Removable support mechanism and reticle pod equipped with the support mechanism

Abstract

To provide a detachable supporting mechanism and a reticule pod including the supporting mechanism.SOLUTION: A reticle pod with a detachable supporting mechanism is suitable for a dual pod including an outer pod, and an inner pod housed in the outer pod. The inner pod includes: a base; and at least one supporting mechanism mounted on the base. The supporting mechanism includes: a supporting assembly connected to a mounting interface of the base and including a seat, at least one limiting post connected to the seat, and a mounting hole which penetrates through the seat and is not a circular hole; and a supporting member having an adapting structure to match with the mounting hole, the supporting member detachably housed in the mounting hole.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a support mechanism for a reticle pod, and more particularly to a support mechanism having a removable support structure.

Background Art

[0002] In a conventional extreme ultraviolet (EUV) reticle carrier, a reticle is supported via a support mechanism, and the support mechanism includes a support member and a limiting post. The support member is used for placing and contacting the reticle, and the limiting post and the support member are integrated. When assembling the support mechanism to the internal pod base of the reticle pod, in addition to fixing with screws, a knurled pin is riveted inside the limiting post to strengthen the fixing and prevent loosening. Since the inside of the knurled pin and the limiting post is an interference fit, when it is necessary to replace the conventional support structure, first, the limiting post needs to be destroyed, the screws need to be removed, and then the knurled pin needs to be knocked out.

[0003] However, in actual use, only the support member contacts the reticle, and the limiting post only prevents damage to the components of the reticle due to abnormal operating errors in an emergency situation, so the reticle does not contact the limiting post under normal circumstances. In other words, only the support member is a consumable, and the limiting post does not actually need to be replaced. However, in the current design, when it is necessary to replace the support member, the limiting post also needs to be replaced together with the support member, resulting in waste of materials and costs, and there is also a problem that removal becomes inconvenient.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present invention focuses on the above problems of the prior art and provides a removable support structure for simplifying the removal process of the support mechanism and reducing waste of materials and costs. In addition, the support member can be made of a more wear-resistant material according to actual needs, and its lifespan can be extended.

Means for Solving the Problems

[0005] The present invention provides a reticle pod suitable for a dual pod comprising an external pod and an internal pod housed within the external pod. The internal pod comprises a base and at least one support mechanism provided on the base, the support mechanism comprising a support assembly connected to a mounting interface of the base and including a seat, at least one limiting post connected to the seat, and a non-circular mounting hole penetrating the seat, and a support member having a fitting structure for aligning with the mounting hole and being removably housed within the mounting hole.

[0006] In one specific embodiment, the support member has at least one anti-rotation mechanism, and when the support member is installed in the mounting hole, the at least one anti-rotation mechanism abuts against the periphery of the mounting hole.

[0007] In one specific embodiment, the thickness of the anti-rotation mechanism is the same as or similar to the thickness of the seat portion.

[0008] In one specific embodiment, the support member includes a contact portion, a neck portion, and a bottom portion, the contact portion and the bottom portion being connected via the neck portion, and the neck portion having at least one anti-rotation mechanism.

[0009] In one specific embodiment, the support member includes a contact portion, a neck portion, and a bottom portion, the bottom portion is provided with at least one projection, the at least one projection protrudes outward from the bottom portion, the mounting hole is provided with at least one notch, and the at least one notch is at least one protrusion It corresponds to the shape and extends outward from the periphery of the mounting hole.

[0010] In one specific embodiment, the neck portion is provided with at least one anti-rotation mechanism, and the mounting hole is provided with at least one positioning projection, the positioning projection protrudes inward from the periphery of the mounting hole, and the positioning projection abuts against the at least one anti-rotation mechanism to prevent the support member from rotating relative to the support assembly.

[0011] In one specific embodiment, the at least one anti-rotation mechanism is a contact projection extending outward from the surface of the neck portion, and the at least one of the contact projections of the neck portion and the bottom portion protrusion It is offset vertically.

[0012] In one specific embodiment, the bottom portion has at least one recess, the at least one recess is recessed inward from the radial direction of the surface of the bottom portion, and when the support member is inserted into the mounting hole, the bottom portion avoids the positioning projection of the mounting hole.

[0013] In one specific embodiment, the at least one recess and the at least one projection are arranged to be adjacent to each other.

[0014] In one specific embodiment, the support member is provided with fixing holes in the bottom and neck portions, and after the support member is rotated to a position where the contact projection and the positioning projection come into contact with each other, the support member is attached by the cooperation of the fixing element and the fixing holes.

[0015] In one specific embodiment, when the support member is in the positioning position, the lower surface of the contact portion is in contact with the upper surface of the seat portion, and the upper surface of the bottom portion is in contact with the lower surface of the seat portion.

[0016] In one specific embodiment, the support member and the support assembly are made of different materials.

[0017] In one specific embodiment, the glass transition temperature of the support member material is 200°C (392°F) or higher.

[0018] To better understand the present invention, reference can be made to the following drawings and descriptions. While referring to the following drawings, non-limiting and non-exhaustive embodiments will be described. It should be noted that the components in the drawings are not necessarily drawn to actual size and are drawn with a focus on explaining the structure and principle.

Brief Description of the Drawings

[0019] [Figure 1] It is a base perspective view of an internal pod provided with a support mechanism of the present invention. [Figure 2] It is a partially enlarged exploded perspective view of the support mechanism at part A in FIG. 1. [Figure 3] It is a partially enlarged perspective view of the support mechanism when replacing the support member. [Figure 4A] It is a bottom view of a support member according to an embodiment of the present invention. [Figure 4B] It is a front view of a support member according to an embodiment of the present invention. [Figure 4C] It is a perspective view of a support member according to an embodiment of the present invention. [Figure 5A] It is a bottom view of a support member according to an embodiment of the present invention. [Figure 5B] It is a front view of a support assembly according to an embodiment of the present invention. [Figure 6A] It is a perspective view of the support mechanism when the support member according to an embodiment of the present invention is in the positioning position. [Figure 6B] It is a perspective view shown from another angle of the support mechanism when the support member according to an embodiment of the present invention is not in the positioning position. [Figure 7A] It is a perspective view of the support mechanism when the support member according to an embodiment of the present invention is in the positioning position. [Figure 7B] It is a perspective view shown from another angle of the support mechanism when the support member according to an embodiment of the present invention is in the positioning position. [Figure 8A] It is a cross-sectional view of plane B in FIG. 6A. [Figure 8B] It is a cross-sectional view of plane C in FIG. 7A. [Figure 9] This is a partially enlarged exploded three-dimensional view of the support mechanism according to Embodiment 2 of the present invention. [Figure 10] This is a partially enlarged three-dimensional view of the support mechanism when replacing the support member in Embodiment 2 of the present invention. [Figure 11A] This is a side view of a support member according to Embodiment 2 of the present invention. [Figure 11B] This is a top view of a support member according to Embodiment 2 of the present invention. [Figure 12A] This is a side view of a support assembly according to Embodiment 2 of the present invention. [Figure 12B] This is a top view of a support assembly according to Embodiment 2 of the present invention. [Modes for carrying out the invention]

[0020] Referring to Figure 1, the present invention provides a reticle pod suitable for a dual pod comprising an external pod and an internal pod housed within the external pod. The internal pod comprises a base 10, a lid (not shown), and a support mechanism 20 connected to a mounting interface 101 of the base 10 for mounting a reticle.

[0021] (Example 1) Referring to Figure 2, which is an enlarged exploded view of circle A in Figure 1. The removable support mechanism 20 of Embodiment 1 of the present invention comprises a support assembly 21 and a support member 23. The support assembly 21 is provided on the mounting interface 101 of the base 10, and the support member 23 has a fitting structure 23A for aligning with the mounting hole 213 of the support assembly 21, so that the support member 23 is removablely housed in the mounting hole 213 of the support assembly 21.

[0022] Referring to Figures 4A to 4C, the support member 23 comprises a contact portion 231, a fixing hole 234, and a fitting structure 23A. The contact portion 231 can be used to allow the user to hold or rotate the support member 23, and the fixing hole 234 passes through the fitting structure 23A. Referring to Figure 3, the fitting structure 23A passes through the mounting hole 213 and partially abuts against the mounting hole 213 so that the support member can be accommodated in the mounting hole 213. In this embodiment, the fitting structure 23A includes a neck portion 232 and a bottom portion 233. The contact portion 231 and the bottom portion 233 are connected via the neck portion 232, and the fixing hole 234 is provided within the bottom portion 233 and the neck portion 232. In this embodiment, the fixing hole 234 passes through the lower surface 2337 of the bottom portion 233 and extends completely or partially to the neck portion 232. Preferably, the upper surface of the contact portion 231 is used for direct contact with the reticle, the neck portion 232 extends from the lower surface 2315 of the contact portion 231 and from the upper surface 2335 of the bottom portion 233. Preferably, a plurality of contact protrusions 2311 are formed on the upper surface of the contact portion 231 to reduce the contact area between the reticle and the support member 23 when the reticle is placed.

[0023] The periphery of the base 233 has at least one projection 2331 and at least one recess 2333, the projection 2331 protruding outward with respect to the radial direction of the surface of the base 233, and the recess 2333 recessing inward from the radial direction of the surface of the base 233, and the at least one projection 2331 and at least one recess 2333 are arranged to be adjacent to each other. Preferably, the base 233 has a center O1, and the distance R1 from the projection 2331 to the center O1 is greater than the distance p1 from the recess 2333 to the center O1. In an embodiment of the present invention, the periphery of the base 233 has four projections 2331 and four recesses 2333.

[0024] Referring further to Figures 4B and 4C, the neck portion 232 has at least one contact projection 2321 (also called an anti-rotation mechanism) that protrudes radially outward from the surface of the neck portion 232. The neck portion 232 has a thickness d1 in front view. The thickness d1 may be the vertical distance from the lower surface 2315 of the contact portion 231 to the upper surface 2335 of the bottom portion 233. The longest distance R1 of the projection 2331 from the center O1 of the bottom portion 233 specifies the vertical direction Y1, and the shortest distance p1 of the contact projection 2321 from the center O1 of the bottom portion 233 specifies the vertical direction Y2. The projection 2331 and the contact projection 2321 are offset vertically, that is, the vertical directions Y1 and Y2 are parallel but do not overlap.

[0025] Referring to Figures 5A and 5B, the support assembly 21 comprises a seat portion 211, at least one limiting post 212, and a mounting hole 213. At least one limiting post 212 is connected to the seat portion 211, and a fixing hole 2121 is provided inside at least one limiting post 212. The mounting hole 213 is a non-circular hole that penetrates the seat portion 211, and the fitting structure 23A of the support member 23 conforms to the shape of the mounting hole 213, so that the support member 23 can be removably attached to the mounting hole 213. In a front view, the seat portion 211 of the support assembly 21 has a thickness D1 that is substantially the same as or similar to the thickness d1 of the neck portion 232 of the support member 23.

[0026] The periphery of the mounting hole 213 has at least one notch 2131 and at least one positioning projection 2133, the notch 2131 extending outward with respect to the radial direction of the mounting hole 213, and the positioning projection 2133 recessed inward with respect to the radial direction of the mounting hole 213, and at least one notch 2131 and at least one positioning projection 2133 are arranged to be adjacent to each other. When the support member is assembled to the support assembly, the notch 2131 avoids the fitting structure 23A of the support member 23, and the positioning projection 2133 contacts the fitting structure 23A of the support member 23 to position them relative to each other, thereby preventing unnecessary rotation of the support member 23 during assembly.

[0027] In this embodiment, when assembling the support member 23 to the support assembly 21, the projection 2331 of the support member 23 is avoided, and the recess 2333 of the support member 23 is able to avoid the positioning projection 2133. When the support member 23 is assembled to the support assembly 21, the positioning projection 2133 and the contact projection 2321 of the support member 23 are positioned relative to each other. In this embodiment, the mounting hole 213 has a center O2, and the distance R2 from the notch 2131 to the center O2 is greater than the distance p2 from the positioning projection 2133 to the center O2. Preferably, the notch 2131 has a shape corresponding to the projection 2331, and the positioning projection 2133 has a shape corresponding to the recess 2333. Preferably, the distance R2 from the notch 2131 to the center O2 is greater than or equal to the distance R1 from the projection 2331 to the center O1. In this embodiment, the periphery of the mounting hole 213 has four notches 2131 and four positioning protrusions 2133.

[0028] Referring to Figures 6A and 6B, the base portion 10 is omitted in the figures to more clearly show the relative positions of the support member 23 and the support assembly 21. When the support member 23 is housed in the support assembly 21, the user can hold the contact portion 231 of the support member 23 directly or via a robot arm, align the projection 2331 of the support member 23 with the notch 2131 of the mounting hole 213, and insert the support member 23 into the mounting hole 213 until the lower surface of the contact portion 231 and the upper surface 2115 of the seat portion 211 come into contact. At this time, the contact portion 231 is located above the upper surface 2115 of the seat portion 211, the bottom portion 233 is located below the lower surface 2117 of the seat portion 211, and the neck portion 232 is housed within the mounting hole 213. Referring also to Figure 8A, Figure 8A is a cross-sectional view of the B plane of Figure 6A, in which case the abutment projection 2321 and the positioning projection 2133 are not in contact.

[0029] Next, referring to Figures 7A and 7B, after rotating the support member 23 in one direction, the projection 2331 and the notch 2131 are shifted vertically upward, and the upper surface of the bottom 233 comes into contact with the lower surface of the seat 211, preventing the support member 23 from detaching from the vertical direction. Referring to Figure 8B, Figure 8B is a cross-sectional view of plane C in Figure 7A, where the support member 23 is rotated until the contact projection 2321 and the positioning projection 2133 come into contact, and after the support member 23 is positioned, the support member 23 is tightened from below the base 10 via the mounting element 24, and the support member 23 is attached to the support assembly 21 provided on the base 10, completing the installation of the support mechanism 20. The contact projection 2321 and the positioning projection 2133 come into contact with each other, which prevents the support member 23 from rotating relative to the support assembly 21 during the process of tightening the support member 23 with the mounting element 24. Preferably, the distance t1 from the center O1 of the support member 23 to the contact projection 2321 is greater than the distance p2 from the center O1 of the support member 23 to the positioning projection 2133, and the positioning projection 2133 of the mounting hole 213 abuts against the support member 23, thereby preventing the support member 23 from rotating relative to the support assembly 21. In this embodiment, the mounting element 24 is a screw, and the fixing hole 234 is a screw hole corresponding to the screw. The direction of rotation of the support member 23 until the contact projection 2321 and the positioning projection 2133 abut each other is the same as the direction in which the mounting element 24 tightens the support member 23. Therefore, when tightening the support member 23, the contact projection 2321 and the positioning projection 2133 are forced to remain in contact, preventing unnecessary rotation of the support member 23 during the tightening process, thereby improving mounting efficiency.

[0030] The following describes the process of attaching the removable support mechanism of the present invention to the mounting interface of the base. First, referring to Figures 2 and 5A, the support assembly 21 is first fixed by the fixing element 22 through the through hole 102 of the base 10 and the fixing hole 2121 in the limiting post 212. The fixing element 22 can be fixed to the limiting post 212 by riveting a knurled pin to it or by tightening it with a screw.

[0031] Next, referring to Figures 6A and 6B, the projection 2331 of the support member 23 is aligned with the notch 2131 of the mounting hole 213, and the support member 23 is inserted into the mounting hole 213 until the lower surface 2315 of the contact portion 231 and the upper surface 2115 of the seat portion 211 come into contact.

[0032] Furthermore, referring to Figures 7A and 7B, the support member 23 is rotated in one direction, causing the projection 2331 of the support member 23 and the notch 2131 of the mounting hole 213 to shift vertically upward, bringing the upper surface 2335 of the bottom portion 233 and the lower surface 2117 of the seat portion 211 into contact. Referring also to Figure 8B, the support member 23 is rotated until the positioning projection 2133 contacts the contact projection 2321, thereby reaching the positioning position.

[0033] Finally, the support member 23 is tightened with the mounting element 24 from below the through-hole 103 at the base, completing the installation of the support mechanism 20. When the support member 23 is positioned in the mounting hole 213, the contact projection 2321 is forced to remain in contact with the positioning projection 2133 of the mounting hole 213, thereby preventing the support member 23 from rotating relative to the support assembly 21 during the installation process.

[0034] When replacing the support member 23, first remove the mounting element 24, then rotate the support member 23 until the projection 2331 of the support member 23 aligns with the notch 2131 of the mounting hole 213, remove the support member 23 from the mounting hole 213, and then repeat the above procedure to replace the support member 23.

[0035] (Example 2) Please refer to Figure 9 for the support mechanism according to Embodiment 2 of the present invention. The difference between Embodiment 2 and Embodiment 1 lies in the structure of the support member 33 and the support assembly 31.

[0036] The removable support mechanism of Embodiment 2 comprises a support assembly 31 and a support member 33. The support assembly 31 is provided on the mounting interface 101 of the base 10, and the support member 33 is removablely attached to the support assembly 31.

[0037] Referring to Figures 11A and 11B, the support member 33 comprises a main body 331, a fitting structure 33A, and a fixing hole (not shown). The main body 331 is substantially cylindrical in shape, and multiple contact protrusions 3311 are formed on its upper surface to reduce the contact area between the reticle and the support member 33 when the reticle is placed on the top surface. The fitting structure 33A is used to fit into the mounting hole 313 of the support assembly 31 so that the support member 33 is housed in the mounting hole 313 of the support assembly 31. In this embodiment, the fitting structure 33A includes an anti-rotation mechanism 332 that protrudes outward from the main body 331, and the anti-rotation mechanism 332 has a thickness d2 in side view. The fixing hole is formed inside the main body 331 and partially penetrates the main body 331.

[0038] Referring to Figures 12A and 12B, the support assembly 31 has a seat portion 311, at least one limiting post 312, and a mounting hole 313. At least one limiting post 312 is connected to the seat portion 311, and a fixing hole (the same as the fixing hole 2121 in Embodiment 1) is provided inside the at least one limiting post 312. The mounting hole 313 is a non-circular hole that penetrates the seat portion 311. The cross-sectional shape of the anti-rotation mechanism 332 conforms to the shape of the mounting hole 313 so that the support member 33 is housed in the mounting hole 313 and abuts against the mounting hole 313 to prevent the support member 33 from rotating. In a front view, the seat portion 311 of the support assembly 311 has a thickness D2 that is substantially the same as or similar to the thickness d2 of the anti-rotation mechanism 332 of the support member 33.

[0039] The following describes the process of attaching the removable support mechanism of Embodiment 2 of the present invention to the base 10. First, referring to Figure 10, the support assembly 31 is first fixed by the fixing element 22 through the through hole 102 of the lower cover and the fixing hole 2121 in the limiting post 312. The fixing element 22 can be fixed to the limiting post 312 by riveting a knurled pin to it or by tightening it with a screw.

[0040] Next, the user can either directly hold the conforming structure 33A of the support member 33 or hold it via a robot arm, align it with the mounting hole 313, and insert the conforming structure 33A of the support member 33 into the mounting hole 313. Then, the support member 33 is mounted from below the through-hole 103 of the base via the mounting element 24, completing the installation of the support mechanism. Because the cross-sectional shape of the anti-rotation mechanism 332 conforms to the shape of the mounting hole 313, when the support member 33 is placed in the mounting hole 313, the anti-rotation mechanism 332 is forced to remain in contact with the periphery of the mounting hole 313, preventing the support member 33 from rotating relative to the support assembly 31 during the installation process.

[0041] If it is necessary to replace the support member 33, after removing the mounting element 24, the support member 33 can be removed vertically, and then the above procedure can be repeated to replace the support member 33. Since the support assembly 31 does not need to be removed and replaced after being fixed to the base 10, waste of materials and costs can be avoided.

[0042] The removable support mechanisms of Embodiments 1 and 2 of the present invention, due to the removable design of the support members 23 and 33 and the support assemblies 21 and 31, not only have a quick attachment / detachment function but also offer greater flexibility in combination and assembly.

[0043] Preferably, the support assemblies 21, 31 and the support members 23, 33 can be made of different materials or have different surface treatments. For example, the support assemblies 21, 31 can be manufactured using relatively cost-effective materials, and the support members 23, 33 can be made of materials suitable for actual use needs. Preferably, the support members 23, 33 are made of materials with higher wear resistance, for example, materials having a glass transition temperature (Tg) of 200°C (392°F) or higher, and / or materials with good insulation and electrostatic dissipation (e.g., surface resistance 10) in general atmospheric or vacuum environments. 4 ~10 11 A material with the (Ω / sq) function can be selected.

[0044] Preferably, in embodiments of the present invention, the material of the support members 23 and 33 is polyimide (Pi), which significantly improves wear resistance and lifespan. The material of the support members 23 and 33 themselves may be plastic or metal, and surface treatment or surface coating is also possible. The glass transition temperature of the coating material selected for the support members 23 and 33 is 200°C (392°F) or higher, and / or it has insulating and electrostatic dissipation functions in a general atmospheric or vacuum environment, thereby improving the lifespan of the support members 23 and 33.

[0045] By selecting materials with high wear resistance and performance for the support members 23 and 33, the wear resistance and lifespan of the support members 23 and 33 are effectively improved, and contamination of the reticle by particles is reduced. [Explanation of symbols]

[0046] 10 base 101 Mounting Interface 102 Through-hole 103 Through Hole 20 Support mechanism 21 Support assembly 211 Seat area 212 Restricted Posts 2121 Fixing hole 213 mounting holes 2131 Notch 2133 Positioning protrusion 22 Fixed elements 23 Support member 23A Compatible structure 231 Contact area 2311 Contact convexity 2315 Bottom surface 232 Neck section 2321 Contact projection 233 Bottom 2331 protrusion 2333 recess 2335 Top surface 2337 Bottom surface 234 fixing hole 24 Mounting elements 31 Support assembly 311 Base 312 Restricted Post 313 Mounting holes 33 Support member 33A Compatible structure 331 Main unit 3311 Contact convexity 332 Anti-rotation mechanism d1, D1, d2, D2 thickness R1, R2, p1, p2, n1 distance A yen B, C plane Y1, Y2 vertical direction

Claims

1. A reticle pod suitable for a dual pod comprising an external pod and an internal pod housed within the external pod, wherein the internal pod is It comprises a base and at least one support mechanism provided on the base, The aforementioned support mechanism is A support assembly connected to the mounting interface of the base, including a seat, at least one limiting post connected to the seat, and a mounting hole that is not a round hole and penetrates the seat, The system comprises a support member having a fitting structure for aligning with the aforementioned mounting hole and being removably housed within the aforementioned mounting hole, Reticle pod.

2. The reticle pod according to claim 1, wherein the support member has at least one anti-rotation mechanism, and when the support member is provided in the mounting hole, the at least one anti-rotation mechanism abuts against the periphery of the mounting hole.

3. The reticle pod according to claim 2, wherein the thickness of the anti-rotation mechanism is the same as or similar to the thickness of the seat portion.

4. The reticle pod according to claim 2, wherein the support member includes a contact portion, the fitting structure includes a neck portion and a bottom portion, the contact portion and the bottom portion are connected via the neck portion, and the neck portion has at least one anti-rotation mechanism.

5. The reticle pod according to claim 1, wherein the support member includes a contact portion, the fitting structure includes a neck portion and a bottom portion, the bottom portion is provided with at least one projection, the at least one projection protrudes outward from the bottom portion, and the mounting hole is provided with at least one notch, the at least one notch corresponds to the shape of the at least one projection and extends outward from the periphery of the mounting hole.

6. The reticle pod according to claim 5, wherein at least one anti-rotation mechanism is provided on the neck portion, at least one positioning projection is provided in the mounting hole, the positioning projection protrudes inward from the periphery of the mounting hole, and the positioning projection abuts against the at least one anti-rotation mechanism to prevent the support member from rotating relative to the support assembly.

7. The reticle pod according to claim 6, wherein the at least one anti-rotation mechanism is a contact projection extending outward from the surface of the neck portion, and the contact projection of the neck portion and the at least one projection of the bottom portion are offset in the vertical direction.

8. The reticle pod according to claim 6, wherein the bottom portion has at least one recess, the at least one recess is recessed radially inward from the surface of the bottom portion, and the bottom portion avoids the positioning projection of the mounting hole when the support member is inserted into the mounting hole.

9. The reticle pod according to claim 8, wherein the at least one recess and the at least one projection of the bottom are arranged to be adjacent to each other.

10. The reticle pod according to claim 7, wherein the support member is provided with a fixing hole formed in the bottom, and after the support member is rotated to a position where the contact projection and the positioning projection contact each other, the support member is fixed to the mounting hole by the cooperation of the fixing element and the fixing hole.

11. The reticle pod according to claim 10, wherein when the support member is in the positioning position, the lower surface of the contact portion is in contact with the upper surface of the seat portion, and the upper surface of the bottom portion is in contact with the lower surface of the seat portion.

12. The reticle pod according to claim 1, wherein the glass transition temperature of the material of the support member is 200°C or higher.

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