Solid source vaporizer

Abstract

A solid source vaporization apparatus includes a housing (1) and several layers of trays (2), a top cover (11) is installed on the top of the housing (1), an air inlet (12) and an air outlet (13) are installed on the top cover (11), the trays (2) are stacked vertically in the housing (1), a carrier gas pipe (3) is installed in the housing (1), and an upper end of the carrier gas pipe (3) is connected to the air inlet (12), the carrier gas pipe (3) penetrates each layer of trays (2) and extends to the bottommost tray (2), several carrier gas outlets (33) are installed in the carrier gas pipe (3), the carrier gas outlets (33) are installed in the cavity (14) of the bottommost tray (2) or in the cavity (14) of the bottommost tray (2) and the remaining several layers of trays (2), and several air guide pipes (21) are installed in each of the remaining trays (2) except for the bottommost tray (2). The solid source vaporizer adopts parallel gas transmission passages, and the carrier gas enters the carrier gas pipe (3) from the inlet (12) and then enters each layer of trays (2) respectively. It can only reach the position of the air guide pipe (21) after being horizontally transmitted a long distance along the surface of the solid source material in each layer of trays (2), so that the carrier gas can carry a large amount of vaporized gas and improve the overall vaporization efficiency of the solid source vaporizer.

Description

Technical Field

[0001] The present invention relates to the field of solid source vaporization devices, and particularly to a solid source vaporization device for vaporizing a solid precursor material and transporting the precursor vapor to a precursor vapor use system such as a reaction chamber of a chemical vapor deposition device, an atomic deposition device, or an ion implantation device.

Background Art

[0002] The structure of a conventional solid source vaporization device has one or more trays for accommodating solid raw materials inside a sealed container. In the solution means for the plurality of trays, several ventilation and air-conducting pipes are distributed on each tray, connecting each tray. In the operating state, the sealed container is heated from the outside to the vaporization temperature of the solid raw material. The sealed container has an intake port for a carrier gas. The carrier gas enters from the intake port, mixes sufficiently with the vapor of the solid raw material, and then enters a reaction container connected to the solid source vaporization device from the exhaust port. Commonly used carrier gases are inert gases such as helium. In the application of semiconductor manufacturing, the reaction container is generally the reaction chamber of a thin film deposition device, such as a CVD or ALD device. In a conventional solid source vaporization device, the carrier gas enters the container from the top or bottom, is transmitted to the bottom of the housing through the air-conducting pipe, and then rises layer by layer through the air-conducting pipes in each layer tray. During the rising process, it mixes with the vapor of the solid source vaporization, and the mixed gas is output from the exhaust port at the top and transported to the reaction container.

[0003] The drawbacks of conventional solid source vaporizers are as follows: First, conventional technology employs a series-connected gas transmission path, and the carrier gas enters each tray layer sequentially from bottom to top through the gas conduit, finally reaching the top tray and being discharged from the exhaust port. As a result, when the carrier gas enters the lower trays, the vapor content in the carrier gas is low, and therefore the vaporization rate of the solid raw material is relatively fast in the lower trays. When the carrier gas reaches the top trays, the concentration of vapor carried in the carrier gas is relatively high, and therefore the vaporization rate of the solid raw material in the top trays is relatively slow. As a result, the difference in vaporization rate of the solid source between the bottom tray and the top tray is very large within the solid source vaporizer, making it impossible to fully utilize the solid raw material in the top trays. Next, since multiple conduits are uniformly distributed in each layer of trays, the height of the conduits is higher than the height of the solid material stacked in the trays to prevent solid material particles from entering the conduits and causing blockage. However, since the amount of solid material stacked is generally large, the height of the conduits is generally close to the outer height of the trays. After stacking the trays, the top of the ventilation conduits is very close to the bottom of the trays installed on the upper layer. As a result, the flow distance of the carrier gas over the surface of the solid material is very short, and therefore the amount of solid source vapor that the carrier gas can carry is very small, resulting in very low mixing efficiency between the carrier gas and the vapor. Furthermore, conventional solid source vaporizers have multiple layers of trays, and the total surface area of ​​the solid material stacked in the trays is large, but the vaporization efficiency of each upper layer is not maximized, and the overall vaporization efficiency and transmission efficiency are not optimized. Therefore, conventional solid source vaporizers need to be improved. [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] The object of the present invention is to provide a novel solid source vaporizer that addresses the problems of conventional solid source vaporizers described in the background art, which employ gas transmission passages arranged in series, resulting in very low vaporization efficiency of the solid source material in the upper tray, very short horizontal travel distance of the carrier gas within each tray, resulting in low mixing effect with solid vapor, a very small amount of vapor that can be carried by the carrier gas, and very low overall vaporization efficiency and transmission efficiency of the solid source vaporizer. [Means for solving the problem]

[0005] To achieve the above objectives, the first means of implementation of the present invention is as follows: A solid source vaporizer comprising a housing and several layers of trays, a top cover installed on the top of the housing, an intake port and an exhaust port installed on the top cover, the trays stacked vertically inside the housing, a carrier gas pipe installed inside the housing, the upper end of the carrier gas pipe connected to the intake port, the carrier gas pipe penetrating each layer of trays and extending into the bottom layer tray, several carrier gas outlets installed in the carrier gas pipe, the carrier gas outlets installed in the cavity of the bottom layer tray or in the cavity of the bottom layer tray and the remaining several layers of trays, and several gas conduits installed in each of the remaining trays except the bottom layer tray.

[0006] As a further improvement to the above solution, the gas conduit is installed at a location away from the carrier gas pipe. With this installation, the point where the carrier gas enters the tray is away from the position of the gas conduit, and the carrier gas can reach the position of the gas conduit in the upper tray only after traveling a long path after entering the tray. It rises into the upper tray through the gas conduit, and in the process of the carrier gas flowing in this way, it mixes sufficiently with the vapor generated by the vaporization of the solid source in the tray, carrying a large amount of vapor into the upper tray, thereby improving the vaporization rate of the solid source material in the tray and the efficiency of vapor transport.

[0007] As a further improvement to the above solution, the carrier gas pipe is installed offset from the center of the tray. This installation allows for an even greater distance between the carrier gas pipe and the gas conduit, and in the process of the carrier gas flowing, it mixes thoroughly with the vapor generated when the solid source in the tray vaporizes, carrying a large amount of vapor into the upper tray, thereby improving the vaporization rate of the solid source material in the tray and the efficiency of vapor transport.

[0008] As a further improvement to the above solution, the conduits in adjacent trays are installed at a set distance apart. With this installation, the mixed gas that rises to the upper tray can travel a certain distance within the tray before entering the conduit of an even higher tray, and rise again into the higher tray, thus further improving the mixing efficiency of the mixed gas and the solid source vapor.

[0009] As a further improvement to the above solution, multiple conduits are installed in each tray of each layer, and the conduits are positioned away from the carrier gas pipes. This arrangement improves the transmission efficiency of the mixed gas.

[0010] A second means of realizing the present invention is as follows: A solid source vaporizer comprising a housing and several layers of trays, a top cover installed on the top of the housing, an exhaust port installed on the top cover, trays stacked vertically inside the housing, an intake port installed on the bottom of the housing, a carrier gas pipe installed inside the housing, the lower end of the carrier gas pipe connected to the intake port, the carrier gas pipe passing through several layers of trays, several carrier gas outlets installed in the carrier gas pipe, the carrier gas outlets installed in the cavity of the bottom layer of tray or in the cavity of the bottom layer of tray and the remaining several layers of trays, and several gas conduits installed in each of the remaining trays except for the bottom layer of tray.

[0011] As a further improvement to the above solution, the gas conduit is installed at a location away from the carrier gas pipe. With this installation, the point where the carrier gas enters the tray is away from the position of the gas conduit, and the carrier gas can reach the position of the gas conduit in the upper tray only after traveling a long path after entering the tray. It rises into the upper tray through the gas conduit, and in the process of the carrier gas flowing in this way, it mixes sufficiently with the vapor generated by the vaporization of the solid source in the tray, carrying a large amount of vapor into the upper tray, thereby improving the vaporization rate of the solid source material in the tray and the efficiency of vapor transport.

[0012] As a further improvement to the above solution, the carrier gas pipe is installed offset from the center of the tray. This installation allows for an even greater distance between the carrier gas pipe and the gas conduit, and in the process of the carrier gas flowing, it mixes thoroughly with the vapor generated when the solid source in the tray vaporizes, carrying a large amount of vapor into the upper tray, thereby improving the vaporization rate of the solid source material in the tray and the efficiency of vapor transport.

[0013] As a further improvement to the above solution, the conduits in adjacent trays are installed at a set distance apart. With this installation, the mixed gas that rises to the upper tray can travel a certain distance within the tray before entering the conduit of an even higher tray, and rise again into the higher tray, thus further improving the mixing efficiency of the mixed gas and the solid source vapor.

[0014] As a further improvement to the above solution, multiple conduits are installed in each tray of each layer, and the conduits are positioned away from the carrier gas pipes. This arrangement improves the transmission efficiency of the mixed gas.

[0015] A third means of realizing the present invention is as follows: A solid source vaporizer comprising a housing and several layers of trays, a top cover installed on top of the housing, an intake port and an exhaust port installed on the top cover, trays stacked vertically within the housing, a cavity installed below the bottommost tray, a first carrier gas pipe and a second carrier gas pipe installed within the housing, the upper end of the first carrier gas pipe connected to the intake port, the first carrier gas pipe penetrating through each layer of trays and extending into the cavity below the bottommost tray, there are multiple second carrier gas pipes, the second carrier gas pipes penetrating several layers of trays from bottom to top, the lower end openings of the second carrier gas pipes located in the cavity below the bottommost tray, several carrier gas outlets installed in the second carrier gas pipes, the carrier gas outlets installed in the cavity of the bottommost tray or in the cavity of the bottommost tray and the remaining several layers of trays, and several gas conduits installed in each of the remaining trays except for the bottom two trays.

[0016] As a further improvement to the above solution, the first carrier gas pipe is installed at the center of the tray or at a position offset from the center of the tray. The first carrier gas pipe can be installed at the center of the tray or at a position offset from the center, and can be flexibly adjusted during the design phase according to the design needs of the airflow path.

[0017] As a further improvement to the above solution, the second carrier gas pipe is installed at the center of the tray or at a position offset from the center of the tray. The second carrier gas pipe can be installed at the center of the tray or at a position offset from the center, and can be flexibly adjusted during the design phase according to the design needs of the airflow path.

[0018] As a further improvement to the above solution, the second carrier gas pipe is installed at a location away from the first carrier gas pipe. With this installation, the carrier gas is allowed to fill the cavity below the lowest tray and stabilize in pressure before entering the carrier gas pipe, thereby further stabilizing the carrier gas pressure.

[0019] As a further improvement to the above solution, the gas conduit is installed at a location away from the second carrier gas pipe. With this installation, the point where the carrier gas enters the tray is away from the position of the gas conduit, and the carrier gas can reach the position of the gas conduit in the upper tray only after traveling a long path after entering the tray. It rises into the upper tray through the gas conduit, and in the process of the carrier gas flowing in this way, it can mix sufficiently with the vapor generated by the vaporization of the solid source in the tray, carrying a large amount of vapor into the upper tray, improving the vaporization rate of the solid source material in the tray and the transport efficiency of the vapor.

[0020] As a further improvement to the above solution, the gas conduits in adjacent trays are installed at a set distance apart. With this installation, the mixed gas that rises to the upper tray can travel a certain distance within the tray before entering the gas conduit of an even higher tray and rising into that even higher tray, thus further improving the mixing efficiency of the mixed gas and vapor.

[0021] As a further improvement to the above solution, multiple gas conduits are installed within the tray. This installation improves the transmission efficiency of the mixed gas.

[0022] As a further improvement to the above solution, multiple conduits are installed in the tray, and the conduits are installed near the first carrier gas pipe. This installation improves the transmission efficiency of the mixed gas, separates the conduits from the second carrier gas pipe, and improves the mixing efficiency of the carrier gas and vapor.

[0023] As a further improvement to the above solution, the first carrier gas pipe also has exhaust openings at positions corresponding to one or more tray cavities. With such an installation, a small amount of carrier gas enters the tray through the exhaust openings in the first carrier gas pipe and mixes with the vapor generated by the vaporization of the solid source in the tray, thereby improving the mixing efficiency.

[0024] As a further improvement of the above solution, the second carrier gas pipe is either only one or one or more. When only one second carrier gas pipe is installed, the carrier gas enters the tray through the carrier gas outlet in the second carrier gas pipe. When a plurality of second carrier gas pipes are installed, the transmission efficiency of the carrier gas can be improved, and further the gas transmission efficiency in the solid source vaporizer can be improved.

Effect of the Invention

[0025] The present invention has positive effects. 1) The solid source vaporizer of the present invention adopts a parallel gas transmission passage. After the carrier gas enters the carrier gas pipe from the air inlet, it can enter each layer of trays respectively. After the carrier gas enters each layer of trays, it can horizontally transmit a long distance along the surface of the solid source material in each layer of trays and then reach the position of the air guiding pipe for the first time. Therefore, the carrier gas can carry a large amount of solid source vapor. 2) Since the carrier gas imported into each layer of trays is a carrier gas that does not contain volatile gas, the amount of vapor that the carrier gas can carry is very large, and the vaporization rates of the solid source materials in each layer of trays are made close to each other, the vaporization efficiency of the solid source materials in each layer of trays is improved, and further the overall vaporization efficiency of the solid source vaporizer can be improved.

Brief Description of the Drawings

[0026] [Figure 1a] Figure 1a is a schematic structural view of the solid source vaporizer of Example 1. [Figure 1b] Figure 1b is a schematic plan view of the solid source vaporizer of Example 1. [Figure 1c] Figure 1c is a schematic cross-sectional view in the A-A direction of Figure 1b. [Figure 1d] Figure 1d is an internal structure view of the solid source vaporizer of Example 1. [Figure 1e] Figure 1e is a schematic structural view of the first to third layer trays. [Figure 1f] Figure 1f is a cross-sectional view in the B-B direction of Figure 1e. [Figure 1g] Figure 1g is a schematic diagram of the structure of the fourth layer tray. [Figure 1h] Figure 1h is a cross-sectional view of Figure 1g in the CC direction. [Figure 2a] Figure 2a is a schematic diagram of the solid source vaporization apparatus of Example 2. [Figure 2b] Figure 2b is a schematic plan view of the solid source vaporizer of Example 2. [Figure 2c] Figure 2c is a schematic cross-sectional view in the DD direction in Figure 2b. [Figure 2d] Figure 2d is a schematic diagram of the internal structure of the solid source vaporizer in Example 2. [Figure 3a] Figure 3a is a schematic diagram of the solid source vaporization apparatus of Example 3. [Figure 3b] Figure 3b is a schematic plan view of the solid source vaporizer of Example 3. [Figure 3c] Figure 3c is a schematic cross-sectional view in the EE direction in Figure 3b. [Figure 3d] Figure 3d is a schematic diagram of the internal structure of the solid source vaporizer of Example 3. [Figure 4a] Figure 4a is a schematic diagram of the solid source vaporizer of Example 4. [Figure 4b] Figure 4b is a schematic plan view of the solid source vaporizer of Example 4. [Figure 4c] Figure 4c is a schematic cross-sectional view in the FF direction in Figure 4b. [Figure 4d] Figure 4d is a schematic diagram of the internal structure of the solid source vaporizer of Example 4. [Figure 5a] Figure 5a is a schematic diagram of the solid source vaporizer of Example 5. [Figure 5b] Figure 5b is a schematic plan view of the solid source vaporizer of Example 5. [Figure 5c] Figure 5c is a schematic cross-sectional view in the GG direction in Figure 5b. [Figure 5d] Figure 5d is a schematic diagram of the internal structure of the solid source vaporizer of Example 5. [Figure 6a]Figure 6a is a schematic diagram of the solid source vaporization apparatus of Example 6. [Figure 6b] Figure 6b is a schematic plan view of the solid source vaporizer of Example 6. [Figure 6c] Figure 6c is a schematic cross-sectional view in the KK direction in Figure 6b. [Modes for carrying out the invention]

[0027] The technical solutions of the present invention will be clearly and completely described below by examples, and the examples described are only a subset of the present invention, not all of it. All other examples that a person skilled in the art could obtain without creative effort based on the examples of the present invention are all within the scope of the protection of the present invention.

[0028] (Example 1) The solid source vaporizer shown in Figures 1a to 1h includes a housing 1, several layers of trays 2, and a carrier gas pipe 3.

[0029] Housing 1 is a corrosion-resistant housing, and a top cover 11 is installed on top of housing 1. After the top cover 11 is fixed and connected to housing 1, a sealed chamber can be formed in housing 1, and an intake port 12 and an exhaust port 13 are installed in the top cover 11. In operation, housing 1 is heated to a specific temperature, and a solid source vaporizes to produce steam. Heating of housing 1 may be achieved by a heating device enclosing the housing, by placing it in a liquid heating container, or by other heating devices.

[0030] The carrier gas pipe 3 is a tubular member, the upper end of which is connected to the air intake in the top cover of the housing, and the bottom of which extends into the lowest tray 2 inside the housing 1. A carrier gas outlet 33 is opened in the carrier gas pipe 3, and the carrier gas outlet 33 is positioned to correspond to the internal cavities of several layers of tray 2, so that the carrier gas can enter the corresponding tray 2 directly through the carrier gas pipe 3. For example, the carrier gas outlet 33 is installed at a position in the carrier gas pipe 3 corresponding to the internal cavity of the lowest tray 2. In a preferred implementation, the carrier gas outlet 33 may be installed in any two or more internal cavities of the tray 2, or in any internal cavity of each layer of tray 2. In order to bring the carrier gas entering the solid source vaporizer to a desired temperature, the carrier gas in the carrier gas pipe 3 is preheated to a desired temperature. The design position of the carrier gas pipe 3 corresponds to the position of the air intake port 12 on the top cover 11 of the housing 1, and the carrier gas pipe 3 may or may not be designed in the center of the tray 2.

[0031] Tray 2 is a tray for containing a solid source material, and includes a bottom wall and side walls installed at the edges of the bottom wall, with a chamber for containing the solid source material formed between the bottom wall and the side walls. The number of trays may include several layers, for example, one, two, three, or more layers. To improve the vaporization rate of the solid source material, multiple layers of trays are generally installed in the solid source vaporizer. Multiple layers of trays are installed so as to be stacked vertically within the housing. In this embodiment, there are four layers of trays, which are stacked vertically within the housing. As shown in Figures 1d and 1e, through holes are provided in the bottom walls of the first to third layers of trays for the carrier gas pipe 3 to pass through, and a conduit pipe 21 is installed vertically on the bottom surface of the tray. On the other hand, the fourth layer of tray does not have through holes or a conduit pipe. As a preferred solution, the conduit 21 may be installed at a distance from the carrier gas pipe 3, as shown in Figure 1c, the distance between the conduit 21 and the carrier gas pipe 3 is greater than the distance between the carrier gas pipe 3 and the center of the tray, the conduit 21 is used to transmit the mixed gas in the lower tray to the upper tray, and the height of the conduit 21 needs to be lower than the height of the side wall of the tray in order to facilitate the vertical stacking of multiple layers of trays, the number of conduits 21 and the diameter of the holes in the conduits 21 may be set according to the transport speed needs of the carrier gas, one conduit 21 may be installed, or two or more conduits 21 may be installed, in this embodiment one conduit 21 is installed in each of the first to third layers of trays 2, and the conduit 21 is installed on the side closer to the exhaust port 13.

[0032] In this embodiment, the carrier gas heated outside the solid source vaporizer enters the carrier gas pipe 3 from the intake port 12, and enters each layer of tray 2 via the carrier gas outlet 33 in the carrier gas pipe 3. The carrier gas that enters the tray 2 moves along the surface of the solid material in the tray 2 to the location of the conduit pipe 21. In this process, a large amount of solid source vapor can be carried, improving the vapor content in the mixed gas, further improving the volatilization efficiency of the solid source material. Since the conduit pipes of each layer face each other, the mixed gas that enters the upper tray from the lower tray via the conduit pipe quickly reaches the trays further above, resulting in a high transmission speed of the mixed gas.

[0033] (Example 2) The solid source vaporizer shown in Figures 2a to 2d is based on Example 1, but differs from Example 1 in that the design position of the conduit pipes 21 in the first to third layers of trays 2 is located away from the carrier gas pipes 3, and the conduit pipes 21 in adjacent trays 2 are installed with a certain distance offset from each other, that is, the conduit pipes 21 in adjacent trays 2 are installed with a vertical offset from the bottom wall of the tray. Furthermore, the position of the conduit pipes 21 in each layer of trays 2 is all installed with a certain distance offset from the exhaust port 13. As shown in Figures 2a to 2d, a total of four layers of trays 2 are installed in the housing 1, there are no conduit pipes in the fourth layer tray, and the conduit pipes 21 in the first and third layers of trays 2 are designed to be near the exhaust port 13 and towards the rear. The conduit pipe 21 in the second layer of tray 2 is designed to be near the exhaust port 13 and towards the front.

[0034] In this embodiment, the carrier gas enters the carrier gas pipe 3 from the intake port 12 and enters each layer of tray 2 via the carrier gas outlet in the carrier gas pipe 3. The carrier gas that enters the tray 2 moves along the surface of the solid material in the tray 2 to the location of the conduit pipe 21. In this process, a large amount of solid source vapor can be carried, improving the vapor content in the mixed gas and further improving the volatilization efficiency of the solid source material. The conduit pipes 21 in adjacent trays 2 are installed with a certain distance between them, and the positions of the conduit pipes 21 in each layer of tray 2 are also installed with a certain distance between them and the exhaust port 13. Therefore, the mixed gas that enters the upper layer of tray 2 from the lower layer of tray 2 via the conduit pipe 21 can only reach the conduit pipe 21 in the upper layer of tray 2 after traveling a certain distance. As a result, the mixing distance of the mixed gas in each layer is increased, and the mixing of the output mixed gas can be made more uniform.

[0035] (Example 3) The solid source vaporizer shown in Figures 3a to 3d is based on the previous embodiment 1, and differs from the previously described embodiment 1 in that multiple gas conduits 21 are installed in each tray 2 of each layer except the bottom tray, and the gas conduits 21 are located away from the carrier gas pipe.

[0036] In this embodiment, the carrier gas is heated outside the solid source vaporizer, then enters the carrier gas pipe 3 from the intake port 12, and enters each layer of tray 2 via each carrier gas outlet 33 in the carrier gas pipe 3. The carrier gas is then transmitted within each layer of tray 2 along the surface of the solid source material in the tray 2 to the position of the gas conduit 21 in the upper layer of tray 2. During the gas transmission process, a large amount of solid source vapor can be carried, improving the vapor content in the mixed gas and further improving the volatilization efficiency of the solid source material. Since multiple gas conduits 21 are installed in each of the trays from the first to the third layer, the rising speed of the mixed gas can be increased, improving the transmission efficiency of the volatile gas.

[0037] (Example 4) The solid source vaporizer shown in Figures 4a to 4d is based on the previous embodiment 1, but differs from embodiment 1 in that it has two carrier gas pipes, named the first carrier gas pipe 31 and the second carrier gas pipe 32, the first carrier gas pipe 31 does not have a carrier gas outlet or has an exhaust opening, the first carrier gas pipe 31 extends from the intake port 12 into the cavity 14 of the lowest tray 2 and communicates with the cavity 14, and an air guide pipe 21 is installed in all of the remaining trays 2 except for the two lowest trays 2, and the air guide pipes 21 in adjacent trays 2 are installed with a certain distance between them, that is, the air guide pipes 21 in adjacent trays 2 are installed offset in a direction perpendicular to the bottom wall of the tray. The second carrier gas pipe 32 penetrates each layer tray 2 other than the bottom and top layer trays 2, and a carrier gas outlet 33 is installed in the second carrier gas pipe 32. The design positions of the conduit pipe 21 and the second carrier gas pipe 32 can be designed as needed, and in a preferred embodiment, the conduit pipe 21 can be designed at a distance from the second carrier gas pipe 32. For example, the conduit pipe 21 may be designed near the first carrier gas pipe 31 and the second carrier gas pipe 32 may be designed at a distance from the conduit pipe 21, or the second carrier gas pipe 32 may be designed close to the first carrier gas pipe 31 and the conduit pipe 21 may be designed at a distance from the second carrier gas pipe 32, or other means that the conduit pipe 21 and the second carrier gas pipe 32 are separated from each other.

[0038] As shown in Figures 4a to 4d, in this embodiment, a total of five trays 2 are installed inside the housing 1. There are no conduits in the fourth and fifth trays. The conduits 21 in the first and third trays are designed to be near the first carrier gas pipe and towards the rear. The conduits 21 in the second tray are designed to be near the first carrier gas pipe and towards the front. In this case, the distance between the first carrier gas pipe 31 and the second carrier gas pipe 32 is greater than the distance between the first carrier gas pipe 31 and the center of the tray, and the distance between the first carrier gas pipe 31 and the second carrier gas pipe 32 is greater than the distance between the second carrier gas pipe 32 and the center of the tray. Furthermore, the distance between the conduit 21 and the second carrier gas pipe 32 is greater than the distance between the second carrier gas pipe 32 and the center of the tray.

[0039] In this embodiment, the carrier gas is transmitted from the intake port 12 through the first carrier gas pipe 31 into the cavity 14 of the fifth layer tray. Inside the cavity 14, the carrier gas is transmitted to the lower end opening of the second carrier gas pipe 32, then enters the second carrier gas pipe 32, rises through the second carrier gas pipe 32, and enters the fourth layer and second layer trays 2 respectively through the carrier gas outlets 33 in the second carrier gas pipe 32. The carrier gas is transmitted to the surface of the solid material in the tray 2, and when it reaches the position of the conduit pipe 21, it reaches the upper tray 2 via the conduit pipe 21, and the first layer tray From tray I to the third layer tray, the conduit pipes 21 in adjacent trays 2 are installed with a certain distance difference between them. Therefore, the mixed gas can only reach the upper layer tray 2 after rising from the conduit pipes 21 and traveling a certain transmission distance. This increases the mixing distance of the gas, allowing for more uniform mixing of the gas. Furthermore, since the second carrier gas pipe 32 does not directly enter the first layer tray 2, the carrier gas and volatile gas can only enter the first layer tray via the conduit pipes 21 in the first layer tray 2 after mixing in the second layer tray. This allows for more uniform mixing of the mixed gas.

[0040] (Example 5) The solid source vaporizer shown in Figures 5a to 5d is based on Example 4, but differs from Example 4 in that multiple gas conduits 21 are installed in each of the trays from the first to the third layer, and the gas conduits 21 are distributed near the first carrier gas pipe 31.

[0041] In this embodiment, the carrier gas is transmitted from the intake port 12 through the first carrier gas pipe 31 into the cavity 14 below the lowest tray. Inside the cavity 14, the carrier gas enters the second carrier gas pipe 32 from its lower end opening, rises through the second carrier gas pipe 32, and enters the trays 2 from the fourth to the second layer via the carrier gas outlets 33 in the second carrier gas pipe 32. After entering each layer tray 2, the carrier gas is transmitted along the surface of the solid material in the tray 2, and when it reaches the position of the conduit 21, it reaches the upper trays via the conduit 21. Since multiple conduits 21 are installed in each tray from the first to the third layer, the rising speed of the mixed gas can be increased and the transmission efficiency of the vaporized gas can be improved.

[0042] (Example 6) The solid source vaporizer shown in Figures 6a to 6c is based on Example 1, but differs from Example 1 in that the intake port 12 is installed at the bottom of the housing 1, the carrier gas pipe 3 penetrates each layer of trays sequentially from bottom to top from the intake port 12, the upper end of the carrier gas pipe 3 is not open, a carrier gas outlet 33 is installed on the carrier gas pipe 3, and the carrier gas outlet 33 is installed at a position corresponding to the internal cavity of each of the remaining layers of trays 2, excluding the uppermost layer 2.

[0043] In this embodiment, the carrier gas heated outside the solid source vaporizer enters the carrier gas pipe 3 through the intake port 12 at the bottom of the housing and enters each of the trays 2 of each layer except the top layer via the carrier gas outlet 33 in the carrier gas pipe 3. The carrier gas that enters the tray 2 moves along the surface of the solid material in the tray 2 to the location of the conduit. In this process, a large amount of vapor can be carried, improving the vapor content in the mixed gas and further improving the vaporization efficiency of the solid source material. Since the conduits of each layer face each other, the mixed gas that enters the upper tray from the lower tray via the conduit quickly reaches the trays of even higher layers, resulting in a high transmission speed of the mixed gas.

[0044] Although embodiments of the present invention have been described, those skilled in the art will understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is limited by the appended claims and equivalents.

[0045] (Note 1) A solid source vaporizer comprising a housing and several layers of trays, a top cover installed on the top of the housing, an intake port and an exhaust port installed on the top cover, the trays stacked vertically inside the housing, a carrier gas pipe installed inside the housing, the upper end of the carrier gas pipe connected to the intake port, the carrier gas pipe penetrating each layer of trays and extending into the bottom layer tray, several carrier gas outlets installed in the carrier gas pipe, the carrier gas outlets installed in the cavity of the bottom layer tray or in the cavity of the bottom layer tray and the remaining several layers of trays, and several gas conduits installed in each of the remaining trays except the bottom layer tray.

[0046] (Note 2) The solid source vaporization apparatus according to Appendix 1, characterized in that the gas conduit is installed at a location away from the carrier gas pipe.

[0047] (Note 3) The solid source vaporizer according to Appendix 1, characterized in that the carrier gas pipe is installed offset from the center of the tray.

[0048] (Note 4) The solid source vaporization apparatus according to Appendix 1, characterized in that the air conduits in adjacent trays are installed at a set distance apart.

[0049] (Note 5) The solid source vaporization apparatus according to Appendix 1, characterized in that multiple conduits are installed in each tray of the aforementioned layer, and the conduits are installed at a position away from the carrier gas pipe.

[0050] (Note 6) A solid source vaporizer comprising a housing and several layers of trays, wherein a top cover is installed on the top of the housing, an exhaust port is installed on the top cover, the trays are stacked vertically inside the housing, an intake port is installed on the bottom of the housing, a carrier gas pipe is installed inside the housing, the lower end of the carrier gas pipe is connected to the intake port, the carrier gas pipe penetrates several layers of trays, several carrier gas outlets are installed in the carrier gas pipe, the carrier gas outlets are installed in the cavity of the bottom layer of tray or in the cavity of the bottom layer of tray and the remaining several layers of trays, and several gas conduits are installed in each of the remaining trays except for the bottom layer of tray.

[0051] (Note 7) The solid source vaporization apparatus according to Appendix 6, characterized in that the gas conduit is installed at a location away from the carrier gas pipe.

[0052] (Note 8) The solid source vaporizer according to Appendix 6, characterized in that the carrier gas pipe is installed offset from the center of the tray.

[0053] (Note 9) The solid source vaporization apparatus according to Appendix 6, characterized in that the air conduits in adjacent trays are installed at a set distance apart.

[0054] (Note 10) The solid source vaporization apparatus according to Appendix 6, characterized in that multiple conduits are installed in each tray of the aforementioned layer, and the conduits are installed at a position away from the carrier gas pipe.

[0055] (Note 11) A solid source vaporizer comprising a housing and several layers of trays, a top cover installed on the top of the housing, an intake port and an exhaust port installed on the top cover, trays stacked vertically inside the housing, a cavity installed below the bottommost tray, a first carrier gas pipe and a second carrier gas pipe installed inside the housing, the upper end of the first carrier gas pipe connected to the intake port, the first carrier gas pipe penetrating through each layer of trays and extending into the cavity below the bottommost tray, there are multiple second carrier gas pipes, the second carrier gas pipes penetrating several layers of trays from bottom to top, the lower end openings of the second carrier gas pipes located in the cavity below the bottommost tray, several carrier gas outlets installed in the second carrier gas pipes, the carrier gas outlets installed in the cavity of the bottommost tray or in the cavity of the bottommost tray and the remaining several layers of trays, and several gas conduits installed in each of the remaining trays except the bottommost tray.

[0056] (Note 12) The solid source vaporizer according to Appendix 11, characterized in that the first carrier gas pipe is installed at the center of the tray or at a position offset from the center of the tray.

[0057] (Note 13) The solid source vaporizer according to Appendix 11, characterized in that the second carrier gas pipe is installed at the center of the tray or at a position offset from the center of the tray.

[0058] (Note 14) The solid source vaporizer according to Appendix 11, characterized in that the second carrier gas pipe is installed at a location away from the first carrier gas pipe.

[0059] (Note 15) The solid source vaporization apparatus according to Appendix 11, characterized in that the gas conduit is installed at a location away from the second carrier gas pipe.

[0060] (Note 16) The solid source vaporization apparatus according to Appendix 11, characterized in that the air conduits in adjacent trays are installed at a set distance apart.

[0061] (Note 17) The solid source vaporization apparatus according to Appendix 11, characterized in that a plurality of air conduits are installed in the tray.

[0062] (Note 18) The solid source vaporization apparatus according to Appendix 11, characterized in that a plurality of conduits are installed in the tray, and the conduits are installed near the first carrier gas pipe.

[0063] (Note 19) The solid source vaporizer according to Appendix 11, characterized in that the first carrier gas pipe also has an exhaust opening at a position corresponding to one or more tray cavities.

[0064] (Note 20) The solid source vaporizer according to any one of the appendices 11 to 19, characterized in that the second carrier gas pipe is one or more. [Explanation of symbols]

[0065] Housing 1, top cover 11, intake port 12, exhaust port 13, cavity 14, tray 2, conduit 21, flow guide plate 22, carrier gas pipe 3, first carrier gas pipe 31, second carrier gas pipe 32, carrier gas outlet 33.

Claims

1. A solid source vaporizer, A housing with a cavity inside, A top cover, which is installed on the top of the housing and closes the cavity, and which has an air intake port and an exhaust port installed on the top cover, At least two trays stacked within the cavity, each tray comprising at least two trays including a bottom wall and a side wall installed at the edge of the bottom wall, A carrier gas pipe, installed within the cavity and penetrating each layer of trays, the upper end of the carrier gas pipe communicating with the air intake, and the lower end of the carrier gas pipe extending into the bottom layer tray, the carrier gas pipe having several carrier gas outlets, the carrier gas outlets located between the bottom walls of two adjacent trays, or between the bottom wall of the top layer tray and the top cover, is included. Here, with the exception of the bottom tray, several air ducts are installed in each of the remaining trays. The aforementioned gas conduit is installed at a distance from the carrier gas pipe, and the carrier gas pipe is installed offset from the center of the tray. A solid source vaporization apparatus characterized in that the distance between the gas conduit and the carrier gas pipe is greater than the distance between the carrier gas pipe and the center position of the tray.

2. The solid source vaporizer according to claim 1, characterized in that the air conduits in adjacent trays are installed offset in a direction perpendicular to the bottom wall of the trays.

3. A solid source vaporizer, A housing having a cavity inside and an air intake port installed at the bottom of the housing, A top cover, which is installed on the top of the housing and closes the cavity, and on which an exhaust port is installed, At least two trays stacked within the cavity, each tray comprising at least two trays including a bottom wall and a side wall installed at the edge of the bottom wall, A carrier gas pipe, installed within the cavity and penetrating each layer of trays, the lower end of the carrier gas pipe communicating with the air intake, and the upper end of the carrier gas pipe extending into the uppermost tray, with several carrier gas outlets provided in the carrier gas pipe, the carrier gas outlets being located between the bottom walls of two adjacent trays, and including a carrier gas pipe. A solid source vaporization device characterized in that, with the exception of the bottom tray, several air conduits are installed in each of the remaining trays.

4. The solid source vaporization apparatus according to claim 3, characterized in that the gas conduit is installed at a location away from the carrier gas pipe, and the carrier gas pipe is installed offset from the center of the tray.

5. The solid source vaporization apparatus according to claim 3, characterized in that the distance between the gas conduit and the carrier gas pipe is greater than the distance between the carrier gas pipe and the center position of the tray.

6. The solid source vaporizer according to claim 3, characterized in that the air conduits in adjacent trays are installed offset in a direction perpendicular to the bottom wall of the trays.

7. A solid source vaporizer, A housing with a cavity inside, A top cover, which is installed on the top of the housing and closes the cavity, and which has an air intake port and an exhaust port installed on the top cover, At least two trays stacked within the cavity, each tray comprising at least two trays including a bottom wall and a side wall installed at the edge of the bottom wall, A first carrier gas pipe installed in the cavity, wherein the upper end of the first carrier gas pipe communicates with an air intake, the first carrier gas pipe penetrates each layer of trays, and the lower end of the first carrier gas pipe communicates with a space enclosed by the bottom wall of the bottom layer tray and the second to last tray, A second carrier gas pipe installed in the cavity, the second carrier gas pipe passing through a plurality of trays from below, the lower end of the second carrier gas pipe being open and communicating with the space, several carrier gas outlets provided in the second carrier gas pipe, the carrier gas outlets being located between the bottom walls of two adjacent trays, and the second carrier gas pipe A solid source vaporization device characterized in that, with the exception of the two bottom trays, several air conduits are installed in each of the remaining trays.

8. The solid source vaporizer according to claim 7, characterized in that the first carrier gas pipe or the second carrier gas pipe is installed offset from the center of the tray, the second carrier gas pipe is located away from the first carrier gas pipe, and the gas conduit is located away from the second carrier gas pipe.

9. The solid source vaporizer according to claim 7, characterized in that the distance between the first carrier gas pipe and the second carrier gas pipe is greater than the distance between the first carrier gas pipe and the center position of the tray, and the distance between the first carrier gas pipe and the second carrier gas pipe is greater than the distance between the second carrier gas pipe and the center position of the tray.

10. The solid source vaporizer according to claim 7, characterized in that the distance between the gas conduit and the second carrier gas pipe is greater than the distance between the second carrier gas pipe and the center position of the tray.

11. The solid source vaporizer according to claim 7, characterized in that the air conduits in adjacent trays are installed offset in a direction perpendicular to the bottom wall of the trays.

12. The solid source vaporization apparatus according to claim 7, characterized in that the gas conduit is installed near the first carrier gas pipe.

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