Piezoelectric driving device for generating displacement in two-dimensional direction, and operation method therefor

Abstract

According to various embodiments, a piezoelectric driving device can be provided, the device comprising a piezoelectric element and a plurality of side structures operatively connected to the piezoelectric element, wherein the plurality of side structures include: a first side structure disposed in a first axial direction with respect to the central axis of the piezoelectric element; and a second side structure disposed in a second axial direction that is perpendicular to the first axial direction with respect to the central axis of the piezoelectric element, and if the piezoelectric element is deformed in response to the application of power to the piezoelectric element, a displacement in the first axial direction is generated in the first side structure and, simultaneously, a displacement in the second axial direction is generated in the second side structure. Other various embodiments are possible.

Description

Piezoelectric actuator generating displacement in a two-dimensional direction, and method of operating the same

[0001] Various embodiments of the present invention relate to a piezoelectric actuator that generates displacement in a two-dimensional direction, and a method of operating the same.

[0002] Piezoelectric materials generate voltage when pressure is applied, and mechanically vibrate and deform when voltage is applied. Based on these physical properties, piezoelectric materials are used in a variety of technological fields, including the piezoelectric motor, also known as a piezoelectric actuator.

[0003] Unlike electromagnetic motors, these piezoelectric actuators (e.g., piezoelectric motors and actuators) do not require magnets or windings, nor do they require complex gear structures to transmit power. Therefore, piezoelectric actuators offer the advantages of lower noise and noise levels than electromagnetic motors, and are suitable for miniaturization.

[0004] Recently, there has been an increasing development of applications that operate in extreme environments, including extreme temperatures and vibrations (e.g., aerospace technology devices such as artificial satellites and quantum technology devices). Accordingly, there is a growing need for technology to develop piezoelectric actuators capable of stable operation in extreme environments, as well as applications utilizing such devices.

[0005] Conventional piezoelectric actuating devices generate linear displacement in a specific direction based on the deformation (e.g., compression and expansion) of a piezoelectric element. However, since the types of linear displacement generated by the piezoelectric actuating device are limited, there is a problem in that the performance of the application product does not reach the expected level. According to various embodiments, a piezoelectric actuating device and an operating method thereof are implemented to generate linear displacement in two axial directions perpendicular to the central axis of the piezoelectric element, and the types of linear displacements generated can be individually determined depending on the types of structures coupled to the piezoelectric actuating device. Accordingly, the piezoelectric actuating device and the operating method thereof can increase the degree of freedom in the types of linear displacements generated, and consequently, can improve the performance of the application product in which the piezoelectric actuating device is used.

[0006] In addition, when a conventional piezoelectric driving device is used in a state where it is placed in an application product, a problem occurs in which the performance of the application product deteriorates because the placement state of the piezoelectric driving device becomes unstable in an extreme environment such as a high-vibration environment. According to various embodiments, a reflection adjustment device including a piezoelectric driving device and an operating method thereof can solve the problem of performance deterioration in an extreme environment such as a high-vibration environment by firmly fixing the piezoelectric driving device by using the expansion displacement in two axial directions generated by the piezoelectric driving device even in a high-vibration environment and simultaneously steering a mirror member by using the linear displacement generated by the piezoelectric driving device.

[0007] According to various embodiments, a piezoelectric driving device may be provided, comprising: a piezoelectric element; and a plurality of side structures operatively connected to the piezoelectric element; wherein the plurality of side structures include a first side structure disposed in a first axial direction with respect to a central axis of the piezoelectric element, and a second side structure disposed in a second axial direction perpendicular to the first axial direction with respect to the central axis of the piezoelectric element, wherein when power is applied to the piezoelectric element and the piezoelectric element is deformed, a displacement in the first axial direction is generated in the first axial direction, and at the same time, a displacement in the second axial direction is generated in the second axial direction.

[0008] According to various embodiments, an operating method for driving a piezoelectric driving device may be provided, comprising: an operation of identifying a target displacement; an operation of applying power to the piezoelectric driving device, the piezoelectric driving device including a first side structure disposed in a first axial direction based on a central axis of a piezoelectric element, and a second side structure disposed in a second axial direction perpendicular to the first axial direction based on the central axis of the piezoelectric element; wherein, when the piezoelectric element is deformed as power is applied to the piezoelectric element, a displacement in the first axial direction is generated in the first side structure while a displacement in the second axial direction is generated in the second axial direction; and an operation of determining whether each of the displacement in the first axial direction and the displacement in the second axial direction generated in the piezoelectric driving device satisfies the target displacement.

[0009] According to various embodiments, the means for solving the problem are not limited to the above-described means, and the means for solving the problem that are not mentioned can be clearly understood by a person having ordinary skill in the art to which the present invention pertains from this specification and the attached drawings.

[0010] According to various embodiments, a piezoelectric driving device and an operating method thereof may be provided, which are configured to generate linear displacement in two axial directions perpendicular to the central axis of a piezoelectric element, and the type of linear displacement generated is individually determined depending on the type of structure coupled to the piezoelectric driving device. Accordingly, the piezoelectric driving device and the operating method thereof can increase the degree of freedom in the type of linear displacement generated, and consequently, improve the performance of an application product in which the piezoelectric driving device is used.

[0011] In addition, according to various embodiments, a reflection adjustment device including a piezoelectric driving device and an operating method thereof can be provided that solves the problem of performance deterioration in extreme environments such as high-vibration environments by firmly fixing the piezoelectric driving device using the expansion displacement in two axial directions generated by the piezoelectric driving device and simultaneously steering a mirror member using the linear displacement generated by the piezoelectric driving device even in a high-vibration environment.

[0012] FIG. 1 is a drawing showing examples of components of a piezoelectric drive system according to various embodiments.

[0013] FIG. 2 is a drawing for explaining an example of an application device according to various embodiments.

[0014] FIG. 3 is a drawing showing an example of a configuration of a piezoelectric driving device and a control device according to various embodiments.

[0015] FIG. 4 is a perspective view of a first embodiment of a piezoelectric driving device according to various embodiments.

[0016] FIG. 5 is a front view, a side view, a top view, and a bottom view of a first embodiment of a piezoelectric driving device according to various embodiments.

[0017] FIG. 6 is an exploded perspective view of a first embodiment of a piezoelectric driving device according to various embodiments.

[0018] FIG. 7 is a drawing for explaining in detail the side structure and support structure of a piezoelectric driving device according to various embodiments.

[0019] FIG. 8 is a perspective view of a second embodiment of a piezoelectric driving device according to various embodiments.

[0020] FIG. 9 is a front view, a side view, a top view, and a bottom view of a second embodiment of a piezoelectric driving device according to various embodiments.

[0021] FIG. 10 is an exploded perspective view of a second embodiment of a piezoelectric driving device according to various embodiments.

[0022] FIG. 11 is a drawing for explaining examples of types of side structures according to various embodiments.

[0023] FIG. 12 is a drawing for explaining examples of the types of displacement that occur depending on the type of side structure according to various embodiments.

[0024] FIG. 13 is a flowchart illustrating an operation method of a control device for driving a piezoelectric driving device according to various embodiments.

[0025] FIG. 14 is a drawing for explaining an example of the operation of a symmetrical piezoelectric driving device according to various embodiments.

[0026] FIG. 15 is a drawing for explaining an example of the operation of an asymmetric piezoelectric driving device according to various embodiments.

[0027] FIG. 16 is a drawing for explaining an example of a configuration of a reflection adjustment device according to various embodiments.

[0028] FIG. 17 is a drawing for explaining an example of the operation of a reflection adjustment device according to various embodiments.

[0029] FIG. 18 is a perspective view of a reflection adjustment device according to various embodiments.

[0030] FIG. 19 is an exploded view of a reflection adjustment device according to various embodiments.

[0031] FIG. 20 is a drawing illustrating examples of piezoelectric actuators disposed on a base structure of a reflection adjustment device according to various embodiments.

[0032] FIG. 21 is a drawing for explaining an example of a plate structure according to various embodiments.

[0033] FIG. 22 is a drawing for explaining an example in which a tilting motion is generated by a plate structure according to various embodiments.

[0034] FIG. 23 is a drawing illustrating examples of a tilting structure and a mirror support structure according to various embodiments.

[0035] FIG. 24 is a flowchart illustrating an operation method of a control device for driving a reflection adjustment device according to various embodiments.

[0036] FIG. 25 is a drawing illustrating an example of operation of a reflection adjustment device generating two-dimensional displacement in a high-vibration environment according to various embodiments.

[0037]

[0038] Electronic devices according to the various embodiments disclosed in this document may take various forms. Electronic devices may include, for example, portable communication devices (e.g., smartphones), computer devices, portable multimedia devices, portable medical devices, cameras, wearable devices, or home appliances. Electronic devices according to the embodiments of this document are not limited to the aforementioned devices.

[0039] The various embodiments of this document and the terminology used therein are not intended to limit the technical features described in this document to specific embodiments, but should be understood to include various modifications, equivalents, or substitutes of the embodiments. In connection with the description of the drawings, similar reference numerals may be used for similar or related components. The singular form of a noun corresponding to an item may include one or more of the items, unless the context clearly indicates otherwise. In this document, each of the phrases "A or B", "at least one of A and B", "at least one of A or B", "A, B, or C", "at least one of A, B, and C", and "at least one of A, B, or C" can include any one of the items listed together in the corresponding phrase among those phrases, or all possible combinations thereof. Terms such as "first," "second," or "first" or "second" may be used merely to distinguish one component from another, and do not limit the components in any other respect (e.g., importance or order). When a component (e.g., a first component) is referred to as "coupled" or "connected" to another component (e.g., a second component), with or without the terms "functionally" or "communicatively," it means that the component can be connected to the other component directly (e.g., wired), wirelessly, or through a third component.

[0040] The term "module" used in various embodiments of this document may include a unit implemented in hardware, software, or firmware, and may be used interchangeably with terms such as logic, logic block, component, or circuit. A module may be an integral component, or a minimum unit or part of such a component that performs one or more functions. For example, according to one embodiment, a module may be implemented in the form of an application-specific integrated circuit (ASIC).

[0041] Various embodiments of the present document may be implemented as software (e.g., a program) including one or more instructions stored in a storage medium (e.g., built-in memory or external memory) readable by a machine (e.g., an electronic device). For example, a processor (e.g., a processor) of the machine (e.g., an electronic device) may call at least one instruction among the one or more instructions stored from the storage medium and execute it. This enables the machine to operate to perform at least one function according to the at least one instruction called. The one or more instructions may include code generated by a compiler or code executable by an interpreter. The machine-readable storage medium may be provided in the form of a non-transitory storage medium. Here, 'non-transitory' only means that the storage medium is a tangible device and does not contain a signal (e.g., electromagnetic waves), and this term does not distinguish between cases where data is stored semi-permanently and cases where it is stored temporarily in the storage medium.

[0042] According to one embodiment, the method according to various embodiments disclosed in this document may be provided as a computer program product. The computer program product may be traded between sellers and buyers as a product. The computer program product may be distributed in the form of a device-readable storage medium (e.g., compact disc read-only memory (CD-ROM)) or may be provided through an application store (e.g., Play Store). TM ) or directly between two user devices (e.g., smart phones), online distribution (e.g., downloading or uploading). In the case of online distribution, at least a portion of the computer program product may be at least temporarily stored or temporarily created in a machine-readable storage medium, such as the memory of a manufacturer's server, an application store's server, or an intermediary server.

[0043] According to various embodiments, each component (e.g., a module or a program) of the above-described components may include one or more entities, and some of the entities may be separated and placed in other components. According to various embodiments, one or more components or operations of the aforementioned components may be omitted, or one or more other components or operations may be added. Alternatively or additionally, a plurality of components (e.g., a module or a program) may be integrated into a single component. In such a case, the integrated component may perform one or more functions of each of the plurality of components identically or similarly to those performed by the corresponding component among the plurality of components prior to the integration. According to various embodiments, the operations performed by a module, program, or other component may be executed sequentially, in parallel, iteratively, or heuristically, or one or more of the operations may be executed in a different order, omitted, or one or more other operations may be added.

[0044] According to various embodiments, a piezoelectric driving device may be provided, comprising: a piezoelectric element; and a plurality of side structures operatively connected to the piezoelectric element; wherein the plurality of side structures include a first side structure disposed in a first axial direction with respect to a central axis of the piezoelectric element, and a second side structure disposed in a second axial direction perpendicular to the first axial direction with respect to the central axis of the piezoelectric element, wherein when power is applied to the piezoelectric element and the piezoelectric element is deformed, a displacement in the first axial direction is generated in the first axial direction, and at the same time, a displacement in the second axial direction is generated in the second axial direction.

[0045] According to various embodiments, a piezoelectric driving device may be provided, wherein the type of displacement in the first axial direction is determined according to the type of the first side structure, and the type of displacement in the second axial direction is determined according to the type of the second side structure.

[0046] According to various embodiments, a piezoelectric actuation device may be provided, wherein each of the plurality of side structures includes an expansion side structure that generates expansion displacement when the piezoelectric element expands, and a compression side structure that generates compression displacement when the piezoelectric element expands.

[0047] According to various embodiments, a piezoelectric actuation device may be provided, wherein each of the plurality of side structures includes a body portion and a wing portion extending from the body portion, and an angle between the body portion and the wing portion of the expansion side structure is a first angle, and an angle between the body portion and the wing portion of the compression side structure is a second angle.

[0048] According to various embodiments, a piezoelectric driving device may be provided, further comprising a support structure supporting the piezoelectric element, wherein each end of each of the plurality of side structures is detachably coupled to each of the plurality of groove structures of the support structure.

[0049] According to various embodiments, a piezoelectric driving device may be provided in which each end of the plurality of side structures protrudes in a direction opposite to the expansion direction of the piezoelectric element.

[0050] According to various embodiments, a piezoelectric driving device may be provided, further comprising a cover structure covering the support structure, wherein the cover structure is coupled on the support structure while the plurality of side structures are coupled to the support structure.

[0051] According to various embodiments, a piezoelectric driving device may be provided, further comprising: a first body structure including the first side structure; and a second body structure including the second side structure; wherein the piezoelectric element is disposed in an internal space of the first body structure, and the first body structure, in which the piezoelectric element is disposed in an internal space of the second body structure, is disposed.

[0052] According to various embodiments, a piezoelectric actuation device may be provided in which, when the piezoelectric element is deformed, mechanical energy is provided to the second body structure through the first body structure.

[0053] According to various embodiments, an operating method for driving a piezoelectric driving device may be provided, comprising: an operation of identifying a target displacement; an operation of applying power to the piezoelectric driving device, the piezoelectric driving device including a first side structure disposed in a first axial direction based on a central axis of a piezoelectric element, and a second side structure disposed in a second axial direction perpendicular to the first axial direction based on the central axis of the piezoelectric element; wherein, when the piezoelectric element is deformed as power is applied to the piezoelectric element, a displacement in the first axial direction is generated in the first side structure while a displacement in the second axial direction is generated in the second axial direction; and an operation of determining whether each of the displacement in the first axial direction and the displacement in the second axial direction generated in the piezoelectric driving device satisfies the target displacement.

[0054]

[0055] 1. Piezoelectric drive system (1)

[0056] According to various embodiments, a piezoelectric actuation system (1) may be implemented to generate a displacement for a target object with a resolution of a microscopic scale (e.g., micro-unit, nano-unit, pico-unit). The generation of the displacement for the target object may mean moving the position of the target object in a specific axial direction. For example, the piezoelectric actuation system (1) may include at least one piezoelectric actuator. The at least one piezoelectric actuator may be implemented to include at least one piezoelectric element and at least one physical structure operatively (or physically) connected to the at least one piezoelectric element. When power (e.g., voltage and / or current) is applied to the piezoelectric actuator from a control device, deformation such as compression and / or expansion of the piezoelectric element may occur. The physical structure may convert the deformation of the piezoelectric element into kinetic energy in a microscopic scale. The type of the above kinetic energy is determined according to the implementation example of the above physical structure, and may include, for example, linear motion, curvilinear motion, angular motion, and / or compound motion. The above converted kinetic energy can generate displacement for a target object placed in the piezoelectric drive system (1).

[0057] According to various embodiments, the piezoelectric drive system (1) can be implemented to operate more stably in various extreme environments (e.g., extreme temperature environments such as extremely low / high temperatures, vacuum environments, extreme electric / magnetic field environments, extreme deployment environments). Accordingly, the piezoelectric drive system (1) can be utilized in application devices in various environments such as extreme high temperature environments such as nuclear fusion, space environments in a vacuum state and where temperatures change rapidly, and extremely low temperature environments.

[0058] Below, examples of the piezoelectric drive system (1) according to various embodiments are described in detail.

[0059]

[0060] 2. Components of the piezoelectric drive system (1)

[0061] FIG. 1 is a drawing showing examples of components of a piezoelectric drive system (1) according to various embodiments. Hereinafter, FIG. 1 will be further described with reference to FIG. 2.

[0062] FIG. 2 is a drawing for explaining an example of an application device (30) according to various embodiments.

[0063] Referring to FIG. 1, a piezoelectric drive system (1) according to various embodiments may include a piezoelectric drive device (10), a control device (20), and an application device (30).

[0064] According to various embodiments, the piezoelectric driving device (10) may be a device (e.g., a piezoelectric motor, a piezoelectric actuator) implemented to generate micro-scale displacement for a target object physically connected to the piezoelectric driving device (10) based on at least one piezoelectric element. The piezoelectric element may mean a functional material having a piezoelectric direct effect that converts mechanical energy into electrical energy (e.g., voltage, current) and a piezoelectric converse effect that converts electrical energy (e.g., voltage, current) into mechanical energy. For example, the piezoelectric element may be a single crystal type piezoelectric element such as α-AlPO4(Berlnite), α-SiO2(Quartz), LiTaO3, LiNbO3, SrxBayNb2O8, Pb5-Ge3O11, Tb2(MoO4)3, Li2B4O7, CdS, ZnO, Bi12SiO20, Bi12GeO20, etc., a polycrystalline type piezoelectric element such as PZT system, PT system, PZT-Complex Perovskite system, BaTiO3, etc., a thin film type piezoelectric element such as ZnO, CdS, AlN, etc., a polymer type piezoelectric element such as PVDF, P(VDF-TrFe), P(VDFTeFE), TGS, etc., and a composite type piezoelectric element such as PZT-PVDF, PZT-Silicon Rubber, PZT-Epoxy, PZT-Foam Polymer, PZT-Foam Urethane The elements may include, but are not limited to, the examples described, various types of piezoelectric elements that are deformable based on power application in extreme environments.

[0065] According to various embodiments, the piezoelectric drive device (10) can generate displacement by utilizing mechanical energy by deformation (e.g., expansion and / or compression) of the piezoelectric element based on the piezoelectric inverse effect of the piezoelectric element, which expands when power is applied in a first direction and compresses when power is applied in a second direction.

[0066] According to various embodiments, the control device (20) may apply power to the piezoelectric element of the piezoelectric driving device (10). The control device (20) may identify a target displacement, identify a displacement generated by the piezoelectric driving device (10) using a sensor device (not shown), and continuously apply power until the generated displacement reaches the target displacement.

[0067] According to various embodiments, the application device (30) may be a device that utilizes the displacement generated by the piezoelectric driving device (10). Referring to (a) of FIG. 2, according to one embodiment, the application device (30) may be a device that includes a piezoelectric driving device (10) and a component (31) moved by the piezoelectric driving device (10). As an example, the application device (30) may be a fast steering mirror (FSM) that includes a reflector as the component (31). The application device (30) may generate a displacement in the reflector using the piezoelectric driving device (10) to finely adjust the position of the reflector, thereby adjusting the direction of light reflected by the reflector. Referring to (b) of FIG. 2, according to one embodiment, the application device (30) may also be implemented to be adjusted by the displacement generated by the piezoelectric driving device (10). For example, the application device (30) is a light source, and the light output direction can be controlled by the displacement generated by the piezoelectric driving device (10).

[0068]

[0069] 2.1 Components of each device

[0070] FIG. 3 is a drawing showing an example of the configuration of a piezoelectric driving device (10) and a control device (20) according to various embodiments. Hereinafter, with reference to FIG. 3, examples of components of each of the piezoelectric driving device (10) and the control device (20) will be described in detail.

[0071]

[0072] 2.1.1 Components of the piezoelectric actuator (10)

[0073] Referring to FIG. 3, a piezoelectric drive device (10) according to various embodiments may include a piezoelectric element (210) and a structure (220) operatively connected to the piezoelectric element (210). Without being limited to the examples described and / or illustrated, the piezoelectric drive device (10) may be implemented to include more components and / or fewer components, depending on the type.

[0074] According to various embodiments, the piezoelectric element (210) may be an element that is compressed and / or expanded when power (e.g., current and / or voltage) is applied based on the piezoelectric effect as described above. As for examples of the piezoelectric element (210), since they are the same as described above, a redundant description will be omitted. At least one piezoelectric element (210) may be provided (or implemented, or mounted, or arranged) in the piezoelectric driving device (10).

[0075] According to various embodiments, the structure (220) may include physical elements included in the piezoelectric driving device (10).

[0076] In one embodiment, the structure (220) may include an actuating member. The actuating member may be a physical member that converts the deformation of the piezoelectric element (210) into displacement along a specific axis. For example, the actuating member may be implemented as a physical member having various shapes, such as a plate shape, a rod shape, a spherical shape, etc. The actuating member may be directly connected to receive energy by the deformation of the piezoelectric element (210), and / or may be connected through another structure. The specific axis of displacement generated by the actuating member may include, but is not limited to, a linear axis, a curved axis, an angle axis, and / or a composite axis including a linear axis, a curved axis, or a mixture of linear axes, curved axes, or each axes. The actuating member may provide the converted displacement along the specific axis to an external source (e.g., another structure of the piezoelectric actuating device (10), a component within the application device (30), etc.). Meanwhile, the actuating member may be implemented to generate displacement in multiple directions. This will be described in detail below.

[0077] In one embodiment, the structure (220) may include a support structure. The support structure is formed to surround the piezoelectric element (210), thereby preventing damage to the piezoelectric element (210) due to an external force.

[0078] Meanwhile, without being limited to the described examples, the structure (220) may include fastening members for firmly assembling the structures to each other, physical structures for connecting to other parts, etc.

[0079]

[0080] 2.1.2 Components of the control device (20)

[0081] Referring to FIG. 3, according to various embodiments, a control device (20) may include a power supply device (240) and a control circuit (250). Without being limited to the described and / or illustrated examples, the control device (20) may be implemented to include more components and / or fewer components.

[0082] According to various embodiments, the power supply device (240) may be implemented to apply a specific pattern of power to the piezoelectric driving device (10) (e.g., the piezoelectric element (210)). For example, the power supply device (240) may provide power based on power received from an external power source (not shown) connected to the control device (20), and / or may provide power based on a battery (not shown) included in the control device (20).

[0083] According to various embodiments, the control circuit (250) may control the power supply device (240) to apply power in a specific pattern based on the execution of software (or program) stored in the control device (20). For example, the specific pattern of power may include power in a sawtooth pattern. For example, the sawtooth pattern may be a pattern in which power is applied at a first slope for a first period, power is applied at a second slope that is sharply greater than the first slope for a second period after the first period, and the first period and the second period are repeated, but is not limited to the described example. As described above, based on the application of power in the sawtooth pattern, as inertia is generated in the moving structure (230), micro-scale displacement may occur in the moving structure (230) and a target object on the moving structure (230).

[0084]

[0085] 3. Implementation example of piezoelectric drive device (10)

[0086] According to various embodiments, the piezoelectric driving device (10) may be implemented to generate displacement in a plurality of mutually orthogonal directions. Compared to a conventional piezoelectric driving device (not shown) implemented to generate displacement in one direction, the piezoelectric driving device (10) according to various embodiments may be applied to various application devices (30) based on displacement generated in different orthogonal directions, and may enable more stable driving.

[0087] According to various embodiments, the piezoelectric driving device (10) may determine the type of displacement generated in a specific direction depending on the type of driving structure (e.g., side structure) disposed in a specific direction. For example, the type of displacement may include a first type of displacement (hereinafter, expansion displacement) and a second type of displacement (hereinafter, compression displacement) moving away from the central axis of the piezoelectric driving device (10). Depending on the type of driving structure, when the piezoelectric element (210) expands, the type of displacement generated in a specific direction may be determined as expansion displacement or compression displacement. Accordingly, depending on the type of driving structure disposed in each specific direction, the type of displacement generated in the first direction and the type of displacement generated in the second direction perpendicular to the first direction may correspond to or be different from each other. Depending on the type of application device (30) in which the piezoelectric driving device (10) is used, the types of driving structures disposed in each of the directions may be determined.

[0088]

[0089] 3.1. First Example

[0090] Hereinafter, with reference to FIGS. 4 to 7, a first embodiment of a piezoelectric driving device (10) that generates displacement in a plurality of mutually orthogonal directions according to various embodiments will be described.

[0091] FIG. 4 is a perspective view of a first embodiment of a piezoelectric driving device (10) according to various embodiments. FIG. 5 is a front view, a side view, a top view, and a bottom view of a first embodiment of a piezoelectric driving device (10) according to various embodiments. FIG. 6 is an exploded perspective view of a first embodiment of a piezoelectric driving device (10) according to various embodiments. FIG. 7 is a drawing for explaining in detail a side structure (410) and a support structure (420) of a piezoelectric driving device (10) according to various embodiments.

[0092]

[0093] 3.1.1. Overall Components

[0094] According to various embodiments, referring to FIGS. 4 to 6, the piezoelectric driving device (10) may include a plurality of side structures (410), a plurality of support structures (420), a plurality of cover structures (430), a plurality of fastening members (440), and a piezoelectric element (P). Meanwhile, without being limited to the illustrated and / or described examples, the piezoelectric driving device (10) may be implemented to include more components and / or fewer components. For example, the piezoelectric driving device (10) may further include electrical lines (not shown) electrically connected to each of both ends of the piezoelectric element (P) and for providing power provided from the control device (20) to the piezoelectric element (P). Also, for example, the piezoelectric driving device (10) may be implemented not to include the plurality of cover structures (430) and / or the plurality of fastening members (440).

[0095]

[0096] 3.1.2. Side structure (410)

[0097] According to various embodiments, referring to FIGS. 4 and 5, displacement may occur in an axial direction perpendicular to the central axis of the piezoelectric driving device (10) based on deformation (e.g., expansion and / or compression) of the piezoelectric element (P) in each of the plurality of side structures (410). For example, the central axis may be defined as a virtual axis that passes through the center point of the piezoelectric element (P) in the longitudinal direction. The type of displacement occurring in the side structure (410) may include a first type of displacement (hereinafter, expansion displacement) and a second type of displacement (hereinafter, compression displacement) moving away from the central axis. The type of displacement may be determined depending on the type of the side structure (410), which will be described later with reference to FIGS. 11 and 12.

[0098] According to various embodiments, with reference to FIGS. 4 and 7, each of the plurality of side structures (410) may include a body portion (411), wing portions (412) extending from the body portion (411) to both sides, and opposite ends (413) connected to the wing portions (412). When the piezoelectric element (P) is deformed, displacement may occur in each of the plurality of side structures due to mechanical energy generated in the direction of the central axis (i.e., the longitudinal direction) of the piezoelectric element (P). The mechanical energy due to the deformation of the piezoelectric element (P) may be transferred from the opposite ends (413) connected to the support structure (420) to the wing portions (412), and may be transferred to the body portion (411) through the wing portions (412). In the above body portion (411), a displacement may occur with a magnitude greater than the degree of deformation of the piezoelectric element (P), and accordingly, the piezoelectric driving device (10) may be defined as a displacement amplifier.

[0099] For example, the body part (411) may be the central part of the side structure (410). Mechanical energy due to deformation of the piezoelectric element (P) is transmitted to the body part (411) through the wing parts (412), and displacement may occur in the body part (411) in axial directions perpendicular to the central axis by the mechanical energy provided from the two wing parts (412). That is, when a target object is physically connected to the body part (411), the target object may be moved in the direction perpendicular to the central axis on a microscopic scale by the body part (411). Referring to FIGS. 4 and 5, the body part (411) may include a coupling structure (411a, 411b) for coupling with a target object. As a fastening member (e.g., a bolt) is provided in the above-described coupling structure (411a, 411b), the body portion (411) and the target object can be physically connected. At this time, the coupling structure (411a, 411b) is formed on side structures (411a, 411c) that are arranged in the same specific direction among directions perpendicular to the central axis (corresponding to each other), thereby providing displacement in a specific direction. Meanwhile, without being limited to the illustrated and / or described examples, the coupling structure (411a, 411b) may not be formed.

[0100] For example, each of the wing parts (412) may be formed to form a predetermined angle with the body part (411). Each of the two wing parts (412) may be symmetrical with respect to the body part (411). For example, the shapes (e.g., shape, size, length, thickness) of each of the two wing parts (412) may correspond to each other, and the predetermined angles they form with respect to the body part (411) may correspond to each other. Accordingly, the magnitudes of mechanical energy applied from each of the two wing parts (412) to the body part (411) may correspond to each other. Different directions of mechanical energy applied to the body part (411) toward the central axis cancel each other out, and mechanical energy remains in the body part (411) in a direction perpendicular to the central axis, so that displacement may occur in the body part (411). Meanwhile, depending on the angle formed by the body part (411) and each of the two wing parts (412), the type of displacement generated from the body part (411) can be determined, which will be described later with reference to FIGS. 11 and 12.

[0101] For example, each of the two end portions (413) may be coupled to a groove structure (423) of a support structure (420). Each of the two end portions (413) may be coupled to the support structure (420). Accordingly, each of the two end portions (413) may receive mechanical energy generated by deformation of the piezoelectric element (P) from the support structure (420) and provide it to the two wing portions (412). Each of the two end portions (413) coupled to the groove structure (423) may be detachable. Accordingly, a specific type of pre-coupled special structure (410) may be replaced with a different type of side structure (410).

[0102] According to various embodiments, each of the plurality of side structures (410) may be arranged in a direction perpendicular to a central axis of the piezoelectric element (P) and perpendicular to each other along a plurality of axes. For example, a first side structure (411a) and a third side structure (411c) may be arranged on a first axis perpendicular to the central axis, and a second side structure (411b) and a fourth side structure (411d) may be arranged on a second axis perpendicular to the central axis and the first direction. The first side structure (411a) and the third side structure (411c) on the first axis may be defined as a first side structure group, and the second side structure (411b) and the fourth side structure (411d) on the second axis may be defined as a second side structure group. Displacement may occur in each of the plurality of side structures (410) based on deformation of the piezoelectric element (P). That is, with respect to the central axis, displacement may occur in a first direction corresponding to the first axis and a second direction corresponding to the second axis. The phenomenon in which displacement occurs in the first direction and the second direction may be defined as displacement occurring in two dimensions (2D). The same type of displacement may occur in each of the plurality of side structures (411a, 411c) arranged on the first axis, and the same type of displacement may occur in each of the plurality of side structures (411b, 411d) arranged on the second axis in the second direction. The type of displacement occurring in the first direction and the type of displacement occurring in the second direction may be the same, but may also be different. Meanwhile, although it has been described that the same type of side structure (410) is arranged on each of the first axis and the second axis, it is not limited to the described example, and different types of side structures (410) may be arranged. Accordingly, the type of displacement that occurs can be individually determined depending on the type of side structure (410) arranged in each direction based on the central axis.

[0103]

[0104] 3.1.3. Support structure (420) and cover structure (430)

[0105] According to various embodiments, referring to FIG. 5, the support structure (420) may include a seating area (421) in which the piezoelectric element (P) is placed, a plurality of groove structures (422) in which the plurality of side structures (410) (e.g., end portions (413)) are coupled, and fastening structures in which a fastening member (440) for coupling with a cover structure (430) is provided.

[0106] According to various embodiments, each of the support structures (420a, 420b) may be in physical contact with the piezoelectric element (P) as both ends of the piezoelectric element (P) are disposed in the seating area (421). In order to allow the piezoelectric element (P) to be deformable in a stable state, the seating area (421) may include a structure for supporting both ends of the piezoelectric element (P), but is not limited to the described example.

[0107] According to various embodiments, referring to (a) to (c) of FIG. 7, an end (413) of each of a plurality of side structures (410a, 410b, 410c, 410d) may be inserted into a plurality of groove structures (422) of each of the support structures (420a, 420b). Referring to (b) of FIG. 7, the end (413) may protrude from the wing portion (412) in a direction opposite to the direction in which the wing portion (412) extends from the body portion (411). That is, the end (413) may protrude from the wing portion (412) in a direction opposite to the expansion direction of the piezoelectric element (P). Accordingly, when the piezoelectric element (P) expands, mechanical energy may be provided to the end (413). The inner surface of the end portion (413) connected to the wing portion (412) may form a predetermined curved surface (414). Referring to (c) of FIG. 7, a curved surface (424) may be formed at a portion connected to a side of the groove structure (423) of the support structure (420). When the end portion (413) is inserted into the groove structure (423), the curved surface (414) of the end portion (413) and the curved surface (424) of the groove structure (423) may come into contact with each other. As the curved surface (414) and the curved surface (424) come into contact with each other, the contact area is relatively large compared to a flat surface, so that the side structure (410) is more stably supported by the support structure (420) while the piezoelectric element (P) is deformed, and mechanical energy can be transmitted smoothly.

[0108] According to various embodiments, while both ends of each of the plurality of side structures (410a, 410b, 410c, 410d) are coupled to each of the support structures (420a, 420b), cover structures (430a, 430b) covering each of the support structures (420a, 420b) may be arranged. As the cover structures (430a, 430b) are coupled by each of the fastening members (440a, 440b) while being arranged on the support structures (420a, 420b), the coupled state of both ends of each of the plurality of side structures (410a, 410b, 410c, 410d) to each of the support structures (420a, 420b) may be firmly supported. Meanwhile, without being limited to the illustrated and / or described examples, the piezoelectric driving device (10) may be implemented so as not to include the plurality of cover structures (430) and / or the plurality of fastening members (440).

[0109]

[0110] 3.2. Second Example

[0111] Hereinafter, with reference to FIGS. 8 to 10, a second embodiment of a piezoelectric driving device (10) that generates displacement in a plurality of mutually orthogonal directions according to various embodiments will be described. For convenience of explanation, unless otherwise specified, any description overlapping with the first embodiment of the piezoelectric driving device (10) described above will be omitted.

[0112] Fig. 8 is a perspective view of a second embodiment of a piezoelectric driving device (10) according to various embodiments. Fig. 9 is a front view, a side view, a top view, and a bottom view of a second embodiment of a piezoelectric driving device (10) according to various embodiments. Fig. 10 is an exploded perspective view of a second embodiment of a piezoelectric driving device (10) according to various embodiments.

[0113] According to various embodiments, the piezoelectric driving device (800) of the second embodiment may include body structures (810, 820) in which the side structure (410) and the support structure (420) are formed integrally with each other, compared to the piezoelectric driving device (10) of the first embodiment. Accordingly, the piezoelectric driving device (800) of the second embodiment has a reduced burden on the manufacturing process compared to the piezoelectric driving device (400) of the first embodiment, and the problem of performance deterioration due to distortion of physical structures (e.g., the side structure (410), the support structure (420), the cover structure (430), etc.) when the piezoelectric element (P) is deformed can be reduced.

[0114]

[0115] 3.2.1. Overall Components

[0116] According to various embodiments, with reference to FIGS. 8 and 9, the piezoelectric driving device (800) may include a first body structure (810), a second body structure (820), a plurality of fastening members (830), and a piezoelectric element (P). For example, the piezoelectric driving device (10) may further include electrical lines (not shown) that are electrically connected to each of both ends of the piezoelectric element (P) and provide power provided from a control device (20) to the piezoelectric element (P).

[0117]

[0118] 3.2.2. Body structure (810, 820)

[0119] According to various embodiments, with reference to FIG. 10, each of the body structures (810, 820) may include a support portion (810, 820) for physically connecting to another configuration, and side portions (813a, 813b, 823a, 823b) extending from the support portion (810, 820). The first body structure (810) may be formed to have a smaller size than the second body structure (820). For example, a space formed inside the first body structure (810) may be formed to be smaller than a space formed inside the second body structure (820).

[0120] According to various embodiments, the first body structure (810) may include first support portions (810a, 810b) and side portions (813a, 813b) connected to each of the first support portions (810a, 810b). An internal space is formed between the first support portions (810a, 810b) and the side portions (813a, 813b), and as the piezoelectric material (P) is provided in the internal space, both ends of the piezoelectric material (P) may physically contact the inner surface of each of the first support portions (810a, 810b). Each of the first side portions (813a, 813b) formed integrally with the first support portions (810a, 810b) may be formed like the side structure (410) described above, and thus, a redundant description thereof will be omitted. According to deformation (e.g., expansion) of the piezoelectric material (P), mechanical energy is provided to the first support portions (810a, 810b), and displacement may occur in the body portions (not shown) of the first side portions (813a, 813b) by the mechanical energy provided from the first support portions (810a, 810b) to the first side portions (813a, 813b).

[0121] According to various embodiments, the second body structure (820) may include second support portions (820a, 820b) and side portions (823a, 823b) connected to each of the second support portions (820a, 820b). An internal space is formed between the second support portions (820a, 820b) and the side portions (823a, 823b), and as the first body structure (810) is provided in the internal space, the first support portions (810a, 810b) of the body structure (810) may physically contact the inner surface of each of the second support portions (820a, 820b). In the above physical contact state, the first support portions (810a, 810b) and the second support portions (820a, 820b) are fastened by the respective fastening members (830a, 830b), so that the first body structure (810) and the second body structure (820) can be firmly coupled to each other. Accordingly, the piezoelectric element (P) can be covered by the first side portions (813a, 813b) of the first body structure (810) and the second side portions (823a, 823b) of the second body structure (820). Each of the second side portions (823a, 823b) formed integrally with the second support portions (820a, 820b) can be formed like the aforementioned side structure (410), and therefore, a redundant description thereof will be omitted. According to the deformation (e.g., expansion) of the piezoelectric material (P), mechanical energy is provided to the second support parts (820a, 820b) physically coupled through the first support parts (810a, 810b), and displacement may occur in the body part (not shown) of the second side parts (823a, 823b) by the mechanical energy provided from the second support parts (820a, 820b) to the second side parts (823a, 823b).Meanwhile, a joining structure (821, 822) for joining with an external configuration may be formed on each of the second side portions (823a, 823b) of the second body structure (820) that is larger than the first body structure (810).

[0122] According to various embodiments, the side portions (e.g., first side portions (813a, 813b), second side portions (823a, 823b)) of each of the body structures (810, 820) may be formed to face each other in a specific axial direction perpendicular to the central axis of the piezoelectric element (P). For example, the first side portions (813a, 813b) of the first body structure (810) may be arranged to face each other in the first axial direction, and the second side portions (823a, 823b) of the second body structure (820) may be arranged to face each other in the second axial direction. The first side portions (813a, 813b) arranged in the first axial direction may be defined as a first lateral structure group, and the second side portions (823a, 823b) arranged in the second axial direction may be defined as a second lateral structure group. Meanwhile, without being limited to the illustrated example, the side portions of the body structure (810, 820) may be formed in a form that is not opposite to each other but orthogonal, and one, three, or four side portions may be formed instead of two.

[0123]

[0124] 3.3. Types of side structures

[0125] FIG. 11 is a drawing for explaining examples of types of side structures (420) according to various embodiments. FIG. 12 is a drawing for explaining examples of types of displacement occurring according to types of side structures (420) according to various embodiments.

[0126] According to various embodiments, the type of displacement occurring in the body portion (411) of the side structure (420) when the piezoelectric element (P) expands may be determined depending on the type of the side structure (420). Referring to FIG. 11, the type of the side structure (420) may include a compression side structure (1000a) and an expansion side structure (1000b).

[0127] For example, referring to (a) of FIG. 11, the compression side structure (1000a) may be formed such that the first angle (A1) formed between the two wing portions (412) with respect to the central axis (C) of the body portion (411) is less than 180 degrees. Accordingly, when the piezoelectric element (P) expands, expansion displacement may occur in a direction perpendicular to the body portion (411).

[0128] For example, referring to (a) of FIG. 11, the compression side structure (1000a) may be formed such that the first angle (A1) formed by the two wing portions (412) with respect to the central axis (C) of the body portion (411) is less than 180 degrees. Accordingly, when the piezoelectric element (P) expands, a compression displacement may occur in a direction perpendicular to the body portion (411).

[0129] According to various embodiments, referring to FIG. 12, the piezoelectric driving device (10) may be implemented in different types depending on the type of the side structures (410) to be coupled. For example, referring to FIG. 12 (a), the piezoelectric driving device (10) may be implemented as a symmetrical piezoelectric driving device (10). For example, the types of the plurality of side structures (410) of the piezoelectric driving device (10) may all be compression side structures (1000a). Accordingly, when the piezoelectric element (P) expands, compression displacement may occur in each of the two axial directions perpendicular to the piezoelectric element (P), and when the piezoelectric element (P) is compressed, expansion displacement may occur in each of the two axial directions perpendicular to the piezoelectric element (P). Meanwhile, without being limited to the illustrated example, the types of the plurality of side structures (410) of the piezoelectric driving device (10) may all be expansion side structures (1000b). For example, referring to (b) of FIG. 12, the piezoelectric driving device (10) may be implemented as an asymmetrical piezoelectric driving device (10). For example, among the plurality of side structures (410) of the piezoelectric driving device (10), the type of side structures (410) arranged in the first axial direction may be a compression side structure (1000a), and the type of side structures (410) arranged in the second axial direction may be an expansion side structure (1000b). Accordingly, when the piezoelectric element (P) expands, an expansion displacement may occur in the first axial direction among the two axial directions perpendicular to the piezoelectric element (P), and a compression displacement may occur in the second axial direction, and when the piezoelectric element (P) is compressed, a compression displacement may occur in the first axial direction, and an expansion displacement may occur in the second axial direction. Meanwhile, without being limited to the illustrated example, the types of the plurality of side structures (410) of the piezoelectric driving device (10) are each individually determined, and thus the type of displacement generated in each axial direction can be individually determined.

[0130]

[0131] 3.4. Operating method of piezoelectric drive device (10)

[0132] Fig. 13 is a flowchart illustrating an operating method of a control device (20) for driving a piezoelectric drive device (10) according to various embodiments. The operations may be performed regardless of the order of the operations illustrated and / or described, and more operations may be performed and / or fewer operations may be performed. Below, Fig. 13 will be further described with reference to Figs. 14 and 15.

[0133] FIG. 14 is a drawing for explaining an example of the operation of a symmetrical piezoelectric driving device (10) according to various embodiments. FIG. 15 is a drawing for explaining an example of the operation of an asymmetrical piezoelectric driving device (10) according to various embodiments.

[0134] According to various embodiments, the control device (20) (e.g., the control circuit (250)) may identify a target displacement in operation 1301, and apply power to the piezoelectric element (P) so that displacement occurs in the vertical direction of each of the plurality of side structures (410) in operation 1303. The control device (20) (e.g., the control circuit (250)) may determine whether the generated displacement corresponds to the target displacement in operation 1505, and maintain the application of power if the generated displacement corresponds to the target displacement (1305-Y), and continue to apply power (e.g., increase the magnitude of power) if the generated displacement does not correspond to the target displacement (1305-N).

[0135] For example, referring to FIG. 14, the control device (20) applies power to the symmetrical piezoelectric driving device (10), and based on the application of the power, the piezoelectric element (P) expands, and the expansion of the piezoelectric element (P) can cause a compressive displacement to be generated in the compressive expansion structure (1000a). The expansion size of the piezoelectric element (P) and the size of the compressive displacement can be proportional to the size of the applied power. The control device (20) can sense the generated compressive displacement using a sensor device (not shown), and increase the size of the power when the sensed displacement does not reach the target displacement.

[0136] For example, referring to FIG. 15, the control device (20) applies power to the symmetrical piezoelectric driving device (10), and based on the application of the power, the piezoelectric element (P) expands, and due to the expansion of the piezoelectric element (P), a compression displacement may be generated in the compression side structure (1000a), and an expansion displacement may be generated in the expansion side structure (1000b). The expansion size of the piezoelectric element (P) and the compression displacement may be proportional to the size of the applied power. The control device (20) may sense the generated displacement using a sensor device (not shown), and increase the size of the power when the sensed displacement does not reach the target displacement.

[0137]

[0138] 4. Reflection adjustment device (1600)

[0139] According to various embodiments, the reflection adjustment device (1600) may be a device that adjusts the angle of a mirror on a microscopic scale to control the direction of light (e.g., laser light) reflected on the mirror. The reflection adjustment device (1600) may convert a linear displacement generated by an actuator into a tilt movement to adjust the angle of the mirror. For example, the reflection adjustment device (1600) may include a fast steering mirror (FSM).

[0140] According to various embodiments, the reflection adjustment device (1600) is utilized in the space and aviation fields, and can be used, for example, in radars of aircraft, phased array antennas of base stations, and optical communications of artificial satellites.

[0141]

[0142] 4.1. Configuration of the reflection adjustment device (1600)

[0143] Fig. 16 is a drawing for explaining an example of the configuration of a reflection adjustment device according to various embodiments. Hereinafter, Fig. 16 will be further described with reference to Fig. 17.

[0144] FIG. 17 is a drawing for explaining an example of the operation of a reflection adjustment device according to various embodiments.

[0145] According to various embodiments, referring to FIG. 16, the reflection adjustment device (1600) may include a reflection member (1610), a structure (1620), and a motion device (1630). However, without being limited to the illustrated and / or described examples, the reflection adjustment device (1600) may include more or fewer components.

[0146] According to various embodiments, the reflective member (1610) may be implemented to reflect the received light. Referring to FIG. 17, the reflective member (1610) may be steered to have a predetermined angle with respect to the central axis by linear displacement generated by the movement devices (1630) arranged below the reflective member (1610). The control device (30) may identify a target angle for transmitting light and control the movement devices (1630) so that the reflective member (1610) is arranged at the target angle.

[0147] According to various embodiments, the structure (1620) can convert the linear displacement generated by the motion device (1630) into displacement in each direction.

[0148] According to various embodiments, the motion device (1630) may be an actuator that generates linear displacement. For example, the motion device (1630) may include the piezoelectric drive device (400) described above, but is not limited to the described example and may include various types of motors and / or actuators that generate linear displacement, such as a voice coil.

[0149] Hereinafter, for convenience of explanation, a reflection adjustment device (1600) including a piezoelectric driving device (400) is described as an example.

[0150]

[0151] 4.2. Embodiment of a reflection adjustment device (1600)

[0152] Hereinafter, with reference to FIGS. 18 and 19, an embodiment of a reflection adjustment device (1600) according to various embodiments will be described.

[0153] FIG. 18 is a perspective view of a reflection adjustment device (1600) according to various embodiments. FIG. 19 is an exploded view of a reflection adjustment device (1600) according to various embodiments.

[0154] According to various embodiments, referring to FIGS. 18 to 19, the reflection adjustment device (1800) may include a mirror (1810), a mirror support structure (1820), a plate structure (1830), a tilting structure (1840), a housing (1850), a base structure (1860), a plurality of piezoelectric driving devices (400), and fastening members for firmly fastening the respective components. Meanwhile, without being limited to the illustrated and / or described examples, the reflection adjustment device (1600) may include more components, or may include fewer components. For example, the reflection adjustment device (1800) may further include electrical lines (not shown) electrically connected to each end of the piezoelectric element (P) in the piezoelectric driving device (400) and for providing power provided from the control device (20) to the piezoelectric element (P). For example, the reflection adjustment device (1800) may further include a sensing device (not shown) for sensing the angle of the mirror (1810) and / or a sensing device (not shown) for sensing the linear displacement of the piezoelectric driving device (400).

[0155] According to various embodiments, the mirror support structure (1820) may be implemented to support the mirror (1810) and be positioned on a tilting structure (1840) to tilt.

[0156] According to various embodiments, the plate structure (1830) may be disposed between the piezoelectric driving devices (400) disposed on the base structure (1860) and the mirror support structure (1820). The plate structure (1830) may be implemented to convert linear displacement generated by the piezoelectric driving devices (400) into angular displacement and provide the converted displacement to the mirror support structure (1820). The plate structure (1830) may be connected to the body portion (411) of the side structure (410) of the piezoelectric driving device (400) and receive the linear displacement generated in the body portion (411). As the shape of a portion of the plate structure (1830) is deformed by the linear displacement, an angular displacement is generated, and the angular displacement may be provided to the mirror support structure (1820).

[0157] According to various embodiments, the tilting structure (1840) may be disposed between the housing (1850) and the mirror support structure (1820). The tilting structure (1840) may guide the tilting axis of the mirror support structure (1820) while being coupled to and supported by the housing (1850). For example, as a convex surface formed at the lower portion of the mirror support structure (1820) is disposed on a concave surface formed in the tilting structure (1840), the angle of the mirror support structure (1820) may be adjusted as the convex surface performs a rolling motion on the concave surface.

[0158] According to various embodiments, the housing (1850) may include a plurality of housings (1850a, 1850b). Each of the plurality of housings (1850a, 1850b) is disposed on a base structure (1860), thereby defining an internal space in which the piezoelectric driving devices (400) are disposed, and the piezoelectric driving devices (400) may be covered by the housing (1850).

[0159] According to various embodiments, each of the piezoelectric actuating devices (400) may be a symmetrical piezoelectric actuating device as described above. When power is applied, expansion displacement may occur in the directions of the plurality of axes.

[0160]

[0161] 4.2.1. Arrangement of piezoelectric actuator (400)

[0162] FIG. 20 is a drawing for explaining examples of piezoelectric drive devices (400) disposed on a base structure (1860) of a reflection adjustment device (1800) according to various embodiments.

[0163] According to various embodiments, referring to FIG. 20, the base structure (1860) may be implemented as a flat plate. The flat plate may be implemented as a circular shape, but is not limited to the illustrated example and may be implemented in various shapes such as a square shape.

[0164] According to various embodiments, referring to FIG. 20, each of the plurality of housings (1850a, 1850b) may include a body including a side wall corresponding to the shape of the base structure (1860), and an internal space (1851a, 1851b) formed inside the body.

[0165] According to various embodiments, referring to (a) of FIG. 20, when a plurality of housings (1850a, 1850b) are arranged on the base structure (1860), a space for arranging the piezoelectric driving devices (400) may be formed. The space may include an internal space (1851a, 1851b) included in each of the plurality of housings (1850a, 1850b), and an interspace (2000) formed between the plurality of housings (1850a, 1850b). When the plurality of housings (1850a, 1850b) are arranged on the base structure (1860), they may be firmly coupled to each other by being coupled by a fastening member (e.g., a bolt).

[0166] According to various embodiments, referring to (b) of FIG. 20, the piezoelectric driving devices (400) may be firmly coupled by a fastening member while being arranged on the spaces (1851a, 1851b, 2000) of the base structure (1860). Referring to (c) of FIG. 20, among the plurality of side structures of the piezoelectric driving device (400), each of the first axial side structures (2001, 2002) may be coupled to the base structure (1860) and the plate structure (1830), and each of the second axial side structures (2003, 2004) may be in contact with the inner wall surface of the housing (1850). Accordingly, when power is applied to the piezoelectric driving device (400), displacement occurs in the side structures (2001, 2002) in the first axial direction, causing a part of the plate structure (1830) to be deformed and thereby generating an angular displacement, and at the same time, displacement occurs in the side structures (2003, 2004) in the second axial direction, causing a frictional force due to a greater vertical force between the inner wall of the housing (1850) and the piezoelectric driving device (400), thereby enabling the piezoelectric driving device (400) to be driven more stably.

[0167]

[0168] 4.2.2. Generation of angular displacement by plate structure (1830)

[0169] FIG. 21 is a drawing for explaining an example of a plate structure (1830) according to various embodiments. FIG. 22 is a drawing for explaining an example of tilting motion generated by a plate structure (1830) according to various embodiments.

[0170] According to various embodiments, referring to (a) to (c) of FIG. 21, the plate structure (1830) may include a body (1830a) corresponding to the shape of the base structure (1860) and having a space formed therein, and a flexible structure (1831) formed in the body (1830a).

[0171] According to various embodiments, a portion of the tilting structure (1820) (e.g., a structure including a concave surface) may penetrate through the interior space of the body (1830a) of the plate structure (1830).

[0172] According to various embodiments, each of the plurality of flexible structures (1831a, 1831b, 1831c, 1831d) of the plate structure (1830) is in contact with the piezoelectric driving device (400) (e.g., the body portion (411)) and can be bent (or deformed) by linear displacement. Referring to (b) to (c) of FIG. 21, the linear displacement can be generated as an angular displacement as displacement occurs in the remaining portion (1832) of the body of the plate structure (1830) by bending of each of the plurality of flexible structures (1831a, 1831b, 1831c, 1831d).

[0173] According to various embodiments, referring to (a) of FIG. 22, each of the plurality of flexible structures (1831a, 1831b, 1831c, 1831d) may include a first horizontal structure (2210), a first flexible member (2211) connecting the first horizontal structure (2210) and the body (1830a), the second horizontal structure (2220), and a second flexible member (2221) connecting the second horizontal structure (2220) and the first horizontal structure (2210). Each of the above components is implemented to be spaced apart from each other by a flexible material, and thus can be deformed by linear displacement.

[0174] According to various embodiments, the first horizontal structure (2210) and the second horizontal structure (2220) are in contact with the piezoelectric driving device (400), and can maintain contact while being horizontal with the body portion (411) of the piezoelectric driving device (400) even when linear displacement of the piezoelectric driving device (400) occurs. The first horizontal structure (2210) is larger than the second horizontal structure (2220) and can be formed to surround the second horizontal structure (2220).

[0175] According to various embodiments, each of the first flexible member (2211) and the second flexible member (2221) may be formed in a direction perpendicular to each other. Accordingly, depending on whether linear displacement occurs in each of the plurality of piezoelectric driving devices (400), the body (1830a) of the plate structure (1830) may tilt (or angular displacement may occur) as the first flexible member (2211) or the second flexible member (2221) of each of the plurality of flexible structures (1831a, 1831b, 1831c, 1831d) is complementarily deformed.

[0176] For example, referring to (b) to (c) of FIG. 22, when linear displacement is generated by a first piezoelectric driving device among a plurality of piezoelectric driving devices (400) and linear displacement is not generated by a second piezoelectric driving device, mechanical energy may be transferred to a first flexible member (2211) formed in a first direction through the first horizontal structure (2210) in contact with the first piezoelectric driving device (400), and mechanical energy may be transferred to a second flexible member (2221) formed in a second direction through the second horizontal structure (2210) in contact with the second piezoelectric driving device (400). The first flexible member (2211) can be bent while the first horizontal structure (2210) in contact with the first piezoelectric driving device maintains contact with the first piezoelectric driving device (400), and the second flexible member (2221) can be bent while the second horizontal structure (2220) maintains contact with the second piezoelectric driving device. Based on the complementary bending of different types of flexible members (e.g., the first flexible member (2211), the second flexible member (2221)) of each of the different bending structures (1831), an angular displacement can occur in the body (1830a) of the plate structure (1830).

[0177]

[0178] 4.2.3. Tilting of mirror member (1810) by tilting structure (1840)

[0179] FIG. 23 is a drawing illustrating an example of a tilting structure (1840) and a mirror support structure (1820) according to various embodiments.

[0180] According to various embodiments, (a) of FIG. 23 illustrates a lower surface of the mirror support structure (1820), and (b) of FIG. 23 illustrates an upper surface of a tilting structure (1840) disposed inside a reflection adjustment device (1800). Referring to (a) and (b) of FIG. 23, a convex surface (2320) is formed on a lower surface of the mirror support structure (1820), and the tilting structure (1840) may include a concave surface (1841). Referring to (c) of FIG. 23, the convex surface (2320) of the mirror support structure (1820) is disposed on the concave surface (1841), and when an angular displacement occurs in the mirror support structure (1820), the convex surface (2320) performs a rolling motion on the concave surface (1841), so that the tilting axis can be maintained.

[0181] According to various embodiments, referring to (a) of FIG. 23, the mirror support structure (1820) may include a coupling structure (2310) for coupling with the aforementioned plate structure (1830). The coupling structure (2310) may be coupled with the aforementioned flexible structure (1831). As described above, since the horizontal structures (2210, 2220) of the flexible structure (1831) remain horizontal even during operation of the piezoelectric drive device (400), the coupling between the mirror support structure (1820) and the plate structure (1830) may be firmly supported. As an angle is formed in the plate structure (1830), an angle is also formed in the mirror support structure (1820), and consequently, an angle may also be formed in the mirror member (1810) on the mirror support structure (1820).

[0182]

[0183] 4.3. Operating method of the reflection adjustment device (1800)

[0184] FIG. 24 is a flowchart illustrating an operating method of a control device (20) for driving a reflection adjustment device (1800) according to various embodiments. The operations may be performed regardless of the order of the operations illustrated and / or described, and more operations may be performed and / or fewer operations may be performed. Below, FIG. 24 will be further described with reference to FIG. 25.

[0185] FIG. 25 is a drawing illustrating an example of operation of a reflection adjustment device (1800) that generates two-dimensional displacement in a high-vibration environment according to various embodiments.

[0186] According to various embodiments, the control device (20) (e.g., the control circuit (250)) can identify a target steering angle in operation 2401 and apply power to some of the plurality of motion devices in operation 2403. The control device (20) (e.g., the control circuit (250)) can determine whether the generated steering angle corresponds to the target steering angle in operation 2405, and maintain the application of power if the generated steering angle corresponds to the target steering angle (2405-Y), and continue to apply power (e.g., increase the magnitude of power) if the generated displacement does not correspond to the target displacement (2405-N).

[0187] For example, the control device (20) may apply power to some of the plurality of piezoelectric driving devices (400), and based on the application of the power, the piezoelectric element (P) may expand, and thus an expansion displacement may be generated in the expansion side structure (1000b) due to the expansion of the piezoelectric element (P). The expansion size of the piezoelectric element (P) and the size of the compression displacement may be proportional to the size of the applied power. The expansion displacement may generate an angular displacement by the aforementioned flat plate structure (1830), so that the mirror member (1810) may be steered to a specific angle. The control device (20) may sense an angle for the mirror member (1810) using a sensor device (not shown), and increase the size of the power when the sensed angle does not reach a target steering angle.

[0188] FIG. 25 is a diagram showing the degree of damage (or extent of destruction) of a reflection adjustment device (1800) according to frequency when a two-dimensional piezoelectric driving device (400) is used as a motion device (1630) (the present invention) and when a conventional (i.e., one-dimensional) piezoelectric driving device is used as a comparative example. Referring to FIG. 25, when a conventional piezoelectric driving device is used, the reflection adjustment device (1800) exhibits a degree of damage greater than a critical size at a first frequency (f1), but when a two-dimensional piezoelectric driving device (400) according to the present invention is used, the reflection adjustment device (1800) exhibits a degree of damage greater than a critical value at a second frequency (f2) greater than the first frequency (f1). Each of the first frequency (f1) and the second frequency (f2) may be defined as a resonant frequency. At this time, the range of the driving frequency of the reflection adjustment device (1800) may be determined based on the resonant frequency. For example, since the closer the driving frequency of the reflection adjustment device (1800) is to the resonant frequency, the more difficult it is to drive, and therefore, a range below the resonant frequency may be determined as the range of the driving frequency of the reflection adjustment device (1800). That is, when the present invention is used, the range of the driving frequency of the reflection adjustment device (1800) becomes relatively wider, and the reflection adjustment device (1800) can be driven with better stability in a high-vibration environment. This may be because, as described above, the piezoelectric driving device (400) is firmly supported by the inner wall of the housing (1850) as expansion displacement occurs in mutually orthogonal directions of the piezoelectric driving device (400). For example, the first frequency (f1) may be 600 Hz, and the second frequency (f2) may be 7 kHz. For example, the first frequency (f1) may be 500 Hz or more and 700 Hz or less, and the second frequency (f2) may be 6 kHz or more and 8 kHz.For example, the first frequency (f1) may be 500 Hz or more and 700 Hz or less, and the second frequency (f2) may be 1 kHz or more and 8 kHz or less. Accordingly, the minimum required driving frequency of the reflection adjustment device (1800) in the range of 1 kHz can be satisfied by the present invention.

Claims

1. As a piezoelectric actuator, piezoelectric element; and comprising a plurality of side structures operatively connected to the piezoelectric element; The above plurality of side structures include a first side structure arranged in a first axial direction based on the central axis of the piezoelectric element, and a second side structure arranged in a second axial direction perpendicular to the first axial direction based on the central axis of the piezoelectric element, When power is applied to the piezoelectric element and the piezoelectric element is deformed, displacement in the first axial direction is generated in the first side structure by mechanical energy in the direction of the central axis of the piezoelectric element, and at the same time, displacement in the second axial direction is generated in the second side structure. Piezoelectric actuator.

2. In paragraph 1, The type of displacement in the first axis direction is determined according to the type of the first side structure, The type of displacement in the second axis direction is determined according to the type of the second side structure. Piezoelectric actuator.

3. In paragraph 2, Each of the above-described plurality of side structures includes an expansion side structure that generates expansion displacement when the piezoelectric element expands, and a compression side structure that generates compression displacement when the piezoelectric element expands. Piezoelectric actuator.

4. In paragraph 3, Each of the plurality of side structures includes a body portion and a wing portion extending from the body portion, The angle between the body portion and the wing portion of the above-mentioned expansion side structure is a first angle, The angle between the body portion and the wing portion of the compression side structure is a second angle, Piezoelectric actuator.

5. In paragraph 1, Further comprising a support structure supporting the piezoelectric element; Each of the plurality of side structures is detachably connected to each of the plurality of groove structures of the support structure. Piezoelectric actuator.

6. In paragraph 5, The end of each of the plurality of side structures protrudes in the opposite direction to the expansion direction of the piezoelectric element, Piezoelectric actuator.

7. In paragraph 6, Further comprising a cover structure covering the above support structure; The cover structure is coupled on the support structure while the plurality of side structures are coupled to the support structure. Piezoelectric actuator.

8. In paragraph 1, a first body structure including the first side structure; and Further comprising a second body structure including the second side structure; The piezoelectric element is arranged in the internal space of the first body structure, The first body structure in which the piezoelectric element is arranged is placed in the internal space of the second body structure. Piezoelectric actuator.

9. In paragraph 8, When the piezoelectric element is deformed, mechanical energy is provided to the second body structure through the first body structure. Piezoelectric actuator.

10. In an operating method for driving a piezoelectric driving device, Action to identify target displacement; An operation of applying power to the piezoelectric driving device, which includes a first side structure arranged in a first axial direction based on a central axis of the piezoelectric element, and a second side structure arranged in a second axial direction perpendicular to the first axial direction based on the central axis of the piezoelectric element; wherein when the piezoelectric element is deformed as power is applied to the piezoelectric element, a displacement in the first axial direction is generated in the first side structure, and at the same time, a displacement in the second axial direction is generated in the second side structure. An operation of determining whether each of the displacement in the first axial direction and the displacement in the second axial direction generated in the piezoelectric driving device satisfies the target displacement; How it works.

Images