Heat treatment equipment

Abstract

To provide a heat treatment facility which is capable of cooling a treatment object in a conveyance unit which carries the conveyance of the treatment object between batch type heat treatment chambers and capable of adjusting a cooling speed at this time.SOLUTION: A heat treatment facility 1 comprises a first heat treatment chamber 12 and a second heat treatment chamber 13 of a batch type arranged along a rail 10 and a conveyance unit 20 of conveying a treatment object W. The conveyance unit 20 comprises a cooling chamber 56 of cooling the treatment object W, and the cooling chamber 56 comprises a treatment chamber 82 which is formed so as to be partitioned by a heat insulation material in a furnace shell 76 and has a circulation fan 100 of circulating a cooling gas, a gas cooler 98 provided on a flow passage 79 of the cooling gas and a heater 120. The circulation fan 100 and the gas cooler 98 are provided at the lateral of the treatment chamber 82 and between the furnace shell 76 and the treatment chamber 82, and the heater 120 is provided at the upper part of the treatment chamber 82.SELECTED DRAWING: Figure 4

Description

Technical Field

[0004] , , , , , ,

[0001] This invention relates to a heat treatment facility for performing heat treatment on a workpiece.

Background Art

[0002] Conventionally, in the material of steel parts, isothermal annealing has been carried out for the purpose of improving machinability in subsequent processes. In isothermal annealing, a heating process for once transforming steel into an austenite structure, an intermediate cooling process for cooling to a target temperature in a relatively short time thereafter, and a soaking process for soaking at the target temperature are carried out. When performing such isothermal annealing, a continuous atmosphere furnace having three chambers, namely a primary furnace responsible for the heating process, a quenching chamber responsible for the intermediate cooling process, and a secondary furnace responsible for the soaking process, is generally used, and during the treatment, the treatment is generally carried out while feeding a reducing gas into the furnace to prevent decarburization and oxidation (see, for example, Patent Document 1 below).

[0003] When annealing is performed using the continuous atmosphere furnace as described above, the following points have been problems. (1) When restarting after the continuous atmosphere furnace stops, it takes time for the atmosphere to become suitable for the treatment. (2) Therefore, even when there is no treatment, it is necessary to maintain the furnace temperature and atmosphere in order to maintain the furnace atmosphere. (3) Thus, security personnel need to be arranged even on holidays, and extra energy is required to maintain the furnace state. (4) Since it is a continuous furnace, it is not possible to perform heat pattern setting according to the weight of each workpiece.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

[0005] As a means of solving the above problems, it is conceivable to use the heat treatment equipment shown in Patent Document 2, which is related to the applicant's patent application. The heat treatment equipment shown in Patent Document 2 comprises a batch-type set of multiple heat treatment chambers and a transport unit equipped with a heat retention chamber for transporting the workpieces to be treated, and the heat retention chamber is equipped with a function for gas cooling the workpieces to be treated. However, if the workpiece is cooled using the aforementioned heating chamber, the workpiece cools down too quickly, preventing the desired cooling gradient from being achieved, and the resulting structure after processing changes to something different from what was intended.

[0006] Against the backdrop of the above circumstances, the present invention aims to provide a heat treatment system that can cool the workpieces within a transport unit responsible for transporting the workpieces between batch-type heat treatment chambers, and that can also adjust the cooling rate during this process. [Means for solving the problem]

[0007] Therefore, the heat treatment equipment of the present invention is defined as follows: (A) A batch-type first heat treatment chamber and a second heat treatment chamber arranged along a transport track, (B) A transport unit comprising a cooling chamber for housing the workpiece to be processed and cooling the workpiece with a cooling gas, and a transfer chamber for transferring the workpiece between the first heat treatment chamber or the second heat treatment chamber and the cooling chamber, A heat treatment apparatus comprising, which cools the heat-treated workpiece received from the first heat treatment chamber to a predetermined temperature in the cooling chamber and then transports and loads it into the second heat treatment chamber, The cooling chamber comprises a processing chamber partitioned by an insulating material within the furnace shell, a circulation fan for circulating the cooling gas, and a gas cooler and heater provided on the flow path of the cooling gas. The circulation fan is provided outside the furnace shell or on the side of the processing chamber, between the furnace shell and the processing chamber. The gas cooler is provided outside the furnace shell, or between the furnace shell and the processing chamber. The heater is located either inside the processing chamber, above the processing chamber, or below the processing chamber.

[0008] According to the heat treatment equipment of the present invention as defined above, intermediate cooling in constant-temperature annealing can be performed in a cooling chamber within a transport unit that handles the transport of workpieces between batch-type heat treatment chambers, enabling efficient execution of a series of heat treatments for constant-temperature annealing. In this heat treatment equipment, when performing intermediate cooling in the cooling chamber, the temperature of the cooling gas is adjusted by a gas cooler and a heater. This allows for adjustment of the cooling rate of the workpieces.

[0009] Furthermore, in this heat treatment equipment, the heater and the circulation fan are located in different positions, thus avoiding the problem of the circulation fan overheating and malfunctioning due to direct radiant heat from the heater hitting it.

[0010] In this heat treatment equipment, the gas cooler, the circulation fan, the heater, and the workpiece can be arranged in that order along the flow path of the cooling gas circulated by the circulation fan. This configuration allows the temperature of the cooling gas to be adjusted before it comes into contact with the workpiece, and because the gas cooler is located on the primary side of the circulation fan, it is possible to avoid the high-temperature gas coming into contact with the circulation fan.

[0011] Furthermore, this heat treatment equipment can also be configured to create a bypass channel that allows the cooling gas to flow while avoiding the gas cooler. In this way, when cooling the workpiece, only a portion of the cooling gas that has become hot after passing through the workpiece passes through the gas cooler and is cooled. This reduces the load on the heater located downstream when heating the cooling gas, and thus reduces the power consumption of the heater. [Brief explanation of the drawing]

[0012] [Figure 1] This figure shows the overall configuration of the heat treatment equipment according to the first embodiment of the present invention. [Figure 2] This is a cross-sectional view showing the internal structure of the heating chamber and the transport unit in the same embodiment. [Figure 3] This is a plan view of the heating chamber and conveying unit. [Figure 4] This is a cross-sectional view taken along line IV-IV in Figure 2. [Figure 5] This is a diagram illustrating the operation of the transfer mechanism in the same embodiment. [Figure 6] This figure shows each step of the heat treatment process in the embodiment, along with the heat pattern and pressure pattern applied to the workpiece. [Figure 7] This figure shows the main parts of a second embodiment of the present invention. [Modes for carrying out the invention]

[0013] Next, embodiments of the present invention will be described in detail below. Figure 6 shows each step of the heat treatment (constant temperature annealing) in this embodiment, along with the heat pattern and pressure pattern applied to the workpiece W. As shown in the figure, the workpiece W is heated, then cooled to a predetermined temperature, soaked at that temperature, and then cooled again. Specifically, in the heating step K1, the workpiece W is heated up to 910°C, then in the subsequent intermediate cooling step K2, it is cooled to 650°C at a predetermined cooling rate (e.g., 1°C / s), soaked at 650°C (soaking step K3), and then cooled (cooling step K4).

[0014] Figure 1 shows the overall schematic configuration of the heat treatment equipment 1 of the first embodiment. In this figure, reference numeral 10 denotes a rail serving as a conveyance track linearly extending in the left - right direction in the drawing. Along this rail 10, a plurality of batch - type heat treatment chambers (heating chamber 12 and soaking chamber 13) are linearly arranged in a row with an opening 44 (see Figure 2) described later facing upward in the same direction in the drawing. Further, a loading table 16 is provided at the left end in Figure 1, and an extraction table 18 is provided at the right end in Figure 1.

[0015] Reference numeral 20 denotes a conveyance unit that travels on the rail 10. The conveyance unit 20 receives the work piece W on the loading table 16, travels on the rail 10, and loads the work piece W into one of the plurality of heating chambers 12. Alternatively, the work piece W after being heat - treated in these heating chambers 12 is received from these heating chambers 12, travels on the rail 10, and the work piece W is loaded into one of the plurality of soaking chambers 13. Further, the conveyance unit 20 receives the work piece W after being soaked in the soaking chamber 13, travels on the rail 10, and conveys it to the extraction table 18. In this example, among the heat treatments shown in Figure 6, the intermediate cooling and the cooling after the soaking treatment are carried out inside the conveyance unit 20.

[0016] Figure 2 shows the internal structures of the heating chamber 12 and the conveyance unit 20. As shown in this figure, the heating chamber 12 has a pressure - resistant furnace shell 22 shaped like a bottomed cylinder and a heat - insulating material 24 disposed inside it. The heat - insulating material 24 forms a bottomed - cylindrical heat - insulating wall 25. And the heat - insulating wall 25 forms a processing chamber 26 on the inner side. This heating chamber 12 is provided with a suction port 32. The suction port 32 is connected to a vacuum pump not shown in the figure, and by sucking the air inside the chamber from this suction port, the inside of the chamber (inside the processing chamber 26) is made into a vacuum state (reduced - pressure state).

[0017] The heating chamber 12 is also provided with a supply port 34 for supplying nitrogen gas into its interior. The nitrogen gas supplied from the supply port 34 is first guided to a header 36, and then introduced into the heating chamber 12, specifically the processing chamber 26 inside the insulating wall 25, through a branch pipe 37 connected to the header 36 and a nozzle 38 provided on the branch pipe 37. Although there is one nozzle 38 in the branch pipe 37 here, multiple nozzles 38 may be provided.

[0018] The insulated wall 25 is equipped with a convection heating fan 39 that agitates and circulates nitrogen gas supplied in the processing chamber 26 to promote heating during the heating phase of the workpiece W, and a motor 40 that rotates the fan. The insulated wall 25 is also equipped with a water-cooling panel 41 near the motor 40 to protect the motor 40 from heat.

[0019] The heating chamber 12 is provided with a sliding door 42 that opens and closes the opening 44. The door 42 slides along the inner surface of the flange 48 by a cylinder 46, and in the closed state, it airtightly seals the opening 44 via a rubber packing. A plate-shaped insulating material 55 is provided on the door 42 in a manner that allows it to move integrally with the door, and this insulating material 55 closes the opening 52 of the cylindrical insulating wall 25. In the heating chamber 12, a water-cooling panel 51 is also provided on the inner surface of the door 42 to protect the rubber gasket that airtightly seals the opening 44 from heat.

[0020] The structure of the heating chamber 12 has been described above, but the soaking chamber 13 has basically the same structure. For this reason, in the internal structure of the soaking chamber 13, parts that are the same as those of the heating chamber 12 are indicated only by symbols, and detailed explanations are omitted.

[0021] In Figure 2, the transport unit 20 has a traveling trolley 90 that runs on the rails 10, and further has a connecting trolley 92 on the traveling trolley 90 that moves back and forth in the left-right direction in Figure 2, which is perpendicular to the rails 10, along with the cooling chamber 56 described later and the transfer chamber 54, and connects and disconnects the transfer chamber 54 and the cooling chamber 56 to the heating chamber 12 and the soaking chamber 13. 94 is a cylinder that moves the connecting trolley 92 forward and backward in a small stroke in the left-right direction in Figure 2, and the cooling chamber 56 and the transfer chamber 54 are moved forward and backward in the left-right direction in Figure 2 by this cylinder 94, accompanied by the rolling of the roller 96. In this embodiment, these connecting trolleys 92, rollers 96, cylinders 94, etc., constitute the means for moving forward and backward.

[0022] The transfer unit 20 has a transfer chamber 54 at the front on the side of the heating chamber 12 and soaking chamber 13, and a cooling chamber 56 at the rear on the opposite side for cooling the workpiece W in steps K2 and K4 of Figure 6.

[0023] The transfer chamber 54 has a pressure-resistant rectangular cylindrical wall 58, and a storage chamber 60 for accommodating the workpiece W to be processed is formed inside it. A transfer mechanism 62 is provided in this storage chamber 60. The transfer mechanism 62 transfers the workpiece W between the heating chamber 12 and the rear cooling chamber 56. As shown in Figure 5, it has a fork section 62A and horizontal sliding members 62B and 62C, and the workpiece W is transferred to the fork section 62A by sliding these horizontally.

[0024] The transfer chamber 54 is provided with a suction port 63, which is connected to the vacuum pump 64 shown in Figure 3 via a suction pipe 66A, so that the inside of the transfer chamber 54 is vacuum-suctioned by the vacuum pump 64. An on-off valve 68A, which consists of a solenoid valve, is provided on the suction pipe 66, and the suction port 63 and the vacuum pump 64 are connected and disconnected by opening and closing the on-off valve 68A.

[0025] The transfer chamber 54 is also provided with a supply port 70, as shown in Figure 3, through which nitrogen gas is supplied into the transfer chamber 54. The transfer chamber 54 has an opening 72 at its front end, i.e., the left end in Figure 2, which does not have a door. The transfer chamber 54 is provided with a flat, frame-shaped packing 74 around this opening 72. The transfer chamber 54 is docked to the heating chamber 12 and the soaking chamber 13 by moving forward toward the heating chamber 12 and the soaking chamber 13, with the frame-shaped packing 74 in airtight contact with the outer surfaces of the heating chamber 12 and the soaking chamber 13.

[0026] On the other hand, the latter cooling chamber 56 has a bottomed cylindrical pressure-resistant furnace shell 76 with an insulating material 78 inside, and this insulating material 78 constitutes an insulating wall 80. A processing chamber 82 is formed in the inner region surrounded by the insulating wall 80, and the product to be processed W is housed there. A support frame 84 is provided in the processing chamber 82, and the product to be processed W inside the processing chamber 82 is placed on and supported by the support frame 84. In addition, openings 104 and 106 are provided at the top and bottom of the insulating wall 80 forming the processing chamber 82 for the circulation of nitrogen gas, which will be described later as a cooling gas.

[0027] As shown in Figure 4, the cooling chamber 56 is provided with a suction port 86 for vacuuming its interior, and as shown in Figure 3, this suction port 86 is connected to the vacuum pump 64 via a suction pipe 66B. An on-off valve 68B, which is an electromagnetic valve, is provided on this suction pipe 66B, and the opening and closing operation of the on-off valve 68B connects and disconnects the suction port 86 and the vacuum pump 64.

[0028] The cooling chamber 56 also has a supply port 88 in the furnace shell 76 for supplying nitrogen gas to the interior, as shown in Figure 4. In this example, the nitrogen gas supplied to the interior of the furnace shell 76 is used as a cooling gas to cool the workpiece W housed in the processing chamber 82.

[0029] In Figure 4, 100 is a circulation fan that circulates nitrogen gas within the cooling chamber 56, and 102 is a motor that rotates the circulation fan 100. The circulation fan 100 is located on the left side of the processing chamber 82 in the figure, in the area between the furnace casing 76 and the processing chamber 82. A partition wall 77 is also provided on the right side of the processing chamber 82 in the figure, which closes off the area between the furnace casing 76 and the processing chamber 82 (the area on the right side of the figure). In this example, the circulation fan 100 generates a nitrogen gas circulation flow 79, which includes a forward path 79a that passes from top to bottom through the processing chamber 82, as shown by the arrows in Figure 4, and a return path 79b that passes upward between the furnace casing 76 and the processing chamber 82.

[0030] 98 is a gas cooler that lowers the temperature of nitrogen gas through heat exchange. Like the circulation fan 100, the gas cooler 98 is located on the left side of the processing chamber 82 in the diagram, between the furnace shell 76 and the processing chamber 82, and temporarily lowers the temperature of the nitrogen gas that has become hot after passing through the product W to be processed.

[0031] 120 is a heater for heating nitrogen gas, and in this example it is positioned directly above the processing chamber 82 and facing the upper opening 104. 121 is a temperature sensor that detects the temperature of nitrogen gas flowing through the cooling chamber 56. It is installed in the gas flow path 79 between the heater 120 and the workpiece W, and detects the temperature of the nitrogen gas on the secondary side of the heater 120. In this example, a control unit (not shown) connected to the temperature sensor 121 controls the output of the heater 120 so that the temperature of the nitrogen gas detected by the temperature sensor 121 matches a preset target gas temperature. The temperature sensor 121 can also be installed in the gas flow path 79 between the workpiece W and the gas cooler 98, or on the secondary side of the gas cooler 98.

[0032] These components—the gas cooler 98, circulation fan 100, heater 120, temperature sensor 121, and control unit—constitute a gas cooling system for the workpiece W. In this gas cooling system, the rotation of the circulation fan 100 causes nitrogen gas to flow downward through the opening 104 at the top of the insulated wall 80, as shown in Figure 4, and cool the high-temperature workpiece W. At this time, the nitrogen gas, which has become hot due to heat exchange with the workpiece W, flows out from the opening 106 at the bottom of the insulated wall 80, then flows upward through the flow path (return path 79b) between the furnace casing 76 and the processing chamber 82, passes through the gas cooler 98, and is cooled there. After that, the nitrogen gas is heated by the heater 120 and adjusted to a predetermined temperature. The nitrogen gas with adjusted temperature then comes into contact with the workpiece W again and cools it. In other words, in this example, not only is the workpiece W housed in the processing chamber 82 simply cooled, but the temperature of the nitrogen gas can be controlled to cool the workpiece W with a desired cooling gradient.

[0033] Furthermore, in the transport unit 20, as shown in Figure 2, an opening 122 is provided between the cooling chamber 56 and the transfer chamber 54, specifically at the end of the cooling chamber 56 on the transfer chamber 54 side. This opening 122 is opened and closed by a door 128 that slides along the inner surface of the flange 126 by a cylinder 124.

[0034] Similar to the heating chamber 12 described above, the door 128 of this cooling chamber 56 is also provided with a plate-shaped insulating material 130 that moves integrally with the opening 129 of the insulating wall 80, and a water-cooling panel 132 is provided on the door 128 to protect the rubber gasket that airtightly seals the opening 122 from heat.

[0035] Next, the series of heat treatments in this embodiment will be described in detail. First, the transport unit 20 receives the workpiece W on the loading table 16 (see Figure 1) via the transfer mechanism 62 in the transfer chamber 54 and places it inside the transfer chamber 54. After that, the transport unit 20 moves to the location of one of the heating chambers 12 and transports the workpiece W.

[0036] Subsequently, the transfer unit 20 uses the cylinder 94 to move the transfer chamber 54 forward a small distance towards the heating chamber 12 together with the rear cooling chamber 56, docking the transfer chamber 54 with the heating chamber 12 so that the frame-shaped packing 74 at the tip of the transfer chamber 54 is in close contact with the outer surface of the heating chamber 12.

[0037] Then, with the door 128 between the transfer chamber 54 and the cooling chamber 56 closed, the inside of the transfer chamber 54 is vacuum-suctioned through the suction port 63 by the vacuum pump 64, and the pressure inside the transfer chamber 54 is reduced to a vacuum pressure similar to that of the heating chamber 12.

[0038] When the pressure inside the transfer chamber 54 becomes a vacuum pressure similar to the pressure inside the heating chamber 12, the door 42 of the heating chamber 12 is opened, and the workpiece W to be processed in the transfer chamber 54 is loaded into the processing chamber 26 of the heating chamber 12 by the transfer mechanism 62 and set on the stand 30.

[0039] When the product to be processed W is placed in the heating chamber 12, heating of the product to be processed W is started, and as shown in heating step K1 in Figure 6, the product to be processed W is heated up to the target heating temperature of 910°C.

[0040] To accelerate the heating process, nitrogen gas is supplied into the heating chamber 12 from the supply port 34, and a convection heating fan 39 is rotated. The convection heating from the fan 39 and the radiant heat from the heater 28 quickly raise the workpiece W to the target heating temperature of 910°C. Once the workpiece W reaches 910°C, the nitrogen gas inside the heating chamber 12 is evacuated through the suction port 32, and the pressure inside the heating chamber 12 is reduced to a set vacuum pressure (e.g., 10 Pa). The pressure inside the heating chamber only needs to be below atmospheric pressure; for example, it can be around 70 kPa.

[0041] Once the heat treatment of the workpiece W is complete, the transfer unit 20, which had temporarily moved away from the heating chamber 12, is moved forward again towards the heating chamber 12, and the transfer chamber 54 is docked with the heating chamber 12. Then, the inside of the transfer chamber 54 and the inside of the cooling chamber 56 are evacuated by the vacuum pump 64, and both are brought to a vacuum pressure (the same pressure as the chamber 12).

[0042] Subsequently, the door 42 of the heating chamber 12 is opened, and the heat-treated workpiece W inside the heating chamber 12 is moved into the transfer chamber 54. Then, it is moved from the transfer chamber 54 to the cooling chamber 56, and the workpiece W is placed inside the cooling chamber 56.

[0043] Once the workpiece W is placed inside the cooling chamber 56, the door 128 is closed, and then the workpiece W is cooled to the desired temperature (e.g., 650°C) as shown in the intermediate cooling process K2 in Figure 6. At this time, nitrogen gas is supplied into the cooling chamber 56 from the supply port 88, and the circulation fan 100 is rotated to circulate the nitrogen gas. At this time, the temperature of the nitrogen gas that comes into contact with the workpiece W is also adjusted by the gas cooler 98 and heater 120, so that the workpiece W can be cooled with the desired cooling gradient. The nitrogen gas may be supplied at a fixed rate or at a variable rate. When supplied at a variable rate, for example, the nitrogen gas flow rate can be controlled so that the furnace pressure matches a preset target furnace pressure. The furnace pressure can also be controlled to a constant pressure, which may be atmospheric pressure or a predetermined pressurized state higher than atmospheric pressure. By circulating nitrogen gas at a predetermined pressurized state, it is possible to improve the heat transfer efficiency of convection and reduce temperature variations between materials during cooling.

[0044] Once the workpiece W has cooled to the target temperature, the nitrogen gas inside the cooling chamber 56 is evacuated through the suction port 86, and the pressure inside the cooling chamber 56 is reduced. The workpiece W is then maintained at the target temperature. The target temperature in the intermediate cooling process is the temperature that allows for the shortest time to obtain the desired structure, and is generally 550 to 680°C. More specifically, it can be determined using an isothermal transformation curve; for example, to obtain a fine ferrite-pearlite structure, the temperature can be set to 550°C for SAE1541 and 680°C for SCM420. The cooling rate to the target temperature can be determined by considering the nose of the isothermal transformation curve; for example, it can be 0.1 to 10°C / s, and preferably 0.3 to 3°C / s.

[0045] The transfer unit 20 moves away from the heating chamber 12, and when the pressure in the transfer chamber 54 and the pressure in the soaking chamber 13 become approximately the same vacuum pressure, the workpiece W, which has been kept at the target temperature, is then loaded into the soaking chamber 13 through the transfer chamber 54.

[0046] The workpiece W, placed in the soaking chamber 13, is then subjected to soaking treatment inside the chamber 13 while being maintained at 650°C, the isothermal holding temperature in constant-temperature annealing, as shown in the soaking process K3 in Figure 6. Specifically, with the door 42 (see Figure 2) of the soaking chamber 13 closed, the workpiece W is heated to 650°C by the heater 28.

[0047] Once the heat soaking process is complete, the transfer chamber 54 of the transport unit 20 is docked with the heat soaking chamber 13. The heat-treated workpiece W is then removed from the heat soaking chamber 13 and moved into the transfer chamber 54. Subsequently, it is moved from the transfer chamber 54 to the cooling chamber 56, where the workpiece W is placed.

[0048] The workpiece W, housed in the cooling chamber 56, is then cooled as shown in Figure 6 (see cooling step K4). Specifically, nitrogen gas is supplied into the cooling chamber 56 from the supply port 88, and the circulation fan 100 is rotated, allowing the nitrogen gas to be directed onto the workpiece W for cooling.

[0049] Once cooling is complete, the door 128 of the cooling chamber 56 opens, and the workpiece W is discharged through the opening 72 to the extraction table 18 at the far right of Figure 1. The workpiece W discharged onto the extraction table 18 is then taken down to the downstream process.

[0050] With the heat treatment equipment 1 of this embodiment configured as described above, intermediate cooling can be performed in the cooling chamber 56 within the transport unit 20, which is responsible for transporting the workpieces W between batch-type heat treatment chambers, and a series of heat treatments for constant-temperature annealing can be efficiently carried out. Each batch-type heat treatment chamber is equipped with a vacuum pump for degassing, allowing the furnace atmosphere to be quickly replaced with one suitable for processing. This eliminates the need to maintain the furnace atmosphere when there are no workpieces to be processed, as is the case with continuous atmosphere furnaces, thus reducing wasted energy spent solely on maintaining the furnace atmosphere. Furthermore, in the heat treatment equipment 1 of this embodiment, the temperature of the nitrogen gas used as a cooling gas during intermediate cooling in the cooling chamber 56 is adjusted by the gas cooler 98 and heater 120. This allows the cooling rate of the workpiece W to be processed to be adjusted.

[0051] Furthermore, in the heat treatment equipment 1 of this embodiment, the heater 120 is positioned above the treatment chamber 82 and the circulation fan 100 is positioned to the side of the treatment chamber 82. Therefore, the problem of the circulation fan 100 overheating and malfunctioning due to radiant heat from the heater 120 directly hitting the circulation fan 100 can be avoided.

[0052] Furthermore, in the heat treatment equipment 1 of this embodiment, the gas cooler 98, the circulation fan 100, the heater 120, and the workpiece W are arranged in that order along the flow path 79 of nitrogen gas circulated by the circulation fan 100. This allows the temperature of the nitrogen gas to be properly adjusted before it reaches the workpiece W, and because the gas cooler 98 is located on the primary side of the circulation fan 100, it is possible to avoid the high-temperature nitrogen gas coming into contact with the circulation fan 100.

[0053] Figure 7 shows the main parts of a second embodiment of the present invention. In the heat treatment equipment 1B of the second embodiment, a partition wall 135 extending vertically is provided in the area between the furnace shell 76 and the treatment chamber 82 to divide the gas flow path into two, and a gas cooler 98 is provided in only one of the flow paths 136. The other flow path 137 is a bypass flow path that allows nitrogen gas to flow while avoiding the gas cooler 98. In this example, a damper 139 for flow rate adjustment is provided in this bypass flow path 137, and a temperature sensor 121B is provided between the gas cooler 98 and the heater 120 in the gas flow path 79. The damper 139 is configured to adjust its opening degree based on the gas temperature on the secondary side of the gas cooler 98 detected by, for example, the temperature sensor 121B. The temperature sensor 121B can also be provided between the workpiece W and the gas cooler 98 in the gas flow path 79, in which case it is possible to configure the damper 139 to adjust its opening degree based on the gas temperature on the primary side of the gas cooler 79.

[0054] After passing through the workpiece W, the nitrogen gas flows through two separate channels 136 and 137, then merges on the secondary side of the gas cooler 98, and the merged nitrogen gas is sent further downstream to the heater 120. Note that among the components of the heat treatment equipment 1B, those components common to the heat treatment equipment 1 according to the first embodiment are indicated by the same reference numerals, and their descriptions are omitted.

[0055] With the heat treatment equipment 1B configured in this way, when cooling the workpiece W, only a portion of the nitrogen gas that has become hot after passing through the workpiece W passes through the gas cooler 98 and is cooled. As a result, the load on the heater 120 located downstream when heating the nitrogen gas is reduced, and the power consumption of the heater 120 can be suppressed.

[0056] Although embodiments of the present invention have been described in detail above, these are merely examples. For example, as shown below, the present invention can be configured in various modified forms without departing from its spirit. (1) In the above embodiment, as shown in Figure 4, a return path 79b in the cooling gas flow path 79 is provided on the side of the processing chamber 82 and between the furnace shell 76 and the processing chamber 82. However, in the present invention, it is also possible to provide such a return path 79b outside the furnace shell 76 and install a gas cooler 98 and a circulation fan 100 there. (2) In the above embodiment, as shown in Figure 4, the gas cooler 98 and circulation fan 100 are provided only on the left side of the processing chamber 82 in the figure. However, in the present invention, it is also possible to install one set each on the left and right sides of the processing chamber 82 (a total of two sets). (3) In the above embodiment, as shown in Figure 4, the heater 120 is provided on the outside (above) of the processing chamber 82, but in some cases it is also possible to provide the heater 120 inside the processing chamber 82, upstream of the workpiece W to be processed. (4) In the above embodiment, as shown in Figure 4, the cooling gas flow 79a for cooling the workpiece W was a downflow, introduced from above the processing chamber 82 and exiting downwards. However, in the present invention, it is also possible to place the heater 120 below the processing chamber 82 and make the cooling gas flow an upflow, introduced from below the processing chamber 82 and exiting upwards. In this case as well, it is preferable that the gas cooler, circulation fan, heater, and workpiece be processed are arranged in that order along the nitrogen gas flow path. (5) In the above embodiment, nitrogen gas is used as the atmospheric gas, but in some cases, low-oxidizing gases and / or reducing gases other than nitrogen gas may be used. (6) The above embodiment is an example in which both the intermediate cooling and the cooling after soaking treatment shown in Figure 6 are performed within the transport unit 20. However, in some cases, it is also possible to configure the heat treatment equipment to separately place a heat treatment chamber for cooling along the transport track and perform the cooling after soaking treatment in such a heat treatment chamber. [Explanation of Symbols]

[0057] 1,1B Heat Treatment Equipment 10 rails 12 Heating Chamber (First Heat Treatment Chamber) 13. Heating Chamber (Second Heat Treatment Chamber) 20 transport units 54 Transfer Chamber 56 Cooling Chamber 76 Furnace shell 79 Gas flow path 82 Processing Room 98 Gas Cooler 100 Circulating Fan 120 Heater 137 Bypass channel W - Items to be processed

Claims

1. (A) A batch-type first heat treatment chamber and a second heat treatment chamber arranged along a transport track, (B) A transport unit comprising a cooling chamber for housing the workpiece to be processed and cooling the workpiece with a cooling gas, and a transfer chamber for transferring the workpiece between the first heat treatment chamber or the second heat treatment chamber and the cooling chamber, (C) A control unit that controls the temperature of the cooling gas, A heat treatment apparatus comprising, which cools the heat-treated workpiece received from the first heat treatment chamber to a predetermined temperature in the cooling chamber, and then transports and loads it into the second heat treatment chamber, The cooling chamber comprises a processing chamber partitioned by an insulating material within the furnace shell, a circulation fan for circulating the cooling gas, and a gas cooler and heater provided on the flow path of the cooling gas. The circulation fan is provided outside the furnace shell or on the side of the processing chamber, between the furnace shell and the processing chamber. The gas cooler is provided outside the furnace shell, or between the furnace shell and the processing chamber. The heater is provided either inside the processing chamber, above the processing chamber, or below the processing chamber. The control unit controls the output to the heater so that the temperature detected by the cooling gas, received from the temperature sensor located in the flow path, matches the target temperature. The heat treatment equipment is configured such that the temperature sensor is located on the secondary side of the heater and on the primary side of the workpiece in the flow path.

2. The heat treatment equipment according to claim 1, wherein both the circulation fan and the gas cooler are provided outside the furnace shell.

3. The heat treatment equipment according to claim 1, wherein the gas cooler, the circulation fan, the heater, and the workpiece to be treated are arranged in that order along the flow path of the cooling gas circulated by the circulation fan.

4. The heat treatment apparatus according to claim 3, further comprising a bypass channel for circulating the cooling gas while avoiding the gas cooler.

5. The heat treatment apparatus according to claim 1, wherein the region between the furnace shell and the processing chamber, in which the circulation fan and the gas cooler are not provided, is closed off by a partition wall, and the flow path of the cooling gas within the furnace shell is restricted.

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