Retaining structure and optical device

Abstract

To appropriately press an optical member to a holding member to hold the optical member.SOLUTION: An elastic member 50 generates energizing force for pressing an optical member 10 to a holding member 20 via a contact member by elastically deforming by a first deformation volume between a pressing member 40 and the contact member 30. The pressing member and the contact member each have attachment portions 41 and 31 to which a connecting member 60 for connecting the pressing member and the contact member is attached in a state where the elastic member is elastically deformed by a second deformation volume larger than the first deformation volume. The connecting member is removed from the attachment portion after the pressing member connected with the contact member by the connecting member is screwed in a predetermined screw-in position of the holding member so that the contact member is brought into contact with the optical member.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a structure for holding an optical member such as a lens in an optical device.

Background Art

[0002] An optical member may be held via an elastic member in order to prevent its breakage. Patent Document 1 discloses a structure in which an elastic member disposed between a pressing member and a holder is compressed by screw-fastening the pressing member and the holder, thereby pressing and holding the optical member against the holder. Patent Document 2 also discloses a structure in which a pressing ring is screwed onto a holder to compress an elastic member disposed between the holder and an inelastic member, and the optical member is pressed and held against the holder via the inelastic member.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the holding structure of Patent Document 1, since the pressing member disposed on the outer side in the radial direction of the optical member is fixed to the holder by bolts, the dimensions of the holding structure increase in the radial direction. On the other hand, in the holding structure of Patent Document 2, an increase in the dimensions in the radial direction can be suppressed. However, when the pressing ring is screwed onto the holder, the frictional force in the rotational direction of the pressing ring acts on the elastic member. As a result, the elastic member may deform in a direction different from the original compression direction (elastic deformation direction) for pressing the optical member against the holding member, and there is a possibility that the optical member cannot be properly pressed against the holding member.

[0005] The present invention allows an optical component to be appropriately pressed and held against a holding member by the biasing force generated by the elastic component, without deforming the elastic component in a direction different from its original elastic deformation direction. [Means for solving the problem]

[0006] One aspect of the present invention is a holding structure comprising an optical member, a holding member that holds the optical member, a contact member that abuts against the optical member, and a member that is screwed into the holding member to a predetermined screwing position. Circular The device comprises a pressing member and an elastic member that elastically deforms by a first amount of deformation between the pressing member and the contact member, thereby generating a biasing force that presses the optical member against the holding member via the contact member. The pressing member and the contact member are connected in a state where the elastic member is elastically deformed by a second amount of deformation greater than the first amount of deformation. multiple The connecting member , along the circumferential direction of the ring Can be installed multiple It has a mounting section. Each of the multiple connecting members is a bolt having a shaft portion and a threaded portion. One of the retaining member and the contact member has multiple holes through which the shaft portion passes, serving as multiple mounting parts, while the other has multiple threaded holes into which the threaded portion is screwed, also serving as multiple mounting parts. After the retaining member, which is connected to the contact member by the connecting member, is screwed into the holding member at a predetermined screw-in position multiple From the mounting part multiple The connecting member each The invention is characterized in that, upon removal, the contact member comes into contact with the optical member. Furthermore, an optical device having the above-described holding structure also constitutes another aspect of the present invention. [Effects of the Invention]

[0007] According to the present invention, the optical component can be appropriately pressed and held by the holding member. [Brief explanation of the drawing]

[0008] [Figure 1] A perspective view of the lens holding structure of Example 1. [Figure 2] A cross-sectional view showing the lens holding structure of Example 1 (in the process of assembly). [Figure 3] A cross-sectional view showing the lens holding structure of Example 1 (assembled state). [Figure 4]A cross-sectional view showing the lens holding structure of Example 2. [Figure 5] A diagram showing an exposure apparatus having the lens holding structure of Examples 1 and 2. [Modes for carrying out the invention]

[0009] Hereinafter, embodiments of the present invention will be described with reference to the drawings. [Examples]

[0010] Figure 3 shows a cross-section of the lens holding structure as a holding structure in Embodiment 1. The lens 10, as an optical element, is positioned inside the lens barrel 20, which acts as a holding member (holder). The lens barrel 20 supports the lens 10 by contacting the peripheral portion of the lower surface (one side) of the lens 10 at a first stepped portion 21 provided on its inner circumference. The lens 10 is positioned so that its optical axis O extends in the vertical direction of the figure.

[0011] A backing plate 30, acting as a contact member, is in contact with the peripheral portion of the upper surface (the other surface) of the lens 10. Compression coil springs 50, acting as elastic members, are arranged at multiple equally spaced locations on the upper surface of the backing plate 30 in the circumferential direction (the direction of screwing rotation of the retaining ring 40 relative to the lens barrel 20, which will be described later). Female threads are formed on the inner circumference of the lens barrel 20, and a retaining ring (retaining member) 40, which has male threads on its outer circumference, is rotated and screwed into the lens barrel 20 from above the compression coil springs 50 to a predetermined screwing position. The predetermined screwing position is determined when the retaining ring 40 comes into contact with a second step portion 22 provided on the inner circumference of the lens barrel 20. When the retaining ring 40 is screwed into the lens barrel 20 to the predetermined screwing position, the compression coil springs 50 elastically deform to a compressed state, and the biasing force generated by this elastic deformation presses the lens 10 against the first step portion 21 of the lens barrel 20 via the backing plate 30. In this way, the lens 10 is positioned and fixed inside the lens barrel 20. The amount of elastic deformation (compression) of the compression coil spring 50 in this assembled state is defined as the first deformation amount.

[0012] In a typical lens holding structure, the lens material and the holder material are different, resulting in a difference in the linear expansion coefficients of the lens and the holder. For example, when glass is used as the lens material and metal as the holder material, as the temperature of the lens holding structure rises, the thermal expansion of the holder becomes greater than that of the lens, increasing the gap between the lens and the holder. Conversely, as the temperature decreases, the gap between the lens and the holder decreases. This change in the gap between the lens and the holder can cause the lens to shift position. Furthermore, unintended stress may act on the lens, potentially causing it to deform. Since lens shifting and deformation can compromise optical performance, it is desirable to use an elastic member to press the lens against the holder so that the lens does not shift position even when the size of the gap changes, and so that unintended stress does not act on the lens. In this embodiment, the lens 10 is pressed against the lens barrel 20 by a biasing force generated by elastically deforming a plurality of compression coil springs 50 arranged in the circumferential direction into a compressed state.

[0013] To prevent the compression coil spring 50 from falling out from between the retaining ring 40 and the backing plate 30, recesses may be provided in the retaining ring 40 and the backing plate 30 where the compression coil spring 50 is positioned, into which the end of the compression coil spring 50 fits, or protrusions such as pins may be provided on the inside of the compression coil spring 50.

[0014] Next, a method for assembling the lens holding structure of this embodiment will be described. First, pre-assembly of the pressing ring 40, the contact plate 30, and a plurality of compression coil springs 50 before being incorporated into the lens barrel 20 is performed. FIGS. 1 and 2 show a unit (hereinafter referred to as a pre-assembled unit) 100 of the pressing ring 40, the contact plate 30, and a plurality of compression coil springs 50 in a state where the pre-assembly is completed. In the pre-assembled unit 100, the pressing ring 40 and the contact plate 30 with a plurality of compression coil springs 50 sandwiched therebetween are connected and fixed using a plurality of stepped bolts 60 in a state where the elastic deformation amount of the compression coil springs 50 is a second deformation amount larger than the first deformation amount (a state where the compression coil springs 50 are more compressed). The pressing ring 40 and the contact plate 30 connected and fixed by the stepped bolts 60, which are connecting members, cannot rotate relative to each other (in other words, they can rotate integrally), and the contact plate 30 cannot move away downward (in the optical axis direction) from the pressing ring 40.

[0015] The plurality of stepped bolts 60 are arranged at equal intervals in the circumferential direction so as not to overlap with the compression coil springs 50 in the circumferential direction. As shown in FIG. 2, the pressing ring 40 has a plurality of holes 41 through which the large-diameter shaft portions 61 of the plurality of stepped bolts 60 penetrate, formed at equal intervals in the circumferential direction. Further, the contact plate 30 has screw holes 31 formed with female threads that engage with male threads provided on the small-diameter threaded portions 62 of the stepped bolts 60, provided at a plurality of equal-interval positions in the circumferential direction. The holes 41 of the pressing ring 40 and the screw holes 31 of the contact plate 30 are respectively the attachment portions of the stepped bolts 60. The elastic deformation amount of the compression coil springs 50 is set according to the length of the large-diameter shaft portion of the stepped bolts 60.

[0016] As described above, in the pre-assembled unit 100, the compression amount (the second deformation amount), which is the elastic deformation amount of the compression coil spring 50, is larger than the compression amount (the first deformation amount) of the compression coil spring 50 in the fully assembled state of the entire lens holding structure. As shown in FIG. 2, for this pre-assembled unit 100, the entire pre-assembled unit 100 is rotated with respect to the lens barrel 20 in which the lens 10 is disposed inside, and the holding ring 40 is screwed into the above-described predetermined screwing position. In the intermediate assembly state where the screwing of the pre-assembled unit 100 is completed, the contact plate 30 is not in contact with the lens 10. Therefore, the rotational force generated by the screwing rotation of the holding ring 40 with respect to the lens barrel 20 does not act on the compression coil spring 50.

[0017] Conventionally, when the holding ring 40 is rotated in a state where the compression coil spring 50 is compressed and the contact plate 30 is pressed against the lens 10, the compression coil spring 50 receives a force in a rotational direction different from its compression direction and is deformed so as to be sheared in the same direction. As a result, the assumed biasing force of the compression coil spring 50 cannot be obtained.

[0018] In contrast, in this embodiment, since the compression coil spring 50 does not receive a force in a rotational direction different from its compression direction, the holding ring 40 can be screwed into the lens barrel 20 to the predetermined screwing position without deforming the compression coil spring 50 in the rotational direction.

[0019] When the stepped bolt 60 is removed as shown in FIG. 3 from the intermediate assembly state shown in FIG. 2, the pre-assembled unit 100 becomes the disconnection unit 200. In the disconnection unit 200, the contact plate 30 abuts against the lens 10 by the biasing force of the compression coil spring 50, and the lens 10 is pressed against the first step portion 21 of the lens barrel 20. Thereby, the lens holding structure becomes a fully assembled state. In the process of removing the stepped bolt 60, the holding ring 40 does not rotate, and a rotational force does not act on the compression coil spring 50. Therefore, the compression amount of the compression coil spring 50 becomes the first deformation amount, and the assumed biasing force acts on the lens 10 via the contact plate 30. Further, since a rotational force due to the screwing of the holding ring 40 does not act on the lens 10, deformation of the lens 10 can be prevented.

[0020] In the process of removing multiple stepped bolts 60, removing the stepped bolts 60 one by one would cause the backing plate 30 to tilt. Therefore, it is preferable to loosen the multiple stepped bolts 60 in stages sequentially, and remove all the stepped bolts 60 after the backing plate 30 has come into contact with the lens 10. In this case, it is preferable to loosen the stepped bolt 60 that is closest to the opposite position on the lens 10 from the loosened stepped bolt 60. When selecting the next stepped bolt 60 to loosen, it is preferable to prioritize selecting one that has been loosened fewer times than the other stepped bolts 60. Alternatively, multiple stepped bolts 60 may be loosened simultaneously.

[0021] The first deformation amount of the compression coil spring 50 that applies the intended biasing force to the lens 10 can be adjusted at a predetermined screw-in position of the retaining ring 40 relative to the lens barrel 20. It is desirable that the predetermined screw-in position be determined considering the external forces acting on the lens 10 during use and transportation of the device into which the lens holding structure is incorporated. Furthermore, if temperature changes occur in the lens holding structure, it is desirable that the position be determined in such a way that even if the amount of compression of the compression coil spring 50 changes due to a change in the size of the gap between the lens barrel 20 and the lens 10, the biasing force acting on the lens 10 will not be insufficient.

[0022] The compression coil spring 50 should preferably have a biasing force that does not change significantly even when the amount of compression changes greatly. For example, stainless steel coil springs are suitable because they are widely available in various sizes and spring constants, and they do not lose their springiness even at high temperatures exceeding 200°C or low temperatures below -100°C. However, the elastic member may be a tension coil spring other than a compression coil spring, or made of a material other than stainless steel (including resin).

[0023] In this embodiment, the lens 10 is a biconvex lens, but one or both of its surfaces may be concave or flat. Furthermore, the optical component may be a mirror, filter, or other optical component instead of a lens. Additionally, if the radii of curvature of the two surfaces of the lens are different, the degree of freedom in the lens's orientation differs depending on whether the surface with the smaller radius of curvature is supported by the lens barrel or held in place by a backing plate. Therefore, it is preferable to select the surface supported by the lens barrel and the surface held in place by the backing plate according to the required positional and tilt accuracy for holding the lens.

[0024] Next, we will describe the case where the lens 10 is a plano-convex lens having a convex surface and a flat surface. When the flat surface of the lens 10 is brought into contact with the stepped portion of the lens barrel 20, the optical axis O of the lens 10 and the central axis of the lens barrel 20 become parallel, and the tilt of the lens 10 relative to the lens barrel 20 can be limited. On the other hand, even if the backing plate 30 is brought into contact with the convex surface, the backing plate 30 moves in accordance with the movement of the lens 10 in the direction perpendicular to the optical axis O (hereinafter referred to as the radial direction), so it is not possible to limit the radial movement of the lens 10. Therefore, it is desirable to fit the inner circumferential surface of the lens barrel 20 with the outer circumferential surface of the lens 10. However, in this case, in order to avoid applying unnecessary compressive stress to the lens 10, the above fitting should be a clearance fit, and a positional displacement of the lens 10 equal to the size of the gap must be allowed.

[0025] In contrast, in a lens holding structure that holds a plano-convex lens using only the lens barrel and retaining ring without using elastic members, the center of the convex surface is positioned at the center of the retaining ring that holds the convex surface, thus limiting the radial movement of the lens. However, in this lens holding structure, there is a risk that the lens may move radially due to the gap created between the lens barrel and the retaining ring as the temperature of the lens barrel rises. Subsequently, when the temperature of the lens barrel decreases and the lens barrel contracts, localized compressive stress acts on the lens, which may lead to lens damage.

[0026] In the lens holding structure of this embodiment, the backing plate 30 moves in accordance with the convex surface of the lens 10 both when the lens barrel 20 expands and contracts, so that localized compressive stress is less likely to occur in the lens 10, and the risk of damage to the lens 10 can be reduced.

[0027] Furthermore, in the lens holding structure of this embodiment, if the convex surface of the lens 10 is brought into contact with the stepped portion of the lens barrel 20, the radial movement of the lens 10 can be restricted, but the tilt of the lens 10 cannot be restricted. On the other hand, in the lens holding structure described above, in which the lens is held only by the lens barrel and retaining ring, both the radial movement and tilt of the lens can be restricted. However, as with the case where the flat surface of the lens is brought into contact with the lens barrel, there is a risk that the lens may be damaged due to displacement of the lens when the lens barrel expands.

[0028] In contrast, in the lens holding structure of this embodiment, the backing plate 30 moves to follow the plane of the tilted lens 10 both when the lens barrel 20 expands and contracts, so that localized compressive stress is less likely to occur in the lens due to the tilt of the lens 10. Therefore, the risk of damage to the lens 10 can be reduced.

[0029] Furthermore, in the lens holding structure of this embodiment, when the convex surface of the lens 10 is brought into contact with the stepped portion of the lens barrel 20, a biasing force acts in a direction that corrects the tilt of the lens 10 due to the multiple compression coil springs 50 arranged at equal intervals in the circumferential direction. The reason the lens 10 is held in a tilted position is due to the frictional force between the lens 10 and the lens barrel 20; therefore, it is desirable that the coefficient of friction between the lens 10 and the lens barrel 20 be small. Specifically, it is desirable that the material of the lens barrel 20 be selected considering the coefficient of friction between the lens barrel 20 and the lens 10, and it is effective to apply a surface treatment such as chemical nickel plating to the metal to make it easier for the lens 10 to slide.

[0030] Regarding the backing plate 30, it is desirable that the coefficient of friction between the backing plate 30 and the lens 10 be small in order to avoid putting unnecessary stress on the lens 10 due to friction with the backing plate 30, and the material and surface treatment of the backing plate 30 should be selected with the viewpoint of reducing the coefficient of friction. However, in order to prevent a large difference in the force with which the backing plate 30 presses on the lens 10 between the position of the backing plate 30 that receives biasing force from the compression coil spring 50 and the position of the backing plate 30 that is far from it, the backing plate 30 needs to have a certain degree of mechanical strength.

[0031] In this embodiment, the radial width of the backing plate 30 only needs to be such that the portion that contacts the screw hole for screwing in the stepped bolt 60 and the compression coil spring 50 is sufficiently large. Similarly, the radial width of the retaining ring 40 only needs to be such that the portion that contacts the hole for passing in the stepped bolt 60 and the compression coil spring 50 is sufficiently large. Therefore, the radial size increase of the backing plate 30 and the retaining ring 40 can be suppressed. In other words, the lens holding structure of this embodiment has a compact radial configuration and can hold the lens 10 in a biased and pressed state against the lens barrel 20. Furthermore, in the lens holding structure of this embodiment, the rotational force when screwing the retaining ring 40 into the lens barrel 20 does not act on the compression coil spring 50 and the lens 10, thus preventing unnecessary deformation of the compression coil spring 50 and the lens 10, and allowing the lens 10 to be held in a state that is pressed against the lens barrel 20 with a predetermined biasing force.

[0032] In this embodiment, the case in which a compression coil spring is used as the elastic member has been described, but a tension coil spring may be used instead. Specifically, the backing plate is positioned above the retaining ring (or a member equivalent thereto), and the tension coil spring biases the backing plate toward the retaining ring. In this case, when a regular bolt is screwed into the backing plate instead of the stepped bolt 60, the tip of the bolt pushes the retaining ring, extending the tension spring and holding the backing plate in a position where it does not come into contact with the lens 10. After screwing this pre-assembled unit into the lens barrel, loosening the bolt causes the backing plate to be pressed against the lens by the biasing force of the tension coil spring. In this configuration, since the retaining ring is positioned to surround the side of the lens, a thinner holding structure can be realized in the vertical direction. [Examples]

[0033] Figure 4 shows a cross-section of the lens holding structure of Example 2 in an intermediate assembly state. In this embodiment, components common to Example 1 or components having equivalent functions are denoted by the same reference numerals as in Example 1. In the lens holding structure of this embodiment, a wave washer 51, which is an annular spring washer extending in the circumferential direction, is used as the elastic member. Multiple circumferential portions of the wave washer 51 that are convex upwards contact the retaining ring 40, and multiple circumferential portions that are convex downwards contact the backing plate 30. Preferably, there are three or more portions of the wave washer 51 that contact the backing plate 31, and in this embodiment there are six. Furthermore, it is more preferable that the multiple portions of the wave washer 51 that contact the backing plate 31 are provided at equal intervals in the circumferential direction.

[0034] In this embodiment, a wave washer 51 is used as a separate component from the backing plate 30 and the retaining ring 40, but the elastic portion corresponding to the wave washer 51 may be integrally provided on the backing plate 30 or the retaining ring 40. Specifically, the elastic portion may be integrally molded on the backing plate 30 or the retaining ring 40, or a separate component that will become the elastic portion may be integrated by bonding, welding, crimping, welding, riveting, etc.

[0035] Furthermore, in this embodiment, it is necessary to position the wave washer 51 and the stepped bolt 60 so that they do not interfere with each other. Specifically, the stepped bolt 60 is positioned outside the outer peripheral edge of the wave washer 51 or inside the inner peripheral edge of the wave washer 51, as shown in Figure 4. Alternatively, the wave washer 51 may be provided with a hole or notch through which the large-diameter shaft portion of the stepped bolt 60 passes.

[0036] Note that some wave washers do not have convex parts, such as those manufactured by processing a metal plate into a spiral shape, and these may be used instead of wave washer 51.

[0037] By using a single spring washer as the elastic member in this way, the lens 10 is prevented from falling out by the inner circumferential surface of the lens barrel 20 that holds it. Therefore, as in Embodiment 1, it is not necessary to provide recesses or protrusions on the backing plate 30 and retaining ring 40 to prevent the elastic member from falling out.

[0038] In this embodiment as well, the rotational force applied when screwing the retaining ring 40, which is connected to the backing plate 30 by the stepped bolt 60, into the lens barrel 20 does not act on the wave washer 51 and the lens 10. Therefore, unnecessary deformation of the wave washer 51 and the lens 10 is prevented, and the lens 10 can be held in a state where it is pressed against the lens barrel 20 with a predetermined biasing force. In the above embodiments, the case described was one in which the retaining ring 40 is provided with a hole 41 through which the large-diameter shaft portion 61 of the stepped bolt 60 passes, and the backing plate 30 is provided with a screw hole 31 into which the small-diameter threaded portion 62 of the stepped bolt 60 is screwed. However, if the backing plate can be accessed from below the lens barrel, the backing plate may be provided with a hole through which the large-diameter shaft portion of the stepped bolt passes, and the retaining ring may be provided with a screw hole into which the small-diameter threaded portion of the stepped bolt is screwed.

[0039] Furthermore, although the cases in each embodiment described the use of stepped bolts 60 as connecting members, other connecting members may be used as long as the backing plate and the retaining ring can be connected and fixed while the elastic member is elastically deformed by a second amount of deformation.

[0040] Furthermore, although the structure for holding the lens as an optical component has been described in each embodiment, a structure similar to that in each embodiment may also be used as a structure for holding optical components other than lenses. [Examples]

[0041] Figure 5 shows an exposure apparatus 300 as an optical device (substrate processing device) equipped with the lens holding structure described in Examples 1 and 2. Note that the lens holding structure described in Examples 1 and 2 can also be used in optical devices other than exposure apparatuses. For example, it can be used in imprinting devices that form patterns of imprint material on a substrate using a mold, and in drawing devices that form patterns on a substrate by irradiating the substrate with a charged particle beam. It can also be used in developing devices that develop a photosensitive medium onto which a pattern has been transferred. Furthermore, the lens holding structure described in Examples 1 and 2 can also be used in optical devices such as processing devices (laser processing devices, etc.), inspection devices (overlay inspection devices, etc.), and measuring devices (mark measuring devices, etc.).

[0042] The exposure apparatus 300 projects an image of the pattern of the mask (master plate) M onto the substrate W via the projection optical system 314 to expose the substrate W. The direction parallel to the optical axis of the projection optical system 314 is defined as the Z direction, and the two mutually orthogonal directions in a plane perpendicular to the Z direction are defined as the X direction and the Y direction.

[0043] The exposure apparatus 300 includes a light source 311, an illumination optical system 312, a mask stage 313, a projection optical system 314, a substrate stage 315, and a main control unit 316 as processing units for exposure processing. The exposure apparatus 300 also includes a first drive unit 321 for driving the mask stage 313, a second drive unit 322 for driving the lens 314a of the projection optical system 314, and a third drive unit 351 for driving the substrate stage 315. The first drive unit 321, the second drive unit 322, and the third drive unit 351 are controlled by a mask stage control unit 331, a projection control unit 332, and a substrate stage control unit 341, respectively.

[0044] The main control unit 316 has a CPU and memory device, and controls the entire exposure apparatus 300 by controlling the mask stage control unit 331, the projection control unit 332, and the substrate stage control unit 341.

[0045] The light source 311 emits exposure light. The illumination optical system 312 illuminates the mask M using the light emitted from the light source 311.

[0046] The mask stage 313 holds the mask M and is driven by the first drive unit 321 in a plane (XY plane) perpendicular to the optical axis of the projection optical system 314. The projection optical system 314 projects an image of the pattern of the mask M, illuminated by the illumination optical system 312, onto the substrate. The projection optical system 314 includes a lens 314a that is movable, for example, in the X-axis direction, by the second drive unit 322.

[0047] The holding structure described in Examples 1 and 2 can hold optical components such as lenses used in at least one of the illumination optical system 312 or the projection optical system 314.

[0048] The substrate stage 315 holds the substrate W and is driven by the third drive unit 351 in the X and Y directions within the XY plane, or rotated around the axis in the Z direction. [Examples]

[0049] As Example 4, a manufacturing method for producing an article using the exposure apparatus 300 described in Example 3 will be described. The article manufacturing method according to this embodiment is suitable for manufacturing articles such as flat panel displays (FPDs), semiconductor devices, sensors, and optical elements. The article manufacturing method of this embodiment includes, for example, a step of forming a latent image pattern on a photosensitive material coated on a substrate by exposure using the above-mentioned exposure apparatus to obtain an exposure substrate (exposure step), and a step of developing the exposure substrate on which the latent image pattern was formed in the above step to obtain a developed substrate (development step). Furthermore, this manufacturing method includes other well-known steps (oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The article manufacturing method of this embodiment is advantageous compared to conventional methods in at least one of the performance, quality, productivity, and production cost of the article.

[0050] The embodiments described above are merely representative examples, and various modifications and changes can be made to each embodiment when implementing the present invention. [Explanation of Symbols]

[0051] 10 lenses 20 Telescope Tubes 30 backing plates 40 Retaining ring 50 Compression coil springs 60-step bolt

Claims

1. Optical components and A retaining member for holding the optical component, A contact member that contacts the optical member, An annular retaining member that is screwed onto the retaining member to a predetermined screwing position, The pressing member and the contact member have an elastic member that elastically deforms by a first amount of deformation, thereby generating a biasing force that presses the optical member against the holding member via the contact member, The pressing member and the contact member each have a plurality of attachment portions to which a plurality of connecting members are attached along the annular circumferential direction, such that the elastic member is elastically deformed by a second deformation amount greater than the first deformation amount, and the pressing member and the contact member are connected. Each of the aforementioned multiple connecting members is a bolt having a shaft portion and a threaded portion. One of the pressing member and the contact member has multiple holes through which the shaft portion passes, which serve as the multiple mounting portions, and the other has multiple screw holes into which the threaded portion is screwed, which serve as the multiple mounting portions. A retaining structure characterized in that the retaining member, which is connected to the contact member by the plurality of connecting members, is screwed into the predetermined screw-in position relative to the retaining member, and then the plurality of connecting members are removed from the plurality of mounting portions, thereby causing the contact member to come into contact with the optical member.

2. The retaining structure according to claim 1, characterized in that the elastic member is a coil spring arranged at multiple locations in the circumferential direction.

3. The retaining structure according to claim 2, characterized in that the coil spring is a compression coil spring that is compressed between the retaining member and the contact member.

4. The retaining structure according to claim 1, characterized in that the elastic member is a spring washer extending in the rotational direction of screwing the retaining member into the holding member.

5. The retaining structure according to claim 2 or 3, characterized in that the plurality of connecting members are arranged in positions different from the coil spring in the circumferential direction.

6. The optical element is a lens, The holding structure according to any one of claims 1 to 5, characterized in that one of the two surfaces of the lens abuts against the holding member, and the abutting member abuts against the other surface of the lens.

7. A retaining structure according to any one of claims 1 to 6, An optical apparatus characterized by having a processing unit that performs processing using light via the optical member.

8. An illumination optical system that illuminates the original plate with light emitted from a light source, A projection optical system that projects an image of the pattern of the original plate illuminated by the illumination optical system onto a substrate, Having a retaining structure according to any one of claims 1 to 7, The exposure apparatus is characterized in that the holding structure holds an optical member used in at least one of the pre-illumination optical system and the projection optical system.

9. An exposure step of exposing a substrate using the exposure apparatus described in claim 8 to obtain an exposed substrate, The process includes developing the aforementioned photopolymer substrate to obtain a developed substrate, A method for manufacturing an article, characterized by manufacturing an article from the aforementioned developing substrate.

10. A method for assembling a holding structure comprising: an optical member; a holding member for holding the optical member; a contact member that abuts against the optical member; an annular pressing member that is screwed into the holding member to a predetermined screw-in position; and an elastic member that generates a biasing force between the pressing member and the contact member, which is elastically deformed by a first amount of deformation, and presses the optical member against the holding member via the contact member. The pressing member and the contact member each have a plurality of mounting portions attached along the annular circumferential direction, and the pressing member and the contact member are connected via the plurality of mounting portions by a plurality of connecting members while the elastic member is elastically deformed by a second deformation amount greater than the first deformation amount. Each of the aforementioned multiple connecting members is a bolt having a shaft portion and a threaded portion. One of the pressing member and the contact member has multiple holes through which the shaft portion passes, which serve as the multiple mounting portions, and the other has multiple screw holes into which the threaded portion is screwed, which serve as the multiple mounting portions. The pressing member, which is connected to the contact member by the plurality of connecting members, is screwed into the predetermined screwing position relative to the holding member. An assembly method characterized by subsequently removing each of the multiple connecting members from the multiple mounting parts and bringing the contact member into contact with the optical member.

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