A suction plate, a cutting device, and a method for manufacturing electronic components.

Abstract

To provide a suction plate capable of forming a half-cut groove with high accuracy.SOLUTION: A suction plate for holding a cutting target object having a substrate and a resin layer, and includes a base member that has a base portion to be arranged on a base provided with a suction mechanism, and a protruding portion formed so as to protrude upward from the base portion and having an adsorption surface capable of adsorbing the resin layer, and a frame-shaped member arranged to surround the periphery of the protruding portion, the frame-shaped member having a mounting surface which is formed to be located above the adsorption surface and on which the substrate can be mounted. A discharge passage capable of discharging foreign matter within a defined space defined by the protrusion and the frame-shaped member to the outside of the defined space is formed in at least one of the base member and the frame-shaped member.SELECTED DRAWING: Figure 13

Description

Technical Field

[0001] The present invention relates to the technology of adsorption plates, cutting devices, and manufacturing methods for electronic components.

Background Art

[0002] Patent Document 1 discloses a cutting device capable of performing half-cuts and full-cuts on an object to be cut placed on a table using a blade. The cutting device described in Patent Document 1 can correct the position of the blade in the height direction based on the wear amount of the blade. By correcting the position of the blade in the height direction in this way, it is possible to suppress variations in the depth of the half-cut grooves formed in the object to be cut.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Here, since generally high dimensional accuracy is required for half-cut grooves, a technology capable of forming half-cut grooves with higher precision is required.

[0005] The present invention has been made in view of the above circumstances, and the problem to be solved is to provide an adsorption plate, a cutting device, and a manufacturing method for electronic components capable of forming half-cut grooves with high precision.

Means for Solving the Problems

[0006] The problems that the present invention aims to solve are as described above, and in order to solve these problems, the adsorption plate according to the present invention is an adsorption plate for holding an object to be cut having a substrate and a resin layer, comprising: a base portion disposed on a base provided with a suction mechanism, and a base member having a protruding portion formed to protrude upward from the base portion and having an adsorption surface capable of adsorbing the resin layer, and a frame-shaped member disposed to surround the protruding portion and having a mounting surface on which the substrate can be placed, formed to be located above the adsorption surface, wherein at least one of the base member and the frame-shaped member has a discharge passage formed therein that allows foreign matter in a defined space defined by the protruding portion and the frame-shaped member to be discharged out of the defined space.

[0007] Furthermore, the cutting device according to the present invention comprises the suction plate and the base on which the suction mechanism is provided.

[0008] Furthermore, the method for manufacturing an electronic component according to the present invention includes a half-cut step in which a half-cut is performed on the object to be cut using the cutting device, and a full-cut step in which a full-cut is performed on the object to be cut that has been half-cut in the half-cut step using the cutting device. [Effects of the Invention]

[0009] According to the present invention, half-cut grooves can be formed with high precision. [Brief explanation of the drawing]

[0010] [Figure 1] (a) Bottom view showing the package substrate. (b) Side view showing the package substrate. [Figure 2] A perspective view showing a semiconductor package with a stepped section. [Figure 3] A schematic plan view showing the configuration of the cutting device. [Figure 4] A schematic side view showing the configuration of the cutting device. [Figure 5] A block diagram showing the electrical connections of the cutting device. [Figure 6] Side cross-sectional view showing the configuration of the table. [Figure 7] (a) Plan view schematically showing the half-cut groove formed in the package substrate. (b) Side view schematically showing the half-cut groove formed in the package substrate. [Figure 8] Flowchart showing the half-cut procedure. [Figure 9] Exploded perspective view showing the suction plate. [Figure 10] Plan view showing the suction plate. [Figure 11] Plan view showing the base portion. [Figure 12] (a) Diagram schematically showing the X1-X1 cross section in FIG. 10. (b) Diagram schematically showing the X2-X2 cross section in FIG. 10. [Figure 13] Perspective view showing the path through which foreign matter is discharged in the suction plate. [Figure 14] Bottom view showing the base portion. [Figure 15] (a) Plan view showing the suction plate with chamfered portions formed. (b) Plan view showing the suction plate according to the first modification. [Figure 16] Plan view showing the suction plate according to the second modification.

Mode for Carrying Out the Invention

[0011] In the following description, the description will be made according to the direction indicated by the arrow in the figure. Also, the figures used in the following description are schematically drawn by omitting or exaggerating the shape, number, etc. as appropriate for convenience.

[0012] <Configuration of Package Substrate 70> Hereinafter, first, as an example of the object to be cut by the cutting device 1, the package substrate 70 will be described.

[0013] The package substrate 70 shown in FIG. 1 is, for example, a wettable flanged QFN (Quad Flat Non-leaded) package substrate. The package substrate 70 includes a substrate 71 formed of a metal such as a copper plate, and a rectangular resin layer 72 obtained by resin-sealing one surface of the substrate 71. As the substrate 71, a lead frame, a printed wiring board, or the like can be used. In the present embodiment, as an example, a lead frame is used as the substrate 71. Hereinafter, of the two surfaces of the substrate 71, the surface on which the resin layer 72 is formed is referred to as the first surface, and the surface opposite to the first surface is referred to as the second surface, respectively.

[0014] On the first surface of the substrate 71, semiconductor chip mounting portions (die pads) (not shown) are arranged in a matrix. Electronic elements 73 such as semiconductor chips, resistor elements, and capacitor elements are fixed to the die pads. The substrate 71 is formed of a metal such as copper (Cu) or 42 alloy (Fe-Ni) and has conductivity. A lead-free metal plating layer or a lead-free solder plating layer (not shown) may be formed in advance on the surface of the substrate 71. A number of leads, which are connection terminals to the outside, are arranged around each die pad. These a number of leads are each connected to a tie bar, which is a metal frame arranged in a grid pattern on the substrate 71. A plurality of electrodes (not shown) provided for each electronic element 73 are electrically connected to the respective leads arranged around the die pad via bonding wires made of gold wires or copper wires.

[0015] The substrate 71 of this embodiment comprises a rectangular usable area 71a and a non-usable area 71b surrounding the usable area 71a. The non-usable area 71b is the area including the outer edge of the substrate 71, is not used in the product and is removed later. On the other hand, the usable area 71a is the area used in the product and includes the die pads, leads, and tie bars of the lead frame described above. The resin layer 72 is molded in a rectangular shape so as to cover the usable area 71a of the substrate 71 and a part of the non-usable area 71b outside the usable area 71a. That is, the electronic elements 73 and bonding wires placed in the usable area 71a are sealed by the resin layer 72. With the formation of the resin layer 72, a step equal to the thickness of the resin layer 72 is formed between the first surface of the substrate 71 and the end surface of the resin layer 72 (the lower surface in Figure 1(b)).

[0016] In addition to the examples described above, the substrate 71 constituting the package substrate 70 can be a semiconductor substrate, a metal substrate, a ceramic substrate, a glass substrate, a resin substrate, or the like. If the substrate is not made of metal and is not conductive, the portion of the substrate that comes into contact with the frame-shaped member 150 of the suction plate 100 (the outer periphery described later) should be configured to be conductive. Furthermore, the substrate 71 constituting the package substrate 70 may or may not have wiring.

[0017] By performing half-cuts and full-cuts on the package substrate 70 shown in Figure 1, a semiconductor package (electronic component) 80 as shown in Figure 2 is manufactured. The specific methods for performing half-cuts and full-cuts on the package substrate 70 will be described later.

[0018] The semiconductor package 80 shown in Figure 2 has a stepped portion 81 formed at the boundary between the top surface (the surface on which the terminals 82 are formed) and the side surface. When the semiconductor package 80 is surface-mounted, solder enters the stepped portion 81. This realizes a fillet-shaped solder connection structure for the semiconductor package 80, ensuring a reliable connection. Furthermore, because the solder enters the stepped portion 81 and forms a fillet, the solder connection state can be easily observed from the side surface of the semiconductor package 80 during visual inspection after mounting. Thus, the semiconductor package 80 has various advantages. The method for forming the stepped portion 81 will be described later.

[0019] <Configuration of the cutting device> Next, the configuration of the cutting device 1 will be explained using Figures 3 to 5.

[0020] The cutting device 1 manufactures multiple semiconductor packages 80, which are cut products, by cutting a package substrate 70. In this embodiment, "cutting" includes separating the object to be cut into multiple individual cut products, and removing a portion of the object to be cut. Hereinafter, cutting that separates the object to be cut into multiple individual cut products will be called a full cut, and cutting that does not separate the object to be cut but removes a portion of it in the thickness direction will be called a half cut. The cutting device 1 mainly comprises a cutting unit 10, a holding unit 20, a detection unit 30, and a control unit 40, etc.

[0021] <Configuration of the cutting unit 10> The cutting unit 10 shown in Figures 3 and 4 is for cutting the package substrate 70. The cutting unit 10 mainly comprises a blade 11 and a spindle section 12, etc. The cutting device 1 may have a twin-spindle configuration with a pair of spindle sections 12, or a single-spindle configuration with only one spindle section 12.

[0022] The blade 11 is an annular blade. The blade 11 is detachably attached to the tip of the spindle portion 12. The blade 11 can rotate around the X axis.

[0023] The spindle section 12 supports the blade 11 and rotates the blade 11. The spindle section 12 is positioned to extend in the X-axis direction. The spindle section 12 can be moved along the X-axis and Z-axis in Figures 3 and 4 by a moving mechanism (not shown). The movement of the spindle section 12 (operation of the moving mechanism) is controlled by a control unit 40, which will be described later. In the following, the Z-axis direction in Figures 3 and 4 may also be referred to as the height direction of the spindle section 12 and the blade 11.

[0024] The blade 11 attached to the spindle 12 rotates at high speed by receiving rotation from the spindle 12, thereby enabling half-cuts and full-cuts to be performed on the package substrate 70. Hereinafter, the blade for half-cuts will be referred to as the first blade 11A, and the blade for full-cuts will be referred to as the second blade 11B, and the first blade 11A and the second blade 11B will be collectively referred to as the blade 11. The first blade 11A has a first thickness, and the second blade 11B has a second thickness that is smaller than the first thickness. In other words, the thickness of the second blade 11B is thinner than the thickness of the first blade 11A. In this embodiment, either the first blade 11A or the second blade 11B is attached to the spindle 12, and cutting is performed.

[0025] The first blade 11A is formed of a conductive material. When the first blade 11A is attached to the spindle portion 12, it is electrically connected to the spindle portion 12. The spindle portion 12 is electrically connected to a detection circuit 32, which will be described later.

[0026] When a half-cut is performed on the package substrate 70, the package substrate 70 is cut by the movement of the first blade 11A relative to the table 50, which will be described later. Specifically, a portion of the package substrate 70 is removed in the thickness direction. By performing a half-cut along the longitudinal and transverse directions on the package substrate 70, a half-cut groove G1 extending in the longitudinal direction of the package substrate 70 and a half-cut groove G2 extending in the transverse direction of the package substrate 70 are formed (see Figure 7(a)). On the other hand, when a full cut is performed on the package substrate 70, the package substrate 70 is cut along the groove pattern by the movement of the second blade 11B relative to the table 50. This separates the portions of the half-cut grooves G1 and G2, and the package substrate 70 is fragmented into multiple separate semiconductor packages 80 (see Figure 2).

[0027] <Configuration of the holding unit 20> The holding unit 20 shown in Figures 3 and 4 holds the package substrate 70. The holding unit 20 mainly comprises a table 50 and a moving mechanism 60, etc. The cutting device 1 may have a twin-cut table configuration with two holding units 20, or it may have one holding unit 20, or it may have three or more holding units 20.

[0028] The table 50 shown in Figure 6 mainly comprises a base 51, a suction plate 100, and a suction mechanism 52, etc.

[0029] The base 51 is on which the suction plate 100 is fixed. The base 51 comprises a first portion 51a that contacts the lower surface of the suction plate 100, and a second portion 51c that is fixed to the lower surface of the first portion 51a via an insulating layer 51b. The first portion 51a and the second portion 51c are made of a conductive material such as stainless steel.

[0030] A ventilation passage 51d is formed in the first section 51a, which is connected to a recess 161 of the suction plate 100, described later. The ventilation passage 51d is formed to penetrate from the top surface to the bottom surface of the first section 51a. A through hole 51e is formed in the second section 51c so as to connect to the ventilation passage 51d of the first section 51a. The piping 52a of the suction mechanism 52, described later, is placed in the through hole 51e.

[0031] The suction plate 100 mainly comprises a base member 110 and a frame-shaped member 150, etc.

[0032] The base member 110 comprises a rectangular plate-shaped portion 111 and a protruding portion 112 projecting upward from the plate-shaped portion 111. The plate-shaped portion 111 is one embodiment of the base according to the present invention. The thickness of the plate-shaped portion 111 in the vertical direction is greater than the thickness of the protruding portion 112 in the vertical direction. The upper surface of the protruding portion 112 constitutes an adsorption surface 112a capable of adsorbing the resin layer 72 of the package substrate 70. As shown in the enlarged view of Figure 6, a thin resin film 113 is provided on the adsorption surface 112a. For the sake of explanation, the resin film 113 is not shown in other figures. Furthermore, the resin film 113 is not necessarily required and can be omitted or replaced with other members (for example, a flexible plate-shaped member).

[0033] A recess 114 is formed on the bottom surface of the base member 110. When viewed from the bottom, the recess 114 is formed to be approximately the same shape as the suction surface 112a. Multiple suction holes 115 are also formed in the base member 110. The suction holes 115 are formed to penetrate the base member 110 vertically. More specifically, the upper end of the suction hole 115 opens at the suction surface 112a, and the lower end of the suction hole 115 opens at the recess 114. The resin film 113 has through holes (not shown) at positions corresponding to the suction holes 115.

[0034] By forming the recess 114, the overall length of the adsorption pore 115 can be shortened. This improves the adsorption force through the adsorption pore 115. Multiple columnar portions 116 extending vertically are formed in the recess 114. The configuration of the columnar portions 116 will be described later.

[0035] The frame-shaped member 150 is formed to surround the protrusion 112 from the side. Specifically, the frame-shaped member 150 has an opening 151 that corresponds to the protrusion 112. With the protrusion 112 inserted inside the opening 151 of the frame-shaped member 150, the frame-shaped member 150 is placed on the base member 110. In this state, the upper surface of the frame-shaped member 150 is located above the suction surface 112a of the protrusion 112. The upper surface of the frame-shaped member 150 constitutes a mounting surface 152 on which the substrate 71 of the package substrate 70 can be placed.

[0036] In this way, by arranging the frame-shaped member 150 to surround the protrusion 112, a recess 161 is formed by the protrusion 112 and the frame-shaped member 150. Furthermore, this recess 161 defines the arrangement space 162 in which the resin layer 72 of the package substrate 70 is arranged. Note that the arrangement space 162 is one embodiment of the defined space according to the present invention.

[0037] The shape of the recess 161 in plan view is formed to be approximately the same as, or slightly larger than, the shape (rectangular) of the resin layer 72 of the package substrate 70. The depth of the recess 161 (placement space 162) is also approximately the same as, or slightly larger than, the thickness of the resin layer 72. The depth of the recess 161 refers to the distance from the mounting surface 152 of the frame-shaped member 150 to the suction surface 112a (more specifically, the upper surface of the resin film 113 provided on the suction surface 112a). By configuring the recess 161 in this way, the resin layer 72 can be accommodated within the recess 161 when the package substrate 70 is placed on the frame-shaped member 150.

[0038] When the resin layer 72 is housed in the recess 161, the unused area 71b of the substrate 71 (hereinafter also referred to as the "peripheral area") (see Figure 1) comes into contact with the upper surface of the mounting surface 152 of the frame-shaped member 150 located outside the recess 161. Since the frame-shaped member 150 and the base member 110 are made of a conductive material such as stainless steel, when the peripheral area of ​​the package substrate 70 is placed on the frame-shaped member 150, the frame-shaped member 150 and the base member 110 become electrically connected to the package substrate 70.

[0039] Furthermore, the suction plate 100 has a discharge passage formed therein for discharging foreign matter from the recess 161 (arrangement space 162). The specific configuration of the discharge passage will be described later.

[0040] The suction mechanism 52 holds the package substrate 70 onto the table 50 by suction through the suction holes 115. The suction mechanism 52 mainly comprises piping 52a and a pump 52b, etc.

[0041] At least a portion of the piping 52a is positioned in the through-hole 51e of the second section 51c and connected to the lower end of the ventilation passage 51d. A pump 52b is connected to the piping 52a. By driving the pump 52b, air is drawn in through the through-hole 51e and the recess 114 and through the multiple suction holes 115. As a result, the resin layer 72 is adsorbed onto the suction surface 112a, and the package substrate 70 is held in place on the suction plate 100. Even if the thickness of the resin layer 72 is thinner than expected and the resin layer 72 does not contact the upper surface of the suction surface 112a when the package substrate 70 is placed on the suction plate 100, the air inside the recess 161 closed by the package substrate 70 is drawn in, creating negative pressure inside the recess 161, which then attracts the substrate 71 downwards, causing the resin layer 72 to contact and be held in place on the suction surface 112a.

[0042] The moving mechanism 60 shown in Figures 3 and 4 is for moving the table 50. The moving mechanism 60 supports the table 50 from below. The moving mechanism 60 can rotate the table 50 in the θ direction in Figure 3 (i.e., on the horizontal plane). The moving mechanism 60 can also move along the Y axis in Figure 3. The operation of the holding unit 20 is controlled by the control unit 40, which will be described later.

[0043] <Configuration of detection unit 30> The detection unit 30 shown in Figures 3 and 4 is for detecting the position of the spindle portion 12 and the first blade 11A in the height direction (Z-axis direction). The detection unit 30 mainly comprises a CCS (Contact Cutter Setup) block 31, a detection circuit 32, and a detection device 33, etc.

[0044] The CCS block 31 is mounted to the side of the table 50 and can move together with the table 50. The CCS block 31 is conductive and is electrically connected to the suction plate 100. Therefore, when the package substrate 70 is placed on the suction plate 100, the package substrate 70 and the CCS block 31 become electrically connected.

[0045] The detection circuit 32 is configured to conduct electricity through the first blade 11A and the CCS block 31 when the first blade 11A contacts the upper surface of the CCS block 31. The detection circuit 32 is electrically connected to the CCS block 31 and the spindle section 12. A detection device 33 is incorporated into the detection circuit 32. Furthermore, since the suction plate 100 is conductive and in contact with the CCS block 31 (see Figure 6), the detection circuit 32 also conducts electricity when the first blade 11A contacts a conductive part of the package substrate 70.

[0046] The detection circuit 32 is configured to apply a constant voltage between the CCS block 31 and the spindle section 12 using a power supply (not shown). The detection device 33 detects changes in the presence or absence of power in the detection circuit 32. More specifically, the detection device 33 detects contact between the first blade 11A (more precisely, the outer edge of the first blade 11A) and the CCS block 31, and contact between the first blade 11A and the package substrate 70, and notifies the control unit 40, which will be described later.

[0047] <Configuration of control unit 40> The control unit 40 shown in Figures 3 to 5 is electrically connected to the cutting unit 10, the holding unit 20, and the detection unit 30, and controls the operation of each unit 10 to 30. The control unit 40 may be configured integrally with each unit 10 to 30, or it may be configured separately from each unit 10 to 30. As shown in Figure 5, the control unit 40 mainly comprises a control unit 41, a display unit 42, an input unit 43, and a storage unit 44, etc.

[0048] The control unit 41 includes a CPU, RAM, and ROM. The ROM stores an operation program 41a for controlling the operation of each unit 10 to 30. The CPU reads and executes the operation program 41a from the ROM. The ROM is used as appropriate for the CPU's arithmetic processing. Note that the operation program 41a may be stored in the storage unit 44 instead of the ROM.

[0049] The display unit 42 is configured to display various types of information to the user, and to display a user interface screen for receiving input from the user for disconnection parameters and detection parameters, which will be described later. The display unit 42 can be implemented in any form, such as a liquid crystal display element, a liquid crystal display, an organic EL display, and a touch panel display.

[0050] The input unit 43 is used, for example, to input various fixed values ​​or various parameters for disconnection. The input unit 43 can be implemented in any form, such as a keyboard, push buttons, or a touch panel display. If the input unit 43 is implemented as a touch panel display, the input unit 43 may also serve as the display unit 42.

[0051] The parameters for cutting are not particularly limited, but they include, for example, cutting parameters that specify the location where the package substrate 70 should be cut. Since the package substrate 70 is usually cut according to a grid-like cutting pattern, the vertical and horizontal cutting lines are determined by determining the cutting parameters.

[0052] <Calculation of half-cut height> Next, the calculation of the half-cut height by the control unit 41 will be explained. The half-cut height is the position of the lowest end of the first blade 11A when performing a half-cut on the package substrate 70. The control unit 41 controls the height position of the spindle unit 12 and brings the first blade 11A closer to the upper surface of the CCS block 31. The control unit 41 recognizes the height coordinate of the spindle unit 12 when contact is detected between the new, unworn first blade 11A and the CCS block 31 as the reference Z coordinate (hereinafter referred to as the reference coordinate). As a result, the height position of the spindle unit 12 and, furthermore, the height position of the first blade 11A are detected with respect to the upper surface of the CCS block 31. Furthermore, the control unit 41 controls the height position of the spindle unit 12 so that the first blade 11A is brought closer to the upper surface of the package substrate 70. Specifically, the height position of the spindle section 12 controlled by the control unit 41 is, for example, the position of the rotation axis of the spindle section 12 in the Z-axis direction. The control unit 41 can determine the position of the spindle section 12 in the Z-axis direction by converting the rotation direction and rotation speed of the motor that moves the spindle section 12 along the ball screw into a movement distance in the Z-axis coordinate system.

[0053] As an example, the half-cut height can be calculated as follows. First, the distance from the top surface of the CCS block 31 to the top surface of the suction plate 100 (fixed value B) and the thickness of the package substrate 70 (fixed value C) are added to the reference coordinate (A), and the height coordinate (A+B+CDE) is calculated by subtracting the half-cut depth (fixed value D) and the correction amount caused by the wear of the first blade 11A at the start of the half-cut (measured value E). Then, the height position of the spindle unit 12 is controlled so that the lowest end of the first blade 11A is positioned at the calculated coordinate (hereinafter referred to as the basic processing coordinate). The fixed values ​​are pre-entered and stored in the cutting device 1. The amount of correction (measured value) caused by the wear of the first blade 11A at the start of the half-cut can be calculated from the height coordinate when the first blade 11A contacts the CCS block 31 and the above-mentioned reference coordinate (for details on the wear of the first blade 11A and the correction of the height position of the first blade 11A caused by that wear, see Japanese Patent Application Publication No. 2022-151243).

[0054] Furthermore, the position of the spindle section 12 in the height direction is controlled, taking into account the actual thickness of the package substrate 70. Specifically, the control unit 41 brings the first blade 11A into contact with the package substrate 70. From the height coordinate (F) at this time, the difference between the actual thickness of the package substrate 70 and the thickness of the package substrate 70 (fixed value C) is calculated as the height offset amount (A+B+CF) of the package substrate 70. Then, taking this offset amount into consideration, the basic processing coordinate is corrected, and the position of the spindle section 12 in the height direction is controlled so that the lowest end portion of the first blade 11A is positioned.

[0055] Furthermore, a correction for wear of the first blade 11A caused by the half-cut is performed, for example, when the half-cut length or half-cut time exceeds a set value. That is, when the half-cut length or half-cut time exceeds a set value (this may be after the half-cut of one cutting line is completed, or it may be during the half-cut), the first blade 11A is brought into contact with the CCS block 31, and the height coordinate at this time is obtained. Then, from this and the above-mentioned reference coordinate, the amount of correction caused by wear of the first blade 11A is calculated (see Japanese Patent Publication No. 2022-151243), and the height position of the spindle section 12 is corrected.

[0056] <Separation of package substrate 70 into individual pieces> Next, a method for cutting the package substrate 70 and forming the semiconductor package 80 will be described with reference to Figure 7. First, a first blade 11A having a first thickness is attached to the spindle portion 12. Using this first blade 11A, the package substrate 70 is half-cut along the cutting line to form a groove pattern consisting of a plurality of half-cut grooves G1 and G2, as shown in Figure 7(a). After each half-cut groove G1 or G2 is formed, for example, the cutting distance may be determined as described later. The outermost part of the package substrate 70 cut by the first blade 11A is the boundary line between the usable area 71a and the non-used area 71b (the dashed line shown in Figure 7(a)). The non-used area 71b is the area that does not contain semiconductor chips, etc., after full cutting and does not become the semiconductor package 80. This boundary line cut by the first blade 11A is above the resin layer 72 and is located within the recess 161 in a plan view.

[0057] Figure 7(b) is a schematic side view of the area near the half-cut grooves G1 and G2 of the package substrate 70. After the groove pattern is formed, a second blade 11B having a second thickness smaller than the first thickness is attached to the spindle portion 12, and the package substrate 70 is fully cut at position P1 by the second blade 11B, thereby separating the package substrate 70 into individual pieces. Position P1 is preferably the center of the half-cut grooves G1 and G2. This produces a plurality of semiconductor packages 80 with stepped portions 81 formed as shown in Figure 2. Note that the cross-sectional shape of the half-cut grooves G1 and G2 is not limited to the shape shown in Figure 7(b).

[0058] When forming a groove pattern on the package substrate 70 by half-cutting, it is important that half-cut grooves G1 and G2 of as uniform a depth as possible are formed on the package substrate 70, and high precision is required. Therefore, in this embodiment, the half-cutting is controlled as follows. The process of performing half-cutting on the package substrate 70 (half-cutting process) will be described below with reference to the flowcharts shown in Figures 6 and 8.

[0059] <Half-cut of package substrate 70> First, the package substrate 70 is aligned with the recess 161 of the holding unit 20 and placed there, and air is sucked in from the suction hole 115 of the base member 110 to hold the package substrate 70 on the suction plate 100 (step S1). As a result, the unused area 71b of the substrate 71 of the package substrate 70 comes into contact with the upper surface of the suction plate 100 (the mounting surface 152 of the frame-shaped member 150), so that the package substrate 70 and the suction plate 100 are electrically connected.

[0060] Next, the spindle unit 12 and the moving mechanism 60 are operated to align the first blade 11A with the package substrate 70 (step S2). Subsequently, the spindle unit 12 is moved to bring the first blade 11A into contact with the CCS block 31, and the height position of the first blade 11A at this time is stored in the storage unit 44. As a result, the correction amount caused by the wear of the first blade 11A is calculated and stored in the storage unit 44, as described above (step S3).

[0061] Next, if the height of the top surface of the package substrate 70 has not been measured (NO in step S4), the spindle unit 12 is moved to bring the first blade 11A into contact with the second surface of the substrate 71 of the package substrate 70. More specifically, the first blade 11A is brought into contact with the unused area 71b of the second surface of the substrate 71 of the package substrate 70, where a resin layer 72 is formed on the lower first surface side. Since the outer periphery of the package substrate 70 is in contact with the suction plate 100, current flows through the first blade 11A and the substrate 71, and the detection device 33 detects the current flow. As a result, the height position of the first blade 11A is calculated (step S5) and stored in the storage unit 44. Based on this, the offset amount described above is calculated and stored in the storage unit 44. On the other hand, if the height of the top surface of the package substrate 70 has been measured (YES in step S4), the half-cut height is calculated (step S6) as follows.

[0062] In other words, the half-cut height by the first blade 101A is calculated from the correction amount and offset amount calculated as described above, and the basic processing coordinates (step S6). Based on this, the height position of the lowest end of the first blade 11A is adjusted to a position lowered by the amount of the half-cut from the height position where the first blade 11A contacts the package substrate 70.

[0063] Subsequently, the spindle section 12 is moved to half-cut the package substrate 70 along the cutting line described above (step S7). At this time, the cutting edge of the lower end of the first blade 11A is held at the half-cut height described above, and the half-cut is performed. In this process, when the half-cut on one cutting line is completed, if the cutting distance by the first blade 11A exceeds a set value (YES in step S8), it is determined that wear has occurred on the first blade 11A, and the correction amount described above is calculated (step S3). On the other hand, if the cutting distance does not exceed the set value (NO in step S8), it is determined whether or not half-cuts have been performed on all cutting lines on the package substrate (step S9). In step S8, instead of determining the cutting distance by the first blade 11A, it may be determined whether or not the cutting time by the first blade 11A exceeds a set value.

[0064] In step S9, if half-cuts have not been made on all cutting lines (NO in step S9), half-cuts are made on other cutting lines (step S7). Once half-cuts have been made on all cutting lines (YES in step S9), the package substrate 70 is washed, dried, and then removed from the suction plate 100 and transported away (step S10). Subsequently, the table 50 is washed with washing water and dried (step S11). When washing the table 50, foreign matter (e.g., cutting debris) in the recess 161 of the suction plate 100 is discharged to the outside via the discharge passage described later. This prevents foreign matter from getting stuck between the suction surface 112a of the suction plate 100 and the package substrate 70, enabling high-precision half-cuts.

[0065] After that, once the half-cutting of all package substrates 70 is complete (YES in step S12), the operation of the cutting device 1 is terminated. If there are still package substrates 70 to be half-cut (NO in step S12), a new package substrate 70 is held in the suction plate 100 (step S1), and the half-cutting is continued.

[0066] Subsequently, the cutting device 1 can perform a full-cut process (full-cut process). In this case, the blade is replaced, and the second blade 11B is installed in place of the first blade 11A in the spindle section 12. Then, a full cut is performed with the replaced second blade 11B. The second blade 11B cuts and separates the package substrate 70 in the thickness direction according to the formed groove pattern. This yields a semiconductor package 80, which is a collection of individual electronic components. The semiconductor package 80 after the full cut may be sent to other units of the cutting device 1.

[0067] Furthermore, the cutting device 1 may also be equipped with a pressing mechanism for holding down the package substrate 70 to be cut (especially half-cut). By holding down the package substrate 70 with the pressing mechanism, warping and lifting of the package substrate 70 can be eliminated, and half-cutting can be performed while the package substrate 70 is in place. Alternatively, by contacting the first blade 11A and measuring the height of the upper surface of the package substrate 70, a half-cut groove can be formed with higher precision. For example, the mechanism described in Japanese Patent Application Publication No. 2022-79910 can be used as the pressing mechanism.

[0068] <Composition of the adsorption plate 100> The configuration of the adsorption plate 100 will be described in more detail below.

[0069] The suction plate 100 shown in Figures 9 to 12 has a discharge passage formed therein for discharging foreign matter (e.g., cutting chips, etc.) from the recess 161 (arrangement space 162). Specifically, the discharge passage is mainly composed of a stepped portion 121, a chamfered portion 122, a first groove portion 123, and a second groove portion 124 formed in the base member 110.

[0070] The stepped portion 121 is formed along the outer peripheral edge of the upper end (adhesion surface 112a) of the protruding portion 112. The stepped portion 121 is formed around the entire circumference of the protruding portion 112. As a result, the stepped portion 121 is formed to surround the periphery of the adhesion surface 112a. The stepped portion 121 is formed to be slightly lower than the central portion (adhesion surface 112a) of the protruding portion 112. Note that the stepped portion 121 is one embodiment of the third passage according to the present invention.

[0071] The chamfered portion 122 is formed by cutting out the four corners of the protruding portion 112, which is formed in a rectangular shape in plan view. The chamfered portion 122 is formed from the upper end to the lower end of the protruding portion 112. By forming the chamfered portion 122, a gap is formed between the protruding portion 112 and the inner surface (opening 151) of the frame-shaped member 150, extending vertically. The upper end of the chamfered portion 122 is connected to the stepped portion 121. The chamfered portion 122 is one embodiment of the first passage according to the present invention.

[0072] The first groove 123 shown in Figures 9 and 11 is formed along the short side of the rectangular projection 112 in plan view. The first groove 123 is formed on the upper surface of the plate-like portion 111 by recessing the portion along the pair of short sides of the projection 112. As a result, the first groove 123 is formed to extend in a direction parallel to the short side of the package substrate 70 held by the suction plate 100.

[0073] The second groove 124 shown in Figures 9, 10, and 11 is formed along the long side of the protruding portion 112, which is formed in a rectangular shape in plan view. The second groove 124 is formed by recessing the portion along the pair of long sides of the protruding portion 112 on the upper surface of the plate-like portion 111. As a result, the second groove 124 is formed to extend in a direction parallel to the long side of the package substrate 70 held by the suction plate 100. Furthermore, both longitudinal ends of the second groove 124 are formed to extend to the end of the plate-like portion 111. As a result, both ends of the second groove 124 are formed to open to the side surface of the plate-like portion 111. Note that the second groove 124 is one embodiment of the second passage according to the present invention.

[0074] The middle portion of the second groove 124 is connected to the first groove 123 near the corner of the protruding portion 112. In this portion, the first groove 123 and the second groove 124 are connected to the chamfered portion 122. In this way, the stepped portion 121, the chamfered portion 122, the first groove 123, and the second groove 124 are connected to each other.

[0075] When the frame-shaped member 150 is attached to the base member 110 on which the stepped portion 121 etc. is formed in this manner, the side surface of the protruding portion 112 and the inner surface (opening 151) of the frame-shaped member 150 fit together, thereby enabling the positioning of the frame-shaped member 150 relative to the base member 110.

[0076] When the frame-shaped member 150 is attached to the base member 110, as shown in Figures 12 and 13, the recess 161 (arrangement space 162) is connected to the outside of the suction plate 100 via the discharge passage (step portion 121, chamfered portion 122, first groove portion 123, and second groove portion 124). Therefore, when the table 50 (suction plate 100) is cleaned in step S11 of Figure 8, foreign matter in the recess 161 is discharged to the outside along with the cleaning water via the discharge passage (for example, discharged along the dotted arrow in Figure 12(b)). This prevents foreign matter from getting stuck between the suction surface 112a of the suction plate 100 and the package substrate 70, and enables high-precision half-cutting.

[0077] Furthermore, as shown in Figures 12(a) and 14, a plurality of vertically extending columnar portions 116 are formed in the recess 114. The columnar portions 116 are formed, for example, in the shape of a rectangular prism. The columnar portions 116 are formed to extend downward from the upper surface of the recess 114. The vertical length of the columnar portions 116 is formed to be approximately the same as the depth of the recess 114. The columnar portions 116 are formed in positions that do not overlap with the suction holes 115. The lower end of the columnar portions 116 is in contact with the upper surface of the base 51 (see Figure 6). The columnar portions 116 can support the base member 110 in which the recess 114 is formed. This prevents deformation of the base member 110 when air is sucked in by the suction mechanism 52 and negative pressure is created inside the recess 114.

[0078] The shape and number of columnar sections 116 are not particularly limited. For example, the columnar sections 116 can be formed in shapes other than rectangular prisms (such as cylindrical shapes). Furthermore, the arrangement and number of columnar sections 116 can be changed arbitrarily.

[0079] Furthermore, the discharge passage can be formed with an appropriate incline to facilitate the discharge of foreign matter through the discharge passage. For example, the second groove 124 shown in Figure 11 may be formed to descend from the left-right center of the plate-shaped portion 111 toward both left and right ends. This facilitates the discharge of foreign matter flowing through the second groove 124 along with the washing water to the outside. In addition, not only the second groove 124 but also other parts (for example, the stepped portion 121, the first groove 123, etc.) may be inclined.

[0080] Although embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and appropriate modifications can be made within the scope of the technical idea of ​​the invention as described in the claims.

[0081] For example, in the above embodiment, as shown in Figure 15(a), an example was shown in which a chamfered portion 122 is formed on the corner of the protruding portion 112 to connect the recessed portion 161 (arrangement space 162) with the first groove portion 123 and the second groove portion 124 formed on the lower part of the protruding portion 112, but the present invention is not limited to this.

[0082] As an example, Figure 15(b) shows a suction plate 100A (base member 110A) according to the first modified example. In the base member 110A according to the first modified example, a stepped portion 121 is left near the corner of the protruding portion 112, and a notch 125 is formed in the middle of one side of the protruding portion 112, which is rectangular in plan view. In this configuration, the recess 161 (arrangement space 162) and the first groove 123 and second groove 124 formed at the lower part of the protruding portion 112 are connected via the notch 125. Furthermore, in this configuration, the side surface of the stepped portion 121 left at the corner of the protruding portion 112 and the inner surface (opening 151) of the frame-shaped member 150 are fitted together, thereby allowing the frame-shaped member 150 to be positioned relative to the base member 110A.

[0083] Thus, the configuration of the discharge passage for discharging foreign matter from the recess 161 (arrangement space 162) is not particularly limited, and the configuration (shape, position, number of passages, etc.) can be arbitrarily changed as long as it can discharge foreign matter from the recess 161.

[0084] For example, in the above embodiment, a stepped portion 121 is shown formed on the outer peripheral edge of the protruding portion 112, but a stepped portion 121 (groove) may also be formed on parts other than the outer peripheral edge of the protruding portion 112 (for example, near the center) as appropriate. Furthermore, it is not necessary to form a stepped portion 121 on the protruding portion 112, and the chamfered portion 122 and the recess 161 may be directly connected.

[0085] Furthermore, in the above embodiment, an example was shown in which the end of the second groove 124 is formed to open to the side surface of the base member 110 (plate-shaped portion 111), and foreign matter is discharged to the outside through this opening. However, the present invention is not limited to this. For example, instead of the second groove 124, the first groove 123 may be formed to open to the side surface of the base member 110, or both the first groove 123 and the second groove 124 may be formed to open to the side surface of the base member 110.

[0086] Furthermore, although the above embodiment shows an example in which a first groove 123 and a second groove 124 are formed parallel to each side of the rectangular projection 112 in plan view, the shape and direction of extension of the grooves are not limited to this, and it is possible to form grooves in any shape and direction.

[0087] Furthermore, although the above embodiment shows an example in which foreign matter is discharged to the outside (to the side of the base member 110) through a second groove 124 that opens on the side surface of the base member 110 (plate-shaped portion 111), the present invention is not limited to this. For example, it is also possible to form a recovery section in the discharge passage that can recover foreign matter, and configure the system to recover foreign matter discharged from the recess 161 (arrangement space 162).

[0088] Furthermore, in the above embodiment, a rectangular suction plate 100 (see Figure 10, etc.) was provided as an example, assuming that a rectangular package substrate 70 was to be cut. However, the present invention is not limited to this, and the shape of the suction plate 100 can be arbitrarily changed according to the shape of the object to be cut (package substrate 70, etc.).

[0089] As an example, Figure 16 shows a suction plate 100B (base member 110B) according to a second modified example. In the base member 110B according to the second modified example, the protruding portion 112 is formed in a square shape in plan view. Although not shown in the figure, the frame-shaped member 150 also has an opening 151 with a shape corresponding to the protruding portion 112 (square shape in plan view). As a result, the suction plate 100B can hold a square-shaped package substrate 70. A suction plate 100B with this shape is suitable for adsorbing relatively large package substrates 70.

[0090] In the base member 110B according to the second modified example shown in Figure 16, similar to the base member 110A according to the first modified example (see Figure 15(b)), a stepped portion 121 is left at the corner of the protruding portion 112, and notches 125 are formed on each side of the protruding portion 112. Furthermore, in the base member 110B according to the second modified example, a plurality of third grooves 126 are formed parallel to the second groove 124 so as to connect to the middle of the first groove 123. The ends of the third grooves 126 are formed to open to the side surface of the base member 110B. In this way, by increasing the number of grooves that open to the side surface of the base member 110B, the discharge of foreign matter can be efficiently promoted.

[0091] Thus, the shape of the suction plate 100B (base member 110B) can be arbitrarily changed as long as it is a shape that can adsorb and hold the object to be cut (package substrate 70, etc.).

[0092] Furthermore, in the above embodiment, the discharge passage (step portion 121, chamfered portion 122, first groove portion 123 and second groove portion 124, etc.) is formed by appropriately processing the base member 110, but the discharge passage does not necessarily have to be formed in the base member 110. For example, the discharge passage may be formed by forming appropriate grooves etc. in the frame-shaped member 150 instead of the base member 110, or by forming appropriate grooves etc. in both the base member 110 and the frame-shaped member 150.

[0093] Furthermore, the cutting device 1 according to the above embodiment may include units other than those described above. For example, the cutting device 1 may include a substrate supply unit for supplying the package substrate 70, an inspection unit for inspecting the package substrate 70 and / or the semiconductor package 80, a cleaning unit for cleaning and / or drying the cut semiconductor package 80, a transport unit for transporting the cut semiconductor package 80 to a storage unit, and so on.

[0094] <Note> The first side of the suction plate 100 of this disclosure is A suction plate 100 for holding a package substrate 70 (object to be cut) having a substrate 71 and a resin layer 72, A base member 110 comprising a plate-shaped portion 111 (base portion) disposed on a base 51 on which a suction mechanism 52 is provided, and a protruding portion 112 formed to protrude upward from the plate-shaped portion 111 and having a suction surface 112a capable of adsorbing the resin layer 72, A frame-shaped member 150 having a mounting surface 152 on which the substrate 71 can be placed, which is arranged to surround the protrusion 112 and is positioned above the suction surface 112a, It is equipped with, At least one of the base member 110 and the frame-shaped member 150 has a discharge passage (step portion 121, chamfered portion 122, first groove portion 123 and / or second groove portion 124) formed therein that allows foreign matter in the arrangement space 162 (defined space) defined by the protrusion portion 112 and the frame-shaped member 150 to be discharged outside the arrangement space 162. The suction plate 100 on the first side of this disclosure allows for the formation of half-cut grooves with high precision. Specifically, foreign matter in the placement space 162 can be discharged to the outside, thereby preventing foreign matter from getting stuck between the suction surface 112a and the package substrate 70.

[0095] In the adsorption plate 100 of the second side conforming to the first side, The discharge passage includes a chamfered portion 122 (first passage) formed between the protruding portion 112 and the frame-shaped member 150, and connected to the arrangement space 162. According to the second side of the suction plate 100 of this disclosure, foreign matter in the placement space 162 can be discharged to the outside via the chamfered portion 122.

[0096] In the adsorption plate 100 with a third side conforming to the second side, The discharge passage includes a second groove 124 (second passage) that connects the chamfered portion 122 and the side surface of the plate-like portion 111. According to the third side of the present disclosure, the suction plate 100 allows foreign matter discharged from the placement space 162 to be discharged to the outside of the base member 110.

[0097] In the adsorption plate 100 of the fourth side following the third side, The package substrate 70 is formed in a rectangular shape, The second groove 124 is formed to extend in a direction parallel to at least one side (long side) of the package substrate 70 that is adsorbed by the adsorption surface 112a. According to the third side suction plate 100 of this disclosure, the suction plate 100 can be made relatively compact by forming the second groove 124 in a direction corresponding to the shape of the package substrate 70. In particular, in the above embodiment, the second groove 124 opening on the side surface of the base member 110 is formed only in a direction parallel to the long side of the package substrate 70 (one direction), so a decrease in the rigidity of the base member 110 can be suppressed. Furthermore, "parallel" includes not only a strict meaning but also a substantive meaning. Therefore, even if the edges of the package substrate 70 and the second groove 124 are not perfectly parallel, they are considered parallel if the difference is within the range of error due to, for example, the arrangement of the package substrate 70.

[0098] In the adsorption plate 100, the fifth side conforming to any of the second to fourth sides, The discharge passage includes a stepped portion 121 (third passage) formed around the adsorption surface 112a and connected to the chamfered portion 122. According to the fifth side of the present disclosure, the suction plate 100 can guide foreign matter to the chamfered portion 122 via the stepped portion 121, thereby effectively promoting the discharge of foreign matter.

[0099] In the adsorption plate 100, the sixth side conforms to any of the first to fifth sides, The thickness of the plate-like portion 111 in the vertical direction is formed to be greater than the thickness of the protruding portion 112 in the vertical direction. According to the sixth side adsorption plate 100 of this disclosure, by forming the plate-like portion 111 with a relatively thick vertical thickness, it becomes easier to ensure the flatness of the adsorption surface 112a.

[0100] In the adsorption plate 100, the seventh side conforms to any of the first to sixth sides, A recess 114 is formed on the bottom surface of the base member 110, which is connected to the suction hole 115 formed in the suction surface 112a. Inside the recess 114, at least one columnar portion 116 is formed that can contact the base 51. The seventh side adsorption plate 100 of this disclosure can suppress deformation of the base member 110 due to the negative pressure generated in conjunction with the package substrate 70.

[0101] Furthermore, the eighth aspect of the cutting device 1 of this disclosure is Adsorption plate 100 on any of the first to seventh sides, The base 51 on which the suction mechanism 52 is provided, It is equipped with the following features. According to the eighth side cutting device 1 of this disclosure, a half-cut groove can be formed with high precision.

[0102] Furthermore, the manufacturing method of electronic components in the ninth aspect of this disclosure is A half-cutting step is performed on the package substrate 70 using the eighth side cutting device 1, A full-cutting step is performed on the package substrate 70 that has been half-cut in the half-cutting step using the cutting device 1, It includes. According to the cutting device 1 of the ninth side of this disclosure, a half-cut groove can be formed with high precision. [Explanation of symbols]

[0103] 1 cutting device 51 Base 52 Suction mechanism 70 Package substrates 71 circuit boards 72 resin layer 100 suction plates 110 Base member 111 Plate-like part 112 Protrusion 112a Adsorption surface 114 recess 115 Adsorption hole 116 Columnar part 121 Stepped section 122 Chamfered section 123 First trench section 124 Second trench section 150 Frame-shaped member 152 Mounting surface 162 Placement space

Claims

1. A suction plate for holding an object to be cut, having a substrate and a resin layer, A base member comprising a base portion disposed on a base provided with a suction mechanism, and a protruding portion formed to project upward from the base portion and having a suction surface capable of adsorbing the resin layer, A frame-shaped member having a mounting surface on which the substrate can be placed, which is arranged to surround the periphery of the protruding portion and is positioned above the suction surface, It is equipped with, At least one of the base member and the frame-shaped member has a discharge passage formed therein that allows foreign matter within the defined space defined by the protrusion and the frame-shaped member to be discharged outside the defined space. Adsorption plate.

2. The discharge passage is formed between the protruding portion and the frame-shaped member and includes a first passage connected to the specified space. The adsorption plate according to claim 1.

3. The discharge passage includes a second passage connecting the first passage and the side surface of the base. The adsorption plate according to claim 2.

4. The object to be cut is formed in a rectangular shape, The second passage is formed to extend in a direction parallel to at least one side of the object to be cut that is adsorbed by the adsorption surface. The adsorption plate according to claim 3.

5. The discharge passage includes a third passage formed around the adsorption surface and connected to the first passage. The adsorption plate according to claim 2.

6. The vertical thickness of the base is formed to be thicker than the vertical thickness of the protruding portion. The adsorption plate according to claim 1.

7. The bottom surface of the base member has a recess formed therein that connects to the adsorption holes formed on the adsorption surface. On the inside of the recess, at least one columnar portion is formed that can contact the base. The adsorption plate according to claim 1.

8. an adsorption plate according to any one of claims 1 to 7, The base on which the suction mechanism is provided, A cutting device equipped with the following.

9. A half-cutting step in which a half-cut is performed on the object to be cut using the cutting device described in claim 8, A full-cutting step is performed using the cutting device to perform a full cut on the object to be cut that has been half-cut in the half-cutting step, including, Manufacturing methods for electronic components.

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