Composite liquid-cooling heat-dissipation device based on jet flow and two-phase flow circulation

By introducing jet stream and two-phase flow circulation technology into the liquid-cooled radiator, the two-phase flow circulation is performed using the heat absorption zone and condensation zone of the steam cavity element, and heat exchange is carried out in the heat exchange chamber, which solves the problem that existing liquid-cooled radiators are difficult to homogenize on high wattage and high power density wafers, and achieves efficient heat dissipation and heat homogenization effects.

WO2025044490A1PCT designated stage expired Publication Date: 2025-03-06GUANGZHOU NEOGENE THERMAL MANAGEMENT TECH CO LTD

Patent Information

Application Number
PCT/CN2024/103277
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-04-19
Filing Date
2024-07-03
Publication Date
2025-03-06

AI Technical Summary

Technical Problem

When existing liquid-cooled radiators face chips with high wattage and high power density, it is difficult to effectively heat the entire wafer, resulting in too large temperature difference and low heat dissipation efficiency.

Method used

A composite liquid-cooled radiator with both jet flow and two-phase flow circulation is adopted. The two-phase flow circulation is carried out through the heat absorption zone and the condensation zone of the steam cavity element, and the heat energy is taken away through the phase changes, and heat exchanged with the coolant in the heat exchange chamber, increasing the heat dissipation surface area and achieving dual-effect heat dissipation.

Benefits of technology

It effectively reduces the temperature difference of the heat source, improves the overall heat dissipation efficiency, and can more efficiently dissipate and homogenize the high-power density wafers.

✦ Generated by Eureka AI based on patent content.

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Abstract

A composite liquid-cooling heat-dissipation device based on jet flow and two-phase flow circulation, comprising a vapor chamber element and a semi-open housing. The vapor chamber element comprises an upper cover and a lower plate; the upper cover has an upper surface; with respect to the upper cover, the lower plate has a lower surface for coming into contact with a heat source; when the upper cover is coupled to the lower plate, a closed cavity is formed; a heat absorption area of the vapor chamber element is located on the lower plate, and a condensation area of the vapor chamber element is located on the upper cover; the semi-open housing is coupled to the lower plate of the vapor chamber element to form a heat exchange cavity; the semi-open housing is provided with a spraying head, an input port, and an output port; the input port is used for inputting a cooling liquid; and the spraying head is connected to the input port to first splash the cooling liquid on the upper surface of the upper cover, and then enable the cooling liquid to flow through the heat exchange cavity to output the cooling liquid through the output port.
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Description

Composite liquid cooling radiator with both jet flow and two-phase flow circulation Technical Field

[0001] The present invention relates to a liquid cooling radiator, in particular to a composite liquid cooling radiator that integrates jet flow heat dissipation technology and steam chamber two-phase flow circulation and heat equalization technology. Background Art

[0002] As the thermal design power (TDP) and power density of high-performance computing and communication chips in servers and communication switches continue to rise, chip temperatures are also increasing. 3D stacked IC packaging also makes it more difficult to dissipate the heat generated by the bottom-layer chips. Traditional air cooling technology has reached a bottleneck, leading to the rise of liquid cooling technology. Among them, cold plate liquid cooling technology is gradually becoming the mainstream heat dissipation method on the market.

[0003] Please refer to Figure 1, which shows a schematic diagram of a conventional liquid-cooled heat sink E. As shown in Figure 1, the conventional liquid-cooled heat sink E includes a heat sink module 70, a semi-open housing 75, and a heat source 90. The conventional heat sink module 70 is a water-cooled plate made of a metal material with heat sink fins 701 welded together. However, as chip power exceeds 1,000W and power density exceeds 100W / cm², and with 3D stacked packaging structures, the conventional heat sink module 70 is no longer able to dissipate heat for high-wattage, high-power-density chips. Furthermore, as shown in Figure 1, the inlet 203 of the conventional semi-open housing 75 is located on the right side of the conventional liquid-cooled heat sink E. When coolant flows into the inlet, heat exchange begins at the location closest to the inlet in the heat sink module 70, rather than at the hottest point closest to the chip. As chip power increases, conventional liquid cooling radiators E still cause large temperature differences across the chip during heat dissipation and are unable to effectively evenly distribute the temperature across the chip.

[0004] Therefore, in order to solve the heat dissipation and heat dissipation challenges brought about by the conventional liquid cooling radiator as the chip power and power density gradually increase, it is necessary to invent and provide a more efficient chip heat dissipation and heat distribution solution.

[0005] Summary of the Invention

[0006] In view of this, the purpose of the present invention is to provide a composite liquid-cooled radiator that combines jet flow and two-phase flow circulation, effectively overcoming the shortcomings of the prior art, achieving the effect of heat uniformity relative to the heat source of the annular vapor chamber, thereby reducing the temperature difference on the heat source, and increasing the heat dissipation surface area in the two-phase flow circulation of the vapor chamber element. At the same time, the internal two-phase flow circulation heat dissipation and the liquid cooling heat dissipation of the coolant are carried out to achieve dual-effect heat dissipation, thereby significantly increasing the overall heat dissipation efficiency.

[0007] To achieve the above-mentioned object, the present invention discloses a composite liquid cooling radiator with both jet flow and two-phase flow circulation, which is characterized by comprising:

[0008] A vapor chamber component comprising:

[0009] a top cover having an upper surface; and

[0010] A lower plate, opposite to the upper cover, has a lower plate lower surface for contacting a heat source, and forms a closed air cavity when the upper cover is coupled to the lower plate;

[0011] wherein a heat absorption area of ​​the vapor chamber element is located on the lower plate, and a condensation area of ​​the vapor chamber element is located on the upper cover; and

[0012] A semi-open shell is coupled to the lower plate of the vapor chamber element to form a heat exchange chamber. The semi-open shell includes a spray head having an input port and an output port. The input port is used to input a coolant. The spray head is connected to the input port to first spray the coolant on the upper surface of the upper cover, and then flows through the heat exchange chamber and outputs the coolant through the output port.

[0013] The vapor chamber element further includes a plurality of flow channel fins, which are spaced apart on the upper surface of the upper cover to form a plurality of micro flow channels and are surrounded by an opening, and the opening and the micro flow channels are interconnected.

[0014] The spray head is used to first spray the cooling liquid onto the upper surface of the upper cover through the opening, and then flow through the micro channels and the heat exchange cavity, and output the cooling liquid through the output port.

[0015] The vapor chamber element is a three-dimensional vapor chamber element, and the flow channel fins are integrally formed and spaced apart on the upper surface of the upper cover to form the micro-channels.

[0016] The microchannels have a channel width less than or equal to 1 mm.

[0017] The semi-open shell further has a top plate and a side plate. The input port is arranged on the top plate, and the output port is arranged on the top plate or the side plate.

[0018] Wherein, the shower head is arranged on the top plate and located in the heat exchange cavity.

[0019] The spray head has a spray port, which is located in the opening and is used for spraying the cooling liquid on the upper surface of the upper cover located in the opening.

[0020] Among them, the semi-open shell also has a top plate and a side plate, the top plate is provided with a top plate flow channel and has a top plate side end, the input port is provided at the top plate side end, the top plate flow channel is used to connect the input port and the sprinkler head, and the output port is provided on the side plate.

[0021] The semi-open shell includes a plurality of spray heads for evenly spraying the cooling liquid on the condensation area on the upper surface of the upper cover.

[0022] In summary, the present invention provides a hybrid liquid-cooled heat sink that combines jet flow and two-phase flow circulation. During the heat dissipation process, heat energy is first absorbed by the lower surface of the lower plate of the vapor chamber element, which is in close contact with the heat source. The working fluid within the lower plate undergoes phase change and two-phase flow circulation within the porous capillary structure and the enclosed air cavity. This heat energy is then removed through the phase change and two-phase flow circulation between the heat absorption zone and the condensation zone, and heat exchanged with the coolant within the heat exchange chamber. Furthermore, the heat source is uniformly distributed relative to the annular vapor chamber, thereby reducing the temperature difference across the heat source. Furthermore, the upper cover of the hybrid liquid-cooled heat sink of the present invention is further provided with flow channel fins, each of which has an opening in the middle, which is used to accommodate a showerhead. The showerhead is then positioned within a semi-open housing, with its spray port positioned perpendicularly to the hotspot with the highest temperature relative to the heat source (i.e., the wafer). This allows coolant to spray directly along the showerhead and impact the upper surface of the upper cover, which is in close contact with the hotspot, for forced heat exchange. Therefore, in addition to increasing the heat dissipation surface area during the two-phase flow circulation within the vapor chamber element, the microchannel structure also allows the coolant to directly dissipate heat at the highest temperature areas when it splashes and impacts the open surface of the upper cover, allowing the coolant to carry heat away from the heat sink. Compared to conventional technology, the vapor chamber or three-dimensional vapor chamber element of the present invention can simultaneously achieve dual-effect heat dissipation through internal two-phase flow circulation and liquid cooling of the coolant. This effectively dissipates and distributes the heat generated by the power chip, significantly increasing overall heat dissipation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] FIG1 shows a schematic diagram of a conventional liquid cooling radiator.

[0024] FIG2 shows a cross-sectional view of a composite liquid cooling radiator according to a specific embodiment of the present invention.

[0025] FIG3 shows a cross-sectional view of a composite liquid cooling radiator according to another embodiment of the present invention.

[0026] FIG. 4 shows an exploded view of the composite liquid cooling radiator according to FIG. 3 .

[0027] FIG5 shows a cross-sectional view of a composite liquid cooling radiator according to another embodiment of the present invention.

[0028] FIG6 shows a cross-sectional view of a composite liquid cooling radiator according to another embodiment of the present invention.

[0029] FIG7 shows a cross-sectional view of a composite liquid cooling radiator according to another embodiment of the present invention.

[0030] FIG8 shows a cross-sectional view of a composite liquid cooling radiator according to another embodiment of the present invention.

[0031] FIG9 shows a cross-sectional view of a composite liquid cooling radiator according to another embodiment of the present invention. DETAILED DESCRIPTION

[0032] To facilitate a clearer and more comprehensive understanding of the advantages, spirit, and features of the present invention, the following detailed description and discussion will be provided using specific embodiments with reference to the accompanying drawings. It should be noted that these embodiments are merely representative of the present invention, and the specific methods, devices, conditions, materials, and the like exemplified herein are not intended to limit the present invention or the corresponding embodiments. Furthermore, the elements in the figures are merely intended to illustrate their relative positions and are not drawn to scale. The step numbers of the present invention are merely for distinguishing between steps and do not represent the order of the steps. This is to be noted above.

[0033] Please refer to Figure 2, which shows a cross-sectional view of a composite liquid-cooled heat sink 1 according to one embodiment of the present invention. As shown in Figure 2, the composite liquid-cooled heat sink 1, which combines jet flow and two-phase flow circulation, comprises a vapor chamber element 10 and a semi-open housing 20. The vapor chamber element 10 comprises an upper cover 111 and a lower plate 121. The upper cover 111 has an upper surface 1111. The lower plate 121 is disposed opposite the upper cover 111 and has a lower plate lower surface 1211, which is configured to contact the heat source 90. When the upper cover 111 is coupled to the lower plate 121, the vapor chamber element 10 is formed, and a sealed air cavity 131 is formed within the vapor chamber element 10. The heat absorption zone 81 of the vapor chamber element 10 is located on the lower plate 121, while the condensation zone 82 of the vapor chamber element 10 is located on the upper cover 111. The space between the semi-open housing 20 and the lower plate 121 of the vapor chamber element 10 forms a heat exchange chamber 201. The semi-open housing 20 includes a showerhead 202 having an inlet 203 and an outlet 204. The inlet 203 is used to input coolant, and the showerhead 202 is connected to the inlet 203. Coolant flows into the inlet 203 and is sprayed from the showerhead 202 onto the upper surface 1111 of the upper cover 111. The coolant then flows through the heat exchange chamber 201 and is discharged through the outlet 204.

[0034] The vapor chamber element 10 of the composite liquid-cooling radiator 1 of this embodiment further includes a continuous multi-porous capillary structure (not shown) and a plurality of support columns 134 having the multi-porous capillary structure. In practice, the multi-porous capillary structure is disposed on the lower surface 1112 of the upper cover 111 and the lower plate upper surface 1212 of the lower plate 121, and the support columns 134 are disposed between the upper cover 111 and the lower plate 121. When the upper cover 111 and the lower plate 121 are coupled, the plurality of support columns 134 having the multi-porous capillary structure are located between the upper cover 111 and the lower plate 121. Furthermore, the plurality of support columns 134 having the multi-porous capillary structure form a continuous capillary structure with the multi-porous capillary structure on the lower surface 1112 of the upper cover 111 and the lower plate upper surface 1212 of the lower plate 121. Next, the working fluid is injected into the cavity between the upper cover 111 and the lower plate 121 through a pre-installed liquid injection port (not shown) in the lower plate 121. The cavity is then evacuated and the liquid injection port is sealed. The evacuated cavity forms a sealed air chamber 131. In practice, the working fluid can be water or a mixture of water and ethylene glycol or propylene glycol.

[0035] In actual use, the lower plate 121 of the vapor chamber element 10 serves as the heat absorption zone 81, preferentially absorbing heat energy from the heat source 90. At this time, the working fluid in the enclosed air cavity 131 of the vapor chamber element 10 absorbs the heat energy, undergoing a phase change from liquid to gas. The gaseous working fluid then drifts into the condensation zone 82. As the temperature drops, the cooled working fluid undergoes another phase change back to liquid, and finally flows back to the heat absorption zone 81 along the porous capillary structure and support pillars 134, thus repeating the two-phase flow cycle within the vapor chamber element 10.

[0036] The semi-open housing 20 of the composite liquid-cooled radiator 1 of this embodiment further includes a top plate 206 and side plates 207. The inlet 203 is disposed on the top plate 206; the outlet 204 is disposed in the top plate 206 or the side plates 207; and the showerhead 202 is disposed on the top plate 206 and within the heat exchange chamber 201. In actual applications, the direction indicated by the arrows in FIG1 represents the direction of coolant flow. As shown in FIG1 , in addition to heat dissipation via the aforementioned two-phase flow circulation within the vapor chamber element 10, coolant can also be directly sprayed from the showerhead 202 onto the upper surface 1111 of the upper cover 111, allowing the low-temperature coolant to further remove heat energy from the upper cover 111 area. The coolant then flows through the heat exchange chamber 201 and finally flows out of the outlet 204. In practice, the joint holes of the semi-open shell 20 are joined to the lower plate 121 of the vapor chamber element 10, and screws are used to fasten the joint ends of the holes on the semi-open shell 20 to the lower plate 121. After the joints are connected, the space inside the semi-open shell 20 becomes the heat exchange chamber 201. In practice, the coolant can be one of water, acetone, ammonia, methanol, tetrachloroethane, and hydrofluorocarbon chemical refrigerants, but is not limited to these. The coolant can also be other fluids that absorb and remove heat energy.

[0037] Furthermore, the present invention provides other vapor chamber components. Please refer to Figures 3 and 4 . Figure 3 shows a cross-sectional view of a composite liquid-cooling radiator 2 according to another embodiment of the present invention, and Figure 4 shows an exploded view of the composite liquid-cooling radiator 2 according to Figure 3 . As shown in Figures 3 and 4 , the vapor chamber component 11 of the composite liquid-cooling radiator 2 of this embodiment further includes a plurality of flow channel fins 30 spaced apart on the upper surface 1111 of the upper cover 111 to form a plurality of microchannels 301. The fins 30 also surround an opening 302, which is interconnected with the plurality of microchannels 301.

[0038] The flow channel fin 30 structure of the vapor chamber element 11 of the composite liquid cooling radiator 2 of this specific embodiment is a quadrilateral structure as a whole. In practice, the metal material can be first milled out of the specific outline of the overall structure using a shovel tooth process, such as the chamfers of the four sides and the opening 302 in the middle, and then the flow channel fins 30 are cut and processed in sequence, and the distance between each flow channel fin 30 forms a micro channel 301 so that the coolant can flow more evenly, and then the flow channel fin 30 is coupled to the upper surface of the upper cover 111 by welding. In another embodiment, the thickness of the upper cover can be directly reserved for the metal material and the openings and flow channel fin features can be milled directly on the upper surface of the material, so that the flow channel fins are integrally formed on the upper cover. When the integrally formed upper cover is coupled to the lower cover, a three-dimensional vapor chamber element is formed. Due to the integral molding, the thermal resistance between the flow channel fin and the upper cover can be reduced, thereby further improving the heat dissipation efficiency.

[0039] Continuing with Figure 3, it is noteworthy that the position of the opening 302 of the composite liquid-cooled radiator 2 of this embodiment corresponds to the position of the heat source 90, and the showerhead 202 has a shower port 2021 disposed within the opening 302. In other words, the opening 302 and the heat source 90 are located at their closest vertical distance. Therefore, after coolant flows into the semi-open housing 20 through the inlet 203, it can flow directly from the showerhead 202's shower port 2021 and spray directly onto the upper surface 1111 of the upper cover 111, the area closest to the heat source 90. This allows the coolant to directly impact the high-temperature area, forcing heat exchange and heat dissipation. Subsequently, the coolant, after splashing onto the upper surface 1111 of the upper cover 111, flows along the microchannel 301 structure, passing through each microchannel 301 and, during its flow, further forcing heat exchange with each large-area flow channel fin 30. Finally, the coolant is discharged from outlet 204, completing a heat exchange liquid cooling cycle. Please note that considering the heat exchange area of ​​the microchannel and the flow rate of the coolant, the microchannel width d is less than or equal to 1 mm. In practical applications, the microchannel width, fin thickness, and drainage structure are not limited to this and can be adjusted according to the design. The other devices of this embodiment are substantially the same as those of the corresponding embodiments described above and are therefore not further described here.

[0040] Furthermore, the present invention provides other embodiments, please refer to Figure 5, which shows a cross-sectional view of a composite liquid-cooled radiator 3 of another specific embodiment of the present invention. As shown in Figure 5, the lower plate 122 of the vapor chamber element 12 of the composite liquid-cooled radiator 3 of this specific embodiment includes a boss structure (not shown in the figure), and this boss structure can correspond to the size of the heat source 90. The difference between the vapor chamber element 12 of the composite liquid-cooled radiator 3 of this specific embodiment and the aforementioned embodiment is that when the height of the electronic components near the heat source 90 is relatively high, the composite liquid-cooled radiator 3 of this specific embodiment can be used for avoidance. The other devices of this specific embodiment are substantially the same as the corresponding devices of the aforementioned specific embodiment, so they will not be repeated here.

[0041] Please refer to Figure 6, which shows a cross-sectional view of a composite liquid-cooled radiator 4 according to another embodiment of the present invention. As shown in Figure 6, the upper cover 112 of the vapor chamber element 13 of the composite liquid-cooled radiator 4 according to this embodiment is further provided with a recessed opening 1113 corresponding to the spray port 2021. This recessed opening 1113 can be milled or molded to form the recessed opening feature during pre-processing. When the coolant flows out of the spray port 2021, the coolant can directly spray the opening surface of this recessed opening 1113, thereby increasing the heat dissipation efficiency. The other devices of this embodiment are substantially the same as those corresponding to the aforementioned embodiments, and therefore will not be described in detail here.

[0042] Please refer to Figure 7, which shows a cross-sectional view of a composite liquid-cooled radiator 5 according to another embodiment of the present invention. As shown in Figure 7, the vapor chamber element 14 of the composite liquid-cooled radiator 5 of this embodiment includes an upper cover 112 and a lower plate 122. This allows the coolant to directly spray onto the opening surface of the recessed opening 1113 of the upper cover 112, thereby increasing heat dissipation efficiency. The lower plate 122 can also be positioned to avoid the presence of taller electronic components. The other devices of this embodiment are substantially the same as those of the corresponding devices in the aforementioned embodiments, and therefore will not be described in detail here.

[0043] Please refer to Figure 8, which shows a cross-sectional view of a composite liquid-cooling radiator 6 according to another embodiment of the present invention. As shown in Figure 8, the semi-open housing 21 of the composite liquid-cooling radiator 6 of this embodiment includes a top plate 206 and a side plate 207. The top plate 206 has a top plate flow channel 2061 disposed therein and has a top plate side end 2062. The inlet 203 is disposed on the top plate side end 2062, and the top plate flow channel 2061 connects the inlet 203 and the spray port 2021. The outlet 204 is disposed on the side plate 207. The coolant flows in from the input port 203 on the side end 2062 of the top plate and flows along the top plate flow channel 2061 to the spray port 2021 of the spray head 202. The coolant is further directly splashed and impacts the upper surface 1111 of the upper cover 111, and then undergoes heat exchange in the heat exchange chamber 201. Finally, it flows out from the output port 204 on the side plate 207 to complete a heat exchange liquid cooling cycle. The input port shown in Figure 8 is set on the right side of the side end of the top plate, but the setting position is not limited to this. The output port can also be set in the top plate. The other devices of this specific embodiment are roughly the same as the devices corresponding to the aforementioned specific embodiments, so they will not be repeated here. Furthermore, the semi-open shell 21 can be coupled with the vapor chamber elements of other embodiments (such as vapor chamber elements 11, 12, 13, 14) according to the needs of the user to form other types of composite liquid cooling radiators.

[0044] Please refer to Figure 9, which shows a cross-sectional view of a composite liquid-cooled radiator 7 according to another embodiment of the present invention. As shown in Figure 9, the semi-open housing 22 of the composite liquid-cooled radiator 7 of this embodiment includes several spray heads 202. Coolant can be directed to each of the spray heads 202 and evenly sprayed onto the entire upper surface 1111 of the upper cover 111. In practice, the composite liquid-cooled radiator 7 of this embodiment includes three spray heads 202, but this is not a limitation. The remaining components of this embodiment are substantially the same as those of the aforementioned embodiments and will not be further described here.

[0045] In summary, the present invention provides a hybrid liquid-cooled heat sink that combines jet flow and two-phase flow circulation. During the heat dissipation process, heat energy is first absorbed by the lower surface of the lower plate of the vapor chamber element, which is in close contact with the heat source. The working fluid within the lower plate undergoes phase change and two-phase flow circulation within the porous capillary structure and the enclosed air cavity. This heat energy is then removed through the phase change and two-phase flow circulation between the heat absorption zone and the condensation zone, and heat exchanged with the coolant within the heat exchange chamber. Furthermore, the heat source is uniformly distributed relative to the annular vapor chamber, thereby reducing the temperature difference across the heat source. Furthermore, the upper cover of the hybrid liquid-cooled heat sink of the present invention is further provided with flow channel fins, each of which has an opening in the middle, which is used to accommodate a showerhead. The showerhead is then positioned within a semi-open housing, with its spray port positioned perpendicularly to the hotspot with the highest temperature relative to the heat source (i.e., the wafer). This allows coolant to spray directly along the showerhead and impact the upper surface of the upper cover, which is in close contact with the hotspot, for forced heat exchange. Therefore, in addition to increasing the heat dissipation surface area during the two-phase flow circulation within the vapor chamber element, the microchannel structure also allows the coolant to directly dissipate heat at the highest temperature areas when it splashes and impacts the open surface of the upper cover, allowing the coolant to carry heat away from the heat sink. Compared to conventional technology, the vapor chamber or three-dimensional vapor chamber element of the present invention can simultaneously achieve dual-effect heat dissipation through internal two-phase flow circulation and liquid cooling of the coolant. This effectively dissipates and distributes the heat generated by the power chip, significantly increasing overall heat dissipation efficiency.

[0046] The above detailed description of the preferred embodiments is intended to more clearly illustrate the features and spirit of the present invention, and is not intended to limit the scope of the present invention by the disclosed preferred embodiments. Rather, the purpose is to encompass various modifications and equivalent arrangements within the scope of the patent application. Therefore, the scope of the patent application should be interpreted broadly in light of the above description to encompass all possible modifications and equivalent arrangements.

Claims

1. A composite liquid cooling radiator with both jet flow and two-phase flow circulation, characterized in that Contains: A vapor chamber element, comprising: A top cover having an upper surface; and A lower plate, opposite to the upper cover, having a lower plate lower surface for contacting a heat source, and forming a closed air cavity when the upper cover is coupled to the lower plate; wherein a heat absorption area of ​​the vapor chamber element is located on the lower plate, and a condensation area of ​​the vapor chamber element is located on the upper cover; and A semi-open shell is coupled to the lower plate of the vapor chamber element to form a heat exchange chamber. The semi-open shell includes a spray head and has an input port and an output port. The input port is used to input a cooling liquid. The spray head is connected to the input port to first spray the cooling liquid on the upper surface of the upper cover, and then flows through the heat exchange chamber and outputs the cooling liquid through the output port.

2. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 1, characterized in that: The vapor chamber element further comprises a plurality of flow channel fins which are arranged at intervals on the upper surface of the upper cover to form a plurality of micro flow channels and are surrounded to form an opening, and the opening and the micro flow channels are mutually connected.

3. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 2, characterized in that: The spray head is used to spray the cooling liquid onto the upper surface of the upper cover through the opening first, and then flow through the micro channels and the heat exchange cavity, and output the cooling liquid through the output port.

4. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 2, characterized in that: The vapor chamber element is a three-dimensional vapor chamber element, and the flow channel fins are integrally formed and spaced apart on the upper surface of the upper cover to form the micro flow channels.

5. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 2, characterized in that: The channel width of the micro channels is less than or equal to 1 mm.

6. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 1, characterized in that: The semi-open shell further has a top plate and a side plate. The input port is arranged on the top plate, and the output port is arranged on the top plate or the side plate.

7. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 6, characterized in that: The shower head is arranged on the top plate and is located in the heat exchange cavity.

8. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 2, characterized in that: The spray head has a spray port, which is located in the opening and is used for spraying the cooling liquid on the upper surface of the upper cover located in the opening.

9. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 1, characterized in that: The semi-open shell further has a top plate and a side plate, the top plate is provided with a top plate flow channel and has a top plate side end, the input port is provided at the top plate side end, the top plate flow channel is used to connect the input port and the sprinkler head, and the output port is provided at the side plate.

10. The composite liquid cooling radiator with both jet flow and two-phase flow circulation as claimed in claim 1, characterized in that: The semi-open shell includes a plurality of spray heads for uniformly spraying the cooling liquid on the condensation area on the upper surface of the upper cover.

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