Standard material for evaluating characteristics of microscope tip and method for evaluating characteristics of microscope tip using same

Abstract

The present invention relates to a standard material for evaluating the characteristics of a microscope tip and a method for evaluating the characteristics of a microscope tip using same, and to a standard material and method for evaluating the characteristics of a microscope tip that enable the calculation of the radius of curvature and the inclination angle of a tip, respectively, by using trenches having different widths.

Description

Standard material for evaluating the characteristics of microscope tips and method for evaluating the characteristics of microscope tips using the same

[0001] The present invention relates to a standard material for evaluating the characteristics of a microscope tip and a method for evaluating the characteristics of a microscope tip using the same, and relates to a standard material and a method for evaluating the characteristics of a microscope tip that can calculate the radius of curvature and the angle of inclination of the tip using nano-structure trenches of different widths.

[0002] Atomic force microscopes (AFMs) and scanning electron microscopes (SEMs) are nanometer-sized instruments used to measure critical dimensions (CDs) and pitches at the nanoscale in semiconductor device manufacturing processes. Current measurements using nanometer-sized instruments can deviate from actual values ​​depending on the conditions under which the instrument is used.

[0003] Typically, to measure the characteristics of an AFM probe tip, such as the shape or sharpness of the tip, a method is used in which a standard member having a rough pattern formed on the surface is scanned with the tip, an image of the standard member is acquired, and the characteristics of the tip are then inferred from the image.

[0004] However, this method has limitations in that it is difficult to accurately evaluate the characteristics of the tip due to scan constraints caused by the inclination of the tip, and it can only evaluate the degree of sharpness of the tip, but it is difficult to accurately measure the radius of curvature and inclination angle of the tip.

[0005] The present invention has been devised to solve the above problems, and its purpose is to provide a standard material and a microscope tip characteristic evaluation method capable of calculating the radius of curvature and inclination angle of the tip using nano-structure trenches of different widths.

[0006] The present invention is a standard material for evaluating the characteristics of a microscope tip, comprising a main body and a plurality of trenches each recessed downward from a surface of the main body and spaced apart from each other, wherein the plurality of trenches can be configured such that the width of each trench increases from one side of the main body to the other side.

[0007] The tip may be configured to be vertically inserted into each of the plurality of trenches.

[0008] By measuring the depth at which the tip is inserted in each of the above trenches, the radius of curvature and cone angle of the tip can be calculated, respectively.

[0009] The above plurality of trenches include a small trench having a width less than or equal to twice the radius of curvature of the tip, and a large trench having a width greater than twice the radius of curvature of the tip, and the small trench can be used to measure the radius of curvature of the tip, and the large trench can be used to measure the inclination angle of the tip.

[0010] Among the above plurality of trenches, the width of the smallest trench may be 3 nm or more and 7 nm or less, and the width of the largest trench may be 190 nm or more and 200 nm or less.

[0011] Each of the above multiple trenches may be configured to the same depth.

[0012] The above multiple trenches can be spaced apart from each other at equal intervals.

[0013] The above body may be configured with a structure in which a first material layer and a second material layer are alternately laminated multiple times, and the upper surface of the second material layer is positioned lower than the upper surface of the first material layer, so that a plurality of trenches are formed on the surface.

[0014] The first material layer may include silicon (Si), and the second material layer may include a silicon oxide film (SiO2).

[0015] The above microscope may be an atomic force microscope (AFM).

[0016] In addition, the present invention may include a method for evaluating the characteristics of a tip of a microscope, comprising: a step of preparing a standard material; a step of scanning the standard material using a microscope; a step of measuring a depth value of the tip corresponding to a depth at which the tip of the microscope is inserted in each trench of the standard material; and a step of calculating a radius of curvature and an angle of inclination of the tip based on the depth value of the tip in each trench.

[0017] In the above calculation step, the depth value of the tip in each trench is compared with the size of half the width of each trench, and the radius of curvature of the tip can be calculated by using the depth value of the tip in a small trench in which the depth value of the tip in each trench is less than or equal to half the width of each trench.

[0018] In the above calculation step, the radius of curvature of the tip can be calculated using the following equation.

[0019] [ceremony]

[0020] , or

[0021] (where, r is the radius of curvature of the tip in each small trench, is the depth value of the tip in each small trench, is the width of each small trench)

[0022] In the above calculation step, if there are multiple small trenches and multiple values ​​of the radius of curvature of the tip in each small trench calculated based thereon, the representative radius of curvature of the tip can be calculated using the arithmetic mean or least squares method.

[0023] In the above calculation step, the depth value of the tip in each trench is compared with a size of half the width of each trench, and the inclination angle of the tip can be calculated using the depth value of the tip in a large trench in which the depth value of the tip in each trench is larger than half the width of each trench.

[0024] In the above calculation step, the inclination angle of the tip can be calculated using the depth value of the tip in each large trench and the depth value of the tip in the previous trench adjacent to each large trench.

[0025] In the above calculation step, the inclination angle of the tip can be calculated using the following equation.

[0026] [ceremony]

[0027]

[0028] (Here, α is the inclination angle of the tip, And, and, Tips from the profile data of the trench is the width between points passing through the depth of Tips from the profile data of the trench ) is the width between points passing through the depth of

[0029] In the above calculation step, if there are multiple large trenches and multiple values ​​of the tip inclination angle in each large trench calculated based thereon, the representative inclination angle of the tip can be calculated using the arithmetic mean or least squares method.

[0030] In the above calculation step, the depth value of the tip in each large trench is compared with the depth of each trench, and the inclination angle of the tip can be calculated using the depth value of the tip in a trench in which the depth value of the tip in each trench is smaller than the depth of each trench.

[0031] The method may further include a step of outputting a cross-sectional image of the tip to a display device based on the radius of curvature and inclination angle of the tip calculated in the above calculation step.

[0032] According to the present invention, the radius of curvature and the angle of inclination of the tip can be calculated using trenches of different widths, and at this time, there is an advantage in that the radius of curvature and the angle of inclination of the tip can be easily and accurately measured.

[0033] In addition, according to the present invention, the characteristics of a tip can be measured regardless of the type or size of the tip, and there is an advantage in that it is easy to produce and use a standard material.

[0034] Figure 1 is a drawing showing the tip of a microscope.

[0035] Figure 2 is a drawing showing the radius of curvature of the tip.

[0036] Figure 3 is a drawing showing the inclination angle of the tip.

[0037] Figure 4 is a drawing showing a standard material according to an example of the present invention.

[0038] Figure 5 is a side view of a standard material according to one embodiment of the present invention.

[0039] Figure 6 is a drawing showing the process of scanning a standard material using a microscope.

[0040] Figure 7 is a drawing showing the process of measuring the radius of curvature of the tip.

[0041] Figure 8 is an enlarged view of one nanostructure trench for measuring the radius of curvature of the tip.

[0042] Figure 9 is a diagram illustrating a method for measuring the inclination angle of a tip from two adjacent trenches where the tip does not contact the trench bottom.

[0043] Figure 10 is a drawing showing a method for measuring the inclination of a tip from a large trench where the tip contacts the trench bottom.

[0044] Figure 11 is a flowchart of a method according to an example of the present invention.

[0045] Figure 12 is a data output screen according to an example of the present invention.

[0046] Fig. 13 is a cross-sectional image output screen of a tip according to an example of the present invention.

[0047] Hereinafter, the present invention will be described with reference to the attached drawings.

[0048] Fig. 1 is a drawing showing the tip of a microscope, and the tip (10) can be installed at the end of a cantilever that is moved by the drive of an actuator and configured to scan the surface of a target along the cantilever.

[0049] Figures 2 and 3 are enlarged drawings of the tip, respectively. In general, the tip is roughly cone-shaped, becoming sharper towards the end, and the end portion is configured in a shape with a predetermined curvature. Based on this, in order to clearly evaluate the shape or characteristics of the tip, it is necessary to determine the radius of curvature of the tip at the end of the tip and the cone angle of the tip, respectively. Figure 2 shows the radius of curvature of the tip ( ) is shown, and Fig. 3 shows the inclination angle of the tip ( ) is indicated.

[0050] In order to clearly evaluate the characteristics of the microscope tip in this way, the present invention proposes the following standard materials.

[0051] FIG. 4 is a drawing showing a standard material according to an example of the present invention, and as shown, the standard material (100) includes a main body (110) and a plurality of trenches (T) formed on the surface of the main body (110). The main body (110) has an approximately elongated hexahedral shape, and the plurality of trenches (T) are each configured in a structure recessed downward from the surface of the main body (110) so that they can be spaced apart from each other.

[0052] More specifically, based on the drawing, the main body (110) It is configured in the shape of a rectangular parallelepiped that is elongated in the axial direction, and each trench (T) is downward from the surface of the main body (110). Indented in the axial direction and at the same time It can be configured in the form of a slit that extends long in the axial direction, and each trench (T) They can be spaced apart from each other in the axial direction. The width of each trench ( ) of each trench (T) corresponds to the axial length and the depth of each trench ( ) of each trench (T) It can correspond to the length in the axial direction.

[0053] Here, the plurality of trenches (T) have a width ( ) is configured to become wider. That is, if the leftmost trench in FIG. 4 is called the first trench (T1), and the trenches on the right from it are called the second to ninth trenches (T2 to T9) in that order, the width of the trenches can become wider as they go from the first trench (T1) to the ninth trench (T9).

[0054] The standard material (100) of the present invention is configured such that a tip (10) is vertically inserted into each of a plurality of trenches (T), and through this configuration, the radius of curvature and the inclination angle of the tip can be calculated.

[0055] Referring back to FIG. 4, the plurality of trenches (T) include small trenches having a width less than or equal to twice the radius of curvature of the tip (10) and large trenches having a width greater than twice the radius of curvature of the tip (10). This is determined by the size of the tip (10), and for example, the first, second, and third trenches (T1, T2, T3) may correspond to small trenches, and the remaining trenches (T4 to T9) may correspond to large trenches.

[0056] In addition, the present invention can measure the radius of curvature of a tip (10) using a small trench and measure the inclination angle of the tip (10) using a large trench. Details regarding this will be described later.

[0057] The standard material (100) of the present invention to the trench (T) is configured approximately on a nanoscale, and as an example, as shown in FIG. 4, the width of the trench (T1) having the smallest width among a plurality of trenches (T) is configured to be approximately 5 nm, for example, 3 nm or more and 7 nm or less, and the width of the trench (T9) having the largest width can be configured to be approximately 200 nm, for example, 190 nm or more and 200 nm or less. This is a design that can accommodate most general tips, and the present standard material can measure the characteristics of the tip regardless of the type or size of the tip.

[0058] Meanwhile, the microscope of the present invention is an atomic force microscope (AFM), and the tip (10) may be an atomic force microscope tip. That is, the standard material of the present invention can be used to evaluate the characteristics of the atomic force microscope tip.

[0059] Referring back to FIG. 4, the plurality of trenches (T) may each be configured with different widths, and the difference in width between adjacent two trenches (T) may be configured to be the same or different. That is, the trench width may increase uniformly from one side to the other, or the increase in the trench width may increase at an increasing rate, or at least in one area, the trench width may increase uniformly and in another area, the increase in the trench width may increase at an increasing rate.

[0060] A plurality of trenches (T) may be spaced apart from each other at equal intervals, and the plurality of trenches (T) may be formed simultaneously or separately, each having the same depth. This may provide convenience in manufacturing the standard material.

[0061] The number of trenches (T) can be appropriately designed and changed considering the width of each trench or the difference in width between two adjacent trenches. As an example, as shown in Fig. 4, the trenches (T) can be configured with a total of 9, and can be configured with approximately 8 to 20.

[0062] FIG. 5 is a side view of a standard material according to the present invention, wherein the main body (110) may include a first material layer (111) and a second material layer (112). More specifically, the main body (110) may be formed by alternately stacking the first material layer (111) and the second material layer (112) multiple times, and the upper surface (112U) of the second material layer may be positioned lower than the upper surface (111U) of the first material layer, so that a plurality of trenches (T) may be formed on the surface of the main body (110) as described above.

[0063] At this time, the first material layer (111) may include silicon (Si), and the second material layer (112) may include a silicon oxide film (SiO2). That is, the first material layer (111) may be made of silicon (Si), and the second material layer (112) may be made of a silicon oxide film (SiO2). This helps in precisely manufacturing a nanoscale standard material.

[0064] Below, we will examine the principle of measuring the radius of curvature and inclination angle of a tip using the standard material of the present invention.

[0065] Fig. 6 is a drawing showing a process of scanning a standard material using a microscope. First, as shown in (a) of Fig. 6, the tip (10) is sequentially inserted into each of the trenches (T) while scanning the standard material (100). At this time, since the width of each trench (T) is different and at the same time, the tip (10) is configured in a cone shape, the degree to which the tip (10) is inserted into each trench (T) is different. Based on this, the depth to which the tip (10) is inserted into each trench (T) can be determined, and as shown in (b) of Fig. 6, the depth value (d) of the tip corresponding to the depth to which the tip (10) is inserted in each trench (T) can be measured.

[0066] Fig. 7 is a drawing showing the process of measuring the radius of curvature of the tip, and Fig. 8 is a drawing showing an enlarged version of one trench for measuring the radius of curvature of the tip. As previously discussed, the tip (10) is inserted into each trench (T), more specifically, each of the small trenches (T), in sequence while scanning the standard material (100), and the depth value of the tip (10) corresponding to the depth at which the tip (10) is inserted in each small trench (T) is ) will be measured.

[0067] And, the depth value of the tip (10) in each small trench (T) ( ) to determine the radius of curvature of the tip ( ) can be calculated. More specifically, referring to Fig. 8, the radius of curvature of the tip ( ) can be organized as follows using the Pythagorean theorem.

[0068] [ceremony]

[0069] (Here, is the radius of curvature of the tip in each small trench, is the depth value of the tip in each small trench, is the width of each small trench)

[0070] This is the radius of curvature If we summarize it, it can be summarized as follows.

[0071] [food] , or

[0072] For example, if the width of the second trench is 10.10 nm and the depth value of the tip measured from the second trench is 3.40 nm, the radius of curvature of the tip based on the second trench can be calculated to be about 2.2 nm.

[0073] At this time, the trench used to calculate the radius of curvature of the tip as described above corresponds to a small trench having a width less than or equal to twice the radius of curvature of the tip, and specifically, if the depth value of the tip in each trench is less than or equal to half the width of each trench, each trench can be judged to be a small trench.

[0074] Figure 9 is a drawing for measuring the inclination angle of the tip from two adjacent trenches where the tip does not contact the trench bottom. As previously discussed, the tip (10) is inserted into each trench (T), more specifically, each of the large trenches (T), in sequence while scanning the standard material (100), and the depth value of the tip (10) corresponding to the depth at which the tip (10) is inserted in each large trench (T) is ) will be measured.

[0075] And, each large trench ( ) the depth value of the tip ( ) and each large trench ( ) and the adjacent previous trench ( ) the depth value of the tip ( ) using the inclination angle of the tip ( ) can be calculated. That is, the difference in the depth of the tip in two adjacent trenches ( ) can be calculated to calculate the inclination angle of the tip. ) values ​​can be used. Also, the width difference ( from the authentication values ​​of the two trench widths) ) can be known. Then the width and height and The inclination of the tip from a right triangle ( ) can be obtained.

[0076] Figure 10 shows a trench (T) where the tip contacts the bottom of the trench. b ) is a method for obtaining the slope angle. The red dotted line in Fig. 10 is a linear distribution diagram, which indicates the movement path of the center of the tip when the tip moves while contacting the edge of the trench. This movement path can be used as profile data of the trench, and through this profile data, two specific depths ( and ) and the travel distance between the specific depths of the tip ( and ) can be obtained, and the inclination angle (α) of the tip can be calculated using this.

[0077] More specifically, referring to Fig. 10, the inclination angle (α) of the tip can be organized as follows using trigonometric functions.

[0078] [ceremony]

[0079] Here, α is the inclination angle of the tip, And, and, Tips from the profile data of the trench is the width between points passing through the depth of Tips from the profile data of the trench is the width between points passing through the depth.

[0080] For example, if the tip travel distance between two points passing through a depth of 40 nm is 98.50 nm, and the tip travel distance between two points passing through a depth of 120 nm is 74.35 nm, is 24.15 nm, is 80.00 nm, the inclination angle of the tip based on the trench profile data can be calculated to be approximately 0.29 rad or 16.6˚.

[0081] Based on the above, the method for evaluating the characteristics of the microscope tip of the present invention will be examined below.

[0082] Fig. 11 is a flowchart of a method according to an example of the present invention. The method largely includes a standard material preparation step (10S), a standard material scanning step (20S), a tip depth value measurement step (30S), and a tip curvature radius and inclination angle calculation step (40S), and may optionally further include a display output step (50S).

[0083] First, a standard material for evaluating the characteristics of the microscope tip is prepared (10S). The standard material may correspond to the standard material (100) of the present invention described above.

[0084] Next, the standard material is scanned using a microscope (20S). The microscope may be an atomic force microscope.

[0085] Next, the depth value of the tip corresponding to the depth to which the microscope tip is inserted in each trench of the standard material is measured (30S). This can be automatically performed by a computing device (not shown) connected to the microscope.

[0086] Next, the radius of curvature and inclination angle of the tip are calculated based on the depth value of the tip in each trench (40S).

[0087] In addition, the present method can generate a cross-sectional image of the tip based on the calculated radius of curvature and inclination angle of the tip, and output this to a display device. Simultaneously or separately, the present method can output the radius of curvature and inclination angle of the tip calculated based on the depth value of the tip measured in each trench and the information of each trench to the display device (50S). This can be automatically performed by a computing device, and the display device (not shown) can be connected to the computer wirelessly or by wire.

[0088] For example, FIG. 12 is a data output screen according to an example of the present invention, and FIG. 13 is a cross-sectional image output screen of a tip according to an example of the present invention. As shown in FIG. 12, the method outputs various information including the measured depth value of the tip in each trench to a display device, and as shown in FIG. 13, a cross-sectional image of the tip can be generated in the form of a graph on the xy plane based on the calculated radius of curvature and inclination angle of the tip and outputted to the display device.

[0089] In the calculation step (40S) for calculating the radius of curvature and inclination angle of the tip, the depth value of the tip in each trench is compared with the size of half the width of each trench, so that it can be determined which data will be used for calculating the radius of curvature of the tip, which data will be used for calculating the inclination angle of the tip, or which data will be excluded from the calculation. In other words, this method can first scan a standard material to measure all the depth values ​​of the tip in each trench, and then filter them appropriately for use.

[0090] As described above, the radius of curvature of the tip can be calculated by using the depth value of the tip in each trench, i.e., the depth value of the tip in a small trench, which is less than or equal to half the width of each trench, and the principle of calculating the radius of curvature of the tip by using the small trench is as shown in FIG. 8.

[0091] Here, if there are multiple small trenches and there are multiple values ​​of the radius of curvature of the tip in each small trench calculated based on them, the present method can calculate the representative radius of curvature of the tip using the arithmetic mean or the least square method. For example, if the first, second, and third trenches are small trenches, three values ​​of the radius of curvature of the tip can be calculated based on them. The radius of curvature of the tip calculated in each of the first, second, and third trenches , , In this case, the present method can calculate a representative radius of curvature of the tip, i.e., a single radius of curvature, by using the arithmetic mean or the least squares method, and set this as the radius of curvature of the entire tip. Since the arithmetic mean or the least squares method is a well-known mathematical technique, a detailed explanation is omitted.

[0092] In addition, as described above, the inclination angle of the tip can be calculated by using the depth value of the tip in a trench in which the depth value of the tip in each trench is greater than half the width of each trench, i.e., a large trench, and the principle of calculating the inclination angle of the tip by using the large trench is as examined through Fig. 10.

[0093] Here, as in the case where there are multiple small trenches, when there are multiple large trenches and the tip inclination angle values ​​calculated based on the multiple large trenches are multiple, the present method can calculate the representative inclination angle of the tip using the arithmetic mean or least squares method.

[0094] And, in the case of calculating the slope angle, the profile of the trench with a width large enough for the tip to contact the bottom of the trench can be used, and even in the case where the width of the trench is small and the tip cannot contact the bottom of the trench, the two trenches that serve as references can be used to calculate the slope angle, as seen above.

[0095] For example, referring to Fig. 12, the standard material can be composed of a total of 9 trenches (T1 to T9). At this time, the trenches that satisfy the case where the depth value of the tip in the trench is less than or equal to half the width of the trench are the first and second trenches (T1 to T2), which correspond to small trenches, and therefore the radius of curvature of the tip is obtained using the corresponding trenches. Since the remaining trenches correspond to large trenches in which the depth value of the tip is greater than half the width of the trench, the inclination angle of the tip can be obtained using the remaining trenches, the third to ninth trenches (T3 to T9). In the case of the third to seventh trenches (T3 to T7), since the tip does not contact the bottom, the inclination angle can be obtained using the same method as Fig. 10(a), and in the case of the eighth and ninth trenches (T8, T9), since they are wide trenches in which the tip contacts the bottom, the inclination angle can be obtained using the same method as Fig. 10(b).

[0096] As discussed above, the present invention provides a novel standard material structured with trenches of different widths, and a principle for calculating the radius of curvature and inclination angle of a tip using this structure, thereby enabling accurate evaluation of tip characteristics. Furthermore, the present invention enables measurement of tip characteristics regardless of tip type or size, and offers the advantage of easy production of the standard material.

[0097] Although the embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical concept or essential characteristics thereof. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

Claims

1. As a standard material for evaluating the characteristics of microscope tips, A main body, comprising a plurality of trenches each recessed downward from the surface of the main body and spaced apart from each other, The above-mentioned plurality of trenches are configured so that the width of each trench increases from one side of the main body to the other side. Standard substance.

2. In paragraph 1, wherein the tip is configured to be vertically inserted into each of the plurality of trenches, Standard substance.

3. In paragraph 2, By measuring the depth at which the tip is inserted in each of the above trenches, the radius of curvature and the cone angle of the tip can be calculated, respectively. Standard substance.

4. In paragraph 3, The above plurality of trenches include small trenches having a width less than or equal to twice the radius of curvature of the tip, and large trenches having a width greater than twice the radius of curvature of the tip, Using the above small trench, measure the radius of curvature of the tip, Using the above large trench, the inclination angle of the tip can be measured. Standard substance.

5. In paragraph 1, Among the above plurality of trenches, the width of the smallest trench is 3 nm or more and 7 nm or less, and the width of the largest trench is 190 nm or more and 200 nm or less. Standard substance.

6. In paragraph 1, The above-mentioned plurality of trenches are each composed of the same depth, Standard substance.

7. In paragraph 1, The above multiple trenches are spaced apart at equal intervals, Standard substance.

8. In paragraph 1, The above body is configured with a structure in which a first material layer and a second material layer are alternately laminated multiple times, and the upper surface of the second material layer is positioned lower than the upper surface of the first material layer, so that a plurality of trenches are formed on the surface. Standard substance.

9. In paragraph 8, The first material layer includes silicon (Si), The second material layer includes a silicon oxide film (SiO2). Standard substance.

10. In paragraph 1, The above microscope is an atomic force microscope (AFM). Standard substance.

11. A method for evaluating the characteristics of a microscope tip, Step for preparing the standard material of paragraph 1; A step of scanning the above standard material using a microscope; A step of measuring the depth value of the tip corresponding to the depth at which the tip of the microscope is inserted in each trench of the standard material; and A calculation step for calculating the radius of curvature and the inclination angle of the tip based on the depth value of the tip in each trench; method.

12. In paragraph 11, In the above calculation step, the depth value of the tip in each trench is compared with the size of half the width of each trench, The radius of curvature of the tip is calculated by using the depth value of the tip in a small trench in which the depth value of the tip in each trench is less than or equal to half the width of each trench. method.

13. In paragraph 12, In the above calculation step, the radius of curvature of the tip is calculated using the following equation: method. [ceremony] , or (Here, is the radius of curvature of the tip in each small trench, is the depth value of the tip in each small trench, is the width of each small trench) 14. In paragraph 12, In the above calculation step, If there are multiple small trenches and the radius of curvature of the tip in each small trench calculated based on them is multiple, Calculating the representative radius of curvature of the tip using the arithmetic mean or least squares method, method.

15. In paragraph 11, In the above calculation step, the depth value of the tip in each trench is compared with the size of half the width of each trench, The tip inclination angle is calculated by using the tip depth value in a large trench in which the tip depth value in each trench is greater than half the width of each trench. method.

16. In paragraph 15, In the above calculation step, the inclination angle of the tip is calculated using the depth value of the tip in each large trench and the depth value of the tip in the previous trench adjacent to each large trench. method.

17. In paragraph 16, In the above calculation step, a method for calculating the inclination angle of the tip using the following equation. [ceremony] Here, α is the inclination angle of the tip, And, and, Tips from the profile data of the trench is the width between points passing through the depth of Tips from the profile data of the trench is the width between points passing through the depth.

18. In paragraph 15, In the above calculation step, If there are multiple large trenches and the tip slope values ​​in each large trench calculated based on them are multiple, Calculating the representative inclination angle of the above tip using the arithmetic mean or least squares method, method.

19. In paragraph 15, In the above calculation step, the depth value of the tip in each large trench is compared with the depth of each trench, The tip inclination angle is calculated by using the tip depth value in the trench where the tip depth value in each trench is smaller than the depth of each trench. method.

20. In paragraph 11, Further comprising a step of outputting a cross-sectional image of the tip to a display device based on the radius of curvature and inclination angle of the tip calculated in the above calculation step. method.

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