Furnace door apparatus and diffusion furnace

Abstract

The present application relates to a furnace door apparatus and a diffusion furnace. The furnace door apparatus comprises: a furnace door body; an adjusting member, connected to the furnace door body and controllably driving the furnace door body to move in a first direction, the first direction being parallel to a direction of the axis of the furnace door body; and a hydraulic buffer, installed on the adjusting member, the hydraulic buffer comprising a piston rod compressible in the first direction, and the piston rod abutting against the furnace door body. Impact generated when the furnace door body is in contact with the furnace tube can be absorbed by the hydraulic buffer, so that the vibration and noise generated when the furnace door body closes the furnace tube are reduced and the probability of the furnace door body breaking the furnace tube is reduced. Further, the startup rate of the diffusion furnace is increased, the mechanical service life is prolonged, the maintenance costs are reduced, the mechanical design is simplified, and the production efficiency of semiconductors is improved.

Description

Furnace door device and diffusion furnace

[0001] Cross-references

[0002] The application refers to Chinese patent application No. 202311049813.5, entitled “Furnace Door Device and Diffusion Furnace”, filed on August 18, 2023, which is incorporated into this application in its entirety by reference. Technical Field

[0003] The present application relates to the technical field of photovoltaic manufacturing equipment, and in particular to a furnace door device and a diffusion furnace. Background Art

[0004] Diffusion furnace is one of the important process equipment in the front process of photovoltaic production line. It is used for diffusion, oxidation, annealing, alloying and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronic devices and optical fibers.

[0005] A diffusion furnace consists of a furnace tube and a furnace door. After silicon wafers enter the furnace tube, the door is closed and gases are introduced into the furnace. The silicon wafers react with the various gases within the furnace tube while being heated. However, in some cases, the door can vibrate and make a lot of noise during the process of opening and closing the furnace tube, which can easily damage the tube opening.

[0006] Summary of the Invention

[0007] Based on this, the present application provides a furnace door device and a diffusion furnace.

[0008] In a first aspect, the present application provides a furnace door device, wherein the furnace door device comprises:

[0009] Furnace door body;

[0010] an adjusting member connected to the furnace door body and capable of controllably driving the furnace door body to move along a first direction, wherein the first direction is parallel to the direction of the axis of the furnace door body;

[0011] A hydraulic buffer is installed on the adjusting member, and the hydraulic buffer includes a piston rod compressible along the first direction, and one end of the piston rod abuts against the furnace door body.

[0012] In the technical solution of the embodiments of the present application, when the furnace door body contacts the tube opening at a certain initial velocity, the impact generated by the tube and the door body acts on the piston rod of the hydraulic buffer, compressing the piston rod. During the compression process, the hydraulic oil in the hydraulic buffer provides the piston rod with a nearly fixed resistance, thereby converting the piston rod's kinetic energy into heat energy, which is ultimately dissipated into the air. In other words, the impact generated by the furnace door body contacting the furnace tube is absorbed by the hydraulic buffer, thereby reducing the vibration and noise generated when the furnace door body closes the furnace tube and the probability of the furnace door body damaging the furnace tube. This, in turn, improves the diffusion furnace's operating rate, extends the machine life, reduces maintenance costs, simplifies the machine design, and improves semiconductor production efficiency.

[0013] In some embodiments, the adjusting member is connected to the geometric center of the furnace door body, and the hydraulic buffer comprises a plurality of hydraulic buffers, which are spaced apart and arranged on the adjusting member around the axis of the furnace door body.

[0014] In the technical solution of the embodiment of the present application, by providing a plurality of hydraulic buffers, the periphery of the furnace door body can be pressed against the furnace tube by the hydraulic buffers, thereby ensuring the sealing effect of the hydraulic buffers.

[0015] In some embodiments, the adjusting member includes a connecting portion and a plurality of buffer portions, the connecting portion is connected to the geometric center of the furnace door body, and the plurality of buffer portions are radially arranged around the circumference of the connecting portion.

[0016] In the technical solution of the embodiment of the present application, the adjusting member can extend from the geometric center position of the furnace door body to the periphery of the furnace door body through multiple radial buffer parts, so as to facilitate the arrangement of multiple hydraulic buffers near the periphery of the furnace door body.

[0017] In some embodiments, the hydraulic buffer is provided at one end of the buffer portion facing away from the connecting portion.

[0018] In the technical solution of the embodiment of the present application, a hydraulic buffer is provided at one end of each buffer portion away from the connecting portion, so that each hydraulic pipe device can be set at a position close to the periphery of the furnace door body, thereby pressing the periphery of the furnace door body and the furnace pipe tightly, preventing the furnace door body from warping, and ensuring the hydraulic effect of the furnace pipe.

[0019] In some embodiments, the adjusting member further includes a mounting ring, which is disposed around the connecting portion and connects one end of each of the buffer portions away from the connecting portion, and all of the hydraulic buffers are disposed on the mounting ring.

[0020] In the technical solution of the embodiment of the present application, the adjusting member can be provided with a hydraulic buffer through the mounting ring, which greatly improves the pressing effect of the furnace door body and the furnace tube, thereby making the sealing of the furnace tube better.

[0021] In some embodiments, the oven door device includes a first driving member, which is transmission-connected to the adjusting member to drive the adjusting member to drive the oven door body to move along the first direction.

[0022] In the technical solution of the embodiment of the present application, the first driving member is transmission-connected with the adjusting member to drive the adjusting member to drive the furnace door body to move along the first direction.

[0023] In some embodiments, the furnace door device further includes a bracket, one end of the bracket is transmission-connected to the first driving member, and the other end of the bracket is connected to the adjusting member.

[0024] In the technical solution of the embodiment of the present application, the power of the first driving member is transmitted to the adjusting member through the bracket, and finally to the furnace door body.

[0025] In some embodiments, the adjusting member further includes a fixing portion, which is protrudingly arranged on a side of the adjusting member facing away from the furnace door body, and a bottom of the fixing portion is arranged at the other end of the bracket.

[0026] In the technical solution of the embodiment of the present application, the bracket not only plays a transmission role, but also can support the adjustment member and the furnace door body through the bracket.

[0027] In some embodiments, the oven door device includes a second driving member, which is in transmission connection with the adjusting member to drive the adjusting member to drive the oven door body to move along a second direction, and the second direction intersects with the first direction.

[0028] In the technical solution of the embodiment of the present application, the second driving member can be used to drive the furnace door body away from the furnace tube.

[0029] In some embodiments, the first driving member and the second driving member are both cylinders, the output shaft of the first driving member is connected to the second driving member, and the output shaft of the second driving member is connected to the adjusting member.

[0030] In the technical solution of the embodiment of the present application, when the first driving member is activated, the first driving member drives the second driving member, the bracket, the adjusting member, and the furnace door body to move together in a first direction X to open and close the furnace tube. When the second driving member is activated, the second driving member drives the furnace door body in a second direction Y via the bracket and the adjusting member to move closer to or avoid the furnace tube.

[0031] In some embodiments, the furnace door body includes a quartz door body and a sealing door body, the quartz door body is provided on one side of the sealing door body, and the adjusting member is provided on the other opposite side.

[0032] In the technical solution of the embodiment of this application, the quartz door is smaller than the sealed door, allowing it to extend into the furnace tube, thereby providing thermal insulation for the furnace door body. The sealed door is used to abut against the furnace tube to seal it, and an adjustment member is provided on the sealed door. The hydraulic buffer member on the adjustment member can improve the compression between the sealed door and the furnace tube.

[0033] In a first aspect, the present application provides a diffusion furnace, which comprises a furnace tube and a furnace door device as described in any one of the above embodiments, wherein the furnace door device is used to open and close the furnace tube.

[0034] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the drawings without creative work.

[0036] FIG1 is a schematic structural diagram of a furnace door device according to an embodiment of the present application;

[0037] FIG2 is a schematic structural diagram of a furnace door body and an adjusting member of a furnace door device according to an embodiment of the present application;

[0038] FIG3 is a cross-sectional schematic diagram of a furnace door body and an adjusting member of a furnace door device according to an embodiment of the present application;

[0039] FIG4 is a schematic structural diagram of a furnace door device provided in another embodiment of the present application.

[0040] FIG5 is a structural diagram of a furnace door body and an adjusting member of a furnace door device provided by another embodiment of the present application;

[0041] FIG6 is a schematic structural diagram of a furnace door device provided in another embodiment of the present application.

[0042] FIG7 is a structural diagram of a furnace door body and an adjusting member of a furnace door device provided in another embodiment of the present application;

[0043] 10. Furnace door body; 11. Quartz door body; 12. Sealed door body;

[0044] 20. Adjusting part; 21. Connecting part; 22. Buffering part; 23. Mounting ring; 24. Fixing part;

[0045] 30. Hydraulic buffer; 31. Piston rod;

[0046] 40. First driving member; 41. Bracket; 42. Second driving member;

[0047] X, first direction; Y, second direction. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0049] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned figure descriptions are intended to cover non-exclusive inclusions.

[0050] In the description of the embodiments of this application, the technical terms "first" and "second" are used only to distinguish different objects and should not be understood to indicate or imply relative importance or implicitly specify the quantity, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, the meaning of "plurality" is more than two, unless otherwise clearly and specifically defined.

[0051] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0052] In the description of the embodiments of this application, the term "and / or" is simply a description of the association relationship between associated objects, indicating that three relationships can exist. For example, A and / or B can represent the following three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this document generally indicates that the associated objects are in an "or" relationship.

[0053] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0054] In the description of the embodiments of the present application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the embodiments of the present application.

[0055] In the description of the embodiments of the present application, unless otherwise expressly specified or limited, technical terms such as "installed," "connected," "connected," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; internal connections between two components or interactions between two components. Those skilled in the art can understand the specific meanings of the above terms in the embodiments of the present application based on specific circumstances.

[0056] Referring to Figures 1, 2, and 3, an embodiment of the present application provides a furnace door device for opening and closing a furnace tube of a diffusion furnace. The furnace door device includes a furnace door body 10 and an adjusting member 20. The furnace door body 10 is configured to abut against the tube opening of the furnace tube, thereby closing and sealing the tube opening. The adjusting member 20 is connected to the furnace tube body and can controllably drive the furnace door body 10 to move in a first direction X, which is parallel to the axis of the furnace door body 10. Movement of the adjusting member 20 in the first direction X drives the furnace door body 10 to abut or separate from the tube opening of the furnace tube, thereby opening and closing the furnace tube.

[0057] Among them, if the furnace tube is opened and closed directly by moving the furnace door body 10 in the first direction X, when the furnace door body 10 closes the tube mouth of the furnace tube, the furnace door body 10 contacts the tube mouth of the furnace tube at a certain speed and generates a large impact force, so that the furnace door body 10 will generate large noise and vibration due to the impact while closing the tube mouth, and it is also very easy to cause the furnace door body 10 to damage the tube mouth of the furnace tube.

[0058] To this end, the furnace door device also includes a hydraulic buffer 30, which is installed on the adjusting member 20. The hydraulic buffer 30 includes a piston rod 31 that is compressible along the first direction X. One end of the piston rod 31 abuts against the furnace door body 10. The hydraulic buffer 30 can rely on hydraulic damping to buffer and decelerate the object acting on it to a stop, thereby playing a certain degree of protective role.

[0059] Thus, when the furnace door body 10 contacts the tube opening of the furnace tube at a certain initial velocity, the impact force generated by the furnace door body 10 and the furnace tube acts on the piston rod 31 of the hydraulic buffer 30, compressing the piston rod 31. During the compression process of the piston rod 31, the hydraulic oil in the hydraulic buffer 30 provides a nearly fixed resistance force to the piston rod 31, which is in the opposite direction of the impact force. The hydraulic buffer absorbs the impact force and reduces its impact on the furnace door body. After the hydraulic piston rod absorbs the impact force, the kinetic energy of the piston rod 31 is converted into heat energy and finally dissipated into the air. In other words, the impact generated by the furnace door body 10 contacting the furnace tube is absorbed by the hydraulic buffer 30, thereby reducing the vibration and noise generated when the furnace door body 10 closes the furnace tube and reducing the probability of the furnace door body 10 damaging the furnace tube. This, in turn, improves the operating rate of the diffusion furnace, extends the mechanical life, reduces maintenance costs, simplifies mechanical design, and improves the production efficiency of semiconductors.

[0060] In actual use, when the furnace door body 10 closes the furnace tube, the connection point between the adjustment member 20 and the furnace door body 10 is usually at the geometric center of the furnace door body. Therefore, the portion of the furnace door body 10 away from the geometric center, that is, the periphery of the furnace door body 10, may warp, resulting in a poor seal of the furnace tube. The furnace door body 10 is disc-shaped, and the geometric center of the furnace door body is the center of the disc.

[0061] To this end, in some embodiments of the present application, the adjustment member 20 is connected to the geometric center of the furnace door body 10, and multiple hydraulic buffers 30 are spaced apart around the axis of the furnace door body 10. As can be seen above, the hydraulic oil within the hydraulic buffer 30 provides a resistive force to the piston rod 31. Therefore, when the furnace door body 10 closes the furnace pipe, the resistive force provided by the hydraulic oil allows the piston rod 31 of the hydraulic buffer 30 to press against the furnace door body 10 and the furnace pipe, preventing the furnace door body 10 from tilting. Furthermore, by providing multiple hydraulic buffers 30, the periphery of the furnace door body 10 can be pressed against the furnace pipe by the hydraulic buffers 30, thereby ensuring the sealing effect of the hydraulic buffers 30.

[0062] In some embodiments, the adjusting member 20 includes a connecting portion 21 and a plurality of buffer portions 22. The connecting portion 21 is connected to the geometric center of the furnace door body 10. The plurality of buffer portions 22 are radially arranged around the circumference of the connecting portion 21. The plurality of radial buffer portions 22 enable the adjusting member 20 to extend from the geometric center position of the furnace door body 10 to the periphery of the furnace door body 10, so as to facilitate the arrangement of the plurality of hydraulic buffers 30 near the periphery of the furnace door body 10.

[0063] Specifically in some embodiments, a hydraulic buffer 30 is provided at one end of each buffer portion 22 away from the connecting portion 21, so that each hydraulic pipe device can be set at a position close to the periphery of the furnace door body 10, thereby pressing the periphery of the furnace door body 10 and the furnace pipe to prevent the furnace door body 10 from tilting, thereby ensuring the hydraulic effect of the furnace pipe.

[0064] 2 , in which the furnace door device has three hydraulic buffers 30, and the furnace door body 10 has three positions capable of being pressed against the furnace tubes. Referring to the embodiments of FIG. 4 and FIG. 5 , the furnace door device has six hydraulic buffers 30, so in this embodiment, the furnace door body 10 has six positions capable of being pressed against the furnace tubes. By analogy, if the number of hydraulic buffers 30 is greater, the pressing effect between the various positions around the furnace door body 10 and the furnace tubes will be better. Therefore, the number of hydraulic buffers 30 determines the pressing effect between the furnace door body 10 and the furnace tubes.

[0065] In order to further increase the number of hydraulic buffers 30, specifically in some embodiments, referring to Figures 6 and 7, the adjusting member 20 also includes a mounting ring 23, which is arranged around the connecting portion 21 and connects one end of each buffer portion 22 away from the connecting portion 21. All hydraulic buffers 30 are arranged on the mounting ring 23, so that the adjusting member 20 can accommodate a larger number of hydraulic buffers 30 through the hydraulic ring. For example, in the embodiments of Figures 6 and 7, the adjusting member 20 can be provided with 12 hydraulic buffers 30 through the mounting ring 23, which greatly improves the pressing effect of the furnace door body 10 and the furnace tube, thereby making the furnace tube more sealed.

[0066] In some embodiments of the present application, in order to drive the furnace door body 10 to open and close the furnace tube, the furnace door device includes a first driving member 40, which is transmission-connected to the adjusting member 20 to drive the adjusting member 20 to drive the furnace door body 10 to move along the first direction X.

[0067] Among them, the furnace door device also includes a bracket 41, one end of the bracket 41 is transmission-connected to the first driving member 40, and the other end of the bracket 41 is connected to the adjusting member 20, so that the power of the first driving member is transmitted to the adjusting member 20 through the bracket 41, and finally transmitted to the furnace door body 10, thereby driving the furnace door body 10 to move.

[0068] In one embodiment, the adjusting member 20 also includes a fixing portion 24, which is protrudingly arranged on the side of the adjusting member 20 facing away from the furnace door body 10, and the bottom of the fixing portion 24 is arranged at the other end of the bracket 41. In this way, the bracket 41 not only plays a transmission role, but also can support the adjusting member 20 and the furnace door body 10 together through the bracket 41.

[0069] In some embodiments, the furnace door device includes a second driving member 42, which is in transmission connection with the adjusting member 20 to drive the adjusting member 20 to cause the furnace door body 10 to move in a second direction Y. The second direction Y intersects with the first direction X, so that the second driving member 42 can be used to drive the furnace door body 10 away from the furnace tube. In actual use, the furnace door body 10 can be first driven in the first direction X to open the furnace tube, and then driven in the second direction Y to move the furnace door body 10 away from the tube opening of the furnace tube, thereby facilitating the removal and placement of parts to be processed.

[0070] Specifically, in some embodiments, the first drive member 40 and the second drive member 42 are both cylinders, and the output shaft of the first drive member 40 is connected to the second drive member 42, and the output shaft of the second drive member 42 is connected to the adjusting member 20 via the bracket 41. Thus, when the first drive member 40 is actuated, the first drive member 40 drives the second drive member 42, the bracket 41, the adjusting member 20, and the furnace door body 10 to move together in a first direction X to open and close the furnace tube. When the second drive member 42 is actuated, the second drive member 42 drives the furnace door body 10 to move in a second direction Y via the bracket 41 and the adjusting member 20 to approach or avoid the furnace tube. It should be noted that in other embodiments, the first drive motor and the second drive motor may also be components for outputting linear motion, such as linear motors, which are not limited here.

[0071] In some embodiments of the present application, the furnace door body 10 includes a quartz door body 11 and a sealing door body 12. The quartz door body 11 is provided on one side of the sealing door body 12, and an adjusting member 20 is provided on the opposite side. The size of the quartz door body 11 is smaller than that of the sealing door body 12, so that the quartz door body 11 can extend into the furnace tube, thereby insulating the furnace door body 10 through the quartz door body 11. The sealing door body 12 is used to abut against the furnace tube to seal the furnace tube, and the adjusting member 20 is provided on the sealing door body 12. Therefore, the sealing door body 12 can improve the compression effect between the sealing door body 12 and the furnace tube through the hydraulic buffer member on the adjusting member 20.

[0072] The present application also provides a diffusion furnace, comprising a furnace tube and a furnace door device as described in any of the above embodiments. The furnace door device is used to open and close the furnace tube, and when the furnace door body 10 contacts the tube mouth of the furnace tube at a certain initial velocity, the impact generated by the furnace tube and the furnace door body 10 acts on the piston rod 31 of the hydraulic buffer 30, compressing the piston rod 31. During the compression process, the piston rod 31 can provide a nearly fixed resistance to the piston rod 31 through the hydraulic oil in the hydraulic buffer 30, thereby converting the kinetic energy of the piston rod 31 into heat energy and finally dissipating it into the air. In other words, the impact generated when the furnace door body 10 contacts the furnace tube is absorbed by the hydraulic buffer 30, thereby reducing the vibration and noise generated when the furnace door body 10 closes the furnace tube and reducing the probability of the furnace door body 10 damaging the furnace tube, thereby achieving the effects of improving the operating rate of the diffusion furnace, extending the mechanical life, reducing maintenance costs, simplifying mechanical design, and improving the production efficiency of semiconductors.

[0073] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0074] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, and these modifications and improvements fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A furnace door device, wherein: The furnace door device comprises: Furnace door body (10); an adjusting member (20) connected to the furnace door body (10) and capable of driving the furnace door body (10) to move in a first direction (X) in a controlled manner, wherein the first direction (X) is parallel to the direction in which the axis of the furnace door body (10) is located; A hydraulic buffer (30) is installed on the adjusting member (20), and the hydraulic buffer (30) comprises a piston rod (31) which is compressible along the first direction (X), and one end of the piston rod (31) is in contact with the furnace door body (10).

2. The furnace door device according to claim 1, wherein: The adjusting member (20) is connected to the geometric center of the furnace door body (10), and the hydraulic buffer (30) includes a plurality of hydraulic buffers (30), which are arranged on the adjusting member (20) at intervals around the axis of the furnace door body (10).

3. The furnace door device according to any one of claims 1 to 2, wherein: The adjusting member (20) comprises a connecting portion (21) and a plurality of buffer portions (22); the connecting portion (21) is connected to the geometric center of the furnace door body (10); and the plurality of buffer portions (22) are radially arranged around the circumference of the connecting portion (21).

4. The furnace door device according to claim 3, wherein: The hydraulic buffer (30) is provided at one end of the buffer portion (22) away from the connecting portion (21).

5. The furnace door device according to claim 3, wherein: The adjusting member (20) further comprises a mounting ring (23), the mounting ring (23) being arranged around the connecting portion (21) and connecting one end of each buffer portion (22) away from the connecting portion (21), and all the hydraulic buffers (30) are arranged on the mounting ring (23).

6. The furnace door device according to any one of claims 1 to 5, wherein: The furnace door device comprises a first driving member (40), which is transmission-connected to the adjusting member (20) so as to drive the adjusting member (20) to drive the furnace door body (10) to move along the first direction (X).

7. The furnace door device according to claim 6, wherein: The furnace door device further comprises a bracket (41), one end of the bracket (41) is drivingly connected to the first driving member (40), and the other end of the bracket (41) is connected to the adjusting member (20).

8. The furnace door device according to claim 7, wherein: The adjusting member (20) further comprises a fixing portion (24), wherein the fixing portion (24) is protrudingly arranged on a side of the adjusting member (20) facing away from the furnace door body (10), and the bottom of the fixing portion (24) is arranged at the other end of the bracket (41).

9. The furnace door device according to claim 6, wherein: The furnace door device comprises a second driving member (42), which is in transmission connection with the adjusting member (20) to drive the adjusting member (20) to drive the furnace door body (10) to move along a second direction (Y), and the second direction (Y) intersects with the first direction (X).

10. The furnace door device according to claim 9, wherein: The first driving member (40) and the second driving member (42) are both cylinders; the output shaft of the first driving member (40) is connected to the second driving member (42); and the output shaft of the second driving member (42) is connected to the adjusting member (20).

11. The furnace door device according to any one of claims 1 to 10, wherein: The furnace door body (10) comprises a quartz door body (11) and a sealing door body (12); the quartz door body (11) is arranged on one side of the sealing door body (12), and the adjusting member (20) is arranged on the other opposite side.

12. A diffusion furnace, wherein: The invention comprises a furnace tube and a furnace door device as claimed in any one of claims 1 to 11, wherein the furnace door device is used for opening and closing the furnace tube.

Images