Mounting system, component holding device, planar motor device, and mounting method

Abstract

The present disclosure addresses the problem of stabilizing the attitude of a movable unit when a component is mounted on a mounting surface of an object. In a mounting system (10) according to the present disclosure, a movable unit (1) mounts a component being held by a holding unit (12) on a mounting surface of an object, and a control unit (4) controls the movable unit (1) so that the movable unit (1) moves along the plane of a stator (21). One of the movable unit (1) and the stator (21) comprises a first magnet (22) including an electromagnet, and the other includes a second magnet (17) that opposes the electromagnet when the component being held by the holding unit (12) is mounted on the mounting surface of the object. The control unit (4) controls the magnetic poles of the electromagnet so that, when the component being held by the holding unit (12) is mounted on the mounting surface of the object, the magnetic pole of a part of the electromagnet opposing the second magnet (17) and the magnetic pole of a part of the second magnet (17) opposing the electromagnet are different.

Description

Technical Field

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[0007]

[0001] The present disclosure generally relates to a mounting system, a component holding device, a planar motor device, and a mounting method. More specifically, the present disclosure relates to a mounting system, a component holding device, a planar motor device, and a mounting method for mounting components on a mounting surface of an object.

Background Art

[0002] Patent Document 1 describes an electronic component mounting apparatus that mounts an electronic component on a substrate placed on a base using a nozzle attached to a work head having a planar linear motor provided above the base as a drive source.

[0003] The planar linear motor has a platen formed in a flat plate shape and three movers magnetically coupled to the platen. The three movers can freely move around within the platen.

[0004] In the mounting system (electronic component mounting apparatus) described in Patent Document 1, the posture of the movable part (work head) may not be stable when mounting a component (electronic component) on the mounting surface of an object (substrate).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

[0006] An object of the present disclosure is to provide a mounting system, a component holding device, a planar motor device, and a mounting method capable of stabilizing the posture of a movable part when mounting a component on a mounting surface of an object.

[0007] An assembly system according to one aspect of the present disclosure comprises a movable part and a control unit. The movable part includes a holding part for holding a component, and mounts the component held by the holding part onto the mounting surface of an object. The control unit controls the movable part so that it moves along the plane of a stator having a plane. One of the movable part and the stator has a first magnet including an electromagnet. The other of the movable part and the stator has a second magnet. The second magnet faces the electromagnet when mounting the component held by the holding part onto the mounting surface of the object. When mounting the component held by the holding part onto the mounting surface of the object, the control unit controls the magnetic poles of the electromagnet such that the magnetic poles of the portion of the electromagnet facing the second magnet are different from the magnetic poles of the portion of the second magnet facing the electromagnet. The control unit controls the magnetic poles of the electromagnet and the magnitude of the magnetic force produced by the electromagnet, thereby enabling the movable part to move relative to the stator. The movable part is able to move along the plane of the stator while magnetically levitating relative to the stator by the magnetic force produced by the electromagnet.

[0008] A component holding device according to one aspect of the present disclosure is a component holding device used in the mounting system. The component holding device comprises the movable part. The movable part further includes a movable element. The movable element is to which the holding part is attached and is movable along the plane of the stator.

[0009] A planar motor device according to one aspect of the present disclosure is a planar motor device used in the aforementioned mounting system. The planar motor device comprises a stator and a movable element. The movable element has a holding portion attached to it and is movable along the plane of the stator.

[0010] An implementation method according to one aspect of the present disclosure is an implementation method used in an implementation system comprising a movable part and a control unit. The movable part includes a holding part for holding a component, and the component held by the holding part is implemented on the implementation surface of an object. The control unit controls the movable part so that it moves along the plane of a stator having a plane. One of the movable part and the stator has a first magnet including an electromagnet. The other of the movable part and the stator has a second magnet. The second magnet faces the electromagnet when implementing the component held by the holding part on the implementation surface of the object. The implementation method includes a step of controlling the magnetic poles of the electromagnet such that the magnetic poles of the portion of the electromagnet facing the second magnet and the magnetic poles of the portion of the second magnet facing the electromagnet are different when implementing the component held by the holding part on the implementation surface of the object. In the above process, the movable part is made movable relative to the stator by controlling the magnetic poles of the electromagnet and the magnitude of the magnetic force produced by the electromagnet. The movable part is made movable along the plane of the stator while magnetically levitating relative to the stator by the magnetic force produced by the electromagnet. [Brief explanation of the drawing]

[0011] [Figure 1] Figure 1 is a block diagram of the implementation system according to the embodiment. [Figure 2] Figure 2 is a perspective view of the implementation system shown above, seen from the front. [Figure 3] Figure 3 is a rear-view perspective of the same implementation system. [Figure 4] Figure 4 is a cross-sectional view of the same implementation system along line XX in Figure 2. [Figure 5] Figure 5 is an enlarged view of part A in Figure 4, relating to the same implementation system. [Figure 6] Figure 6 is a schematic diagram illustrating the relationship between the magnetic forces generated between the stator and the movable element of the same implementation system. [Figure 7] Figure 7 is another schematic diagram illustrating the relationship between the magnetic forces generated between the stator and the movable part of the same implementation system. [Figure 8] Figure 8 is yet another schematic diagram illustrating the relationship between the magnetic forces generated between the stator and the movable part of the same implementation system. [Figure 9] Figure 9 is a cross-sectional view of the same implementation system along the ZZ line in Figure 2. [Figure 10] Figures 10A to 10D are explanatory diagrams for explaining the operation of the mounting portion of the same mounting system. [Figure 11] Figure 11 is a flowchart showing the mounting method executed by the same mounting system. [Figure 12] Figure 12 is an explanatory diagram for explaining the operation of the movable element of the same mounting system. [Figure 13] Figure 13 is a flowchart showing the overall operation of the same mounting system. [Figure 14] Figure 14 is a time chart showing the operation of the same mounting system. [Figure 15] Figure 15 is an explanatory diagram for explaining the operation of the same mounting system. [Figure 16] Figure 16 is an explanatory diagram for explaining the operation of the mounting system according to Modification Example 1 of the embodiment.

Mode for Carrying Out the Invention

[0012] (Embodiment) Hereinafter, the mounting system, component holding device, planar motor device, and mounting method according to the embodiment will be described with reference to the drawings. Each figure described in the following embodiment is a schematic diagram, and the ratio of the size and thickness of each component does not necessarily reflect the actual dimensional ratio. Also, the configuration described in the following embodiment is only an example of the present disclosure. The present disclosure is not limited to the following embodiment, and various modifications can be made according to the design and the like as long as the effects of the present disclosure can be achieved.

[0013] (1) Outline of the Mounting System First, the outline of the mounting system 10 according to the present embodiment will be described.

[0014] As shown in FIGS. 2 and 3, the mounting system 10 according to this embodiment is a mounting device (mounter) for mounting component 100 onto object 20. The mounting system 10 is used, for example, in facilities such as factories, research institutes, offices, and educational institutions for operations in the manufacture of various products such as electronic devices, automobiles, clothing, foodstuffs, pharmaceuticals, and handicrafts.

[0015] In this embodiment, the case where the mounting system 10 is used in the manufacture of electronic devices in a factory will be described. A general electronic device has various circuit boards such as a power supply circuit and a control circuit, for example. In the manufacture of these circuit boards, as an example, a solder application process, a mounting process, and a soldering process are performed in this order. In the solder application process, cream solder is applied (or printed) onto a substrate (including a printed wiring board). In the mounting process, components (including electronic components) are mounted onto the substrate. In the soldering process, for example, the substrate with components mounted thereon is heated in a reflow furnace to melt the cream solder and perform soldering. The mounting system 10 performs the operation of mounting component 100 onto substrate 200 as object 20 in the mounting process.

[0016] As described above, the mounting system 10 used for mounting component 100 onto object 20 (substrate 200) includes a movable part 1 and a control part 4, as shown in FIG. 1.

[0017] The movable part 1 includes a holding part 12 for holding component 100. The holding part 12 is, for example, a suction nozzle and holds component 100 in a state where it can be released (i.e., the holding is released). In the mounting system 10, the movable part 1 lowers the holding part 12 close to the substrate 200 while holding component 100 by the holding part 12, and mounts component 100 onto the mounting surface 201 of the substrate 200. That is, the movable part 1 mounts component 100 held by the holding part 12 onto the mounting surface 201 of object 20 (substrate 200).

[0018] The control unit 4 controls the movable part 1 so that it moves along the plane 211 (see Figure 4) of the stator 21. The stator 21 is a rectangular flat plate when viewed from a plane in the direction in which the stator 21 and the movable part 1 are aligned (the Z-axis direction, described later). Therefore, the plane 211 is also rectangular when viewed from a plane in the direction in which the stator 21 and the movable part 1 are aligned.

[0019] One of the movable part 1 and the stator 21 has a first magnet 22 including an electromagnet 221 (see Figure 6). The other of the movable part 1 and the stator 21 has a second magnet 17. The second magnet 17 faces the electromagnet 221 when mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20. In this embodiment, as shown in Figure 1, the stator 21 has the first magnet 22 and the movable part 1 has the second magnet 17. Therefore, in this embodiment, the stator 21 has the electromagnet 221.

[0020] When mounting the component 100 held by the holding unit 12 onto the mounting surface 201 of the object 20, the control unit 4 controls the magnetic poles of the electromagnet 221 such that the magnetic pole of the portion of the electromagnet 221 facing the second magnet 17 is different from the magnetic pole of the portion of the second magnet 17 facing the electromagnet 221.

[0021] In this mounting system 10, when mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20, the magnetic poles of the part of the electromagnet 221 facing the second magnet 17 and the magnetic poles of the part of the second magnet 17 facing the electromagnet 221 are different. As a result, the magnetic force (magnetic attraction) generated between the electromagnet 221 and the second magnet 17 makes it possible to fix the movable part 1 to the stator 21. Consequently, when mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20, it becomes possible to stabilize the posture of the movable part 1.

[0022] (2) Details Next, we will describe the details of the implementation system 10 according to this embodiment.

[0023] (2.1) Premise In this embodiment, as an example, the case in which the mounting system 10 is used to mount a component 100 using surface mount technology (SMT) will be described. That is, the component 100 is a surface mount device (SMD) and is mounted by being placed on the surface (mounting surface 201) of the substrate 200, which is the object 20. However, the mounting system 10 may also be used to mount the component 100 using insertion mount technology (IMT), not limited to this example. In this case, the component 100 is an insertion mount component having lead terminals and is mounted on the surface (mounting surface 201) of the substrate 200, which is the object 20, by inserting the lead terminals into holes in the substrate 200.

[0024] In this disclosure, "orthogonal" means not only a state in which the angle between two objects is exactly 90 degrees, but also a state in which the angle between two objects is within a substantially effective tolerance (e.g., ±5 degrees). Similarly, in this disclosure, "parallel" means not only a state in which the angle between two objects is exactly 0 degrees, but also a state in which the angle between two objects is within a substantially effective tolerance (e.g., ±5 degrees).

[0025] In this disclosure, "movement of the movable part" means that the movable part is displaced along the plane of the stator while it is floating above the stator due to magnetic repulsion. In this disclosure, "stopping of the movable part" means that the movable part is in close contact with the stator and stationary due to magnetic attraction.

[0026] In the following example, we define three mutually orthogonal axes: the X, Y, and Z axes. The axes parallel to the surface (mounting surface 201) of the substrate 200, which is the object 20, are defined as the "X" and "Y" axes, and the axis parallel to the thickness direction of the substrate 200 is defined as the "Z" axis. Furthermore, one of the two directions along the Z axis is defined as the upward direction, and the other direction as the downward direction. For example, when the movable part 1 faces the mounting surface 201 of the substrate 200, the substrate 200 is located below the movable part 1. Note that the X, Y, and Z axes are all virtual axes, and the arrows indicating "X," "Y," and "Z" in the drawings are for illustrative purposes only and do not represent actual axes. Also, these directions are not intended to limit the direction in which the mounting system 10 can be used.

[0027] (2.2) Configuration of the implementation system Next, each component of the implementation system 10 according to this embodiment will be described with reference to Figures 1 to 10.

[0028] As shown in Figures 1 to 3, the mounting system 10 according to this embodiment includes a plurality of movable parts 1, a drive unit 2, a plurality of power units 3, a control unit 4, a plurality of parts supply units 5, a parts recognition unit 6, a parts disposal unit 7, a nozzle replacement unit 8, a mounting unit 9, and a transmitting / receiving unit 25. However, the drive unit 2, power units 3, parts supply units 5, parts recognition unit 6, parts disposal unit 7, nozzle replacement unit 8, mounting unit 9, and transmitting / receiving unit 25 are not essential components of the mounting system 10. In other words, all or part of the drive unit 2, power units 3, parts supply units 5, parts recognition unit 6, parts disposal unit 7, nozzle replacement unit 8, mounting unit 9, and transmitting / receiving unit 25 may not be included as components of the mounting system 10. Also, in this embodiment, the plurality of power units 3 and the plurality of parts supply units 5 correspond one-to-one, but the plurality of power units 3 and the plurality of parts supply units 5 do not have to correspond one-to-one. In other words, the number of power units 3 may be more or less than the number of component supply units 5.

[0029] (2.2.1) Movable parts Each of the multiple movable parts (mounting heads) 1 has at least one holding part 12. In this embodiment, each movable part 1 has one holding part 12. Each movable part 1 moves the holding part 12 closer to the substrate 200 while the holding part 12 holds the component 100, and mounts the component 100 onto the mounting surface 201 of the substrate 200. In other words, each movable part 1 holds the holding part 12 so that it can move toward the substrate 200.

[0030] In this embodiment, each movable part 1 further includes, in addition to the holding part 12, a movable element 11, a first pressure accumulator (pressure accumulator) 13, a second pressure accumulator 14, a battery 15, an actuator 16, a second magnet 17, a head 18, and a control unit 24. That is, each movable part 1 further includes, in addition to the first pressure accumulator 13, a second pressure accumulator 14 which is different from the first pressure accumulator 13. In the mounting system 10 according to this embodiment, one head 18 holds one movable element 11, one holding part 12, one first pressure accumulator 13, one second pressure accumulator 14, one battery 15, and one actuator 16. As a result, each movable part 1 can hold one component 100 with one holding part 12. In addition, in the mounting system 10, one head 18 holds multiple permanent magnets 171 as the second magnet 17. In this embodiment, the movable part 1, which is the other of the stator 21, has a second magnet 17.

[0031] The movable element 11, together with the stator 21 described later, constitutes a planar motor device (planar servo motor) 40. That is, the planar motor device 40 is a planar motor device used in the mounting system 10, and comprises a stator 21 and a movable element 11. The movable element 11 faces the stator 21 in the Z-axis direction. More specifically, the movable element 11 is located below the stator 21 in the Z-axis direction (vertical direction). The movable element 11 is controlled by the motor driver 41 of the control unit 4 described later and is movable along the plane 211 (see Figure 4) of the stator 21.

[0032] The movable element 11 has a protruding portion 19. As shown in Figure 5, the protruding portion 19 is formed integrally with the movable element 11 and protrudes from the movable element 11 in an L-shape. The protruding portion 19 has a second connecting surface 191. The second connecting surface 191 can be connected to a first connecting surface 34 provided on the power unit body 33 of the power unit 3, which will be described later, when the movable part 1 is in the first position (the position shown in Figure 5). That is, the movable part 1 further has a protruding portion 19 which has a second connecting surface 191 that can be connected to the first connecting surface 34 provided on the air adjustment unit 31. The second connecting surface 191 is provided with a vent 192 through which air passes when the internal pressure of the first pressure accumulator 13 and the second pressure accumulator 14 is adjusted by the air adjustment unit 31, which will be described later. The vent 192 is connected to a flow path 193 provided inside the protruding portion 19, and the internal pressure of the first accumulator 13 and the second accumulator 14 is regulated by the air passing through the vent 192 and the flow path 193. Here, "the first connecting surface 34 and the second connecting surface 191 are connected" means that the flow path 36 connected to the vent 35 provided on the first connecting surface 34 and the flow path 193 connected to the vent 192 provided on the second connecting surface 191 are fluidly connected, forming an air flow path between the flow path 36 and the flow path 193. When the movable portion 1 is in the first position, a gap G1 is provided between the first connecting surface 34 and the second connecting surface 191, as shown in Figure 5. The gap G1 is a gap (gap) that does not allow air to leak when the first connecting surface 34 and the second connecting surface 191 are facing each other. The gap G1 should preferably be as small as possible to suppress air leakage.

[0033] The holding part 12 is, for example, a suction nozzle. The holding part 12 is controlled by the control unit 24, which will be described later, and can switch between a holding state in which it holds the part 100 and a release state in which it releases the part 100 (releases its hold). Regarding the holding of the part 100 by the holding part 12, the movable part 1 operates by receiving a supply of pneumatic pressure (vacuum) as power. In this embodiment, the movable part 1 switches between the holding state and the release state of the holding part 12 by opening and closing the valve of the first pressure vessel 13. That is, the holding part 12 holds the part 100 using the air in the first pressure vessel 13. When opening the valve of the first pressure vessel 13 to release the part 100, it is preferable to also open the valve of the second pressure vessel 14. In this case, the air released from the holding part 12 pushes the part 100 away from the holding part 12, making it easier for the part 100 to separate from the holding part 12.

[0034] The first pressure accumulator (first pressure chamber) 13 is, for example, an air tank. The internal pressure of the first pressure accumulator 13 is adjusted by the air adjustment unit 31. More specifically, the internal pressure of the first pressure accumulator 13 is adjusted to negative pressure by the air adjustment unit 31 drawing in air. The internal pressure of the first pressure accumulator 13 is adjusted to negative pressure by the air adjustment unit 31 when, for example, the movable part 1 is in the first position. When the internal pressure of the first pressure accumulator 13 is adjusted to negative pressure, the component 100 is held (adsorbed) by the holding part 12. When the valve of the first pressure accumulator 13 is opened and air flows into the first pressure accumulator 13, the internal pressure of the first pressure accumulator 13 changes from negative pressure to atmospheric pressure, and the holding state of the component 100 is released.

[0035] The second pressure accumulator (second pressure chamber) 14, like the first pressure accumulator 13, is, for example, an air tank. The internal pressure of the second pressure accumulator 14 is adjusted by the air adjustment unit 31. More specifically, the internal pressure of the second pressure accumulator 14 is adjusted to positive pressure by the air adjustment unit 31 supplying air. The internal pressure of the second pressure accumulator 14 is adjusted to positive pressure by the air adjustment unit 31 when, for example, the movable part 1 is in the first position. The valve of the second pressure accumulator 14 is opened, and the air inside the second pressure accumulator 14 is released at low pressure by an air blow, pushing the part 100 away from the holding part 12. As a result, the internal pressure of the second pressure accumulator 14 becomes atmospheric pressure.

[0036] The storage battery 15 is, for example, an electric double-layer capacitor (EDLC). The storage battery 15 is powered by the power supply unit 32. The power supply from the power supply unit 32 to the storage battery 15 may be contact-type or non-contact-type. The storage battery 15 is powered by the power supply unit 32 when, for example, the movable part 1 is in the second position. In this embodiment, the first position and the second position are the same position, and as an example, the first position and the second position are holding positions (adsorption positions) P1 (see Figure 4) in which the holding part 12 holds (adsorbs) the component 100.

[0037] The actuator 16 moves the holding part 12 linearly in the Z-axis direction. Furthermore, the actuator 16 rotates the holding part 12 in a rotational direction (hereinafter referred to as the "θ" direction) about an axis along the Z-axis direction. In this embodiment, as an example, the actuator 16 is driven by a driving force generated by a linear motor for the movement of the holding part 12 in the Z-axis direction. Also, the actuator 16 is driven by a driving force generated by a rotary motor for the movement of the holding part 12 in the θ direction. On the other hand, as will be described later, the movable part 1 moves linearly in the X-axis direction and the Y-axis direction along the plane 211 of the stator 21 of the drive unit 2. As a result, the holding part 12 included in the movable part 1 can be moved in the X-axis direction, Y-axis direction, Z-axis direction and the θ direction by the drive unit 2 and the actuator 16.

[0038] The second magnet 17 includes multiple permanent magnets 171, as shown in Figures 6 to 8. The multiple permanent magnets 171 are arranged in a matrix in the X-axis and Y-axis directions. In Figures 6 to 8, six permanent magnets 171 are arranged in the X-axis direction. Although not shown, at least one permanent magnet 171 is arranged in the Y-axis direction. Each of the multiple permanent magnets 171 is oriented so that both its S and N poles are in the Z-axis direction. In Figures 6 to 8, the six permanent magnets 171 arranged in the X-axis direction are oriented so that the magnetic poles on the stator 21 side are in the order of "S pole", "N pole", "S pole", "N pole", "S pole", "N pole" from left to right. Note that in Figures 6 to 8, for each of the multiple permanent magnets 171, only the symbol representing the magnetic pole on the stator 21 side (upper side) is shown, and the symbol representing the magnetic pole on the opposite side (lower side) from the stator 21 side is omitted.

[0039] The first pressure vessel 13, the second pressure vessel 14, the battery 15, the actuator 16, and the multiple permanent magnets 171 (second magnet 17) described above are housed in the head 18. The head 18 is, for example, made of metal and formed in the shape of a hollow cylindrical tube. The head 18 also holds the holding part 12 via the actuator 16. Such a head 18 is attached to the movable element 11 and is movable in the X and Y directions as the movable element 11 moves in the X and Y directions. In other words, the holding part 12 is attached to the movable element 11.

[0040] The control unit 24 controls each part of the movable part 1. The control unit 24 can be implemented by a computer system having one or more processors and one or more memories. That is, the control unit 24 functions by one or more processors executing a program recorded in one or more memories of the computer system. In this case, the program is pre-recorded in the memory of the control unit 24, but it may also be provided, for example, via a telecommunication line such as the Internet, or recorded and provided on a non-temporary recording medium such as a memory card.

[0041] As shown in Figure 1, the control unit 24 includes a motor driver 241. The motor driver 241 is electrically connected to the actuator 16. The motor driver 241 outputs control signals to the actuator 16 to move the actuator 16 in the Z-axis direction and the θ-axis direction.

[0042] Furthermore, the control unit 24 controls the opening and closing of the valves of the first pressure vessel 13 and the second pressure vessel 14. This switches between the state in which the component 100 is held by the holding unit 12 and the state in which it is released.

[0043] In the movable part 1 described above, air is stored in the first pressure vessel 13 when the movable part 1 is in the first position (holding position P1). When the movable part 1 is not in the first position, that is, when the movable part 1 is in a position different from the first position, the holding part 12 can hold (adsorb) the component 100 using the air stored in the first pressure vessel 13. Also in the movable part 1, power is stored in the battery 15 when the movable part 1 is in the second position (holding position P1). When the movable part 1 is in the planned mounting position P3 (see Figure 4), the power stored in the battery 15 allows the holding part 12 to move in the Z-axis direction and the θ direction.

[0044] Here, the movable part 1 performs a retrieval operation in the first position. The retrieval operation is the operation of the holding part 12 taking out (picking up) the part 100 from the part supply unit 5 that supplies the part 100. More specifically, with the movable part 1 in the first position, the holding part 12 is lowered toward the part supply unit 5 to hold the part 100 in the holding part 12, and then the holding part 12 holding the part 100 is raised. Therefore, according to the mounting system 10 of this embodiment, while the holding part 12 is taking out the part 100, it is possible to adjust the internal pressure of the first pressure vessel 13 and the second pressure vessel 14 and supply power to the storage battery 15.

[0045] In this embodiment, the component holding device 30 is configured by the movable part 1. That is, the component holding device 30 is a component holding device used in the mounting system 10 and comprises the movable part 1. The movable part 1 further includes a movable element 11. The movable element 11 has a holding part 12 attached to it and is movable along the plane 211 of the stator 21.

[0046] (2.2.2) Drive Unit The drive unit 2 includes a stator 21 and a magnetizable body 23. The magnetizable body 23 is, for example, an iron plate. Each of the stator 21 and the magnetizable body 23 is a rectangular flat plate that is elongated in the X-axis direction when viewed from the Z-axis direction. The stator 21 has a plane 211. In this embodiment, as shown in Figures 6 to 8, the magnetizable body 23 is positioned below the stator 21 in the Z-axis direction (vertical direction), and the lower surface 231 of the magnetizable body 23 functions as the plane 211 of the stator 21. That is, in this embodiment, the stator 21 and the magnetizable body 23 constitute the "stator" of this disclosure. The magnetizable body 23 is used to average the magnetic force of a plurality of electromagnets 221 as the first magnet 22, which will be described later. The stator 21, together with the movable body 11 described above, constitutes a planar motor device 40. The drive unit 2 is controlled by the motor driver 41 of the control unit 4, which will be described later, and drives the movable part 1 (movable element 11) so that it moves along the plane 211 of the stator 21.

[0047] The drive unit 2 has a first magnet 22 in addition to the stator 21 and the magnetizable body 23. The drive unit 2 has a plurality of electromagnets 221 as the first magnet 22. That is, the first magnet 22 includes electromagnets 221. The plurality of electromagnets 221 are arranged in a matrix in the X-axis direction and the Y-axis direction. In Figures 6 to 8, 18 electromagnets 221 are arranged in the X-axis direction. Although not shown, at least one electromagnet 221 is arranged in the Y-axis direction. The plurality of electromagnets 221 are arranged between the stator 21 and the magnetizable body 23 in the Z-axis direction. Each of the plurality of electromagnets 221 has a coil, and when the coil is energized, magnetic poles (N pole or S pole) are generated at both ends in the winding axis direction of the coil. The orientation of each of the plurality of electromagnets 221 is adjusted so that the winding axis direction of the coil is the Z-axis direction. In Figures 7 and 8, only the symbol representing the magnetic pole generated on the movable element 11 side (lower side) of each of the multiple electromagnets 221 is shown, and the symbol representing the magnetic pole on the opposite side (upper side) from the movable element 11 is omitted. In this embodiment, the stator 21, which is one of the movable part 1 and the stator 21, has a first magnet 22 which includes the electromagnet 221.

[0048] (2.2.3) Power part As shown in Figure 2, the multiple power units 3 are arranged at equal intervals along the X-axis. Each of the multiple power units 3 includes an air adjustment unit 31, a power supply unit 32, and a power unit body 33 (see Figure 5), as shown in Figure 1. The air adjustment unit 31 includes, for example, an air pump capable of both drawing in and supplying air. When the movable unit 1 is in the first position, the air adjustment unit 31 adjusts the internal pressure of the first pressure accumulator (pressure accumulator) 13 to negative pressure by drawing in air with the air pump. Also, when the movable unit 1 is in the first position, the air adjustment unit 31 adjusts the internal pressure of the second pressure accumulator 14 to positive pressure by supplying air with the air pump. The power supply unit 32 includes, for example, an AC-DC converter. When the movable unit 1 is in the second position, the power supply unit 32 supplies power (DC power) to the storage battery 15.

[0049] The air adjustment unit 31 and the power supply unit 32 are housed in the power unit body 33. The power unit body 33 is, for example, rectangular parallelepiped and has a first connection surface 34 (see Figure 5). When the movable part 1 is in the first position (the position shown in Figure 5), the magnetic poles of the multiple electromagnets 221 provided on the stator 21 side are made different from the magnetic poles of the multiple permanent magnets 171 provided on the movable part 11 side, so that the movable part 11 and the stator 21 are in close contact and in a stable state. At this time, the first connection surface 34 faces the second connection surface 191, which is provided on the protruding part 19 of the movable part 1, with a gap G1 between them. The first connection surface 34 is provided with a vent 35 through which air passes when the air adjustment unit 31 adjusts the internal pressure of the first pressure accumulator 13 and the second pressure accumulator 14. The vent 35 is connected to a flow path 36 located inside the power unit body 33, and the internal pressure of the first accumulator 13 and the second accumulator 14 is adjusted by the air passing through the vent 35 and the flow path 36. When the movable part 1 is performing the withdrawal operation in the first position, the vent 35 on the first connection surface 34 and the vent 192 on the second connection surface 191 face each other in the Z-axis direction, and the flow path 36 connected to the vent 35 and the flow path 193 connected to the vent 192 are connected. This makes it possible for the air adjustment unit 31 to adjust the internal pressure of the first accumulator 13 and the second accumulator 14.

[0050] Here, as shown in Figures 4 and 5, the power unit 3 is located outside the outer edge 2111 of the plane 211 in a plan view from the Z-axis direction (normal direction of the plane 211). In other words, the air adjustment unit 31 included in the power unit 3 is located outside the outer edge 2111 of the plane 211 in a plan view from the normal direction of the plane 211.

[0051] Furthermore, when the movable part 1 is performing the extraction operation in the first position, in a plan view from the Z-axis direction (normal direction of the plane 211), at least a part of the protruding portion 19 is located outside the outer edge 2111 of the plane 211. In this embodiment, in a plan view from the Z-axis direction, the entire protruding portion 19 is located outside the outer edge 2111 of the plane 211. When the movable part 1 is in the first position, as shown in Figure 5, the first connecting surface 34 provided on the power unit 3 and the second connecting surface 191 provided on the protruding portion 19 of the movable part 1 are connected. Here, when the movable part 1 is in the first position, as shown in Figure 5, the movable part 1 and the stator 21 are in close contact and stable, and a gap G1 is provided between the first connecting surface 34 and the second connecting surface 191. When the movable part 1 moves at high speed along the plane 211 of the stator 21 toward the first position, the gap G1 is provided, making it possible to avoid collision between the movable part 1 and the power unit 3.

[0052] (2.2.4) Control Unit The control unit 4 controls each part of the implementation system 10. The control unit 4 can be implemented by a computer system having one or more processors and one or more memories. That is, the control unit 4 functions by one or more processors executing a program recorded in one or more memories of the computer system. In this case, the program is pre-recorded in the memory of the control unit 4, but it may also be provided, for example, via a telecommunication line such as the Internet, or recorded and provided on a non-temporary recording medium such as a memory card.

[0053] As shown in Figures 2 and 3, the control unit 4 includes a plurality of motor drivers 41. The plurality of motor drivers 41 are electrically connected to the drive unit 2. The plurality of motor drivers 41 output control signals to the drive unit 2 and control the drive unit 2 so that the plurality of movable parts 1 move along the plane 211 in the X-axis and Y-axis directions. In other words, the control unit 4 controls the movable parts 1 so that they move along the plane 211 of the stator 21.

[0054] Furthermore, the control unit 4 executes the first control step ST1, the second control step ST2, and the third control step ST3, which will be described later. The first control step ST1 is a step in which the movable element 11 is magnetically levitated relative to the stator 21 by the magnetic force of the electromagnet 221. More specifically, in the first control step ST1, the control unit 4 magnetically levitates the movable element 11 relative to the stator 21 by applying a magnetic force to the electromagnet 221 that is opposite to the direction of the magnetic force of the permanent magnet 171. The second control step ST2 is a step in which the movable element 11 is moved along the plane 211 of the stator 21 while the movable element 11 is magnetically levitated relative to the stator 21. More specifically, in the second control step ST2, the control unit 4 makes the magnetic poles of the electromagnets 221 in the direction of travel of the movable element 11 different for each of the multiple permanent magnets 171, and increases the magnitude of the magnetic force of the electromagnets 221 compared to the magnitude of the magnetic force in the first control step ST1, so that the movable element 11 moves along the direction of travel. The third control step ST3 is a step of fixing the movable element 11 to the stator 21 when mounting the component 100 held by the holding unit 12 onto the mounting surface 201 of the object 20. More specifically, in the third control step ST3, the control unit 4 controls the magnetic poles of the electromagnets 221 so that the magnetic poles of the portion of the electromagnet 221 facing the second magnet 17 are different from the magnetic poles of the portion of the second magnet 17 facing the electromagnet 221. As a result, the movable element 11 is fixed to the stator 21 by the magnetic force generated between the electromagnet 221 and the second magnet 17.

[0055] Furthermore, the control unit 4 is electrically connected to the power unit 3, the parts supply unit 5, the parts recognition unit 6, and the mounting unit 9. The control unit 4 outputs a control signal to the power unit 3, controlling it to adjust the internal pressure of the first pressure vessel 13 and the second pressure vessel 14 and to supply power to the battery 15. In addition, the control unit 4 outputs a control signal to the parts recognition unit 6, controlling the parts recognition unit 6 and acquiring images captured by the parts recognition unit 6 from the parts recognition unit 6. The control unit 4 also outputs a control signal to the mounting unit 9, controlling it to adjust the position of the substrate 200 mounted on the mounting unit 9.

[0056] (2.2.5) Parts Supply Department As described above, the multiple parts supply units 5 correspond one-to-one with the multiple power units 3 and are arranged at equal intervals along the X-axis. Each of the multiple parts supply units 5 supplies parts 100 that are held by the holding parts 12 of each movable unit 1. Each parts supply unit 5 has, for example, a parts feeder that supplies parts 100 contained in a carrier tape. Each movable unit 1 holds parts 100 from any of the multiple parts supply units 5 by the holding parts 12.

[0057] (2.2.6) Component Recognition Unit As shown in Figure 1, the component recognition unit 6 has a camera 61. The camera 61 captures an image from below of the movable part 1 as it moves between above the component supply unit 5 and above the planned mounting position P3 (see Figure 4) on the mounting surface 201 of the substrate 200. Therefore, the image captured by the camera 61 shows the component 100 held by the holding unit 12. In other words, the image captured by the camera 61 contains information about the relative positional relationship between the holding unit 12 and the component 100, or in other words, information about the displacement of the component 100 relative to the holding unit 12. It is preferable that the camera 61 does not capture images continuously, but rather captures images when the holding unit 12 holding the component 100 passes above the camera 61. The camera 61 may also be installed below the component supply unit 5. The mounting system 10 may also further include an illumination device to illuminate the imaging area of ​​the camera 61. As shown in Figure 4, when the movable part 1 is located above the component recognition unit 6, the movable part 1 is located at the recognition position P2. Furthermore, for the movable part 1 that returns to above the part recognition part 6 in the return process ST11 (see Figure 13) described later, the recognition position P2 is also the origin position P0.

[0058] (2.2.7) Parts Disposal Section The parts disposal section 7 is a space for disposing of defective parts 100 that have been removed from the parts supply section 5 by the holding section 12. A "defective part" refers to a part that, for example, has scratches on its surface and may not be able to perform its function as a part. If the control unit 4 determines, for example, that a part 100 has scratches based on an image captured by the camera 61 of the parts recognition section 6, it issues an instruction to dispose of the part 100 in the parts disposal section 7. With each movable part 1 positioned above the parts disposal section 7, it opens the valve of the first pressure vessel 13 and the valve of the second pressure vessel 14, and the low-pressure air released from the holding section 12 blows the part 100 away from the holding section 12. As a result, the part 100 is disposed of in the parts disposal section 7. In addition, each movable part 1 may clean the holding section (nozzle) 12 after disposing of the part 100. For example, by opening the valve of the second pressure vessel 14 and blowing high-pressure air, it becomes possible to clean the inside of the holding part 12. That is, when the movable part 1 is located above the parts disposal part 7, it performs at least one of the following: disposal of parts 100 and cleaning of the holding part 12.

[0059] (2.2.8) Nozzle replacement section The nozzle replacement unit 8 has multiple types of holding parts (suction nozzles) 12. Each of the multiple types of holding parts 12 corresponds to a different size of part 100. Each movable part 1 replaces the holding part 12 according to the size of the part 100 that it holds.

[0060] (2.2.9) Mounting section The mounting section 9 is on which the substrate 200 (object 20) transported to the mounting space by the transport section described later is placed. As shown in Figure 9, the mounting section 9 has a pair of support members 91. Each of the pair of support members 91 is a long rod in the X-axis direction. The pair of support members 91 are arranged at a predetermined distance in the Y-axis direction. The predetermined distance is shorter than the length of the substrate 200 in the Y-axis direction. Each of the pair of support members 91 is pivotable in the Y-axis direction by two eccentric pins 92.

[0061] Figures 10A to 10D are explanatory diagrams illustrating the operation of the mounting section 9. In the following explanation, one of the pair of support members 91 (the upper support member 91 in Figure 10A) may be referred to as the "first support member 91," and the other support member 91 (the lower support member 91 in Figure 10A) may be referred to as the "second support member 91." Also, one of the two eccentric pins 92 that hold the first support member 91 (the right side in Figure 10A) may be referred to as the "first eccentric pin 92," and the other eccentric pin 92 (the left side in Figure 10A) may be referred to as the "second eccentric pin 92." Furthermore, one of the two eccentric pins 92 that hold the second support member 91 (the right side in Figure 10A) may be referred to as the "third eccentric pin 92," and the other eccentric pin 92 (the left side in Figure 10A) may be referred to as the "fourth eccentric pin 92."

[0062] Figure 10A shows the state in which the pair of support members 91 constituting the mounting section 9 are in their initial positions. In this state, each of the pair of support members 91 is parallel to the X-axis, and the distance between the pair of support members 91 in the Y-axis direction is narrower than the length of the substrate 200 in the Y-axis direction. Therefore, it is possible to place the substrate 200 on the pair of support members 91.

[0063] When the first eccentric pin 92 and the third eccentric pin 92 are rotated in the first direction from the initial position shown in Figure 10A, the first support member 91 rotates counterclockwise around the second eccentric pin 92 as the center of rotation, and the second support member 91 rotates counterclockwise around the fourth eccentric pin 92 as the center of rotation. As a result, as shown in Figure 10B, the right ends of the first support member 91 and the second support member 91 are displaced in the Y-axis direction. In the state shown in Figure 10B, the pair of support members 91 are parallel to each other.

[0064] When the second and fourth eccentric pins 92 are rotated in a second direction (opposite to the first direction) from the initial position shown in Figure 10A, the first support member 91 rotates clockwise around the first eccentric pin 92 as the center of rotation, and the second support member 91 rotates clockwise around the third eccentric pin 92 as the center of rotation. As a result, the left ends of the first support member 91 and the second support member 91 are displaced in the Y-axis direction, as shown in Figure 10C. In the state shown in Figure 10C, the pair of support members 91 are parallel to each other.

[0065] When the first eccentric pin 92 and the third eccentric pin 92 are rotated in a first direction, and the second eccentric pin 92 and the fourth eccentric pin 92 are rotated in a second direction, the first support member 91 and the second support member 91 are translated in the Y-axis direction, as shown in Figure 10D. In the state shown in Figure 10D, each of the pair of support members 91 is parallel to the X-axis.

[0066] In this mounting section 9, the amount of displacement of the pair of support members 91 can be adjusted by adjusting the amount of rotation of each of the four eccentric pins 92.

[0067] In this embodiment, it is preferable to provide an inspection step between the mounting process using the mounting system 10 and the subsequent soldering process. In this case, the amount of displacement of the components 100 relative to the substrate 200 is measured in the inspection step, and the measurement results are fed back to the mounting system 10, making it possible to adjust the orientation of the substrate 200 based on the measurement results. Specifically, the control unit 4 adjusts the amount of displacement of the pair of support members 91 that constitute the mounting section 9 on which the substrate 200 is placed, based on the measurement results fed back from the inspection step. This makes it possible to adjust the amount of displacement of the pair of support members 91 before the substrate 200 is transported to the mounting section 9. Therefore, it is possible to shorten the working time compared to the case where the diagonal positions of the substrate 200 brought into the mounting space are recognized by a camera or the like, and the orientation of the substrate 200 is adjusted based on the recognition results.

[0068] The inspection process is not limited to being between the mounting process and the soldering process; it may also be provided after the soldering process. In this case, after the component 100 is soldered to the substrate 200, the amount of displacement of the component 100 relative to the substrate 200 is measured, and the measurement result is fed back to the mounting system 10.

[0069] (2.2.10) Transmitting and Receiving Unit The transmitting / receiving unit 25 is configured to communicate with a higher-level system directly or indirectly via a network or repeater. The transmitting / receiving unit 25 receives a first control signal, a second control signal, a third control signal, and a fourth control signal from the higher-level system. The first control signal is a signal for controlling the first magnet 22 of the drive unit 2 and is output from the transmitting / receiving unit 25 to the control unit 4. The second control signal is a signal for controlling the air adjustment unit 31 and the power supply unit 32 of the power unit 3 and is output from the transmitting / receiving unit 25 to the control unit 4. The third control signal is a signal for controlling the opening and closing of the valve of the first pressure accumulator 13 and the valve of the second pressure accumulator 14 and is output from the transmitting / receiving unit 25 to the control unit 24 of the movable unit 1. The fourth control signal is a signal for controlling the actuator 16 and is output from the transmitting / receiving unit 25 to the control unit 24 of the movable unit 1.

[0070] (2.2.11) Enclosure The implementation system 10 according to this embodiment further comprises a housing 101, as shown in Figures 2 and 3. The housing 101 has a plurality of (four in the illustrated example) support columns 1011, a top plate 1012, a middle plate 1013, and a bottom plate 1014. The top plate 1012, middle plate 1013, and bottom plate 1014 are supported by the plurality of support columns 1011 and are arranged in the order of top plate 1012, middle plate 1013, and bottom plate 1014 with spacing between them, starting from one end (top) in the Z-axis direction.

[0071] The multiple motor drivers 41 described above are mounted on one side (top surface) of the middle plate 1013 and are arranged along the X-axis direction. The drive unit 2 described above is mounted on the other side (bottom surface) of the middle plate 1013. The component recognition unit 6, component disposal unit 7, nozzle replacement unit 8, and mounting unit 9 described above are mounted on one side (top surface) of the bottom plate 1014. On one side of the bottom plate 1014, the component recognition unit 6, component disposal unit 7, and nozzle replacement unit 8 are arranged in the order of component disposal unit 7, component recognition unit 6, and nozzle replacement unit 8 from one end (left side in Figure 2) in the X-axis direction.

[0072] (2.2.12) Others The mounting system 10 may also include a transport unit in addition to a movable unit 1, a drive unit 2, a power unit 3, a control unit 4, a parts supply unit 5, a parts recognition unit 6, a parts disposal unit 7, a nozzle replacement unit 8, and a mounting unit 9.

[0073] The transport unit transports the substrate 200, which is the object 20, to the mounting unit 9. The transport unit is implemented, for example, by a belt conveyor. The transport unit transports the substrate 200, for example, along the X-axis. The transport unit transports the substrate 200 to a mounting space at least below the movable unit 1, that is, opposite the holding unit 12 in the Z-axis direction. The transport unit then stops the substrate 200 in the mounting space until the mounting of the components 100 onto the substrate 200 by the movable unit 1 is completed.

[0074] (3) Implementation method Next, the implementation method according to this embodiment will be described with reference to Figures 6 to 8, 11 and 12.

[0075] The mounting method according to this embodiment is a mounting method used in a mounting system 10. The mounting system 10 comprises a movable part 1 and a control unit 4. The movable part 1 includes a holding part 12 for holding a component 100. The movable part 1 mounts the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20 (substrate 200). The control unit 4 controls the movable part 1 so that it moves along the plane 211 of the stator 21 which has a plane 211. One of the movable part 1 and the stator 21 (the stator 21 in this embodiment) has a first magnet 22 including an electromagnet 221 (see Figure 6). The other of the movable part 1 and the stator 21 (the movable part 1 in this embodiment) has a second magnet 17. The second magnet 17 faces the electromagnet 221 when mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20. The mounting method includes a step of controlling the magnetic poles of the electromagnet 221 such that the magnetic pole of the portion of the electromagnet 221 facing the second magnet 17 is different from the magnetic pole of the portion of the second magnet 17 facing the electromagnet 221 when mounting the component 100 held by the holding portion 12 onto the mounting surface 201 of the object 20.

[0076] In other words, the mounting method according to this embodiment is a mounting method used in the mounting system 10 according to this embodiment. In this mounting method, when mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20, the magnetic poles of the part of the electromagnet 221 facing the second magnet 17 and the magnetic poles of the part of the second magnet 17 facing the electromagnet 221 are different. As a result, the magnetic force (magnetic attraction) generated between the electromagnet 221 and the second magnet 17 makes it possible to fix the movable part 1 to the stator 21. As a result, when mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20, it is possible to stabilize the posture of the movable part 1.

[0077] (3.1) Operation of the control unit The control unit 4 of the implementation system 10 according to this embodiment executes the implementation method described above. The operation of the control unit 4 will be described below with reference to Figures 6 to 8 and Figure 11.

[0078] Figures 6 to 8 are schematic diagrams showing the relationship of magnetic forces between the movable element 11 and the stator 21 of the mounting system 10 according to this embodiment. Figure 11 is a flowchart showing the operation of the control unit 4 of the mounting system 10, including the mounting method according to this embodiment. As shown in Figure 11, the mounting method includes a first control step ST1, a second control step ST2, and a third control step ST3.

[0079] When the current to the multiple electromagnets 221 provided on the stator 21 is stopped, as shown in Figure 6, the movable part 11 is fixed to the stator 21 (more precisely, the magnetizable body 23) by the magnetic force (magnetic attraction) F1 acting between the multiple permanent magnets 171 provided on the movable part 1 and the magnetizable body 23. The magnetic force F1 from the multiple permanent magnets 171 acts in the direction from the movable part 11 toward the stator 21 (upward). At this time, since the current to the multiple electromagnets 221 is stopped, no magnetic poles (south pole and north pole) are generated in each electromagnet 221.

[0080] From the state shown in Figure 6, the control unit 4 of the implementation system 10 executes the first control step ST1. In the first control step ST1, as shown in Figure 7, the control unit 4 magnetically levitates the movable element 11 relative to the stator 21 by the magnetic force (magnetic repulsion) F2 acting between two or more electromagnets 221 that are facing the multiple permanent magnets 171 in the Z-axis direction and the multiple permanent magnets 171. More specifically, in the first control step ST1, the control unit 4 controls the magnetic poles of two or more electromagnets 221 so that the magnetic poles of the multiple permanent magnets 171 and the magnetic poles of two or more electromagnets 221 that are facing the multiple permanent magnets 171 in the Z-axis direction are the same. The control unit 4 also controls the magnitude of the current flowing through each coil of the two or more electromagnets 221 so that the magnetic force F2 from the two or more electromagnets 221 is greater than the magnetic force F1 from the multiple permanent magnets 171. As a result, the movable element 11 becomes magnetically levitated relative to the stator 21, as shown in Figure 7. The magnetic force F2 from the two or more electromagnets 221 acts in a direction from the stator 21 toward the movable element 11 (downward). Therefore, the movable element 11 is magnetically levitated relative to the stator 21 by the difference between the magnetic force F1 from the multiple permanent magnets 171 and the magnetic force F2 from the two or more electromagnets 221.

[0081] From the state shown in Figure 7, the control unit 4 executes the second control step ST2. In the second control step ST2, the control unit 4 controls the magnetic poles and magnetic force magnitude of one or more electromagnets 221 that are located in the direction of travel of the movable element 11. As a result, a magnetic attractive force is generated between one or more permanent magnets 171 that are located in the direction of travel of the movable element 11 and the one or more electromagnets 221, and the movable element 11 moves in the direction of travel due to this magnetic attractive force. In other words, in the implementation system 10 according to this embodiment, the movable part 1 (movable element 11) can move relative to the stator 21 by the control unit 4 controlling the magnetic poles and magnetic force magnitude of the electromagnets 221. More specifically, the movable part 1 (movable element 11) can move along the plane 211 of the stator 21 while magnetically levitating relative to the stator 21 by the magnetic force of the electromagnets 221. The movement of the movable element 11 along the plane 211 of the stator 21 will be explained in detail in the section "(3.2) Movement of the movable element" below.

[0082] When the control unit 4 executes the second control step ST2 and the movable element 11 reaches the target position (target position in the X-axis direction and target position in the Y-axis direction) in the plane 211 of the stator 21, the control unit 4 executes the third control step ST3. In the third control step ST3, the control unit 4 fixes the movable element 11 (movable part 1) to the stator 21. More specifically, in the third control step ST3, the control unit 4 controls the magnetic poles of two or more electromagnets 221 such that the magnetic poles of the multiple permanent magnets 171 are different from the magnetic poles of two or more electromagnets 221 that face the multiple permanent magnets 171 in the Z-axis direction. At this time, the magnetic force F3 acting between the two or more electromagnets 221 and the multiple permanent magnets 171 acts in the direction from the movable element 11 toward the stator 21 (upward). Therefore, as shown in Figure 8, the movable element 11 is fixed to the stator 21 (more precisely, the magnetizable body 23) by the combined magnetic force of the magnetic force F1 from the multiple permanent magnets 171 and the magnetic force F3 from two or more electromagnets 221. Subsequently, the control unit 4 performs the mounting process ST17 (see Figure 13) described later, with the movable element 11 (movable part 1) fixed to the stator 21. That is, when energizing the electromagnets 221 and mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20, the movable part 1 (movable element 11) is fixed to the stator 21 by the magnetic force from the permanent magnets 171 and the magnetic force from the electromagnets 221.

[0083] Furthermore, when mounting the component 100 held by the holding unit 12 onto the mounting surface 201 of the object 20 (substrate 200), the control unit 4 controls the magnetic poles of the electromagnet 221 so that the magnetic poles of the portion of the electromagnet 221 facing the second magnet 17 are different from the magnetic poles of the portion of the second magnet 17 facing the electromagnet 221. In other words, the mounting method according to this embodiment includes a step (third control step ST3) of controlling the magnetic poles of the electromagnet 221 so that the magnetic poles of the portion of the electromagnet 221 facing the second magnet 17 are different from the magnetic poles of the portion of the second magnet 17 facing the electromagnet 221 when mounting the component 100 held by the holding unit 12 onto the mounting surface 201 of the object 20 (substrate 200). At this time, as described above, the multiple permanent magnets 171 (second magnets 17) face two or more electromagnets 221 in the Z-axis direction (see Figure 8).

[0084] Here, the magnetic force F3 from two or more electromagnets 221 may be the same magnitude as the magnetic force F1 from multiple permanent magnets 171, may be greater than or less than the magnetic force F1. In any case, the magnetic attractive force between the movable element 11 and the stator 21 is greater than when the two or more electromagnets 221 are not energized. Therefore, it becomes possible to fix the movable element 11 to the stator 21 more firmly than when the two or more electromagnets 221 are not energized, and as a result, it becomes possible to stabilize the posture of the movable element 11 (movable part 1).

[0085] (3.2) Movement of the movable part Next, the operation of the movable element 11 will be explained with reference to Figure 12. Note that Figure 12 omits the illustration of the multiple permanent magnets 171, the multiple electromagnets 221, and the magnetizable body 23.

[0086] At time t1, the current to the multiple electromagnets 221 is stopped, and the movable element 11 is fixed to the stator 21 by the magnetic force F1 (see Figure 6) from the multiple permanent magnets 171.

[0087] At time t2, the control unit 4 controls the magnetic poles and magnetic force magnitudes of two or more electromagnets 221 that are facing the multiple permanent magnets 171 in the Z-axis direction. At this time, the magnetic poles of the multiple permanent magnets 171 and the magnetic poles of the two or more electromagnets 221 are the same, and the magnetic force F2 (see Figure 7) from the two or more electromagnets 221 is greater than the magnetic force F1 (see Figure 7) from the multiple permanent magnets 171, so the movable element 11 is magnetically levitated relative to the stator 21.

[0088] At time t3, the control unit 4 controls the magnetic poles and magnetic force magnitude of one or more electromagnets 221 that are located in the direction of travel of the movable element 11 (to the right in Figure 12). At this time, the magnetic poles of one or more permanent magnets 171 located in the direction of travel of the movable element 11 are different from the magnetic poles of the one or more electromagnets 221, and the magnetic force of the one or more electromagnets 221 is greater than the magnetic force of the one or more permanent magnets 171, so the movable element 11 starts to move in the direction of travel (to the right in Figure 12). Between time t3 and time t6, the control unit 4 alternately switches the magnetic poles of the one or more electromagnets 221 so that the movable element 11 moves in the direction of travel.

[0089] Between time t3 and time t4, the movable element 11 is accelerated by the magnetic force from the one or more electromagnets 221, and as shown in Figure 12, it is tilted at an angle so that the part on the direction of travel approaches the stator 21.

[0090] Between time t4 and time t5, the movable element 11 is moving at a constant speed due to the magnetic force from the one or more electromagnets 221, and as shown in Figure 12, the surface on the stator 21 side is parallel to the plane 211 of the stator 21.

[0091] At time t6, the control unit 4 controls the magnitude of the magnetic force from one or more electromagnets 221 located in the direction of travel of the movable element 11, in order to stop the movable element 11 at the target position (target position in the X-axis direction and target position in the Y-axis direction) in the plane 211 of the stator 21. At this time, since the magnetic force from the one or more electromagnets 221 is smaller than the magnetic force from one or more permanent magnets 171 located in the direction of travel of the movable element 11, the movable element 11 begins to decelerate. Between time t6 and time t7, the movable element 11 is decelerating due to the magnetic force from the one or more electromagnets 221, and as shown in Figure 12, the part on the direction of travel side is tilted diagonally away from the stator 21.

[0092] At time t7, the control unit 4 controls the magnetic poles and magnetic force magnitudes of two or more electromagnets 221 that are facing the multiple permanent magnets 171 in the Z-axis direction. At this time, the magnetic poles of the multiple permanent magnets 171 and the magnetic poles of the two or more electromagnets 221 are the same, and the magnetic force of the two or more electromagnets 221 is greater than the magnetic force of the multiple permanent magnets 171, so the movable element 11 is magnetically levitated relative to the stator 21.

[0093] At time t8, the control unit 4 controls the magnetic poles and magnetic force magnitudes of two or more electromagnets 221 that are facing the multiple permanent magnets 171 in the Z-axis direction. At this time, since the magnetic poles of the multiple permanent magnets 171 and the magnetic poles of the two or more electromagnets 221 are different, the movable element 11 is fixed to the target position in the plane 211 of the stator 21 by the magnetic force F1 (see Figure 8) from the multiple permanent magnets 171 and the magnetic force F3 (see Figure 8) from the two or more electromagnets 221.

[0094] (4) Overall operation of the implemented system Next, the overall operation of the implementation system 10 according to this embodiment will be described with reference to Figures 13 and 14.

[0095] First, the mounting system 10 performs the return process ST11. In the return process ST11, the mounting system 10 returns each movable part 1 to its origin position P01, P02, P03, ... (see Figure 9). Also, in the return process ST11, as shown in Figure 14, the valves of the first pressure vessel 13 and the second pressure vessel 14 are open, and the internal pressure of the first pressure vessel 13 and the second pressure vessel 14 is at atmospheric pressure.

[0096] Next, the mounting system 10 performs the adjustment process ST12. In the adjustment process ST12, the mounting system 10 moves each movable part 1 to a holding position P1 (first position, second position), and then adjusts the internal pressure of the first pressure accumulator 13 and the second pressure accumulator 14, respectively. More specifically, in the adjustment process ST12, as shown in Figure 14, the air adjustment unit 31 adjusts the internal pressure of the first pressure accumulator 13 to negative pressure and the internal pressure of the second pressure accumulator 14 to positive pressure.

[0097] Next, the implementation system 10 performs the energy storage process ST13. In the energy storage process ST13, the implementation system 10 stores power in the battery 15. More specifically, in the energy storage process ST13, as shown in Figure 14, the power supply unit 32 supplies power to the battery 15.

[0098] Next, the mounting system 10 performs the holding process ST14. In the holding process ST14, the mounting system 10 moves (lowers) the holding part 12, which is located above the part 100 supplied from the part supply unit 5, toward the part supply unit 5, causing the holding part 12 to hold the part 100. Then, the mounting system 10 moves (rises) the holding part 12, which is holding the part 100, toward the part supply unit 5. After that, the mounting system 10 stops the air adjustment unit 31 and closes the valve of the first pressure accumulator 13 and the valve of the second pressure accumulator 14. In other words, the internal pressure of the first pressure accumulator 13 is maintained at a negative pressure, and the internal pressure of the second pressure accumulator 14 is maintained at a positive pressure. In this embodiment, since the mounting system 10 has multiple holding parts 12, in the holding process ST14, the mounting system 10 drives each of the multiple holding parts 12 to cause each of the multiple holding parts 12 to hold the part 100.

[0099] Next, the mounting system 10 performs the recognition process ST15. In the recognition process ST15, as shown in Figure 14, the mounting system 10 moves the movable part 1 above the component recognition unit 6, and then moves (lowers) the holding part 12 to a height that can be recognized by the component recognition unit 6. The mounting system 10 then uses the camera 61 of the component recognition unit 6 to image the area including the holding part 12 and the component 100. Here, when the movable part 1 moves from the holding position P1 to the recognition position P2 (see Figure 4), the holding part 12 rotates to match the mounting angle of the component 100 with respect to the planned mounting position P3. As a result, the component recognition unit 6 recognizes the component 100 and the holding part 12 with the angle of the component 100 aligned with the mounting angle to the substrate 200, so that even if the dimensional accuracy of the actuator 16, etc., is not good, it is possible to improve the mounting accuracy of the component 100.

[0100] Next, the mounting system 10 performs the movement process ST16. In the movement process ST16, the mounting system 10 drives a plurality of movable parts 1 with the drive unit 2 and moves each movable part 1 so that each movable part 1 is positioned above the corresponding planned mounting position P3 (see Figure 4).

[0101] Next, the mounting system 10 executes the mounting process ST17. In the mounting process ST17, the mounting system 10 moves (lowers) the holding part 12, which is located above the planned mounting position P3 on the mounting surface 201 of the substrate 200, toward the substrate 200, thereby mounting the component 100 to the planned mounting position P3 on the mounting surface 201 of the substrate 200. At this time, in order to release the component 100 from being held by the holding part 12, the mounting system 10 opens the valve of the first pressure vessel 13, and then opens the valve of the second pressure vessel 14 (see Figure 14). This releases the component 100 from being held by the holding part 12. Then, the mounting system 10 moves (rises) the holding part 12, which has released the component 100, toward the substrate 200. In this embodiment, since the mounting system 10 has a plurality of holding parts 12, in the mounting process ST17, the mounting system 10 mounts the components 100 by driving each of the plurality of holding parts 12. Also in this embodiment, in the mounting process ST17, the mounting system 10 drives (controls) all of the plurality of movable parts 1 simultaneously so that all of the plurality of components 100 held by the plurality of holding parts 12 are mounted simultaneously to different planned mounting positions P3. Here, "simultaneous" includes not only cases where the times are exactly the same, but also cases where the times differ by a range that is considered to be the same (for example, ±1 second).

[0102] The flowchart in Figure 13 is merely one example of the overall operation of the implemented system 10, and processes may be omitted or added as appropriate, or the order of processes may be changed as appropriate. For example, if the origin position P0 and the holding position P1 are the same position, the return process ST11 may be omitted. Also, for example, the adjustment process ST12 may be performed between the energy storage process ST13 and the holding process ST14.

[0103] (5) Movement of movable parts Next, the operation of the multiple movable parts 1 provided in the implementation system 10 according to this embodiment will be described with reference to Figure 15.

[0104] As shown in Figure 15, the multiple parts supply units 5 include parts supply unit 5A (first parts supply unit) and parts supply unit 5B (second parts supply unit). Parts supply units 5A and 5B are arranged along the direction (X-axis direction) in which the object 20 is transported to the mounting unit 9. More specifically, parts supply unit 5A is located on the transport unit side (left side in Figure 15) in the X-axis direction compared to parts supply unit 5B.

[0105] As shown in Figure 15, the multiple movable parts 1 include a movable part 1A (first movable part) and a movable part 1B (second movable part). In the example shown in Figure 15, movable part 1A takes a component 100 from a component supply unit 5A and mounts the component 100 at the planned mounting position P31 on the mounting surface 201 of the substrate 200. Movable part 1B takes a component 100 from a component supply unit 5B and mounts the component 100 at the planned mounting position P32 on the mounting surface 201 of the substrate 200.

[0106] In the mounting system 10 according to this embodiment, the control unit 4 controls the movable parts 1A and 1B so that the first movement path R1 and the second movement path R2 intersect in a plan view from the Z-axis direction (normal direction of the plane 211), as shown in Figure 15. The first movement path R1 is the path that the movable part 1A moves when the movable part 1A mounts the component 100 taken from the component supply unit 5A onto the mounting surface 201 of the target object 20 (substrate 200). The second movement path R2 is the path that the movable part 1B moves when the movable part 1B mounts the component 100 taken from the component supply unit 5B onto the mounting surface 201 of the target object 20 (substrate 200).

[0107] In the implementation system 10 according to this embodiment, as described above, the movable element 11 included in the movable part 1 and the stator 21 included in the drive unit 2 constitute the planar motor device 40. Therefore, as described above, it is possible to move the two movable parts 1A and 1B such that their movement paths (first movement path R1, second movement path R2) intersect. The same applies to three or more movable parts 1 including the movable parts 1A and 1B.

[0108] (6) Effects In the mounting system 10 according to the embodiment, when mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20, the magnetic poles of the portion of the electromagnet 221 facing the second magnet 17 and the magnetic poles of the portion of the second magnet 17 facing the electromagnet 221 are different. As a result, the magnetic force (magnetic attraction) generated between the electromagnet 221 and the second magnet 17 makes it possible to fix the movable part 1 to the stator 21. Consequently, when mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20, the posture of the movable part 1 can be stabilized. Furthermore, by stabilizing the posture of the movable part 1, it is possible to improve the mounting accuracy of the component 100 on the substrate 200.

[0109] Furthermore, in the implementation system 10 according to this embodiment, when the power supply to the electromagnet 221 is stopped, the movable part 1 is fixed to the stator 21 by the magnetic force of the permanent magnet 171. This makes it possible to stabilize the posture of the movable part 1 by the magnetic force of the permanent magnet 171 even when the power supply to the electromagnet 221 is stopped. It also makes it possible to reduce the risk of the movable part 1 falling when the power supply to the implementation system 10 is stopped.

[0110] Furthermore, according to the implementation system 10 of the embodiment, the control unit 4 controls the magnetic poles of the electromagnet 221 and the magnitude of the magnetic force of the electromagnet 221, thereby enabling the movable part 1 to move along the plane 211 of the stator 21.

[0111] Furthermore, in the mounting system 10 according to the embodiment, when mounting the component 100 held by the holding part 12 onto the mounting surface 201 of the object 20 (substrate 200), the movable part 1 is fixed to the stator 21 by the magnetic force F1 of the permanent magnet 171 and the magnetic force F3 of the electromagnet 221. Therefore, compared to the case where the movable part 1 is fixed to the stator 21 by the magnetic force F1 of the permanent magnet 171 alone, it is possible to fix the movable part 1 to the stator 21 more firmly.

[0112] Furthermore, in the mounting system 10 according to the embodiment, the movable part 1 is located below the stator 21. This makes it possible to construct a system suitable for tasks such as mounting components 100 onto the mounting surface 201 of the object 20.

[0113] Furthermore, in the implementation system 10 according to the embodiment, the holding part 12 can hold the component 100 by the air stored in the first pressure container 13 when the movable part 1 is in the first position, even when the movable part 1 is not in the first position (i.e., when the movable part 1 is in a position different from the first position). Also, when the movable part 1 is not in the second position (i.e., when the movable part 1 is in a position different from the second position), the movable part 1 can move along the plane 211 of the stator 21 by the power stored in the battery 15 when the movable part 1 is in the second position. Therefore, the movement path of the movable part 1 is less restricted compared to, for example, when the movable part is powered via a cable and air is supplied via piping. As a result, it is possible to suppress a decrease in work efficiency.

[0114] Furthermore, in the implementation system 10 according to the embodiment, the first position and the second position are the same. This makes it possible to reduce the working time compared to the case where the first position and the second position are different.

[0115] Furthermore, in the implementation system 10 according to the embodiment, the internal pressure of the first pressure accumulator 13 is adjusted to a negative pressure by the air adjustment unit 31. This makes it possible to hold the component 100 in the holding unit 12.

[0116] Furthermore, in the implementation system 10 according to this embodiment, the internal pressure of the second pressure accumulator 14 is set to positive pressure by the air adjustment unit 31. This makes it easier to release the component 100 from the holding unit 12 using air from the second pressure accumulator 14.

[0117] Furthermore, in the implementation system 10 according to the embodiment, the movable part 1 performs a removal operation in the first position. This makes it possible to adjust the internal pressure of at least the first pressure accumulator 13 while the movable part 1 is performing the removal operation.

[0118] Furthermore, in the mounting system 10 according to the embodiment, the control unit 4 simultaneously controls all of the multiple movable parts 1 when mounting multiple components 100 onto the mounting surface 201 of the substrate 200. This makes it possible to shorten the time required to mount multiple components 100 compared to mounting multiple components 100 sequentially.

[0119] (7) Variant The embodiments described above are merely one of many embodiments of this disclosure. The embodiments described above can be modified in various ways depending on the design, etc., as long as the objectives of this disclosure are achieved. Furthermore, functions similar to those of the implementation method according to the embodiments described above may be embodied in the implementation system 10, a (computer) program, or a non-temporary recording medium on which the program is stored.

[0120] The following lists some modifications of the above-described embodiment. The modifications described below can be combined and applied as appropriate.

[0121] (7.1) Variation 1 The mounting system 10 according to Modification 1 will be described with reference to Figure 16. The mounting system 10 according to Modification 1 differs from the mounting system 10 according to the above embodiment in that, as shown in Figure 16, the component supply units 5C and 5D are arranged on both sides of the mounting unit 9 in the second direction (Y-axis direction). In addition, with respect to the mounting system 10 according to Modification 1, the same reference numerals are used for components that are the same as those in the mounting system 10 according to the above embodiment, and their description is omitted.

[0122] The mounting system 10 according to Modification 1 includes, as shown in Figure 16, a plurality of component supply units 5C (first component supply unit or third component supply unit) and a plurality of component supply units 5D (second component supply unit or fourth component supply unit). The plurality of component supply units 5C and the plurality of component supply units 5D are arranged on both sides of the mounting unit 9 in the second direction (Y-axis direction), as shown in Figure 16. The second direction intersects (is perpendicular to) the first direction (X-axis direction), which is the direction in which the object 20 (substrate 200) is transported to the mounting unit 9. Furthermore, in the mounting system 10 according to Modification 1, as shown in Figure 16, the plurality of movable parts 1 include a movable part 1C (first movable part or third movable part) and a movable part 1D (first movable part or third movable part).

[0123] In the mounting system 10 according to Modification 1, the control unit 4 controls the movable part 1C so that it mounts the component 100 taken from the component supply unit 5C onto the mounting surface 201 of the substrate 200, as shown in Figure 16. The control unit 4 also controls the movable part 1D so that it mounts the component 100 taken from the component supply unit 5D onto the mounting surface 201 of the substrate 200. In other words, the control unit 4 controls the movable parts 1C and 1D to perform a first mode in which the movable part 1C mounts the component 100 taken from the component supply unit 5C onto the mounting surface 201 of the object 20, and the movable part 1D mounts the component 100 taken from the component supply unit 5D onto the mounting surface 201 of the object 20.

[0124] Furthermore, in the mounting system 10 according to Modification 1, the control unit 4 controls the movable part 1C so that the movable part 1C mounts the component 100 taken from the component supply unit 5D onto the mounting surface 201 of the substrate 200, as shown in Figure 16. The control unit 4 also controls the movable part 1D so that the movable part 1D mounts the component 100 taken from the component supply unit 5C onto the mounting surface 201 of the substrate 200. In other words, the control unit 4 controls the movable parts 1C and 1D to perform a second mode in which the movable part 1C mounts the component 100 taken from the component supply unit 5D onto the mounting surface 201 of the object 20, and the movable part 1D mounts the component 100 taken from the component supply unit 5C onto the mounting surface 201 of the object 20.

[0125] In the mounting system 10 according to Modification 1, the planar motor device 40 is composed of a movable element 11 included in the movable part 1 and a stator 21 included in the drive unit 2, similar to the mounting system 10 according to the above embodiment. Therefore, as described above, it is possible to have each of the movable parts 1C and 1D perform the operation of mounting a component 100 taken from the component supply unit 5C onto the mounting surface 201 of the object 20, and the operation of mounting a component 100 taken from the component supply unit 5D onto the mounting surface 201 of the object 20.

[0126] (7.2) Other variations The implementation system 10 in this disclosure includes, for example, a computer system in the control unit 4. The computer system mainly consists of a processor and memory as hardware. The functionality of the implementation system 10 in this disclosure is realized by the processor executing a program recorded in the memory of the computer system. The program may be pre-recorded in the memory of the computer system, provided via a telecommunications line, or provided on a non-temporary recording medium such as a memory card, optical disk, or hard disk drive that can be read by the computer system. The processor of the computer system consists of one or more electronic circuits including a semiconductor integrated circuit (IC) or a large-scale integrated circuit (LSI). The integrated circuits such as ICs and LSIs referred to here are named differently depending on the degree of integration, and include integrated circuits called system LSIs, VLSIs (Very Large Scale Integration), or ULSIs (Ultra Large Scale Integration). Furthermore, FPGAs (Field-Programmable Gate Arrays) that are programmed after the manufacture of the LSI, or logic devices that allow for the reconfiguration of junction relationships or circuit compartments within the LSI, can also be used as processors. Multiple electronic circuits may be integrated onto a single chip or distributed across multiple chips. Multiple chips may be integrated onto a single device or distributed across multiple devices. The computer system referred to here includes a microcontroller having one or more processors and one or more memories. Therefore, the microcontroller also consists of one or more electronic circuits, including semiconductor integrated circuits or large-scale integrated circuits.

[0127] Furthermore, it is not essential for the implementation system 10 to have multiple functions integrated within a single enclosure. The components of the implementation system 10 may be distributed across multiple enclosures. Moreover, at least some of the functions of the implementation system 10 may be implemented by the cloud (cloud computing), etc.

[0128] Conversely, in the above-described embodiment, at least some of the functions of the implementation system 10, which are distributed across multiple devices, may be consolidated into a single housing. For example, some of the functions that are distributed between the movable part 1 and the control unit 4 may all be consolidated into the movable part 1.

[0129] In the embodiment described above, the storage battery 15 is an electric double-layer capacitor, but the storage battery 15 is not limited to an electric double-layer capacitor, and may be, for example, a secondary battery.

[0130] In the above embodiment, the stator 21, which is one of the movable part 1 and the stator 21, has a first magnet 22 including an electromagnet 221, and the movable part 1, which is the other of the movable part 1 and the stator 21, has a second magnet 17. However, the reverse is also possible. That is, the stator 21, which is one of the movable part 1 and the stator 21, may have a second magnet, and the movable part 1, which is the other of the movable part 1 and the stator 21, may have a first magnet including an electromagnet.

[0131] In the above embodiment, the movable part 1 has a permanent magnet 171, but the stator 21 may also have a permanent magnet, or both the movable part 1 and the stator 21 may have permanent magnets. In other words, it is sufficient that at least one of the movable part 1 and the stator 21 has a permanent magnet.

[0132] In the above embodiment, the stator 21 has an electromagnet 221, but the movable part 1 may have an electromagnet, or both the movable part 1 and the stator 21 may have electromagnets. Furthermore, either the movable part 1 or the stator 21 may have a permanent magnet and an electromagnet, or both the movable part 1 and the stator 21 may have a permanent magnet and an electromagnet.

[0133] In the above embodiment, the magnetic force F2 of two or more electromagnets 221 is greater than the magnetic force F1 of the multiple permanent magnets 171, but the magnetic force F2 may be the same magnitude as the magnetic force F1. However, in this case, since the movable element 11 moves while in contact with the plane 211 of the stator 21, it is preferable that the magnetic force F2 is greater than the magnetic force F1.

[0134] In the embodiment described above, the first position is the position in which the holding unit 12 performs a removal operation to take out the part 100 from the part supply unit 5. However, the first position may also be a position in which, for example, at least one of the parts held by the holding unit 12 is discarded and the holding unit 12 is cleaned. This makes it possible to adjust the internal pressure of the first pressure accumulator 13 while the part 100 is being discarded or the holding unit 12 is being cleaned at the first position.

[0135] Furthermore, the holding unit 12 may have separate nozzles for suction and disposal. In this case, foreign matter (e.g., dust) attached to the part 100 that has been suctioned by the suction nozzle can be removed by the disposal nozzle.

[0136] In the above-described embodiment, each parts supply unit 5 has a parts feeder, but each parts supply unit 5 may also have, for example, a parts tray on which a plurality of parts 100 are placed. Alternatively, each parts supply unit 5 may have both a parts feeder and a parts tray.

[0137] In the above-described embodiment, each movable part 1 has one holding part 12, but each movable part 1 may have two or more holding parts 12 within a range that can be attached to the movable element 11.

[0138] In the embodiment described above, the first position and the second position are the same position (holding position P1), but the first position and the second position may be different positions. For example, the first position may be the holding position P1, and the second position may be the origin position P0.

[0139] In the above-described embodiment, the first pressure accumulation operation to make the internal pressure of the first pressure accumulator 13 negative, the second pressure accumulation operation to make the internal pressure of the second pressure accumulator 14 positive, and the charging operation for the storage battery 15 are performed at the holding position P1. However, the second pressure accumulation operation and the charging operation are not limited to the holding position P1. For example, the second pressure accumulation operation may be performed when the movable part 1 is positioned above the component recognition unit 6, the component disposal unit 7, or the nozzle replacement unit 8. In other words, the second pressure accumulation operation is performed when the device is stopped in order to hold the component 100, recognize the component 100, discard the component 100, or replace the holding unit (nozzle) 12. Similarly, the first pressure accumulation operation is also performed when the device is stopped in order to hold the component 100. On the other hand, the charging operation may be performed when the device is stopped in any of the above-described positions, or when it is not stopped. In other words, the charging operation may be performed while the movable part 1 is moving.

[0140] In the above embodiment, the control unit 4 simultaneously controls all of the multiple movable parts 1 when mounting the components 100 on the mounting surface 201 of the substrate 200, but it may also control only some of the multiple movable parts 1. That is, the control unit 4 only needs to be configured to simultaneously control at least two of the multiple movable parts 1 so that the multiple components 100 are mounted at multiple different mounting locations P3 on the mounting surface 201 of the object 20.

[0141] In the above-described embodiment and modification 1, multiple components 100 are mounted on a single substrate 200, but for example, multiple components 100 may be mounted on multiple substrates 200. In this case, the multiple substrates 200 may be arranged in a first direction (X-axis direction), which is the direction in which the substrates 200 are fed into the mounting section 9, or in a second direction (Y-axis direction) that intersects (orthogonal to) the first direction, or in both the first and second directions.

[0142] In the embodiment described above, there is one stator 21, but the stator 21 may be divided into multiple parts. In this case, the stator 21 may be divided into two or more parts in the X-axis direction, or into two or more parts in the Y-axis direction, or into two or more parts in both the X-axis direction and the Y-axis direction.

[0143] In the above embodiment, when the movable part 1 moves from the holding position P1 to the recognition position P2 (see Figure 4), the holding part 12 rotates to match the mounting angle of the component 100 with respect to the planned mounting position P3. Alternatively, when the movable part 1 moves from the recognition position P2 to the planned mounting position P3, the holding part 12 may rotate to match the mounting angle of the component 100.

[0144] In the above embodiment, when mounting multiple components 100 on the mounting surface 201 of the substrate 200, all of the multiple movable parts 1 are controlled simultaneously to mount all of the multiple components 100 at the same time. However, the multiple components 100 may be mounted sequentially.

[0145] In the embodiments described above, the "stator" of this disclosure is composed of a stator 21 and a magnetizable body 23, but the magnetizable body 23 may be omitted. That is, the "stator" of this disclosure may be composed of only the stator 21.

[0146] In the embodiment described above, the magnetizable body 23 is an iron plate, but the magnetizable body 23 is not limited to an iron plate; it may be made of a material other than an iron plate as long as it can average out the magnetic fields generated by the multiple electromagnets 221.

[0147] (Appearance) This specification discloses the following aspects:

[0148] The mounting system (10) according to the first embodiment comprises a movable part (1) and a control unit (4). The movable part (1) includes a holding part (12) for holding a component (100), and mounts the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20). The control unit (4) controls the movable part (1) so that it moves along the plane (211) of a stator (21) which has a plane (211). One of the movable part (1) and the stator (21) has a first magnet (22) including an electromagnet (221). The other of the movable part (1) and the stator (21) has a second magnet (17) that faces the electromagnet (221) when mounting the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20). When mounting the component (100) held by the holding unit (12) onto the mounting surface (201) of the object (20), the control unit (4) controls the magnetic poles of the electromagnet (221) such that the magnetic pole of the portion of the electromagnet (221) facing the second magnet (17) is different from the magnetic pole of the portion of the second magnet (17) facing the electromagnet (221).

[0149] According to this embodiment, when mounting the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20), the movable part (1) can be fixed to the stator (21) by the magnetic force (magnetic attraction force) generated between the electromagnet (221) and the second magnet (17). As a result, the posture of the movable part (1) can be stabilized when mounting the component (100) onto the mounting surface (201) of the object (20).

[0150] In the implementation system (10) according to the second embodiment, in the first embodiment, at least one of the first magnet (22) and the second magnet (17) includes a permanent magnet (171).

[0151] According to this embodiment, even when the current to the electromagnet (221) is stopped, the position of the movable part (1) can be stabilized by the magnetic force (F1) from the permanent magnet (171).

[0152] In the third embodiment of the implementation system (10), in the second embodiment, when the current to the electromagnet (221) is stopped, the movable part (1) is fixed to the stator (21) by the magnetic force (F1) of the permanent magnet (171).

[0153] According to this embodiment, even when the current to the electromagnet (221) is stopped, the position of the movable part (1) can be stabilized by the magnetic force (F1) from the permanent magnet (171).

[0154] In the implementation system (10) according to the fourth embodiment, in any one of the first to third embodiments, the control unit (4) controls the magnetic poles of the electromagnet (221) and the magnitude of the magnetic force (F2) produced by the electromagnet (221), thereby enabling the movable part (1) to move relative to the stator (21).

[0155] In this embodiment, the control unit (4) controls the magnetic poles of the electromagnet (221) and the magnitude of the magnetic force (F2) produced by the electromagnet (221), thereby enabling the movable part (1) to move relative to the stator (21).

[0156] In the implementation system (10) according to the fifth embodiment, in the fourth embodiment, the movable part (1) is magnetically levitated from the stator (21) by a magnetic force (F2) from the electromagnet (221) and is movable along the plane (211) of the stator (21).

[0157] According to this embodiment, the movable part (1) can be moved along the plane (211) of the stator (21) by the magnetic force (F2) from the electromagnet (221).

[0158] In the sixth embodiment of the mounting system (10), in any one of the first to fifth embodiments, the second magnet (17) includes a permanent magnet (171). When the electromagnet (221) is not energized, the movable part (1) is fixed to the stator (21) by the magnetic force (F1) of the permanent magnet (171). When the electromagnet (221) is energized and the component (100) held in the holding part (12) is mounted on the mounting surface (201) of the object (20), the movable part (1) is fixed to the stator (21) by the magnetic force (F1) of the permanent magnet (171) and the magnetic force (F2) of the electromagnet (221).

[0159] According to this embodiment, when mounting the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20), it is possible to fix the movable part (1) to the stator (21) with a stronger magnetic force than when the current to the electromagnet (221) is stopped.

[0160] In the seventh embodiment of the implementation system (10), in any one of the first to sixth embodiments, the movable part (1) is located below the stator (21).

[0161] According to this embodiment, it is possible to construct a system suitable for tasks such as mounting components (100) onto the mounting surface (201) of an object (20).

[0162] The eighth embodiment of the implementation system (10) further comprises, in any one of the first to seventh embodiments, an air adjustment unit (31) and a power supply unit (32). The air adjustment unit (31) adjusts the internal pressure of the accumulator (13) when the movable part (1) is in a first position. The power supply unit (32) supplies power to the battery (15) when the movable part (1) is in a second position. The movable part (1) further includes the accumulator (13) and the battery (15). The holding unit (12) is capable of holding the component (100) by the air in the accumulator (13) when the movable part (1) is not in a first position. When the movable part (1) is not in a second position, it is capable of moving along the plane (211) of the stator (21) by the power stored in the battery (15).

[0163] In this embodiment, the holding part (12) can hold the part (100) by the air stored in the pressure vessel (13) when the movable part (1) is in the first position. Furthermore, the movable part (1) can move by the power stored in the battery (15) when the movable part (1) is in the second position. Therefore, compared to, for example, a case where power is supplied to the movable part via a cable and air is supplied to the movable part via a pipe, the movement path of the movable part (1) is less restricted. As a result, it is possible to suppress a decrease in work efficiency.

[0164] In the implementation system (10) according to the ninth embodiment, the first position and the second position are the same position as in the eighth embodiment.

[0165] According to this embodiment, the time required to mount the component (100) can be reduced compared to the case where the first position and the second position are different positions.

[0166] In the implementation system (10) according to the tenth embodiment, in the eighth or ninth embodiment, the internal pressure of the accumulator (13) is adjusted to a negative pressure by the air adjustment unit (31).

[0167] According to this embodiment, the internal pressure of the accumulator (13) can be adjusted to a negative pressure, thereby allowing the component (100) to be held in the holding part (12).

[0168] In the implementation system (10) according to the eleventh embodiment, in the tenth embodiment, the movable part (1) further includes a second pressure accumulator (14). The second pressure accumulator (14) is different from the first pressure accumulator (13) as the pressure accumulator (13). The internal pressure of the second pressure accumulator (14) is adjusted to positive pressure by an air adjustment unit (31).

[0169] In this embodiment, the internal pressure (positive pressure) of the second pressure accumulator (14) makes it easier to release the holding portion (12) from holding the component (100).

[0170] In the implementation system (10) according to the 12th embodiment, in any one of the 8th to 11th embodiments, the movable part (1) performs a removal operation in which the holding part (12) removes the part (100) from the part supply part (5) that supplies the part (100) at the first position.

[0171] According to this embodiment, it is possible to adjust the internal pressure of the accumulator (13) while the movable part (1) is performing the removal operation.

[0172] In the implementation system (10) according to the 13th embodiment, in the 12th embodiment, the movable part (1) further includes a protruding part (19). The protruding part (19) is provided with a second connecting surface (191) that can be connected to a first connecting surface (34) provided on the air adjustment part (31). The air adjustment part (31) is located outside the outer edge (2111) of the plane (211) in a plan view. When the movable part (1) is performing the removal operation, in a plan view, at least a part of the protruding part (19) is located outside the outer edge (2111) of the plane (211), and the vent (35) provided on the first connecting surface (34) and the vent (192) provided on the second connecting surface (191) are facing each other.

[0173] According to this embodiment, for example, even when the moving speed of the movable part (1) is high, it is possible to suppress collisions between the movable part (1) and the air adjustment part (31).

[0174] The mounting system (10) according to the 14th embodiment includes a plurality of movable parts (1) in any one of the 8th to 13th embodiments. The control unit (4) simultaneously controls at least two of the plurality of movable parts (1) so that the plurality of components (100) held by the plurality of holding parts (12) in the plurality of movable parts (1) are mounted on the mounting surface (201) of the object (20) at a plurality of different mounting locations (P3).

[0175] According to this embodiment, it is possible to reduce the time required to mount the components (100) compared to mounting multiple components (100) in sequence.

[0176] The mounting system (10) according to the 15th embodiment includes a plurality of movable parts (1) in any one of the 8th to 14th embodiments. The mounting system (10) further includes a first part supply unit (5A) and a second part supply unit (5B) that supply parts (100) respectively. The plurality of movable parts (1) include a first movable part (1A) and a second movable part (1B). The control unit (4) controls the first movable part (1A) and the second movable part (1B) so that, in a plan view, a first movement path (R1) and a second movement path (R2) intersect. The first movement path (R1) is the path to which the first movable part (1A) moves when it mounts the parts (100) taken from the first part supply unit (5A) onto the mounting surface (201) of the object (20). The second movement path (R2) is the path along which the second movable part (1B) moves when it mounts the part (100) taken from the second part supply unit (5B) onto the mounting surface (201) of the object (20).

[0177] According to this embodiment, the first movable part (1A) and the second movable part (1B) can be moved such that the first movement path (R1) and the second movement path (R2) intersect.

[0178] The mounting system (10) according to the 16th embodiment includes a plurality of movable parts (1) in any one of the 8th to 14th embodiments. The mounting system (10) further includes a first part supply unit (5C) and a second part supply unit (5D) that supply parts (100), respectively. The plurality of movable parts (1) include a first movable part (1C) and a second movable part (1D). The control unit (4) controls the first movable part (1C) and the second movable part (1D) to perform the first embodiment and the second embodiment. The first embodiment is an embodiment in which the first movable part (1C) performs the operation of mounting a part (100) taken from the first part supply unit (5C) onto the mounting surface (201) of the object (20), and the second movable part (1D) performs the operation of mounting a part (100) taken from the second part supply unit (5D) onto the mounting surface (201) of the object (20). The second embodiment is an embodiment in which the first movable part (1C) performs the operation of mounting a part (100) taken out of the second part supply unit (5D) onto the mounting surface (201) of the object (20), and the second movable part (1D) performs the operation of mounting a part (100) taken out of the first part supply unit (5C) onto the mounting surface (201) of the object (20).

[0179] According to this embodiment, it is possible to have the first movable part (1C) and the second movable part (1D) each perform the operation of mounting a part (100) taken from the first part supply unit (5C) onto the mounting surface (201) of the object (20), and the operation of mounting a part (100) taken from the second part supply unit (5D) onto the mounting surface (201) of the object (20).

[0180] In the 17th embodiment of the mounting system (10), in the 15th embodiment, the plurality of movable parts (1) include a third movable part (1C) and a fourth movable part (1D). The mounting system (10) further comprises a third part supply unit (5C) and a fourth part supply unit (5D) that supply parts (100), respectively. The third part supply unit (5C) and the fourth part supply unit (5D) are different from the first part supply unit (5A) and the second part supply unit (5B). The control unit (4) controls the third movable part (1C) and the fourth movable part (1D) to perform the first and second embodiments. The first embodiment is an embodiment in which the third movable part (1C) performs the operation of mounting a component (100) taken out of the third component supply unit (5C) onto the mounting surface (201) of the object (20), and the fourth movable part (1D) performs the operation of mounting a component (100) taken out of the fourth component supply unit (5D) onto the mounting surface (201) of the object (20). The second embodiment is an embodiment in which the third movable part (1C) performs the operation of mounting a component (100) taken out of the fourth component supply unit (5D) onto the mounting surface (201) of the object (20), and the fourth movable part (1D) performs the operation of mounting a component (100) taken out of the third component supply unit (5C) onto the mounting surface (201) of the object (20).

[0181] According to this embodiment, the third movable part (1C) and the fourth movable part (1D) can be made to perform the operation of mounting a component (100) taken from the third component supply unit (5C) onto the mounting surface (201) of the object (20), and the operation of mounting a component (100) taken from the fourth component supply unit (5D) onto the mounting surface (201) of the object (20).

[0182] The component holding device (30) according to the 18th embodiment is a component holding device (30) used in any one of the mounting systems (10) according to the 1st to 17th embodiments. The component holding device (30) comprises a movable part (1). The movable part (1) further comprises a movable element (11). The movable element (11) has a holding part (12) attached to it and is movable along the plane (211) of the stator (21).

[0183] According to this embodiment, when mounting the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20), the magnetic force generated between the electromagnet (221) and the second magnet (17) makes it possible to fix the movable part (1) to the stator (21). As a result, when mounting the component (100) onto the mounting surface (201) of the object (20), it becomes possible to stabilize the posture of the movable part (1).

[0184] The planar motor device (40) according to the 19th embodiment is a planar motor device (40) used in any one of the first to 17th embodiments of the implementation system (10). The planar motor device (40) comprises a stator (21) and a movable element (11). The movable element (11) is fitted with a holding part (12) and is movable along the plane (211) of the stator (21).

[0185] According to this embodiment, when mounting the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20), the magnetic force generated between the electromagnet (221) and the second magnet (17) makes it possible to fix the movable part (1) to the stator (21). As a result, when mounting the component (100) onto the mounting surface (201) of the object (20), it becomes possible to stabilize the posture of the movable part (1).

[0186] The 20th embodiment of the mounting method is a mounting method used in a mounting system (10). The mounting system (10) comprises a movable part (1) and a control unit (4). The movable part (1) includes a holding part (12) for holding a component (100), and mounts the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20). The control unit (4) controls the movable part (1) so that it moves along the plane (211) of a stator (21) which has a plane (211). One of the movable part (1) and the stator (21) has a first magnet (22) including an electromagnet (221). The other of the movable part (1) and the stator (21) has a second magnet (17) that faces the electromagnet (221) when mounting the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20). The mounting method includes a step of controlling the magnetic pole of the electromagnet (221) such that the magnetic pole of the part of the electromagnet (221) facing the second magnet (17) and the magnetic pole of the part of the second magnet (17) facing the electromagnet (221) are different when mounting the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20).

[0187] According to this embodiment, when mounting the component (100) held by the holding part (12) onto the mounting surface (201) of the object (20), the magnetic force generated between the electromagnet (221) and the second magnet (17) makes it possible to fix the movable part (1) to the stator (21). As a result, when mounting the component (100) onto the mounting surface (201) of the object (20), it becomes possible to stabilize the posture of the movable part (1).

[0188] The configurations relating to the second to seventeenth aspects are not essential to the implementation system (10) and can be omitted as appropriate. [Explanation of Symbols]

[0189] 1 Moving part 1A Movable part (1st movable part) 1B Movable part (2nd movable part) 1C Movable part (1st movable part, 3rd movable part) 1D moving part (2nd moving part, 4th moving part) 4. Control Unit 5. Parts Supply Department 5A Parts supply section (1st parts supply section) 5B Parts Supply Department (Second Parts Supply Department) 5C Parts Supply Department (Parts Supply Department 1, Parts Supply Department 3) 5D Parts Supply Department (2nd Parts Supply Department, 4th Parts Supply Department) 10 Implementation System 11 Mover 12 Holding part 13. First pressurized vessel (pressurized vessel) 14. Second pressurized vessel 15 Storage batteries 17. Second Magnet 19 Protrusion 20 Objects 21 Stator 22 First Magnet 30. Parts holding device 31 Air adjustment section 32 Power supply section 34. First connection surface 35 Ventilation holes 40 Planar motor device 100 parts 171 Permanent Magnet 191 Second connection surface 192 Ventilation opening 200 circuit boards 201 Implementation aspects 211 plane 221 Electromagnet 2111 Outer edge F1,F2,F3 Magnetic force P1 holding position (1st position, 2nd position) P3 Planned implementation location R1 First movement path R2 Second movement path

Claims

1. A movable part includes a holding part for holding a component, and the movable part mounts the component held by the holding part onto the mounting surface of the object, The system comprises a control unit that controls the movable part so that the movable part moves along the plane of a stator having a plane, The movable part and the stator each have a first magnet including an electromagnet. The other of the movable part and the stator has a second magnet that faces the electromagnet when the component held by the holding part is mounted on the mounting surface of the object. When mounting the component held by the holding unit onto the mounting surface of the object, the control unit controls the magnetic poles of the electromagnet such that the magnetic pole of the portion of the electromagnet facing the second magnet is different from the magnetic pole of the portion of the second magnet facing the electromagnet. The control unit controls the magnetic poles of the electromagnet and the magnitude of the magnetic force produced by the electromagnet, thereby enabling the movable part to move relative to the stator. The movable part is able to move along the plane of the stator while magnetically levitating relative to the stator by the magnetic force of the electromagnet. Implementation system.

2. At least one of the first magnet and the second magnet includes a permanent magnet. The implementation system according to claim 1.

3. When the current to the electromagnet is stopped, the movable part is fixed to the stator by the magnetic force of the permanent magnet. The implementation system according to claim 2.

4. The second magnet includes a permanent magnet, When the current to the electromagnet is stopped, the movable part is fixed to the stator by the magnetic force of the permanent magnet. When energizing the electromagnet and mounting the component held in the holding part to the mounting surface of the object, the movable part is fixed to the stator by the magnetic force of the permanent magnet and the magnetic force of the electromagnet. The implementation system according to any one of claims 1 to 3.

5. The movable part is located below the stator, The implementation system according to any one of claims 1 to 3.

6. When the movable part is in the first position, an air adjustment unit for adjusting the internal pressure of the pressure accumulator, The system further comprises a power supply unit that supplies power to a storage battery when the movable part is in the second position, The movable part further includes the pressure reservoir and the battery, The holding portion is capable of holding the component by the air in the pressure vessel when the movable portion is not in the first position. When the movable part is not in the second position, it is movable along the plane of the stator by the power stored in the battery. The implementation system according to any one of claims 1 to 3.

7. The first position and the second position are the same position. The implementation system according to claim 6.

8. The pressure accumulator is adjusted to a negative pressure by the air adjustment unit. The implementation system according to claim 6.

9. The movable part further includes a second pressure accumulator that is different from the first pressure accumulator, The second pressure accumulator is adjusted to a positive pressure by the air adjustment unit. The implementation system according to claim 8.

10. The movable part, in the first position, performs a removal operation in which the holding part removes the part from the part supply unit that supplies the part. The implementation system according to claim 6.

11. The movable part further includes a protruding part having a second connecting surface that can be connected to a first connecting surface provided on the air adjustment part, The air adjustment unit is located outside the outer edge of the plane in a plan view. When the movable part is performing the removal operation, in a plan view, at least a portion of the protruding part is located outside the outer edge of the plane, and the vent provided on the first connecting surface and the vent provided on the second connecting surface are facing each other. The implementation system according to claim 10.

12. comprising a plurality of the movable parts, The control unit simultaneously controls at least two of the plurality of movable parts so that the plurality of parts held by the plurality of holding parts in the plurality of movable parts are mounted at a plurality of different planned mounting positions on the mounting surface of the object. The implementation system according to claim 6.

13. comprising a plurality of the movable parts, The system further comprises a first parts supply unit and a second parts supply unit that supply the aforementioned parts, respectively. The plurality of movable parts include a first movable part and a second movable part, The control unit controls the first movable part and the second movable part so that, in a plan view, the first movement path by which the first movable part moves when the first movable part mounts the part taken from the first part supply unit onto the mounting surface of the object, and the second movement path by which the second movable part moves when the second movable part mounts the part taken from the second part supply unit onto the mounting surface of the object, intersect. The implementation system according to claim 6.

14. comprising a plurality of the movable parts, The system further comprises a first parts supply unit and a second parts supply unit that supply the aforementioned parts, respectively. The plurality of movable parts include a first movable part and a second movable part, The control unit, A first embodiment in which the first movable part performs the operation of mounting the part taken out of the first part supply unit onto the mounting surface of the object, and the second movable part performs the operation of mounting the part taken out of the second part supply unit onto the mounting surface of the object, The first movable part and the second movable part are controlled to perform a second mode in which the first movable part performs the operation of mounting the part taken out of the second part supply unit onto the mounting surface of the object, and the second movable part performs the operation of mounting the part taken out of the first part supply unit onto the mounting surface of the object. The implementation system according to claim 6.

15. The plurality of movable parts further include a third movable part and a fourth movable part, Unlike the first and second parts supply units, the system further comprises a third and fourth parts supply unit that supply the parts, respectively. The control unit, A first embodiment in which the third movable part performs the operation of mounting the part taken out of the third part supply unit onto the mounting surface of the object, and the fourth movable part performs the operation of mounting the part taken out of the fourth part supply unit onto the mounting surface of the object, The third movable part and the fourth movable part are controlled to perform a second mode in which the third movable part performs the operation of mounting the part taken out of the fourth part supply unit onto the mounting surface of the object, and the fourth movable part performs the operation of mounting the part taken out of the third part supply unit onto the mounting surface of the object. The implementation system according to claim 13.

16. A component holding device used in the mounting system according to any one of claims 1 to 3, The movable part is provided, The movable part further includes a movable element to which the holding part is attached and which is movable along the plane of the stator. Parts holding device.

17. A planar motor device used in the mounting system according to any one of claims 1 to 3, The stator and, The holding portion is attached to a movable member which is movable along the plane of the stator, Planar motor device.

18. A movable part that includes a holding part for holding a component, and mounts the component held by the holding part onto the mounting surface of an object, An implementation method used in an implementation system comprising: a control unit that controls the movable part so that the movable part moves along the plane of a stator having a plane, The movable part and the stator each have a first magnet including an electromagnet. The other of the movable part and the stator has a second magnet that faces the electromagnet when the component held by the holding part is mounted on the mounting surface of the object. When mounting the component held in the holding part onto the mounting surface of the object, the process includes controlling the magnetic poles of the electromagnet such that the magnetic pole of the portion of the electromagnet facing the second magnet is different from the magnetic pole of the portion of the second magnet facing the electromagnet. In the above process, by controlling the magnetic poles of the electromagnet and the magnitude of the magnetic force produced by the electromagnet, the movable part can move relative to the stator. The movable part is able to move along the plane of the stator while magnetically levitating relative to the stator by the magnetic force of the electromagnet. Implementation method.

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