Pulse power circuit using hybrid nonlinear magnetic material and inductor incorporating hybrid nonlinear magnetic material

Abstract

The pulse power circuit (30, 31, 32) includes an inductor (55) having a hybrid core including a switch magnetic material positioned and selected to function as a magnetic switch and a damping magnetic material positioned and selected to damp energy reflections without interfering with the function of the switch magnetic material as a magnetic switch, such that the circuit can mitigate reflected energy induced resonance without significantly degrading the switching function as part of a saturable reactor inductor.

Description

Technical Field

[0001] (Cross - reference to related applications)

[0001] This application claims priority to U.S. Application No. 63 / 129,188, filed December 22, 2020, entitled "PULSED POWER CIRCUITS USING HYBRID NON - LINEAR MAGNETIC MATERIALS AND INDUCTORS INCORPORATING THE SAME", which is hereby incorporated by reference in its entirety.

[0002]

[0002] This disclosure relates to circuits for generating electrical pulses for use, for example, in lasers that function as illumination sources for lithographic apparatuses.

Background Art

[0003]

[0003] A lithographic apparatus applies a desired pattern to a substrate such as a wafer of semiconductor material, typically to a target portion of the substrate. Alternatively, a patterning device, also commonly called a mask or reticle, can be used to generate the circuit patterns to be formed on individual layers of the wafer. The transfer of the pattern is usually effected by imaging onto a layer of radiation - sensitive material (resist) provided on the substrate. Generally, a single substrate includes adjacent target portions to which patterns are sequentially applied.

[0004]

[0004] Lithographic apparatuses include so - called steppers in which each target portion is irradiated by exposing the entire pattern to the target portion in one go, and so - called scanners in which the substrate is scanned synchronously in a given direction or in the opposite direction while the pattern is scanned in this given direction with a radiation beam, so that each target portion is irradiated. Also, it is possible to transfer the pattern from the patterning device to the substrate by imprinting the pattern onto the substrate.

[0005]

[0005] The light source used to illuminate a pattern and project it onto a substrate can be any one of a number of configurations. Deep ultraviolet excimer lasers commonly used in lithography systems include a krypton fluoride (KrF) laser with a wavelength of 248 nm and an argon fluoride (ArF) laser with a wavelength of 193 nm.

[0006]

[0006] Lasers such as those described above use pulses of electrical energy. The circuits used to generate the electrical pulses typically include magnetic switching elements. These switching elements must be able to generate pulses reproducibly and reliably.

[0007]

[0007] In this situation, a need for the present invention arises.

Summary of the Invention

[0008]

[0008] The following gives a concise summary of one or more embodiments in order to obtain a basic understanding of these embodiments. This summary is not an extensive overview of all contemplated embodiments, is not intended to identify key or essential elements of all embodiments, and is not intended to delineate the scope of any or all embodiments. Its sole purpose is to present some concepts of one or more embodiments in a simplified form as a prelude to the more detailed description that follows.

[0009]

[0009] According to one embodiment, a pulse power circuit for supplying pulses to a laser chamber is disclosed. This pulse power circuit includes an inductor having a hybrid saturable magnetic core. The hybrid saturable magnetic core mainly includes a switch magnetic material arranged and selected to function as a magnetic switch, and secondarily includes a damping magnetic material arranged and selected to dampen reflections from the laser chamber without excessively interfering with the function of the switch magnetic material as a magnetic switch. These materials can be such that, when the inductor is biased to a bias point, the magnitude of the hysteresis permeability of the damping magnetic material at the bias point is greater than the magnitude of the hysteresis of the switch magnetic material at the bias point. The switch magnetic material can mainly act as a switch within the switching range of the switch magnetic material. This switching range is -H C and +H C This includes the magnetic field strength between [the specified point] and [the specified point]. The switching magnetic material has a maximum permeability μ within the switching range. SWITCH It can have the maximum permeability μ within the switching range of the damped magnetic material. DAMPER Significantly larger than (e.g., greater than 10x). Switching magnetic materials may have a first magnetic squareness ratio, while damping magnetic materials have a second magnetic squareness ratio smaller than the first. Switching magnetic materials may have a magnetic squareness ratio greater than 0.80. Damping magnetic materials have a magnetic squareness ratio less than 0.80. Damping magnetic materials may contain a weight percentage in the range of 0.50% to 10% of the saturable magnetic core. Damping magnetic materials may contain a weight percentage of about 1% of the saturable magnetic core.

[0010]

[0010] According to another embodiment, an inductor having a hybrid saturable magnetic core is disclosed. The hybrid saturable magnetic core comprises a switch magnetic material arranged and selected to function as a magnetic switch, and a damping magnetic material arranged and selected to dampen reflections from a laser chamber without interfering with the function of the first magnetic material as a magnetic switch. These materials can be such that, when the inductor is biased to a bias point, the magnitude of the hysteresis of the damping magnetic material at the bias point is greater than the magnitude of the hysteresis of the switch magnetic material at the bias point. The switch magnetic material is mainly the -H of the switch magnetic material C and +H C It operates as a switch within a switching range that includes the magnetic field strength between [value] and [value]. The switch magnetic material has a minimum permeability μ within the switching range. SWITCH This has the maximum permeability μ of the damped magnetic material within the switching range. DAMPER Larger than 0.80. Switch magnetic materials may have a magnetic perpendicularity ratio greater than 0.80. Damping magnetic materials may have a magnetic perpendicularity ratio smaller than 0.80. Damping magnetic materials may contain a weight percentage in the range of 0.5% to 10% of the saturable magnetic core. Damping magnetic materials may contain a weight percentage of about 1% of the saturable magnetic core.

[0011]

[0011] According to another embodiment, an inductor is disclosed. This inductor comprises a plurality of first toroidal elements arranged in a laminate, each comprising a switching magnetic material arranged and selected to function as a magnetic switch, and at least one second toroidal element arranged in the laminate, each comprising a damping magnetic material arranged and selected to dampen pulse energy reflection without interfering with the function of the switching magnetic material as a magnetic switch.

[0012]

[0012] According to another embodiment, an inductor is disclosed. This inductor comprises a toroid formed of a tape wound one or more times, the tape having a radial cross section when wound. The radial cross section includes at least one first layer made of a switch material selected to function as a magnetic switch, and at least one second layer made of an attenuation material selected to attenuate pulse energy reflection without interfering with the function of the switch magnetic material as a magnetic switch.

[0013]

[0013] According to another embodiment, a laser system is disclosed. This laser system comprises a laser chamber including a pair of electrodes and a pulsed power supply system arranged to supply pulses to these electrodes. The pulsed power system includes a hybrid saturable core reactor. The hybrid saturable core reactor comprises a switch magnetic material arranged and selected to function as a magnetic switch and a damping magnetic material arranged and selected to dampen reflections from the laser chamber without interfering with the function of the switch magnetic material as a magnetic switch.

[0014]

[0014] Other features and advantages of the present invention, as well as the structure and operation of various embodiments of the present invention, will be described in detail below with reference to the accompanying drawings. It should be noted that the present invention is not limited to the specific embodiments described herein. Such embodiments are described herein for illustrative purposes only. Those skilled in the art will readily come up with further embodiments based on the teachings contained herein. [Brief explanation of the drawing]

[0015]

[0015] The accompanying drawings incorporated herein and forming part thereof illustrate and describe the present invention, and further illustrate the principles of the present invention, enabling those skilled in the art to create and use the present invention.

[0016] [Figure 1]

[0016] This is a functional block diagram of a pulse power circuit according to one embodiment. [Figure 2]

[0017] This is a circuit diagram of a rectifier module that can be used in the pulse power circuit of Figure 1, according to one embodiment of the model. [Figure 3A]

[0018] A perspective view of a wound toroidal core. [Figure 3B]

[0019] This is a perspective view of the core of Figure 3A, cut along line BB. [Figure 3C]

[0020] This is a perspective view of a core composed of cylindrical stacks of toroidal core elements. [Figure 4A]

[0021] This is a diagram of the magnetization curves of two materials according to one embodiment. [Figure 4B]

[0022] This is another diagram of the magnetization curves of two materials according to one embodiment. [Figure 5A]

[0023] This is a perspective view of a hybrid core according to one embodiment. [Figure 5B]

[0023] This is a perspective view of a hybrid core according to one embodiment. [Figure 5C]

[0023] This is a perspective view of a hybrid core according to one embodiment. [Figure 5D]

[0023] This is a perspective view of a hybrid core according to one embodiment. [Figure 5E]

[0023] This is a perspective view of a hybrid core according to one embodiment.

[0017]

[0024] The features and advantages of the present invention will become even clearer by reading the following detailed description with reference to the drawings, where similar reference numerals indicate corresponding elements throughout. In the drawings, similar reference numerals generally indicate elements that are identical, functionally similar, and / or structurally similar. [Modes for carrying out the invention]

[0018]

[0025] This specification discloses one or more embodiments incorporating features of the present invention. The disclosed embodiments are merely illustrative of the present invention. The scope of the present invention is not limited to the disclosed embodiments. The present invention is defined by the claims appended herein.

[0019]

[0026] Where one or more embodiments are described herein, and where “one embodiment,” “a particular embodiment,” “exemplary embodiment,” etc. are used herein, it is understood that one or more embodiments described may include certain features, structures, or characteristics, but each embodiment may not necessarily include those features, structures, or characteristics. Furthermore, such phrases do not necessarily refer to the same embodiment. Moreover, where certain features, structures, or characteristics are described in relation to a particular embodiment, it is understood that performing such features, structures, or characteristics in relation to other embodiments, whether expressly described or not, is within the knowledge of those skilled in the art.

[0020]

[0027] Moving to FIG. 1, an example of a pulse power circuit including a high voltage power supply module 30, a resonant charger module 31, a rectifier module 32, a compression head module 34, and a laser chamber module 36 is shown. These components other than the laser chamber module 36 constitute a solid state pulsed power module (SSPPM). The high voltage power supply module 30 converts normal three-phase power plant power into a high DC voltage. The resonant charger module 31 charges the capacitor bank in the rectifier module 32 to increase the pulse voltage and forms a shorter electrical pulse. The compression head module 34 further temporally compresses the electrical pulse from the rectifier module and correspondingly increases the current to generate a pulse having a desired discharge voltage between the electrodes of the laser chamber module 36. Further details regarding the configuration and operation of such a laser system can be found, for example, in U.S. Patent No. 7,079,564 entitled "Control System for a Two Chamber Gas Discharge Laser" issued on July 18, 2006. The entire content thereof is incorporated herein by reference. Further details regarding the operation of this circuit can be found, for example, in U.S. Patent No. 7,002,443 entitled "Method and Apparatus for Cooling Magnetic Circuit Elements" issued on February 21, 2006. The entire content thereof is incorporated herein by reference.

[0021]

[0028] FIG. 2 is a simplified circuit diagram of the rectifier module 32 that can be used in the pulse power circuit of FIG. 1 according to one aspect of the embodiment. The elements between the dashed lines A and B constitute the circuit implementing the rectifier module 32. The high voltage power supply module 30 supplies power to the resonant charger module 31 that operates as known. The pulse from the resonant charger module 31 is supplied to the rectifier module 32 to charge the capacitor 50. Usually, the capacitor 50 is referred to as C0, and the voltage on the capacitor 50 is V C0This is referred to as [a specific term]. When a trigger signal is detected, the rectifier solid switch 68 closes, and capacitor 50 discharges to capacitor 60 via the charging inductance 54. Typically, capacitor 60 is referred to as C1, and the voltage across capacitor 60 is V C1 This is referred to as the capacitor 60. The voltage is held in the capacitor 60 until the saturable reactor 55, which functions as a magnetic switch, saturates and discharges the capacitor 60 to the capacitor bank in the compression head module 34 via the transformer 70.

[0022]

[0029] The saturable reactor 55 initially withstands the current from capacitor 60. More specifically, before a pulse is emitted, the saturable reactor 55 is typically biased to negative saturation. (While the saturable reactor 55 can withstand the incoming current without bias current, using bias current provides (maximum) increase and stability to the fluctuations of the magnetic flux.) When the next pulse energy flows from capacitor 50 to capacitor 60, the current induces a back electromotive force in the core of the saturable reactor 55, which withstands the incoming current until the core saturates in the forward direction. Once saturated, the back electromotive force disappears, and the charge accumulated on capacitor 60 moves as if a circuit switch had suddenly closed.

[0023]

[0030] Therefore, the saturable reactor 55 functions as a magnetic switch for the pulsed laser. The saturable magnetic core gives the inductor two states. In one state, the inductance of the saturable reactor is high because the magnetic core has high permeability. In the other state, the magnetic core is driven to saturate, which corresponds to low permeability and therefore the inductance is low.

[0024]

[0031] The magnetic core of a saturable reactor can be one of several forms, including a compacted core, a ferrite core, and a tape-wound core. An example of a tape-wound core 100 is shown in Figure 3A. Figure 3B is a cutaway of Figure 3A along line BB, and includes an additional case, which may be made of aluminum, or a similar structure or coating to mechanically stabilize the core. These tape-wound cores 100 can be used individually or configured as a laminate 110 as shown in Figure 3C. The tape-wound core is made from elongated nickel-iron alloy strips with high magnetic permeability, including grain-oriented 50% nickel-iron alloy, non-oriented 80% nickel-iron alloy, and grain-oriented 3% silicon-iron alloy. These are just some examples of materials. It is clear that this list is not exhaustive and that many other materials may be used.

[0025]

[0032] The core of a saturable reactor used in such applications has traditionally had a specific hysteresis perpendicularity, i.e., B r / B sat It is necessary to show the ratio of . This is because, in ideal operation as a switch, the core material should exhibit a nearly rectangular hysteresis curve, which will be detailed below. One characteristic of the rectangular curve is the sharp bend (knee) in the curve where the magnetization B begins to decrease as the magnetic field strength H decreases (negative direction).

[0026]

[0033] One technical issue in the design of the power supply is the reflection of pulses by electrodes within the laser chamber module 36. These reflections can cause ringing, which can interfere with the pulse circuit's ability to prepare for the transmission of the next pulse. Various measures have been employed to control this reflected energy. For further information, see U.S. Patent No. 5,729,562, issued March 17, 1998, entitled “Pulse Power Generating Circuit with Energy Recovery,” which is incorporated herein by reference in its entirety.

[0027]

[0034] According to one embodiment, the reflected energy is further controlled by modifying the saturable reactor core to include a "damping" magnetic material in addition to the "switching" magnetic material that governs the switching behavior. The damping magnetic material has the characteristic of damping reflected energy. However, the damping magnetic material is selected so as not to interfere with the switching operation of the switching magnetic material during pulse generation. As a result, a hybrid core is obtained that performs both the switching function during pulse generation and the damping function after pulse generation. Here and elsewhere, the term "interfere" is used to mean that each magnetic material has some effect on other operating domains (switching vs. damping), but the effect outside the domain is small enough not to excessively interfere with the function of the other material in that domain. Thus, the damping magnetic material does not interfere with the switching function of the switching magnetic material during switching, and the switching magnetic material does not interfere with the damping function of the damping magnetic material during reflected damping.

[0028]

[0035] There are several methods for characterizing and selecting damping magnetic materials to achieve the desired objective of reflection reduction without compromising switching. Figure 4A shows the ideal hysteresis square curve (solid line) of a switching magnetic material. Figure B SAT (Switch) represents the saturation magnetism of the switch magnetic material, and beyond this point, increasing the applied magnetic field strength H does not increase the magnetization. B r (Switch) is the remanent magnetism of the switch, i.e., the remanent magnetization of the switch magnetic material when the intensity of the applied magnetic field H decreases to zero. At perfect perpendicularity, B r (Switch) = B SAT (Switch) and their ratio is 1. H C This relates to the holding force, as will be explained in more detail below. The bias point is the point on the damping material curve (dashed line) to which the core is biased.

[0029]

[0036] According to one embodiment, the advantages of using a high perpendicularity material are maintained in the switch magnetic material. However, the vibrations caused by the reflected chamber energy are controlled by adding a portion of a low perpendicularity damped magnetic material to the core to create a hybrid core. As used herein, “hybrid” is intended to imply a combination of multiple materials, each discrete and distinct and having individual magnetic properties.

[0030]

[0037] The dashed lines in Figure 4A show some possible features of a damped magnetic material according to one embodiment. Figure B SAT The (damper) represents the saturation magnetism of the damping magnetic material, and from this point onward, increasing the applied magnetic field strength H does not increase the magnetization. B r (Attenuator) is the B remanent magnetism of the attenuator, that is, the remanent magnetization of the attenuating magnetic material when the intensity of the applied magnetic field H decreases to zero. As can be seen from the figure, B r (Attenuator) is B SAT (Not equal to an attenuator). According to one embodiment, for a low perpendicularity material, the curvature of the curve in which magnetization B begins to decrease with decreasing magnetic field strength H (negative direction) is rounded, within the ellipse shown by the dashed line.

[0031]

[0038] According to one embodiment, the damping magnetic material is B r (Attenuator) / B SAT (Attenuator) = B r (Switch) / B SAT It is selected to be (a switch). Here, B r (Attenuator) is the residual magnetism of the attenuating magnetic material. B SAT (Attenuator) is the saturation or maximum magnetic intensity of the attenuating magnetic material. B r (The switch) is the residual magnetism of the switch magnetic material. B SAT (Switch) is the saturation or maximum magnetic intensity of the switch magnetic material.

[0032]

[0039] According to one embodiment, the damping magnetic material is HC (Attenuator)>H C (Switch) is selected. Here, H C (Attenuator) is the coercive force of the damping magnetic material, H C (The switch) is the coercive force of the damping magnetic material. In another embodiment, even H C Even if the attenuator is small, if the curve around the inflection point is relatively round, as shown by the dashed ellipse in Figure 4A, the attenuating material can attenuate the energy returning from the chamber.

[0033]

[0040] As seen in Figure 4A, in the curve of the attenuator material, the hysteresis at the bias point is greater and dominant than the hysteresis exhibited by the switch magnetic material at the bias point. Therefore, the attenuating magnetic material can attenuate the reflected or residual energy from the laser chamber. However, the attenuating magnetic material has a switching operating range (+H of the switch magnetic material) that is greater than that of the switch magnetic material. C and -H C Within this range (including the interval between these two values), it is close to saturation. Within this range, the permeability μ of the switch magnetic material S μ is the permeability of the damped magnetic material. D It is more dominant. This is especially true in cases where, according to one aspect of the embodiment, the amount of the switching magnetic material is more dominant than the amount of the damping magnetic material, so the presence of the damping magnetic material does not interfere with the operation of the switching magnetic material within this range.

[0034]

[0041] In other words, according to one embodiment, at the bias point, the hysteresis of the damped magnetic material is dominant over the hysteresis of the switch magnetic material, but in the switch operating range, the permeability of the switch magnetic material is dominant over the permeability of the damped magnetic material. Therefore, each material is effective in its own operational regime and does not interfere with the effectiveness of other materials in the regimes of other materials.

[0035]

[0042] As another example, the dashed line in Figure 4B shows the possible hysteresis curve for another damped magnetic material. The damped magnetic material is B r (Attenuator) / BSAT (Attenuator) r (Switch) / B SAT (It is selected to be a switch. Also, the damping magnetic material is H C (Attenuator) = H C It is selected to be a (switch). The attenuating magnetic material having these characteristics shows the dashed hysteresis curve in Figure 4B. As can be seen from the figure, in this case as well, the hysteresis shown by the curve of the attenuating material at the bias point is significantly larger than the hysteresis shown by the switch magnetic material at the bias point. Therefore, the attenuating magnetic material can attenuate the reflected or residual energy from the laser chamber. Permeability μ of the switch magnetic material S The permeability μ of the damped magnetic material in the switch operating range is D It is more dominant. This is especially true in cases where, according to one aspect of the embodiment, the amount of the switching magnetic material is more dominant than the amount of the damping magnetic material, so the presence of the damping magnetic material does not interfere with the operation of the switching magnetic material within this range.

[0036]

[0043] The number of materials can be two or more. In examples where two materials constitute a hybrid core material, the switch magnetic material may exhibit a relatively high perpendicularity, while the damping magnetic material may exhibit a relatively low perpendicularity. In some embodiments, the switch magnetic material may have a perpendicularity in the range of 0.8 to 1. Also, in some embodiments, the damping magnetic material may have a relatively high perpendicularity, and may have a perpendicularity of less than 0.8.

[0037]

[0044] According to another embodiment, the permeability ratio μ of the switching material max / μ sat Assuming similarly defined permeability ratios for both the switching material and the damping material, it is advantageous to have a relatively large permeability ratio for the switching material and a relatively small permeability ratio for the damping material. Here, μ max This is thought to be the slope of the BH curve in the switching region.

[0038]

[0045] ​Regarding the physical structure of the magnetic core, as described above, the core can be constructed as a cylindrical laminate of toroidal elements. An example of this configuration is shown in Figure 5. As can be seen from the figure, in this example the core is constructed as a laminate 110 of five toroidal elements, but fewer or more elements may be used. In the laminate, the light-colored toroids are made of switch magnetic material. One of them is indicated by the number 100. Together these toroids 100 constitute four of the five toroids in the laminate 110. Another toroid 120 made of damping magnetic material is inserted into the laminate 110. The toroid 120 can be placed at any position within the laminate 110.

[0039]

[0046] As shown in Figure 5B, there may be multiple toroids of the switch magnetic material 100 and the damping magnetic material 120. In this case as well, the toroids 120 can be placed at any position within the laminate 110.

[0040]

[0047] Figures 5C to 5E show cross-sections of the tape wound to produce the toroid. As shown in Figure 5C, the tape 130 may have a layer 135 of switchable magnetic material along with a layer 137 of damping magnetic material. Layers 135 and 137 can be positioned as shown, or layer 137 can be placed below layer 135, or sandwiched between the two layers 135. As shown in Figure 5D, the tape 140 can have multiple alternating layers 145 and 147, which are switchable magnetic material and damping magnetic material, respectively. As shown in Figure 5E, in the tape 150, low perpendicularity material can be arranged as an array of linear elements 157 within a matrix of high perpendicularity material 155. This array can be regular or irregular with respect to the positioning and spacing of the elements, as shown.

[0041]

[0048] The ratio of the amount of damped magnetic material to the weight of the damped magnetic material can vary considerably. For example, the weight of the damped magnetic material in a hybrid core may constitute 0.5 to 10 percent of the weight of the hybrid core. As another example, the hybrid core may constitute 1 percent of the weight of the damped magnetic material.

[0042]

[0049] The hybrid saturable magnetic cores described above can be incorporated into an inductor as a saturable core reactor in the pulse power circuit described above.

[0043]

[0050] Although the foregoing description has been primarily related to tape-wound cores to provide concrete examples that facilitate better understanding, it will be obvious to those skilled in the art that the principles described herein can also be applied to other types of cores.

[0044]

[0051] It will be acknowledged that the section "Modes for Carrying Out the Invention" is intended to be used to interpret the claims, rather than the sections "Summary of the Invention" and "Abstract." The sections "Summary of the Invention" and "Abstract" may describe one or more exemplary embodiments of the invention as envisioned by the inventor, but not all of those exemplary embodiments, and are therefore not intended to limit the invention and the attached claims in any sense.

[0045]

[0052] The present invention has been described above using function building blocks that illustrate examples of specified functions and their relationships. The boundaries of these function building blocks are arbitrarily defined in this specification for the sake of clarity. Alternative boundaries may also be defined, as long as the specified functions and their relationships are properly performed.

[0046]

[0053] The above-mentioned descriptions of specific embodiments fully illustrate the overall nature of the invention, and by applying knowledge in the art, such specific embodiments can be readily modified and / or adapted for various uses without excessive experimentation and without departing from the overall concept of the invention. Accordingly, based on the teachings and guidance presented herein, such adaptations and modifications are intended to be within the meaning and scope of equivalents of the disclosed embodiments. Since the expressions or terms herein are for illustrative purposes only and not limitation, it will be understood that the expressions or terms herein should be interpreted in light of the teachings and guidance by those skilled in the art.

[0047]

[0054] Further embodiments can be described using the following clauses. 1. A pulse power circuit for supplying pulses to a laser chamber, wherein the pulse power circuit includes an inductor having a hybrid saturable magnetic core, and the saturable magnetic core is A switch magnetic material arranged and selected to function as a magnetic switch, A damping magnetic material is arranged and selected to attenuate reflections from the laser chamber without interfering with the function of the switching magnetic material as a magnetic switch, A pulse power circuit equipped with this feature. 2. The pulse power circuit described in Clause 1, wherein when the inductor is biased to the bias point, the magnitude of the hysteresis of the attenuating magnetic material at the bias point is greater than the magnitude of the hysteresis of the switching magnetic material at the bias point. 3. Switch magnetic materials are mainly -H C and +H C It operates as a switch within the switching range of magnetic field strength between and , and the switching magnetic material has a minimum permeability μ within the switching range. SWITCH The damped magnetic material has a maximum permeability μ within the switching range. DAMPER It has μ DAMPER is μ SWITCH A pulse power circuit smaller than the one described in Clause 1. 4. Switch magnetic materials are mainly -H C and +H C It operates as a switch within the switching range of magnetic field strength between and , and the switching magnetic material has a minimum permeability μ within the switching range. SWITCH The damped magnetic material has a maximum permeability μ within the switching range. DAMPER It has μ DAMPER is μ SWITCH A pulse power circuit smaller than the one described in Clause 2. 5. The pulse power circuit according to Clause 1, wherein the switching magnetic material has a first magnetic perpendicularity ratio, and the damping magnetic material has a second magnetic perpendicularity ratio smaller than the first magnetic perpendicularity ratio. 6. The pulse power circuit described in Clause 1, wherein the switch magnetic material has a magnetic perpendicularity ratio greater than 0.80. 7. The pulse power circuit according to Clause 6, wherein the damping magnetic material has a magnetic perpendicularity ratio less than 0.80. 8. The pulse power circuit as described in Clause 1, wherein the damping magnetic material comprises a weight percentage in the range of 0.50% to 10% of the saturable magnetic core. 9. The pulse power circuit described in Clause 1, wherein the damping magnetic material comprises approximately 1% by weight of the saturable magnetic core. 10. An inductor having a hybrid saturable magnetic core, wherein the hybrid saturable magnetic core is A switch magnetic material arranged and selected to function as a magnetic switch, A damping magnetic material is arranged and selected to dampen reflections from the laser chamber without interfering with the function of the first magnetic material as a magnetic switch, An inductor equipped with the following features. 11. The inductor described in Clause 10, wherein when the inductor is biased to a bias point, the magnitude of the hysteresis of the damped magnetic material at the bias point is greater than the magnitude of the hysteresis of the switched magnetic material at the bias point. 12. Switch magnetic materials are mainly -H C and +H CIt operates as a switch within the switching range of magnetic field strength between and , and the switching magnetic material has a minimum permeability μ within the switching range. SWITCH The damped magnetic material has a maximum permeability μ within the switching range. DAMPER It has μ DAMPER is μ SWITCH An inductor smaller than the one specified in Clause 10. 13. Switch magnetic materials are mainly -H C and +H C It operates as a switch within the switching range of magnetic field strength between and , and the switching magnetic material has a minimum permeability μ within the switching range. SWITCH The damped magnetic material has a maximum permeability μ within the switching range. DAMPER It has μ DAMPER is μ SWITCH An inductor smaller than the one specified in Clause 11. 14. The inductor according to Clause 10, wherein the switching magnetic material has a first magnetic perpendicularity ratio, and the damping magnetic material has a second magnetic perpendicularity ratio smaller than the first magnetic perpendicularity ratio. 15. The inductor according to Clause 10, wherein the switch magnetic material has a magnetic perpendicularity ratio greater than 0.8. 16. The inductor according to Clause 10, wherein the damping magnetic material has a magnetic perpendicularity ratio less than 0.8. 17. The inductor as described in Clause 10, wherein the damping magnetic material comprises a weight percentage in the range of 0.5% to 10% of the saturable magnetic core. 18. The inductor described in Clause 10, wherein the damping magnetic material comprises about 1% by weight of the saturable magnetic core. 19. A plurality of first toroidal elements arranged in a laminate, comprising a plurality of first toroidal elements including a switch magnetic material arranged and selected to function as a magnetic switch, A second toroidal element disposed within a laminate, comprising at least one second toroidal element including a damping magnetic material arranged and selected to dampen pulse energy reflection without interfering with the function of the switching magnetic material as a magnetic switch, An inductor equipped with the following features. An inductor comprising a toroid formed of a tape wound with 20.1 or more turns, wherein the tape, when wound, has a radial cross-section, the radial cross-section including at least one first layer made of a switch material selected to function as a magnetic switch, and at least one second layer made of an attenuating material selected to attenuate pulse energy reflection without interfering with the function of the switch magnetic material as a magnetic switch. 21.1 A laser chamber containing a pair of electrodes, A laser system comprising: a pulsed power supply system arranged to supply pulses to electrodes, wherein the pulsed power system includes a hybrid saturable core reactor, the hybrid saturable core reactor comprising a switch magnetic material arranged and selected to function as a magnetic switch, and a damping magnetic material arranged and selected to dampen reflections from the laser chamber without interfering with the function of the switch magnetic material as a magnetic switch.

[0048]

[0055] Other embodiments and examples can be found within the scope of the following claims.

Claims

1. A pulse power circuit for supplying pulses to a laser chamber, wherein the pulse power circuit includes an inductor having a hybrid saturable magnetic core, and the saturable magnetic core is A switch magnetic material arranged and selected to function as a magnetic switch, A damping magnetic material is arranged and selected to dampen reflections from the laser chamber without interfering with the function of the switch magnetic material as a magnetic switch, A pulse power circuit equipped with this feature.

2. The pulse power circuit according to claim 1, wherein when the inductor is biased to a bias point, the magnitude of the hysteresis of the damping magnetic material at the bias point is greater than the magnitude of the hysteresis of the switching magnetic material at the bias point.

3. The switch magnetic material mainly consists of the -H of the switch magnetic material. Ｃ and +H Ｃ It operates as a switch in a switching range of magnetic field strength between and , and the switch magnetic material has a minimum permeability μ within the switching range. ＳＷＩＴＣＨ The damping magnetic material has a maximum permeability μ within the switching range. ＤＡＭＰＥＲ It has μ ＤＡＭＰＥＲ is μ ＳＷＩＴＣＨ A pulse power circuit according to claim 1, which is smaller than the one described in claim 1.

4. The switch magnetic material mainly operates as a switch within the magnetic field strength switching range between -H Ｃ and +H Ｃ of the switch magnetic material. The switch magnetic material has a minimum magnetic permeability μ ＳＷＩＴＣＨ within the switching range, and the damping magnetic material has a maximum magnetic permeability μ ＤＡＭＰＥＲ within the switching range. μ ＤＡＭＰＥＲ is smaller than μ ＳＷＩＴＣＨ The pulse power circuit according to claim 2.

5. The pulse power circuit according to claim 1, wherein the switch magnetic material has a first magnetic perpendicularity ratio, and the damping magnetic material has a second magnetic perpendicularity ratio smaller than the first magnetic perpendicularity ratio.

6. The pulse power circuit according to claim 1, wherein the switch magnetic material has a magnetic perpendicularity ratio greater than 0.

80.

7. The pulse power circuit according to claim 6, wherein the damping magnetic material has a magnetic perpendicularity ratio less than 0.

80.

8. The pulse power circuit according to claim 1, wherein the damping magnetic material comprises a weight percentage in the range of 0.50% to 10% of the saturable magnetic core.

9. An inductor having a hybrid saturable magnetic core, wherein the hybrid saturable magnetic core is A switch magnetic material arranged and selected to function as a magnetic switch, A damping magnetic material is arranged and selected to attenuate reflections from the laser chamber without interfering with the function of the switch magnetic material as a magnetic switch, An inductor equipped with the following features.

10. The inductor according to claim 9, wherein when the inductor is biased to a bias point, the magnitude of the hysteresis of the damping magnetic material at the bias point is greater than the magnitude of the hysteresis of the switching magnetic material at the bias point.

11. The switch magnetic material mainly consists of the -H of the switch magnetic material. Ｃ and +H Ｃ It operates as a switch in a switching range of magnetic field strength between and , and the switch magnetic material has a minimum permeability μ within the switching range. ＳＷＩＴＣＨ The damping magnetic material has a maximum permeability μ within the switching range. ＤＡＭＰＥＲ It has μ ＤＡＭＰＥＲ is μ ＳＷＩＴＣＨ The inductor according to claim 9, which is smaller than the inductor described in claim 9.

12. The switch magnetic material mainly consists of the -H of the switch magnetic material. Ｃ and +H Ｃ It operates as a switch in a switching range of magnetic field strength between and , and the switch magnetic material has a minimum permeability μ within the switching range. ＳＷＩＴＣＨ The damping magnetic material has a maximum permeability μ within the switching range. ＤＡＭＰＥＲ It has μ ＤＡＭＰＥＲ is μ ＳＷＩＴＣＨ The inductor according to claim 10, which is smaller than the inductor described in claim 10.

13. The inductor according to claim 9, wherein the switch magnetic material has a first magnetic perpendicularity ratio, and the damping magnetic material has a second magnetic perpendicularity ratio smaller than the first magnetic perpendicularity ratio.

14. The inductor according to claim 9, wherein the switch magnetic material has a magnetic perpendicularity ratio greater than 0.

8.

15. The inductor according to claim 9, wherein the damping magnetic material has a magnetic perpendicularity ratio less than 0.

8.

16. The inductor according to claim 9, wherein the damping magnetic material comprises a weight percentage in the range of 0.5% to 10% of the saturable magnetic core.

17. A plurality of first toroidal elements arranged in a laminate, comprising a plurality of first toroidal elements including a switch magnetic material arranged and selected to function as a magnetic switch, At least one second toroidal element disposed within the laminate, comprising an attenuating magnetic material arranged and selected to attenuate pulse energy reflection without interfering with the function of the switch magnetic material as a magnetic switch, An inductor equipped with the following features.

18. An inductor comprising a toroid formed of one or more rolled tapes, wherein the tapes, when rolled, have a radial cross-section, the radial cross-section including at least one first layer made of a switch material selected to function as a magnetic switch, and at least one second layer made of an attenuating material selected to attenuate pulse energy reflection without interfering with the function of the switch material as a magnetic switch.

19. A laser chamber containing a pair of electrodes, A laser system comprising: a pulse power supply system arranged to supply pulses to the electrodes, wherein the pulse power supply system includes a hybrid saturable core reactor, the hybrid saturable core reactor comprising: a switch magnetic material arranged and selected to function as a magnetic switch; and a damping magnetic material arranged and selected to dampen reflections from the laser chamber without interfering with the function of the switch magnetic material as a magnetic switch.

Images