Valve

Abstract

The invention relates to a valve, in particular a vacuum valve, comprising a closing element (2) for closing an opening (3) and a valve drive for moving the closing element (2) between an open position in which the closing element (2) leaves the opening (3) open and a closed position in which the closing element (2) closes the opening (3), wherein: the valve drive has at least two pivotably mounted levers (5); the valve drive has at least one rotatably mounted spindle (6); and an angle (W) included by the at least two levers (5) can be changed by the rotation of the at least one spindle (6).

Description

[0001]

[0002] valve

[0003] The invention relates to a valve, in particular a vacuum valve, with a closure element for closing an opening and a valve drive for moving the closure element between an open position, in which the closure element releases the opening, and a closed position, in which the closure element closes the opening, wherein the valve drive has at least two pivotably mounted levers.

[0004] Such valves, particularly in vacuum technology, i.e., in the vacuum valve design, are often equipped with valve actuators that have pneumatically or hydraulically operated piston-cylinder arrangements. Such a valve is known, for example, from the applicant's own EP 2 749 789 A1.

[0005] The object of the invention is to design a valve of the type mentioned at the outset in such a way that the closure element can be moved between the open position and the closed position in a simple and reliable manner.

[0006] This object is achieved by a valve having the features of independent claim 1.

[0007] According to the invention, it is therefore provided that the valve drive has at least one rotatably mounted spindle, and that an angle enclosed by the at least two levers can be changed by a rotary movement of the at least one spindle.

[0008] This makes it possible to move the closure element back and forth between the open position and the closed position in a reliable manner. As explained in more detail below, it is possible, for example, to bring about a movement of the closure element by means of a corresponding rotation mode of the at least one spindle and a resulting change in an angle between the at least two levers. Above all, as explained in more detail below, the valves according to the invention can also be used to implement a wide variety of movement paths of the closure element between the open position and the closed position. These paths can, for example, be L-shaped or J-shaped, but can also be designed in other ways.

[0009] Further advantageous embodiments of the invention are defined in the dependent claims.

[0010] A valve according to the invention can advantageously have a valve housing. This valve housing can, for example, also contain the opening, which is closed by the closure element in the closed position. However, this does not necessarily have to be the case. The opening, which is closed by the closure element, does not necessarily have to be part of the valve. It can, for example, also be a corresponding opening in a process chamber or transfer chamber or the like.

[0011] The closure element can, in principle, be shaped differently depending on the shape of the opening it is intended to close. In preferred embodiments, in which relatively large openings are to be closed, the closure element is advantageously designed in the form of a valve disk known per se.

[0012] The degree of sealing achieved between the closure element and a valve seat surrounding the opening in the closed position can vary depending on the valve's design and application. The application of suitable seals to the closure element and / or the valve seat is known per se and requires no further explanation.

[0013] The closure element can be attached directly to a valve rod or to the valve rod via a closure element support. However, the valve rod is also generally optional, e.g., if the closure element is connected to the valve drive in another way.

[0014] The at least one spindle preferably has at least one thread, in particular an external thread. The thread can be a motion thread, for example, a trapezoidal thread. However, the spindle can also be designed, for example, as a recirculating ball screw.

[0015] With valves according to the invention it is possible, for example, to move the closure element back and forth on a known L-shaped movement path between the open position and the closed position. With these L-shaped movement paths the closure element is initially moved from the open position parallel to a longitudinal extension of a valve rod into an intermediate position. In this intermediate position the closure element is already arranged in front of the opening but is not yet pressed against the valve seat surrounding the opening. This parallel movement takes place depending on the precise embodiment of this invention either via a specific rotary movement of the at least one spindle or via another longitudinal drive.

[0016] From the intermediate position, the closure element is then moved into the closed position orthogonally to a longitudinal extension of a valve rod. Such an orthogonal movement can be achieved by a specific rotational movement of the at least one spindle. This rotational movement changes the angle between the at least two levers, resulting in a movement of the closure element orthogonally to a longitudinal extension of a valve rod.

[0017] In particular, it can be provided that a reduction in the angle corresponds to a movement in the direction of the closed position and an increase in the angle corresponds to a movement in the direction of an intermediate position.

[0018] The exact kinematic relationships will be explained in more detail below.

[0019] In order to be able to move the closure element back and forth particularly quickly between the closed and open positions, it can also be guided on so-called J-shaped or generally curved movement paths. In these J-shaped or otherwise curved movement paths, the closure element is moved, at least in sections, simultaneously parallel and orthogonal to the longitudinal extension of a valve rod. If no valve rod is present or if it is not longitudinally extended, one can generally speak of a longitudinal movement direction and a transverse movement direction in the above statements regarding the movement path of the closure element.

[0020] Advantageously, it can be provided that the at least two levers are arranged so as to be pivotable relative to one another about a common pivot axis or about at least two parallel, spaced-apart pivot axes and / or wherein the angle enclosed by the at least two levers is less than 180°, preferably less than 90°.

[0021] The angle enclosed by the at least two levers can occur, in particular, in a projection of the at least two levers. The at least two levers are preferably skewed relative to one another, i.e., in other words, generally not arranged in a common plane.

[0022] Preferably, it can be provided that the at least two levers are pivotally mounted directly or indirectly on the valve rod or on the closure element.

[0023] Depending on the embodiment, by changing an angle of the at least two levers, the valve rod or the closure element can be moved in a direction orthogonal to a longitudinal extent of the valve rod, i.e. generally speaking in a transverse direction of movement.

[0024] The valve drive advantageously has at least one spindle drive for driving, preferably for rotating, the at least one spindle, wherein the at least one spindle drive preferably comprises at least one drive motor. This greatly facilitates the operation of the valve. Particularly advantageously, the valve drive can have a separate spindle drive for each spindle for rotating the respective spindle about its respective longitudinal axis. In principle, however, it would also be conceivable with the invention to rotate the at least one spindle by hand about its longitudinal axis.

[0025] Particularly preferably, it can be provided that the valve drive has at least a first spindle nut and a second spindle nut, wherein one of the at least two levers is pivotally mounted on the first spindle nut or an actuating element connected, preferably fixedly, to the first spindle nut and another of the at least two levers is pivotally mounted on the second spindle nut or an actuating element connected, preferably fixedly, to the second spindle nut.

[0026] This represents a simple possibility to generate a pivoting movement of a lever by means of a rotary movement of at least one spindle.

[0027] According to one embodiment of the present invention, it can be provided that the at least one spindle has a left-handed threaded section and a right-handed threaded section, wherein the first spindle nut is in threaded engagement with the left-handed threaded section and the second spindle nut is in threaded engagement with the right-handed threaded section.

[0028] Depending on the direction of rotation of the at least one spindle, the first and second spindle nuts move either toward each other or away from each other. Since the at least two levers are pivotally mounted on the spindle nuts or pivotally mounted on adjusting elements connected to the spindle nuts, and are also pivotally mounted relative to each other, a movement of the spindle nuts relative to each other leads to a change in the angle between the at least two levers.

[0029] The movement of the closure element orthogonal to a longitudinal extension of the valve rod, i.e. generally speaking in a transverse direction of movement, takes place in this embodiment by rotating the at least one spindle.

[0030] A movement parallel to the said longitudinal extension, i.e., generally speaking, in a transverse direction, can be realized via another longitudinal drive. This longitudinal drive can be implemented, for example, by a piston-cylinder arrangement or a rack and pinion drive. In principle, however, any type of linear drive is conceivable.

[0031] In further embodiments, the valve drive can have at least two rotatably mounted spindles, wherein the at least two spindles are preferably arranged parallel to one another.

[0032] In particular, it can then be provided that the first spindle nut is in threaded engagement with one of the at least two spindles and the second spindle nut is in threaded engagement with the other of the at least two spindles.

[0033] In these exemplary embodiments, the entire closing movement can take place via different rotation modes of the at least two spindles. The rotation modes are in any case coordinated rotational movements of the spindles which can rotate about their longitudinal axes. In a first rotation mode, the spindle nuts are moved simultaneously and in the same direction along the at least two spindles. In a second rotation mode, the spindle nuts are moved exclusively relative to one another. In a superimposed rotation mode or in a third rotation mode, the spindle nuts are both moved in the same direction along the at least two spindles and simultaneously moved relative to one another. As a result, the levers and thus also the closure element connected to them are transported along the spindles in the first rotation mode, i.e. generally speaking in the longitudinal direction of movement, without the angle between the levers changing.In the second rotation mode, however, the angle between the levers is changed, causing the locking element to move orthogonally to the spindles, i.e., generally speaking, in a transverse direction. In the superposition mode, these two types of movement of the levers and thus also of the locking element are superimposed.

[0034] Each rotation mode can be implemented in different ways depending on the design of the thread pitches and the directions of rotation of the threads on the spindles by correspondingly coordinated directions of rotation and rotation speeds when rotating the at least two spindles about their longitudinal axis.

[0035] If the threads on the at least two spindles have the same pitch and the same direction of rotation, the first rotation mode can be realized, for example, by rotating the at least two spindles at the same speed in the same direction. The second rotation mode can then be realized, for example, by rotating the threaded spindles at the same speed but in opposite directions.

[0036] In the superposition rotation mode, the rotational speeds and directions of rotation of the at least two spindles about their longitudinal axes are coordinated depending on the respective pitches and directions of rotation of the threads in such a way that the spindle nuts are moved simultaneously in the same direction along the at least two spindles and relative to each other.

[0037] If the directions of rotation of the threads and / or the thread pitches of the threads of at least two spindles are different from each other, the rotation modes can be realized by adjusting the rotation speeds and directions of rotation accordingly.

[0038] Preferred variants of the invention provide that the spindles are spaced apart from one another in a direction orthogonal to their longitudinal extent. It is also preferably provided that the valve has two spindle drives, and each spindle can be driven individually via a respective one of the spindle drives.

[0039] Valves according to the invention, as in the exemplary embodiments shown below, are preferably so-called vacuum valves. Vacuum valves are generally used when work is to be carried out in a special atmosphere and / or at a special pressure level. Vacuum valves are particularly used when work is carried out with pressure differences of less than or equal to 0.001 mbar (millibar) or 0.1 Pascal. However, they can also be referred to as vacuum valves when they are designed for pressure differences below normal pressure, i.e. below 1 bar.

[0040] Further details and advantages of the invention are explained in more detail below with reference to the figures and the drawings, in which:

[0041] Fig. 1a is a schematic perspective view of a first embodiment of a valve according to the invention from above,

[0042] Fig. 1b is a schematic perspective view of the valve of Fig. 1a from below,

[0043] Fig. 2a is a schematic plan view of the first embodiment in an open position,

[0044] Fig. 2b is a schematic plan view of the first embodiment in an intermediate position,

[0045] Fig. 2c is a schematic plan view of the first embodiment in a closed position,

[0046] Fig. 2d is a schematic plan view of the first embodiment in a service position,

[0047] Fig. 3a is a schematic side view of the first embodiment in the open position, without valve housing,

[0048] Fig. 3b is a schematic side view of the first embodiment in the intermediate position, without valve housing,

[0049] Fig. 3c is a schematic side view of the first embodiment in the closed position, without valve housing,

[0050] Fig. 3d is a schematic side view of the first embodiment in the service position, without the valve housing, Fig. 4a is a schematic sectional view of the first embodiment in the open position,

[0051] Fig. 4b is a schematic sectional view of the first embodiment in the intermediate position,

[0052] Fig. 4c is a schematic sectional view of the first embodiment in the closed position,

[0053] Fig. 4d is a schematic sectional view of the first embodiment in the service position,

[0054] Fig. 5 is a schematic perspective view of a second embodiment of a valve according to the invention,

[0055] Fig . 6a a schematic plan view of the valve according to Fig .

[0056] 5 in an open position,

[0057] Fig . 6b a schematic plan view of the valve according to Fig .

[0058] 5 in an intermediate position,

[0059] Fig . 6c a schematic plan view of the valve according to Fig .

[0060] 5 in a closed position,

[0061] Fig. 7a is a schematic side view of the valve according to Fig. 5 in the open position,

[0062] Fig. 7b is a schematic side view of the valve according to Fig. 5 in the intermediate position,

[0063] Fig. 7c is a schematic side view of the valve according to Fig. 5 in the closed position,

[0064] Fig. 8 is a schematic representation of part of the valve drive of the valve according to Fig. 5,

[0065] Fig. 9a is a schematic side view of the valve actuator according to Fig. 8 in the open position,

[0066] Fig. 9b is a schematic side view of the valve drive according to Fig. 8 in the intermediate position,

[0067] Fig. 9c is a schematic side view of the valve actuator according to Fig. 8 in the closed position,

[0068] Fig. 10a is a schematic sectional view of a third embodiment of a valve according to the invention in an open position, Fig. 10b is a schematic sectional view of the third embodiment of a valve in an intermediate position,

[0069] Fig. 10c is a schematic sectional view of the third embodiment of a valve in a closed position,

[0070] Fig. 11a is a schematic sectional view of a fourth embodiment of a valve according to the invention with an alternative longitudinal drive, and Fig. 11b is a schematic sectional view of a fifth embodiment of a valve with an alternative lever arrangement.

[0071] Figs. 1a and 1b show the first exemplary embodiment of a valve 1 according to the invention in a perspective view from above and from below, respectively. The valve 1 has a two-part valve housing 14. The opening 3 is also formed in a first housing part 14a of the valve housing 14. A further opening 3a can also be seen.

[0072] The second housing part 14b of the valve housing 14 essentially houses the valve drive 4. A cover, which would normally conceal the valve drive 4 and thus close the second housing part 14b of the valve housing 14, is not shown.

[0073] The first housing part 14a could also be

[0074] Valve opening housing and / or the second housing part 14b could also be referred to as drive housing.

[0075] In this first embodiment, two spindles 6 are provided, wherein the two spindles 6 have a co-rotating thread with the same thread pitch. Furthermore, a first spindle nut 9, which is in threaded engagement with one of the two spindles 6, and a second spindle nut 10, which is in threaded engagement with the other of the two spindles 6, can be seen.

[0076] The first spindle nut 9 is positively coupled to a first actuating element 11, and the second spindle nut 10 is positively coupled to a second actuating element 12. An intermediate piece 10a is provided, which extends through the actuating element 11 and positively connects the actuating element 12 to the second spindle nut 10.

[0077] A total of eight levers 5 are provided, each of which is arranged in pairs. The two levers 5 of a pair are each pivotably mounted on a valve rod 7 at one end of the levers 5 about a common pivot axis A. Another end of the levers 5 of a pair is pivotably mounted either on the actuating element 11 or on the actuating element 12.

[0078] Furthermore, a valve rod passage 7a can be seen, which separates the housing parts 14a and 14b from each other in a vacuum-tight manner and, in this example, also seals the first housing part 14a against the environment in a vacuum-tight manner.

[0079] Furthermore, two spindle drives 8 are provided. The spindle drives 8 each comprise a drive motor 8a, for example in the form of an electric motor, as well as two pulleys 8b and a belt 8c for transmitting a rotary motion of a drive motor 8b to the respective spindle 6. Each spindle 6 can therefore be driven individually via its respective spindle drive 8. The spindle drives 8 themselves can be operated, for example, via a control and / or regulating unit (not shown).

[0080] The adjusting elements 11, 12 can be guided on guides 15 in the valve housing 14 or here in the second housing part 14b.

[0081] Figs. 2a to 2d each show the valve 1 schematically in a plan view in various positions. In Fig. 2a, the valve 1 is in an open position. The opening 3 is thereby exposed by the closure element 2.

[0082] In Fig. 2b, the valve 1 is in an intermediate position. It can be seen that the spindle nuts 9 and 10, and thus also the adjusting elements 11, 12, were moved uniformly along the spindles 6 in a direction parallel to the longitudinal extent L of the valve rod 7. For this purpose, the two spindles 6 were rotated at the same speed in the same direction. It can be seen in particular that the spindle nuts 9, 10 were not moved relative to one another.

[0083] After the valve rod 7 has been connected to the actuating elements 11, 12 via the levers 5, the valve rod 7 has also been moved. The closure element 2 arranged on the valve rod 7 has therefore advanced in front of the opening 3 and covers it, but is not yet in contact with a valve seat extending around the opening 3.

[0084] In Fig. 2c the closure element 2 is in its closed position. It can be seen that the spindle nuts 9, 10 have been moved relative to one another between Fig. 2b and 2c. As a result, the adjusting elements 11, 12 have also been moved towards one another, whereby the angle W between two levers 5 of a pair has been changed, in this case reduced. This results in a movement of the valve rod 7 and thus of the closure element 2 in an orthogonal direction (in the plan view in a direction normal to the plane of the drawing into the plane of the drawing). The closure element 2 therefore closes the opening 3 in its closed position.

[0085] In Fig. 2d, the valve 3 is in a service position. It can again be seen that the spindle nuts 9, 10 have again been moved relative to one another compared to Fig. 2c. The angle W between the levers 5 of a pair has thereby been increased. As a result, the actuating element 2 is moved in a direction out of the plane of the drawing, and the actuating element 2 closes the further opening 3a opposite the opening 3.

[0086] Figs. 3a to 3d each show the valve 1 schematically in a side view in various positions. The valve housing 14 is not shown in each case. In Fig. 3a, the closure element 2 is in the open position, in Fig. 3b in the intermediate position, in Fig. 3c in the closed position, and in Fig. 3d in the service position.

[0087] It is clearly visible how the closure element 2 is moved from the open position to the intermediate position in a longitudinal direction of movement parallel to the longitudinal extent L of the valve rod 7. From the intermediate position to a closed or service position, the closure element 2 is moved in a direction orthogonal (here upwards or downwards) to the longitudinal extent L, in other words in a transverse direction of movement. As already explained, the actuating element 2 can be moved not only in such an L-shaped movement path, but also on so-called J-shaped or generally curved movement paths. In the latter case, a movement parallel and orthogonal to the longitudinal extent L, or in other words to the longitudinal direction of movement, is carried out simultaneously.

[0088] Fig. 4a to 4d each show a schematic sectional view of the valve 1 in various positions. The section runs along the line SS shown only as an example in Fig. 2a, the section line being adapted to the various positions in order to be able to show the levers 5. In Fig. 4a the valve 1 is in its open position, in Fig. 4b it is in the intermediate position, in Fig. 4c it is in the closed position and in Fig. 4d it is in the service position.

[0089] It can again be seen how the closure element 2 is moved from its open position into the intermediate position parallel to a longitudinal extension L of the valve rod 7, or in other words, to the longitudinal direction of movement. From the intermediate position into the closed or service position, the closure element 2 is moved in a direction orthogonal (here, upwards or downwards) to the longitudinal extension L, or in other words, in a transverse direction of movement.

[0090] In addition, four levers 5, which are divided into two pairs, can be seen. It can be seen how the angle W between the levers 5 of a pair changes depending on the position of the spindle nuts 9, 10 and the adjusting elements 11, 12 and how this affects the position of the valve rod 7 and the closure element 2. Fig. 5 shows a schematic perspective view of a second embodiment of a valve 1 according to the invention. It can be seen that only part of a valve housing 14 and no spindle drive 8 is shown.

[0091] This embodiment comprises four spindles 6 which are rotatably mounted, wherein the spindles have a co-rotating thread with the same pitch. Two spindle nuts 9, 10 are arranged on each of the spindles 6.

[0092] Levers 5 are pivotally mounted at one end on the spindle nuts 9, 10. At another end, the levers 5 are pivotally connected to an actuating element 11, with two levers 5 forming a pair which are arranged pivotably relative to one another about a common pivot axis A. One lever 5 of a pair is arranged on a spindle 6, and a second lever 5 of a pair is arranged on an adjacent spindle 6. The levers 5 are designed in duplicate.

[0093] A valve rod 7 is fixedly connected to the actuating element 11, wherein a closure element 2 is arranged on the valve rod 7.

[0094] 6a to 6c show a schematic plan view of a valve 1 according to the second exemplary embodiment in Fig. 5 in various positions. In Fig. 6a the valve 1 is shown in an open position, in Fig. 6b in an intermediate position and in Fig. 6c in a closed position. A service position is not shown for this exemplary embodiment. However, it would be easily possible to move to a service position with such an embodiment of a valve 1. To move the valve 1 from an open position to the intermediate position, all spindles 6 are rotated at the same speed in the same direction. As a result, the spindle nuts 9, 10 move along the spindles 6 parallel to the longitudinal extent L without moving relative to one another. The closure element 2 is thereby moved into the intermediate position via the levers 5, the adjusting element 11 and the valve rod 7.

[0095] To move the valve 1 into the closed position, two non-adjacent spindles 6 are rotated in one direction and the other two spindles 6 are rotated in another direction. For example, the first and third spindles 6 are rotated clockwise from above and the second and fourth spindles 6 are rotated counterclockwise from above. This moves the spindle nuts 9, 10 relative to one another, whereby an angle W between two levers 5 of a pair changes, in this case becoming smaller. In this exemplary embodiment, this moves the valve rod 7 and thus also the actuating element 2 upwards, i.e. in a transverse direction of movement, into the closed position.

[0096] Figs. 7a to 7c again show a schematic side view of the valve 1 of the second embodiment in various positions. In Fig. 7a, the valve 1 is again shown in the open position, in Fig. 7b in the intermediate position, and in Fig. 7c in the closed position. It can again be seen how the closure element 2 moves between the various positions.

[0097] Fig. 8 shows a schematic representation of part of a valve drive 4 of the valve 1 according to Fig. 5, i.e. of the second embodiment. Two spindles 6, which form a spindle pair, can be seen. On one of the two spindles

[0098] Two first spindle nuts 9 are arranged on the spindle 6, and two second spindle nuts 10 are arranged on the other of the two spindles 6. These are each in threaded engagement with their respective spindle 6.

[0099] In Fig. 8, four double levers 5 can be seen, whereby two of the double levers 5, i.e. four levers 5, form a pair and can be pivoted about a common pivot axis A. In each case, one double lever 5 of a pair is pivotally mounted with one end on one of the two first spindle nuts 9 and the other of the double levers 5 is pivotally mounted with one end on one of the two second spindle nuts 10.

[0100] For the second exemplary embodiment, Figs. 9a to 9c each show a schematic side view of a part of the valve drive 4 according to Fig. 8 in various positions. Fig. 9a shows the open position, Fig. 9b the intermediate position, and Fig. 9c the closed position.

[0101] To transfer the valve 1 from the open position, see Fig. 9a, to the intermediate position, see Fig. 9b, the two spindles 6 are rotated in the same direction and at the same speed, whereby the spindle nuts 9, 10 and thereby also the adjusting element 11, the valve rod

[0102] 7 and the closure element 2 are moved parallel to the longitudinal extension L along the spindles 6, i.e., in the longitudinal direction of movement. The spindle nuts 9, 10 are not moved relative to each other.

[0103] To move the valve 1 from the intermediate position to the closed position, the spindles 6 are rotated relative to one another in opposite directions, whereby the first spindle nuts 9 and the second spindle nuts 10 are moved towards one another. This changes the angle W between the levers 5 of a pair. This also moves the common pivot point about the pivot axis A, whereby the closure element 2 can be moved via the actuating element 11 and the valve rod 7 in a transverse direction of movement orthogonal to the longitudinal extent L.

[0104] Fig. 10a shows a schematic sectional view of a third exemplary embodiment of a valve 1 according to the invention in an open position. A two-part valve housing 14 is provided, with a first housing part 14a having the double opening 3. In this exemplary embodiment, another longitudinal drive 13 is arranged in the second housing part 14b.

[0105] It can be seen that in this exemplary embodiment, only one spindle 6 is provided. The spindle 6 has a left-hand threaded section 6a and a right-hand threaded section 6b and is arranged entirely within a hollow valve rod 7. A first spindle nut 9 is in threaded engagement with the left-hand threaded section 6a and a second spindle nut 10 is in threaded engagement with the right-hand threaded section 6b. By rotating the spindle 6, the spindle nuts 9, 10 can be moved towards or away from each other along the spindle 6.

[0106] Four levers 5 can be seen, with two levers 5 forming a pair. The levers 5 of a pair are pivotally mounted relative to one another about a common pivot axis A. One lever 5 of a pair is pivotally mounted on a first spindle nut 9 and another lever 5 of a pair is pivotally mounted on the second spindle nut 10. The levers 5 are guided out of the hollow valve rod 7.

[0107] Also arranged within the valve rod 7 is a spindle drive 8, here with a drive motor 8a in the form of an electric motor. The connections for the drive motor 8a can be led out of the valve housing 14 through the valve rod 7.

[0108] Two closure elements 2 are provided, which can simultaneously close the double opening 3. Between the closure elements 2 and the valve rod 7, bellows 16 can be provided, which prevent the penetration of contaminants and can also elastically preload the two closure elements 2 against each other.

[0109] The longitudinal drive 13 is designed here as a cylinder-piston arrangement. Thus, a piston 13a is provided, which is guided in a cylinder 13b and connected to the valve rod 7 in a motion-coupled manner. A medium can be introduced into or removed from chambers of the cylinder 13b via connections 13c, as is known per se. This allows the piston 13a to be moved within the cylinder 13b.

[0110] To transfer the valve 1 from an open position, see Fig. 10a, into an intermediate position shown in Fig. 10b, the valve rod 7 is moved by means of the longitudinal drive 13 parallel to the longitudinal extension L of the valve rod 7.

[0111] To transfer the valve 1 from the intermediate position into a closed position shown in Fig. 10c, the spindle 6 is rotated by means of the spindle drive 8 such that the spindle nuts 9, 10 move toward one another, thus changing an angle W between the levers 5 of a pair. The two closure elements 2 are thereby moved simultaneously in a transverse direction orthogonal to the longitudinal extent L, thus closing the openings 3.

[0112] Fig. 11a shows a schematic sectional view of a fourth exemplary embodiment of a valve 1 according to the invention with an alternative longitudinal drive 13. The longitudinal drive 13 is designed as a rack and pinion drive. A drive unit 13d is therefore provided which can drive a gear 13e. The gear 13e engages with a rack 13f which is arranged on the valve rod 7. By rotating the gear 13e, the valve rod 7 can therefore be moved parallel to the longitudinal extent L of the valve rod 7. Otherwise, this fourth exemplary embodiment corresponds to the third exemplary embodiment.

[0113] Fig. 11b shows a schematic sectional view of a fifth embodiment of a valve 1 according to the invention with an alternative lever arrangement. The levers 5 of a pair now have two spaced-apart pivot axes, but the levers 5 of a pair are still pivotable relative to one another.

[0114] Finally, it should be noted that opening a valve 1 from the closed or service position can be done simply in the opposite way to closing the valve 1 from the open position. Key to the reference numbers:

[0115] List of reference symbols: 13 Longitudinal drive

[0116] Valve 13a piston

[0117] Locking element 13b cylinder

[0118] Opening 13c Connections

[0119] Valve actuator 13d drive unit

[0120] Lever 13e gear

[0121] Spindle 13f Rack

[0122] 6a left-turning 14 valve housing

[0123] Thread cut

[0124] 14a first housing part

[0125] 6b right-handed

[0126] 14b second

[0127] Thread cut

[0128] Housing part

[0129] valve rod

[0130] 15 Guide

[0131] 7a

[0132] 16 Bellows

[0133] Valve rod diameter

[0134] A swivel axis guide

[0135] L Longitudinal extension

[0136] Spindle drive

[0137] W angle

[0138] 8a Drive motor

[0139] 8b Pulleys

[0140] 8c belt

[0141] First spindle nut

[0142] Second spindle nut

[0143] 10a Intermediate piece

[0144] Actuator

[0145] Actuator

Claims

Patent claims 1. Valve (1), in particular a vacuum valve, with a closure element (2) for closing an opening (3) and a valve drive (4) for moving the closure element (2) between an open position in which the closure element (2) releases the opening (3) and a closed position in which the closure element (2) closes the opening (3), wherein the valve drive (4) has at least two pivotably mounted levers (5), characterized in that the valve drive (4) has at least one rotatably mounted spindle (6), and in that an angle (W) enclosed by the at least two levers (5) can be changed by a rotary movement of the at least one spindle (6).

2. Valve (1) according to claim 1, wherein the at least two levers (5) are arranged to be pivotable relative to one another about a common pivot axis (A) or about at least two parallel, spaced-apart pivot axes (A) and / or wherein the angle (W) enclosed by the at least two levers (5) is less than 180°, preferably less than 90°.

3. Valve (1) according to one of claims 1 or 2, wherein the valve (1) has a valve rod (7) with a longitudinal extension (L), wherein the closure element (2) is preferably fixedly attached to the Valve rod (7) is arranged, wherein the closure element (2) is movable by changing the angle (W) between the at least two levers (5) in a direction orthogonal to the longitudinal extent (L) of the valve rod (7).

4. Valve (1) according to claim 3, wherein the at least two levers (5) are pivotally mounted directly or indirectly on the valve rod (7) or on the closure element (2).

5. Valve (1) according to one of claims 1 to 4, wherein the valve drive (4) has at least one spindle drive (8) for driving, preferably for rotating, which has at least one spindle (6), wherein the at least one spindle drive (8) preferably comprises at least one drive motor (8a).

6. Valve (1) according to one of claims 1 to 5, wherein the valve drive (4) has at least a first spindle nut (9) and a second spindle nut (10), wherein one of the at least two levers (5) is pivotally mounted on the first spindle nut (9) or an actuating element (11) connected, preferably fixedly, to the first spindle nut and another of the at least two levers (5) is pivotally mounted on the second spindle nut (10) or an actuating element (12) connected, preferably fixedly, to the second spindle nut (10).

7. Valve (1) according to claim 6, wherein the at least one spindle (6) has a left-hand threaded portion (6a) and a right-hand threaded portion (6b), wherein the first spindle nut (9) is in a Thread engagement with the left-hand thread section (6a) and the second spindle nut (10) is in threaded engagement with the right-hand threaded section (6b).

8. Valve (1) according to one of claims 1 to 7, wherein the valve drive (4) has at least two rotatably mounted spindles (6), wherein the at least two spindles (6) are preferably arranged parallel to one another.

9. Valve (1) according to claims 6 and 8, wherein the first spindle nut (9) is in threaded engagement with one of the at least two spindles (6) and the second spindle nut (10) is in threaded engagement with the other of the at least two spindles (6).

10. Valve (1) according to claim 8 or 9, wherein one or the valve rod (7) is provided with a longitudinal extension, wherein the closure element (2) is arranged, preferably fixedly, on the valve rod (7) and the closure element (2) is movable by a rotary movement of the at least two spindles (6) or by another longitudinal drive (13) in a direction parallel to the longitudinal extension (L) of the valve rod (7).

11. Valve (1) according to one of claims 8 to 10, wherein the spindles (6) are spaced apart from one another in a direction orthogonal to their longitudinal extent.

12. Valve (1) according to one of claims 9 to 11, wherein in a, preferably first, rotation mode the spindle nuts (9, 10) are displaced simultaneously and in the same direction along the at least two spindles (6).

13. Valve (1) according to one of claims 9 to 12, wherein in one, preferably second, rotation mode the spindle nuts (9, 10) are moved exclusively relative to each other.

14. Valve (1) according to one of claims 9 to 13, wherein in one, preferably third, rotation mode the spindle nuts (9, 10) are both displaced in the same direction along the at least two spindles (6) and simultaneously moved relative to one another.

15. Valve (1) according to one of claims 8 to 14, wherein the valve (1) has two spindle drives (8) and each spindle (6) can be driven individually via a respective one of the spindle drives (8).

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