is capable of suction-holding and rotating the undersides of the multiple cut products. The first cleaning and drying mechanism 110 is capable of cleaning and drying the upper surfaces of the multiple cut products. The second spinner table 114 is capable of suction-holding and rotating the lower surfaces of the multiple cut products. The second cleaning and drying mechanism 133 is capable of cleaning and drying the upper surfaces of the multiple cut products. The second transport mechanism 112 is equipped with an inversion mechanism 113 and is capable of inverting the multiple cut products so that the upper and lower surfaces are interchanged.

[0015] The second transport mechanism 112 is capable of reciprocating between the first spinner table 111 and the second spinner table 114 on a movement axis 134 along the Y axis. Furthermore, the second transport mechanism 112 is capable of reciprocating on a movement axis (not shown) along the Z axis extending vertically, i.e., it is capable of vertical movement. The third transport mechanism 115 is capable of reciprocating on a movement axis (not shown) along the Z axis extending vertically, i.e., it is capable of vertical movement. The fourth transport mechanism 118 is capable of reciprocating on a movement axis 135 along the X axis between the second spinner table 114 and the first area 119. Furthermore, the fourth transport mechanism 118 is capable of reciprocating on a movement axis (not shown) along the Z axis extending vertically, i.e., it is capable of vertical movement. The fifth transport mechanism 121 is capable of reciprocating on a movement axis 136 along the Y axis between the first area 119 and the second area 122. The first inspection mechanism 117 is located on the movement axis 135 of the fourth transport mechanism 118. The first inspection mechanism 117 is movable in the Y-axis direction. The second inspection mechanism 120 is located on the movement axis 136 of the fifth conveying mechanism 121. The second inspection mechanism 120 is movable in the X-axis direction. The fourth conveying mechanism 118 is capable of receiving multiple products from the third conveying mechanism 115 above the second spinner table 114 and delivering multiple products to the fifth conveying mechanism 121 in the first area 119. The fifth conveying mechanism 121 is capable of receiving multiple products from the fourth conveying mechanism 118 in the first area 119 and delivering multiple products to the sixth conveying mechanism 138 in the second area 122.

[0016] In the cutting device 100 of this embodiment, the movement axis 132 of the first conveyor mechanism 106 is perpendicular to the movement axis 134 of the second conveyor mechanism 112. The movement axis 134 of the second conveyor mechanism 112 is perpendicular to the movement axis of the third conveyor mechanism 115 extending in the Z-axis direction and perpendicular to the movement axis 135 of the fourth conveyor mechanism 118. The movement axis 135 of the fourth conveyor mechanism 118 is perpendicular to the movement axis of the third conveyor mechanism 115 extending in the Z-axis direction and perpendicular to the movement axis 136 of the fifth conveyor mechanism 121. The movement axis 136 of the fifth conveyor mechanism 121 is perpendicular to the movement axis 137 of the sixth conveyor mechanism 138. Furthermore, the movement axis 132 of the first conveyor mechanism 106, the movement axis 135 of the fourth conveyor mechanism 118, and the movement axis 137 of the sixth conveyor mechanism 138 are parallel to each other. The movement axis 134 of the second conveyor mechanism 112 and the movement axis 136 of the fifth conveyor mechanism 121 are parallel to each other. Therefore, in the cleaning and drying module C of the cutting device 100 of the embodiment, the first cleaning and drying mechanism 110, the second cleaning and drying mechanism 133, the first inspection mechanism 117, the first area 119, the second inspection mechanism 120, and the second area 122 are arranged in a U-shape, but this configuration is not limited to this. For example, the first cleaning and drying mechanism 110, the second cleaning and drying mechanism 133, the first inspection mechanism 117, the first area 119, the second inspection mechanism 120, and the second area 122 may be arranged linearly (i.e., the movement axis 132 of the first conveyor mechanism 106, the movement axis 134 of the second conveyor mechanism 112, the movement axis 135 of the fourth conveyor mechanism 118, and the movement axis 136 of the fifth conveyor mechanism 121 are parallel to each other). When the first cleaning and drying mechanism 110, the second cleaning and drying mechanism 133, the first inspection mechanism 117, the first area 119, the second inspection mechanism 120 and the second area 122 are arranged in a U-shape, as in the cutting device 100 of the embodiment, the overall length of the cutting device 100 can be shortened.

[0017] <Off-load Module D> The offload module D includes a sixth conveying mechanism 138 such as a loader that can receive multiple products from the fifth conveying mechanism 121 in the second area 122 and transfer the multiple products to the index table 123, an index table 123 that can receive multiple products from the sixth conveying mechanism 138, a conveying mechanism 124 such as a pick-and-place device that can receive some of the multiple products from the index table 123, a first tray 125 such as a good product tray that can receive multiple products from the conveying mechanism 124, a second tray 126 such as a defective product tray, and a third tray 128 such as an empty tray that is supplied to the first tray 125 or the second tray 126.

[0018] <Configuration of the first cleaning and drying mechanism and the second cleaning and drying mechanism> Fig. 2 is a schematic perspective view of an example of the first and second cleaning and drying mechanisms 110, 133 shown in Fig. 1. As shown in Fig. 2, the first and second cleaning and drying mechanisms 110, 133 include a cleaning fluid splash prevention cover 203 that surrounds the periphery of the first and second spinner tables 111, 114, a cleaning fluid injection nozzle 202 that can inject cleaning fluid onto the upper surfaces of the multiple cut products on the first and second spinner tables 111, 114, and an air injection nozzle 201 that can inject air onto the upper surfaces of the multiple cut products on the first and second spinner tables 111, 114.

[0019] <Configuration of the first and second spinner tables> Fig. 3 is a schematic cross-sectional view of an example of the first and second spinner tables 111, 114 shown in Fig. 2. As shown in Fig. 3, the first and second spinner tables 111, 114 are equipped with first and second suction-holding members 303, 403 that can suck and hold the undersides of multiple cut products, and first and second support members 309, 409 that can support the first and second suction-holding members 303, 403. The first and second suction-holding members 303, 403 are provided with first and second through-holes 307, 407 for sucking the multiple cut products. Note that the first suction-holding member 303 and the second suction-holding member 403 differ in that they suck and hold the opposite surfaces of the multiple cut products, as will be described later.

[0020] The first and second suction and holding members 303, 403 may be made of rubber, for example. By making the first and second suction and holding members 303, 403 out of rubber, the suction force of the first and second spinner tables 111, 114 to hold the multiple cut products can be improved.

[0021] Fig. 4 is a schematic partial plan view of an example of the first and second suction and hold members 303, 403 of the first and second spinner tables 111, 114 shown in Fig. 3. As shown in Fig. 4, the first and second suction and hold members 303, 403 include a plurality of combinations of first and second through holes 307, 407, each having a circular or rectangular planar shape, and first and second frame portions 305, 405, each having a rectangular planar shape that surrounds the periphery of the first and second through holes 307, 407. The first and second suction and hold members 303, 403 are configured such that the combinations of the first and second through holes 307, 407 and the first and second frame portions 305, 405 are arranged vertically and horizontally (in the X-axis direction and the Y-axis direction). One first and second through hole 307, 407 is formed corresponding to each of the plurality of cut products. With this configuration, the first and second spinner tables 111 and 114 can suction-hold the undersides of the multiple cut products so as to contact the peripheral regions of the undersides of the multiple cut products without contacting the area inside the peripheral regions of the undersides of the multiple cut products, as described below. Furthermore, the first and second through-holes 307 and 407 have a smaller diameter at the bottom and a larger diameter at the top. In this embodiment (FIG. 4), the combination of the first and second through-holes 307 and 407 and the first and second frame portions 305 and 405 has a rectangular shape at the top and a circular shape at the bottom. With this configuration, the multiple cut products can be held on the first and second spinner tables 111 and 114 with greater suction force.

[0022] 3, recesses 310, 410 communicating with the first and second through-holes 307, 407 are formed in the upper surfaces of the first and second support members 309, 409, and the recesses 310, 410 are connected to through-holes 320, 420 formed in the centers of the lower surfaces of the first and second support members 309, 409. The through-holes 320, 420 are connected to a vacuum pump (not shown) via a suction path.

[0023] In the cutting device 100 of this embodiment, the other mechanisms for adsorbing and holding multiple cut products, namely the processing table 105, the conveying mechanism 103, the first conveying mechanism 106, the second conveying mechanism 112, the third conveying mechanism 115, the fourth conveying mechanism 118, the fifth conveying mechanism 121 and the sixth conveying mechanism 138, have substantially the same configuration as the first and second spinner tables 111 and 114.

[0024] <Product manufacturing method> An example of a method for manufacturing a product of the embodiment using the cutting device 100 of the embodiment shown in Fig. 1 will be described below. First, a pusher (not shown) pushes out an object placed in a magazine 101 of a magazine module A shown in Fig. 1 onto a strip rail 102 of a cut engine module B. Next, a conveying mechanism 103 receives the object from the strip rail 102, conveys the object to a processing table 105, and hands it over to the processing table 105. Thereafter, the processing table 105 suction-holds the object.

[0025] 5 is a schematic cross-sectional view showing an example of a state in which the processing table 105 suction-holds the underside 701 of the workpiece 700. As shown in FIG. 5, the processing table 105 includes a processing-table suction-holding member 703 that can suction-hold the underside 701 of the workpiece 700 by suction through a through-hole 707, and a processing-table support member 709 that can support the processing-table suction-holding member 703. In this embodiment, the workpiece 700 is held on the processing table 105 with the terminals 311 facing upward. Note that the terminals 311 are shown for ease of explanation and are not necessarily provided on the workpiece 700.

[0026] Next, the processing table 105, which suction-holds the workpiece 700, moves along the Y-axis on the movement axis 130 shown in Fig. 1 to a position adjacent to the cutting mechanism 109. Next, the cutting mechanism 109 moves along the X-axis on the movement axis 131 to above the workpiece 700 on the processing table 105. Next, the cutting mechanism 109 cuts the workpiece 700 suction-held on the processing table 105 to produce a plurality of cut products.

[0027] Next, the processing table 105 holding the multiple cut pieces by suction moves along the Y-axis on the movement axis 130 shown in FIG. 1, and moves below the cleaning fluid spray nozzle 108, as shown in the schematic partial cross-sectional view of FIG. 6. Next, the cleaning fluid spray nozzle 108 sprays cleaning fluid onto the upper surfaces of the multiple cut pieces 300 (the second surfaces 302 having the terminals 311 in FIG. 6), thereby cleaning the upper surfaces of the multiple cut pieces 300. Thereafter, the cleaning fluid spray nozzle 108 stops spraying the cleaning fluid. Next, the air spray nozzle 104 shown in the schematic partial cross-sectional view of FIG. 7 sprays air onto the upper surfaces of the multiple cut pieces 300 (the second surfaces 302 in FIG. 7), thereby drying the upper surfaces of the multiple cut pieces 300 after cleaning. Thereafter, the air spray nozzle 104 stops spraying air. Next, the processing table 105, which has adsorbed and held the multiple cut products 300, moves along the Y axis on the movement axis 130 shown in Figure 1 to its original position (a position on the movement axis 132 of the first conveying mechanism 106 shown in Figure 1).

[0028] Next, the first transport mechanism 106 moves along the X-axis on the movement axis 132 shown in FIG. 1 to above the multiple cut pieces 300 suction-held on the processing table 105. Next, as shown in the schematic cross-sectional view of FIG. 8, the first transport mechanism 106 moves downward and receives the multiple cut pieces 300 all at once from the processing table 105. At this time, in order to transfer the multiple cut pieces 300 to the first transport mechanism 106, the processing table 105 releases the suction path to the atmosphere or breaks the suction, thereby facilitating the processing table 105 releasing the suction of the multiple cut pieces 300. Meanwhile, in order to receive the multiple cut pieces 300 from the processing table 105, the first transport mechanism 106 suction-holds the upper surfaces (second surfaces 302 in FIG. 8) of the multiple cut pieces 300 by sucking them through the suction path. Next, the first transport mechanism 106 moves upward while suction-holding the upper surfaces of the multiple cut pieces 300. The description of the delivery and receipt of the plurality of cut pieces 300 and the finished product 3000 (see FIGS. 11 to 14) described below is the same as above, and will be omitted hereafter.

[0029] Next, the first transport mechanism 106 moves along the X-axis on the movement axis 132 shown in FIG. 1 toward the first spinner table 111 while suction-holding the upper surfaces of the plurality of cut products 300.

[0030] Next, the first transport mechanism 106 moves to above the first spinner table 111 and transfers the plurality of cut products 300 all at once to the first spinner table 111. Fig. 9 shows a schematic cross-sectional view of an example of a state in which the plurality of cut products 300 are placed on the first spinner table 111. At this time, the first spinner table 111 suction-holds the lower surfaces (first surfaces 301 in Fig. 9) of the plurality of cut products 300 on the first suction-holding member 303.

[0031] At this time, it is preferable that the first suction holding member 303 of the first spinner table 111 suction-holds the first surfaces 301 of the cut products 300 so as to contact the peripheral regions 301b of the first surfaces 301 of the cut products 300 without contacting the inner regions 301a of the surfaces (first surfaces 301 in FIG. 9) of the cut products 300. In this case, it is possible to further prevent dirt from adhering to the inner regions 3001a, 3002a (see FIGS. 11 to 14) of the products 3000 described below. In this specification, the "peripheral region" refers to the peripheral region of the surfaces of the cut products or the products that are to be sucked, and the "inner region" refers to the region inside the "peripheral region" of the cut products or the products. After transferring multiple cut pieces 300 to the first spinner table 111 in one go, the first conveying mechanism 106 moves along the X-axis on the moving axis 132 shown in Figure 1 to its original position (a position above the processing table 105 on the moving axis 132 of the conveying mechanism 106 shown in Figure 1).

[0032] Next, the first cleaning and drying mechanism 110 cleans and then dries the upper surfaces (second surfaces 302 in FIG. 9) of the plurality of cut products 300. Cleaning and drying of the upper surfaces of the plurality of cut products 300 by the first cleaning and drying mechanism 110 can be performed, for example, as follows.

[0033] First, a plurality of cut pieces 300 are placed on the first spinner table 111 shown in Fig. 2. Next, the cleaning fluid splash prevention cover 203 is raised in the direction of arrow 204 in Fig. 2 so that the upper end of the cleaning fluid splash prevention cover 203 is positioned above the upper surfaces of the plurality of cut pieces 300. This makes it possible to prevent the cleaning fluid from splashing outside the first cleaning and drying mechanism 110 while the first cleaning and drying mechanism 110 is cleaning and drying the upper surfaces of the plurality of cut pieces 300.

[0034] Next, cleaning fluid injection nozzle 202 rotates in the direction of arrow 205 inside cleaning fluid splash prevention cover 203 so as to be positioned above the upper surfaces of multiple cut pieces 300, and first spinner table 111 begins to rotate. At this time, it is desirable for the rotation speed to be such that the force with which first suction holding member 301 of first spinner table 111 suctions and holds the lower surfaces of multiple cut pieces 300 is greater than the centrifugal force applied to multiple cut pieces 300 suction-held on first spinner table 111.

[0035] Next, while the first spinner table 111 is rotating, cleaning fluid is sprayed from the cleaning fluid spray nozzle 202 to clean the upper surfaces of the plurality of cut products 300. At this time, the cleaning fluid spray nozzle 202 can spray the cleaning fluid while appropriately swinging in the direction of arrow 205. This improves the cleaning power for the upper surfaces of the plurality of cut products 300. A two-fluid nozzle can also be used as the cleaning fluid spray nozzle 202. In this case, the cleaning power for the upper surfaces of the plurality of cut products 300 can also be improved. Thereafter, spraying of the cleaning fluid from the cleaning fluid spray nozzle 202 is stopped. Thereafter, the cleaning fluid spray nozzle 202 retracts from above the upper surfaces of the plurality of cut products 300 along the arrow 205 in FIG. 2 .

[0036] Next, while continuing to rotate the first spinner table 111, the air injection nozzle 201 is rotated inside the cleaning fluid splash prevention cover 203 in the direction of arrow 206 so that it is positioned above the upper surfaces of the plurality of cut pieces 300. Air is injected from the air injection nozzle 201 to dry the upper surfaces of the plurality of cut pieces 300. At this time, the air injection nozzle 201 can inject air while appropriately swinging in the direction of arrow 206. This promotes drying of the upper surfaces of the plurality of cut pieces 300. The temperature of the air injected from the air injection nozzle 201 is preferably set to a temperature that suppresses quality deterioration of the plurality of cut pieces 300 due to heating and promotes drying of the upper surfaces of the plurality of cut pieces 300. Thereafter, the injection of air from the air injection nozzle 201 is stopped. Next, the rotation of the first spinner table 111 is stopped. Even after the air injection nozzle 201 stops injecting air, the drying of the upper surfaces of the plurality of cut pieces 300 can be promoted by continuing to rotate the first spinner table 111. Thereafter, the air injection nozzle 201 retreats from above the upper surfaces of the plurality of cut products 300 along the arrow 206 in FIG.

[0037] Next, the cleaning fluid splash prevention cover 203 is lowered in the downward direction of the arrow 204 so that the upper end of the cleaning fluid splash prevention cover 203 is positioned below the upper surfaces of the plurality of cut products 300. This makes it easier for the second transport mechanism 112, which will be described later, to receive the plurality of cut products 300 from the first spinner table 111.

[0038] The cleaning fluid injection nozzle 202 and the air injection nozzle 201 may be attached to the cleaning fluid splash prevention cover 203, which can be raised and lowered as described above, so that they can be raised and lowered, or they may be configured to be able to be raised and lowered independently of the cleaning fluid splash prevention cover 203 without being attached to the cleaning fluid splash prevention cover 203.

[0039] Next, as shown in the schematic cross-sectional view of Figure 8, the second conveying mechanism 112 moves above the first spinner table 111 and then moves downward to receive the plurality of cut products 300 all at once from the first spinner table 111. At this time, the first spinner table 111 stops suction, while the second conveying mechanism 112 sucks and holds the upper surfaces (second surfaces 302 in Figure 8) of the plurality of cut products 300 by suction through a suction path in order to receive the plurality of cut products 300 from the first spinner table 111. Unless otherwise specified, the transfer of the plurality of cut products 300 or the plurality of products 3000 all at once is performed by stopping suction of the conveying mechanism on the transferring side and starting suction on the receiving side.

[0040] Next, the second conveyance mechanism 112, which suction-holds the second surfaces 302 of the plurality of cut products 300, moves on the movement axis 134 shown in FIG. 1 along the Y-axis toward the second spinner table 114. While the second conveyance mechanism 112 is conveying the plurality of cut products 300, the reversing mechanism 113 shown in FIG. 1 reverses the plurality of cut products 300 while suction-holding them, swapping their upper and lower surfaces, as shown in the schematic cross-sectional view of FIG. 10. As a result, the first surfaces 301 of the plurality of cut products 300 become the upper surfaces, and the second surfaces 302 of the plurality of cut products 300 become the lower surfaces. Thereafter, the second conveyance mechanism 112, which suction-holds the lower surfaces (the second surfaces 302 in FIG. 10) of the plurality of cut products 300, moves on the movement axis 134 shown in FIG. 1 along the Y-axis to above the second spinner table 114.

[0041] Next, as shown in the schematic cross-sectional view of FIG. 11 , the third conveyance mechanism 115, which was located further above the second spinner table 114, moves downward toward the second conveyance mechanism 112. Next, as shown in the schematic cross-sectional view of FIG. 12 , the third conveyance mechanism 115 receives the plurality of cut products 300 all at once from the second conveyance mechanism 112. At this time, the third conveyance mechanism 115 suction-holds the upper surfaces (first surfaces 301 in FIG. 12 ) of the plurality of cut products 300. After delivering the plurality of cut products 300 to the third conveyance mechanism 115, the second conveyance mechanism 112 moves along the Y-axis on the moving shaft 134 shown in FIG. 1 to its original position (a position between the first spinner table 111 and the second spinner table 114 shown in FIG. 1 ), turns over the cut products 300 using the turning-over mechanism 113, and waits for the delivery of the next plurality of cut products 300.

[0042] Next, the third transport mechanism 115 located above the second spinner table 114 transfers the plurality of cut products 300 to the second spinner table 114 all at once. FIG. 10 is a schematic cross-sectional view showing an example of a state in which the plurality of cut products 300 are placed on the second spinner table 114. The second spinner table 114 suction-holds the surfaces of the plurality of cut products 300 that are to be sucked (second surfaces 302 in FIG. 10). At this time, it is preferable that the second spinner table 114 suction-holds the second surfaces 302 of the plurality of cut products 300 so that the second suction-holding member 403 of the second spinner table 114 contacts the peripheral regions 302b of the second surfaces 302 of the plurality of cut products 300 without contacting the inner regions 302a of the second surfaces 302 of the plurality of cut products 300. After delivering the plurality of cut products 300 to the second spinner table 114, the third transport mechanism 115 moves on the movement axis along the Z axis to its original position (a position above the second spinner table 114).

[0043] Next, the second cleaning and drying mechanism 133 cleans and dries the upper surfaces (first surfaces 301 in FIG. 10) of the plurality of cut products 300, thereby obtaining a plurality of products 3000. The cleaning and drying of the upper surfaces of the plurality of cut products 300 by the second cleaning and drying mechanism 133 can be performed in the same manner as the first cleaning and drying mechanism 110.

[0044] <Subsequent process> After the second cleaning and drying mechanism 133 has finished cleaning and drying the upper surfaces of the plurality of cut products 300, the following process is carried out. First, the fourth conveying mechanism 118 moves along the X-axis on the moving shaft 135 shown in FIG. 1 to above the second spinner table 114. Next, as shown in the schematic cross-sectional view of FIG. 12, the fourth conveying mechanism 118 receives the plurality of products 3000 all at once from the second spinner table 114. At this time, the fourth conveying mechanism 118 suction-holds the upper surfaces of the plurality of products 3000 (first surfaces 3001 in FIG. 12).

[0045] Next, the fourth conveying mechanism 118, while holding the upper surfaces of the multiple products 3000 by suction, moves along the X-axis on the moving shaft 135 shown in FIG. 1 toward the first area 119. At this time, as the fourth conveying mechanism 118 passes above the air injection nozzle 116, the air injection nozzle 116 injects air onto the lower surfaces (second surfaces 3002 in FIG. 12) of the multiple products 3000. This makes it possible to completely remove any cleaning fluid remaining on the second surfaces 3002 of the multiple products 3000, thereby preventing the cleaning fluid from being carried over to subsequent processes.

[0046] Next, as shown in the schematic partial cross-sectional view of Fig. 13, the fourth conveying mechanism 118 is disposed above the first inspection mechanism 117, with the fourth conveying mechanism 118 suction-holding the upper surfaces (first surfaces 3001 in Fig. 13) of the multiple products 3000. Here, the first inspection mechanism 117 inspects the lower surfaces (second surfaces 3002 in Fig. 13) of the multiple products 3000 suction-held by the fourth conveying mechanism 118 from below.

[0047] After the inspection by the first inspection mechanism 117 is completed, the multiple products 3000 are transported to the first area 119 by the fourth transport mechanism 118, and in the first area 119, as shown in the schematic cross-sectional view of Figure 11, the fourth transport mechanism 118 delivers the multiple products 3000 all at once to the fifth transport mechanism 121. At this time, the fifth transport mechanism 121 suction-holds the bottom surfaces (second surfaces 3002 in Figure 11) of the multiple products 3000.

[0048] Next, the fifth conveying mechanism 121 moves along the Y-axis on the movement axis 136 shown in Fig. 1 toward the second area 122. At this time, the fifth conveying mechanism 121 is disposed below the second inspection mechanism 120, as shown in the schematic partial cross-sectional view of Fig. 14. Here, the second inspection mechanism 120 inspects the top surfaces (first surfaces 3001 in Fig. 14) of the multiple products 3000 sucked and held by the fifth conveying mechanism 121 from above.

[0049] After the inspection by the second inspection mechanism 120 is completed, the plurality of products 3000 are transported to the second area 122 by the fifth transport mechanism 121, and in the second area 122, as shown in the schematic cross-sectional view of Fig. 12, the fifth transport mechanism 121 transfers the plurality of products 3000 together to the sixth transport mechanism 138. At this time, the sixth transport mechanism 138 suction-holds the upper surfaces (first surfaces 3001 in Fig. 12) of the plurality of products 3000.

[0050] Thereafter, the sixth conveying mechanism 138 transfers the plurality of products 3000 together along the X-axis on the moving shaft 137 shown in FIG. 1 to the index table 123 of the offload module D shown in FIG. 1. Some of the plurality of products 3000 transferred together to the index table 123 are picked up by the conveying mechanism 124. The plurality of products 3000 picked up by the conveying mechanism 124 are transferred to and stored in a first tray 125 such as a tray for good products or a second tray 126 such as a tray for defective products. This process of picking up the products by the conveying mechanism 124 and storing them in one of the trays 125, 126 is repeated until all of the plurality of products 3000 transferred to the index table 123 are gone.

[0051] <Action and effect> In the cutting device 100 of this embodiment, the first spinner table 111 of the first cleaning and drying mechanism 110 rotates while suction-holding the undersides (first surface 301 in FIG. 9 ) of the plurality of cut pieces 300, cleaning and drying the upper surfaces (second surface 302 in FIG. 9 ) of the plurality of cut pieces 300, and then the second spinner table 114 of the second cleaning and drying mechanism 133 rotates while suction-holding the undersides (second surface 302 in FIG. 10 ) of the plurality of cut pieces 300, cleaning the upper surfaces (first surface 301 in FIG. 10 ) of the plurality of cut pieces 300, and then drying them, thereby manufacturing a plurality of products 3000. This makes it possible to clean both surfaces of the plurality of cut pieces 300 while reducing the amount of cleaning fluid used when cleaning the plurality of cut pieces 300 and the amount of air used when drying the plurality of cut pieces 300. In experiments, it was confirmed that the amount of cleaning fluid required and the amount of air used during drying were reduced to about one-third in the cutting device 100 of this embodiment compared to the cleaning and drying in a conventional cutting device (a cutting device in which the air injection nozzle 104 and cleaning fluid injection nozzle 108 of the cutting device 100 of this embodiment are equipped to clean and dry both sides of multiple cut pieces, and the table on which the multiple cut pieces are fixed does not rotate during cleaning and drying). This is thought to be due to the cleaning and drying using centrifugal force of the cutting device 100 of this embodiment.

[0052] Furthermore, for the plurality of products 3000 obtained by cleaning and drying the inner regions 301a, 302a of the first and second surfaces 301, 302 of the plurality of cut products 300 without contacting components such as the processing table 105, the first and second spinner tables 111, 114, and the first to third transport mechanisms 106, 112, 115, adhesion of dirt to the inner regions 3001a, 3002a of the plurality of products 3000 can be further suppressed. In this case, re-adhesion of dirt from the processing table 105, the first and second spinner tables 111, 114, and the first to third transport mechanisms 106, 112, 115, etc. to the plurality of cut products 300 can also be suppressed. Furthermore, in this embodiment, since the cut products can be manufactured without using a brush, re-adhesion of dirt on the brush to the plurality of products 3000 can be suppressed.

[0053] <Additional Notes> (Disclosure 1) Disclosed aspect 1 is a cutting device including: a processing table on which a workpiece can be placed; a cutting mechanism capable of cutting the workpiece placed on the processing table into multiple cut pieces; a first cleaning and drying mechanism including a first spinner table capable of suction-holding and rotatably holding first sides of the multiple cut pieces and capable of cleaning and drying second sides opposite the first sides of the multiple cut pieces; a second cleaning and drying mechanism including a second spinner table capable of suction-holding and rotatably holding the second sides of the multiple cut pieces and capable of cleaning and drying the first sides of the multiple cut pieces; a first transport mechanism capable of receiving the multiple cut pieces from the processing table and transferring them to the first spinner table; a second transport mechanism capable of receiving the multiple cut pieces from the first spinner table; and a third transport mechanism capable of receiving the multiple cut pieces from the second transport mechanism and transferring them to the second spinner table. Disclosed aspect 1 makes it possible to produce multiple products from which dirt has been removed while reducing the amount of cleaning fluid used to wash both sides of the multiple cut pieces and the amount of air used to dry them.

[0054] (Disclosure Aspect 2) Disclosed aspect 2 is the cutting device according to disclosed aspect 1, wherein the first spinner table or the second spinner table is configured to contact the peripheral region of the surface of each of the plurality of cut pieces to be sucked, without contacting an area inside the peripheral region of the surface of each of the plurality of cut pieces to be sucked. According to disclosed aspect 2, even if one or both surfaces of the plurality of cut pieces have irregularities, the plurality of cut pieces can be appropriately held on the first spinner table or the second spinner table.

[0055] (Disclosure Aspect 3) Disclosed Aspect 3 is the cutting device according to Disclosed Aspect 1 or Disclosed Aspect 2, wherein the second conveying mechanism is reversible. Disclosed Aspect 3 makes it possible to easily wash and dry both surfaces of a plurality of cut products.

[0056] (Disclosure Aspect 4) Disclosed Aspect 4 is the cutting device according to any one of Disclosed Aspects 1 to 3, wherein the movement axis of the second transport mechanism and the movement axis of the third transport mechanism are perpendicular to each other. According to Disclosed Aspect 4, the overall length of the cutting device can be shortened.

[0057] (Disclosure Aspect 5) Disclosed Aspect 5 is the cutting device according to any one of Disclosed Aspects 1 to 4, wherein the movement axis of the first transport mechanism and the movement axis of the second transport mechanism are perpendicular to each other. According to Disclosed Aspect 4, the overall length of the cutting device can be shortened.

[0058] (Disclosure 6) Disclosed aspect 6 is the cutting device according to any one of disclosed aspects 1 to 5, further comprising a first inspection mechanism capable of inspecting second sides of the plurality of products obtained by cleaning and drying the plurality of cut products with the second cleaning and drying mechanism, and a second inspection mechanism capable of inspecting first sides of the plurality of products opposite to the second sides. Disclosed aspect 6 makes it possible to inspect both sides of the plurality of products.

[0059] (Disclosure Aspect 7) A seventh aspect of the disclosure is the cutting device according to the sixth aspect, further comprising a fourth conveying mechanism capable of conveying the plurality of products to the first inspection mechanism. According to the seventh aspect of the disclosure, it is possible to convey a plurality of products to the first inspection mechanism.

[0060] (Disclosure Aspect 8) Disclosed Example 8 is the cutting device according to Disclosed Example 7, wherein the fourth conveying mechanism is perpendicular to the movement axis of the second conveying mechanism and parallel to the movement axis of the first conveying mechanism. According to Disclosed Example 8, the overall length of the cutting device can be shortened.

[0061] (Disclosure Aspect 9) Disclosed aspect 9 is the cutting device according to disclosed aspect 7 or 8, further including a fifth conveying mechanism capable of conveying the plurality of products to the second inspection mechanism. According to disclosed aspect 9, it becomes possible to convey a plurality of products to the second inspection mechanism.

[0062] (Disclosure 10) Disclosed Example 10 is the cutting device according to Disclosed Example 9, wherein the movement axis of the fifth conveying mechanism is perpendicular to the movement axis of the fourth conveying mechanism and parallel to the movement axis of the second conveying mechanism. According to Disclosed Example 10, the overall length of the cutting device can be shortened.

[0063] (Disclosure 11) Disclosed aspect 11 is a method for manufacturing a cutting machine, comprising the steps of: placing an object to be cut on a processing table; cutting the object to be cut on the processing table to produce a plurality of cut products; a step of a first conveying mechanism receiving the plurality of cut products from the processing table and transferring them to a first spinner table; a step of the first spinner table rotating while suction-holding first surfaces of the plurality of cut products; a step of washing and then drying second surfaces of the plurality of cut products opposite to the first surfaces while the first spinner table is rotating; a step of receiving the plurality of cut pieces from the first spinner table, a step of having the second conveying mechanism turn over the plurality of cut pieces while holding the second sides thereof, a step of having the third conveying mechanism receive the plurality of cut pieces from the second conveying mechanism after the turning over step and transfer them to the second spinner table, a step of having the second spinner table rotate while holding the second sides thereof by suction, and a step of cleaning the first sides of the plurality of cut pieces while the second spinner table is rotating and then drying them to obtain products. According to the eleventh aspect of the disclosure, it is possible to produce a plurality of products from which dirt has been removed while reducing the amount of cleaning fluid used to clean both sides of the plurality of cut pieces and the amount of air used to dry them.

[0064] The embodiments and experimental examples disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims. [Industrial Applicability]

[0065] The cutting apparatus of this embodiment can be suitably used as a cutting apparatus in a post-process of semiconductor manufacturing, such as cutting packaged semiconductor substrates. [Explanation of symbols]

[0066] 101 magazine, 102 strip rail, 103 transport mechanism, 104 air injection nozzle, 105 processing table, 106 first transport mechanism, 108 cleaning fluid injection nozzle, 109 cutting mechanism, 110 first cleaning and drying mechanism, 111 first spinner table, 112 second transport mechanism, 113 reversing mechanism, 114 second spinner table, 115 third transport mechanism, 116 air injection nozzle, 117 first inspection mechanism, 118 fourth transport mechanism, 119 first area, 120 second inspection mechanism, 121 fifth transport mechanism, 122 second area, 123 index table, 124 transport mechanism, 125 first tray, 126 second tray, 128 third tray, 129, 130, 131, 132, 134, 135, 136, 137 moving axis, 133 second cleaning and drying mechanism, 138 Sixth conveying mechanism, 201 air injection nozzle, 202 cleaning fluid injection nozzle, 203 cleaning fluid splash prevention cover, 204, 205, 206 arrows, 300 multiple cut products, 301 first surface, 301a, 302a inner region, 301b, 302b peripheral region, 302 second surface, 303 first suction holding member, 305 first frame-shaped portion, 307 first through-hole, 309 first support member, 310 recess, 311 terminal, 320 through-hole, 403 second suction holding member, 405 second frame-shaped portion, 407 second through-hole, 409 second support member, 410 recess, 420 through-hole, 700 workpiece, 701 lower surface, 703 processing table suction holding member, 707 through-hole, 709 processing table support member, 3000 Multiple products, 3001 first surface, 3001a, 3002a inner areas, 3002 second surface.

Claims

1. a processing table on which an object to be cut can be placed; a cutting mechanism capable of cutting the object placed on the processing table into a plurality of cut pieces; a first cleaning and drying mechanism including a first spinner table capable of suction-holding and rotating first surfaces of the plurality of cut products, and capable of cleaning and drying second surfaces of the plurality of cut products opposite to the first surfaces; a second cleaning and drying mechanism including a second spinner table capable of suction-holding and rotating the second surfaces of the plurality of cut products, and capable of cleaning and drying the first surfaces of the plurality of cut products; a first conveying mechanism capable of receiving the plurality of cut products from the processing table and transferring the plurality of cut products to the first spinner table; a second conveying mechanism capable of receiving the plurality of cut products from the first spinner table; a third conveying mechanism capable of receiving the plurality of cut products from the second conveying mechanism and transferring the plurality of cut products to the second spinner table.

2. 2. The cutting device according to claim 1, wherein the first spinner table or the second spinner table is configured to contact the peripheral region of the surface of each of the plurality of cut pieces to be sucked in without contacting an area inside the peripheral region of the surface of each of the plurality of cut pieces to be sucked in when sucking and holding the plurality of cut pieces.

3. The cutting device according to claim 1 , wherein the second transport mechanism is reversible.

4. The cutting device according to claim 1 , wherein the movement axis of the second transport mechanism and the movement axis of the third transport mechanism are perpendicular to each other.

5. The cutting device according to claim 1 , wherein the movement axis of the first transport mechanism and the movement axis of the second transport mechanism are perpendicular to each other.

6. 2. The cutting device of claim 1, further comprising: a first inspection mechanism capable of inspecting second surfaces of the plurality of products obtained by cleaning and drying the plurality of cut products with the second cleaning and drying mechanism; and a second inspection mechanism capable of inspecting first surfaces of the plurality of products opposite the second surfaces.

7. The cutting device according to claim 6 , further comprising a fourth conveying mechanism capable of conveying the plurality of products to the first inspection mechanism.

8. The cutting device according to claim 7 , wherein the fourth transport mechanism has a movement axis that is perpendicular to the movement axis of the second transport mechanism and parallel to the movement axis of the first transport mechanism.

9. The cutting device according to claim 7 , further comprising a fifth conveying mechanism capable of conveying the plurality of products to the second inspection mechanism.

10. The cutting device according to claim 9 , wherein the movement axis of the fifth transport mechanism is perpendicular to the movement axis of the fourth transport mechanism and parallel to the movement axis of the second transport mechanism.

11. placing an object to be cut on a processing table; cutting the object on the processing table to produce a plurality of cut products; a step in which a first transport mechanism receives the plurality of cut products from the processing table and transfers them to a first spinner table; rotating the first spinner table while suction-holding first surfaces of the plurality of cut products; a step of cleaning and then drying a second surface of the plurality of cut products opposite to the first surface while the first spinner table is rotating; a second transfer mechanism receiving the plurality of cut pieces from the first spinner table after drying the second surfaces of the plurality of cut pieces; a step of the second conveying mechanism inverting the plurality of cut products while holding the second surfaces of the cut products; a step of receiving the plurality of cut products from the second conveying mechanism and transferring them to a second spinner table by a third conveying mechanism after the inverting step; rotating the second spinner table while suction-holding the second surfaces of the plurality of cut products; and washing the first surfaces of the plurality of cut products while the second spinner table is rotating, followed by drying the first surfaces to obtain a plurality of products.

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