Compliant pin probes with flat extension springs and pre-biasing stop structures

Abstract

Embodiments are directed to probe structures, arrays, methods of using probes and arrays, and / or methods for making probes and / or arrays wherein the probes include at least one flat tensional spring segment and stop structures to allow pre-biasing of the spring segment.

Description

SPECIFICATIONTitle: Compliant pin probes with flat extension springs and pre-biasing stop structuresField of the Present Disclosure

[0001] Embodiments of the present disclosure relate to probes for testing electronic circuits and more particularly to probes with flat extension springs or segments and structures for stabilizing probe operation while still others are directed to methods for making probes for testing electronic circuits.Background of the Present DisclosureProbes

[0002] Numerous electrical contact probe and pin configurations have been commercially used or proposed, some of which may qualify as prior art and others of which do not qualify as prior art. Electrochemical fabrication

[0003] Electrochemical fabrication techniques for forming three-dimensional structures from a plurality of adhered layers have been, and are being, commercially pursued by Microfabrica Inc. (formerly MEMGen Corporation) of Van Nuys, California under the process names EFAB and MICA FREEFORM®.

[0004] Various electrochemical fabrication techniques and methods for forming microstructures using electrochemical fabrication techniques are known.

[0005] Electrochemical fabrication provides the ability to form prototypes and commercial quantities of miniature objects, parts, structures, devices, and the like at reasonable costs and in reasonable times. In fact, electrochemical fabrication is an enabler for the formation of many structures that were hitherto impossible to produce. Electrochemical fabrication opens the spectrum for new designs and products in many industrial fields. Even though electrochemical fabrication offers this capability, and it is understood that electrochemical fabrication techniques can be combined with designs and structures known within various fields to produce new structures, certain uses for electrochemical fabrication provide designs, structures, capabilities and / or features not known or obvious in view of the state of the art.

[0006] A need exists in various fields for miniature devices having improved characteristics, improved operational capabilities, reduced fabrication times, reduced fabrication costs, simplified fabrication processes, greater versatility in device design, improved selection of materials, improved material properties, more cost effective and less risky production of such devices, and / or more independence between geometric configuration and the selected fabrication process.Summary of the Present Disclosure

[0007] It is an object of some embodiments of the invention to provide improved compliant pin probes with one or more substantially planar spring segments with at least one of the segments being operated in tension with the probes further including sheaths or other rails, slots, channels, spring connector arms, and / or other engagement structures providing enhanced stability of probe performance.

[0008] It is an object of some embodiments of the invention to provide a probe including a plurality of spring segments, with at least one being a tensional or extension spring and with the combinations of segments being connected in series and / or in parallel.

[0009] It is an object of some embodiments of the invention to provide a probe including multiple spring segments with at least two of the spring segments being spaced from one another but at least partially overlaying one another with a side-to-side or face-to-face orientation.

[0010] It is an object of some embodiments of the invention to provide improved probe arrays.

[0011] It is an object of some embodiments of the invention to provide methods for making improved probes.

[0012] It is an object of some embodiments of the invention to provide a probe having at least one movable contact tip with another end of the probe having a structure that is to be bonded or attached to an electrical interface.

[0013] It is an object of some embodiments of the invention to provide a probe with a sheath that has at least one end cap that restrains excessive longitudinal movement of at least one tip from that end of the probe.

[0014] It is an object of some embodiments of the invention to provide a probe that has at least two movable contact tips for contacting different electronic components or different pads or bumps on the same electronic component.

[0015] It is an object of some embodiments of the invention to provide a probe with the sheath having at least two end caps that restrain excessive longitudinal movement of the tips from either end of the probe.

[0016] It is an object of some embodiments of the invention to provide a probe that is configured to provide shunting of a majority of the current through a sheath as opposed to through a majority of the length of the spring elements.

[0017] It is an object of some embodiments of the invention to provide a probe with a configuration that provides a compliant element attached to the sheath that is in direct or indirect sliding contact with the moving tip.

[0018] It is an object of some embodiments of the invention to provide a probe with a configuration that provides a compliant element attached directly or indirectly to the moving tip and is in direct or indirect sliding contact with a sheath.

[0019] It is an object of some embodiments of the invention to provide a method of forming a probe, or a plurality of probes simultaneously, with at least a portion of each of the plurality of spring segments of a probe formed within an opening in a sheath.

[0020] It is an object of some embodiments of the invention to provide a method of forming a probe, or a plurality of probes simultaneously, with all of the plurality of spring segments of a probe formed within an opening in a sheath.

[0021] It is an object of some embodiments of the invention to provide a probe with a sheath that is formed as multiple components, with the components pushed longitudinally together after formation to load the spring segments and to join the multiple components.

[0022] It is an object of some embodiments of the invention to provide a probe with a joining structure or structures that are configured to allow the moving of a compliant element through an engagement feature that inhibits unjoining.

[0023] It is an object of some embodiments of the invention to provide a probe with at least some spring segments that undergo tensional loading when transitioning from a build configuration to a working configuration.

[0024] It is an object of some embodiments of the invention to provide transitioning that includes moving a compliant element through an engagement feature that inhibits movement back to a build configuration.

[0025] Other objects and advantages of various embodiments of the present disclosure will be apparent to those of skill in the art upon review of the teachings herein. The various embodiments of the present disclosure, set forth explicitly herein or otherwise ascertained from the teachings herein, may address one or more of the above objects alone or in combination, or alternatively they may address some other object ascertained from the teachings herein. It is not intended that any particular object, let alone all objects, be addressed by any single aspect of the present disclosure.

[0026] In a first aspect of the invention, a probe for testing a DOT, comprises a first tip for making electrical contact to an electrical circuit element, the first tip having a contact region and an attachment region; a first extension arm connecting directly or indirectly to the attachment region of the first tip; a compliant structure comprising at least one spring segment, wherein a first region of the compliant structure joins the first extension arm; a second extension arm selected in a group consisting of: (i) joining a second region of the compliant structure such that relative displacement of the first and second extension arms results in elastic movement of the at least one spring segment of the compliant structure, and (ii) connecting directly or indirectly to a second connection region of the compliant structure such that relative displacement of the first extension arm and the second extension arm results in elastic movement of the at least one first spring segment of the compliant structure; and a second tip having a first attachment region and a second region wherein the first attachment region of the second tip joins the second extension arm; wherein the at least one spring segment is selected from a group consisting of: (i) operating under tension to provide an elastic restoration force; (ii) undergoing increased extension upon relative displacement of the first tip toward one another along a longitudinal axis of the probe, wherein the second region of the second tip is configured for making an electrical connection to a second circuit element, wherein the configuration is selected from a group consisting of: (i) a tip for making a contact connection, and (ii) a tip for making an attached connection, wherein the probe further comprises at least two movable stop structures to allow pre-biasing of at least one of the spring segments, and wherein the at least two movable stop structures include an opening through which an arm can pass.

[0027] Numerous variations of the first aspect of the invention are possible and include, for example: (1) the probe may further comprise at least one guidance element selected from a group consisting of: (i) the at least one guidance element limits elastic movement of the compliant structure to substantially longitudinal movement along a longitudinal axis of the probe, and (ii) the at least one guidance element limits relative movement of the first tip and the second tip along a substantially longitudinal axis of the probe; (2) the at least one spring segment may comprise a plurality of spring segments; (3) the at least one spring segment may comprise a plurality of spring segments with at least one of the plurality of spring segments operating under compression to provide a restoring force; (4) the probe may further comprise at least twomovable stop structures to allow pre-biasing of at least one of the spring segments; (5) the probe may additionally comprise features that can engage with features on an array structure to allow for pre-biasing of at least one spring segment; (6) the probe may additionally comprise at least one shunting element that directs current from one of the first or second extension arms through a non-compliant structure and then through the other of the first or second extension arms; (7) the at least one shunting element may include a surface against which an extension arm of the first or second extension arms slides; (8) the at least one spring segment may comprise a metal and be provided in a flat spring configuration; (9) the at least one spring segment may comprise at least two spring segments that are joined together in a serial configuration; (10) the at least two joined spring segments may be selected from a group consisting of: (i) the at least two joined spring segments operate in tension; and (ii) at least one of the at least two joined segments operates in tension while at least another of the at least two joined segments operates in compression; (11) the at least two spring segments may be selected from a group consisting of: (i) the at least two spring segments are flat spring segments and are spaced from one another but at least partially overlay one another in a face- to-face configuration; and (ii) the at least two spring segments are flat springs and are separated from one another by an intermediate surface against which at least one of the spring segments can slide; (12) the probe may further comprise a sheath in which at least a portion of the at least one spring segment of the compliant structure moves; (13) the probe may additionally comprise at least one structure that is directly or indirectly attached to an end of the at least one spring segment for providing a function selected from a group consisting of: (i) providing a stop structure that moves with the end of the spring segment as the first tip and second tip are moved relative to one another; and (ii) providing for relative longitudinal motion of the first tip relative to the second tip while inhibiting excessive lateral motion of at least one of the first tip or the second tip; and (14) the probe may additionally comprise a rigid probe body providing a frame which supports a relative lateral positioning of the compliant structure, the first extension arm, and the second extension arm while allowing at least one of the first extension arm and first tip or the second extension arm and second tip to move longitudinally, via an external compressive force applied to the first and / or second tips, through a working range of longitudinally extended probe length to longitudinally compressed probe length while increasing a tensional force on the at least one spring segment and moving longitudinally through a working range of longitudinally compressed probe length to extended probe length under a force of extension provided, at least in part, by the tensional force stored in the at least one spring segment, wherein the rigid probe body extends from at least one end of the at least one spring segment to the other end of the at least one spring segment at a full working extension of the at least one spring segment.

[0028] Other alternative embodiments are possible and include, for example: (1) the at least one spring segment may include a plurality of spring segments; (2) the at least one spring segment may include a plurality of spring segments with at least one of the plurality of spring segments operating under compression to provide a restoring force; (3) the probe may further include at least two stop structures to allow pre-biasing of at least one of the spring segments; (4) the probe may further include at least two movable stop structures to allow pre-biasing of at least one of the spring segments; (5) the probe may additionally include features that can engage with features on an array structure to allow for pre-biasing of at least one spring segment;(6) the probe may additionally include at least one shunting element that directs current from one of the firstor second extension arms through a non-compliant structure and then through the other of the first or second extension arms; (7) the sixth variation wherein the at least one shunting structure is a surface against which the extension arms slide; (8) the at least one spring segment may include a metal and is provided in a flat spring configuration; (9) the at least one spring segment may include at least two spring segments that are joined together in a serial configuration; (10) the ninth variation with the at least two joined spring segments operating in tension; (11) the ninth variation with at least one of the at least two joined segments operating in tension while another of the at least two joined segments operates in compression; (12) the ninth variation with the at least two spring segments being flat spring segments and being spaced from one another but at least partially overlay one another in a face-to-face configuration; (13) the ninth variation with the at least two spring segments being flat springs and being separated from one another by an intermediate surface against which at least one of the spring segments can slide; and (14) the probe may include a sheath in which at least a portion of the at least one segment of the compliant structure moves. Many further variations are possible and will be understood by those of skill in the art upon reviewing the teachings herein.

[0029] Still other aspects of the present disclosure will be understood by those of skill in the art upon review of the teachings herein. Other aspects of the present disclosure may involve combinations of the above noted aspects of the present disclosure. These other aspects of the present disclosure may provide various combinations of the aspects presented above as well as provide other configurations, structures, functional relationships, and processes that have not been specifically set forth above but are taught by other specific teachings set forth herein or by the teachings set forth herein as a whole.Brief Description of the Drawings

[0030] FIGS. 1 A - 1 F schematically depict the formation of a first layer of a structure using adhered mask plating where the blanket deposition of a second material overlays both the openings between deposition locations of a first material and the first material itself.

[0031] FIG. 1G depicts the completion of formation of the first layer resulting from planarizing the deposited materials to a desired level.

[0032] FIGS. 1 H and 11 respectively depict the state of the process after formation of the multiple layers of the structure and after release of the structure from the sacrificial material.

[0033] FIG. 2A provides a schematic representation of a side view of a vertically oriented probe that includes a single flat tensional spring connected to two tip arms that extend in opposite directions relative to their associated spring ends such that the spring operates in tension when the tips are pressed toward one another.

[0034] FIG. 2B provides a schematic representation of a side view of a vertically oriented probe having a configuration similar to that of FIG. 2A but additionally including an upper and lower coupling ring that provides for the arms to remain joined to the edges of the spring segments in a slidable configuration.

[0035] FIG. 2C provides a schematic representation of a side view of a vertically oriented probe having a configuration and functionality similar to that of the probe of FIG. 2B but with the connection rings not being attached to the springs themselves but to lateral extension elements of the tip arms that attach to the top and bottom ends of the segment.

[0036] FIG. 2D provides a schematic representation of a side view of a vertically oriented probe having a configuration similar to that of FIG. 2C with the exception that two additional connection or slide rings have been added.

[0037] FIG. 2E provides a schematic representation of a side view of a vertically oriented probe having a configuration that is similar to FIG. 2C but where the retention or connection rings are replaced by half rings that provide for sliding but not complete lateral connection of the tip arms to the lateral extension elements.

[0038] FIG. 2F provides a schematic representation of a side view of a vertically oriented probe that includes two flat tensional springs connected inline and in series with the lower end of the lower spring connecting to the upper tip arm and the upper end of the upper spring connected to the lower tip arm such that the springs operate together in tension (e.g., with a combined spring constant) when the tips are pressed toward one another.

[0039] FIG. 2G provides a schematic representation of a side view of a vertically oriented probe that includes two flat tensional springs positioned edge-to-edge (when unbiased) and in series with a connection bar joining the lower end of the left spring to the upper end of the right spring with the lower end of the right spring connecting to the upper tip arm and the upper end of the left spring connected to the lower tip arm such that the springs operate together in tension (e.g., with a combined spring constant) when the tips are pressed toward one another.

[0040] FIG. 2H provides a schematic representation of a side view of a vertically oriented probe that includes three flat tensional springs connected inline and in series with the lower end of the lower spring connecting to the upper tip arm and the upper end of the upper spring connected to the lower tip arm such that the springs operate together in tension (e.g., with a combined spring constant) when the tips are pressed toward one another.

[0041] FIG. 2I provides a schematic representation of a side view of a vertically oriented probe having a configuration that provides two extension spring segments that operate in parallel to provide a longitudinal and tensional return force when tips of arms are compressed toward one another.

[0042] FIG. 2J provides a schematic representation of a side view of a vertically oriented probe having two spring segments with one of the edge-to-edge configured springs operating in compression (spring 201) and the other (spring 202) operating in tension.

[0043] FIGS. 3A - 3J provide further example embodiments of probes that are similar to those of FIGS. 2A - 2J, respectively, with the difference being that the lower contact tip of each probe is replaced by a bonded, attached, captured, or otherwise retained electrical connection.

[0044] FIG. 4A provides a schematic illustration of a probe similar to that of FIG. 2C with a single tensional spring connected on both ends to tip arms with corresponding tips and where the arms are connected to the springs via respective stop plates and passing through openings in the opposing stop plates such that the stop plates may function as movable plates during probe operation.

[0045] FIGS. 4B-1 to 4B-3 provides schematic illustrations of the probe of FIG. 4A with the probe further including a sheath or frame structure that sets a minimum distance between the stop plates where FIG. 4B-1 shows the probe in an undeflected state, while FIG. 4B-2 shows the probe with the lower tipcompressed toward the sheath with the spring being biased or stretched as the top movable plate is forced away from the top of the sheath, and while FIG. 4B-3 shows the probe after the upper tip is compressed toward the sheath with the spring being further biased or stretched as the lower movable plate is forced away from the lower portion of the sheath.

[0046] FIG. 4C provides another schematic illustration of the probe of FIG. 4A with the spring being pre-biased by use of a taller sheath or frame structure that holds the movable stops at a larger relative separation, thus ensuring that an initial contact of either tip against a surface (e.g., a pad, bump, or other contact surface of an electrical circuit element) will be accompanied by a non-zero back force.

[0047] FIG. 5A provides a schematic illustration of a probe 500 similar to that of FIG. 21 with two tensional springs 501-1 and 501-2 functionally connected in parallel and with additional structural emphasis added to the three structural member that may function as movable stops.

[0048] FIGS. 5B-1 to 5B-2 provide first and second variations of the probe of FIG. 5A but with the addition of sheaths or frame structures that set the minimum distance between a first pair of movable stops (i.e., the lower pair) with the minimum distance of FIG. 5B-1 being the same separation distance shown in FIG. 5A while the minimum distance of FIG. 5B-2 being larger than the separation distance shown inFIG. 5A.

[0049] FIGS. 5C-1 to 5C-2 provide third and fourth variations of the probe of FIG. 5A but with the addition of sheaths or frame structures that set the maximum distance between a second pair of movable stops (i.e., the upper pair) with the maximum distance of FIG. 5C-1 being the same separation distance shown in FIG. 5A while the maximum distance of FIG. 5C-2 being smaller than the separation distance shown in FIG. 5A.

[0050] FIG. 6A provides a schematic illustration of a probe similar to that of FIG. 2J with a tensional spring and a compression spring functionally connected side by side in series and with additional structural emphasis added to the three structural members that may function as movable stops.

[0051] FIGS. 6B-1 to 6B-2 provide first and second variations of the probe of FIG. 6A but with the addition of sheaths or frame structures that set the maximum distance between a first pair of movable stops (i.e., the top and bottom stops) with the maximum distance of FIG. 6B-1 being the same separation distance shown in FIG. 6A while the maximum distance of FIG. 6B-2 being smaller than the separation distance shown in FIG. 6A.

[0052] FIGS. 6C-1 to 6C-2 provide third and fourth variations of the probe of FIG. 6A but with the addition of sheaths or frame structures that set a minimum distance between a second pair of movable stops (i.e., the middle and bottom stops) with the minimum distance of FIG. 5C-1 being the same separation distance shown in FIG. 5A while the minimum distance of FIG. 5C-2 being smaller than the separation distance shown in FIG. 5A.

[0053] FIGS. 7A - 7C provide a three-spring segment example probe with the upper spring, lower spring, and middle spring all operating in tension wherein the probe also includes upper and lower moving stops as well as upper and lower tips and arms with fixed stops also shown in FIGS. 7B and 7C.

[0054] FIG. 8 provides a schematic representation of a probe according to another embodiment of the present disclosure where the probe includes a single spring segment (like that of FIG. 2A or 2B), anupper arm and tip which are positioned in front of the plane or layer of the spring, and a lower arm and tip that are positioned behind the plane or layer of the spring.

[0055] FIGS. 9A - 9J provide side section illustrations of various states in a process of assembling a probe array with pretensioned spring probes according to an embodiment of the present disclosure.

[0056] FIG. 10 provides a schematic representation of a probe according to another embodiment of the present disclosure where the probe includes two spring segments with a first segment (on the left) operating in tension and a second segment (on the right) operating in compression, wherein the upper end of the first spring rigidly engages a lower frame structure and probe tip while the upper end of the second spring rigidly engages an upper frame structure and probe tip, and wherein the frame structures can move longitudinally relative to one another via a number of sliding guide structures.

[0057] FIGS. 11-1 to 11-6 provide a number of isometric views of a probe and views of expanded sections of the probe according to another embodiment of the present disclosure where the probe provides a specific implementation of spring and guide functionality of the probe of FIG. 10.Detailed Description of Preferred EmbodimentsElectrochemical Fabrication in General

[0058] FIGS. 1 A - 11 illustrate side views of various states in an alternative multi-layer, multimaterial electrochemical fabrication process. FIGS. 1 A - 1G illustrate various stages in the formation of a single layer of a multi-layer fabrication process where a second metal is deposited on a first metal as well as in openings in the first metal so that the first and second metals form part of the layer. In FIG. 1A, a side view of a substrate 82 having a surface 88 is shown, onto which patternable photoresist 84 is deposited, spread, or cast as shown in FIG. 1 B. In FIG. 1C, a pattern of resist is shown that results from the curing, exposing, and developing of the resist. The patterning of the photoresist 84 results in openings or apertures 92(a) - 92(c) (e.g., openings) extending from a surface 86 of the photoresist through the thickness of the photoresist to surface 88 of the substrate 82. In FIG. 1 D, a metal 94 (e.g., nickel) is shown as having been electroplated into the apertures 92(a) - 92(c). In FIG. 1 E, the photoresist has been removed (i.e., chemically or otherwise stripped) from the substrate to expose regions of the substrate 82 which are not covered with the first metal 94. In FIG. 1 F, a second metal 96 (e.g., silver) is shown as having been blanket electroplated over the entire exposed portions of the substrate 82 (which is conductive) and over the first metal 94 (which is also conductive). FIG. 1 G depicts the completed first layer of the structure which has resulted from the planarization of the first and second metals down to a height that exposes the first metal and sets a thickness for the first layer. In FIG. 1 H, the result of repeating the process steps shown in FIGS. 1 B - 1G several times to form a multi-layer structure is shown where each layer consists of two materials. For most applications, one of these materials is removed as shown in FIG. 11 to yield a desired 3-D structure 98 (e.g., component or device) or multiple such structures.

[0059] In some variations, the structure may be separated from the substrate. For example, release of the structure (or multiple structures if formed in a batch process) from the substrate may occur when releasing the structure from the sacrificial material particularly when a layer of sacrificial material is positioned between the first layer of the structure and the substrate. Alternative methods may involve, for example, the use of a dissolvable substrate that may be separated before, during or after removal of thesacrificial material, machining off the substrate before or after removal of the sacrificial material, or use of a different intermediate material that can be dissolved, melted or otherwise used to separate the structure(s) from the substrate before, during, or after removal of the sacrificial material that surround the structure(s).

[0060] Various embodiments of various aspects of the present disclosure are directed to formation of three-dimensional structures from materials, some, or all, of which may be electrodeposited or electroless deposited (as illustrated in FIGS. 1A - 11). Some of these structures may be formed from a single build level (e.g., a planarized layer) that is formed from one or more deposited materials while others are formed from a plurality of build levels, each including at least two materials (e.g., two or more layers, more preferably five or more layers, and most preferably ten or more layers). In some embodiments, layer thicknesses may be as small as one micron or as large as fifty microns. In other embodiments, thinner layers may be used while in other embodiments, thicker layers may be used, while in still other embodiments, layer thickness may be varied during formation of different levels of the same structure. In some embodiments, microscale structures have lateral features positioned with 0.1 - 10 micron level precision and minimum feature sizes on the order of microns to tens of microns. In other embodiments, structures with less precise feature placement and / or larger minimum features may be formed. In still other embodiments, higher precision and smaller minimum feature sizes may be desirable. In the present application, meso-scale and millimeter-scale have the same meaning and refer to devices that may have one or more dimensions that may extend into the 0.1 - 50 millimeter range, or larger, and features positioned with a precision in the micron to 100 micron range and with minimum feature sizes on the order of several microns to hundreds of microns.

[0061] The various embodiments, alternatives, and techniques disclosed herein may form multilayer structures using a single patterning technique on all layers or using different patterning techniques on different layers. For example, various embodiments of the present disclosure may perform selective patterning operations using conformable contact masks and masking operations (i.e., operations that use masks which are contacted to but not adhered to a substrate), proximity masks and masking operations (i.e., operations that use masks that at least partially selectively shield a substrate by their proximity to the substrate even if contact is not made), non-conformable masks and masking operations (i.e., masks and operations based on masks whose contact surfaces are not significantly conformable), adhered masks and masking operations (masks and operations that use masks that are adhered to a substrate onto which selective deposition or etching is to occur as opposed to only being contacted to it), and / or selective patterned deposition of materials (e.g., via extrusion, jetting, or controlled electrodeposition) as opposed to masked patterned deposition . Conformable contact masks, proximity masks, and non-conformable contact masks share the property that they are preformed and brought to, or in proximity to, a surface which is to be treated (i.e., the exposed portions of the surface are to be treated). These masks can generally be removed without damaging the mask or the surface that received treatment to which they were contacted or located in proximity to. Adhered masks are generally formed on the surface to be treated (i.e., the portion of that surface that is to be masked) and bonded to that surface such that they cannot be separated from that surface without being completely destroyed or damaged beyond any point of reuse. Adhered masks may be formed in a number of ways including: (1) by application of a photoresist, selective exposure of the photoresist, and then development of the photoresist, (2) selective transfer of pre-patterned maskingmaterial, and / or (3) direct formation of masks from computer-controlled depositions of material. In some embodiments adhered mask material may be used as a sacrificial for the layer or may be used only as a masking material which is replaced by another material (e.g., dielectric or conductive material prior to completing formation of a layer where the replacement material will be considered the sacrificial material of the respective layer. Masking material may or may not be planarized before or after deposition of material into voids or openings included therein.

[0062] Patterning operations may be used in selectively depositing material and / or may be used in the selective etching of material. Selectively etched regions may be selectively filled in or filled in via blanket deposition, or the like, with a different desired material. In some embodiments, the layer-by-layer build up may involve the simultaneous formation of portions of multiple layers. In some embodiments, depositions made in association with some layer levels may result in depositions to regions associated with other layer levels (i.e., regions that lie within the top and bottom boundary levels that define a different layer’s geometric configuration).

[0063] Temporary substrates on which structures may be formed may be of the sacrificial-type (i.e., destroyed or damaged during separation of deposited materials to the extent they cannot be reused) or non- sacrificial-type (i.e., not destroyed or excessively damaged, i.e., not damaged to the extent they may not be reused, e.g., with a sacrificial or release layer located between the substrate and the initial layers of a structure that is formed). Non-sacrificial substrates may be considered reusable, with little or no rework (e.g., replanarizing one or more selected surfaces or applying a release layer, and the like) though they may or may not be reused for a variety of reasons.

[0064] Definitions of various terms and concepts that may be used in understanding the embodiments of the present disclosure (either for the devices themselves, certain methods for making the devices, or certain methods for using the devices) will be understood by those of skill in the art.Probe Embodiments:

[0065] Probe of the various embodiments of the present disclosure can take on a variety of forms. Each probe includes at least one substantially flat tensional spring segment that biases a test contact tip relative to a second tip that may or may not be a contact tip wherein the probes generally include structural elements for ensuring stable and robust probe functionality. In some embodiments, the probes further include a plurality of substantially flat spring segments, either of the extension type only or of a combination of one or more extension springs and one or more compression springs. In some embodiments, springs are configured to operate functionally in series or in parallel with the spring segments at least partially lying side- by-side or face-to-face as opposed to edge-to-edge or end-to-end. In some embodiments, probe deformation is limited to a compression along the axis of the probe (e.g., substantially longitudinal compression as probe tips or circuit joining elements move to more proximal positions).

[0066] Numerous variations of the probe embodiments are possible; including for example:(1) use, or inclusion, of only extension springs;(2) use, or inclusion, of a combination of compression springs and extension springs;(3) use, or inclusion, of multi-segment springs as a single effective spring;(4) use, or inclusion, of multi-segment springs including springs in series with interconnecting bars, plates or the like as necessary;(5) use, or inclusion, of multi-segment springs including springs in parallel with interconnecting bars, plates or the like as necessary;(6) use, or inclusion, of multi-segment springs formed of springs grouped in a combination of parallel and series connections with interconnecting bars, plates or the like as necessary;(7) use, or inclusion, of individual springs having substantially linear behavior (e.g., F = K*Ax) or having non-linear behaviors;(8) use, or inclusion, of individual spring segments having common or different spring constants;(9) use, or inclusion, of springs or spring segments that are substantially flat (e.g., having substantially planar front and back surfaces when unbiased or having substantially flat profiles whether formed from a single layer, multiple layers or in some other manner);(10) use, or inclusion, of springs or spring segments laying in different parallel but offset planes (e.g., each formed within a single layer or from a series of adjacent layers) with connection elements extending from one spring segment to another through one or more intermediate layers;(11) use, or inclusion, of individual probes that include a fixed stop, or more than one fixed stop, which interacts with one or more movable stops or alternatively the one or more fixed stop may be part of an array mounting structure or array assembly which can engage the movable stop or stops once probes are loaded into the array structure or final assembly is completed;(12) use, or inclusion, of individual probes including at least two fixed stops that may be used to bias one or more spring segments such that the one or more spring segments are pre-biased by at least two moving stops being on the inside (spring side) of their respective fixed stops for a spring that is compressed or both being on the outside of their respective stops for a spring that is operated as an extension spring (i.e., biased in an extended state);(13) use, or inclusion, of individual probes that include three springs, or more, and two or more moving stops that contact fixed stops when their respective springs, if of the extension type, are compressed to a working limit or, if of the compression type, are made to extend to a working limit;(14) use, or inclusion, of spring segments that are connected via flat, T-shaped, angled, or other bar or plate configurations that run between springs or spring segments on a single layer or via one or more intermediate layers that separate springs or spring segments;(15) use, or inclusion, of spring segments that are connected via flat, T-shaped, angled, or other bar or plate configurations that run along the edges of the springs or spring segments on a single layer or via one or more layers;(16) use, or inclusion, of guide elements (e.g., sheaths, rails, fixed or movable plates, slip rings, or the like) in probes with compression springs to ensure that compression springs do not laterally bulge excessively during compression (e.g., where unintended contact or interference with an adjacent spring or spring segment could occur or even unintended contact with a neighboring probe);(17) use, or inclusion, of probe tips that may take on one or more forms including flat surfaces, knife edge or blade-like structures, multi-contact crown-like configurations, single point contacts, single curved contact structures, or multiple curved contact structures;(18) use, or inclusion, of tips that include the same material as the springs or that include a material that is different from a spring material,(19) use, or inclusion, of a probe configuration that allows, during use, current to flow from one probe tip to another probe tip via at least one spring;(20) use, or inclusion, of tips, tip extensions, springs, connection bars, sheaths, and / or the like providing moving or non-moving (e.g., sliding) contacts between elements of a single probe to shunt a portion, most, or all of the current around spring elements;(21) use, or inclusion, of incorporated dielectric elements to provide individual probes with isolated conductive regions (e.g., for coaxial or other multi-path probe structures) or to ensure electrical isolation of some probes from other probes;(22) use, or inclusion, of selective electrical or dielectric connections from probe to guide plates or to other structures to provide desired lateral or longitudinally spacing of probes, alternate current flow paths, and / or to provide electrical shielding;(23) use, or inclusion, of end regions or intermediate regions of probes that include sliding components or surfaces through which moving probe elements slide as shunting contact surfaces;(24) use, or inclusion, of end regions or intermediate regions of probes that engage sliding components or surfaces of array or mounting structures against which probe shaft elements slide as shunting contact surfaces;(25) use, or inclusion, of sliding surfaces of moving probe components or of fixed probe components that include different materials or have regions of different materials as compared to materials used in formation of the bulk of spring segment elements;(26) use, or inclusion, of probes that are formed using multi-layer, multi-material electrochemical fabrication methods in whole or in part;(27) use, or inclusion, of probes that are formed as separate components or as partly connected or aligned components that need at least some assembly after formation of components;(28) use, or inclusion, of probes that are formed in their entirety with all components formed together where build configurations are similar to their working configurations with possible exceptions of additional biasing required prior to use or where such biasing occurs upon initial use;(29) use, or inclusion, of probes that are formed with all components formed in relation to one another with build configurations that are different from working configurations such that assembly is limited to movement of components from one configuration to another prior to use (e.g., compression or expansion of spring elements, snapping together of separated but aligned component features, sliding together or interlocking components, and the like);(30) use, or inclusion, of probes that include stop features that do not engage moving stops upon probe formation but instead are made to engage moving stops upon compression or extension of their respective springs, or probe tips, by longitudinal sliding of engagement elements, lateral movement ofengagement elements, rotational movement of engagement elements, or the like, where engagement may occur automatically upon initial spring movement, tip movement, or may be made to occur independently of spring or probe tip movement;(31) use, or inclusion, of probes that include serpentine, saw-tooth, rectangular, triangular, sine-shaped, S-shaped, C-shaped, or numerous other configurations that provide elastic compliance over a working range of probe compression;(32) use, or inclusion, of probes that are configured for 0.1 or smaller to 0.7 mm or large pitch, or larger (probe-to-probe spacing in an array);(33) use, or inclusion, of probes that have body diameters or lateral dimensions (e.g., sheath, guide element, or spring width dimensions) ranging from 0.05 mm or less to 0.65 mm or more);(34) use, or inclusion, of probes that have force targets (at maximum over-travel) from 1 gram or less to 100 grams or more (e.g., 2g - 40g, 4g - 30g, 6g - 20g);(35) use, or inclusion, of probes that have over-travel targets as low as 50 microns or less or as high as 1 mm or more, (e.g., 200 - 800 microns or 400 - 600 microns);(36) use, or inclusion, of probes that have dimensions that allow pre-loading to occur with a travel of slightly above zero microns to more than 400 microns, (e.g., 20 - 400 microns, 50 - 300 microns, or 100 - 200 microns);(37) use, or inclusion, of probes that have lengths that may be on the order of 100 microns or less to 5 mm or more (e.g., 0.5 mm to 3 mm);(38) use, or inclusion, of probes that are formed from layers with their longitudinal axes parallel to a build axis or stacking axes of the layers;(39) use, or inclusion, of probes that are formed with their longitudinal axes laying in a plane perpendicular to a build axes or stacking axes of layers from which the probes are formed;(40) use, or inclusion, of probes that are formed with their longitudinal axes laying in a plane perpendicular to a build axes and with a normal to the plane or planes of their spring segments also being perpendicular to the build axes when forming the probes from a plurality of stacked layers;(41) use, or inclusion, of probes that are formed with their longitudinal axes laying in a plane perpendicular to a build axes and with a normal to the plane or planes of their spring segments being parallel to the build axes when forming the probes from a plurality of stacked layers;(42) use, or inclusion, of curved lateral cross-sectional features of the probes being approximated by layer-to-layer stair stepping with the approximation dictated by the thickness of individual layers when probes are formed on their sides from a plurality of layers;(43) use, or inclusion, of spring segments that are constrained upon use by being inside an outer body that forms part of the probes (e.g., sheath or framing structure);(44) use, or inclusion, of spring segments that are constrained upon use by an internal frame structure that forms part of the probes;(45) use, or inclusion, of probes with individual spring segments formed from a single layer, formed from two layers, or formed from more than two layers; and(46) use, or inclusion, of probes that meet one or more of the following criteria: (1) have a total uncompressed working length of between 3 - 4 mm, (2) a spring length of 2.5 - 3.5 mm, (3) an overtravel of at least 300 microns, and (4) a maximum force at maximum over travel of 1 .5 - 3.0 grams.

[0067] Numerous other variations are possible, some of which are explicitly or implicitly set forth herein while others will be apparent to those of skill in the art after review of the teachings herein. Some variations include using such probes in testing integrated circuits, dies on semiconductor wafers, or other electronic circuits. Other variations include assembly of a plurality of such probes into arrays for use in testing applications or for use in permanent contact applications. Further embodiments include methods for making such probes or making such arrays.

[0068] Reference numbers are included in many of the figures wherein like numbers are used to represent similar structures or features in different embodiments. In particular, when the figures of the various embodiments use reference numbers, the reference numbers are provided in a 3 or 4 digit format which may be followed by letters, dashes, and / or additional numbers, wherein the first digit or first two digits (from the left) represent the figure number while the final digits to the right along with any trailing letters, dashes, or numbers represent a particular general structure or feature. When two or more figures include a reference having the same right most digits (and following letters, dashes, and additional numbers), it is intended to indicate a similarity of the features indicated.

[0069] Here and below, relative terms like “top”, “bottom, “upper”, “lower”, and similar ones are intended as referring to the illustrations given in the drawings, for sake of conciseness. Similarly, terms like “left”, “right”, “above”, “below”, and similar ones are used still with reference to the drawings.

[0070] FIGS. 2A - 3I provide probes according to several embodiments of the present disclosure wherein spring segments and structural elements illustrate a number of different example configurations of probes having at least one tensional spring but not a sheath. In particular, according to these embodiments, the probes comprise at least one tensional spring element or segment without a sheath.

[0071] FIG. 2A provides a schematic representation of a side view of a vertically oriented probe 200A that includes a single flat tensional spring 201 connected to two tip arms 211 and 212 that extend in opposite directions relative to their associated spring ends such that the spring operates in tension when the tips 211T and 212T are pressed toward one another wherein the arms are shown as being located along the edges of the spring segment but could alternatively be located along and spaced slightly from either face of the segment or both could be located along a single face of the segment and could potentially function as shield that protects that face of the segment.

[0072] FIG. 2B provides a schematic representation of a side view of a vertically oriented probe 200B having a configuration similar to that of FIG. 2A but additionally including coupling rings 261 and 262 that provide for the arms 211 and 212 to remain joined to the edges of selected spring segments in a slidable configuration. In other configurations, the slide rings, the arms, and any other connecting elements could have been formed along one or both faces of the segment so that the arms could alternatively run along one or both faces. In other embodiments, other or additional spring segments could have been attached to slide rings.

[0073] FIG. 2C provides a schematic representation of a side view of a vertically oriented probe 200C having a configuration and functionality similar to that of the probe of FIG. 2B but with the connection rings 261 and 262 not being attached to the springs themselves but to lateral connection elements 264 (e.g., extension elements, lateral connecting arms) of the tip arms 211 and 212 that attach to the top and bottom ends of the spring segment.

[0074] FIG. 2D provides a schematic representation of a side view of a vertically oriented probe 200D having a configuration similar to that of FIG. 2C with the exception that two additional slide or connection rings 261-2 and 262-2 have been added to provide additional movement stability.

[0075] FIG. 2E provides a schematic representation of a side view of a vertically oriented probe 200E having a configuration that is similar to FIG. 2C but where the retention or connection rings are replaced by half rings 263 that provide for sliding but not complete lateral connection of the tip arms 211 and 212 to the lateral connection elements 264. In other embodiments, the sliding elements may take on other configurations that still allow separation of the connection between the arms and the extension elements while still enhancing desired relative movement ability and / or inhibiting certain unwanted degrees of freedom of the components or structural elements of the probe.

[0076] FIG. 2F provides a schematic representation of a side view of a vertically oriented probe 200F that includes two flat tensional springs 202 and 201 connected inline and in series with the lower end of the lower spring 202 connecting to the upper tip arm 211 which connects to upper tip 211T and the upper end of the upper spring 201 connecting to lower tip arm 212 which connects to lower tip 212T such that the springs operate together in tension (e.g., with a combined spring constant) when the tips are pressed toward one another.

[0077] FIG. 2G provides a schematic representation of a side view of a vertically oriented probe 200G that includes two flat tensional springs 201 and 202 positioned edge-to-edge (when unbiased) and in series with a connection bar 206 joining the lower end of the left spring 201 to the upper end of the right spring 202 with the lower end of the right spring 202 connecting to the upper tip arm 211 which connects to the upper tip 211T and the upper end of the left spring 201 connecting to lower tip arm 212 which connects to lower tip 212T such that the springs operate together in tension (e.g., with a combined spring constant) when the tips are pressed toward one another.

[0078] FIG. 2H provides a schematic representation of a side view of a vertically oriented probe 200H that includes three flat tensional springs 201 , 202, and 203 connected inline and in series with the lower end of the lower spring 203 connecting to the upper tip arm 211 which connects to upper tip 211T and the upper end of the upper spring 201 connects to lower tip arm 212 that connects to lower tip 212T such that the springs operate together in tension (e.g., with a combined spring constant) when the tips are pressed toward one another.

[0079] FIG. 2I provides a schematic representation of a side view of a vertically oriented probe 200I having a configuration that provides two extension spring segments 201-1 and 201-2 that operate in parallel to provide a longitudinal and tensional return force when tips 211T and 212T of arms 211 and 212 are compressed toward one another. More specifically, the compression of the end tips 211T and 212T of arms 211 and 212 cause relative movement of arm 212 and the branches 211-1 and 211-2 of tip arm 211 which inturn cause increased spacing between the upper and lower lateral connection elements 264 which slide along branches 211-1 , 211-2, and tip arm 212 via connecting slip rings 261 and 262 which in turn cause tensional extension (in Z) of both spring segments. Though, as in the previous illustrations, the arms are shown in the same plane as the springs, in other variations, the arms could lay in planes above or below (e.g., behind the sheet or in front of the sheet - in X) the springs or the spring segments to allow narrowing of the width of the probe (in Y) while providing some increase in thickness (in X).

[0080] FIG. 2J provides a schematic representation of a side view of a vertically oriented probe 200J having two spring segments with one of the edge-to-edge configured springs operating in compression (e.g., spring 201) and the other (e.g., spring 202) operating in tension and connected to one another by a slip ring 201-C or other guide structure while in other examples, as with the other embodiments herein, a face-to- face configuration could have been implemented. In some other examples, additional structural features may be added to the probe to aid in probe stability and in particular, to aid in ensuring controlled deflection of the compression spring elements (e.g., to avoid unintended buckling or deflection of the spring that might lead to inadvertent contact, shorting, and / or entanglement between neighboring probes in an array).

[0081] FIGS. 3A - 3J provide further example embodiments of probes 300A to 300J, respectively, that are similar to probes 200A - 200J of FIGS. 2A - 2J, respectively, with the difference being that one tip 212T of FIGS. 2A - 2J of the two contact tips is replaced by an attached, bonded, captured, or otherwise retained electrical connection 312C. Like features between FIGS. 2A - 2J and FIGS. 3A - 3J are represented by similar reference numerals with the exception that the reference number series is shifted from 200 to 300. In other embodiments, the roles of the contact tip and the other tip may be reversed.

[0082] FIG. 4A provides a schematic illustration of a probe 400 similar to that of FIG. 2C, wherein the probe has first and second extension springs held within a sheath. In particular, the probe 400 comprises a single tensional spring 401 connected on either end to two tip arms 411 and 412 with corresponding tips 411T and 412T where the arms are connected to the springs via respective plates 464L and 464U (i.e., stop plates, with the lower portion of the upper arm 411 connecting to the lower plate 464L and the upper portion of the lower arm connecting to the upper plate 464U), wherein the upper plate has an opening 461 U and the lower plate has an opening 461 L through which the respective arm can pass freely with the walls of the openings functioning as longitudinal movement guides (i.e., the walls of the openings electric connection is to be made).

[0083] FIGS. 4B-1 to 4B-3 provide schematic illustrations of a probe 400B, similar to probe 400 of FIG. 4A, with the probe further including a sheath 4 or frame structure with a left side and right side being shown that sets a minimum distance between the stop plates with the sheath 4 including upper stop features 431 , lower stop features 432, and spacer or standoff sections 434. FIG. 4B-1 shows the probe in an undeflected state with the movable stops resting against the upper and lower portions of the sheath 4.FIG. 4B-2 shows the probe with the lower tip compressed toward the sheath 4 (e.g., by contact with a lower contact structure that is moved toward the bottom of the sheath) with the spring being biased or stretched as the top movable plate is forced away from the top of the sheath 4. FIG. 4B-3 shows the probe after the upper tip is compressed toward the sheath 4 (e.g., by contact with an upper contact structure that is moved toward the top of the sheath) with the spring being further biased or stretched as the lower movable plate is forcedaway from the lower portion of the sheath 4. In some embodiments, the sheaths 4 may be provided with solid front and back faces or front and back frame structures that help provide lateral guidance during plate movement. In some embodiments, the sheath and / or the movable plates may include additional features that allow for retention of relative lateral positions during longitudinal movement of the probe arms and connected plates and spring relative to the sheath.

[0084] FIG. 4C provides another schematic illustration of a probe 400C, similar to probe 400 of FIG. 4A, with the spring being pre-biased by use of a taller sheath or frame structure that holds the movable stops at a larger relative separation, thus ensuring that an initial contact of either tip against a surface (e.g., a pad, bump, or other contact surface of an electrical circuit element) will be accompanied by a non-zero back force.

[0085] FIG. 5A provides a schematic illustration of a probe 500 similar to that of FIG. 2I with two tensional springs 501-1 and 501-2 functionally connected in parallel and with additional structural emphasis added to the three structural members that may function as movable stops. The probe 500 of FIG. 5A has two tensional springs 501-1 and 501-2 functionally connected in parallel and connected on top to a movable stop 564U (e.g., a plate, a bar, a crossbar, a potentially movable stop) which includes two openings for passing longitudinal tip arms 511-1 and 511-2. The movable stop 564U connects to the upper end of lower tip arm 512 which in turn ends at, or connects to, lower tip 512T. The two tensional springs connect on their bottoms at a movable stop 564L (e.g., a plate, a bar, a crossbar, a potentially movable stop) that connects to the bottom of tip arms 511-1 and 511-2 which in turn connect, at their tops, to a movable stop 565U (e.g., a plate, a bar, a crossbar, a potentially movable stop), that may function as a movable stop, which in turn connects to upper tip arm 511 U which connects to tip 511T. The probe of FIG. 5A includes three potential movable stop features but with only two degrees of freedom since the movable stop 565U and the movable stop 564L are rigidly connected as such viable combinations for engaging independent pairs of the potentially movable stops include: (1) engaging movable stop 565U and movable stop 564U or (2) engaging movable stop 564L and movable stop 564U.

[0086] FIGS. 5B-1 to 5B-2 provide first and second variations of the probe of FIG. 5A but with the addition of sheaths 5 or frame structures. The probes 500B of FIG. 5B-1 and 5B-2 have pairs of stops that set the minimum distance between the upper and lower moving stops. Stop 531 sets the lower position of movable stop 564U (e.g., an upper movable stop) by bounding the movable stop 564U to upward relative motion. Stop 532 sets the upper position of movable stop 564L (e.g., a lower movable stop) by bounding the movable stop 564L to downward relative motion. The minimum distance set by the stops of FIG. 5B-1 is the same separation distance shown in FIG. 5A while the minimum distance set by the stops of FIG. 5B-2 is larger than the separation distance shown in FIG. 5A. Worded another way, the probe of FIG. 5B-2 has an initial bias that is larger than that of FIG. 5B-1 . The amount of working compression range of the probes of FIGS. 5B-1 and 5B-2 may be set by the lengths of arms 511-1 and 512 or the gap between movable stop 564U and movable stop 564L because either of these may dictate the elastic range of motion allowed. In other embodiments, different parameters, structures, or features may be used to set the working range of motion.

[0087] The probes 500C of FIGS. 5C-1 and 5C-2 provide third and fourth variations of the probe of FIG. 5A with each having a pair of stops that sets the maximum distance between the upper pair of movable stops. Stop 531 sets the upper position of movable stop 565U by bounding movable stop 564U to downward relative motion. Stop 532 sets the lower position of movable stop 564L (e.g., a lower movable stop) by bounding the movable stop 564L to upward relative motion. The gap between stops 531 and 532 of FIG. 5C- 1 should be adequate to provide a desired extent of compressive motion for the tips of the probe. The maximum distance set by the stops of FIG. 5C-1 is the same separation distance shown in FIG. 5A while the maximum distance set by the stops of FIG. 5C-2 is smaller than the separation distance shown in FIG. 5A. Worded another way, the probe of FIG. 5C-2 has an initial bias that is larger than that of FIG. 5C-1 . The amount of working compression range of the probes of FIGS. 5C-1 and 5C-2 may be set by the lengths of arms 511-1 and 512 or the gap between 564U and 564L because either of these may dictate the elastic range of motion allowed. In other embodiments, different parameters, structures, or features may be used to set the working range of motion.

[0088] In some variations of the embodiments of FIGS. 5A to 5C-2, different spacing heights may be used for the fixed stops, different lengths of arms and springs may be used, additional guide structures may be added, tabs or other structures may be added to the sheaths 5 or frame structures to provide controlled engagement with array structures (e.g., guide plates, substrates, other probes, or the like), and dielectric features may be added to provide electric isolation of selected elements within a given probe or between neighboring probes.

[0089] FIG. 6A provides a schematic illustration of a probe 600 similar to that of FIG. 2J with a tensional spring 601-2 and a compression spring 601 functionally connected side by side in series by a movable stop 664L (e.g., a stop structure, a movable stop structure) at their lower ends. Movable stop 664L includes an opening through which arm 612 can pass. An upper end of arm 612, along with an upper end of spring 602 attaches to another movable stop 664M that includes an opening for passing spring 601 . An upper end of spring 601 connects to a movable stop 664U as does a lower end of upper tip arm 611 which joins tip 611T at its opposite end. A lower end of lower tip arm 612 joins tip 612T.

[0090] FIGS. 6B-1 to 6B-2 provide first and second variations of a probe 600B, similar to probe 600 of FIG. 6A but with the addition of sheaths 6 or frame structures having upper stops 631 , lower stops 632 and spacers or standoffs 634 that set the maximum distance between a first pair of movable stops (i.e., the top and bottom stops) with the maximum distance of FIG. 6B-1 being the same separation distance shown in FIG. 6A while the maximum distance of FIG. 6B-2 being smaller than the separation distance shown inFIG. 6A. Worded another way, the probe of FIG. 6B-2 has an initial bias that is larger than that of FIG. 6B-1 . The amount of working compression range of the probes of FIGS. 6B-1 and 6B-2 may be set by the lengths of arms 611 and 612 or the gap between 664U and 664M because either of these may dictate the elastic range of motion allowed. In other embodiments, different parameters, structures, or features may be used to set the working range of motion.

[0091] FIG. 6C-1 to 6C-2 provide third and fourth variations of a probe 600C, similar to probe 600 of FIG. 6A but with the addition of sheaths 6 or frame structures that set a maximum distance between a second pair of movable stops (i.e., the middle and top stops) with the maximum distance of FIG. 6C-1 beingthe same separation distance shown in FIG. 6A while the maximum distance of FIG. 6C-2 being smaller than the separation distance shown in FIG. 6A. Worded another way, the probe of FIG. 6C-2 has an initial bias that is larger than that of FIG. 6C-1. The amount of working compression range of the probes of FIGS. 6C-1 and 6C-2 may be set by the lengths of arms 611 and 612 or the gap between 664U and 664M because either of these may dictate the elastic range of motion allowed. In other embodiments, different parameters, structures, or features may be used to set the working range of motion.

[0092] In some variations of the embodiments of FIGS. 6A to 6C-2, different spacing heights may be used for the fixed stops, different lengths of arms and springs may be used, additional guide structures may be added, tabs or other structures may be added to the sheaths 6 or frame structures to provide controlled engagement with array structures (e.g., guide plates, substrates, other probes, or the like), and dielectric features may be added to provide electric isolation of selected elements within a given probe or between neighboring probes.

[0093] FIGS. 7 A - 7C provide schematic illustrations of three example probes having three tensional springs located in series with the probes also having movable stops as well as upper and lower tips and arms with fixed stops also shown in FIGS. 7B and 7C. Probe 700 of FIG. 7A includes an upper tip 711T at the upper end of an upper arm 711 . The lower end of the upper arm is attached to a movable stop or lateral extension arm 724 with the stop having an opening 761 that allows passage of a second tip arm 712 and the arm 724 having the lower end of spring 703 attached thereto. The upper end of spring 703 attaches to movable stop 723 to which a lower end of spring 702 attaches, with the stop 723 also including an opening for passing another portion of tip arm 712. An upper end of spring 702 attaches to another movable stop 722 to which a bottom end of spring 701 attaches with the movable stop 722 also having an opening for passage of another portion of arm 712. The upper end spring 701 and the upper end of arm 712 attached to a final movable stop or lateral extension arm 721. FIG. 7B depicts a probe 700B, similar to probe 700 of FIG. 7A, having a fixed stop or a fixed spacing structure that sets a minimum distance between two intermediate movable stops 722 and 723. The spacing structure includes stops 732 and 733 along with a standoff 734 (e.g., a spacing element, a standoff element), wherein the minimum spacing distance is the same as the separation distance shown in FIG. 7A. FIG. 7C shows a probe 700C, similar to probe 700 of FIG. 7A, with the fixed stop or fixed spacing structure of FIG. 7B but with the spacer or standoff 734 being taller. Interactions between springs, the fixed stops, the moving stops, along with pre-tensioning of one or more springs prior to usage can lead to overall spring constant variations (e.g., decreases) over a working compression range of the probe tips 711T and 712T toward one another. In other examples, variations are possible where one spring or two springs operate in compression while the other two springs or one spring operate in tension. In still other variations, the springs and / or the arms could all be overlaid in a variety of face-to-face or edge-to-edge configurations with the arms running outside or between the various spring segments.

[0094] FIG. 8 provides a schematic representation of a probe 800 according to another embodiment of the invention where the probe includes a single spring segment 801 (like that of FIG. 2A or 2B) that is operated by pressing on upper tip 811 T, which is connected to arm 811 with both being positioned in front of the plane or layer of the spring, and lower tip 812T, which is connected to arm 812 with both being positionedbehind the plane or layer of the spring and where the ends of the spring engage the arms at locations 817 and 818 which are longitudinally opposite to their respective tip locations and wherein the arms run along opposite faces of the spring segment and extend longitudinally beyond the ends of the sheath 851 . Gaps also separate the spring faces and the arms except at the connection locations 816 and 817. In some embodiments, the front and back of the sheath may be fully closed, be partially closed, or remain open. Similarly, the sides of the sheath may be fully closed or partially open. In the illustration of FIG. 8, the front and back faces are shown as open. Numerous other alternatives are also possible: for example: (1) arm positioning may be opposite to that shown, (2) both arms may be positioned on the same side of the spring, (3) both arms may be aligned with one another in front of or behind the spring, (4) both arms may be located on either side of the spring with their respective tips located in line with the arms or with tips translated to a common line (e.g., a center line) of the probe by inclusion of laterally extending translating arms (e.g., that may be located beyond the working range of the spring), or (5) one or both arms may be located beyond either edge of the spring, within a plane or layer of the spring or in a separate plane or layer with their respective tips located in line with the arms or with tips translated to a different line (e.g., a center line) of the probe by laterally extending translating arms (e.g., that may be located beyond the working range of the spring). Still numerous other variations are possible with some set forth herein as features of other embodiments or as alternatives associated with other embodiments.

[0095] FIGS. 9A - 9J provide side section illustrations of various states in a process of assembling a probe array with pretensioned spring probes. The process provides for the assembly of multi-spring probes into arrays with pre-loading of tensional springs. In particular, the side section illustrations show a plurality of probes (two probes in this illustration) being loaded into an array frame that provides intended lateral (XY) positioning of the probes along with pre-loading or biasing of an extension spring while allowing upper and lower moving stop elements to move upward and downward respectively while maintaining a minimum downward position of the upper moving stops and a maximum upward position of the lower moving stops at positions dictated by the upper and lower fixed stops wherein fixed stop positions are at different longitudinal heights on either side of each probe and wherein at least some of the fixed stop positions are set by the relative lateral sliding of the stop plates.

[0096] FIG. 9A provides a side schematic representation of an initial state in a probe array assembly process where a base, probes, a lower biasing or stop plate pair, standoffs, and an upper biasing or stop plate pair are shown as being longitudinally separated and laterally aligned. The lower biasing plate pair and the upper biasing plate pair include a bottom plate and a top plate that can be laterally shifted relative to one another while maintaining their longitudinal proximity. FIG. 9B shows the probes and the base after being brought together longitudinally. FIG. 9C shows the lower stop plate pair being shifted longitudinally to a position on or near the base. FIG. 9D shows the state of the process after relative lateral movement that splits the bottom and top biasing plates of the lower pair laterally to close the openings and trap the probe’s movable stop plate temporarily against the base. As shown, the left side of the lower movable stops of the probes are captured by the right edges of openings in the lower biasing plate while the slightly higher right side of the lower movable stops of the probes are captured by the slightly higher left edges of the openings in the top biasing plate (of the lower set of plates) such that the probes are temporarilyrestrained by the base and the lower biasing plate pair. FIG. 9E illustrates the state of the process after the standoffs and upper fixed stop plate set are lowered into contact with each other and into contact with the upper plate of the lower set. FIG. 9F shows the state of the process after a biasing tool is moved into position below the lower probe tips. FIG. 9G shows the state of the process after relative longitudinal movement of the biasing tool and the base (or of some other features of the probes or probe frames) causes the spring to extend such that the lower surface of the upper movable stop is located above the longitudinal level of the lower surface of the top biasing plate of the upper biasing plate pair. FIG. 9H shows the state of the process after relative lateral movement of the bottom and top biasing plates of the upper plate pair such that the right edges of the openings in the bottom plate move laterally under the left edges of movable upper stops of the probes and the left edges of the openings in the top biasing plate are below the right edges of the upper movable stops of the probes. FIG. 9I shows the state of the process after relative longitudinal movement of the base and the biasing tool allow the upper springs to contract so as to allow the upper movable probe stops to contact the upper plate pair while still maintaining some tensional biasing of the springs. FIG. 9J shows the state of the process after the base has been removed, leaving only the configured probe array with the biasing plates being used as guide plates for the array while allowing the probe tips to be compressed toward one another when making electrical contact with circuit elements while allowing the upper movable stops to move upward and the lower movable stops to move downward, thus allowing the compliance of the springs to provide controlled mating of the probes and the circuit elements. In alternative embodiments, the movable stops of the probe may not have raised and lowered plate engagement features as any height difference associated with the side-to-side displacement of the upper and lower biasing plates of a biasing plate pair may be insignificant or otherwise acceptable. In other embodiments, additional plates may be included within a pair so as to provide a higher level of surface engagement (e.g., three plates undergoing lateral displacement along 120° orientations, or four plates undergoing displacement at 90° orientations). In still other alternative embodiments, different probe structures may be used instead of the example shown. Similar processes may be used to cause loading of springs into multiple probe sheaths to provide pre-biasing of at least one spring in such probes after which the encased probes may be loaded into array frames or guide plates.

[0097] FIG. 10 provides a schematic representation of a probe 1000 with a multiple springs and stabilizing guide elements where tip 1011 T results in compression of spring 1001 (e.g., a spring segment) while movement of lower tip 1012T results in extension of spring 1002. Since the two springs 1001 and 1002 are joined at their lower ends by coupling and guide ring 1062-3, the compressing of spring 1001 has an impact on the net extension of spring 1002 while the extension of spring 1002 has a net impact on the compression of spring 1001. A net force applied to the tips of the probe depends on several factors including the spring constant of each spring, the net deflection of each spring, and any initial bias created in each spring. An upper probe tip is located at the upper end of tip arm 1011 while the other end of the tip arm connects to a relatively rigid sliding frame structure via frame elements 1064-1 & 1064-2 (e.g., lateral crossbars) with these bars in turn connecting to the upper end of spring 1001 as well as to other frame elements 1061-1 to 1061-4. Frame elements 1061-1 to 1061-4 at their lower ends connect to frame elements 1064-3 and 1064-4 (e.g., lateral crossbars) which are joined by the coupling and guide ring 1062-5. Theupper portion of spring 1002 connects to slip ring 1062-4 which also connects to tip arm 1012 which ends in tip 1012T. The sliding frame is held by and can slide longitudinally relative to a second frame that includes frame elements 1063-1 to 1063-3 with an interface between the frames being a plurality of slip rings 1062-1 on the right and 1062-2 on the left which are mounted to the second frame while slidingly engaging the first frame with a relative longitudinal positioning of the frames being a function of the relative position of upper and lower circuit elements (such as a DOT, device under test, or a space transformer or other test circuit interface elements that engage probe tips) along with any other movable or fixed stop to which the probe may engage. The framing elements help in stabilizing probe functionality and may help ensure that the compression spring 1001 does not deflect or bow excessively. In some implementations, additional guide elements may be provided in front and / or behind both faces of one or both springs to provide additional operational stability. For example, initial biasing of one or both springs may be useful in providing different operational characteristics to the probe. For example, selecting and setting a minimum distance between frame element 1063-3 and 1064-4 that is greater than a nominal unbiased distance or setting a maximum distance between frame elements 1063-3 and 1064-2 may result in pre-biasing of the springs to provide an initial non-zero contact force for the probe.

[0098] FIG. 11-1 provides an isometric view of a probe 1100 according to another embodiment of the present disclosure that provides functionality and structural relationships similar to those set forth in the probe of FIG. 5 wherein the probe includes first and second relatively movable structures S1 and S2 and compliant elements including two spring segments 1101 and 1102 (e.g., probe segments, springs) connected in series. Structure S1 includes the first tip arm 1111 and tip 1111T (which may be used to make contact with a contact or bonding pad of a first electrical circuit element), frame elements 1161-1 to 1161-4 (e.g., guide arms, with only 1161-1 to 1161-3 being visible) and frame element 1164 (e.g., end connector) that joins the guide arms while structure S2 includes frame elements 1163-1 to 1163-3 (e.g., guide arms) and movable stop 1122 where S1 and S2 can slide relative to each other. S1 and S2 are connected by a spring assembly or group which includes a tensional portion or segment 1102 that has a right end that joins the right end of S2 and a left end that joins the left end of a compressional spring segment 1101 via a slidable connector 1162-3, which can slide relative to the guide arms of both S1 and S2, which in turn, at a right end, joins S1 . The left end of S2 is shown with a flat tip arm 1112 and tip 1112T. The tip 1112T may be used to make electrical connection with a contact pad of a second electrical circuit element (e.g., a device under test (DOT), which may be an integrated circuit still in wafer form) and which, in alternative embodiments, may take on a variety of different forms other than the blunt flat tip configuration of the current example. As shown, flat tip arm 1112 is separated from the right end of S1 to leave a gap 1170-3 that allows compression of tip 1112T toward tip 1111T.

[0099] FIG. 11-2 provides a close up view of the left most portion of the probe of FIG. 11-1 so that various key elements can be better seen including: (1) Tip 1112T; (2) Three frame elements 1163-1 , 1163-2, and 1163-3 (e.g., guide arms) of S2; (3) Frame elements 1161-1 , 1161-2, 1161-3 (e.g., main guide arms) of structure 1 (1161-4 is out of view but corresponds to 1161-3 on the opposite side of the probe); (4) Sliding interfaces or slots 1162-1 and 1162-2 for the T-shape rails or guides of S2, and the complementary shaped frame elements 1161-1 and 1161-2 (e.g., guide arms) formed by the guide arms of S1 ; and (5) Tensionalsegment 1102 and the compressional segment 1101 , and the connector 1162-3 that joins the two segments together and allows for sliding along both S1 and S2. Furthermore, in this example, frame elements 1163-1 , 1163-2, and 1163-3 (e.g., guides) can be seen having narrowed regions 1183-1 , 1183-2, and 1183-3, respectively, where the narrowed regions can be used to provide a larger gap between the guides and the openings in frame element 1164 (e.g., end) during fabrication of the assembled but not fully engaged probe (e.g., where formation occurs using a multi-layer electrochemical fabrication method), whereafter S1 and S2 are transitioned to a working or operational configuration by pressing the ends of the probe together wherein the wider regions of the guides are brought into the openings of frame element 1164, thereby narrowing the gap and providing a probe with a more stable operational configuration. For example, during formation, the gap is larger than a minimum feature size (e.g., a size that allows formation of the features to occur with desired or required yield, e.g., 80, 90, 95, or even 99%, or more, feature yield for a given fabrication process) which may be, for example, as large as 5, 10, 20, 30 microns or more. After transition to a work configuration, the gap is smaller than the minimum feature size, for example, and the gap may be reduced to 10, 5, 2 microns or even less. In other probe embodiments of the present disclosure, such configuration size changes between interface regions for fabrication and use may be designed into other probe regions to improve stability and probe operation.

[0100] FIG. 11-3 provides an isometric view of the left end of S1 and S2 from a different angle compared to that of FIG. 11-2 so that additional features can be more readily seen such as the retention flanges 1101 F at the top of the undulations 1101 U of the compressive spring segment 1101 which engages a slot along the bottom of frame element 1161-3 (e.g., guide arm) with similar flanges on the spring segment on the opposite side of the probe engaging a counterpart frame element 1161-4 (e.g., guide arm) on that side (see FIG. 11-4).

[0101] FIG. 11 -4 provides a view of the left end of S1 from a different angle compared to that of FIG. 11-2 so that additional features may be more readily seen such as: (1) The double I configuration of the connector 1162-3 that joins spring segments 1101 and 1102 while allowing the frame element 1163-3 (e.g., central bar) of S2 and frame elements 1161-3 and 1161-4 (e.g., side bars) of S1 to pass through it; and (2) Flanges 1101 F at the ends of undulations 1101 U (i.e., the elastically deformable compliant building blocks) of the compression spring segment 1101.

[0102] FIG. 11-5 provides an isometric view of the right most ends of S1 and S2 so that select features may be more readily seen such as: (1) Attachment structure 1167 joining the right end of the compression spring segment 1101 to tip arm 1111 of S1 ; and (2) Gaps 1170-1 and 1170-2 that provide space for frame elements 1163-1 and 1163-2 to move into during compression of the probe tips 1111T and 1112T toward one another.

[0103] FIG. 11-6 provides an isometric view of the right most ends of S1 and S2 from a different angle than that shown in FIG. 11-5 so that selected features may be more readily seen such as the attachment structure 1168 that joins the right end of the tension spring segment 1102 to the right end of the frame element 1163-2 (e.g., lower bar) and / or to the frame element 1163-3 (e.g., central bar) of S2.

[0104] Numerous variations of this embodiment are possible and include for example: (1) adding to the present embodiment features associated other embodiments or replacing some of the features of thepresent embodiment with those from one or more other embodiments, (2) using or including a different number of stabilizing guides, (3) using or including a different configuration of stabilizing guides, (4) using or including a different number of springs and with different configurations, including different numbers of segments and / or types of segments and our positional relationships between segments, and / or different connection relationships between segments and other segments or between segments and coupling structures, (5) using or including different tip configurations. (6) using or including different connecting elements that join the spring segments where the connecting elements may or may not provide guide features, (7) using or including fixed stop features, (8) using or including different or additional moving stop features, (9) using or including interface features that aid in aligning with and engaging fixed stop features that are part of array structures, (10) using or including interface features that aid in array loading and retention, and (11) using or including additional features for aiding in the pre-biasing of spring segments.

[0105] Still other embodiments may be created by combining the various embodiments and their alternatives with other embodiments and their alternatives as set forth herein.Further Comments and Conclusions

[0106] Various other embodiments of the present disclosure exist. Some of these embodiments may be based on a combination of the teachings herein with various known teachings. For example, some fabrication embodiments may not use any blanket deposition process. Some embodiments may use selective deposition processes or blanket deposition processes on some layers that are not electrodeposition processes. Some embodiments may use nickel or nickel-cobalt as a structural material while other embodiments may use different materials. For example, preferred spring materials include nickel (Ni), copper (Cu) in combination with one or more other materials, beryllium copper (BeCu), nickel phosphorous (Ni-P), tungsten (W), aluminum copper (Al-Cu), steel, P7 alloy, palladium, palladium-cobalt, silver, molybdenum, manganese, brass, chrome, chromium copper (Cr-Cu), and combinations of these. Some embodiments may use copper as the structural material with or without a sacrificial material.

[0107] Structural or sacrificial dielectric materials may be incorporated into embodiments of the present disclosure in a variety of different ways. Such materials may form a third material or higher deposited material on selected layers or may form one of the first two materials deposited on some layers. Some embodiments may employ diffusion bonding or the like to enhance adhesion between successive layers of material or to reduce stress.

[0108] Various other embodiments of the present disclosure exist. Some of these embodiments may be based on a combination of the teachings herein with various known teachings. Some method of making embodiments may not use any blanket deposition process and / or they may not use a planarization process. Some embodiments may use selective deposition processes or blanket deposition processes on some layers that are not electrodeposition processes. Some embodiments, for example, may use nickel, nickel-phosphorous, nickel-cobalt, palladium, palladium-cobalt, gold, copper, tin, silver, zinc, solder, rhodium, rhenium as structural materials while other embodiments may use different materials. Some embodiments, for example, may use copper, tin, zinc, solder or other materials as sacrificial materials. Some embodiments may use different structural materials on different layers or on different portions of single layers. Someembodiments may remove a sacrificial material while other embodiments may not. Some embodiments may use photoresist, polyimide, glass, ceramics, other polymers, and the like as dielectric structural materials.

[0109] It will be understood by those of skill in the art that additional operations may be used in variations of the above presented method of making embodiments. These additional operations may, for example, perform cleaning functions (e.g., between the primary operations discussed herein or known), and they may perform activation functions and monitoring functions, and the like.

[0110] It will also be understood that the probe elements of some aspects of the present disclosure may be formed with processes which are very different from the processes set forth herein, and it is not intended that structural aspects of the present disclosure need to be formed by only those processes taught herein or by processes made obvious by those taught herein.

[0111] Though various portions of this specification have been provided with headers, it is not intended that the headers be used to limit the application of teachings found in one portion of the specification from applying to other portions of the specification. For example, alternatives acknowledged in association with one embodiment are intended to apply to all embodiments to the extent that the features of the different embodiments make such applications functional and do not otherwise contradict or remove all benefits of the adopted embodiment. Various other embodiments of the present disclosure exist. Some of these embodiments may be based on a combination of the teachings set forth herein with various known teachings.

[0112] It is intended that any aspects of the present disclosure set forth herein represent independent invention descriptions which Applicant contemplates as full and complete invention descriptions that Applicant believes may be set forth as independent claims without need of importing additional limitations or elements, from other embodiments or aspects set forth herein, for interpretation or clarification other than when explicitly set forth in such independent claims once written. It is also understood that any variations of the aspects set forth herein represent individual and separate features that may form separate independent claims, be individually added to independent claims, or added as dependent claims to further define an invention being claimed by those respective dependent claims should they be written.

[0113] In view of the teachings herein, many further embodiments, alternatives in design and uses of the embodiments of the instant invention will be apparent to those of skill in the art. As such, it is not intended that the invention be limited to the particular illustrative embodiments, alternatives, and uses described above but instead that it be solely limited by the claims presented hereafter.

Claims

CLAIMSWhat is claimed is:1 . A probe for testing a DUT, comprising: a first tip (211T; 411T; 511T; 611T; 711T; 811T; 1011T; 1111T) for making electrical contact to an electrical circuit element, the first tip (211T; . . . 1111T) having a contact region and an attachment region; a first extension arm connecting directly or indirectly to the attachment region of the first tip (211T; 411T; 511T; 611T; 711T; 811T; 1011T; 1111T); a compliant structure comprising at least one spring segment (201-1 ; 201-2; 801 ; 1001 ; 1101), wherein a first region of the compliant structure joins the first extension arm; a second extension arm selected in a group consisting of: (i) joining a second region of the compliant structure such that relative displacement of the first and second extension arms results in elastic movement of the at least one spring segment (201-1 ; 201-2; 801 ; 1001 ; 1101) of the compliant structure, and (ii) connecting directly or indirectly to a second connection region of the compliant structure such that relative displacement of the first extension arm and the second extension arm results in elastic movement of the at least one spring segment (201-1 ; . . . 1101) of the compliant structure; and a second tip (212T; 412T; 512T; 612T; 712T; 812T; 1012T; 1112T) having a first attachment region and a second region wherein the first attachment region of the second tip (212T; . . . 1112T) joins the second extension arm; wherein the at least one spring segment (201-1 ; 201-2; 801 ; 1001 ; 1101) is selected from a group consisting of: (i) operating under tension to provide an elastic restoration force; (ii) undergoing increased extension upon relative displacement of the first tip (211T; . . . 1111T) and the second tip (212T; . . . 1112T) toward one another along a longitudinal axis of the probe, wherein the second region of the second tip (212T; . . . 1112T) is configured for making an electrical connection to a second circuit element, wherein the configuration is selected from a group consisting of: (i) a tip for making a contact connection, and (ii) a tip for making an attached connection, wherein the probe further comprises at least two movable stop structures to allow prebiasing of at least one of the spring segments (201-1 ; 201-2; . . . 1101), and wherein the at least two movable stop structures include an opening through which an arm can pass.

2. The probe of claim 1 further comprising at least one guidance element selected from a group consisting of: (i) the at least one guidance element limits elastic movement of the compliant structure to substantially longitudinal movement along a longitudinal axis of the probe, and (ii) the at least one guidance element limits relative movement of the first tip (211T; . . . 1111T) and the second tip (212T; . . . 1112T) along a substantially longitudinal axis of the probe.

3. The probe of claim 1 wherein the at least one spring segment (201-1 ; 201-2; . . . 1101) comprises a plurality of spring segments (201-1 ; 201-2; . . . 1101).

4. The probe of claim 1 wherein the at least one spring segment (201-1 ; 201-2; . . . 1101) comprises a plurality of spring segments (201-1 ; 201-2; . . . 1101) with at least one of the plurality of spring segments (201-1 ; 201-2; . . . 1101) operating under compression to provide a restoring force.

5. The probe of claim 1 further comprising at least two movable stop structures to allow prebiasing of at least one of the spring segments (201-1 ; 201-2; . . . 1101).

6. The probe of claim 1 additionally comprising features that can engage with features on an array structure to allow for pre-biasing of at least one spring segment (201-1 ; 201-2; 801 ; 1001 ; 1101).

7. The probe of claim 1 additionally comprising at least one shunting element that directs current from one of the first or second extension arms through a non-compliant structure and then through the other of the first or second extension arms.

8. The probe of claim 7 wherein the at least one shunting element comprises a surface against which an extension arm of the first or second extension arms slides.

9. The probe of claim 1 wherein the at least one spring segment (201-1 ; 201-2; . . . 1101) comprises a metal and is provided in a flat spring configuration.

10. The probe of claim 1 wherein the at least one spring segment (201-1 ; 201-2; . . . 1101) comprises at least two spring segments (201-1 ; 201-2; . . . 1101) that are joined together in a serial configuration.11 . The probe of claim 10 wherein the at least two joined spring segments (201-1 ; 201-2; . . . 1101) are selected from a group consisting of: (i) the at least two joined spring segments (201-1 ; 201-2; . . . 1101) operate in tension; and (ii) at least one of the at least two joined segments (201-1 ; 201-2; . . . 1101) operates in tension while at least another of the at least two joined segments (201-1 ; 201-2; . . . 1101) operates in compression.

12. The probe of claim 10 wherein the at least two spring segments (201-1 ; 201-2; . . . 1101) are selected from a group consisting of: (i) the at least two spring segments (201-1 ; 201-2; . . . 1101) are flat spring segments (201-1 ; 201-2; . . . 1101) and are spaced from one another but at least partially overlay one another in a face-to-face configuration; and (ii) the at least two spring segments (201-1 ; 201-2; 801 ; 1001 ;1101) are flat springs and are separated from one another by an intermediate surface against which at least one of the spring segments (201-1 ; 201-2; 801 ; 1001 ; 1101) can slide.

13. The probe of claim 1 further comprising a sheath in which at least a portion of the at least one spring segment (201-1 ; 201-2; . . . 1101) of the compliant structure moves.

14. The probe of claim 1 further additionally comprising at least one structure that is directly or indirectly attached to an end of the at least one spring segment (201-1 ; 201-2; . . . 1101) for providing afunction selected from a group consisting of: (i) providing a stop structure that moves with the end of the spring segment (201-1 ; 201-2; . . . 1101) as the first tip (211T; . . . 1111T) and second tip (212T; . . . 1112T) are moved relative to one another; and (ii) providing for relative longitudinal motion of the first tip (211T; . . . 1111T) relative to the second tip (212T; . . . 1112T) while inhibiting excessive lateral motion of at least one of the first tip (211T; . . . 1111T) or the second tip (212T; . . . 1112T).

15. The probe of claim 1 additionally comprising a rigid probe body providing a frame which supports a relative lateral positioning of the compliant structure, the first extension arm, and the second extension arm while allowing at least one of the first extension arm and first tip (211T; . . . 1111 T) or the second extension arm and second tip (212T; . . . 1112T) to move longitudinally, via an external compressive force applied to the first and / or second tips (212T; . . . 1112T), through a working range of longitudinally extended probe length to longitudinally compressed probe length while increasing a tensional force on the at least one spring segment (201-1 ; 201-2; . . . 1101) and moving longitudinally through a working range of longitudinally compressed probe length to extended probe length under a force of extension provided, at least in part, by the tensional force stored in the at least one spring segment (201-1 ; 201-2; . . . 1101), wherein the rigid probe body extends from at least one end of the at least one spring segment (201-1 ; 201-2; . . . 1101) to the other end of the at least one spring segment (201-1 ; 201-2; . . . 1101) at a full working extension of the at least one spring segment (201-1 ; 201-2; . . . 1101).

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